CN111338106A - Silicon-based liquid crystal spatial light modulator and manufacturing method thereof and wavelength selection switch - Google Patents
Silicon-based liquid crystal spatial light modulator and manufacturing method thereof and wavelength selection switch Download PDFInfo
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- CN111338106A CN111338106A CN202010148500.5A CN202010148500A CN111338106A CN 111338106 A CN111338106 A CN 111338106A CN 202010148500 A CN202010148500 A CN 202010148500A CN 111338106 A CN111338106 A CN 111338106A
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- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 77
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 68
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 68
- 239000010703 silicon Substances 0.000 title claims abstract description 68
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 220
- 244000126211 Hericium coralloides Species 0.000 claims abstract description 30
- 238000000034 method Methods 0.000 claims description 15
- 239000004020 conductor Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 6
- 230000005669 field effect Effects 0.000 abstract description 12
- 239000010949 copper Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000011651 chromium Substances 0.000 description 8
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 7
- 229910052804 chromium Inorganic materials 0.000 description 7
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 230000001052 transient effect Effects 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- 230000003190 augmentative effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Geometry (AREA)
- Mathematical Physics (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides a silicon-based liquid crystal spatial light modulator, a manufacturing method thereof and a wavelength selection switch. The liquid crystal on silicon spatial light modulator comprises: the liquid crystal display panel comprises a first substrate, a second substrate arranged opposite to the first substrate at intervals, and a liquid crystal layer arranged between the first substrate and the second substrate; the first substrate includes: the first substrate, a first electrode arranged on one side of the first substrate facing the second substrate and a first alignment layer arranged on the first electrode and the first substrate; the second substrate includes: the second substrate, a second electrode arranged on one side of the second substrate facing the first substrate and a second alignment layer arranged on the second electrode and the second substrate; the first electrode comprises a first handle part and a plurality of first comb tooth parts which are vertically connected with the first handle part and are arranged at intervals; the second electrode comprises a second handle part and a plurality of second comb-tooth parts which are vertically connected with the second handle part and are arranged at intervals; the first electrode and the second electrode form an interdigital electrode, and the edge field effect of the liquid crystal on silicon spatial light modulator can be inhibited.
Description
Technical Field
The invention relates to the technical field of photoelectricity, in particular to a silicon-based liquid crystal spatial light modulator, a manufacturing method thereof and a wavelength selection switch.
Background
Liquid Crystal on Silicon (LCoS) technology has been developed for many years, and is mainly used in the field of information display, and due to its unique ability to modulate the wavelength of a light beam spatially, LCoS technology has been widely used in the fields of ultra high definition projectors, augmented reality, and virtual reality, while LCoS devices have also been used in the field of telecommunication networks as modulation chips for wavelength selective switches in recent years.
Existing LCoS devices typically include a silicon substrate based on Complementary Metal Oxide Semiconductor (CMOS) technology, a glass substrate opposite the silicon substrate, and a liquid crystal layer sandwiched between the silicon substrate and the glass substrate, the silicon substrate having millions of individually addressable reflective electrodes thereon for forming pixels, each of which is capable of applying a control voltage across the liquid crystal layer to control the rotation of the liquid crystal layer, thereby achieving electrically controlled birefringence of the liquid crystal material, such that the LCoS device is capable of spatially modulating the wavefront of a light beam in phase or amplitude depending on the configuration of the liquid crystal layer.
When the liquid crystal layer is made of uniformly arranged nematic liquid crystal materials, liquid crystal molecules are inclined at different angles in response to control voltages at two ends of the pixels, so that the effective refractive index of the liquid crystal molecules can be changed according to the linear polarized light speed, and the polarization method of the liquid crystal molecules is parallel to the liquid crystal alignment direction, so that the LCoS device can spatially modulate the phase of the incident light speed and keep the amplitude of the incident light speed unchanged, and the LCoS device is a pure-phase LCoS device.
The wavelength selective switch is one of the key technologies capable of reconfiguring the optical network, a typical wavelength selective switch can selectively route each wavelength division multiplexing channel entering an input optical fiber port of the wavelength selective switch to any optical fiber output port according to the configuration of remote control software of a service provider, and a phase-only LCoS spatial light modulator is selected due to the characteristics of software upgradeability and switchable flexible spectrum, and is widely applied to the wavelength selective switch.
However, the edge field effect of the conventional LCoS spatial light modulator is serious, and the diffraction efficiency is not high, so that the static state and transient crosstalk of the wavelength selective switch adopting the LCoS spatial light modulator are large.
Disclosure of Invention
The invention aims to provide a silicon-based liquid crystal spatial light modulator which can inhibit the edge field effect of the silicon-based liquid crystal spatial light modulator and improve the diffraction efficiency of the silicon-based liquid crystal spatial light modulator.
The invention also aims to provide a manufacturing method of the silicon-based liquid crystal spatial light modulator, which can inhibit the edge field effect of the silicon-based liquid crystal spatial light modulator and improve the diffraction efficiency of the silicon-based liquid crystal spatial light modulator.
It is another object of the present invention to provide a wavelength selective switch capable of reducing crosstalk of the wavelength selective switch.
To achieve the above object, the present invention provides a liquid crystal on silicon spatial light modulator, comprising: the liquid crystal display panel comprises a first substrate, a second substrate and a liquid crystal layer, wherein the second substrate is arranged opposite to the first substrate at intervals;
the first substrate includes: the first substrate, a first electrode arranged on one side of the first substrate facing the second substrate and a first alignment layer arranged on the first electrode and the first substrate;
the second substrate includes: the second substrate, a second electrode arranged on one side of the second substrate facing the first substrate and a second alignment layer arranged on the second electrode and the second substrate;
the first electrode comprises a first handle part and a plurality of first comb tooth parts which are vertically connected with the first handle part and are arranged at intervals;
the second electrode comprises a second handle part and a plurality of second comb-tooth parts which are vertically connected with the second handle part and are arranged at intervals;
the orthographic projection of the second handle part on the first substrate is opposite to the orthographic projection of the first handle part at intervals, and the orthographic projection of the plurality of second comb-tooth parts on the first substrate and the plurality of first comb-tooth parts are sequentially and alternately arranged.
The first electrode comprises a first film layer, a second film layer and a third film layer which are arranged in a stacked mode; the first film layer and the second film layer are both made of metal materials, and the third film layer is made of metal or transparent conductive materials; the material of the second electrode is a transparent conductive material.
The first substrate is a silicon-based substrate, and the second substrate is a transparent substrate.
The distance between the first substrate and the second substrate is 0.5-50 μm.
The distance between the first substrate and the second substrate is 1-5 μm.
The invention also provides a manufacturing method of the silicon-based liquid crystal spatial light modulator, which comprises the following steps:
step S1, providing a first substrate, and manufacturing a first electrode on the first substrate;
the first electrode comprises a first handle part and a plurality of first comb tooth parts which are vertically connected with the first handle part and are arranged at intervals;
step S2, fabricating a first alignment layer on the first substrate and the first electrode to form a first substrate;
step S3, providing a second substrate, and manufacturing a second electrode on the second substrate;
the second electrode comprises a second handle part and a plurality of second comb-tooth parts which are vertically connected with the second handle part and are arranged at intervals;
step S4, forming a second alignment layer on the second substrate and the second electrode to form a second substrate
Step S5, assembling the first substrate and the second substrate such that the first substrate and the second substrate are oppositely spaced, the orthographic projection of the second handle portion on the first substrate is oppositely spaced from the first handle portion, and the orthographic projection of the plurality of second comb-tooth portions on the first substrate and the plurality of first comb-tooth portions are sequentially and alternately arranged;
step S6, disposing a liquid crystal layer between the first substrate and the second substrate.
In step S1, the manufacturing the first electrode on the silicon-based substrate specifically includes:
forming a first film layer, a second film layer and a third film layer which are sequentially stacked on the silicon-based substrate;
the first film layer and the second film layer are both made of metal materials, and the third film layer is made of metal or transparent conductive materials;
in step S3, the second electrode is made of a transparent conductive material;
the first substrate is a silicon-based substrate, and the second substrate is a transparent substrate.
The distance between the first substrate and the second substrate is 0.5-50 μm.
The distance between the first substrate and the second substrate is 1-5 μm.
The invention also provides a wavelength selective switch which comprises the silicon-based liquid crystal spatial light modulator.
The invention has the beneficial effects that: the invention provides a silicon-based liquid crystal spatial light modulator, comprising: the liquid crystal display panel comprises a first substrate, a second substrate and a liquid crystal layer, wherein the second substrate is arranged opposite to the first substrate at intervals; the first substrate includes: the first substrate, a first electrode arranged on one side of the first substrate facing the second substrate and a first alignment layer arranged on the first electrode and the first substrate; the second substrate includes: the second substrate, a second electrode arranged on one side of the second substrate facing the first substrate and a second alignment layer arranged on the second electrode and the second substrate; the first electrode comprises a first handle part and a plurality of first comb tooth parts which are vertically connected with the first handle part and are arranged at intervals; the second electrode comprises a second handle part and a plurality of second comb-tooth parts which are vertically connected with the second handle part and are arranged at intervals; the orthographic projection of the second handle part on the first substrate is opposite to the orthographic projection of the first handle part at intervals, the orthographic projection of the second comb tooth parts on the first substrate and the first comb tooth parts are sequentially and alternately arranged, the first electrode and the second electrode jointly form an interdigital electrode structure, the fringe field effect of the liquid crystal on silicon spatial light modulator can be inhibited, and the diffraction efficiency of the liquid crystal on silicon spatial light modulator is improved. The invention also provides a manufacturing method of the silicon-based liquid crystal spatial light modulator, which can inhibit the edge field effect of the silicon-based liquid crystal spatial light modulator and improve the diffraction efficiency of the silicon-based liquid crystal spatial light modulator. The invention also provides a wavelength selective switch, which can reduce crosstalk of the wavelength selective switch.
Drawings
For a better understanding of the nature and technical aspects of the present invention, reference should be made to the following detailed description of the invention, taken in conjunction with the accompanying drawings, which are provided for purposes of illustration and description and are not intended to limit the invention.
In the drawings, there is shown in the drawings,
FIG. 1 is a side view of a liquid crystal on silicon spatial light modulator of the present invention;
FIG. 2 is a top view of a first electrode of an LCOS spatial light modulator of the present invention;
FIG. 3 is a top view of a second electrode of an LCOS spatial light modulator of the present invention;
FIG. 4 is a schematic diagram showing the orthographic projection positions of the first electrode and the second electrode on the first substrate of the LCOS spatial light modulator according to the present invention;
FIG. 5 is a flow chart of a method of fabricating a liquid crystal on silicon spatial light modulator of the present invention;
FIGS. 6 and 7 are schematic diagrams of step S11 of the method for fabricating an LCOS spatial light modulator according to the present invention;
FIGS. 8 and 9 are schematic diagrams of step S12 of the method for fabricating an LCOS spatial light modulator according to the present invention;
FIGS. 10 and 11 are schematic diagrams of step S13 of the method for fabricating a liquid crystal on silicon spatial light modulator according to the present invention;
FIGS. 12 and 13 are schematic diagrams of step S14 of the method for fabricating a LCOS spatial light modulator according to the present invention;
FIGS. 14 and 15 are schematic diagrams of step S15 of the method for fabricating a LCOS spatial light modulator according to the present invention;
FIGS. 16 and 17 are schematic diagrams of step S16 of the method for fabricating a LCOS spatial light modulator according to the present invention;
FIGS. 18 and 19 are schematic diagrams of step S17 of the method for fabricating an LCOS spatial light modulator according to the present invention;
FIGS. 20 and 21 are schematic diagrams of step S18 of a method of fabricating a LCOS spatial light modulator according to the present invention;
fig. 22 and 23 are schematic diagrams of step S19 of the method for fabricating a liquid crystal on silicon spatial light modulator according to the present invention.
Detailed Description
To further illustrate the technical means and effects of the present invention, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.
Referring to fig. 1 to 4, the present invention provides a liquid crystal on silicon spatial light modulator, comprising: a first substrate 10, a second substrate 20 disposed opposite to the first substrate 10 at an interval, and a liquid crystal layer 30 disposed between the first substrate 10 and the second substrate 20;
the first substrate 10 includes: a first substrate 11, a first electrode 12 disposed on a side of the first substrate 11 facing the second substrate 20, and a first alignment layer 13 disposed on the first electrode 12 and the first substrate 11;
the second substrate 20 includes: a second substrate 21, a second electrode 22 disposed on a side of the second substrate 21 facing the first substrate 10, and a second alignment layer 23 disposed on the second electrode 22 and the second substrate 21;
the first electrode 12 comprises a first handle 311 and a plurality of first comb teeth 312 vertically connected to the first handle 311 and arranged at intervals;
the second electrode 22 includes a second shank 321 and a plurality of second comb-teeth 322 vertically connected to the second shank 321 and arranged at intervals;
the orthogonal projection of the second stem 321 on the first substrate 10 is spaced from the first stem 311, and the orthogonal projection of the second comb-tooth portions 322 on the first substrate 10 and the first comb-tooth portions 312 are alternately arranged in sequence.
Specifically, the first alignment layer 13 and the second alignment layer 23 are used for aligning the liquid crystal layer 30, and the specific alignment manner can be selected according to actual needs, such as Vertical Alignment (VA) or Twisted Nematic (TN).
Specifically, the first electrode 12 includes a first film 121, a second film 122 and a third film 123 stacked together, where the first film 121 and the second film 122 are both made of metal materials, and the third film 123 is made of metal or transparent conductive materials.
Preferably, the first film 121 is made of chromium (Cr), the second film 122 is made of copper (Cu), and the third film 123 is made of tin (Sn) or Indium Tin Oxide (ITO).
The thickness of the first film layer 121 is 15-30 nm, the thickness of the second film layer 122 is 50-150 nm, and the thickness of the third film layer 123 is 15-50 nm.
Specifically, the material of the second electrode 22 is a transparent conductive material, preferably ITO.
Specifically, the first substrate 11 is a silicon-based substrate, and the second substrate 21 is a transparent substrate, preferably, the first substrate 11 is a polyimide silicon-based substrate, and the second substrate 21 is a transparent glass substrate.
Specifically, the distance between the first substrate 10 and the second substrate 20 is 0.5 to 50 μm, and preferably, the distance between the first substrate 10 and the second substrate 20 is 1 to 5 μm.
It should be noted that, in the liquid crystal on silicon spatial light modulator of the present invention, the first electrode and the second electrode are used to form an interdigital electrode structure, which can effectively suppress the edge field effect, so that the liquid crystal on silicon spatial light modulator has a lower edge field effect, the diffraction efficiency of the liquid crystal on silicon spatial light modulator is effectively improved, and the static state and transient crosstalk of the wavelength selective switch can be effectively reduced when the liquid crystal on silicon spatial light modulator is applied to the wavelength selective switch.
Referring to fig. 5, the present invention further provides a method for manufacturing a liquid crystal on silicon spatial light modulator, comprising the following steps:
step S1, providing a first substrate 11, and forming a first electrode 12 on the first substrate 11;
the first electrode 31 includes a first handle 311 and a plurality of first comb-teeth 312 vertically connected to the first handle 311 and arranged at intervals;
specifically, the manufacturing of the first electrode 12 on the silicon-based substrate 11 specifically includes: forming a first film layer 121, a second film layer 122 and a third film layer 123 which are sequentially stacked on the silicon-based substrate 11; the first film 121 and the second film 122 are both made of metal materials, and the third film 123 is made of metal or transparent conductive materials.
Preferably, the first film 121 is made of chromium, the second film 122 is made of copper, and the third film 123 is made of tin or indium tin oxide.
For example, as shown in fig. 6 to 23, in some embodiments of the present invention, the detailed operation steps of fabricating the first electrode 12 on the silicon-based substrate 11 include:
step S11, as shown in fig. 6 and 7, providing a first substrate 11, and forming a chromium film 121' on the first substrate 11, wherein the thickness is 15-30 nm;
step S12, as shown in fig. 8 and 9, forming a copper film 122 'with a thickness of 50-100 nm on the chromium film 121';
step S13, as shown in fig. 10 and 11, covering a negative photoresist 40 on the copper film 122';
step S14, as shown in fig. 12 and 13, exposing and developing the negative photoresist 40 by using a Mask (Mask) to form an electrode pattern;
step S15, as shown in fig. 14 and fig. 15, electroplating a copper layer 122 ″ on the interdigital electrode pattern;
step S16, as shown in fig. 16 and 17, removing the remaining negative photoresist 40;
step S17, as shown in fig. 18 and 19, removing the remaining chromium film 121 'and copper film 122' except the region where the electrode pattern is located, specifically removing the chromium film 121 'and copper film 122' except the region where the electrode pattern is located by electron beam etching, wherein the unremoved chromium film 121 'serves as the first film 121 of the first electrode 12, and the unremoved copper film 122' and the electroplated copper layer 122 ″ serve as the second film 122 of the first electrode 12;
step S18, as shown in fig. 20 and 21, forming a tin layer or an ITO layer on the second film layer 122, wherein the thickness of the tin layer or the ITO layer is 15-50 nm, and the tin layer or the ITO layer is used as a third film layer 123;
step S19, as shown in fig. 22 and 23, cuts the first substrate 11 to a suitable size, and completes the step of forming the first electrode 12 on the first substrate 11.
Step S2, as shown in fig. 1, fabricating a first alignment layer 13 on the first substrate 11 and the first electrode 12 to form a first substrate 10;
step S3, as shown in fig. 3, providing a second substrate 21, and forming a second electrode 22 on the second substrate 21;
the second electrode 22 includes a second shank 321 and a plurality of second comb teeth 322 vertically connected to the second shank 321 and arranged at intervals.
Specifically, the manufacturing of the second electrode 22 on the second substrate 21 specifically includes: a transparent conductive material film is formed on the second substrate 21, and then the transparent conductive material film is patterned to obtain the second electrode 22. The transparent conductive material is preferably ITO.
Step S4, as shown in fig. 1, fabricating a second alignment layer 23 on the second substrate 21 and the second electrode 22 to form a second substrate 20;
step S5, as shown in fig. 1 and 4, the first substrate 10 and the second substrate 20 are assembled such that the first substrate 10 and the second substrate 20 are oppositely spaced, the orthogonal projection of the second handle 321 on the first substrate 10 is oppositely spaced from the first handle 311, and the orthogonal projection of the plurality of second comb-tooth portions 322 on the first substrate 10 and the plurality of first comb-tooth portions 312 are sequentially and alternately arranged;
in step S6, as shown in fig. 1, the liquid crystal layer 30 is disposed between the first substrate 10 and the second substrate 20.
Specifically, the first alignment layer 13 and the second alignment layer 23 are used for aligning the liquid crystal layer 30, and the specific alignment manner can be selected according to actual needs, such as selecting a vertical alignment type or a twisted nematic type.
Specifically, the first substrate 11 is a silicon-based substrate, and the second substrate 21 is a transparent substrate.
Specifically, the distance between the first substrate 10 and the second substrate 20 is 0.5 to 50 μm, and preferably, the distance between the first substrate 10 and the second substrate 20 is 1 to 5 μm.
Preferably, the first substrate 11 is a polyimide silicon-based substrate, and the second substrate 21 is a transparent glass substrate.
It should be noted that, in the liquid crystal on silicon spatial light modulator manufactured by the method for manufacturing a liquid crystal on silicon spatial light modulator of the present invention, the first electrode and the second electrode jointly form an interdigital electrode structure, which can effectively suppress the fringe field effect, so that the liquid crystal on silicon spatial light modulator has a lower fringe field effect, which effectively improves the diffraction efficiency of the liquid crystal on silicon spatial light modulator, and the static state and transient crosstalk of the wavelength selective switch can be effectively reduced when the liquid crystal on silicon spatial light modulator is applied to the wavelength selective switch.
The invention also provides a wavelength selective switch which comprises the silicon-based liquid crystal spatial light modulator and can reduce crosstalk of the wavelength selective switch.
In summary, the present invention provides a liquid crystal on silicon spatial light modulator, comprising: the liquid crystal display panel comprises a first substrate, a second substrate and a liquid crystal layer, wherein the second substrate is arranged opposite to the first substrate at intervals; the first substrate includes: the first substrate, a first electrode arranged on one side of the first substrate facing the second substrate and a first alignment layer arranged on the first electrode and the first substrate; the second substrate includes: the second substrate, a second electrode arranged on one side of the second substrate facing the first substrate and a second alignment layer arranged on the second electrode and the second substrate; the first electrode comprises a first handle part and a plurality of first comb tooth parts which are vertically connected with the first handle part and are arranged at intervals; the second electrode comprises a second handle part and a plurality of second comb-tooth parts which are vertically connected with the second handle part and are arranged at intervals; the orthographic projection of the second handle part on the first substrate is opposite to the orthographic projection of the first handle part at intervals, the orthographic projection of the second comb tooth parts on the first substrate and the first comb tooth parts are sequentially and alternately arranged, the first electrode and the second electrode jointly form an interdigital electrode structure, the fringe field effect of the liquid crystal on silicon spatial light modulator can be inhibited, and the diffraction efficiency of the liquid crystal on silicon spatial light modulator is improved. The invention also provides a manufacturing method of the silicon-based liquid crystal spatial light modulator, which can inhibit the edge field effect of the silicon-based liquid crystal spatial light modulator and improve the diffraction efficiency of the silicon-based liquid crystal spatial light modulator. The invention also provides a wavelength selective switch, which can reduce crosstalk of the wavelength selective switch.
As described above, it will be apparent to those skilled in the art that other various changes and modifications may be made based on the technical solution and concept of the present invention, and all such changes and modifications are intended to fall within the scope of the appended claims.
Claims (10)
1. A liquid crystal on silicon spatial light modulator, comprising: the liquid crystal display panel comprises a first substrate (10), a second substrate (20) and a liquid crystal layer (30), wherein the second substrate (20) is arranged opposite to the first substrate (10) at an interval, and the liquid crystal layer (30) is arranged between the first substrate (10) and the second substrate (20);
the first substrate (10) includes: the liquid crystal display panel comprises a first substrate (11), a first electrode (12) arranged on one side, facing a second substrate (20), of the first substrate (11), and a first alignment layer (13) arranged on the first electrode (12) and the first substrate (11);
the second substrate (20) includes: a second substrate (21), a second electrode (22) arranged on one side of the second substrate (21) facing the first substrate (10), and a second alignment layer (23) arranged on the second electrode (22) and the second substrate (21);
the first electrode (12) comprises a first handle part (311) and a plurality of first comb tooth parts (312) which are vertically connected with the first handle part (311) and are arranged at intervals;
the second electrode (22) comprises a second handle part (321) and a plurality of second comb-tooth parts (322) which are vertically connected with the second handle part (321) and are arranged at intervals;
the orthographic projection of the second handle part (321) on the first base plate (10) is opposite to the first handle part (311) at an interval, and the orthographic projection of the plurality of second comb-tooth parts (322) on the first base plate (10) and the plurality of first comb-tooth parts (312) are sequentially and alternately arranged.
2. A lcos spatial light modulator as recited in claim 1, wherein the first electrode (12) comprises a first film layer (121), a second film layer (122) and a third film layer (123) arranged in a stack; the first film layer (121) and the second film layer (122) are both made of metal materials, and the third film layer (123) is made of metal or transparent conductive materials; the material of the second electrode (22) is a transparent conductive material.
3. A liquid crystal on silicon spatial light modulator according to claim 1 wherein the first substrate (11) is a silicon based substrate and the second substrate (21) is a transparent substrate.
4. The LCOS spatial light modulator of claim 1, wherein the first substrate (10) and the second substrate (20) are spaced apart by 0.5 to 50 μm.
5. The LCOS spatial light modulator of claim 4, wherein the first substrate (10) and the second substrate (20) are spaced apart by 1-5 μm.
6. A method for manufacturing a silicon-based liquid crystal spatial light modulator is characterized by comprising the following steps:
step S1, providing a first substrate (11), and manufacturing a first electrode (12) on the first substrate (11);
the first electrode (12) comprises a first handle part (311) and a plurality of first comb tooth parts (312) which are vertically connected with the first handle part (311) and are arranged at intervals;
step S2, manufacturing a first alignment layer (13) on the first substrate (11) and the first electrode (12) to form a first substrate (10);
step S3, providing a second substrate (21), and manufacturing a second electrode (22) on the second substrate (21);
the second electrode (22) comprises a second handle part (321) and a plurality of second comb-tooth parts (322) which are vertically connected with the second handle part (321) and are arranged at intervals;
step S4, manufacturing a second alignment layer (23) on the second substrate (21) and the second electrode (22) to form a second substrate (20);
step S5, the first substrate (10) and the second substrate (20) are assembled, so that the first substrate (10) and the second substrate (20) are oppositely arranged at intervals, the orthographic projection of the second handle part (321) on the first substrate (10) is oppositely arranged at intervals with the first handle part (311), and the orthographic projection of the plurality of second comb-tooth parts (322) on the first substrate (10) and the plurality of first comb-tooth parts (312) are sequentially and alternately arranged;
step S6 is to provide a liquid crystal layer (30) between the first substrate (10) and the second substrate (20).
7. The method for fabricating a liquid crystal on silicon spatial light modulator according to claim 6, wherein in the step S1, fabricating the first electrode (12) on the silicon substrate (11) specifically comprises:
forming a first film layer (121), a second film layer (122) and a third film layer (123) which are sequentially stacked on the silicon-based substrate (11);
the first film layer (121) and the second film layer (122) are both made of metal materials, and the third film layer (123) is made of metal or transparent conductive materials;
in the step S3, the material of the second electrode (22) is a transparent conductive material;
the first substrate (11) is a silicon-based substrate, and the second substrate (21) is a transparent substrate.
8. The method of claim 6 wherein the first substrate (10) and the second substrate (20) are spaced apart by 0.5-50 μm.
9. The method of claim 8, wherein the first substrate (10) and the second substrate (20) are spaced apart by a distance of 1-5 μm.
10. A wavelength selective switch comprising a liquid crystal on silicon spatial light modulator according to any of claims 1 to 5.
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