CN111338028A - Novel silicon fundamental wave division multiplexer structure - Google Patents
Novel silicon fundamental wave division multiplexer structure Download PDFInfo
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- CN111338028A CN111338028A CN202010220368.4A CN202010220368A CN111338028A CN 111338028 A CN111338028 A CN 111338028A CN 202010220368 A CN202010220368 A CN 202010220368A CN 111338028 A CN111338028 A CN 111338028A
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 12
- 239000010703 silicon Substances 0.000 title claims abstract description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 9
- 238000005452 bending Methods 0.000 claims abstract description 10
- 230000007423 decrease Effects 0.000 claims abstract description 3
- 230000008878 coupling Effects 0.000 claims description 18
- 238000010168 coupling process Methods 0.000 claims description 18
- 238000005859 coupling reaction Methods 0.000 claims description 18
- 150000003376 silicon Chemical class 0.000 claims 3
- 238000004891 communication Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 3
- 230000003287 optical effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention relates to the technical field of communication equipment, in particular to a novel silicon fundamental wavelength division multiplexer structure, which comprises a bent waveguide with a continuously changed curvature radius, wherein the bent waveguide comprises: a first region; the second area is connected with the first area, the second area is set in mirror symmetry with the first area, and the first area and the second area are set in a 45-degree bending mode; the curvature of the curved waveguide changes according to the Euler spiral, and gradually decreases and then gradually increases from the first end to the second end. The invention introduces the curved waveguide with continuously changed curvature to replace the existing curved waveguide, thereby greatly reducing the size of the device under the condition of not influencing the performance of the device; the wavelength division multiplexer is fully arranged and designed by adopting the bent waveguide and the straight waveguide running wire, so that the device is more integrated; the occupied area of the device is reduced under the condition that the performance of the device is not influenced, so that the cost is further reduced, and the method is suitable for large-scale mass production.
Description
Technical Field
The invention relates to the technical field of communication equipment, in particular to a novel silicon fundamental wavelength division multiplexer structure.
Background
The rapid development of long-distance, large-capacity and high-speed wavelength division multiplexing optical fiber communication systems meets the urgent needs of people for communication bandwidth, and simultaneously, provides higher and higher requirements for optoelectronic devices serving as physical bases of the optical fiber communication systems. The silicon optoelectronic chip can realize the development and integration of various optical devices by means of a mature CMOS process, and is a hot spot of current research. In a wavelength division multiplexing optical fiber communication system, typical optical wavelength division multiplexers/demultiplexers are mainly of a grating type, an arrayed waveguide type, and a filter type based on mach-zehnder interferometer cascade. However, the grating type has the main disadvantages of large volume, small bandwidth of the array waveguide type, not flat frequency response in the pass band, temperature compensation and troublesome use. The cascaded filter type based on the Mach-Zehnder interferometer is widely applied to a wavelength division multiplexing optical fiber communication system with excellent performances of small insertion loss, small crosstalk, flat frequency response in a passband and the like, but the device is still large in size at present. Therefore, how to miniaturize the wavelength division multiplexing device at low cost without affecting the performance index of the device is an urgent technical problem to be solved.
Disclosure of Invention
In order to solve the technical problems, the invention provides a novel silicon-based wavelength division multiplexer structure.
The technical problem solved by the invention can be realized by adopting the following technical scheme:
a novel silicon fundamental wavelength division multiplexer structure comprising a curved waveguide having a continuously varying radius of curvature, said curved waveguide comprising:
a first region;
the second area is connected with the first area, the second area is set in mirror symmetry with the first area, and the first area and the second area are set in a 45-degree bending mode;
the curvature of the curved waveguide changes according to the Euler spiral, and gradually decreases and then gradually increases from the lower end of the first region to the upper end of the second region.
Preferably, the Euler spiral is represented by the formula:
R＝S/(2θ)
wherein R is the radius of curvature of the curved waveguide; s is the length along the spiral and θ is the angle of the curved waveguide.
Preferably, the curvatures of the lower end of the first region and the upper end of the second region are infinite.
Preferably, the curved waveguide is used in a cascade between a curved waveguide section in a directional coupler coupling region in a mach-zehnder interferometer and the mach-zehnder interferometer.
Preferably, the mach-zehnder interferometers are cascaded by routing the curved waveguides and the straight waveguides, so that the curved waveguides and the straight waveguides are nested with each other.
Preferably, when the curved waveguide is used in the coupling region of the directional coupler in the mach-zehnder interferometer, the coupling length of the directional coupler needs to be reset.
Preferably, when the coupling region of the directional coupler adopts the combination of the curved waveguide and a preset curved waveguide, the combination of the curved waveguide and the preset curved waveguide forms a 90-degree bend.
The beneficial effects are that:
the invention creatively introduces the curved waveguide with continuously changed curvature into the MZI structure to replace the existing curved waveguide, greatly reduces the size of the device and the occupied area of the device under the condition of not influencing the performance of the device, and even can reduce the size of the device by times, thereby further reducing the cost and being suitable for large-scale mass production.
Drawings
FIG. 1a and FIG. 1b are layout routing diagrams of a prior art device;
FIG. 2 is a block diagram of a curved waveguide provided by the present invention;
fig. 3a and fig. 3b are layout routing diagrams of a device according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
The invention is further described with reference to the following drawings and specific examples, which are not intended to be limiting.
Referring to fig. 2, a diagram of a predetermined curved waveguide 1 according to the present invention includes:
in the first area (2) of the substrate,
the second area 3 is connected with the first area, the second area 3 and the first area 2 are set in a mirror symmetry mode, and the first area 2 and the second area 3 are set in a 45-degree bending mode;
the curvature of the curved waveguide 1 is changed according to the euler's spiral, gradually decreasing and then gradually increasing from the lower end of the first region to the upper end of the second region.
In the preferred embodiment of the present invention, for a 90-degree curved waveguide 1, the curvature radius can be decomposed into two regions, and the two regions are mirror symmetric, and each region realizes 45-degree bending. The radius of curvature of the curved waveguide 1 is infinite at both ends of the 90-degree curved waveguide 1 according to the euler spiral variation, and is minimum at the point where the first region 2 and the second region 3 meet.
In the preferred embodiment of the present invention, the 90-degree bend waveguide 1 of the present invention can reduce the device footprint, greatly reduce the device size, and make the device more compact during the time without affecting the device performance.
Further, the Euler spiral is represented by the following formula:
R＝S/(2θ)
wherein R is the radius of curvature of the curved waveguide 1; s is the length along the spiral and θ is the angle at which the waveguide 1 is bent.
Specifically, the waveguide loss can be reduced by adopting the bent waveguide 1 while the size of the device is reduced, so that the size of the device is greatly reduced without influencing the performance of the device, and the cost is reduced.
Further, the curvatures of the lower end of the first region and the upper end of the second region are infinite.
Further, the curved waveguide 1 may be used for a cascade between a curved waveguide section in a directional coupler coupling region in a mach-zehnder interferometer and the mach-zehnder interferometer.
Specifically, the curved waveguide 1 in the mach-zehnder interferometer is functionally divided into two parts, one part is used for the curved waveguide part in the coupling region of the directional coupler in the mach-zehnder interferometer, and the other part is used for the cascade connection between the mach-zehnder interferometers.
Furthermore, the cascade connection between the mach-zehnder interferometers can adopt the curved waveguide 1 and the straight waveguide for wiring, so that the curved waveguide 1 and the straight waveguide are mutually nested and arranged.
Further, when the coupling region of the directional coupler in the mach-zehnder interferometer adopts the curved waveguide, the coupling length of the directional coupler needs to be reset.
Further, when the coupling region of the directional coupler adopts the combination of the curved waveguide 1 and a preset curved waveguide, the combination of the curved waveguide and the preset curved waveguide forms a 90-degree bend.
Specifically, the preset curved waveguide is a common curved waveguide, and for the curved waveguide in the directional coupler, when the curved waveguide with the special design is adopted for replacement, the coupling length of the directional coupler needs to be redesigned in consideration of the influence on the coupling region. If the coupling length of the directional coupler is not required to be redesigned, the combination of the ordinary curved waveguide and the specially designed curved waveguide is adopted for the curved waveguide in the coupling area, and the combination of the ordinary curved waveguide and the specially designed curved waveguide completes 90-degree bending, so that the ordinary curved waveguide is continuously used for the part which affects the coupling area, and the size of the device is reduced for the other part of the specially designed curved waveguide.
In a preferred embodiment of the present invention, referring to fig. 1a and fig. 1b, the existing waveguide routing layout has a large size, and in this embodiment, the curved waveguide structures in the mach-zehnder interferometer structure are nested with each other through the routing design of the curved waveguide and the straight waveguide, so as to greatly reduce the occupied area of the device. For example, the size of the optical wavelength division multiplexer device in FIG. 3a is only 0.6mm ^2, and the size of the optical wavelength division multiplexer device in FIG. 3b is only 1.5mm ^ 2. With the same design parameters and curved waveguides, the device size can be reduced by another 30% with this layout compared to the conventional layout.
In conclusion, the curved waveguide with continuously changed curvature is innovatively introduced into the Mach-Zehnder interferometer structure to replace the existing curved waveguide, so that the size of the device is greatly reduced under the condition of not influencing the performance of the device, and even the size of the device can be reduced by times. Meanwhile, the invention provides that the optical wavelength division multiplexer device is fully arranged and designed by adopting the bent waveguide and the straight waveguide walking line, so that the device is more integrated. The defect of large size in the prior art is overcome, and the size of the device is reduced under the condition that the performance of the device is not influenced, so that the cost is further reduced, and the method is suitable for large-scale mass production.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention.
Claims (7)
1. A novel structure of a silicon-based wavelength division multiplexer, comprising a curved waveguide having a continuously varying radius of curvature, said curved waveguide comprising:
a first region;
the second area is connected with the first area, the second area is set in mirror symmetry with the first area, and the first area and the second area are set in a 45-degree bending mode;
the curvature of the curved waveguide changes according to the Euler spiral, and gradually decreases and then gradually increases from the lower end of the first region to the upper end of the second region.
2. A novel silicon fundamental wavelength division multiplexer structure as claimed in claim 1, wherein said euler spiral is represented by the following formula:
R＝S/(2θ)
wherein R is the radius of curvature of the curved waveguide; s is the length along the spiral and θ is the angle of the curved waveguide.
3. A novel structure of a silicon-based wavelength division multiplexer according to claim 1, wherein the curvatures of the lower end of said first region and the upper end of said second region are infinite.
4. A novel structure of a silicon fundamental wavelength division multiplexer according to claim 1, wherein the curved waveguide is used in a cascade between a curved waveguide section in a coupling region of a directional coupler in a mach-zehnder interferometer and the mach-zehnder interferometer.
5. The novel structure of claim 4, wherein the cascade connection between the Mach-Zehnder interferometers is formed by routing the curved waveguides with straight waveguides in a nested arrangement.
6. The new structure of the silicon fundamental wavelength division multiplexer according to claim 4, wherein when the curved waveguide is used in the coupling region of the directional coupler in the mach-zehnder interferometer, the coupling length of the directional coupler needs to be reset.
7. The structure according to claim 6, wherein when the bending waveguide and a predetermined bending waveguide are combined in the coupling region of the directional coupler, the bending waveguide and the predetermined bending waveguide form a 90 ° bend.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010220368.4A CN111338028A (en) | 2020-03-25 | 2020-03-25 | Novel silicon fundamental wave division multiplexer structure |
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| CN202010220368.4A CN111338028A (en) | 2020-03-25 | 2020-03-25 | Novel silicon fundamental wave division multiplexer structure |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104781708A (en) * | 2012-10-18 | 2015-07-15 | Vttoy技术研究中心 | curved light guide |
| CN207249175U (en) * | 2017-07-25 | 2018-04-17 | 浙江大学 | Coarse wavelength division multiplexer device based on curved oriented coupler |
| CN108227075A (en) * | 2018-03-16 | 2018-06-29 | 中国科学院上海微系统与信息技术研究所 | Curved waveguide structure and polarization beam splitting circulator |
| US10436982B1 (en) * | 2018-07-18 | 2019-10-08 | Globalfoundries Inc. | Waveguide bends with field confinement |
| CN110596813A (en) * | 2019-08-02 | 2019-12-20 | 浙江大学 | Silicon-based multimode spiral waveguide delay line supporting low-loss fundamental mode transmission |
-
2020
- 2020-03-25 CN CN202010220368.4A patent/CN111338028A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104781708A (en) * | 2012-10-18 | 2015-07-15 | Vttoy技术研究中心 | curved light guide |
| CN207249175U (en) * | 2017-07-25 | 2018-04-17 | 浙江大学 | Coarse wavelength division multiplexer device based on curved oriented coupler |
| CN108227075A (en) * | 2018-03-16 | 2018-06-29 | 中国科学院上海微系统与信息技术研究所 | Curved waveguide structure and polarization beam splitting circulator |
| US10436982B1 (en) * | 2018-07-18 | 2019-10-08 | Globalfoundries Inc. | Waveguide bends with field confinement |
| CN110596813A (en) * | 2019-08-02 | 2019-12-20 | 浙江大学 | Silicon-based multimode spiral waveguide delay line supporting low-loss fundamental mode transmission |
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Application publication date: 20200626 |