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CN111290064A - Polarization-independent optical filter - Google Patents

Polarization-independent optical filter Download PDF

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Publication number
CN111290064A
CN111290064A CN201811401140.4A CN201811401140A CN111290064A CN 111290064 A CN111290064 A CN 111290064A CN 201811401140 A CN201811401140 A CN 201811401140A CN 111290064 A CN111290064 A CN 111290064A
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polarization
refractive
substrate
index film
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苏炎
于光龙
刘哲
李昱
林志强
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Fuzhou Photop Optics Co ltd
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Fuzhou Photop Optics Co ltd
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Priority to CN201811401140.4A priority Critical patent/CN111290064A/en
Priority to PCT/CN2018/119814 priority patent/WO2020103206A1/en
Publication of CN111290064A publication Critical patent/CN111290064A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/207Filters comprising semiconducting materials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Filters (AREA)
  • Polarising Elements (AREA)

Abstract

The invention discloses a polarization-independent optical filter, which comprises a substrate, wherein a film system formed by alternately stacking a plurality of high-refractive-index film layers and low-refractive-index film layers is arranged on the substrate, and the high-refractive-index film layers are made of SiH and SiOxHyOr SiH and SiOxHyThe scheme of the invention can be applied to the fields of 3D sensing, laser radar, imaging instruments, detecting instruments, data centers, comb filters (interleavers) of optical communication and the like, wherein the passband is at least partially overlapped with the wavelength range of 800nm to 4000nm, and each SiH/SiOxHyThe refractive index of the layers is greater than 3 in the wavelength range of 800nm to 4000nm, the extinction coefficient in the wavelength range of 800nm to 4000nm is less than 0.0005, the whole film system is partially overlapped in the wavelength range of 800nm to 4000nm, low absorption is realized, and the polarization-independent optical filter under a large angle or in a wide angle range is realized.

Description

Polarization-independent optical filter
Technical Field
The invention relates to the fields of 3D sensing, laser radar and optical communication, in particular to a polarization-independent optical filter.
Background
In the conventional case, polarization independent filters, due to depolarizationThe resonator design requires two or more kinds of dielectric films or metal films having refractive indexes to be alternately stacked. The high refractive index film layer is typically formed using different oxides, such as TiO2、Nb2O5、Ta2O5And mixtures thereof, with the intermediate refractive index film layer usually being made of Al2O3And oxide mixture (Al)xPryOz、AlxLayOz、AlxTayOzEtc.), a low refractive index film layer is usually made of SiO2、MgF2And metal Ag. The polarization-independent filter prepared by the mixed plating of the metal film and the dielectric film has low service life due to extremely poor reliability, and is far inferior to a hard dielectric oxide film. However, polarization independent filters based on hard dielectric oxide films can only achieve depolarization over a very small range of angles.
In order to achieve depolarization over a larger angular range with polarization independent filters, it is desirable to maintain the P and S light polarization spectra to have a consistent angular wavelength shift effect.
Disclosure of Invention
In view of the state of the prior art, it is an object of the present invention to provide a polarization independent filter that is reliable in implementation, easy to manufacture and capable of being used in a range of incident angles from 0 to 40 degrees.
In order to achieve the technical purpose, the invention adopts the technical scheme that:
the polarization-independent optical filter comprises a substrate, wherein a film system formed by alternately stacking a plurality of high-refractive-index film layers and low-refractive-index film layers is arranged on the substrate, and the ratio of the refractive index of the material of the high-refractive-index film layers to the refractive index of the material of the low-refractive-index film layers is less than 2.
Further, the high refractive index film layer is made of SiH and SiOxHyOr SiH and SiOxHyA mixture of (a).
Further, the material of the low-refractive-index film layer is Nb2O5、Ta2O5、TiO2、SixNyAt least one kind of mixtures thereof.
Further, the substrate is formed by a silicon dioxide material, or colored glass based on the silicon dioxide material, or a silicon material.
Furthermore, the refractive indexes of the high-refractive-index film layers in the wavelength range of 800-4000 nm are all larger than 3, and the extinction coefficients are all smaller than 0.0005.
In one embodiment, the substrate is provided with a long wavelength pass having no polarization on one end surface and a short wavelength pass having no polarization on the other end surface.
As another implementation on the substrate, further, a long-wavelength and short-wavelength light-polarized and non-light-polarized light pass is superposed on the same end face of the substrate, and an AR antireflection film is plated on the other end face.
Further, within the range of 0-40 degrees, the Cut-ON wavelength separation of P light and S light under each angle is less than 3nm, and the typical value is less than 1 nm; the Cut-OFF wavelength separation of P and S light at each angle is less than 3nm, typically less than 1 nm.
Further, within the range of 0-40 degrees, the FWHM difference of the P light and the S light under each angle is less than 5nm, and the typical value is less than 3 nm.
Furthermore, the polarization-independent filter is applied to angle tuning within the range of 0-40 degrees.
By adopting the technical scheme, compared with the prior art, the invention has the beneficial effects that: the substrate material is a glass material based on a silicon dioxide material, or colored glass forming based on the silicon dioxide material, or silicon material forming, and SiH/SiO is adoptedxHyA high refractive index film layer made of the mixture, and Nb2O5、Ta2O5、Al2O3、AlxPryOz、AlxLayOz、AlxTayOzAt least one mixed low refractive index film layer is alternately stacked on the substrate to form a film system, each SiH/SiOxHyThe refractive index of the layer (i.e., the high refractive index film layer) is greater than 3 in the wavelength range of 800nm to 4000nm, and the extinction coefficient is less than 0.0005 in the wavelength range of 800nm to 4000 nm. Complete film systemThe partial overlapping is realized in the wavelength range of 800nm to 4000nm, the low absorption is realized, and the polarization-independent partial optical filter under a large angle or in a large angle range is realized, so that the scheme can also be applied to the fields of 3D sensing, laser radars, imaging instruments, detecting instruments, data centers, comb filters (interleavers) of optical communication and the like.
Drawings
The invention will be further elucidated with reference to the drawings and the detailed description:
FIG. 1 is a schematic diagram of an embodiment of the present invention;
FIG. 2 is a graph of transmittance versus wavelength for 40 degrees of P and S light polarization for example 1 of the present invention;
FIG. 3 is a graph of transmittance versus wavelength for 30 degrees of P and S light polarization for example 1 of the present invention;
FIG. 4 is a graph of transmittance versus wavelength for 40 degrees of P and S light polarization for example 2 of the present invention;
FIG. 5 is a graph of transmittance versus wavelength for 30 degrees of P and S light polarization for example 2 of the present invention;
FIG. 6 is a graph of transmittance versus wavelength for 40 degrees of P and S light polarization for example 3 of the present invention;
FIG. 7 is a graph of transmittance versus wavelength for 30 degrees of P and S light polarization for example 3 of the present invention;
FIG. 8 is a graph of transmittance versus wavelength for P-polarization and S-polarization at 0 degrees, 30 degrees, and 40 degrees for example 3 of the present invention.
Detailed Description
As shown in fig. 1, the polarization independent optical filter of the present invention includes a substrate 1, wherein the substrate 1 has a film system formed by alternately stacking a plurality of high refractive index film layers 2 and low refractive index film layers 3, and a ratio of a refractive index of a material of the high refractive index film layers 2 to a refractive index of the material of the low refractive index film layers 3 is less than 2.
Wherein the high refractive index film layer is made of SiH and SiOxHyOr SiH and SiOxHyA mixture of (a); the low-refractive-index film layer is made of Nb2O5、Ta2O5、TiO2、SixNyAt least one mixture of (a); the substrate is formed by a silicon dioxide material, or colored glass based on the silicon dioxide material, or a silicon material.
In addition, the refractive indexes of the high-refractive-index film layers in the wavelength range of 800-4000 nm are all larger than 3, and the extinction coefficients are all smaller than 0.0005; as one of the preferred embodiments of the substrate, one end surface of the substrate is plated with long wave pass which is not related to polarization, and the other end surface is plated with short wave pass which is not polarized; in another preferred implementation, the long and short wavelength beams without polarized light are superposed on the same end face of the substrate, and an AR antireflection film is plated on the other end face.
In addition, within the range of 0-40 degrees, the Cut-ON wavelength separation of P light and S light under each angle is less than 3nm, and the typical value is less than 1 nm; Cut-OFF wavelength separation of P light and S light under each angle is less than 3nm, and the typical value is less than 1 nm; the FWHM difference between P and S light at each angle is less than 5nm, typically less than 3 nm.
The invention adopts the technical scheme that the substrate 1 is made of glass material based on silicon dioxide material, or colored glass forming based on silicon dioxide material, or silicon material forming, and SiH/SiO is adoptedxHyA high refractive index film layer 2 made of the mixture, and Nb2O5、Ta2O5、Al2O3、AlxPryOz、AlxLayOz、AlxTayOzAt least one mixed low refractive index film layer 3 is alternately stacked on the substrate to form a film system, each SiH/SiOxHyThe refractive index of the layer (i.e., the high refractive index film layer) is greater than 3 in the wavelength range of 800nm to 4000nm, and the extinction coefficient is less than 0.0005 in the wavelength range of 800nm to 4000 nm. The whole film system is partially overlapped in the wavelength range of 800nm to 4000nm, low absorption is realized, and the polarization-independent light splitting filter under a large angle or in a large angle range is realized, so that the scheme can also be applied to 3D sensing, laser radar, imaging instruments, detecting instruments, data centers and comb filters (in) for optical communicationInterlaver), and the like.
Example 1
This example is one implementation of the present invention in which high and low index film layers are alternately stacked on a substrate
For example, it has a short pass with a depolarization effect in the range of 0 to 40 degrees and has a structure comprising 30 layers of a film system in which two materials are alternately stacked.
The hierarchical order of the stacks is shown in the following table:
Figure BDA0001876344900000031
Figure BDA0001876344900000041
wherein,
the material of the high refractive index film layer is SiH, and the refractive index of the high refractive index film layer is 3.6546 near 940 nm.
The low refractive index film layer is made of Ta2O5The refractive index in the vicinity of 940nm is 2.1056.
The substrate material is ordinary K9 optical glass.
The film is formed by stacking 30 layers of two kinds of materials alternately.
The implementation has the following beneficial effects: the polarized lightless short wave pass is implemented, the Cut-Off wavelengths of P polarization and S polarization are not separated within the range of 0-40 ℃, and the difference is less than 1.5 nm; and (4) coating with a sputtered hard medium. And can meet the reliability requirements of friction resistance, high temperature and high humidity resistance of communication and automobile products; FIG. 2 is a graph showing the transmittance of the P-polarization and the S-polarization at 40 degrees versus wavelength for this example; FIG. 3 is a graph of transmittance versus wavelength for the P-polarization and S-polarization at 30 degrees for this example.
Example 2
This example is one implementation of the present invention in which high and low index film layers are alternately stacked on a substrate
For example, it has a long-wave pass with a depolarization effect in the range of 0 to 40 degrees and has a structure comprising 29 layers of film systems formed by alternately stacking two materials.
The hierarchical order of the stacks is shown in the following table:
Figure BDA0001876344900000042
Figure BDA0001876344900000051
wherein,
the material of the high refractive index film layer is SiH, and the refractive index of the high refractive index film layer is 3.6546 near 940 nm.
The low refractive index film layer is made of Ta2O5The refractive index in the vicinity of 940nm is 2.1056.
The substrate material is ordinary K9 optical glass.
The film is formed by stacking 29 layers of two kinds of materials alternately.
The implementation has the following beneficial effects: the polarized lightless long-wave transmission is realized, the Cut-ON wavelengths of P polarization and S polarization are not separated within the range of 0-40 ℃, and the difference is less than 1 nm; and (4) coating with a sputtered hard medium. And can meet the reliability requirements of friction resistance, high temperature and high humidity resistance of communication and automobile products; FIG. 4 is a graph of transmittance versus wavelength for the present example at 40 degrees for P-polarization and S-polarization; FIG. 5 is a graph of transmittance versus wavelength for the P-polarization and S-polarization at 30 degrees for this example.
Example 3
This example is a method of plating example 1 and example 2 on both sides of a substrate, respectively, with long wave pass and no light with independent polarization
The short wavelength of (a) forms a band pass filter that polarizes the absence of light.
Figure BDA0001876344900000052
Figure BDA0001876344900000061
The implementation has the following beneficial effects: in the band-pass filter without polarized light, the difference of the waveform separation of P polarization and S polarization is less than 1.5nm and the variation of the FWHM difference is less than 2nm within the range of 0-40 ℃; and (4) coating with a sputtered hard medium. And can meet the reliability requirements of friction resistance, high temperature and high humidity resistance of communication and automobile products; FIG. 6 is a graph of transmittance versus wavelength for the present example at 40 degrees for P-polarization and S-polarization; FIG. 7 is a graph of transmittance versus wavelength for the P-polarization and S-polarization at 30 degrees for this example; FIG. 8 is a graph of transmittance versus wavelength for P-polarization and S-polarization at 0, 30, and 40 degrees for this example.
The foregoing detailed description of the preferred embodiments of the invention has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions available to those skilled in the art through logic analysis, reasoning and limited experiments based on the prior art according to the concept of the present invention should be within the scope of protection defined by the claims.

Claims (10)

1. The polarization-independent optical filter comprises a substrate, wherein a film system formed by alternately stacking a plurality of high-refractive-index film layers and low-refractive-index film layers is arranged on the substrate, and the polarization-independent optical filter is characterized in that: the ratio of the refractive index of the material of the high-refractive-index film layer to the refractive index of the material of the low-refractive-index film layer is less than 2.
2. The polarization independent filter of claim 1, wherein: the high refractive index film layer is made of SiH and SiOxHyOr SiH and SiOxHyA mixture of (a).
3. The polarization independent filter of claim 1, wherein: the low-refractive-index film layer is made of Nb2O5、Ta2O5、TiO2、SixNyAt least one kind of mixtures thereof.
4. The polarization independent filter of claim 1, wherein: the substrate is formed by a silicon dioxide material, or colored glass based on the silicon dioxide material, or a silicon material.
5. The polarization independent filter of claim 1, wherein: the refractive index of the high-refractive-index film layer in the wavelength range of 800-4000 nm is larger than 3, and the extinction coefficient is smaller than 0.0005.
6. The polarization independent filter of claim 1, wherein: one end face of the substrate is plated with long-wave pass irrelevant to polarization, and the other end face of the substrate is plated with short-wave pass irrelevant to polarization.
7. The polarization independent filter of claim 1, wherein: the long and short wavelength channels without polarized light are superposed on the same end face of the substrate, and an AR antireflection film is plated on the other end face.
8. The polarization independent filter of claim 1, wherein: within the range of 0-40 degrees, the Cut-ON wavelength separation of P light and S light at each angle is less than 3nm, and the typical value is less than 1 nm; the Cut-OFF wavelength separation of P and S light at each angle is less than 3nm, typically less than 1 nm.
9. The polarization independent filter of claim 1, wherein: within the range of 0-40 degrees, the FWHM difference of the P light and the S light under each angle is less than 5nm, and the typical value is less than 3 nm.
10. The polarization independent filter of claim 1, wherein: the method is applied to angle tuning within the range of 0-40 degrees.
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CN109683225A (en) * 2019-02-27 2019-04-26 成都国泰真空设备有限公司 A kind of flat sheet membranes edge filter for depolarization
CN113960707A (en) * 2021-10-13 2022-01-21 苏州众为光电有限公司 Angle-tunable depolarizing filter

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CN110737036A (en) 2018-07-18 2020-01-31 福州高意光学有限公司 Wide angle application high reflector
CN112114402A (en) * 2020-10-12 2020-12-22 东莞市微科光电科技有限公司 CWDM optical filter

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CN113960707A (en) * 2021-10-13 2022-01-21 苏州众为光电有限公司 Angle-tunable depolarizing filter
CN113960707B (en) * 2021-10-13 2024-09-10 苏州众为光电有限公司 Angle-tunable depolarization filter

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Application publication date: 20200616