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CN111288077A - reduction drive bearing - Google Patents

reduction drive bearing Download PDF

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Publication number
CN111288077A
CN111288077A CN201811504096.XA CN201811504096A CN111288077A CN 111288077 A CN111288077 A CN 111288077A CN 201811504096 A CN201811504096 A CN 201811504096A CN 111288077 A CN111288077 A CN 111288077A
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bearing
ring
flexible inner
teeth
rigid outer
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李茂碷
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Meiya Precision Co ltd
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Meiya Precision Co ltd
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00Bearings with rolling contact, for exclusively rotary movement
    • F16C19/54Systems consisting of a plurality of bearings with rolling friction

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Rolling Contact Bearings (AREA)
  • Retarders (AREA)

Abstract

The invention discloses a speed reduction transmission bearing, which comprises a flexible inner bearing and a rigid outer bearing; the outer ring surface of the outer ring of the flexible inner bearing is formed with a circle of external teeth, an axial extension ring arranged at one end of the outer ring of the flexible inner bearing is provided with a plurality of elastic cutting grooves and a radial flange, and the inner ring of the flexible inner bearing provides a harmonic cam embedded group for power input; a circle of internal teeth are formed on the inner ring surface of the inner ring of the rigid outer bearing, and the internal teeth are meshed with the external teeth of the flexible inner bearing to actuate; therefore, the outer ring of the rigid outer bearing is used for reducing the speed and outputting force to be connected, and when the flexible inner bearing is transmitted into the harmonic cam by power to rotate, the flexible inner bearing and the rigid outer bearing generate a speed reduction transmission effect.

Description

减速传动轴承reduction drive bearing

技术领域technical field

本发明是有关一种传动轴承,尤其是指一种减速传动轴承。The present invention relates to a transmission bearing, in particular to a deceleration transmission bearing.

背景技术Background technique

传统减谐减速器(谐波减速器)多是应用一刚性外齿环、一柔性内齿环及一谐波凸轮所组成,刚性外齿环的内环面设有内齿,柔性内齿环的外环面设有外齿,将柔性内齿环设置于刚性外齿环中,而谐波凸轮设置于柔性内齿环中,使谐波凸轮抵靠柔性内齿环,致使柔性内齿环的一部分外齿啮合于刚性外齿环的内齿。其安装使用时,将马达输出动力轴接至谐波凸轮,通过谐波凸轮的转动动作,驱动柔性内齿环在刚性外齿环中转动,使柔性内齿环转化成低转速的动力输出,如此可将减谐减速器应用于高负载、低转速需求的领域,例如机械手臂的各轴部关节。The traditional harmonic reduction reducer (harmonic reducer) is mostly composed of a rigid outer gear ring, a flexible inner gear ring and a harmonic cam. The inner ring surface of the rigid outer gear ring is provided with internal teeth, and the flexible inner gear ring The outer ring surface is provided with external teeth, the flexible inner gear ring is arranged in the rigid outer gear ring, and the harmonic cam is arranged in the flexible inner gear ring, so that the harmonic cam abuts the flexible inner gear ring, causing the flexible inner gear ring A part of the external teeth meshes with the internal teeth of the rigid external gear ring. When it is installed and used, the motor output power shaft is connected to the harmonic cam, and through the rotating action of the harmonic cam, the flexible inner gear ring is driven to rotate in the rigid outer gear ring, so that the flexible inner gear ring can be converted into low-speed power output. In this way, the harmonic reduction reducer can be applied to the fields of high load and low speed requirements, such as the joints of each axis of the robot arm.

但是,此种马达与减谐减速器以轴部串接的动力传动模式,势必造成整体的轴向长度过长,致使马达与减谐减速器的安装空间需要较大的尺寸,不利于机构规划。为此,有中国台湾发明专利公开号第201626696号所提出的旋转致动器方案,希望以中空型的谐波齿轮装置来容置马达,以期达到缩减旋转致动器轴向尺寸的目的。但是,该方案所揭示的谐波齿轮装置齿传咬合的齿宽,受限柔性减谐驱动齿结构组成因素,无法有较佳的动力传递,导致旋转致动器的扭矩输出值也没有较佳的表现,负载能力较为不足。However, this kind of power transmission mode in which the motor and the harmonic reduction reducer are connected in series with the shaft will inevitably cause the overall axial length to be too long, so that the installation space of the motor and the harmonic reduction reducer requires a larger size, which is not conducive to the mechanism planning. . For this reason, there is a rotary actuator solution proposed by Taiwan Invention Patent Publication No. 201626696. It is hoped that a hollow harmonic gear device is used to accommodate the motor, in order to achieve the purpose of reducing the axial size of the rotary actuator. However, the tooth width of the tooth transmission of the harmonic gear device disclosed in this solution is limited by the components of the flexible harmonic reduction drive tooth structure, so that it cannot have a better power transmission, resulting in an unsatisfactory torque output value of the rotary actuator. performance, the load capacity is relatively insufficient.

本发明人乃秉持精益求精的研发精神,期待谐波减速轴承在缩减轴向尺寸的条件下,也能在扭矩输出有着极佳的表现,使谐波减速轴承整体的应用层面更加广泛,乃为本发明所要积极揭露的技术。The inventor of the present invention adheres to the research and development spirit of excellence, and expects that the harmonic deceleration bearing can also have an excellent performance in torque output under the condition of reducing the axial size, so that the overall application level of the harmonic deceleration bearing will be wider. Invent the technology you want to actively disclose.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于提供一种减速传动轴承,借由减速传动轴承以简易的复合轴承啮合组成,达到内外齿更完全啮合传递动力,能够直接动力传动及整体构造更精简的目的。The purpose of the present invention is to provide a deceleration transmission bearing, by which the deceleration transmission bearing is composed of a simple compound bearing meshing, so that the inner and outer teeth are more fully meshed to transmit power, the direct power transmission can be achieved, and the overall structure is more streamlined.

为了达到上述目的,本发明的减速传动轴承,包括:彼此可转动地轴向套合在一起的一柔性内轴承及一刚性外轴承,该柔性内轴承及该刚性外轴承都具有一外环、一内环,及设置在该柔性内轴承的内、外环之间的数个滚子与设置在该刚性外轴承的内、外环之间的数个滚子;该柔性内轴承的外环的外环面具有一圈外齿,该柔性内轴承的外环的一端具有一轴向延伸环,自该轴向延伸环端部径向延伸有一径向法兰,该轴向延伸环设有数个切槽,各该切槽之间形成连接该柔性内轴承与该径向法兰的弹性变形部;该刚性外轴承的内环的内环面具有一圈内齿,该内齿与该柔性内轴承的外齿相啮合;以及该柔性内轴承的内环中嵌组一谐波凸轮,该谐波凸轮转动致使该柔性内轴承与刚性外轴承彼此间产生减速传动作用。In order to achieve the above object, the deceleration transmission bearing of the present invention includes: a flexible inner bearing and a rigid outer bearing that are rotatably axially sleeved together, the flexible inner bearing and the rigid outer bearing both have an outer ring, an inner ring, and several rollers arranged between the inner and outer rings of the flexible inner bearing and several rollers arranged between the inner and outer rings of the rigid outer bearing; the outer ring of the flexible inner bearing The outer ring surface of the flexible inner bearing has a ring of outer teeth, one end of the outer ring of the flexible inner bearing has an axially extending ring, and a radial flange radially extends from the end of the axially extending ring, and the axially extending ring is provided with several Each of the grooves forms an elastic deformation portion connecting the flexible inner bearing and the radial flange; the inner ring surface of the inner ring of the rigid outer bearing has a ring of inner teeth, and the inner teeth are connected to the flexible inner ring. The outer teeth of the inner bearing are meshed with each other; and a harmonic cam is embedded in the inner ring of the flexible inner bearing, and the rotation of the harmonic cam causes the flexible inner bearing and the rigid outer bearing to produce a deceleration transmission effect.

上述减速传动轴承中,该柔性内轴承的外齿的齿数小于该刚性外轴承的内齿的齿数。In the above reduction transmission bearing, the number of teeth of the outer teeth of the flexible inner bearing is smaller than the number of teeth of the inner teeth of the rigid outer bearing.

上述减速传动轴承中,该切槽为沿着该轴向延伸环的圆周方向延伸的条形切槽,该条形切槽的两端分别形成一孔。In the above reduction drive bearing, the cut groove is a strip-shaped cut-out extending along the circumferential direction of the axially extending ring, and two ends of the strip-shaped cut-out are respectively formed with a hole.

上述减速传动轴承中,该刚性外轴承的外环与该径向法兰分别设有能够穿设固定组件的穿孔。In the above reduction transmission bearing, the outer ring and the radial flange of the rigid outer bearing are respectively provided with through holes through which the fixing components can be passed.

上述减速传动轴承中,该柔性内轴承的滚子为滚珠。In the above reduction transmission bearing, the rollers of the flexible inner bearing are balls.

上述减速传动轴承中,该刚性外轴承的滚子为滚柱,该刚性外轴承的各该滚子的轴心呈垂直角度交叉排列配置。In the above reduction transmission bearing, the rollers of the rigid outer bearing are rollers, and the axis centers of the rollers of the rigid outer bearing are arranged in a cross-arrangement at a vertical angle.

本发明的减速传动轴承,借由减速传动轴承的柔性内轴承及刚性外轴承直接形成齿差啮合的传动状态,使减速传动轴承具有简易的复合轴承啮合组成的结构,以达到内外齿更完全啮合传递动力,能够直接动力传动及整体构造更精简的功效。The deceleration transmission bearing of the present invention directly forms a transmission state of tooth differential meshing by the flexible inner bearing and rigid outer bearing of the deceleration transmission bearing, so that the deceleration transmission bearing has a simple structure composed of compound bearing meshing, so as to achieve more complete meshing of the inner and outer teeth Power transmission, direct power transmission and a more streamlined overall structure.

附图说明Description of drawings

以下配合附图详细说明本发明的特征及优点:The features and advantages of the present invention are described in detail below in conjunction with the accompanying drawings:

图1为本发明减速传动轴承的组合构造立体示意图。FIG. 1 is a schematic perspective view of the combined structure of the reduction drive bearing of the present invention.

图2为本发明减速传动轴承的分解构造立体示意图。FIG. 2 is a schematic perspective view of the exploded structure of the deceleration transmission bearing of the present invention.

图3为本发明减速传动轴承的另一分解构造立体示意图。FIG. 3 is a perspective view of another exploded structure of the reduction drive bearing of the present invention.

图4为本发明减速传动轴承的组合构造剖面示意图。FIG. 4 is a schematic cross-sectional view of the combined structure of the reduction drive bearing of the present invention.

图5为本发明减速传动轴承的组合构造前视示意图。FIG. 5 is a schematic front view of the combined structure of the reduction transmission bearing of the present invention.

附图中的符号说明:Description of symbols in the attached drawings:

10 柔性内轴承;11 外环;12 内环;13 滚子;14 外齿;15 轴向延伸环;16 径向法兰;161 穿孔;17 切槽;171 条形切槽;172 孔;18 弹性变形部;20 刚性外轴承;21 外环;211穿孔;22 内环;23 滚子;24 内齿。10 Flexible inner bearing; 11 Outer ring; 12 Inner ring; 13 Roller; 14 Outer teeth; 15 Axially extending ring; 16 Radial flange; 161 Perforation; Elastic deformation part; 20 rigid outer bearing; 21 outer ring; 211 perforation; 22 inner ring; 23 roller; 24 inner teeth.

具体实施方式Detailed ways

下面结合附图和具体实施例对本发明作进一步说明,但所举实施例不作为对本发明的限定。The present invention will be further described below with reference to the accompanying drawings and specific embodiments, but the embodiments are not intended to limit the present invention.

参阅图1、图2及图3所示,本发明的减速传动轴承是一种具有减速传动及承载动力输入轴或动力输出轴的轴承功能的减速传动轴承,其较佳的具体实施例主要包括:一柔性内轴承10及一刚性外轴承20,该柔性内轴承10与该刚性外轴承20都具有一外环11、21,一内环12、22,及设置在该柔性内轴承10的外环11、内环12之间的数个滚子13与设置在该刚性外轴承20内环22、外环21之间的数个滚子23,该柔性内轴承10的外环11的直径小于该刚性外轴承20的内环22的直径,使该柔性内轴承10与该刚性外轴承20彼此可转动地轴向套合在一起。Referring to FIG. 1, FIG. 2 and FIG. 3, the deceleration transmission bearing of the present invention is a deceleration transmission bearing with the functions of deceleration transmission and bearing the bearing of the power input shaft or the power output shaft, and its preferred specific embodiments mainly include: : a flexible inner bearing 10 and a rigid outer bearing 20, the flexible inner bearing 10 and the rigid outer bearing 20 both have an outer ring 11, 21, an inner ring 12, 22, and are arranged on the outer side of the flexible inner bearing 10 Several rollers 13 between the ring 11 and the inner ring 12 and several rollers 23 arranged between the inner ring 22 and the outer ring 21 of the rigid outer bearing 20, the diameter of the outer ring 11 of the flexible inner bearing 10 is smaller than The diameter of the inner ring 22 of the rigid outer bearing 20 enables the flexible inner bearing 10 and the rigid outer bearing 20 to be rotatably axially sleeved with each other.

参阅图2至图4所示,该柔性内轴承10的外环11及内环12为可挠性材料制成,该柔性内轴承10的外环11的外环面特别实施有一圈外齿14,该柔性内轴承10的一端实施有一轴向延伸环15,自该轴向延伸环15端部径向延伸有一径向法兰16;该轴向延伸环15设有数个切槽17,该切槽17较佳的实施例之一为沿着该轴向延伸环15的圆周方向延伸的条形切槽171,且条形切槽171的两端分别形成一孔172,借此使各该切槽17之间形成有连接该柔性内轴承10的外环11与该径向法兰16的弹性变形部18。Referring to FIG. 2 to FIG. 4 , the outer ring 11 and the inner ring 12 of the flexible inner bearing 10 are made of flexible materials, and the outer ring surface of the outer ring 11 of the flexible inner bearing 10 is specially implemented with a ring of outer teeth 14 , one end of the flexible inner bearing 10 is implemented with an axially extending ring 15, and a radial flange 16 radially extends from the end of the axially extending ring 15; One of the preferred embodiments of the groove 17 is a strip-shaped slot 171 extending along the circumferential direction of the axially extending ring 15, and two ends of the strip-shaped slot 171 are respectively formed with a hole 172, so that each An elastic deformation portion 18 connecting the outer ring 11 of the flexible inner bearing 10 and the radial flange 16 is formed between the grooves 17 .

参阅图2至图4所示,该刚性外轴承20的外环21及内环22为刚性材料制成,该刚性外轴承20的内环22的内环面的直径大于该柔性内轴承10外环11的外环面的直径,使该刚性外轴承20轴向套合于该柔性内轴承10外环面,该刚性外轴承20的内环面实施有一圈对应该外齿14的内齿24,借此通过设置在该柔性内轴承10之中的一谐波凸轮(未图标)的驱动,使该柔性内轴承10的外齿14与该刚性外轴承20的内齿24相啮合(如图5所示),且该柔性内轴承10的外齿14的齿数小于该刚性外轴承20的内齿24的齿数,进而达到减速传动的作用。2 to 4 , the outer ring 21 and the inner ring 22 of the rigid outer bearing 20 are made of rigid materials, and the diameter of the inner ring surface of the inner ring 22 of the rigid outer bearing 20 is larger than that of the flexible inner bearing 10 The diameter of the outer ring surface of the ring 11 enables the rigid outer bearing 20 to be axially sleeved on the outer ring surface of the flexible inner bearing 10. The inner ring surface of the rigid outer bearing 20 is implemented with a circle of inner teeth 24 corresponding to the outer teeth 14. , whereby the outer teeth 14 of the flexible inner bearing 10 are engaged with the inner teeth 24 of the rigid outer bearing 20 by the driving of a harmonic cam (not shown) arranged in the flexible inner bearing 10 (as shown in the figure). 5), and the number of teeth of the outer teeth 14 of the flexible inner bearing 10 is smaller than the number of teeth of the inner teeth 24 of the rigid outer bearing 20, thereby achieving the effect of reduction transmission.

再参阅图2至图4所示,该刚性外轴承20的外环21与该柔性内轴承10的径向法兰16分别设有能够穿设固定组件(螺丝等)的穿孔211、161以相互固定结合。该柔性内轴承10的滚子13为球形的滚珠,也可实施为平行排列的滚柱或滚针。该刚性外轴承20的滚子23较佳的实施为滚柱,且该刚性外轴承20的各该滚子23(滚柱)轴心呈垂直角度交叉排列配置,使该刚性外轴承20的外环21与内环22不会轴向脱离。Referring again to FIGS. 2 to 4 , the outer ring 21 of the rigid outer bearing 20 and the radial flange 16 of the flexible inner bearing 10 are respectively provided with through holes 211 and 161 through which fixing components (screws, etc.) can be inserted so as to communicate with each other. Fixed binding. The rollers 13 of the flexible inner bearing 10 are spherical balls, and can also be implemented as parallel-arranged rollers or needles. The rollers 23 of the rigid outer bearing 20 are preferably implemented as rollers, and the axes of the rollers 23 (rollers) of the rigid outer bearing 20 are arranged in a cross-arrangement at a vertical angle, so that the outer The ring 21 and the inner ring 22 are not axially disengaged.

本发明中的该柔性内轴承10是作为动力输入组件,该刚性外轴承20作为减速后的动力输出组件。其使用时参阅图4及图5所示,使动力输入轴带动谐波凸轮(未图示)转动,通过该柔性内轴承10的切槽17与弹性变形部18的构造,能够让该柔性内轴承10更易于被谐波凸轮撑开,进而使该柔性内轴承10的外齿14与该刚性外轴承20的内齿24完全啮合。且本发明中的该柔性内轴承10的外齿14的齿数小于该刚性外轴承20的内齿24的齿数,因此能够使该刚性外轴承20减速输出动力,达到高减速比及直接传动的效果。再者,本发明的整体构造更为精简,更有益于制造及组装的方便性。In the present invention, the flexible inner bearing 10 is used as a power input component, and the rigid outer bearing 20 is used as a power output component after deceleration. 4 and 5, the power input shaft drives the harmonic cam (not shown) to rotate. Through the structure of the slot 17 and the elastic deformation part 18 of the flexible inner bearing 10, the flexible inner bearing 10 can be made to rotate. The bearing 10 is more likely to be propped apart by the harmonic cam, thereby fully meshing the outer teeth 14 of the flexible inner bearing 10 with the inner teeth 24 of the rigid outer bearing 20 . In addition, the number of teeth of the outer teeth 14 of the flexible inner bearing 10 in the present invention is smaller than the number of teeth of the inner teeth 24 of the rigid outer bearing 20 , so the rigid outer bearing 20 can be decelerated to output power, and the effect of high reduction ratio and direct transmission can be achieved. . Furthermore, the overall structure of the present invention is more compact, which is more beneficial to the convenience of manufacture and assembly.

以上所述实施例仅是为充分说明本发明而所举的较佳的实施例,本发明的保护范围不限于此。本技术领域的技术人员在本发明的基础上所作的等同替代或变换,均在本发明的保护范围之内。本发明的保护范围以权利要求书为准。The above-mentioned embodiments are only preferred embodiments for fully illustrating the present invention, and the protection scope of the present invention is not limited thereto. Equivalent substitutions or transformations made by those skilled in the art on the basis of the present invention are all within the protection scope of the present invention. The protection scope of the present invention is subject to the claims.

Claims (6)

1.一种减速传动轴承,其特征在于,包括:彼此可转动地轴向套合在一起的一柔性内轴承及一刚性外轴承,该柔性内轴承及该刚性外轴承都具有一外环、一内环,及设置在该柔性内轴承的内、外环之间的数个滚子与设置在该刚性外轴承的内、外环之间的数个滚子;该柔性内轴承的外环的外环面具有一圈外齿,该柔性内轴承的外环的一端具有一轴向延伸环,自该轴向延伸环端部径向延伸有一径向法兰,该轴向延伸环设有数个切槽,各该切槽之间形成连接该柔性内轴承与该径向法兰的弹性变形部;该刚性外轴承的内环的内环面具有一圈内齿,该内齿与该柔性内轴承的外齿相啮合;以及该柔性内轴承的内环中嵌组一谐波凸轮,该谐波凸轮转动致使该柔性内轴承与刚性外轴承彼此间产生减速传动。1. A deceleration drive bearing, characterized in that it comprises: a flexible inner bearing and a rigid outer bearing that are rotatably axially sleeved together, the flexible inner bearing and the rigid outer bearing both have an outer ring, an inner ring, and several rollers arranged between the inner and outer rings of the flexible inner bearing and several rollers arranged between the inner and outer rings of the rigid outer bearing; the outer ring of the flexible inner bearing The outer ring surface of the flexible inner bearing has a ring of outer teeth, one end of the outer ring of the flexible inner bearing has an axially extending ring, and a radial flange radially extends from the end of the axially extending ring, and the axially extending ring is provided with several Each of the grooves forms an elastic deformation portion connecting the flexible inner bearing and the radial flange; the inner ring surface of the inner ring of the rigid outer bearing has a ring of inner teeth, and the inner teeth are connected to the flexible inner ring. The outer teeth of the inner bearing are meshed with each other; and a harmonic cam is embedded in the inner ring of the flexible inner bearing, and the rotation of the harmonic cam causes the flexible inner bearing and the rigid outer bearing to generate deceleration transmission with each other. 2.如权利要求1所述的减速传动轴承,其特征在于,其中该柔性内轴承的外齿的齿数小于该刚性外轴承的内齿的齿数。2 . The deceleration transmission bearing of claim 1 , wherein the number of teeth of the outer teeth of the flexible inner bearing is smaller than the number of teeth of the inner teeth of the rigid outer bearing. 3 . 3.如权利要求1所述的减速传动轴承,其特征在于,其中该切槽为沿着该轴向延伸环的圆周方向延伸的条形切槽,该条形切槽的两端分别形成一孔。3 . The deceleration transmission bearing of claim 1 , wherein the cut groove is a strip-shaped cut-out extending along the circumferential direction of the axially extending ring, and two ends of the strip-shaped cutout respectively form a hole. 4.如权利要求1所述的减速传动轴承,其特征在于,其中该刚性外轴承的外环与该径向法兰分别设有能够穿设固定组件的穿孔。4 . The deceleration transmission bearing as claimed in claim 1 , wherein the outer ring and the radial flange of the rigid outer bearing are respectively provided with through holes capable of passing through the fixing components. 5 . 5.如权利要求1所述的减速传动轴承,其特征在于,其中该柔性内轴承的滚子为滚珠。5. The deceleration transmission bearing of claim 1, wherein the rollers of the flexible inner bearing are balls. 6.如权利要求1所述的减速传动轴承,其特征在于,其中该刚性外轴承的滚子为滚柱,该刚性外轴承的各该滚子的轴心呈垂直角度交叉排列配置。6 . The deceleration transmission bearing as claimed in claim 1 , wherein the rollers of the rigid outer bearing are rollers, and the axes of the rollers of the rigid outer bearing are arranged to cross at a vertical angle. 7 .
CN201811504096.XA 2018-12-10 2018-12-10 reduction drive bearing Withdrawn CN111288077A (en)

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CN111604604A (en) * 2020-06-28 2020-09-01 安徽富信半导体科技有限公司 Forming equipment for processing semiconductor elements and method of using the same
CN112855761A (en) * 2021-02-09 2021-05-28 中山早稻田科技有限公司 Crossed roller bearing with toothed inner ring
WO2022012713A1 (en) * 2020-07-16 2022-01-20 Schaeffler Technologies AG & Co. KG Harmonic drive for a robot, and robot comprising a harmonic drive
EP4293253A1 (en) 2022-06-15 2023-12-20 Ovalo GmbH Harmonic drive transmission

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JPS60143244A (en) * 1983-12-29 1985-07-29 Mitsubishi Electric Corp Harmonic gear device
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111604604A (en) * 2020-06-28 2020-09-01 安徽富信半导体科技有限公司 Forming equipment for processing semiconductor elements and method of using the same
WO2022012713A1 (en) * 2020-07-16 2022-01-20 Schaeffler Technologies AG & Co. KG Harmonic drive for a robot, and robot comprising a harmonic drive
CN112855761A (en) * 2021-02-09 2021-05-28 中山早稻田科技有限公司 Crossed roller bearing with toothed inner ring
EP4293253A1 (en) 2022-06-15 2023-12-20 Ovalo GmbH Harmonic drive transmission

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Application publication date: 20200616