CN111237175A - A miniature piezoelectric pump - Google Patents

Abstract

The invention relates to the field of fluid transportation, in particular to a micro piezoelectric pump. A miniature piezoelectric pump, comprising a piezoelectric vibrator and a valve part, a pump cavity is formed between the piezoelectric vibrator and the valve part, and under the action of the piezoelectric vibrator, the fluid flows into the pump cavity through the valve part in one direction, and the pump cavity is The fluid in the pump flows to the outside of the pump through the valve part in one direction. The pump cavity is provided with a perturbation piece, and the perturbation piece has a through hole. The perturbation piece vibrates under the action of the piezoelectric vibrator, and the perturbation piece cooperates with the inner wall of the pump cavity to squeeze and discharge. bubble. By arranging a perturbation member in the pump cavity, the perturbation member vibrates under the driving of the piezoelectric vibrator, and there is a phase difference between the vibration of the perturbation member and the vibration of the piezoelectric vibrator. Due to the existence of the phase difference, the perturbation member will face the piezoelectric vibrator. movement, thereby forming a squeezing effect, which solves the technical problems of the micro piezoelectric pump in the prior art that the ability to discharge air bubbles is poor, the air bubbles are not easy to be discharged after gathering, and the reliability and stability are reduced.

Description

A miniature piezoelectric pump

technical field

The invention relates to the field of fluid transportation, in particular to a micro piezoelectric pump.

Background technique

Piezoelectric pump is a new type of fluid device that utilizes the inverse piezoelectric effect of piezoelectric ceramics and uses piezoelectric vibrators as drivers. It is widely used in biomedical, household appliances, portable testing equipment and other fields. With the continuous expansion of applications, the piezoelectric pump needs to be further miniaturized, and as the piezoelectric pump is further miniaturized, the problem of the piezoelectric pump being sensitive to air bubbles becomes more prominent. If air bubbles accumulate in the pump cavity, the output performance of the pump will be sharp. If it falls, it will even form a gas lock phenomenon that will make the pump lose its ability to work.

For example, the Chinese patent with the application number of CN02117352.4 discloses a high-frequency valve piezoelectric pump and a pump cavity design method thereof, and specifically discloses: the high-frequency valve piezoelectric pump includes a pump body, a piezoelectric vibrator holder, a fixed The piezoelectric vibrator, suction valve and discharge valve in the pump body cavity are used on the inner wall of the pump cavity to reduce the fluid transfer time in the pump cavity and reduce the compressible volume. Non-linear curve shape pump body, suction valve and discharge valve The valve adopts a "mountain"-shaped valve piece, and the suction valve piece and the discharge valve piece are fixed on the valve body where the suction valve and the discharge valve are located respectively by common technology, forming a "mountain"-shaped suction valve and discharge valve. The above application improves the output performance of the piezoelectric pump by optimizing the shape of the inner wall of the pump cavity, the structure of the valve body, etc., but the improvement of the ability to discharge air bubbles is not large, and the air bubbles are not easily discharged after gathering, which affects the reliability and stability of the micro piezoelectric pump. sex.

SUMMARY OF THE INVENTION

In order to solve the technical problems of the micro piezoelectric pump in the prior art that the ability to discharge air bubbles is poor, the air bubbles are not easily discharged after accumulation, and the reliability and stability are reduced, the present invention proposes a micro piezoelectric pump, which solves the above technical problems. The technical scheme of the present invention is as follows:

A miniature piezoelectric pump, comprising a piezoelectric vibrator and a valve portion, a pump cavity is formed between the piezoelectric vibrator and the valve portion, and under the action of the piezoelectric vibrator, fluid flows through the valve portion in one direction into the pump cavity, the fluid in the pump cavity flows to the outside of the pump through the valve part in one direction, a perturbation member is arranged in the pump cavity, a through hole is opened on the perturbation member, and the perturbation member is Vibrating under the action of the piezoelectric vibrator, the perturbation member cooperates with the inner wall of the pump cavity to squeeze and discharge air bubbles.

By arranging a perturbation member in the pump cavity, the perturbation member vibrates under the drive of the piezoelectric vibrator, and there is a phase difference between the vibration of the perturbation member and the vibration of the piezoelectric vibrator. Due to the existence of the phase difference, the perturbation member will face the piezoelectric vibrator. movement, thus forming a squeezing effect: when the piezoelectric vibrator moves towards the valve, the disturbing member moves away from the valve, and the two move closer to each other. The bubbles are extruded, and the bubbles flow out through the through holes on the perturbation piece. In this way, the air bubbles between the perturbation element and the piezoelectric vibrator will be basically discharged; when the piezoelectric vibrator moves away from the valve part, the perturbation element moves towards the valve part, and it will also gradually stick to the valve part from the surrounding, to drive out the air between the two. The air bubbles flow to the through holes on the perturbation element, and then the piezoelectric vibrator moves toward the valve part to discharge the air bubbles through the outflow port of the valve part. In this way, the air bubbles between the disturbing plate and the valve portion can be basically discharged, and the retention and accumulation of air bubbles in the dead zone around the pump chamber can be avoided.

According to an embodiment of the present invention, the valve part includes: a valve plate, the valve plate includes a valve plate body, the valve plate body is provided with two installation holes, and two valves are suspended in the two installation holes The valve body can reciprocate relative to the installation hole where it is located; the pressure plate, there are two pressure plates, each of the pressure plates is provided with a large flow hole and a small flow hole, and the two pressure plates are opposite to each other. Pressed on both sides of the valve plate, each of the mounting holes is in communication with the large flow hole and the small flow hole on both sides respectively, and the diameter of the valve body is smaller than the diameter of the large flow hole. and larger than the diameter of the small flow hole.

According to an embodiment of the present invention, the valve body includes a contact area and a holding area, the holding area is located on the inner circumference of the contact area, the holding area has at least one protrusion, and the back surface corresponding to the protrusion is concave , the two valve bodies are respectively arranged in the two mounting holes.

According to an embodiment of the present invention, the holding area has a first protrusion, and the first protrusion extends from a center point of the holding area to an edge of the holding area; or, the holding area has at least one protrusion. A second protrusion and at least one third protrusion, the protrusion directions of the second protrusion and the third protrusion are opposite, and the second protrusion and the third protrusion are along the circumferential direction or the diameter Alternately arranged.

According to an embodiment of the present invention, the perturbation member is disposed between the piezoelectric vibrator and the valve portion in layers, and the through holes on the perturbation member are arranged opposite to large and small flow holes on the adjacent platen.

According to an embodiment of the present invention, the through hole is in the shape of a belt with different diameters at both ends, a larger diameter end of the through hole corresponds to a large flow hole, and a smaller diameter end of the through hole corresponds to a small flow hole hole.

According to an embodiment of the present invention, grooves are formed on the inner wall of the pump chamber.

According to an embodiment of the present invention, a first groove is provided on the surface of the piezoelectric vibrator close to the valve portion and/or a second groove is provided on the surface of the valve portion close to the piezoelectric vibrator groove.

According to an embodiment of the present invention, the second groove is disposed between a large flow hole and a small flow hole on the pressure plate close to the piezoelectric vibrator, and the first groove is connected to the second groove. Slots are set relative to each other.

According to an embodiment of the present invention, the piezoelectric vibrator includes a stacked piezoelectric element and a substrate, the substrate is disposed close to the valve portion, and the perturbation member is a thin plate with a lower stiffness than the substrate.

Based on the above technical solutions, the technical effects that the present invention can achieve are:

1. The miniature piezoelectric pump of the present invention, by setting the perturbation member in the pump cavity, the perturbation member generates vibration under the driving of the piezoelectric vibrator, and there is a phase difference between the vibration of the perturbation member and the vibration of the piezoelectric vibrator, due to the phase difference. Existing, the perturbation member will move towards the piezoelectric vibrator, thus forming a squeezing effect: when the piezoelectric vibrator moves towards the valve, the perturbation member moves away from the valve, and the two are close to each other, and the perturbation member will gradually stick to the surrounding. Squeeze the vibrator to squeeze out the air bubbles between them, and the air bubbles flow out through the through holes on the perturbation element. In this way, the air bubbles between the perturbation element and the piezoelectric vibrator will be forced to flow to the through hole of the perturbation element, which is greatly beneficial for the air bubbles to be discharged from the pump; when the piezoelectric vibrator moves away from the valve part, the perturbation element moves toward the valve part, which will also be moved from the surrounding It starts to stick to the valve part gradually, and drives the air bubbles between the two to flow to the through hole on the perturbation element, and then the piezoelectric vibrator moves toward the valve part to discharge the air bubbles through the outflow port of the valve part. In this way, the air bubbles between the perturbation plate and the valve can be discharged, avoiding the accumulation of bubbles in the dead zone around the pump cavity; the vibration of the perturbation member will alternately discharge the bubbles in the chambers on both sides of the perturbation member. It increases the bubble discharge ability of the micro piezoelectric pump and reduces the number of bubbles in the pump chamber. The reciprocating vibration of the perturbation member plays a role of stirring, which will break the larger bubbles and hinder the fusion and growth of the bubbles, which further enhances the bubble discharge ability of the micro piezoelectric pump;

2. In the miniature piezoelectric pump of the present invention, the perturbation member is a thin plate with a lower rigidity than the base plate, so that the perturbation member can be more closely fitted with the walls on both sides of the pump cavity during the vibration of the piezoelectric vibrator, and can be discharged. Air bubbles in the dead zone around the pump chamber; grooves are set on the wall surface of the pump chamber, which can help to discharge air bubbles by working with the perturbation element;

3. The micro piezoelectric pump of the present invention includes a valve plate body by setting a valve plate, and two valve bodies are installed on the valve plate body, and the two valve bodies can be installed in two mounting holes on the valve plate body in a centrally symmetrical manner. It can also be installed in a non-centrally symmetrical form. The holding areas of the two valve bodies are provided with protrusions and the backs of the protrusions are concave. Compared with the flat structure of the valve body, the quality of the valve plate of the present application is unchanged, and the rigidity is increased. Deformation due to impact of fluid. In addition, the bulge structure of the holding area can be reasonably arranged, the holding area can be set to have a first bulge, or the second bulge and the third bulge with opposite bulge directions can be arranged, and the second bulge and the third bulge can be circumferential Alternately arranged in the radial direction or the radial direction, the above setting can increase the rigidity of the valve plate and prevent deformation; the valve plate is matched with the pressure plates on both sides, and the pressure plate is provided with a large flow hole and a small flow hole. The pressure plate is installed in reverse, and the two valve bodies on the valve plate cooperate with the large and small flow holes on the pressure plate to form a one-way inflow valve and a one-way outflow valve to control the one-way flow of the fluid.

Description of drawings

1 is a schematic structural diagram of a micro piezoelectric pump according to Embodiment 1 of the present invention;

Figure 2 is an exploded view of the micro piezoelectric pump;

3 is a cross-sectional view of a micro piezoelectric pump;

4 is a schematic structural diagram of a substrate;

Fig. 5 is the structural schematic diagram of valve part;

Figure 6 is a schematic structural diagram of a valve plate;

Fig. 7 is the first structural schematic diagram of the holding area of the valve sheet;

Fig. 8 is another alternative structural schematic diagram of the holding area of the valve plate;

Fig. 9 is another alternative structural schematic diagram of the holding area of the valve plate;

Figure 10-11 is the working state diagram of the micro piezoelectric pump;

12 is an exploded view of the micro piezoelectric pump according to the second embodiment of the present invention;

13 is an exploded view of the micro piezoelectric pump according to the third embodiment of the present invention;

14 is a cross-sectional view of the valve portion of the micro piezoelectric pump according to the fourth embodiment of the present invention;

In the figure: 1-piezoelectric vibrator; 11-piezoelectric element; 12-substrate; 121-fixing plate; 122-vibration transmission plate; 1221-first groove; 123-partition plate; 2-valve part; 21-valve 211-valve body; 2111-installation hole; 212-valve body; 2121-holding area; 21211-first protrusion; 21212-second protrusion; 21213-third protrusion; 2122-contact area; 213 -connecting part; 2131-first cantilever; 2132-second cantilever; 22-pressing plate; 221-large flow hole; 222-small flow hole; 223-second groove; 224-preload; 3-pump Cavity; 4-disturbing part; 41-through hole; 5-base; 51-flow hole; 6-bubble.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

It should be noted that the terminology used herein is for the purpose of describing specific embodiments only, and is not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural as well, furthermore, it is to be understood that when the terms "comprising" and/or "including" are used in this specification, it indicates that There are features, steps, operations, devices, components and/or combinations thereof.

The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the invention unless specifically stated otherwise. Meanwhile, it should be understood that, for the convenience of description, the dimensions of various parts shown in the accompanying drawings are not drawn in an actual proportional relationship. Techniques, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the authorized description. In all examples shown and discussed herein, any specific value should be construed as illustrative only and not as limiting. Accordingly, other examples of exemplary embodiments may have different values. It should be noted that like numerals and letters refer to like items in the following figures, so once an item is defined in one figure, it does not require further discussion in subsequent figures.

In the description of the present invention, it should be understood that the orientations indicated by orientation words such as "front, rear, top, bottom, left, right", "horizontal, vertical, vertical, horizontal" and "top, bottom" etc. Or the positional relationship is usually based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and these orientation words do not indicate or imply the indicated device or element unless otherwise stated. It must have a specific orientation or be constructed and operated in a specific orientation, so it cannot be construed as a limitation on the protection scope of the present invention; the orientation words "inside and outside" refer to the inside and outside relative to the outline of each component itself.

For ease of description, spatially relative terms, such as "on", "over", "on the surface", "above", etc., may be used herein to describe what is shown in the figures. The spatial positional relationship of one device or feature shown to other devices or features. It should be understood that spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or features would then be oriented "below" or "over" the other devices or features under other devices or constructions". Thus, the exemplary term "above" can encompass both an orientation of "above" and "below." The device may also be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptions used herein interpreted accordingly.

In addition, it should be noted that the use of words such as "first" and "second" to define components is only for the convenience of distinguishing corresponding components. Unless otherwise stated, the above words have no special meaning and therefore cannot be understood to limit the scope of protection of the present invention.

Example 1

As shown in FIG. 1-11 , this embodiment provides a micro piezoelectric pump, including a piezoelectric vibrator 1 and a valve part 2 , the piezoelectric vibrator 1 and the valve part 2 are arranged in layers, and a pump cavity is formed between them 3. An inflow valve structure and an outflow valve structure are formed on the valve part 2. The external fluid can flow into the pump cavity 3 through the inflow valve structure in one direction, and the fluid in the pump cavity 3 flows in one direction through the outflow valve structure. To the outside of the pump, the formation of fluid delivery.

The piezoelectric vibrator 1 includes a stacked piezoelectric element 11 and a substrate 12. The substrate 12 is arranged close to the valve portion 2, and a pump chamber 3 is formed between the substrate 12 and the valve portion 2. Further, the substrate 12 can be arranged in a multi-layer structure. 12 includes a stacking fixed plate 121 and a vibration transmission plate 122 , the piezoelectric element 11 is fixed on the fixed plate 121 , the vibration transmission plate 122 is arranged close to the valve part 2 , and a pump cavity 3 is formed between the vibration transmission plate 122 and the valve part 2 . Preferably, the base plate 12 further includes a partition plate 123 , the partition plate 123 is an annular structure with a through hole, and the partition plate 123 is located between the vibration transmission plate 122 and the valve portion 2 to separate the vibration transmission plate 122 and the valve portion 2 . Pump chamber 3.

The valve part 2 includes a valve plate 21 and two pressing plates 22 , and the two pressing plates 22 are pressed against the upper and lower sides of the valve plate 21 respectively. The valve plate 21 includes a valve plate body 211 and a valve body 212 . The valve plate body 211 is provided with two mounting holes 2111 , there are two valve bodies 212 , and the two valve bodies 212 are arranged in the two mounting holes 2111 .

Specifically, the mounting holes 2111 are through holes, and the two mounting holes 2111 are symmetrically arranged on the valve plate body 211 . Preferably, the mounting hole 2111 is circular. The two valve bodies 212 have the same structure. Taking one valve body 212 as an example, the valve body 212 can be divided into a holding area 2121 and a contact area 2122. The region 2121 has at least one protrusion, and the back surface corresponding to the protrusion is concave. As shown in FIG. 7 , the holding area 2121 is provided with a first protrusion 21211 , and the first protrusion 21211 extends from the center point of the holding area 2121 to the edge. Preferably, the valve body 212 has a symmetrical structure.

As another alternative technical solution for the protrusion structure on the holding area 2121, as shown in FIG. 8, at least one second protrusion 21212 and at least one third protrusion 21213 are provided on the holding area 2121. The second protrusion 21212 and The third protrusions 21213 have the same shape but opposite directions, and the second protrusions 21212 and the third protrusions 21213 are alternately arranged in the circumferential direction. Preferably, the second protrusions 21212 and the third protrusions 21213 are both elongated, and both the second protrusions 21212 and the third protrusions 21213 extend radially from the center point of the holding area 2121. The second protrusions 21212 and The third protrusions 21213 are alternately arranged in the circumferential direction.

As another alternative technical solution for the protrusion structure on the holding area 2121, as shown in FIG. 9, at least one second protrusion 21212 and at least one third protrusion 21213 are provided on the holding area 2121. The second protrusion 21212 and The third protrusions 21213 have the same shape but opposite directions, and the second protrusions 21212 and the third protrusions 21213 are alternately arranged in the radial direction. Preferably, both the second protrusions 21212 and the third protrusions 21213 are annular, and the adjacent second protrusions 21212 and the third protrusions 21213 are in contact with each other, and the second protrusions 21212 and the third protrusions 21213 are in the radial direction Alternate arrangement.

The valve body 212 is connected to the mounting hole 2111 through at least one cantilever arm, and is suspended in the mounting hole 2111 . Preferably, the valve body 212 is suspended in the installation hole 2111 through the connecting portion 213, the connecting portion 213 is annular, and at least two first cantilever arms 2131 extend from the inner circumference of the connecting portion 213 to connect with the outer circumference of the valve body 212, At least two second cantilevers 2132 extend from the outer circumference of the connecting portion 213 to be connected to the mounting holes 2111 . Preferably, the first cantilever 2131 and the second cantilever 2132 both extend radially and are evenly distributed along the circumferential direction, and the first cantilever 2131 and the second cantilever 2132 are arranged staggered in the radial direction. By disposing the first cantilever 2131 and the second cantilever 2132, the mass of the valve plate 21 can be reduced. In this embodiment, both the first cantilever 2131 and the second cantilever 2132 are three. Through the setting of the connecting portion 213, the valve body 212 can reciprocate relative to the mounting hole 2111 where it is located. Specifically, the valve body 212 can translate up and down relative to the mounting hole 2111 to open or close the fluid channel, so as to control the fluid flow. for the purpose of circulation.

The two pressing plates 22 are pressed against the upper and lower sides of the valve plate 21 respectively. The two pressure plates 22 have the same structure. Taking the structure of one pressure plate 22 as an example, the pressure plate 22 is provided with a large flow hole 221 and a small flow hole 222. The flow-through hole 221 and the small flow-through hole 222 may communicate with the two installation holes 2111 of the valve plate 21 respectively. Preferably, when the pressure plate 22 is pressed against the valve plate 21 , the large flow hole 221 and the small flow hole 222 on the pressure plate 22 can be coaxially communicated with the two mounting holes 2111 of the valve plate 21 respectively.

Specifically, the two pressing plates 22 are pressed against the upper and lower sides of the valve plate 21 in opposite directions, and the pressing plate 22 on the upper side is arranged close to the piezoelectric vibrator 1 , that is, the large overflow hole 221 , a mounting hole 2111 of the upper pressing plate 22 and the lower The small flow holes 222 of the pressure plate 22 are connected correspondingly, the small flow holes 222 and the other mounting hole 2111 of the upper pressure plate 22 and the large flow holes 221 of the lower pressure plate 22 are connected correspondingly, and the large flow holes 221 of the upper pressure plate 22 are connected correspondingly. , The valve body 212 in one installation hole 2111 and the small flow hole 222 of the lower pressure plate 22 together form the inflow valve structure; the small flow hole 222 of the upper pressure plate 22, the valve body 212 in the other installation hole 2111 and the lower flow hole 222 The large flow holes 221 of the pressing plate 22 together form an outflow valve structure. Preferably, the large flow-through hole 221 , the installation hole 2111 and the small flow-through hole 222 communicate with each other coaxially. Further preferably, the outer diameter of the valve body 212 is larger than the diameter of the small flow hole 222 and smaller than the diameter of the large flow hole 221 . When the two pressure plates 22 are pressed against both sides of the valve plate 21, the contact area 2122 of the valve body 212 is in contact with the plate surface of the pressure plate 22 where the small flow holes 222 are located, and the protrusions on the holding area 2121 of the valve body 212 can It protrudes to the side of the large flow hole 221 , or to the side of the small flow hole 222 . Preferably, the protrusion on the holding area 2121 of the valve body 212 extends at least partially into the small flow hole 222 . Preferably, the diameter of the small flow hole 222 is equal to the maximum outer diameter of the protrusion extending into the small flow hole 222 .

In order to help discharge the air bubbles 6 in the pump chamber 3 , the pump chamber 3 is provided with a perturbation member 4 , and the perturbation member 4 is provided with a through hole 41 , which will not hinder the flow of the fluid in the pump chamber 3 . Specifically, the disturbing member 4 is stacked between the piezoelectric vibrator 1 and the valve portion 2 , the outer end of the disturbing member 4 is fixed, and the through holes 41 are located in the large flow hole 221 and the small flow hole of the pressure plate 22 of the valve portion 2 . 222 to facilitate the flow of fluid in the pump chamber 3 . Preferably, the through hole 41 is in the shape of a belt, two ends of the through hole 41 have different diameters, the larger diameter end of the through hole 41 corresponds to the large flow hole 221 on the adjacent pressure plate 22, and the smaller diameter end of the through hole 41 corresponds to The small flow hole 222 on the adjacent pressure plate 22; further preferably, the diameter of the larger diameter end of the through hole 41 is the same as the diameter of the large flow hole 221, and the diameter of the smaller diameter end of the through hole 41 is the same as that of the small flow hole 222. pore size is the same. Preferably, the perturbation member 4 is in the shape of a plate, and the perturbation member 4 may be a thin plate with a lower rigidity than that of the substrate 12 ; further preferably, the perturbation member 4 may be a flexible film with lower rigidity. In this way, the perturbation plate 4 can be more closely attached to the walls on both sides of the pump cavity 3 during the vibrating process of the piezoelectric vibrator 1, and the air bubbles in the dead zone around the pump cavity can be discharged.

The side of the valve part 2 away from the piezoelectric vibrator 1 is also provided with a base 5, the base 5 is connected with another pressure plate 2 of the valve, and two flow holes 51 are provided on the base 5. When the base 5 is connected with the valve part 2 , the two flow holes 51 are respectively communicated with the large flow holes 221 and the small flow holes 222 on the connected pressure plate 22 . Preferably, the two flow holes 51 and the corresponding large flow holes 221 or the small flow holes 222 communicate with each other coaxially. Preferably, the diameter of the flow hole 51 is equal to the diameter of the large flow hole 221 .

Based on the above structure, the working principle of the micro piezoelectric pump of this embodiment is:

During the working process of the micro piezoelectric pump, the disturbance member 4 will vibrate with the piezoelectric vibrator 1 under the drive of the piezoelectric vibrator 1, but the vibration of the disturbance member 4 will have a certain phase difference with the vibration of the piezoelectric vibrator 1. In the presence of the phase difference, the perturbation member 4 will move towards the piezoelectric vibrator 1, thereby forming a squeezing effect. The squeezing works best when the phase difference reaches 180° under the appropriate frequency drive.

As shown in FIG. 10 , when the piezoelectric vibrator 1 moves downward, the disturbing member 4 moves upward, and the two are close to each other, and the disturbing member 4 will gradually adhere to the substrate 12 from all around, and squeeze out the air bubbles 6 between them. , the air bubble 6 passes through the through hole 41, and then flows out of the pump chamber 3 through the outflow valve structure. In this way, the air bubbles 6 between the disturbance member 4 and the base plate 12 are completely eliminated, and the accumulation of the air bubbles 6 in the dead zone around the pump chamber 3 is avoided.

As shown in FIG. 11 , when the piezoelectric vibrator 1 moves upward, the perturbing member 4 moves downward and approaches the pressure plate 22 , and will also gradually adhere to the pressure plate 22 from the periphery, driving the air bubbles 6 between them to the through hole 41 in the middle. flow. Next, the downward movement of the piezoelectric vibrator 1 will discharge the air bubble 6 in the middle through the outflow valve structure. In this way, the air bubbles between the disturbance member 4 and the pressing plate 22 will be completely discharged, and the accumulation of the air bubbles 6 in the dead zone around the pump chamber 3 is avoided.

The vibration of the perturbation member 4 will alternately discharge the bubbles in the chambers on both sides of the perturbation member 4 , which greatly increases the bubble discharge capability of the micro piezoelectric pump and reduces the number of air bubbles 6 in the pump chamber 3 . The reciprocating vibration of the perturbation member 4 plays the role of stirring, which will break the larger air bubbles 6 and hinder the fusion and growth of the air bubbles 6, which further enhances the ability of the micro piezoelectric pump to discharge air bubbles.

Embodiment 2

As shown in FIG. 12 , this embodiment is basically the same as the first embodiment, the only difference is that a groove is formed on the inner wall of the pump chamber 3 . In this embodiment, the groove is provided on the piezoelectric vibrator 1. Specifically, a first groove 1221 is formed on the surface of the vibration transmission plate 122 of the base plate 12 that is in contact with the fluid in the pump chamber 3, and the first groove 1221 passes through the first groove 1221. Matching the perturbation member 4 can enhance the discharge ability of air bubbles. Preferably, the first groove 1221 is provided in the center of the vibration transmission plate 122 .

Embodiment 3

As shown in FIG. 13 , this embodiment is basically the same as the first embodiment, the only difference is that a groove is formed on the inner wall of the pump chamber 3 . In this embodiment, the groove is provided on the valve part 2 . Specifically, a second groove 223 is formed on the surface of the pressure plate 22 close to the piezoelectric vibrator 1 which is in contact with the fluid in the pump chamber 3 , and the second groove 223 passes through the second groove 223 Matching the perturbation member 4 can enhance the discharge ability of air bubbles. Preferably, the second groove 223 is disposed between the large flow hole 221 and the small flow hole 222 .

Besides, the first groove 1221 and the second groove 223 may be provided at the same time. Preferably, the first groove 1221 and the second groove 223 are disposed opposite to each other.

Embodiment 4

As shown in FIG. 14 , the present embodiment is basically the same as the first embodiment, the only difference is that a pre-tightening member 223 is provided on the pressing plate 22 of this embodiment to provide a pre-tightening force to the valve body 212 . Specifically, the preloading member 223 is annular, and the preloading member 223 is disposed on the surface of the pressing plate 22 close to the valve body 212 and is disposed around the port of the small flow hole 222 . There are two preloading members 223 , which are arranged near the two small flow holes 222 to provide preloading force for the two valve bodies 212 respectively. The contact area 2122 of the valve body 212 is in contact with the preload 223 .

The embodiments of the present invention have been described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned embodiments, and within the scope of knowledge possessed by those of ordinary skill in the art, it can also be done without departing from the purpose of the present invention. various changes.

Claims (10)

1. A miniature piezoelectric pump, comprising a piezoelectric vibrator (1) and a valve portion (2), a pump cavity (3) is formed between the piezoelectric vibrator (1) and the valve portion (2), and a pump cavity (3) is formed between the piezoelectric vibrator (1) and the valve portion (2). Under the action of the piezoelectric vibrator (1), the fluid flows into the pump chamber (3) through the valve portion (2) in one direction, and the fluid in the pump chamber (3) passes through the valve portion (2). ) one-way flow to the outside of the pump, characterized in that a perturbation member (4) is arranged in the pump cavity (3), a through hole (41) is opened on the perturbation member (4), and the perturbation member (4) ) vibrates under the action of the piezoelectric vibrator (1), and the perturbation member (4) cooperates with the inner wall of the pump chamber (3) to squeeze and discharge air bubbles. 2. A micro piezoelectric pump according to claim 1, characterized in that, the valve part (2) comprises: A valve plate (21), the valve plate (21) includes a valve plate body (211), the valve plate body (211) is provided with two mounting holes (2111), and the two mounting holes (2111) are suspended in the two mounting holes (2111). There are two valve bodies (212), and the valve bodies (212) can reciprocate relative to the mounting holes (2111) where they are located; A pressure plate (22), there are two pressure plates (22), each of the pressure plates (22) is provided with a large flow hole (221) and a small flow hole (222), and the two pressure plates (22) Reversely press on both sides of the valve plate (21), each of the mounting holes (2111) is connected with the large flow hole (221) and the small flow hole (222) on both sides respectively. The diameter of the valve body (212) is smaller than the diameter of the large flow hole (221) and larger than the diameter of the small flow hole (222). 3 . The micro piezoelectric pump according to claim 2 , wherein the valve body ( 212 ) comprises a contact area ( 2122 ) and a holding area ( 2121 ), and the holding area ( 2121 ) is located in the On the inner circumference of the contact area (2122), the holding area (2121) has at least one protrusion, the back surface corresponding to the protrusion is concave, and the two valve bodies (212) are respectively arranged in the two mounting holes (2111). 4. A micro piezoelectric pump according to claim 3, characterized in that, the holding area (2121) has a first protrusion (21211), and the first protrusion (21211) is formed from the holding area (21211). The center point of the area (2121) extends toward the edge of the holding area (2121); or, the holding area (2121) has at least one second protrusion (21212) and at least one third protrusion (21213), so The bulge directions of the second protrusions (21212) and the third protrusions (21213) are opposite, and the second protrusions (21212) and the third protrusions (21213) alternate in the circumferential direction or the radial direction Arrange. 5. A micro piezoelectric pump according to any one of claims 2-4, wherein the disturbance member (4) is stacked on the piezoelectric vibrator (1) and the valve portion (2) ), the through holes (41) on the disturbing member (4) are arranged opposite to the large and small flow holes on the adjacent pressing plates (22). 6 . The micro piezoelectric pump according to claim 5 , wherein the through hole ( 41 ) is in the shape of a belt with different diameters at both ends, and the larger diameter of the through hole ( 41 ) corresponds to the end of the larger diameter. 7 . The large flow hole (221), the smaller diameter end of the through hole (41) corresponds to the small flow hole (222). 7 . The micro piezoelectric pump according to claim 1 , wherein a groove is formed on the inner wall of the pump cavity ( 3 ). 8 . 8. A micro piezoelectric pump according to claim 7, characterized in that a first groove (1221) and a first groove (1221) and /or a second groove (223) is provided on the surface of the valve portion (2) close to the piezoelectric vibrator (1). 9 . The micro piezoelectric pump according to claim 8 , wherein the second groove ( 223 ) is provided with a large overcurrent on the pressure plate ( 22 ) close to the piezoelectric vibrator ( 1 ). 10 . Between the hole (221) and the small flow hole (222), the first groove (1221) is arranged opposite to the second groove (223). 10 . The micro piezoelectric pump according to claim 1 , wherein the piezoelectric vibrator ( 1 ) comprises a piezoelectric element ( 11 ) and a substrate ( 12 ) arranged in layers, and the substrate ( 12 ) It is arranged close to the valve part (2), and the disturbance member (4) is a thin plate whose rigidity is smaller than that of the base plate (12).

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