CN111220138A - Fully-differential torsional double-tuning-fork MEMS gyroscope and working mode thereof - Google Patents
Fully-differential torsional double-tuning-fork MEMS gyroscope and working mode thereof Download PDFInfo
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- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
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Abstract
The invention provides a fully differential torsional pendulum type double tuning fork MEMS gyroscope, comprising: a base; the mass blocks are distributed along a straight line of the space; the upper side and the lower side of the mass blocks are supported at fixed support points through the supporting springs; the two groups of mass blocks are respectively connected with the corresponding coupling springs in the horizontal direction to form tuning fork harmonic oscillators, the tuning fork harmonic oscillators on the two sides and the corresponding supporting springs form torsion pendulum tuning forks on the two sides, and the two adjacent mass blocks of the torsion pendulum tuning forks on the two sides are directly connected; the plurality of mass blocks in the torsional pendulum tuning forks on the same side are respectively connected by adopting the balancing rods so as to inhibit the plurality of mass blocks from moving in the same direction in the vertical direction at the same moment, and the balancing rods are symmetrical up and down; corresponding methods of use are also provided.
Description
Technical Field
The invention belongs to the technical field of MEMS gyroscope structure design, and particularly relates to a structure of a fully differential torsional pendulum type double tuning fork MEMS gyroscope and a working mode thereof.
Background
the prior MEMS (Micro Electro Mechanical systems, Micro systems and Micro machines) gyroscope goes through three main development stages, namely, an ③ simple mass block spring simple harmonic vibration system with single mass, an ③ double-mass tuning fork resonance structure and an ③ four-mass double-tuning fork structure.
The simple-mass simple harmonic vibration gyro research originates from the 1990 s, has low precision, is eliminated by the industry and is not described any more.
The German Bosch company, which introduced SMG060 and other model vibratory wheel gyros before and after 2009, is a single vibratory wheel structure, and is detailed in a product data manual on a website' www.bosch-semiconductor. The wheel type gyroscope is equivalent to a double-mass single torsional pendulum structure, the linear motion momentum of the oscillator forms a tuning fork effect, the internal parts of the oscillator are mutually offset, and the structure only has the rotational inertia of torsional pendulum vibration to the external part and is coupled with the surrounding environment. Due to the existence of torsional pendulum moment inertia coupling, the stability of the harmonic oscillator is difficult to maintain under the influence of environmental interference factors such as temperature, impact, vibration, long-term reliability and the like, so that the accuracy limit of the single torsional pendulum structure is in the order of 1 degree/s-3600 degrees/h, and the requirement of high-end application occasions on the accuracy cannot be met.
The SAR500 type MEMS gyroscope and the STIM202 gyroscope are released by Norway sensor company in 2012, a double-mass block Butterfly wing type 'Butterfly fly' structure form is adopted, two shafts of the structure are respectively symmetrical in a horizontal plane, a base of the structure has a function of releasing stress, and a driving circuit and a detection circuit adopt closed-loop control. The butterfly wing type structure is two vibration wheel type structures for coupling vibration, the gyroscope adopts a negative stiffness effect to tune a driving mode and a detection mode, and simultaneously compensates orthogonal errors so as to solve the problem of external torsional pendulum vibration coupling of the harmonic oscillator, the precision is high, the noise is low, the stability is high, the impact resistance and the vibration resistance are high, the zero offset stability is improved to 0.5 degree/h, and the nonlinearity of a scale factor is reduced to 300 ppm.
In 2014, an article "Flat Is Not De: Current and Future Performance of Si-MEMS QuadrMass Gyro (QMG) System" 2014 IEEE/ION Position, Location and Navigation, pp252-258, published by Northrop Grimman and University of California, Irvine division A.A.Trusov, G.Atikyan, D.M.Rozelle, A.D.Meyer, S.A.Zotov, B.R.Simon, A.M.Shkel. The fully differential mode of the MEMS gyroscope is realized by adopting a 4-mass space uniform distribution mode for the first time, dynamic tuning can be realized, the energy dissipation of a structural substrate is greatly inhibited, and the precision of the MEMS gyroscope is improved by one order of magnitude.
Compared with foreign countries, the technology investment in the technical field is increased in recent years at home. 2011 Qinghua university reports a novel multi-axis self-suspension type micro-electrostatic gyroscope, which consists of a rotor without mechanical constraint, a rotating electrode for controlling the rotating speed of the rotor and a common electrode for realizing the electrostatic suspension of 5 degrees of freedom of the rotor.
In 2013, a supporting beam of the MEMS tuning fork gyroscope developed by university in southeast, driving and detecting capacitors are all U-shaped folding beams, and the driving and detecting capacitors are designed in a variable area mode.
In 2015, an MEMS tuning fork gyroscope is reported by Beijing university, a bipolar decoupling double-mass-block tuning fork structure is adopted, a left mass block and a right mass block are completely symmetrical, the size of a silicon structure layer is 5mm x 3mm, a variable-area differential push-pull type comb tooth structure is adopted for electrostatic driving, a variable-spacing type comb tooth capacitor structure is designed in the structure to adjust the driving and detecting frequency difference of the gyroscope, the bandwidth of the gyroscope is higher than 85Hz, and the zero-offset stability of the gyroscope is superior to 5 DEG/h.
In 2016, the university of Qinghua released a new type of center-supported four-mass gyroscope, in which four masses were symmetrically distributed around the circumference, the four masses vibrated in opposite phases and provided differential signal outputs, and 4Y-beams were used to adjust the mechanical vibration of the four masses to maintain their synchronism. The working mode of the gyroscope is similar to that of a hemispherical resonator gyroscope.
The MEMS gyroscope developed by the first research institute of aerospace in China adopts a double-mass block line vibration tuning fork type structure, the gyroscope structure realizes bipolar decoupling, the driving comb teeth adopt a variable area type design, the detection comb teeth adopt a variable interval type detection mode, the gyroscope adopts a gyroscope tube shell for vacuum packaging, and the Q value is about 3 ten thousand at normal temperature.
The MEMS gyroscope is an instrument for precisely testing weak Coriolis signals through vibration phenomena, and the improvement of the instrument precision mainly depends on whether a harmonic oscillator structure can isolate external interference quantity from the vibration characteristics of a core resonance structure as much as possible. The main instruments in the development process of the gyroscope are simply listed in the literature, from simple harmonic vibration of a single mass block, to local cancellation of vibration inertia of a simple tuning fork, to further cancellation of vibration inertia of a butterfly wing type double-torsion pendulum, to comprehensive cancellation of vibration inertia of 360 degrees of a four-mass framework, the development of the overall framework of the MEMS gyroscope is developed in nearly 40 years, the precision level of the MEMS gyroscope is continuously improved, the degree of cancellation of the vibration inertia of a harmonic oscillator is continuously improved, and the degree of isolation of external interference outside the harmonic oscillator is continuously deepened. The technology is developed to a four-mass framework proposed by University of California and Irvine division, and the instrument precision of the MEMS gyroscope can be improved to the order of 0.1 degree/h, but the MEMS gyroscope in the scheme has overlarge volume, the line motion offset distance spans the side length of a chip, the MEMS gyroscope is not suitable for application in many industrial occasions, and the improvement of the instrument precision still has a large space.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a fully differential torsional pendulum type double-tuning-fork MEMS gyroscope, wherein a fully differential torsional pendulum type double-tuning-fork MEMS gyroscope framework is adopted, a fully differential two-dimensional resonant structure is formed by a left torsional pendulum tuning fork structure and a right torsional pendulum tuning fork structure, any motion in the horizontal direction and the vertical direction or the direction in which the two torsional pendulum tuning fork structures are superposed in any proportion is tuning fork motion, namely the motion instantaneous total inertia at any external moment is always 0.
The invention aims to provide a fully differential torsional pendulum type double tuning fork MEMS (or microelectronic mechanical system, micro electromechanical system) gyroscope, which comprises:
a base;
a plurality of mass blocks distributed along a straight line of space;
the upper side and the lower side of the mass blocks are supported at fixed support points through the supporting springs;
the mass blocks are averagely divided into two symmetrical groups, the mass blocks in the torsional pendulum tuning forks on the same side are connected by the coupling springs in the horizontal direction, the two groups of mass blocks respectively form tuning fork harmonic oscillators with the corresponding coupling springs, the tuning fork harmonic oscillators on two sides and the corresponding supporting springs form torsional pendulum tuning forks on two sides, and the two adjacent mass blocks of the torsional pendulum tuning forks on two sides are directly connected, so that the motion direction and the motion magnitude of the two adjacent mass blocks of the torsional pendulum tuning forks on two sides at any moment are kept consistent;
the upper parts of the mass blocks in the torsional pendulum tuning forks on the same side are respectively connected by adopting the balance rods so as to inhibit the mass blocks from moving in the same direction in the vertical direction at the same moment, and the balance rods are symmetrical up and down; through reasonable arrangement of each structural component of the gyroscope, a tuning fork effect is formed in the horizontal direction and the vertical direction simultaneously, and a fully differential effect is achieved.
Preferably, the two masses distributed at the central position and adjacent to the twisted tuning forks at the two sides are connected by a rigid structure, so that the motion direction and the motion magnitude of the two masses at the central position at any moment are kept completely consistent.
Preferably, the balance bar is composed of a balance beam and a plurality of hinge points, wherein the hinge points include mass block hinge points and balance bar hinge points, the mass block hinge points are respectively connected with different mass blocks in the mass blocks of the torsional-pendulum tuning fork at the same side, and the balance bar hinge points fix the balance bars on the base.
Preferably, the plurality of masses are identical in size and shape; the fully differential torsional double tuning fork MEMS gyroscope is generally bilaterally symmetrical about a vertical center line, and the structure is generally vertically symmetrical about a horizontal center line.
Preferably, the plurality of masses comprises:
a first mass (m1), a second mass (m2), a third mass (m3) and a fourth mass (m4), the four masses (m1, m2, m3, m4) being distributed along a straight line of space, and the four masses (m1, m2, m3, m4) being identical in size and shape.
Preferably, the plurality of support springs includes:
first supporting spring (K)1) Second support spring (K)2) Third support spring (K)3) And a fourth supporting spring (K)4) Fifth supporting spring (K)5)、Sixth supporting spring (K)6) And a seventh supporting spring (K)7) And an eighth supporting spring (K)8) Wherein the upper and lower sides of the first mass (m1) are respectively supported by the first supporting spring (K)1) And the second supporting spring (K)2) The upper side and the lower side of the second mass block (m2) are respectively supported by the third supporting spring (K)3) And the fourth supporting spring (K)4) The upper side and the lower side of the third mass block (m3) are respectively supported by the fifth supporting spring (K)5) And the sixth supporting spring (K)6) The upper side and the lower side of the fourth mass block (m4) are respectively supported by a seventh supporting spring (K)7) And the eighth supporting spring (K)8) And the support is connected with the fixed support point.
Preferably, the plurality of coupling springs includes:
first coupling spring (K)01) And a second coupling spring (K)02) Horizontally, between the first mass (m1) and the second mass (m2) via a first coupling spring (K)01) A connection between the third mass (m3) and the fourth mass (m4) via a second coupling spring (K)02) A connection, the first and second masses (m1, m2) and a coupling spring (K)01) The tuning fork harmonic oscillator on the left side, the third mass (m3) and the fourth mass (m4) and a second coupling spring (K)02) And forming a tuning fork harmonic oscillator on the right side.
Preferably, the plurality of balance bars comprises:
first balance bar (L)1) A second balance bar (L)2) A third balance bar (L)3) And a fourth balance bar (L)4) The first mass block (m1) and the second mass block (m2) adopt a first balance rod (L) at the upper part1) Connected, lower with said second balance bar (L)2) Connected, the first balance bar (L)1) And said second balance bar (L)2) Inhibits the equidirectional movement of the first mass (m1) and the second mass (m2) in the vertical direction, only allows the first mass (m1)And said second mass (m2) move simultaneously upwards and downwards, respectively; the third mass (m3) and the fourth mass (m4) are connected via a third balance bar (L)3) Is connected, the lower part passes through the fourth balancing lever (L)4) Connected, the third balance bar (L)3) And said fourth balancing lever (L)4) -the co-directional movement of the third mass (m3) and the fourth mass (m4) in the vertical direction is inhibited, -only the third mass (m3) and the fourth mass (m4) are allowed to move simultaneously upwards and downwards, respectively.
The invention also aims to provide a working mode of the fully differential torsional pendulum type double tuning fork MEMS gyroscope, which comprises the following steps:
step 2, implementing driving mode motion under the driving of an external circuit, and forming a tuning fork effect in the vertical direction;
step 3, forcing the fully differential torsional pendulum type double tuning fork MEMS gyroscope to enter a detection mode to move by a forced driving force in the horizontal direction, and forming a tuning fork effect in the horizontal direction;
and 4, demodulating the two-dimensional vibration gyro effect of the sensitive structure of the fully differential torsional double-tuning-fork MEMS gyro by an external circuit, and calculating the intensity of the Coriolis effect by testing and detecting the vibration amplitude of the vibration mode by the external circuit so as to reversely deduce the input of the angular rate.
Preferably, the step 1 comprises: the first mass (m1), the second mass (m2), the first supporting spring (K)1) A second supporting spring (K)2) And a third supporting spring (K)3) And a fourth supporting spring (K)4) A first coupling spring (K)01) A first balance bar (L)1) And a second balance bar (L)2) Forming a left torsional pendulum tuning fork; the third mass (m3), the fourth mass (m4), the fifth supporting spring (K)5) And a sixth supporting spring (K)6) And a seventh supporting spring (K)7) And an eighth supporting spring (K)8) The second couplingSpring (K)02) A third balance bar (L)3) And a fourth balance bar (L)4) Forming a right torsional pendulum tuning fork;
the step 2 comprises the following steps: when the first mass m1 moves downwards, due to the first balance bar L1And a second balance bar L2Forces the second mass m2 to move upwards; the direct or rigid structural connection of the second mass m2 and the third mass m3 causes the third mass m3 to move upwards in synchronism with the second mass m 2; due to the third balance bar L3And a fourth balance bar L4The fourth mass m4 is forced to move downwards at the speed opposite to the same direction of the third mass m3 and the fourth mass m4, the second mass m2 and the third mass m3 move upwards while the first mass m1 and the fourth mass m4 move downwards, the speed is the same and the direction is opposite, the total momentum of the whole structure is always kept at 0, and a tuning fork effect in the vertical direction is formed;
the step 3 comprises the following steps: when the first mass m1 moves to the right, the second mass m2 moves to the left due to the effect of the simple harmonic vibration of the left tuning fork, the rigid connection between the second mass m2 and the third mass m3 causes the third mass m3 and the second mass m2 to move to the left synchronously, and due to the effect of the simple harmonic vibration of the right tuning fork, the fourth mass m4 is forced to move to the right at the same speed and in the opposite direction. While the first mass m1 and the fourth mass m4 move rightwards, the second mass m2 and the third mass m3 move leftwards, the speeds are the same and opposite, and therefore the total momentum of the fully differential torsional pendulum type double tuning fork MEMS gyroscope structure is always kept to be 0, and a tuning fork effect in the horizontal direction is formed.
The invention has the beneficial effects that:
the fully-differential torsional double-tuning-fork MEMS gyroscope structure is bilaterally symmetrical about a vertical central line, is vertically symmetrical about a horizontal central line, is a fully-differential two-dimensional resonant structure formed by a left fully-symmetric torsional tuning fork structure and a right fully-symmetric torsional tuning fork structure, and has the advantages that any motion in the horizontal direction and the vertical direction or in the direction in which the two are superposed in any proportion is always 0 to the external total inertia, so that the 360-degree all-directional vibration decoupling of the MEMS gyroscope in the plane of the surrounding environment is realized, the interference of typical interference quantities such as temperature, instrument installation stress, environmental impact, vibration, long-term creep deformation and the like on the measurement precision of the gyroscope is comprehensively and effectively inhibited, and the high-precision MEMS gyroscope is improved to be less than or.
The above and other objects, advantages and features of the present invention will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof, taken in conjunction with the accompanying drawings.
Brief description of the drawings
Some specific embodiments of the invention will be described in detail hereinafter, by way of illustration and not limitation, with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. The objects and features of the present invention will become more apparent in view of the following description taken in conjunction with the accompanying drawings, in which:
fig. 1 is an overall structure diagram of a fully differential torsional pendulum type double tuning fork MEMS gyroscope architecture according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a torsional pendulum type single tuning fork according to an embodiment of the present invention;
FIG. 3 is a schematic illustration of a balance bar configuration according to an embodiment of the present invention;
fig. 4 is a schematic diagram of a torsional pendulum type single tuning fork driving torsional pendulum vibration mode according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a torsional pendulum type single tuning fork detection mode according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a fully differential torsional double tuning fork MEMS gyroscope driving a double torsional pendulum tuning fork mode according to an embodiment of the present invention;
fig. 7 is a schematic diagram of a fully differential torsional pendulum type twin tuning fork MEMS gyroscope to detect tuning fork mode according to an embodiment of the present invention.
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings, but the present invention is not limited thereto.
The fully differential torsional pendulum type double tuning fork MEMS (or micro-electro-mechanical system, micro-electro-mechanical system) gyroscope of the invention mainly comprises: the balance weight comprises a base, a plurality of masses, a plurality of supporting springs, a plurality of coupling springs and a plurality of balance rods.
Wherein the plurality of masses are distributed along a straight line in space. Optionally, the masses are identical in size and shape. The upper side and the lower side of the mass blocks are supported at fixed support points through a plurality of supporting springs. Optionally, the number of support springs is greater than the number of masses. The mass blocks are averagely divided into two symmetrical groups, the mass blocks in the torsional pendulum tuning forks on the same side are connected by the coupling springs in the horizontal direction, the two groups of mass blocks respectively form tuning fork harmonic oscillators with the corresponding coupling springs, the tuning fork harmonic oscillators on the two sides and the corresponding supporting springs form torsional pendulum tuning forks on the two sides, and the two adjacent mass blocks of the torsional pendulum tuning forks on the two sides are directly connected, so that the motion direction and the motion size of the two adjacent mass blocks of the torsional pendulum tuning forks on the two sides at any moment are kept consistent. The plurality of mass blocks in the torsional pendulum tuning forks on the same side are respectively connected by adopting the balance rods to inhibit the plurality of mass blocks from moving in the same direction in the vertical direction at the same moment, and the balance rods are symmetrical up and down. Optionally, the upper parts of the plurality of masses in the twisted tuning forks on the same side are respectively connected by using a balance rod. According to the fully differential torsional double-tuning-fork MEMS gyroscope disclosed by the invention, the tuning fork effect is simultaneously formed in the horizontal direction and the vertical direction through reasonable arrangement of all structural components of the gyroscope, so that the fully differential effect is realized.
In some embodiments of the present invention, two masses distributed at the central position and adjacent to each other are rigidly connected to each other, so that the motion direction and motion magnitude of the two masses at the central position at any time are kept identical.
In some embodiments of the present invention, the balance bar is composed of a balance beam and a plurality of hinge points, wherein the hinge points include mass hinge points and balance bar hinge points, the mass hinge points are respectively connected to different mass blocks of the plurality of mass blocks of the same torsional pendulum tuning fork, and the balance bar hinge points fix the plurality of balance bars on the base.
In some embodiments of the present invention, the fully differential twisted pair tuning fork MEMS gyroscope is generally left-right symmetric about a vertical centerline, and the structure is generally up-down symmetric about a horizontal centerline.
In some embodiments of the present invention, the fully differential twisted pair tuning fork MEMS gyroscope architecture of the present embodiment is shown in fig. 1, and the fully differential twisted pair tuning fork MEMS (or called micro-electro-mechanical system, micro-electro-mechanical system) gyroscope includes:
a base;
four quality pieces, four quality pieces distribute along a straight line in space, and the size and the shape of four quality pieces are identical completely, and wherein a plurality of quality pieces include: the mass damper comprises a first mass block m1, a second mass block m2, a third mass block m3 and a fourth mass block m4, wherein the four mass blocks m1, m2, m3 and m4 are distributed along a straight line of a space, and the sizes and the shapes of the four mass blocks m1, m2, m3 and m4 are completely consistent;
eight supporting spring, the upper and lower both sides of four quality pieces are supported at the fixed fulcrum through eight supporting spring, and eight supporting spring's quantity is the twice of quality piece quantity, and wherein eight supporting spring include: first support spring K1Second support spring K2Third support spring K3And a fourth supporting spring K4Fifth supporting spring K5And a sixth supporting spring K6And a seventh supporting spring K7And an eighth supporting spring K8Wherein the upper and lower sides of the first mass m1 are respectively provided with a first supporting spring K1And a second supporting spring K2The upper side and the lower side of the second mass block m2 are respectively provided with a third supporting spring K3And a fourth supporting spring K4Supported and connected with the fixed support point, the upper side and the lower side of the third mass block m3 are respectively provided with a fifth supporting spring K5And a sixth supporting spring K6The upper side and the lower side of the fourth mass block m4 are respectively provided with a seventh supporting spring K7And an eighth supporting spring K8Supporting and connecting with the fixed support point;
the four mass blocks are averagely divided into two symmetrical groups, the two mass blocks in the torsional pendulum tuning fork at the same side are connected by the coupling springs in the horizontal direction, and the two mass blocks are divided into two groupsDo not form the tuning fork harmonic oscillator with corresponding coupling spring, both sides tuning fork harmonic oscillator forms both sides torsion pendulum tuning fork with corresponding supporting spring, and direct connection between two adjacent quality pieces of both sides torsion pendulum tuning fork guarantees that the motion direction and the motion size of two adjacent quality pieces of both sides torsion pendulum tuning fork anytime keep strict unanimous, and wherein, two coupling springs include: first coupling spring K01And a second coupling spring K02Horizontally, the first mass m1 and the second mass m2 are connected by a first coupling spring K01The third mass m3 and the fourth mass m4 are connected through a second coupling spring K02A first mass m1 and a second mass m2 and a coupling spring K01A tuning fork harmonic oscillator, a third mass m3, a fourth mass m4 and a second coupling spring K02The tuning fork harmonic oscillators on the right side are formed, and the first mass block m1 or the second mass block m2 distributed at the central position and the third mass block m3 or the fourth mass block m4 distributed at the central position are directly connected or connected through a rigid structure, so that the motion direction and the motion size of the two mass blocks located at the central position at any moment are kept completely consistent;
four balancing poles, two mass block upper portions in same one side torsional pendulum tuning fork adopt two balancing poles to connect respectively in order to restrain two mass blocks at same moment in the same direction motion on vertical direction, balancing pole longitudinal symmetry, wherein a plurality of balancing poles include: first balance bar L1A second balance bar L2A third balance bar L3And a fourth balance bar L4The upper parts of the first mass m1 and the second mass m2 pass through the first balance bar L1Connected, the lower part passing through a second balance bar L2Connected, a first balance bar L1And a second balance bar L2The first mass m1 and the second mass m2 are restrained from moving in the same direction in the vertical direction, and only the first mass m1 and the second mass m2 are allowed to move upward and downward at the same time, respectively; the upper parts of the third mass m3 and the fourth mass m4 adopt a third balance rod L3Connected, lower, by a fourth balance bar L4Connecting, third balance bar L3And a fourth balance bar L4Inhibit the thirdThe masses m3 and m4 move in the same direction in the vertical direction, allowing only the third mass m3 and the fourth mass m4 to move simultaneously upwards and downwards, respectively.
In the fully differential torsional double tuning fork MEMS gyroscope structure of this embodiment, four mass blocks are distributed on a horizontal straight line and are composed of two identical single torsional pendulum structures as shown in fig. 2. As shown in fig. 2, each single torsional pendulum structure can realize the function of the MEMS gyroscope, but the single torsional pendulum structure still has torsional pendulum vibration coupling between the vertical direction and the structural substrate, so that the torsional pendulum vibration couplings between the left and right torsional pendulum structures and the substrate are opposite in magnitude and direction and cancel each other out through the double torsional pendulum structure, thereby realizing the decoupling of all vibration momentum to the external environment.
The working principle of the single torsional pendulum structure shown in fig. 2 is that the measurement of the angular rate input in the direction perpendicular to the paper can be achieved by the torsional pendulum vibration mode shown in fig. 4 and the detection vibration mode shown in fig. 5. Torsional vibration mode is shown in FIG. 4 due to the first balance bar L1And a second balance bar L2The vibration speeds of the first mass m1 and the second mass m2 in the vertical direction are always kept equal and opposite, so that the sum of the linear motion inertia of the simple torsional pendulum structure is 0. Therefore, the single torsional pendulum structure has the function of a gyroscope, only the torsional inertia generated by the torsional pendulum vibration mode in the vertical direction cannot realize vibration decoupling with the surrounding ring, the interference source interferes the testing precision of the gyroscope by influencing the torsional pendulum vibration stability, and in order to solve the problem, a fully differential torsional pendulum double-tuning-fork structure is introduced as shown in fig. 1.
Such as the balance bar configuration shown in fig. 3. In this embodiment, the balance bar Lx, wherein x represents 1-4 arbitrary corner marks, is composed of a balance Beam, a hinge point a, a hinge point B, and a hinge point C, as shown in fig. 3, the hinge point a is connected with one mass block, the hinge point B is connected with another mass block, and the balance bar Lx is fixed on the base through the hinge point C, for example, the balance bar L1The hinge point A is connected with a mass m1, and a balance bar L1The hinge point B is connected with a mass m2, and a balance bar L1The twisting fulcrum C is connected with the fixed base of the structure(ii) a Balance bar L2With the balance bar L1The upper part and the lower part are symmetrical; balance bar L3The hinge point A is connected with a mass m3, and a balance bar L3The hinge point B is connected with a mass m4, and a balance bar L3The twisting fulcrum C is connected with a fixed base of the structure; balance bar L4With the balance bar L3Is symmetrical up and down.
First balance bar L1And a second balance bar L2The two mass blocks on the left side and the right side of the two balancing rods are limited in motion trail, the mass block on the right side can only move downwards when the mass block on the left side moves upwards, and the motion trail of the two mass blocks in the vertical direction can only exist in a differential motion mode. The total inertia of the mass block along the linear motion in the vertical direction is always kept to be 0. However, when M1 moves upwards and M2 moves downwards, the motion tracks are not on the same straight line, so that the torsional inertia around the geometric center of the structure is generated, and the torsional inertia is coupled with the vibration of the base of the structure.
As shown in fig. 5, in the torsional single tuning fork detection mode of this embodiment, the first mass m1 moves while the second mass m2 moves in opposite directions at the same speed, the motion trajectories of the two masses are on a straight line, and the linear motion inertias cancel each other out while no rotational inertia is generated. Therefore, any vibration information of the mode can not be conducted to the outside, and external environmental interference such as temperature, stress, impact and the like can not influence the torsional single tuning fork resonance mode. Under the working state, the external circuit of the gyroscope controls the single torsional pendulum structure to generate the driving mode vibration shown in fig. 4, so that the mass block generates the vibration in the vertical direction to generate the stable motion speed. When an angular velocity vertical to the paper surface is input, the mass block generates an inertial acceleration in the horizontal direction due to the Coriolis effect, as shown in formula (1):
where Ω denotes the angular rate input, ac1Representing the inertial acceleration, v, of the first mass m1 in the horizontal direction1Indicates the first qualityMoving speed of gauge block m1, ac2Representing the inertial acceleration, v, of the second mass m2 in the horizontal direction2Representing the speed of movement of the second mass m 2. The inertial forced driving force generated by the two masses m1 and m2 in the horizontal direction is thus represented by the following equation (2):
wherein m is1Representing the mass, F, of the first mass m1c1The inertial forced driving force generated to the first mass block in the horizontal direction is represented; m is2Representing the mass, F, of the second mass m2c2The driving force is forced from the inertia generated to the second mass in the horizontal direction.
Since the speeds of the two masses m1 and m2 in the driving mode are equal and opposite, and the masses m1 and m2 of the two masses are identical, the generated forced driving forces in the horizontal direction are also equal and opposite, as shown in formula (3):
Fc1＝-Fc2(3)
this horizontal forced driving force forces the twisted single fork structure of fig. 2 to produce the detected vibration mode as shown in fig. 5. The servo circuit of the fully differential torsional double tuning fork MEMS gyroscope is used for demodulating the two-dimensional vibration gyro effect of a sensitive structure, calculating the strength of the Coriolis effect and reversely deducing the magnitude of angular rate input. According to the structural analysis and the working property analysis of the fully differential torsional double tuning fork MEMS gyroscope of the embodiment, the servo circuit comprises a power supply, a front C/V circuit, a driving closed loop circuit, a driving shaft amplitude control closed loop circuit and a gyro effect demodulation circuit, wherein the gyro effect demodulation circuit reversely deduces the size of an angular rate input omega through testing and detecting the vibration amplitude of a vibration mode. Since the servo circuit portion can be combined with a conventional gyro demodulation circuit structure well known in the art, it is not described herein in detail.
The second mass m2 and the third mass m3 which are distributed at the central position are directly connected together or connected together by a rigid structure, so that the moving direction and the moving size of the two masses at any moment are kept strictly consistent.
The structural principle of the fully differential torsional pendulum type double tuning fork MEMS gyroscope of the embodiment is as follows:
a first mass m1, a second mass m2, a first supporting spring K1A second supporting spring K2A third supporting spring K3And a fourth supporting spring K4A first coupling spring K01First balance bar L1And a second balance bar L2Forming a left torsional pendulum tuning fork;
a third mass m3, a fourth mass m4, a fifth supporting spring K5And a sixth supporting spring K6And a seventh supporting spring K7And an eighth supporting spring K8A second coupling spring K02A third balance bar L3And a fourth balance bar L4To form a right torsional pendulum tuning fork.
The working process of the fully differential torsional double tuning fork MEMS gyroscope of the embodiment is as follows:
s1, mounting a plurality of mass blocks, a plurality of supporting springs, a plurality of coupling springs and a plurality of balance rods, and correspondingly forming torsion pendulum tuning forks with symmetrical two sides;
s2, performing a driving mode motion under the driving of an external circuit to form a tuning fork effect in the vertical direction, performing the driving mode motion as shown in fig. 6 to form a tuning fork effect in the vertical direction: when the first mass m1 moves downwards, due to the first balance bar L1And a second balance bar L2Forces the second mass m2 to move upwards; the direct or rigid structural connection of the second mass m2 and the third mass m3 causes the third mass m3 to move upwards in synchronism with the second mass m 2; due to the third balance bar L3And a fourth balance bar L4By action of which the fourth mass m4 is forced to move downwards with a speed opposite to the same direction as the third mass m3 and the fourth mass m 4. Therefore, the first mass m1 and the fourth mass m4 move downwards at the same time that the second mass m2 and the third mass m3 move upwards, the speed is the same, the speed is opposite, the total momentum of the whole structure is always kept to be 0, and a vertical direction is formedA directional tuning fork effect;
s3, forcing the fully differential twisted twin tuning fork MEMS gyroscope to enter the detection mode motion by the forced driving force in the horizontal direction, forming the tuning fork effect in the horizontal direction, implementing the detection mode motion as shown in fig. 7, thereby forming the tuning fork effect in the horizontal direction: the first mass m1 and the second mass m2 are connected through a first coupling spring K01Connecting the first mass m1 and the second mass m2 with the first coupling spring K01The tuning fork harmonic oscillator on the left side, the third mass m3 and the fourth mass m4 are formed by a second coupling spring K02Connecting; a third mass m3 and a fourth mass m4 and a second coupling spring K02Forming a tuning fork harmonic oscillator on the right side; when the first mass m1 moves to the right, the second mass m2 moves to the left due to the effect of the simple harmonic vibration of the left tuning fork, the rigid connection between the second mass m2 and the third mass m3 causes the third mass m3 and the second mass m2 to move to the left synchronously, and due to the effect of the simple harmonic vibration of the right tuning fork, the fourth mass m4 is forced to move to the right at the same speed and in the opposite direction. While the first mass block m1 and the fourth mass block m4 move rightwards, the second mass block m2 and the third mass block m3 move leftwards, the speeds are the same and the directions are opposite, so that the total momentum of the fully differential torsional pendulum type double tuning fork MEMS gyroscope structure is always kept at 0, and a tuning fork effect in the horizontal direction is formed;
s4, demodulating the two-dimensional vibration gyro effect of the sensitive structure of the fully differential torsional double-tuning-fork MEMS gyro through an external circuit, calculating the intensity of the Coriolis effect through testing and detecting the vibration amplitude of the vibration mode by the external circuit, and reversely deducing the input angular rate, wherein the external circuit comprises a power supply, a front C/V circuit, a driving closed-loop circuit, a driving shaft amplitude control closed-loop circuit and a gyro effect demodulation circuit.
The fully-differential torsional double-tuning-fork MEMS gyroscope framework of the embodiment is generally bilaterally symmetrical about a vertical center line, the whole structure is vertically symmetrical about a horizontal center line, a fully-differential two-dimensional resonant structure is formed by the left and right fully-symmetrical torsional tuning fork structures, any motion in the horizontal direction and the vertical direction or in the direction in which the two are superposed in any proportion is tuning fork motion, namely the motion instantaneous total inertia at any external time is always 0, 360-degree all-around vibration decoupling of the MEMS gyroscope to the surrounding environment in the plane is realized, the interference of typical interference quantities such as temperature, instrument installation stress, environmental impact, vibration, long-term creep deformation and the like to the gyroscope measurement precision is comprehensively and effectively inhibited, and the high-precision MEMS gyroscope is a basic technology that the measurement precision is improved to be less than or equal to 1 degree.
The technical solutions provided by the embodiments of the present invention are described in detail above, and the principles and embodiments of the present invention are explained herein by using specific examples, and the descriptions of the embodiments are only used to help understanding the principles of the embodiments of the present invention; meanwhile, a person skilled in the art may change the embodiments and the application scope according to the embodiments of the present invention, and in summary, the content of the present description should not be construed as limiting the present invention.
Claims (10)
1. A fully differential torsional pendulum type double tuning fork MEMS gyroscope is characterized by comprising:
a base;
a plurality of mass blocks distributed along a straight line of space;
the upper side and the lower side of the mass blocks are supported at fixed support points through the supporting springs;
the mass blocks are averagely divided into two symmetrical groups, the mass blocks in the same group are connected by the coupling springs in the horizontal direction, the two groups of mass blocks and the corresponding coupling springs form tuning fork harmonic oscillators respectively, the tuning fork harmonic oscillators on two sides and the corresponding supporting springs form torsional pendulum tuning forks on two sides, and the two adjacent mass blocks of the torsional pendulum tuning forks on two sides are directly connected, so that the motion direction and the motion size of the two adjacent mass blocks of the torsional pendulum tuning forks on two sides at any moment are kept consistent;
the plurality of mass blocks in the same torsional pendulum tuning fork are connected through the balance rods respectively to restrain the plurality of mass blocks from moving in the same direction in the vertical direction at the same moment, and the balance rods are symmetrical up and down.
2. The fully differential twisted pair tuning fork MEMS gyroscope of claim 1, wherein: two masses distributed at the central position and adjacent to the torsional tuning forks at two sides are connected by adopting a rigid structure, so that the motion direction and the motion magnitude of the two masses at the central position at any moment are kept completely consistent.
3. The fully differential twisted pair tuning fork MEMS gyroscope of claim 1, wherein: the balance rod is composed of a balance beam and a plurality of hinge points, wherein the hinge points comprise mass block hinge points and balance rod hinge points, the mass block hinge points are respectively connected with different mass blocks in a plurality of mass blocks of the same torsional pendulum tuning fork, and the balance rod hinge points fix the balance rods on the base.
4. The fully differential twisted pair tuning fork MEMS gyroscope of claim 1, wherein: the sizes and the shapes of the plurality of mass blocks are completely consistent; the fully differential torsional double tuning fork MEMS gyroscope is generally bilaterally symmetrical about a vertical center line, and the structure is generally vertically symmetrical about a horizontal center line.
5. The fully differential twisted pair tuning fork MEMS gyroscope of claim 1, wherein: the plurality of masses comprises:
a first mass (m1), a second mass (m2), a third mass (m3) and a fourth mass (m4), the four masses (m1, m2, m3, m4) being distributed along a straight line of space, and the four masses (m1, m2, m3, m4) being identical in size and shape.
6. The fully differential twisted pair-tuning-fork MEMS gyroscope of claim 5, wherein: the plurality of support springs includes:
first supporting spring (K)1) Second support spring (K)2) Third support spring (K)3) And a fourth supporting spring (K)4) Fifth supporting spring (K)5) And a sixth supporting spring (K)6) And a seventh supporting spring (K)7) And an eighth supporting spring (K)8) Wherein the upper and lower sides of the first mass (m1) are respectively supported by the first supporting spring (K)1) And the second supporting spring (K)2) The upper side and the lower side of the second mass block (m2) are respectively supported by the third supporting spring (K)3) And the fourth supporting spring (K)4) The upper side and the lower side of the third mass block (m3) are respectively supported by the fifth supporting spring (K)5) And the sixth supporting spring (K)6) The upper side and the lower side of the fourth mass block (m4) are respectively supported by a seventh supporting spring (K)7) And the eighth supporting spring (K)8) And the support is connected with the fixed support point.
7. The fully differential twisted pair-tuning-fork MEMS gyroscope of claim 5, wherein: the plurality of coupling springs includes:
first coupling spring (K)01) And a second coupling spring (K)02) Horizontally, between the first mass (m1) and the second mass (m2) via a first coupling spring (K)01) A connection between the third mass (m3) and the fourth mass (m4) via a second coupling spring (K)02) A connection, the first and second masses (m1, m2) and a coupling spring (K)01) The tuning fork harmonic oscillator on the left side, the third mass (m3) and the fourth mass (m4) and a second coupling spring (K)02) And forming a tuning fork harmonic oscillator on the right side.
8. The fully differential twisted pair-tuning-fork MEMS gyroscope of claim 5, wherein: the plurality of balance bars comprises:
first balance bar (L)1) A second balance bar (L)2) A third balance bar (L)3) And a fourth balance bar (L)4) Said first mass (m1) andthe upper part of the second mass block (m2) adopts a first balance rod (L)1) Connected, lower with said second balance bar (L)2) Connected, the first balance bar (L)1) And said second balance bar (L)2) -the co-directional movement in the vertical direction of the first and second masses (m1, m2) is inhibited, only the first and second masses (m1, m2) are allowed to move simultaneously upwards and downwards, respectively; the third mass (m3) and the fourth mass (m4) are connected via a third balance bar (L)3) Is connected, the lower part passes through the fourth balancing lever (L)4) Connected, the third balance bar (L)3) And said fourth balancing lever (L)4) -the co-directional movement of the third mass (m3) and the fourth mass (m4) in the vertical direction is inhibited, -only the third mass (m3) and the fourth mass (m4) are allowed to move simultaneously upwards and downwards, respectively.
9. An operating mode using a fully differential twisted pair tuning fork MEMS gyroscope according to any of claims 1-8, comprising the steps of:
step 1, installing a plurality of mass blocks, a plurality of supporting springs, a plurality of coupling springs and a plurality of balance rods, and correspondingly forming torsion pendulum tuning forks with symmetrical two sides;
step 2, implementing driving mode motion under the driving of an external circuit, and forming a tuning fork effect in the vertical direction;
step 3, forcing the fully differential torsional pendulum type double tuning fork MEMS gyroscope to enter a detection mode to move by a forced driving force in the horizontal direction, and forming a tuning fork effect in the horizontal direction;
and 4, demodulating the two-dimensional vibration gyro effect of the sensitive structure of the fully differential torsional double-tuning-fork MEMS gyro by an external circuit, and calculating the intensity of the Coriolis effect by testing and detecting the vibration amplitude of the vibration mode by the external circuit so as to reversely deduce the input of the angular rate.
10. The method according to claim 9, wherein the step 1 comprises: the first mass (m1) and the second massGauge block (m2) and first supporting spring (K)1) A second supporting spring (K)2) And a third supporting spring (K)3) And a fourth supporting spring (K)4) A first coupling spring (K)01) A first balance bar (L)1) And a second balance bar (L)2) Forming a left torsional pendulum tuning fork; the third mass (m3), the fourth mass (m4), the fifth supporting spring (K)5) And a sixth supporting spring (K)6) And a seventh supporting spring (K)7) And an eighth supporting spring (K)8) A second coupling spring (K)02) A third balance bar (L)3) And a fourth balance bar (L)4) Forming a right torsional pendulum tuning fork;
the step 2 comprises the following steps: when the first mass m1 moves downwards, due to the first balance bar L1And a second balance bar L2Forces the second mass m2 to move upwards; the direct or rigid structural connection of the second mass m2 and the third mass m3 causes the third mass m3 to move upwards in synchronism with the second mass m 2; due to the third balance bar L3And a fourth balance bar L4The fourth mass m4 is forced to move downwards at a speed opposite to the same direction of the third mass m3 and the fourth mass m4, the second mass m2 and the third mass m3 move upwards while the first mass m1 and the fourth mass m4 move downwards, the speed is the same and the direction is opposite, the total momentum of the whole structure is always kept at 0, and a tuning fork effect in the vertical direction is formed;
the step 3 comprises the following steps: when the first mass m1 moves to the right, the second mass m2 moves to the left due to the effect of the simple harmonic vibration of the left tuning fork, the rigid connection between the second mass m2 and the third mass m3 causes the third mass m3 and the second mass m2 to move to the left synchronously, and due to the effect of the simple harmonic vibration of the right tuning fork, the fourth mass m4 is forced to move to the right at the same speed and in the opposite direction. While the first mass m1 and the fourth mass m4 move rightwards, the second mass m2 and the third mass m3 move leftwards, the speeds are the same and opposite, and therefore the total momentum of the fully differential torsional pendulum type double tuning fork MEMS gyroscope structure is always kept to be 0, and a tuning fork effect in the horizontal direction is formed.
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