CN111207303A

CN111207303A - Device for preventing nitrogen gas inner leakage

Info

Publication number: CN111207303A
Application number: CN201811387415.3A
Authority: CN
Inventors: 陈水波
Original assignee: Suzhou Industrial Park Kelunpo System Integrated Technology Co ltd
Current assignee: Suzhou Industrial Park Kelunpo System Integrated Technology Co ltd
Priority date: 2018-11-21
Filing date: 2018-11-21
Publication date: 2020-05-29

Abstract

The invention discloses a device for preventing nitrogen from leaking inwards, which is used for gas supply equipment, wherein the gas supply equipment comprises a plurality of gas steel cylinders, a gas supply main pipe and a nitrogen main pipe, the gas steel cylinders are connected with the gas supply main pipe through corresponding gas supply channels, the gas steel cylinders are connected with the nitrogen main pipe through corresponding nitrogen channels, and gas supply pipe shut-off valves are arranged on the gas supply channels. The nitrogen channel is provided with a scavenging shut-off valve, a pressure detector, a vacuum pumping mechanism and a nitrogen isolating valve, the scavenging shut-off valve is close to the gas steel cylinder, the nitrogen isolating valve is close to the nitrogen header pipe, the pressure detector and the vacuum pumping mechanism are respectively arranged between the scavenging shut-off valve and the nitrogen isolating valve, the pressure detector is connected with a controller, and the controller is connected with a pressure alarm. The device for preventing the nitrogen from leaking inwards is used for solving the problems that the nitrogen leaks inwards to pollute process gas, so that products are scrapped and are difficult to discriminate in the prior art and the like.

Description

Device for preventing nitrogen gas inner leakage

Technical Field

The invention relates to the technical field of gas supply, in particular to a device for preventing nitrogen from leaking inwards.

Background

In the existing gas cylinder cabinet gas supply device, as shown in fig. 2, a gas steel cylinder 1 supplies gas to the outside through a gas supply channel 3, and when the cylinder is replaced, the gas steel cylinder performs nitrogen scavenging through a nitrogen channel 4, and a scavenging shutoff valve 2 is arranged on the nitrogen channel 4. In the gas supply process, when the gas leakage of the scavenging shut-off valve 2 is completely removed, nitrogen enters the gas steel cylinder 1 or the gas supply channel 3 to pollute the process gas and cause the rejection of products. Especially, the line diameter required by modern high-end chip manufacturing process has been reduced to nanometer level and has slight nitrogen pollution, which means huge profit loss.

The problem of nitrogen leakage can not be prevented by a common gas cylinder cabinet, and the problem can be found only by finding the reason after the product goes wrong. And because the scavenging shut-off valve belongs to the valve in the middle of the channel, leaked gas can flow into the channel and cannot be discharged outwards, namely, the leakage is internal, the problem of the internal leakage needs to be found and the problem point needs to be confirmed, and the problem belonging to the internal leakage of the valve can be discriminated among a plurality of possible reasons with a certain professional ability.

Disclosure of Invention

The application provides a device for preventing leaking in nitrogen gas for it pollutes the processing procedure gas to leak in the nitrogen gas among the solution prior art, causes scrapping and difficult scheduling problem of discriminating of product.

In order to achieve the purpose, the invention provides a device for preventing nitrogen from leaking inwards, which is used for gas supply equipment, wherein the gas supply equipment comprises a plurality of gas steel cylinders, a gas supply main pipe and a nitrogen main pipe, the gas steel cylinders are connected with the gas supply main pipe through corresponding gas supply channels, the gas steel cylinders are connected with the nitrogen main pipe through corresponding nitrogen channels, and gas supply pipe shut-off valves are arranged on the gas supply channels.

The device that leaks in preventing nitrogen gas is including locating clean shutoff valve, pressure detector, vacuum pumping mechanism and nitrogen gas isolation valve on the nitrogen gas passageway, clean shutoff valve is close to the gas steel bottle, the nitrogen gas isolation valve is close to nitrogen gas house steward, pressure detector with vacuum pumping mechanism locates respectively clean shutoff valve with between the nitrogen gas isolation valve, pressure detector is connected with the controller, the controller is connected with the pressure alarm.

Compared with the prior art, the invention has the advantages that by arranging the scavenging shut-off valve and the nitrogen isolating valve, when the gas cylinder supplies gas, the scavenging shut-off valve and the nitrogen isolating valve are both in a closed state, so that the scavenging shut-off valve and the nitrogen isolating valve are in a closed state, the space between the scavenging shut-off valve and the nitrogen isolating valve is pumped into a vacuum state by the vacuum pumping mechanism, if the scavenging shut-off valve leaks, gas in the gas cylinder flows to the vacuum section and does not flow reversely, and the nitrogen in the nitrogen channel is ensured not to flow into the gas cylinder; and a pressure detector is arranged between the scavenging shutoff valve and the nitrogen isolation valve, the pressure detector is used for detecting the pressure between the scavenging shutoff valve and the nitrogen isolation valve, and in a vacuum state, if the scavenging shutoff valve leaks, the pressure detector detects that the pressure value is increased, and when the pressure change value is greater than 1psig, the pressure alarm gives an alarm, and an operator receives the alarm and needs to know a professional engineer to know the alarm and make proper maintenance.

The further improvement is that the vacuum pumping mechanism is connected with the controller, and the controller controls the vacuum pumping mechanism to facilitate the operation.

The gas supply pipe shutoff valve comprises a gas supply pipe high-pressure shutoff valve and a gas supply pipe low-pressure shutoff valve, and through the arrangement of the gas supply pipe high-pressure shutoff valve, the gas supply pipe high-pressure shutoff valve is shut off when the pressure is too high, and the gas supply pipe low-pressure shutoff valve is shut off when the pressure is too low, so that the pressure in the channel is maintained at normal pressure, and the safety of the channel is ensured.

The gas supply pipe high-pressure shutoff valve, the gas supply pipe low-pressure shutoff valve, the scavenging shutoff valve and the nitrogen isolation valve are respectively connected with the controller and are controlled by the controller to be convenient for operators to operate.

Drawings

FIG. 1 is a schematic view of a gas supply apparatus;

fig. 2 is a schematic structural diagram of a gas supply device of a gas cylinder cabinet in the prior art.

Reference is made to the following in corresponding reference numbers in the drawings of the specification:

in the background art: 1. a gas cylinder; 2. purging the shut-off valve; 3. a gas supply channel; 4. a nitrogen gas channel.

In the specific implementation mode: 5. a left gas cylinder; 6. a pressure detector; 7. purging the shut-off valve; 8. a left gas supply channel; 9. a left air supply pipe high pressure shutoff valve; 10. a low-pressure shutoff valve of the left gas supply pipe; 11. a right gas supply pipe low-pressure shutoff valve; 12. a right gas supply pipe high pressure shutoff valve; 13. a right gas supply channel; 14. a right gas cylinder; 15. a controller; 16. a left nitrogen channel; 17. a nitrogen block valve; 18. a right nitrogen channel; 19. a left channel; 20. a right channel; 21. a nitrogen header pipe; 22. a gas supply manifold.

Detailed Description

In order to make the technical means, the characteristics, the purposes and the functions of the invention easy to understand, the invention is further described with reference to the specific drawings.

As shown in fig. 1, the device for preventing internal leakage of nitrogen gas of the present invention is used for a gas supply device, the gas supply device comprises a plurality of gas steel cylinders, the plurality of gas steel cylinders are two gas steel cylinders, which are respectively a left gas steel cylinder 5 and a right gas steel cylinder 14, the left gas steel cylinder 5 is connected with a left gas supply channel 8 through a left channel 19, the left gas steel cylinder 5 is connected with a gas supply main 22 through the left gas supply channel 8, the gas supply main 21 is connected with the left gas supply channel 8 through a left nitrogen channel 16, a left gas supply pipe high pressure shut-off valve 9 and a left gas supply pipe low pressure shut-off valve 10 are arranged on the left gas supply channel 8, and the left gas supply pipe high pressure shut-off valve; the right gas cylinder 14 is connected with the right gas supply channel 13 through the right channel 20, the right gas cylinder 14 is connected with the gas supply main pipe 22 through the right gas supply channel 13, the nitrogen main pipe 21 is connected with the right gas supply channel 13 through the right nitrogen channel 18, the right gas supply channel 13 is provided with a right gas supply pipe high-pressure shutoff valve 12 and a right gas supply pipe low-pressure shutoff valve 11, and the right gas supply pipe high-pressure shutoff valve 12 is close to the right gas cylinder 14.

The left nitrogen channel 16 and the right nitrogen channel 18 are respectively provided with a device for preventing nitrogen from leaking inwards, the nitrogen channel is provided with a scavenging shut-off valve 7 and a nitrogen isolating valve 17, when the gas steel cylinder supplies gas, the scavenging shut-off valve 7 and the nitrogen isolating valve 17 are both in a closed state, so that the scavenging shut-off valve 7 and the nitrogen isolating valve 17 are in a closed state, a vacuum state is pumped between the scavenging shut-off valve 7 and the nitrogen isolating valve 17 through a vacuum pumping mechanism, if the scavenging shut-off valve 7 leaks, the gas of the gas steel cylinder flows to a vacuum section and cannot flow reversely, and the nitrogen in the nitrogen channel cannot flow into the gas steel cylinder; and be equipped with pressure detector 6 between clean shutoff valve 7 and nitrogen gas isolation valve 17, detect clean shutoff valve 7 and nitrogen gas isolation valve 17 between pressure detector 6, under the vacuum state, if clean shutoff valve 7 leaks, pressure detector 6 detects the pressure value grow, when the pressure variation value is greater than 1psig, pressure alarm sends the police dispatch newspaper, overhauls by the engineer, the reason of pressure variation includes the trouble of clean shutoff valve 7, nitrogen gas isolation valve 17 or impress transmitter 6, it is just as if the maintenance personal need overhaul it. The devices for preventing nitrogen leakage on the left nitrogen channel 16 and the right nitrogen channel 18 operate independently and do not affect each other.

In summary, the device for preventing the internal leakage of nitrogen effectively prevents the internal leakage of nitrogen from entering the gas supply system in a way of preventing accidents, and solves the problems that the internal leakage of nitrogen pollutes process gas, causes product scrapping and is difficult to discriminate in the prior art.

Specific embodiments of the invention have been described above. It is to be understood that the invention is not limited to the particular embodiments described above, in that devices and structures not described in detail are understood to be implemented in a manner common in the art; various changes or modifications may be made by one skilled in the art within the scope of the claims without departing from the spirit of the invention, and without affecting the spirit of the invention.

Claims

1. The utility model provides a device that leaks in preventing nitrogen gas for gas supply equipment, gas supply equipment includes a plurality of gas steel bottle, gas main, nitrogen main, the gas steel bottle through corresponding gas supply channel with the gas main is connected, the gas steel bottle through corresponding nitrogen gas channel with the nitrogen main is connected, be equipped with gas supply pipe shutoff valve on the gas supply channel, its characterized in that, including locating clean shutoff valve, pressure detector, vacuum pumping mechanism and nitrogen isolation valve on the nitrogen gas channel, clean shutoff valve is close to the gas steel bottle, the nitrogen isolation valve is close to nitrogen main, pressure detector with vacuum pumping mechanism locates respectively clean shutoff valve with between the nitrogen isolation valve, pressure detector is connected with the controller, the controller is connected with pressure alarm.

2. The apparatus as claimed in claim 1, wherein the vacuum pumping mechanism is connected to the controller.

3. The apparatus as claimed in claim 1, wherein the gas supply pipe shut-off valve comprises a gas supply pipe high pressure shut-off valve and a gas supply pipe low pressure shut-off valve.

4. The apparatus as claimed in claim 3, wherein the gas supply pipe high pressure shut-off valve, the gas supply pipe low pressure shut-off valve, the purge shut-off valve and the nitrogen gas isolation valve are connected to the controller, respectively.