CN111192803A - Ion source device for preventing ion bombardment - Google Patents
Ion source device for preventing ion bombardment Download PDFInfo
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- CN111192803A CN111192803A CN202010128512.1A CN202010128512A CN111192803A CN 111192803 A CN111192803 A CN 111192803A CN 202010128512 A CN202010128512 A CN 202010128512A CN 111192803 A CN111192803 A CN 111192803A
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- pole
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- ion source
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
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- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
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- Electron Sources, Ion Sources (AREA)
Abstract
本发明涉及离子源技术领域，具体而言，涉及一种防离子轰击的离子源装置，包括：壳体、磁铁、导磁件、阳极件、石墨阴极、第一极靴和第二极靴。壳体开设有第一凹槽；第一极靴设置于第一凹槽内，磁铁设置于第一极靴的两端并贴合于第一凹槽的内壁，导磁件设置于第一极靴与磁铁所形成的第二凹槽内，阳极件设置于导磁件的内腔，第二极靴设置于导磁件与磁铁形成的承载平台上，石墨阴极包裹于第二极靴，石墨阴极用于阻挡从阳极件发射的电子对第二极靴进行轰击。如此，离子在阳极的加速下轰击产品时，石墨阴极能够阻挡从阳极件发射的离子对第二极靴进行轰击，从而有效的保护第二极靴，同时避免对环境造成污染。
The invention relates to the technical field of ion sources, in particular, to an ion source device for preventing ion bombardment, comprising: a casing, a magnet, a magnetic conductive part, an anode part, a graphite cathode, a first pole piece and a second pole piece. The shell is provided with a first groove; the first pole piece is arranged in the first groove, the magnet is arranged at both ends of the first pole piece and is attached to the inner wall of the first groove, and the magnetic conducting member is arranged in the first pole In the second groove formed by the shoe and the magnet, the anode piece is arranged in the inner cavity of the magnetic conducting piece, the second pole piece is arranged on the bearing platform formed by the magnetic conducting piece and the magnet, the graphite cathode is wrapped in the second pole piece, the graphite The cathode serves to block the electrons emitted from the anode piece from bombarding the second pole piece. In this way, when ions bombard the product under the acceleration of the anode, the graphite cathode can prevent the ions emitted from the anode from bombarding the second pole piece, thereby effectively protecting the second pole piece and avoiding environmental pollution.
Description
Technical Field
The invention relates to the technical field of ion sources, in particular to an ion source device for preventing ion bombardment.
Background
An ion source is a device that ionizes neutral atoms or molecules and extracts a stream of ions therefrom. Is an indispensable component in various types of equipment such as ion accelerators, mass spectrometers, electromagnetic isotope separators, ion implanters, ion beam etching devices, ion thrusters, and neutral beam implanters in controlled fusion devices.
In the traditional ion source, a magnet forms a magnetic field surface through a pole shoe to capture electrons and bombard inert gas, so that plasma is generated, the pole shoe is etched by ion beams in the process of ion bombardment on a product under the acceleration of an anode, and therefore, the pole shoe cannot be effectively protected, and meanwhile, the environment is polluted.
Disclosure of Invention
The invention provides an ion source device for preventing ion bombardment, wherein a first pole shoe is arranged in a first groove of a shell, magnets are further arranged at two ends of the first pole shoe, a magnetic conduction piece is arranged in a second groove formed by the first pole shoe and the magnets, an anode is arranged in an inner cavity of the magnetic conduction piece, a second pole shoe is arranged on a bearing platform formed by the magnetic conduction piece and the magnets, and a graphite cathode is wrapped on the second pole shoe. So, when the product is bombarded under the acceleration of positive pole to ion, the graphite cathode can block from the ion of positive pole piece transmission to bombard the second pole shoe to effectual protection second pole shoe avoids causing the pollution to the environment simultaneously.
The invention provides an ion source device for preventing ion bombardment, which comprises: the device comprises a shell, a magnet, a magnetic conduction piece, an anode piece, a graphite cathode, a first pole shoe and a second pole shoe;
the shell is provided with a first groove;
the first pole shoe is arranged in the first groove, and the magnets are arranged at two ends of the first pole shoe and attached to the inner wall of the first groove;
the magnetic conduction piece is arranged in a second groove formed by the first pole shoe and the magnet;
the anode part is arranged in the inner cavity of the magnetic conduction part;
the second pole shoe is arranged on a bearing platform formed by the magnetic conduction piece and the magnet;
the graphite cathode is wrapped on the second pole shoe;
the graphite cathode is used for blocking ions emitted from the anode piece from bombarding the second pole shoe.
In an alternative embodiment, the number of the second pole shoes is two, and the two second pole shoes are opposite in position; gaps exist among the graphite cathodes wrapped on each second pole shoe.
In an alternative embodiment, the gap is opposite the anode member.
In an alternative embodiment, the graphite cathode, the magnetically permeable member, and the anode member define a reaction chamber therebetween.
In an alternative embodiment, the number of the magnets is two, and the magnetic conducting member connects the N pole and the S pole of the two magnets to form a magnetic flux.
In an alternative embodiment, the N pole of one of the magnets is connected to the first pole piece, the S pole is connected to the second pole piece, the S pole of the other magnet is connected to the first pole piece, and the N pole is connected to the second pole piece.
In an alternative embodiment, the graphite cathode and the second pole shoe are fixed by a connection piece.
In an alternative embodiment, the connecting element is a screw.
In an alternative embodiment, the bottom of the housing is provided with a cooling chamber for receiving a cooling fluid.
In an alternative embodiment, the anode member is clamped in the inner cavity of the magnetic conducting member.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides an ion source device for preventing ion bombardment, wherein a first pole shoe is arranged in a first groove of a shell, magnets are further arranged at two ends of the first pole shoe, a magnetic conduction piece is arranged in a second groove formed by the first pole shoe and the magnets, an anode is arranged in an inner cavity of the magnetic conduction piece, a second pole shoe is arranged on a bearing platform formed by the magnetic conduction piece and the magnets, and a graphite cathode wraps the second pole shoe.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of an ion source apparatus for preventing ion bombardment according to an embodiment of the present invention.
In the figure:
1-a shell;
21-a first pole shoe; 22-a second pole piece;
3-a magnet;
4-a magnetic conductive member;
5-an anode member;
6-graphite cathode;
7-a reaction chamber;
8-cooling chamber.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
Example (b):
referring to fig. 1, an ion source apparatus for preventing ion bombardment according to an embodiment of the present invention includes: the magnetic flux-conducting magnetic field generator comprises a shell 1, a magnet 3, a magnetic conducting piece 4, an anode piece 5, a graphite cathode 6, a first pole piece 21 and a second pole piece 22.
Further, casing 1 has seted up first recess, and first pole shoe 21 sets up in 1 first recess, and magnet 3 sets up in the both ends of first pole shoe 21 and laminates in the inner wall of first recess, and magnetic conduction piece 4 sets up in the second recess that first pole shoe 21 and magnet 3 formed, and anodal piece 5 sets up in the inner chamber of magnetic conduction piece 4, can understand, and anodal piece 5 can block and locate the inner chamber of magnetic conduction piece 4.
Furthermore, the second pole shoe 22 is disposed on the load-bearing platform formed by the magnetic conductive member 4 and the magnet 3, the graphite cathode 6 is wrapped on the second pole shoe 22, and the graphite cathode 6 is used for blocking ions emitted from the anode member 5 from bombarding the second pole shoe 22.
It can be understood that the graphite cathode 6 is wrapped on the second pole shoe 22, so that the second pole shoe 22 can be prevented from being etched by ion beams, the phenomenon that the quality of a product is affected due to splashing of metal after etching can also be avoided, and meanwhile, the phenomenon that a conductive metal material splashes to a conductive joint to cause short circuit can also be avoided.
It can be understood that, by adopting the above structure, when the product is bombarded by ions under the acceleration of the anode member 5, the graphite cathode 6 can block the ions emitted from the anode member 5 from bombarding the second pole piece 22, so as to effectively protect the second pole piece 22 and avoid polluting the environment.
Referring to fig. 1, the two second pole pieces 22 are disposed opposite to each other, and a gap exists between the graphite cathode 6 wrapped around each second pole piece 22, wherein the gap is opposite to the anode member 5, and the gap is used for releasing the ion beam for bombarding the product under the acceleration of the anode member 5.
Further, a reaction cavity 7 is formed among the graphite cathode 6, the magnetic conducting piece 4 and the anode piece 5, wherein the reaction cavity 7 is used for the magnet to form a magnetic field surface through the pole shoe to capture electrons so as to bombard the inert gas.
In an alternative embodiment, there are two magnets 3, and the magnetic conducting member 4 connects the N pole and the S pole of the two magnets 3 to form a magnetic flux, wherein the N pole of one magnet 3 is connected to the first pole piece 21, the S pole is connected to the second pole piece 22, the S pole of the other magnet 3 is connected to the first pole piece 21, the N pole is connected to the second pole piece 22, and the magnetic field is mainly present at the gap, so that the magnetic field can be prevented from leaking.
In this embodiment, the graphite cathode 6 and the second pole piece 22 can be fixed by a connector, wherein the connector is a screw and belongs to a detachable connection, thereby facilitating detachment and maintenance. It is understood that graphite can be a material that is non-magnetic, high temperature resistant, ion etch resistant, and electrically conductive.
In an alternative embodiment, the bottom of the housing 1 may be further opened with a cooling chamber 8 for containing a cooling fluid. When the product is bombarded with ions under acceleration of the anode member 5, this results in an increase in the temperature of the reaction chamber 7, which causes deformation of the second pole piece. The temperature in the reaction chamber 7 is reduced by injecting cold water into the cooling chamber 8, and the second pole shoe can be effectively protected.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An ion source apparatus that is resistant to ion bombardment, comprising: the device comprises a shell (1), a magnet (3), a magnetic conduction piece (4), an anode piece (5), a graphite cathode (6), a first pole shoe (21) and a second pole shoe (22);
the shell (1) is provided with a first groove;
the first pole shoe (21) is arranged in the first groove, and the magnets (3) are arranged at two ends of the first pole shoe (21) and attached to the inner wall of the first groove;
the magnetic conduction piece (4) is arranged in a second groove formed by the first pole shoe (21) and the magnet (3);
the anode piece (5) is arranged in the inner cavity of the magnetic conduction piece (4);
the second pole shoe (22) is arranged on a bearing platform formed by the magnetic conduction piece (4) and the magnet (3);
the graphite cathode (6) is wrapped on the second pole shoe (22);
the graphite cathode (6) is used for blocking ions emitted from the anode piece (5) from bombarding the second pole shoe (22).
2. The ion source device of claim 1, wherein the number of the second pole pieces (22) is two, and the two second pole pieces (22) are oppositely arranged; gaps exist among the graphite cathodes (6) wrapped on each second pole shoe (22).
3. The ion source arrangement of claim 2, wherein said gap is opposite said anode member (5).
4. The ion source device of claim 3, wherein a reaction chamber (7) is formed between the graphite cathode (6), the magnetic conductor member (4) and the anode member (5).
5. The ion source device for preventing ion bombardment according to claim 1, wherein the number of the magnets (3) is two, and the magnetic conducting member (4) connects the N pole and the S pole of the two magnets (3) to form a magnetic flux.
6. The ion source device of claim 5, wherein one magnet (3) has its N pole connected to the first pole piece (21) and S pole connected to the second pole piece (22), and the other magnet (3) has its S pole connected to the first pole piece (21) and N pole connected to the second pole piece (22).
7. The ion source device of claim 1, wherein the graphite cathode (6) and the second pole piece (22) are fixed by a connector.
8. The ion source apparatus of claim 7, wherein the attachment member is a screw.
9. The ion source device for preventing ion bombardment according to claim 1, wherein the bottom of the housing (1) is provided with a cooling cavity (8) for containing cooling liquid.
10. The ion source device for preventing ion bombardment according to claim 1, wherein the anode member (5) is clamped in an inner cavity of the magnetic conductive member (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010128512.1A CN111192803B (en) | 2020-02-28 | 2020-02-28 | Ion source device for preventing ion bombardment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010128512.1A CN111192803B (en) | 2020-02-28 | 2020-02-28 | Ion source device for preventing ion bombardment |
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| Publication Number | Publication Date |
|---|---|
| CN111192803A true CN111192803A (en) | 2020-05-22 |
| CN111192803B CN111192803B (en) | 2025-03-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010128512.1A Active CN111192803B (en) | 2020-02-28 | 2020-02-28 | Ion source device for preventing ion bombardment |
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| Country | Link |
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| CN (1) | CN111192803B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112963544A (en) * | 2021-03-17 | 2021-06-15 | 清华大学 | Magnetic liquid sealing device with porous medium material layer |
Citations (8)
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| US20080017112A1 (en) * | 2006-07-18 | 2008-01-24 | Guardian Industries Corp. | Ion source with recess in electrode |
| US20080136309A1 (en) * | 2006-12-06 | 2008-06-12 | Chu Paul K | Ion source |
| CN101447274A (en) * | 2008-09-26 | 2009-06-03 | 东莞宏威数码机械有限公司 | Magnetic circuit mechanism, magnetron sputtering cathode with same and manufacturing method |
| CN201508820U (en) * | 2009-09-22 | 2010-06-16 | 冯毓材 | Electron bombardment ion source discharge chamber |
| CN102254775A (en) * | 2011-03-29 | 2011-11-23 | 核工业西南物理研究院 | Magnetic field reinforced type linear ion source |
| CN103887133A (en) * | 2014-04-01 | 2014-06-25 | 南京迪奥赛真空科技有限公司 | Magnetic field reinforced type linear large-area ion source |
| CN109559962A (en) * | 2017-09-26 | 2019-04-02 | 深圳市鼎力真空科技有限公司 | A kind of narrow beam Linear ion source |
| CN211062682U (en) * | 2020-02-28 | 2020-07-21 | 成都国泰真空设备有限公司 | Anode layer ion source device of graphite cathode |
-
2020
- 2020-02-28 CN CN202010128512.1A patent/CN111192803B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080017112A1 (en) * | 2006-07-18 | 2008-01-24 | Guardian Industries Corp. | Ion source with recess in electrode |
| US20080136309A1 (en) * | 2006-12-06 | 2008-06-12 | Chu Paul K | Ion source |
| CN101447274A (en) * | 2008-09-26 | 2009-06-03 | 东莞宏威数码机械有限公司 | Magnetic circuit mechanism, magnetron sputtering cathode with same and manufacturing method |
| CN201508820U (en) * | 2009-09-22 | 2010-06-16 | 冯毓材 | Electron bombardment ion source discharge chamber |
| CN102254775A (en) * | 2011-03-29 | 2011-11-23 | 核工业西南物理研究院 | Magnetic field reinforced type linear ion source |
| CN103887133A (en) * | 2014-04-01 | 2014-06-25 | 南京迪奥赛真空科技有限公司 | Magnetic field reinforced type linear large-area ion source |
| CN109559962A (en) * | 2017-09-26 | 2019-04-02 | 深圳市鼎力真空科技有限公司 | A kind of narrow beam Linear ion source |
| CN211062682U (en) * | 2020-02-28 | 2020-07-21 | 成都国泰真空设备有限公司 | Anode layer ion source device of graphite cathode |
Non-Patent Citations (1)
| Title |
|---|
| 冉彪;李刘合;: "阳极层离子源的发展及应用", 真空, no. 05, 25 September 2018 (2018-09-25) * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112963544A (en) * | 2021-03-17 | 2021-06-15 | 清华大学 | Magnetic liquid sealing device with porous medium material layer |
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| Publication number | Publication date |
|---|---|
| CN111192803B (en) | 2025-03-28 |
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Effective date of registration: 20210218 Address after: 611130 group 6, Xinhua, Liucheng, Wenjiang District, Chengdu City, Sichuan Province Applicant after: Lu Cheng Address before: 611130 No. 618, Kelin West Road, Chengdu cross strait science and Technology Industrial Development Park, Wenjiang District, Chengdu City, Sichuan Province Applicant before: CHENGDU GUOTAI VACUUM EQUIPMENT Co.,Ltd. |
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Effective date of registration: 20210715 Address after: 618 Kelin West Road, Chengdu cross strait science and Technology Industrial Development Park, Wenjiang District, Chengdu, Sichuan 610000 Applicant after: Sichuan Jincheng Guotai Vacuum Equipment Co.,Ltd. Address before: 611130 group 6, Xinhua, Liucheng, Wenjiang District, Chengdu City, Sichuan Province Applicant before: Lu Cheng |
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