CN111128846B - 一种用于芯片封装的顶针装置 - Google Patents
一种用于芯片封装的顶针装置 Download PDFInfo
- Publication number
- CN111128846B CN111128846B CN201911346279.8A CN201911346279A CN111128846B CN 111128846 B CN111128846 B CN 111128846B CN 201911346279 A CN201911346279 A CN 201911346279A CN 111128846 B CN111128846 B CN 111128846B
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- CN
- China
- Prior art keywords
- thimble
- ejector pin
- knob
- platform
- ejector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H10P72/0442—
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- H10P72/7612—
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/02—Arrangements of circuit components or wiring on supporting structure
- H05K7/10—Plug-in assemblages of components, e.g. IC sockets
- H05K7/1053—Plug-in assemblages of components, e.g. IC sockets having interior leads
- H05K7/1076—Plug-in assemblages of components, e.g. IC sockets having interior leads co-operating by sliding
- H05K7/1084—Plug-in assemblages of components, e.g. IC sockets having interior leads co-operating by sliding pin grid array package carriers
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- H10P72/7402—
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- H10P72/7624—
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- H10P72/78—
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2113/00—Details relating to the application field
- G06F2113/18—Chip packaging
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
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- H10P72/7444—
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- H10W99/00—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Infusion, Injection, And Reservoir Apparatuses (AREA)
Abstract
Description
Claims (9)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911346279.8A CN111128846B (zh) | 2019-12-24 | 2019-12-24 | 一种用于芯片封装的顶针装置 |
| US17/620,062 US12272589B2 (en) | 2019-12-24 | 2020-10-13 | Ejector pin device for chip packaging |
| PCT/CN2020/120539 WO2021129053A1 (zh) | 2019-12-24 | 2020-10-13 | 一种用于芯片封装的顶针装置 |
| JP2021575341A JP7271730B2 (ja) | 2019-12-24 | 2020-10-13 | チップパッケージ用のエジェクターピン装置 |
| KR1020217041159A KR102680707B1 (ko) | 2019-12-24 | 2020-10-13 | 칩 패키징에 이용되는 밀핀 장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911346279.8A CN111128846B (zh) | 2019-12-24 | 2019-12-24 | 一种用于芯片封装的顶针装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111128846A CN111128846A (zh) | 2020-05-08 |
| CN111128846B true CN111128846B (zh) | 2022-02-22 |
Family
ID=70501849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911346279.8A Active CN111128846B (zh) | 2019-12-24 | 2019-12-24 | 一种用于芯片封装的顶针装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12272589B2 (zh) |
| JP (1) | JP7271730B2 (zh) |
| KR (1) | KR102680707B1 (zh) |
| CN (1) | CN111128846B (zh) |
| WO (1) | WO2021129053A1 (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111128846B (zh) * | 2019-12-24 | 2022-02-22 | 颀中科技(苏州)有限公司 | 一种用于芯片封装的顶针装置 |
| CN113414737B (zh) * | 2021-07-09 | 2022-05-17 | 长鑫存储技术有限公司 | 顶针安装治具及方法 |
| CN113937052A (zh) * | 2021-11-22 | 2022-01-14 | 唐人制造(嘉善)有限公司 | 顶起机构 |
| JP7633203B2 (ja) * | 2022-03-29 | 2025-02-19 | 東レエンジニアリング株式会社 | 突き上げヘッド及び突き上げ装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05326672A (ja) * | 1992-05-21 | 1993-12-10 | Sony Corp | チップ突き上げ装置 |
| CN103077918A (zh) * | 2013-01-09 | 2013-05-01 | 广东志成华科光电设备有限公司 | 一种芯片分选设备顶针装置 |
| CN105140156A (zh) * | 2015-08-26 | 2015-12-09 | 华中科技大学 | 一种面向柔性芯片的多顶针剥离装置及剥离方法 |
| CN206864447U (zh) * | 2017-06-08 | 2018-01-09 | 太极半导体(苏州)有限公司 | 一种超薄芯片的吸取装置 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2995435B2 (ja) * | 1991-12-26 | 1999-12-27 | エムテック株式会社 | チップ自動選別搬送装置 |
| JPH05310322A (ja) * | 1992-05-11 | 1993-11-22 | Sony Corp | 温度槽内の搬送装置 |
| JPH10189690A (ja) * | 1996-12-26 | 1998-07-21 | Hitachi Ltd | 半導体チップのピックアップ方法及びピックアップ装置 |
| US6204092B1 (en) * | 1999-04-13 | 2001-03-20 | Lucent Technologies, Inc. | Apparatus and method for transferring semiconductor die to a carrier |
| JP2005150214A (ja) * | 2003-11-12 | 2005-06-09 | Renesas Technology Corp | 半導体装置の製造方法およびそれに用いられる半導体製造装置 |
| JP2007115934A (ja) * | 2005-10-21 | 2007-05-10 | Matsushita Electric Ind Co Ltd | 電子部品突き上げ装置及び電子部品の供給方法 |
| JP4504308B2 (ja) * | 2005-12-15 | 2010-07-14 | 株式会社日立ハイテクインスツルメンツ | ダイピックアップ方法及びダイピックアップ装置 |
| JP5040666B2 (ja) * | 2008-01-15 | 2012-10-03 | 株式会社ジェイテクト | ボールねじ装置 |
| US8470130B2 (en) * | 2009-10-20 | 2013-06-25 | Asm Assembly Automation Ltd | Universal die detachment apparatus |
| JP2013051265A (ja) * | 2011-08-30 | 2013-03-14 | Dainippon Screen Mfg Co Ltd | 昇降ユニットおよび基板処理装置 |
| CN103681441B (zh) | 2013-11-11 | 2016-08-24 | 爱立发自动化设备(上海)有限公司 | 一种用于半导体芯片封装的顶针治具机构 |
| KR102231146B1 (ko) * | 2014-04-22 | 2021-03-23 | (주)제이티 | 이송툴모듈, 니들핀 조립체, 및 그를 가지는 소자핸들러 |
| KR20170030336A (ko) * | 2015-09-09 | 2017-03-17 | 세메스 주식회사 | 다이 이젝팅 장치 |
| CN107093575A (zh) | 2017-05-08 | 2017-08-25 | 大连佳峰自动化股份有限公司 | 顶针系统 |
| US10410905B1 (en) * | 2018-05-12 | 2019-09-10 | Rohinni, LLC | Method and apparatus for direct transfer of multiple semiconductor devices |
| CN109935545B (zh) | 2019-01-22 | 2022-03-18 | 厦门市三安集成电路有限公司 | 一种挑起不同尺寸晶片的顶针模组 |
| CN111128846B (zh) | 2019-12-24 | 2022-02-22 | 颀中科技(苏州)有限公司 | 一种用于芯片封装的顶针装置 |
| US12406872B2 (en) * | 2020-02-24 | 2025-09-02 | Lam Research Corporation | Semiconductor processing chamber with dual-lift mechanism for edge ring elevation management |
| JP7039675B2 (ja) * | 2020-11-18 | 2022-03-22 | ファスフォードテクノロジ株式会社 | 半導体製造装置および半導体装置の製造方法 |
| CN114933167A (zh) * | 2022-04-27 | 2022-08-23 | 泉州兰姆达仪器设备有限公司 | 一种激光芯片测试分选机的顶针机构及其工作方法 |
-
2019
- 2019-12-24 CN CN201911346279.8A patent/CN111128846B/zh active Active
-
2020
- 2020-10-13 KR KR1020217041159A patent/KR102680707B1/ko active Active
- 2020-10-13 WO PCT/CN2020/120539 patent/WO2021129053A1/zh not_active Ceased
- 2020-10-13 US US17/620,062 patent/US12272589B2/en active Active
- 2020-10-13 JP JP2021575341A patent/JP7271730B2/ja active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05326672A (ja) * | 1992-05-21 | 1993-12-10 | Sony Corp | チップ突き上げ装置 |
| CN103077918A (zh) * | 2013-01-09 | 2013-05-01 | 广东志成华科光电设备有限公司 | 一种芯片分选设备顶针装置 |
| CN105140156A (zh) * | 2015-08-26 | 2015-12-09 | 华中科技大学 | 一种面向柔性芯片的多顶针剥离装置及剥离方法 |
| CN206864447U (zh) * | 2017-06-08 | 2018-01-09 | 太极半导体(苏州)有限公司 | 一种超薄芯片的吸取装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2022538987A (ja) | 2022-09-07 |
| WO2021129053A1 (zh) | 2021-07-01 |
| JP7271730B2 (ja) | 2023-05-11 |
| KR20220017416A (ko) | 2022-02-11 |
| CN111128846A (zh) | 2020-05-08 |
| US12272589B2 (en) | 2025-04-08 |
| US20220352003A1 (en) | 2022-11-03 |
| KR102680707B1 (ko) | 2024-07-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: No. 166 Fengli Street, Suzhou Industrial Park, Jiangsu Province Applicant after: CHIPMORE TECHNOLOGY Corp.,Ltd. Applicant after: Xi'an yisiwei Material Technology Co., Ltd Address before: No. 166 Fengli Street, Suzhou Industrial Park, Jiangsu Province Applicant before: CHIPMORE TECHNOLOGY Corp.,Ltd. Applicant before: Beijing yisiwei Technology Co.,Ltd. |
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| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20210621 Address after: 215000 No.166, Fengli street, Suzhou Industrial Park, Jiangsu Province Applicant after: CHIPMORE TECHNOLOGY Corp.,Ltd. Applicant after: Hefei Qizhong Sealing Technology Co.,Ltd. Address before: 215000 No.166, Fengli street, Suzhou Industrial Park, Jiangsu Province Applicant before: CHIPMORE TECHNOLOGY Corp.,Ltd. Applicant before: Xi'an yisiwei Material Technology Co., Ltd |
|
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 215000 No.166, Fengli street, Suzhou Industrial Park, Jiangsu Province Applicant after: CHIPMORE TECHNOLOGY Corp.,Ltd. Applicant after: Hefei Qizhong Technology Co., Ltd Address before: 215000 No.166, Fengli street, Suzhou Industrial Park, Jiangsu Province Applicant before: CHIPMORE TECHNOLOGY Corp.,Ltd. Applicant before: Hefei Qizhong sealing and Testing Technology Co., Ltd |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |