CN111113166B - Main shaft structure of ultrasonic-assisted self-rotation grinding machine tool - Google Patents
Main shaft structure of ultrasonic-assisted self-rotation grinding machine tool Download PDFInfo
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- CN111113166B CN111113166B CN202010086513.4A CN202010086513A CN111113166B CN 111113166 B CN111113166 B CN 111113166B CN 202010086513 A CN202010086513 A CN 202010086513A CN 111113166 B CN111113166 B CN 111113166B
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- 238000000227 grinding Methods 0.000 title claims abstract description 115
- 230000005540 biological transmission Effects 0.000 claims abstract description 7
- 230000006698 induction Effects 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000012545 processing Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 10
- 238000013461 design Methods 0.000 description 5
- 239000010432 diamond Substances 0.000 description 5
- 229910003460 diamond Inorganic materials 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
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- 238000004458 analytical method Methods 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000010431 corundum Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
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- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
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- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention discloses a main shaft structure of an ultrasonic-assisted self-rotating grinding machine tool, which comprises a transducer, an amplitude transformer, a main shaft body, a flange plate, a skirt edge structure part, an induction coil connected with the transducer and a grinding disc grinding wheel part, wherein the transducer is connected with the amplitude transformer; the transducer is fixedly connected with the first end of the amplitude transformer, the second end of the amplitude transformer is fixedly connected with the first end of the main shaft body, the second end of the main shaft body is fixedly connected with the skirt edge structural part, the grinding disc grinding wheel part is fixedly arranged on the skirt edge structural part, the transducer generates longitudinal ultrasonic vibration, the longitudinal ultrasonic vibration is converted into radial ultrasonic vibration through the amplitude transformer, and the skirt edge structural part amplifies the amplitude and the vibration speed of the radial ultrasonic vibration and drives the grinding disc grinding wheel part to vibrate radially and ultrasonically; the middle part of the main shaft body is fixedly connected with a flange plate for fixedly connecting with a main shaft of a transmission connection motor. It has the following advantages: the ultrasonic vibration is used for assisting in self-rotation grinding, so that grinding force can be reduced, crack expansion can be restrained, and grinding damage can be reduced.
Description
Technical Field
The invention relates to ultrasonic auxiliary processing equipment, in particular to a main shaft structure of an ultrasonic auxiliary self-rotating grinding machine tool.
Background
Hard brittle materials such as engineering ceramics, glass, crystals, semiconductor crystals and the like are widely applied to the fields of optics, aerospace, semiconductors, microelectronics and the like due to good mechanochemical properties. The high hardness and high brittleness of the hard brittle material make it difficult to work, and grinding is widely used for the work of the hard brittle material as an efficient precision machining method. However, there has been a challenge in the grinding of hard brittle materials in that larger grain diamond grinding wheels are required to provide grinding efficiency, while coarse grain diamond grinding wheels can cause greater surface and subsurface damage. In order to reduce machining damage and provide grinding surface quality, a fine-grain diamond grinding wheel is required to be used, however, the fine-grain diamond grinding wheel is low in efficiency and easy to block in the grinding process.
Ultrasonic vibration assisted grinding is a compound process in which ultrasonic vibration is applied to a workpiece or tool on the basis of conventional grinding, as a result of the combined action of conventional grinding and ultrasonic vibration. Although the effect of applying ultrasonic vibration in different directions is different, under the normal condition, the ultrasonic vibration auxiliary grinding of the hard and brittle material can not only greatly improve the processing efficiency, but also reduce the processing damage, improve the processing quality, prevent the grinding wheel from blocking and the like. Therefore, ultrasonic vibration assisted grinding is an effective method for realizing high-efficiency and precise machining of hard and brittle materials. However, the application of the ultrasonic vibration auxiliary grinding technology in the processing and production practice of the hard and brittle materials is very limited, and the main bottleneck limiting the wide application of the ultrasonic vibration auxiliary grinding technology is the development of an ultrasonic auxiliary grinding machine tool, and the core of the ultrasonic auxiliary grinding machine tool is the design and preparation of the main shaft of the ultrasonic vibration auxiliary grinding machine tool.
Self-rotation grinding is a common method for processing hard and brittle materials, and is particularly widely applied to planarization processing and back-side thinning processing of semiconductor substrates. However, in these applications, it is desirable to obtain higher surface quality, as much surface and subsurface damage as possible. In order to achieve both a higher surface quality and a higher grinding efficiency, ultrasonic vibration assisted self-rotating grinding would be a very efficient method. However, no mature ultrasonic vibration assisted self-rotation grinding machine tool exists in the market at present, and meanwhile, the research on a main shaft of the ultrasonic vibration assisted self-rotation grinding machine tool is relatively less. Therefore, it is obviously important to design a spindle of an ultrasonic vibration-assisted self-rotating grinding machine and develop an ultrasonic vibration-assisted self-rotating grinding machine.
Currently, patents aiming at the main shaft design aspect of an ultrasonic vibration auxiliary self-rotating grinding machine tool include a grinding head capable of realizing end face ultrasonic auxiliary grinding and polishing (patent number: ZL 201510492706.9), a large-size radial ultrasonic auxiliary end face grinding disc (patent number: ZL 201510492598.5) and a large-size axial ultrasonic auxiliary end face grinding disc (patent number: ZL 201510492638.6), however, the three patents mainly adopt a splicing method to realize axial ultrasonic vibration and radial ultrasonic vibration of the grinding disc. However, the ultrasonic millstone manufactured by the splicing method has the defects of complex structure, lower assembly precision, inconvenient assembly and disassembly and the like. Therefore, it is necessary to develop an ultrasonic vibration-assisted self-rotation grinding machine tool spindle which is simple in structure, convenient to assemble and disassemble and high in precision.
Disclosure of Invention
The invention provides an ultrasonic-assisted self-rotation grinding machine tool spindle structure, which overcomes the defects in the prior art.
The technical scheme adopted for solving the technical problems is as follows:
The ultrasonic auxiliary self-rotating grinding machine tool spindle structure comprises a transducer, an amplitude transformer, a spindle body, a flange plate, a skirt edge structure part, an induction coil connected with the transducer and a grinding disc grinding wheel part; the transducer is fixedly connected with the first end of the amplitude transformer, the second end of the amplitude transformer is fixedly connected with the first end of the main shaft body, the second end of the main shaft body is fixedly connected with the skirt edge structural part, the grinding disc grinding wheel part is fixedly arranged on the skirt edge structural part, the transducer generates longitudinal ultrasonic vibration, the longitudinal ultrasonic vibration is converted into radial ultrasonic vibration through the amplitude transformer, and the skirt edge structural part amplifies the amplitude and the vibration speed of the radial ultrasonic vibration and drives the grinding disc grinding wheel part to vibrate radially and ultrasonically; the middle part of the main shaft body is fixedly connected with a flange plate for fixedly connecting with a main shaft of a transmission connection motor.
In one embodiment: the first end of the amplitude transformer is a wide section end, and the second end of the amplitude transformer is a narrow section end.
In one embodiment: the main shaft body comprises a middle section and connecting sections fixedly connected to the two axial sides of the middle section, the outer diameter of the connecting sections is smaller than the maximum outer diameter of the middle section, the second end of the amplitude transformer is fixedly connected to the tail end of one connecting section, the skirt structure part is fixedly connected to the tail end of the other connecting section, and the flange plate is fixedly connected to the outer peripheral wall of the middle section.
In one embodiment: the two connecting sections are two first cylindrical sections with equal diameters, the middle section comprises a second cylindrical section, the outer diameter of the second cylindrical section is larger than that of the first cylindrical section, a cone frustum is connected between the second cylindrical section and the first cylindrical section, one end of the cone frustum is opposite to the first cylindrical section Ji Gujie, and the other end of the cone frustum is opposite to the second cylindrical section Ji Gujie; the flange plate is fixedly connected to the middle part of the second cylindrical section.
In one embodiment: the skirt structure portion has an outer diameter greater than the maximum outer diameter of the middle section.
In one embodiment: the grinding wheel part of the grinding disc comprises a fixed sleeve, the lower periphery of the fixed sleeve extends inwards to form an annular part, the bottom surface of the annular part is fixedly provided with grinding materials, and the fixed sleeve is fixedly sleeved outside the skirt structure part.
In one embodiment: the skirt structure part comprises a connecting disc, wherein a groove is concavely arranged on the bottom surface of the connecting disc, the groove is of a rotary groove structure, and the inner diameter from the groove bottom to the notch is gradually increased to form the skirt structure.
Compared with the background technology, the technical proposal has the following advantages:
The ultrasonic vibration is converted into radial ultrasonic vibration by the amplitude transformer, the amplitude and the vibration speed of the radial ultrasonic vibration are amplified by the skirt structure part, and the radial ultrasonic vibration of the grinding disc grinding wheel part is driven, so that the grinding wheel is matched with the main shaft to rotate for grinding.
Drawings
The invention is further described below with reference to the drawings and the detailed description.
Fig. 1 is a schematic diagram of a spindle structure of an ultrasonic-assisted self-rotating grinding machine.
FIG. 2 is a schematic diagram of a second embodiment of the spindle structure of the ultrasonic-assisted self-rotating grinding machine.
Fig. 3 is an exploded schematic view of the spindle structure of the ultrasonic-assisted self-rotating grinding machine tool.
Fig. 4 is a schematic view of a millstone wheel portion of an ultrasonic assisted self-rotating grinding machine spindle configuration.
Fig. 5 is a top view of the spindle structure of the ultrasonic-assisted self-rotating grinding machine in a vertical position.
Fig. 6 is a bottom view of the spindle structure of the ultrasonic-assisted self-rotating grinding machine in a vertical position.
Detailed Description
Referring to fig. 1 to 6, the main shaft structure of the ultrasonic-assisted self-rotation grinding machine tool comprises a transducer 1, an amplitude transformer 2, a main shaft body 3, a skirt edge structure part 5, an induction coil connected with the transducer and a grinding disc grinding wheel part 6, wherein a flange 4 is fixedly connected in the middle of the main shaft body 3 for fixedly connecting with a main shaft of a motor in transmission connection, and the main shaft can realize high-speed rotation movement required by grinding under the drive of the motor. The transducer 1 is fixedly connected with a first end of the amplitude transformer 2, a second end of the amplitude transformer 2 is fixedly connected with a first end of the main shaft body 3, a skirt edge structure part 5 is fixedly connected with a second end of the main shaft body 3, the grinding disc grinding wheel part 6 is fixedly arranged on the skirt edge structure part 5, the transducer 1 generates longitudinal ultrasonic vibration, the longitudinal ultrasonic vibration converts the longitudinal ultrasonic vibration into radial ultrasonic vibration through the amplitude transformer 2, and the skirt edge structure part 5 amplifies the amplitude and the vibration speed of the radial ultrasonic vibration and drives the grinding disc grinding wheel part 6 to vibrate radially and ultrasonically.
The first end of the amplitude transformer 2 is a wide section end, and the second end of the amplitude transformer 2 is a narrow section end; in this embodiment: the transducer 1 is directly fixedly connected with the first end of the wide section of the amplitude transformer 2, and the second end of the narrow section of the amplitude transformer 2 is fixedly connected with the end of the narrow section of the main shaft body 3.
The main shaft body 3 comprises a middle section and connecting sections fixedly connected to the two axial sides of the middle section, the outer diameter of the connecting sections is smaller than the maximum outer diameter of the middle section, the second end of the amplitude transformer 2 is fixedly connected to the tail end of one connecting section, and the skirt edge structural part 5 is fixedly connected to the tail end of the other connecting section. The concrete structure is as follows: the two connecting sections are two first cylindrical sections with equal diameters, the middle section comprises a second cylindrical section, the outer diameter of the second cylindrical section is larger than that of the first cylindrical section, a cone frustum is connected between the second cylindrical section and the first cylindrical section, one end of the cone frustum is opposite to the first cylindrical section Ji Gujie, and the other end of the cone frustum is opposite to the second cylindrical section Ji Gujie; the flange 4 is fixedly connected to the outer peripheral wall of the middle part of the second cylindrical section.
The skirt structure portion 5 has an outer diameter larger than the maximum outer diameter of the middle section of the main shaft body 3. The concrete structure is as follows: the skirt structure portion 5 includes a land having a concave groove 51 on the bottom surface thereof, the groove 51 being a revolving groove structure such as a stepped groove or a tapered groove, and the inner diameter from the groove bottom to the notch being gradually increased to form the skirt structure.
The grinding disc grinding wheel part 6 comprises a fixed sleeve, the lower periphery of the fixed sleeve extends inwards to form an annular part 61, the bottom surface of the annular part is fixedly provided with an abrasive 62, and the fixed sleeve is fixedly sleeved outside the connecting disc of the skirt structure part 5. In the concrete structure, the fixed sleeve of the grinding disc grinding wheel part 6 is assembled with the connecting disc of the skirt structure part 5 in interference fit.
Preferably, the vibration frequency and amplitude of the spindle can be designed to be different in frequency and amplitude according to the grinding requirements, the frequency is usually in the range of 15-55kHz, and the amplitude is in the range of 1-15 mu m. The ultrasonic signals generated by the spindle are transmitted to the transducer through the induction coil, and the ultrasonic signals can be transmitted to the transducer by a brush or other modes. The abrasive on the grinding disc can be super-hard abrasive: diamond or cubic boron nitride, and also common abrasives such as silicon carbide, corundum, silica, and the like. The material of the amplitude transformer is consistent with that of the grinding disc fixing sleeve, and the amplitude transformer can be aluminum alloy, titanium alloy and other materials which are favorable for ultrasonic transmission. According to the analysis result of the unconstrained mode, when the selected ultrasonic power supply has the frequency of about 20KHz, the final frequency of about 20.4KHz meets the requirements.
In this embodiment, the spindle structure of the ultrasonic-assisted self-rotating grinding machine has the following characteristics: (1) Automatic frequency tracking ensures that the ultrasonic-assisted end grinding disc remains stationary during ultrasonic-assisted grinding. (2) In the ultrasonic grinding process, the power and the amplitude can be automatically adjusted to reach the optimal state; (3) Providing effective protection and alarm for various defects that may occur.
In this embodiment, according to the results of the non-filtering amplitude test, the vibration of the vibration plate is substantially stable under the condition of 65% of the power, and the amplitude size of about 9.4um obtained by selecting the option in which the amplitude shape is relatively uniform is basically satisfactory. The vibration of the vibrating reed is stable under the condition of 100% of the power supply, the amplitude size is about 14um by selecting the option that the amplitude shape is relatively uniform, and each amplitude is uniform. Vibration conversion can achieve an amplitude variation of 10um in the middle of 65% -75% of the power supply power. The vibration amplitude can reach 10um when the power of the power supply is 70%, and the required amplitude can be reached. The amplitude variation can be changed under the stable condition under the condition of 9-14 um.
In this example, according to the temperature change test result, it is shown that the workpiece will not raise the average temperature in the air to about 24 ° under 40% of the power. And under the condition of 55% of power supply, the workpiece can not raise the temperature in the air, and the casting with the average temperature is stabilized at about 30 ℃. Under the condition of 75% of power supply power, the temperature of the workpiece rises faster and faster without cooling measures, and the workpiece rises to more than 80 ℃ within 10 to 15 minutes.
In this embodiment, the main shaft structure of the ultrasonic-assisted self-rotation grinding machine tool can produce the following technical effects: 1. the ultrasonic vibration is used for assisting in self-rotation grinding, so that grinding force can be reduced, crack expansion is restrained, grinding damage is reduced, abrasion of a grinding wheel is reduced, and the like. 2. Ultrasonic vibration is added in the grinding process, the processing property of the workpiece is facilitated on a certain basis, and various mentioned problems in the existing processing mode can be avoided. Has good efficiency and processing technology for surface processing. 3. The ultrasonic-assisted self-rotating grinding machine tool breaks through the limitation that the current research is limited to small workpieces or tools on the application range, and simultaneously solves the problems of low quality and poor quality of hard and brittle materials in surface processing. 4. The flange plate is arranged at the vibration node in the middle of the main shaft to be connected, so that ultrasonic vibration generated by the ultrasonic generator is transmitted to the transducer through the induction coil, and after the longitudinal ultrasonic vibration is converted into radial ultrasonic vibration through the amplitude transformer, the vibration transmitted to the main shaft is prevented from loosening the connection of all parts, and the energy loss in the vibration transmission process is reduced. 5. The end nodes of the main shaft are connected through the flange plates, and a symmetrical skirt edge structure is arranged, so that vibration amplitude and vibration speed are amplified, and meanwhile, the vibration transmission direction is changed. 6. In the symmetrical skirt edge structure arranged in the main shaft, the vibrating disc of the skirt edge structure adopts the design scheme of grinding disc and grinding wheel combination grinding, the grinding wheel is annularly arranged on the outer ring of the radial grinding disc in the skirt edge structure, abrasive particles are in an open design and are uniformly distributed on the annular section of one side of the grinding wheel, which is in direct contact with the abrasive material, so that the occurrence of the conditions of blocking and the like of the grinding wheel is effectively prevented.
The foregoing description is only illustrative of the preferred embodiments of the present invention, and therefore should not be taken as limiting the scope of the invention, for all changes and modifications that come within the meaning and range of equivalency of the claims and specification are therefore intended to be embraced therein.
Claims (1)
1. The utility model provides an ultrasonic auxiliary autogyration grinding lathe main shaft structure which characterized in that: the device comprises a transducer, an amplitude transformer, a main shaft body, a flange plate, a skirt edge structure part, an induction coil connected with the transducer and a millstone grinding wheel part; the transducer is fixedly connected with the first end of the amplitude transformer, the second end of the amplitude transformer is fixedly connected with the first end of the main shaft body, the second end of the main shaft body is fixedly connected with the skirt edge structural part, the grinding disc grinding wheel part is fixedly arranged on the skirt edge structural part, the transducer generates longitudinal ultrasonic vibration, the longitudinal ultrasonic vibration is converted into radial ultrasonic vibration through the amplitude transformer, and the skirt edge structural part amplifies the amplitude and the vibration speed of the radial ultrasonic vibration and drives the grinding disc grinding wheel part to vibrate radially and ultrasonically; the middle part of the main shaft body is fixedly connected with a flange plate and is used for fixedly connecting a main shaft of a transmission connection motor; the first end of the amplitude transformer is a wide section end, and the second end of the amplitude transformer is a narrow section end; the main shaft body comprises a middle section and connecting sections fixedly connected to the two axial sides of the middle section, the outer diameter of the connecting sections is smaller than the maximum outer diameter of the middle section, the second end of the amplitude transformer is fixedly connected to the tail end of one connecting section, the skirt structure part is fixedly connected to the tail end of the other connecting section, and the flange plate is fixedly connected to the peripheral wall of the middle section; the two connecting sections are two first cylindrical sections with equal diameters, the middle section comprises a second cylindrical section, the outer diameter of the second cylindrical section is larger than that of the first cylindrical section, a cone frustum is connected between the second cylindrical section and the first cylindrical section, one end of the cone frustum is opposite to the first cylindrical section Ji Gujie, and the other end of the cone frustum is opposite to the second cylindrical section Ji Gujie; the flange plate is fixedly connected to the middle part of the second cylindrical section; the outer diameter of the skirt structure part is larger than the maximum outer diameter of the middle section; the grinding wheel part of the grinding disc comprises a fixed sleeve, the lower periphery of the fixed sleeve extends inwards to form an annular part, the bottom surface of the annular part is fixedly provided with grinding materials, and the fixed sleeve is fixedly sleeved outside the skirt structure part; the skirt structure part comprises a connecting disc, wherein a groove is concavely arranged on the bottom surface of the connecting disc, the groove is of a rotary groove structure, and the inner diameter from the groove bottom to the groove opening is gradually increased to form a skirt structure; vibration frequency and amplitude of the spindle: the frequency is in the range of 15-55kHz, the amplitude is in the range of 1-15 mu m, and the ultrasonic signal generated by the main shaft is transmitted to the transducer through the induction coil; the grinding material on the grinding disc grinding wheel part is super-hard grinding material or common grinding material, and the amplitude transformer is consistent with the material of the fixing sleeve.
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| CN202010086513.4A CN111113166B (en) | 2020-02-11 | 2020-02-11 | Main shaft structure of ultrasonic-assisted self-rotation grinding machine tool |
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| CN202010086513.4A CN111113166B (en) | 2020-02-11 | 2020-02-11 | Main shaft structure of ultrasonic-assisted self-rotation grinding machine tool |
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| CN111113166B true CN111113166B (en) | 2024-06-07 |
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| CN111168485B (en) * | 2020-02-11 | 2024-06-07 | 华侨大学 | Ultrasonic vibration auxiliary self-rotation grinding machine tool and main shaft device thereof |
| TR2021010781A2 (en) * | 2021-07-01 | 2023-01-23 | Arslan Refik Bilal | VIBRATING DRUM CENTRAL SHAFT FOR WASHING MACHINE |
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| CN205996712U (en) * | 2016-08-31 | 2017-03-08 | 福建晶安光电有限公司 | A kind of supersonic vibration assistant grinding draws rod machine tool chief axis |
| WO2018049790A1 (en) * | 2016-09-14 | 2018-03-22 | 青岛理工大学 | Multi-angle two-dimensional ultrasonic vibration assisted grinding device of nano-fluid minimum quantity lubrication type |
| CN108637801A (en) * | 2018-08-01 | 2018-10-12 | 中北大学 | A kind of ultrasonic vibration aided grinding device and its application |
| CN209850497U (en) * | 2018-11-09 | 2019-12-27 | 河南理工大学 | Ultrasonic plane grinding system with flange plate having double vibration reduction and double sealing functions |
| CN211841234U (en) * | 2020-02-11 | 2020-11-03 | 华侨大学 | Spindle structure of an ultrasonic-assisted self-rotating grinding machine tool |
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2020
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN205996712U (en) * | 2016-08-31 | 2017-03-08 | 福建晶安光电有限公司 | A kind of supersonic vibration assistant grinding draws rod machine tool chief axis |
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| CN209850497U (en) * | 2018-11-09 | 2019-12-27 | 河南理工大学 | Ultrasonic plane grinding system with flange plate having double vibration reduction and double sealing functions |
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| 旋转超声磨削加工技术研究进展;朱旭等;第17 国特种加工学术会议论文集（下册）;20171117;全文 * |
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