CN111001928B

CN111001928B - Light beam scanning device for laser micropore processing

Info

Publication number: CN111001928B
Application number: CN201911346223.2A
Authority: CN
Inventors: 康伟; 王宁; 赵华龙; 赵荣昌
Original assignee: Xi'an Micromach Photon Technology Co ltd
Current assignee: Xi'an Zhongke Weijing Photon Technology Co ltd
Priority date: 2019-12-24
Filing date: 2019-12-24
Publication date: 2020-09-25
Anticipated expiration: 2039-12-24
Also published as: CN111001928A

Abstract

A beam scanning device for laser micropore processing comprises a reflection module, a deflection module, a translation module and a focusing module; the reflection module comprises a first reflection sub-module and a second reflection sub-module; the number of the deflection modules and the number of the translation modules are two; the shaft systems of the two deflection modules rotate relatively and are arranged between the first reflection sub-module and the second reflection sub-module, and each deflection module comprises an optical wedge assembly and a first direct-drive motor for driving the optical wedge assembly to rotate around a first axial direction; the shafting of two translation modules relatively rotates and all sets up in between the second mirror subassembly with the focus module, every translation module includes dull and stereotyped subassembly and is used for driving dull and stereotyped subassembly around the second direct-driven motor of second axial pivoted. The invention can realize the processing of holes with large depth-diameter ratio and different tapers.

Description

Light beam scanning device for laser micropore processing

Technical Field

The invention belongs to the technical field of laser fine micropore machining, and particularly relates to a light beam scanning device for laser micropore machining.

Background

Compared with the traditional mechanical processing, the laser processing has the following advantages: 1. no contact processing and no mechanical deformation; 2. the laser beam has high energy density, high processing speed and small thermal deformation of the workpiece; 3. can process high hardness, high brittleness and high melting point material; 4. high production efficiency, stable and reliable processing quality and good economic benefit. Laser processing provides a brand-new processing way for the processing industry and has incomparable advantages compared with the traditional processing. With the continuous improvement of the processing requirements, the scanning structure and the scanning mode of laser processing are also continuously improved and upgraded.

At present, the scanning modes of laser micropore processing are various and can be divided into the following modes according to the principle: transmissive and reflective; the composition structure can be divided into: galvanometer scanning, double optical wedge + parallel flat plate scanning, PZT + parallel flat plate scanning and the like. The PZT scanning is realized by controlling a reflecting mirror on the end face of the PZT to rotate around an x (or y) axis and an axis which forms 45 degrees with the y (or x) axis; wedge scanning is the processing of micro-holes by controlling the mutual angular cooperation between two wedges. The main defects of the existing method are as follows: 1. when the micro-hole is machined, machining of any inverted taper hole cannot be realized, such as machining of the micro-hole on an automobile oil nozzle; 2. in the micropore machining, the offset of the received light beam cannot be changed at all times, so that the machining of the micropore with the large depth-diameter ratio cannot be satisfied.

Disclosure of Invention

Aiming at the technical problems, the invention provides a light beam scanning device for laser micropore machining, which can realize the machining of holes with large depth-diameter ratio and different tapers.

The invention provides a light beam scanning device for laser micropore machining, which comprises a mounting plate, and a reflection module, a deflection module, a translation module and a focusing module which are arranged on the mounting plate; the reflection module comprises a first reflection sub-module and a second reflection sub-module; the number of the deflection modules and the number of the translation modules are two; the two deflection module shaft systems rotate relatively and are arranged between the first reflection sub-module and the second reflection sub-module, each deflection module comprises a first direct-drive motor and a corresponding optical wedge assembly arranged on the first direct-drive motor, and each first direct-drive motor is used for driving the corresponding optical wedge assembly to rotate around a first axial direction; two translation module shafting rotate relatively and all set up in the second mirror subassembly with between the gathering module, every translation module include the second directly drive formula motor and install in corresponding flat subassembly on the second directly drive formula motor, every second directly drives formula motor and is used for driving corresponding flat subassembly and around the second axial rotation. The invention can realize the processing of holes with large depth-diameter ratio and different tapers.

When the device is used, after light energy passes through the first reflection sub-module, main light energy is reflected to enter the deflection modules, and the two deflection modules can respectively rotate around the first axial direction to change the synthetic position of a light beam so as to control the size of a processing hole; the light beam passing through the deflection module enters the second reflection sub-module, the main light energy is reflected to enter the translation modules, and the two translation modules can respectively rotate around the second axial direction so as to change the transverse offset of the light beam and further control the taper of the machined hole; finally, the processing of holes with large depth-diameter ratio and different taper angles is realized.

Drawings

Fig. 1 is a schematic structural diagram of a beam scanning apparatus for laser micro-hole machining according to the present invention.

Fig. 2 is a cross-sectional view of the beam scanning apparatus for laser micro-via machining shown in fig. 1.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.

E.g., error! No reference source is found. And error! No reference source is found. The beam scanning device 100 for laser micro-hole machining comprises a mounting plate 001, a reflection module, a deflection module 3, a translation module 4 and a focusing module 5; the reflection module, the deflection module 3, the translation module 4 and the focusing module 5 are all arranged on the mounting plate 001, and the reflection module comprises a first reflection sub-module 1 and a second reflection sub-module 1A; the number of the deflection modules 3 and the number of the translation modules 4 are two; two deflection module 3 shaft systems rotate relatively and are arranged between the first reflection submodule 1 and the second reflection submodule 1A, each deflection module 3 comprises a first direct-drive motor and a corresponding optical wedge component 308 arranged on the first direct-drive motor, and each first direct-drive motor is used for driving the corresponding optical wedge component 308 to rotate around the first axial direction; the shaft systems of the two translation modules 4 rotate relatively and are arranged between the second reflection sub-module 1A and the focusing module 5, each translation module 4 comprises a second direct-drive motor and a corresponding flat plate component 408(418) mounted on the second direct-drive motor, and each second direct-drive motor is used for driving the corresponding flat plate component 408(418) to rotate around the second axial direction; preferably, the plate member 408(418) is made of glass.

When the device is used, after light energy passes through the first reflection sub-module 1, main light energy is reflected to enter the deflection modules 3, and the two deflection modules 3 can respectively rotate around the first axial direction to change the synthesis position of a light beam so as to control the size of a processing hole; the light beam passing through the deflection module 3 enters the second reflection sub-module 1A, main light energy is reflected to enter the translation modules 4, and the two translation modules 4 can respectively rotate around the second axial direction to change the transverse offset of the light beam so as to control the taper of the machined hole; finally, the processing of holes with large depth-diameter ratio and different taper angles is realized.

In the present embodiment, each first direct drive motor includes a first main shaft 303, a pair of first bearings 304, a first motor rotor 306, a first bearing housing 310, a first motor stator 312, a first motor housing 313, and a first base 314. The first base 314 is a hollow structure with two open ends and includes a first end 3141 and a second end 3142. First motor mount 313 is received within first base 314 from first end 3141 of first base 314 and is fixedly attached to second end 3142 of first base 314. The first motor stator 312 is installed in the first motor base 313 from the first end 3141 of the first base 314. The pair of first bearings 304 and the first motor rotor 306 are sleeved outside the hollow first main shaft 303, and the pair of first bearings 304 are located at two sides of the first motor rotor 306. The first spindle 303 is disposed through the first motor stator 312, and the first bearing seat 310 is sleeved outside the first spindle 303 and abuts against a first end 3141 of the first motor seat 313 close to the first base 314; one of the first bearings 304 is located between the first main shaft 303 and the first bearing seat 310, the other first bearing 304 is located between the first main shaft 303 and the first motor seat 313, and the optical wedge assembly 308 is mounted at the end of the first main shaft 303 near the second end 3142; the first clear element 002 is secured to the first end cap 315 of one deflection module 3 and is in a clearance fit with the first end cap 315 of another deflection module 3. The first spindles 303 of the two deflection modules 3 can rotate around the first axial direction respectively to drive the corresponding optical wedge assemblies 308 to rotate respectively. Each wedge assembly 308 includes a wedge, and the cross-sectional shape of the wedge may be triangular, trapezoidal, or the like.

In this embodiment, the first reflector sub-module 1 includes a first window glass seat assembly 101, a collimator tube 102, a first reflector holder 103, and a transflector assembly 104. The first window glass seat assembly 101 is mounted at one end of the light passing pipe 102, and the transflective mirror assembly 104 is mounted on the first reflective support 103 at the end of the light passing pipe 102 opposite to the first window glass seat assembly 101. The second reflector module 1A comprises a second reflector bracket 106, a transflective mirror assembly 104; the end of the first main shaft 303 of one of the deflection modules 3 near the first end 3141 of the first base 314 is threadedly engaged with one of the lock nuts 301; the end of the first main shaft 303 of the other deflection module 3 near the first end 3141 of the first base 314 is screw-fitted with the other lock nut 301. The first main shaft 303 of each deflection module 3 is rotatable relative to the first reflecting support 103 and the second reflecting support 106. The transflective component 104 is used for reflecting and transmitting light, and the proportion of the reflected light is greater than that of the transmitted light.

In this embodiment, each deflection module 3 further comprises a first circular grating assembly 302 and a first grating readhead assembly 316. Each first direct drive motor further includes a pair of

first spacers

305, 307, a first gland 309, a first pressing block 311, and a first end cap 315. A pair of

first spacers

305, 307 are disposed around the first spindle 303 and each first spacer is disposed between the first motor rotor 306 and a corresponding one of the first bearings 304 for protecting and positioning the first motor rotor 306. The first pressing block 311 is clamped between the first motor stator 312 and the first bearing seat 310, and the first pressing block 311 is used for pressing the first motor stator 312. The first pressing cover 309 presses against a side of the first bearing seat 310 facing away from the first base 314. The first circular grating assembly 302 is sleeved outside the first main shaft 303 at a side of the first gland 309 facing away from the first bearing seat 310. The first grating reading head assembly 316 is mounted on the first gland 309, and is used for reading the rotation angle of the first circular grating assembly 302 when the first circular grating assembly 302 rotates along with the first spindle 303. The first end cap 315 is annular and fits within an opening at the second end 3142 of the first base 314; the optical wedge assembly 308 is disposed within the first end cap 315. When the optical wedge assembly 308 is replaced, the first light-passing element 002 can be disassembled and assembled, so that the use is convenient.

In the present embodiment, each first direct drive motor further includes a first temperature sensor 317 and a water joint 318. The temperature sensor 317 is disposed on the first bearing seat 310 and is configured to detect a temperature of the first bearing seat 310; the water joint 318 is disposed on the first base 314 and the first bearing seat 310 and is connected to the water tank on the first motor seat 313 and the water tank on the first bearing seat 310 respectively. The upper water tank of the first motor base 313 is disposed on the outer surface of the first motor base 313 and is annular, and functions to cool the first motor stator 312 and the first bearing 304 near the second end 3142 of the first base 314. An O-ring seal is installed at both ends of the water tank of the first motor mount 313 between the first base 314 and the first motor mount 313 to seal the cooling water. The first gland 309 and the first bearing seat 310 are fixedly connected together by screws, a spiral water tank is opened on the surface of the first bearing seat 310 facing the first gland 309 for cooling the first bearing 304 by cooling water, and an O-ring is arranged between the first bearing seat 310 and the first gland for sealing the spiral water tank. The number of the water joints 318 on the first pedestal 314 is two, wherein one water joint is used for water inlet, and the other water joint is used for water outlet; the number of the water connectors 318 on the first bearing seat 310 is two, one of which is used for water inlet and the other is used for water outlet. The first direct drive motor is cooled by the first motor base 313 and the water tank on the first bearing 310, so that the reduction of the light beam control precision caused by motor damage, bearing failure and optical wedge component deformation due to overhigh temperature rise can be avoided.

In the present embodiment, each of the second direct drive motors includes a second main shaft 403, a pair of second bearings 404, a second motor rotor 406, a second bearing housing 410, a second motor stator 412, a second motor housing 413, and a second base 414. The second base 414 is a hollow structure with two open ends and includes a front end 4141 and a rear end 4142. The second motor seat 413 is installed in the second base 414 from the front end 4141 of the second base 414 and is fixedly installed to the rear end 4142 of the second base 414. The second motor stator 412 is installed in the second motor base 413 from the front end 4141 of the second base 414. The pair of second bearings 404 and the second motor rotor 406 are sleeved outside the hollow second main shaft 403, and the pair of second bearings 404 are located at two sides of the second motor rotor 406. The second spindle 403 is disposed through the second motor stator 412, and the second bearing seat 410 is sleeved outside the second spindle 403 and abuts against the second motor seat 413 near the front end 4141 of the first base 314; one of the second bearings 404 is located between the second main shaft 404 and the second bearing seat 410, the other second bearing 404 is located between the second main shaft 403 and the second motor seat 413, and the flat plate assembly 408(418) is mounted at the end of the second main shaft 403 near the rear end 4142; the second light passing element 003 is located between the rear end 4142 of the second base 414 of one pan module 4 and the front end 4141 of the second base 414 of another pan module 4. In the present embodiment, the two translation modules 4 respectively include a flat component 408 and a flat component 418 having different structures. The

plate element

408 or 418 includes at least one polygonal prism having a cross section including a pair of parallel light incident and light emitting surfaces. In other embodiments, the flat component 408 and the flat component 418 may be designed to have the same structure according to actual requirements.

In this embodiment, each translation module 4 further includes a second circular grating assembly 402 and a second grating readhead assembly 416. Each second direct-drive motor further includes a pair of

second spacers

405, 407, a second gland 409, a second pressing block 411, and a second end cap 415. A pair of

second spacers

405, 407 is fitted around the second spindle 403 and each second spacer is located between the second motor rotor 406 and a corresponding one of the second bearings 404 for protecting and positioning the second motor rotor 406. The second pressing block 411 is clamped between the first motor stator 312 and the second bearing seat 410, and the second pressing block 411 is used for pressing the second motor stator 412. The second pressing cover 409 presses against a side of the second bearing seat 410 away from the second base 414, so as to fixedly mount the second bearing seat 410 on the second base 414. The second circular grating assembly 402 is sleeved outside the second main shaft 403 on a side of the second gland 409 facing away from the second bearing seat 410. The second grating reading head assembly 416 is mounted on the second pressing cover 409, and is used for reading the rotation angle of the second circular grating assembly 402 when the second circular grating assembly 402 rotates along with the second main shaft 403. The second end cap 415 is ring-shaped and is mounted in the opening of the rear end 4142 of the second base 414, wherein the end of the second main shaft 403 of one of the translation modules 4 near the front portion 4141 of the second base 414 is threadedly engaged with one of the lock nuts 401, and the lock nut 401 is disposed adjacent to the second reflective support 106, and the lock nut 401 is rotatable relative to the second reflective support 106. The rear end 4142 of the second base 414 of one of the translation modules 4 is disposed adjacent to one end face of the second hollow light passing element 003 through the second end cap 415, the other end of the second light passing element 003 is disposed adjacent to the lock nut 401 outside the second main shaft 403 of the other translation module 4, and the second light passing element 003 is in clearance fit with at least one of the two translation modules. The plate members 408(418) are respectively disposed in the second end caps 415 of the corresponding one of the translation modules 4.

In the present embodiment, each of the second direct drive motors further includes a second temperature sensor 417 and a water joint 318; the second temperature sensor 417 is disposed on the second bearing 404, and is configured to detect a temperature of the second bearing housing 410. The water joint 318 is disposed on the second base 414 and the second bearing housing 410 and is respectively connected to the water tank on the second motor housing 413 and the water tank on the second bearing housing 410. The upper water tank of the second motor base 413 is disposed on the outer surface of the second motor base 413 and is annular, and plays a role in cooling the first motor base 41 and the second motor stator 412. An O-ring seal is installed between the second base 414 and the second motor base 413 at two ends of the water tank of the second motor base 413, and plays a role in sealing cooling water. The second pressing cover 409 and the second bearing seat 410 are fixedly connected together through screws, and a spiral water groove is opened on the surface of the second bearing seat 410 facing the second pressing cover 409 for cooling the second bearing seat 410 through cooling water. An O-ring is disposed between the second bearing seat 410 and the second gland for sealing the spiral water tank. The number of the water connectors 318 on the second base 414 is two, one of which is used for water inlet and the other is used for water outlet; the number of the water connectors 318 on the second bearing seat 410 is two, one of which is used for water inlet and the other is used for water outlet. The second direct-drive motor is cooled down through the water tanks on the second motor base 413 and the second bearing 410, so that the deformation of the flat component caused by overhigh temperature rise can be avoided, and the accuracy of light beam control is influenced.

In this embodiment, the focusing module 5 includes a cover plate 501, a third base 502, a mounting seat 504, a focusing lens group 505, a second window glass seat assembly 506, and an air nozzle assembly 507. The third base 502 is a hollow structure with openings at two ends, and the cover plate 501 is annular and is installed in the opening at one end of the third base 502. The mounting base 504 is a hollow structure with two open ends, one end of the mounting base 504 is mounted outside the opening of the third base 502 far from the cover plate 501, and the focusing lens group 505 is fixedly mounted in the mounting base 504. The second window glass seat assembly 506 is installed in the air nozzle assembly 507, and the air nozzle assembly 507 is connected to one end of the mounting base 504 opposite to the third base 502.

The focusing lens group 505 and the mounting base 504 are screwed together, and quick replacement can be realized. The air nozzle assembly 507 is connected with the mounting base 504 through threads, and is independent from the focusing lens group 505, and the air nozzle assembly 507 with corresponding specification can be replaced quickly according to the specification of the focusing lens in practical use. The mounting base 504 and the third base 502 are connected by screws. The second window glass seat assembly 506 is installed on the air nozzle assembly 507 through a thread, so that the space of the air nozzle assembly and the space of the focusing lens assembly are isolated, and the cleanness of the space around the focusing lens assembly 505 is ensured.

An air path joint 004 is arranged on the third base 502. An air nozzle 509 is arranged on the air nozzle assembly 507. When gas with certain pressure is introduced into the gas path connector 004, gas protection can be formed in light path transmission among the deflection modules, among the translation modules and around the focusing lens group, and part of the protective gas can escape through the gap between the first light passing element 002 and the polarization module 3 and the gap between the second light passing element 003 and the translation module, so that the pollution of optical components caused by the entering of processing dust and the like is avoided. And provides a flow of process air when venting the gas connector 509.

In this embodiment, the optical fiber connector further includes three adapters 105, position-sensitive monitoring modules 2 corresponding to the adapters 105 one by one, and a light splitting flat plate 503; each position-sensitive monitoring module 2 comprises a transmissive mirror assembly 201, a reflective mirror assembly 202 opposite the transmissive mirror assembly 201, and a receiver assembly 203 opposite the reflective mirror assembly 202; the first adapter is connected to the side of the first reflective support 103 opposite to the light passing pipe 102, and the transflective mirror assembly 104 is opposite to the transmissive mirror assembly 201 of the first position-sensitive monitoring module; the second adapter is connected to a side of the second reflector bracket 106 opposite to the deflection module 3, and the transflective mirror assembly 104 is opposite to the transmissive mirror assembly 201 of the second position-sensitive monitoring module 2; the light splitting plate 503 is installed in the third base 502; the third adapter is connected to one side of the third base 503, and the spectroscopic plate 503 is opposite to the transmissive mirror assembly 201 of the third position-sensitive monitoring module 2. The mirror assembly 202 is coupled to the mirror assembly 201 by a screw threaded disc spring to adjust and reflect the light beam. The receiver assembly 203 comprises an attenuation sheet, a receiver and a processing device, and plays a role in sensing the position of the light beam.

A window is further formed in one side of the third base 502, an upper cover plate 508 covering the window is arranged on the third base 502, the upper cover plate 508 is connected with the third base 502 through screws, and the upper cover plate plays a role of a window and improves the maintenance capability of the light splitting plate 503.

In this embodiment, the collimator 102, the second spindle 403, the second light passing element 003, the adapter 105 connected to the first reflecting support 103, and the third base 502 are provided with a light channel coaxially arranged and parallel to the second axial direction; the first spindle 303, the first light-passing element 002, the adapter 105 connected to the second reflecting support 106, and the adapter 105 connected to the third base 502 are provided with light channels which are coaxially arranged and are parallel to the first axial direction; the first reflecting bracket 103 is provided with optical channels which are coaxial with the light passing tube 102 and the first main shaft 303 respectively and are vertical to each other; the second reflecting support 106 is provided with optical channels which are coaxially arranged with the optical channels of the second main shaft 403 and the first main shaft 303 respectively and are perpendicular to each other; the half mirror assembly 104, the mirror group 202 and the light splitting plate 503 form an angle of 45 degrees with the first axis. In this embodiment, the first axial direction is perpendicular to the second axial direction.

The beam scanning device for laser micropore processing is based on the optical principle of 'double optical wedges + double flat plates', and simultaneously considers the modular design of independent functional modules. The frameless motor direct-drive type position sensor adopts a frameless motor direct-drive mode, combines circular grating high-precision position monitoring, and gives consideration to light path transmission anti-pollution protection, key rotor part water-cooling and temperature monitoring. The device has the advantages of compact and simple transmission structure, high precision, quick response and the like. The invention can realize the processing conditions of holes with large depth-diameter ratio and different tapers in laser micropore processing.

The above embodiments are merely illustrative of one or more embodiments of the present invention, and the description is specific and detailed, but not construed as limiting the scope of the invention. It should be noted that various changes and modifications can be made by those skilled in the art without departing from the spirit of the invention, and these changes and modifications are all within the scope of the invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. A beam scanning device for laser micropore processing is characterized by comprising an installation plate, a reflection module, a deflection module, a translation module and a focusing module, wherein the reflection module, the deflection module, the translation module and the focusing module are arranged on the installation plate; the reflection module comprises a first reflection sub-module and a second reflection sub-module; the number of the deflection modules and the number of the translation modules are two; shaft systems of the two deflection modules rotate relatively and are arranged between the first reflection sub-module and the second reflection sub-module, each deflection module comprises a first direct-drive motor and an optical wedge assembly arranged on the first direct-drive motor, and each first direct-drive motor is used for driving the corresponding optical wedge assembly to rotate around a first axial direction; shafting of the two translation modules relatively rotate and are arranged between the second reflector assembly and the focusing module, each translation module comprises a second direct-drive motor and a corresponding flat plate assembly arranged on the second direct-drive motor, and each second direct-drive motor is used for driving the corresponding flat plate assembly to rotate around the second axial direction;

each first direct-drive motor comprises a first main shaft, a pair of first bearings, a first motor rotor, a first bearing seat, a first motor stator, a first motor seat and a first base; the first base is a hollow structure with two open ends and comprises a first end and a second end; the first motor base is arranged in the first base from the first end of the first base and fixedly mounted to the second end of the first base; the first motor stator is arranged in the first motor base from the first end of the first base; the pair of first bearings and the first motor rotor are sleeved outside the hollow first main shaft, and the pair of first bearings are positioned on two sides of the first motor rotor; the first main shaft penetrates through the first motor stator, and the first bearing seat is sleeved outside the first main shaft and abuts against the first end, close to the first base, of the first motor seat; one first bearing is positioned between the first main shaft and the first bearing seat, the other first bearing is positioned between the first main shaft and the first motor seat, the optical wedge component is arranged at the end part of the first main shaft close to the second end, and the first light-passing element is fixedly connected with the first end cover of one deflection module and is in clearance fit with the first end cover of the other deflection module;

each deflection module further comprises a first circular grating assembly and a first grating reading head assembly; each first direct-drive motor further comprises a pair of first spacer bushes, a first gland, a first pressing block and a first end cover; the pair of first spacer bushes are sleeved on the first main shaft, and each first spacer bush is positioned between the first motor rotor and a corresponding first bearing; the first pressing block is clamped between the first motor stator and the first bearing seat, and the first pressing cover is abutted against one side, away from the first base, of the first bearing seat; the first circular grating assembly is sleeved outside the first main shaft and positioned on one side, away from the first bearing seat, of the first gland, and the first grating reading head assembly is installed on the first gland; the first end cover is annular and is arranged in the opening of the second end of the first base; the optical wedge assembly is disposed within the first end cap.

2. The beam scanning apparatus for laser micro-via machining according to claim 1, wherein the first reflector sub-module comprises a first window glass seat assembly, a light passing pipe, a first reflector bracket and a transreflector assembly; the first window glass seat assembly is arranged at one end of the light passing pipe, and the first reflector assembly is arranged on the first reflecting support and is positioned at one end of the light passing pipe, which is opposite to the first window glass assembly; the second reflection sub-module comprises a second reflection bracket and a transflective mirror assembly; the end part of the first main shaft of one deflection module, which is close to the first end of the first base, is in threaded fit with a locking nut; the end of the first main shaft of the other deflection module close to the first end of the first base is in threaded fit with the other locking nut.

3. The beam scanning apparatus for laser micro-via machining according to claim 1, wherein each of the first direct drive motors further comprises a first temperature sensor and a water joint; the temperature sensor is arranged on the first bearing seat; the water joint of the first direct-drive motor is arranged on the first base and the first bearing seat and is respectively connected with the water tank on the first motor seat and the water tank on the first bearing seat.

4. The beam scanning apparatus for laser micro-via machining according to claim 2, wherein each of the second direct drive motors includes a second spindle, a pair of second bearings, a second motor rotor, a second bearing housing, a second motor stator, a second motor housing, and a second base; the second base is of a hollow structure with openings at two ends and comprises a front end and a rear end; the second motor base is arranged in the second base from the front end of the second base and fixedly mounted to the rear end of the second base; the second motor stator is arranged in the second motor base from the front end of the second base; the pair of second bearings and the second motor rotor are sleeved outside the hollow second main shaft, and the pair of second bearings are positioned on two sides of the second motor rotor; the second main shaft penetrates through the second motor stator, and the second bearing seat is sleeved outside the second main shaft and abuts against the front end, close to the first base, of the second motor seat; one of them second bearing is located between second main shaft and the second bearing frame, and another second bearing is located between second main shaft and the second motor cabinet, dull and stereotyped subassembly is installed in the tip that the second main shaft is close to the rear end.

5. The beam scanning apparatus for laser micro-via machining according to claim 4, wherein each translation module further comprises a second circular grating assembly and a second grating reader head assembly; each second direct-drive motor comprises a pair of second spacer bushes, a second gland, a second pressing block and a second end cover; the pair of second spacer bushes are sleeved on the second main shaft, and each second spacer bush is positioned between the second motor rotor and a corresponding second bearing; the second pressing block is clamped between the second motor stator and the second bearing seat; the second gland is pressed against one side of the second bearing seat, which is far away from the second base; the second circular grating assembly is sleeved outside the second main shaft and positioned on one side, away from the second bearing seat, of the second gland, and the second grating reading head assembly is installed on the second gland; the second end cover is annular and is arranged in an opening at the rear end of the second base, the end part, close to the front part of the second base, of the second main shaft of one translation module is in threaded fit with a locking nut, the locking nut is arranged adjacent to the second reflection support and can be rotatably arranged relative to the second reflection support, the rear end of the second base of one translation module is arranged adjacent to one end face of a hollow second light-passing element through the second end cover, the other end of the second light-passing element is arranged adjacent to a locking nut outside the second main shaft of the other translation module, and the second light-passing element is in clearance fit with at least one of the two translation modules; the flat component is arranged in the second end cover.

6. The beam scanning apparatus for laser micro-hole machining according to claim 5, wherein each of the second direct drive motors further includes a second temperature sensor and a water joint; the second temperature sensor is arranged on the second bearing; and the water joint of the second direct-drive motor is arranged on the second base and the second bearing seat and is respectively connected with the water tank on the second motor seat and the water tank on the second bearing seat.

7. The beam scanning apparatus for laser micro-via machining according to claim 5, wherein the focusing module comprises a cover plate, a third base, a mounting seat, a focusing lens assembly, a second window glass seat assembly and an air tap assembly; the third base is of a hollow structure with openings at two ends, and the cover plate is annular and is arranged in the opening at one end of the third base; the mounting seat is of a hollow structure with openings at two ends, one end of the mounting seat is arranged outside the opening at the end, far away from the cover plate, of the third base, and the focusing lens group is fixedly arranged in the mounting seat; the second window glass seat assembly is installed in the air faucet assembly, and the air faucet assembly is connected to one end, back to back, of the installation seat and the third base.

8. The beam scanning apparatus for laser micro-via machining according to claim 7, wherein the third base has a gas path connector, and when a gas under a certain pressure is introduced into the gas path connector, a gas shield is formed in the optical path transmission between the deflection modules, between the translation modules, and around the focusing lens group, and a part of the shielding gas can escape through the gap between the first light passing element and the polarization module and the gap between the second light passing element and the translation module.

9. The beam scanning device for laser micropore machining according to claim 5, further comprising three adapter seats, position sensitive monitoring modules corresponding to the adapter seats one by one, and a light splitting flat plate; each position-sensitive monitoring module comprises a transmission mirror assembly, a reflection mirror assembly opposite to the transmission mirror assembly and a receiver assembly opposite to the reflection mirror assembly; the first adapter is connected to one side, opposite to the light passing pipe, of the first reflection support, and the transflective mirror assembly is opposite to the transmission mirror assembly of the first position-sensitive monitoring module; the second adapter is connected to one side, opposite to the deflection module, of the second reflection support, and the transflective mirror assembly is opposite to the transmission mirror assembly of the second position-sensitive monitoring module; the light splitting flat plate is arranged in the third base; the third adapter is connected to one side of the third base, and the light splitting flat plate is opposite to a transmission mirror assembly of the third position-sensitive monitoring module.

10. The beam scanning device for laser micropore machining according to claim 9, wherein the transition tube, the second spindle, the adapter of the second light passing element connected to the first reflection support and the third base are provided with light channels which are coaxially arranged and are parallel to the second axial direction; the first main shaft, the first light-transmitting element, the adapter connected with the second reflecting support and the adapter connected with the third base are provided with light channels which are coaxially arranged and are parallel to the first axial direction; the first reflection bracket is provided with mutually vertical light channels which are coaxial with the light passing tube and the first main shaft respectively; the second reflection bracket is provided with an optical channel which is coaxially arranged with and vertical to the optical channels of the second main shaft and the first main shaft respectively; the reflecting mirror group, the reflecting mirror group and the light splitting flat plate form 45-degree included angles with the first axial direction.

11. The laser micro-aperture machining beam scanning device of claim 1, wherein the first axis is perpendicular to the second axis.