CN111006006A - A gear transmission device coated with super lubricating solid film - Google Patents
A gear transmission device coated with super lubricating solid film Download PDFInfo
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- CN111006006A CN111006006A CN201911362583.1A CN201911362583A CN111006006A CN 111006006 A CN111006006 A CN 111006006A CN 201911362583 A CN201911362583 A CN 201911362583A CN 111006006 A CN111006006 A CN 111006006A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H57/00—General details of gearing
- F16H57/04—Features relating to lubrication or cooling or heating
- F16H57/041—Coatings or solid lubricants, e.g. anti-seize layers or pastes
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
- F16H19/02—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion
- F16H19/04—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising a rack
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H49/00—Other gearings
- F16H49/001—Wave gearings, e.g. harmonic drive transmissions
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H57/00—General details of gearing
- F16H57/04—Features relating to lubrication or cooling or heating
- F16H57/048—Type of gearings to be lubricated, cooled or heated
- F16H57/0493—Gearings with spur or bevel gears
- F16H57/0495—Gearings with spur or bevel gears with fixed gear ratio
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H57/00—General details of gearing
- F16H57/04—Features relating to lubrication or cooling or heating
- F16H57/048—Type of gearings to be lubricated, cooled or heated
- F16H57/0498—Worm gearings
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Gears, Cams (AREA)
- General Details Of Gearings (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a gear transmission device plated with a super-lubricating solid film, which consists of a gear transmission device body and a-C, H-based super-lubricating solid film plated on one surface or two surfaces of a gear meshing surface; the film coating component is provided with a conductive threaded hole which is used for being communicated with a conductive area of the processing platform through a conductive screw during preparation. The invention can greatly reduce the friction torque of operation, increase the stability of rotation and reduce the energy loss by coating, and the addition of the threaded hole for electric conduction can also ensure the electric conduction between the coated part and the workbench during processing.
Description
Technical Field
The invention belongs to the technical field of bearings, and relates to a gear transmission device plated with a super-lubricating solid film.
Background
Ultra-lubricating solid films and conventional solid lubricating films (e.g., MoS)2) In comparison, its coefficient of friction: (<0.005) is 1-2 orders of magnitude lower, the fluctuation of the friction torque is greatly reduced, the running stability of the movable mechanism can be greatly improved, the friction torque and the energy consumption are reduced, and irreplaceable important effects on improving the running stability of the space spacecraft, reducing the noise and the power attenuation caused by friction and the like are achieved.
Although a great deal of research is carried out on super-lubricating materials by various colleges and research institutes at home and abroad, and the preparation of a macro-scale super-lubricating film is tried, at present, no super-lubricating film can be successfully applied to a solid lubricating bearing for space. The main problems involved are as follows: (1) the super-lubrication research is basically limited to the micro scale, and the micro super-lubrication mechanism is difficult to reproduce in the macro scale; (2) a few materials (such as a hydrogen-containing amorphous carbon film, a-C: H) which show super-lubricating property in macroscopic size have short service life and large friction coefficient fluctuation and cannot meet the requirement of space application; (3) most of the super-lubricating materials obtained in the current research have no space environment adaptability (such as vacuum, irradiation, atomic oxygen and the like).
The hydrogen-containing amorphous carbon (a-C: H) film is the only super-lubricating material with space application feasibility at present, and is attributed to three aspects: the membrane is the only material which is reported in the literature and shows super-lubricating performance on a macroscopic scale (namely, a large scale explained in concept and connotation) sample under the traditional test condition; the film H is an amorphous film, does not depend on a perfect crystal structure and an ultra-clean surface, so that the film H can be effectively plated on non-planar surfaces (such as an inner ring and an outer ring of a rolling ball bearing) which are difficult to realize for materials such as a graphite single crystal, an H-BN single crystal and the like; and (III) the diamond-like carbon (DLC) film similar to the a-C: H film in composition and structure is successfully applied to a space moving mechanism for many times, and space flight verification is obtained, so that the a-C: H film has high space environment adaptation potential, which is not possessed by other two-dimensional materials.
However, when preparing the a-C: H-based super-lubricating solid film, the film material can be simultaneously deposited on a workpiece table. Because the film material has poor conductivity, the conductivity between the workpiece table and the film coating component gradually becomes poor along with the progress of the film coating process. However, the process of plating the a-C: H-based super-lubricating solid film requires good electrical conductivity between the workpiece to be plated and the workpiece table so as to apply direct current or pulse voltage to ensure the structure and performance of the super-lubricating film. Therefore, the stage and the plating member are required to have good conductivity, and therefore, the process effect is not good when the stage is covered with a thin film material.
Disclosure of Invention
In view of the above, the present invention provides a gear transmission coated with an ultra-lubricating solid film, which can greatly reduce the running friction torque, increase the rotational stability, and reduce the energy loss by coating, and the addition of a conductive threaded hole can ensure the conductivity between a coated part and a workbench during processing.
In order to solve the technical problem, the invention is realized as follows:
a gear transmission device plated with a super-lubricating solid film comprises a gear transmission device body and a-C, H-based super-lubricating solid film plated on one or two surfaces of a gear meshing surface; the film coating component is provided with a conductive threaded hole which is used for being communicated with a conductive area of the processing platform through a conductive screw during preparation.
Preferably, the gear transmission is a straight gear, a helical gear, a herringbone gear, a conical gear, a hypoid gear, a crossed helical gear, a rack and pinion mechanism or a worm and gear.
Preferably, the gear transmission device is a harmonic reducer serving as a gear transmission speed reduction device, and in the harmonic reducer, the surfaces of the gear teeth of the rigid gear and/or the surfaces of the gear teeth of the flexible gear are/is plated with the a-C: H-based super-lubricating solid film.
Preferably, the inner surface of the flexible gear of the harmonic reducer is plated with the a-C: H-based super-lubricating solid film.
Preferably, the types of harmonic reducers include single wave harmonic reducers, double wave harmonic reducers, and triple wave harmonic reducers.
Preferably, the thickness of the a-C: H-based super-lubricating solid film is 0.1-10 mu m.
Preferably, the thickness of the a-C: H-based super-lubricating solid film is 1-3 μm.
Preferably, the thickness of the a-C: H-based super-lubricating solid film is 1.5-2.5 μm.
Preferably, the a-C is one or more elements of Ti, Al, Zr, Cr, Cu, Mo, V, Si and Ag doped in the H-based super-lubricating solid film; the microstructure of the a-C: H-based super-lubricating solid film is amorphous, nanocrystalline or a composite of the amorphous and the nanocrystalline.
Preferably, when the film-coated part is prepared, a conductive screw is connected with the conductive threaded hole, and the part to be film-coated is communicated with the workpiece table by adopting a wire band; through the design of the size of the conductive threaded hole, the material of the conductive screw and the material of the wire belt, the resistance of the part to be coated to the workpiece table is less than 5 ohms.
The preparation method of the a-C: H-based super-lubricating solid film can be physical vapor deposition or chemical vapor deposition.
Has the advantages that:
the gear surface of the gear transmission device is coated with the a-C-H-based super-lubricating solid film, so that the friction energy consumption of the gear transmission device in the operation process can be greatly reduced, the service life of the gear transmission device is prolonged, the transmission efficiency of the gear transmission device is improved, and the operation stability of the gear transmission device is improved. The device is particularly suitable for moving mechanisms in space or planet detection with long service life, high precision, high stability and the like, such as a spreading mechanism, a mechanical arm, a driving mechanism and the like. .
Meanwhile, the coating part is provided with a conductive threaded hole which is communicated with a conductive area of the processing platform through a conductive screw during preparation, so that the conduction between the coating part and the workbench can be ensured during processing and is not influenced by sputtering non-conductive materials.
The invention is not only suitable for spacecraft parts, but also suitable for ground movable parts, in particular to servo systems with high dynamic characteristics. The application fields of the method comprise aviation, navigation, robots, energy sources, bionic machinery, machine tools, instruments, electronic equipment, transportation, hoisting machinery, medical machinery, agricultural machinery, mine metallurgy, ship and naval vessels and the like.
Drawings
FIG. 1 is a schematic diagram of a straight-tooth gear pair for a spacecraft coated with an ultra-lubricating solid film;
FIG. 2 is a schematic view of a rack and pinion pair for a spacecraft coated with an ultra-lubricating solid film;
FIG. 3 is a schematic diagram of a harmonic reducer for a spacecraft coated with a super-lubricating solid film.
Detailed Description
The invention provides a gear transmission device plated with a super-lubricating solid film, which consists of a gear transmission device body and a-C, H-based super-lubricating solid film plated on one surface or two surfaces of a gear meshing surface; the film coating component is provided with a conductive threaded hole which is used for being communicated with a conductive area of the processing platform through a conductive screw during preparation. The use of the H-based super-lubricating solid film can greatly reduce the friction energy consumption in the running process of the gear transmission device, prolong the service life of the gear transmission device, improve the transmission efficiency of the gear transmission device and increase the running stability of the gear transmission device; more importantly, the increase and the use of the conductive threaded holes can ensure the conductivity between the coating part and the workbench during processing and are not influenced by the sputtered non-conductive material.
The a-C: H-based super-lubricating solid film used in the invention can adopt any one of the existing a-C: H-based super-lubricating solid films. The thickness of the a-C-H-based super-lubricating solid film is 0.1-10 mu m, and the preferable range is 1-3 mu m. When the thickness of the a-C-H-based super-lubricating solid film is 1.5-2.5 mu m, the better effect can be achieved, the preparation time is reduced, and the process cost is greatly reduced. The composition of the a-C-H-based super-lubricating solid film may only contain C element and H element, or may contain one or more elements of Ti, Al, Zr, Cr, Cu, Mo, V, Si, Ag and the like in addition to C, H element. And the microstructure of the a-C: H-based super-lubricating solid film can be amorphous, nanocrystalline or a composite of the amorphous and the nanocrystalline.
The scheme can be applied to various gear transmission devices, and not only comprises a straight gear, a helical gear, a herringbone gear, a conical gear, a hypoid gear, a staggered shaft helical gear, a gear rack mechanism or a worm gear, but also comprises a harmonic reducer serving as a gear transmission speed reduction device.
The invention is described in detail below by taking a straight-tooth gear, a rack-and-pinion mechanism and a harmonic reducer for a spacecraft as examples, and taking three embodiments.
Example 1
As shown in figure 1, a solid lubrication straight-tooth gear pair coated with a super-lubrication solid film is composed of a pinion 11 and a bull gear 12; the tooth surfaces of the pinion 11 and the bull gear 12 are coated with a-C: H-based super-lubricating solid film 13. The pinion gear 11 and the bull gear 12 are provided with conductive screw holes 14 and 15. The preparation process of the a-C: H-based super-lubricating solid film 15 comprises the following steps:
the a-C is that the H-base super-lubricating solid film is prepared by adopting a reactive magnetron sputtering technology, and a stainless steel screw is firstly connected with a threaded hole for electric conduction, so that a part to be coated is fixed on a workpiece table; the part to be coated is communicated with the workpiece platform by adopting the wire band, and the resistance from the part to be coated to the workpiece platform is less than 5 ohms by the design of the size of the threaded hole for electric conduction, the material of the conductive screw and the material of the wire band. In this embodiment, the conductive screw is a stainless steel screw, the wire band is a woven copper wire band, and the measured resistance from the component to be coated to the workpiece table is less than 0.3 ohm.
Secondly, the target material uses Ti target with purity higher than 99.99%, the reaction gas adopts high-purity hydrogen with purity higher than 99.999%, high-purity nitrogen with purity higher than 99.999% and high-quality purityAt 99.9% acetylene gas. The vacuum chamber background vacuum degree in the deposition preparation process is better than 1 multiplied by 10-3Pa. In this example, the total deposition time was 1.5 hours, resulting in a total film thickness of about 1.2 μm.
According to China institute of space technology standard Q/W1106-2007 sputtering deposition MoS for spacecraft2The performance test method of the solid lubricating film tests that the adhesive force of the film is more than or equal to 250mN and the friction coefficient<0.003。
In the practical application, an a-C: H-based super-lubricating solid film can be plated on one of the pinion 11 and the bull gear 12. In order to ensure the lubricating effect, other types of lubricating films may be plated on the other member.
Example 2
As shown in figure 2, the solid lubrication straight-tooth gear pair coated with the super-lubrication solid film consists of a gear 21 and a rack 22. The tooth surfaces of the gear 21 and the rack 22 are coated with an a-C: H-based super-lubricating solid film 23. The gear 21 and the rack 22 are provided with screw holes 24 and 25 for electric conduction. The preparation process of the a-C: H-based super-lubricating solid film 23 comprises the following steps:
the a-C is that the H-base super-lubricating film is prepared by adopting a reactive magnetron sputtering technology, and a stainless steel screw is firstly connected with a threaded hole for electric conduction, so that a part to be coated is fixed on a workpiece table; the part to be coated is communicated with the workpiece platform by adopting the wire band, and the resistance from the part to be coated to the workpiece platform is less than 5 ohms by the design of the size of the threaded hole for electric conduction, the material of the conductive screw and the material of the wire band. In this embodiment, the conductive screw is a stainless steel screw, the wire band is a woven copper wire band, and the measured resistance from the component to be coated to the workpiece table is less than 0.3 ohm.
Secondly, the target material uses a Ti target with the purity higher than 99.99 percent, the reaction gas adopts high-purity hydrogen with the purity higher than 99.999 percent, high-purity nitrogen with the purity higher than 99.999 percent and acetylene gas with the purity higher than 99.9 percent. The vacuum chamber background vacuum degree in the deposition preparation process is better than 1 multiplied by 10-3Pa. In this example, the total deposition time was 2 hours, and the total thickness of the obtained thin film was about 1.5 μm.
According to China institute of space technology standard Q/W1106-2007 sputtering deposition MoS for spacecraft2The solid lubricating film performance test method tests that the adhesive force of the film is more than or equal to 280mN and the friction coefficient<0.003。
In the practical application, an a-C: H-based super-lubricating solid film can be plated on one of the gear 21 and the rack 22. In order to ensure the lubricating effect, other types of lubricating films may be plated on the other member.
Example 3
As shown in FIG. 3, the harmonic reducer for the spacecraft coated with the super-lubricating solid film is specifically composed of a rigid gear 31, a flexible gear 32, a flexible bearing 33, a cam 34 and a super-lubricating film 35. The flexible bearing 33 includes a flexible bearing outer ring 331, a flexible bearing inner ring 333, and flexible bearing balls 332. The specific plating sites of the super-lubricating film 35 are: the gear tooth surface of the rigid gear 31 and the gear tooth surface of the flexible gear 32. The rigid wheel 31 is provided with a conductive threaded hole 36, and the flexible wheel 32 itself is provided with a threaded hole which can be used as a conductive threaded hole (not shown). The super-lubricating film 35 is an a-C H-base super-lubricating solid film, and the preparation process comprises the following steps:
the a-C is that the H-base super-lubricating film is prepared by adopting a reactive magnetron sputtering technology, and a stainless steel screw is firstly connected with a threaded hole for electric conduction, so that a part to be coated is fixed on a workpiece table; and communicating the part to be coated with the film with the workpiece platform by adopting a wire band.
Then, the target material uses Ti target with purity higher than 99.99%, the reaction gas uses high-purity hydrogen with purity better than 99.999%, high-purity nitrogen with purity better than 99.999% and acetylene gas with purity better than 99.9%. The vacuum chamber background vacuum degree in the deposition preparation process is better than 1 multiplied by 10-3Pa. In this example, the total deposition time was 1.5 hours, resulting in a total film thickness of about 1.2 μm.
According to China institute of space technology standard Q/W1106-2007 sputtering deposition MoS for spacecraft2The performance test method of the solid lubricating film tests that the adhesive force of the film is more than or equal to 250mN and the friction coefficient<0.003。
In the practical application, one of the gear teeth of the rigid gear and the gear teeth of the flexible gear 32 can be plated with an a-C-H-based super-lubricating solid film; in order to ensure the lubricating effect, other types of lubricating films can be plated on the other component. Preferably, the inner surface of the flexible gear 32 may be further coated with the a-C: H-based super-lubricating solid film. The harmonic reducer further comprises a flexible bearing 33, wherein the flexible bearing is in rolling transmission and can be coated on the outer surface of an outer ring of the flexible bearing 33 and the surface of a channel of an inner ring of the flexible bearing 33. The coating can be a lubricating film or an a-C: H-based super-lubricating solid film.
The examples in the specific embodiments are intended to be illustrative of embodiments of the invention and are neither intended to be exhaustive nor exclusive.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A gear transmission device plated with a super-lubricating solid film is characterized by comprising a gear transmission device body and a-C, H-based super-lubricating solid film plated on one or two surfaces of a gear meshing surface; the film coating component is provided with a conductive threaded hole which is used for being communicated with a conductive area of the processing platform through a conductive screw during preparation.
2. The super-lubricant solid film coated gear assembly of claim 1, wherein the gear assembly is a straight gear, a helical gear, a herringbone gear, a conical gear, a hypoid gear, an alternating axis helical gear, a rack and pinion mechanism, or a worm and gear.
3. The gear transmission device coated with the ultra-lubricating solid film according to claim 1, wherein the gear transmission device is a harmonic reducer as a gear transmission speed reduction device, and in the harmonic reducer, the surfaces of the teeth of a rigid gear and/or the surfaces of the teeth of a flexible gear are coated with the a-C: H-based ultra-lubricating solid film.
4. The ultra-lubricating solid film coated gear transmission device according to claim 3, wherein the inner surface of the flexspline of the harmonic reducer is coated with the a-C: H-based ultra-lubricating solid film.
5. The gear transmission coated with a super-lubricating solid film according to claim 3, wherein the types of harmonic reducers include single wave harmonic reducers, double wave harmonic reducers and triple wave harmonic reducers.
6. The gear transmission device coated with the ultra-lubricating solid film according to claim 1, wherein the thickness of the a-C: H-based ultra-lubricating solid film is 0.1 to 10 μm.
7. The gear transmission device coated with the ultra-lubricating solid film according to claim 6, wherein the thickness of the a-C: H-based ultra-lubricating solid film is 1 to 3 μm.
8. The gear transmission device coated with the ultra-lubricating solid film according to claim 7, wherein the thickness of the a-C: H-based ultra-lubricating solid film is 1.5 to 2.5 μm.
9. The gear transmission device coated with the super-lubricating solid film according to claim 1, wherein the a-C is formed by doping one or more elements selected from Ti, Al, Zr, Cr, Cu, Mo, V, Si and Ag in the H-based super-lubricating solid film; the microstructure of the a-C: H-based super-lubricating solid film is amorphous, nanocrystalline or a composite of the amorphous and the nanocrystalline.
10. The gear transmission device coated with the super-lubricating solid film according to claim 1, wherein the coated part is prepared by connecting a conductive screw with a conductive threaded hole and communicating the part to be coated with a wire band to a workpiece table; through the design of the size of the conductive threaded hole, the material of the conductive screw and the material of the wire belt, the resistance of the part to be coated to the workpiece table is less than 5 ohms.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113969967A (en) * | 2021-10-26 | 2022-01-25 | 松山湖材料实验室 | Rigid wheel and preparation method thereof, harmonic reducer and application thereof |
| CN114001142A (en) * | 2021-10-26 | 2022-02-01 | 东风商用车有限公司 | High-load gear with low transmission noise and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113969967A (en) * | 2021-10-26 | 2022-01-25 | 松山湖材料实验室 | Rigid wheel and preparation method thereof, harmonic reducer and application thereof |
| CN114001142A (en) * | 2021-10-26 | 2022-02-01 | 东风商用车有限公司 | High-load gear with low transmission noise and preparation method thereof |
| CN113969967B (en) * | 2021-10-26 | 2023-11-10 | 松山湖材料实验室 | Rigid wheel, preparation method thereof, harmonic reducer and application thereof |
| CN114001142B (en) * | 2021-10-26 | 2024-01-02 | 东风商用车有限公司 | High-load gear with low transmission noise and preparation method thereof |
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