CN110952063B - Deflection-preventing multi-arc ion composite coating machine for aluminum plate processing - Google Patents
Deflection-preventing multi-arc ion composite coating machine for aluminum plate processing Download PDFInfo
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- CN110952063B CN110952063B CN201911209447.9A CN201911209447A CN110952063B CN 110952063 B CN110952063 B CN 110952063B CN 201911209447 A CN201911209447 A CN 201911209447A CN 110952063 B CN110952063 B CN 110952063B
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- side wall
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
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Abstract
本发明公开了一种用于铝板加工防偏转多弧离子复合镀膜机，包括真空炉本体，所述真空炉本体的内侧壁固定连接有铜环，所述真空炉本体的内侧壁转动连接有安装环，且铜环位于安装环和真空炉本体内侧壁之间，所述安装环上固定连接有靶环，且靶环与铜环接触。本发明通过电机带动输出轴的转动，进而带动安装环的转动，从而带动安装环上的靶环转动，由于磁场相同，则磁场对转动的靶环每处磨损的程度相同，避免靶材不能充分利用的问题；通过啮合齿带动第二齿轮转动的角度与铝板从一侧转动到另外一侧的角度相同，且通过第一弹簧的配合作用，使得铝板来回转动，避免现有技术中磁场对铝板进行定点镀膜时因磁场强度不同导致的镀膜均匀度不同的问题。
The invention discloses an anti-deflection multi-arc ion composite coating machine for aluminum plate processing, comprising a vacuum furnace body, the inner side wall of the vacuum furnace body is fixedly connected with a copper ring, and the inner side wall of the vacuum furnace body is rotatably connected with a mounting and the copper ring is located between the mounting ring and the inner side wall of the vacuum furnace body, the mounting ring is fixedly connected with the target ring, and the target ring is in contact with the copper ring. The present invention drives the rotation of the output shaft by the motor, and then drives the rotation of the mounting ring, thereby driving the target ring on the mounting ring to rotate. Since the magnetic field is the same, the magnetic field wears the same degree of wear to each part of the rotating target ring, so that the target material cannot be fully The problem of utilization; the angle at which the second gear is driven by the meshing teeth is the same as the angle at which the aluminum plate rotates from one side to the other side, and through the cooperation of the first spring, the aluminum plate is made to rotate back and forth, so as to avoid the magnetic field affecting the aluminum plate in the prior art. The problem of different coating uniformity caused by different magnetic field strengths during fixed-point coating.
Description
Technical Field
The invention relates to the technical field of coating machines, in particular to an anti-deflection multi-arc ion composite coating machine for aluminum plate processing.
Background
At present, a vacuum coating machine mainly refers to a type of coating which needs to be carried out under a higher vacuum degree, and the main realization modes of the vacuum coating machine are evaporation and sputtering. Wherein, sputtering is to bombard a target material by electrons or high-energy laser, and enable surface components to be sputtered out in the form of atomic groups or ions, and finally deposit on the surface of a substrate, and undergo a film forming process to finally form a thin film.
However, when the existing aluminum plate is coated by sputtering, two problems exist because of the uneven distribution of the sputtering magnetic field: firstly, the wear of the target material is excessive in the place with strong magnetic field, and on the contrary, the wear is less in the place with weak magnetic field, so that the wear of the target material is uneven when in use, and the target material cannot be fully utilized; secondly, the abrasion at the place with strong magnetic field is too much to cause more sputtered atomic groups or ions, and conversely, the abrasion at the place with weak magnetic field is less to cause less sputtered atomic groups or ions, so that the sputtered atomic groups or ions cause uneven film thickness when the film is coated on the surface of the substrate due to different magnetic field strengths.
Disclosure of Invention
The invention aims to solve the problems in the prior art, and provides an anti-deflection multi-arc ion composite coating machine for aluminum plate processing.
In order to achieve the purpose, the invention adopts the following technical scheme:
a deflection-preventing multi-arc ion composite coating machine for aluminum plate processing comprises a vacuum furnace body, wherein a copper ring is fixedly connected to the inner side wall of the vacuum furnace body, an installation ring is rotatably connected to the inner side wall of the vacuum furnace body, the copper ring is located between the installation ring and the inner side wall of the vacuum furnace body, a target ring is fixedly connected to the installation ring and is in contact with the copper ring, and a plurality of magnetic devices are arranged on the inner side wall of the vacuum furnace body; the outer side wall of the vacuum furnace body is fixedly connected with a motor, the output end of the motor is fixedly connected with an output shaft, the output shaft penetrates through the vacuum furnace body and extends into the vacuum furnace body, and the outer side wall of the output shaft is in transmission connection with the bottom of the mounting ring through a transmission mechanism; the inner bottom of the vacuum furnace body is rotatably connected with a cylindrical support column and a hollow protective cover arranged outside the support column, the tops of the support column and the protective cover are fixedly connected with the same disc-shaped dial, the outer side wall of the protective cover is sleeved with a reset first spring, and two ends of the first spring are fixedly connected with the outer side wall of the protective cover and the inner bottom of the vacuum furnace body respectively; one end of the output shaft, which is far away from the motor, is connected with the outer side wall of the protective cover through an adjusting mechanism; the supporting column is provided with clamping devices which correspond to the magnetic devices in number and position and are used for clamping; one side of the vacuum furnace body is provided with a water tank, a water inlet pipe is communicated with the water tank, a water body is filled in the water tank, and the water tank is communicated with the vacuum furnace body through a communication device.
Preferably, the mounting ring is in threaded connection with a plurality of fixing screws, and the target ring is provided with threaded holes matched with the fixing screws.
Preferably, the magnetic device comprises a mounting groove formed in the inner side wall of the vacuum furnace body, three permanent magnets are mounted in the mounting groove, and the magnetic property of the permanent magnets in the middle is opposite to that of the permanent magnets on two sides.
Preferably, the transmission mechanism comprises a first gear fixedly sleeved on the outer side wall of the output shaft, and a plurality of tooth grooves meshed with the first gear are formed in the bottom of the mounting ring.
Preferably, adjustment mechanism includes that sliding connection keeps away from a plurality of meshing teeth on the motor one end lateral wall at the output shaft, the output shaft is kept away from and is offered the sliding tray that is used for meshing tooth horizontal slip on the motor one end lateral wall, the inside wall of sliding tray passes through the second spring and is connected with the meshing tooth, be provided with the fixed block on the meshing tooth, the fixed block runs through the sliding tray and extends to the sliding tray, the spread groove has all been seted up at the both ends of fixed block, there is the fixture block bottom in the spread groove through third spring coupling, motor one end contact is kept away from to the lateral wall and the output shaft of fixture block.
Preferably, clamping device includes fixed cup joint the head rod on the support column and rotates the second connecting rod of connection on the support column, the sliding port that corresponds with head rod and second connecting rod is seted up to the lateral wall of protection casing, head rod and second connecting rod all rotate and are connected with half clamp plate, one of them half clamp plate is close to one side fixedly connected with inserted bar of another half clamp plate, and inserted bar inserts and establish on another half clamp plate, the lateral wall cover of inserted bar is equipped with the fourth spring, the both ends of fourth spring respectively with two half clamp plate fixed connection.
Preferably, an upper annular cavity and a lower annular cavity are formed in the vacuum furnace body, and the two annular cavities are communicated through a plurality of vertically arranged vertical grooves.
Preferably, the communicating device comprises a water pump fixedly connected in the water tank, an output end of the water pump is fixedly connected with a water outlet pipe, the water outlet pipe penetrates through the water tank and is communicated with the annular cavity located below, the annular cavity located above is connected with a connecting pipe, and the connecting pipe is communicated with the water tank.
The invention has the beneficial effects that:
1. the motor drives the output shaft to rotate, so as to drive the mounting ring to rotate, so as to drive the target ring on the mounting ring to rotate, and because the magnetic fields are the same, the degree of abrasion of the magnetic fields to each position of the rotating target ring is the same, so that the problem that the target material cannot be fully utilized is avoided;
2. the angle of the second gear driven by the meshing teeth is the same as the angle of the aluminum plate rotating from one side to the other side, and the aluminum plate rotates back and forth under the matching action of the first spring, so that the problem of different coating uniformity caused by different magnetic field strengths when a magnetic field coats the aluminum plate at a fixed point in the prior art is solved;
3. the target ring contacted with the side wall of the vacuum furnace body, the copper ring and the copper ring can be obviously cooled in a water cooling mode.
Drawings
FIG. 1 is a schematic top view of a deflection-preventing multi-arc ion composite coating machine for aluminum plate processing according to the present invention;
FIG. 2 is a schematic view of a connection structure between an output shaft and a mounting ring and a protective cover of the deflection-preventing multi-arc ion composite coating machine for aluminum plate processing according to the present invention;
FIG. 3 is a schematic side view of the connection between the output shaft and the engaging teeth of the deflection-preventing multi-arc ion composite coating machine for aluminum plate processing according to the present invention;
FIG. 4 is a schematic view of a connection structure between a fixing block and a fixture block in the deflection-preventing multi-arc ion composite coating machine for aluminum plate processing according to the present invention;
FIG. 5 is a schematic view of the internal structure of a water tank of the deflection-preventing multi-arc ion composite coating machine for aluminum plate processing according to the present invention;
fig. 6 is a schematic view of a connection structure between a support column and a protective cover in the deflection-preventing multi-arc ion composite coating machine for aluminum plate processing according to the present invention.
In the figure: the device comprises a vacuum furnace body 1, a copper ring 2, a mounting ring 3, a motor 4, an output shaft 5, a target ring 6, a supporting column 7, a protective cover 8, a dial 9, a first spring 10, a water tank 11, a permanent magnet 12, a first gear 13, a tooth space 14, a meshing tooth 15, a second spring 16, a fixed block 17, a third spring 18, a fixture block 19, a first connecting rod 20, a second connecting rod 21, an inserted rod 22, a fourth spring 23, an annular cavity 24, a vertical groove 25, a water pump 26, a water outlet pipe 27, a connecting pipe 28, a second gear 29 and a half clamping plate 30.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Referring to fig. 1-6, an anti-deflection multi-arc ion composite coating machine for aluminum plate processing comprises a vacuum furnace body 1, wherein a copper ring 2 is fixedly connected to the inner side wall of the vacuum furnace body 1, a mounting ring 3 is rotatably connected to the inner side wall of the vacuum furnace body 1, the copper ring 2 is positioned between the mounting ring 3 and the inner side wall of the vacuum furnace body 1, a target ring 6 is fixedly connected to the mounting ring 3, a plurality of fixing screws are connected to the mounting ring 3 in a threaded manner, threaded holes matched with the fixing screws are formed in the target ring 6, the target ring 6 is fixedly connected with the mounting ring 3 under the action of the fixing screws, the target ring 6 is conveniently detached in a screw manner, the target ring 6 is in contact with the copper ring 2, a plurality of magnetic devices are arranged on the inner side wall of the vacuum furnace body 1, the magnetic devices comprise mounting grooves formed on the inner side wall of the vacuum furnace body 1, three permanent magnets 12 are installed in the mounting grooves, the magnetism of the permanent magnet 12 in the middle is opposite to that of the permanent magnets 12 on the two sides, two wave-shaped magnetic fields can be generated under the action of the three permanent magnets 12, and atomic groups or ions sputtered from the target material flow to the surface of the substrate under the action of the magnetic fields.
The outer side wall of the vacuum furnace body 1 is fixedly connected with a motor 4, the output end of the motor 4 is fixedly connected with an output shaft 5, the output shaft 5 penetrates through the vacuum furnace body 1 and extends into the vacuum furnace body 1, the outer side wall of the output shaft 5 is in transmission connection with the bottom of the mounting ring 3 through a transmission mechanism, the transmission mechanism comprises a first gear 13 fixedly sleeved on the outer side wall of the output shaft 5, the bottom of the mounting ring 3 is provided with a plurality of tooth grooves 14 meshed with the first gear 13, the rotation of the output shaft 5 can drive the mounting ring 3 to rotate through the matching effect of the first gear 13 and the tooth grooves 14, and then the target ring 6 fixedly mounted on the mounting ring 3 is driven to rotate;
the inner bottom of the vacuum furnace body 1 is rotatably connected with a cylindrical support column 7 and a hollow protective cover 8 which is arranged outside the support column 7, the tops of the support column 7 and the protective cover 8 are fixedly connected with a disc-shaped dial 9, the outer side wall of the protective cover 8 is sleeved with a reset first spring 10, and two ends of the first spring 10 are respectively and fixedly connected with the outer side wall of the protective cover 8 and the inner bottom of the vacuum furnace body 1;
wherein, the end of the output shaft 5 far away from the motor 4 is connected with the outer side wall of the protective cover 8 through an adjusting mechanism, further, the adjusting mechanism comprises a plurality of engaging teeth 15 which are slidably connected with the side wall of the output shaft 5 far away from the motor 4, a sliding groove for the horizontal sliding of the engaging teeth 15 is arranged on the side wall of the output shaft 5 far away from the motor 4, the inner side wall of the sliding groove is connected with the engaging teeth 15 through a second spring 16, a fixed block 17 is arranged on the engaging teeth 15, the fixed block 17 penetrates through the sliding groove and extends out of the sliding groove, both ends of the fixed block 17 are provided with connecting grooves, the inner bottom of the connecting grooves is connected with a clamping block 19 through a third spring 18, the outer side wall of the clamping block 19 is contacted with the end of the output shaft 5 far away from the motor 4, a second gear 29 meshed with the engaging teeth 15 is fixedly sleeved on the outer side wall of the protective cover 8, wherein the rotation angle of the protective cover 8 can be controlled by adjusting the number of the meshing between the engaging teeth 15 and the second gear 29, namely, the second gear 29 is driven by the meshing tooth 15, when the meshing tooth 15 is meshed with the second gear 29, the meshing tooth 15 can drive the second gear 29 to rotate, when the meshing tooth 15 is not meshed with the second gear 29, the protection cover 8 can be reset under the action of the first spring 10, and the next time the meshing tooth 15 is meshed with the second gear 29, the protection cover 8 is driven to rotate;
the supporting column 7 is provided with clamping devices which correspond to the magnetic devices in quantity and position and are used for clamping, each clamping device comprises a first connecting rod 20 fixedly sleeved on the supporting column 7 and a second connecting rod 21 rotatably connected on the supporting column 7, the outer side wall of the protective cover 8 is provided with sliding ports corresponding to the first connecting rod 20 and the second connecting rod 21, the first connecting rod 20 and the second connecting rod 21 are rotatably connected with half clamping plates 30, one side, close to the other half clamping plate 30, of one half clamping plate 30 is fixedly connected with an inserting rod 22, the inserting rod 22 is inserted in the other half clamping plate 30, the outer side wall of the inserting rod 22 is sleeved with a fourth spring 23, two ends of the fourth spring 23 are fixedly connected with the two half clamping plates 30 respectively, so that the aluminum plate can be clamped through the clamping devices, the distance between the two half clamping plates 30 can be adjusted through the matching effect of the inserting rod 22 and the fourth spring 23, thereby being convenient for clamping aluminum plates with different sizes;
the water tank 11 is arranged on one side of the vacuum furnace body 1, a water inlet pipe is communicated with the water tank 11, a water body is filled in the water tank 11, the water tank 11 is communicated with the vacuum furnace body 1 through a communication device, further, an upper annular cavity and a lower annular cavity 24 are formed in the vacuum furnace body 1, the two annular cavities 24 are communicated and arranged through a plurality of vertically arranged vertical grooves 25, cooling water can flow conveniently through the arrangement of the annular cavities 24 and the vertical grooves 25, and then the target ring 6 in contact with the side wall of the vacuum furnace body 1, the copper ring 2 and the copper ring 2 can be cooled through the flow of the cooling water; still further, the intercommunication device includes water pump 26 of fixed connection in water tank 11, water pump 26's output fixedly connected with outlet pipe 27, and outlet pipe 27 run through water tank 11 and with the annular chamber 24 intercommunication setting that is located the below, the annular chamber 24 that is located the top is connected with connecting pipe 28, connecting pipe 28 and water tank 11 intercommunication setting, the water that can realize in the water tank 11 through water pump 26 is at annular chamber 24, carry out the circulation flow in vertical groove 25 and the water tank 11, thereby realize the effect of the target ring 6 cooling of vacuum furnace body 1 lateral wall, copper ring 2 and the contact of copper ring 2 through water-cooled mode.
The working principle of the invention is as follows:
under initial condition, will treat the aluminum plate centre gripping between two half clamp plates 30 earlier, can make two half clamp plates 30 adjust according to the aluminum plate size through the setting of first spring 10, adjust the back of accomplishing, the operator reads out the angle between the first connecting rod 20 and the second connecting rod 21 on the same aluminum plate through the calibrated scale 9 at top, wherein need explain: the mounting groove is opposite to the first connecting rod 20 in the initial state, so that the magnetic field generated by the permanent magnet 12 in the mounting groove is opposite to the aluminum plate at the first connecting rod 20 in the initial state;
then, the number of the meshing teeth 15 meshing with the second gear 29 is adjusted by the angle between the first connecting rod 20 and the second connecting rod 21 read out through the dial 9, that is, the number of the meshing teeth 15 is N, and the angle corresponding to each meshing tooth 15 is 360oN, the number of the meshing between the meshing teeth 15 and the second gear 29 is adjusted in such a way that the angle of the meshing teeth 15 driving the second gear 15 to rotate is closest to the angle between the first connecting rod 20 and the second connecting rod 21 read by the dial 9, so that the angle of the meshing teeth 15 driving the second gear 29 to rotate is close to the angle between the first connecting rod 20 and the second connecting rod 21, and further the angle of the meshing teeth 15 driving the second gear 29 to rotate is close to the angle of the aluminum plate to deflect, namely, under the condition that the magnetic field is not changed, the aluminum plate rotates from one side to the other side, so that the uniformity of film coating when the aluminum plate is coated can be realized, because the magnetic field is not moved, the aluminum plate to be treated deflects by a certain angle, the problem that the film coating is different due to different uniformity of the fixed-point film coating of the aluminum plate in the prior art is solved, wherein the end of the stable meshing teeth 15, which is far away from the motor 4 through the fixture block 19 extending outwards, is abutted against the output shaft 5 to fix the fixed-position of the aluminum plate The block 17 limits the position to ensure that the meshing teeth 15 after the adjustment is completed are stable, and the meshing teeth 15 without the limit of the fixture block 19 return to the rear initial position under the action of the second spring 16 and cannot be meshed with the second gear 29.
When the target is used, the motor 4 is turned on, the rotation of the motor 4 drives the output shaft 5 to rotate, and then the first gear 13 is matched with the tooth grooves 14 to drive the mounting ring 3 to rotate, so that the target ring 6 fixedly mounted on the mounting ring 3 rotates, and the rotating target ring 6 rotates, so that the problem that the target abrasion degree is different due to uneven magnetic field distribution in the prior art is solved;
further, the rotation of output shaft 5 will drive meshing tooth 15 on the output shaft 5 and rotate, and then drive the rotation of protection casing 8 through second gear 29, and then drive aluminum plate from one side rotation to other one side through clamping device, make the atomic group or the biggest plating of ion that sputter from the target on aluminum plate, meshing tooth 15 accomplishes the back with the meshing of second gear 29, 10 make protection casing 8 reset under the effect of first spring, even make aluminum plate reset, because of the round trip rotation of aluminum plate circulation, the problem that the coating film degree of consistency is different that leads to because of the magnetic field intensity difference when avoiding prior art magnetic field to carry out the fixed point coating film to aluminum plate.
In addition, the device can obviously cool the side wall of the vacuum furnace body 1, the copper ring 2 and the target ring 6 contacted with the copper ring 2 in a water cooling mode.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (6)
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| CN201911209447.9A CN110952063B (en) | 2019-12-01 | 2019-12-01 | Deflection-preventing multi-arc ion composite coating machine for aluminum plate processing |
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| CN201911209447.9A CN110952063B (en) | 2019-12-01 | 2019-12-01 | Deflection-preventing multi-arc ion composite coating machine for aluminum plate processing |
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| CN110952063B true CN110952063B (en) | 2022-02-08 |
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Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6287435B1 (en) * | 1998-05-06 | 2001-09-11 | Tokyo Electron Limited | Method and apparatus for ionized physical vapor deposition |
| CN100560786C (en) * | 2006-06-02 | 2009-11-18 | 鸿富锦精密工业（深圳）有限公司 | Sputtering device and sputtering method |
| JP5619666B2 (en) * | 2010-04-16 | 2014-11-05 | ジェイディーエス ユニフェイズ コーポレーションＪＤＳ Ｕｎｉｐｈａｓｅ Ｃｏｒｐｏｒａｔｉｏｎ | Ring cathode for use in magnetron sputtering devices |
| CN107805785A (en) * | 2017-10-18 | 2018-03-16 | 东莞产权交易中心 | A multi-arc ion coating machine for aluminum plate processing |
| CN207581908U (en) * | 2017-11-03 | 2018-07-06 | 东莞市宝沛金属制品有限公司 | An anti-deflection multi-arc ion composite coating machine for aluminum plate processing |
| CN108265270A (en) * | 2018-01-23 | 2018-07-10 | 安徽银立方金属科技有限公司 | A kind of multi-Arc Ion Plating |
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Effective date of registration: 20220117 Address after: 528225 "Xiekou vortex" self compiled plant 3, Shizhong village, Shishan town, Nanhai District, Foshan City, Guangdong Province Applicant after: Guangdong Jinhui Aluminum Plate Curtain Wall Co.,Ltd. Address before: East China University of science and technology, 130 Meilong Road, Xuhui District, Shanghai, 200030 Applicant before: Wang Yanjun |
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Effective date of registration: 20241121 Address after: No. 3 Longteng Road, Duanzhou District, Zhaoqing City, Guangdong Province, China 526000 Patentee after: Guangdong Jinhui Curtain Wall Metal Materials Co.,Ltd. Country or region after: China Address before: 528225 "Xiekou vortex" self compiled plant 3, Shizhong village, Shishan town, Nanhai District, Foshan City, Guangdong Province Patentee before: Guangdong Jinhui Aluminum Plate Curtain Wall Co.,Ltd. Country or region before: China |
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| CP03 | Change of name, title or address |
Address after: No. 3 Longteng Road, Duanzhou District, Zhaoqing City, Guangdong Province, China 526000 Patentee after: Guangdong Jinhui Curtain Wall Technology Co.,Ltd. Country or region after: China Address before: No. 3 Longteng Road, Duanzhou District, Zhaoqing City, Guangdong Province, China 526000 Patentee before: Guangdong Jinhui Curtain Wall Metal Materials Co.,Ltd. Country or region before: China |