CN110863962A - Nanoparticle agglomeration type nanoporous electrochemical actuator and its preparation and testing methods - Google Patents

Abstract

The invention discloses a nanoparticle agglomeration type nanoporous electrochemical driver and a preparation and testing method thereof. The driver comprises a deposition substrate of a flexible conductor material and a driving film deposited on the deposition substrate; the preparation method is realized by bombarding a high-energy laser beam. The transformation of the target material from solid state to plasma state to solid state enables the formation of nanoparticle agglomerated nanoporous driven thin films on different substrates. By adjusting the preparation conditions such as target-substrate spacing, substrate rotational speed, and deposition temperature, nanoporous electrochemical actuators with controllable particle size can be obtained. It overcomes the shortcomings of traditional electrochemical drivers that cannot take into account the response rate and deformation capacity; by shortening the ion insertion path and improving the ion adsorption capacity, the driving rate and deformation amplitude can be simultaneously improved. The driver of the invention has fast response rate, high driving amplitude, strong load driving capability, simple process and low cost, and can promote the application of the electrochemical driver in the fields of small medical instruments, micro-nano electromechanical systems and the like.

Description

Nanoparticle agglomeration type nanoporous electrochemical actuator and its preparation and testing methods

technical field

The invention relates to the technical field of electrochemical driving, in particular to a high-performance nanoparticle agglomeration type nanoporous electrochemical driver and a preparation and testing method thereof.

Background technique

Electrochemical drives generate mechanical energy through chemical reactions at low voltages. Compared with other types of actuators, electrochemical actuators have lower driving voltage and higher energy output, so they have broad application prospects in artificial muscles, intelligent robots, and micro-nano electromechanical systems. For electrochemical actuators, response rate and deformability are two crucial but opposing parameters. More specifically, although low-modulus gel or conductive polymer-based electrochemical actuators have excellent deformability, their response rates are extremely slow; in comparison, carbon nanomaterial electrochemical actuators have faster response rates. , but its deformation ability is limited by the influence of high modulus and cannot be fully exerted; the simultaneous improvement of the two has also become a major challenge in the field of electrochemical driving. It is difficult to achieve simultaneous improvement of response rate and deformation amplitude only by selecting new materials or hybridizing materials with different properties.

For electrochemical actuators with a bilayer structure (driving film-substrate), the driving behavior originates from the interaction between the active layer expansion effect caused by ion intercalation and the confinement effect provided by the substrate. Therefore, the response rate and deformability of the electrochemical actuator depend on the diffusion rate of ions in the active layer and the ability of the active layer to adsorb ions, respectively. Recent research results have shown that materials exhibit better mechanical and electrochemical properties at the nanoscale. Thus, tuning the nanostructure of electrochemical actuators has become a feasible approach to address this enormous challenge. Traditional electrochemical actuators are mostly single-layer nanosheet structures or multilayer nanosheet stacking structures, which largely block the intercalation channels of ions; in addition, the diffusion paths of ions in the above structures are also too long and difficult to control.

The agglomerated nanoporous structure of spherical nanoparticles can increase the specific surface area of the material and provide more intercalation channels for ions. Furthermore, this structure provides the shortest diffusion path for ions. In addition to enhancing the rate and efficiency of ion intercalation, the mechanical properties of the electrochemical actuator can also be improved by tuning the fabrication parameters.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a high-performance nanoparticle agglomeration type nanoporous electrochemical actuator and its preparation and testing method, so as to solve the technical problem that the response rate and the deformation ability cannot be simultaneously improved as described in the background art.

In order to achieve the above object, the present invention adopts the following technical solutions:

A nanoparticle agglomeration type nanoporous electrochemical actuator is characterized in that it is a double-layer film structure, comprising a deposition substrate of a flexible conductor material and a driving film deposited on the deposition substrate, wherein the driving film is formed by agglomeration of nanoparticles, The nanoporous structure is realized by agglomerating and depositing nanoparticles of different sizes; the thickness ratio of the driving film to the deposition substrate should satisfy (0.3-1):1; in the electrochemical reaction, when ions are embedded in the driving film, The driving film will undergo volume expansion; the deposition substrate is not affected by ion intercalation and has no volume expansion; the volume expansion effect induced by ion intercalation in the driving film interacts with the confinement effect of the deposition substrate, thus making the bilayer The thin film structure is bent to achieve the driving effect.

Further, the flexible conductor material includes metal foil materials such as aluminum foil, silver foil, and gold foil, or a polymer film plated with conductive electrodes. The nanoporous driving thin film is formed by agglomeration of any one or more of transition metal sulfide, metal or carbon nanoparticles.

The invention also provides a preparation method of a high-performance nanoparticle agglomeration type nanoporous electrochemical driver. A calender is used for multiple cold pressing to roll out a base material that meets the thickness design requirements; then it is ultrasonically cleaned and vacuum dried for 24 hours. ; Then cut it into a slender strip that meets the design requirements and use it as a deposition substrate. The entire preparation process needs to be completed in a vacuum chamber. The deposition substrate is inverted and fixed on the heating table, and the target target material is set according to the preset target-base spacing. It is fixed under the heating table; in order to make the film formation more uniform, the heating table drives the deposition substrate to rotate at a certain speed; in order to ensure the service life of the target material, the target target rotates in reverse at a speed 15 times higher than that of the heating table. Then, the garnet laser energy was adjusted to be stable, the laser frequency was set to 1-10 Hz, and the scanning bombardment was carried out along the radial direction of the target. The nanoparticle agglomeration type nanoporous driving film is formed on the film; before the preparation, the air pressure in the vacuum chamber is set at 4×10 ^-8 to 2×10 ^-7 Torr, and the temperature during preparation is controlled at 25 to 100°C. By controlling the deposition time To control the deposition thickness of the driving film on the deposition substrate, and by adjusting the target-substrate spacing, substrate rotation speed, and deposition temperature, a nanoporous electrochemical driver with controllable particle size is obtained.

The invention also provides a test method for a high-performance nanoparticle agglomeration type nanoporous electrochemical driver. The electrochemical test adopts a three-electrode test system, and the nanoparticle agglomeration type nanoporous electrochemical driver is used as a working electrode. Saturated calomel electrode and 2×2cm ² platinum sheet electrode were used as reference electrode and auxiliary electrode; 0.5mol/L dilute sulfuric acid solution was used as electrolyte; Chenhua CHI660E electrochemical workstation was used to output and collect voltage and current , charge, frequency and other electrical signals; at the same time, the displacement and curvature of the driver were observed in situ using a high-definition experimental camera. The driving voltage of the electrochemical driver can be as low as -0.35-0.35V, the response frequency is 0.001-0.25Hz, and the driving voltage includes any one or a combination of multiple stages of square wave, triangular wave and sine wave. This electrochemical driver can drive heavy objects within 800 times its own weight; its curvature amplitude is as high as 0.207mm ^-1 ; its driving rate can reach 9.4×10 ^-3 mm ^-1 ·s ^-1 ·V ^-1 .

Compared with the prior art, the advantages of the present invention include:

(1) The synchronous improvement of the response rate and deformation ability of the electrochemical driver is realized, and the load driving ability is stronger; it has a wide range of application prospects in the fields of small medical devices, micro-nano electromechanical systems, etc., for example, it can be applied to small medicines Sorter, micro valve, etc.;

(2) The electrochemical driver has a simple preparation process, high product stability and durability, and low cost.

Description of drawings

Figure 1 is a schematic diagram of the preparation and driving principle of a high-performance nanoparticle agglomeration type nanoporous electrochemical actuator;

Figure 2 is a scanning electron microscope image of the surface and cross-section of a high-performance nanoparticle agglomeration type nanoporous electrochemical actuator;

Fig. 3 is the driving example diagram of molybdenum disulfide nanoparticle agglomeration type nanoporous electrochemical actuator from undriven state to -0.35V at 0.005Hz;

Fig. 4 is the driving example diagram of molybdenum disulfide nanoparticle agglomeration type nanoporous electrochemical actuator from undriven state to -1V at 0.001Hz;

5 is an example diagram of a molybdenum disulfide nanoparticle agglomeration type nanoporous electrochemical actuator driving a weight that exceeds 550 times its own weight;

Fig. 6 is the transmission electron microscope image of tungsten disulfide nanoparticle agglomeration type nanoporous driving thin film;

FIG. 7 is a diagram showing an example of split-range driving of a binary composite nanoparticle agglomeration type nanoporous electrochemical actuator.

Detailed ways

The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. The exemplary embodiments and descriptions of the present invention are used to explain the present invention, but are not intended to limit the present invention.

Example 1:

The aluminum foil with a thickness of 100 μm was cold-pressed and rolled for 5 times by a calender, and finally pressed to a thickness of 4.5 μm; then it was ultrasonically cleaned and vacuum dried for 24 hours; then it was cut into 12.5 × 3 mm ² slender strips As the substrate for deposition, as shown in Figure 1, the deposition substrate was inverted and fixed on the heating table, the molybdenum disulfide target was selected as the target target, and the target target was fixed under the heating table, and the target-base spacing was 50mm; To make the film formation more uniform, the heating table drives the deposition substrate to rotate at 2 rpm; in order to ensure the service life of the target, the target rotates in reverse at 30 rpm. Then the garnet laser energy was adjusted and stabilized to 70mJ/mm ² ; the laser frequency was set to 1Hz, and it was scanned and bombarded at a speed of 5mm/s along the radial direction of the target; the air pressure in the vacuum cavity was set at 2×10 ^-7 Torr, and the temperature during preparation was controlled at 25 °C; in order to deposit a 1.5 μm driving film, the entire deposition process lasted 19 hours. The surface and cross-sectional scanning electron microscope images of the prepared high-performance nanoparticle agglomerated nanoporous electrochemical actuator are shown in Figure 2. It can be seen from the figure that the driving film is formed by the dense agglomeration of spherical nanoparticles. In addition, this The preparation method also ensures excellent adhesion between the actuating film and the substrate, which helps to prevent the debonding phenomenon that occurs in the operation of the bilayer electrochemical driver.

The electrochemical test adopts a three ^- electrode test system, and the prepared nanoparticle agglomeration type nanoporous electrochemical actuator is taken out and used as the working electrode in the three-electrode system. Reference electrode and auxiliary electrode; use 0.5mol/L dilute sulfuric acid solution as electrolyte; use Chenhua CHI660E electrochemical workstation to output and collect electrical signals such as voltage, current, charge, frequency; at the same time, use high-definition experimental camera In situ observation of the displacement and curvature of the actuator. The results shown in Figure 3 can be obtained through the above test. Under the test conditions of square wave voltage ±0.35V and frequency of 0.005Hz, the electrochemical driver shows strong driving performance, and its curvature change is as high as 0.05mm ^-1 .

Example 2:

The tungsten foil with a thickness of 100 μm was cold-rolled for 4 times by a calender, and finally pressed to a thickness of 6 μm; then it was ultrasonically cleaned and vacuum dried for 24 hours; then it was cut into 12.5×3 mm ² slender strips As the substrate for deposition, as shown in Figure 1, the deposition substrate was inverted and fixed on the heating table, the molybdenum disulfide target was selected as the target target, and the target target was fixed under the heating table, and the target-base spacing was 50mm; To make the film formation more uniform, the heating table drives the deposition substrate to rotate at 2 rpm; in order to ensure the service life of the target, the target rotates in reverse at 30 rpm. Then the garnet laser energy was adjusted and stabilized to 70mJ/mm ² ; the laser frequency was set to 5Hz, and it was scanned and bombarded at a speed of 5mm/s along the radial direction of the target; the air pressure in the vacuum cavity was set at 2 × 10 ^-7 Torr, and the temperature during preparation was controlled at 25 °C; in order to deposit a 6 μm driving film, the entire deposition process lasted for 32 hours.

The electrochemical test adopts a three ^- electrode test system, and the prepared nanoparticle agglomeration type nanoporous electrochemical actuator is taken out and used as the working electrode in the three-electrode system. Reference electrode and auxiliary electrode; use 0.5mol/L dilute sulfuric acid solution as electrolyte; use Chenhua CHI660E electrochemical workstation to output and collect electrical signals such as voltage, current, charge, frequency; at the same time, use high-definition experimental camera In situ observation of the displacement and curvature of the actuator. The results shown in Figure 4 can be obtained through the above test. Under the test conditions of square wave voltage ±1V and frequency of 0.001Hz, the electrochemical driver exhibits super driving performance, and its curvature change is as high as 0.207mm ^-1 .

Example 3:

The aluminum foil with a thickness of 100 μm was cold-rolled for ⁴ times by a calender, and finally pressed to 6 μm; then it was ultrasonically cleaned and vacuum-dried for 24 h; The deposited substrate, as shown in Figure 1, was fixed on the heating table upside down, the molybdenum disulfide target was selected as the target, and the target target was fixed under the heating table, and the distance between the target and the base was 50mm; The film is more uniform, and the heating stage drives the deposition substrate to rotate at 2 rpm; in order to ensure the service life of the target, the target rotates in reverse at 30 rpm. Then the garnet laser energy was adjusted and stabilized to 70mJ/mm ² ; the laser frequency was set to 10Hz, and it was scanned and bombarded at a speed of 5mm/s along the radial direction of the target; the air pressure in the vacuum chamber was set at 1×10 ^-7 Torr, the temperature during preparation was controlled at 50 °C; in order to deposit a 6 μm driving film, the entire deposition process lasted for 32 hours.

The electrochemical test adopts a three ^- electrode test system, and the prepared nanoparticle agglomeration type nanoporous electrochemical actuator is taken out and used as the working electrode in the three-electrode system. Reference electrode and auxiliary electrode; use 0.5mol/L dilute sulfuric acid solution as electrolyte; use Chenhua CHI660E electrochemical workstation to output and collect electrical signals such as voltage, current, charge, frequency; at the same time, use high-definition experimental camera In situ observation of the displacement and curvature of the actuator. Under the test conditions of square wave voltage ±1V and frequency of 0.25Hz, the response rate of the electrochemical driver is as high as 7.5×10 ^-3 mm ^-1 ·s ^-1 ·V ^-1 .

Example 4:

The silver foil with a thickness of 100 μm was cold-pressed and rolled for ⁴ times by a calender, and finally pressed to 6 μm; then it was ultrasonically cleaned and vacuum dried for 24 hours; As the substrate for deposition, as shown in Figure 1, the deposition substrate is inverted and fixed on the heating table, the molybdenum disulfide target is selected as the target, and the target target is fixed under the heating table, and the target-base spacing is 35mm; The film formation is more uniform, and the heating table drives the deposition substrate to rotate at 4rpm; in order to ensure the service life of the target material, the target target rotates in the reverse direction at a speed of 30rpm. Then the garnet laser energy was adjusted and stabilized to 70mJ/mm ² ; the laser frequency was set to 10Hz, and it was scanned and bombarded at a speed of 5mm/s along the radial direction of the target; the air pressure in the vacuum chamber was set at 4×10 ^-8 Torr, the temperature during preparation was controlled at 100 °C; in order to deposit a 6 μm driving film, the entire deposition process lasted 27 hours. Then, the particle size of the nanoparticles in the nanoparticle agglomeration driven film was analyzed, and the average particle size of the nanoparticles was reduced from 220.095nm to 104.687nm compared with Example 3, and the standard deviation was also reduced from 111.065nm to 47.113nm. Therefore, increasing the deposition temperature, shortening the target-base spacing, and increasing the vacuum degree in the vacuum chamber are beneficial to reduce the particle size of the nanoparticles and improve the size uniformity of the nanoparticles.

The electrochemical test adopts a three ^- electrode test system, and the prepared nanoparticle agglomeration type nanoporous electrochemical actuator is taken out and used as the working electrode in the three-electrode system. Reference electrode and auxiliary electrode; use 0.5mol/L dilute sulfuric acid solution as electrolyte; use Chenhua CHI660E electrochemical workstation to output and collect electrical signals such as voltage, current, charge, frequency; at the same time, use high-definition experimental camera In situ observation of the displacement and curvature of the actuator. Under the same test conditions as in Example 3 (square wave voltage ± 1V, frequency 0.25Hz), the response rate of the electrochemical driver was increased to 9.4×10 ^-3 mm ^-1 ·s ^-1 ·V ^-1 , this rate Exceeds all current electrochemical drives.

Example 5:

The tungsten foil with a thickness of 100 μm was cold-rolled for 5 times by a calender, and finally pressed to 4.5 μm; then it was ultrasonically cleaned and vacuum dried for 24 hours; then it was cut into 12.5 × 3 mm ² slender strips As the substrate for deposition, as shown in Figure 1, the deposition substrate was inverted and fixed on the heating table, the molybdenum disulfide target was selected as the target target, and the target target was fixed under the heating table, and the target-base spacing was 50mm; To make the film formation more uniform, the heating table drives the deposition substrate to rotate at 2 rpm; in order to ensure the service life of the target, the target rotates in reverse at 30 rpm. Then the garnet laser energy was adjusted and stabilized to 70mJ/mm ² ; the laser frequency was set to 10Hz, and it was scanned and bombarded at a speed of 5mm/s along the radial direction of the target; the air pressure in the vacuum chamber was set at 4 × 10 ^-8 Torr, and the temperature during preparation was controlled at 75 °C; in order to deposit a 4.5 μm driving film, the entire deposition process lasted 26 hours.

The electrochemical test adopts a three ^- electrode test system, and the prepared nanoparticle agglomeration type nanoporous electrochemical actuator is taken out and used as the working electrode in the three-electrode system. Reference electrode and auxiliary electrode; use 0.5mol/L dilute sulfuric acid solution as electrolyte; use Chenhua CHI660E electrochemical workstation to output and collect electrical signals such as voltage, current, charge, frequency; at the same time, use high-definition experimental camera In situ observation of the displacement and curvature of the actuator. Under the test conditions of square wave voltage ± 1V and frequency of 0.01Hz, the electrochemical driver showed a super load driving ability. As shown in Figure 5, the electrochemical driver (0.0018g) will exceed its own weight by 550 times The weight hook (1g) drives 2.9mm.

Example 6:

The gold foil with a thickness of 100 μm was cold-pressed and rolled for ⁵ times by a calender, and finally pressed to 4.5 μm; then it was ultrasonically cleaned and vacuum dried for 24 hours; As the substrate for deposition, as shown in Figure 1, this deposition substrate is fixed upside down on the heating table, the tungsten disulfide target is selected as the target, and the target target is fixed under the heating table, and the target-base spacing is 35mm; The film formation is more uniform, and the heating table drives the deposition substrate to rotate at 2rpm; in order to ensure the service life of the target material, the target target rotates in the reverse direction at a speed of 30rpm. Then the garnet laser energy was adjusted and stabilized to 40mJ/mm ² ; the laser frequency was set to 7Hz, and it was scanned and bombarded at a speed of 5mm/s along the radial direction of the target; the air pressure in the vacuum cavity was set at 4×10 ^-8 Torr, and the temperature during preparation was controlled at 25 °C; in order to deposit a 4.5 μm driving film, the entire deposition process lasted for 40 hours. The film formation results are shown in Fig. 6. The nanoparticles in the nano-agglomerated nanoporous driving film are changed from single sulfide particles in Examples 1-5 to core-shell composite nanoparticles of tungsten metal-sulfide.

The electrochemical test adopts a three ^- electrode test system, and the prepared nanoparticle agglomeration type nanoporous electrochemical actuator is taken out and used as the working electrode in the three-electrode system. Reference electrode and auxiliary electrode; use 0.5mol/L dilute sulfuric acid solution as electrolyte; use Chenhua CHI660E electrochemical workstation to output and collect electrical signals such as voltage, current, charge, frequency; at the same time, use high-definition experimental camera In situ observation of the displacement and curvature of the actuator. Under the test conditions of square wave voltage ±1V and frequency of 0.001Hz, the electrochemical driver showed stronger load driving ability than Example 5, and it drove the weight hook (2g) that was 800 times more than its own weight. 1.4mm.

Example 7:

A ²⁵ μm polyimide film was used as the base material, and conductive electrodes were plated on its two surfaces, and then ultrasonically cleaned and vacuum dried for 24 h; As shown in Figure 1, the deposition substrate was fixed upside down on the heating table, the molybdenum disulfide target was selected as the target target, and the target target was fixed below it, and the target-base spacing was 50mm; in order to make the film formation more uniform , the heating table drives the deposition substrate to rotate at 2rpm; in order to ensure the service life of the target material, the target target rotates in the reverse direction at a speed of 30rpm. Then the garnet laser energy was adjusted and stabilized to 70mJ/mm ² ; the laser frequency was set to 10Hz, and it was scanned and bombarded at a speed of 5mm/s along the radial direction of the target; the air pressure in the vacuum chamber was set at 2×10 ^-7 Torr, the temperature during preparation was controlled at 80 °C; in order to deposit a 7.5 μm driving film, the entire deposition process lasted for 43 hours.

The electrochemical test adopts a three ^- electrode test system, and the prepared nanoparticle agglomeration type nanoporous electrochemical actuator is taken out and used as the working electrode in the three-electrode system. Reference electrode and auxiliary electrode; use 0.5mol/L dilute sulfuric acid solution as electrolyte; use Chenhua CHI660E electrochemical workstation to output and collect electrical signals such as voltage, current, charge, frequency; at the same time, use high-definition experimental camera In situ observation of the displacement and curvature of the actuator. Under the test conditions of square wave voltage ±0.35V and frequency of 0.001Hz, the electrochemical driver showed strong driving performance, and its curvature change was as high as 0.102mm ^-1 .

Example 8:

The aluminum foil with a thickness of 100 μm was cold-rolled for ⁵ times by a calender, and finally pressed to 4.5 μm; then it was ultrasonically cleaned and vacuum dried for 24 hours; As the substrate for deposition, as shown in Figure 1, the deposition substrate is fixed upside down on the heating table, and the target of tungsten disulfide and molybdenum disulfide is selected as the target target of the binary composite film, and the target target material is fixed under the heating table , the distance between the target and base is 50mm; during the preparation process, the two targets are transposed at a frequency of 0.2Hz, and the position of the base is kept unchanged; in order to ensure the service life of the target, the target rotates in the opposite direction at a speed of 30rpm. Then the garnet laser energy was adjusted and stabilized to 70mJ/mm ² ; the laser frequency was set to 10Hz, and it was scanned and bombarded at a speed of 5mm/s along the radial direction of the target; the air pressure in the vacuum chamber was set at 2×10 ^-7 Torr, and the temperature during preparation was controlled at 25 °C; in order to deposit a 4.5 μm driving film, the entire deposition process lasted for 36 hours.

The electrochemical test adopts a three ^- electrode test system, and the prepared nanoparticle agglomeration type nanoporous electrochemical actuator is taken out and used as the working electrode in the three-electrode system. Reference electrode and auxiliary electrode; use 0.5mol/L dilute sulfuric acid solution as electrolyte; use Chenhua CHI660E electrochemical workstation to output and collect electrical signals such as voltage, current, charge, frequency; at the same time, use high-definition experimental camera In situ observation of the displacement and curvature of the actuator. Under the test conditions of square wave voltage ±0.35V and frequency of 0.05Hz, the driving rate of the tungsten disulfide growth region is higher than that of the molybdenum disulfide growth region, and the overall driving effect of the electrochemical driver also shows the results shown in Figure 7 The split-range drive mode shown.

The above-mentioned embodiments are only preferred specific embodiments of the present invention, and do not constitute a limitation on the protection scope of the technical solution. Any changes or substitutions that can be easily conceived by any person skilled in the art within the technical scope disclosed by the present invention shall be included within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims (6)

1. a nanoparticle agglomeration type nanoporous electrochemical driver is characterized in that, it is a double-layer film structure, comprising a deposition substrate of flexible conductor material and a driving film deposited on the deposition substrate, and the driving film is formed by nanoparticle agglomeration. The nanoporous structure is realized by agglomerating and depositing nanoparticles of different sizes; the thickness ratio of the driving film to the deposition substrate should satisfy (0.3-1):1; in the electrochemical reaction, when ions are embedded in the driving film When , the driving film will undergo volume expansion; while the deposition substrate is not affected by ion intercalation and has no volume expansion; the interaction between the volume expansion effect induced by ion intercalation in the driving film and the confinement effect of the deposition substrate will make the The double-layer thin-film structure bends to achieve the driving effect. 2 . The nanoparticle agglomeration type nanoporous electrochemical driver according to claim 1 , wherein the flexible conductor material is a metal foil or a polymer film plated with conductive electrodes. 3 . 3. The nanoparticle agglomeration-type nanoporous electrochemical driver according to claim 1, wherein the driving film is formed by the agglomeration growth of any one or more of transition metal sulfide, metal or carbon nanoparticles. to make. 4. The preparation method of the nanoparticle agglomeration type nanoporous electrochemical actuator according to any one of claims 1 to 3, wherein the base material that meets the thickness design requirements is rolled out by using a calender multiple times by cold pressing; It was ultrasonically cleaned and vacuum dried for 24 hours; then it was cut into a slender strip that met the design requirements and used as a deposition substrate; the entire preparation process needed to be completed in a vacuum chamber, the deposition substrate was inverted and fixed on the heating table, and the target target The material is fixed under the heating table according to the preset target base spacing; in order to make the film formation more uniform, the heating table drives the deposition substrate to rotate; in order to ensure the service life of the target material, the target target rotates at a speed 15 times higher than that of the heating table. Then, the garnet laser energy is adjusted to be stable, the laser frequency is set to 1-10 Hz, and the scanning bombardment is carried out along the radial direction of the target target, and the high-energy laser beam bombardment is used to realize the transformation of the target material from solid-plasma state-solid state, thereby Nanoparticle agglomeration-type nanoporous driven films were formed on different substrates; the air pressure in the vacuum chamber was set at 4×10 ^-8 to 2×10 ^-7 Torr before preparation, and the temperature during preparation was controlled at 25 to 100 °C. Control the deposition time to control the deposition thickness of the driving film on the deposition substrate, and obtain a nanoporous electrochemical actuator with controllable particle size by adjusting the target-substrate spacing, substrate rotation speed, and deposition temperature. 5. The test method of the nanoparticle agglomeration type nanoporous electrochemical driver according to any one of claims 1 to 3, wherein the electrochemical test is carried out by using a three-electrode test system, and the method described in any one of claims 1 to 3 is used. The described nanoparticle agglomeration type nanoporous electrochemical actuator was used as working electrode, saturated calomel electrode and 2 × 2 ^cm2 platinum sheet electrode were used as reference electrode and auxiliary electrode, respectively; 0.5 mol/L dilute sulfuric acid solution Used as electrolyte; use Chenhua CHI660E electrochemical workstation to output and collect voltage, current, charge and frequency; at the same time, use high-definition experimental camera to observe the displacement and curvature of the driver in situ; the driving voltage of the electrochemical driver is as low as -0.35～0.35V, the response frequency is 0.001～0.25Hz, this electrochemical driver can drive heavy objects within 800 times its own weight; its curvature amplitude is as high as 0.207mm ^-1 ; the driving rate is 9.4×10 ^-3 mm ^-1 · s ^-1 ·V ^-1 . 6 . The testing method according to claim 5 , wherein the driving voltage is a combination of any one or more of a square wave, a triangular wave, and a sine wave in stages. 7 .

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