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CN110535027A - For manufacturing the method and optoelectronic semiconductor component of optoelectronic semiconductor component - Google Patents

For manufacturing the method and optoelectronic semiconductor component of optoelectronic semiconductor component Download PDF

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Publication number
CN110535027A
CN110535027A CN201910837614.8A CN201910837614A CN110535027A CN 110535027 A CN110535027 A CN 110535027A CN 201910837614 A CN201910837614 A CN 201910837614A CN 110535027 A CN110535027 A CN 110535027A
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pressure
semiconductor component
semiconductor
optoelectronic semiconductor
optoelectronic
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田晓
齐兵
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Xian Aeronautical University
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Xian Aeronautical University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/023Mount members, e.g. sub-mount members
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/0233Mounting configuration of laser chips
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/0235Method for mounting laser chips

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Light Receiving Elements (AREA)

Abstract

本发明公开了半导体技术领域的用于制造光电子半导体组件的方法和光电子半导体组件,包括半导体和压力垫圈,所述压力垫圈安装在半导体外壁,两个所述压力垫圈之间通过插杆连接固定,所述插杆上安装有用于固定插杆的限位圈,该光电子半导体组件的制作方法如下:步骤一:将压力垫圈安装在半导体上;步骤二:将两个安装好压力垫圈的半导体进行重合;步骤三:通过压力器将两个压力垫圈进行挤压,使压力垫圈的底端达到与半导体的表面呈平行状,将两个半导体之间通过压力垫片进行连接固定,压力垫片有一定的形变性能,使两个半导体之间接触的同时,通过压力垫片达到均匀受压的目的。

The invention discloses a method for manufacturing an optoelectronic semiconductor component in the field of semiconductor technology and an optoelectronic semiconductor component, including a semiconductor and a pressure washer, the pressure washer is installed on the outer wall of the semiconductor, and the two pressure washers are connected and fixed by inserting rods. A limit ring for fixing the insertion rod is installed on the insertion rod. The manufacturing method of the optoelectronic semiconductor component is as follows: step 1: install the pressure washer on the semiconductor; step 2: overlap the two semiconductors with the pressure washer installed ; Step 3: Squeeze the two pressure washers through the pressure device, so that the bottom of the pressure washers is parallel to the surface of the semiconductor, and connect and fix the two semiconductors through the pressure gasket. The pressure gasket has a certain Excellent deformation performance, so that the two semiconductors are in contact with each other, and the purpose of uniform pressure is achieved through the pressure gasket.

Description

用于制造光电子半导体组件的方法和光电子半导体组件Method for producing an optoelectronic semiconductor component and an optoelectronic semiconductor component

技术领域technical field

本发明涉及半导体技术领域,具体为用于制造光电子半导体组件的方法和光电子半导体组件。The invention relates to the field of semiconductor technology, in particular to a method for producing an optoelectronic semiconductor component and an optoelectronic semiconductor component.

背景技术Background technique

半导体光电子器件是利用半导体光-电子(或电-光子)转换效应制成的各种功能器件。它不同于半导体光器件(如光波导开关、光调制器、光偏转器等)。光器件的设计原理是依据外场对导波光传播方式的改变,它也有别于早期人们袭用的光电器件。后者只是着眼于光能量的接收和转换(如光敏电阻、光电池等)。早期的光电器件只限于被动式的应用,60年代作为相干光载波源的半导体激光器的问世,则使它进入主动式应用阶段,光电子器件组合应用的功能在某些方面(如光通信、光信息处理等)正在扩展电子学难以执行的功能性。Semiconductor optoelectronic devices are various functional devices made of semiconductor photo-electron (or electro-photon) conversion effect. It is different from semiconductor optical devices (such as optical waveguide switches, optical modulators, optical deflectors, etc.). The design principle of the optical device is based on the change of the propagation mode of the guided wave by the external field, which is also different from the optoelectronic device used by the early people. The latter only focuses on the reception and conversion of light energy (such as photoresistors, photocells, etc.). Early optoelectronic devices were limited to passive applications. The advent of semiconductor lasers as coherent optical carrier sources in the 1960s brought it into the active application stage. The functions of combined applications of optoelectronic devices are in some aspects (such as optical communication, optical information processing, etc.) etc.) are extending functionality that is difficult for electronics to perform.

光电子半导体组件在制造时,考虑到半导体的脆弱性,通过精密的机器进行组装,组装时由于机器输入的数值为一定的,不能实时的调整与组件的连接位置,容易造成硬性损坏的情况发生,且半导体组件连接后的相邻的半导体之间受机器固定的范围较大,导致周围的连接处压力大,而中间的连接处压力小,使受力不均匀的情况发生。When manufacturing optoelectronic semiconductor components, considering the fragility of semiconductors, they are assembled by precision machines. Since the value input by the machine is fixed during assembly, the connection position with the components cannot be adjusted in real time, which is likely to cause hard damage. Moreover, after the semiconductor components are connected, the adjacent semiconductors are fixed by the machine in a large range, resulting in high pressure at the surrounding joints, while the pressure at the middle joints is small, resulting in uneven force.

发明内容Contents of the invention

本发明的目的在于提供用于制造光电子半导体组件的方法和光电子半导体组件,以解决上述背景技术中提出的半导体组件上的半导体之间压力受力不均,容易造成损坏的问题。The purpose of the present invention is to provide a method for manufacturing an optoelectronic semiconductor component and an optoelectronic semiconductor component, so as to solve the problem of uneven pressure between semiconductors on the semiconductor component and easy damage caused by the aforementioned background art.

为实现上述目的,本发明提供如下技术方案:一种光电子半导体组件,包括半导体和压力垫圈,所述压力垫圈安装在半导体外壁,两个所述压力垫圈之间通过插杆连接固定,所述插杆上安装有用于固定插杆的限位圈。In order to achieve the above object, the present invention provides the following technical solutions: an optoelectronic semiconductor component, including a semiconductor and a pressure washer, the pressure washer is installed on the outer wall of the semiconductor, and the two pressure washers are connected and fixed by inserting rods, and the insert A limit ring for fixing the plunger is installed on the rod.

优选的,该光电子半导体组件的制作方法如下:Preferably, the fabrication method of the optoelectronic semiconductor component is as follows:

步骤一:将压力垫圈安装在半导体上;Step 1: Install the pressure washer on the semiconductor;

步骤二:将两个安装好压力垫圈的半导体进行重合;Step 2: Overlap the two semiconductors with pressure washers installed;

步骤三:通过压力器将两个压力垫圈进行挤压,使压力垫圈的底端达到与半导体的表面呈平行状;Step 3: Squeeze the two pressure washers through a press, so that the bottom of the pressure washers is parallel to the surface of the semiconductor;

步骤四:将插杆插入到压力垫圈上的通孔内,将限位圈安装到插杆的另一端,使压力垫圈的位置固定;Step 4: Insert the insertion rod into the through hole on the pressure washer, and install the limit ring to the other end of the insertion rod to fix the position of the pressure washer;

步骤五:将重合的光电子半导体组件缝隙处进行红外扫描;Step 5: Carry out infrared scanning on the gap between the overlapped optoelectronic semiconductor components;

步骤六:根据扫描数据驱动压力器进行数据调节;Step 6: Drive the pressure device according to the scan data to adjust the data;

步骤七:检测两个光电子半导体之间的承受压力;Step 7: Detect the bearing pressure between the two optoelectronic semiconductors;

步骤八:根据扫描数据和最大承受压力对压力器进行调节;Step 8: Adjust the pressure device according to the scanning data and the maximum pressure;

步骤九:取两个光电子半导体接触同时两个光电子半导体之间承受压力和两个光电子半导体之间缝隙三者最佳数据,得到最佳的压力承受状态。Step 9: Take the best data of the two optoelectronic semiconductors being in contact with each other while the two optoelectronic semiconductors are under pressure and the gap between the two optoelectronic semiconductors to obtain the best pressure bearing state.

优选的,所述步骤一中压力垫圈与半导体之间粘接,压力垫圈与半导体之间安装有绝缘垫片。Preferably, in the first step, the pressure washer is bonded to the semiconductor, and an insulating gasket is installed between the pressure washer and the semiconductor.

优选的,所述步骤二中重合为将两个压力垫圈呈叠放的状态,使压力垫圈上的通孔对应。Preferably, the overlapping in the second step is to put the two pressure washers in a stacked state, so that the through holes on the pressure washers correspond to each other.

优选的,所述步骤三中压力器的工作方式是将伸缩杆的底部通过与压力垫圈相对应的压盘对压力垫圈进行挤压。Preferably, the working method of the pressure device in the third step is to press the bottom of the telescopic rod through the pressure plate corresponding to the pressure washer to press the pressure washer.

优选的,所述步骤四中插杆插入到压力垫圈和对插杆进行固定均通过机器完成。Preferably, in the step four, the insertion of the insertion rod into the pressure washer and the fixing of the insertion rod are both completed by machine.

优选的,所述步骤五中红外扫描通过红外扫描仪完成。Preferably, the infrared scanning in step five is completed by an infrared scanner.

优选的,所述步骤六中数据调节通过控制端完成。Preferably, the data adjustment in step six is completed through the control terminal.

优选的,所述步骤七中压力检测通过压力传感器完成。Preferably, the pressure detection in step seven is accomplished by a pressure sensor.

优选的,所述步骤八和步骤九中数据调节均通过控制端完成。Preferably, the data adjustment in the eighth step and the ninth step is completed through the control terminal.

与现有技术相比,本发明的有益效果是:通过该用于制造光电子半导体组件的方法和光电子半导体组件,光电子半导体组件在制造时,考虑到半导体的脆弱性,通过精密的机器进行组装,组装时由于机器输入的数值为一定的,不能实时的调整与组件的连接位置,容易造成硬性损坏的情况发生,且半导体组件连接后的相邻的半导体之间受机器固定的范围较大,导致周围的连接处压力大,而中间的连接处压力小,使受力不均匀的情况发生。本申请文件中,将两个半导体之间通过压力垫片进行连接固定,压力垫片有一定的形变性能,使两个半导体之间接触的同时,通过压力垫片达到均匀受压的目的。Compared with the prior art, the beneficial effect of the present invention is: through the method for manufacturing an optoelectronic semiconductor component and the optoelectronic semiconductor component, the optoelectronic semiconductor component is assembled by a precision machine in consideration of the fragility of the semiconductor during manufacture, During assembly, since the value input by the machine is fixed, the connection position with the component cannot be adjusted in real time, which may easily cause hard damage. Moreover, after the semiconductor component is connected, the adjacent semiconductors are fixed by the machine in a large range, resulting in The pressure on the surrounding joints is high, while the pressure on the middle joints is small, causing uneven stress. In this application document, the two semiconductors are connected and fixed through a pressure gasket. The pressure gasket has certain deformation properties, so that the two semiconductors can be evenly pressed through the pressure gasket while they are in contact.

附图说明Description of drawings

图1为本发明结构示意图;Fig. 1 is a structural representation of the present invention;

图2为本发明俯视结构示意图;Fig. 2 is a schematic view of the top view structure of the present invention;

图3为本发明压力器结构示意图。Fig. 3 is a structural schematic diagram of the pressure device of the present invention.

图中:100压力垫圈、200半导体、300插杆、400通孔、500压力器。In the figure: 100 pressure washers, 200 semiconductors, 300 insert rods, 400 through holes, 500 pressure devices.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

本发明提供如下技术方案:一种光电子半导体组件,请参阅图1-3,包括半导体200和压力垫圈100,压力垫圈100安装在半导体200外壁,两个压力垫圈100之间通过插杆300连接固定,插杆300上安装有用于固定插杆300的限位圈。The present invention provides the following technical solutions: An optoelectronic semiconductor assembly, please refer to Figures 1-3, includes a semiconductor 200 and a pressure washer 100, the pressure washer 100 is installed on the outer wall of the semiconductor 200, and the two pressure washers 100 are connected and fixed by an insertion rod 300 , a limit ring for fixing the insertion rod 300 is installed on the insertion rod 300 .

其中,该光电子半导体组件的制作方法如下:Wherein, the fabrication method of the optoelectronic semiconductor component is as follows:

步骤一:将压力垫圈100安装在半导体200上;Step 1: Install the pressure washer 100 on the semiconductor 200;

步骤二:将两个安装好压力垫圈100的半导体200进行重合;Step 2: Overlap the two semiconductors 200 with the pressure washers 100 installed;

步骤三:通过压力器500将两个压力垫圈100进行挤压,使压力垫圈100的底端达到与半导体200的表面呈平行状;Step 3: Squeeze the two pressure washers 100 through the pressure device 500, so that the bottom of the pressure washers 100 is parallel to the surface of the semiconductor 200;

步骤四:将插杆300插入到压力垫圈100上的通孔400内,将限位圈安装到插杆300的另一端,使压力垫圈100的位置固定;Step 4: Insert the insertion rod 300 into the through hole 400 on the pressure washer 100, and install the limit ring on the other end of the insertion rod 300 to fix the position of the pressure washer 100;

步骤五:将重合的光电子半导体组件缝隙处进行红外扫描;Step 5: Carry out infrared scanning on the gap between the overlapped optoelectronic semiconductor components;

步骤六:根据扫描数据驱动压力器500进行数据调节;Step 6: Drive the pressure device 500 according to the scan data to adjust the data;

步骤七:检测两个光电子半导体200之间的承受压力;Step 7: Detect the bearing pressure between the two optoelectronic semiconductors 200;

步骤八:根据扫描数据和最大承受压力对压力器500进行调节;Step 8: Adjust the pressure device 500 according to the scan data and the maximum pressure;

步骤九:取两个光电子半导体200接触同时两个光电子半导体200之间承受压力和两个光电子半导体200之间缝隙三者最佳数据,得到最佳的压力承受状态。Step 9: Take the best data of the two optoelectronic semiconductors 200 being in contact with each other while the two optoelectronic semiconductors 200 are under pressure and the gap between the two optoelectronic semiconductors 200 to obtain the best pressure bearing state.

其中,步骤一中压力垫圈100与半导体200之间粘接,压力垫圈100与半导体200之间安装有绝缘垫片,具体的,绝缘垫片用于将压力垫圈100与半导体200之间实现绝缘目的,从而防止压力垫圈100对半导体200之间产生影响。Wherein, in step 1, the pressure washer 100 is bonded to the semiconductor 200, and an insulating gasket is installed between the pressure washer 100 and the semiconductor 200. Specifically, the insulating gasket is used to achieve insulation between the pressure washer 100 and the semiconductor 200. , thereby preventing the impact between the pressure washer 100 and the semiconductor 200 .

其中,步骤二中重合为将两个压力垫圈100呈叠放的状态,使压力垫圈100上的通孔400对应,具体的,叠放的压力垫圈100使其在受压时的压力面更加的均匀,防止受压不均造成的半导体200组件倾斜的情况发生。Wherein, overlapping in step 2 is to put the two pressure washers 100 in a stacked state, so that the through holes 400 on the pressure washers 100 correspond to each other. Specifically, the stacked pressure washers 100 make their pressure surfaces more compact when under pressure. Uniformity, to prevent the semiconductor 200 components from tilting caused by uneven pressure.

其中,步骤三中压力器500的工作方式是将伸缩杆的底部通过与压力垫圈100相对应的压盘对压力垫圈100进行挤压,具体的,压力器500有伸缩杆和压盘组成,伸缩杆与压盘螺纹连接。Wherein, the working method of the pressure device 500 in step three is to squeeze the pressure washer 100 through the pressure plate corresponding to the pressure washer 100 at the bottom of the telescopic rod. Specifically, the pressure device 500 is composed of a telescopic rod and a pressure plate. The rod is threadedly connected with the pressure plate.

其中,步骤四中插杆300插入到压力垫圈100和对插杆300进行固定均通过机器完成,具体的,机器由升降装置和夹持装置组成,夹持装置和升降装置均通过控制端进行控制,控制端控制升降装置进行升降,夹持装置对插杆300进行夹持,配合升降装置实现插杆300的移动。Wherein, in Step 4, the insertion of the insertion rod 300 into the pressure washer 100 and the fixing of the insertion rod 300 are all completed by the machine. Specifically, the machine is composed of a lifting device and a clamping device, and both the clamping device and the lifting device are controlled by the control terminal. , the control end controls the lifting device to lift, the clamping device clamps the insertion rod 300, and cooperates with the lifting device to realize the movement of the insertion rod 300.

其中,步骤五中红外扫描通过红外扫描仪完成,具体的,红外扫描仪将扫描的信息传输给控制端后进行数据的处理。Wherein, the infrared scanning in step five is completed by an infrared scanner, specifically, the infrared scanner transmits the scanned information to the control terminal for data processing.

其中,步骤六中数据调节通过控制端完成,具体的,控制端为外部控制装置,将检测到的数据进行信息化的智能调节对比。Wherein, the data adjustment in Step 6 is completed through the control terminal, specifically, the control terminal is an external control device, and the detected data is compared with informationized intelligent adjustment.

其中,步骤七中压力检测通过压力传感器完成,具体的,压力传感器将检测到的压力信息传输给控制端。Wherein, the pressure detection in step seven is completed by a pressure sensor, specifically, the pressure sensor transmits the detected pressure information to the control terminal.

其中,步骤八和步骤九中数据调节均通过控制端完成,具体的,控制端为外部控制装置,用于进行数据的信息化调节。Wherein, the data adjustment in step 8 and step 9 are both completed through the control terminal, specifically, the control terminal is an external control device for informational adjustment of data.

虽然在上文中已经参考了一些实施例对本发明进行描述,然而在不脱离本发明的范围的情况下,可以对其进行各种改进并且可以用等效无替换其中的部件。尤其是,只要不存在结构冲突,本发明所披露的各个实施例中的各项特征均可通过任意方式相互结合起来使用,在本说明书中未对这些组合的情况进行穷举的描述仅仅是处于省略篇幅和节约资源的考虑。因此,本发明并不局限于文中公开的特定实施例,而且包括落入权利要求的范围内的所有技术方案。While the invention has been described above with reference to certain embodiments, various modifications may be made and equivalents may be substituted for parts thereof without departing from the scope of the invention. In particular, as long as there is no structural conflict, each feature in each embodiment disclosed in the present invention can be used in combination with each other in any way, and the description of these combinations is not exhaustive in this specification only for the sake of Omit length and resource conservation considerations. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims (10)

1. a kind of optoelectronic semiconductor component, it is characterised in that: including semiconductor (200) and pressure disc (100), the pressure Washer (100) is mounted on semiconductor (200) outer wall, is connected between two pressure discs (100) by inserted link (300) solid It is fixed, the spacing collar for fixing inserted link (300) is installed on the inserted link (300).
2. the method according to claim 1 for manufacturing optoelectronic semiconductor (200) component, it is characterised in that: the light Electronic semiconductor components the production method is as follows:
Step 1: pressure disc (100) is mounted on semiconductor (200);
Step 2: the semiconductor (200) that two install pressure disc (100) is overlapped;
Step 3: two pressure discs (100) are squeezed by pressure device (500), reach the bottom end of pressure disc (100) To with the surface of semiconductor (200) be in parallel shape;
Step 4: inserted link (300) is inserted into the through-hole (400) on pressure disc (100) Nei, spacing collar is installed to inserted link (300) the other end fixes the position of pressure disc (100);
Step 5: infrared scan will be carried out at the optoelectronic semiconductor component gap of coincidence;
Step 6: data adjusting is carried out according to scanning data drive pressure device (500);
Step 7: the receiving pressure between two optoelectronic semiconductors (200) of detection;
Step 8: pressure device (500) is adjusted according to scan data and maximum pressure of bearing;
Step 9: take the contact of two optoelectronic semiconductors (200) bear between two optoelectronic semiconductors (200) simultaneously pressure and Gap three's optimum data between two optoelectronic semiconductors (200), obtains optimal pressure bearing state.
3. the method according to claim 2 for manufacturing optoelectronic semiconductor component, it is characterised in that: the step 1 It is be bonded between middle pressure disc (100) and semiconductor (200), insulation is installed between pressure disc (100) and semiconductor (200) Gasket.
4. the method according to claim 2 for manufacturing optoelectronic semiconductor component, it is characterised in that: the step 2 It is middle to be overlapped to be in the state stacked by two pressure discs (100), keep the through-hole (400) on pressure disc (100) corresponding.
5. the method according to claim 2 for manufacturing optoelectronic semiconductor component, it is characterised in that: the step 3 The working method of middle pressure device (500) is by platen corresponding with pressure disc (100) by the bottom of telescopic rod to pressure Washer (100) is squeezed.
6. the method according to claim 2 for manufacturing optoelectronic semiconductor component, it is characterised in that: the step 4 Middle inserted link (300) is inserted into pressure disc (100) and inserted link (300) is fixed and completed by machine.
7. the method according to claim 2 for manufacturing optoelectronic semiconductor component, it is characterised in that: the step 5 Middle infrared scan is completed by infrared scanner.
8. the method according to claim 2 for manufacturing optoelectronic semiconductor component, it is characterised in that: the step 6 Middle data are adjusted to be completed by control terminal.
9. the method according to claim 2 for manufacturing optoelectronic semiconductor component, it is characterised in that: the step 7 Middle pressure detecting is completed by pressure sensor.
10. the method according to claim 2 for manufacturing optoelectronic semiconductor component, it is characterised in that: the step Eight and step 9 in data adjust by control terminal completion.
CN201910837614.8A 2019-09-05 2019-09-05 For manufacturing the method and optoelectronic semiconductor component of optoelectronic semiconductor component Pending CN110535027A (en)

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101828277A (en) * 2007-11-01 2010-09-08 松下电器产业株式会社 Semiconductor light emitting device and semiconductor light emitting apparatus using the same
CN104934851A (en) * 2015-06-19 2015-09-23 郑州大学 Fixture for packaging stack array of semiconductor laser
CN204835205U (en) * 2015-08-17 2015-12-02 江苏北方湖光光电有限公司 A buffer gear for high power semiconductor laser
CN105406350A (en) * 2014-09-04 2016-03-16 佳耐美电气有限公司 Semiconductor Lasers
CN106785921A (en) * 2016-12-29 2017-05-31 西安炬光科技股份有限公司 A kind of semiconductor laser stacks of mechanical erection
CN107069434A (en) * 2017-03-13 2017-08-18 西安炬光科技股份有限公司 A kind of semiconductor laser stacks of mechanical connection
CN206422383U (en) * 2016-12-29 2017-08-18 西安炬光科技股份有限公司 The semiconductor laser stacks that a kind of solderless is installed
CN107069419A (en) * 2016-12-27 2017-08-18 中国科学院长春光学精密机械与物理研究所 Device of the two-dimentional integration packaging of many laser tubes into area source
CN107123611A (en) * 2016-02-24 2017-09-01 苏斯微技术光刻有限公司 Semiconductor bond device and correlation technique
CN207705566U (en) * 2017-11-13 2018-08-07 石家庄麦特达电子科技有限公司 Semiconductor laser chip packaging and positioning device

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101828277A (en) * 2007-11-01 2010-09-08 松下电器产业株式会社 Semiconductor light emitting device and semiconductor light emitting apparatus using the same
CN105406350A (en) * 2014-09-04 2016-03-16 佳耐美电气有限公司 Semiconductor Lasers
CN104934851A (en) * 2015-06-19 2015-09-23 郑州大学 Fixture for packaging stack array of semiconductor laser
CN204835205U (en) * 2015-08-17 2015-12-02 江苏北方湖光光电有限公司 A buffer gear for high power semiconductor laser
CN107123611A (en) * 2016-02-24 2017-09-01 苏斯微技术光刻有限公司 Semiconductor bond device and correlation technique
CN107069419A (en) * 2016-12-27 2017-08-18 中国科学院长春光学精密机械与物理研究所 Device of the two-dimentional integration packaging of many laser tubes into area source
CN106785921A (en) * 2016-12-29 2017-05-31 西安炬光科技股份有限公司 A kind of semiconductor laser stacks of mechanical erection
CN206422383U (en) * 2016-12-29 2017-08-18 西安炬光科技股份有限公司 The semiconductor laser stacks that a kind of solderless is installed
CN107069434A (en) * 2017-03-13 2017-08-18 西安炬光科技股份有限公司 A kind of semiconductor laser stacks of mechanical connection
CN207705566U (en) * 2017-11-13 2018-08-07 石家庄麦特达电子科技有限公司 Semiconductor laser chip packaging and positioning device

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Application publication date: 20191203