[go: up one dir, main page]

CN110501521B - Piezoelectric accelerometer - Google Patents

Piezoelectric accelerometer Download PDF

Info

Publication number
CN110501521B
CN110501521B CN201910740137.3A CN201910740137A CN110501521B CN 110501521 B CN110501521 B CN 110501521B CN 201910740137 A CN201910740137 A CN 201910740137A CN 110501521 B CN110501521 B CN 110501521B
Authority
CN
China
Prior art keywords
piezoelectric
accelerometer
mass block
symmetrical
electrode joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910740137.3A
Other languages
Chinese (zh)
Other versions
CN110501521A (en
Inventor
刘炎
孙成亮
胡博豪
高超
邹杨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan Memsonics Technologies Co Ltd
Original Assignee
Wuhan University WHU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan University WHU filed Critical Wuhan University WHU
Priority to CN201910740137.3A priority Critical patent/CN110501521B/en
Publication of CN110501521A publication Critical patent/CN110501521A/en
Application granted granted Critical
Publication of CN110501521B publication Critical patent/CN110501521B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

本发明涉及加速度计技术领域，公开了一种压电式加速度计，包括矩形框架，矩形框架内设置有质量块，质量块在一组互相平行的侧面上固定梁一、梁二、梁三和梁四；梁一和梁二互相对称且位于同一侧面，梁三和梁四互相对称且位于与梁一所在的侧面相平行的另一侧面，梁一与梁三互相对称，梁二与梁四互相对称；梁一、梁二、梁三和梁四上表面上均设置有压电片，每个压电片的四个角上分别设置有一个金属电极。本发明将各个梁设置在质量块对称的两侧，加强了加速度计的稳定性，减少加速度计在工作情况下的扭转变形；质量块的厚度与梁的厚度一致，增强了加速度计的稳定性并减少了扭转变形，同时能够获得较高的动态频宽。

Figure 201910740137

The invention relates to the technical field of accelerometers, and discloses a piezoelectric accelerometer, which comprises a rectangular frame, a mass block is arranged in the rectangular frame, and the mass block is fixed on a set of mutually parallel sides beams 1, 2, 3 and Beam 4; Beams 1 and 2 are symmetrical to each other and are located on the same side, beams 3 and 4 are symmetrical to each other and are located on the other side parallel to the side where beam 1 is located, beams 1 and 3 are symmetric to each other, and beams 2 and 4 They are symmetrical to each other; the upper surfaces of beams 1, 2, 3 and 4 are all provided with piezoelectric sheets, and four corners of each piezoelectric sheet are respectively provided with a metal electrode. In the invention, each beam is arranged on the symmetrical sides of the mass block, which strengthens the stability of the accelerometer and reduces the torsional deformation of the accelerometer under working conditions; the thickness of the mass block is consistent with the thickness of the beam, which enhances the stability of the accelerometer And reduce the torsional deformation, and at the same time can obtain a higher dynamic bandwidth.

Figure 201910740137

Description

一种压电式加速度计A piezoelectric accelerometer

技术领域technical field

本发明涉及加速度计技术领域，具体涉及一种压电式加速度计。The invention relates to the technical field of accelerometers, in particular to a piezoelectric accelerometer.

背景技术Background technique

惯性导航系统通过加速度计能够实时测量运载体相对惯性坐标系的加速度。目前加速度传感器主要有压阻式、电容式、压电式、力平衡式、微机械热对流式和微机械谐振器。压电式加速度计是利用具有压电效应的材料进行加速度测量，当输入加速度时，质量块产生的惯性力使得梁、薄膜结构发生形变，在其表面产生电荷，通过电荷放大器或者电压放大器，将输出与输入加速度成正比的电荷或者电压。压电式加速度传感器的动态范围宽、线性度好，非常适合于冲击以及振动的检测。The inertial navigation system can measure the acceleration of the carrier relative to the inertial coordinate system in real time through the accelerometer. At present, acceleration sensors mainly include piezoresistive, capacitive, piezoelectric, force balance, micromechanical thermal convection and micromechanical resonators. Piezoelectric accelerometers use materials with piezoelectric effect for acceleration measurement. When the acceleration is input, the inertial force generated by the mass block deforms the beam and film structure, and generates charges on its surface. Through the charge amplifier or voltage amplifier, the Output a charge or voltage proportional to the input acceleration. Piezoelectric accelerometers have a wide dynamic range and good linearity, making them very suitable for shock and vibration detection.

传统的压电式加速度计多为单轴加速度计，需要三个单轴组装才能检测三轴，因此必然导致体积大、一致性差等缺陷；同时也使得质量块的厚度远大于梁的厚度，这样会导致加速度计在工作中的扭转变形，极大影响加速度计的精准测量。Most of the traditional piezoelectric accelerometers are single-axis accelerometers, which require three single-axis assemblies to detect three axes, which will inevitably lead to defects such as large volume and poor consistency; at the same time, the thickness of the mass block is much larger than that of the beam, so It will lead to torsional deformation of the accelerometer during operation, which greatly affects the accurate measurement of the accelerometer.

发明内容SUMMARY OF THE INVENTION

基于以上问题，本发明提供一种压电式加速度计，加强了加速度计的稳定性，减少加速度计在工作情况下的扭转变形；质量块的厚度与梁的厚度一致，增强了加速度计的稳定性并减少了扭转变形，同时能够获得较高的动态频宽。Based on the above problems, the present invention provides a piezoelectric accelerometer, which enhances the stability of the accelerometer and reduces the torsional deformation of the accelerometer under working conditions; the thickness of the mass block is consistent with the thickness of the beam, which enhances the stability of the accelerometer and reduce torsional deformation, while achieving higher dynamic bandwidth.

为解决以上技术问题，本发明提供了一种压电式加速度计，包括矩形框架，矩形框架内设置有一个长方体的质量块，质量块在一组互相平行的侧面上固定梁一、梁二、梁三和梁四，梁一、梁二、梁三和梁四在远离质量块的端头均与矩形框架内壁固定连接；梁一和梁二互相对称且位于同一侧面，梁三和梁四互相对称且位于与梁一所在的侧面相平行的另一侧面，梁一与梁二之间留置有间隙，梁三与梁四之间留置有间隙，梁一与梁三互相对称，梁二与梁四互相对称；梁一、梁二、梁三和梁四上表面上均设置有压电片，每个压电片的四个角上分别设置有一个金属电极；梁一、梁二、梁三和梁四的厚度均与质量块的厚度相同。In order to solve the above technical problems, the present invention provides a piezoelectric accelerometer, which includes a rectangular frame, and a rectangular mass block is arranged in the rectangular frame. Beam 3 and beam 4, beam 1, beam 2, beam 3 and beam 4 are fixedly connected to the inner wall of the rectangular frame at the end far from the mass block; beam 1 and beam 2 are symmetrical to each other and are located on the same side, beam 3 and beam 4 are mutually Symmetrical and located on the other side parallel to the side where beam one is located, there is a gap between beam one and beam two, a gap is left between beam three and beam four, beam one and beam three are symmetrical to each other, beam two and beam The four are symmetrical to each other; the upper surfaces of beams 1, 2, 3 and 4 are all provided with piezoelectric sheets, and a metal electrode is respectively provided on the four corners of each piezoelectric sheet; beams 1, 2, and 3 The thickness of beam four is the same as that of the mass.

进一步地，梁一、梁二、梁三和梁四均为长方体，梁一、梁二、梁三、梁四与质量块形成“工”字形双轴压电式加速度计。Further, beam 1, beam 2, beam 3 and beam 4 are all rectangular parallelepipeds, and beam 1, beam 2, beam 3, beam 4 and the mass block form an "I"-shaped biaxial piezoelectric accelerometer.

进一步地，梁一、梁二、梁三和梁四均为L形，梁一、梁二、梁三、梁四与质量块形成具有L形梁的三轴压电式加速度计。Further, beam 1, beam 2, beam 3 and beam 4 are all L-shaped, and beam 1, beam 2, beam 3, beam 4 and the mass block form a triaxial piezoelectric accelerometer with L-shaped beam.

进一步地，梁一、梁二、梁三、梁四与质量块通过机械加工一体成型。Further, beam 1, beam 2, beam 3, beam 4 and the mass block are integrally formed by machining.

与现有技术相比，本发明的有益效果是：Compared with the prior art, the beneficial effects of the present invention are:

1)将梁设置在质量块对称的两侧，加强了加速度计的稳定性，减少加速度计在工作情况下的扭转变形；1) The beams are arranged on the symmetrical sides of the mass block, which strengthens the stability of the accelerometer and reduces the torsional deformation of the accelerometer under working conditions;

2)质量块的厚度与梁的厚度一致，进一步增强了加速度计的稳定性并减少了扭转变形；同时，能够获得较高的动态频宽。2) The thickness of the mass block is consistent with the thickness of the beam, which further enhances the stability of the accelerometer and reduces torsional deformation; at the same time, a higher dynamic bandwidth can be obtained.

附图说明Description of drawings

图1为实施例中1中的一种压电式加速度计结构示意图；1 is a schematic structural diagram of a piezoelectric accelerometer in Embodiment 1;

图2为实施例中2中的“工”字形双轴压电式加速度计结构示意图；2 is a schematic structural diagram of the "I"-shaped biaxial piezoelectric accelerometer in 2 in the embodiment;

图3为实施例中2中的“工”字形双轴压电式加速度计电路连接示意图；3 is a schematic diagram of the circuit connection of the "I"-shaped biaxial piezoelectric accelerometer in 2 in the embodiment;

图4为实施例中3中的具有L形梁的三轴压电式加速度计结构示意图；4 is a schematic structural diagram of a three-axis piezoelectric accelerometer with an L-shaped beam in Embodiment 3;

图5为实施例中3中的具有L形梁的三轴压电式加速度计电路连接示意图；5 is a schematic diagram of the circuit connection of the triaxial piezoelectric accelerometer with an L-shaped beam in Embodiment 3;

具体实施方式Detailed ways

为使本发明的目的、技术方案和优点更加清楚明白，下面结合实施例和附图，对本发明作进一步的详细说明，本发明的示意性实施方式及其说明仅用于解释本发明，并不作为对本发明的限定。In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the embodiments and the accompanying drawings. as a limitation of the present invention.

实施例1：Example 1:

参见图1，一种压电式加速度计，包括矩形框架101，矩形框架101内设置有一个长方体的质量块102，质量块102在一组互相平行的侧面上固定有梁一103、梁二104、梁三105和梁四106，梁一103、梁二104、梁三105和梁四106在远离质量块102的端头均与矩形框架101内壁固定连接；梁一103和梁二104互相对称且位于同一侧面，梁三105和梁四106互相对称且位于与梁一103所在的侧面相平行的另一侧面，梁一103与梁二104之间留置有间隙，梁三105与梁四106之间留置有间隙，梁一103与梁三105互相对称，梁二104与梁四106互相对称；梁一103、梁二104、梁三105和梁四106上表面上均设置有压电片，每个压电片的四个角上分别设置有一个金属电极；梁一103、梁二104、梁三105和梁四106的厚度均与质量块102的厚度相同。Referring to FIG. 1, a piezoelectric accelerometer includes a rectangular frame 101, and a rectangular mass block 102 is arranged in the rectangular frame 101. The mass block 102 is fixed on a set of mutually parallel sides with a beam one 103 and a beam two 104. , beam three 105 and beam four 106, beam one 103, beam two 104, beam three 105 and beam four 106 are all fixedly connected with the inner wall of the rectangular frame 101 at the end away from the mass 102; beam one 103 and beam two 104 are symmetrical to each other And are located on the same side, beam three 105 and beam four 106 are symmetrical to each other and are located on the other side parallel to the side where beam one 103 is located, there is a gap left between beam one 103 and beam two 104, beam three 105 and beam four 106 There is a gap between them, beam one 103 and beam three 105 are symmetrical to each other, beam two 104 and beam four 106 are symmetrical to each other; , and a metal electrode is respectively set on the four corners of each piezoelectric sheet;

在本实施例中，质量块102与各个梁的材料可为结构钢、硅、合金、有机玻璃等；压电片可为AlN、PZT、ZnO等压电材料；金属电极可采用Mo、Al、Au、Pt和Ag等材料；质量块102、各个梁、压电片和金属电极的制作可采用微机械加工(MEMS)或者传统机械加工方式一体成型，使加速度计的整体稳定性较好。其工作原理为：质量块102受到某一方向的载荷产生微位移，进而梁一103、梁二104、梁三105和梁四106上的压电片随着梁的弯曲而弯曲，根据正压电效应，压电片会产生正比于加速度的电荷，通过测量电荷的大小进而可以推导出加速度的大小，再通过测量不同金属电极之间的电荷或电压信号值，即可推算出对应轴向方向上的加速度大小。In this embodiment, the material of the mass block 102 and each beam can be structural steel, silicon, alloy, plexiglass, etc.; the piezoelectric sheet can be piezoelectric material such as AlN, PZT, ZnO; the metal electrode can be made of Mo, Al, Materials such as Au, Pt and Ag; the mass block 102 , each beam, piezoelectric sheet and metal electrodes can be formed integrally by micromachining (MEMS) or traditional machining methods, so that the overall stability of the accelerometer is better. Its working principle is: the mass block 102 is subjected to a load in a certain direction to produce micro-displacement, and then the piezoelectric sheets on beam one 103, beam two 104, beam three 105 and beam four 106 are bent with the bending of the beam, according to the positive pressure. Electric effect, the piezoelectric sheet will generate a charge proportional to the acceleration. By measuring the size of the charge, the size of the acceleration can be deduced, and then by measuring the electric charge or voltage signal value between different metal electrodes, the corresponding axial direction can be calculated. the magnitude of the acceleration.

压电式加速度计的灵敏度既可以用电荷灵敏度Sq表示，也可以用电压灵敏度Sv表示：The sensitivity of the piezoelectric accelerometer can be expressed by either the charge sensitivity S q or the voltage sensitivity S v :

电荷灵敏度：

Figure BDA0002163651890000031
Charge Sensitivity:
Figure BDA0002163651890000031

电压灵敏度：

Figure BDA0002163651890000032
Voltage Sensitivity:
Figure BDA0002163651890000032

则可通过

Figure BDA0002163651890000033
计算加速度值；can be passed
Figure BDA0002163651890000033
Calculate the acceleration value;

其中，Qa为测量端出现的电荷量，电荷灵敏度Sq为压电片在一个单位加速度下产生的电荷量，可通过仪器进行测量；Va为测量端在一定负载相关下的电压值，电压灵敏度Sv为压电片在一个单位加速度下产生的电压值，可通过仪器进行测量。Among them, Q a is the amount of charge appearing at the measuring end, and the charge sensitivity S q is the amount of charge generated by the piezoelectric sheet under a unit acceleration, which can be measured by the instrument; V a is the voltage value of the measuring end under a certain load correlation, The voltage sensitivity S v is the voltage value generated by the piezoelectric sheet under a unit acceleration, which can be measured by the instrument.

实施例2：Example 2:

如图2和图3所示，一种压电式加速度计，包括矩形框架101，矩形框架101内设置有一个长方体的质量块102，质量块102在一组互相平行的侧面上固定梁一103、梁二104、梁三105和梁四106，梁一103、梁二104、梁三105和梁四106在远离质量块102的端头均与矩形框架101内壁固定连接；梁一103和梁二104互相对称且位于同一侧面，梁三105和梁四106互相对称且位于与梁一103所在的侧面相平行的另一侧面，梁一103与梁二104之间留置有间隙，梁三105与梁四106之间留置有间隙，梁一103与梁三105互相对称，梁二104与梁四106互相对称；梁一103、梁二104、梁三105和梁四106上表面上均设置有压电片，每个压电片的四个角上分别设置有一个金属电极；梁一103、梁二104、梁三105和梁四106的厚度均与质量块102的厚度相同。As shown in FIG. 2 and FIG. 3, a piezoelectric accelerometer includes a rectangular frame 101, and a rectangular mass 102 is arranged in the rectangular frame 101, and the mass 102 is fixed on a set of mutually parallel side beams 103 , beam two 104, beam three 105 and beam four 106, beam one 103, beam two 104, beam three 105 and beam four 106 are all fixedly connected with the inner wall of the rectangular frame 101 at the ends away from the mass 102; beam one 103 and beam The two 104 are symmetrical to each other and are located on the same side, the beam three 105 and the beam four 106 are symmetrical to each other and are located on the other side parallel to the side where the beam one 103 is located, there is a gap between the beam one 103 and the beam two 104, and the beam three 105 There is a gap with the beam four 106, the beam one 103 and the beam three 105 are symmetrical to each other, the beam two 104 and the beam four 106 are symmetrical to each other; There are piezoelectric sheets, and four corners of each piezoelectric sheet are respectively provided with a metal electrode;

梁一103、梁二104、梁三105和梁四106均为长方体，梁一103、梁二104、梁三105、梁四106与质量块102、矩形框架101形成“工”字形双轴压电式加速度计。Beam one 103, beam two 104, beam three 105 and beam four 106 are all rectangular parallelepipeds. Beam one 103, beam two 104, beam three 105, beam four 106, mass block 102 and rectangular frame 101 form an "I"-shaped biaxial compression Electric accelerometer.

图3为“工”字形压电双轴加速计的金属电极电路连接示意图，其共有16个金属电极107～122。金属电极109、114、115、120通过导线互连引出至电极接头123，金属电极108、111、118、121通过导线互连引出至电极接头127；当受到Z轴方向的载荷时，梁的夹持端和连接质量块102一端将产生相反的形变，进而电极接头123和电极接头127产生电性相反的电荷，通过测量电极接头123和电极接头127的电荷或电压信号即可推算出Z轴的加速度；FIG. 3 is a schematic diagram of the circuit connection of the metal electrodes of the “I”-shaped piezoelectric biaxial accelerometer, which has 16 metal electrodes 107 to 122 in total. The metal electrodes 109, 114, 115, and 120 are led out to the electrode joint 123 through wire interconnection, and the metal electrodes 108, 111, 118, and 121 are led out to the electrode joint 127 through wire interconnection; The holding end and the end of the connection mass 102 will produce opposite deformations, and then the electrode joint 123 and the electrode joint 127 will generate electrical opposite charges. acceleration;

金属电极107、117通过导线互连引出至电极接头125，金属电极112、122通过导线互连引出至电极接头128；当受到Y轴方向的载荷时，各梁的夹持端的上、下部产生相反的形变，进而电极接头125和电极接头128产生电性相反的电荷，通过测量电极接头125和电极接头128的电荷或电压信号即可推算出Y轴的加速度；The metal electrodes 107 and 117 are led out to the electrode joint 125 through the wire interconnection, and the metal electrodes 112 and 122 are led out to the electrode joint 128 through the wire interconnection; when subjected to the load in the Y-axis direction, the upper and lower parts of the clamping ends of the beams are opposite to each other. The deformation of the electrode joint 125 and the electrode joint 128 generate opposite electric charges, and the acceleration of the Y-axis can be calculated by measuring the charge or voltage signal of the electrode joint 125 and the electrode joint 128;

金属电极110、113通过导线互连引出至电极接头126，金属电极116、119通过导线互连引出至电极接头124；当受到X轴方向的载荷时，左梁和右梁产生的是相反的变形，电极接头126和电极接头124产生电性相反的电荷，通过测量电极接头126和电极接头124的电荷或电压信号即可，特别的，该变形非常微小，信号可以忽略不计。The metal electrodes 110 and 113 are led out to the electrode joint 126 through wire interconnection, and the metal electrodes 116 and 119 are led out to the electrode joint 124 through the wire interconnection; when subjected to the load in the X-axis direction, the left beam and the right beam produce opposite deformations , the electrode joint 126 and the electrode joint 124 generate electrical opposite charges, and the charge or voltage signal of the electrode joint 126 and the electrode joint 124 can be measured. In particular, the deformation is very small, and the signal can be ignored.

当受到Z轴方向载荷时，电极接头123和电极接头127用于测量Z轴加速度信号，而用于测量Y轴加速度信号的电极接头125和电极接头128、用于测量X轴加速度信号的电极接头126和电极接头124为对称连接，电荷相互抵消，信号输出基本为0；When subjected to a load in the Z-axis direction, the electrode joint 123 and the electrode joint 127 are used to measure the Z-axis acceleration signal, while the electrode joint 125 and the electrode joint 128 are used to measure the Y-axis acceleration signal, and the electrode joints are used to measure the X-axis acceleration signal. 126 and the electrode joint 124 are symmetrically connected, the charges cancel each other, and the signal output is basically 0;

当受到Y轴方向载荷时，电极接头125和电极接头128用于测量Y轴加速度信号，而用于测量Z轴加速度信号的电极接头123和电极接头127、用于测量X轴加速度信号的电极接头126和电极接头124为对称连接，电荷相互抵消，信号输出基本为0；When subjected to a load in the Y-axis direction, the electrode joint 125 and the electrode joint 128 are used to measure the Y-axis acceleration signal, while the electrode joint 123 and the electrode joint 127 for measuring the Z-axis acceleration signal, and the electrode joint for measuring the X-axis acceleration signal 126 and the electrode joint 124 are symmetrically connected, the charges cancel each other, and the signal output is basically 0;

当受到X轴方向载荷时，电极接头126和电极接头124用于测量X轴加速度信号，而用于测量Z轴加速度信号的电极接头123和电极接头127、用于测量Y轴加速度信号的电极接头125和电极接头128为对称连接，电荷相互抵消，信号输出基本为0。When subjected to a load in the X-axis direction, the electrode joints 126 and 124 are used to measure the X-axis acceleration signal, while the electrode joints 123 and 127 are used to measure the Z-axis acceleration signal, and the electrode joints are used to measure the Y-axis acceleration signal. 125 and the electrode joint 128 are symmetrically connected, the charges cancel each other, and the signal output is basically 0.

本实施例中的其他部分与实施例1相同，这里不再赘述。Other parts in this embodiment are the same as those in Embodiment 1, and are not repeated here.

实施例3：Example 3:

如图4和图5所示，一种压电式加速度计，包括矩形框架101，矩形框架101内设置有一个长方体的质量块102，质量块102在一组互相平行的侧面上固定梁一103、梁二104、梁三105和梁四106，梁一103、梁二104、梁三105和梁四106在远离质量块102的端头均与矩形框架101内壁固定连接；梁一103和梁二104互相对称且位于同一侧面，梁三105和梁四106互相对称且位于与梁一103所在的侧面相平行的另一侧面，梁一103与梁二104之间留置有间隙，梁三105与梁四106之间留置有间隙，梁一103与梁三105互相对称，梁二104与梁四106互相对称；梁一103、梁二104、梁三105和梁四106上表面上均设置有压电片，每个压电片的四个角上分别设置有一个金属电极；梁一103、梁二104、梁三105和梁四106的厚度均与质量块102的厚度相同。As shown in FIG. 4 and FIG. 5 , a piezoelectric accelerometer includes a rectangular frame 101, and a rectangular mass 102 is arranged in the rectangular frame 101. The mass 102 is fixed on a set of mutually parallel sides with a beam 103 , beam two 104, beam three 105 and beam four 106, beam one 103, beam two 104, beam three 105 and beam four 106 are all fixedly connected with the inner wall of the rectangular frame 101 at the ends away from the mass 102; beam one 103 and beam The two 104 are symmetrical to each other and are located on the same side, the beam three 105 and the beam four 106 are symmetrical to each other and are located on the other side parallel to the side where the beam one 103 is located, there is a gap between the beam one 103 and the beam two 104, and the beam three 105 There is a gap with the beam four 106, the beam one 103 and the beam three 105 are symmetrical to each other, the beam two 104 and the beam four 106 are symmetrical to each other; There are piezoelectric sheets, and four corners of each piezoelectric sheet are respectively provided with a metal electrode;

梁一103、梁二104、梁三105和梁四106均为L形，梁一103、梁二104、梁三105、梁四106与质量块102、矩形框架101形成具有L形梁的三轴压电式加速度计。Beam one 103, beam two 104, beam three 105, and beam four 106 are all L-shaped, and beam one 103, beam two 104, beam three 105, beam four 106, mass block 102, and rectangular frame 101 form three L-shaped beams. Axial Piezo Accelerometer.

如图4所示，具有L形梁的三轴压电式加速度计，质量块102为长方体，在质量202对称两边设有梁一103、梁二104、梁三105、梁四106，各个梁的一端固定于矩形框架101上，另一端连接质量块102，在梁的表面上设有压电片。在梁一103的压电片上分布了金属电极207、208、209、210；在梁二104的压电片上分布了金属电极211、212、213、214；在梁三105的压电片上分布了金属电极215、216、217、218；在梁四106的压电片上分布了金属电极219、220、221、222。As shown in FIG. 4 , in a three-axis piezoelectric accelerometer with an L-shaped beam, the mass block 102 is a cuboid, and there are beam one 103, beam two 104, beam three 105, and beam four 106 on the symmetrical sides of the mass 202. Each beam One end of the beam is fixed on the rectangular frame 101, the other end is connected to the mass block 102, and a piezoelectric sheet is arranged on the surface of the beam. Metal electrodes 207, 208, 209, 210 are distributed on the piezoelectric sheet of beam one 103; metal electrodes 211, 212, 213, 214 are distributed on the piezoelectric sheet of beam two 104; Metal electrodes 215, 216, 217, 218; metal electrodes 219, 220, 221, 222 are distributed on the piezoelectric sheet of beam four 106.

图5为具有L形梁的三轴压电式加速度计的金属电极电路连接示意图，其共有16个金属电极207～222。金属电极210、216、213、219通过导线互连引出至电极接头228，金属电极207、212、222、217通过导线互连引出至电极接头225；当受到Z轴方向的载荷时，夹持端和连接质量块102一端将产生相反的形变，进而电极接头225和电极接头228产生电性相反的电荷，通过测量电极接头225和电极接头228的电荷或电压信号即可推算出Z轴的加速度；FIG. 5 is a schematic diagram of the circuit connection of metal electrodes of a triaxial piezoelectric accelerometer with an L-shaped beam, which has 16 metal electrodes 207 to 222 in total. The metal electrodes 210, 216, 213, 219 are led out to the electrode joint 228 through wire interconnection, and the metal electrodes 207, 212, 222, 217 are led out to the electrode joint 225 through wire interconnection; when subjected to the load in the Z-axis direction, the clamping end One end of the connection mass 102 will produce the opposite deformation, and then the electrode joint 225 and the electrode joint 228 will generate electrical opposite charges, and the Z-axis acceleration can be calculated by measuring the electric charge or the voltage signal of the electrode joint 225 and the electrode joint 228;

金属电极209、215通过导线互连引出至电极接头224，金属电极214、210通过导线互连引出至电极接头227；当受到Y轴方向的载荷时，梁靠近质量块102一端的上、下部产生相反的形变，进而电极接头224和电极接头227产生电性相反的电荷，通过测量电极接头224和电极接头227的电荷或电压信号即可推算出Y轴的加速度；The metal electrodes 209 and 215 are led out to the electrode joint 224 through the wire interconnection, and the metal electrodes 214 and 210 are led out to the electrode joint 227 through the wire interconnection; when subjected to the load in the Y-axis direction, the upper and lower parts of the beam close to one end of the mass 102 are generated The opposite deformation, and then the electrode joint 224 and the electrode joint 227 generate electrical opposite charges, and the Y-axis acceleration can be calculated by measuring the charge or voltage signal of the electrode joint 224 and the electrode joint 227;

金属电极208、211通过导线互连引出至电极接头223，金属电极218、221通过导线互连引出至电极接头226；当受到X轴方向的载荷时，梁的夹持端的上、下部产生相反的形变，进而电极接头223和电极接头226产生电性相反的电荷，通过测量电极接头223和电极接头226的电荷或电压信号即可推算出X轴的加速度；The metal electrodes 208 and 211 are led out to the electrode joint 223 through the wire interconnection, and the metal electrodes 218 and 221 are led out to the electrode joint 226 through the wire interconnection; when subjected to the load in the X-axis direction, the upper and lower parts of the clamping end of the beam are opposite to each other. deformation, and then the electrode joint 223 and the electrode joint 226 generate electrical opposite charges, and the X-axis acceleration can be calculated by measuring the charge or voltage signal of the electrode joint 223 and the electrode joint 226;

当受到Z轴方向载荷时，电极接头225和电极接头228用于测量Z轴加速度信号，而用于测量Y轴加速度信号的电极接头224和电极接头227、用于测量X轴加速度信号的电极接头223和电极接头226为对称连接，电荷相互抵消，信号输出基本为0；When subjected to a load in the Z-axis direction, the electrode joint 225 and the electrode joint 228 are used to measure the Z-axis acceleration signal, while the electrode joint 224 and the electrode joint 227 for measuring the Y-axis acceleration signal, and the electrode joint for measuring the X-axis acceleration signal 223 and the electrode joint 226 are symmetrically connected, the charges cancel each other, and the signal output is basically 0;

当受到Y轴方向载荷时，电极接头224和电极接头227用于测量Y轴加速度信号，而用于测量Z轴加速度信号的电极接头225和电极接头228、用于测量X轴加速度信号的电极接头223和电极接头226为对称连接，电荷相互抵消，信号输出基本为0；When subjected to a load in the Y-axis direction, the electrode joint 224 and the electrode joint 227 are used to measure the Y-axis acceleration signal, while the electrode joint 225 and the electrode joint 228 are used to measure the Z-axis acceleration signal, and the electrode joints are used to measure the X-axis acceleration signal. 223 and the electrode joint 226 are symmetrically connected, the charges cancel each other, and the signal output is basically 0;

当受到X轴方向载荷时，电极接头223和电极接头226用于测量X轴加速度信号，而用于测量Z轴加速度信号的电极接头225和电极接头228、用于测量Y轴加速度信号的电极接头224和电极接头227为对称连接，电荷相互抵消，信号输出基本为0。When subjected to a load in the X-axis direction, the electrode joint 223 and the electrode joint 226 are used to measure the X-axis acceleration signal, while the electrode joint 225 and the electrode joint 228 are used to measure the Z-axis acceleration signal, and the electrode joints are used to measure the Y-axis acceleration signal. 224 and the electrode joint 227 are symmetrically connected, the charges cancel each other, and the signal output is basically 0.

本实施例中的其他部分与实施例1相同，这里不再赘述。Other parts in this embodiment are the same as those in Embodiment 1, and are not repeated here.

上述实施例2和实施例3中各个金属电极的型号规格相同，各个电极接头的型号规格相同，为了便于阐述本发明的工作原理，分别以数字标号加以区分。The models and specifications of each metal electrode in the above-mentioned embodiment 2 and embodiment 3 are the same, and the model and specification of each electrode joint are the same.

如上即为本发明的实施例。上述实施例以及实施例中的具体参数仅是为了清楚表述发明验证过程，并非用以限制本发明的专利保护范围，本发明的专利保护范围仍然以其权利要求书为准，凡是运用本发明的说明书及附图内容所作的等同结构变化，同理均应包含在本发明的保护范围内。The above is an embodiment of the present invention. The above examples and the specific parameters in the examples are only to clearly describe the invention verification process, not to limit the scope of patent protection of the present invention. The scope of patent protection of the present invention is still based on the claims. Equivalent structural changes made in the contents of the description and drawings shall be included within the protection scope of the present invention.

Claims (4)

1. A piezoelectric accelerometer comprising a rectangular frame (101), characterized in that: a cuboid mass block (102) is arranged in the rectangular frame (101), a first beam (103), a second beam (104), a third beam (105) and a fourth beam (106) are fixed on a group of parallel side faces of the mass block (102), and the ends of the first beam (103), the second beam (104), the third beam (105) and the fourth beam (106) far away from the mass block (102) are fixedly connected with the inner wall of the rectangular frame (101); the first beam (103) and the second beam (104) are symmetrical to each other and located on the same side face, the third beam (105) and the fourth beam (106) are symmetrical to each other and located on the other side face parallel to the side face where the first beam (103) is located, a gap is reserved between the first beam (103) and the second beam (104), a gap is reserved between the third beam (105) and the fourth beam (106), the first beam (103) and the third beam (105) are symmetrical to each other, and the second beam (104) and the fourth beam (106) are symmetrical to each other; piezoelectric sheets are arranged on the upper surfaces of the first beam (103), the second beam (104), the third beam (105) and the fourth beam (106), and four corners of each piezoelectric sheet are respectively provided with a metal electrode; the thickness of the first beam (103), the second beam (104), the third beam (105) and the fourth beam (106) is the same as that of the mass block (102).
2. The piezoelectric accelerometer of claim 1, wherein: the first beam (103), the second beam (104), the third beam (105) and the fourth beam (106) are cuboids, and the first beam (103), the second beam (104), the third beam (105), the fourth beam (106) and the mass block (102) form an I-shaped biaxial piezoelectric accelerometer.
3. The piezoelectric accelerometer of claim 1, wherein: the first beam (103), the second beam (104), the third beam (105), and the fourth beam (106) are all L-shaped, and the first beam (103), the second beam (104), the third beam (105), the fourth beam (106), and the proof mass (102) form a tri-axial piezoelectric accelerometer having an L-shaped beam.
4. A piezoelectric accelerometer according to any one of claims 1 to 3, wherein: the first beam (103), the second beam (104), the third beam (105), the fourth beam (106) and the mass block (102) are integrally formed through machining.
CN201910740137.3A 2019-08-12 2019-08-12 Piezoelectric accelerometer Active CN110501521B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910740137.3A CN110501521B (en) 2019-08-12 2019-08-12 Piezoelectric accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910740137.3A CN110501521B (en) 2019-08-12 2019-08-12 Piezoelectric accelerometer

Publications (2)

Publication Number Publication Date
CN110501521A CN110501521A (en) 2019-11-26
CN110501521B true CN110501521B (en) 2020-12-11

Family

ID=68586421

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910740137.3A Active CN110501521B (en) 2019-08-12 2019-08-12 Piezoelectric accelerometer

Country Status (1)

Country Link
CN (1) CN110501521B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112798821B (en) * 2020-12-28 2021-10-08 武汉大学 A biaxial piezoelectric accelerometer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101118250A (en) * 2007-09-13 2008-02-06 中国电子科技集团公司第十三研究所 A silicon MEMS piezoresistive acceleration sensor
CN102141576A (en) * 2010-12-28 2011-08-03 中北大学 High-gravity (g) acceleration sensor in plane of micro-electromechanical system (MEMS) based on resonance tunnelling structure (RTS)
CN104764904A (en) * 2015-03-26 2015-07-08 厦门大学 Three-axis piezoelectric accelerometer
CN106908624A (en) * 2017-03-24 2017-06-30 京东方科技集团股份有限公司 A kind of acceleration sensitive device and accelerometer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0768532B1 (en) * 1995-10-09 2003-04-23 Matsushita Electric Industrial Co., Ltd Acceleration sensor and method for producing the same, and shock detecting device using the same
JP3642026B2 (en) * 2001-01-12 2005-04-27 株式会社村田製作所 Acceleration sensor and manufacturing method thereof
GB0305857D0 (en) * 2003-03-14 2003-04-16 Europ Technology For Business Accelerometers
US20140260618A1 (en) * 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Force feedback electrodes in mems accelerometer
CN103293336A (en) * 2013-07-02 2013-09-11 中国工程物理研究院电子工程研究所 Double-cantilever beam type micro-mechanical acceleration sensor
CN110726498B (en) * 2015-04-30 2021-12-31 意法半导体股份有限公司 Integrated piezoelectric sensor for detecting in-plane forces such as shock, acceleration, rotational force, and the like
US10060943B2 (en) * 2016-03-18 2018-08-28 Rosemount Aerospace Inc. Symmetric MEMS piezoelectric accelerometer for lateral noise

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101118250A (en) * 2007-09-13 2008-02-06 中国电子科技集团公司第十三研究所 A silicon MEMS piezoresistive acceleration sensor
CN102141576A (en) * 2010-12-28 2011-08-03 中北大学 High-gravity (g) acceleration sensor in plane of micro-electromechanical system (MEMS) based on resonance tunnelling structure (RTS)
CN104764904A (en) * 2015-03-26 2015-07-08 厦门大学 Three-axis piezoelectric accelerometer
CN106908624A (en) * 2017-03-24 2017-06-30 京东方科技集团股份有限公司 A kind of acceleration sensitive device and accelerometer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
《Design，modeling and FEM-based simulations of a 1-DoF MEMS bulk micromachined piezoresistive accelerometer》;Mukhiya R等;《Microsystem Technologies》;20141119;第21卷(第10期);第2242页第2.1节及图1和图5 *

Also Published As

Publication number Publication date
CN110501521A (en) 2019-11-26

Similar Documents

Publication Publication Date Title
CN107643423B (en) A three-degree-of-freedom weakly coupled resonant accelerometer based on modal localization effect
CN101118250B (en) Silicon MEMS piezoresistance type acceleration sensor
CN111721971B (en) High-sensitivity MEMS resonant acceleration sensor
CN201083760Y (en) Three axis integrated piezoresistance type acceleration sensor
US6397677B1 (en) Piezoelectric rotational accelerometer
CN110780089A (en) Weakly coupled resonant microaccelerometer with adjustable sensitivity
US10697994B2 (en) Accelerometer techniques to compensate package stress
CN106629571A (en) Weakly coupled MEMS resonance type accelerometer based on mode localization effect
CN102495236A (en) High-sensitivity dual-axis silicon-micro resonance accelerometer
CN103235155B (en) A kind of piezoresistance type acceleration sensor with full-bridge micro girder construction
CN102768291A (en) Piezoresistive monolithic integrated four-beam tri-axial accelerometer
CN101271124B (en) L-shaped beam piezoresistive micro-accelerometer and manufacturing method thereof
CN103901227B (en) Silicon micro-resonance type accelerometer
WO2018088066A1 (en) Signal processing device, inertia sensor, acceleration measuring method, electronic device and program
CN103760381A (en) Integrated quartz vibrating beam accelerometer
CN106908626A (en) A kind of capacitance microaccelerator sensitive structure
CN106771358A (en) A kind of full quartz resonance accelerometer of miniature differential formula
CN104359547A (en) Differential vibration isolation type MEMS (micro-electromechanical system) vector hydrophone
CN111766401A (en) A triaxial piezoresistive accelerometer
CN110501521B (en) Piezoelectric accelerometer
CN112016234B (en) Mechanical pendulum, test system and test method of differential capacitance seismometer
CN104764904B (en) A kind of three axle piezoelectric accelerometers
CN110388983A (en) Quaternary Array Piezoelectric Vibration Sensor
WO2023151129A1 (en) Triaxial piezoresistive accelerometer
Han et al. Design of a tri-axial micro piezoelectric accelerometer

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20220406

Address after: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province

Patentee after: Ningbo Huazhang enterprise management partnership (L.P.)

Address before: 430072 No. 299 Bayi Road, Wuchang District, Hubei, Wuhan

Patentee before: WUHAN University

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20220823

Address after: No.01, 4th floor, building D7, phase 3, Wuhan Software New Town, No.9 Huacheng Avenue, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000

Patentee after: Wuhan Minsheng New Technology Co.,Ltd.

Address before: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province

Patentee before: Ningbo Huazhang enterprise management partnership (L.P.)