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CN110412668A - A structure producing multiple surface lattice resonances and its application - Google Patents

A structure producing multiple surface lattice resonances and its application Download PDF

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Publication number
CN110412668A
CN110412668A CN201910726541.5A CN201910726541A CN110412668A CN 110412668 A CN110412668 A CN 110412668A CN 201910726541 A CN201910726541 A CN 201910726541A CN 110412668 A CN110412668 A CN 110412668A
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surface lattice
multiple surface
phasmon
lattice resonances
nano
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CN110412668B (en
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刘绍鼎
刘杰
岳鹏
董红霞
胡红刚
耿伟
贾卓楠
刘钧妍
栗正华
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Taiyuan University of Technology
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/008Surface plasmon devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region

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  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
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  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
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Abstract

The invention discloses a kind of structures and its application for generating multiple surface lattice resonance, belong to micro-nano photonic device technical field, including substrate, phasmon molecule is placed in the substrate, for the phasmon molecular ordered arrangement at array architecture, the phasmon molecule is the condensate being made of nanogold or nano silver cellular construction;Phasmon molecular array structure provided by the invention can generate multiple surface lattice resonance, using the structure fabrication at surface phasmon chip of laser can excite multiple surface lattice resonance well, and it can be in multiple wave bands while inhibition system radiation loss, multiple wave bands are modulated, it is emitted the nanometer laser of multiple wave bands, this is of great significance to the development of Information Integration.

Description

一种产生多重表面晶格共振的结构及其应用A structure producing multiple surface lattice resonances and its application

技术领域technical field

本发明属于微纳光子器件技术领域,具体涉及一种产生多重表面晶格共振的结构及其应用。The invention belongs to the technical field of micro-nano photonic devices, and in particular relates to a structure for generating multiple surface lattice resonances and an application thereof.

背景技术Background technique

纳米激光是传统半导体激光和微纳光电子结合发展起来的前沿领域,对微纳光子器件的设计具有重要意义。同时,受到“三维光学衍射极限”的限制,纳米激光器的集成化、微型化发展受到了很大挑战,但表面等离激元激光器可以克服衍射极限并将光限制在亚波长区域。目前,表面等离激元激光器体系具有很大的辐射损耗,从而引起品质因子降低、局域场强弱化。Nanolaser is the frontier field developed by the combination of traditional semiconductor laser and micro-nano photonics, which is of great significance to the design of micro-nano photonic devices. At the same time, limited by the "three-dimensional optical diffraction limit", the development of integration and miniaturization of nano-lasers has been greatly challenged, but surface plasmon lasers can overcome the diffraction limit and limit light to sub-wavelength regions. At present, the surface plasmon laser system has a large radiation loss, which leads to a decrease in the quality factor and a weakening of the local field strength.

表面晶格共振是纳米颗粒阵列中局域表面等离激元共振与阵列瑞丽异常耦合激发的一种共振模式,它可以将入射场能量很好的局限在阵列结构中,从而有效抑制体系辐射损耗,并显著增大局域场强。但是,目前单一的表面晶格共振只能在单一波段对光谱进行调控,不能在多个波段同时抑制体系辐射损耗,从而不能实现对多个波段同时进行调制。Surface lattice resonance is a resonance mode excited by the coupling excitation of local surface plasmon resonance and array Rayleigh anomaly in nanoparticle arrays. It can well confine the incident field energy in the array structure, thereby effectively suppressing the radiation loss of the system. , and significantly increases the local field strength. However, at present, a single surface lattice resonance can only regulate the spectrum in a single band, and cannot simultaneously suppress the radiation loss of the system in multiple bands, so that simultaneous modulation of multiple bands cannot be realized.

发明内容Contents of the invention

本发明提供了一种产生多重表面晶格共振的结构及其应用,解决了上述技术问题,本发明基于等离激元分子阵列结构,设计出了能很好产生多重表面晶格共振的多模表面等离激元激光器芯片,实现了在多个波段同时抑制体系的辐射损耗的目的。The present invention provides a structure for generating multiple surface lattice resonances and its application, which solves the above-mentioned technical problems. Based on the plasmon molecular array structure, the present invention designs a multimode structure capable of producing multiple surface lattice resonances. The surface plasmon laser chip realizes the purpose of simultaneously suppressing the radiation loss of the system in multiple bands.

本发明的第一个目的是提供一种产生多重表面晶格共振的结构,包括多个等离激元分子,多个所述等离激元分子有序排列成陈列结构,所述等离激元分子是由纳米金或纳米银单元结构构成的聚合体。The first object of the present invention is to provide a structure that generates multiple surface lattice resonances, including a plurality of plasmonic molecules, the plurality of plasmonic molecules are arranged in an array structure, and the plasmonic molecules Metamolecules are polymers composed of nano-gold or nano-silver unit structures.

优选地,所述单元结构为纳米盘、纳米棒、纳米三角或纳米环。Preferably, the unit structure is nanodisk, nanorod, nanotriangle or nanoring.

优选地,所述聚合体为三聚体、四聚体或五聚体。Preferably, the polymer is a trimer, tetramer or pentamer.

优选地,所述聚合体对称性属于Dnh、Dnd、Dn、Cnh、Cnv或Cn点群,其中n为≥2的整数。Preferably, the polymer symmetry belongs to a D nh , D nd , D n , C nh , C nv or C n point group, where n is an integer > 2.

本发明的第二个目的是提供上述产生多重表面晶格共振的结构在表面等离激元激光器芯片方面的应用。The second object of the present invention is to provide the application of the above-mentioned structure generating multiple surface lattice resonances in surface plasmon laser chips.

本发明的第三个目的是提供一种表面等离激元激光器芯片,包括基底,所述基底上排布有上述产生多重表面晶格共振的结构。The third object of the present invention is to provide a surface plasmon laser chip, which includes a substrate on which the above-mentioned structure for generating multiple surface lattice resonances is arranged.

本发明与现有技术相比具有如下有益效果:Compared with the prior art, the present invention has the following beneficial effects:

本发明提供的等离激元分子阵列结构能够产生多重表面晶格共振,利用该结构制作成的表面等离激元激光器芯片能很好地激发起多重表面晶格共振,且能够在多个波段同时抑制体系辐射损耗,对多个波段进行调制,出射多个波段的纳米激光,这对信息集成化的发展具有重要意义。The plasmon molecular array structure provided by the present invention can generate multiple surface lattice resonances, and the surface plasmon laser chip made by using this structure can well excite multiple surface lattice resonances, and can generate multiple surface lattice resonances in multiple wave bands. At the same time, it suppresses the radiation loss of the system, modulates multiple bands, and emits nano-lasers of multiple bands, which is of great significance to the development of information integration.

附图说明Description of drawings

图1是实施例1多模表面等离激元激光器芯片结构示意图;Fig. 1 is a schematic structural diagram of a multimode surface plasmon laser chip in Embodiment 1;

图2是实施例1圆盘三聚体C2V分子点群;Fig. 2 is embodiment 1 disc trimer C 2V molecular point group;

图3是实施例1三聚体分子阵列的透射谱图;Fig. 3 is the transmission spectrogram of embodiment 1 trimer molecule array;

图4是实施例2多模表面等离激元激光器芯片结构示意图;4 is a schematic structural diagram of a multimode surface plasmon laser chip in Embodiment 2;

图5是实施例2圆盘四聚体C2V分子点群;Fig. 5 is embodiment 2 disc tetramer C 2V molecular point group;

图6是实施例2四聚体分子阵列的透射谱图;Fig. 6 is the transmission spectrogram of embodiment 2 tetramer molecular array;

图7是实施例3多模表面等离激元激光器芯片结构示意图;7 is a schematic structural diagram of a multimode surface plasmon laser chip in Embodiment 3;

图8是实施例4多模表面等离激元激光器芯片结构示意图;8 is a schematic structural diagram of a multimode surface plasmon laser chip in Embodiment 4;

图9是实施例4圆盘五聚体D2h分子点群。Fig. 9 is the molecular point group of disc pentamer D 2h in Example 4.

具体实施方式Detailed ways

为了使本领域技术人员更好地理解本发明的技术方案能予以实施,下面结合具体实施例和附图对本发明作进一步说明,但所举实施例不作为对本发明的限定。In order to enable those skilled in the art to better understand that the technical solutions of the present invention can be implemented, the present invention will be further described below in conjunction with specific examples and accompanying drawings, but the given examples are not intended to limit the present invention.

本发明提供了一种产生多重表面晶格共振的结构,包括多个等离激元分子,多个等离激元分子有序排列成陈列结构,等离激元分子是由纳米金或纳米银单元结构构成的聚合体,单元结构可为纳米盘、纳米棒、纳米三角或纳米环,聚合体可为三聚体、四聚体或五聚体,聚合体对称性属于Dnh、Dnd、Dn、Cnh、Cnv或Cn点群,其中n为≥2的整数;下面我们以金纳米盘为例,说明本发明提供的产生多重表面晶格共振的结构,以及利用上述结构制成的表面等离激元激光器芯片。The invention provides a structure for generating multiple surface lattice resonances, including a plurality of plasmonic molecules arranged in an orderly array structure, and the plasmonic molecules are made of nano-gold or nano-silver A polymer composed of unit structures, the unit structure can be nanodisk, nanorod, nanotriangle or nanoring, the polymer can be trimer, tetramer or pentamer, and the symmetry of the polymer belongs to D nh , D nd , D n , C nh , C nv or C n point group, wherein n is an integer ≥ 2; we will take gold nanodisks as an example below to illustrate the structure that produces multiple surface lattice resonances provided by the present invention, and to make use of the above structure A surface plasmon laser chip.

实施例1Example 1

一种产生多重表面晶格共振的结构,由金纳米盘三聚体C2V分子有序排列成陈列结构,如图2所示,金纳米盘三聚体C2V分子由三个厚度相同、直径大小不同的金纳米盘构成,其中,两个小金纳米盘的直径相等,小金纳米盘半径r=80nm,大金纳米盘半径R=150nm,s=240nm,g=290nm,大、小金纳米盘厚度均为h=50nm;如图1所示,将上述阵列结构通过离子/电子刻蚀方法刻蚀在石英-PMMA(聚甲基丙烯酸甲酯)基底上,制得多模表面等离激元激光器芯片。A structure that produces multiple surface lattice resonances. The gold nanodisk trimer C 2V molecules are arranged in an orderly array structure. As shown in Figure 2, the gold nanodisk trimer C 2V molecules are composed of three with the same thickness and diameter Consists of gold nanodisks of different sizes, wherein the diameters of the two small gold nanodisks are equal, the radius of the small gold nanodisk is r=80nm, the radius of the large gold nanodisk is R=150nm, s=240nm, g=290nm, the thickness of the large and small gold nanodisk Both are h=50nm; as shown in Figure 1, the above-mentioned array structure is etched on the quartz-PMMA (polymethyl methacrylate) substrate by ion/electronic etching method to make a multi-mode surface plasmon laser chip.

为了检测上述等离激元激光器芯片的性能,通过电子束刻蚀实验,将制作好的样品浸入与已设定折射率相匹配的油里进行测量,得到对应的透射光谱图(见图3左),通过时域有限差分法(FDTD)模拟,设定周围环境折射率为1.48,计算得到透射光谱图(见图3右);由图3可得,实验和计算仿真的结果具有很好的拟合性:当入射场偏振方向为x方向时,保持垂直入射场偏振方向上的周期Py为750nm,改变平行入射场偏振方向上的周期Px(650nm、750nm、850nm)分别在1000nm以上的位置处出现了多个尖锐的共振峰,即局域共振模式与阵列瑞丽异常耦合产生的多重表面晶格共振模式。In order to test the performance of the above-mentioned plasmonic laser chip, through the electron beam etching experiment, the prepared sample is immersed in the oil that matches the set refractive index for measurement, and the corresponding transmission spectrum is obtained (see the left side of Fig. 3 ), through the finite difference time domain (FDTD) simulation, set the refractive index of the surrounding environment to 1.48, and calculate the transmission spectrum (see Figure 3 right); from Figure 3, the results of the experiment and calculation simulation have a good Fitting: When the polarization direction of the incident field is in the x direction, keep the period P y in the direction perpendicular to the polarization direction of the incident field at 750nm, and change the period P x (650nm, 750nm, 850nm) in the direction parallel to the polarization direction of the incident field to be above 1000nm respectively Multiple sharp resonance peaks appear at the position of , that is, the multiple surface lattice resonance mode generated by the coupling of the local resonance mode and the Rayleigh anomaly of the array.

实施例2Example 2

一种产生多重表面晶格共振的结构,由金纳米盘四聚体C2V分子有序排列成陈列结构,如图5所示,金纳米盘四聚体C2V分子由四个金纳米盘构成,其中两个小金纳米盘半径均为r=70nm,两个大金纳米盘半径均R=90nm,s1=170nm,s2=240nm,s3=240nm,大、小金纳米盘厚度均为h=50nm;如图4所示,将上述阵列结构通过离子/电子刻蚀方法刻蚀在石英-PMMA基底上,制得多模表面等离激元激光器芯片;A structure that produces multiple surface lattice resonances. The tetrameric C 2V molecules of gold nanodisks are arranged in an orderly array structure. As shown in Figure 5, the tetrameric C 2V molecules of gold nanodisks are composed of four gold nanodisks. , where the radius of the two small gold nanodisks is r=70nm, the radius of the two large gold nanodisks is R=90nm, s 1 =170nm, s 2 =240nm, s 3 =240nm, the thickness of the large and small gold nanodisks is h =50nm; As shown in Figure 4, above-mentioned array structure is etched on the quartz-PMMA substrate by ion/electron etching method, makes multi-mode surface plasmon laser chip;

如图6所示,电子束刻蚀实验表明,当入射场偏振方向为x方向时,保持垂直入射场偏振方向上的周期Py为750nm,改变平行入射场偏振方向上的周期Px(650nm、750nm、850nm)分别实现了多重表面晶格共振。As shown in Figure 6, the electron beam etching experiment shows that when the polarization direction of the incident field is the x direction, the period P y on the polarization direction perpendicular to the incident field is maintained at 750nm, and the period P x on the polarization direction parallel to the incident field is changed (650nm , 750nm, 850nm) achieved multiple surface lattice resonances respectively.

实施例3Example 3

一种产生多重表面晶格共振的结构,由金纳米盘三聚体D3h分子有序排列成陈列结构,三聚体D3h分子点群由三个大小相同的金纳米盘构成,设置金纳米盘半径r=80nm,金纳米盘圆心间距s=175nm,金纳米盘厚度h=50nm,将上述阵列结构通过离子/电子刻蚀方法刻蚀在石英-PMMA基底上,如图7所示,制得多模表面等离激元激光器芯片,效果与实施例1相同,同样可以实现多重表面晶格共振。A structure that produces multiple surface lattice resonances. The gold nanodisk trimer D 3h molecules are arranged in an orderly array structure. The trimer D 3h molecular point group is composed of three gold nanodisks of the same size. Disc radius r=80nm, gold nanodisc center spacing s=175nm, gold nanodisk thickness h=50nm, above-mentioned array structure is etched on quartz-PMMA substrate by ion/electron etching method, as shown in Figure 7, manufacture The effect of the multi-mode surface plasmon laser chip is the same as that of Embodiment 1, and multiple surface lattice resonances can also be realized.

实施例4Example 4

一种产生多重表面晶格共振的结构,由金纳米盘五聚体D2h分子有序排列成陈列结构,如图9所示,五聚体D2h分子点群由五个金纳米盘构成,其中四个小金纳米盘大小相同,设置大金纳米盘半径R=120nm,小金纳米盘半径r=60nm,s1=200nm,s2=360nm,金纳米盘厚度均为h=50nm,如图8所示,将上述阵列结构通过离子/电子刻蚀方法在石英-PMMA基底上,效果与实施例1相同,同样可以实现多重表面晶格共振。A structure that produces multiple surface lattice resonances. The gold nanodisk pentamer D 2h molecules are arranged in an orderly array structure. As shown in Figure 9, the pentamer D 2h molecular point group is composed of five gold nanodisks. Wherein four small gold nano-discs have the same size, set the radius of the large gold nano-disc R=120nm, the radius of the small gold nano-disc r=60nm, s 1 =200nm, s 2 =360nm, and the thickness of the gold nano-disc is h=50nm, as shown in Figure 8 As shown, the above-mentioned array structure is etched on the quartz-PMMA substrate by ion/electron etching, the effect is the same as that of embodiment 1, and multiple surface lattice resonance can also be realized.

综上所述,本发明提供的等离激元分子阵列结构能够产生多重表面晶格共振,利用该结构制作成的表面等离激元激光器芯片能很好地激发起多重表面晶格共振,且能够在多个波段同时抑制体系辐射损耗,对多个波段进行调制,出射多个波段的纳米激光,这对信息集成化的发展具有重要意义。In summary, the plasmonic molecular array structure provided by the present invention can generate multiple surface lattice resonances, and the surface plasmon laser chip made of this structure can well excite multiple surface lattice resonances, and It can simultaneously suppress the radiation loss of the system in multiple bands, modulate multiple bands, and emit nano-lasers in multiple bands, which is of great significance to the development of information integration.

显然,本领域的技术人员可以对本发明进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内也意图包含这些改动和变型在内。Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. In this way, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, it is also intended to include these modifications and variations.

Claims (6)

1.一种产生多重表面晶格共振的结构,其特征在于,包括多个等离激元分子,多个所述等离激元分子有序排列成陈列结构,所述等离激元分子是由纳米金或纳米银单元结构构成的聚合体。1. A structure that produces multiple surface lattice resonances, characterized in that it includes a plurality of plasmonic molecules, and a plurality of the plasmonic molecules are arranged in an orderly array structure, and the plasmonic molecules are A polymer composed of nano-gold or nano-silver unit structure. 2.根据权利要求1所述的产生多重表面晶格共振的结构,其特征在于,所述单元结构为纳米盘、纳米棒、纳米三角或纳米环。2. The structure for generating multiple surface lattice resonances according to claim 1, wherein the unit structure is a nanodisk, a nanorod, a nanotriangle or a nanoring. 3.根据权利要求1所述的产生多重表面晶格共振的结构,其特征在于,所述聚合体为三聚体、四聚体或五聚体。3. The structure producing multiple surface lattice resonance according to claim 1, characterized in that the polymer is a trimer, tetramer or pentamer. 4.根据权利要求3所述的产生多重表面晶格共振的结构,其特征在于,所述聚合体对称性属于Dnh、Dnd、Dn、Cnh、Cnv或Cn点群,其中n为≥2的整数。4. The structure producing multiple surface lattice resonances according to claim 3, characterized in that the aggregate symmetry belongs to a Dnh , Dnd , Dn , Cnh , Cnv or Cn point group, wherein n is an integer of ≥2. 5.一种如权利要求1~4任一项所述的产生多重表面晶格共振的结构在表面等离激元激光器芯片方面的应用。5. An application of the structure producing multiple surface lattice resonances as claimed in any one of claims 1 to 4 in surface plasmon laser chips. 6.一种表面等离激元激光器芯片,包括基底,其特征在于,所述基底上排布有如权利要求1~4任一项所述的产生多重表面晶格共振的结构。6. A surface plasmon laser chip, comprising a substrate, characterized in that the structure for generating multiple surface lattice resonances according to any one of claims 1 to 4 is arranged on the substrate.
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CN110824603A (en) * 2019-11-11 2020-02-21 中国科学院上海技术物理研究所 A kind of nano-chiral optical antenna for directional radiation fluorescence and preparation method
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