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CN110197814A - A kind of Micro LED display panel and preparation method thereof, display device - Google Patents

A kind of Micro LED display panel and preparation method thereof, display device Download PDF

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CN110197814A
CN110197814A CN201910449557.6A CN201910449557A CN110197814A CN 110197814 A CN110197814 A CN 110197814A CN 201910449557 A CN201910449557 A CN 201910449557A CN 110197814 A CN110197814 A CN 110197814A
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electrode
micro led
substrate
metal layer
groove
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孙明晓
乔明胜
李潇
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Qingdao Hisense Electronics Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01Manufacture or treatment
    • H10D86/021Manufacture or treatment of multiple TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices

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Abstract

本发明公开了一种Micro LED显示面板及其制备方法、显示装置,用以解决在巨量转移时需要识别Micro LED芯片的电极,转移效率低的问题。本发明Micro LED显示面板,包括基板和形成基板上呈阵列分布的Micro LED芯片,Micro LED芯片包括一本体、第一电极、第二电极,本体的一个侧面形成有凸起部以形成台阶结构,第一电极设置于台阶结构的台阶面上,第二电极设置于凸起部的顶面;基板的一表面形成有凹槽,且凹槽的底面形成有凹陷;凹槽的底面形成有第一金属层,凹陷的底面形成有第二金属层;Micro LED芯片的凸起部嵌入于基板的凹陷中,且第一金属层与第一电极贴合,第二金属层与第二电极贴合。

The invention discloses a Micro LED display panel, a preparation method thereof, and a display device, which are used to solve the problem that electrodes of Micro LED chips need to be identified during mass transfer and the transfer efficiency is low. The Micro LED display panel of the present invention includes a substrate and Micro LED chips distributed in an array on the substrate. The Micro LED chip includes a body, a first electrode, and a second electrode. A raised portion is formed on one side of the body to form a stepped structure. The first electrode is arranged on the stepped surface of the stepped structure, and the second electrode is arranged on the top surface of the protrusion; a groove is formed on one surface of the substrate, and a depression is formed on the bottom surface of the groove; a first electrode is formed on the bottom surface of the groove. As for the metal layer, a second metal layer is formed on the bottom surface of the depression; the raised part of the Micro LED chip is embedded in the depression of the substrate, and the first metal layer is bonded to the first electrode, and the second metal layer is bonded to the second electrode.

Description

一种Micro LED显示面板及其制备方法、显示装置A kind of Micro LED display panel and its preparation method, display device

技术领域technical field

本发明涉及显示技术领域,特别涉及一种Micro LED显示面板及其制备方法、显示装置。The present invention relates to the field of display technology, in particular to a Micro LED display panel, a preparation method thereof, and a display device.

背景技术Background technique

Micro LED(Micro Light Emitting Diode微型发光二极管)技术是指发光芯片面积小于100μm的LED技术,一般在基板上形成高密度的LED阵列,LED显示屏上的每一个像素可定制、单独驱动点亮,像素点距离从毫米级降低至微米级。Micro LED的优点表现的很明显,它继承了无机LED的高效率、高亮度、高可靠度及反应时间快等特点,并且具有自发光,无需背光源的特性,更具节能、机构简易、体积小、薄型等优势。Micro LED (Micro Light Emitting Diode) technology refers to LED technology with a light-emitting chip area of less than 100 μm. Generally, a high-density LED array is formed on the substrate. Each pixel on the LED display can be customized and individually driven to light up. The pixel distance is reduced from millimeter level to micron level. The advantages of Micro LED are obvious. It inherits the characteristics of high efficiency, high brightness, high reliability and fast response time of inorganic LED, and has the characteristics of self-illumination and no need for backlight. Small, thin and other advantages.

相比OLED(Organic Light-Emitting Diode,有机发光二极管),Micro LED色彩更容易调试,有更长的发光寿命以及具有较佳的材料稳定性、寿命长、无影像烙印等优点。Micro LED的亮度和色彩饱和度优于OLED和LCD(Liquid Crystal Display,液晶显示器),操作电压低于OLED,由于其发光区电流密度可以达到10-20A/cm2,使得开口率非常小,可以实现透明显示和各种传感器的集成。Compared with OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode), Micro LED is easier to adjust the color, has a longer luminous life, and has better material stability, long life, and no image burn-in. The brightness and color saturation of Micro LED are better than OLED and LCD (Liquid Crystal Display, liquid crystal display), and the operating voltage is lower than that of OLED. Because the current density of its light-emitting area can reach 10-20A/cm 2 , the aperture ratio is very small, which can Realize the integration of transparent display and various sensors.

Micro LED与传统LED最大的区别是“巨量转移”技术,将几十万,甚至几百万的亚像素LED颗粒,通过高精度的工程转移技术精确定位并“焊接”到驱动板的适当位置。如图1所示,Micro LED芯片分为P(Positive,正)电极和N(Negative,负)电极,在巨量转移过程中,需要识别芯片的P电极和N电极,并与基板的电极精确对位。当芯片贴合数量增大到上万颗、上百万颗时,将严重降低转移效率。The biggest difference between Micro LED and traditional LED is the "mass transfer" technology. Hundreds of thousands or even millions of sub-pixel LED particles are precisely positioned and "welded" to the appropriate position of the driver board through high-precision engineering transfer technology. . As shown in Figure 1, Micro LED chips are divided into P (Positive, positive) electrodes and N (Negative, negative) electrodes. counterpoint. When the number of chip bonding increases to tens of thousands or millions, the transfer efficiency will be seriously reduced.

发明内容Contents of the invention

本发明提供一种Micro LED显示面板及其制备方法、显示装置,用以解决现有技术中存在的在巨量转移过程中需要识别Micro LED芯片的电极,转移效率低的问题。The present invention provides a Micro LED display panel, a preparation method thereof, and a display device, which are used to solve the problems in the prior art that the electrodes of the Micro LED chips need to be identified during the mass transfer process and the transfer efficiency is low.

为达到上述目的,本发明提供以下技术方案:To achieve the above object, the present invention provides the following technical solutions:

第一方面,本发明实施例提供一种Micro LED显示面板,包括基板和形成于所述基板上呈阵列分布的微型发光二极管Micro LED芯片,其中:In the first aspect, an embodiment of the present invention provides a Micro LED display panel, including a substrate and micro LED chips formed on the substrate in an array, wherein:

所述Micro LED芯片包括一本体、第一电极、第二电极,其中,所述本体的一个侧面形成有凸起部以形成台阶结构,所述第一电极设置于所述台阶结构的台阶面上,所述第二电极设置于所述凸起部的顶面:The Micro LED chip includes a body, a first electrode, and a second electrode, wherein a raised portion is formed on one side of the body to form a stepped structure, and the first electrode is disposed on a stepped surface of the stepped structure , the second electrode is disposed on the top surface of the protrusion:

所述基板的一表面形成有凹槽,所述凹槽对应于所述Micro LED芯片,且所述凹槽的底面形成有凹陷;其中所述凹槽的底面形成有第一金属层,所述凹陷的底面形成有第二金属层;A groove is formed on one surface of the substrate, the groove corresponds to the Micro LED chip, and a depression is formed on the bottom surface of the groove; wherein a first metal layer is formed on the bottom surface of the groove, the A second metal layer is formed on the bottom surface of the depression;

所述Micro LED芯片中,所述凸起部嵌入于所述凹陷中,且所述第一金属层与所述第一电极贴合,所述第二金属层与所述第二电极贴合。In the Micro LED chip, the protrusion is embedded in the recess, the first metal layer is bonded to the first electrode, and the second metal layer is bonded to the second electrode.

上述Micro LED显示面板,包括基板和形成于该基板上呈阵列分布的Micro LED芯片,其中:该Micro LED芯片包括一本体、第一电极、第二电极,其中,该本体的一个侧面形成有凸起部以形成台阶结构,该第一电极设置于所述台阶结构的台阶面上,第二电极设置于凸起部的顶面:基板的一表面形成有凹槽,凹槽对应于所述Micro LED芯片,且凹槽的底面形成有凹陷;其中凹槽的底面形成有第一金属层,凹陷的底面形成有第二金属层;MicroLED芯片中,凸起部嵌入于凹陷中,且第一金属层与第一电极贴合,第二金属层与第二电极贴合。由于该显示面板中,Micro LED芯片的凸起部嵌入于基板的凹陷中,在基板的凹槽底面形成的第一金属层与在Micro LED芯片的台阶面设置的第一电极贴合,在基板的凹陷底面形成的第二金属层与在Micro LED芯片的凸起部的顶面设置的第二电极贴合,从而在巨量转移过程中无需识别Micro LED芯片的P、N电极,提高转移效率。The above-mentioned Micro LED display panel includes a substrate and Micro LED chips formed in an array on the substrate, wherein: the Micro LED chip includes a body, a first electrode, and a second electrode, wherein one side of the body is formed with a convex raised part to form a stepped structure, the first electrode is set on the stepped surface of the stepped structure, and the second electrode is set on the top surface of the raised part: a groove is formed on one surface of the substrate, and the groove corresponds to the Micro LED chip, and the bottom surface of the groove is formed with a depression; wherein the bottom surface of the groove is formed with a first metal layer, and the bottom surface of the depression is formed with a second metal layer; in the MicroLED chip, the protrusion is embedded in the depression, and the first metal The metal layer is attached to the first electrode, and the second metal layer is attached to the second electrode. In this display panel, the protruding part of the Micro LED chip is embedded in the depression of the substrate, and the first metal layer formed on the bottom surface of the groove of the substrate is attached to the first electrode provided on the stepped surface of the Micro LED chip. The second metal layer formed on the bottom surface of the recess of the micro LED chip is bonded to the second electrode set on the top surface of the raised part of the Micro LED chip, so that there is no need to identify the P and N electrodes of the Micro LED chip during the mass transfer process, and the transfer efficiency is improved .

优选地,所述基板设有的凹槽为多个,所述凹槽沿行方向延伸,且多个所述凹槽沿列方向排列,所述凹槽与行Micro LED芯片对应,所述凹槽的底面形成有对应行Micro LED芯片中的Micro LED芯片的凸起部的凹陷;或Preferably, the substrate is provided with a plurality of grooves, the grooves extend along the row direction, and the plurality of grooves are arranged along the column direction, the grooves correspond to the row of Micro LED chips, and the grooves The bottom surface of the groove is formed with a depression corresponding to the raised portion of the Micro LED chip in the row; or

所述基板设有的凹槽为多个,凹槽沿列方向延伸,且多个所述凹槽沿行方向排列,所述凹槽与列Micro LED芯片对应,每一个所述凹槽的底面形成与对应列Micro LED芯片中的Micro LED芯片的凸起部的凹陷。The substrate is provided with a plurality of grooves, the grooves extend along the column direction, and the plurality of grooves are arranged along the row direction, the grooves correspond to the columns of Micro LED chips, and the bottom surface of each groove is A depression corresponding to the raised portion of the Micro LED chip in the row of Micro LED chips is formed.

上述Micro LED显示面板,由于基板设有的凹槽为多个,凹槽沿行方向延伸,且多个所述凹槽沿列方向排列,每一个所述凹槽与行Micro LED芯片对应,所述凹槽的底面形成有对应行Micro LED芯片中的Micro LED芯片的凸起部的凹陷;或基板设有的凹槽为多个,凹槽沿列方向延伸,且多个所述凹槽沿行方向排列,所述凹槽与列Micro LED芯片对应,所述凹槽的底面形成与对应列Micro LED芯片凸起部的凹陷,从而在巨量转移过程中,无需识别Micro LED芯片的P、N电极,提高转移效率的同时能够精确定位。In the above-mentioned Micro LED display panel, since the substrate is provided with a plurality of grooves, the grooves extend along the row direction, and the plurality of grooves are arranged along the column direction, and each of the grooves corresponds to a row of Micro LED chips, so The bottom surface of the groove is formed with a depression corresponding to the raised part of the Micro LED chip in the row of Micro LED chips; or the substrate is provided with a plurality of grooves, the grooves extend along the column direction, and the plurality of grooves extend along the Arranged in the row direction, the grooves correspond to the Micro LED chips in the column, and the bottom surface of the groove forms a depression corresponding to the raised part of the Micro LED chip in the column, so that there is no need to identify the P, The N electrode can be precisely positioned while improving the transfer efficiency.

优选地,该本体的一个侧面形成有一个凸起部,该凸起部形成于该侧面的中心位置处。Preferably, one side of the main body is formed with a raised portion, and the raised portion is formed at the center of the side.

优选地,该本体内部设置有第一电极导电层;Preferably, a first electrode conductive layer is provided inside the body;

该凸起内部设置有第二电极导电层和量子阱层,且该第二电极导电层设置于该第一电极和所述量子阱层之间。A second electrode conductive layer and a quantum well layer are arranged inside the protrusion, and the second electrode conductive layer is arranged between the first electrode and the quantum well layer.

优选地,该第一电极为N型电极,该第二电极为P型电极;或Preferably, the first electrode is an N-type electrode, and the second electrode is a P-type electrode; or

该第一电极为P型电极,该第二电极为N型电极。The first electrode is a P-type electrode, and the second electrode is an N-type electrode.

优选地,该第一金属层与该第一电极贴合,包括:Preferably, the first metal layer is attached to the first electrode, including:

该第一金属层通过导电粘合剂与该第一电极贴合;The first metal layer is attached to the first electrode through a conductive adhesive;

该第二金属层与该第二电极贴合,包括:The second metal layer is attached to the second electrode, including:

该第二金属层通过导电粘合剂与该第二电极贴合。The second metal layer is attached to the second electrode through a conductive adhesive.

优选地,该芯片的俯视图的形状为矩形或圆形。Preferably, the top view of the chip is rectangular or circular in shape.

第二方面,本发明实施例提供一种显示装置,该显示装置包括如第一方面的技术方案提供的显示面板。In a second aspect, an embodiment of the present invention provides a display device, and the display device includes the display panel provided in the technical solution of the first aspect.

上述显示装置,由于包括第一方面中的显示面板,因此在巨量转移过程中无需识别Micro LED芯片的P、N电极,提高转移效率。Since the above-mentioned display device includes the display panel in the first aspect, there is no need to identify the P and N electrodes of the Micro LED chip during the mass transfer process, thereby improving the transfer efficiency.

第三方面,本发明实施例提供一种Micro LED显示面板的制备方法,该方法包括:In a third aspect, an embodiment of the present invention provides a method for preparing a Micro LED display panel, the method comprising:

通过巨量转移的方法将阵列排布的Micro LED芯片转移到基板上,其中,MicroLED芯片包括一本体、第一电极、第二电极,所述本体的一个侧面形成有凸起部以形成台阶结构,所述第一电极设置于所述台阶结构的台阶面上,所述第二电极设置于所述凸起部的顶面;所述基板的一表面形成有凹槽,所述凹槽对应于所述Micro LED芯片,且所述凹槽的底面形成有凹陷;其中所述凹槽的底面形成有第一金属层,所述凹陷的底面形成有第二金属层;The Micro LED chips arranged in an array are transferred to the substrate by a mass transfer method, wherein the Micro LED chip includes a body, a first electrode, and a second electrode, and a raised portion is formed on one side of the body to form a stepped structure , the first electrode is disposed on the stepped surface of the stepped structure, the second electrode is disposed on the top surface of the protrusion; a groove is formed on a surface of the substrate, and the groove corresponds to The Micro LED chip, and the bottom surface of the groove is formed with a depression; wherein the bottom surface of the groove is formed with a first metal layer, and the bottom surface of the depression is formed with a second metal layer;

按压所述阵列排布的Micro LED芯片表面,使所述阵列排布的Micro LED芯片的表面与所述基板表面在同一平面上,其中,所述Micro LED芯片中,所述凸起部嵌入于所述凹陷中,且所述第一金属层与所述第一电极贴合,所述第二金属层与所述第二电极贴合。Press the surface of the Micro LED chips arranged in the array so that the surface of the Micro LED chips arranged in the array is on the same plane as the surface of the substrate, wherein, in the Micro LED chip, the raised portion is embedded in In the depression, the first metal layer is bonded to the first electrode, and the second metal layer is bonded to the second electrode.

上述方法,首先通过巨量转移方法将阵列排布的Micro LED芯片转移到基板上,然后按压所述阵列排布的Micro LED芯片表面,使所述阵列排布的Micro LED芯片的表面与所述基板表面在同一平面上。由于Micro LED芯片包括一本体、第一电极、第二电极,所述本体的一个侧面形成有凸起部以形成台阶结构,所述第一电极设置于所述台阶结构的台阶面上,所述第二电极设置于所述凸起部的顶面;所述基板的一表面形成有凹槽,所述凹槽对应于所述Micro LED芯片,且所述凹槽的底面形成有凹陷;其中所述凹槽的底面形成有第一金属层,所述凹陷的底面形成有第二金属层;所述Micro LED芯片中,所述凸起部嵌入于所述凹陷中,且所述第一金属层与所述第一电极贴合,所述第二金属层与所述第二电极贴合,从而在巨量转移过程中,无需识别Micro LED芯片的P、N电极,提高转移效率的同时减小对位难度。In the above method, firstly, the Micro LED chips arranged in an array are transferred to the substrate by a mass transfer method, and then the surface of the Micro LED chips arranged in the array is pressed, so that the surface of the Micro LED chips arranged in the array is aligned with the surface of the Micro LED chips arranged in the array. The substrate surfaces are on the same plane. Since the Micro LED chip includes a body, a first electrode, and a second electrode, a raised portion is formed on one side of the body to form a stepped structure, the first electrode is arranged on a stepped surface of the stepped structure, and the The second electrode is disposed on the top surface of the protrusion; a groove is formed on one surface of the substrate, the groove corresponds to the Micro LED chip, and a depression is formed on the bottom surface of the groove; wherein the A first metal layer is formed on the bottom surface of the groove, and a second metal layer is formed on the bottom surface of the depression; in the Micro LED chip, the protrusion is embedded in the depression, and the first metal layer It is bonded to the first electrode, and the second metal layer is bonded to the second electrode, so that there is no need to identify the P and N electrodes of the Micro LED chip during the mass transfer process, which improves the transfer efficiency while reducing the Counterpoint difficulty.

优选地,在所述通过巨量转移的方法将阵列排布的Micro LED芯片转移到基板上之前,还包括:Preferably, before transferring the Micro LED chips arranged in an array onto the substrate by the mass transfer method, it also includes:

在所述第一金属层和所述第二金属层上填补导电粘合剂。A conductive adhesive is filled on the first metal layer and the second metal layer.

上述方法,由于Micro LED芯片嵌入于基板的凹陷中,为了将Micro LED芯片和基板焊接到一起,所以可以在第一金属层和第二金属层上填补导电粘合剂。In the above method, since the Micro LED chip is embedded in the recess of the substrate, in order to weld the Micro LED chip and the substrate together, conductive adhesive can be filled on the first metal layer and the second metal layer.

附图说明Description of drawings

为了更清楚地说明本发明实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简要介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域的普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings that need to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For Those of ordinary skill in the art can also obtain other drawings based on these drawings without any creative effort.

图1为背景技术提供的现有Micro LED芯片和基板的结构示意图;Fig. 1 is a schematic structural diagram of an existing Micro LED chip and substrate provided by the background technology;

图2为本发明实施例提供的一种Micro LED显示面板的结构示意图;Fig. 2 is a schematic structural diagram of a Micro LED display panel provided by an embodiment of the present invention;

图3为本发明实施例提供的一种Micro LED芯片2的本体20的一个侧面形成有两个凸起部23的示意图;Fig. 3 is a schematic diagram of two protrusions 23 formed on one side of the body 20 of a Micro LED chip 2 provided by an embodiment of the present invention;

图4为本发明实施例提供的一种Micro LED芯片2的本体20的一个侧面形成有三个凸起部23的示意图;Fig. 4 is a schematic diagram of three protrusions 23 formed on one side of the body 20 of a Micro LED chip 2 provided by an embodiment of the present invention;

图5为本发明实施例提供的一种凹槽10的底面形成有2个凹陷11的示意图;FIG. 5 is a schematic diagram of two depressions 11 formed on the bottom surface of a groove 10 provided by an embodiment of the present invention;

图6为本发明实施例提供的一种凹槽10的底面形成有3个凹陷11的示意图;FIG. 6 is a schematic diagram of three depressions 11 formed on the bottom surface of a groove 10 provided by an embodiment of the present invention;

图7为本发明实施例提供的一种基板1用于设置Micro LED芯片2的表面形成有1个凹槽10的剖视图;Fig. 7 is a cross-sectional view of a substrate 1 provided by an embodiment of the present invention for setting a Micro LED chip 2 with a groove 10 formed on its surface;

图8为本发明实施例提供的一种基板1用于设置Micro LED芯片2的表面形成有1个凹槽10的俯视图;Fig. 8 is a top view of a groove 10 formed on the surface of a substrate 1 provided by an embodiment of the present invention for setting a Micro LED chip 2;

图9为本发明实施例提供的一种Micro LED芯片2嵌入于基板1形成有1个凹槽的剖视图;Fig. 9 is a cross-sectional view of a Micro LED chip 2 embedded in a substrate 1 provided by an embodiment of the present invention to form a groove;

图10为本发明实施例提供的第一种基板1设有多个凹槽10的剖视图;FIG. 10 is a cross-sectional view of a first type of substrate 1 provided with a plurality of grooves 10 according to an embodiment of the present invention;

图11为本发明实施例提供的第一种基板1设有多个凹槽10的俯视图;Fig. 11 is a top view of a first substrate 1 provided with a plurality of grooves 10 according to an embodiment of the present invention;

图12为本发明实施例提供的第一种Micro LED芯片2嵌入于基板1设有多个凹槽10的剖视图;Fig. 12 is a cross-sectional view of the first Micro LED chip 2 embedded in the substrate 1 provided with a plurality of grooves 10 provided by the embodiment of the present invention;

图13为本发明实施例提供的第二种基板1设有多个凹槽10的剖视图;Fig. 13 is a cross-sectional view of a second type of substrate 1 provided with a plurality of grooves 10 according to an embodiment of the present invention;

图14为本发明实施例提供的第二种基板1设有多个凹槽10的俯视图;Fig. 14 is a top view of a second type of substrate 1 provided with a plurality of grooves 10 according to an embodiment of the present invention;

图15为本发明实施例提供的第二种Micro LED芯片2嵌入于基板1设有多个凹槽10的剖视图;Fig. 15 is a cross-sectional view of a second Micro LED chip 2 embedded in a substrate 1 provided with a plurality of grooves 10 according to an embodiment of the present invention;

图16为本发明实施例提供的一种基板1用于设置Micro LED芯片2的表面形成的凹槽10与Micro LED芯片2一一对应的剖视图;Fig. 16 is a cross-sectional view of a one-to-one correspondence between a groove 10 formed on the surface of a substrate 1 for setting a Micro LED chip 2 and a Micro LED chip 2 according to an embodiment of the present invention;

图17为本发明实施例提供的一种基板1用于设置Micro LED芯片2的表面形成的凹槽10与Micro LED芯片2一一对应的俯视图;Fig. 17 is a top view of a one-to-one correspondence between a groove 10 formed on the surface of a substrate 1 for setting a Micro LED chip 2 and a Micro LED chip 2 according to an embodiment of the present invention;

图18为本发明实施例提供的一种Micro LED芯片2嵌入于基板1的凹槽10的剖视图;Fig. 18 is a cross-sectional view of a Micro LED chip 2 embedded in the groove 10 of the substrate 1 provided by the embodiment of the present invention;

图19为本发明实施例提供的一种Micro LED芯片2的内部结构示意图;FIG. 19 is a schematic diagram of the internal structure of a Micro LED chip 2 provided by an embodiment of the present invention;

图20为本发明实施例提供的一种凸起部23和本体20为圆柱形的俯视图;Fig. 20 is a cylindrical top view of a protrusion 23 and a body 20 provided by an embodiment of the present invention;

图21为本发明实施例提供的一种凹槽10和凹陷11为圆柱形的俯视图;Fig. 21 is a cylindrical top view of a groove 10 and a depression 11 provided by an embodiment of the present invention;

图22为本发明实施例提供的一种Micro LED芯片2的尺寸示意图;Fig. 22 is a schematic diagram of the size of a Micro LED chip 2 provided by an embodiment of the present invention;

图23为本发明实施例提供的一种Micro LED显示面板的制备方法流程示意图;Fig. 23 is a schematic flowchart of a method for preparing a Micro LED display panel provided by an embodiment of the present invention;

图24为本发明实施例提供的一种压合Micro LED芯片和基板的示意图。Fig. 24 is a schematic diagram of a press-bonded Micro LED chip and substrate provided by an embodiment of the present invention.

图标:1-基板;2-Micro LED芯片;10-凹槽;11-凹陷;12-第一金属层;13-第二金属层;20-本体;21-第一电极;22-第二电极;23-凸起部;24-第二电极层;25-量子阱层;26-第一电极层。Icons: 1-substrate; 2-Micro LED chip; 10-groove; 11-depression; 12-first metal layer; 13-second metal layer; 20-body; 21-first electrode; 22-second electrode ; 23-protrusion; 24-second electrode layer; 25-quantum well layer; 26-first electrode layer.

具体实施方式Detailed ways

为了使本发明的目的、技术方案和优点更加清楚,下面将结合附图对本发明作进一步地详细描述,显然,所描述的实施例仅仅是本发明一部份实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments . Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

Micro LED是新一代显示技术,比现有的OLED技术亮度更高、发光效率更好、功耗更低。Micro LED可以将几十万,甚至几百万的亚像素LED颗粒,通过高精度的工程转移技术精确定位并焊接到驱动板的适当位置。由于Micro LED芯片分为P电极和N电极,所以在转移过程中,需要识别Micro LED芯片的P电极和N电极,并与基板的电极精确定位。如果在转移过程中无需识别Micro LED芯片的P电极和N电极,则可以提高转移效率。Micro LED is a new generation of display technology, which has higher brightness, better luminous efficiency and lower power consumption than the existing OLED technology. Micro LED can precisely position and solder hundreds of thousands or even millions of sub-pixel LED particles to the proper position of the driver board through high-precision engineering transfer technology. Since the Micro LED chip is divided into P electrodes and N electrodes, during the transfer process, it is necessary to identify the P electrodes and N electrodes of the Micro LED chips and precisely position them with the electrodes of the substrate. If there is no need to identify the P and N electrodes of the Micro LED chip during the transfer process, the transfer efficiency can be improved.

Micro LED芯片可以在本体的一个侧面形成有凸起部以形成台阶结构,在台阶结构的台阶面上设置第一电极,在该凸起部的顶面设置第二电极,基板的一表面形成有凹槽,该凹槽对应于该Micro LED芯片,且该凹槽的底面形成有凹陷,凹槽的底面形成有第一金属层,该凹陷的底面形成有第二金属层,Micro LED芯片的凸起部嵌入于基板的凹陷中,并且第一金属层与第一电极贴合,第二金属层与第二电极贴合,由于Micro LED芯片的台阶结构的台阶面上设置第一电极,凸起部的顶面设置第二电极,并且Micro LED芯片的凸起嵌入于基板的凹陷中,因此在巨量转移过程中可以无需识别Micro LED芯片的P电极和N电极。The Micro LED chip can have a raised portion formed on one side of the body to form a stepped structure, a first electrode is arranged on the stepped surface of the stepped structure, a second electrode is arranged on the top surface of the raised portion, and a surface of the substrate is formed with A groove, the groove corresponds to the Micro LED chip, and a depression is formed on the bottom surface of the groove, a first metal layer is formed on the bottom surface of the groove, a second metal layer is formed on the bottom surface of the depression, and the protrusion of the Micro LED chip The rising part is embedded in the depression of the substrate, and the first metal layer is bonded to the first electrode, and the second metal layer is bonded to the second electrode. Since the first electrode is arranged on the step surface of the step structure of the Micro LED chip, the protrusion The second electrode is set on the top surface of the substrate, and the protrusion of the Micro LED chip is embedded in the depression of the substrate, so there is no need to identify the P electrode and N electrode of the Micro LED chip during the mass transfer process.

本申请实施例描述的应用场景是为了更加清楚的说明本申请实施例的技术方案,并不构成对于本申请实施例提供的技术方案的限定,本领域普通技术人员可知,随着新应用场景的出现,本申请实施例提供的技术方案对于类似的技术问题,同样适用。The application scenarios described in the embodiments of this application are to illustrate the technical solutions of the embodiments of the application more clearly, and do not constitute limitations on the technical solutions provided by the embodiments of the application. Those of ordinary skill in the art know that with the development of new application scenarios It appears that the technical solutions provided by the embodiments of the present application are also applicable to similar technical problems.

针对上述场景,为本申请提供的一种Micro LED显示面板的结构示意图,具体如图2所示,该显示面板包括:In view of the above scenario, a schematic structural diagram of a Micro LED display panel provided by this application is shown in Figure 2. The display panel includes:

基板1和形成于所述基板1上呈阵列分布的微型发光二极管Micro LED芯片2,其中:The substrate 1 and the micro light-emitting diode Micro LED chips 2 formed in an array on the substrate 1, wherein:

所述Micro LED芯片2包括一本体20、第一电极21、第二电极22,其中,所述本体20的一个侧面形成有凸起部23以形成台阶结构,所述第一电极21设置于所述台阶结构的台阶面上,所述第二电极22设置于所述凸起部23的顶面:The Micro LED chip 2 includes a body 20, a first electrode 21, and a second electrode 22, wherein a raised portion 23 is formed on one side of the body 20 to form a stepped structure, and the first electrode 21 is disposed on the On the stepped surface of the stepped structure, the second electrode 22 is arranged on the top surface of the raised portion 23:

所述基板1的一表面形成有凹槽10,凹槽10对应于Micro LED芯片2,且所述凹槽10的底面形成有凹陷11;其中所述凹槽10的底面形成有第一金属层12,所述凹陷的底面形成有第二金属层13;A groove 10 is formed on one surface of the substrate 1, the groove 10 corresponds to the Micro LED chip 2, and a depression 11 is formed on the bottom surface of the groove 10; wherein a first metal layer is formed on the bottom surface of the groove 10 12. A second metal layer 13 is formed on the bottom surface of the depression;

所述Micro LED芯片2中,所述凸起部23嵌入于所述凹陷11中,且所述第一金属层12与所述第一电极21贴合,所述第二金属层13与所述第二电极22贴合。In the Micro LED chip 2, the raised portion 23 is embedded in the recess 11, and the first metal layer 12 is bonded to the first electrode 21, and the second metal layer 13 is bonded to the The second electrode 22 is bonded together.

上述Micro LED显示面板,由于该显示面板中Micro LED芯片2的凸起部23嵌入于基板1的凹陷11中,在基板1的凹槽10底面形成的第一金属层12与在Micro LED芯片2的台阶面设置的第一电极21贴合,在基板1的凹陷11底面形成的第二金属层13与在Micro LED芯片2的凸起部23的顶面设置的第二电极22贴合,从而在巨量转移过程中,无需识别Micro LED芯片的P电极和N电极,提高转移效率。In the above-mentioned Micro LED display panel, since the raised portion 23 of the Micro LED chip 2 in the display panel is embedded in the recess 11 of the substrate 1, the first metal layer 12 formed on the bottom surface of the groove 10 of the substrate 1 and the first metal layer 12 formed on the bottom surface of the Micro LED chip 2 The first electrode 21 provided on the stepped surface of the substrate 1 is bonded, and the second metal layer 13 formed on the bottom surface of the recess 11 of the substrate 1 is bonded to the second electrode 22 provided on the top surface of the raised portion 23 of the Micro LED chip 2, so that In the mass transfer process, there is no need to identify the P electrode and N electrode of the Micro LED chip, which improves the transfer efficiency.

其中,Micro LED芯片2的本体20的一个侧面形成的凸起部23,可以有一个,也可以有多个,如图2所示,Micro LED芯片2的本体20的一个侧面形成的凸起部23有一个,如图3所示,Micro LED芯片2的本体20的一个侧面形成的凸起部23有两个,如图4所示,Micro LED芯片2的本体20的一个侧面形成的凸起部23有三个。Wherein, the raised portion 23 formed on one side of the body 20 of the Micro LED chip 2 may have one or more, as shown in FIG. 2 , the raised portion formed on one side of the body 20 of the Micro LED chip 2 23 has one, as shown in Figure 3, the raised part 23 formed on one side of the body 20 of the Micro LED chip 2 has two, as shown in Figure 4, the raised part 23 formed on one side of the body 20 of the Micro LED chip 2 Section 23 has three.

具体Micro LED芯片2的本体20的一个侧面形成的凸起部23的个数,可以根据实际需要设置,本发明实施例不做限制。Specifically, the number of raised portions 23 formed on one side of the main body 20 of the Micro LED chip 2 can be set according to actual needs, and is not limited in the embodiment of the present invention.

由于Micro LED芯片2中,本体20具有的凸起部23嵌入于凹陷11中,因此凸起部23与凹陷11是一一对应的,也就是说Micro LED芯片2有几个凸起部23,基板1就对应有几个凹陷11。Since in the Micro LED chip 2, the raised portion 23 of the main body 20 is embedded in the recess 11, the raised portion 23 corresponds to the recess 11 one by one, that is to say, the Micro LED chip 2 has several raised portions 23, The substrate 1 corresponds to several depressions 11 .

如图5所示,为凹槽10的底面形成有2个凹陷11。图5所示的基板1和图3所示的Micro LED芯片2是对应的,Micro LED芯片2的2个凸起部23嵌入于基板1的2个凹陷11中。As shown in FIG. 5 , two depressions 11 are formed for the bottom surface of the groove 10 . The substrate 1 shown in FIG. 5 corresponds to the Micro LED chip 2 shown in FIG. 3 , and the two protrusions 23 of the Micro LED chip 2 are embedded in the two recesses 11 of the substrate 1 .

如图6所示,为凹槽10的底部形成有3个凹陷11。图6所示的基板1和图4所示的Micro LED芯片2是对应的,Micro LED芯片2的3个凸起部23嵌入于基板1的3个凹陷11中。As shown in FIG. 6 , three depressions 11 are formed for the bottom of the groove 10 . The substrate 1 shown in FIG. 6 corresponds to the Micro LED chip 2 shown in FIG. 4 , and the three protrusions 23 of the Micro LED chip 2 are embedded in the three recesses 11 of the substrate 1 .

具体基板1的凹槽10的底部形成的凹陷11的个数,可以根据实际需要设置,本发明实施例不做限制。Specifically, the number of depressions 11 formed at the bottom of the groove 10 of the substrate 1 can be set according to actual needs, and is not limited in the embodiment of the present invention.

在实施中,基板1中用于设置Micro LED芯片2的表面形成有凹槽10,该凹槽10的数量可以有一个,也可以有多个。下面分不同的情况进行说明。In practice, a groove 10 is formed on the surface of the substrate 1 for setting the Micro LED chip 2 , and the number of the groove 10 may be one or more. Different situations are described below.

本发明实施例以Micro LED芯片2具有一个凸起部23为例进行说明。The embodiment of the present invention is described by taking the Micro LED chip 2 having a raised portion 23 as an example.

情况一、基板1的一表面形成有1个凹槽10。Case 1: A groove 10 is formed on one surface of the substrate 1 .

如图7所示,为基板1的一表面形成有1个凹槽10的剖视图。图7中,凹槽10底面形成有3个凹陷11,3个Micro LED芯片2中每个Micro LED芯片2的凸起部23可以嵌入于每个凹陷11中。As shown in FIG. 7 , it is a cross-sectional view in which one groove 10 is formed on one surface of the substrate 1 . In FIG. 7 , three depressions 11 are formed on the bottom surface of the groove 10 , and the protrusion 23 of each Micro LED chip 2 among the three Micro LED chips 2 can be embedded in each depression 11 .

如图8所示,为基板1的一表面形成有1个凹槽10的俯视图。从图8中可以看出,基板1的一表面形成有1个凹槽10,该凹槽10底面形成有9个凹陷11。As shown in FIG. 8 , it is a top view of a groove 10 formed on one surface of the substrate 1 . It can be seen from FIG. 8 that a groove 10 is formed on one surface of the substrate 1 , and nine depressions 11 are formed on the bottom surface of the groove 10 .

如图9所示,为Micro LED芯片2嵌入于基板1形成有1个凹槽的剖视图。图9中,基板1的一表面形成有1个凹槽10,该凹槽10底面形成有多个凹陷11,每个Micro LED芯片2的凸起部23嵌入于每个凹陷11中。As shown in FIG. 9 , it is a cross-sectional view of the Micro LED chip 2 embedded in the substrate 1 to form a groove. In FIG. 9 , a groove 10 is formed on one surface of the substrate 1 , and a plurality of depressions 11 are formed on the bottom surface of the groove 10 , and the protrusion 23 of each Micro LED chip 2 is embedded in each depression 11 .

情况二、基板1设有的凹槽10为多个,凹槽10沿行方向延伸,且多个所述凹槽10沿列方向排列,所述凹槽10与行Micro LED芯片2对应,所述凹槽10的底面形成对应行MicroLED芯片2中的Micro LED芯片2的凸起部23的凹陷11。Case 2: There are multiple grooves 10 provided on the substrate 1, the grooves 10 extend along the row direction, and the plurality of grooves 10 are arranged along the column direction, the grooves 10 correspond to the Micro LED chips 2 in the row, so The bottom surface of the groove 10 forms a depression 11 corresponding to the raised portion 23 of the Micro LED chip 2 in the row of Micro LED chips 2 .

如图10所示,为第一种基板1设有多个凹槽10的剖视图。图10中可以看出,凹槽10沿行方向延伸,凹槽10底面形成有3个凹陷11,每个Micro LED芯片2的凸起部23可以嵌入于每个凹陷11中。As shown in FIG. 10 , it is a cross-sectional view of a first type of substrate 1 provided with a plurality of grooves 10 . It can be seen from FIG. 10 that the groove 10 extends along the row direction, and three depressions 11 are formed on the bottom surface of the groove 10 , and the protrusion 23 of each Micro LED chip 2 can be embedded in each depression 11 .

如图11所示,为第一种基板1设有多个凹槽10的俯视图。从图11中可以看出,基板1设有3个凹槽10,凹槽10沿行方向延伸,3个凹槽10沿列方向排列,凹槽10与行Micro LED芯片2对应,凹槽10的底面形成对应行Micro LED芯片2中的Micro LED芯片2的凸起部23的凹陷11。As shown in FIG. 11 , it is a top view of a first type of substrate 1 provided with a plurality of grooves 10 . It can be seen from Fig. 11 that the substrate 1 is provided with three grooves 10, the grooves 10 extend along the row direction, and the three grooves 10 are arranged along the column direction, the grooves 10 correspond to the row Micro LED chips 2, the grooves 10 The bottom surface of the corresponding row of Micro LED chips 2 forms the recesses 11 of the raised portions 23 of the Micro LED chips 2 .

其中,凹槽10的数量和凹陷11的数量都可以根据实际需要设定,本发明实施例不做限制。Wherein, the number of the grooves 10 and the number of the depressions 11 can be set according to actual needs, which are not limited in the embodiment of the present invention.

如图12所示,为本发明实施例提供的第一种Micro LED芯片2嵌入于基板1设有多个凹槽10的剖视图。从图12中可以看出,在一个凹槽中底面形成有3个凹陷11,每个MicroLED芯片2的凸起部23嵌入于每个凹陷11中。As shown in FIG. 12 , it is a cross-sectional view of a first type of Micro LED chip 2 embedded in a substrate 1 provided with a plurality of grooves 10 according to an embodiment of the present invention. It can be seen from FIG. 12 that three depressions 11 are formed on the bottom surface of one groove, and the protrusion 23 of each Micro LED chip 2 is embedded in each depression 11 .

情况三、基板1设有的凹槽10为多个,凹槽10沿列方向延伸,且多个所述凹槽10沿行方向排列,所述凹槽10与列Micro LED芯片2对应,所述凹槽10的底面形成有对应列MicroLED芯片2中的Micro LED芯片2的凸起部23的凹陷11。Situation 3: There are multiple grooves 10 provided on the substrate 1, the grooves 10 extend along the column direction, and the multiple grooves 10 are arranged along the row direction, the grooves 10 correspond to the Micro LED chips 2 in the column, so The bottom surface of the groove 10 is formed with a depression 11 corresponding to the raised portion 23 of the Micro LED chip 2 in the row of Micro LED chips 2 .

如图13所示,为第二种基板1设有多个凹槽10的剖视图。从图13中可以看出,基板1设有3个凹槽10,凹槽10沿行方向延伸。As shown in FIG. 13 , it is a cross-sectional view of a second type of substrate 1 provided with a plurality of grooves 10 . It can be seen from FIG. 13 that the substrate 1 is provided with three grooves 10, and the grooves 10 extend along the row direction.

如图14所示,为第二种基板1设有多个凹槽10的俯视图。从图14中可以看出,基板1设有3个凹槽10,凹槽10底部形成有3个凹陷11,3个凹槽10沿行方向排列,凹槽10与列MicroLED芯片2对应,凹槽10的底面形成有对应列Micro LED芯片2中的Micro LED芯片2的凸起部23的凹陷11。As shown in FIG. 14 , it is a top view of the second type of substrate 1 provided with a plurality of grooves 10 . It can be seen from FIG. 14 that the substrate 1 is provided with three grooves 10, and three grooves 11 are formed at the bottom of the grooves 10. The three grooves 10 are arranged along the row direction. The grooves 10 correspond to the columns of MicroLED chips 2. The bottom surface of the groove 10 is formed with a recess 11 corresponding to the raised portion 23 of the Micro LED chip 2 in the row of Micro LED chips 2 .

其中,凹槽10的数量和凹陷11的数量都可以根据实际需要设定,本发明实施例不做限制。Wherein, the number of the grooves 10 and the number of the depressions 11 can be set according to actual needs, which are not limited in the embodiment of the present invention.

如图15所示,本发明实施例提供的第二种Micro LED芯片2嵌入于基板1设有多个凹槽10的剖视图。从图15中可以看出,基板1的一表面形成有3个凹槽10,Micro LED芯片2的凸起部23嵌入于每个凹陷11中。As shown in FIG. 15 , a cross-sectional view of a second type of Micro LED chip 2 embedded in a substrate 1 provided with a plurality of grooves 10 provided by the embodiment of the present invention. It can be seen from FIG. 15 that three grooves 10 are formed on one surface of the substrate 1 , and the raised portion 23 of the Micro LED chip 2 is embedded in each of the grooves 11 .

情况四、基板1的一表面形成的凹槽与Micro LED芯片一一对应。Situation 4: The grooves formed on one surface of the substrate 1 correspond to the Micro LED chips one by one.

如图16所示,为基板1的一表面形成的凹槽10与Micro LED芯片2一一对应的剖视图。图16中,基板1的每个凹槽10底面形成有一个凹陷11。As shown in FIG. 16 , it is a cross-sectional view showing a one-to-one correspondence between the grooves 10 formed on one surface of the substrate 1 and the Micro LED chips 2 . In FIG. 16 , a depression 11 is formed on the bottom surface of each groove 10 of the substrate 1 .

如图17所示,为基板1用于设置Micro LED芯片2的表面形成的凹槽10与Micro LED芯片2一一对应的俯视图。从图17中可以看出,基板1的一表面沿阵列的列方向形成有3个凹槽10,每个凹槽10底面形成有3个凹陷11。As shown in FIG. 17 , it is a top view of the one-to-one correspondence between the grooves 10 formed on the surface of the substrate 1 for setting the Micro LED chips 2 and the Micro LED chips 2 . It can be seen from FIG. 17 that three grooves 10 are formed on one surface of the substrate 1 along the column direction of the array, and three depressions 11 are formed on the bottom surface of each groove 10 .

其中,凹槽10的数量和凹陷11的数量都可以根据实际需要设定,本发明实施例不做限制。Wherein, the number of the grooves 10 and the number of the depressions 11 can be set according to actual needs, which are not limited in the embodiment of the present invention.

如图18所示,为Micro LED芯片2嵌入于基板1的凹槽10的剖视图。从图15中可以看出,每个Micro LED芯片2的凸起部23嵌入于每个凹陷11中。As shown in FIG. 18 , it is a cross-sectional view of the Micro LED chip 2 embedded in the groove 10 of the substrate 1 . It can be seen from FIG. 15 that the protrusion 23 of each Micro LED chip 2 is embedded in each recess 11 .

在实施中,本体内部设置与第一电极导电层,在凸起部内部设置有第二电极导电层和量子阱层。In practice, the first electrode conductive layer is arranged inside the main body, and the second electrode conductive layer and the quantum well layer are arranged inside the protrusion.

比如,以Micro LED芯片2有一个凸起部23,且该凸起部23形成于本体20侧面的中心位置处为例,如图19所示,在第二电极22下方的为第二电极层24,在第一电极21下方的为第一电极层26,在第一电极层25和第二电极层23之间的为量子阱层25。For example, taking the Micro LED chip 2 has a raised portion 23, and the raised portion 23 is formed at the center of the side of the main body 20 as an example, as shown in FIG. 19, the second electrode layer below the second electrode 22 24 , the first electrode layer 26 is below the first electrode 21 , and the quantum well layer 25 is between the first electrode layer 25 and the second electrode layer 23 .

具体的,第一电极21可以为P型电极,也可以为N型电极,第二电极22也可以为P型电极,也可以为N型电极。如果第一电极21为P型电极,则第二电极22为N型电极,如果第一电极21为N型电极,则第二电极22为P型电极。Specifically, the first electrode 21 may be a P-type electrode or an N-type electrode, and the second electrode 22 may also be a P-type electrode or an N-type electrode. If the first electrode 21 is a P-type electrode, then the second electrode 22 is an N-type electrode, and if the first electrode 21 is an N-type electrode, then the second electrode 22 is a P-type electrode.

相应的,如果第一电极21为P型电极,则第一电极层26为P型电极层;如果第一电极21为N型电极,则第一电极层26为N型电极层。如果第二电极22为P型电极,则第二电极层26为P型电极层;如果第二电极22为N型电极,则第二电极层26为N型电极层。Correspondingly, if the first electrode 21 is a P-type electrode, then the first electrode layer 26 is a P-type electrode layer; if the first electrode 21 is an N-type electrode, then the first electrode layer 26 is an N-type electrode layer. If the second electrode 22 is a P-type electrode, then the second electrode layer 26 is a P-type electrode layer; if the second electrode 22 is an N-type electrode, then the second electrode layer 26 is an N-type electrode layer.

在实施中,第一金属层12和第一电极21贴合时,可以通过导电粘合剂贴合,使第一金属层12和第一电极21之间能够导电;同样,第二金属层13和第二电极22贴合时,有可以使用导电粘合剂贴合,使第二金属层13和第二电极22之间能够导电。In practice, when the first metal layer 12 and the first electrode 21 are bonded together, they can be bonded by a conductive adhesive to enable conduction between the first metal layer 12 and the first electrode 21; similarly, the second metal layer 13 When bonding with the second electrode 22 , a conductive adhesive may be used for bonding to enable conduction between the second metal layer 13 and the second electrode 22 .

上述的说明都是以Micro LED芯片2的凸起部和本体的俯视图为矩形进行的说明,Micro LED芯片2的凸起部23和本体20的俯视图的形状还可以为其他形状,比如圆形,也就是说,凸起部23为圆柱形,本体20也为圆柱形。下面举例进行说明。The above descriptions are based on the fact that the raised portion of the Micro LED chip 2 and the top view of the main body are rectangular. The shape of the raised portion 23 of the Micro LED chip 2 and the top view of the main body 20 can also be other shapes, such as a circle, That is to say, the protrusion 23 is cylindrical, and the body 20 is also cylindrical. An example is given below.

如图20所示,为凸起部23和本体20为圆柱形的俯视图。从图20中可以看出,该Micro LED芯片2的凸起部23的俯视图为圆形,本体20的俯视图也为圆形。As shown in FIG. 20 , it is a top view in which the protrusion 23 and the body 20 are cylindrical. It can be seen from FIG. 20 that the top view of the raised portion 23 of the Micro LED chip 2 is circular, and the top view of the main body 20 is also circular.

由于Micro LED芯片2的本体20上的第一电极21与基板的凹槽10的底面形成的第一金属层12贴合,因此凹槽10的形状可以和本体20的形状相同,当本体20为圆柱形时,凹槽10也可以为圆柱形;由于凸起部23需要嵌入到基板1的凹陷11中,因此,当凸起部23为圆柱形时,凹陷11也可以为圆柱形。Because the first electrode 21 on the body 20 of the Micro LED chip 2 is attached to the first metal layer 12 formed on the bottom surface of the groove 10 of the substrate, the shape of the groove 10 can be the same as the shape of the body 20. When the body 20 is When the groove 10 is cylindrical, the groove 10 may also be cylindrical; since the protrusion 23 needs to be embedded in the recess 11 of the substrate 1 , when the protrusion 23 is cylindrical, the recess 11 may also be cylindrical.

如图21所示,为凹槽10和凹陷11为圆柱形的俯视图。从图21中可以看出,每个Micro LED芯片2对应基板1上的一个凹槽10,基板1的凹槽10的俯视图形状为圆形,凹陷11的俯视图形状也为圆形。As shown in FIG. 21 , it is a top view in which the groove 10 and the depression 11 are cylindrical. It can be seen from FIG. 21 that each Micro LED chip 2 corresponds to a groove 10 on the substrate 1 . The top view shape of the groove 10 of the substrate 1 is circular, and the top view shape of the depression 11 is also circular.

需要说明的是,Micro LED芯片2的凸起部23的形状和本体20的形状可以随意组合,比如,凸起部23为圆柱形,本体20为长方体;凸起部23为长方体,本体20为圆柱形;凸起部23为圆柱形,本体20为正方体等,具体凸起部23的形状和本体20的形状可以根据实际需要设定,本发明实施例不做限定。It should be noted that the shape of the raised portion 23 of the Micro LED chip 2 and the shape of the body 20 can be freely combined, for example, the raised portion 23 is cylindrical, and the body 20 is a cuboid; the raised portion 23 is a cuboid, and the body 20 is Cylindrical; the convex part 23 is cylindrical, and the body 20 is a cube, etc. The specific shape of the convex part 23 and the shape of the body 20 can be set according to actual needs, and the embodiment of the present invention does not limit it.

本发明实施例中,Micro LED芯片2的凸起部23的尺寸可以为20μm(微米),如图22所示,比如,如果凸起部23的形状为正方体,则正方体的长为20μm;如果凸起部23的形状为圆柱形,则圆柱形的直径为20μm;In the embodiment of the present invention, the size of the protrusion 23 of the Micro LED chip 2 can be 20 μm (micrometer), as shown in FIG. 22 , for example, if the shape of the protrusion 23 is a cube, the length of the cube is 20 μm; if The shape of the protrusion 23 is cylindrical, and the diameter of the cylindrical shape is 20 μm;

Micro LED芯片2的本体20的尺寸可以约为60μm(微米),如图22所示,比如,如果本体10的形状为正方体,则正方体的高为20μm;如果本体20的形状为圆柱形,则圆柱形的高为20μm;The size of the body 20 of the Micro LED chip 2 can be about 60 μm (micrometer), as shown in Figure 22, for example, if the shape of the body 10 is a cube, the height of the cube is 20 μm; if the shape of the body 20 is a cylinder, then The height of the cylinder is 20 μm;

Micro LED芯片2的底部到顶部的尺寸可以为100μm,如图22所示,本体20的高、凸起部23的高共为100μm。The size from the bottom to the top of the Micro LED chip 2 may be 100 μm. As shown in FIG. 22 , the height of the body 20 and the height of the raised portion 23 are 100 μm in total.

基于同一发明构思,本发明实施例还提供了一种显示装置,由于该显示装置对应的是本发明实施例显示面板,并且该显示装置解决问题的原理与该显示面板相似,因此该显示装置的实施可以参见该显示面板的实施,重复之处不再赘述。Based on the same inventive concept, an embodiment of the present invention also provides a display device. Since the display device corresponds to the display panel of the embodiment of the present invention, and the problem-solving principle of the display device is similar to that of the display panel, the display device's For implementation, reference may be made to the implementation of the display panel, and repeated descriptions will not be repeated.

基于同一发明构思,本发明实施例还提供了一种Micro LED显示面板的制备方法,如图23所示,该方法包括:Based on the same inventive concept, an embodiment of the present invention also provides a method for preparing a Micro LED display panel, as shown in FIG. 23 , the method includes:

S2300、通过巨量转移的方法将阵列排布的Micro LED芯片转移到基板上,其中,所述Micro LED芯片包括一本体、第一电极、第二电极,所述本体的一个侧面形成有凸起部以形成台阶结构,所述第一电极设置于所述台阶结构的台阶面上,所述第二电极设置于所述凸起部的顶面;所述基板的一表面形成有凹槽,所述凹槽对应于所述Micro LED芯片,且所述凹槽的底面形成有凹陷;其中所述凹槽的底面形成有第一金属层,所述凹陷的底面形成有第二金属层;S2300. Transfer the Micro LED chips arranged in an array onto the substrate by mass transfer method, wherein the Micro LED chip includes a body, a first electrode, and a second electrode, and a protrusion is formed on one side of the body part to form a stepped structure, the first electrode is arranged on the stepped surface of the stepped structure, and the second electrode is arranged on the top surface of the raised part; a groove is formed on one surface of the substrate, so The groove corresponds to the Micro LED chip, and a depression is formed on the bottom surface of the groove; wherein a first metal layer is formed on the bottom surface of the groove, and a second metal layer is formed on the bottom surface of the depression;

S2301、按压所述阵列排布的Micro LED芯片表面,使所述阵列排布的Micro LED芯片的表面与所述基板表面在同一平面上,其中,所述Micro LED芯片中,所述凸起部嵌入于所述凹陷中,且所述第一金属层与所述第一电极贴合,所述第二金属层与所述第二电极贴合。S2301. Press the surface of the Micro LED chip arranged in the array, so that the surface of the Micro LED chip arranged in the array is on the same plane as the surface of the substrate, wherein, in the Micro LED chip, the raised portion embedded in the depression, and the first metal layer is bonded to the first electrode, and the second metal layer is bonded to the second electrode.

本发明实施例,首先通过巨量转移方法将阵列排布的Micro LED芯片转移到基板上,然后按压所述阵列排布的Micro LED芯片表面,使所述阵列排布的Micro LED芯片的表面与所述基板表面在同一平面上。由于Micro LED芯片包括一本体、第一电极、第二电极,所述本体的一个侧面形成有凸起部以形成台阶结构,所述第一电极设置于所述台阶结构的台阶面上,所述第二电极设置于所述凸起部的顶面;所述基板的一表面形成有凹槽,且所述凹槽的底面形成有凹陷;其中所述凹槽的底面形成有第一金属层,所述凹陷的底面形成有第二金属层;所述Micro LED芯片中,所述凸起部嵌入于所述凹陷中,且所述第一金属层与所述第一电极贴合,所述第二金属层与所述第二电极贴合,从而在巨量转移过程中,无需识别Micro LED芯片的P、N电极,提高转移效率的同时减小对位难度。In the embodiment of the present invention, the Micro LED chips arranged in an array are first transferred to the substrate by a mass transfer method, and then the surface of the Micro LED chips arranged in an array is pressed, so that the surface of the Micro LED chips arranged in an array is aligned with the substrate. The substrate surfaces are on the same plane. Since the Micro LED chip includes a body, a first electrode, and a second electrode, a raised portion is formed on one side of the body to form a stepped structure, and the first electrode is arranged on the stepped surface of the stepped structure, the The second electrode is disposed on the top surface of the protrusion; a groove is formed on a surface of the substrate, and a depression is formed on the bottom surface of the groove; wherein a first metal layer is formed on the bottom surface of the groove, A second metal layer is formed on the bottom surface of the depression; in the Micro LED chip, the protrusion is embedded in the depression, and the first metal layer is bonded to the first electrode, and the first The two metal layers are attached to the second electrode, so that during the mass transfer process, there is no need to identify the P and N electrodes of the Micro LED chip, which improves the transfer efficiency and reduces the difficulty of alignment.

在实施中,为了使Micro LED芯片和基板能够更好的贴合,需要压合Micro LED芯片和基板,本发明实施例中,可以按压该Micro LED芯片的表面,使该Micro LED芯片的表面与该基板的表面在同一平面上,此时即停止压合,由于该Micro LED芯片的表面与该基板的表面在同一平面上,压合过程中压合力是固定可控的,这样可以减小Micro LED芯片的受损率。In practice, in order to make the Micro LED chip and the substrate bond better, it is necessary to press the Micro LED chip and the substrate. In the embodiment of the present invention, the surface of the Micro LED chip can be pressed to make the surface of the Micro LED chip and The surface of the substrate is on the same plane, and the pressing is stopped at this time. Since the surface of the Micro LED chip and the surface of the substrate are on the same plane, the pressing force is fixed and controllable during the pressing process, which can reduce the micro Damage rate of LED chips.

如图24所示,为压合Micro LED芯片和基板的示意图。图24中,可以使用一个平板按压Micro LED芯片,压合后,使Micro LED芯片的表面与基板表面在同一个平面上。As shown in Figure 24, it is a schematic diagram of lamination of Micro LED chips and substrates. In Figure 24, a flat plate can be used to press the Micro LED chip. After pressing, the surface of the Micro LED chip and the surface of the substrate are on the same plane.

由于Micro LED芯片和基板需要焊接到一起,因此在通过巨量转移的方法将阵列排布的Micro LED芯片转移到基板上之前,还包括:在第一金属层和第二金属层上填补导电粘合剂。Since the Micro LED chips and the substrate need to be soldered together, before transferring the arrayed Micro LED chips to the substrate by the method of mass transfer, it also includes: filling the conductive adhesive on the first metal layer and the second metal layer mixture.

在第一金属层和第一电极之间存在导电粘合剂,在第二金属层和第二电极之间存在导电粘合剂,导电粘合剂将第一金属层和第一电极焊接到一起,将第二金属层和第二电极焊接到一起,从而在通电以后,可以点亮该Micro LED显示面板。A conductive adhesive is present between the first metal layer and the first electrode, a conductive adhesive is present between the second metal layer and the second electrode, and the conductive adhesive solders the first metal layer and the first electrode together , welding the second metal layer and the second electrode together, so that the Micro LED display panel can be lighted up after electrification.

以上参照示出根据本申请实施例的方法、装置(系统)和/或计算机程序产品的框图和/或流程图描述本申请。应理解,可以通过计算机程序指令来实现框图和/或流程图示图的一个块以及框图和/或流程图示图的块的组合。可以将这些计算机程序指令提供给通用计算机、专用计算机的处理器和/或其它可编程数据处理装置,以产生机器,使得经由计算机处理器和/或其它可编程数据处理装置执行的指令创建用于实现框图和/或流程图块中所指定的功能/动作的方法。The present application is described above with reference to block diagrams and/or flowcharts illustrating methods, apparatus (systems) and/or computer program products according to embodiments of the present application. It will be understood that one block of the block diagrams and/or flowchart illustrations, and combinations of blocks in the block diagrams and/or flowchart illustrations, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, a special purpose computer and/or other programmable data processing apparatus to produce a machine such that instructions executed via the computer processor and/or other programmable data processing apparatus create a means of implementing the functions/acts specified in the block diagrams and/or flowchart blocks.

相应地,还可以用硬件和/或软件(包括固件、驻留软件、微码等)来实施本申请。更进一步地,本申请可以采取计算机可使用或计算机可读存储介质上的计算机程序产品的形式,其具有在介质中实现的计算机可使用或计算机可读程序代码,以由指令执行系统来使用或结合指令执行系统而使用。在本申请上下文中,计算机可使用或计算机可读介质可以是任意介质,其可以包含、存储、通信、传输、或传送程序,以由指令执行系统、装置或设备使用,或结合指令执行系统、装置或设备使用。Accordingly, the present application may also be implemented in hardware and/or software (including firmware, resident software, microcode, etc.). Still further, the present application may take the form of a computer program product on a computer-usable or computer-readable storage medium having computer-usable or computer-readable program code embodied in the medium for use by an instruction execution system or Used in conjunction with command execution systems. In the context of this application, a computer-usable or computer-readable medium may be any medium that may contain, store, communicate, transmit, or convey a program for use by, or in connection with, an instruction execution system, apparatus, or device device or equipment used.

显然,本领域的技术人员可以对本发明进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内,则本发明也意图包含这些改动和变型在内。Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention also intends to include these modifications and variations.

Claims (10)

1.一种Micro LED显示面板,其特征在于,包括基板和形成于所述基板上呈阵列分布的微型发光二极管Micro LED芯片,其中:1. A Micro LED display panel, characterized in that it comprises a substrate and micro LED chips formed in an array on the substrate, wherein: 所述Micro LED芯片包括一本体、第一电极、第二电极,其中,所述本体的一个侧面形成有凸起部以形成台阶结构,所述第一电极设置于所述台阶结构的台阶面上,所述第二电极设置于所述凸起部的顶面:The Micro LED chip includes a body, a first electrode, and a second electrode, wherein a raised portion is formed on one side of the body to form a stepped structure, and the first electrode is disposed on a stepped surface of the stepped structure , the second electrode is disposed on the top surface of the protrusion: 所述基板的一表面形成有凹槽,所述凹槽对应于所述Micro LED芯片,且所述凹槽的底面形成有凹陷;其中所述凹槽的底面形成有第一金属层,所述凹陷的底面形成有第二金属层;A groove is formed on one surface of the substrate, the groove corresponds to the Micro LED chip, and a depression is formed on the bottom surface of the groove; wherein a first metal layer is formed on the bottom surface of the groove, the A second metal layer is formed on the bottom surface of the depression; 所述Micro LED芯片中,所述凸起部嵌入于所述凹陷中,且所述第一金属层与所述第一电极贴合,所述第二金属层与所述第二电极贴合。In the Micro LED chip, the protrusion is embedded in the recess, the first metal layer is bonded to the first electrode, and the second metal layer is bonded to the second electrode. 2.如权利要求1所述的显示面板,其特征在于,所述基板设有的凹槽为多个,所述凹槽沿行方向延伸,且多个所述凹槽沿列方向排列,所述凹槽与行Micro LED芯片对应,所述凹槽的底面形成有对应行Micro LED芯片中的Micro LED芯片的凸起部的凹陷;或2. The display panel according to claim 1, wherein the substrate is provided with a plurality of grooves, the grooves extend along the row direction, and a plurality of the grooves are arranged along the column direction, so The groove corresponds to the row of Micro LED chips, and the bottom surface of the groove is formed with a depression corresponding to the raised part of the Micro LED chip in the row of Micro LED chips; or 所述基板设有的凹槽为多个,所述凹槽沿列方向延伸,且多个所述凹槽沿行方向排列,所述凹槽与列Micro LED芯片对应,所述凹槽的底面形成有对应列Micro LED芯片中的Micro LED芯片的凸起部的凹陷。The substrate is provided with a plurality of grooves, the grooves extend along the column direction, and the plurality of grooves are arranged along the row direction, the grooves correspond to the columns of Micro LED chips, and the bottom surface of the grooves Concaves corresponding to the protruding portions of the Micro LED chips in the row of Micro LED chips are formed. 3.如权利要求1所述的显示面板,其特征在于,所述本体的一个侧面形成有一个凸起部,所述凸起部形成于所述侧面的中心位置处。3. The display panel according to claim 1, wherein a raised portion is formed on one side of the main body, and the raised portion is formed at a central position of the side. 4.如权利要求1所述的显示面板,其特征在于,所述本体内部设置有第一电极导电层;4. The display panel according to claim 1, wherein a first electrode conductive layer is disposed inside the body; 所述凸起部内部设置有第二电极导电层和量子阱层,且所述第二电极导电层设置于所述第一电极和所述量子阱层之间。A second electrode conductive layer and a quantum well layer are arranged inside the protrusion, and the second electrode conductive layer is arranged between the first electrode and the quantum well layer. 5.如权利要求4所述的显示面板,其特征在于,所述第一电极为N型电极,所述第二电极为P型电极;或5. The display panel according to claim 4, wherein the first electrode is an N-type electrode, and the second electrode is a P-type electrode; or 所述第一电极为P型电极,所述第二电极为N型电极。The first electrode is a P-type electrode, and the second electrode is an N-type electrode. 6.如权利要求1所述的显示面板,其特征在于,所述第一金属层与所述第一电极贴合,包括:6. The display panel according to claim 1, wherein the first metal layer is bonded to the first electrode, comprising: 所述第一金属层通过导电粘合剂与所述第一电极贴合;The first metal layer is attached to the first electrode through a conductive adhesive; 所述第二金属层与所述第二电极贴合,包括:The second metal layer is attached to the second electrode, including: 所述第二金属层通过导电粘合剂与所述第二电极贴合。The second metal layer is attached to the second electrode through a conductive adhesive. 7.如权利要求1~6任一所述的显示面板,其特征在于,所述Micro LED芯片的俯视图的形状为矩形或圆形。7. The display panel according to any one of claims 1-6, wherein the shape of the Micro LED chip in a top view is a rectangle or a circle. 8.一种显示装置,其特征在于,该显示装置包括:8. A display device, characterized in that the display device comprises: 如权利要求1~7任一所述的显示面板。The display panel according to any one of claims 1-7. 9.一种Micro LED显示面板的制备方法,其特征在于,该方法包括:9. A method for preparing a Micro LED display panel, characterized in that the method comprises: 通过巨量转移的方法将阵列排布的Micro LED芯片转移到基板上,其中,所述MicroLED芯片包括一本体、第一电极、第二电极,所述本体的一个侧面形成有凸起部以形成台阶结构,所述第一电极设置于所述台阶结构的台阶面上,所述第二电极设置于所述凸起部的顶面;所述基板的一表面形成有凹槽,所述凹槽对应于所述Micro LED芯片,且所述凹槽的底面形成有凹陷;其中所述凹槽的底面形成有第一金属层,所述凹陷的底面形成有第二金属层;The Micro LED chips arranged in an array are transferred to the substrate by a mass transfer method, wherein the Micro LED chip includes a body, a first electrode, and a second electrode, and a raised portion is formed on one side of the body to form a Step structure, the first electrode is arranged on the step surface of the step structure, the second electrode is arranged on the top surface of the protrusion; a groove is formed on a surface of the substrate, and the groove Corresponding to the Micro LED chip, and a depression is formed on the bottom surface of the groove; wherein a first metal layer is formed on the bottom surface of the groove, and a second metal layer is formed on the bottom surface of the depression; 按压所述阵列排布的Micro LED芯片表面,使所述阵列排布的Micro LED芯片的表面与所述基板表面在同一平面上,其中,所述Micro LED芯片中,所述凸起部嵌入于所述凹陷中,且所述第一金属层与所述第一电极贴合,所述第二金属层与所述第二电极贴合。Press the surface of the Micro LED chips arranged in the array so that the surface of the Micro LED chips arranged in the array is on the same plane as the surface of the substrate, wherein, in the Micro LED chip, the raised portion is embedded in In the depression, the first metal layer is bonded to the first electrode, and the second metal layer is bonded to the second electrode. 10.如权利要求9所述的制备方法,其特征在于,在所述通过巨量转移的方法将阵列排布的Micro LED芯片转移到基板上之前,还包括:10. The preparation method according to claim 9, further comprising: 在所述第一金属层和所述第二金属层上填补导电粘合剂。A conductive adhesive is filled on the first metal layer and the second metal layer.
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