CN119856009A - Diaphragm valve - Google Patents
Diaphragm valve Download PDFInfo
- Publication number
- CN119856009A CN119856009A CN202380064950.8A CN202380064950A CN119856009A CN 119856009 A CN119856009 A CN 119856009A CN 202380064950 A CN202380064950 A CN 202380064950A CN 119856009 A CN119856009 A CN 119856009A
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- China
- Prior art keywords
- diaphragm
- joint
- valve
- peripheral edge
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/02—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with screw-spindle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Lift Valve (AREA)
Abstract
隔膜阀(1)包括：阀箱(10)，其具有第一流路(11)、第二流路(12)以及阀座(15)；盖体(20)，其螺合安装于阀箱(10)；阀杆(30)，其能够进行相对于盖体(20)可升降地螺合的旋转操作；接头(40)，其与阀杆(30)连结且具有沿着阀杆(30)的螺合轴(42)；固定座(50)，其螺合于螺合轴(42)且相对于阀座(15)接触分离而对第一流路(11)与第二流路(12)之间进行开闭；环状的隔膜(60)，其供螺合轴(42)插通。隔膜(60)的外周缘部(61)机械地紧固固定于阀箱(10)和盖体(20)之间，隔膜(60)的内周缘部(62)机械地紧固固定于接头(40)和固定座(50)之间。
The diaphragm valve (1) includes: a valve box (10) having a first flow path (11), a second flow path (12) and a valve seat (15); a cover body (20) screwed and installed on the valve box (10); a valve stem (30) capable of being screwed and rotated relative to the cover body (20) so as to be raised and lowered; a joint (40) connected to the valve stem (30) and having a screw shaft (42) along the valve stem (30); a fixed seat (50) screwed on the screw shaft (42) and contacting and separating with respect to the valve seat (15) to open and close the first flow path (11) and the second flow path (12); and an annular diaphragm (60) for the screw shaft (42) to be inserted through. The outer peripheral edge (61) of the diaphragm (60) is mechanically fastened and fixed between the valve box (10) and the cover body (20), and the inner peripheral edge (62) of the diaphragm (60) is mechanically fastened and fixed between the joint (40) and the fixing seat (50).
Description
Technical Field
The present invention relates to a diaphragm valve for adjusting the flow rate of a fluid flowing through a flow path and opening and closing the flow path.
Background
Conventionally, as a diaphragm valve, a metal diaphragm valve is known (see patent document 1), in which a metal diaphragm (diaphragm) is disposed between a thrust button which is lifted and lowered by rotation of a handle via a stem and a valve seat provided in a valve housing. The diaphragm has a shape in which its peripheral edge is sealingly held by the valve housing and its central portion bulges upward (thrust button side).
The metal diaphragm valve is used in a semiconductor manufacturing apparatus or the like, and is configured such that a diaphragm is pressed by a push button which is lowered by a handle operation and is brought into contact with a valve seat, while the push button is raised by the handle operation, so that the pressing of the diaphragm by the push button is released, and the diaphragm is self-restored to an original shape, so that the diaphragm is separated from the valve seat, and the diaphragm is actuated in such a manner that the flow rate is regulated.
Prior art literature
Patent literature
Patent document 1 (Japanese patent application laid-open No. 8-105554).
Disclosure of Invention
Technical problem to be solved by the invention
However, in the metal diaphragm valve described in patent document 1, the diaphragm is configured to separate from the valve seat by self-recovery, and therefore, it is difficult to forcibly separate from the valve seat beyond self-recovery of the diaphragm to achieve a large flow rate.
Here, for example, it is considered to weld the diaphragm to the thrust button or the like, and to forcibly separate the diaphragm from the valve seat by the upward movement of the thrust button, but it is difficult to reduce the manufacturing cost because a welding operation is required in manufacturing the metal diaphragm valve
The invention aims to provide a diaphragm valve which can realize large flow rate by forcing a diaphragm to operate and can restrain manufacturing cost.
Technical scheme for solving technical problems
The diaphragm valve includes a main body having a first flow path, a second flow path, and a valve seat, a cover body screwed to the main body, a valve rod capable of being screwed to the cover body in a vertically movable manner, a joint connected to the valve rod and having a screw shaft along the valve rod, a fixed seat screwed to the screw shaft and contacting and separating from the valve seat to open and close between the first flow path and the second flow path, an annular diaphragm through which the screw shaft is inserted, and an outer peripheral edge portion of the diaphragm mechanically fastened and fixed between the main body and the cover body, and an inner peripheral edge portion of the diaphragm mechanically fastened and fixed between the joint and the fixed seat.
According to the diaphragm valve of the present invention, since the inner peripheral edge portion of the diaphragm is fastened and fixed between the joint and the fixed seat, the diaphragm can be forcibly lifted and lowered in accordance with the lifting and lowering of the valve stem, for example, compared with the case of the diaphragm valve having the flow rate adjustment by self-recovery of the diaphragm as described above, particularly, the flow path opening can be performed beyond the self-recovery of the diaphragm, and thus a large flow rate can be achieved. Further, since both the outer peripheral edge portion and the inner peripheral edge portion of the diaphragm and the like are mechanically fastened and fixed, it is not necessary to weld the diaphragm to a joint or the like, and the manufacturing cost of the diaphragm valve can be suppressed.
In the diaphragm valve according to the present invention, the joint may include a joint body having the screw shaft, and an abutting body that is rotatably inserted through the screw shaft with respect to the joint body and abuts against the diaphragm, and an outer diameter dimension of the abutting body may be the same as an outer diameter dimension of the joint body.
According to this structure, when the fixing base is screwed to the screw shaft of the joint body, the fixing base and the contact body rotate together with the diaphragm, and friction between the diaphragm and the joint and the fixing base can be reduced. Further, since the outer diameter of the abutting body is set to be the same as the outer diameter of the joint main body, the abutting area of the abutting body against the diaphragm can be increased within a range where the abutting body does not interfere with the cap body or the like when the joint and the valve stem are lifted together. Therefore, the diaphragm receiving the pressure of the fluid flowing in the main body can be received by the large contact area of the contact body.
In the diaphragm valve according to the present invention, the joint may include a joint body having the screw shaft, an abutting body rotatably inserted through the screw shaft with respect to the joint body and abutting against the diaphragm, the body and the cover body may fasten and fix an outer peripheral edge portion of the diaphragm so that the diaphragm is inclined upward toward the joint side, the abutting body may include a planar receiving surface for receiving the diaphragm, and a convex curved surface formed in a convex curved shape continuous with an outer periphery of the receiving surface.
According to this configuration, when the joint is lowered and the receiving surface of the abutting body is disposed below the fastening position of the outer peripheral edge portion of the diaphragm, the portion on the inner peripheral side is bent obliquely downward toward the joint side as compared with the portion on the outer peripheral side of the diaphragm in which the outer peripheral edge portion is fastened and fixed obliquely upward toward the joint side, but the convex curved surface is formed in the abutting body, so that the occurrence of stress concentration in the diaphragm can be suppressed.
In the diaphragm valve according to the present invention, the joint may include a joint body having the screw shaft, an abutting body rotatably inserted through the screw shaft with respect to the joint body and abutting against the diaphragm, the fixing base may include a screw hole opened in an upper surface thereof and screwed with the screw shaft, a tapered surface inclined obliquely upward toward the screw shaft side may be formed in the abutting body, and a corner portion of the upper surface of the fixing base continuous with the screw hole may be formed at an acute angle and may be overlapped with the tapered surface in an up-down direction.
According to this configuration, the inner peripheral edge portion of the diaphragm can be firmly fastened and fixed so that the corner portion of the fixing base is fitted between the tapered surface of the abutting body and the screw shaft, and even if welding is not performed as described above, the risk of fluid leakage or the like can be further reduced.
Further, since the inner peripheral edge portion of the diaphragm is fastened and fixed in this manner, the fastening and fixing portion is inclined obliquely downward toward the outer peripheral side. Therefore, when the inner peripheral edge of the diaphragm is lowered, the diaphragm can be prevented from being inverted vertically to generate abnormal noise, and the durability of the diaphragm can be improved.
In the diaphragm valve according to the present invention, the diaphragm may be formed in an annular flat plate shape, and an inner peripheral edge portion of the diaphragm may be disposed at an upper position or a lower position than an outer peripheral edge portion of the diaphragm as the joint and the fixing seat are lifted and lowered.
According to this configuration, the inner peripheral edge portion of the diaphragm having the original annular flat plate shape can be forcibly disposed at the upper position or the lower position than the outer peripheral edge portion, and thus, for example, the occurrence of abnormal noise can be further suppressed as compared with the case where the dome-shaped diaphragm having the original shape bulging upward is used.
According to the present invention, a diaphragm valve can be provided that can forcibly operate a diaphragm to achieve a large flow rate and that can be manufactured at a low cost.
Drawings
Fig. 1 is a perspective view showing a diaphragm valve according to an embodiment of the present invention.
Fig. 2 is a vertical sectional view showing an opened state of the diaphragm valve according to the above embodiment.
Fig. 3 is a longitudinal sectional view showing an intermediate state of the diaphragm valve according to the above embodiment.
FIG. 4 is a longitudinal sectional view showing a closed state of the diaphragm valve according to the above embodiment
Fig. 5 is an enlarged schematic view showing a main portion of the diaphragm valve according to the above embodiment in an open state.
Fig. 6 is an enlarged schematic view showing a main part of the diaphragm valve according to the above embodiment in an intermediate state.
Fig. 7 is an enlarged schematic view showing a main portion of the diaphragm valve according to the above embodiment in a closed state.
Detailed Description
[ Structure of the present embodiment ]
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In fig. 1 to 4, the diaphragm valve 1 of the present embodiment is a metal diaphragm valve for controlling the flow rate of various fluids in a semiconductor manufacturing apparatus or the like, and is a large flow rate type valve in which a high Cv value is required. The diaphragm valve 1 is made of metal, and includes a valve housing 10 as a main body, a cover 20 screwed to the valve housing 10, a valve rod 30 screwed to the cover 20 so as to be capable of being lifted and lowered, a joint 40 connected to the valve rod 30 and having a screw shaft 42 along the valve rod 30, a fixing seat 50 screwed to the screw shaft 42, and an annular diaphragm 60 through which the screw shaft 42 is inserted. A handle 70 for rotating the valve rod 30 is attached to the valve rod.
In the following description, the left-right direction of the diaphragm valve 1 is referred to as the X-axis direction, the front-rear direction of the diaphragm valve 1 is referred to as the Y-axis direction, and the up-down direction of the diaphragm valve 1 is referred to as the Z-axis direction. The X, Y, Z axes are mutually orthogonal. In the present embodiment, the vertical and horizontal directions of the diaphragm valve 1 are determined for convenience of explanation, but the vertical and horizontal directions may be different depending on the actual installation direction.
The valve housing 10 has a first flow path 11 on the inlet side into which fluid flows, a second flow path 12 on the outlet side from which fluid flows, and a rising portion 13 forming a chamber 131 that communicates the first flow path 11 with the second flow path 12.
In the present embodiment, the first flow passage 11 is formed in an L-shaped cross section, one end portion in the X-axis direction is opened at a position protruding from the outer peripheral surface 14 of the valve housing 10, the other end portion in the X-axis direction is opened at a substantially central portion on the bottom surface 132 forming the chamber 131, and a valve seat 15 protruding slightly upward from the bottom surface 132 is formed at the opening periphery thereof.
In the present embodiment, the second flow path 12 is formed in a substantially "<" shape in cross section, and an end portion located on one side in the X-axis direction is opened to the bottom surface 132 and the inner peripheral surface 133 forming the chamber 131, and is located on the other side in the X-axis direction than the end portion on the other side of the first flow path 11. The other end portion of the second flow path 12 in the X-axis direction is open at a position protruding from the outer peripheral surface 14 of the valve housing 10.
The rising portion 13 is formed of a cylindrical portion rising in the Z-axis direction from the peripheral edge of the chamber 131, and an internal screw portion 135 to which the lid 20 is screwed is formed in an upper portion 134 of the rising portion 13, and a wall of a lower portion 136 of the rising portion 13 is thicker toward the inner peripheral side than the upper portion 134. An annular segment 137 is formed between the upper portion 134 and the lower portion 136 of the rising portion 13. An annular groove overlapping an annular projection 239 of a diaphragm pressing ring 235 described later in the Z-axis direction is formed in the annular step 137.
The lid body 20 is formed in a tubular shape, and in this embodiment, integrally includes an upper annular lid 21, an intermediate annular lid 22, and a lower annular lid 23, and a diaphragm pressing ring 235 is provided on the lower annular lid 23. In the cap 20, the outer diameter of the intermediate annular cap 22 is larger than the outer diameter of the upper annular cap 21, the outer diameter of the lower annular cap 23 is larger than the outer diameter of the intermediate annular cap 22, and the inner diameter of the lower annular cap 23 is larger than the inner diameters of the upper annular cap 21 and the intermediate annular cap 22.
The indication portion 71 is fitted to the outer peripheral portion 211 of the upper annular cover 21 so as to be rotatable about an axis along the Z-axis direction. An inner peripheral portion of the upper annular cover portion 21 is formed as a female screw portion 212 into which the valve stem 30 is screwed. The indication portion 71 is configured to display an OPEN (OPEN) and a Closed (CLOSE) indication on an upper surface thereof, and the indication is visible from a hole 72 formed in the handle 70. The indication portion 71 is formed to be fitted in a concave-convex manner to the handle 70 at a predetermined portion in the rotation direction, and rotates together with the handle 70 in the fitted state.
The inner peripheral portion 222 of the intermediate annular cover 22 is in sliding contact with the valve stem 30 that can be lifted and lowered in the Z-axis direction.
The outer peripheral portion of the lower annular cover portion 23 is formed as an external screw portion 231 screwed with the upper portion 134 of the rising portion 13. The inner diameter of the inner peripheral portion 232 of the lower annular cover 23 is larger than the outer diameter of the joint 40. The diaphragm pressing ring 235 is provided on the lower annular cover 23.
The diaphragm pressing ring 235 includes a cylindrical portion 236 disposed between the inner peripheral portion 232 and the joint 40, and a hollow circular plate-shaped pressing ring portion 237 extending from a lower end of the cylindrical portion 236 to an outer peripheral side. The lower surface 238 (see fig. 5) of the pressing ring portion 237 is inclined obliquely upward from the outer peripheral side to the inner peripheral side (joint 40 side). An annular projection 239 protruding downward is formed on the lower portion of the outer peripheral edge of the diaphragm pressing ring 235, and the male screw 231 of the lower annular cover 23 is screwed into the female screw 135 of the valve housing 10, whereby the outer peripheral edge 61 (screw-in type fixation in the present embodiment) of the diaphragm 60 is mechanically fastened and fixed between the annular projection 239 and the annular segment 137 of the rising portion 13. Here, the annular projection 239 of the diaphragm pressing ring 235 provided on the cover 20 overlaps the groove portion in the annular segment 137 of the valve housing 10 in the Z-axis direction, and sandwiches the outer peripheral edge portion 61 of the diaphragm 60 between the annular segment 137. Accordingly, the outer peripheral edge portion 61 of the diaphragm 60 is fastened and fixed by the valve housing 10 and the cover 20 so that the diaphragm 60 is inclined upward toward the joint 40 side. The outer peripheral edge 61 of the diaphragm 60 is not welded to the annular projection 239 and the annular segment 137.
The valve stem 30 extends in the Z-axis direction and has a stem upper portion 31 and a stem lower portion 32, the stem upper portion 31 has an external screw portion 311 formed on an outer peripheral portion thereof to be screwed with the internal screw portion 212 of the upper annular cover portion 21, and an outer peripheral portion of the stem lower portion 32 is slidably contacted in a vertically movable manner with respect to an inner peripheral portion 222 of the intermediate annular cover portion 22, and in this embodiment, one O-ring is fitted to an outer peripheral portion of the stem lower portion 32. A handle 70 is attached to the upper end 33 of the valve rod 30, and a joint 40 is attached to the lower end 34 thereof.
The joint 40 includes a joint body 41 and an abutment 45 (piece), the joint body 41 includes a screw shaft 42 and a recess 43, and the abutment 45 is configured to allow the screw shaft 42 to be rotatably inserted through the joint body 41 and abut against the diaphragm 60.
The joint body 41 is formed into a short-sized cylindrical body, except for the screw shaft 42 and the recess 43. The screw shaft 42 extends downward from the lower surface of the short cylindrical body, and has an external thread formed on its outer peripheral surface. The screw shaft 42 is disposed on a rotation axis line along the Z axis direction of the valve stem 30. The recess 43 is opened in the upper surface of the short cylindrical body, and the lower end 34 of the valve stem 30 is rotatably fitted. The joint main body 41 has a larger outer diameter size than the outer diameter size of the valve stem 30.
The contact body 45 is formed of a metal annular plate. As shown in fig. 5, the contact body 45 has an upper surface 451, a lower surface 452, an inner peripheral surface 453, and an outer peripheral surface 454, and the lower surface 452 constitutes a planar receiving surface for receiving the diaphragm 60. As shown in fig. 5 to 7, a tapered surface 455 is formed in the contact body 45, continuous with the lower surface 452 and the inner peripheral surface 453, and inclined obliquely upward toward the screw shaft 42 side. Further, a convex curved surface 456 is formed on the contact body 45 so as to be continuous with the lower surface 452 (outer periphery of the receiving surface) and the outer peripheral surface 454, and so as to be convex curved toward the outer peripheral side. The outer diameter of the contact body 45 is the same as the outer diameter of the joint body 41.
A seal ring 51 capable of abutting against the valve seat 15 is attached to the holder 50, and a screw hole 52 is formed in the holder 50, and an internal thread that is screwed with the external thread of the screw shaft 42 is formed in the inner peripheral surface of the screw hole 52. The screw hole 52 is opened at an upper surface 53 of the fixing base 50. The upper surface 53 of the fixed seat 50 is inclined obliquely downward from the screw shaft 42 side (inner peripheral side) toward the rising portion 13 side (outer peripheral side) and is formed in the shape of the diaphragm 60 when rising along the valve stem 30. The corner 54 where the upper surface 53 and the screw hole 52 are continuous is formed at an acute angle smaller than 90 ° and is disposed so as to overlap the tapered surface 455 in the Z-axis direction. Here, the inner peripheral edge 62 of the diaphragm 60 is pressed upward by the corner 54 and its vicinity, and is in contact with the contact body 45 at a position on the outer peripheral side of the corner 54. Therefore, the inner peripheral edge 62 of the diaphragm 60 is mechanically fastened and fixed (screwed-in fixation in the present embodiment) so that the diaphragm 60 is inclined obliquely downward toward the outer peripheral side. The inner peripheral edge 62 of the diaphragm 60 is not welded to any one of the joint 40 and the holder 50.
The diaphragm 60 is made of metal, has a circular flat plate shape as it is, and is elastically deformable in the Z-axis direction. The outer peripheral edge 61 of the diaphragm 60 is attached by screwing the cover 20 to the valve housing 10, and thus the diaphragm 60 is mechanically fastened and fixed between the valve housing 10 and the cover 20 without welding so as to be inclined upward toward the joint 40 side. The inner peripheral edge 62 of the diaphragm 60 is attached by screwing the fixing base 50 to the joint 40, and thus the diaphragm 60 is mechanically fastened and fixed between the joint 40 and the fixing base 50 without welding so as to incline downward toward the outer peripheral side. The fastening force to the outer peripheral edge portion 61 and the inner peripheral edge portion 62 of the diaphragm 60 is appropriately set in accordance with the size within a range where no fluid leakage occurs and excessive crushing of the diaphragm does not occur. The diaphragm 60 divides the space of the chamber 131.
The opening and closing operation of the diaphragm valve 1 will be described below.
Fig. 2 and 5 show the open state of the diaphragm valve 1, fig. 3 and 6 show the intermediate state of the diaphragm valve 1, and fig. 4 and 7 show the closed state of the diaphragm valve 1. In the open state, the seal ring 51 of the fixed seat 50 is disposed to be spaced upward from the valve seat 15 of the valve housing 10, and the first flow path 11 and the second flow path 12 communicate with each other via the space of the chamber 131. In the intermediate state, the fixed seat 50 is disposed closer to the valve seat 15 than in the open state, and the space of the chamber 131 throttles the flow path that communicates the first flow path 11 and the second flow path 12. In the closed state, the seal ring 51 of the holder 50 contacts the valve seat 15 to block the first flow path 11 and the second flow path 12.
[ Closing action ]
First, in the diaphragm valve 1 in the open state shown in fig. 2 and 5, the handle 70 is rotated about the axis of the valve stem 30, and the valve stem 30 is rotated. The valve stem 30 is lowered by this rotation, and the joint 40 and the holder 50 are not lowered rotationally, and the abutting body 45 of the joint 40 presses down the inner peripheral edge portion 62 of the diaphragm 60, so that the diaphragm valve 1 is brought into the closed state shown in fig. 4 and 7 through the intermediate state shown in fig. 3 and 6. In the intermediate state of fig. 6, the position of the inner peripheral edge 62 is at a substantially equal height position (up-down position) relative to the position of the outer peripheral edge 61, and in the closed state of fig. 7, the inner peripheral edge 62 is disposed at a lower position relative to the outer peripheral edge 61. When the position of the inner peripheral edge 62 in the intermediate state is taken as the reference position, the position of the inner peripheral edge 62 is arranged at a lower position within a range of less than 1mm from the reference position in the closed state. In the intermediate state and the closed state, the abutting body 45 is disposed at a position protruding downward from the inner peripheral portion of the pressing ring portion 237 of the diaphragm pressing ring 235. In the intermediate state of fig. 6 and the closed state of fig. 7, the lower surface 452 of the abutment 45 receives the inner peripheral edge 62 of the diaphragm 60 from above, and the convex curved surface 456 can abut against the diaphragm 60 so that stress concentration does not occur in the diaphragm 60. The diaphragm 60 is fastened and fixed uniquely as described above by the outer peripheral edge portion 61 and the inner peripheral edge portion 62, whereby the outer peripheral edge portion 61 is inclined obliquely upward toward the inner peripheral side in the intermediate state and the closed state, and the intermediate portion on the inner peripheral edge portion 62 side is inclined obliquely downward toward the inner peripheral side than the outer peripheral edge portion 61, and the inclination of the inner peripheral edge portion 62 on the inner peripheral side is more gentle than the intermediate portion. By forcibly bending the diaphragm 60 in a unique shape in this way, it is difficult to emit such abnormal sounds as a carbody or the like from the diaphragm 60 when the diaphragm valve 1 is operated to the open state and the closed state. Further, since the corner 54 is disposed so as to overlap the tapered surface 455 in the Z-axis direction, the inner peripheral edge 62 of the diaphragm 60 can be firmly fastened and fixed by the abutting body 45 and the inner peripheral portion of the fixing base 50 without welding. In the present embodiment, the forced deformation of the diaphragm 60 based on the rotation of the handle 70 at the time of closing the flow path is performed within a range in which the diaphragm 60 can be elastically deformed without being plastically deformed. By limiting the deformation to this range, for example, the durability of the separator 60 can be suppressed from being lowered by plastic deformation.
In this way, the fixed seat 50 of the diaphragm valve 1 contacts the valve seat 15, and closes the gap between the first flow path 11 and the second flow path 12.
[ Opening action ]
First, in the diaphragm valve 1 in the closed state shown in fig. 4 and 7, the handle 70 is rotated around the axis of the valve stem 30 in the reverse direction, and the valve stem 30 is rotated in the reverse direction. The valve stem 30 is raised by this rotation, the joint 40 and the holder 50 are raised without rotation, the holder 50 presses the inner peripheral edge 62 of the diaphragm 60 upward, and the diaphragm valve 1 is in the intermediate state shown in fig. 3 and 6, and is forced to be upward beyond the self-recovery of the diaphragm 60, thereby bringing the valve to the open state shown in fig. 2 and 5. In this open state, the diaphragm 60 is greatly separated from the valve seat 15 as compared with the case where the diaphragm 60 is self-recovered upward, and therefore, the communication area between the first flow path 11 and the second flow path 12 can be enlarged, and further, a larger flow volume can be achieved. In the present embodiment, the forced deformation of the diaphragm 60 based on the rotation of the handle 70 when opening the flow path is performed within a range in which the diaphragm 60 can be elastically deformed without being plastically deformed. By limiting the deformation to this range, for example, the durability of the separator 60 can be suppressed from being lowered by plastic deformation. In the open state of fig. 5, the position of the inner peripheral edge 62 is disposed at an upper position with respect to the position of the outer peripheral edge 61. In the open state, the lower surface 452 of the contact body 45 is disposed at a vertical position approximately along the inner peripheral portion of the pressing ring portion 237 of the diaphragm pressing ring 235, and the upper surface 53 of the holder 50 receives the inner peripheral portion 62 of the diaphragm 60 from below. In the open state, the diaphragm 60 has a substantially dome shape inclined obliquely upward from the outer peripheral edge portion 61 to the inner peripheral edge portion 62. When the position of the inner peripheral edge 62 in the intermediate state is taken as the reference position, the position of the inner peripheral edge 62 is arranged at an upward position within a range of 1 to 2mm from the reference position in the open state.
In this way, in the diaphragm valve 1, the fixed seat 50 is separated from the valve seat 15 to communicate the first flow path 11 with the second flow path 12.
As described in the diaphragm valve 1 of the present embodiment, the inventors have invented a diaphragm valve 1 having both stroke, sealing property, and durability by mechanically fixing the diaphragm 60 to the joint 40 without welding the diaphragm 60 to the joint 40 and mechanically analyzing the shape of the member of the diaphragm 60.
[ Effect of the present embodiment ]
In the present embodiment, since the diaphragm valve 1 is mechanically fastened and fixed particularly between the valve housing 10 and the cover 20 at the outer peripheral edge portion 61 of the diaphragm 60 and between the joint 40 and the fixed seat 50 at the inner peripheral edge portion 62 of the diaphragm 60, the diaphragm 60 can be forcibly lifted and lowered in accordance with the lifting and lowering of the valve stem 30, for example, compared with the case of the diaphragm valve having the diaphragm valve in which the flow rate is regulated by self-recovery of the diaphragm as described above, the flow path can be opened particularly beyond self-recovery of the diaphragm 60, and further large flow can be achieved. Further, since both the outer peripheral edge portion 61 and the inner peripheral edge portion 62 of the diaphragm 60 and the like are mechanically fastened and fixed, it is not necessary to weld the diaphragm 60 to the joint 40 or the like, and the manufacturing cost of the diaphragm valve 1 can be reduced.
In the present embodiment, in particular, since the outer diameter of the abutting body 45 is set to be the same as the outer diameter of the joint main body 41, friction between the diaphragm 60 and the joint 40 and between the fixing base 50 can be reduced by the fixing base 50 and the abutting body 45 rotating together with the diaphragm 60 when the fixing base 50 is screwed to the screw shaft 42 of the joint main body 41. Further, since the outer diameter of the abutting body 45 is set to be the same as the outer diameter of the joint body 41, the abutting area between the abutting body 45 and the diaphragm 60 can be increased within a range where the abutting body 45 does not interfere with the cover 20 or the like when the joint 40 is lifted and lowered together with the valve stem 30. Accordingly, the diaphragm 60 receiving the pressure of the fluid flowing in the valve housing 10 can be received in the large contact area of the contact body 45.
In the present embodiment, in particular, the valve housing 10 and the cover 20 are fastened and fixed such that the diaphragm 60 is inclined upward toward the joint 40, and the abutting body 45 has the lower surface 452 that is a planar receiving surface for receiving the diaphragm 60 and the convex curved surface 456 that is continuous with the outer periphery of the lower surface 452, so that when the lower surface 452 of the abutting body 45 is disposed below the fastening and fixing position of the outer peripheral edge 61 of the diaphragm 60 by lowering the joint 40, the portion on the inner peripheral side is inclined upward toward the joint 40 than the portion on the outer peripheral side of the diaphragm 60 where the outer peripheral edge 61 is fastened and fixed so as to be inclined upward toward the joint 40, but the occurrence of stress concentration on the diaphragm 60 can be suppressed by forming the convex curved surface 456 on the abutting body 45.
In the present embodiment, in particular, since the tapered surface 455 inclined obliquely upward toward the screw shaft 42 side is formed in the abutting body 45, and the corner 54 continuous with the screw hole 52 on the upper surface 53 of the fixed seat 50 is formed at an acute angle and is disposed so as to overlap the tapered surface 455 in the Z-axis direction, the inner peripheral edge 62 of the fixed diaphragm 60 can be firmly fastened and fixed so that the corner 54 of the fixed seat 50 is fitted between the tapered surface 455 of the abutting body 45 and the screw shaft 42, and even if the inner peripheral edge 62 is not welded or the like, the risk of fluid leakage or the like can be further reduced. Further, since the inner peripheral edge 62 of the diaphragm 60 is fastened and fixed in this manner, the fastened and fixed portion is inclined obliquely downward toward the outer peripheral side. Therefore, when the inner peripheral edge 62 of the diaphragm 60 is lowered, the diaphragm 60 can be prevented from being turned upside down to generate abnormal noise, and the durability of the diaphragm 60 can be improved.
In the present embodiment, the diaphragm 60 is formed in an annular flat plate shape, and the inner peripheral edge portion 62 of the diaphragm 60 is disposed at an upper position or a lower position than the outer peripheral edge portion 61 of the diaphragm 60 as the joint 40 and the fixing base 50 are lifted, and therefore, the inner peripheral edge portion 62 of the diaphragm 60 formed in an annular flat plate shape is forcibly disposed at the upper position or the lower position than the outer peripheral edge portion 61, and therefore, for example, occurrence of abnormal noise can be further suppressed as compared with a case where a dome-shaped diaphragm formed by bulging upward in an original shape is used.
Modification example
In the above embodiment, the outer diameter of the contact body 45 is the same as the outer diameter of the joint body 41, but the present invention is not limited thereto, and may be, for example, a smaller size than the outer diameter of the joint body 41, and the outer diameter of the contact body 45 may be a larger size than the outer diameter of the joint body 41 as long as the lifting operation of the joint body 41 is not hindered.
In the above embodiment, the outer diameter of the holder 50 is larger than the outer diameter of the joint 40, but the present invention is not limited thereto, and the outer diameter may be equal to or smaller than the outer diameter.
In the above embodiment, the joint 40 is configured such that the abutting body 45 is rotatably provided with respect to the joint main body 41, and the abutting body 45 and the diaphragm 60 are rotated together when the fixing base 50 is screwed to the screw shaft 42, so that friction with the diaphragm 60 can be suppressed, but the diaphragm valve 1 can be configured regardless of this, and the abutting body 45 may be integrally formed with the joint main body 41. The integrally formed joint 40 has a portion (non-rotatable) corresponding to the abutting body 45.
In the above embodiment, the inner peripheral edge portion 62 of the diaphragm 60 is firmly fastened and fixed by the tapered surface 455 of the abutting body 45 and the acute angle corner portion 54 of the fixing base 50, but such a tapered surface 455 and the acute angle corner portion 54 may not be provided, and the inner peripheral edge portion 62 of the diaphragm 60 may not be fastened and fixed by welding.
In the above embodiment, the valve housing 10 and the cover 20 fasten and fix the outer peripheral edge portion 61 of the diaphragm 60 so that the diaphragm 60 is inclined upward toward the joint 40, and even when the inner peripheral edge portion 62 of the diaphragm 60 is disposed at a lower position with respect to the position of the outer peripheral edge portion 61 during the operation of the diaphragm 60, abnormal noise generated by the diaphragm 60 turning can be suppressed, but when it is not necessary to suppress such abnormal noise, the valve housing 10 and the cover 20 do not fasten and fix the outer peripheral edge portion 61 of the diaphragm 60 in the above orientation, and for example, the diaphragm 60 can fasten and fix in the horizontal orientation.
In the above embodiment, the convex curved surface 456 is formed in the contact body 45, but in the case where there is no problem in the operation of the diaphragm 60 even if there is no convex curved surface 456, the convex curved surface 456 may be omitted.
In the above embodiment, the case where the diaphragm valve 1 is a large-flow metal diaphragm valve used in a semiconductor manufacturing apparatus or the like has been described, but the diaphragm valve can be used in the liquid crystal market in addition to the semiconductor market.
Description of the reference numerals
Diaphragm valve; valve box (body); first flow path; the valve comprises a second flow path, a first standing part, a second standing part, a third standing part, a fourth standing part, a third standing part, a fourth standing part, a third standing part, a third, a third stand, a third stands, a third stand, a third, and a third, and a is, a is, and, is, a is, a is, and is a is a pressing, and is compression, a compression, and is compression, a compression, compression is compression, compression is compression, compression a compression is compression, compression a.
Claims (5)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022-144408 | 2022-09-12 | ||
| JP2022144408A JP7220830B1 (en) | 2022-09-12 | 2022-09-12 | diaphragm valve |
| PCT/JP2023/014673 WO2024057597A1 (en) | 2022-09-12 | 2023-04-11 | Diaphragm valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN119856009A true CN119856009A (en) | 2025-04-18 |
Family
ID=85174617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202380064950.8A Pending CN119856009A (en) | 2022-09-12 | 2023-04-11 | Diaphragm valve |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7220830B1 (en) |
| KR (1) | KR20250067825A (en) |
| CN (1) | CN119856009A (en) |
| WO (1) | WO2024057597A1 (en) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01116275U (en) * | 1988-02-01 | 1989-08-04 | ||
| JPH0449423Y2 (en) * | 1988-08-08 | 1992-11-20 | ||
| JP3469331B2 (en) * | 1994-10-17 | 2003-11-25 | 株式会社フジキン | Seal structure of the inner peripheral edge of a metal diaphragm |
| US5865423A (en) * | 1997-07-11 | 1999-02-02 | Parker Intangibles, Inc. | High flow diaphragm valve |
| JP4220542B2 (en) | 2006-10-25 | 2009-02-04 | 横浜ゴム株式会社 | Pneumatic tire |
| JP6033912B2 (en) * | 2015-04-17 | 2016-11-30 | 株式会社キッツエスシーティー | Diaphragm valve |
| KR102561519B1 (en) * | 2018-12-18 | 2023-08-01 | 엔테그리스, 아이엔씨. | Valves and valve elements for controlling fluid flow |
-
2022
- 2022-09-12 JP JP2022144408A patent/JP7220830B1/en active Active
-
2023
- 2023-04-11 KR KR1020257008679A patent/KR20250067825A/en active Pending
- 2023-04-11 CN CN202380064950.8A patent/CN119856009A/en active Pending
- 2023-04-11 WO PCT/JP2023/014673 patent/WO2024057597A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024057597A1 (en) | 2024-03-21 |
| JP7220830B1 (en) | 2023-02-10 |
| JP2024039790A (en) | 2024-03-25 |
| KR20250067825A (en) | 2025-05-15 |
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