CN119804481A - Detection system and integrated testing and coding machine - Google Patents
Detection system and integrated testing and coding machine Download PDFInfo
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- CN119804481A CN119804481A CN202411767271.XA CN202411767271A CN119804481A CN 119804481 A CN119804481 A CN 119804481A CN 202411767271 A CN202411767271 A CN 202411767271A CN 119804481 A CN119804481 A CN 119804481A
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Abstract
The invention relates to a detection system and a detection and braiding integrated machine, which comprises an optical detection device, a suction device and a distance changing mechanism, wherein the optical detection device comprises an imaging mechanism, a plurality of groups of reflection mechanisms are all arranged in a view field of the imaging mechanism, each group of reflection mechanisms correspondingly form a detection position for placing a detected element, a light source mechanism is used for providing illumination light for the detected element, each reflection mechanism is used for reflecting light rays from at least two sides of the detected element positioned at the corresponding detection position to the imaging mechanism, the imaging mechanism is used for receiving the reflected light rays from the plurality of groups of reflection mechanisms to image and detect a plurality of detected elements, the suction device comprises a distance changing mechanism and a plurality of suction nozzle modules for taking and placing the detected elements on a material tray, the suction nozzle modules are connected with the distance changing mechanism, and the distance changing mechanism is used for adjusting the distance between the suction nozzle modules so that the detected elements sucked by the suction nozzle modules are placed in the detection position in a one-to-one correspondence manner. Compared with the condition that only one tested element can be tested at a time in the prior art, the detection time is saved, and the detection efficiency is improved.
Description
Technical Field
The invention relates to the technical field of semiconductor detection, in particular to a detection system and a testing and braiding integrated machine.
Background
The chip is used as a core component of an electronic product, and the performance and the quality of the chip directly influence the performance and the service life of the product. Since the chip has small size and multiple functions, various problems are easy to occur in the process of processing and production, and the problems seriously affect the electrical performance, reliability and service life of the chip, the appearance detection of the finished product of the chip is an indispensable step.
In a conventional inspection system, a gripping device grips one chip at a time to an optical inspection device, and an imaging mechanism of the optical inspection device photographs one surface of the chip at a time. The grabbing device rotates the chip for a plurality of times, and the imaging mechanism of the optical detection device performs imaging for a plurality of times, so that patterns of all the surfaces of the chip can be shot and obtained, and at the moment, the detection of one chip is completed. This arrangement takes much time and has low detection efficiency.
Disclosure of Invention
In view of the above, it is necessary to provide a detection system and a test and braiding integrated machine capable of improving detection efficiency.
A detection system, comprising:
an optical detection device comprising:
An imaging mechanism;
The reflection mechanisms are arranged in the view field of the imaging mechanism, and each group of reflection mechanisms corresponds to a detection position for placing a tested element;
The light source mechanism is used for providing illumination light for the tested element;
Each reflecting mechanism is used for reflecting light rays from at least two sides of the tested element positioned at the corresponding detection position to the imaging mechanism, and the imaging mechanism is used for receiving the reflected light rays from a plurality of groups of reflecting mechanisms so as to image and detect a plurality of tested elements;
The suction device comprises a distance changing mechanism and a plurality of suction nozzle modules for taking and placing the tested components on the tray, wherein the suction nozzle modules are connected with the distance changing mechanism, the distance changing mechanism is used for adjusting the distance between the suction nozzle modules so that the suction nozzle modules can place the tested components sucked by the suction nozzle modules in the detection positions for detection in a one-to-one correspondence manner, and
And the controller is used for controlling the suction device to take, place and move the tested element and controlling the optical detection device to image the tested element when the tested element is positioned in the detection position.
In one embodiment, the controller may control the pitch-changing mechanism to adjust the pitch between the nozzle modules based on the pitch of the pit on the tray and the pitch between the detection positions, so that the pitch of the nozzle modules is adapted to the pitch of the pit when the detected component is picked and placed on the tray, and is adapted to the pitch of the detection positions when the detected component is placed on the detection positions.
In one embodiment, the reflecting mechanism comprises a reflecting prism assembly, the reflecting prism assembly is adjacent between two adjacent detection positions, the reflecting prism assembly is used for reflecting the illumination light emitted by the light source mechanism to the side surfaces of two corresponding adjacent detected elements and reflecting the light from the side surfaces of the two corresponding adjacent detected elements to the imaging mechanism so as to image the side surfaces of the detected elements;
and the distance between two adjacent detection positions is larger than or equal to the width of the reflecting prism assembly in the adjacent direction.
In one embodiment, the reflecting prism assembly comprises a first type of reflecting prism which is an isosceles right angle prism, wherein the hypotenuse of the first type of reflecting prism is perpendicular to the optical axis of the imaging mechanism, the two right angle sides of the first type of reflecting prism respectively reflect illumination light emitted by the light source mechanism to the side surfaces of two corresponding adjacent detected elements, and reflect light rays from the side surfaces of the two corresponding adjacent detected elements to the imaging mechanism so as to image a plurality of side surfaces of the detected elements, and the width of the adjacent direction of the reflecting prism assembly is at least the length of the hypotenuse of the first type of reflecting prism;
Or (b)
The reflecting prism assembly comprises at least two second-type reflecting prisms which are arranged in parallel along the adjacent direction, wherein the second-type reflecting prisms are isosceles right-angle prisms, one right-angle edge of each second-type reflecting prism is arranged in parallel with the optical axis of the imaging mechanism, the hypotenuse of each second-type reflecting prism reflects illumination light emitted by the light source mechanism to the side face of the corresponding tested element, and reflects light rays from the side face of the corresponding tested element to the imaging mechanism so as to image a plurality of side faces of the tested element, and the width of the adjacent direction of the reflecting prism assembly is at least the sum of the lengths of the right-angle edges of the two second-type reflecting prisms.
In one embodiment, the reflecting mechanism comprises a plurality of reflecting prisms, and the plurality of reflecting prisms surround the detecting position;
The light source mechanism emits partial illumination light which is reflected to a plurality of sides of the corresponding tested element through a plurality of reflecting prisms, and the reflecting prisms reflect first imaging light from the plurality of sides of the corresponding tested element to the imaging mechanism;
part of illumination light emitted by the light source mechanism is incident to the bottom surface or the top surface of the tested element, and reflected or scattered to form second imaging light to the imaging mechanism;
The imaging mechanism receives the first imaging light and the second imaging light to image a plurality of sides of the element under test and a bottom or top surface of the element under test.
In one embodiment, the reflecting prisms include a first type reflecting prism and a second type reflecting prism which are all isosceles right prisms, and the second type reflecting prism is arranged around the first type reflecting prism to form a plurality of detection positions;
One right-angle side of the second type reflecting prism is arranged in parallel with the optical axis of the imaging mechanism, and the hypotenuse of each second type reflecting prism reflects illumination light emitted by the light source mechanism to the side surface of the corresponding tested element and reflects light rays from the side surface of the corresponding tested element to the imaging mechanism so as to image a plurality of side surfaces of the tested element;
The hypotenuse of the first type reflecting prism is perpendicular to the optical axis of the imaging mechanism, and the two right-angle sides of the first type reflecting prism respectively reflect illumination light emitted by the light source mechanism to the side surface of the corresponding tested element and reflect light rays from the side surface of the corresponding tested element to the imaging mechanism so as to image a plurality of side surfaces of the tested element.
In one embodiment, the imaging mechanism comprises a camera and an object telecentric lens, the field of view of the object telecentric lens corresponds to a plurality of groups of the reflecting mechanisms, and the imaging mechanism is used for simultaneously imaging the side surfaces and the bottom surfaces of a plurality of tested elements;
or alternatively
The imaging mechanism comprises a camera and a non-object space telecentric lens, the field of view of the non-object space telecentric lens corresponds to a plurality of groups of the reflecting mechanisms, and the imaging mechanism is used for respectively imaging the side surfaces and the bottom surfaces of a plurality of tested elements.
In one embodiment, the suction device further comprises a displacement driving mechanism, wherein the displacement driving mechanism is used for driving the suction nozzle module to circulate between the tray pit and the detection position;
The controller is used for controlling the distance changing mechanism to adjust the distance between the suction nozzle modules in the process that the suction nozzle modules circulate between the tray pit position and the detection position.
In one embodiment, the displacement driving mechanism comprises a first suction driving mechanism and a second suction driving mechanism, the second suction driving mechanism is connected with the first suction driving mechanism, and the variable-pitch mechanism is connected with the second suction driving mechanism;
The first suction driving mechanism is used for driving the second suction driving mechanism, the distance changing mechanism and the suction nozzle module to translate along a first direction so as to drive the suction nozzle module to circulate between the tray and the detection position, and the second suction driving mechanism is used for driving the distance changing mechanism and the suction nozzle module to lift along a second direction so as to be close to or far away from the tray or the optical detection device;
the first direction and the second direction intersect.
In one embodiment, the controller is configured to perform at least one cycle of the following control process:
During a first time interval, controlling the suction nozzle module to suck the tested element on the material taking disc and then transferring the tested element to the detection position, controlling the distance changing mechanism to adjust the distance between the suction nozzle modules to be the distance between the detection positions in the transferring process, and ending the first time interval and starting a second time interval when the tested element is positioned in the detection position;
Controlling the camera exposure of the imaging mechanism during a second time interval, collecting the image of the tested element under the illumination light provided by the light source mechanism, ending the second time interval after collecting the image of the tested element and starting a third time interval;
and during a third time interval, controlling the suction nozzle module to transfer the detected element with the image acquisition in the detection position to a tray pit, controlling the distance changing mechanism to adjust the distance between the suction nozzle modules to be the tray pit distance in the transfer process, and ending the third time interval when the detected element is placed in the tray pit.
In one embodiment, the optical detection device further includes a first detection driving mechanism, where the imaging mechanism, the reflection mechanism, and the light source mechanism are all connected to the first detection driving mechanism, and the first detection driving mechanism is configured to drive the imaging mechanism, the reflection mechanism, and the light source mechanism to translate along a third direction so as to be opposite to the suction nozzle module;
And/or
The reflection mechanism, the light source mechanism and the imaging mechanism are sequentially arranged along a second direction, the optical detection device further comprises a second detection driving mechanism, the imaging mechanism is connected with the second detection driving mechanism, and the second detection driving mechanism is used for driving the imaging mechanism to lift along the second direction so as to adjust the relative position of the imaging mechanism and the light source mechanism along the second direction.
In one embodiment, the suction device comprises a plurality of groups of suction nozzle module groups distributed along a third direction, wherein each group of suction nozzle module groups comprises a plurality of suction nozzle modules arranged along a first direction;
The pitch changing mechanism comprises a first pitch changing component and a second pitch changing component, the first pitch changing component is used for adjusting the intervals of a plurality of groups of suction nozzle module groups in the third direction, and the second pitch changing component is used for adjusting the intervals of the suction nozzle modules of each group of suction nozzle module groups in the first direction;
The first direction intersects the third direction.
The utility model provides a survey and compile all-in-one, includes feeding system, braid system and detecting system as above, feeding system is used for carrying the feeding tray, detecting system can detect the measured element on the charging tray that feeding system carried, braid system can snatch the qualified measured element of detection on the charging tray and carry out the braid.
According to the detection system and the testing and braiding integrated machine, when the tested components on the tray are required to be detected, the controller controls the plurality of suction nozzle modules of the suction device to suck the tested components from the tray, and after the suction nozzle modules suck the tested components, the controller can also control the distance-changing mechanism to adjust the distance between the suction nozzle modules, so that the suction nozzle modules can place the sucked tested components in a one-to-one correspondence mode for detection of detection positions. Because the optical detection device is provided with a plurality of detection positions, the detected elements positioned in the detection positions can be simultaneously imaged and detected in the imaging mechanism, and compared with the condition that only one detected element can be detected at a time in the prior art, the optical detection device saves detection time and improves detection efficiency. And each reflection mechanism can reflect light rays from at least two sides of the detected element positioned at the corresponding detection position to the imaging mechanism, so that during detection, at least two sides of each detected element are imaged in the imaging mechanism, and compared with the condition that only one side of the detected element can be detected at a time in the prior art, the detection time is saved, and the detection efficiency is further improved.
Drawings
FIG. 1 is a block diagram of a detection system according to an embodiment of the present application;
FIG. 2 is a block diagram of a part of a structure of a testing and braiding integrated machine according to an embodiment of the present application;
FIG. 3 is a block diagram of another view of the detection system shown in FIG. 1;
FIG. 4 is a block diagram of an optical detection device of the detection system shown in FIG. 1;
FIG. 5 is a schematic diagram of an optical detection device according to another embodiment;
FIG. 6 is a schematic diagram of an optical detection device according to another embodiment;
FIG. 7 is a schematic diagram of a reflective mechanism according to one embodiment;
FIG. 8 is an isometric view of a reflection mechanism of another embodiment;
FIGS. 9 and 10 are schematic diagrams of relative positional adjustment between reflective prisms in one embodiment;
FIG. 11 is an isometric view of a reflection mechanism of yet another embodiment;
FIG. 12 is a schematic diagram showing a positional relationship between a reflecting mechanism and a device under test in one embodiment;
FIG. 13 is a schematic diagram showing a positional relationship between a reflecting mechanism and a device under test in another embodiment;
FIG. 14 is an imaging schematic of an imaging mechanism in one embodiment;
FIG. 15 is a timing diagram of the control of the controller in one embodiment;
FIG. 16 is an isometric view of a suction device of the detection system shown in FIG. 1;
fig. 17 is a schematic structural diagram of a testing and braiding integrated machine according to an embodiment of the present application.
Reference numerals illustrate:
1000. The testing and braiding integrated machine; 100, a detection system; 10, a suction device; the mechanical equipment comprises a first variable-pitch mechanism, a first variable-pitch assembly 111, a first lead screw, a second variable-pitch assembly 112, a second lead screw 1121, a second lead screw 12, a suction nozzle module 13, a first suction driving mechanism 14, a second suction driving mechanism 14, a first suction driving mechanism 20, an optical detection device 21, an imaging mechanism 211, a camera 212, a lens 22, a reflecting mechanism 221, a reflecting prism assembly 222, a first type reflecting prism 223, a second type reflecting prism 23, a light source mechanism 231, an annular light source 232, a coaxial light source 2321, a light-emitting source 2322, a semi-transparent semi-reflecting film 24, an adjusting mechanism 25, a first detection driving mechanism 26, a mounting frame 27, a second detection driving mechanism 28, a light filter 200, a feeding system 201, a first tray separating device 202, a first conveying device 203, a tray conveying device 204, a second tray separating device 205, a second conveying device 300, a first transfer manipulator 400, a first optical detection module 500, a braiding system 501, a rejection manipulator 502, a braiding manipulator 600, a second tray detecting manipulator 600, a second tray 700, a material transporting manipulator 2001, a material pit transporting manipulator.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the invention, whereby the invention is not limited to the specific embodiments disclosed below.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed, mechanically connected, electrically connected, directly connected, indirectly connected through an intervening medium, or in communication between two elements or in an interaction relationship between two elements, unless otherwise explicitly specified. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
Referring to fig. 1 and 2, an embodiment of the present application provides a detection system 100, which includes a suction device 10, an optical detection device 20 and a controller. The controller is used for controlling the suction device 10 to suck the tested element 3000 from the pit 2001 of the tray 2000 and transfer the tested element 3000 to the detection position of the optical detection device 20, and controlling the optical detection device 20 to perform imaging detection on the tested element 3000 located at the detection position. In addition, the controller can control the suction device 10 to put the inspected element 3000 detected by the optical detection device 20 back into the pit 2001 of the tray 2000 again. The suction device 10 is controlled to reciprocate between the tray 2000 and the detection position, so as to realize appearance detection of all the detected elements 3000 on the tray 2000.
Specifically, the tested element 3000 may be a semiconductor chip, or may be other components that need to perform surface appearance detection. Taking the tested element 3000 as a semiconductor chip as an example, the chip may have a square or rectangular cross-section, or may have other similar chip structures, such as a structure in which two square chips are connected together by a communication line, and the chip is commonly packaged with BGA, QFN, FLP, LEAD or other similar packages.
Further, referring to fig. 3 and 4, the optical detection device 20 includes an imaging mechanism 21 and a plurality of sets of reflecting mechanisms 22. The multiple sets of reflecting mechanisms 22 are disposed in the field of view of the imaging mechanism 21, and each set of reflecting mechanisms 22 correspondingly forms a detecting position for placing the tested element 3000. Since the optical detection device 20 includes a plurality of sets of reflection mechanisms 22, each set of reflection mechanisms 22 forms a detection bit, the number of detection bits is plural.
Referring to fig. 5, the optical inspection apparatus 20 further includes a light source mechanism 23, where the light source mechanism 23 is configured to provide illumination light to the inspected element 3000, each of the reflecting mechanisms 22 is configured to reflect light from at least two sides of the inspected element 3000 located at the corresponding inspection position to the imaging mechanism 21, and the imaging mechanism 21 is configured to receive reflected light from the plurality of groups of reflecting mechanisms 22 to image and inspect the plurality of inspected elements 3000. Specifically, the measured element 3000 is generally placed horizontally on the detecting position so that a plurality of sides thereof correspond to the reflecting mechanism 22, a part of the illumination light output by the light source mechanism 23 directly irradiates the bottom surface of the measured element 3000, a part of the illumination light is reflected to each side of the measured element 3000 by the reflecting mechanism 22, the reflecting mechanism 22 reflects the light from each side of the corresponding measured element 3000, and the reflected light can be transmitted to the imaging mechanism 21 after passing through the light source mechanism 23 or directly transmitted to the imaging mechanism 21.
With continued reference to fig. 3, the suction device 10 includes a distance-varying mechanism 11 and a plurality of nozzle modules 12 for picking up and placing the tested components 3000 on the tray 2000, each nozzle module 12 is connected to the distance-varying mechanism 11, and the distance-varying mechanism 11 is used for adjusting the distance between the nozzle modules 12, so that the nozzle modules 12 place the tested components 3000 sucked by the nozzle modules in a one-to-one correspondence to the detection position.
Here, the suction nozzle module 12 places the tested components 3000 sucked by the suction nozzle module in a one-to-one correspondence to the test positions, which means that only one tested component 3000 can be placed at each test position. The number of the suction nozzle modules 12 and the number of the detection bits may be the same or different, and when the number of the suction nozzle modules 12 and the number of the detection bits are the same, each suction nozzle module 12 corresponds to one detection bit, and the tested component 3000 sucked by the suction nozzle module 12 is placed in the corresponding detection bit. When the number of the suction nozzle modules 12 is greater than the number of the detection positions, the detected components 3000 sucked by part of the suction nozzle modules 12 are placed in the detection positions for detection, the detected components 3000 may or may not be sucked by the rest of the suction nozzle modules 12, and the detected components 3000 may be placed next time when the rest of the suction nozzle modules 12 suck the detected components 3000. When the number of the nozzle modules 12 is smaller than the number of the inspection positions, only a part of the inspection positions have the tested components 3000 placed therein for the test.
In the detection system 100 provided by the embodiment of the application, when the detected element 3000 on the tray 2000 needs to be detected, the controller controls the plurality of suction nozzle modules 12 of the suction device 10 to suck the detected element 3000 from the tray 2000, and when the suction nozzle modules 12 suck the detected element 3000, the controller can also control the distance changing mechanism 11 to adjust the distance between the suction nozzle modules 12, so that the suction nozzle modules 12 place the detected elements 3000 sucked by the suction nozzle modules in a one-to-one correspondence to detection position. Since the optical detection device 20 has a plurality of detection bits, the detected elements 3000 located in the plurality of detection bits can be simultaneously imaged and detected in the imaging mechanism 21, so that the detection time is saved and the detection efficiency is improved compared with the case that only one detected element 3000 can be detected at a time in the prior art. And, each reflection mechanism 22 can reflect the light from at least two sides of the tested element 3000 located at the corresponding detection position to the imaging mechanism 21, so that during detection, at least two sides of each tested element 3000 are imaged in the imaging mechanism 21, compared with the condition that only one side of the tested element 3000 can be detected at a time in the prior art, the detection time is saved, and the detection efficiency is further improved.
Generally, the tray 2000 is a standard, and the spacing between the pits 2001 on the tray 2000 is kept constant for a specific size of the element 3000 to be tested. The arrangement of the pitch between the detection positions of the optical detection device 20 needs to ensure that the detection positions are all located under the field of view of the imaging mechanism 21 and do not affect the imaging effect of the respective devices 3000 to be detected, and therefore the pitch between the detection positions and the pitch between the pan pits (pitch between the pits 2001 on the pan 2000) are generally different.
In some embodiments, the controller can control the pitch-changing mechanism 11 to adjust the pitch between the nozzle modules 12 based on the pitch of the pits 2001 on the tray 2000 and the pitch between the detection positions, so that the pitch of the nozzle modules 12 is adapted to the pitch of the pits 2001 on the tray 2000 when the tested components 3000 are taken and placed on the tray 2000, and to the pitch of the detection positions when the tested components are placed on the detection positions. By means of the arrangement, when the suction nozzle module 12 picks up and discharges materials on the tray 2000, the suction nozzle module 12 can be guaranteed to suck the tested element 3000 in the corresponding pit 2001 and place the tested element 3000 in the corresponding pit 2001, and when the tested element 3000 needs to be detected, the suction nozzle module 12 can accurately place the tested element 3000 in the corresponding detection position for detection, and detection effect is guaranteed.
The specific configuration of the reflecting mechanism 22 is not exclusive and a reflecting prism and/or mirror may be selected to reflect light. In one embodiment, referring to fig. 6, the reflecting mechanism 22 includes a reflecting prism assembly 221, the reflecting prism assembly 221 is adjacent between two adjacent detecting positions, and the reflecting prism assembly 221 is used for reflecting the illumination light emitted by the light source mechanism 23 to the sides of two corresponding adjacent detected elements 3000, and reflecting the light from the sides of two corresponding adjacent detected elements 3000 to the imaging mechanism 21 to image the sides of the detected elements 3000. Wherein, the interval between two adjacent detection positions is larger than or equal to the width of the adjacent direction (left-right direction in fig. 6) of the reflecting prism assembly 221. In this way, when the suction nozzle module 12 places the tested component 3000 at the test position, the reflection mechanism 22 does not interfere with the tested component 3000, so as to facilitate the tested component 3000 to be placed at the test position for testing.
In some embodiments, with continued reference to fig. 5, the reflecting prism assembly 221 includes a first type of reflecting prism 222 that is an isosceles right angle prism, the hypotenuse of the first type of reflecting prism 222 is disposed perpendicular to the optical axis of the imaging mechanism 21, and two right angle sides of the first type of reflecting prism 222 respectively reflect the illumination light emitted by the light source mechanism 23 to the sides of the corresponding two adjacent measured elements 3000, and reflect the light from the sides of the corresponding two adjacent measured elements 3000 to the imaging mechanism 21 to image multiple sides of the measured elements 3000. The width of the reflecting prism assembly 221 in the adjoining direction is at least the hypotenuse length of the first type of reflecting prism 222. At this time, the reflecting prism assembly 221 is not required to be formed in a spliced manner, and is easy to be disposed.
In other embodiments, with continued reference to fig. 6, the reflecting prism assembly 221 includes at least two second reflecting prisms 223 disposed in parallel along an adjacent direction, the second reflecting prisms 223 are isosceles right-angle prisms, one right-angle side of the second reflecting prism 223 is disposed parallel to the optical axis of the imaging mechanism 21, the hypotenuse of each second reflecting prism 223 reflects the illumination light emitted from the light source mechanism 23 to the side of the corresponding measured element 3000, and reflects the light from the side of the corresponding measured element 3000 to the imaging mechanism 21 to image multiple sides of the measured element 3000, and the width of the adjacent direction of the reflecting prism assembly 221 is at least the sum of the right-angle side lengths of the two second reflecting prisms 223. At this time, the reflection prism assembly 221 is formed by assembling a plurality of second-type reflection prisms 223, and the structure of the reflection prism assembly 221 can be flexibly adjusted.
In some embodiments, the reflective mechanism 22 includes a plurality of reflective prisms that surround to form the detection bit. The part of the illumination light emitted from the light source mechanism 23 is reflected to the plurality of sides of the corresponding measured element 3000 by the plurality of reflecting prisms, the reflecting prisms reflect the first imaging light from the plurality of sides of the corresponding measured element 3000 to the imaging mechanism 21, the part of the illumination light emitted from the light source mechanism 23 is incident to the bottom surface or the top surface of the measured element 3000 and reflected or scattered to form the second imaging light to the imaging mechanism 21, and the imaging mechanism 21 receives the first imaging light and the second imaging light to image the plurality of sides of the measured element 3000 and the bottom surface or the top surface of the measured element 3000. In this way, the side faces and the bottom face (or top face) of each test element 3000 can be imaged at the same time, and when the test element 3000 is a rectangular chip, that is, 5 faces of 4 side faces and the bottom face (or top face) of each chip are imaged at the same time, so that defect detection is performed on the test element 3000.
The reflection prism includes a first type reflection prism 222 and a second type reflection prism 223, and the second type reflection prism 223 is disposed around the first type reflection prism 222 to form at least two detection positions. For example, three second-type reflecting prisms 223 and one first-type reflecting prism 222 may be used, and disposed perpendicularly to each other to form a detection position for placing the tested element 3000, and the detection position may be a square or rectangular area. The specific size of each reflecting prism is not unique, and the size of the reflecting prism may be changed according to the different sizes and shapes (e.g., square or rectangle) of the measured element 3000, so as to image the sides and the bottom (or top) of the measured element 3000 with different sizes.
The combination of the first type reflecting prism 222 and the second type reflecting prism 223 in the reflecting mechanism 22 is not exclusive, and may be combined in various ways (m×n) in combination with the field of view of the imaging mechanism 21. Referring to fig. 7, the reflecting mechanism 22 may be designed to have a structure of 2×2, two first type reflecting prisms 222 are disposed, 6 second type reflecting prisms 223 are disposed around each first type reflecting prism 222, and a first detecting position A1, a second detecting position A2, etc. are formed respectively, so that four detected elements 3000 can be detected simultaneously, and when the size of the detected element 3000 is smaller, the reflecting mechanism 22 may be designed to have a structure of 2*3 (see fig. 8). Four first-type reflecting prisms 222 are provided, second-type reflecting prisms 223 are provided around each of the first-type reflecting prisms 222, 6 test elements 3000 are simultaneously tested, and so on.
Specifically, a reflection film may be coated on the hypotenuse of the second type reflection prism 223 for reflecting light, and on both right-angle sides of the first type reflection prism 222 for reflecting light. A part of illumination light emitted by the light source mechanism 23 irradiates on the hypotenuse of the second type reflecting prism 223 and the two right-angle sides of the first type reflecting prism 222, the second type reflecting prism 223 and the first type reflecting prism 222 reflect light to the side face of the corresponding measured element 3000, the light is reflected by the side face of the measured element 3000, returns to the light source mechanism 23 along the original path by the second type reflecting prism 223 and the first type reflecting prism 222, and is transmitted to the imaging mechanism 21 for imaging by the light source mechanism 23.
With continued reference to fig. 7 and 8, the optical inspection device 20 further includes an adjusting mechanism 24 connected to each of the reflection prisms, where the adjusting mechanism 24 is used to mount the reflection prisms and adjust the relative positions of the reflection prisms to accommodate the measured components 3000 with different sizes. Specifically, the adjustment mechanism 24 may be designed specifically as a mechanical structure that mounts the first-type reflection prism 222 and the second-type reflection prism 223, and adjusts the relative position between the first-type reflection prism 222 and the second-type reflection prism 223. Referring to fig. 9 and 10, taking the case that the first type reflecting prism 222 and the second type reflecting prism 223 are disposed along the X axis and the Y axis in a mutually perpendicular manner, the adjusting mechanism 24 may control the first type reflecting prism 222 and the second type reflecting prism 223 to move along the X axis or the Y axis, so as to adjust the relative positions between the first type reflecting prism 222 and the second type reflecting prism 223, and change the area of the detection bit, so as to adapt to detecting the detected elements 3000 with various sizes.
The structure of the light source mechanism 23 is also not exclusive, and the light source mechanism 23 may include, in particular, an annular light source 231 that provides dark field illumination light, and/or an on-axis light source 232 that provides bright field illumination light. The annular light source 231 can provide low-angle uniform dark field illumination light, so that the information of the surface height change of the measured element 3000 can be obtained, and the light emitted by the annular light source 231 is reflected by the reflecting prism after being scattered by the side surface of the measured element 3000, and is imaged by the imaging mechanism 21.
With continued reference to fig. 5, the coaxial light source 232 may provide bright-field illumination light, where the coaxial light source 232 specifically includes a light-emitting source 2321 and a semi-transparent and semi-reflective film 2322, and a diffuse reflection plate (not shown in the drawing) is disposed in front of the light-emitting source 2321, and a part of light emitted by the light-emitting source 2321 passes through the semi-transparent and semi-reflective film 2322, and another part of light is directly transmitted and reflected to the first type reflective prism 222 and the second type reflective prism 223. The light reflected by the reflecting prism irradiates the side surface of the measured element 3000, the light reflected by the measured element 3000 returns to the semi-transparent and semi-reflective film 2322 of the coaxial light source 232 along the original path, and the light is directly transmitted to the imaging mechanism 21 for imaging. The coaxial light source 232 can provide uniform parallel light irradiation to obtain the dimension information of the tested element 3000.
It will be appreciated that when the light source mechanism 23 includes both the annular light source 231 and the coaxial light source 232, imaging is performed in a combined light source illumination manner while satisfying both bright field illumination and dark field illumination conditions.
Further, the annular light source 231 and/or the coaxial light source 232 are light sources that can provide illumination light of multiple wavelengths. With continued reference to fig. 6, according to the characteristic colors of the surface of the measured element 3000, the annular light source 231 and/or the coaxial light source 232 may use multi-wavelength light sources, such as red, green, blue light, and so on, to mix to form multi-color light, and the complementary color may be used to highlight the defect edge of the measured element 3000, sharpen the boundary, and improve the contrast of the defect boundary. Or the coaxial light sources 232 may employ light sources of different wavelengths for regions of different detection bits. For example, referring to fig. 8 and 11, the first wavelength light source is used for the coaxial light source 232 region corresponding to the first detection position A1, the second wavelength light source is used for the coaxial light source 232 region corresponding to the second detection position A2, and so on, so that the wavelength light source required for the coaxial light source 232 region can be set according to the difference of the type, the defect, and the like of the tested element 3000 in the different detection positions, and the tested element 3000 with the difference of the different types, the defect, and the like can be effectively detected at the same time. In addition, the optical detection device 20 further includes a filter 28 provided between the imaging mechanism 21 and the light source mechanism 23. The optical filter 28 is added to obtain imaging effects of different colors of light, different wavelength light sources are adopted for irradiation, characteristic information which can be acquired by different wavelengths is different, more abundant defect information can be obtained, and defects can be detected conveniently.
In some embodiments, with continued reference to fig. 5, the imaging mechanism 21 includes a camera 211 and a lens 212, and in particular, the lens 212 is an object-side telecentric lens, and a field of view of the object-side telecentric lens corresponds to the plurality of sets of reflecting mechanisms 22, and the imaging mechanism 21 is configured to simultaneously image the side surfaces and the bottom surfaces of the plurality of measured elements 3000. When the measured element 3000 is rectangular, the imaging mechanism 21 is used to simultaneously image 5 sides of the 4 sides and the bottom of the plurality of measured elements 3000. The object side telecentric lens can specifically select a double telecentric lens or a non-image side telecentric object side telecentric lens, so long as the lens 212 can realize object side telecentricity, the object side telecentric lens can eliminate errors of inconsistent magnification caused by inconsistent distances between the measured element 3000 and the lens 212, and the measured element 3000 is imaged more truly, thereby facilitating defect detection. The camera 211 may be a monochrome or color camera 211, and may be specifically selected according to practical requirements.
In the imaging mechanism 21, the object telecentric lens is adopted, so that the problem of different side resolutions caused by the position deviation of the measured element 3000 in the detection position can be solved. Referring to fig. 12, when the measured element 3000 is gripped to the center of the detection position, the distances between the four sides of the measured element 3000 and the reflecting surface of the reflecting prism are equal, the working distances are equal for the object side telecentric lens, the imaging effects of the four sides are consistent, and the defect detection can be directly performed. Referring to fig. 13, when the measured element 3000 deviates from the center of the detection position, the distances from the four sides of the measured element 3000 to the reflecting surface of the reflecting prism are inconsistent, resulting in different working distances, and the object side telecentric lens can eliminate the error of inconsistent magnification caused by inconsistent distance between the measured element 3000 and the lens, and can also image the sides of the measured element 3000. Therefore, for the same reflecting mechanism 22, the measured elements 3000 with different sizes can be detected compatibly, and the size range (i.e. the field of view range) that can be detected by the optical detecting device 20 is determined jointly according to the performance parameters of the object side telecentric lens and the camera 211. Fig. 14 is a schematic diagram of a camera 211 imaging a side surface and a bottom surface (top surface) of a tested element 3000, which can well image each surface of the tested element 3000 for defect detection.
In other embodiments, with continued reference to fig. 5, the imaging mechanism 21 includes a camera 211 and a non-object-side telecentric lens, and the field of view of the non-object-side telecentric lens corresponds to the plurality of sets of reflecting mechanisms 22, and the imaging mechanism 21 is configured to image the side surfaces and the bottom surfaces of the plurality of measured elements 3000, respectively. Specifically, when the measured element 3000 is rectangular, the non-object-side telecentric lens is used for imaging 4 sides of the measured element 3000 each time, and focusing on the bottom surface of the measured element 3000 after the non-object-side telecentric lens moves a preset distance relative to the suction nozzle module 12. Typically, the non-object-side telecentric lens is controlled to remain motionless, and the suction nozzle module 12 is displaced, so as to adjust the distance between the non-object-side telecentric lens and the suction nozzle module 12. If the suction nozzle module 12 is controlled to be stationary, and the non-object-side telecentric lens is adjusted to be moved, the non-object-side telecentric lens needs to be reset when the measured element 3000 is photographed next time.
In some embodiments, with continued reference to fig. 4, the optical inspection apparatus 20 further includes a first inspection drive mechanism 25, and the imaging mechanism 21, the reflecting mechanism 22, and the light source mechanism 23 are all coupled to the first inspection drive mechanism 25. The first detection driving mechanism 25 is for driving the imaging mechanism 21, the reflecting mechanism 22, and the light source mechanism 23 to translate in the third direction so as to oppose the nozzle module 12. By providing the first detection driving mechanism 25, the positions of the imaging mechanism 21, the reflecting mechanism 22, the light source mechanism 23, and the nozzle module 12 can be adjusted, so that the nozzle module 12 can conveniently place the component 3000 to be detected at the detection position for detection. Alternatively, the first detection driving mechanism 25 may be driven by a motor or a cylinder.
Further, the optical detection device 20 includes a mounting frame 26, and the imaging mechanism 21, the reflecting mechanism 22 and the light source mechanism 23 are all mounted on the mounting frame 26, and the first detection driving mechanism 25 translates along a third direction by driving the mounting frame 26, so as to drive the imaging mechanism 21, the reflecting mechanism 22 and the light source mechanism 23 to translate along the third direction.
The reflection mechanism 22, the light source mechanism 23 and the imaging mechanism 21 are sequentially arranged along the second direction, the optical detection device 20 further comprises a second detection driving mechanism 27, the imaging mechanism 21 is connected with the second detection driving mechanism 27, the second detection driving mechanism 27 is used for driving the imaging mechanism 21 to lift along the second direction so as to adjust the relative position of the imaging mechanism 21 and the light source mechanism 23 along the second direction, so that the distance between the imaging mechanism 21 and the light source mechanism 23 or the reflection mechanism 22 along the second direction is proper, and imaging of the detected element 3000 is facilitated. Alternatively, the second detection driving mechanism 27 may be driven by a motor or an air cylinder.
In some embodiments, the suction device 10 further comprises a displacement drive mechanism for driving the nozzle module 12 to circulate between the tray well position and the inspection position. The controller is used for controlling the distance changing mechanism 11 to adjust the distance between the suction nozzle modules 12 in the process that the suction nozzle modules 12 circulate between the pit position and the detection position of the tray. Thus, the distance between the suction nozzle modules 12 is prevented from being adjusted when the suction nozzle modules 12 are above the tray pits or the detection positions, and the tested element 3000 can be taken out and placed when the suction nozzle modules 12 are moved above the tray pits or the camera 211 of the imaging mechanism 21 can be directly exposed and detected when the suction nozzle modules 12 are moved above the detection positions, so that the detection time is saved.
Specifically, referring to fig. 15, the controller is configured to perform the following control procedure for at least one cycle:
During the first time interval T1, the suction nozzle module 12 is controlled to suck the tested component 3000 on the material taking tray 2000 and then transfer the tested component 3000 to the detection position, and the distance changing mechanism 11 is controlled to adjust the distance between the suction nozzle modules 12 to the detection position distance in the transfer process, and the first time interval T1 is ended and the second time interval T2 is started when the tested component 3000 is located in the detection position.
It should be noted that, when the nozzle modules 12 are at the pitch of the test positions, the pitch of the nozzle modules 12 is adapted to the pitch of the test positions, and the nozzle modules 12 can place the tested components 3000 one by one in the test positions.
During the second time interval T2, the camera 211 of the imaging mechanism 21 is controlled to expose, an image of the measured element 3000 is collected under illumination light provided by the light source mechanism 23, the second time interval T2 is ended after the image of the measured element 3000 is collected, and the third time interval T3 is started. In the present embodiment, the light source mechanism 23 illuminates in a stroboscopic manner in a period corresponding to the exposure of the camera 211, and in other embodiments, the light source mechanism 23 may illuminate in a normally bright manner.
During the third time interval T3, the control nozzle module 12 transfers the tested component 3000 with the image acquisition in the detection position to the tray pit, and controls the distance changing mechanism 11 to adjust the distance between the nozzle modules 12 to the tray pit distance in the transferring process, and the third time interval T3 is ended when the tested component 3000 is placed in the tray pit.
It should be noted that, when the suction nozzle modules 12 are located at the tray pit pitch, the pitch of the suction nozzle modules 12 is adapted to the pitch of the tray pit, and the suction nozzle modules 12 can just place the tested components 3000 in the tray pit one by one.
In the above control process, the controller mainly controls the camera 211 of the imaging mechanism 21 to expose and collect images in the second time interval T2, and the suction nozzle module 12 is stationary during the period, or performs a Z-axis displacement to complete focusing of the bottom surface of the chip. The controller mainly controls the suction nozzle module 12 to perform displacement and pitch change in the third time interval T3 and the first time interval T1, the imaging mechanism 21 performs data conversion after exposure in the period, and waits for the next exposure, and the imaging mechanism 21 is stationary or performs the resetting process of the Z-axis displacement in the waiting process.
The controller controls the distance changing mechanism 11 to adjust the distance between the suction nozzle modules 12 in the transferring process by executing the control process, and when the suction nozzle modules 12 move to the position above the pit of the tray, the tested element 3000 can be taken out or when the suction nozzle modules move to the position above the detection position, the camera 211 of the imaging mechanism 21 can be directly exposed for detection, so that the detection time is saved.
Since the tray 2000 carries more tested devices 3000, the controller generally performs the above-mentioned control process for a plurality of cycles to test all tested devices 3000 on the tray 2000.
With continued reference to fig. 3, the displacement drive mechanism includes a first suction drive mechanism 13 and a second suction drive mechanism 14, the second suction drive mechanism 14 is connected to the first suction drive mechanism 13, and the variable-pitch mechanism 11 is connected to the second suction drive mechanism 14. The first suction driving mechanism 13 is used for driving the second suction driving mechanism 14, the distance changing mechanism 11 and the suction nozzle module 12 to translate along a first direction so as to drive the suction nozzle module 12 to flow between the tray 2000 and the detection position, and the second suction driving mechanism 14 is used for driving the distance changing mechanism 11 and the suction nozzle module 12 to lift along a second direction so as to approach the tray 2000 or the optical detection device 20, so as to take the tested element 3000 in the pit of the tray or place the tested element 3000 in the detection position for detection. The first direction, the second direction and the third direction are intersected in pairs. Specifically, the first direction, the second direction and the third direction are perpendicular to each other. The Y direction in fig. 1 is the first direction, the second direction is the Z direction in fig. 1, and the third direction is the X direction in fig. 1.
Alternatively, both the first suction driving mechanism 13 and the second suction driving mechanism 14 may be driven by a motor or a cylinder.
In some embodiments, the suction device 10 includes multiple nozzle module groups arranged along a third direction, each nozzle module group including a plurality of nozzle modules 12 arranged along a first direction. The plurality of detection bits are arranged in an array along the first direction and the third direction. In this case, the first direction or the second direction is the above-described adjacent direction. The pitch changing mechanism 11 includes a first pitch changing assembly 111 for adjusting the pitch of the plurality of nozzle module groups in the third direction, and a second pitch changing assembly 112 for adjusting the pitch of the nozzle modules 12 of each of the plurality of nozzle module groups in the first direction. The nozzle module 12 can change the pitch under the cooperation of the first pitch changing component 111 and the second pitch changing component 112.
In a specific embodiment, the suction device 10 comprises two groups of nozzle modules, each group comprising three nozzle modules 12. Referring to fig. 16, the first pitch assembly 111 includes a first screw 1111 and a first nut that are screw-coupled, and a group of nozzle modules is connected to the first nut. The second pitch assembly 112 includes a second screw rod 1121 and two second nuts, the two second nuts are connected to two threads Duan Luo of the second screw rod 1121 opposite to the threads, and two nozzle modules 12 located at two ends of the nozzle module group are connected to the two second nuts, respectively. Alternatively, the first screw 1111 and the second screw 1121 are driven by motors.
In the above arrangement, the motor drives the first screw rod 1111 to rotate, the first nut moves relative to the first screw rod 1111, the distance between the two suction nozzle module groups in the third direction changes, the motor drives the second screw rod 1121 to rotate, the two second nuts move relative to the second screw rod 1121, and the suction nozzle modules 12 of each suction nozzle module group at two ends move relative to the other suction nozzle module 12 in the first direction, so that 2*3, that is, the pitch change of 6 suction nozzle modules 12 can be realized.
It is contemplated that in other embodiments, when there are more nozzle modules 12, such as more than 6, the pitch mechanism 11 may be adapted to meet the pitch requirements of more nozzle modules 12.
Referring to fig. 17, another embodiment of the present application further provides a testing and braiding integrated machine 1000, which includes a feeding system 200, a braiding system 500 and the above-mentioned detecting system 100, wherein the feeding system 200 is used for conveying a feeding tray 2000, the detecting system 100 can detect a tested element 3000 on the feeding tray 2000 conveyed by the feeding system 200, and the braiding system 500 can grasp the tested element 3000 qualified for braiding on the feeding tray 2000.
Specifically, the feed system 200 includes a first tray dividing device 201, a first conveying device 202, a tray carrying device 203, and a second tray dividing device 204. The first tray separating device 201 is configured to store trays 2000 stacked in the second direction and enable separation of the bottom tray 2000 and the upper tray 2000, and the first conveying device 202 is configured to receive the separated bottom tray 2000 and convey the trays 2000 to the first station in the third direction. When the tray 2000 is at the first station, the suction nozzle module 12 of the suction device 10 can suck the tested component 3000 on the tray 2000 and transfer it to the optical detection device 20 for detection. When all the tested components 3000 on the tray 2000 are tested, the first conveying device 202 conveys the tray 2000 to the second station along the third direction. When the tray 2000 is in the second station, the tray handling device 203 can handle the tray 2000 to the second tray dividing device 204 for stacking.
The feeding system 200 further comprises a second conveying device 205, the second tray dividing device 204 is capable of separating the bottom tray 2000 from the upper tray 2000, and the second conveying device 205 is configured to receive the divided bottom tray 2000 and convey the tray 2000 to the third station and the fourth station along the third direction.
Optionally, the testing and braiding integrated machine 1000 further includes a first transferring manipulator 300 and a first optical detection module 400, where the first transferring manipulator 300 can transfer the tested element 3000 on the tray 2000 at the third station to the first optical detection module 400 for detection. The testing and braiding integrated machine 1000 further comprises a second transferring manipulator 700 and a second optical detection module 600, and the second transferring manipulator 700 can transfer the tested element 3000 on the tray 2000 at the fourth station to the second optical detection module 600 for detection. The first optical detection module 400 and the second optical detection module 600 are combined with the first optical detection device 20, and can detect the entire surface of the element 3000 to be detected. In some embodiments, the optical inspection device 20 inspects 5 sides (including 4 sides and bottom) of the inspected component 3000, the first optical inspection module 400 is capable of inspecting the bottom of the inspected component 3000 and is also capable of inspecting the inspected component 3000 in 3D, and the second optical inspection module 600 is capable of inspecting the top of the inspected component 3000.
Optionally, the taping system 500 includes a rejecting manipulator 501 and a taping manipulator 502, the second conveying device 205 can convey the tray 2000 to the fifth station, the rejecting manipulator 501 can grasp the detected defective element 3000 on the tray 2000 at the fifth station, and transfer the detected defective element 3000 to the scrap tray, and the taping manipulator 502 can grasp the detected defective element 3000 on the tray 2000 at the fifth station to taping station taping. When the detected element 3000 is detected as being unqualified during the in-situ detection and mark detection in the braiding process, the braiding robot 502 can grasp the unqualified detected element 3000 and put it back into the tray 2000, and grasp the qualified detected element 3000 from the tray 2000 to fill the gap.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (13)
1. A detection system, comprising:
An optical detection device (20) comprising:
An imaging mechanism (21);
The multiple groups of reflection mechanisms (22) are arranged in the view field of the imaging mechanism (21), and each group of reflection mechanisms (22) correspondingly forms a detection position for placing a tested element (3000);
a light source mechanism (23) for providing illumination light to the element (3000) to be tested;
wherein each reflecting mechanism (22) is used for reflecting light rays from at least two sides of the tested element (3000) positioned at the corresponding detection position to the imaging mechanism (21), and the imaging mechanism (21) is used for receiving the reflected light rays from a plurality of groups of reflecting mechanisms (22) so as to image and detect a plurality of tested elements (3000);
the suction device (10) comprises a distance changing mechanism (11) and a plurality of suction nozzle modules (12) for taking and placing the tested components (3000) on the tray (2000), wherein the suction nozzle modules (12) are connected with the distance changing mechanism (11), the distance changing mechanism (11) is used for adjusting the distance between the suction nozzle modules (12) so that the suction nozzle modules (12) can place the tested components (3000) sucked by the suction nozzle modules in the detection position for detection in a one-to-one correspondence manner, and
And the controller is used for controlling the suction device (10) to take and put and move the tested element (3000) and controlling the optical detection device (20) to image the tested element (3000) when the tested element (3000) is positioned in the detection position.
2. The detection system according to claim 1, wherein the controller is capable of controlling the pitch-changing mechanism (11) to adjust the pitch between the nozzle modules (12) based on the pitch of the pit (2001) on the tray (2000) and the pitch between the detection sites, so that the pitch of the nozzle modules (12) is adapted to the pitch of the pit (2001) when the detected component (3000) is taken from the tray (2000) and to the pitch of the detection sites when the detected component is placed in the detection sites.
3. The detection system according to claim 2, wherein the reflecting mechanism (22) includes a reflecting prism assembly (221), the reflecting prism assembly (221) being adjacent between two adjacent detection positions, the reflecting prism assembly (221) being configured to reflect illumination light emitted from the light source mechanism (23) to sides of two adjacent detected elements (3000) and reflect light from the sides of two adjacent detected elements (3000) to the imaging mechanism (21) to image the sides of the detected elements (3000);
And the distance between two adjacent detection positions is larger than or equal to the width of the reflecting prism assembly (221) in the adjacent direction.
4. A detection system according to claim 3, wherein the reflecting prism assembly (221) comprises a first type reflecting prism (222) which is an isosceles right angle prism, the hypotenuse of the first type reflecting prism (222) is arranged perpendicular to the optical axis of the imaging mechanism (21), two right angle sides of the first type reflecting prism (222) respectively reflect the illumination light emitted by the light source mechanism (23) to the side surfaces of the corresponding adjacent two measured elements (3000), and reflect the light from the side surfaces of the corresponding adjacent two measured elements (3000) to the imaging mechanism (21) to image a plurality of side surfaces of the measured elements (3000), and the width of the adjacent direction of the reflecting prism assembly (221) is at least the length of the hypotenuse of the first type reflecting prism (222);
Or (b)
The reflecting prism assembly (221) comprises at least two second-type reflecting prisms (223) which are arranged in parallel along the adjacent direction, wherein the second-type reflecting prisms (223) are isosceles right-angle prisms, one right-angle side of each second-type reflecting prism (223) is arranged in parallel with the optical axis of the imaging mechanism (21), the hypotenuse of each second-type reflecting prism (223) reflects illumination light emitted by the light source mechanism (23) to the side surface of the corresponding tested element (3000), and reflects light rays from the side surface of the corresponding tested element (3000) to the imaging mechanism (21) so as to image a plurality of side surfaces of the tested element (3000), and the width of the adjacent direction of the reflecting prism assembly (221) is at least the sum of the right-angle side lengths of the two second-type reflecting prisms (223).
5. The detection system according to claim 1, wherein the reflecting means (22) comprises a plurality of reflecting prisms surrounding the detection bit;
Part of illumination light emitted by the light source mechanism (23) is reflected to a plurality of sides of the corresponding tested element (3000) through a plurality of reflecting prisms, and the reflecting prisms reflect first imaging light from the plurality of sides of the corresponding tested element (3000) to the imaging mechanism (21);
Part of illumination light emitted by the light source mechanism (23) is incident to the bottom surface or the top surface of the tested element (3000), and reflected or scattered to form second imaging light to the imaging mechanism (21);
The imaging mechanism (21) receives the first imaging light and the second imaging light to image a plurality of sides of the element under test (3000) and a bottom or top surface of the element under test (3000).
6. The detection system according to claim 5, wherein the reflecting prisms comprise a first type of reflecting prism (222) and a second type of reflecting prism (223), each being an isosceles right angle prism, the second type of reflecting prism (223) being arranged around the first type of reflecting prism (222) to form a plurality of the detection sites;
One right-angle side of the second-type reflecting prism (223) is arranged in parallel with the optical axis of the imaging mechanism (21), and the hypotenuse of each second-type reflecting prism (223) reflects illumination light emitted by the light source mechanism (23) to the side surface of the corresponding tested element (3000) and reflects light rays from the side surface of the corresponding tested element (3000) to the imaging mechanism (21) so as to image a plurality of side surfaces of the tested element (3000);
The hypotenuse of the first type reflecting prism (222) is perpendicular to the optical axis of the imaging mechanism (21), and the two right-angle sides of the first type reflecting prism (222) respectively reflect illumination light emitted by the light source mechanism (23) to the side surface of the corresponding tested element (3000) and reflect light from the side surface of the corresponding tested element (3000) to the imaging mechanism (21) so as to image a plurality of side surfaces of the tested element (3000).
7. The detection system according to claim 1, wherein the imaging mechanism (21) comprises a camera (211) and an object telecentric lens, the field of view of the object telecentric lens corresponding to a plurality of sets of the reflecting mechanisms (22), the imaging mechanism (21) being configured to simultaneously image the sides and the bottom of the plurality of measured elements (3000);
or alternatively
The imaging mechanism (21) comprises a camera (211) and a non-object-space telecentric lens, the field of view of the non-object-space telecentric lens corresponds to a plurality of groups of the reflecting mechanisms (22), and the imaging mechanism (21) is used for respectively imaging the side surfaces and the bottom surfaces of a plurality of tested elements (3000).
8. The detection system according to claim 1, wherein the suction device (10) further comprises a displacement drive mechanism for driving the suction nozzle module (12) to circulate between a tray well position and the detection position;
The controller is used for controlling the distance changing mechanism (11) to adjust the distance between the suction nozzle modules (12) in the process that the suction nozzle modules (12) circulate between the tray pit position and the detection position.
9. The detection system according to claim 8, characterized in that the displacement drive comprises a first suction drive (13) and a second suction drive (14), the second suction drive (14) being connected to the first suction drive (13), the displacement mechanism (11) being connected to the second suction drive (14);
The first suction driving mechanism (13) is used for driving the second suction driving mechanism (14), the distance changing mechanism (11) and the suction nozzle module (12) to translate along a first direction so as to drive the suction nozzle module (12) to circulate between the tray (2000) and the detection position, and the second suction driving mechanism (14) is used for driving the distance changing mechanism (11) and the suction nozzle module (12) to lift along a second direction so as to be close to or far away from the tray (2000) or the optical detection device (20);
the first direction and the second direction intersect.
10. The detection system of claim 8, wherein the controller is configured to perform at least one cycle of the following control process:
During a first time interval, controlling the suction nozzle module (12) to suck the tested element (3000) on the material taking disc (2000) and then transferring the tested element (3000) to the detection position, controlling the distance changing mechanism (11) to adjust the distance between the suction nozzle module (12) to be the detection position distance in the transferring process, and ending the first time interval and starting a second time interval when the tested element (3000) is positioned in the detection position;
During a second time interval, controlling the exposure of a camera (211) of the imaging mechanism (21), acquiring an image of the element (3000) under illumination light provided by the light source mechanism (23), ending the second time interval and starting a third time interval after acquiring the image of the element (3000);
And during a third time interval, controlling the suction nozzle module (12) to transfer the detected element (3000) with the image acquisition in the detection position to a tray pit, controlling the distance changing mechanism (11) to adjust the distance between the suction nozzle module (12) to be the tray pit distance in the transfer process, and ending the third time interval when the detected element (3000) is placed in the tray pit.
11. The detection system according to claim 1, wherein the optical detection device (20) further comprises a first detection driving mechanism (25), the imaging mechanism (21), the reflecting mechanism (22) and the light source mechanism (23) are all connected to the first detection driving mechanism (25), and the first detection driving mechanism (25) is used for driving the imaging mechanism (21), the reflecting mechanism (22) and the light source mechanism (23) to translate along a third direction so as to be opposite to the suction nozzle module (12);
And/or
The reflection mechanism (22), the light source mechanism (23) and the imaging mechanism (21) are sequentially arranged along a second direction, the optical detection device (20) further comprises a second detection driving mechanism (27), the imaging mechanism (21) is connected with the second detection driving mechanism (27), and the second detection driving mechanism (27) is used for driving the imaging mechanism (21) to lift along the second direction so as to adjust the relative position of the imaging mechanism (21) and the light source mechanism (23) along the second direction.
12. The detection system according to claim 1, wherein the suction device (10) comprises a plurality of groups of nozzle module groups arranged along a third direction, each group of nozzle module groups comprising a plurality of nozzle modules (12) arranged along a first direction, a plurality of detection sites being arranged in an array along the first direction and the third direction;
The pitch changing mechanism (11) comprises a first pitch changing assembly (111) and a second pitch changing assembly (112), the first pitch changing assembly (111) is used for adjusting the pitches of a plurality of groups of suction nozzle module groups in the third direction, and the second pitch changing assembly (112) is used for adjusting the pitches of the suction nozzle modules (12) of each group of suction nozzle module groups in the first direction;
The first direction intersects the third direction.
13. The all-in-one machine for testing and braiding is characterized by comprising a feeding system (200), a braiding system (500) and the detection system according to any one of claims 1-12, wherein the feeding system (200) is used for conveying a feeding tray (2000), the detection system can detect tested elements (3000) on the feeding tray (2000) conveyed by the feeding system (200), and the braiding system (500) can grab tested elements (3000) qualified in detection on the feeding tray (2000) to carry out braiding.
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| CN117929271A (en) * | 2024-01-23 | 2024-04-26 | 博众精工科技股份有限公司 | Chip imaging detection device and method |
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2024
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| CN109100366A (en) * | 2018-08-10 | 2018-12-28 | 武汉盛为芯科技有限公司 | The detection system and method for semiconductor laser chip end face appearance |
| CN217332213U (en) * | 2022-04-18 | 2022-08-30 | 广州诺顶智能科技有限公司 | Chip side defect detection device |
| CN218239802U (en) * | 2022-09-22 | 2023-01-06 | 东莞市捷展精密设备有限公司 | Four-mirror-surface image taking lens base and part appearance detection equipment |
| CN219657659U (en) * | 2022-12-22 | 2023-09-08 | 深圳市标王工业设备有限公司 | Full-automatic chip high-low temperature detection equipment |
| CN117929271A (en) * | 2024-01-23 | 2024-04-26 | 博众精工科技股份有限公司 | Chip imaging detection device and method |
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