CN1196994A - Method and appts. for plane super-precision grinding and polishing optical glass - Google Patents
Method and appts. for plane super-precision grinding and polishing optical glass Download PDFInfo
- Publication number
- CN1196994A CN1196994A CN 97104109 CN97104109A CN1196994A CN 1196994 A CN1196994 A CN 1196994A CN 97104109 CN97104109 CN 97104109 CN 97104109 A CN97104109 A CN 97104109A CN 1196994 A CN1196994 A CN 1196994A
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- abrasive disk
- test specimen
- diameter
- grinding
- grinder
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- 238000000227 grinding Methods 0.000 title claims abstract description 20
- 239000005304 optical glass Substances 0.000 title claims abstract description 10
- 238000005498 polishing Methods 0.000 title claims abstract description 6
- 238000000034 method Methods 0.000 title claims description 16
- 239000007788 liquid Substances 0.000 claims abstract description 11
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 9
- 230000003287 optical effect Effects 0.000 claims abstract description 9
- 239000000725 suspension Substances 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 3
- 238000012360 testing method Methods 0.000 claims description 45
- 230000033001 locomotion Effects 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 3
- 239000002390 adhesive tape Substances 0.000 abstract description 2
- 229910052681 coesite Inorganic materials 0.000 abstract description 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 2
- 229910052682 stishovite Inorganic materials 0.000 abstract description 2
- 229910052905 tridymite Inorganic materials 0.000 abstract description 2
- 239000008213 purified water Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000013518 transcription Methods 0.000 description 1
- 230000035897 transcription Effects 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A ultraprecise grinding-polishing machine for optical planar glass features that the workpiece to be ground is attached to fixture by adhesive tape and the grinding disk made of pure tin has convex ring band on its surface, whose width is 80-95% of workpiece's diameter. The grinding liquid is a suspension of SiO2 (70A) and purified water. After ground for 3 hrs, an optical glass (100 mm in diameter) can reach a plane precision of lambda/20.
Description
The present invention relates to a kind of polishing method and special equipment of ultraprecise processing optical glass planar glass.Can reach the optical flat of λ/20 above flatnesses through 3 hours ultraprecise processing to diameter phi 100mm optical glass with this method.
Along with science and technology development, play the precision optics plane and more and more used.For example, be used in measurement, providing the high precision plane-optical parallel of datum plane.In laser fusion research, be used to do the high-precision optical plane of high power laser reflection, and in electronics industry the nonmetal semiconductor planar or the like of no affected layer.
The machining accuracy on optical glass plane is general relevant with the test specimen diameter, is satisfying under the same plane precision condition, and the test specimen diameter is big more, and difficulty of processing is big more, processes the optical mirror plane of 100 millimeters of diameters with existing method, and plane precision is difficult to reach λ/more than 20.
The object of the invention is to disclose a kind of plane precision and reaches the above optical glass plane super-precision polishing method in λ/20, also discloses a kind of equipment that is exclusively used in said method simultaneously.
The method of the invention is made up of following steps:
(1). be that 99.9% metallic tin is made into the annular abrasive disk by purity on accurate lapping and buffing machine, abrasive disk annulus width is greater than processed test specimen diameter, and fixedly the anchor clamps of test specimen are connected with rotating shaft by universal coupling;
(2). with two-sided tape test specimen is pasted on the anchor clamps;
(3). use the topping machanism that is installed on the grinder, the flat abrasive disk of turning is that width is protruding circular ring with the abrasive disk cutting by 80～95% of processed test specimen diameter again, forms the scope of operation of abrasive disk;
(4). annotate lapping liquid, exceed to flood the abrasive disk surface.Lapping liquid is that a kind of nominal diameter is the super micropowder of SiO2 of 70A and the suspension of pure water.
(5). abrasive disk and test specimen are that rotate at the center with its axle separately, and test specimen only turns round and the oscillating motion in the optical flat grinding as none, adjust lap speed more than 60rpm.
(6). the continuously grinding test specimen, till the test specimen flatness reaches nominal accuracy.
The present invention is used for the special equipment of said method, is a kind of abrasive disk of grinder.
A kind of special-purpose abrasive disk is the circular disk that a periphery that is fixed on the grinder turntable has the outer, and the abrasive disk scope of operation is that one deck purity is the metallic tin more than 99%.The annulus width of abrasive disk is greater than processed test specimen diameter, and abrasive disk and test specimen grinding operation face are the endless belt of height of projection slightly, and the width of endless belt is 80～95% of a test specimen diameter.On the scope of operation of endless belt, can be evenly equipped with a plurality of uniformly-spaced cannelures.
Accompanying drawing 2 is a tin abrasive disk structure chart;
Accompanying drawing 3 is two states schematic diagram in the lapping liquid grinding;
The accompanying drawing 4 plane lapping disk shapes and the location of workpiece concern schematic diagram;
Accompanying drawing 5 is revised back abrasive disk test record;
Accompanying drawing 6 flat tools grind 8 hours back plane degree resolution charts;
Accompanying drawing 7 flat tool abrasion situation kymograms;
Accompanying drawing 8 concerns schematic diagram for abrasive disk shape of the present invention and test specimen;
Accompanying drawing 9 is flat tool and flatness relation test figure;
Accompanying drawing 10 is test specimen and flatness relation test figure for grinding bandwidth;
Accompanying drawing 11 is test specimen and flatness relation test figure for grinding bandwidth;
Accompanying drawing 12 is test specimen and flatness relation test figure for grinding bandwidth.
Embodiment:
The device that uses as shown in Figure 1, Fig. 2 is an abrasive disk, external diameter 460mm, internal diameter 120mm, by purity is that 99.9% tin (Sn) is made, and the spiral grooves of shape shown in Figure 2 is processed into by the topping machanism that is installed on the grinder in the surface of abrasive disk according to experiment condition.Test specimen is diameter phi 100mm, the BK-7 optical glass of thick 30mm.With two-sided tape it is bonded on the piece fixture 4, anchor clamps are connected on the axle 2 by universal coupling.In grinding, test specimen only carries out gyration and the oscillating motion in the optical flat grinding as none.The rotation of abrasive disk and test specimen can infinitely variable speeds, thereby changes the two speed of related movement.5 is lapping liquid.It is the SiO with nominal diameter 70A
2Ultra-micro powder is mixed in the suspension liquid in the aquae destillata.Lapping liquid in the abrasive disk outer cover because abrasive disk rotates centrifugal force, will make liquid to peripolesis, and as shown in Figure 3, lapping liquid exceeds to flood the abrasive disk surface in abrasive disk, when low speed, is A condition, will become the B state along with rotating speed improves.The revolution of abrasive disk is advisable more than 60rpm.The glass test specimen is fixing on anchor clamps, adopts double faced adhesive tape to fix, and can eliminate heat and power like this and cause the test specimen cargo handling process to cause plane error.
The form accuracy transcription that the key of the inventive method is to make abrasive disk is to workpiece, and its surface configuration of the abrasive disk of use is with being arranged on high accuracy topping machanism correction on the grinder.The material of abrasive disk is a pure tin, and it has the soft and splendid performance that is cut, so can make abrasive disk itself have very high flatness, abrasive disk as shown in Figure 4 its flatness after tested can reach about 1 μ.Decision test specimen flatness precision, relevant with the abrasive disk shape, as use flat tool, i.e. abrasive disk as shown in Figure 4 repeatedly grinds for a long time for φ 100mm test specimen and also can only reach about λ/4, can think ultimate precision, and the grinding rear surface is shaped as convex surface.Fig. 6 drops to λ/4 for the flatness of grinding after 8 hours by λ/6.This is because along with milling time increases, due to the abrasive disk wearing and tearing also strengthen thereupon.Fig. 7 is a flat tool abrasion situation.The present invention adopts banded abrasive disk, and as shown in Figure 8, the test specimen and the abrasive disk scope of operation are slightly high any raised annular band, and test specimen is not that gross area grinds in process of lapping is instantaneous, and its most surfaces just.Along with the minimizing of grinding bandwidth, instantaneous milling area will diminish; Fig. 9,10,11,12 is depicted as the result that the test specimen that grinds with the banded milling area dish of different in width is tested on ZYGO, ZAPP laser plane interferometer.Grind bandwidth as seen from the figure not simultaneously, gained plane precision difference not only, its surface configuration are also different, and Fig. 9 is shaped as convex surface for being 0.464 λ with the flat tool flatness.Figure 10 flatness is 0.098 λ, and the surface still is a convex.Flatness is 0.048 λ/20, is shaped as the plane.Flatness is that 0.089 λ surface configuration is a concave surface.
From experimental result as can be known, along with the minimizing of grinding bandwidth, the surface configuration of being ground test specimen will become concave surface through the plane from convex surface.The flatness of test specimen is also ground about the width institute of band.For the workpiece of different-diameter, adopt different technological parameter (diameter of workpiece and abrasive disk adds the variation of revolution), through experimental study when grind bandwidth/diameter of work 80～95% the time can obtain the optical flat of λ/below 20.
The present invention adopts pure tin to make abrasive disk and grinds, φ 100mm optical glass, and through three hours continuously grindings, plane precision can reach λ/20 (λ is a He--Ne optical maser wavelength).
Claims (3)
1, a kind of optical glass plane super-precision polishing method, form by following steps:
(1), on accurate lapping and buffing machine, be that 99.9% metallic tin is made into the annular abrasive disk by purity, abrasive disk annulus width is greater than processed test specimen diameter, fixedly the anchor clamps of test specimen are connected with rotating shaft by universal coupling;
(2). with two-sided tape test specimen is pasted on the anchor clamps;
(3). use the topping machanism that is installed on the grinder, the flat abrasive disk of turning is that width is protruding circular ring with the abrasive disk cutting by 80～95% of processed test specimen diameter again, forms the scope of operation of abrasive disk;
(4). annotate lapping liquid, exceed to flood the abrasive disk surface.Lapping liquid is that a kind of nominal diameter is the SiO of 70A
2The suspension of super micropowder and pure water.
(5). abrasive disk and test specimen are that rotate at the center with its axle separately, and test specimen only turns round and the oscillating motion in the optical flat grinding as none, adjust lap speed more than 60rpm.
(6). the continuously grinding test specimen, till the test specimen flatness reaches nominal accuracy.
2, a kind of grinder abrasive disk that is exclusively used in the described method of claim 1, it is the circular disk that a periphery that is fixed on the grinder turntable has the outer, it is characterized in that, the abrasive disk scope of operation is that one deck purity is the metallic tin more than 99%, the annulus width of abrasive disk is greater than processed test specimen diameter, abrasive disk and test specimen grinding operation face are the endless belts of height of projection slightly, and the wide of endless belt is 85～94% of test specimen diameter.
3, grinder abrasive disk as claimed in claim 2 is characterized in that on the scope of operation of endless belt, is evenly equipped with a plurality of uniformly-spaced cannelures.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97104109 CN1196994A (en) | 1997-04-18 | 1997-04-18 | Method and appts. for plane super-precision grinding and polishing optical glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97104109 CN1196994A (en) | 1997-04-18 | 1997-04-18 | Method and appts. for plane super-precision grinding and polishing optical glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1196994A true CN1196994A (en) | 1998-10-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 97104109 Pending CN1196994A (en) | 1997-04-18 | 1997-04-18 | Method and appts. for plane super-precision grinding and polishing optical glass |
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| Country | Link |
|---|---|
| CN (1) | CN1196994A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7556381B2 (en) | 2002-10-04 | 2009-07-07 | Gerhard Kelch | Method for producing a lens and a lens produced thereby |
| CN101264586B (en) * | 2007-03-13 | 2010-09-22 | 贵阳高新泰丰航空航天科技有限公司 | Quick blur removing method for minisize cushion ring |
| CN102059389A (en) * | 2010-11-25 | 2011-05-18 | 成都飞机工业（集团）有限责任公司 | Holding method and device for machined foamed parts |
| CN110315405A (en) * | 2019-08-02 | 2019-10-11 | 合肥集知网信息技术有限公司 | A kind of float glass process TFT-LCD process of glass |
-
1997
- 1997-04-18 CN CN 97104109 patent/CN1196994A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7556381B2 (en) | 2002-10-04 | 2009-07-07 | Gerhard Kelch | Method for producing a lens and a lens produced thereby |
| CN101264586B (en) * | 2007-03-13 | 2010-09-22 | 贵阳高新泰丰航空航天科技有限公司 | Quick blur removing method for minisize cushion ring |
| CN102059389A (en) * | 2010-11-25 | 2011-05-18 | 成都飞机工业（集团）有限责任公司 | Holding method and device for machined foamed parts |
| CN110315405A (en) * | 2019-08-02 | 2019-10-11 | 合肥集知网信息技术有限公司 | A kind of float glass process TFT-LCD process of glass |
| CN110315405B (en) * | 2019-08-02 | 2020-11-10 | 阜阳市远大浮法玻璃制品有限公司 | Float TFT-LCD glass production process |
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