CN1195248C - Developing device for pixel definition layer of organic electroluminescence - Google Patents

Abstract

A developing device of pixel definition layer of organic electroluminescence is used to carry out a developing process for the pixel definition layer of organic electroluminescence, comprising a developing unit for providing a developing solution to distribute on the surface of an organic electroluminescence display panel, a cleaning unit for cleaning the residual developing solution, a blow-drying unit for blow-drying the display panel, a transmission unit for transmitting the display panel to the developing unit, the cleaning unit and the blow-drying unit in sequence, a control unit for controlling the transmission sequence and the transmission time and precisely controlling the processing time of the display panel in each unit; the developing device is provided with a plurality of developing units which are connected in front and back; the developing device can be arranged into a first section cleaning unit and a second section cleaning unit, wherein the first section cleaning unit is firstly utilized to spray a circulating solution, and then the second section cleaning unit is utilized to spray a fresh cleaning solution so as to completely remove the developing solution.

Description

Developing device for pixel definition layer of organic electroluminescence

technical field

The invention provides a developing device, especially a developing device for an organic electroluminescent pixel definition layer.

Background technique

Organic electroluminescent display (organic electroluminescent display) has become a new-generation flat-panel display that has attracted much attention in recent years because of its advantages such as light weight, high contrast, high response speed, low power consumption, and high brightness. However, because the technology of organic electroluminescent devices is relatively new and developed later than other displays, the technology is not yet fully mature, so there are still many obstacles to be overcome in the process of commercialization and mass production.

The main structure of the organic electroluminescent display panel includes a plurality of indium tin oxide (ITO) anode electrodes parallel to each other, a plurality of photoresist barrier walls parallel to each other but perpendicular to the anode electrodes, and an organic electroluminescence material layer is evaporated It is deposited in the adjacent photoresist barrier walls, and a plurality of cathode electrodes parallel to each other are deposited on the organic electroluminescent material layer. The sandwich structure of the anode electrode, the organic electroluminescent material layer and the cathode electrode constitutes a light-emitting pixel of the organic electroluminescence display panel. In addition, a pixel definition layer is provided on the surface of the display panel, which is coated between the anode electrode and the photoresist barrier wall, and can define the area and pattern of the light-emitting area of the anode electrode, and can also connect the anode electrode and the photoresist barrier wall. The cathode electrodes deposited on the photoresist barrier wall are separated, so that the probability of short circuit between the cathode electrode and the anode electrode is reduced, thereby improving the manufacturing yield of the display panel.

Generally speaking, the material used for the pixel definition layer is photoresist layer or polyimide (polyimide), because polyimide has better thermal stability, mechanical stability, electrical stability and light stability, it can be The organic electroluminescent display panel has better luminous stability and longer service life. The production method includes coating polyimide or the polyimide precursor (precursor), and sequentially performing pre-baking, exposure, post-exposure baking, development, high-temperature baking and other processes to define the polyimide picture of. Among them, in the conventional technology of developing, in the traditional integrated circuit and optoelectronic manufacturing process, the silicon substrate is placed on the suction cup and rotated, and then the developer and the washing liquid are sprayed by the nozzle respectively, and finally spin-dried at high speed. However, as the size of the display increases toward the new generation, the double effect of the display glass substrate being much heavier than the silicon substrate makes the traditional turntable design unable to bear such a large weight and centrifugal force under high-speed rotation, resulting in uneven or uneven development. Cleaning results in photoresist residue, which greatly reduces the yield of display components. Therefore, the method of soaking the display substrate in different developing tanks and washing tanks may be adopted, but it is impossible to continuously operate each step. The display panel must be taken out and loaded into another machine by manual transfer. Therefore, the entire The time course of the development process will be much longer, which is not conducive to mass production, and is also not conducive to the manufacture of large-area display panels. In addition, due to human factors that are difficult to control, delays or damages often occur during the transfer process. Therefore, general developing equipment cannot accurately control the developing time at all, nor can it ensure the quality of the developing process.

Furthermore, especially for the polyimide pixel definition layer in the organic electroluminescence display structure, since polyimide has high electrical and mechanical , thermal and chemical stability; before this, its chemical properties were not stable, and it was easily damaged by chemical agents such as alkaline substances. Therefore, for the non-photosensitive polyimide development, the development process includes both the development of the photoresist pattern and the etching of the polyimide under the developed photoresist. Therefore, precise development time control is required to prevent polyimide from being over-etched by the developer TMAH during development, changing the specification of the pixel definition area or even causing PI peeling off, so as to improve the process yield and specification stability of the display. Because of this, the creators, based on the spirit of active creation, eagerly thought of a "developing device for the pixel definition layer of organic electroluminescence" that can solve the above problems, and finally completed the creation after several researches and experiments.

Contents of the invention

The main purpose of the present invention is to provide a developing device for an organic electroluminescent pixel definition layer, so that the organic electroluminescent display panel can be continuously delivered to each unit, so as to effectively shorten the time course of the developing process and improve the different Operational flexibility of the size substrate.

A secondary object of the present invention is to provide a developing device capable of precisely controlling a predetermined developing time.

Another object of the present invention is to provide a developing device that can be flexibly selected and used according to maintenance requirements and developing process requirements.

Another object of the present invention is to provide a developing device that can achieve the effects of environmental protection and cost saving.

Another object of the present invention is to provide a developing device, which can increase the service life and efficiency of the developing device.

A developing device for an organic electroluminescent pixel definition layer according to the present invention is used to perform a development process on an organic electroluminescent pixel definition layer; it is characterized in that the developing device includes: a developing unit, A developing solution is provided so that the developing solution is evenly distributed on the surface of an organic electroluminescence display panel; a cleaning unit is connected with the developing unit to spray a cleaning solution to remove the organic electroluminescence The remaining developer solution on the surface of the display panel; a drying unit is connected with the cleaning unit to dry the remaining cleaning solution on the surface of the organic electroluminescence display panel; a transmission unit is respectively connected to the developer unit, the cleaning unit and the drying unit are connected to deliver the organic electroluminescence display panel to each unit; and a control unit controls the delivery sequence and delivery time of the delivery unit to precisely control the The processing time of the organic electroluminescent display panel in each unit; wherein the conveying unit sequentially conveys the organic electroluminescent display panel to the developing unit, the cleaning unit and the drying unit in a continuous conveying manner In order to complete the developing process, the developing device can precisely control the predetermined developing time, effectively shorten the time course of the developing process, and reduce the manpower operation cost.

The developing device further includes a loading unit, which is connected with the drying unit to load the developed display panel, or provide a buffer zone for the display panel substrate to directly enter the downstream photoresist stripping module.

Wherein the developing unit shakes the organic electroluminescent display panel to distribute the developer evenly on the surface of the organic electroluminescent display panel, and uses a spray pressure controller to control the spray pressure of the developer in the nozzle.

Wherein the developing unit further includes at least one air knife, which is arranged at the end of the developing unit, and is used to scrape off excess developing solution on the surface of the organic electroluminescence display panel.

Wherein the developing unit includes a developing solution recovery unit, which is used to recover the used developing solution and provide for reuse, and a developing solution temperature heating controller, which is used to control the temperature condition of the developing process.

Wherein the drying unit is to use an air knife to dry the remaining cleaning solution on the surface of the organic electroluminescent display panel.

The developing process performed by the developing device is used to define the pattern and area of the light-emitting area of the organic electroluminescent display panel.

A development device for an organic electroluminescence pixel definition layer of the present invention is used to perform a development process on an organic electroluminescence pixel definition layer; the development device includes: a plurality of development units connected back and forth, Each developing unit is used to provide a developing solution so that the developing solution is uniformly distributed on the surface of an organic electroluminescent display panel for a predetermined time; a cleaning unit is connected to the developing unit at the rearmost side connected to spray a cleaning solution to remove the developer remaining on the surface of the organic electroluminescent display panel; a drying unit connected to the cleaning unit to dry the organic electroluminescent display The cleaning solution remaining on the surface of the panel; a transmission unit is respectively connected with the plurality of developing units, the cleaning unit and the drying unit, and sequentially transports the organic electroluminescence display panel in a continuous transmission mode to the plurality of developing units, the cleaning unit and the drying unit; and a control unit, which is used to control the transmission mode and transmission time of the transmission unit, so as to precisely control the organic electroluminescence display panel in each The processing time in the unit; wherein the developing device can flexibly select and use the plurality of developing units according to maintenance needs and developing process requirements, and the control unit controls the processing time of the selected developing unit to precisely control the Development time of organic electroluminescent display panels.

A development device for an organic electroluminescence pixel definition layer of the present invention is used to perform a development process on an organic electroluminescence pixel definition layer: the development device includes: a development unit, which is used to provide A developing solution, so that the developing solution is evenly distributed on the surface of an organic electroluminescent display panel, and lasts for a predetermined developing time; a first-stage cleaning unit is connected with the developing unit, and is used to spray a circulating solution , to initially remove the developer solution remaining on the surface of the organic electroluminescent display panel; a second-stage cleaning unit is connected to the first-stage cleaning unit, and is used to spray a fresh cleaning solution to completely remove The developer solution remaining on the surface of the organic electroluminescent display panel; a drying unit connected to the second cleaning unit for drying the remaining solution on the surface of the organic electroluminescent display panel; The conveying unit is respectively connected with the developing unit, the first-stage cleaning unit, the second-stage cleaning unit and the drying unit, and conveys the organic electroluminescent display panel to the In the developing unit, the cleaning unit of the first section, the cleaning unit of the second section, and the drying unit; and a control unit, which is used to control the transmission mode and transmission time of the transmission unit, so as to precisely control the organic electrical excitation The processing time of the light display panel in each unit; wherein the fresh cleaning solution used in the second stage cleaning unit is circulated to the first stage cleaning unit to be used as the circulating solution.

Because the method of the present invention is novel, can provide industrial utilization, and really has the function of enhancing, so apply for the invention patent according to law.

Description of drawings

For further illustrating structure and feature thereof of the present invention, below in conjunction with accompanying drawing, the present invention is described in further detail, wherein:

1 is a schematic diagram of a developing device according to Embodiment 1 of the present invention;

Figure 2 is a schematic diagram of the developing unit shown in Figure 1;

3 is a schematic diagram of a developing device according to Embodiment 2 of the present invention;

4 is a schematic diagram of a developing device according to Embodiment 3 of the present invention;

Fig. 5 is a schematic diagram of a developing device according to Embodiment 4 of the present invention.

Detailed ways

Example 1

Please refer to FIG. 1 , which is a schematic diagram of a developing device 10 according to Embodiment 1 of the present invention. The present invention provides a developing device 10, which is used to perform a developing process on an organic electroluminescent display panel (not shown), so as to define the light emission of the ITO anode electrode on the polyimide pixel definition layer on the surface of the display panel. District pattern and area. The developing device 10 includes a carrying unit 12 for carrying the display panel, a developing unit 14 connected with the carrying unit 12, a cleaning unit 16 connected with the developing unit 14, and a drying unit 18 connected with the cleaning unit 16. Connect, a downloading unit 19 is to be connected with drying unit 18, a transmission unit 20 is to be connected with developing unit 14, cleaning unit 16 and drying unit 18 respectively, and a control unit 22 is to be connected with transmission unit 20. The developing device 10 utilizes the control unit 22 to control the conveying sequence and conveying time of the conveying unit 20, so that the conveying unit 20 can convey the display panel sequentially to the developing unit 14, the cleaning unit 16 and the drying unit 18 in a continuous conveying manner, And precisely control the processing time of the display panel in each unit. Wherein, the developing unit 14 is used to provide a developing solution, so that the developing solution is uniformly distributed on the surface of the display panel, and lasts for a set developing time. The cleaning unit 16 is used to spray a cleaning solution to remove the remaining developer on the surface of the display panel. The drying unit 18 is used to dry the remaining cleaning solution on the surface of the display panel. The loading unit 19 is used to load the developed display panel to provide a buffer zone for the display panel to directly enter the downstream photoresist stripping module. The transmission unit 20 is a transmission roller unit, which is composed of a plurality of receiving inner rollers and limiting outer rollers arranged at both ends of the wheel shaft, wherein the receiving inner rollers are used to receive the display panel, and the limiting outer rollers are for To fix the lateral relative position of the display panel in the transport roller unit, and in use, the distance between the rollers at both ends of the wheel shaft of the conveying device can be adjusted, and the distance between the two rollers can be adjusted according to the panel width of the OLED, so that substrates of different sizes can be provided. Operational flexibility for mass production.

Please refer to FIG. 2 , which is a schematic diagram of the developing unit 14 shown in FIG. 1 . The developing unit 14 includes a cavity 24, and a ventilation device 26 is connected with the cavity 14 to provide the inert gas required to be introduced into the cavity 24, such as nitrogen (N ₂ ), argon (Ar) etc., To avoid oxidation of the polyimide graphic definition layer, a developer heating temperature controller 29 is connected to the cavity 14 to control the developing temperature of the developer, and a developer recovery unit 28 is connected to the cavity 24 Connected to recover used developer and provide reuse. The cavity 24 is provided with a nozzle 30 for spraying the developing solution, a spray pressure controller 31 for controlling the spraying pressure of the developing solution at the nozzle 30 by a pump, and a developing tank 32 for shaking the sprayed developing solution. The display panel and at least one air knife 34 are arranged at the end of the cavity 24 for blowing off excess developing solution on the surface of the display panel to reduce contamination of the used developing solution to the next tank. After the display panel is transported from the carrying unit 12 to the developing unit 14, the nozzle 30 in the cavity 24 will spray the developer on the display panel, and the spray pressure controller 31 will control the spray pressure of the developer on the nozzle 30 to make the developer Get the most complete uniformity. In the developing tank 32 , the display panel is shaken in a rocking manner, so that the developer solution is evenly distributed on the surface of the display panel. Another way is to fill the developing tank 32 with developing solution. The display panel can be directly soaked in the developing tank 32 and shaken in a rocking manner, which can also achieve the effect of uniform distribution. In addition, the above two methods of spraying and immersing the developer can also be used at the same time, and the effect of uniform distribution can be achieved more quickly. As for replacing the conventional rotating method with shaking, it is to prevent the developing solution on the display panel from splashing into the cavity 24 due to over-rotation, which is of great help in improving the recovery rate of the developing solution. The function of the air knife 34 is to blow off excess developing solution on the surface of the display panel before the display panel is sent to the cleaning unit 16, which can not only improve the recovery rate of the developing solution, but also reduce the use of subsequent steps. The amount of cleaning solution used.

In the developing unit 14 , the control unit 22 controls the spraying time and shaking time of the developer, and immediately after the set developing time is reached, the display panel is transferred to the cleaning unit 16 by the transfer unit 20 . Subsequently, the cleaning unit 16 sprays a high-pressure deionized water to clean the developer on the surface of the display panel. Then, the display panel will be sent to the drying unit 18 and dried by air drying or air knife drying to complete the developing process. Since the control unit 22 can control the processing time of the display panel in each unit, and the conveying unit 20 can continuously convey the display panel to each unit, the developing device 10 can precisely control the predetermined developing time required for the display panel, so as to Avoid developing time errors caused by human operation and the cost of manual work. also. The continuous conveying operation method can effectively shorten the development process time, which is quite suitable for the mass production operation of the factory, especially the mass production operation of large-area display panels.

Example 2

Please refer to FIG. 3 , which is a schematic diagram of a developing device 40 according to Embodiment 2 of the present invention. The developing device 40 includes a carrying unit 42, a first developing unit 441 is connected with the carrying unit 42, a second developing unit 442 is connected with the first developing unit 441, and a third developing unit 443 is connected with the second developing unit 441. Unit 442 is connected, a cleaning unit 46 is connected with the third developing unit 443, a drying unit 48 is connected with the cleaning unit 46, a download unit 49 is connected with the drying unit 48, and a transmission unit 50 is It is respectively connected with each developing unit 441 - 443 , cleaning unit 46 and drying unit 48 , and a control unit 52 is connected with the transfer unit 50 .

The developing device 40 utilizes the control unit 52 to control the conveying sequence and conveying time of the conveying unit 50, so that the conveying unit 50 can continuously convey the display panel to the first developing unit 441, the second developing unit 442, the third developing unit The developing unit 443 , the cleaning unit 46 and the drying unit 48 are used to precisely control the processing time of the display panel in each unit. Wherein, the equipment and functions of each developing unit 441-443, cleaning unit 46, drying unit 48 and downloading unit 49 are the same as those in Embodiment 1.

Since the developing device 40 is provided with the first, second and third developing units 441, 442, 443 connected back and forth, the first, second or third developing units 441, 441, 443 can be flexibly selected according to maintenance needs and development process requirements. 442, 443, and the control unit 52 controls the process and processing time of the selected developing unit, so as to accurately control the required amount of developer and the predetermined developing time. Example 1: During mass production, it is possible to control the developer coating, shaking step and predetermined developing time in each developing unit at the same time, so that the output of the developing and developing device 40 can be increased by three times. Example 2: When one developing unit needs to be maintained or replenished, the developer coating and shaking steps can be performed in the other two display units, so as to prevent the developing device 40 from being unable to operate due to a stoppage of one developing unit. Example 3: When the developing process needs to replace the developing solutions with different concentrations or different agents, different types of developing solutions can be installed in different developing units, so that the developing device 40 can simultaneously perform three developing processes.

To sum up, it can be seen that the continuous transmission mode of the developing device 40 is equipped with at least two developing units, which can not only effectively shorten the time course of the developing process, but also increase the space for using the developing device 40, which is helpful for improving the service life and use of the developing device 40. Efficiency helps a lot.

Example 3

Please refer to FIG. 4 , which is a schematic diagram of a developing device 60 according to Embodiment 3 of the present invention. The developing device 60 includes a carrying unit 62, a developing unit 64 is connected with the carrying unit 62, a first stage cleaning unit 661 is connected with the developing unit 64, a second stage cleaning unit 662 is connected with the first stage cleaning unit 661 is connected, a drying unit 68 is connected with the second section cleaning unit 662, a download unit 69 is connected with the drying unit 68, and a transfer unit 70 is respectively connected with the developing unit 64 and the first section cleaning unit 661 , the second cleaning unit 662 and the drying unit 68 are connected, and a control unit 72 is connected with the transfer unit 70 .

The developing device 60 utilizes the control unit 72 to control the conveying sequence and conveying time of the conveying unit 70, so that the conveying unit 70 can convey the display panel sequentially to the developing unit 64, the first-stage cleaning unit 661, the second-stage The cleaning unit 662 and the drying unit 68 are used to precisely control the processing time of the display panel in each unit. Wherein, the equipment and functions of the developing unit 64 , the drying unit 68 and the downloading unit 69 are the same as those in the first embodiment. The first cleaning unit 661 is used to spray a high-pressure circulating aqueous solution to initially remove the residual developer on the surface of the display panel. The second-stage cleaning unit 662 is used to spray a high-pressure fresh deionized water to completely remove the developer remaining on the surface of the display panel.

The developing device 60 is provided with a two-stage cleaning unit, which preliminarily cleans the display panel in the first-stage cleaning unit 661 to greatly reduce the developer on the surface of the display panel, and then completely removes the residual developer in the second-stage cleaning unit 662. developer solution. Therefore, the second-stage cleaning unit 662 only needs to consume a small amount of high-pressure fresh deionized water to completely remove the developer on the surface of the display panel. In this way, too much developer can be prevented from splashing and contaminating the second-stage cleaning unit 662 , so as to ensure the cleaning quality of other display panels in the second-stage cleaning unit 662 and prolong the service life of the second-stage cleaning unit 662 . In addition, since the used high-pressure fresh deionized water has low turbidity: it can be reused for preliminary cleaning of the display panel, so it will be circulated to the first-stage cleaning unit 661 as a high-pressure circulating aqueous solution.

To sum up, it can be seen that the continuous transmission mode of the developing device 60 is equipped with a two-stage cleaning unit, which can not only effectively control the time schedule of the developing process, but also achieve the effects of environmental protection and cost saving. It helps a lot.

Example 4

Please refer to FIG. 5 , which is a schematic block diagram of a developing device 80 according to Embodiment 4 of the present invention. The developing device 80 includes a carrying unit 82, a first developing unit 841 is connected with the carrying unit 80, a second developing unit 842 is connected with the first developing unit 841, and a third developing unit 843 is connected with the second developing unit 841. Unit 842 is connected, a first section cleaning unit 861 is connected with the third developing unit 843, a second section cleaning unit 862 is connected with the first section cleaning unit 861, and a drying unit 88 is connected with the second section The cleaning unit 862 is connected, a download unit 89 is connected with the drying unit 88, a transfer unit 90 is connected with each developing unit 841-843, each cleaning unit 861, 862 and the drying unit 88 respectively, and A control unit 92 is connected to the transmission unit 90 .

The developing device 80 uses the control unit 92 to control the delivery sequence and delivery time of the delivery unit 90, so that the delivery unit 90 can deliver the display panel to the first, second, and third developing units 841, 842, 843, the first and second stage cleaning units 861, 862 and the drying unit 88, so as to precisely control the processing time of the display panel in each unit. Wherein, the equipment and functions of each developing unit 841-843, drying unit 88, and downloading unit 89 are as described in Embodiment 2, and each cleaning unit 861, 862 is as described in Embodiment 3.

To sum up, it can be known that the continuous transmission method of the developing device 80 is equipped with three developing units and a two-stage cleaning unit, and the developing unit can be flexibly selected according to maintenance needs and developing process requirements, and high-pressure circulating water solution is used to achieve environmental protection and cost saving The effect is very helpful for improving the service life and efficiency of the developing device 80 .

In summary, the present invention, regardless of its purpose, means and effects, shows its features that are very different from those of the known technologies. It should be noted that the above-mentioned embodiments are only examples for ease of description. The claimed scope of rights should be based on the scope of the patent application, rather than limited to the above-mentioned embodiments.

Claims (21)

1. A development device for an organic electroluminescence pixel definition layer, which is used to carry out a development process for an organic electroluminescence pixel definition layer; it is characterized in that the development device includes: A developing unit is provided with a developing solution so that the developing solution is evenly distributed on the surface of an organic electroluminescence display panel; A cleaning unit is connected with the developing unit to spray a cleaning solution to remove the developer remaining on the surface of the organic electroluminescent display panel; A drying unit is connected with the cleaning unit to dry the remaining cleaning solution on the surface of the organic electroluminescent display panel; a conveying unit, which is respectively connected with the developing unit, the cleaning unit and the drying unit, so as to convey the organic electroluminescent display panel to each unit; and A control unit is used to control the transfer sequence and transfer time of the transfer unit, so as to accurately control the processing time of the organic electroluminescent display panel in each unit; Wherein the conveying unit conveys the organic electroluminescent display panel sequentially to the developing unit, the cleaning unit and the drying unit in a continuous conveying manner to complete the developing process, so the developing device can accurately The predetermined developing time is controlled, and the time course of the developing process is effectively shortened, and the manpower operation cost is reduced. 2. The developing device of the pixel definition layer of organic electroluminescence as claimed in claim 1, wherein the developing device further comprises a loading unit, which is connected with the drying unit to load the finished developing unit. The display panel is processed to provide a buffer zone for the display panel to directly enter the downstream photoresist stripping module. 3. The developing device for the pixel definition layer of organic electroluminescence as claimed in claim 1, wherein the developing unit shakes the organic electroluminescent display panel to make the developing solution evenly Distributed on the surface of the organic electroluminescence display panel, and a spray pressure controller is used to control the spray pressure of the developer in the nozzle to obtain the best uniformity of development. 4. The developing device for the pixel definition layer of organic electroluminescence as claimed in claim 3, wherein the developing unit further comprises at least one air knife, which is arranged at the end of the developing unit for scraping removing excess developer on the surface of the organic electroluminescence display panel. 5. The developing device for the pixel definition layer of organic electroluminescence as claimed in claim 3, wherein the developing unit further comprises a developing solution recovery unit, which is used to recover the used developing solution and provide Reuse, and a developer temperature heating controller are used to control the temperature conditions of the development process. 6. The developing device for the pixel definition layer of organic electroluminescence as claimed in claim 1, wherein the drying unit uses an air knife to dry the organic electroluminescent display panel surface. The remaining cleaning solution is removed. 7. The developing device of the organic electroluminescent pixel definition layer according to claim 1, wherein the developing process performed by the developing device is used to define the organic electroluminescent display panel Light emitting area pattern and area. 8. A developing device for an organic electroluminescent pixel definition layer, which is used to perform a development process on an organic electroluminescent pixel definition layer; the developing device includes: A plurality of developing units connected back and forth, each developing unit is used to provide a developing solution, so that the developing solution is evenly distributed on the surface of an organic electroluminescent display panel, and lasts for a predetermined time; a cleaning unit, which is connected to the developing unit at the rearmost side, and is used to spray a cleaning solution to remove the residual developing solution on the surface of the organic electroluminescence display panel; A drying unit is connected with the cleaning unit and is used to dry the cleaning solution remaining on the surface of the organic electroluminescence display panel; A conveying unit is respectively connected with the plurality of developing units, the cleaning unit and the drying unit, and sequentially conveys the organic electroluminescence display panel to the plurality of developing units, the cleaning unit in a continuous conveying manner. unit and the drying unit; and A control unit is used to control the transmission mode and transmission time of the transmission unit, so as to accurately control the processing time of the organic electroluminescence display panel in each unit; Wherein the developing device can flexibly select and use the plurality of developing units according to maintenance needs and developing process requirements, and the control unit can control the processing time of the selected developing units to precisely control the organic electroluminescence display panel development time. 9. The developing device of the pixel definition layer of organic electroluminescence as claimed in claim 8, wherein the developing device further comprises a loading unit, which is connected with the drying unit and can be loaded with the finished developing unit. The display panel is processed to provide a buffer zone for the display panel to directly enter the downstream photoresist stripping module. 10. The developing device of the organic electroluminescent pixel definition layer as claimed in claim 8, wherein the developing unit shakes the organic electroluminescent display panel to make the developing solution evenly Distributed on the surface of the organic electroluminescence display panel, and a spray pressure controller is used to control the spray pressure of the developer in the nozzle to obtain the best uniformity of development. 11. The developing device for the pixel definition layer of organic electroluminescence as claimed in claim 10, wherein each developing unit further comprises at least one air knife, which is arranged at the end of the developing unit and is used to blowing off excess developing solution on the surface of the organic electroluminescent display panel. 12. The developing device for the pixel definition layer of organic electroluminescence as claimed in claim 10, wherein the developing unit device further comprises a developing solution recovery unit, which is used to recover and provide reused used The developer, and a developer temperature heating controller, are used to control the temperature conditions of the developing process. 13. The developing device for the pixel definition layer of organic electroluminescence as claimed in claim 8, wherein the drying unit uses an air knife to dry the organic electroluminescent display panel surface. The remaining cleaning solution is removed. 14. The developing device of the organic electroluminescent pixel definition layer according to claim 8, wherein the developing process performed by the developing device is used to define the organic electroluminescent top display panel The pattern and area of the light-emitting area. 15. A development device for an organic electroluminescence pixel definition layer, which is used to perform a development process on an organic electroluminescence pixel definition layer: the development device includes: A developing unit is used to provide a developing solution so that the developing solution is uniformly distributed on the surface of an organic electroluminescent display panel for a predetermined developing time; A first-stage cleaning unit is connected with the developing unit and is used to spray a circulating solution to initially remove the developer remaining on the surface of the organic electroluminescence display panel; A second-stage cleaning unit is connected to the first-stage cleaning unit, and is used to spray a fresh cleaning solution to completely remove the developer remaining on the surface of the organic electroluminescent display panel; A blow-drying unit, which is connected to the second cleaning unit, and is used to dry the remaining solution on the surface of the organic electroluminescent display panel; A conveying unit is respectively connected with the developing unit, the first-stage cleaning unit, the second-stage cleaning unit and the drying unit, and conveys the organic electroluminescent display panel to the In the developing unit, the first-stage cleaning unit, the second-stage cleaning unit, and the drying unit; and A control unit is used to control the transmission mode and transmission time of the transmission unit, so as to accurately control the processing time of the organic electroluminescence display panel in each unit; Wherein the fresh cleaning solution used in the second stage cleaning unit is circulated to the first stage cleaning unit to be used as the circulating solution. 16. The developing device of the pixel definition layer of organic electroluminescence as claimed in claim 15, wherein the developing device further comprises a loading unit, which is connected with the drying unit, and can be loaded with the finished developing unit. The display panel is processed to provide a buffer zone for the display panel to directly enter the downstream photoresist stripping module. 17. The developing device of an organic electroluminescent pixel definition layer as claimed in claim 15, wherein the developing unit shakes the organic electroluminescent display panel to make the developing solution evenly Distributed on the surface of the organic electroluminescence display panel, and a spray pressure controller is used to control the spray pressure of the developer in the nozzle to obtain the best uniformity of development. 18. The developing device of organic electroluminescent pixel definition layer as claimed in claim 17, wherein the developing unit further comprises at least one air knife, which is arranged at the end of the developing unit and is used for blowing removing excess developer on the surface of the organic electroluminescence display panel. 19. The developing device of an organic electroluminescent pixel definition layer as claimed in claim 17, wherein the developing unit further comprises a developing solution recovery unit for recovering and providing reused used developing solution , and a developer temperature heating controller, used to control the temperature conditions of the development process. 20. The developing device for the pixel definition layer of organic electroluminescence as claimed in claim 15, wherein the drying unit utilizes an air knife to dry the organic electroluminescence on the surface of the display panel. The remaining cleaning solution is removed. 21. The developing device of the organic electroluminescent pixel definition layer according to claim 17, wherein the developing process performed by the developing device is used to define the organic electroluminescent display panel Light emitting area pattern and area.

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