CN119318817B - Solid material sublimation evaporator device and optical fiber preparation system - Google Patents
Solid material sublimation evaporator device and optical fiber preparation systemInfo
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- CN119318817B CN119318817B CN202411222353.6A CN202411222353A CN119318817B CN 119318817 B CN119318817 B CN 119318817B CN 202411222353 A CN202411222353 A CN 202411222353A CN 119318817 B CN119318817 B CN 119318817B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D7/00—Sublimation
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
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- Geochemistry & Mineralogy (AREA)
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- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
The invention discloses a solid material sublimation evaporator device and an optical fiber preparation system, and relates to the technical field of optical fiber preparation. The evaporation device comprises a tray set, an air inlet pipe and an air outlet pipe, wherein the tray set comprises an annular cover plate, a first annular disk and a second annular disk which are sequentially overlapped and are in clearance sealing arrangement, an inner annular hole of the annular cover plate, an inner annular hole of the first annular disk and an inner annular hole of the second annular disk are communicated, a first groove is formed in one side of the first annular disk, which faces the annular cover plate, a second groove is formed in one side of the second annular disk, which faces the annular cover plate, a first through hole is formed in the annular cover plate, the air inlet pipe penetrates through the first through hole and can be communicated with the first groove, a first hole penetrating through the first annular disk is formed in the bottom of the first groove, the first groove is communicated with the second groove, a second hole penetrating through the second annular disk is formed in a grassland of the second groove, and the second hole can be communicated with the air outlet pipe. The invention solves the technical problem of poor evaporation effect of the existing evaporator device.
Description
Technical Field
The invention relates to the technical field of optical fiber preparation, in particular to a solid material sublimation evaporator device and an optical fiber preparation system.
Background
Rare earth doped active optical fibers are the core component in present fiber lasers. The preparation process of the rare earth doped active optical fiber mainly comprises two main categories, namely 1, MCVD+solution method and 2, MCVD+high temperature gas phase method (CDS). The high-temperature gas phase method adopts on-line doping solid materials, and compared with the solution method, the high-temperature gas phase method has higher efficiency and better control of product stability. The high temperature gas Xiang Fa heats the solid rare earth chelate and other relevant solid materials to form steam, and the steam is carried into the reaction tube by He carrier gas. The rare earth doped core component is a high-temperature evaporation system of solid materials, and how to ensure the stable evaporation pressure and flow rate of the solid materials is the key for preparing the rare earth doped active optical fiber.
The traditional solid material evaporator is disc-shaped, a plurality of discs can be stacked, a small amount of materials are arranged in each disc, the discs are stacked together and then are placed in a metal protection shell, the metal shell mainly plays a role of isolating the internal atmosphere from the external atmosphere and protecting the tightness of the evaporator, the whole metal shell is placed in a heating cavity, the temperature of the evaporator is increased along with the heating of the cavity, steam evaporated from the materials enters a reaction tube along with carrier gas for reaction, the size of the discs is limited relatively greatly because of the requirement of temperature stabilization, the material loading capacity of the discs is correspondingly small, meanwhile, the carrier gas flow route is carried out from the whole surface of the discs, no fixed gas route exists, and the carrier gas effect is unstable.
Disclosure of Invention
In view of the above, the present invention provides a solid material sublimation evaporator device and an optical fiber preparation system, which are used for solving the technical problem of poor effect of the solid material evaporator device.
In order to solve the technical problems, the first technical scheme adopted by the invention is as follows:
the utility model provides a solid material sublimates evaporator device, evaporation plant includes charging tray group, intake pipe and outlet duct, the charging tray group is including overlapping in proper order and the sealed annular apron of setting in clearance, first annular disk and second annular disk, the interior annular hole of annular apron first annular disk with the interior annular hole intercommunication of second annular disk, first annular disk orientation one side of annular apron has seted up first recess, second annular disk orientation one side of annular apron has seted up the second recess, first through-hole has been seted up on the annular apron, the intake pipe wears to locate first through-hole can with first recess intercommunication, the first hole that runs through first annular disk has been seted up to the tank bottom of first recess, first hole makes first recess with second recess intercommunication, the meadow of second recess has been seted up and has been run through the second hole of second annular disk, the second hole can with the outlet duct intercommunication.
In some embodiments of the solid material sublimation evaporator apparatus, an outer diameter of the first annular disc is the same size as an outer diameter of the second annular disc, an inner diameter of the first annular disc is the same size as an inner diameter of the second annular disc, and central axes of the first annular disc and the second annular disc are arranged in superposition.
In some embodiments of the solid material sublimation evaporator apparatus, a first boss is provided at a location of the first groove bottom corresponding to the first hole, the first hole extending through the first boss, and/or a second boss is provided at a location of the second groove bottom corresponding to the second hole, the second hole extending through the second boss.
In some embodiments of the solid material sublimation evaporator apparatus, the first groove bottom is spirally disposed around the inner ring hole of the first annular disk to have a first end, a second end, and an extension groove section communicating the first end and the second end, the air inlet pipe is communicated with the first end, and an opening position of the first hole is located in the second end;
And/or the bottom of the second groove is spirally arranged around the inner ring hole of the second annular disk so as to be provided with a third end, a fourth end and an extension groove section communicated with the third end and the fourth end, the first hole is communicated with the third end, and the opening position of the second hole is positioned in the fourth end.
In some embodiments of the solid material sublimation evaporator apparatus, the number of the first annular disks is two, the second annular disk is arranged between the two first annular disks, and the first holes on the first annular disk far from the annular cover plate are communicated with the air outlet pipe;
Or the number of the first annular discs and the second annular discs is multiple, and the first annular discs, the second annular discs and the first annular discs are overlapped according to the arrangement mode of the first annular discs, the second annular discs and the first annular discs.
In some embodiments of the solid material sublimation evaporator apparatus, sealing sheets are provided between the annular cover plate and the first annular disc and on the sides of the first annular disc and the second annular disc.
In some embodiments of the solid material sublimation evaporator device, a plurality of strip holes penetrating through the sealing piece are formed in the sealing piece at positions corresponding to the grooves of the annular disc, so that the sealing piece with a net-shaped structure is formed, and orthographic projections of inner walls of the strip holes towards the bottom surfaces of the grooves are located in the bottom surfaces of the grooves.
In some embodiments of the solid material sublimation evaporator device, the annular cover plate is further provided with a second through hole penetrating through the annular cover plate, the evaporator device further comprises a temperature measuring element and a container, the container penetrates through the second through hole and stretches into the first groove, and the temperature measuring element is accommodated in the container.
In some embodiments of the solid material sublimation evaporator apparatus, the evaporator apparatus further comprises a heating control module and a temperature detection element, the temperature detection element is used for detecting the temperature of the outer wall of the tray set, the heating control module is in communication connection with both the temperature measurement element and the temperature detection element, so as to be capable of acquiring and controlling the detection data of the temperature measurement element, and the control step comprises the following steps:
setting a preset temperature value T1 of the temperature measuring element;
Setting a maximum temperature difference value delta t between the temperature measuring element and the temperature detecting element;
And stopping heating when the actual temperature detection value detected by the temperature measuring element reaches the sum of T1 and delta T, until the actual temperature detection value of the temperature detecting element reaches T1.
In order to solve the technical problems, the second technical scheme adopted by the invention is as follows:
an optical fiber preparation system comprising a solid material sublimation evaporator apparatus as described in the above embodiments.
The implementation of the embodiment of the invention has at least the following beneficial effects:
The solid material sublimation evaporator device is applied to an optical fiber preparation system, and can enable the device and the optical fiber preparation system to have the technical effect of good evaporation effect, specifically, the first annular disc and the second annular disc are respectively provided with the first groove and the second groove and can be used for accommodating and placing materials for evaporation, and the first annular disc and the second annular disc are of annular structures and are provided with inner annular holes, so that the uniformity of the overall temperature of the evaporator device can be effectively improved, the temperature of the whole evaporator is more uniform, obvious local supercooling or overheating conditions cannot occur, the materials are decomposed and denatured by overheating, and then the materials are condensed into a solid state to block an airflow pipeline, and the technical problem of poor evaporation effect of the existing evaporator device is solved.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of an evaporator apparatus in one embodiment;
FIG. 2 is a schematic view of an exploded construction of the evaporator apparatus shown in FIG. 1;
fig. 3 is a cross-sectional view of an exploded construction of the evaporator assembly shown in fig. 2.
Wherein:
1. The device comprises an air inlet pipe, 2, an air outlet pipe, 3, a container, 4, an annular cover plate, 41, a first through hole, 42, a second through hole, 5, a first annular disc, 51, a first groove, 511, a first end, 512, a second end, 52, a first boss, 6, a second annular disc, 61, a second groove, 611, a third end, 612, a fourth end, 62, a second boss, 7, a sealing piece, 71 and a strip hole.
Detailed Description
In order that the invention may be readily understood, a more complete description of the invention will be rendered by reference to the appended drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many other different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
As shown in fig. 1-3, in an embodiment of a solid material sublimation evaporator device, the evaporation device includes a tray set, an air inlet pipe 1 and an air outlet pipe 2, where the tray set includes an annular cover plate 4, a first annular disk 5 and a second annular disk 6 that are stacked in order and are disposed in a gap-sealing manner, an inner annular hole of the annular cover plate 4, an inner annular hole of the first annular disk 5 and an inner annular hole of the second annular disk 6 are communicated, a first groove 51 is formed on a side of the first annular disk 5 facing the annular cover plate 4, a second groove 61 is formed on a side of the second annular disk 6 facing the annular cover plate 4, a first through hole 41 is formed on the annular cover plate 4, and the air inlet pipe 1 is disposed through the first through hole 41 and can be communicated with the first groove 51. The tank bottom of the first groove 51 is provided with a first hole penetrating through the first annular disk 5, the first hole enables the first groove 51 to be communicated with the second groove 61, the grassland of the second groove 61 is provided with a second hole penetrating through the second annular disk 6, and the second hole can be communicated with the air outlet pipe 2.
In this embodiment, the first groove 51 and the second groove 61 are respectively formed in the first annular disk 5 and the second annular disk 6, and can be used for accommodating and placing materials for evaporation, and the first annular disk 5 and the second annular disk 6 are of annular structures and are provided with inner annular holes, so that the uniformity of the overall temperature of the evaporator device can be effectively improved, the temperature of the whole evaporator is more uniform, obvious local supercooling or overheating conditions can not occur, the overheating can lead to failure after material decomposition and denaturation, the supercooling can condense the materials into a solid state, and an airflow pipeline is blocked, thereby solving the technical problem that the evaporation effect of the existing evaporator device is poor.
In an embodiment of the solid material sublimating evaporator device, the outer diameter of the first annular disc 5 is the same as the outer diameter of the second annular disc 6, the inner diameter of the first annular disc 5 is the same as the inner diameter of the second annular disc 6, and the central axes of the first annular disc 5 and the second annular disc 6 are coincident.
In this embodiment, the first annular disc 5 and the second annular disc 6 are set to have the same inner diameter and outer diameter, so that the first annular disc and the second annular disc can be stacked and aligned conveniently, and a better sealing effect is achieved.
It will be appreciated that in this embodiment the first annular disc 5 and the second annular disc 6 may be identical structural members, so that the amount of open modulus can be reduced during processing.
In one embodiment of the solid material sublimating evaporator device, a first boss 52 is arranged at a position corresponding to a first hole at the bottom of the first groove 51, and the first hole penetrates through the first boss 52. And/or, a second boss 62 is arranged at the position of the bottom of the second groove 61 corresponding to the second hole, and the second hole penetrates through the second boss 62.
In this embodiment, it will be appreciated that the first recess 51 and the second recess 61 are used to hold materials, and at high temperature, the solid materials will travel in a molten state, and by providing the first boss 52 and the second boss 62 at positions corresponding to the first hole and the second hole, respectively, the step can be traveled to raise the position of the first hole and the position of the second hole, so that the materials in the first recess 51 can be prevented from flowing out through the first hole in a molten state, and the materials in the second recess 61 can be prevented from flowing out through the second hole in a molten state.
In one embodiment of the solid material sublimating evaporator device, the bottom of the first groove 51 is spirally arranged around the inner ring hole of the first annular disk 5 to have a first end 511, a second end 512 and an extending groove section communicating the first end 511 and the second end 512, the air inlet pipe 1 is communicated with the first end 511, and the opening position of the first hole is located in the second end 512. And/or the bottom of the second groove 61 is spirally arranged around the inner ring hole of the second annular disk 6 to have a third end 611, a fourth end 612 and an extension groove section communicating the third end 611 and the fourth end 612, the first hole is communicated with the third end 611, and the opening position of the second hole is located in the fourth end 612.
In this embodiment, the carrier gas stroke can be improved by setting the bottom of the first groove 51 to be spiral, the gas flows out from the other end after entering from one end of the first groove 51 and running through the complete stroke, the long stroke can better promote the material to generate steam, the phenomenon that the steam is too little due to short stroke is avoided, and in the same way, the stroke size of the gas in the second groove 61 can be enhanced by setting the second groove 61 to be spiral, so that the evaporation effect is better, and the stroke is large, so that the evaporator device has a stable evaporation area and good stability.
In addition, it will be appreciated that when the first groove 51 and the second groove 61 are both helical, the positions of the first hole and the second hole are correspondingly opposite, and the first hole is disposed at the end of the inner ring, and the second hole is disposed at the end of the outer ring, or vice versa.
Further combining the previous embodiments, the spiral grooves cooperate with the annular disc, so that the temperature of the evaporator device can be more uniform, the uniformity is further improved, and local overheating or supercooling is avoided.
In one embodiment of the solid material sublimating evaporator apparatus, the number of the first annular disks 5 is two, the second annular disk 6 is arranged between the two first annular disks 5, and the first holes in the first annular disk 5 far from the annular cover plate 4 are communicated with the air outlet pipe 2. Or, the number of the first annular discs 5 and the second annular discs 6 is plural, and the first annular discs 5, the second annular discs 6 and the first annular discs 5 are overlapped according to the arrangement mode.
In this embodiment, through setting up annular disk stack, can increase the material of same batch, reduce the frequency of reloading, reduce the time of shutting down reloading, improve production effect, can increase and decrease wantonly according to the in-service use, satisfy different manufacturer's demand. In combination with the previous spiral embodiment of the first groove 51 and the second groove 61, when a plurality of annular discs are stacked, still arranged in such spiral communication, each annular disc goes through a complete spiral and then enters the next annular disc groove.
In the previous embodiments, the sealing between the first annular disc 5 and the annular cover plate 4 and the first annular disc 5 and the second annular disc 6 may be achieved by a press-fit tight with each other, whereas in one solid material sublimation evaporator device embodiment sealing strips 7 are provided between the annular cover plate 4 and the first annular disc 5 and on the side of the first annular disc 5 and the second annular disc 6.
In the embodiment, the sealing of the gap between the two can be ensured by arranging the sealing sheet 7, so that the tightness is improved, the contact between the external air and the internal materials is blocked, and the performance of the materials is not influenced by moisture and oxygen in the air. Specifically, the sealing piece 7 can be made of a high-temperature-resistant corrosion-resistant organic polymer material, has certain elasticity and deformability, and can achieve a better sealing effect compared with the sealing of the annular disc in direct contact, the sealing piece 7 is adopted as a sealing piece in the middle, the sealing piece 7 can also have the effect of covering the first groove 51 and the second groove 61, and the air flow is prevented from running out of the travel of the first groove 51 and the second groove 61.
In one embodiment of the solid material sublimating evaporator device, a plurality of strip holes 71 penetrating through the sealing sheet 7 are formed on the sealing sheet 7 at the positions corresponding to the grooves of the annular disc, so as to form the sealing sheet 7 with a net-shaped structure, and the orthographic projection of the inner walls of the strip holes 71 towards the bottom surface of the groove is positioned in the bottom surface of the groove.
In this embodiment, in combination with the previous embodiment, the first groove 51 and the second groove 61 are both spiral, and in this embodiment, by forming the strip hole 71 on the sealing sheet 7, the structure of the sealing sheet 7 can be changed into a net shape, the strip hole 71 can correspond to the first groove 51 or the second groove 61, it can be ensured that the sealing sheet 7 will not collapse into the groove and the difficulty in installing the sealing sheet 7 is reduced, and the sealing effect is not affected, and under the sealing sheet 7 with a net structure, the air flow still travels according to the travel of the first groove 51 and the second groove 61.
In an embodiment of the solid material sublimating evaporator device, the annular cover plate 4 is further provided with a second through hole 42 penetrating through the annular cover plate 4, the evaporator device further comprises a temperature measuring element and a container 3, the container 3 is arranged through the second through hole 42 and extends into the first groove 51, and the temperature measuring element is accommodated in the container 3.
In the present embodiment, the temperature inside the evaporator can be measured by putting the temperature measuring element into the container 3 and then extending into the first recess 51. Specifically, the container 3 preferably has a cylindrical structure, and has a bottom, which is not in communication with the first groove 51, so as to protect the temperature measuring element.
In an embodiment of the solid material sublimation evaporator device, the evaporator device further comprises a heating control module and a temperature detection element, wherein the temperature detection element is used for detecting the temperature of the outer wall of the tray set, the heating control module is in communication connection with the temperature detection element and the temperature detection element so as to obtain detection data of the temperature detection element and control the temperature detection element, and the control step comprises the following steps:
A preset temperature value T1 of the temperature measuring element is set.
And setting a maximum temperature difference value delta t between the temperature measuring element and the temperature detecting element.
And stopping heating when the actual temperature detection value detected by the temperature measuring element reaches the sum of T1 and deltat until the actual temperature detection value of the temperature detecting element reaches T1.
In this embodiment, the heating control mode of the evaporator device is improved, and in combination with the foregoing embodiment, two temperature measuring components are provided, one is a temperature measuring element for measuring the temperature inside the evaporator device, and the other is a temperature detecting element for measuring the temperature of the outer wall of the evaporator device, where it is understood that, because the temperatures of the two detecting points are different at the same time point, the temperature of the inner wall of the evaporator device will reach the T1 value more quickly, when the temperature value measured by the temperature measuring element reaches the sum of T1 and Δt, the heating is not continued, and the temperature is maintained until the actual detected value of the temperature detecting element reaches T1.
In addition, the evaporator device can be wrapped by the cover body, and the temperature detection element is placed in a gap between the evaporator device and the inner wall of the cover body. Specifically, the temperature measuring element and the temperature detecting element may be thermocouple structural members.
Finally, the annular cover plate 4 and the first annular disc 5 and the second annular disc 6 can be sealed and fixed by inserting bolts on the peripheral edge, and the installation sequence and the torque can be obtained through simulation, so that the integral sealing performance of the evaporator device is ensured.
The invention also relates to an optical fiber preparation system comprising the solid material sublimation evaporator apparatus of the previous embodiment.
Through being applied to in the optic fibre preparation system with this evaporator device, there is fixed gas flow path in the evaporator device, guaranteed that the carrier route of carrier gas is long enough, reached can provide stable carrier gas for optic fibre preparation system, effectively improve the product yield to the material loading is big, can avoid the material frequently to change the material and lead to same batch of product difference big.
The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The foregoing examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (10)
1. The solid material sublimating evaporator device is characterized by comprising a tray group, an air inlet pipe and an air outlet pipe, wherein the tray group comprises an annular cover plate, a first annular disc and a second annular disc which are sequentially overlapped and are in clearance sealing arrangement, an inner annular hole of the annular cover plate, an inner annular hole of the first annular disc and an inner annular hole of the second annular disc are communicated, a first groove is formed in one side of the first annular disc, a second groove is formed in one side of the second annular disc, a first through hole is formed in the annular cover plate, the air inlet pipe penetrates through the first through hole and can be communicated with the first groove, a first hole penetrating through the first annular disc is formed in the bottom of the first groove, the first groove is communicated with the second groove, a second hole penetrating through the second annular disc is formed in the bottom of the second groove, and the second hole can be communicated with the air outlet pipe.
2. The evaporator apparatus as set forth in claim 1, wherein said first annular disk has an outer diameter of the same size as an outer diameter of said second annular disk, an inner diameter of said first annular disk is of the same size as an inner diameter of said second annular disk, and central axes of said first annular disk and said second annular disk are disposed in coincidence.
3. The evaporator apparatus as set forth in claim 1, wherein a first boss is provided at a position of the bottom of said first groove corresponding to said first hole through which said first hole penetrates, and/or a second boss is provided at a position of the bottom of said second groove corresponding to said second hole through which said second hole penetrates.
4. The evaporator device as set forth in claim 1, wherein said first groove bottom is spirally disposed around an inner ring hole of said first annular disk so as to have a first end, a second end, and an extended groove section communicating said first end and said second end, said intake pipe being communicated with said first end, said first hole being opened at a position in said second end;
And/or the bottom of the second groove is spirally arranged around the inner ring hole of the second annular disk so as to be provided with a third end, a fourth end and an extension groove section communicated with the third end and the fourth end, the first hole is communicated with the third end, and the opening position of the second hole is positioned in the fourth end.
5. The evaporator apparatus as set forth in claim 1 or 4, wherein said first annular disks are two in number, said second annular disk being provided between two of said first annular disks, said first holes in said first annular disk remote from said annular cover plate being in communication with said outlet pipe;
Or the number of the first annular discs and the second annular discs is multiple, and the first annular discs, the second annular discs and the first annular discs are overlapped according to the arrangement mode of the first annular discs, the second annular discs and the first annular discs.
6. The evaporator assembly of claim 5, wherein sealing sheets are disposed between the annular cover plate and the first annular disc and between the first annular disc and the second annular disc.
7. The evaporator assembly of claim 6, wherein a plurality of openings are formed in said sealing plate at positions corresponding to the recesses of the annular disk, said openings being positioned in said recess bottom surface in a manner that the orthographic projection of the inner walls of said openings toward the bottom surface of the recess, so as to form said sealing plate having a mesh structure.
8. The evaporator device of claim 1, wherein the annular cover plate is further provided with a second through hole penetrating the annular cover plate, and the evaporator device further comprises a temperature measuring element and a container, wherein the container penetrates through the second through hole and extends into the first groove, and the temperature measuring element is accommodated in the container.
9. The evaporator apparatus as set forth in claim 8, further comprising a heating control module and a temperature detecting element for detecting a temperature of an outer wall of said tray set, said heating control module being communicatively connected to both said temperature measuring element and said temperature detecting element so as to be able to acquire detection data of said temperature measuring element and control, the controlling step comprising:
setting a preset temperature value T1 of the temperature measuring element;
Setting a maximum temperature difference value delta t between the temperature measuring element and the temperature detecting element;
And stopping heating when the actual temperature detection value detected by the temperature measuring element reaches the sum of T1 and delta T, until the actual temperature detection value of the temperature detecting element reaches T1.
10. An optical fiber preparation system comprising a solid material sublimation evaporator apparatus according to any one of claims 1-9.
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| RU2362607C1 (en) * | 2007-12-19 | 2009-07-27 | Открытое акционерное общество "Уральский электрохимический комбинат" (ОАО "УЭХК") | Desublimation device |
| WO2019023011A1 (en) * | 2017-07-25 | 2019-01-31 | Linde Aktiengesellschaft | Solid composition sublimer apparatus, systems, and methods of using same |
| JP2021084821A (en) * | 2019-11-26 | 2021-06-03 | 株式会社フジクラ | Gas supply device and optical fiber preform manufacturing apparatus |
| CN113564563A (en) * | 2021-07-20 | 2021-10-29 | 江苏微导纳米科技股份有限公司 | Evaporation device and vacuum coating equipment |
| CN116121730B (en) * | 2023-04-12 | 2023-09-01 | 江苏鹏举半导体设备技术有限公司 | Solid precursor source sublimation device |
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2024
- 2024-09-02 CN CN202411222353.6A patent/CN119318817B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101960044A (en) * | 2008-01-10 | 2011-01-26 | 乔治洛德方法研究和开发液化空气有限公司 | Solid precursor sublimator |
| CN108467195A (en) * | 2018-05-24 | 2018-08-31 | 江苏亨通光纤科技有限公司 | Laser fiber prefabricated rods gas phase doping rare earth material vaporising device |
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| CN119318817A (en) | 2025-01-17 |
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