CN1190660C - Heterodyne interferometric surface plasmon wave sensing device and method - Google Patents
Heterodyne interferometric surface plasmon wave sensing device and method Download PDFInfo
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Abstract
The invention provides a heterodyne interference type surface plasma wave sensing device and method, which utilize dual-frequency linear polarization frequency stabilization laser to simultaneously generate two surface plasma waves on a metal film interface, and immediately measure data such as interaction, reaction rate, reaction kinetics and the like among molecules of biological and chemical materials by measuring the amplitude of a reflected heterodyne interference optical signal.
Description
Technical field
The present invention relates to a kind of plasma wave sensing apparatus and method, particularly a kind of heterodyne interference type surface plasma wave sensing apparatus and method.
Background technology
Pass through some immunoassays (ELISA or RIA) detection pathogen bacterium or virus traditionally and need three days at least, it must pass through cleaning-reaction-steps such as cleaning and can finish, if utilize optical fiber biosensor, though can shorten the time of check greatly, yet need also to indicate that fluorescent material can carry out, and in fluoroscopic examination sensitivity, certain limitation arranging, up-to-date method is to utilize surface plasma wave resonance method (Surface Plasma Resonance at present; SPR), can have quick test and need not use the advantage of fluorescence sign simultaneously.Surface plasma wave (SurfacePlasma Wave; SPW) be " electromagnetic wave that shakes synchronously in the metal surface ", and the occurring principle of surface plasma resonance is to make the propagation constant k of the P polarization light (TM wave) of incident in the direction that is parallel to the metallic film interface by prism or other different optical coupled (opticalcoupling) structure
xPropagation constant k with surface plasma wave
SpIdentical, and satisfy the condition that resonates: k
x=k
gSin θ=k
Sp, k wherein
g=[ω/c] (ε
0)
1/2,
k
Sp=[ω/c] (ε
1ε
2/ (ε
1+ ε
2))
1/2, ω is the incident laser frequency, and ε
0, ε
1, ε
2Be respectively the specific inductive capacity of prism, metal film and tested medium, result from metal film this moment and can produce surface plasma wave and also simultaneously the incident light energy is taken away attached to the dielectric interface on the metal film, therefore cause catoptrical strength degradation, as Fig. 1.And produce the translation of resonance angle or the variation (as Fig. 2) that the fixed laser incident angle is measured intensity of reflected light by detecting because of the change of specific inductive capacity or the change of refractive index, and can try to achieve as physical quantitys such as refraction index changings.More than two kinds of methods be used in widely in the quick test of biomedicine or chemical substance, yet no matter this kind method utilizes the variation of intensity of reflected light or the variation of resonance angle occurrence positions to detect physical quantity, certain restriction is arranged all in sensitivity.
Summary of the invention
The object of the present invention is to provide a kind of new difference interference surface plasma wave sensing apparatus and method, adopt the line polarization laser of bifrequency mutually vertical (orthogonal), for example day graceful (Zeeman) laser produces two surface plasma waves on interfaces such as metal film, utilize the amplitude size variation of the difference interference signal of measuring the P polarization reflection wave (the first polarized light P1+, the second polarized light P2) that produces surface plasma wave, replace traditionally with methods (as Fig. 3) such as the position of measuring resonance angle or the variations of individual reflection P wave intensity, the detection sensitivity that is used for device and method of the present invention can significantly improve and can measure tested intermolecular interaction immediately, for example, in conjunction with (association), separate (dissociation) speed and concentration functions such as (concentration), also can develop into chemistry and biology sensor (sensor) or other application simultaneously.
For realizing purpose of the present invention, we propose a kind of heterodyne interference type surface plasma wave method for sensing, be used to measure chemistry or biomolecule interphase interaction, when this method produces surface plasma wave at the interface, the amplitude variations that the reflection first polarized light P1 of measurement two mutual people having the same aspiration and interest connections, different frequency and the reflection wave of the second polarized light P2 produce the difference interference signal calculates physical quantity to be measured, and this method comprises the following steps:
(1) substrate of using as total reflection with a total reflection device with first refractive index, one has the metallic film of second refractive index and standard one set thickness, it abuts against this total reflection device substrate, another side at this metallic film adheres to a chemistry or biofilm simultaneously, and wherein this second refractive index is lower than this first refractive index;
(2) angle of adjustment and correction incident laser makes surface plasma wave produce surface plasma wave on this metallic film and this chemistry or biofilm interface;
(3) adopt bifrequency and mutual perpendicular line polarization laser, it is P polarized light and S polarized light, and make incident laser be transformed into different frequency and the mutually first polarized light P1 and the second polarized light P2 of people having the same aspiration and interest connection through a polarized light element group, polarized light P1 and P2 produce surface plasma wave through total reflection respectively on metal film and chemistry or biofilm interface, its first reflection wave P
1' and the second reflection wave P
2' producing the difference interference signal, its beat frequency equals this double-frequency difference frequency;
(4) optical interference signals of the reference beam of same carrier frequencies and signal beams passes through band-pass filter, and the difference interference signal is input in lock-in amplifier or the amplitude demodulation device, can measure the amplitude and the phase change of difference interference signal immediately; And
(5) select suitable incident angle, also promptly near the resonance angle that surface plasma wave produces, measure the amplitude size of difference interference signal and amount or phase changing capacity over time.
Above-mentioned heterodyne interference type surface plasma wave method for sensing, the first polarized light P1 and the second polarized light P2 line polarization laser that interrelate of bifrequency wherein can obtain by the following method:
(1) unifrequency line polarization laser is in conjunction with phase-modulator, the assembly of polarized light, Mach-Ce Side (Mach-Zehnder) interferometer;
(2) unifrequency line polarization laser is in conjunction with the electro-optic modulators of fixed drive frequency;
(3) semiconductor laser cooperates the power supply unit and the polarized light assembly of current-modulation, forms Mach-Ce Side (Mach-Zehnder) interferometer;
(4) the relevant first polarized light P1 and the second polarized light P2 of the bifrequency people having the same aspiration and interest can utilize unifrequency line polarization semiconductor laser to cooperate polarization to keep single-mode fiber and integrated optics assembly, and phase-modulator forms Mach-Ce Side (Mach-Zehnder) interferometer; And
(5) the first polarized light P1 that the bifrequency people having the same aspiration and interest is relevant and the second polarized light P2 also can utilize unifrequency P swash polar biased laser to cooperate the phase modulation device to form Mechelson, A. A. (Michelson) interferometer.
Above-mentioned heterodyne interference type surface plasma wave method for sensing, wherein the mutual perpendicular line polarization of bifrequency laser can be replaced by the vertical mutually circle polarization of bifrequency laser, its polarized light element group is the polarization sheet of a P polarization, can produce the first polarized light P1 and the second polarized light P2 of different frequency.
Above-mentioned heterodyne interference type surface plasma wave method for sensing, wherein this total reflection device can be replaced and produced surface plasma wave by grating, and the bifrequency line polarization laser of incident is to reenter through the tested film of printing opacity earlier to be incident upon metallic film and to produce surface plasma wave on its interface.
Above-mentioned heterodyne interference type surface plasma wave method for sensing, wherein this physical quantity is the refractive index and the variable quantity thereof of object under test.
Above-mentioned heterodyne interference type surface plasma wave method for sensing, wherein this physical quantity is the intermolecular combination of object under test or separating reaction speed and dynamics thereof.
Above-mentioned heterodyne interference type surface plasma wave method for sensing can be combined into biology sensor or chemical sensor through antigen-antibody.
Above-mentioned heterodyne interference type surface plasma wave method for sensing, it is through the ratio x=(A of the difference interference signal amplitude size of measuring-signal light beam and reference beam
p' A
s')/(A
pA
s), and improve detection sensitivity, to avoid the instability of incident laser light intensity, Ap wherein, As is respectively orthogonal line polarization light P ripple and S wave amplitude; Ap ', As ' are respectively the amplitude of the reflected signal first reflection wave P1 ' and the second reflection wave P2 '.
Above-mentioned heterodyne interference type surface plasma wave method for sensing, wherein the big I of the amplitude of difference interference signal utilizes the amplitude demodulation device to finish, and is extensible to be multichannel difference interference surface plasma wave sensing system.
Above-mentioned heterodyne interference type surface plasma wave method for sensing, wherein multichannel difference interference signal beams is received by the one-dimensional array photodetector, and measure the amplitude variations of corresponding difference interference signal respectively immediately by the amplitude demodulation device, this bifrequency line polarization laser beam can be utilized the cylindrical lens mode, to reach the needed parallel beam of multichannel sensing.
Above-mentioned heterodyne interference type surface plasma wave method for sensing, it also comprises bifrequency, the orthogonal polarization laser with day graceful laser same optical properties, produce the bifrequency the people having the same aspiration and interest relevant first polarized light P1 and the second polarized light P2, on the metallic film interface, produce the first reflection wave P1 ' and the second reflection wave P2 ' of surface plasma wave and its reflection, produce the measuring method of difference interference signal and amplitude size thereof.
Above-mentioned heterodyne interference type surface plasma wave method for sensing, wherein multichannel difference interference signal beams is received by the two-dimensional array photodetector, and measure the amplitude variations of corresponding difference interference signal respectively immediately by the amplitude demodulation device, this bifrequency line polarization laser beam can utilize the laser beam expanding lens combination to reach the needed parallel beam of multichannel sensing.
Above-mentioned heterodyne interference type surface plasma wave method for sensing, wherein this polarized light element group comprises λ/2 slides, λ/4 slides and polarization sheet.
The heterodyne interference type surface plasma wave method for sensing of the above, wherein this laser is day graceful (Zeeman) laser.
Above-mentioned heterodyne interference type surface plasma wave method for sensing, wherein this total reflection device is to select from the combination that prism, optical fiber and integrated optics assembly are formed.
A kind of device of realizing this heterodyne interference type surface plasma wave method for sensing, it is used to measure the physical quantity of chemistry or bio-molecular interaction, when producing surface plasma wave at the interface, it measures the reflection first polarized light P1 and the second polarized light P2 of two mutual people having the same aspiration and interest connections, different frequency, the amplitude variations of the difference interference signal that produces calculates physical quantity to be measured, and this device comprises:
One LASER Light Source is used to produce laser;
One polarized light element group, make incident laser be transformed into the first polarized light P1 and the second polarized light P2 of different frequency and mutual people having the same aspiration and interest connection, polarized light P1 and P2 produce surface plasma wave through total reflection respectively on metal film and chemical film interface, the first reflection wave P of its reflection
1' and the second reflection wave P
2' producing the difference interference signal, its beat frequency equals double-frequency difference frequency;
One has the total reflection device of first refractive index, and one has the metallic film of second refractive index and standard one set thickness, and it is close proximity to this total reflection device substrate, and a chemistry or biofilm, and it is attached to the another side of this metallic film; Wherein this second refractive index is lower than this first refractive index;
One angular adjustment apparatus, the angle that is used to adjust and proofread and correct incident laser makes surface plasma wave produce surface plasma wave on this metallic film and this chemistry or biofilm interface;
One photodetector is respectively applied for and converts a reference beam and a signal beams to the difference interference signal;
One bandpass filter is used for the difference interference signal of reference beam and the difference interference filtering signals of signal beams; And
One lock-in amplifier or amplitude demodulation device can be measured the amplitude and the phase change of difference interference signal.
Above-mentioned heterodyne interference type surface plasma wave sensing apparatus, wherein this polarized light element group comprises λ/2 slides, λ/4 slides and polarization sheet.
Above-mentioned heterodyne interference type surface plasma wave sensing apparatus, wherein this laser is day graceful (Zeeman) laser.
Above-mentioned heterodyne interference type surface plasma wave sensing apparatus, wherein this total reflection device is selected from the combination that prism, optical fiber and integrated optics assembly are formed.
In sum, the present invention has following several advantages:
1. the optical texture of heterodyne interference type surface plasma wave sensing apparatus is simple;
2. high sensitivity reaches the bigger range of linearity:
The method of measuring resonance angle translation variation because of the method ratio of measuring single incident angle intensity of reflected light traditionally is highly sensitive, add the present invention with the amplitude of measuring the difference interference signal but not strength signal has more increased detection sensitivity, the range of linearity of Jian Ceing is also bigger simultaneously.
3. because of merging the technology of difference interference and phase-locked amplification, signal to noise ratio (S/N ratio) significantly improves.
4. the measurement of general amplitude is subject to the unsettled influence of laser intensity, and structure of the present invention is the amplitude of the difference interference signal of the difference interference signal of measuring-signal light beam and reference beam size ratio x=(A simultaneously also
p' A
s'/A
pA
s), can reduce the unsettled influence of laser light intensity significantly, improve sensitivity, Ap wherein, As is respectively orthogonal line polarization light P ripple and S wave amplitude; Ap ', As ' are respectively the amplitude of the reflected signal first reflection wave P1 ' and the second reflection wave P2 '.
5. the present invention need not indicate fluorescent material, not only makes the quick but also simplification of checkout procedure, and because of being the detection that belongs to instantaneity, can do instant measurement to the dynamic change in the intermolecular interaction process.
6. the present invention can develop into multichannel difference interference surface plasma wave sensing system.
Description of drawings
Be described in detail as follows with regard to most preferred embodiment of the present invention below in conjunction with accompanying drawing:
Fig. 1 is that the prism surface plasma wave produces key diagram;
Fig. 2 is intensity reflectivity R and the explanation of incident angle θ relation;
Fig. 3 is that the two surface plasma waves (the first polarized light P1+, the second polarized light P2) of prism produce explanation;
Fig. 4 is a surface plasma wave lens optical component drawings;
Fig. 5 heterodyne interference type surface plasma wave of the present invention sensing apparatus and method figure;
Fig. 6 is biomolecule mobilization process (IgG concentration is 38 μ g/ml);
Fig. 7 is anti--IgG and IgG molecular action situation;
Fig. 8 a is the result of the corresponding saturation signal of each concentration;
Fig. 8 b converts Fig. 8 a to logarithmic coordinate;
Fig. 9 is a multichannel difference interference surface plasma wave sensing system.
Embodiment
See also Fig. 4, glass substrate in the surface plasma wave lens optical assembly (glassbased plate) 53 surface evaporations gold-plated (Au) or silver metallic films such as (Ag), the about 50nm of thickness, wherein the purpose of optical index coupling solution (index matching oil) 52 is to make its refractive index identical in conjunction with prism 51 and glass substrate 53, metal film and surface thereof go up plating one deck chemical film 54 and and molecule with identical characteristics in conjunction with producing interaction.In reactor 58 and form molecule combination 57.Surface plasma wave because of be subjected to the metallic film adhering on surface the molecule combination for example the combination 57 of antigen-antibody cause the variation of optical index, and make the first polarized light P1 of reflection and the amplitude of the difference interference signal that the second polarized light P2 is produced change, utilize lock-in amplifier or relevant amplitude demodulation device can measure the amplitude size immediately again to reach the relevant physical quantity of instant detection and over time.
The present invention proposes a kind of heterodyne interference type surface plasma wave sensing apparatus and method, the optical texture that is proposed such as Fig. 5, the light source that adopts is the orthogonal line polarization of a bifrequency Frequency Stabilized Lasers, for example Zeeman laser 10, this kind laser output beam is mutually perpendicular line polarization light (P ripple and a S ripple), and its amplitude and frequency are respectively (A
p, ω
p) and (A
s, ω
s).Place a λ/2 slides 20, the P ripple and the S ripple polarization light anglec of rotation of laser output can be made to be expressed as P ripple paralleled by X axis thereafter
The capable Y-axis of S popin is expressed as simultaneously
After P involved the S ripple and is incident to a λ/4 slides 30 simultaneously, P ripple and S ripple converted the round polarization light of a dextrorotation (R ripple) and one left-handed (L ripple) to, and it can be expressed as:
Ap wherein, As is respectively orthogonal line polarization light P ripple and S wave amplitude, through P polarization sheet 40, makes the P wave component of R ripple and L ripple by polarization sheet 40, and produces the double-frequency first polarized light P1 and the second polarized light P2, and can be write as respectively
With
Through light splitting piece 50 light beam is divided into two bundles again, wherein signal beams is incident to surface plasma wave lens optical assembly 60, the rotating prism optical module makes laser incident angle change, select suitable incident angle, also promptly near the resonance angle that surface plasma wave produces, or when incident angle equals the surface plasma body resonant vibration angle, the first polarized light P1 and the second polarized light P2 of different frequency and interrelate (correlate) produce surface plasma wave respectively simultaneously on the metallic film surface, thereby there are two surface plasma waves on metallic film, to propagate simultaneously, and the reflected light of the first polarized light P1 and the second polarized light P2 is received back generation difference interference signal by detecting device 70, and its difference frequency is Δ ω=ω
p-ω
sFlashlight difference interference signal can be expressed as:
Wherein ΔΦ '=Φ
P1'-Φ
P2'.And A
p', A
s' and Φ
P1', Φ
P2' be respectively amplitude and the phase place of the reflected signal light first reflection wave P1 ' and the second reflection wave P2 ', by being that the AC signal that leaches can be write as after the bandpass filter 80 of centre frequency was filtered with Δ ω:
I
sig(Δωt)＝A
p′A
s′cos(Δωt+ΔΦ′)………………………………………(2)
Ap ' wherein, As ' is respectively the first reflection wave P1 ' of the reflected signal first polarized light P1 and the second polarized light P2 and the amplitude of the second reflection wave P2 '.
And with I
Sig(Δ ω t) is input to lock-in amplifier 90 and deals with.In like manner, the reference beam that spectroscope 50 is reflected is received by photodetector 71, and resulting reference light difference interference signal is:
ΔΦ=Φ wherein
P1-Φ
P2And Φ
P1, Φ
P2Be respectively first polarized light P1 of reference beam and the phase place of the second polarized light P2.Filter through bandpass filter 81, the reference light AC signal that is leached can be write as
I
ref(Δωt)＝A
pA
s?cos(Δωt+ΔΦ)………………………………………(4)
Send into lock-in amplifier 90 too.Like this, lock-in amplifier can detect the also signal of amplifying signal light, and significantly improve signal to noise ratio (snr) and sensitivity according to the frequency Δ ω of reference optical signal.Read by computer 91 note at last and calculate, can record the amplitude (A of difference interference signal immediately
p' A
s') size and the amount of phase place ΔΦ ' over time, and can immediate reaction go out interaction relationship between chemistry to be measured or biomolecule and the sensing chip.
Fig. 6 has finished the process that IgG antibody in the experiment is fixed in sensing chip (BIAcore, CM5 chip) surface, Fig. 7 then be the IgG antibody that is fixed on the sensing chip surface with testing sample in resist-immediate reaction data that IgG (about 100ng/ml) mutually combines.Fig. 7 is the resulting signal relation data of the determinand of variable concentrations (25ng/ml or 0.2nM).By the detection sensitivity of experimental result susceptible of proof apparatus of the present invention and method with and bigger linear measurement range significantly bring up to 50 times than classic method.
Patent of the present invention is as using the amplitude demodulation device, digital voltmeter (Digital voltmeter for example, DVM) measure the amplitude size of difference interference signal, patent difference interference surface plasma wave sensing apparatus then of the present invention and method can be converted into multichannel sensing system (as Fig. 9), wherein bifrequency line polarization laser 100 produces the laser beam of the bifrequency first polarized light P1 and the second polarized light P2 through hyperpolarization assembly 110, lens pillar 120 is with laser beam expanding and parallel can being incident to simultaneously in the surface plasma wave lens optical assembly 130, pass through one-dimensional array photodetector 140 and band pass filter means 150 again, amplitude demodulation device 160, PC 170 and reach the function of multichannel detection.
Difference interference surface plasma wave sensing apparatus of the present invention in sum and method really can be borrowed above-mentioned structure to convert to bifrequency line polarization laser and heterodyne interference type with the method for measuring intensity of reflected light in the past and be measured the amplitude signal size; no matter on detection sensitivity and effective range, all have significantly and improve; but above-mentioned diagram and explanation are only in order to illustrate embodiments of the invention; be not for limiting enforcement of the present invention; all personage's other equivalences that the characteristic range factor is done according to the present invention of being familiar with this technology change or modify, and all should be encompassed in the protection domain of claim of the present invention.
Claims (19)
1. heterodyne interference type surface plasma wave method for sensing, be used to measure chemistry or biomolecule interphase interaction, when this method produces surface plasma wave at the interface, the amplitude variations that the reflection first polarized light P1 of measurement two mutual people having the same aspiration and interest connections, different frequency and the reflection wave of the second polarized light P2 produce the difference interference signal calculates physical quantity to be measured, and this method comprises the following steps:
(1) substrate of using as total reflection with a total reflection device with first refractive index, one has the metallic film of second refractive index and standard one set thickness, it abuts against this total reflection device substrate, another side at this metallic film adheres to a chemistry or biofilm simultaneously, and wherein this second refractive index is lower than this first refractive index;
(2) angle of adjustment and correction incident laser makes surface plasma wave produce surface plasma wave on this metallic film and this chemistry or biofilm interface;
(3) adopt bifrequency and mutual perpendicular line polarization laser, it is P polarized light and S polarized light, and make incident laser be transformed into different frequency and the mutually first polarized light P1 and the second polarized light P2 of people having the same aspiration and interest connection through a polarized light element group, polarized light P1 and P2 produce surface plasma wave through total reflection respectively on metal film and chemistry or biofilm interface, its first reflection wave P
1' and the second reflection wave P
2' producing the difference interference signal, its beat frequency equals this double-frequency difference frequency;
(4) optical interference signals of the reference beam of same carrier frequencies and signal beams passes through band-pass filter, and the difference interference signal is input in lock-in amplifier or the amplitude demodulation device, measures the amplitude and the phase change of difference interference signal immediately; And
(5) select suitable incident angle, also promptly near the resonance angle that surface plasma wave produces, measure the amplitude size of difference interference signal and amount or phase changing capacity over time.
2. heterodyne interference type surface plasma wave method for sensing according to claim 1, wherein the mutual perpendicular line polarization of bifrequency laser is replaced by the vertical mutually circle polarization of bifrequency laser, its polarized light element group is the polarization sheet of a P polarization, produces the first polarized light P1 and the second polarized light P2 of different frequency.
3. heterodyne interference type surface plasma wave method for sensing according to claim 1, wherein this total reflection device is replaced by grating and produces surface plasma wave, and the bifrequency line polarization laser of incident is to reenter through the tested film of printing opacity earlier to be incident upon metallic film and to produce surface plasma wave on its interface.
4. heterodyne interference type surface plasma wave method for sensing according to claim 1, wherein this physical quantity is the refractive index and the variable quantity thereof of object under test.
5. heterodyne interference type surface plasma wave method for sensing according to claim 1, wherein this physical quantity is the intermolecular combination of object under test or separating reaction speed and dynamics thereof.
6. heterodyne interference type surface plasma wave method for sensing according to claim 1, it is through the ratio x=(A of the difference interference signal amplitude size of measuring-signal light beam and reference beam
p' A
s')/(A
pA
s), and improve detection sensitivity, to avoid the instability of incident laser light intensity, Ap wherein, As is respectively orthogonal line polarization light P ripple and S wave amplitude; Ap ', As ' are respectively the amplitude of the reflected signal first reflection wave P1 ' and the second reflection wave P2 '.
7. heterodyne interference type surface plasma wave method for sensing according to claim 1, it also comprises bifrequency, the orthogonal polarization laser with day graceful laser same optical properties, produce the bifrequency the people having the same aspiration and interest relevant first polarized light P1 and the second polarized light P2, on the metallic film interface, produce the first reflection wave P1 ' and the second reflection wave P2 ' of surface plasma wave and its reflection, produce the measuring method of difference interference signal and amplitude size thereof.
8. heterodyne interference type surface plasma wave method for sensing according to claim 1, wherein this polarized light element group comprises λ/2 slides, λ/4 slides and polarization sheet.
9. heterodyne interference type surface plasma wave method for sensing according to claim 1, wherein this laser is day graceful laser.
10. heterodyne interference type surface plasma wave method for sensing according to claim 1, wherein this total reflection device is to select from the combination that prism, optical fiber are formed.
11. heterodyne interference type surface plasma wave sensing apparatus, it is used to measure the physical quantity of chemistry or bio-molecular interaction, when producing surface plasma wave at the interface, it measures the reflection first polarized light P1 and the second polarized light P2 of two mutual people having the same aspiration and interest connections, different frequency, the amplitude variations of the difference interference signal that produces calculates physical quantity to be measured, and this device comprises:
One LASER Light Source is used to produce laser;
One polarized light element group, make incident laser be transformed into the first polarized light P1 and the second polarized light P2 of different frequency and mutual people having the same aspiration and interest connection, polarized light P1 and P2 produce surface plasma wave through total reflection respectively on metal film and chemical film interface, its reflection wave P
1' and P
2' producing the difference interference signal, its beat frequency equals double-frequency difference frequency;
One has the total reflection device of first refractive index, and one has the metallic film of second refractive index and standard one set thickness, and it is close proximity to this total reflection device substrate, and a chemistry or biofilm, and it is attached to the another side of this metallic film; Wherein this second refractive index is lower than this first refractive index;
One angular adjustment apparatus, the angle that is used to adjust and proofread and correct incident laser makes surface plasma wave produce surface plasma wave on this metallic film and this chemistry or biofilm interface;
One photodetector is respectively applied for and converts a reference beam and a signal beams to the difference interference signal;
One bandpass filter is used for the difference interference signal of reference beam and the difference interference filtering signals of signal beams; And
One lock-in amplifier or amplitude demodulation device, the amplitude and the phase change of measurement difference interference signal.
12. heterodyne interference type surface plasma wave sensing apparatus according to claim 11, it is combined into biology sensor through antigen-antibody.
13. heterodyne interference type surface plasma wave sensing apparatus according to claim 11, it becomes chemical sensor through chemical action.
14. heterodyne interference type surface plasma wave sensing apparatus according to claim 11, wherein the amplitude size of difference interference signal utilizes the amplitude demodulation device to finish, and expanding becomes multichannel difference interference surface plasma wave sensing system.
15. heterodyne interference type surface plasma wave sensing apparatus according to claim 14, wherein multichannel difference interference signal beams is received by the one-dimensional array photodetector, and measure the amplitude variations of corresponding difference interference signal respectively immediately by the amplitude demodulation device, this bifrequency line polarization laser beam is utilized the cylindrical lens mode, to reach the needed parallel beam of multichannel sensing.
16. heterodyne interference type surface plasma wave sensing apparatus according to claim 14, wherein multichannel difference interference signal beams is received by the two-dimensional array photodetector, and measure the amplitude variations of corresponding difference interference signal respectively immediately by the amplitude demodulation device, this bifrequency line polarization laser beam utilizes the laser beam expanding lens combination to reach the needed parallel beam of multichannel sensing.
17. heterodyne interference type surface plasma wave sensing apparatus according to claim 11, wherein this polarized light element group comprises λ/2 slides, λ/4 slides and polarization sheet.
18. heterodyne interference type surface plasma wave sensing apparatus according to claim 11, wherein this laser is day graceful laser.
19. heterodyne interference type surface plasma wave sensing apparatus according to claim 11, wherein this total reflection device is selected from the combination that prism, optical fiber are formed.
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| US7365855B2 (en) | 2005-07-08 | 2008-04-29 | The Chinese University Of Hong Kong | Optical sensing devices with SPR sensors based on differential phase interrogation and measuring method using the same |
| US7407817B2 (en) | 2006-01-19 | 2008-08-05 | The Chinese University Of Hong Kong | Surface plasmon resonance sensors and method for detecting samples using the same |
| TWI476394B (en) * | 2012-04-02 | 2015-03-11 | Univ Chang Gung | And a method and method for determining whether a target biomolecule exists in a sample to be measured |
| CN102608041B (en) * | 2012-04-05 | 2014-03-05 | 清华大学深圳研究生院 | Method and device for detecting charging state of vanadium cell |
| CN104132677A (en) * | 2014-07-24 | 2014-11-05 | 中国科学院半导体研究所 | Heterodyne interference type optical fiber sensing time division multiplexing system |
| CN104792738A (en) * | 2015-04-08 | 2015-07-22 | 苏州微纳激光光子技术有限公司 | Device and method for detecting refractive index of transparent liquid by adopting SPR (surface plasma resonance) |
| CN105486665B (en) * | 2016-01-26 | 2018-07-31 | 深圳大学 | A kind of SPR detection methods |
| CN105943183B (en) * | 2016-04-26 | 2017-09-01 | 哈尔滨工业大学 | Infrared thermal wave imaging detection device based on heterodyne method |
| US11407672B2 (en) * | 2019-10-03 | 2022-08-09 | Northrop Grumman Systems Corporation | Method for high fill-factor optical arrays manufacturing |
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