CN119035810B - Metal mask processing equipment and processing method - Google Patents
Metal mask processing equipment and processing method Download PDFInfo
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- CN119035810B CN119035810B CN202411527120.7A CN202411527120A CN119035810B CN 119035810 B CN119035810 B CN 119035810B CN 202411527120 A CN202411527120 A CN 202411527120A CN 119035810 B CN119035810 B CN 119035810B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/912—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/06—Carrying-off electrostatic charges by means of ionising radiation
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention relates to the technical field of metal mask processing, in particular to metal mask processing equipment and a processing method, comprising a base, a platform arranged on the base, supports arranged on the platform and arranged at the left end and the right end of the platform, a laser system arranged above the platform, a waste tank arranged in the middle of the base, a supporting mechanism, a fixed flattening mechanism, a three-dimensional movement mechanism and a material taking mechanism, wherein the supporting mechanism, the fixed flattening mechanism, the three-dimensional movement mechanism and the material taking mechanism are arranged on the supports and are arranged on the platform and used for feeding and discharging products, the fixed flattening mechanism is arranged on the left side and the right side of the waste tank and used for fixing and flattening the products, the supporting mechanism is arranged below the fixed flattening mechanism and used for supporting a region to be cut of the products, and the three-dimensional movement mechanism is arranged above the fixed flattening mechanism and used for driving the laser system to move in a three-dimensional mode.
Description
Technical Field
The invention relates to the technical field of metal mask processing, in particular to metal mask processing equipment and a metal mask processing method.
Background
The Openmask (OM) is a CMM Mask used in the manufacture of an OLED display screen, is mainly used for controlling the deposition of a specific position in the evaporation process, and belongs to an Open Mask, namely, no shielding part exists in the starting range of the display screen. Open masks are commonly used to deposit the entire display surface, as would be the case when using a luminescent material of one color to deposit a luminescent layer or to deposit an EIL (injection layer), HTL (hole transport layer) layer.
The existing Open Mask processing technology mainly comprises etching processing, and is low in efficiency and low in yield. At present, a laser cutting device is also adopted to realize CMM mask processing. The CMM mask is often arranged with spaces with the size of a display screen closely when designing patterns (as shown in figure 1), because the CMM mask is thinner and the patterns are arranged closely, the connecting materials are very narrow, and the connecting materials are easily deformed or broken due to the gravity influence of the waste materials with the size of the display screen in the laser cutting process, so that the laser cuts are uneven, the product requirements of the CMM mask are not met, and the yield is not high. In addition, the existing laser cutting device cannot effectively remove the cut waste materials, and the cutting quality of products is affected.
Disclosure of Invention
The invention aims to solve the technical problems of overcoming the defects in the prior art and providing the metal mask processing equipment and the processing method which have the advantages of simple structural design, high efficiency and yield and effective waste removal.
The technical scheme adopted by the invention for solving the technical problems is that the metal mask processing equipment comprises a base, a platform arranged on the base, brackets arranged on the platform and arranged at the left end and the right end of the platform, and a laser system arranged above the platform, wherein a waste tank is arranged in the middle of the base, a waste port corresponding to the waste tank is arranged in the middle of the platform, and the metal mask processing equipment further comprises:
The bearing mechanism, the fixing flattening mechanism and the three-dimensional movement mechanism are all arranged on the platform;
the material taking mechanism is arranged on the bracket and is used for feeding and discharging products;
the fixing and flattening mechanism is arranged on the left side and the right side of the waste port and used for fixing and flattening products, the bearing mechanism is arranged below the fixing and flattening mechanism and used for supporting an area to be cut of the products, and the three-dimensional movement mechanism is arranged above the fixing and flattening mechanism and used for driving the laser system to move in a three-dimensional mode.
Further, the bearing mechanism comprises a longitudinal moving module, a transverse moving plate, a jacking module, a jacking plate, a supporting frame, a bearing component, lifting plates, transverse moving driving components and lifting driving components, wherein the longitudinal moving module is installed on the platform and arranged at the left end and the right end of the platform, the left end and the right end of the transverse moving plate are respectively connected with the upper sliding plate of the longitudinal moving module, the jacking plate is transversely arranged above the transverse moving plate and connected with the transverse moving plate through a plurality of jacking modules, the supporting frame is transversely installed on the jacking plate and arranged at the front part of the jacking plate, the bearing component is movably arranged in the supporting frame, the lifting plates are respectively transversely arranged at the front side and the rear side of the supporting frame and are respectively connected with the supporting frame in a sliding mode, the lifting driving components are installed on the lifting plates to drive the bearing component to transversely move, and the lifting driving components are installed on the jacking plate and are arranged at the rear part of the jacking plate to drive the lifting plate to lift.
Further, the bearing assembly comprises a bearing plate, a sliding shaft, a shaft sleeve, a ball head, a supporting cover, a reset spring and a magnet, wherein the middle part of the bearing plate is provided with a through hole, the front end and the rear end of the bearing plate are respectively provided with a shaft hole, the front side wall and the rear side wall of the through hole are oppositely provided with a clearance groove, the sliding shaft penetrates through the shaft hole and is in clearance fit with the shaft hole, the shaft sleeve is slidably sleeved on the sliding shaft and is arranged at the end part of the shaft hole, which is close to the clearance groove, the end part of the sliding shaft, which is far away from the through hole, is connected with the ball head, the end part, which is close to the through hole, is connected with the supporting cover, the ball head is arranged in a groove formed in the supporting frame, the reset spring is sleeved on the sliding shaft, one end of the reset spring is in collision with the shaft sleeve, the other end of the reset spring is in collision with the ball head, and the magnet is arranged at the bottom end of the bearing plate.
Further, the cross section of the groove is 匚 -shaped, and the upper side walls of the two grooves form an eight-shaped structure.
Further, the transverse moving driving assembly comprises a connecting plate and a linear motor, wherein the connecting plate is respectively arranged on the front side and the rear side of the supporting plate, one end of the connecting plate is connected with the outer side of the lifting plate in a sliding manner, the other end of the connecting plate extends into the supporting frame and is connected with the bottom end of the supporting plate, the linear motor is transversely arranged on the outer side of one lifting plate, the driving end of the linear motor is connected with the connecting plate on the lifting plate, the lifting driving assembly comprises a rotating shaft, a cam, a convex plate, a gap spring, a driving motor and a synchronous group, the rotating shaft is respectively rotatably arranged at the left end and the right end of the supporting frame, the cam is respectively arranged on the front side and the rear side of the supporting frame and sleeved at the two ends of the rotating shaft, the convex plate is respectively arranged at the bottoms of the left end and the right end of the lifting plate and is in collision with the cam, the gap spring is respectively arranged on the left side and the right side of the lifting plate, one end of the gap spring is connected with the supporting frame, the other end of the linear motor is connected with the lifting plate, the driving motor is arranged on the lifting plate, and the output ends of the linear motor is respectively in transmission connection with the rear ends of the two rotating shafts through the synchronous group.
Further, the fixing and flattening mechanism comprises an underframe, a fixing component and a flattening component, wherein the underframe is arranged on the platform and is arranged at the left side and the right side of the waste port, and the fixing component and the flattening component are respectively and longitudinally arranged at the top ends of the two underframes; the fixing assembly comprises a fixing bottom plate, a fixing clamping plate and a fixing air cylinder, wherein the fixing bottom plate is longitudinally arranged at the top end of the underframe, the fixing air cylinder is vertically arranged on the fixing bottom plate, the fixing clamping plate is arranged at the driving end of the fixing air cylinder and corresponds to the fixing bottom plate, the flattening assembly comprises a flattening bottom plate, a flattening module, a flattening clamping plate and a flattening air cylinder, the flattening bottom plate is longitudinally arranged above the underframe and is in sliding connection with the underframe, the flattening module is transversely arranged at the middle part of the top end of the underframe, an upper sliding plate is connected with the middle part of the bottom end of the flattening bottom plate, and the flattening air cylinder is vertically arranged on the flattening bottom plate and is arranged at the driving end of the flattening bottom plate and corresponds to the flattening bottom plate.
Further, the feeding mechanism comprises a feeding shaft, a cross beam, a numerical moving shaft, a sucker and an ion air gun, wherein the feeding shaft is respectively and longitudinally arranged at the top end of the support, the left end and the right end of the cross beam are respectively connected with the driving end of the feeding shaft, the numerical moving shaft is vertically arranged in the middle of the cross beam, the sucker is arranged at the bottom end of the numerical moving shaft, and the ion air gun is distributed in the sucker.
Further, a guide plate is arranged in the waste material port, the bottom end of the guide plate extends into the waste material tank, and an air suction port is formed in the guide plate.
Further, the laser system comprises a laser head, a visual camera and a height adjuster, wherein the laser head and the visual camera are arranged in parallel, and the height adjuster is arranged above the visual camera.
A metal mask processing method comprises the following steps:
S1, taking materials, namely adsorbing the products on the feeding trolley by the material taking mechanism, and transporting the products to the fixing and flattening mechanism for fixing and flattening;
s2, laser cutting, wherein the three-dimensional movement mechanism drives the laser system to move to the upper part of the product to be cut, meanwhile, the bearing assembly in the bearing mechanism moves to the lower part of the product to be cut, and ascends to support the product to be cut, and then the laser system performs laser cutting on the product to be cut;
s3, collecting the waste, namely descending a bearing assembly in the bearing mechanism, and enabling the waste to fall into a waste tank from a waste port.
The beneficial effects of the invention are as follows:
(1) According to the invention, the product is fixed and flattened through the fixing flattening mechanism, the flatness of the product is ensured, the supporting mechanism is combined to support the area to be cut of the product, the flatness of the cutting area is maintained, and the internal waste is supported, so that the problem that the interface is cut poorly due to the influence of the gravity of the waste and the suction force below when the cutting track is closed is avoided, and the processing efficiency and the yield of the product are improved.
(2) According to the invention, through the arrangement of the waste port and the waste trough, waste automatically falls into the waste trough from the waste port in the resetting process of the bearing mechanism, so that the cut waste is effectively removed in time, the influence of the waste on subsequent cutting is avoided, and the cutting quality of products is ensured.
Drawings
The invention will be further described with reference to the drawings and examples.
FIG. 1 is a schematic illustration of the product of the present invention;
FIG. 2 is a schematic diagram of the apparatus of the present invention;
FIG. 3 is a schematic view of the apparatus of the present invention with the shield removed;
FIG. 4 is a schematic view of a chute in the present invention;
FIG. 5 is a schematic view of a deflector in accordance with the present invention;
FIG. 6 is a schematic view of a support mechanism according to the present invention;
FIG. 7 is a schematic view of a lift drive assembly of the present invention;
fig. 8 is an enlarged view of a portion a in fig. 7;
Figure 9 is a schematic view of a support assembly of the present invention;
FIG. 10 is a schematic view of a magnet according to the present invention;
FIG. 11 is a partial cross-sectional view of a carrier plate of the present invention;
FIG. 12 is a schematic view of a securing assembly of the present invention;
FIG. 13 is a schematic view of a flattening assembly of the present invention;
FIG. 14 is a schematic view of a three-dimensional motion mechanism of the present invention;
FIG. 15 is a schematic view of a take off mechanism of the present invention;
FIG. 16 is a graph showing the distribution of an ion wind gun according to the present invention.
100, A base; 110, a waste tank; 200, a platform; 210, waste port, 300, bracket, 400, laser system, 410, laser head, 420, vision camera, 430, heightening device, 500, bearing mechanism, 510, longitudinal moving module, 520, transverse moving plate, 530, jacking module, 540, jacking plate, 550, supporting frame, 551, groove, 560, bearing module, 561, bearing plate, 5611, through hole, 5612, shaft hole, 5613, avoiding groove, 562, sliding shaft, 563, shaft sleeve, 564, ball head, 565, supporting cover, 566, return spring, 567, magnet, 570, lifting plate, 580, transverse moving driving module, 581, connecting plate, 582, linear motor, 590, lifting driving module, 591, rotating shaft, 592, cam, 593, convex plate, 594, gap spring, 595, driving motor, 596, synchronous set, 600, fixing mechanism, 610, underframe, 620, fixing module, 621, fixing base plate, 622, fixing clamping plate, fixing cylinder, 630, module, flattening plate, base plate, 632, base plate, fixture plate, flexible, 633, base plate, 632, base plate, flexible plate, and made flexible plate, and flexible plates and flexible plates flexible plates and flexible plates flexible plates flexible.
Detailed Description
The invention will now be further described with reference to the drawings and preferred embodiments. The drawings are simplified schematic representations which merely illustrate the basic structure of the invention and therefore show only the structures which are relevant to the invention.
Example 1
As shown in fig. 2 to 4, the metal mask processing device comprises a base 100, a platform 200 installed on the base 100, supports 300 installed on the platform 200 and arranged at the left end and the right end of the platform 200, a laser system 400 arranged above the platform 200, a waste tank 110 arranged in the middle of the base 100, a waste port 210 corresponding to the waste tank 110 arranged in the middle of the platform 200, a bearing mechanism 500 installed on the platform 200, a fixed flattening mechanism 600, a three-dimensional movement mechanism 700 and a material taking mechanism 800 installed on the supports 300, wherein the material taking mechanism 800 is used for feeding and discharging products, the fixed flattening mechanism 600 is arranged at the left side and the right side of the waste port 210 and used for fixing and flattening products, the bearing mechanism 500 is arranged below the fixed flattening mechanism 600 and used for supporting a region to be cut of the products, and the three-dimensional movement mechanism 700 is arranged above the fixed flattening mechanism 600 and used for driving the laser system 400 to move in a three-dimensional manner. Product fixing and flattening are performed through the fixing and flattening mechanism 600, product flatness is guaranteed, the supporting mechanism 500 is combined to support the product to be cut, flatness of the cut area is kept, internal waste is supported, and poor interface cutting caused by the influence of waste gravity and suction below when a cutting track is closed is avoided, so that machining efficiency and product yield are improved. Through the setting of waste material mouth 210 and waste material groove 110, the waste material is fallen into waste material groove 110 by waste material mouth 210 is automatic at bearing mechanism 500 in-process that resets, guarantees to effectively reject in time the waste material after the cutting, avoids the waste material to the influence of follow-up cutting, guarantees product cutting quality.
Specifically, as shown in fig. 2, 4 and 14, the waste tank 110 is designed as a drawer for conveniently taking out and cleaning waste, the three-dimensional movement mechanism 700 comprises a Y-direction module 710, an X-direction module 720 and a Z-direction module 730, wherein the Y-direction module 710 is arranged on the platform 200 and is respectively arranged at the outer side of the fixed flattening mechanism 600, the X-direction module 720 is transversely arranged, two ends of the X-direction module 720 are respectively connected with a sliding plate on the Y-direction module 710, the Z-direction module 730 is vertically arranged on the sliding plate of the X-direction module 720, the laser system 400 is arranged on the sliding plate of the Z-direction module 730, the Y-direction module 710, the X-direction module 720 and the Z-direction module 730 are all linear modules, the metal mask laser cutting equipment further comprises a protective cover 1000, a fan filter unit 1100, a dust collector 1200 and an operation platform 1300, the fan filter unit 1100 is arranged at the top end of the protective cover 1000 for providing high-quality air for the equipment, the dust collector 1200 and the operation platform 1300 are arranged at one side of the protective cover 1000, and the dust collector 1200 collects the dust generated in the laser cutting process.
As shown in fig. 3 to 7, the bearing mechanism 500 includes a vertical movement module 510, a horizontal movement plate 520, a lifting module 530, a lifting plate 540, a supporting frame 550, a bearing assembly 560, a lifting plate 570, a horizontal movement driving assembly 580 and a lifting driving assembly 590, wherein the vertical movement module 510 is mounted on the platform 200 and is disposed at the left and right ends of the platform 200, the left and right ends of the horizontal movement plate 520 are respectively connected with the upper sliding plate of the vertical movement module 510, the lifting plate 540 is transversely disposed above the horizontal movement plate 520 and is connected with the horizontal movement plate 520 through a plurality of lifting modules 530, the supporting frame 550 is transversely mounted on the lifting plate 540 and is disposed at the front of the lifting plate 540, the bearing assembly 560 is movably disposed in the supporting frame 550, the lifting plate 570 is respectively transversely disposed at the front and rear sides of the supporting frame 550 and is respectively slidably connected with the supporting frame 550, the horizontal movement driving assembly 580 is mounted on the lifting plate 570 to drive the bearing assembly 560 to transversely move, and the lifting driving assembly 590 is mounted on the lifting plate 540 and is disposed at the rear of the lifting plate 540 to drive the lifting plate 570 to lift. Before laser cutting, the longitudinal moving module 510 and the transverse moving driving module 580 are matched, so that the bearing assembly 560 is right below a product area to be cut, then the lifting module 530 lifts the lifting plate 540 until the supporting frame 550 is in contact with the product, a linear supporting area is formed, the influence of local cutting on the product is prevented, then the lifting plate 570 is driven to lift through the lifting driving module 590, the bearing assembly 560 is synchronously driven to lift until the bearing assembly 560 is in contact with the product area to be cut, the flatness of the cutting area is kept, internal waste materials are supported, and finally laser cutting is performed. Specifically, the vertical movement module 510 is a linear module, and the lifting module 530 is a conventional module.
As shown in fig. 7 and 9-11, the bearing assembly 560 includes a bearing plate 561, a sliding shaft 562, a shaft sleeve 563, a ball head 564, a supporting cover 565, a return spring 566 and a magnet 567, wherein a through hole 5611 is formed in the middle of the bearing plate 561, shaft holes 5612 are respectively formed at the front end and the rear end of the bearing plate 5611, a clearance groove 5613 is formed in the front side wall and the rear side wall of the through hole 5611, the sliding shaft 562 penetrates through the shaft holes 5612 and is in clearance fit with the shaft holes 5612, the shaft sleeve 563 is slidably sleeved on the sliding shaft 562, and is mounted at the end of the shaft hole 5612 close to the clearance groove 5613, the end of the sliding shaft 562 far from the through hole 5611 is connected with the ball head 564, the end close to the through hole 5611 is connected with the supporting cover 565, the ball head 564 is disposed in a groove 551 formed in the supporting frame 550, the return spring 566 is sleeved on the sliding shaft 562, one end of the return spring 566 is in contact with the shaft sleeve 563, the other end of the ball head 564 is in contact with the ball head 564, and the magnet 567 is mounted at the bottom end of the bearing plate 561. The magnets 567 are arranged such that the carrier plate 561 is fixed to the connection plate 581 and provides weak magnetic force to attract the product. Specifically, the grooves 551 extend transversely, the cross section of the grooves 551 is 匚 -shaped, and the upper side walls of the two grooves 551 form an "eight" shape. In the process that the lifting plate 570 ascends and then synchronously drives the bearing assembly 560 to ascend, the ball head 564 moves upwards along the upper side wall of the groove 551, so that the sliding shaft 562 is pushed to slide towards the through hole 5611 until the supporting cover 565 stretches out of the clearance groove 5613 and enters the through hole 5611, the supporting cover 565 is supported below waste materials to start cutting processing, after the processing is finished, when the bearing assembly 560 moves downwards, the ball head 564 moves downwards along the upper side wall of the groove 551 to reset into the groove 551 under the action of the reset spring 566, meanwhile, the supporting cover 565 completely enters the clearance groove 5613, the waste materials lose the supporting of the supporting cover 565, and the waste materials automatically fall into the waste material groove 110 from the waste material port 210 under the action of gravity. It should be noted that in order to avoid the over-cut ablation of the support member 560 by laser cutting, the accuracy of laser cutting is improved in practical applications, and the support cover 565 and/or the slide shaft 562 are made of a cut-resistant material and are replaced periodically.
As shown in fig. 7, the traverse driving assembly 580 includes connection plates 581 and linear motors 582, the connection plates 581 are respectively disposed at front and rear sides of the supporting plate 561, one end of the connection plate 581 is slidably connected with the outer side of the elevating plate 570, and the other end thereof extends into the supporting frame 550 to be connected with the bottom end of the supporting plate 561, the linear motor 582 is transversely mounted at the outer side of one of the elevating plates 570, and the driving end thereof is connected with the connection plate 581 on the elevating plate 570. The linear motor 582 drives the support assembly 560 to move laterally via the web 581 to support the waste in different lateral areas. Specifically, the cross section of the connection plate 581 is U-shaped, the connection plate 581 is close to the end pin of the supporting plate 561, and the end of the supporting plate 561 is correspondingly provided with a pin hole for quick positioning of the replacement supporting member 560.
As shown in fig. 6 to 8, the lifting driving assembly 590 includes a rotation shaft 591, a cam 592, a convex plate 593, a gap spring 594, a driving motor 595 and a synchronization group 596, the rotation shaft 591 is rotatably installed at the left and right ends of the support frame 550, the cam 592 is respectively disposed at the front and rear sides of the support frame 550 and is sleeved at the two ends of the rotation shaft 591, the convex plate 593 is respectively installed at the bottom of the left and right ends of the lifting plate 570 and is in contact with the cam 592, the gap spring 594 is respectively disposed at the left and right sides of the lifting plate 570, one end of the gap spring 594 is connected with the support frame 550, the other end thereof is connected with the lifting plate 570, the driving motor 595 is installed on the lifting plate 540, and the output ends thereof are respectively in transmission connection with the rear ends of the two rotation shafts 591 through the synchronization group 596. The provision of the gap spring 594 causes the projection plate 593 to always press against the cam 592 surface to eliminate play. The driving motor 595 drives the two rotating shafts 591 to synchronously rotate through the synchronizing group 596, and then synchronously drives the cam 592 to rotate, and drives the convex plate 593 to lift, so as to drive the lifting plate 570 to lift. In particular, sync set 596 is prior art.
As shown in fig. 4, 5, 12 and 13, the fixed flattening mechanism 600 includes a chassis 610, a fixing assembly 620 and a flattening assembly 630, the chassis 610 is longitudinally installed on the platform 200 and disposed at both left and right sides of the waste port 210, the fixing assembly 620 and the flattening assembly 630 are respectively longitudinally installed at the top ends of the two chassis 610, the fixing assembly 620 includes a fixing base plate 621, a fixing clamp plate 622 and a fixing cylinder 623, the fixing base plate 621 is longitudinally installed at the top end of the chassis 610, the fixing cylinder 623 is vertically installed on the fixing base plate 621, the fixing clamp plate 622 is installed at the driving end of the fixing cylinder 623 and corresponds to the fixing base plate 621, the flattening assembly 630 includes a flattening base plate 631, a flattening module 632, a flattening clamp plate 633 and a cylinder 634, the flattening base plate 631 is longitudinally disposed above the chassis 610 and slidably connected with the chassis 610, the flattening module 632 is transversely installed at the top end middle of the chassis 610, and the upper slide plate is connected with the bottom end middle of the flattening base plate 631, the flattening cylinder 634 is vertically installed on the base plate 631, and the flattening clamp plate 633 is installed at the driving end of the flattening base plate 631 corresponds to the flattening base plate. The material taking mechanism 800 places the product on the fixed bottom plate 621 and the flattening bottom plate 631, then the fixed air cylinder 623 drives the fixed clamping plate 622 to press the product, the flattening air cylinder 634 drives the flattening clamping plate 633 to press the product, the fixing of the product is achieved, and finally the flattening module 632 drives the flattening bottom plate 631 to be far away from the fixed bottom plate 621, and the flattening of the product is achieved. Specifically, the fixing cylinder 623 and the flattening cylinder 634 are lever cylinders, and the flattening module 632 is a linear module.
As shown in fig. 4, 15 and 16, the material taking mechanism 800 includes a feeding shaft 810, a cross beam 820, a numerical moving shaft 830, suction cups 840 and ion air guns 850, the feeding shaft 810 is respectively and longitudinally installed at the top end of the bracket 300, the left and right ends of the cross beam 820 are respectively connected with the driving end of the feeding shaft 810, the numerical moving shaft 830 is vertically installed at the middle part of the cross beam 820, the suction cups 840 are installed at the bottom ends of the numerical moving shaft 830, and the ion air guns 850 are distributed in the suction cups 840. The suction cup 840 performs a material taking operation using the electrostatic chuck product, and the ion wind gun 850 removes residual static electricity. Specifically, both the feed shaft 810 and the numerical motion shaft 830 are of the prior art.
As shown in fig. 5, a guide plate 900 is installed in the waste port 210, the bottom end of the guide plate 900 extends into the waste tank 110, and an air suction port 910 is formed in the guide plate 900. The guide plate 900 guides the waste into the waste tank 110, and the air suction port 910 enables the lower part of the cutting area to keep a high flow negative pressure area, ensures that cutting sparks and dust cannot splash upwards, improves the cutting quality of the product, and adsorbs the waste into the waste tank 110.
As shown in fig. 4 and 14, the laser system 400 includes a laser head 410, a vision camera 420, and a height adjuster 430, the laser head 410 and the vision camera 420 being juxtaposed, the height adjuster 430 being disposed above the vision camera 420. Because the product breadth is bigger, the consistency of the product plane can not be ensured, and the height of the product is detected in real time through the height regulator 430, so that the laser processing quality is better.
In operation, the suction cup 840 on the material taking mechanism 800 adsorbs the product on the feeding trolley and moves to the fixing and flattening mechanism 600 for fixing and flattening, the three-dimensional moving mechanism 700 drives the laser system 400 to move above the product to-be-cut area, the bearing assembly 560 in the bearing mechanism 500 moves below the product to-be-cut area, the bearing assembly 560 rises until the supporting cover 565 contacts with the waste material to form a support, the laser head 410 in the laser system 400 performs laser cutting, after the cutting area is cut, the bearing assembly 560 descends, the supporting cover 565 no longer supports the waste material, the waste material falls into the waste material tank 110, the bearing assembly 560 moves below the next product to-be-cut area, the above actions are repeated until the laser cutting of all the areas to-be-cut on the product is completed, and finally the suction cup 840 on the material taking mechanism 800 adsorbs the product for discharging.
Example 2
A metal mask processing method comprises the following steps:
S1, taking materials, namely adsorbing the products on a feeding trolley by a material taking mechanism 800, and transporting the products to a fixing and flattening mechanism 600 for fixing and flattening;
s2, laser cutting, namely driving the laser system 400 to move to the upper part of a product to be cut by the three-dimensional movement mechanism 700, simultaneously moving the bearing component 560 in the bearing mechanism 500 to the lower part of the product to be cut, lifting and supporting the product to be cut, and then performing laser cutting on the product to be cut by the laser system 400;
s3, the supporting component 560 in the supporting mechanism 500 descends, and the waste falls into the waste tank 110 from the waste port 210.
The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and to implement the same, but are not intended to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.
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| CN117068756A (en) * | 2023-10-16 | 2023-11-17 | 无锡超通智能制造技术研究院有限公司 | Fine metal mask plate overturning device and overturning method thereof |
| CN118664124A (en) * | 2024-08-22 | 2024-09-20 | 华发科技(内蒙古)有限公司 | Light guide plate cutting device and cutting system |
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| WO2018133358A1 (en) * | 2017-01-23 | 2018-07-26 | 昆山思拓机器有限公司 | Fully-automatic cutting and welding apparatus and method for stepped steel plate |
| CN106973518B (en) * | 2017-02-27 | 2023-06-23 | 深圳市易通自动化设备有限公司 | High-efficient automatic paster equipment |
| CN208099625U (en) * | 2018-02-28 | 2018-11-16 | 深圳市赛孚科技有限公司 | A kind of metallic circuit laser board separator |
| CN109335675B (en) * | 2018-11-09 | 2024-07-05 | 南京富信节能科技有限公司 | Automatic ball top sticking machine and working method thereof |
| CN111674925B (en) * | 2020-07-03 | 2025-06-06 | 苏州欣华锐电子有限公司 | Fully automatic chip burning equipment |
| CN111941094B (en) * | 2020-08-07 | 2025-02-11 | 苏州晟成光伏设备有限公司 | A deviation-correcting welding machine for battery components |
| CN112014320B (en) * | 2020-09-09 | 2023-12-01 | 上海阳泰医疗科技有限公司 | Automatic water sample detector |
| CN217859426U (en) * | 2022-08-05 | 2022-11-22 | 超快激光（天津）机械设备有限公司 | Stepping feeding device for laser cutting machine |
| CN116749514A (en) * | 2023-07-12 | 2023-09-15 | 贵州航越科技有限公司 | 3D printer capable of rapidly removing printing support |
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| CN117068756A (en) * | 2023-10-16 | 2023-11-17 | 无锡超通智能制造技术研究院有限公司 | Fine metal mask plate overturning device and overturning method thereof |
| CN118664124A (en) * | 2024-08-22 | 2024-09-20 | 华发科技(内蒙古)有限公司 | Light guide plate cutting device and cutting system |
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