CN118980695B - A method for detecting defects on the front and back surfaces of ceramic substrates without flipping based on multi-roller transmission - Google Patents
A method for detecting defects on the front and back surfaces of ceramic substrates without flipping based on multi-roller transmission Download PDFInfo
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Abstract
The invention discloses a ceramic substrate overturning-free front and back defect detection method based on multi-roller transmission, and relates to the technical field of ceramic substrate surface defect detection, comprising the following steps of obtaining the distance and diameter of rollers for transmission; according to the method for detecting the turnover-free front and back defects of the ceramic substrate based on multi-roller transmission, the change of the surface height of the ceramic substrate and the up-and-down fluctuation of the ceramic substrate caused by the contact or separation of the bulge or the recess at the defect and the roller when the ceramic substrate moves on the multi-roller are analyzed through the laser interferometer, so that the defect of the surface of the ceramic substrate when the ceramic substrate is transported by the multi-roller is determined, and the influence of the up-and-down fluctuation of the ceramic substrate caused by the contact or separation of the bulge or the recess at the defect and the roller when the ceramic substrate is analyzed is removed, so that the detection is applicable to multi-roller transmission.
Description
Technical Field
The invention relates to the technical field of ceramic substrate surface defect detection, in particular to a ceramic substrate turnover-free front and back defect detection method based on multi-roller transmission.
Background
Ceramic substrates refer to special process plates in which copper foil is bonded directly to the surface (single or double sided) of an alumina (Al 2O 3) or aluminum nitride (AlN) ceramic substrate at high temperature. The ultrathin composite substrate has excellent electrical insulation performance, high heat conduction property, excellent soldering property and high adhesion strength, can etch various patterns like a PCB, and has great current carrying capacity. In order to ensure the performance of the ceramic substrate, the surface of the ceramic substrate needs to be smooth, and free from warpage, bending, microcracks and the like.
The prior art with the publication number of CN115931898A discloses a visual detection method, a visual detection device and a storage medium for surface defects of a ceramic substrate, wherein the visual detection method for the surface defects of the ceramic substrate comprises the steps of driving the ceramic substrate to be detected to do uniform motion through a conveying device, arranging a through hole below the ceramic substrate, determining a stroboscopic time sequence of a first stroboscopic light source and a second stroboscopic light source which are connected through a light source controller based on line frequency of a linear camera arranged above the through hole, arranging the first stroboscopic light source below the through hole, arranging the second stroboscopic light source obliquely above the through hole, acquiring images of the ceramic substrate according to the stroboscopic time sequence by utilizing a linear camera to obtain a first image and a second image of the ceramic substrate respectively irradiated by the first stroboscopic light source and the second stroboscopic light source, and selecting the corresponding first image and/or the second image to analyze according to different surface defects of the image surface characteristics of the surface defects to obtain detection results of the surface defects.
However, the detection mode is greatly influenced by the performance and parameters of the camera and the glossiness of the surface of the ceramic substrate, the detection result also depends on image processing, a large number of images need to be processed and analyzed in the detection process, the processing workload and difficulty are increased, and the processing efficiency and accuracy are reduced to a certain extent.
Disclosure of Invention
The invention aims to provide a ceramic substrate overturning-free front and back defect detection method based on multi-roller transmission, so as to solve the defects in the prior art.
In order to achieve the purpose, the invention provides the technical scheme that the method for detecting the defects of the front and the back of the ceramic substrate without overturning based on multi-roller transmission comprises the following steps:
acquiring the distance and the diameter of rollers for transmission;
Selecting from the gaps of the rollers, and setting detection positions;
the method comprises the steps of arranging a laser interferometer above a detection position and a detection position, respectively detecting the distance change between the laser interferometer and the surface of a ceramic substrate transmitted from a roller to obtain distance change data, wherein laser emitted by the arranged laser interferometer is perpendicular to the transportation direction of a transportation mechanism formed by the roller, the laser emission direction of the laser interferometer at the detection position faces upwards, and the laser interferometer above the detection position and the laser interferometer at the detection position are preferably separated by a certain distance in the horizontal direction to prevent the laser interference of the two laser interferometers;
obtaining the horizontal distance from the laser interferometer to the axis of the roller to obtain a detection distance;
Constructing a defect identification model and a defect height model of each defect type;
the ceramic substrate is transported through rollers and passes through the detection position to obtain corresponding distance change data, and a distance change curve is obtained through continuous distance change data;
inputting the distance change curve into a defect identification model to identify, and outputting a defect label corresponding to the defect type;
Based on the influence of the defects on the moving track of the ceramic substrate, selecting a corresponding defect height model, inputting distance change data for calculation, outputting defect heights, and displaying the shape and the size of the defects through the defect heights of all the defects;
constructing a standard three-dimensional model of the ceramic substrate, wherein the three-dimensional model of the ceramic substrate can be drawn and constructed based on standard parameters of the ceramic substrate by using three-dimensional software or downloaded and imported from other databases or websites;
Based on the defect height, drawing a corresponding defect on the standard three-dimensional model to obtain an actual three-dimensional model corresponding to the ceramic substrate, and marking the drawn defect on the actual three-dimensional model, so that a user can conveniently and intuitively observe the position and the shape of the defect, and meanwhile, the defect that the user with too small defect is difficult to find the position of the defect in the actual three-dimensional model is prevented.
Further, the constructing the defect identification model specifically includes the following steps:
Respectively selecting a set number of ceramic substrates with various defect types as a test substrate, and obtaining defect parameters of the test substrate, wherein the defect parameters consist of defect heights of all defects, and the defect heights are the height difference between the defects and the surface of the ceramic substrate;
Setting defect labels corresponding to the defect types and the defects one by one, and establishing an association relation between the test substrates with the same corresponding defect types and the defect labels, wherein the defect labels comprise crack defects, convex defects, concave defects, missing defects and defects (normal);
The method comprises the steps that rollers are enabled to transport a test substrate at a constant speed to pass through a laser interferometer, corresponding distance change data are obtained, when the test substrate passes through the laser interferometer, after laser emitted by the laser interferometer contacts with the surface of the test substrate, part of the laser can be reflected back to the laser interferometer and received by the laser interferometer, corresponding interference images are obtained, and the relative movement distance between the contact position of the test substrate and the laser, namely the distance change data, is analyzed based on the interference images;
Based on the continuous distance change data of each test substrate, a corresponding distance change curve is obtained, because if the surface of the test substrate is flat and flawless, the relative movement distance between each part of the surface of the test substrate and the contact position of the laser is zero when the test substrate passes through the laser interferometer, the obtained corresponding distance change curve is a horizontal straight line, if the surface of the test substrate has defects, the fluctuation characteristics and the amplitude of the corresponding distance change curve are different according to the types, the shapes and the sizes of the defects, for example, a crack exists at a certain part of the surface of the test substrate, namely the crack is sunken relative to the surface of the test substrate, the relative movement distance obtained by the test moves far (can be represented by a positive number) when the crack passes through the test laser of the laser interferometer, and the relative movement distance obtained by the test moves near (can be represented by a negative number) when the surface of the test substrate has bulges caused by warping or bending when the bulge passes through the test laser of the laser interferometer;
Training a deep neural network model based on the distance change test curve and the defect labels of each test substrate to obtain a defect identification model, wherein the defect identification model is used for outputting the corresponding defect labels based on the input distance change curve.
Further, the distance change data comprises first distance change data and second distance change data, wherein the first distance change data is distance change data obtained by a laser interferometer at the detection position, and the second distance change data is distance change data obtained by the laser interferometer above the detection position;
The distance change curve comprises a first distance change curve and a second distance change curve, wherein the first distance change curve is obtained by continuous first distance change data, and the second distance change curve is obtained by continuous second distance change data;
the defect label output after the first distance change curve is input into the defect identification model is a first defect label, and the defect label output after the second distance change defect is input into the defect identification model is a second defect label.
Further, a defect height model of each defect type is built, and the method specifically comprises the following steps:
Constructing different defect height models according to whether the defects influence the moving track of the ceramic substrate on the roller or not;
The method has no influence on the moving track of the ceramic substrate, and the defect heights of all positions of the defects are obtained directly through the distance change curve, namely the defect heights are equal to distance change data corresponding to each point of the distance change curve, namely the output of the defect height model is equal to the corresponding distance change data;
If the lower surface of the test substrate is convex or concave caused by warping or bending, when the convex or concave of the test substrate passes through the roller, one side of the test substrate is relatively lifted or dropped, so that the distance change curve has larger fluctuation, defect parameters cannot be obtained only through analysis of the distance change curve, the distance and the diameter of the roller are combined, the detection distance is needed to be analyzed, so that specific parameters are obtained, the movement track of the ceramic substrate is influenced, regression analysis is carried out on the defect parameters and the distance change data of the test substrate based on the distance and the diameter of the roller, a defect height calculation formula is obtained, and the defect height corresponding to each distance change data is obtained based on the distance and the diameter of the roller, the detection distance and the input distance change data, namely, the defect height model at the moment is the defect height calculation formula.
Further, based on the influence of the defect on the moving track of the ceramic substrate, selecting a corresponding defect height calculation formula, inputting distance change data for calculation, and outputting the defect height, wherein the method specifically comprises the following steps:
Judging whether defects exist or not based on the distance change data, and affecting the moving track of the ceramic substrate;
If not, directly obtaining the defect heights of all positions of the defects based on the distance change curve, specifically obtaining the defect height of the lower surface of the ceramic substrate based on the first distance change data, and obtaining the defect height of the upper surface of the ceramic substrate based on the second distance change data;
if yes, judging whether the upper surface of the ceramic substrate has defects or not based on the second defect label;
Because the fluctuation of the second distance change data reflects the moving track of the ceramic substrate affected by the contact or separation of the lower surface defect position and the roller under the condition that the upper surface of the ceramic substrate is not defective, and the directions of the first distance change data and the second distance change data detected by the two laser interferometers are opposite, when the upper surface of the ceramic substrate is not defective, the first distance change curve and the second distance change curve are consistent in phase and added, partial data reflecting the moving track of the ceramic substrate in the first distance change curve can be counteracted, only partial data reflecting defects remain, so that if the upper surface of the ceramic substrate is not defective, a second defect label is output, and the first distance change curve and the second distance change curve are added after being consistent in phase adjustment, so that the defect height curve of the lower surface of the substrate is obtained, wherein the abscissa obtained during detection is time because the laser interferometers possibly have certain horizontal distances, and the ordinate is the distance change curve of the distance change data has phase difference, and the phase difference between the first distance change curve and the second distance change curve is zero through horizontal translation;
and directly obtaining the defect height of the position corresponding to the defect of the lower surface of the ceramic substrate based on the defect height curve of the lower surface of the substrate.
Further, based on the influence of the defect on the moving track of the ceramic substrate, selecting a corresponding defect height calculation formula, inputting distance change data for calculation, and outputting the defect height, and further comprising the following steps:
if the upper surface of the ceramic substrate is defective, inputting the first distance change data into the defect height calculation formula to obtain the defect height of the lower surface of the ceramic substrate;
Subtracting the corresponding defect height from the distance change data of the first distance change curve and the corresponding part of the defect to obtain a substrate track curve;
Adding the second distance change curve after phase adjustment is consistent with the substrate track curve, so as to obtain a substrate upper surface defect height curve;
and directly obtaining the defect height of the position corresponding to the surface defect on the ceramic substrate based on the surface defect height curve of the substrate.
Furthermore, the method also comprises a plurality of detection positions, each detection position and a laser interferometer above the detection position, the emitted laser is different from the angle of the moving direction of the ceramic substrate, the ceramic substrate is conveniently detected by using the laser interferometer from different angles, and the detection precision is improved.
1. Compared with the prior art, the method for detecting the turnover-free defects of the front and the back of the ceramic substrate based on the multi-roller transmission has the advantages that the laser interferometers are arranged at the gaps of the rollers and above the gaps, the defects of the front and the back of the ceramic substrate are detected respectively, the ceramic substrate is not required to be turned over, the detection steps are simplified, and the detection efficiency is improved.
2. Compared with the prior art, the turnover-free front and back defect detection method for the ceramic substrate based on multi-roller transmission provided by the invention has the advantages that the defect of the surface of the ceramic substrate is determined when the ceramic substrate is transported by the multi-roller through analyzing the change of the surface height of the ceramic substrate and the up-and-down fluctuation of the ceramic substrate caused by the contact or separation of the bulge or the recess of the defect part and the roller when the ceramic substrate moves on the multi-roller, so that the influence of the up-and-down fluctuation of the ceramic substrate on the detection caused by the contact or the separation of the bulge or the recess of the defect part and the roller when the ceramic substrate is analyzed is removed, and the detection is suitable for multi-roller transmission.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments described in the present application, and other drawings may be obtained according to these drawings for a person having ordinary skill in the art.
FIG. 1 is a diagram of steps in a method according to an embodiment of the present invention;
Fig. 2 is a schematic diagram of a situation where a defect provided in an embodiment of the present invention has an effect on a moving track of a ceramic substrate.
Reference numerals illustrate:
1. Roller, ceramic substrate, and raised defect.
Detailed Description
In order to make the technical scheme of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise. The terms "mounted," "connected," "coupled," and "connected" are used in a broad sense, and may be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, or indirectly connected via an intermediate medium, or may be in communication with the interior of two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Example embodiments will be described more fully hereinafter with reference to the accompanying drawings, but may be embodied in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
Embodiments of the disclosure and features of embodiments may be combined with each other without conflict.
As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
Embodiments described herein may be described with reference to plan and/or cross-sectional views with the aid of idealized schematic diagrams of the present disclosure. Accordingly, the example illustrations may be modified in accordance with manufacturing techniques and/or tolerances. Thus, the embodiments are not limited to the embodiments shown in the drawings, but include modifications of the configuration formed based on the manufacturing process. Thus, the regions illustrated in the figures have schematic properties and the shapes of the regions illustrated in the figures illustrate the particular shapes of the regions of the elements, but are not intended to be limiting.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and the present disclosure, and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
Referring to fig. 1-2, the method for detecting the defect of the front and back surfaces of the ceramic substrate without overturning based on multi-roller transmission comprises the following steps:
s1, acquiring the distance and the diameter of rollers for transmission.
S2, selecting from gaps of the rollers, setting detection positions, wherein when the detection positions are set, a plurality of detection positions can be set, and each detection position and a laser interferometer above the detection position are different in angle between emitted laser and the moving direction of the ceramic substrate, so that the ceramic substrate can be conveniently detected by using the laser interferometers from different angles, and the detection precision is improved.
S3, arranging laser interferometers at the detection position and above the detection position, respectively detecting the distance change between the laser interferometers and the surface of the ceramic substrate transmitted from the roller to obtain distance change data, wherein laser emitted by the arranged laser interferometers is perpendicular to the transportation direction of a transportation mechanism formed by the roller, the laser emission direction of the laser interferometers at the detection position is upward, and the laser interferometers above the detection position and the laser interferometers at the detection position are preferably arranged at a certain distance in the horizontal direction, so that the laser of the two laser interferometers is prevented from interfering with each other, and meanwhile, the width of a laser path required to be selected to be measured is larger than the width of the ceramic substrate when the laser interferometers are selected, so that the surface of the ceramic substrate can be measured when the ceramic substrate passes through the laser interferometers;
The distance change data comprises first distance change data and second distance change data, wherein the first distance change data is distance change data obtained by a laser interferometer at the detection position, and the second distance change data is distance change data obtained by the laser interferometer above the detection position;
The distance change curve comprises a first distance change curve and a second distance change curve, wherein the first distance change curve is obtained by continuous first distance change data, and the second distance change curve is obtained by continuous second distance change data;
The defect label output after the first distance change curve is input into the defect identification model is a first defect label, and the defect label output after the second distance change defect is input into the defect identification model is a second defect label.
And S4, obtaining the horizontal distance from the laser interferometer to the axis of the roller to obtain the detection distance.
S5, constructing a defect identification model and a defect height model of each defect type;
the defect identification model is built, and specifically comprises the following steps:
s5.1.1, respectively selecting a set number of ceramic substrates with various defect types as a test substrate, and acquiring defect parameters of the test substrate, wherein the defect parameters consist of defect heights of all defects, and the defect heights are the height difference between the defects and the surface of the ceramic substrate;
S5.1.2, setting defect labels corresponding to the defect types and the defect-free one-to-one, and establishing an association relation between the test substrate with the same corresponding defect types and the defect labels, wherein the defect labels comprise crack defects, convex defects, concave defects, missing defects and defect-free (normal);
S5.1.3, enabling the roller to uniformly transport the test substrate to pass through the laser interferometer to obtain corresponding distance change data, enabling part of laser emitted by the laser interferometer to be reflected back to the laser interferometer and received by the laser interferometer after the laser emitted by the laser interferometer contacts with the surface of the test substrate when the test substrate passes through the laser interferometer to obtain corresponding interference images, and analyzing the relative movement distance between the contact position of the test substrate and the laser, namely the distance change data, based on the interference images;
S5.1.4, obtaining a corresponding distance change curve based on continuous distance change data of each test substrate, wherein if the surface of the test substrate is flat and flawless, the relative movement distance of each part of the surface of the test substrate and the laser contact position is zero when the test substrate passes through a laser interferometer, the obtained corresponding distance change curve is a horizontal straight line, if the surface of the test substrate has defects, the fluctuation characteristics and the amplitude of the corresponding distance change curve are different according to the types, the shapes and the sizes of the defects, for example, a crack exists at a certain part of the surface of the test substrate, namely the crack is sunken relative to the surface of the test substrate, the relative movement distance obtained by testing moves far (can be represented by positive numbers) when the crack passes through the test laser of the laser interferometer, and the relative movement distance obtained by testing moves near (can be represented by negative numbers) when the surface of the test substrate has bulges caused by warping or bending;
S5.1.5 training a deep neural network model based on the distance change test curve and the defect labels of each test substrate to obtain a defect identification model, wherein the defect identification model is used for outputting the corresponding defect labels based on the input distance change curve.
Constructing defect height models of various defect types, which specifically comprises the following steps:
s5.2.1, constructing different defect height models according to the condition that whether the defect can affect the moving track of the ceramic substrate on the roller or not;
S5.2.2, directly obtaining the defect heights of all positions of the defects through the distance change curve without influencing the moving track of the ceramic substrate, wherein the defect heights are equal to the distance change data corresponding to each point of the distance change curve, namely the output of the defect height model is equal to the corresponding distance change data;
S5.2.3, if there is a bulge on the lower surface of the test substrate, or a bulge caused by warping or bending, when the bulge or the bulge of the test substrate passes through the roller, one side of the test substrate is relatively lifted or dropped, so that the distance change curve has larger fluctuation, defect parameters cannot be obtained only through the analysis of the distance change curve, the distance and the diameter of the roller are needed to be combined for analysis, and the detection distance is needed to obtain specific parameters, so that the movement track of the ceramic substrate is influenced, regression analysis is performed on the defect parameters and the distance change data of the test substrate based on the distance and the diameter of the roller, so that a defect height calculation formula is obtained, and the defect height corresponding to each distance change data is obtained based on the distance and the diameter of the roller, wherein the defect height model at the moment is the defect height calculation formula.
S6, conveying the ceramic substrate through rollers and passing through the detection positions to obtain corresponding distance change data, and obtaining a distance change curve through continuous distance change data;
s7, inputting the distance change curve into a defect identification model to identify, and outputting a defect label corresponding to the defect type;
s8, selecting a corresponding defect height model based on the influence of the defects on the moving track of the ceramic substrate, inputting distance change data for calculation, outputting defect heights, and displaying the shape and the size of the defects through the defect heights of all the defects, wherein the method specifically comprises the following steps:
S8.1, judging whether defects exist or not based on the distance change data, and affecting the moving track of the ceramic substrate;
S8.2, if not, directly obtaining the defect heights of all positions of the defects based on the distance change curve, specifically obtaining the defect heights of the lower surface of the ceramic substrate based on the first distance change data, and obtaining the defect heights of the upper surface of the ceramic substrate based on the second distance change data;
S8.3, if so, judging whether the upper surface of the ceramic substrate has defects or not based on the second defect label;
S8.4, under the condition that the upper surface of the ceramic substrate is not defective, the fluctuation of the second distance change data reflects the movement track of the ceramic substrate influenced by contact or separation of the lower surface defect position and the roller, and the directions of the first distance change data and the second distance change data detected by the two laser interferometers are opposite, so that under the condition that the upper surface of the ceramic substrate is not defective, the first distance change curve and the second distance change curve are consistent in phase and added, partial data reflecting the movement track of the ceramic substrate in the first distance change curve can be counteracted, only partial data reflecting defects are left, so that if the upper surface of the ceramic substrate is not defective, a second defect label is output, and the first distance change curve and the second distance change curve are added after being consistent in phase adjustment, so that a substrate lower surface defect height curve is obtained, wherein, due to the fact that a certain horizontal distance exists between a detection position and a laser interferometer above the detection position, the horizontal coordinate obtained during detection is time, and the vertical coordinate is the distance change curve of the distance change data has phase difference, and the phase difference between the first distance change curve and the second distance change curve is zero through horizontal translation;
S8.5, directly obtaining the defect height of the position corresponding to the defect of the lower surface of the ceramic substrate based on the defect height curve of the lower surface of the substrate;
s8.6, if the upper surface of the ceramic substrate is defective, inputting the first distance change data into a defect height calculation formula to obtain the defect height of the lower surface of the ceramic substrate;
s8.7, subtracting the corresponding defect height from the distance change data of the first distance change curve and the corresponding defect part to obtain a substrate track curve;
s8.8, adding the second distance change curve after phase adjustment is consistent with the substrate track curve, and obtaining a substrate upper surface defect height curve;
S8.9, directly obtaining the defect height of the position corresponding to the surface defect on the ceramic substrate based on the surface defect height curve on the substrate.
S9, constructing a standard three-dimensional model of the ceramic substrate, wherein the three-dimensional model of the ceramic substrate can be drawn and constructed based on standard parameters of the ceramic substrate by using three-dimensional software, or can be downloaded and imported from other databases or websites;
S10, drawing corresponding defects on the standard three-dimensional model based on the defect height to obtain an actual three-dimensional model corresponding to the ceramic substrate, and marking the drawn defects on the actual three-dimensional model, so that a user can conveniently and intuitively observe the positions and the shapes of the defects, and meanwhile, the defect that the user with too small defects is difficult to find the positions of the defects in the actual three-dimensional model is prevented.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that modifications may be made to the described embodiments in various different ways without departing from the spirit and scope of the invention. Accordingly, the drawings and description are to be regarded as illustrative in nature and not as restrictive.
Claims (2)
1. The method for detecting the turnover-free defects of the front and back surfaces of the ceramic substrate based on multi-roller transmission is characterized by comprising the following steps of:
acquiring the distance and the diameter of rollers for transmission;
Selecting from the gaps of the rollers, and setting detection positions;
the detection position and the upper part of the detection position are respectively provided with a laser interferometer for respectively detecting the distance change between the laser interferometer and the surface of the ceramic substrate transmitted from the roller to obtain distance change data;
obtaining the horizontal distance from the laser interferometer to the axis of the roller to obtain a detection distance;
Constructing a defect identification model and a defect height model of each defect type, wherein the defect types comprise crack defects, protruding defects, sinking defects, missing defects and no defects;
the ceramic substrate is transported through rollers and passes through the detection position to obtain corresponding distance change data, and a distance change curve is obtained through continuous distance change data;
inputting the distance change curve into a defect identification model to identify, and outputting a defect label corresponding to the defect type;
selecting a corresponding defect height model based on the influence of the defect on the moving track of the ceramic substrate, inputting distance change data for calculation, and outputting defect height;
Constructing a standard three-dimensional model of the ceramic substrate;
drawing a corresponding defect on the standard three-dimensional model based on the defect height to obtain an actual three-dimensional model corresponding to the ceramic substrate, and marking the drawn defect on the actual three-dimensional model;
the defect identification model is built, and specifically comprises the following steps:
Respectively selecting a set number of ceramic substrates with various defect types as a test substrate, and obtaining defect parameters of the test substrate, wherein the defect parameters consist of defect heights of all defects, and the defect heights are the height difference between the defects and the surface of the ceramic substrate;
Setting defect labels corresponding to the defect types one by one, and establishing an association relation between the corresponding test substrates with the same defect types and the defect labels;
enabling the rollers to transport the test substrate at a constant speed, and obtaining corresponding distance change data through a laser interferometer;
based on the continuous distance change data of each test substrate, a corresponding distance change curve is obtained;
Training a deep neural network model based on the distance change test curve and the defect labels of each test substrate to obtain a defect identification model, wherein the defect identification model is used for outputting the corresponding defect labels based on the input distance change curve;
The distance change data comprise first distance change data and second distance change data, the first distance change data are distance change data obtained by a laser interferometer at the detection position, and the second distance change data are distance change data obtained by the laser interferometer above the detection position;
The distance change curve comprises a first distance change curve and a second distance change curve, wherein the first distance change curve is obtained by continuous first distance change data, and the second distance change curve is obtained by continuous second distance change data;
the defect label output after the first distance change curve is input into the defect identification model is a first defect label, and the defect label output after the second distance change defect is input into the defect identification model is a second defect label;
Establishing a defect height model of each defect type, which specifically comprises the following steps:
Constructing different defect height models according to whether the defects influence the moving track of the ceramic substrate on the roller or not;
the moving track of the ceramic substrate is not influenced, and the defect heights of all positions of the defects are obtained directly through the distance change curve;
Regression analysis is performed on the defect parameters and the distance change data of the test substrate based on the distance and the diameter of the rollers and the detection distance of the rollers, so as to obtain a defect height calculation formula, wherein the defect height calculation formula is used for obtaining defect heights corresponding to all the distance change data based on the known distance and the diameter of the rollers, the detection distance and the input distance change data;
Based on the influence of the defects on the moving track of the ceramic substrate, selecting a corresponding defect height calculation formula, inputting distance change data for calculation, and outputting defect heights, wherein the method specifically comprises the following steps:
Judging whether defects exist or not based on the distance change data, and affecting the moving track of the ceramic substrate;
if not, directly obtaining the defect heights of all positions of the defect based on the distance change curve;
if yes, judging whether the upper surface of the ceramic substrate has defects or not based on the second defect label;
outputting a second defect label if the upper surface of the ceramic substrate is defect-free, and adding the first distance change curve and the second distance change curve after phase adjustment is consistent to obtain a defect height curve of the lower surface of the substrate;
directly obtaining the defect height of the position corresponding to the defect on the lower surface of the ceramic substrate based on the defect height curve of the lower surface of the substrate;
Based on the influence of the defect on the moving track of the ceramic substrate, selecting a corresponding defect height calculation formula, inputting distance change data for calculation, and outputting the defect height, and further comprising the following steps:
if the upper surface of the ceramic substrate is defective, inputting the first distance change data into the defect height calculation formula to obtain the defect height of the lower surface of the ceramic substrate;
Subtracting the corresponding defect height from the distance change data of the first distance change curve and the corresponding part of the defect to obtain a substrate track curve;
Adding the second distance change curve after phase adjustment is consistent with the substrate track curve, so as to obtain a substrate upper surface defect height curve;
and directly obtaining the defect height of the position corresponding to the surface defect on the ceramic substrate based on the surface defect height curve of the substrate.
2. The method for detecting the turnover-free front and back defects of the ceramic substrate based on the multi-roller transmission of claim 1, further comprising the step of setting a plurality of detection positions, wherein each detection position and a laser interferometer above the detection position emit laser with different angles with respect to the moving direction of the ceramic substrate.
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