CN118912819A - Laser gas recovery freezing solid particle separator - Google Patents
Laser gas recovery freezing solid particle separator Download PDFInfo
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- CN118912819A CN118912819A CN202411135146.7A CN202411135146A CN118912819A CN 118912819 A CN118912819 A CN 118912819A CN 202411135146 A CN202411135146 A CN 202411135146A CN 118912819 A CN118912819 A CN 118912819A
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- heat exchanger
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2220/00—Processes or apparatus involving steps for the removal of impurities
- F25J2220/02—Separating impurities in general from the feed stream
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Abstract
本发明公开了一种激光气回收冷冻固体颗粒分离装置，涉及杂质分离技术领域；包括：高压液化分离装置冷箱，高压液化分离装置冷箱内设置有一级气液分离器，一级气液分离器的输入端连接有激光气回收气输入管，一级气液分离器底部设置有冷凝杂质输出管；一级换热机构，一级换热机构设置于高压液化分离装置冷箱内，用于给激光气回收气输入管降温；一级粗氖输送管，一级粗氖输送管安装于一级气液分离器的输出端。本发明在螺旋管换热器进出口设置阻力测量仪表；当阻力有增大趋势时，控制模块通过第二电控阀使常温的回收气经过复热输送管进入螺旋管换热器，加热融化螺旋管换热器中凝固的固体，提高流速将淤堵的固体杂质吹离来确保工艺的连续性。
The present invention discloses a laser gas recovery frozen solid particle separation device, which relates to the technical field of impurity separation; it comprises: a high-pressure liquefaction separation device cold box, a first-level gas-liquid separator is arranged in the high-pressure liquefaction separation device cold box, the input end of the first-level gas-liquid separator is connected to a laser gas recovery gas input pipe, and a condensed impurity output pipe is arranged at the bottom of the first-level gas-liquid separator; a first-level heat exchange mechanism, the first-level heat exchange mechanism is arranged in the high-pressure liquefaction separation device cold box, and is used to cool the laser gas recovery gas input pipe; a first-level crude neon delivery pipe, the first-level crude neon delivery pipe is installed at the output end of the first-level gas-liquid separator. The present invention sets a resistance measuring instrument at the inlet and outlet of the spiral tube heat exchanger; when the resistance has a tendency to increase, the control module allows the normal temperature recovery gas to enter the spiral tube heat exchanger through the reheating delivery pipe through the second electric control valve, heats and melts the solidified solids in the spiral tube heat exchanger, and increases the flow rate to blow away the blocked solid impurities to ensure the continuity of the process.
Description
Technical Field
The invention relates to the technical field of impurity separation, in particular to a laser gas recovery frozen solid particle separation device.
Background
The application of neon in scientific research, chip, medicine and high-tech industries, especially the rapid development of the industries such as chip and the like is greatly consumed. The demand for special gases such as neon, which is a rare gas, has stable chemical characteristics, does not react with other elements, and is non-renewable and non-replaceable. Neon can be used to produce neon lasers for scientific research, medical treatment, materials processing, and other fields. This feature makes helium one of the important elements in the field of high-tech manufacturing. The laser gas with specific wavelength is obtained by mixing neon and krypton or neon and argon and xenon according to a certain proportion and is applied to a chip photoetching machine.
Almost all helium gas currently used in china comes from the united states or other countries in the middle east, australia, etc. Only a small amount of neon comes from the concentration of the noncondensable gas in the lower tower of the air separation device and then is separated into pure neon, because the large-scale air separation device is provided with the scarcity of the neon and helium concentration device, meanwhile, the neon content in the air is only 18.18 multiplied by 10 -6, and the separation process of neon and helium with 99.9999 percent of purity of neon is complex, so that the laser gas supply cost is high, the neon is almost not lost in the using process of the photoetching machine, and the neon is recycled and separated into an optional choice of a chip factory.
According to different laser gas varieties, the laser gas after being used by the machine table of the photoetching machine not only enriches neon, krypton, xenon and argon, but also enriches part of air and hydrogen, xenon is solidified at about-112 ℃ under normal pressure, and krypton is solidified at about-157 ℃, so that the defects that the heat exchanger is blocked by solidification caused by high concentration of krypton and xenon at low temperature or the temperature is increased and high-boiling-point krypton, xenon and argon are not easy to separate are avoided in the neon purification process.
Through retrieving, chinese patent application number is 201720096764.4's application scheme, discloses a double helix tube condensing heat exchanger, and its technical scheme's key point is including the case shell, be provided with high temperature flue gas entry, low temperature flue gas export, first rivers joint, second rivers joint and comdenstion water joint on the case shell respectively, be provided with first spiral pipe and second spiral pipe side by side in the case shell, the one end of first spiral pipe with the one end of second spiral pipe is connected, the other end of first spiral pipe with first rivers joint is connected, the other end of second spiral pipe with second rivers joint is connected. The double spiral tube type condensing heat exchanger in the above document has the following disadvantages: the inability to properly cope with the situation where the solidified solids clog the spiral pipe remains to be improved.
Disclosure of Invention
The invention aims to solve the defects in the prior art, and provides a laser gas recovery frozen solid particle separating device.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
A laser gas recovery frozen solid particle separation device comprising:
The high-pressure liquefaction separation device comprises a high-pressure liquefaction separation device cold box, wherein a first-stage gas-liquid separator is arranged in the high-pressure liquefaction separation device cold box, the input end of the first-stage gas-liquid separator is connected with a laser gas recovery gas input pipe, and the bottom of the first-stage gas-liquid separator is provided with a condensed impurity output pipe;
The first-stage heat exchange mechanism is arranged in the cold box of the high-pressure liquefaction separation device and is used for cooling the laser gas recovery gas input pipe;
the first-stage coarse neon conveying pipe is arranged at the output end of the first-stage gas-liquid separator, and is provided with a first electric control valve;
a low-temperature container, wherein a low-temperature adsorber is arranged in the low-temperature container;
the vacuum pump is arranged on the low-temperature container and is connected with the low-temperature adsorber;
The secondary gas-liquid separator is arranged in the low-temperature container, is connected with the low-temperature adsorber and is provided with a separator top;
the secondary heat exchange mechanism is arranged in the low-temperature container;
The spiral tube heat exchanger is wound on the outer surface of the low-temperature adsorber, the output end of the spiral tube heat exchanger is connected with the secondary gas-liquid separator through a secondary coarse neon conveying pipe, and a resistance measuring element is arranged at the inlet and the outlet of the spiral tube heat exchanger;
One end of the reheating conveying pipe is connected with the first-stage coarse neon conveying pipe, the reheating conveying pipe passes through the first-stage heat exchanger to enable the internal gas to be reheated to be in a normal temperature state, the other end of the reheating conveying pipe is connected with the first-stage coarse neon conveying pipe, and two ends of the reheating conveying pipe, which are connected with the first-stage coarse neon conveying pipe, are positioned on two sides of the first electric control valve; a second electric control valve is arranged on the reheating conveying pipe;
the control module is used for controlling the on and off of the first electric control valve and the second electric control valve based on the measurement condition of the resistance measuring instrument.
As a preferred embodiment of the present invention: the primary heat exchange mechanism comprises:
the first-stage heat exchanger is arranged in the cold box of the high-pressure liquefaction separation device and is used for cooling the laser gas recovery gas input pipe;
the low-temperature cold source input pipe is connected with the primary heat exchanger, and one end of the primary heat exchanger is connected with the low-temperature cold source output pipe;
The reheating conveying pipe passes through the primary heat exchanger.
As a preferred embodiment of the present invention: the secondary heat exchange mechanism comprises:
the secondary heat exchanger is arranged in the low-temperature container;
The liquid nitrogen input pipe is arranged on the low-temperature container, and one end of the liquid nitrogen input pipe is connected with the secondary heat exchanger;
The pure neon output pipe is arranged at the output end of the secondary heat exchanger, and one end of the secondary gas-liquid separator is connected with the secondary heat exchanger.
As a preferred embodiment of the present invention: the laser gas recovery gas input pipe is connected with an auxiliary cooler in series, and the auxiliary cooler comprises:
the cooling chamber is of a hollow disc-shaped structure as a whole, one side of the cooling chamber is provided with an input end, and the other side of the cooling chamber is provided with an output end;
The rotary roller is hermetically rotated in the cooling chamber, the middle part of the rotary roller is provided with a mounting seat, the outer side of the mounting seat is provided with a plurality of cooling blades, and a main cold source channel and an auxiliary cold source channel are respectively arranged in the rotary roller and the cooling blades;
The two cold source branch pipes are respectively communicated with the main cold source channels at two ends of the rotating roller, one cold source branch pipe is connected with the low-temperature cold source input pipe, and the other cold source branch pipe is connected with the low-temperature cold source output pipe; and a third electric control valve is arranged on the cold source branch pipe.
As a preferred embodiment of the present invention: the both ends of transfer roller all are provided with annular connecting seat, and annular chamber is installed in the annular connecting seat outside, and annular connecting seat sealed rotation is connected in annular chamber inner wall, and cold source branch pipe installs in annular chamber one side outer wall, and cold source branch pipe switches on with each main cold source passageway through annular chamber and annular connecting seat.
As a preferred embodiment of the present invention: the cooling blade plate is detachably arranged on the outer side of the mounting seat;
The outer wall of the circumference of the mounting seat is provided with sockets distributed in pairs, the outer wall of one side of the cooling blade is provided with a connector matched with the sockets, and one side of the connector is provided with an opening;
a plugging column is movably arranged on the inner side of the mounting seat through a spring, an annular groove is formed in the outer wall of the circumference of the middle part of the plugging column, and the diameter of the plugging column is matched with the inner diameter of the socket;
When the connector is not inserted, the plugging column plugs the socket based on the support of the spring, and meanwhile, the position of the annular groove is matched with the main cold source channel, and one end of the main cold source channel is communicated with the other end of the main cold source channel through the annular groove;
When the connector is inserted, the middle part of the main cold source channel is blocked by the connector, but the two ends of the main cold source channel are respectively communicated with the auxiliary cold source channel through the openings to form a new passage, an annular clamping groove is formed in the inner side of the socket, a sealing ring matched with the annular clamping groove is arranged on the connector, and when the connector is inserted into the socket, the sealing ring is clamped into the annular clamping groove.
As a preferred embodiment of the present invention: the shape of the auxiliary cold source channel is in an arc shape.
As a preferred embodiment of the present invention: elastic films are arranged on the inner sides of the cooling blades.
As a preferred embodiment of the present invention: the auxiliary cooler also comprises a supporting frame, and the supporting frame is arranged at one side of the cooling chamber;
The support frame is last to install and to be used for driving the pivoted actuating mechanism of commentaries on classics roller, actuating mechanism includes:
The control motor is arranged on the support frame;
The shaft of the driving gear is in transmission connection with the output end of the control motor;
The outer cylinder is arranged on the shaft of the rotating roller and is rotatably arranged on the supporting frame;
and the driven gear is arranged on the shaft of the outer cylinder and meshed with the driving gear.
As a preferred embodiment of the present invention: the shaft of the rotating roller is rotatably arranged in the outer cylinder, one side of the outer cylinder is provided with an electric locking cylinder through a bracket, and the position of the output end of the electric locking cylinder is matched with the shaft of the rotating roller.
The beneficial effects of the invention are as follows:
1. The invention relates to a spiral tube heat exchanger the inlet and the outlet are provided with resistance measuring instruments; when the resistance tends to increase, the control module enables the normal-temperature recovered gas to enter the spiral tube heat exchanger through the reheating conveying pipe through the second electric control valve, heats and melts the solid solidified in the spiral tube heat exchanger, and improves the flow speed to blow away the blocked solid impurities so as to ensure the continuity of the process.
2. By arranging the auxiliary cooler, the mounting seat and the cooling blade plate can keep lower temperature through the cold source, and gas is fully contacted with the cooling blade plate and the mounting seat when passing through the cooling chamber, so that reliable cooling is realized.
3. According to the invention, through arranging the structures such as the annular connecting seat, the annular chamber and the like, the requirement of cold source conveying is met, meanwhile, the rotation of the structure is not influenced, and the reliability is improved; by arranging the detachable cooling blades, the assembly condition of the cooling blades can be adjusted according to the requirements, so that the heat transfer effect is changed; in addition, before and after the cooling blade plate is installed, different cooling passages are formed, so that the cooling reliability is guaranteed, and the auxiliary cold source channels with the arch-shaped structures can further improve the cooling effect.
4. According to the invention, by arranging the structures such as the electric locking cylinder and the control motor, the outer cylinder and the shaft of the rotary roller can be locked through the work of the electric locking cylinder according to actual demands; based on the work of the control motor, the outer cylinder and the rotating roller are driven to synchronously rotate under the transmission of the driving gear and the driven gear.
Drawings
FIG. 1 is a schematic diagram of a laser gas recovery frozen solid particle separation device according to the present invention;
Fig. 2 is a schematic structural diagram of an auxiliary cooler in a laser gas recovery frozen solid particle separating device according to the present invention;
FIG. 3 is a schematic diagram of a driving mechanism in a laser gas recovery frozen solid particle separating device according to the present invention;
FIG. 4 is a schematic cross-sectional view of an annular chamber and an annular connecting seat in a laser gas recovery frozen solid particle separating device according to the present invention;
FIG. 5 is a schematic cross-sectional view of a cooling chamber in a laser gas recovery frozen solid particle separation device according to the present invention;
FIG. 6 is a schematic sectional view of a mounting seat in a laser gas recovery frozen solid particle separating device according to the present invention;
fig. 7 is a schematic view showing the structure of the laser gas recovery frozen solid particle separating device with cooling blades removed.
In the figure: the device comprises a low-temperature adsorber, a 2 spiral tube heat exchanger, a 3 second-level gas-liquid separator, a 4 low-temperature container, a 5 second-level heat exchanger, a6 high-pressure liquefaction separation device cold box, a 7 first-level heat exchanger, a 8 first-level gas-liquid separator, a 9 vacuum pump, a 10 resistance measuring instrument, a 11 first electric control valve, a 12 second electric control valve, a 13 cooling chamber, a 14 cold source branch pipe, a 15 third electric control valve, a 16 input end, a 17 output end, a 18 control motor, a 19 driving gear, a 20 driven gear, a 21 annular chamber, a 22 electric locking cylinder, a 23 support frame, a 24 outer cylinder, a 25 annular connecting seat, a 26 main cold source channel, a 27 rotary roller, 28 cooling blades, a 29 mounting seat, a 30 elastic membrane, 31 sealing rings, 32 springs, 33 auxiliary cold source channels, 34 openings, 35 sockets, 36 annular grooves, 37 sealing columns, 38 connectors, a 101 laser gas recovery gas input pipe, a 102 condensed impurity output pipe, a 103 first-level crude neon output pipe, a 104 low-temperature cold source input pipe, a 105 low-temperature neon output pipe, a 106 second-level neon output pipe, a 107 crude neon output pipe, a 108 top end delivery pipe, a 108 and a 109 separator.
Detailed Description
The technical scheme of the invention is further described in detail below with reference to the specific embodiments.
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the invention.
Example 1:
a laser gas recovery frozen solid particle separation apparatus, as shown in fig. 1-7, comprising:
The high-pressure liquefaction separation device comprises a high-pressure liquefaction separation device cold box 6, wherein a first-stage gas-liquid separator 8 is arranged in the high-pressure liquefaction separation device cold box 6, the input end of the first-stage gas-liquid separator 8 is connected with a laser gas recovery gas input pipe 101, and the bottom of the first-stage gas-liquid separator 8 is provided with a condensed impurity output pipe 102;
the primary heat exchange mechanism is arranged in the cold box 6 of the high-pressure liquefaction separation device and is used for cooling the laser gas recovery gas input pipe 101;
The first-stage coarse neon conveying pipe 103, the first-stage coarse neon conveying pipe 103 is arranged at the output end of the first-stage gas-liquid separator 8, and the first electric control valve 11 is arranged on the first-stage coarse neon conveying pipe 103;
A low-temperature container 4, wherein the low-temperature adsorber 1 is arranged in the low-temperature container 4;
The vacuum pump 9 is arranged on the low-temperature container 4, and the vacuum pump 9 is connected with the low-temperature adsorber 1;
The secondary gas-liquid separator 3 is arranged in the low-temperature container 4, the secondary gas-liquid separator 3 is connected with the low-temperature adsorber 1, and the separator top 109 is arranged on the secondary gas-liquid separator 3;
The secondary heat exchange mechanism is arranged in the low-temperature container 4;
The spiral tube heat exchanger 2 is wound on the outer surface of the low-temperature adsorber 1, the output end of the spiral tube heat exchanger 2 is connected with the secondary gas-liquid separator 3 through a secondary coarse neon conveying pipe 106, and a resistance measuring element 10 is arranged at the inlet and the outlet of the spiral tube heat exchanger 2;
one end of the reheating conveying pipe 108 is connected with the first-stage coarse neon conveying pipe 103, the reheating conveying pipe 108 passes through the first-stage heat exchanger 7 to enable internal gas to be reheated to be in a normal temperature state, the other end of the reheating conveying pipe 108 is connected with the first-stage coarse neon conveying pipe 103, and two ends of the reheating conveying pipe 108 connected with the first-stage coarse neon conveying pipe 103 are positioned on two sides of the first electric control valve 11; the reheating delivery pipe 108 is provided with a second electric control valve 12;
the control module controls the on and off of the first electric control valve 11 and the second electric control valve 12 based on the measurement condition of the resistance measuring instrument 10.
To facilitate heat exchange; as shown in fig. 1, the primary heat exchange mechanism includes:
The first-stage heat exchanger 7 is arranged in the cold box 6 of the high-pressure liquefaction separation device, and the first-stage heat exchanger 7 is used for cooling the laser gas recovery gas input pipe 101;
The low-temperature cold source input pipe 104, the low-temperature cold source input pipe 104 is connected with the primary heat exchanger 7, and one end of the primary heat exchanger 7 is connected with the low-temperature cold source output pipe 105;
the reheat pipe 108 passes through the primary heat exchanger 7.
To facilitate heat exchange; as shown in fig. 1, the secondary heat exchange mechanism includes:
the secondary heat exchanger 5, the secondary heat exchanger 5 is installed in the low-temperature container 4;
The liquid nitrogen input pipe is arranged on the low-temperature container 4, and one end of the liquid nitrogen input pipe is connected with the secondary heat exchanger 5;
The pure neon output pipe 107, the pure neon output pipe 107 is installed in the output of second grade heat exchanger 5, and the one end of second grade gas-liquid separator 3 is connected second grade heat exchanger 5.
In one practical application, the mixed laser gas recovered by the photoetching machine is recovered to an exhaust chamber, then enters into a gas storage bag, the components are (96.5 percent of Ne,1.75 percent of Ar,10ppm of Xe,1.23 percent of Kr, O 2,N2,H2O,H2 and trace He), the hydrogen is removed in a catalyst furnace by adding excessive oxygen, then enters into a dryer to remove water, the dried recovered laser gas is pressurized to 5.5MPa and then is input through a laser gas recovery gas input pipe 101, and is partially liquefied by liquid oxygen cooling in a cold box 6 of a high-pressure liquefying separation device, The recovered laser gas after removing most of impurities such as krypton, xenon, fluoride and the like by high-pressure liquefaction enters a low-temperature container 4 through a first-stage coarse neon conveying pipe 103 for further purification; the separated heavy components (about 23.2NM 3/h, 7.5 percent of Ne,2.2 percent of Ar,17ppm of Xe,1.99 percent of Kr, 88 percent of O 2 and trace N 2) are depressurized through a valve and then are discharged or recycled through a condensed impurity output pipe 102; The first gas-liquid separator 8 gas phase withdraws non-condensable crude neon 46.79NM 3/h (79.2% Ne,0.65% Ar,0.03ppm Xe,682ppm Kr and 20.07% O 2 and trace N 2), He) is output from a first-stage coarse neon conveying pipe 103 of a cold box 6 of a high-pressure liquefaction separation device, is depressurized to 3MPa through a valve 11 and enters a spiral tube heat exchanger 2 in a low-temperature container 4, the spiral tube heat exchanger 2 is sleeved on the outer surface of a low-temperature absorber 1, laser gas recovery gas in a spiral tube is cooled and liquefied in negative-pressure liquid nitrogen carried by the low-temperature container 4 and is partially solidified, solidified impurities are brought into a lower secondary gas-liquid separator 3 by utilizing high-speed movement of the laser gas in the spiral tube, most of krypton, xenon and fluoride are separated by the laser gas recovery gas, and then the laser gas enters the lower secondary gas-liquid separator 3 to separate oxygen-nitrogen liquid impurities, and the top end 109 (99.69%Ne,194ppm Ar,0.173ppmKr, 0.283% o 2 and trace N 2 of the separator, He) is discharged into a low-temperature adsorber 1, residual oxygen, argon, nitrogen, krypton, xenon, fluoride and other impurities are removed through adsorption by an adsorbent, pure neon is obtained, the pure neon is reheated and then is used as a raw material bottle for laser gas or is filled into a neon helium separation device after residual helium in the neon is further removed, and the high-purity neon after bottle filling is used as a raw material for laser gas for recycling.
A resistance measuring instrument 10 is arranged at the inlet and the outlet of the spiral tube heat exchanger 2; when the resistance tends to increase, the control module enables the recovered gas at normal temperature to enter the spiral tube heat exchanger 2 through the reheating conveying pipe 108 through the second electric control valve 12, heats and melts the solid solidified in the spiral tube heat exchanger 2, and improves the flow rate to blow away the blocked solid impurities so as to ensure the continuity of the process.
After the low-temperature container 4 discharges liquid nitrogen, wen Fure is added to normal temperature, the krypton-xenon fluoride solid solidified in the spiral tube heat exchanger 2 and the secondary gas-liquid separator 3 is melted and recovered into gas, and the impurity gas is carried out of the recovery device through nitrogen.
Example 2:
a laser gas recovery frozen solid particle separation device, as shown in figures 2-7, for better cooling; the present example was modified on the basis of example 1 as follows: an auxiliary cooler is connected in series on the laser gas recovery gas input pipe 101, and the auxiliary cooler comprises:
the cooling chamber 13, the whole cooling chamber 13 is of a hollow disc-shaped structure, one side of the cooling chamber 13 is provided with an input end 16, and the other side of the cooling chamber 13 is provided with an output end 17;
The rotary roller 27, the rotary roller 27 is sealed and rotated in the cooling chamber 13, the middle part of the rotary roller 27 is provided with a mounting seat 29, the outer side of the mounting seat 29 is provided with a plurality of cooling blades 28, and the rotary roller 27 and the cooling blades 28 are respectively provided with a main cold source channel 26 and a secondary cold source channel 33;
The cold source branch pipes 14, the two cold source branch pipes 14 are respectively communicated with the main cold source channels 26 at two ends of the rotating roller 27, one cold source branch pipe 14 is connected with the low-temperature cold source input pipe 104, and the other cold source branch pipe 14 is connected with the low-temperature cold source output pipe 105; the cold source branch pipe 14 is provided with a third electric control valve 15;
through setting up supplementary cooler, can make mount pad 29, cooling blade 28 keep lower temperature through the cold source, when gaseous through cooling chamber 13, with cooling blade 28 and mount pad 29 fully contact, realize reliable cooling.
In order to facilitate the transportation of the cold source; as shown in fig. 3-5, the two ends of the rotating roller 27 are respectively provided with an annular connecting seat 25, the outer side of the annular connecting seat 25 is provided with an annular chamber 21, the annular connecting seat 25 is connected to the inner wall of the annular chamber 21 in a sealing and rotating way, the cold source branch pipe 14 is arranged on the outer wall of one side of the annular chamber 21, and the cold source branch pipe 14 is communicated with each main cold source channel 26 through the annular chamber 21 and the annular connecting seat 25;
through having set up annular connecting seat 25, annular chamber 21 isotructure, satisfied the demand that the cold source was carried, do not influence the rotation of structure simultaneously, promoted the reliability.
In order to facilitate the adjustment of the structural layout, the refrigeration effect is adjusted; as shown in fig. 5-7, the cooling blades 28 are detachably mounted on the outer side of the mounting seat 29;
The circumference outer wall of the mounting seat 29 is provided with sockets 35 distributed in pairs, the outer wall of one side of the cooling blade 28 is provided with a connector 38 matched with the sockets 35, and one side of the connector 38 is provided with an opening 34;
a plugging column 37 is movably arranged on the inner side of the mounting seat 29 through a spring 32, an annular groove 36 is formed in the outer wall of the circumference of the middle part of the plugging column 37, and the diameter of the plugging column 37 is matched with the inner diameter of the socket 35;
when the connector 38 is not inserted, the plug column 37 plugs the socket 35 based on the support of the spring 32, and meanwhile, the position of the annular groove 36 is matched with that of the main cold source channel 26, and one end of the main cold source channel 26 is communicated with the other end of the main cold source channel 26 through the annular groove 36;
When the connector 38 is inserted, the middle part of the main cold source channel 26 is blocked by the connector 38, but two ends of the main cold source channel 26 are respectively communicated with the auxiliary cold source channel 33 through the opening 34 to form a new passage, an annular clamping groove is formed in the inner side of the socket 35, a sealing ring 31 matched with the annular clamping groove is arranged on the connector 38, and when the connector 38 is inserted into the socket 35, the sealing ring 31 is clamped into the annular clamping groove;
The shape of the auxiliary cold source channel 33 is in an arc shape;
By arranging the detachable cooling blades 28, the assembly condition of the cooling blades 28 can be adjusted according to the requirements, so that the heat transfer effect is changed; in addition, different cooling passages are formed before and after the cooling blades 28 are installed, so that the cooling reliability is ensured, and the auxiliary cold source channels 33 with the arch-shaped structure can further improve the cooling effect.
Wherein the cooling blades 28 are provided inside with a resilient membrane 30.
Example 3:
A laser gas recovery frozen solid particle separation device, as shown in figures 2-7, for better control; the present example was modified on the basis of example 2 as follows: the auxiliary cooler also comprises a supporting frame 23, and the supporting frame 23 is arranged on one side of the cooling chamber 13;
The support 23 is provided with a driving mechanism for driving the rotating roller 27 to rotate, and the driving mechanism comprises:
the control motor 18, the control motor 18 is installed on the supporting frame 23;
the driving gear 19, the shaft of the driving gear 19 is connected with the output end of the control motor 18 in a transmission way;
An outer cylinder 24, the outer cylinder 24 being mounted on the shaft of the rotating roller 27, the outer cylinder 24 being rotatably mounted on the supporting frame 23;
the driven gear 20, the driven gear 20 is mounted on the shaft of the outer cylinder 24, and the driven gear 20 meshes with the driving gear 19.
To facilitate adjustment of the rotation pattern of the turning rolls 27; as shown in fig. 4, the shaft of the rotating roller 27 is rotatably installed in the outer cylinder 24, one side of the outer cylinder 24 is provided with an electric locking cylinder 22 through a bracket, and the position of the output end of the electric locking cylinder 22 is matched with the shaft of the rotating roller 27;
By arranging the structures such as the electric locking cylinder 22 and the control motor 18, the shaft of the outer cylinder 24 and the rotating roller 27 can be locked by the electric locking cylinder 22 according to actual demands; based on the operation of the control motor 18, the outer cylinder 24 and the rotary roller 27 are driven to synchronously rotate under the transmission of the driving gear 19 and the driven gear 20.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411135146.7A CN118912819B (en) | 2024-08-19 | 2024-08-19 | Laser gas recovery freezing solid particle separator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411135146.7A CN118912819B (en) | 2024-08-19 | 2024-08-19 | Laser gas recovery freezing solid particle separator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN118912819A true CN118912819A (en) | 2024-11-08 |
| CN118912819B CN118912819B (en) | 2025-02-11 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5626035A (en) * | 1995-07-24 | 1997-05-06 | Russian American Technology Alliance | Apparatus and method for separation of helium and neon |
| CN202522015U (en) * | 2012-03-28 | 2012-11-07 | 上海启元空分技术发展股份有限公司 | Neon and helium separation and purification device with refrigeration equipment |
| KR102018690B1 (en) * | 2018-06-21 | 2019-09-05 | 대성산업가스 주식회사 | Apparatus for separating neon and helium gases |
| CN113108550A (en) * | 2021-04-19 | 2021-07-13 | 衢州杭氧特种气体有限公司 | Neon and helium separation system and separation method thereof |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5626035A (en) * | 1995-07-24 | 1997-05-06 | Russian American Technology Alliance | Apparatus and method for separation of helium and neon |
| CN202522015U (en) * | 2012-03-28 | 2012-11-07 | 上海启元空分技术发展股份有限公司 | Neon and helium separation and purification device with refrigeration equipment |
| KR102018690B1 (en) * | 2018-06-21 | 2019-09-05 | 대성산업가스 주식회사 | Apparatus for separating neon and helium gases |
| CN113108550A (en) * | 2021-04-19 | 2021-07-13 | 衢州杭氧特种气体有限公司 | Neon and helium separation system and separation method thereof |
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| CN118912819B (en) | 2025-02-11 |
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