CN118899043B - A method and system for determining abnormal AMC concentration - Google Patents
A method and system for determining abnormal AMC concentration Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 39
- 230000002159 abnormal effect Effects 0.000 title claims description 75
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 199
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 99
- 238000005259 measurement Methods 0.000 claims abstract description 75
- 239000007789 gas Substances 0.000 claims abstract description 49
- 238000010926 purge Methods 0.000 claims abstract description 32
- 230000005856 abnormality Effects 0.000 claims abstract description 30
- 238000012544 monitoring process Methods 0.000 claims abstract description 30
- 230000003213 activating effect Effects 0.000 claims abstract description 4
- 238000012545 processing Methods 0.000 claims description 18
- 238000012795 verification Methods 0.000 claims description 13
- 238000004458 analytical method Methods 0.000 claims description 12
- 238000007670 refining Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 4
- 239000003344 environmental pollutant Substances 0.000 abstract description 2
- 231100000719 pollutant Toxicity 0.000 abstract description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 14
- 238000010586 diagram Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 6
- 239000006227 byproduct Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- FYGHSUNMUKGBRK-UHFFFAOYSA-N 1,2,3-trimethylbenzene Chemical compound CC1=CC=CC(C)=C1C FYGHSUNMUKGBRK-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000010909 process residue Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- DQWPFSLDHJDLRL-UHFFFAOYSA-N triethyl phosphate Chemical compound CCOP(=O)(OCC)OCC DQWPFSLDHJDLRL-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/007—Arrangements to check the analyser
-
- G—PHYSICS
- G16—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR SPECIFIC APPLICATION FIELDS
- G16C—COMPUTATIONAL CHEMISTRY; CHEMOINFORMATICS; COMPUTATIONAL MATERIALS SCIENCE
- G16C20/00—Chemoinformatics, i.e. ICT specially adapted for the handling of physicochemical or structural data of chemical particles, elements, compounds or mixtures
- G16C20/20—Identification of molecular entities, parts thereof or of chemical compositions
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- Biochemistry (AREA)
- Pathology (AREA)
- Immunology (AREA)
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- General Health & Medical Sciences (AREA)
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- Food Science & Technology (AREA)
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- Bioinformatics & Computational Biology (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The invention relates to the technical field of pollutant detection, and particularly discloses a method and a system for judging AMC concentration abnormality, wherein the method comprises the steps of S100, locating a measurement point in an AMC online monitoring system, dividing the measurement point into a plurality of single items, wherein the single items at least comprise NH3+NO+NO2, HCL+HF and SO2, acquiring real-time readings of the single items by utilizing a sampler, and S200, acquiring filling permission of judging gas in the measurement point, wherein the judging gas comprises standard gas and nitrogen, and activating the filling permission. According to the invention, the nitrogen is filled into the measurement point, so that the standard gas can be diluted, and the diluted standard gas with different concentrations is measured for multiple times, so that the performance of the sampler in different concentration ranges is evaluated, the reliability of measurement data is further improved, the maximum value is calculated, the sampler can be purged, decision support is provided for purging, residual gas in the measurement point can be removed, and the authenticity of the measurement data is ensured.
Description
Technical Field
The invention relates to the technical field of pollutant detection, in particular to a method and a system for judging AMC concentration abnormality.
Background
AMC refers to a gas mixture affecting wafer processing during semiconductor production, which mainly includes numerous fine contaminants affecting the production process and resulting in reduced product yield, such as acidic molecules (e.g., hydrofluoric acid, hydrochloric acid, phosphoric acid, etc.), basic molecules (amine, ammonia), and condensable molecules (ethyl lactate, trimethylbenzene, triethylphosphate), etc., and the presence of these mixed gases may not only affect the characteristics of components, but also result in process residues, even affect the processing accuracy of wafers, reducing yield.
In a semiconductor production workshop, a clean room is generally arranged, the air quality requirement of the clean room is high, namely the concentration of AMC needs to be guaranteed to be in a lower level in real time, the front-end process for adjusting the concentration of AMC is an AMC concentration abnormality judging process, the more accurate the detection result of the AMC concentration is, the more accurate the adjusting process is, the existing AMC concentration abnormality judging process is mostly realized through an AMC on-line monitoring system, and the AMC on-line monitoring system consists of acid analysis equipment, alkali analysis equipment, sulfide analysis equipment, organic matter analysis equipment, a multi-point sampler and on-line monitoring software. The above-mentioned equipment is liable to be disturbed by the environment when measuring the concentration, and then influences the authenticity of measured value. Therefore, "how to mitigate environmental interference and improve the authenticity of AMC concentration measurement values" is a technical problem to be solved by the present invention.
Disclosure of Invention
The invention aims to provide a method and a system for judging AMC concentration abnormality, which are used for solving the problem of how to reduce environmental interference and improve the authenticity of an AMC concentration measured value in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions:
a method for discriminating an AMC concentration abnormality, the method comprising:
S100, positioning a measurement point in an AMC online monitoring system, and dividing the measurement point into a plurality of single items, wherein the single items at least comprise NH3+NO+NO2, HCL+HF and SO2, and acquiring real-time readings of the single items by using the sampler;
S200, acquiring filling authorities of discrimination gases in the measurement point, wherein the discrimination gases comprise standard gases and nitrogen, activating the filling authorities, filling a preset volume of standard gases into the measurement point, defining real-time readings of each single item as a reference value, and selecting a plurality of nitrogen filling volume items from a preset concentration control table, wherein the concentration control table at least comprises the nitrogen filling volume items and theoretical values;
S300, filling nitrogen with corresponding volume into the measurement point based on the volume item and the filling authority, recording real-time reading of each item, obtaining a measured value, and judging whether the reference value, the measured value and the theoretical value are the same;
if the measured point is the same, traversing the maximum value from the volume item filled with nitrogen, calculating the nitrogen amount required by purging, continuously filling nitrogen into the measured point, reading the real-time reading of the single item again after the purging is completed, judging whether the single item is 0, if the single item is not 0, determining an offset value, and if the single item is 0, determining the real-time reading as a final reading;
If the real-time readings are different, finding out the single items with different theoretical values, determining the single items as abnormal single items, backtracking the measurement points corresponding to the abnormal single items to obtain abnormal point positions, integrating the abnormal single items, the abnormal point positions and the theoretical values and the measured values corresponding to the abnormal single items, and generating an error analysis report.
Further, the S100 includes:
Creating a co-processing architecture, integrating the real-time readings into the co-processing architecture, and inserting directives, wherein the directives are used for representing correlation relations among single items, and the correlation relations comprise positive correlation and negative correlation;
and synchronizing the acquired real-time readings to an AMC online monitoring system.
Further, the S200 includes:
Issuing the filling authority to an AMC on-line monitoring system, and selecting a control point from the measurement point;
after the filling authority is activated, when the real-time reading in the control point is the same as the theoretical value, the filling authority is forbidden, and the real-time reading in all the single items is defined as a reference value;
and judging whether the reference value is the same as the theoretical value, if so, marking the measurement point position, and adding the measurement point position into the abnormal point position.
Further, the S200 includes:
introducing error factors, wherein the error factors at least comprise temperature, humidity and standard gas pressure;
Comparing the real-time reading of the abnormal single item with the theoretical value, marking the error factor of each abnormal point location, and embedding a verification mechanism of the error factor into the abnormal point location;
and if the error factor passes through a verification mechanism, deleting the abnormal point.
Further, the verification mechanism comprises the steps of refining two adjacent groups of nitrogen-filled volume items in the concentration control table, making a selection strategy, determining a high value and a low value, and correcting the abnormal point by utilizing the error factor.
Further, the S300 includes:
Inquiring the concentration control table, traversing the volume item of the nitrogen to be filled corresponding to the maximum value to obtain the total amount of the nitrogen to be filled, and adding the rest into the total amount of the nitrogen to be filled based on a preset purging strategy;
based on the current real-time reading, determining the amount of nitrogen charged, calculating the difference between the total amount of nitrogen to be charged and the amount of nitrogen charged, and defining the difference as the amount of nitrogen required by purging.
Further, the S300 includes:
after purging is completed, finding out a measuring point position with real-time reading not being 0, and determining an offset value;
And generating a label by using the offset value, and inserting the label into a single item.
Further, the method further comprises:
Based on the offset value, determining the zero drift amount of each abnormal single item, configuring the corresponding relation between the zero drift amount and the error factor, and drawing a compensation curve;
And correcting the real-time reading of the abnormal single item by using the compensation curve.
The invention also provides a distinguishing system for AMC concentration abnormality, which comprises:
the acquisition module is used for positioning a measurement point in the AMC on-line monitoring system and dividing the measurement point into a plurality of single items, wherein the single items at least comprise NH3+NO+NO2, HCL+HF and SO2, and the sampler is used for acquiring real-time readings of the single items;
the selection module is used for acquiring the filling authority of the distinguishing gas in the measurement point, wherein the distinguishing gas comprises standard gas and nitrogen, the filling authority is activated, the measurement point is filled with standard gas with a preset volume, the real-time reading of each single item is defined as a reference value, and a plurality of nitrogen filling volume items are selected from a preset concentration control table, wherein the concentration control table at least comprises the nitrogen filling volume items and theoretical values;
the judging module is used for charging nitrogen with corresponding volume into the measurement point based on the volume item and the charging authority of the charged nitrogen, recording real-time reading of each item, obtaining a measured value, and judging whether the reference value, the measured value and the theoretical value are the same;
if the measured point is the same, traversing the maximum value from the volume item filled with nitrogen, calculating the nitrogen amount required by purging, continuously filling nitrogen into the measured point, reading the real-time reading of the single item again after the purging is completed, judging whether the single item is 0, if the single item is not 0, determining an offset value, and if the single item is 0, determining the real-time reading as a final reading;
If the real-time readings are different, finding out the single items with different theoretical values, determining the single items as abnormal single items, backtracking the measurement points corresponding to the abnormal single items to obtain abnormal point positions, integrating the abnormal single items, the abnormal point positions and the theoretical values and the measured values corresponding to the abnormal single items, and generating an error analysis report.
Further, the acquisition module includes:
An inserting unit, configured to create a co-processing architecture, integrate the real-time readings into the co-processing architecture, and insert a direction, where the direction is used to characterize a correlation between the individual items, and the correlation includes a positive correlation and a negative correlation;
and the synchronization unit is used for synchronizing the acquired real-time reading to the AMC on-line monitoring system.
Compared with the prior art, the invention has the beneficial effects that:
Through obtaining filling permission, can mark the sample thief, measurement accuracy is improved, and ensure the stability of sample thief performance, simultaneously also greatly reduced measurement drift, guaranteed the accuracy of measured data, through filling nitrogen gas into the measurement point location, can dilute standard gas, and carry out a lot of measurement to the diluted standard gas of different concentration, thereby evaluate the sample thief and carry out the performance in different interval of measuring, further improve the reliability of measured data, through calculating maximum value, can sweep the sample thief, and calculate the required nitrogen volume of sweeping, clear away residual gas in the measurement point location, ensure the authenticity of measured data.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following description will briefly introduce the drawings that are needed in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are only some embodiments of the present invention.
FIG. 1 is a flow chart of a method for determining AMC concentration abnormality provided by an embodiment of the invention;
FIG. 2 is a first sub-flowchart of a method for determining AMC concentration anomalies according to an embodiment of the present invention;
FIG. 3 is a second sub-flowchart of a method for determining AMC concentration anomalies according to an embodiment of the present invention;
FIG. 4 is a third sub-flowchart of a method for determining AMC concentration anomalies according to an embodiment of the present invention;
FIG. 5 is a block diagram showing the constitution of a discrimination system for AMC concentration abnormality according to an embodiment of the present invention;
FIG. 6 is a block diagram of an acquisition module in the AMC concentration anomaly determination system according to an embodiment of the present invention;
FIG. 7 is a block diagram illustrating selection modules in the AMC concentration anomaly determination system according to an embodiment of the present invention;
Fig. 8 is a block diagram of a judging module in the AMC concentration abnormality judging system according to the embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
In embodiment 1, fig. 1 shows a flow of implementation of the method for determining the AMC concentration abnormality provided in the embodiment of the present invention, and the following details are given below:
and S100, positioning a measurement point in the AMC online monitoring system, and dividing the measurement point into a plurality of single items, wherein the single items at least comprise NH3+NO+NO2, HCL+HF and SO2, and acquiring real-time readings of the single items by using the sampler.
Determining a measuring point in an AMC on-line monitoring system, wherein the measuring point is the installation position of a sampler, determining a plurality of single items according to a sampling result, wherein the single items are the types of each component in the AMC, the single items can be NH3+NO+NO2, HCL+HF, SO2 and the like, each component needs to be detected by using specific equipment, for example, an ultraviolet smoke analyzer for detecting the concentration of NH3+NO+NO2 by using a chemiluminescence method, a laser trace gas analyzer for detecting HCL+HF by using a semiconductor laser absorption spectrum and Herriott cavity enhancement technology, an ultraviolet fluorescent sulfur analyzer for detecting SO2 by using an ultraviolet fluorescent method, and determining the real-time reading of each single item by using the equipment.
S200, acquiring filling authorities of distinguishing gases in the measurement point, wherein the distinguishing gases comprise standard gases and nitrogen, activating the filling authorities, filling standard gases with preset volumes into the measurement point, defining real-time readings of each single item as a reference value, and selecting a plurality of nitrogen filling volume items from a preset concentration control table, wherein the concentration control table at least comprises the nitrogen filling volume items and theoretical values.
In actual work, the sampler, the related pipelines and the outside air can be isolated by closing the air inlet pump and the like. After the real-time reading record is completed, standard gas is introduced into the sampler by using the preset air inlet pipeline through the filling authority, at the moment, the real-time reading of the sampler is recorded, the real-time reading of each single item is determined, the recorded real-time reading is determined as a reference value, the reference value is used for comparison in a concentration control table, whether the reference value is identical with a corresponding theoretical value or not is judged, if the reference value is identical with the theoretical value, the sampler is proved to be accurate, if errors exist, the judgment is needed to be continued, after the judgment is completed, a plurality of nitrogen filling volume items are selected, and the nitrogen volume needing to be filled is determined, wherein the attention is paid to that one nitrogen filling volume item corresponds to a plurality of theoretical values (the concentration control table is exemplified by the following table and is not an actual measurement value).
S300, filling nitrogen with corresponding volume into the measurement point based on the volume item and the filling authority, recording real-time reading of each item, obtaining a measured value, and judging whether the reference value, the measured value and the theoretical value are the same;
If the measured point is the same, traversing the maximum value from the volume item of the filled nitrogen, calculating the nitrogen amount required by purging, continuously filling nitrogen into the measured point, reading the real-time reading of the single item again after the purging is completed, judging whether the single item is 0, if the single item is not 0, determining the offset value, and if the single item is 0, determining the real-time reading as the final reading.
If the real-time readings are different, finding out the single items with different theoretical values, determining the single items as abnormal single items, backtracking the measurement points corresponding to the abnormal single items to obtain abnormal point positions, integrating the abnormal single items, the abnormal point positions and the theoretical values and the measured values corresponding to the abnormal single items, and generating an error analysis report.
And (3) selecting two nitrogen filling volume items of 4.5 and 9, filling nitrogen of 4.5cm & lt 3 & gt and 9cm & lt 3 & gt into the measurement point, recording real-time readings of each single item in the sampler at the moment, recording the real-time readings as measured values, judging whether the measured values are identical with theoretical values in a concentration control table or not, and judging whether the real-time readings (namely the reference values) of the single items at the moment are identical with the theoretical values or not after standard gas is filled into the measurement point.
If the real-time reading is 0, the measured AMC concentration result is correct, if the real-time reading is not 0, zero drift is indicated, the offset value can be utilized to correct the real-time reading of the single item, and the final corrected result is not necessarily an accurate value, and further check by using diluted standard gas for many times is needed.
If the measurement results are different, the error of the AMC concentration is indicated, at the moment, the real-time reading of the measurement point is compared with the concentration control table, the single item with the difference between the real-time reading and the theoretical value is found out, the single item is defined to be an abnormal single item, the corresponding measurement point is an abnormal point, the abnormal point is the measurement point of the error of the sampler, the abnormal point, the abnormal single item, the measured value and the like are integrated, an error analysis report is generated, and the error analysis report is sent to a preset terminal, wherein the preset terminal can be a manager terminal.
In embodiment 2, fig. 2 shows a flow of implementation of the method for determining AMC concentration abnormality provided in the embodiment of the present invention, and S100 is described in detail below:
S101, creating a collaborative processing architecture, integrating the real-time reading into the collaborative processing architecture, and inserting a direction, wherein the direction is used for representing the correlation relationship among the single items, and the correlation relationship comprises positive correlation and negative correlation.
A co-processing architecture is created, wherein the co-processing architecture is a distributed computing framework, all measurement points can be monitored through a sampler, and mutual correction can be performed between real-time readings.
The real-time readings are integrated into the co-processing architecture while inserting directives, i.e., relationships between each individual item.
For example, a certain production facility acts as a pollution source, which generates two kinds of by-product pollution gas during wafer processing, and due to the production characteristics, the two kinds of by-products can mutually inhibit, that is, one kind of by-product has high yield, and the other kind of by-product must be lower, that is, the two kinds of by-products have a negative correlation, and if the corresponding real-time readings of two single items are higher, the real-time readings may have errors.
And S102, synchronizing the acquired real-time readings into an AMC online monitoring system.
After the real-time reading is acquired, the real-time reading is synchronized to the AMC on-line monitoring system.
In embodiment 3, fig. 3 shows a flow of implementation of the method for determining AMC concentration abnormality provided in the embodiment of the present invention, and S200 is described in detail below, as follows:
and S201, issuing the filling authority to an AMC on-line monitoring system, and selecting a control point from the measurement points.
And issuing the filling permission to an AMC on-line monitoring system, finding out samplers with higher accuracy and stability, and determining corresponding measurement points as reference points, wherein the number of the reference points is at least one.
And S202, after the filling authority is activated, when the real-time reading in the control point is the same as the theoretical value, the filling authority is forbidden, and the real-time reading in all the single items is defined as a reference value.
And after filling the standard gas into the measurement point, stopping filling the standard gas into the measurement point when the real-time reading in the control point is the same as the theoretical value, and determining the real-time reading in a single item as the reference value.
And S203, judging whether the reference value is the same as the theoretical value, if so, marking the measurement point position, and adding the measurement point position into the abnormal point position.
And if the standard gas is different, the real-time reading of the single item is wrong, and the accuracy of the sampler is poor.
In embodiment 4, fig. 3 shows a flow of implementation of the method for determining AMC concentration abnormality provided in the embodiment of the present invention, and S200 is described in detail below, as follows:
And S204, introducing error factors, wherein the error factors at least comprise temperature, humidity and standard gas pressure.
The introduction of error factors into a single item may be responsible for the poor accuracy of the sampler, which may be temperature, humidity, pressure, etc.
S205, comparing the real-time reading of the abnormal single item with the theoretical value, marking the error factor of each abnormal point location, and embedding a verification mechanism of the error factor into the abnormal point location.
And determining an error factor affecting the accuracy of the sampler by comparing the real-time reading of the abnormal single item with a theoretical value in a concentration control table, wherein a verification mechanism is a specific method for determining the error factor from the real-time reading.
S206, deleting the abnormal point location if the error factor passes through a verification mechanism.
If the real-time reading can be calibrated to the real reading by using the error factor, the outlier is deleted, wherein the real reading can be measured by other same equipment.
The implementation flow of the method for judging AMC concentration abnormality provided by the embodiment of the invention is as follows, and the verification mechanism is described in detail as follows:
The verification mechanism comprises the steps of refining two adjacent groups of nitrogen-filled volume items in the concentration control table, making a selection strategy, determining a high value and a low value, and correcting the abnormal point by utilizing the error factors.
The method has the advantages that the detection result of the sampler can be further refined, whether the sampler is correct or not can be accurately judged, two nitrogen-filled volume items with far distance are selected in the concentration control table by utilizing a selection strategy, and a high value and a low value are determined, for example, 1 and 9 nitrogen-filled volume items are selected in the concentration control table, 9 is a high value, 1 is a low value, and the advantages of expanding the correction range and ensuring the accuracy of readings of the sampler in a plurality of measuring range intervals are achieved. After the high value and the low value are determined, correcting the real-time reading of the abnormal point by using an error factor, judging whether the corrected reading is the same as the theoretical value corresponding to the high value and the low value, and deleting the abnormal point if the corrected reading is the same as the theoretical value corresponding to the high value and the low value. That is, while the real-time reading of the sampler is not a true reading, the true reading can be calculated by data compensation.
In embodiment 5, fig. 4 shows a flow of implementation of the method for determining AMC concentration abnormality provided in the embodiment of the present invention, and S300 is described in detail below, as follows:
And S301, inquiring the concentration control table, traversing the volume item of the nitrogen to be filled corresponding to the maximum value to obtain the total amount of the nitrogen to be filled, and adding the rest into the total amount of the nitrogen to be filled based on a preset purging strategy.
And (3) finding out the maximum value in the volume item of the nitrogen to be filled in the concentration control table, determining the maximum value as the total amount of the nitrogen to be filled in, and carrying out a preset purging strategy, namely continuously filling the nitrogen with the same volume as the residual volume after filling the total amount of the nitrogen corresponding to the maximum value in the measurement point, thereby purging the measurement point and the sampler.
After the total amount of nitrogen to be charged is calculated, the remaining amount is added thereto, and the sum of the two is taken as the total amount of nitrogen to be used for purging.
S302, determining the amount of nitrogen filled based on the current real-time reading, calculating the difference between the total amount of nitrogen to be filled and the amount of nitrogen filled, and defining the difference as the amount of nitrogen required by purging.
According to the single real-time reading, determining the amount of the nitrogen to be filled, and subtracting the amount of the nitrogen to be filled from the sum of the total amount of the nitrogen to be filled and the balance to calculate the amount of the nitrogen required by purging, namely, the volume of the nitrogen is required to be filled to complete the purging.
In embodiment 6, fig. 4 shows a flow of implementation of the method for determining AMC concentration abnormality provided in the embodiment of the present invention, and S300 is described in detail below, as follows:
And S303, after purging is completed, finding out a measuring point position with real-time reading not being 0, and determining an offset value.
When the purging is completed, a measuring point with a real-time reading not being 0 is found, and if the real-time reading of a certain measuring point is not 0, the corresponding real-time reading is determined to be an offset value, namely the zero drift amount.
S304, generating a label by using the offset value, and inserting the label into a single item.
Using this offset value, a tag is generated and inserted into the corresponding item.
In embodiment 7, unlike embodiment 1, in an embodiment of the present invention, the method further includes:
Based on the offset value, determining the zero drift amount of each abnormal single item, configuring the corresponding relation between the zero drift amount and the error factor, and drawing a compensation curve;
And correcting the real-time reading of the abnormal single item by using the compensation curve.
In actual production, most of zero drift phenomena are caused by error factors, and meanwhile, a compensation curve is drawn, wherein the compensation curve is the relation between the error factors and the zero drift quantity, and the compensation curve is traversed to correct real-time readings in the abnormal single items.
In actual production, standard gas is often utilized to correct an AMC online monitoring system, whether a sampler and a monitoring result in the AMC online monitoring system are accurate or not is judged, after preliminary judgment is completed, nitrogen is filled into a measuring point position in the AMC online monitoring system, the standard gas in the AMC online monitoring system is diluted, whether the monitoring result is accurate or not is judged again, so that a plurality of intervals in a measuring range are calibrated, the system is opened again to exhaust, nitrogen is continuously filled, the AMC online monitoring system is purged, after the purging is completed, whether zero drift phenomenon exists or not is judged, and if the real-time reading of the AMC online monitoring system is accurate, the real-time reading is determined to be a final result.
Fig. 5 shows a block diagram of a composition structure of a discrimination system for AMC concentration abnormality provided in an embodiment of the present invention, the discrimination system 1 for AMC concentration abnormality includes:
The acquisition module 11 is used for positioning a measurement point in the AMC online monitoring system and dividing the measurement point into a plurality of single items, wherein the single items at least comprise NH3+NO+NO2, HCL+HF and Amines, and acquiring real-time readings of the single items;
The selection module 12 is configured to obtain filling rights of a discriminating gas in the measurement point, where the discriminating gas includes a standard gas and nitrogen, activate the filling rights, fill a preset number of standard gases into the measurement point, define a real-time reading of each single item as a reference value, and select a plurality of nitrogen-filled volume items in a preset concentration control table, where the concentration control table at least includes a nitrogen-filled volume item and a theoretical value;
the judging module 13 is used for filling nitrogen with corresponding volume into the measurement point based on the volume item and the filling authority of the filled nitrogen, recording real-time reading of each item, obtaining a measured value, and judging whether the reference value, the measured value and the theoretical value are the same;
If the measured point is the same, traversing the minimum value from the volume item of the filled nitrogen, calculating the nitrogen amount required by purging, continuously filling nitrogen into the measured point, reading the real-time reading of the single item again after the purging is completed, judging whether the single item is 0, if the single item is not 0, determining an offset value, and if the single item is 0, determining the real-time reading as a final reading;
If the real-time readings are different, finding out the single items with different theoretical values, determining the single items as abnormal single items, backtracking the measurement points corresponding to the abnormal single items to obtain abnormal point positions, integrating the abnormal single items, the abnormal point positions and the theoretical values and the measured values corresponding to the abnormal single items, and generating an error analysis report.
Fig. 6 shows a block diagram of a component structure of a discrimination system for AMC concentration abnormality provided in an embodiment of the present invention, the acquisition module 11 includes:
An inserting unit 111, configured to create a co-processing architecture, integrate the real-time readings into the co-processing architecture, and insert a direction, where the direction is used to characterize a correlation between the single items, and the correlation includes a positive correlation and a negative correlation;
And the synchronization unit 112 is used for synchronizing the acquired real-time reading into the AMC online monitoring system.
Fig. 7 shows a block diagram of a component structure of a discrimination system for AMC concentration abnormality provided in an embodiment of the present invention, the selection module 12 includes:
a selecting unit 121, configured to issue the filling right to an AMC online monitoring system, and select a control point from the measurement points;
A defining unit 122, configured to disable the filling authority when the real-time reading in the control point is the same as the theoretical value after the filling authority is activated, and define the real-time reading in all the single items as a reference value;
A marking unit 123, configured to determine whether the reference value is the same as the theoretical value, and if so, mark a measurement point location and add the measurement point location to the abnormal point location;
an introduction unit 124 for introducing error factors including at least temperature, humidity, and standard gas pressure;
The embedding unit 125 is configured to compare the real-time reading of the abnormal single item with a theoretical value, calculate an error factor of each abnormal point location, and embed a verification mechanism of the error factor into the abnormal point location;
A deleting unit 126 for deleting the abnormal point location after the error factor passes the verification mechanism
Fig. 8 shows a block diagram of the composition and structure of a discrimination system for AMC concentration abnormality provided in the embodiment of the present invention, the discrimination module 13 includes:
The adding unit 131 is configured to query the concentration control table, traverse the volume item of the nitrogen to be filled corresponding to the minimum value, obtain the total amount of nitrogen to be filled, and add the balance to the total amount of nitrogen to be filled based on a preset purge strategy;
The determining unit 132 is configured to determine an amount of nitrogen to be charged according to the current real-time reading, calculate a difference between a total amount of nitrogen to be charged and the amount of nitrogen to be charged, and define the difference as an amount of nitrogen required for purging;
the offset unit 133 is configured to find out a measurement point location with a real-time reading that is not "0" after the purging is completed, and determine an offset value;
A generating unit 134, configured to generate a tag using the offset value, and insert the tag into a single item.
The acquisition module 11 is mainly used for completing the step S100, the selection module 12 is mainly used for completing the step S200, and the judgment module 13 is mainly used for completing the step S300;
the inserting unit 111 is mainly used for completing step S101, and the synchronizing unit 112 is mainly used for completing step S102;
the selecting unit 121 is mainly used for completing step S201, the defining unit 122 is mainly used for completing step S202, the marking unit 123 is mainly used for completing step S203, the introducing unit 124 is mainly used for completing step S204, the embedding unit 125 is mainly used for completing step S205, and the deleting unit 126 is mainly used for completing step S206;
The adding unit 131 is mainly used for completing step S301, the determining unit 132 is mainly used for completing step S302, the shifting unit 133 is mainly used for completing step S303, and the generating unit 134 is mainly used for completing step S304.
The foregoing description is only of the preferred embodiments of the present invention, and is not intended to limit the scope of the invention, but rather is intended to cover any equivalents of the structures or equivalent processes disclosed herein or in the alternative, which may be employed directly or indirectly in other related arts.
Claims (10)
1. A method for determining an AMC concentration abnormality, the method comprising:
s100, positioning a measurement point in an AMC online monitoring system, and dividing the measurement point into a plurality of single items, wherein the single items at least comprise NH3+NO+NO2, HCL+HF and SO2, and acquiring real-time readings of the single items by using a sampler;
S200, acquiring filling authorities of discrimination gases in the measurement point, wherein the discrimination gases comprise standard gases and nitrogen, activating the filling authorities, filling a preset volume of standard gases into the measurement point, defining real-time readings of each single item as a reference value, and selecting a plurality of nitrogen filling volume items from a preset concentration control table, wherein the concentration control table at least comprises the nitrogen filling volume items and theoretical values;
S300, filling nitrogen with corresponding volume into the measurement point based on the volume item and the filling authority, recording real-time reading of each item, obtaining a measured value, and judging whether the reference value, the measured value and the theoretical value are the same;
if the measured point is the same, traversing the maximum value from the volume item filled with nitrogen, calculating the nitrogen amount required by purging, continuously filling nitrogen into the measured point, reading the real-time reading of the single item again after the purging is completed, judging whether the single item is 0, if the single item is not 0, determining an offset value, and if the single item is 0, determining the real-time reading as a final reading;
If the real-time readings are different, finding out the single items with different theoretical values, determining the single items as abnormal single items, backtracking the measurement points corresponding to the abnormal single items to obtain abnormal point positions, integrating the abnormal single items, the abnormal point positions and the theoretical values and the measured values corresponding to the abnormal single items, and generating an error analysis report.
2. The method for determining an abnormality in AMC concentration according to claim 1, wherein said S100 comprises:
Creating a co-processing architecture, integrating the real-time readings into the co-processing architecture, and inserting directives, wherein the directives are used for representing correlation relations among single items, and the correlation relations comprise positive correlation and negative correlation;
and synchronizing the acquired real-time readings to an AMC online monitoring system.
3. The method for determining an AMC concentration abnormality according to claim 2, wherein said S200 comprises:
Issuing the filling authority to an AMC on-line monitoring system, and selecting a control point from the measurement point;
after the filling authority is activated, when the real-time reading in the control point is the same as the theoretical value, the filling authority is forbidden, and the real-time reading in all the single items is defined as a reference value;
and judging whether the reference value is the same as the theoretical value, if so, marking the measurement point position, and adding the measurement point position into the abnormal point position.
4. The method for determining an AMC concentration abnormality according to claim 3, wherein S200 comprises:
introducing error factors, wherein the error factors at least comprise temperature, humidity and standard gas pressure;
Comparing the real-time reading of the abnormal single item with the theoretical value, marking the error factor of each abnormal point location, and embedding a verification mechanism of the error factor into the abnormal point location;
and if the error factor passes through a verification mechanism, deleting the abnormal point.
5. The method according to claim 4, wherein the verification mechanism includes refining two adjacent sets of nitrogen-filled volume entries in the concentration control table, making a selection policy, determining a high value and a low value, and correcting the abnormal point location by using the error factor.
6. The method for determining an AMC concentration abnormality as claimed in claim 5, wherein said S300 includes:
Inquiring the concentration control table, traversing the volume item of the nitrogen to be filled corresponding to the maximum value to obtain the total amount of the nitrogen to be filled, and adding the rest into the total amount of the nitrogen to be filled based on a preset purging strategy;
based on the current real-time reading, determining the amount of nitrogen charged, calculating the difference between the total amount of nitrogen to be charged and the amount of nitrogen charged, and defining the difference as the amount of nitrogen required by purging.
7. The method for determining an AMC concentration abnormality according to claim 1, wherein said S300 comprises:
after purging is completed, finding out a measuring point position with real-time reading not being 0, and determining an offset value;
And generating a label by using the offset value, and inserting the label into a single item.
8. The method for determining an abnormality in AMC concentration according to claim 4, further comprising:
Determining the zero drift amount of each abnormal single item, configuring the corresponding relation between the zero drift amount and the error factor, and drawing a compensation curve;
And correcting the real-time reading of the abnormal single item by using the compensation curve.
9. An AMC concentration anomaly discrimination system, comprising:
the acquisition module is used for positioning a measurement point in the AMC on-line monitoring system and dividing the measurement point into a plurality of single items, wherein the single items at least comprise NH3+NO+NO2, HCL+HF and SO2, and a sampler is used for acquiring real-time readings of the single items;
the selection module is used for acquiring the filling authority of the distinguishing gas in the measurement point, wherein the distinguishing gas comprises standard gas and nitrogen, the filling authority is activated, the measurement point is filled with standard gas with a preset volume, the real-time reading of each single item is defined as a reference value, and a plurality of nitrogen filling volume items are selected from a preset concentration control table, wherein the concentration control table at least comprises the nitrogen filling volume items and theoretical values;
the judging module is used for charging nitrogen with corresponding volume into the measurement point based on the volume item and the charging authority of the charged nitrogen, recording real-time reading of each item, obtaining a measured value, and judging whether the reference value, the measured value and the theoretical value are the same;
if the measured point is the same, traversing the maximum value from the volume item filled with nitrogen, calculating the nitrogen amount required by purging, continuously filling nitrogen into the measured point, reading the real-time reading of the single item again after the purging is completed, judging whether the single item is 0, if the single item is not 0, determining an offset value, and if the single item is 0, determining the real-time reading as a final reading;
If the real-time readings are different, finding out the single items with different theoretical values, determining the single items as abnormal single items, backtracking the measurement points corresponding to the abnormal single items to obtain abnormal point positions, integrating the abnormal single items, the abnormal point positions and the theoretical values and the measured values corresponding to the abnormal single items, and generating an error analysis report.
10. The AMC concentration anomaly discrimination system according to claim 9, wherein the acquisition module comprises:
An inserting unit, configured to create a co-processing architecture, integrate the real-time readings into the co-processing architecture, and insert a direction, where the direction is used to characterize a correlation between the individual items, and the correlation includes a positive correlation and a negative correlation;
and the synchronization unit is used for synchronizing the acquired real-time reading to the AMC on-line monitoring system.
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| CN107548458A (en) * | 2015-04-29 | 2018-01-05 | Ams微量金属公司 | Renewable mercury meniscus electrode with mercury recycling system and pollutant removal |
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