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CN118807361B - Vacuum equipment filtering control device and method - Google Patents

Vacuum equipment filtering control device and method Download PDF

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Publication number
CN118807361B
CN118807361B CN202411307817.3A CN202411307817A CN118807361B CN 118807361 B CN118807361 B CN 118807361B CN 202411307817 A CN202411307817 A CN 202411307817A CN 118807361 B CN118807361 B CN 118807361B
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CN
China
Prior art keywords
gas
mounting column
sealing ring
close
piston
Prior art date
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Application number
CN202411307817.3A
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Chinese (zh)
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CN118807361A (en
Inventor
陈国富
陈学胜
郑经纬
周倍禾
翁新增
苏少剑
廖振华
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Spectrum Materials Corp ltd
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Spectrum Materials Corp ltd
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Priority to CN202411307817.3A priority Critical patent/CN118807361B/en
Publication of CN118807361A publication Critical patent/CN118807361A/en
Application granted granted Critical
Publication of CN118807361B publication Critical patent/CN118807361B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42Auxiliary equipment or operation thereof
    • B01D46/44Auxiliary equipment or operation thereof controlling filtration
    • B01D46/446Auxiliary equipment or operation thereof controlling filtration by pressure measuring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0084Filters or filtering processes specially modified for separating dispersed particles from gases or vapours provided with safety means
    • B01D46/0086Filter condition indicators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42Auxiliary equipment or operation thereof
    • B01D46/44Auxiliary equipment or operation thereof controlling filtration
    • B01D46/46Auxiliary equipment or operation thereof controlling filtration automatic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42Auxiliary equipment or operation thereof
    • B01D46/48Removing dust other than cleaning filters, e.g. by using collecting trays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/88Replacing filter elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D8/00Cold traps; Cold baffles

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

本发明涉及过滤装置技术领域,且公开了一种真空设备过滤控制装置及方法,该装置包括管道及真空设备,所述管道的内部固定安装有安装柱,所述安装柱的一侧对称开设有螺纹口。本发明通过过滤组件可对通入真空设备的气体进行处理,且当过滤组件堵塞时,可切换至另一个过滤组件,保证整个过程中的不中断,保证工作效率,可在切换过滤组件的过程中,使得密封圈不会由于与安装柱之间的摩擦而导致其形变,因此后续在气体流动时,不会泄漏,且在切换过滤组件的过程中,吸入组件不断的吸入气体,使得这些气体不会泄漏在外,且可在切换完成后对用于吸入气体的吸入孔进行清理,以及对用于清理吸入孔的清理杆进行自清理,保证吸入孔的畅通。

The present invention relates to the technical field of filtering devices, and discloses a vacuum equipment filtering control device and method, the device comprises a pipeline and a vacuum equipment, a mounting column is fixedly installed inside the pipeline, and a threaded opening is symmetrically opened on one side of the mounting column. The present invention can process the gas passed into the vacuum equipment through a filtering component, and when the filtering component is blocked, it can be switched to another filtering component to ensure uninterrupted operation of the entire process and work efficiency. In the process of switching the filtering component, the sealing ring will not be deformed due to the friction between the sealing ring and the mounting column, so there will be no leakage when the gas flows later, and in the process of switching the filtering component, the suction component continuously sucks in the gas, so that the gas will not leak out, and after the switching is completed, the suction hole for sucking in the gas can be cleaned, and the cleaning rod for cleaning the suction hole can be self-cleaned to ensure the smooth flow of the suction hole.

Description

Vacuum equipment filtering control device and method
Technical Field
The invention belongs to the technical field of filtering devices, and particularly relates to a device and a method for controlling filtering of vacuum equipment.
Background
A vacuum apparatus is a device that generates, improves, and/or maintains a vacuum, and includes a vacuum application apparatus and a vacuum obtaining apparatus.
Because the gas entering the vacuum equipment has corrosive and large-particle impurities, the vacuum equipment is damaged, and therefore, a filter device is required to be arranged, when the existing filter device is used, after the existing filter device is blocked, the equipment is required to be shut down, the whole gas transmission process is suspended, the filter device is repaired, and the working progress is seriously delayed.
Therefore, it is necessary to provide a vacuum apparatus filtration control device and method to solve the above problems.
Disclosure of Invention
The present invention provides a device and a method for controlling filtration of a vacuum apparatus to solve the problems set forth in the background art.
In order to achieve the above purpose, the present invention provides the following technical solutions:
The utility model provides a vacuum equipment filters controlling means, includes pipeline and vacuum equipment, the inside fixed mounting of pipeline has the erection column, threaded opening has been seted up to one side symmetry of erection column, be equipped with the filter component who is used for filtering gas in the threaded opening, the inside fixed mounting of pipeline has the baffle, the through-hole has been seted up in the outside of baffle, one side fixed mounting that the baffle is close to the erection column has the flexible pipe that corresponds with the through-hole position, the one end fixed mounting that the baffle was kept away from to flexible pipe has the ring canal, the inside of ring canal is equipped with the subassembly that is used for inhaling gas, the one end fixed mounting that the ring canal is close to the erection column has the sealing washer, the sealing washer is contradicted with the erection column, be equipped with on the pipeline and be used for controlling the ring pipe and take sealing washer and erection column separation and carry out the control assembly who removes, filter component passes through the connecting pipe and is connected with vacuum equipment.
Further, the control assembly comprises a rectangular block which is symmetrically and fixedly arranged on the outer side of the circular pipe, a support is arranged on an outer sliding sleeve of the rectangular block, a sliding rod is fixedly arranged in the support, the rectangular block is sleeved outside the sliding rod in a sliding mode, a first spring is sleeved between the rectangular block and the baffle plate outside the sliding rod, a round rod is fixedly arranged on the outer side of the rectangular block, a driving frame used for driving the round rod to move towards a direction far away from the mounting column is symmetrically arranged on one side, close to the mounting column, of the baffle plate, a vertical groove is symmetrically arranged on one side, close to the mounting column, a screw rod is rotatably arranged in the vertical groove, a motor is fixedly arranged on the top wall of the vertical groove, an output shaft of the motor is fixedly connected with one end of the screw rod, one end of the support is sleeved outside the screw rod in a threaded mode, a pressure sensor is fixedly arranged on the top wall of the pipeline, a controller is fixedly arranged on one side of the baffle plate, an alarm is arranged on the outer side of the pipeline, and the controller can control the motor.
Further, the driving frame is specifically configured as a plate-shaped member with inclined planes symmetrically arranged on one side close to the round rod, a horizontal section for connecting the inclined planes is arranged between the two inclined planes, and the driving frame is fixedly connected with the mounting column.
Further, the suction assembly comprises an annular cylinder fixedly installed on the inner side of the annular pipe, suction holes are formed in the annular cylinder at equal intervals on one side, close to the mounting column, of the annular cylinder, a piston is arranged in the annular cylinder, a second spring is symmetrically and fixedly installed on one side, close to the baffle, of the piston, one end, far away from the piston, of the second spring is fixedly connected with the inner wall of the annular cylinder, a first electromagnet is symmetrically and fixedly installed on the inner wall, far away from the mounting column, of the annular cylinder, one side, close to the first electromagnet, of the piston, is made of iron, and the controller can control the first electromagnet.
Further, the round groove corresponding to the suction hole is formed in one side, close to the suction hole, of the piston, the cleaning rod is rotatably mounted in the round groove, one end of the cleaning rod extends out of the suction hole, a torsion spring is sleeved outside the cleaning rod, two ends of the torsion spring are fixedly connected with the inner wall of the round groove and the cleaning rod respectively, and a rotation positioning assembly used for driving the cleaning rod to rotate and positioning the cleaning rod is arranged outside the cleaning rod.
Further, rotate the locating component including setting up the mounting groove with the circular slot intercommunication on the piston, the clearance pole is kept away from the one end middle part fixed mounting of suction orifice and is had the take-up reel, the take-up reel is located the mounting groove, the wire passing hole with the mounting groove intercommunication has been seted up to one side of being close to the suction orifice of piston, the inside in wire passing hole is equipped with the stay cord, the both ends of stay cord respectively with the inner wall and the take-up reel fixed connection of annular cylinder, the stay cord rolling is on the take-up reel, one side fixed mounting that the suction orifice was kept away from to the piston has the casing that corresponds with the take-up reel, the rectangle mouth has all been seted up in the one side middle part that the suction orifice was kept away from to the piston and the outside of take-up reel, the inside slidable mounting of casing has the iron plate, one end fixed mounting that the iron plate is close to the rectangle mouth complex rectangle post, one side inner wall fixed mounting that the iron plate was kept away from to the casing has the second electro-magnet, one side that the iron plate is close to the second electro-magnet is through a plurality of third springs and casing inner wall fixed connection, the second electro-magnet can be controlled by the controller.
Further, the filter component comprises a cold trap arranged in the threaded port, a cylinder is fixedly arranged on one side, far away from the baffle, of the cold trap, the cylinder is in threaded connection with the threaded port, and one end of the cylinder is fixedly connected with the connecting pipe.
The invention also provides a method for performing filtration control by using the vacuum equipment filtration control device, which comprises the following steps:
s1, when the device is used, a pipe for inputting gas is connected with a pipeline, the gas enters the pipeline, then enters the telescopic pipe and the annular pipe through the ports, corrosive and large-particle impurities are filtered by the filtering assembly and then enter the vacuum equipment through the connecting pipe, and the corrosive and large-particle impurities are filtered, so that the vacuum equipment can be protected;
s2, as impurities are more and more filtered, the filter assembly is blocked, so that the air pressure in a pipeline is increased, at the moment, the control assembly drives the ring pipe to be separated from the mounting column and move to move towards the other filter assembly, in the whole process, the gas passing through the ring pipe and the gas in the ring pipe continuously is sucked at the moment, so that the gas cannot leak in the ring pipe and the area outside the ring pipe, the final ring pipe is in contact with the mounting column, the ring pipe is opposite to the other filter assembly, at the moment, the suction assembly works reversely, and the sucked gas is discharged after being filtered, and the gas is discharged;
S3, in the whole process, as the sealing ring is not contacted with the mounting column when moving, the sealing ring cannot deform due to friction between the sealing ring and the mounting column, after the sealing ring is reset, the sealing ring can keep the original form and the outer side of the mounting column to be in conflict, so that the sealing ring cannot leak when gas flows, and in the process of switching the filter assembly, after the sealing ring is separated from the mounting column, the gas is continuously inhaled by the inhalation assembly, so that the gas cannot leak outside, and in the process of taking out and maintaining the fault filter assembly, the gas cannot leak to the outside and be inhaled by a human body, and the whole process is enabled to be free from suspending the gas by switching the filter assembly, so that the uninterrupted in the whole process is ensured, and the working efficiency is ensured.
The invention has the technical effects and advantages that:
1. The invention can process the gas introduced into the vacuum equipment through the filter assembly, so that the vacuum equipment can be protected, and when the filter assembly is blocked, the filter assembly can be switched to another filter assembly, so that the gas is not required to be introduced into the whole process, the uninterrupted operation in the whole process is ensured, and the working efficiency is ensured;
2. The invention can ensure that the sealing ring is not contacted with the mounting column when the sealing ring is moved in the process of switching the filtering component, so that the sealing ring can not deform due to friction between the sealing ring and the mounting column, the sealing ring can still keep the original form to be in contact with the outer side of the mounting column after the sealing ring is reset, thus the sealing ring can not leak when gas flows later, and in the process of switching the filtering component, the sealing ring is separated from the mounting column, the gas is continuously inhaled by the inhalation component, so that the gas can not leak outside, and the condition that the gas leaks to the outside and is inhaled by a human body can not occur when the fault filtering component is taken out and maintained later;
3. the invention can clean the suction hole for sucking gas after switching and self-clean the cleaning rod for cleaning the suction hole, thereby ensuring the smoothness of the suction hole and further ensuring the suction and collection effects of the gas.
Drawings
FIG. 1 is a schematic diagram showing the structure of a vacuum equipment filter control device and a vacuum equipment assembly according to an embodiment of the present invention;
FIG. 2 is a schematic diagram showing a cross-sectional structure of a vacuum apparatus filtration control apparatus according to an embodiment of the present invention;
FIG. 3 shows an enlarged schematic view of the structure of FIG. 2A in accordance with an embodiment of the present invention;
FIG. 4 shows an enlarged schematic view of the structure of FIG. 3 at B in accordance with an embodiment of the present invention;
FIG. 5 is a schematic view showing a part of the structure of the embodiment of the present invention;
FIG. 6 is a schematic view showing the structure of a baffle and grommet combination according to an embodiment of the present invention;
FIG. 7 is a schematic cross-sectional view of a baffle and grommet combination according to an embodiment of the present invention;
FIG. 8 shows a second schematic structural view of a part of the structure of an embodiment of the present invention;
In the figure: 1. a pipe; 2. a mounting column; 3. a through port; 4. a baffle; 5. a telescopic tube; 6. a grommet; 7. a seal ring; 8. rectangular blocks; 9. a bracket; 10. a slide bar; 11. a first spring; 12. a round bar; 13. a drive rack; 14. a screw rod; 15. a motor; 16. an annular cylinder; 17. a suction hole; 18. a piston; 19. a second spring; 20. a first electromagnet; 21. cleaning a rod; 22. a torsion spring; 23. a take-up reel; 24. a pull rope; 25. a housing; 26. a rectangular opening; 27. an iron plate; 28. a third spring; 29. a second electromagnet; 30. rectangular columns; 31. a pressure sensor; 32. a controller; 33. an alarm; 34. a connecting pipe; 35. a cold trap; 36. a cylinder; 37. and (5) vacuum equipment.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the embodiments.
The invention provides a vacuum equipment filtering control device, as shown in fig. 1 to 8, the vacuum equipment filtering control device comprises a pipeline 1 and vacuum equipment 37, a mounting column 2 is fixedly arranged in the pipeline 1, threaded openings are symmetrically formed in one side of the mounting column 2, a filtering component for filtering gas is arranged in the threaded openings, a baffle 4 is fixedly arranged in the pipeline 1, a through opening 3 is formed in the outer side of the baffle 4, a telescopic pipe 5 corresponding to the position of the through opening 3 is fixedly arranged on one side of the baffle 4, one end, far away from the baffle 4, of the telescopic pipe 5 is fixedly provided with a ring pipe 6, a suction component for sucking gas is arranged in the ring pipe 6, a sealing ring 7 is fixedly arranged at one end, close to the mounting column 2, of the ring pipe 6, the sealing ring 7 is abutted against the mounting column 2, a control component for controlling the ring pipe 6 to be separated from the mounting column 2 and move is arranged on the pipeline 1, and the filtering component is connected with the vacuum equipment 37 through a connecting pipe 34.
When in use, the pipe for inputting gas is connected with the pipeline 1, the gas enters the pipeline 1, then enters the telescopic pipe 5 and the annular pipe 6 through the port 3, corrosive and large-particle impurities are filtered by the filtering component and then enter the vacuum equipment 37 through the connecting pipe 34, the vacuum equipment 37 can be protected through the filtration of the corrosive and large-particle impurities, the filtering component is blocked as the impurities are more and more, the air pressure in the pipeline 1 is increased, the control component drives the annular pipe 6 to separate from the mounting column 2 with the sealing ring 7 and move, so that the gas moves towards the other filtering component, the gas in the annular pipe 6 and the gas in the sealing ring 7 are sucked continuously at the moment in the whole process, so that the gas cannot leak in the areas outside the annular pipe 6 and the sealing ring 7, finally, the sealing ring 7 is in contact with the mounting column 2, the ring pipe 6 is opposite to the other filtering component, at the moment, the suction component works reversely, the sucked gas is discharged, so that the gas is discharged after filtering, in the whole process, the sealing ring 7 is not contacted with the mounting column 2 when moving, so that the sealing ring 7 cannot deform due to friction between the sealing ring 7 and the mounting column 2, after the sealing ring 7 is reset, the sealing ring 7 still keeps the original form in contact with the outer side of the mounting column 2, so that the gas cannot leak when flowing, in the process of switching the filtering component, after the sealing ring 7 is separated from the mounting column 2, the gas is continuously sucked by the suction component, so that the gas cannot leak outside, and in the process of taking out and maintaining the failed filtering component, the gas cannot leak to the outside and be sucked by a human body, and through the switching to filtering component for the whole in-process need not to pause the income of gaseous, guarantees the uninterrupted in-process, guarantees work efficiency.
As shown in fig. 2 and 6, the control assembly comprises a rectangular block 8 symmetrically and fixedly installed at the outer side of a collar 6, a support 9 is sleeved outside the rectangular block 8 in a sliding manner, a sliding rod 10 is fixedly installed inside the support 9, the rectangular block 8 is sleeved outside the sliding rod 10 in a sliding manner, a first spring 11 is sleeved outside the sliding rod 10 and between the rectangular block 8 and a baffle 4, a round rod 12 is fixedly installed at the outer side of the rectangular block 8, a driving frame 13 for driving the round rod 12 to move in a direction far away from the mounting column 2 is symmetrically arranged at one side of the mounting column 2, a vertical groove is symmetrically formed at one side of the baffle 4 close to the mounting column 2, a screw rod 14 is rotatably installed in the vertical groove, a motor 15 is fixedly installed at the top wall of the vertical groove, an output shaft of the motor 15 is fixedly connected with one end of the screw rod 14, one end of the support 9 is sleeved outside the screw rod 14 in a threaded manner, a pressure sensor 31 is fixedly installed at the top wall of the pipe 1, a controller 32 is fixedly installed at one side of the baffle 4, an alarm 33 is arranged at the outer side of the pipe 1, the controller 32 can control the motor 15, and the controller 32 is a PLC controller.
The pressure sensor 31 detects that the air pressure in the pipeline 1 is increased, the controller 32 is matched to enable the control alarm 33 to alarm, the operator is reminded to repair the filter assembly in the future, meanwhile, the controller 32 controls the motor 15 to start, the screw rod 14 is driven to rotate forwards, the driving support 9 is driven to descend with the rectangular block 8 and the round rod 12, the driving support 13 is matched to drive the round rod 12 to move in the direction away from the mounting column 2, meanwhile, the first spring 11 is compressed to enable the first spring 11 to deform to generate acting force, the rectangular block 8 is driven to move along with the annular pipe 6, the sealing ring 7 can move away from the mounting column 2, then when the sealing ring 7 and the annular pipe 6 are about to be aligned with another filter assembly, the first spring 11 continuously releases the acting force to reset the rectangular block 8, the annular pipe 6 and the sealing ring 7, the final sealing ring 7 is enabled to abut against the surface of the mounting column 2, the controller 32 controls the output shaft of the motor 15 to rotate reversely, combination of the annular pipe 6 and the repaired filter assembly can be achieved through forward and reverse rotation of the output shaft of the motor 15, and switching between the annular pipe 7 and the two filter assemblies can be achieved.
As shown in fig. 5, the driving frame 13 is specifically configured as a plate-shaped member with inclined surfaces symmetrically arranged on one side near the round bar 12, a horizontal section for connecting the two inclined surfaces is arranged between the two inclined surfaces, and the driving frame 13 is fixedly connected with the mounting post 2.
The round bar 12 is pressed when moving along the inclined plane so as to move in a direction away from the mounting column 2, then the round bar 12 is contacted with the horizontal section and does not move in a direction away from the mounting column 2, then the round bar 12 is contacted with the other inclined plane, and at the moment, the rectangular block 8 can move along the round bar 12 and the circular pipe 6 in a direction approaching the mounting column 2 under the action of the first spring 11.
As shown in fig. 3,4 and 7, the suction assembly comprises an annular cylinder 16 fixedly mounted on the inner side of the collar 6, suction holes 17 are formed in the side, close to the mounting column 2, of the annular cylinder 16 in an equidistant and encircling manner, pistons 18 are arranged in the annular cylinder 16, second springs 19 are symmetrically and fixedly mounted on one side, close to the baffle 4, of the pistons 18, one ends, far from the pistons 18, of the second springs 19 are fixedly connected with the inner wall of the annular cylinder 16, first electromagnets 20 are symmetrically and fixedly mounted on the inner wall, far from the mounting column 2, of the annular cylinder 16, one side, close to the first electromagnets 20, of the pistons 18 is made of iron, and the controller 32 can control the first electromagnets 20.
The controller 32 controls the first electromagnet 20 to be electrified to have magnetism, so that the attraction piston 18 moves in a direction away from the attraction hole 17, meanwhile, the second spring 19 is compressed to deform to generate acting force, so that external gas is inhaled into the annular cylinder 16 through the attraction hole 17, the speed of inhaled gas of the piston 18 is higher than the flow speed of gas introduced into the annular tube 6, therefore, the gas continuously introduced into the annular tube 6 can be inhaled, the gas originally existing in the sealing ring 7 can be inhaled, the untreated gas cannot leak outside, when the sealing ring 7 is in contact with the mounting column 2 again, the controller 32 controls the first electromagnet 20 to be powered off, at the moment, the acting force is released by the second spring 19 to reset the piston 18, the gas collected in the annular cylinder 16 is discharged outwards through the attraction hole 17, and the gas is discharged into the filter assembly for filtering.
As shown in fig. 4 and 6, a circular groove corresponding to the suction hole 17 is formed in one side of the piston 18, which is close to the suction hole 17, a cleaning rod 21 is rotatably mounted in the circular groove, the cleaning rod 21 is matched with the suction hole 17 in shape, the cleaning rod 21 is attached to the inner wall of the suction hole 17, one end of the cleaning rod 21 extends out of the suction hole 17, a torsion spring 22 is sleeved outside the cleaning rod 21, two ends of the torsion spring 22 are fixedly connected with the inner wall of the circular groove and the cleaning rod 21 respectively, and a rotation positioning assembly for driving the cleaning rod 21 to rotate and positioning the cleaning rod is arranged outside the cleaning rod 21.
The piston 18 moves to the direction of keeping away from the suction hole 17, the rotation positioning component drives the cleaning rod 21 to rotate at this moment, the torsion spring 22 makes the torsion deformation of the cleaning rod 21 generate acting force, after the piston 18 stops moving, the rotation positioning component positions the cleaning rod 21 so that the cleaning rod 21 cannot rotate, when the piston 18 moves to the direction close to the suction hole 17, impurities attached to the inner wall of the suction hole 17 can be ejected when the cleaning rod 21 passes through the suction hole 17, the rotation positioning component cancels the positioning of the cleaning rod 21, the torsion spring 22 releases the acting force to drive the cleaning rod 21 to rotate rapidly, impurities attached to the cleaning rod 21 during cleaning of the suction hole 17 are thrown out, cleaning of the cleaning rod 21 is achieved, cleaning of the suction hole 17 and cleaning of the cleaning rod 21 are completed, the suction hole 17 cannot be accumulated and blocked by the impurities, air suction efficiency is guaranteed, and when the piston 18 resets, a part of the cleaning rod 21 extends out of the suction hole 17.
As shown in fig. 4, the rotary positioning assembly comprises a mounting groove which is arranged on the piston 18 and is communicated with the circular groove, a take-up reel 23 is fixedly arranged in the middle of one end of the cleaning rod 21, which is far away from the suction hole 17, the take-up reel 23 is positioned in the mounting groove, a wire passing hole which is communicated with the mounting groove is formed in one side of the piston 18, which is close to the suction hole 17, a pull rope 24 is arranged in the wire passing hole, two ends of the pull rope 24 are respectively fixedly connected with the inner wall of the annular cylinder 16 and the take-up reel 23, the pull rope 24 is wound on the take-up reel 23, a shell 25 which corresponds to the take-up reel 23 is fixedly arranged on one side of the piston 18, which is far away from the suction hole 17, a rectangular opening 26 is formed in the middle of one side of the piston 18, and the outer side of the take-up reel 23, an iron plate 27 is slidably arranged in the shell 25, a rectangular column 30 which is matched with the rectangular opening 26 is fixedly arranged at one side of the iron plate 27, a second electromagnet 29 is fixedly arranged on one side of the shell 25, which is far away from the iron plate 27, and the inner wall of the second electromagnet 29 is fixedly connected with the shell 25 through a plurality of third springs 28, and the second electromagnet 29 can be controlled by a controller 32.
When the piston 18 moves to the direction away from the suction hole 17 until the piston cannot move, the controller 32 de-energizes the energized second electromagnet 29 to lose magnetism, the compressed third spring 28 releases the acting force to bring the iron plate 27, the rectangular column 30 moves to the direction close to the rectangular hole 26, the rectangular column 30 is inserted into the rectangular hole 26 of the take-up reel 23, the take-up reel 23 is clamped, the cleaning rod 21 cannot rotate at the moment, when the piston 18 is about to reset, the cleaning rod 21 passes through the suction hole 17 to push out and clean impurities on the inner wall of the cleaning rod 21, then the controller 32 energizes the second electromagnet 29 to have magnetism, the iron plate 27 is attracted to leave the rectangular hole 26 with the rectangular column 30, the iron plate 27 compresses the third spring 28 to deform to generate the acting force, finally the second electromagnet 29 is adsorbed and fixed with the iron plate 27, the torsion spring 22 releases the acting force to quickly rotate the cleaning rod 21, the take-up reel 23 rotates along with the acting force, the loose pull rope 24 is quickly wound, the cleaning rod 21 quickly rotates to push out and throws out the impurities attached to the cleaning rod 21 when the suction hole 17 is about to reset, and the cleaning rod 21 is thrown out.
As shown in fig. 2, the filtering component comprises a cold trap 35 arranged in a threaded port, liquid nitrogen is filled in the cold trap 35, a cylinder 36 is fixedly arranged on one side of the cold trap 35 away from the baffle 4, the cylinder 36 is in threaded connection in the threaded port, and one end of the cylinder 36 is fixedly connected with the connecting pipe 34.
The cold trap 35 can filter corrosive and large-particle impurities in the pipeline, when the cold trap 35 needs to be maintained, the connecting pipe 34 can be separated from the vacuum equipment 37, the connecting pipe 34 is reversely rotated to enable the connecting pipe 34 to rotate with the cylinder 36, so that the cold trap 35 is separated from the mounting column 2, the cold trap 35 needing to be maintained is taken out, and conversely, the cold trap 35 can be mounted back into the mounting column 2 by rotating the connecting pipe 34 positively and rotating the connecting pipe 34 with the cylinder 36.
The invention also provides a method for filtering control by using the vacuum equipment filtering control device, which comprises the following steps:
S1, when the device is used, a pipe for inputting gas is connected with a pipeline 1, the gas enters the pipeline 1, then enters a telescopic pipe 5 and a circular pipe 6 through a port 3, corrosive and large-particle impurities are filtered by a filtering component and then enter a vacuum device 37 through a connecting pipe 34, and the vacuum device 37 can be protected through the filtration of the corrosive and large-particle impurities;
S2, as impurities are more and more filtered, the filter assembly is blocked, the air pressure in the pipeline 1 is increased, at the moment, the control assembly drives the ring pipe 6 to be separated from the mounting column 2 with the sealing ring 7 and move, so that the gas continuously passes through the ring pipe 6 and the gas in the sealing ring 7 is sucked in the whole process, the gas is not leaked in the ring pipe 6 and the area outside the sealing ring 7, the sealing ring 7 is finally in contact with the mounting column 2, the ring pipe 6 is opposite to the position of the other filter assembly, at the moment, the suction assembly works reversely, the sucked gas is discharged, and the gas is discharged after being filtered;
S3, in the whole process, as the sealing ring 7 is not contacted with the mounting column 2 when moving, the sealing ring 7 cannot deform due to friction between the sealing ring 7 and the mounting column 2, after the sealing ring 7 is reset, the sealing ring 7 can keep the original form and the outer side of the mounting column 2 to be in conflict, so that the gas cannot leak when flowing, and in the process of switching the filter assembly, after the sealing ring 7 is separated from the mounting column 2, the gas is continuously inhaled by the inhalation assembly, so that the gas cannot leak outside, the gas cannot leak to the outside when the fault filter assembly is taken out and maintained, and the gas is not required to be suspended in the whole process through switching the filter assembly, so that the uninterrupted gas in the whole process is ensured, and the working efficiency is ensured.
Working principle: when in use, the pipe for inputting gas is connected with the pipeline 1, the gas enters the pipeline 1, then enters the telescopic pipe 5 and the annular pipe 6 through the port 3, corrosive and large-particle impurities are filtered by the filter assembly and then enter the vacuum equipment 37 through the connecting pipe 34, the vacuum equipment 37 can be protected through the filtration of the corrosive and large-particle impurities, the filter assembly is blocked as the impurities are more and more filtered, the air pressure in the pipeline 1 is increased, the air pressure in the pipeline 1 is detected to be increased by the pressure sensor 31, the controller 32 is matched at the moment to control the alarm 33 to alarm, and the staff is reminded to maintain the filter assembly before, Simultaneously, the controller 32 controls the motor 15 to start, so that the screw rod 14 is driven to rotate positively, the driving bracket 9 is driven to descend with the rectangular block 8 and the round rod 12, the round rod 12 is extruded to move away from the mounting column 2 when moving along an inclined plane, the rectangular block 8 is driven to move away from the mounting column 2, meanwhile, the first spring 11 is compressed to deform to generate acting force, the rectangular block 8 is driven to move with the ring pipe 6, so that the sealing ring 7 can move away from the mounting column 2, then the round rod 12 is contacted with the horizontal section, the round rod 12 does not move continuously in a direction away from the mounting column 2, then the round rod 12 is contacted with the other inclined plane, at the moment, under the action of the first spring 11, The rectangular block 8 can move along the round rod 12 and the circular pipe 6 towards the direction close to the mounting column 2, the controller 32 controls the first electromagnet 20 to be electrified to have magnetism when the first motor 15 is started, so that the suction piston 18 moves towards the direction far away from the suction hole 17, and simultaneously the second spring 19 is compressed to deform to generate a force, so that the outside air is sucked into the annular cylinder 16 through the suction hole 17, the speed of the sucked air of the piston 18 is greater than the air flow speed led into the circular pipe 6, thus the continuously-introduced air in the circular pipe 6 can be sucked, and the air originally existing in the sealing ring 7 can be sucked, So that these untreated gases will not leak outside, and eventually the sealing ring 7 will collide with the mounting post 2, the collar 6 will be opposite to the other filter assembly, when the sealing ring 7 again collides with the mounting post 2, the controller 32 will control the first electromagnet 20 to be powered off, and the second spring 19 will release the force to return the piston 18, so that the gas collected in the annular cylinder 16 will be discharged outwards, and the gas will be discharged into the filter assembly through the suction hole 17 for filtration, and during the whole process, since the sealing ring 7 will not contact with the mounting post 2 when moving, the sealing ring 7 will not deform due to friction with the mounting post 2, the sealing ring 7 can still keep the original form and collide with the outer side of the mounting column 2, so that the gas cannot leak in the subsequent process of flowing, and in the process of switching the filter assembly, after the sealing ring 7 is separated from the mounting column 2, the annular cylinder 16 continuously sucks the gas, so that the gas cannot leak outside, and in the subsequent process of taking out and maintaining the failed filter assembly, the gas cannot leak to the outside and be sucked by a human body, and in the process of switching the filter assembly, the gas is not required to be introduced in a pause, the uninterrupted in the whole process is ensured, and the working efficiency is ensured; When the piston 18 moves away from the suction hole 17, the pull rope 24 pulls the take-up reel 23 to rotate with the cleaning rod 21, so that the torsion spring 22 deforms to generate acting force, when the piston 18 moves away from the suction hole 17 to be unable to move, the controller 32 de-energizes the second electromagnet 29 to lose magnetism, the compressed third spring 28 releases acting force to move along with the iron plate 27 and the rectangular column 30 towards the direction close to the rectangular opening 26, so that the rectangular column 30 is inserted into the rectangular opening 26 of the take-up reel 23, so that the take-up reel 23 is clamped, the cleaning rod 21 cannot rotate at the moment, when the piston 18 is about to reset, At this time, the cleaning rod 21 passes through the suction hole 17 to push out and clean impurities on the inner wall of the cleaning rod, then the controller 32 electrifies the second electromagnet 29 to enable the second electromagnet to have magnetism, at this time, the attraction iron plate 27 brings the rectangular column 30 to leave the rectangular opening 26, meanwhile, the iron plate 27 compresses the third spring 28 to deform to generate acting force, finally, the second electromagnet 29 is fixedly adsorbed with the iron plate 27, at this time, the torsion spring 22 releases the acting force to bring the cleaning rod 21 to rotate rapidly, so that the take-up reel 23 rotates accordingly, the loose pull rope 24 is wound rapidly, the cleaning rod 21 rotates rapidly to throw out impurities attached to the cleaning rod 21 when cleaning the suction hole 17, the cleaning of the cleaning rod 21 is achieved, so that the cleaning of the suction hole 17 and the cleaning of the cleaning rod 21 are completed, the suction hole 17 is not blocked by accumulation of impurities, and the gas suction efficiency is guaranteed.
The above embodiments are only for illustrating the technical solution of the present invention, and are not limiting.

Claims (7)

1.一种真空设备过滤控制装置,包括管道(1)及真空设备(37),其特征在于:所述管道(1)的内部固定安装有安装柱(2),所述安装柱(2)的一侧对称开设有螺纹口,所述螺纹口内设有用于过滤气体的过滤组件,所述管道(1)的内部固定安装有挡板(4),所述挡板(4)的外侧开设有通口(3),所述挡板(4)靠近安装柱(2)的一侧固定安装有与通口(3)位置对应的伸缩管(5),所述伸缩管(5)远离挡板(4)的一端固定安装有环管(6),所述环管(6)的内部设有用于吸入气体的吸入组件,所述环管(6)靠近安装柱(2)的一端固定安装有密封圈(7),所述密封圈(7)与安装柱(2)抵触,所述管道(1)上设有用于控制环管(6)带着密封圈(7)与安装柱(2)分离并进行移动的控制组件,所述过滤组件通过连接管(34)与真空设备(37)连接;1. A vacuum equipment filtration control device, comprising a pipeline (1) and a vacuum equipment (37), characterized in that: a mounting column (2) is fixedly installed inside the pipeline (1), a threaded opening is symmetrically opened on one side of the mounting column (2), a filter assembly for filtering gas is arranged in the threaded opening, a baffle (4) is fixedly installed inside the pipeline (1), a through opening (3) is opened on the outer side of the baffle (4), and a telescopic tube (3) corresponding to the position of the through opening (3) is fixedly installed on the side of the baffle (4) close to the mounting column (2). 5), a ring tube (6) is fixedly mounted on one end of the telescopic tube (5) away from the baffle (4), a suction assembly for sucking gas is arranged inside the ring tube (6), a sealing ring (7) is fixedly mounted on one end of the ring tube (6) close to the mounting column (2), the sealing ring (7) is in contact with the mounting column (2), a control assembly for controlling the ring tube (6) to separate and move with the sealing ring (7) from the mounting column (2), and the filter assembly is connected to the vacuum device (37) via a connecting pipe (34); 所述控制组件包括对称固定安装在环管(6)外侧的矩形块(8),所述矩形块(8)的外部滑动套设有支架(9),所述支架(9)的内部固定安装有滑杆(10),所述矩形块(8)滑动套设在滑杆(10)的外部,所述滑杆(10)的外部且位于矩形块(8)与挡板(4)之间套设有第一弹簧(11),所述矩形块(8)的外侧固定安装有圆杆(12),所述安装柱(2)靠近挡板(4)的一侧对称设有用于驱动圆杆(12)向远离安装柱(2)的方向移动的驱动架(13),所述挡板(4)靠近安装柱(2)的一侧对称开设有竖槽,所述竖槽内转动安装有丝杆(14),所述竖槽的顶壁固定安装有电机(15),所述电机(15)的输出轴与丝杆(14)的一端固定连接,所述支架(9)的一端螺纹套设在丝杆(14)的外部,所述管道(1)的顶壁固定安装有压力传感器(31),所述挡板(4)的一侧固定安装有控制器(32),所述管道(1)的外侧设有报警器(33),所述控制器(32)能对电机(15)进行控制。The control assembly comprises a rectangular block (8) symmetrically fixedly mounted on the outside of the ring tube (6); a bracket (9) is slidably sleeved on the outside of the rectangular block (8); a slide rod (10) is fixedly mounted inside the bracket (9); the rectangular block (8) is slidably sleeved on the outside of the slide rod (10); a first spring (11) is sleeved on the outside of the slide rod (10) and located between the rectangular block (8) and the baffle (4); a round rod (12) is fixedly mounted on the outside of the rectangular block (8); and a driving spring (12) is symmetrically mounted on one side of the mounting column (2) close to the baffle (4) for driving the round rod (12) to move in a direction away from the mounting column (2). The baffle (4) is symmetrically provided with vertical grooves on one side close to the mounting column (2), a screw rod (14) is rotatably installed in the vertical groove, a motor (15) is fixedly installed on the top wall of the vertical groove, an output shaft of the motor (15) is fixedly connected to one end of the screw rod (14), one end of the bracket (9) is threadedly sleeved on the outside of the screw rod (14), a pressure sensor (31) is fixedly installed on the top wall of the pipeline (1), a controller (32) is fixedly installed on one side of the baffle (4), an alarm (33) is provided on the outside of the pipeline (1), and the controller (32) can control the motor (15). 2.根据权利要求1所述的真空设备过滤控制装置,其特征在于:所述驱动架(13)具体设置为靠近圆杆(12)的一侧对称设有斜面的板状构件,两个所述斜面之间设置有将它们连接的水平段,所述驱动架(13)与安装柱(2)固定连接。2. The vacuum equipment filtering control device according to claim 1 is characterized in that: the driving frame (13) is specifically configured as a plate-like component with inclined surfaces symmetrically provided on one side close to the round rod (12), and a horizontal section connecting the two inclined surfaces is provided between them, and the driving frame (13) is fixedly connected to the mounting column (2). 3.根据权利要求2所述的真空设备过滤控制装置,其特征在于:所述吸入组件包括固定安装在环管(6)内侧的环形缸(16),所述环形缸(16)靠近安装柱(2)的一侧等距环绕开设有吸入孔(17),所述环形缸(16)的内部设有活塞(18),所述活塞(18)靠近挡板(4)的一侧对称固定安装有第二弹簧(19),所述第二弹簧(19)远离活塞(18)的一端与环形缸(16)的内壁固定连接,所述环形缸(16)远离安装柱(2)的一侧内壁对称固定安装有第一电磁铁(20),所述活塞(18)靠近第一电磁铁(20)的一侧的材质为铁,所述控制器(32)能对第一电磁铁(20)进行控制。3. The vacuum equipment filtering control device according to claim 2, characterized in that: the suction component comprises an annular cylinder (16) fixedly mounted on the inner side of the annular tube (6), the annular cylinder (16) is provided with suction holes (17) equidistantly around the side of the annular cylinder (16) close to the mounting column (2), a piston (18) is provided inside the annular cylinder (16), a second spring (19) is symmetrically fixedly mounted on the side of the piston (18) close to the baffle (4), the end of the second spring (19) away from the piston (18) is fixedly connected to the inner wall of the annular cylinder (16), a first electromagnet (20) is symmetrically fixedly mounted on the inner wall of the annular cylinder (16) away from the mounting column (2), the material of the side of the piston (18) close to the first electromagnet (20) is iron, and the controller (32) can control the first electromagnet (20). 4.根据权利要求3所述的真空设备过滤控制装置,其特征在于:所述活塞(18)靠近吸入孔(17)的一侧开设有与吸入孔(17)对应的圆槽,所述圆槽内转动安装有清理杆(21),所述清理杆(21)的一端延伸至吸入孔(17)外,所述清理杆(21)的外部套设有扭簧(22),所述扭簧(22)的两端分别与圆槽内壁及清理杆(21)固定连接,所述清理杆(21)的外部设有用于驱动其转动并对其进行定位的转动定位组件。4. The vacuum equipment filtering control device according to claim 3 is characterized in that: a circular groove corresponding to the suction hole (17) is opened on one side of the piston (18) close to the suction hole (17), a cleaning rod (21) is rotatably installed in the circular groove, one end of the cleaning rod (21) extends to the outside of the suction hole (17), a torsion spring (22) is sleeved on the outside of the cleaning rod (21), two ends of the torsion spring (22) are respectively fixedly connected to the inner wall of the circular groove and the cleaning rod (21), and a rotation positioning component for driving the cleaning rod (21) to rotate and position it is provided on the outside of the cleaning rod (21). 5.根据权利要求4所述的真空设备过滤控制装置,其特征在于:所述转动定位组件包括设置在活塞(18)上与圆槽连通的安装槽,所述清理杆(21)远离吸入孔(17)的一端中部固定安装有收线盘(23),所述收线盘(23)位于安装槽内,所述活塞(18)的靠近吸入孔(17)的一侧开设有与安装槽连通的过线孔,所述过线孔的内部设有拉绳(24),所述拉绳(24)的两端分别与环形缸(16)的内壁及收线盘(23)固定连接,所述拉绳(24)收卷在收线盘(23)上,所述活塞(18)远离吸入孔(17)的一侧固定安装有与收线盘(23)对应的壳体(25),所述活塞(18)远离吸入孔(17)的一侧中部及收线盘(23)的外侧均开设有矩形口(26),所述壳体(25)的内部滑动安装有铁板(27),所述铁板(27)靠近矩形口(26)的一端固定安装有与矩形口(26)配合的矩形柱(30),所述壳体(25)远离铁板(27)的一侧内壁固定安装有第二电磁铁(29),所述铁板(27)靠近第二电磁铁(29)的一侧通过多个第三弹簧(28)与壳体(25)内壁固定连接,所述第二电磁铁(29)能被控制器(32)控制。5. The vacuum equipment filtration control device according to claim 4, characterized in that: the rotation positioning assembly includes a mounting groove arranged on the piston (18) and connected to the circular groove, a take-up drum (23) is fixedly installed in the middle of the end of the cleaning rod (21) away from the suction hole (17), and the take-up drum (23) is located in the mounting groove, and a wire hole connected to the mounting groove is opened on the side of the piston (18) close to the suction hole (17), and a pull rope (24) is arranged inside the wire hole, and the two ends of the pull rope (24) are respectively fixedly connected to the inner wall of the annular cylinder (16) and the take-up drum (23), and the pull rope (24) is wound on the take-up drum (23), and the side of the piston (18) away from the suction hole (17) is fixedly connected to the take-up drum (23). A shell (25) corresponding to the take-up reel (23) is fixedly installed, a rectangular opening (26) is opened in the middle of the side of the piston (18) away from the suction hole (17) and the outer side of the take-up reel (23), an iron plate (27) is slidably installed inside the shell (25), a rectangular column (30) matching with the rectangular opening (26) is fixedly installed on one end of the iron plate (27) close to the rectangular opening (26), a second electromagnet (29) is fixedly installed on the inner wall of the side of the shell (25) away from the iron plate (27), the side of the iron plate (27) close to the second electromagnet (29) is fixedly connected to the inner wall of the shell (25) through a plurality of third springs (28), and the second electromagnet (29) can be controlled by a controller (32). 6.根据权利要求5所述的真空设备过滤控制装置,其特征在于:所述过滤组件包括设置在螺纹口内的冷阱(35),所述冷阱(35)远离挡板(4)的一侧固定安装有筒体(36),所述筒体(36)螺纹连接在螺纹口内,所述筒体(36)的一端与连接管(34)固定连接。6. The vacuum equipment filtration control device according to claim 5, characterized in that: the filtration assembly comprises a cold trap (35) arranged in a threaded opening, a barrel (36) is fixedly installed on the side of the cold trap (35) away from the baffle (4), the barrel (36) is threadedly connected in the threaded opening, and one end of the barrel (36) is fixedly connected to the connecting pipe (34). 7.一种使用如权利要求6所述的真空设备过滤控制装置进行过滤控制的方法,其特征在于,包括如下步骤:7. A method for filtering control using the vacuum equipment filtering control device according to claim 6, characterized in that it comprises the following steps: S1、使用时,将用于输入气体的管子与管道(1)连接,气体进入到管道(1)内,随后通过通口(3)进入到伸缩管(5)、环管(6)内,经过过滤组件过滤掉腐蚀性、大颗粒的杂质后通过连接管(34)进入到真空设备(37)内,通过对腐蚀性、大颗粒的杂质的过滤,使得能保护真空设备(37);S1. When in use, the pipe for inputting gas is connected to the pipeline (1), the gas enters the pipeline (1), then enters the telescopic tube (5) and the ring tube (6) through the opening (3), passes through the filter assembly to filter out corrosive and large-particle impurities, and then enters the vacuum device (37) through the connecting tube (34). By filtering out corrosive and large-particle impurities, the vacuum device (37) can be protected; S2、随着过滤的进行杂质越来越多,使得堵塞过滤组件,造成管道(1)内的气压增大,此时控制组件驱动环管(6)带着密封圈(7)与安装柱(2)分离并进行移动,使得向另一个过滤组件处运动,整个过程中,吸入组件工作将此时继续通过环管(6)的气体以及处在密封圈(7)内部的气体进行吸入,使得这些气体不会泄漏在环管(6)及密封圈(7)以外的区域,最终密封圈(7)与安装柱(2)抵触,环管(6)与另一个过滤组件位置相对,此时吸入组件反向工作,将吸入的气体排出,使得气体经过过滤后排出;S2. As the filtration proceeds, more and more impurities are present, clogging the filter assembly, causing the air pressure in the pipe (1) to increase. At this time, the control assembly drives the annular tube (6) to separate the sealing ring (7) from the mounting column (2) and move it toward another filter assembly. During the entire process, the suction assembly works to suck in the gas that continues to pass through the annular tube (6) and the gas inside the sealing ring (7), so that these gases will not leak into the area outside the annular tube (6) and the sealing ring (7). Finally, the sealing ring (7) contacts the mounting column (2), and the annular tube (6) is opposite to the other filter assembly. At this time, the suction assembly works in the reverse direction to discharge the inhaled gas, so that the gas is discharged after being filtered. S3、整个过程中,由于密封圈(7)在移动时不与安装柱(2)接触,因此密封圈(7)不会由于与安装柱(2)之间的摩擦而导致其形变,在密封圈(7)复位后,密封圈(7)能保持原形态与安装柱(2)的外侧抵触,因此后续在气体流动时,不会泄漏,且在切换过滤组件的过程中,在密封圈(7)与安装柱(2)分离后,吸入组件不断的吸入气体,使得这些气体不会泄漏在外,因此后续在进行故障的过滤组件的取出维修时,不会出现气体泄漏至外界被人体吸入的情况,且通过对过滤组件的切换,使得整个过程中,无需暂停气体的通入,保证整个过程中的不中断,保证工作效率。S3. During the whole process, since the sealing ring (7) does not contact the mounting column (2) when it moves, the sealing ring (7) will not be deformed due to the friction between the sealing ring (7) and the mounting column (2). After the sealing ring (7) is reset, the sealing ring (7) can maintain its original shape and contact the outer side of the mounting column (2). Therefore, when the gas flows subsequently, there will be no leakage. In addition, during the process of switching the filter assembly, after the sealing ring (7) is separated from the mounting column (2), the suction assembly continuously sucks in the gas, so that the gas will not leak out. Therefore, when the faulty filter assembly is removed for maintenance, there will be no gas leakage to the outside and inhaled by the human body. Moreover, by switching the filter assembly, there is no need to suspend the gas supply during the whole process, thereby ensuring uninterrupted operation of the whole process and ensuring work efficiency.
CN202411307817.3A 2024-09-19 2024-09-19 Vacuum equipment filtering control device and method Active CN118807361B (en)

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