CN118703976B - CVD coating device with gas conveying function - Google Patents
CVD coating device with gas conveying function Download PDFInfo
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- CN118703976B CN118703976B CN202410917022.8A CN202410917022A CN118703976B CN 118703976 B CN118703976 B CN 118703976B CN 202410917022 A CN202410917022 A CN 202410917022A CN 118703976 B CN118703976 B CN 118703976B
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- 239000011248 coating agent Substances 0.000 title claims abstract description 64
- 238000000576 coating method Methods 0.000 title claims abstract description 64
- 239000002184 metal Substances 0.000 claims abstract description 82
- 238000005096 rolling process Methods 0.000 claims abstract description 6
- 230000000670 limiting effect Effects 0.000 claims description 23
- 230000006835 compression Effects 0.000 claims description 14
- 238000007906 compression Methods 0.000 claims description 14
- 230000005540 biological transmission Effects 0.000 claims description 7
- 238000009434 installation Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 abstract description 6
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 25
- 238000007747 plating Methods 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 7
- 239000012495 reaction gas Substances 0.000 description 6
- 239000007888 film coating Substances 0.000 description 5
- 238000009501 film coating Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention belongs to the technical field of CVD (chemical vapor deposition) coating and discloses a CVD coating device with a gas conveying function, which comprises a control box, wherein a coating box is arranged on one side of the control box, a coating cavity is formed in the coating box, a first motor is fixedly arranged at the bottom of the coating cavity, the output end of the first motor is fixedly connected with a rotating shaft, the top of the rotating shaft is fixedly connected with a rotating disc, the top of the rotating disc is rotationally connected with a rotating rod, a second motor is fixedly arranged at the top of the rotating rod, and a mounting disc is connected to the bottom of the second motor and positioned on the outer surface of the rotating rod. The heater through rolling disc drive first backup pad and second backup pad one side rotates, drives the metal part reverse rotation of dead lever both sides through the mounting disc, makes two metal parts of fixed plate bottom all can rotate simultaneously to the independent metal part homoenergetic of being convenient for is heated evenly, is convenient for react with gas contact in coating film intracavity portion, is convenient for improve the effect of coating film.
Description
Technical Field
The invention belongs to the technical field of CVD coating, and particularly relates to a CVD coating device with a gas conveying function.
Background
The CVD film plating technology is a high-tech surface treatment technology, and is based on the chemical vapor deposition principle, and a film which is uniform, compact, high in hardness and good in chemical inertia is formed by enabling the surface of a preheated material to react with gas under high temperature and high pressure to generate a new material and deposit the new material on the surface. The technology is widely applied to manufacturing products with high precision and high reliability such as electronic components, optical devices, mechanical parts and the like so as to enhance the performance and added value of the products. Advantages of CVD coating technology include extremely high deposition rate, uniform coating on surfaces of complex shapes, stable and controllable film quality, precise control of film thickness, and the like.
In the prior art, the metal part is placed in the internal heating of the coating cavity, and gas is conveyed to the inside of the coating cavity for reaction through the CVD coating device, but the single metal part is not rotated enough when the metal part is heated, so that the single metal part is not convenient to heat uniformly, the reaction of the metal part is affected, and the metal part is not convenient to coat.
Disclosure of Invention
Aiming at the problems that in the prior art, a metal part is placed in a coating cavity for heating, gas is conveyed into the coating cavity for reaction through a CVD coating device, but the single metal part is not rotated enough during heating, so that the single metal part can be heated uniformly, the reaction of the metal part is affected, and the coating of the metal part is inconvenient, the invention provides the following technical scheme:
The utility model provides a CVD film plating device with gas delivery function, which comprises a control box, one side of control box is provided with the coating film case, the coating film chamber has been seted up to coating film case inside, coating film chamber bottom fixed mounting has first motor, first motor output fixedly connected with axis of rotation, axis of rotation top fixedly connected with rolling disc, rolling disc top rotation is connected with the dwang, rolling rod top fixed mounting has the second motor, second motor bottom and be located dwang external surface connection have the mounting disc, mounting disc bottom fixed mounting has the dead lever, first ring channel has been seted up at the mounting disc top, dead lever bottom and first ring channel sliding connection, the mounting disc top just is located the dead lever outside fixed mounting and has first backup pad, first backup pad inside is seted up flutedly, recess inside fixed mounting has first electric putter, first electric putter top fixedly connected with second backup pad, first backup pad and second backup pad are close to dead lever one side all are provided with the heater, both ends equal fixed mounting has the fixed plate about the dead lever surface, fixed mounting has the installation piece, the fixed plate bottom is connected with two mount pads, mounting pad inside fixed mounting has the third motor, first motor output piece fixed mounting has, first movable mounting has a gear, the first end is connected with the first movable gear, the first end of gear, the first movable connection has a belt, the first fixed connection, the first side is provided with the first movable gear seat, the first movable mounting is connected with the first gear, the first fixed connection, the right side is provided with the gear.
As the preference of above-mentioned technical scheme, one side of coating film case is provided with the cold air pipe, and cold air pipe one end fixedly connected with cold air case, and coating film case rear side is provided with the vacuum pump, and two mounting grooves have been seted up to control box one side that is close to the coating film case, and two mounting grooves are inside to be provided with first gas tank and second gas tank respectively, and first gas tank is connected with the connecting pipe with second gas tank one side, and connecting pipe one end passes the coating film case and extends to the coating film intracavity portion.
As the preference of above-mentioned technical scheme, second motor bottom just is located mounting disc top fixed mounting and has the mounting panel, and the mounting panel both sides all are with coating film intracavity wall fixed connection, and the quantity of dead lever is four, and its is located the mounting disc bottom and is circular array distribution, and first backup pad is located second backup pad bottom, and first electric putter is located the recess inside and is symmetrical setting with the mounting disc center.
As the preference of above-mentioned technical scheme, the dead lever runs through installation piece and dead plate middle part, and first movable lever and second movable lever are located the dead lever both sides, and first gear, belt and second gear are located inside the installation piece, and two mount pads and metalwork all are located the dead plate bottom both ends, and it all is located the dead lever both sides, and movable groove has all been seted up to dead lever middle part and bottom, and the inside of movable groove is provided with bearing structure.
As the preference of above-mentioned technical scheme, the fixed plate bottom has seted up the second ring channel, and limit groove has all been seted up to second ring channel both sides inner wall, and second ring channel inside sliding connection has first supporting shoe, and first supporting shoe and second electric putter are located two mount pad both sides, and it sets up with two mount pad central symmetry, and the equal fixedly connected with in first supporting shoe top both sides limit piece, limit piece and limit groove sliding connection.
As the preference of above-mentioned technical scheme, supporting shoe is close to two mount pad one side fixed mounting and has second electric putter, and second electric putter one end fixedly connected with inserted bar, slot has all been seted up to two mount pad left and right sides, and the slot runs through two mount pads and metal parts's top both sides, and inserted bar one end and slot grafting.
As the preference of above-mentioned technical scheme, bearing structure includes the fourth motor, fourth motor output fixedly connected with threaded rod, threaded rod surface threaded connection has the movable plate, the equal sliding connection in movable plate both ends has the gag lever post, the equal fixedly connected with circle in movable plate bottom both ends is protruding, circle protruding bottom is provided with the second supporting shoe, second supporting shoe one side fixedly connected with rotor plate, rotor plate bottom fixedly connected with arc dwang, arc dwang both ends all rotate and are connected with the connecting block, connecting block bottom and movable tank bottom inner wall fixedly connected.
As the preference of above-mentioned technical scheme, movable mouth has all been seted up to dead lever middle part and bottom both sides surface, and fourth motor and movable groove top fixed mounting, threaded rod bottom and movable groove inner wall rotate to be connected, and the gag lever post is located the threaded rod both sides, and its upper and lower both ends all with movable groove inner wall fixed connection, the circle protruding is located gag lever post and is close to rotor plate one side, and the rotor plate is located rotor plate and second supporting shoe top.
As the preference of above-mentioned technical scheme, the rotor plate is located movable mouth department, and second supporting shoe is close to gag lever post one side top and is the inclined plane, and rotor plate is close to second supporting shoe one side fixedly connected with compression spring, compression spring one end fixedly connected with fixed block, fixed block bottom and movable tank bottom inner wall fixed mounting, compression spring and fixed block are located second supporting shoe both sides, and it sets up with rotor plate central symmetry.
The beneficial effects of the invention are as follows:
(1) According to the invention, the heater at one side of the first support plate and the heater at one side of the second support plate can be driven to rotate through the rotating disc, the mounting disc drives the metal parts at two sides of the fixing rod to reversely rotate, and simultaneously, the two metal parts at the bottom of the fixing plate can both rotate, so that the uniformity of heating of the metal parts is improved, the reaction with gas in the coating cavity is facilitated, and the coating effect is improved;
(2) According to the invention, the metal part can be fixed in the mounting seat through the second electric push rod and the inserted rod, so that the mounting seat can keep stable when driving the metal part to rotate, coating can be conveniently carried out, the bottom of the metal part can be conveniently supported through the supporting structure after the metal part rotates, the metal part can keep stable after rotating, and the metal part can be conveniently taken out after being stable, so that convenience is improved.
Drawings
FIG. 1 is a schematic view showing the overall structure of an embodiment;
FIG. 2 is a rear side view showing the overall structure of the embodiment;
FIG. 3 is a view showing an internal construction of the mounting groove of the embodiment;
FIG. 4 is a view showing an internal construction of the plating tank of the embodiment;
FIG. 5 is a view showing a structure of a first support plate and a second support plate according to the embodiment;
FIG. 6 is a top view of the rotary disk of the embodiment;
FIG. 7 is a view showing an internal construction of the mounting block and the fixing plate of the embodiment;
FIG. 8 is a bottom view showing a fixing plate of the embodiment;
FIG. 9 shows an enlarged view at A of the embodiment of FIG. 8;
FIG. 10 is a block diagram of an embodiment support structure;
fig. 11 shows a top view of an embodiment support structure.
In the figure, 1, a control box, 2, a coating box, 3, a first motor, 4, a rotating shaft, 5, a rotating disc, 6, a rotating rod, 7, a second motor, 8, a mounting disc, 9, a fixed rod, 10, a first supporting plate, 11, a first electric push rod, 12, a second supporting plate, 13, a heater, 14, a fixed plate, 15, a mounting block, 16, a mounting seat, 17, a third motor, 18, a first movable rod, 19, a first gear, 20, a belt, 21, a second gear, 22, a second movable rod, 23, a metal part, 24, a cold air pipe, 25, a cold air box, 26, a first air tank, 27, a second air tank, 28, a connecting pipe, 29, a supporting structure, 291, a fourth motor, 292, a threaded rod, 293, a moving plate, 294, a round boss, 295, a second supporting block, 296, a rotating plate, 297, an arc-shaped rotating rod, 30, a second annular groove, 31, a first supporting block, 32, a limiting block, a second electric push rod, 34, a plug-in 35, a compression spring and 36 are shown.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the embodiments.
The invention provides a CVD film plating device with gas conveying function, as shown in figures 1-7, comprising a control box 1, wherein one side of the control box 1 is provided with a film plating box 2, a film plating cavity is arranged in the film plating box 2, the bottom of the film plating cavity is fixedly provided with a first motor 3, the output end of the first motor 3 is fixedly connected with a rotating shaft 4, the top of the rotating shaft 4 is fixedly connected with a rotating disc 5, the top of the rotating disc 5 is rotationally connected with a rotating rod 6, the top of the rotating rod 6 is fixedly provided with a second motor 7, the bottom of the second motor 7 is connected with a mounting disc 8 on the outer surface of the rotating rod 6, the bottom of the mounting disc 8 is fixedly provided with a fixing rod 9, the top of the mounting disc 8 is provided with a first annular groove, the bottom of the fixing rod 9 is in sliding connection with the first annular groove, the top of the mounting disc 8 is fixedly provided with a first support plate 10 on the outer side of the fixing rod 9, the inside of the first support plate 10 is provided with a groove, the first electric push rod 11 is fixedly arranged in the groove, the second support plate 12 is fixedly connected to the top of the first electric push rod 11, the heater 13 is arranged on one side, close to the fixed rod 9, of the first support plate 10 and the second support plate 12, the fixed plate 14 is fixedly arranged at the upper end and the lower end of the outer surface of the fixed rod 9, the mounting block 15 is fixedly connected to the top of the fixed plate 14, the two mounting seats 16 are rotationally connected to the bottom of the fixed plate 14, the third motor 17 is fixedly arranged in the mounting block 15, the first movable rod 18 is fixedly connected to the output end of the third motor 17, one end of the first movable rod 18 penetrates through the mounting block 15 and is fixedly connected with the mounting seat 16 on the left side of the fixed plate 14, the first gear 19 is fixedly connected to the outer surface of the first movable rod 18, the belt 20 is in transmission connection with the outer surface of the first gear 19, the belt 20 is far away from the inner wall of the first gear 19, the second gear 21 is in transmission connection with the inner wall of the first gear 19, the middle part of the second gear 21 is fixedly connected with a second movable rod 22, one end of the second movable rod 22 penetrates through the mounting block 15 and the fixing plate 14 to be fixedly connected with the right mounting seat 16, and metal parts 23 are arranged inside the two mounting seats 16.
The metal part 23 is convenient to react and film in the film coating cavity through the film coating box 2, the metal part 23 is placed in the mounting seat 16 and fixed at the bottom of the fixed plate 14 through the mounting seat 16, so that the metal part 23 is fixed on the fixed rod 9, the control box 1 is used for controlling the first motor 3 to drive the rotating shaft 4 and the rotating disc 5 to rotate, the first supporting plate 10 and the second supporting plate 12 at the top of the rotating disc 5 drive the heater 13 to rotate, the metal part 23 on the fixed rod 9 is heated when the heater 13 rotates, the second motor 7 is started to drive the mounting disc 8 and the rotating rod 6 to rotate, the mounting disc 8 and the rotating disc 5 rotate in opposite directions, the mounting disc 8 drives the fixed rod 9 to move along the first annular groove, the metal part 23 on the fixed rod 9 rotates in opposite directions with the first supporting plate 10 and the second supporting plate 12, the heating uniformity of the metal part 23 is improved when the heater 13 is heated by rotating, the third motor 17 is started to drive the first movable rod 18 and the first gear 19 to rotate, the second gear 21 and the second movable rod 22 are driven to rotate by the transmission effect of the belt 20, so that the first movable rod 18 and the second movable rod 22 conveniently drive the two mounting seats 16 to rotate at the two sides of the fixed rod 9, the metal part 23 in the two mounting seats 16 is rotated, the part where the metal part 23 is not heated is rotated to the side opposite to the heater 13, the heating uniformity of the metal part 23 and the heater 13 is further improved, after the metal part 23 is heated, the first electric push rod 11 drives the second support plate 12 and the heater 13 at one side thereof to move into the groove to expose the metal part 23 on the fixed rod 9, thereby being convenient for the control box 1 to control the gas to be conveyed into the coating box 2 for reaction and being convenient for coating treatment.
As shown in fig. 1-3, a cold air pipe 24 is arranged on one side of the film plating box 2, one end of the cold air pipe 24 is fixedly connected with a cold air box 25, a vacuum pump is arranged on the rear side of the film plating box 2, two mounting grooves are formed in one side, close to the film plating box 2, of the control box 1, a first gas tank 26 and a second gas tank 27 are respectively arranged in the two mounting grooves, one side of the first gas tank 26 and one side of the second gas tank 27 are connected with a connecting pipe 28, and one end of the connecting pipe 28 penetrates through the film plating box 2 and extends into a film plating cavity.
The cold air in the cold air box 25 is conveyed to the inside of the coating cavity through the cold air pipe 24, after the reaction coating of the metal part 23 is completed, the metal part 23 is cooled, when the coating is carried out on the metal part 23, the air in the coating cavity is pumped out through the action of the vacuum pump, so that the air pressure in the environment is reduced, the competition reaction between gas molecules and reactive substances is avoided, the gas in the first gas tank 26 and the second gas tank 27 is conveyed to the inside of the coating cavity through the connecting pipe 28, the gas reacts with the heated metal part 23, a film is formed on the outer surface of the metal part 23 after a period of reaction, and the reactive gas is conveyed to the coating cavity to meet the reaction requirement, so that the metal part 23 is coated conveniently.
As shown in fig. 4-6, the bottom of the second motor 7 is fixedly provided with a mounting plate at the top of the mounting plate 8, two sides of the mounting plate are fixedly connected with the inner wall of the film coating cavity, four fixing rods 9 are provided, the fixing rods are distributed in a circular array at the bottom of the mounting plate 8, the first supporting plate 10 is positioned at the bottom of the second supporting plate 12, and the first electric push rod 11 is positioned in the groove and symmetrically arranged at the center of the mounting plate 8.
The second motor 7 is convenient to install through the mounting panel for the second motor 7 drives dwang 6 and mounting disc 8 rotation, make the dwang 5 drive the dead lever 9 of bottom and rotate, because the quantity of dead lever 9 has four, and it is circular array distribution in mounting disc 8 bottom, make the metal part 23 on the dead lever 9 rotate along with mounting disc 8, mounting disc 8 and the opposite direction removal of dwang 5, thereby be convenient for improve the homogeneity that is heated of metal part 23, drive the removal of second backup pad 12 through first electric putter 11, expose the metal part 23 on the dead lever 9, be convenient for with the reaction gas contact, drive the rotation of dead lever 9 through mounting disc 8, improve the homogeneity of metal part 23 and reaction gas contact on the dead lever 9, improve the effect of coating film.
As shown in fig. 6-8, the fixing rod 9 penetrates through the middle parts of the mounting block 15 and the fixing plate 14, the first movable rod 18 and the second movable rod 22 are located at two sides of the fixing rod 9, the first gear 19, the belt 20 and the second gear 21 are located inside the mounting block 15, the two mounting seats 16 and the metal parts 23 are located at two ends of the bottom of the fixing plate 14 and located at two sides of the fixing rod 9, movable grooves are formed in the middle part and the bottom end of the fixing rod 9, and supporting structures 29 are arranged inside the movable grooves.
The third motor 17 is convenient to install through the installation block 15, when the third motor 17 drives the first movable rod 18 to rotate, the second movable rod 22 can be simultaneously driven to rotate under the action of the first gear 19, the belt 20 and the second gear 21, so that the installation seat at the bottom of the fixed plate 14 drives the metal part 23 to rotate, the uniformity and the comprehensiveness of the contact between the heated metal part 23 and the reaction gas are improved, the metal part 23 is supported after rotating through the supporting structure 29 inside the movable groove, the stability of the metal part 23 is kept, and the subsequent cooling and taking out are facilitated.
As shown in fig. 8-9, the bottom of the fixing plate 14 is provided with a second annular groove 30, inner walls at two sides of the second annular groove 30 are provided with limiting grooves, a first supporting block 31 is slidably connected inside the second annular groove 30, the first supporting block 31 and a second electric push rod 33 are located at two sides of the two mounting seats 16 and are symmetrically arranged at centers of the two mounting seats 16, two sides of the top end of the first supporting block 31 are fixedly connected with limiting blocks 32, the limiting blocks 32 are slidably connected with the limiting grooves, one side, close to the two mounting seats 16, of the first supporting block 31 is fixedly provided with a second electric push rod 33, one end of the second electric push rod 33 is fixedly connected with a plug rod 34, slots are formed in the left side and the right side of the two mounting seats 16, the slots penetrate through two mounting seats 16 and two sides of the top ends of the metal part 23, and one end of the plug rod 34 is plugged into the slots.
The second electric push rod 33 is supported and fixed through the first supporting block 31, the second electric push rod 33 drives the inserting rod 34 to move into the slot, so that the inserting rod 34 and the second electric push rod 33 limit the top ends of the mounting seat 16 and the metal part 23, when the mounting seat 16 drives the metal part 23 to rotate, the inserting rod 34 drives the second electric push rod 33 to rotate, the first supporting block 31 moves along the second annular groove 30, meanwhile, the limiting block 32 moves in the limiting groove, the first supporting block 31 is limited, and therefore stability of the metal part 23 in the mounting seat 16 is improved, and rotation is facilitated.
As shown in fig. 7, fig. 10, fig. 11, the bearing structure 29 includes the fourth motor 291, fourth motor 291 output fixedly connected with threaded rod 292, threaded rod 292 surface threaded connection has movable plate 293, the equal sliding connection in movable plate 293 both ends has the gag lever post, the equal fixedly connected with circle boss 294 in movable plate 293 bottom both ends, circle boss 294 bottom is provided with the second supporting shoe 295, second supporting shoe 295 one side fixedly connected with rotor plate 296, rotor plate 296 bottom fixedly connected with arc dwang 297, arc dwang 297 both ends all rotate and are connected with the connecting block, connecting block bottom and movable tank bottom inner wall fixed connection.
Through the limiting effect of actuating fourth motor 291 drive threaded rod 292 rotation, through the gag lever post for movable plate 293 moves down along the gag lever post on threaded rod 292, movable plate 293 drives protruding 294 downwardly moving, protruding 294 extrudes second supporting shoe 295, make the rotor plate 296 that second supporting shoe 295 connects rotate to dead lever 9 outside, rotor plate 296 drives arc rotor lever 297 and rotates, when protruding 294 moved to second supporting shoe 295 bottom, rotor plate 296 rotated the horizontal direction, second supporting shoe 295 moved the bottom of metal part 23 this moment, support metal part 23, the stability of being convenient for improves.
As shown in fig. 7, 10 and 11, the outer surfaces of the middle part and the two sides of the bottom end of the fixed rod 9 are provided with movable openings, the fourth motor 291 is fixedly mounted on the top of the movable groove, the bottom of the threaded rod 292 is rotationally connected with the inner wall of the movable groove, the limiting rod is positioned on two sides of the threaded rod 292, the upper end and the lower end of the limiting rod are fixedly connected with the inner wall of the movable groove, the round protrusion 294 is positioned on one side of the limiting rod close to the rotating plate 296, the moving plate 293 is positioned on the top of the rotating plate 296 and the second supporting block 295, the rotating plate 296 is positioned at the movable opening, the top of one side of the second supporting block 295 close to the limiting rod is an inclined surface, the rotating plate 296 is fixedly connected with the compression spring 35 on one side of the second supporting block 295, one end of the compression spring 35 is fixedly connected with the fixed block 36, the bottom of the fixed block 36 is fixedly mounted on the inner wall of the bottom of the movable groove, the compression spring 35 and the fixed block 36 are positioned on two sides of the second supporting block 295, and the center of the rotating plate 296 is symmetrically arranged.
The movable plate 293 is driven to rotate through the rotation of the threaded rod 292, the movable plate 293 is convenient to drive the round boss 294 to move downwards through the limitation of the limiting rod, as the top end of one side of the second supporting block 295, which is close to the limiting rod, is an inclined surface, the round boss 294 is pressed to rotate the rotating plate 296 when moving along the inclined surface, the compression spring 35 compresses, the rotating plate 296 is convenient to rotate to the two sides of the fixed rod 9 to the bottom of the metal part 23 through the movable opening, the second supporting block 295 supports, the inserting rod 34 is enabled to move out of the inserting groove through the starting of the second electric push rod 33, the moving bottom end of the metal part 23 is positioned at the top of the second supporting block 295, the metal part 23 is supported, the metal part 23 is prevented from falling, the threaded rod 292 is driven to rotate through the fourth motor 291, the movable plate 293 moves upwards along the limiting rod 292, the round boss 294 is driven to move upwards, the rotating plate 296 is not pressed, and the rotating plate 296 is rotated to the original position under the action of the compression spring 36.
Working principle: when in use, one end of the metal part 23 is placed in the mounting seat 16, the second electric push rod 33 is started to drive the inserting rod 34 to move into the slot, the metal part 23 is fixed on the mounting seat 16, firstly, the air in the film coating cavity is pumped out under the action of the vacuum pump, then the first motor 3 is started to drive the rotating shaft 4 and the rotating disc 5 to rotate, the first supporting plate 10 and the second supporting plate 12 at the top of the rotating disc 5 drive the heater 13 to rotate, the metal part 23 on the fixing rod 9 is heated when the heater 13 rotates, meanwhile, the second motor 7 is started to drive the mounting disc 8 and the rotating rod 6 to rotate, the mounting disc 8 and the rotating disc 5 rotate in opposite directions, the mounting disc 8 drives the fixing rod 9 to move along the first annular groove, the metal part 23 on the fixing rod 9 rotates in opposite directions with the first supporting plate 10 and the second supporting plate 12, the heating uniformity of the metal part 23 is improved when the heater 13 is rotated and heated, the third motor 17 is started to drive the first movable rod 18 and the first gear 19 to rotate, the second gear 21 and the second movable rod 22 are driven to rotate through the transmission effect of the belt 20, the first movable rod 18 and the second movable rod 22 drive the two mounting seats 16 to rotate at the two sides of the fixed rod 9 at the same time, the metal part 23 in the two mounting seats 16 is rotated, the place where the metal part 23 is not heated is rotated to the side opposite to the heater 13, the uniformity of the metal part 23 is further improved, after the metal part 23 is heated, the first electric push rod 11 drives the second support plate 12 and the heater 13 at one side of the second support plate to move into the groove to expose the metal part 23 on the fixed rod 9, the reaction gas is conveyed to the inside of the film coating cavity through the connecting pipe 28 by the first gas tank 26 and the second gas tank 27, the fixed rod 9 on the mounting plate 8 moves along the first annular groove through the rotation of the second motor 7, the mounting plate 8 and the rotating rod 6, so that the heated metal part 23 is driven to rotate, the second gear 21 and the second movable rod 22 are driven to rotate through the transmission effect of the belt 20 through the rotation of the third motor 17, the first movable rod 18 and the first gear 19, the metal part 23 inside the mounting seat 16 rotates on two sides of the fixed rod 9 and is in full contact reaction with the reaction gas, and a film is formed on the outer surface of the metal part 23 through a period of reaction.
After the metal part 23 is fully contacted with the reaction gas, the rotation of the metal part 23 is stopped, the threaded rod 292 and the moving plate 293 are driven to rotate by the fourth motor 291, the moving plate 293 moves downwards along the limiting rod on the threaded rod 292 under the limiting effect of the limiting rod, the moving plate 293 drives the round boss 294 to move downwards, the round boss 294 moves along the inclined plane at the top end of the second supporting block 295 to squeeze the rotating plate 296, the rotating plate 296 drives the arc-shaped rotating rod 297 to rotate, the rotating plate 296 connected with the second supporting block 295 rotates outwards to the fixed rod 9, the compression spring 35 connected with the rotating plate is stretched, when the round boss 294 moves to the bottom end of the second supporting block 295, the rotating plate 296 rotates to the horizontal direction, at the moment, the second supporting block 295 moves to the bottom of the metal part 23, cold air is conveyed into the coating cavity through the cold air box 25, and the metal part 23 is cooled.
The above embodiments are only for illustrating the technical solution of the present invention, and are not limiting.
Claims (9)
1. The utility model provides a CVD coating device with gas delivery function, includes control box (1), its characterized in that, one side of control box (1) is provided with coating film case (2), coating film chamber has been seted up to coating film case (2) inside, coating film chamber bottom fixed mounting has first motor (3), first motor (3) output fixedly connected with axis of rotation (4), axis of rotation (4) top fixedly connected with rolling disc (5), rolling disc (5) top rotation is connected with dwang (6), dwang (6) top fixed mounting has second motor (7), second motor (7) bottom just is located dwang (6) surface connection has mounting disc (8), mounting disc (8) bottom fixed mounting has dead lever (9), first motor (3) are seted up at mounting disc (8) top, dead lever (9) bottom and first ring groove sliding connection, just be located dead lever (9) outside fixed mounting have first backup pad (10), first backup pad (10) inside recess, electric supporting plate (11) inside is seted up, first annular groove (11) inside is connected with first push rod (11), the utility model discloses a metal part fixing device, including fixed plate (9), fixed plate (14), first backup pad (10), second backup pad (12), fixed plate (9) are close to dead lever (9) one side and all are provided with heater (13), both ends all fixed plate (14) about fixed plate (9) surface, fixed plate (14) top fixedly connected with installation piece (15), fixed plate (14) bottom rotates and is connected with two mount pads (16), inside fixed mounting of installation piece (15) has third motor (17), first movable rod (18) of third motor (17) output fixedly connected with, mount pad (16) of first movable rod (18) one end pass mount pad (15), fixed plate (14) and left, first movable rod (18) surface fixedly connected with first gear (19), first gear (19) surface transmission is connected with belt (20), first gear (19) inner wall transmission is kept away from to belt (20) is connected with second gear (21), second gear (21) middle part fixedly connected with second movable rod (22), second movable rod (22) one end passes through mount pad (16) and right side fixed part (16), and fixed part fixing device is installed to right side (16).
2. The CVD coating apparatus with gas delivery function according to claim 1, wherein a cold air pipe (24) is provided at one side of the coating box (2), one end of the cold air pipe (24) is fixedly connected with a cold air box (25), a vacuum pump is provided at the rear side of the coating box (2), two mounting grooves are provided at one side of the control box (1) close to the coating box (2), a first gas tank (26) and a second gas tank (27) are provided in the two mounting grooves respectively, a connecting pipe (28) is connected at one side of the first gas tank (26) and one side of the second gas tank (27), and one end of the connecting pipe (28) extends to the inside of the coating cavity through the coating box (2).
3. The CVD coating apparatus with gas delivery function according to claim 1, wherein the second motor (7) bottom and be located mounting panel (8) top fixed mounting, mounting panel both sides all with coating film intracavity wall fixed connection, the quantity of dead lever (9) is four, and it is distributed in circular array in mounting panel (8) bottom, first backup pad (10) are located second backup pad (12) bottom, first electric putter (11) are located the recess inside with mounting panel (8) center symmetry setting.
4. The CVD coating apparatus with gas delivery function according to claim 1, wherein the fixing rod (9) penetrates through the middle parts of the mounting block (15) and the fixing plate (14), the first movable rod (18) and the second movable rod (22) are located at two sides of the fixing rod (9), the first gear (19), the belt (20) and the second gear (21) are located inside the mounting block (15), the two mounting seats (16) and the metal parts (23) are located at two ends of the bottom of the fixing plate (14), and are located at two sides of the fixing rod (9), the middle parts and the bottom ends of the fixing rod (9) are provided with movable grooves, and the inside of the movable grooves is provided with a supporting structure (29).
5. The CVD coating apparatus with gas delivery function according to claim 1, wherein the bottom of the fixing plate (14) is provided with a second annular groove (30), two side inner walls of the second annular groove (30) are provided with limiting grooves, a first supporting block (31) is slidably connected inside the second annular groove (30), the first supporting block (31) and a second electric push rod (33) are located at two sides of the mounting seat (16), the two mounting seats (16) are arranged in a central symmetry manner, two sides of the top end of the first supporting block (31) are fixedly connected with limiting blocks (32), and the limiting blocks (32) are slidably connected with the limiting grooves.
6. The CVD coating apparatus with gas delivery function according to claim 5, wherein the first supporting block (31) is fixedly installed with a second electric push rod (33) near two sides of the mounting base (16), one end of the second electric push rod (33) is fixedly connected with a plug rod (34), slots are formed in both left and right sides of the two mounting bases (16), the slots penetrate through two sides of the top ends of the two mounting bases (16) and the metal part (23), and one end of the plug rod (34) is plugged into the slots.
7. The CVD coating apparatus with gas delivery function according to claim 4, wherein the support structure (29) comprises a fourth motor (291), a threaded rod (292) is fixedly connected to an output end of the fourth motor (291), a moving plate (293) is screwed to an outer surface of the threaded rod (292), limit rods are slidably connected to two ends of the moving plate (293), round protrusions (294) are fixedly connected to two ends of the bottom of the moving plate (293), a second support block (295) is arranged at the bottom of the round protrusions (294), a rotating plate (296) is fixedly connected to one side of the second support block (295), an arc-shaped rotating rod (297) is fixedly connected to the bottom of the rotating plate (296), connecting blocks are rotatably connected to two ends of the arc-shaped rotating rod (297), and the bottom of each connecting block is fixedly connected to an inner wall of the bottom of the movable groove.
8. The CVD coating apparatus with gas delivery function according to claim 7, wherein the movable opening is provided on the outer surface of the middle portion and the two sides of the bottom end of the fixed rod (9), the fourth motor (291) is fixedly mounted on the top of the movable groove, the bottom of the threaded rod (292) is rotatably connected with the inner wall of the movable groove, the limit rod is located on the two sides of the threaded rod (292), the upper and lower ends of the limit rod are fixedly connected with the inner wall of the movable groove, the circular protrusion (294) is located on one side of the limit rod close to the rotating plate (296), and the moving plate (293) is located on the top of the rotating plate (296) and the second supporting block (295).
9. The CVD coating apparatus with gas delivery function according to claim 7, wherein the rotation plate (296) is located at the movable opening, the top of the side of the second support block (295) close to the limit lever is an inclined plane, the side of the rotation plate (296) close to the second support block (295) is fixedly connected with a compression spring (35), one end of the compression spring (35) is fixedly connected with a fixing block (36), the bottom of the fixing block (36) is fixedly mounted on the inner wall of the bottom of the movable groove, the compression spring (35) and the fixing block (36) are located at both sides of the second support block (295), and the compression spring and the fixing block are arranged in a central symmetry manner with the rotation plate (296).
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN210534361U (en) * | 2019-08-16 | 2020-05-15 | 丹阳市玖田光电科技有限公司 | Coating device is used in optical lens piece production |
| CN211170847U (en) * | 2019-11-08 | 2020-08-04 | 深圳市瑞泓塑胶五金镀膜技术有限公司 | Novel vacuum coating equipment |
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| CN111763922A (en) * | 2020-07-30 | 2020-10-13 | 宿迁市金田塑业有限公司 | Vacuum coating machine capable of realizing continuous coating function |
| WO2023108313A1 (en) * | 2021-12-13 | 2023-06-22 | 湘潭宏大真空技术股份有限公司 | Vacuum coating apparatus for improving film coating uniformity of workpiece |
| CN217026055U (en) * | 2022-03-01 | 2022-07-22 | 山东申华光学科技有限公司 | Vacuum coating processing device for optical crystal processing |
| CN217881453U (en) * | 2022-04-08 | 2022-11-22 | 徐州联超光电科技有限公司 | Wafer surface coating equipment |
| CN220034639U (en) * | 2023-06-09 | 2023-11-17 | 烟台世晶电子科技有限公司 | Novel magnetron sputtering coating machine for crystal production |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN210534361U (en) * | 2019-08-16 | 2020-05-15 | 丹阳市玖田光电科技有限公司 | Coating device is used in optical lens piece production |
| CN211170847U (en) * | 2019-11-08 | 2020-08-04 | 深圳市瑞泓塑胶五金镀膜技术有限公司 | Novel vacuum coating equipment |
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