CN118658810A - A dual-cavity lifting wafer transfer device - Google Patents
A dual-cavity lifting wafer transfer device Download PDFInfo
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- CN118658810A CN118658810A CN202411115323.5A CN202411115323A CN118658810A CN 118658810 A CN118658810 A CN 118658810A CN 202411115323 A CN202411115323 A CN 202411115323A CN 118658810 A CN118658810 A CN 118658810A
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- lifting
- lifting frame
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- movable portion
- cavity
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- H10P72/0461—
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- H10P72/0608—
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- H10P72/3302—
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- H10P72/7612—
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a double-cavity lifting wafer transfer device, and relates to the technical field of semiconductors. The double-cavity lifting wafer transfer device comprises a double-cavity chamber, a mounting seat, a lifting frame, a driving motor, a transmission mechanism, a displacement difference detection element and two jacking pieces. The double-cavity chamber interval is provided with two transfer cavities, and the mount pad is connected with the double-cavity chamber, and driving motor installs on the mount pad, and is connected with the crane through drive mechanism, and two jacking pieces are installed in the both ends of crane relatively, and every jacking piece stretches into a transfer cavity setting, and displacement difference detecting element installs on the crane. The double-cavity lifting type wafer transfer device provided by the invention can realize synchronous lifting of two wafers in the double cavities, so that synchronous feeding and discharging of the two wafers can be conveniently carried out in time, continuity of a transfer process is ensured, transfer efficiency is improved, and productivity is improved.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a double-cavity lifting wafer transfer device.
Background
At present, in the process of depositing a wafer by using semiconductor equipment, a lifting mechanism in a manipulator and a transfer device generally jointly acts to realize the loading and unloading functions of the wafer. If the transfer device is double-cavity (can transfer two wafers simultaneously), the number of the lifting mechanisms is two, and the two lifting mechanisms are independently controlled and are respectively used for driving the two wafers to ascend or descend. However, the synchronism of the two lifting mechanisms is poor, the lifting actions of the two lifting mechanisms are easy to delay, so that the manipulator cannot timely synchronously feed the two wafers to the transfer device, and cannot timely synchronously feed the two wafers (because the two lifting mechanisms lift in place one by one, the manipulator can only synchronously feed the two wafers after waiting for the two lifting mechanisms to be in place), the continuity of the transfer process is directly affected, the transfer efficiency is reduced, and the productivity is reduced.
In view of the above, it is important to design and manufacture a dual-chamber lifting type wafer transfer device capable of synchronously lifting and lowering and having high transfer efficiency, especially in semiconductor production.
Disclosure of Invention
The invention aims to provide a double-cavity lifting type wafer transfer device which can realize synchronous lifting of two wafers in a double cavity so as to facilitate synchronous loading and unloading of the two wafers in time, ensure continuity of a transfer process, improve transfer efficiency and improve productivity.
The invention is realized by adopting the following technical scheme.
The utility model provides a two-chamber over-and-under type wafer transfer device, including two-chamber, the mount pad, the crane, driving motor, drive mechanism, displacement difference detecting element and two jacking pieces, two-chamber interval is provided with two transfer cavities, the mount pad is connected with two-chamber, driving motor installs on the mount pad, and be connected with the crane through drive mechanism, two jacking pieces install in the both ends of crane relatively, every jacking piece stretches into a transfer cavity setting, every jacking piece is used for bearing a wafer, driving motor is used for driving two jacking pieces through the crane is ascending or descending in step, displacement difference detecting element installs on the crane, displacement difference detecting element is used for detecting the displacement difference of crane both ends on the lift direction, and displacement difference is greater than or equal to the difference of predetermineeing the control driving motor and pauses.
Optionally, the transmission mechanism comprises a coupler, a screw rod, a nut and a jacket, wherein the driving motor is connected with the screw rod through the coupler, the screw rod passes through the nut to be arranged and is in threaded fit with the nut, and the jacket is arranged on the lifting frame and is sleeved outside the nut.
Optionally, press from both sides cover including sleeve portion, connecting portion, first movable portion and second movable portion set up in the both ends of connecting portion relatively, and all be connected with connecting portion, first movable portion and second movable portion interval set up, and connect through adjusting screw, sleeve portion connects on connecting portion, and simultaneously with first movable portion and second movable portion interval set up, first movable portion and crane pass through first holding screw connection, sleeve portion cover is located outside the partly nut, connecting portion, first movable portion and second movable portion enclose jointly and locate outside the another part nut, adjusting screw is used for adjusting the interval of first movable portion and second movable portion, with the nut clamp or loosen.
Optionally, the nut is made of an elastic material, and the nut can be elastically deformed under the action of the adjusting screw, so that the matching precision of the nut and the screw rod is ensured.
Optionally, the lifting frame is provided with a yielding hole, the sleeve part passes through the yielding hole to be arranged, and the connecting part, the first movable part and the second movable part are all attached to the lifting frame.
Optionally, the transmission mechanism further comprises a positioning block, the positioning block is arranged on one side, far away from the sleeve portion, of the first movable portion, and is connected with the first movable portion through a second set screw, a flanging is arranged at one end, far away from the connecting portion, of the sleeve portion, and the nut is clamped between the flanging and the positioning block.
Optionally, the positioning block is arc-shaped, and the positioning block is arranged outside the screw rod in a surrounding manner, coaxial with the screw rod and arranged at intervals.
Optionally, the mounting seat is provided with a sliding rail, the lifting frame is provided with a sliding block, the extending direction of the sliding rail is the same as the lifting direction of the lifting frame, and the sliding block is in sliding fit with the sliding rail.
Optionally, the crane includes cooperation piece, two linking arms and two stiffening ribs, and two linking arms set up in the both sides of cooperation piece relatively, and all are connected with the cooperation piece, and the cooperation piece is connected with drive mechanism, and every stiffening rib is connected with cooperation piece and a linking arm simultaneously, and every jacking piece is installed in the free end of a linking arm.
Optionally, the lifting frame further comprises two corrugated pipes, each corrugated pipe is sleeved outside one lifting piece, one end of each corrugated pipe is connected with the connecting arm, the other end of each corrugated pipe is connected with the double-cavity chamber, and the corrugated pipes are communicated with the transferring cavity.
Optionally, the displacement difference detecting element includes a first sensor, a controller and a second sensor, the first sensor is installed at one end of the lifting frame, the second sensor is installed at the other end of the lifting frame, the first sensor and the second sensor are both electrically connected with the controller, the controller is electrically connected with the driving motor, the first sensor is used for detecting the first displacement of one end of the lifting frame in the lifting direction, the second sensor is used for detecting the second displacement of the other end of the lifting frame in the lifting direction, the controller is used for calculating the displacement difference according to the first displacement and the second displacement, and the driving motor is controlled to be suspended when the displacement difference is greater than or equal to a preset difference value.
Optionally, the first sensor includes scale grating and grating reading head, and the grating reading head is installed in the tip of crane, and is connected with the controller electricity, and scale grating is connected with two chambeies cavity, and extends along the lift direction of crane and set up, and the grating reading head is used for reading on the scale grating.
The double-cavity lifting type wafer transfer device provided by the invention has the following beneficial effects:
According to the double-cavity lifting wafer transfer device provided by the invention, two transfer cavities are arranged at intervals, the mounting seat is connected with the double-cavity cavities, the driving motor is mounted on the mounting seat and is connected with the lifting frame through the transmission mechanism, two lifting pieces are relatively mounted at two ends of the lifting frame, each lifting piece stretches into one transfer cavity to be arranged, each lifting piece is used for bearing one wafer, the driving motor is used for synchronously driving the two lifting pieces to ascend or descend through the lifting frame, the displacement difference detection element is mounted on the lifting frame, and the displacement difference detection element is used for detecting displacement differences of two ends of the lifting frame in the lifting direction and controlling the driving motor to be suspended when the displacement differences are larger than or equal to preset difference values. Compared with the prior art, the double-cavity lifting type wafer transfer device provided by the invention has the advantages that due to the adoption of the two lifting pieces which are relatively arranged at the two ends of the lifting frame and the displacement difference detection element which is arranged on the lifting frame, the synchronous lifting of the two wafers in the double cavities can be realized, so that the synchronous loading and unloading of the two wafers can be conveniently and timely carried out, the continuity of the transfer process is ensured, the transfer efficiency is improved, and the productivity is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a dual-cavity lifting wafer transfer device according to an embodiment of the present invention;
Fig. 2 is a schematic structural diagram of a driving motor connected with a lifting frame through a transmission mechanism in the dual-cavity lifting wafer transfer device according to the embodiment of the invention;
FIG. 3 is a schematic view of the jacket of FIG. 2;
fig. 4 is a cross-sectional view of a driving motor connected with a lifting frame through a transmission mechanism in a dual-cavity lifting wafer transfer device according to an embodiment of the present invention;
FIG. 5 is an enlarged view of a portion of V in FIG. 4;
fig. 6 is a schematic structural diagram of a transmission mechanism connected to a lifting frame in a dual-cavity lifting wafer transfer device according to an embodiment of the present invention.
Icon: 100-a double-cavity lifting wafer transfer device; 110-a dual-chamber; 111-transit cavities; 120-mounting seats; 121-a slide rail; 130-lifting frame; 131-relief holes; 132-a slider; 133-mating blocks; 134-connecting arms; 135-reinforcing ribs; 136-bellows; 140-driving a motor; 150-a transmission mechanism; 151-coupling; 152-screw; 153-nut; 154-jacket; 1541-a sleeve portion; 1542-a connection; 1543-a first movable portion; 1544-a second movable portion; 1545-flanging; 155-adjusting the screw; 156-a first set screw; 157-positioning blocks; 158-a second set screw; 160-a displacement difference detecting element; 161-a first sensor; 1611-a scale grating; 1612-grating read head; 162-a second sensor; 170-lifters.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present invention, it should be noted that, directions or positional relationships indicated by terms such as "inner", "outer", "upper", "lower", "horizontal", etc., are directions or positional relationships based on those shown in the drawings, or those that are conventionally put in use of the inventive product, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific direction, be configured and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "connected," "mounted," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Some embodiments of the present invention are described in detail below with reference to the accompanying drawings. Features of the embodiments described below may be combined with each other without conflict.
Referring to fig. 1 to 6, a dual-chamber lift-type wafer transferring apparatus 100 for transferring a wafer (not shown) is provided in an embodiment of the invention. The double-cavity synchronous lifting device can realize synchronous lifting of two wafers in the double cavities, so that synchronous loading and unloading of the two wafers can be conveniently carried out in time, continuity of a transfer process is guaranteed, transfer efficiency is improved, and productivity is improved.
The dual-chamber lift wafer relay apparatus 100 includes a dual-chamber 110, a mounting base 120, a lift 130, a driving motor 140, a transmission mechanism 150, a displacement difference detecting element 160, and two lifters 170. The dual-chamber 110 is provided with two transfer cavities 111 at intervals, and each transfer cavity 111 is used for accommodating one wafer so as to transfer two wafers at the same time. The mount pad 120 is connected with the dual-chamber 110, and the mount pad 120 is disposed below the dual-chamber 110, and the dual-chamber 110 can fix the position of the mount pad 120. The driving motor 140 is mounted on the mounting seat 120 and connected with the lifting frame 130 through the transmission mechanism 150, and the driving motor 140 can drive the lifting frame 130 to ascend or descend through the transmission mechanism 150. Specifically, two lifting members 170 are relatively installed at two ends of the lifting frame 130, each lifting member 170 extends into one transfer cavity 111 to be arranged, each lifting member 170 is used for bearing one wafer, and the driving motor 140 is used for synchronously driving the two lifting members 170 to ascend or descend through the lifting frame 130 so as to realize synchronous lifting of the two wafers in the double cavities, so that synchronous feeding and discharging of the two wafers are convenient to timely perform, continuity of a transfer process is guaranteed, transfer efficiency is improved, and productivity is improved.
Further, a displacement difference detecting element 160 is mounted on the lifting frame 130, and the displacement difference detecting element 160 is used for detecting the displacement difference between the two ends of the lifting frame 130 in the lifting direction and controlling the driving motor 140 to be suspended when the displacement difference is greater than or equal to a preset difference value. Specifically, when the displacement difference between the two ends of the lifting frame 130 in the lifting direction is greater than or equal to the preset difference, it is indicated that the lifting frame 130 is inclined, the lifting synchronicity between the two ends of the lifting frame 130 is poor, the synchronous loading and unloading of the two wafers are directly affected, at this time, the displacement difference detecting element 160 controls the driving motor 140 to pause and gives an alarm to the staff, so as to prompt the staff to overhaul and maintain the whole dual-cavity lifting wafer transfer device 100, and ensure that the displacement difference between the two ends of the lifting frame 130 in the lifting direction is smaller than the preset difference.
The transmission mechanism 150 includes a coupling 151, a lead screw 152, a nut 153, and a collet 154. The driving motor 140 is connected with the screw 152 through a coupling 151, the driving motor 140 can drive the screw 152 to rotate through the coupling 151, and the coupling 151 is used for guaranteeing transmission stability and transmission efficiency. Specifically, the lead screw 152 passes through the nut 153 and is in threaded fit with the nut 153, the jacket 154 is mounted on the lifting frame 130 and is sleeved outside the nut 153, the jacket 154 is used for fixing the relative positions of the nut 153 and the lifting frame 130, the lead screw 152 can drive the nut 153 to displace along the axial direction of the lead screw 152 in the rotating process, so that the lifting frame 130 is driven to ascend or descend through the jacket 154, and further, two jacking pieces 170 mounted at two ends of the lifting frame 130 are driven to ascend or descend, so that synchronous loading and unloading of two wafers are facilitated in time.
The collet 154 includes a sleeve portion 1541, a connecting portion 1542, a first movable portion 1543, and a second movable portion 1544. The first movable portion 1543 and the second movable portion 1544 are disposed opposite to each other at both ends of the connection portion 1542, and are connected to the connection portion 1542, and the first movable portion 1543 and the second movable portion 1544 are movable relative to the connection portion 1542. The first movable portion 1543 and the second movable portion 1544 are arranged at intervals, and are connected through the adjusting screw 155, the adjusting screw 155 can adjust the distance between the first movable portion 1543 and the second movable portion 1544, and the first movable portion 1543 and the second movable portion 1544 can move relative to the connecting portion 1542 in the process of adjusting the distance. The sleeve portion 1541 is connected to the connection portion 1542 and is disposed at an interval with the first movable portion 1543 and the second movable portion 1544, so as to avoid interference to the movement of the first movable portion 1543 and the second movable portion 1544 during the adjustment of the spacing, and ensure the stability of the adjustment of the spacing.
Further, the first movable portion 1543 and the lifting frame 130 are connected by a first set screw 156, and the first set screw 156 is used for fixing the relative position of the first movable portion 1543 and the lifting frame 130, so as to prevent the first movable portion 1543 from being separated from the lifting frame 130, and thus prevent the jacket 154 from being separated from the lifting frame 130. Specifically, since the position of the first movable portion 1543 is defined, when the adjustment screw 155 adjusts the spacing of the first movable portion 1543 and the second movable portion 1544, the first movable portion 1543 remains stationary, and the second movable portion 1544 moves relative to the connecting portion 1542 and approaches or moves away from the first movable portion 1543.
The sleeve portion 1541 is sleeved outside a part of the nut 153, the sleeve portion 1541 is coaxially disposed with the nut 153, the connecting portion 1542, the first movable portion 1543 and the second movable portion 1544 are jointly surrounded outside another part of the nut 153, and the sleeve portion 1541, the connecting portion 1542, the first movable portion 1543 and the second movable portion 1544 jointly act to limit the nut 153. Specifically, the nut 153 is clamped between the first movable portion 1543 and the second movable portion 1544, and the adjusting screw 155 is used for adjusting the distance between the first movable portion 1543 and the second movable portion 1544, so as to clamp or unclamp the nut 153, thereby facilitating the installation and the disassembly of the nut 153 and improving the maintenance efficiency.
In this embodiment, the sleeve portion 1541, the connecting portion 1542, the first movable portion 1543, and the second movable portion 1544 are integrally formed to improve the connection strength.
Preferably, the nut 153 is made of an elastic material, and the nut 153 can be elastically deformed under the action of the adjusting screw 155 to ensure the matching precision of the nut 153 and the screw 152, thereby precisely controlling the lifting height of the lifting frame 130. Specifically, since the first movable portion 1543 is connected to the lifting frame 130 through the first set screw 156, the gravity of the lifting frame 130 is transferred to the nut 153 through the first movable portion 1543, so that the partial nut 153 (the partial nut 153 sandwiched between the first movable portion 1543 and the second movable portion 1544) corresponding to the position of the first movable portion 1543 is stressed most during the lifting of the lifting frame 130 by the driving motor 140, so that the abrasion of the partial nut 153 during the threaded engagement with the screw 152 is also maximized, and when the partial nut 153 is abraded to a certain extent, the engagement accuracy of the nut 153 with the screw 152 is affected. In contrast, in the present invention, when the portion of the nut 153 is worn to a certain extent, the adjusting screw 155 is used to reduce the distance between the first movable portion 1543 and the second movable portion 1544, so as to clamp and elastically deform the portion of the nut 153, so that the portion of the nut 153 is tightly fitted with the screw 152 again, and the precision of the fitting of the nut 153 with the screw 152 is ensured.
In the present embodiment, the nut 153 is made of metal or alloy material, preferably tin bronze, which has good elasticity and can be elastically deformed adaptively with the first movable portion 1543 and the second movable portion 1544, but not limited thereto, and in other embodiments, the nut 153 may be made of other materials, and the material of the nut 153 is not particularly limited.
In this embodiment, the lifting frame 130 is provided with the yielding hole 131, the sleeve portion 1541 passes through the yielding hole 131, and the connecting portion 1542, the first movable portion 1543 and the second movable portion 1544 are attached to the lifting frame 130, so as to ensure the connection reliability of the jacket 154 and the lifting frame 130. The screw 152 is disposed through the collet 154 from bottom to top and is threadedly engaged with a nut 153 within the collet 154.
Preferably, the transmission mechanism 150 further includes a positioning block 157. The positioning block 157 is disposed on a side of the first movable portion 1543 away from the sleeve portion 1541, and is connected to the first movable portion 1543 by a second set screw 158, where the second set screw 158 is used to fix a relative position between the first movable portion 1543 and the positioning block 157, so as to prevent the positioning block 157 from being separated from the first movable portion 1543. Specifically, a flange 1545 is disposed at one end of the sleeve portion 1541 away from the connecting portion 1542, the nut 153 is clamped between the flange 1545 and the positioning block 157, and the flange 1545 and the positioning block 157 cooperate to limit the nut 153 and prevent the nut 153 from moving up and down relative to the jacket 154, so as to ensure the stability of lifting the lifting frame 130 driven by the jacket 154 under the action of rotation of the screw 152.
Further, the positioning block 157 is arc-shaped, the positioning block 157 is enclosed outside the screw 152 and is coaxial with the screw 152 and arranged at intervals, so that interference to rotation of the screw 152 is avoided, the nut 153 is abutted against the positioning block 157, and the positioning block 157 can support and position the nut 153, so that the nut 153 is prevented from falling out of the jacket 154.
In this embodiment, the positioning block 157 is arranged in a semicircular shape, the projection of the positioning block 157 on the plane on which the first movable portion 1543 is located completely falls in the first movable portion 1543, and since the first movable portion 1543 is connected to the lifting frame 130 by the first fastening screw 156 and the positioning block 157 is connected to the first movable portion 1543 by the second fastening screw 158, the relative position between the positioning block 157 and the lifting frame 130 is fixed, and the positioning effect of the positioning block 157 on the nut 153 is ensured.
It should be noted that, when the nut 153 is severely worn and needs to be replaced, the second set screw 158 is first loosened to detach the positioning block 157; the adjusting screw 155 is unscrewed to release the limiting function of the first movable portion 1543 and the second movable portion 1544, and at this time, the first movable portion 1543 and the second movable portion 1544 no longer clamp the nut 153; then, the old nut 153 in the collet 154 is taken out, and the new nut 153 is put into the collet 154; the adjusting screw 155 is then tightened to clamp the nut 153 by the first movable portion 1543 and the second movable portion 1544; next, the positioning block 157 is mounted, and the second set screw 158 is tightened, thereby completing the replacement of the nut 153.
Preferably, the mounting seat 120 is provided with a sliding rail 121, the lifting frame 130 is provided with a sliding block 132, the extending direction of the sliding rail 121 is the same as the lifting direction of the lifting frame 130, the lifting direction of the lifting frame 130 is the axial direction of the screw 152, the sliding block 132 is in sliding fit with the sliding rail 121, the sliding block 132 can slide corresponding to the sliding rail 121, and the sliding rail 121 can guide and limit the sliding block 132, so that the lifting frame 130 can only ascend or descend along the axial direction of the screw 152, and the lifting frame 130 is prevented from tilting or shifting.
The lifting frame 130 includes a fitting block 133, two connecting arms 134, and two reinforcing ribs 135. The two connecting arms 134 are oppositely arranged at two sides of the matching block 133, and are connected with the matching block 133. The matching block 133 is connected with the jacket 154 of the transmission mechanism 150, and the driving motor 140 can drive the matching block 133 to ascend or descend through the transmission mechanism 150 so as to drive the whole lifting frame 130 to ascend or descend. Specifically, each reinforcing rib 135 is simultaneously connected with the matching block 133 and one connecting arm 134 to improve the structural strength of the whole lifting frame 130, each lifting member 170 is mounted at a free end of one connecting arm 134, and the connecting arm 134 can drive the lifting member 170 to rise or fall so as to drive the wafer on the lifting member 170 to rise or fall.
Preferably, the lifting frame 130 further comprises two bellows 136. Each bellows 136 is sleeved outside one jacking member 170, one end of the bellows 136 is connected with the connecting arm 134, the other end of the bellows 136 is connected with the double-cavity chamber 110, the bellows 136 is communicated with the transfer cavity 111, and the bellows 136 is used for being connected with an air pipe arranged on the connecting arm 134 so as to realize air inlet or air exhaust of the transfer cavity 111 and prevent air in the transfer cavity 111 from leaking. Specifically, during the lifting of the lifting frame 130, since the dual-chamber 110 is kept stationary, the interval between the lifting frame 130 and the dual-chamber 110 is continuously changed, and the height of the lifting member 170 extending into the transfer cavity 111 is also continuously changed, and during this process, the bellows 136 is extended or contracted to ensure air tightness and prevent the leakage of air.
The displacement difference detecting element 160 includes a first sensor 161, a controller (not shown), and a second sensor 162, the first sensor 161 is mounted at one end of the lifting frame 130, the second sensor 162 is mounted at the other end of the lifting frame 130, the first sensor 161 and the second sensor 162 are electrically connected to the controller, and the controller is electrically connected to the driving motor 140. Specifically, the first sensor 161 is configured to detect a first displacement of one end of the lifting frame 130 in the lifting direction, the second sensor 162 is configured to detect a second displacement of the other end of the lifting frame 130 in the lifting direction, the controller is configured to calculate a displacement difference according to the first displacement and the second displacement, determine a displacement difference and a preset difference, and when the displacement difference is greater than or equal to the preset difference, the controller controls the driving motor 140 to pause and prompts a worker to overhaul and maintain the entire dual-cavity lifting wafer transfer device 100, so as to ensure that the displacement difference of two ends of the lifting frame 130 in the lifting direction is smaller than the preset difference.
In this embodiment, the preset difference is 0.5 mm, but not limited thereto, and in other embodiments, the preset difference may be 0.3 mm or 0.8 mm, and the size of the preset difference is not specifically limited.
The first sensor 161 includes a scale grating 1611 and a grating readhead 1612. The grating reading head 1612 is mounted at an end of the lifting frame 130 and is electrically connected with the controller, and the scale grating 1611 is connected with the dual-cavity chamber 110 and extends along the lifting direction of the lifting frame 130. Specifically, the grating reading head 1612 is configured to read a reading on the scale grating 1611, obtain a first displacement according to the reading, and send the first displacement data to the controller.
In this embodiment, the specific structure of the second sensor 162 is the same as that of the first sensor 161, and will not be described here again.
According to the dual-cavity lifting wafer transfer device 100 provided by the embodiment of the invention, two transfer cavities 111 are arranged in the dual-cavity chamber 110 at intervals, the mounting seat 120 is connected with the dual-cavity chamber 110, the driving motor 140 is mounted on the mounting seat 120 and is connected with the lifting frame 130 through the transmission mechanism 150, two lifting pieces 170 are oppositely mounted at two ends of the lifting frame 130, each lifting piece 170 stretches into one transfer cavity 111 and is arranged, each lifting piece 170 is used for bearing one wafer, the driving motor 140 is used for synchronously driving the two lifting pieces 170 to lift or descend through the lifting frame 130, the displacement difference detection element 160 is mounted on the lifting frame 130, and the displacement difference detection element 160 is used for detecting displacement differences of two ends of the lifting frame 130 in the lifting direction and controlling the driving motor 140 to pause when the displacement difference is larger than or equal to a preset difference value. Compared with the prior art, the dual-cavity lifting type wafer transfer device 100 provided by the invention can realize synchronous lifting of two wafers in a dual cavity due to the adoption of the two lifting pieces 170 which are oppositely arranged at the two ends of the lifting frame 130 and the displacement difference detection element 160 which is arranged on the lifting frame 130, so that synchronous loading and unloading of the two wafers can be conveniently and timely carried out, continuity of a transfer process is ensured, transfer efficiency is improved, and productivity is improved.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (12)
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| CN202411115323.5A CN118658810B (en) | 2024-08-14 | 2024-08-14 | Double-cavity lifting wafer transfer device |
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| CN202411115323.5A CN118658810B (en) | 2024-08-14 | 2024-08-14 | Double-cavity lifting wafer transfer device |
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| CN118658810B CN118658810B (en) | 2025-02-18 |
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| CN117488287A (en) * | 2023-11-06 | 2024-02-02 | 研微(江苏)半导体科技有限公司 | Dual-cavity base matching device and base matching method |
| CN118398531A (en) * | 2024-06-26 | 2024-07-26 | 盛吉盛半导体科技(无锡)有限公司 | Double-cavity wafer deposition device and deposition method thereof |
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2024
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| KR20080114151A (en) * | 2007-06-27 | 2008-12-31 | 피에스케이 주식회사 | Lift pin assembly and substrate processing apparatus having the same |
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| CN115841966A (en) * | 2022-11-29 | 2023-03-24 | 浙江求是创芯半导体设备有限公司 | Wafer temporary storage chamber of semiconductor equipment and semiconductor process equipment |
| CN219546583U (en) * | 2023-03-31 | 2023-08-18 | 上海百雅信息科技发展有限公司 | Lifting device |
| CN117488287A (en) * | 2023-11-06 | 2024-02-02 | 研微(江苏)半导体科技有限公司 | Dual-cavity base matching device and base matching method |
| CN118398531A (en) * | 2024-06-26 | 2024-07-26 | 盛吉盛半导体科技(无锡)有限公司 | Double-cavity wafer deposition device and deposition method thereof |
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| CN118658810B (en) | 2025-02-18 |
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