CN118603070A - High-sensitivity nested ring monolithic three-axis MEMS gyro chip - Google Patents
High-sensitivity nested ring monolithic three-axis MEMS gyro chip Download PDFInfo
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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Abstract
The invention relates to a triaxial gyroscope, in particular to a high-sensitivity nested wheel ring monolithic triaxial MEMS gyroscope chip. The invention solves the problems of low sensitivity and low measurement precision of the existing triaxial gyroscope. The high-sensitivity nested wheel ring monolithic triaxial MEMS gyro chip comprises a harmonic oscillator part and an electrode part; the harmonic oscillator part comprises a wheel structure and a ring structure; the wheel structure comprises a disc-shaped mass; two grooves which are symmetrically distributed left and right are formed in the outer side surface of the disc-shaped mass block; the ring structure comprises a circular ring-shaped mass block B; the annular mass block B is coaxially sleeved on the outer side of the annular mass block A; the electrode portion includes a square base; the square base is coaxially arranged with the disc-shaped mass block. The invention is suitable for the high-precision tip fields such as military navigation, deep space exploration and the like.
Description
Technical Field
The invention relates to a triaxial gyroscope, in particular to a high-sensitivity nested wheel ring monolithic triaxial MEMS gyroscope chip.
Background
The three-axis gyroscope is a core sensitive device of an inertial navigation system, can simultaneously measure angular velocity input in the directions of an x axis, a y axis and a z axis, is widely applied to the fields of high precision tips such as military navigation, deep space exploration and the like, and has extremely wide application prospects. Existing triaxial gyroscopes are mainly divided into two categories: one type is a monolithically integrated three-axis gyroscope, which has the following problems: first, the limited geometry of its resonators results in low area usage and thus low sensitivity. Secondly, complete decoupling of each driving and detecting direction cannot be realized, so that coupling errors among modes are large, and the measuring precision is low. The other type is an assembled three-axis gyroscope (which is assembled by three single-axis gyroscopes), and the three-axis gyroscope is limited by an assembly process and has the problem of low measurement precision. Based on the above, it is necessary to invent a high-sensitivity nested wheel ring monolithic triaxial MEMS gyroscope chip to solve the problems of low sensitivity and low measurement accuracy of the existing triaxial gyroscope.
Disclosure of Invention
The invention provides a high-sensitivity nested wheel ring single-chip triaxial MEMS gyroscope chip, which aims to solve the problems of low sensitivity and low measurement precision of the existing triaxial gyroscope.
The invention is realized by adopting the following technical scheme:
The high-sensitivity nested wheel ring monolithic triaxial MEMS gyro chip comprises a harmonic oscillator part and an electrode part;
The harmonic oscillator part comprises a wheel structure and a ring structure;
The wheel structure comprises a disc-shaped mass;
two grooves which are symmetrically distributed left and right are formed in the outer side surface of the disc-shaped mass block; two straight coupling cantilever beams A which are distributed in bilateral symmetry are correspondingly connected to the bottoms of the two open grooves one by one;
the ends of the two straight coupling cantilever beams A are commonly connected with a circular ring-shaped supporting frame;
Eight double-side comb-tooth-shaped coupling suspension beams A symmetrically distributed along the circumferential direction, four straight supporting suspension beams A symmetrically distributed along the circumferential direction and two straight coupling suspension beams B symmetrically distributed front and back are connected to the outer side surface of the annular supporting frame;
The four straight supporting suspension beams A are correspondingly arranged between the first double-side comb-tooth-shaped coupling suspension beam A and the second double-side comb-tooth-shaped coupling suspension beam A, between the third double-side comb-tooth-shaped coupling suspension beam A and the fourth double-side comb-tooth-shaped coupling suspension beam A, between the fifth double-side comb-tooth-shaped coupling suspension beam A and the sixth double-side comb-tooth-shaped coupling suspension beam A, and between the seventh double-side comb-tooth-shaped coupling suspension beam A and the eighth double-side comb-tooth-shaped coupling suspension beam A; four anchor points A symmetrically distributed along the circumferential direction are connected with the end parts of the four straight supporting cantilever beams A in a one-to-one correspondence manner;
The two straight coupling suspension beams B are positioned between the second double-side comb-tooth-shaped coupling suspension beam A and the third double-side comb-tooth-shaped coupling suspension beam A and between the sixth double-side comb-tooth-shaped coupling suspension beam A and the seventh double-side comb-tooth-shaped coupling suspension beam A in a one-to-one correspondence manner; the ends of the two straight coupling cantilever beams B are commonly connected with a circular mass block A;
The inner side surface of the annular mass block A is connected with two suspension mass blocks which are distributed in a bilateral symmetry manner; the two suspension mass blocks are correspondingly positioned between the fourth double-side comb-tooth-shaped coupling suspension beam A and the fifth double-side comb-tooth-shaped coupling suspension beam A and between the eighth double-side comb-tooth-shaped coupling suspension beam A and the first double-side comb-tooth-shaped coupling suspension beam A one by one;
the ring structure comprises a circular ring-shaped mass block B;
The annular mass block B is coaxially sleeved on the outer side of the annular mass block A; eight straight coupling suspension beams C which are symmetrically distributed along the circumferential direction are connected to the inner side surface of the annular mass block B, and the circumferential positions of the eight straight coupling suspension beams C are in one-to-one correspondence with the circumferential positions of the four straight supporting suspension beams A, the circumferential positions of the two straight coupling suspension beams B and the circumferential positions of the two suspension mass blocks;
eight straight coupling cantilever beams C are connected with eight support cantilever beams symmetrically distributed along the circumferential direction in a one-to-one correspondence manner at the end parts of the eight straight coupling cantilever beams C;
Eight straight support suspension beams B which are symmetrically distributed along the circumferential direction are connected with the inner side surfaces of the eight square support suspension beams in a one-to-one correspondence manner;
eight anchor points B symmetrically distributed along the circumferential direction are connected with the end parts of the eight straight supporting cantilever beams B in a one-to-one correspondence manner;
Eight double-side comb-tooth-shaped coupling cantilever beams B which are symmetrically distributed along the circumferential direction are connected to the outer side surface of the circular mass block B, and the circumferential positions of the eight double-side comb-tooth-shaped coupling cantilever beams B are in one-to-one correspondence with the circumferential positions of the eight straight coupling cantilever beams C;
the electrode portion includes a square base;
The square base and the disc-shaped mass block are coaxially arranged; the upper surface of the square base is sputtered with two arc-shaped plane electrodes which are symmetrically distributed front and back, two drum-shaped plane electrodes A which are symmetrically distributed front and back, two drum-shaped plane electrodes B which are symmetrically distributed front and back, eight pairs of strip-shaped plane electrodes A which are symmetrically distributed along the circumferential direction, four dot-shaped plane electrodes A which are symmetrically distributed along the circumferential direction, two T-shaped plane electrodes which are symmetrically distributed left and right, two pairs of arc-shaped plane electrodes A which are symmetrically distributed left and right, two pairs of arc-shaped plane electrodes B which are symmetrically distributed left and right, eight dot-shaped plane electrodes B which are symmetrically distributed along the circumferential direction, eight pairs of arc-shaped plane electrodes C which are symmetrically distributed along the circumferential direction and eight pairs of strip-shaped plane electrodes B which are symmetrically distributed along the circumferential direction;
the upper surfaces of the two arched plane electrodes and the lower surface of the disc-shaped mass block jointly form two parallel capacitors A;
the two drum-shaped plane electrodes A are positioned between the two arc-shaped plane electrodes; the upper surfaces of the two drum-shaped plane electrodes A and the lower surface of the disc-shaped mass block jointly form two parallel capacitors B;
The two drum-shaped plane electrodes B are positioned between the two drum-shaped plane electrodes A; the upper surfaces of the two drum-shaped plane electrodes B and the lower surface of the disc-shaped mass block jointly form two parallel capacitors C;
Eight pairs of unilateral comb-shaped three-dimensional electrodes A symmetrically distributed along the circumferential direction are bonded on the upper surfaces of the eight pairs of strip-shaped plane electrodes A in a one-to-one correspondence manner; eight pairs of unilateral comb-tooth-shaped three-dimensional electrodes A are symmetrically embedded at two sides of the eight bilateral comb-tooth-shaped coupling cantilever beams A in a one-to-one correspondence manner, and the eight pairs of unilateral comb-tooth-shaped three-dimensional electrodes A and the eight bilateral comb-tooth-shaped coupling cantilever beams A form eight pairs of comb-tooth capacitors A in a one-to-one correspondence manner;
The upper surfaces of the four punctiform plane electrodes A are bonded with the lower surfaces of the four anchor points A in a one-to-one correspondence manner;
The upper surfaces of the two T-shaped plane electrodes and the lower surfaces of the annular mass block A together form two parallel capacitors D;
the two pairs of arc-shaped plane electrodes A are symmetrically distributed on two sides of the two T-shaped plane electrodes in a one-to-one correspondence manner; the upper surfaces of the two pairs of arc plane electrodes A and the lower surface of the annular mass block A jointly form two pairs of parallel capacitors E;
the two pairs of arc-shaped plane electrodes B are symmetrically distributed on two sides of the two pairs of arc-shaped plane electrodes A in a one-to-one correspondence manner; the upper surfaces of the two pairs of arc plane electrodes B and the lower surface of the annular mass block A jointly form two pairs of parallel capacitors F;
the upper surfaces of the eight punctiform plane electrodes B are bonded with the lower surfaces of the eight anchor points B in a one-to-one correspondence manner;
Eight pairs of arc three-dimensional electrodes are bonded on the upper surfaces of the eight pairs of arc plane electrodes C in a one-to-one correspondence manner; eight pairs of arc-shaped three-dimensional electrodes are symmetrically distributed on two sides of the eight straight coupling cantilever beams C in a one-to-one correspondence manner, and the outer side surfaces of the eight pairs of arc-shaped three-dimensional electrodes and the inner side surfaces of the annular mass blocks B jointly form eight pairs of parallel capacitors G;
eight pairs of unilateral comb-shaped three-dimensional electrodes B are bonded on the upper surfaces of the eight pairs of strip-shaped plane electrodes B in a one-to-one correspondence manner; eight pairs of unilateral comb-tooth-shaped three-dimensional electrodes B are symmetrically embedded at two sides of the eight bilateral comb-tooth-shaped coupling cantilever beams B in a one-to-one correspondence manner, and the eight pairs of unilateral comb-tooth-shaped three-dimensional electrodes B and the eight bilateral comb-tooth-shaped coupling cantilever beams B form eight pairs of comb-tooth capacitors B in a one-to-one correspondence manner.
In operation, the annular proof mass A serves as an x-axis proof mass. The disc-shaped proof mass serves as the y-axis proof mass. The annular mass B serves as a z-axis proof mass. The first pair of comb tooth capacitors A, the second pair of comb tooth capacitors A, the fifth pair of comb tooth capacitors A and the sixth pair of comb tooth capacitors A are all used as x/y axis driving excitation capacitors. The third pair of comb tooth capacitors A, the fourth pair of comb tooth capacitors A, the seventh pair of comb tooth capacitors A and the eighth pair of comb tooth capacitors A are all used as x/y axis driving response capacitors. Both parallel capacitances D serve as x-axis detection response capacitances. Both pairs of parallel capacitances E are used as x-axis detection excitation capacitances. Both pairs of parallel capacitors F are used as x-axis fm capacitors. Both parallel capacitances a serve as y-axis detection response capacitances. Both parallel capacitances B are used as y-axis detection excitation capacitances. Both parallel capacitances C are used as y-axis tuning capacitances. The first pair of comb tooth capacitors B and the third pair of comb tooth capacitors B are used as z-axis driving excitation capacitors. The fifth pair of comb tooth capacitors B and the seventh pair of comb tooth capacitors B are used as z-axis driving response capacitors. The second pair of comb tooth capacitors B and the fourth pair of comb tooth capacitors B are used as z-axis detection response capacitors. The sixth pair of comb tooth capacitors B and the eighth pair of comb tooth capacitors B are used as z-axis detection excitation capacitors. Eight pairs of parallel capacitors G are used as z-axis frequency modulation capacitors. The two arc-shaped plane electrodes, the two drum-shaped plane electrodes A, the two drum-shaped plane electrodes B, the eight pairs of strip-shaped plane electrodes A, the four dot-shaped plane electrodes A, the two T-shaped plane electrodes, the two pairs of arc-shaped plane electrodes A, the two pairs of arc-shaped plane electrodes B, the eight dot-shaped plane electrodes B, the eight pairs of arc-shaped plane electrodes C and the eight pairs of strip-shaped plane electrodes B are all connected with a control system through metal wires.
The specific working process is as follows: firstly, a control system generates a direct-current bias voltage signal A and two paths of drive voltage signals A with the same amplitude, the same frequency and the opposite phase, and loads the direct-current bias voltage signal A to four point-shaped plane electrodes A, meanwhile, on one hand, loads a first path of drive voltage signal A to four x/y axis drive excitation capacitors (a first comb tooth capacitor A in a first pair of comb tooth capacitors A, a first comb tooth capacitor A in a second pair of comb tooth capacitors A, a first comb tooth capacitor A in a fifth pair of comb tooth capacitors A and a first comb tooth capacitor A in a sixth pair of comb tooth capacitors A) and on the other hand, loads a second path of drive voltage signal A to the other four x/y axis drive excitation capacitors (a second comb tooth capacitor A in the first pair of comb tooth capacitors A), The second comb tooth capacitor A in the second pair of comb tooth capacitors A, the second comb tooth capacitor A in the fifth pair of comb tooth capacitors A and the second comb tooth capacitor A in the sixth pair of comb tooth capacitors A, so that the annular supporting frame, the x-axis detection mass block and the y-axis detection mass block perform in-plane rotation and reciprocation under the action of electrostatic force. In the motion process, the control system measures the displacement of the annular supporting frame in real time through four pairs of x/y axis driving response capacitors, and controls two paths of driving voltage signals A in real time according to the measurement result. Meanwhile, the control system generates a direct-current bias voltage signal B and two paths of driving voltage signals B with the same amplitude, the same frequency and the opposite phases, and loads the direct-current bias voltage signal B to eight punctiform plane electrodes B, and meanwhile, on one hand, the first path of driving voltage signal B is loaded to two z-axis driving excitation capacitors (a first pair of comb tooth capacitors B), and on the other hand, the second path of driving voltage signal B is loaded to the other two z-axis driving excitation capacitors (a third pair of comb tooth capacitors B), so that the z-axis detection mass block performs four-antinode bending vibration under the action of electrostatic force. in the motion process, the control system measures the displacement of the z-axis detection mass block in real time through two pairs of z-axis driving response capacitors, and controls two paths of driving voltage signals B in real time according to the measurement result. When no angular velocity is input, the annular supporting frame, the x-axis detection mass block and the y-axis detection mass block do in-plane rotation reciprocating motion in a driving mode, so that the polar plate distance of the two x-axis detection response capacitors and the polar plate distance of the two y-axis detection response capacitors are kept unchanged, and the capacities of the two x-axis detection response capacitors and the capacities of the two y-axis detection response capacitors are kept unchanged. At the same time, the z-axis detection mass block makes four antinode bending vibration in the plane in a driving mode. At this time, the two pairs of z-axis detection response capacitances are located at the nodes of the four-antinode flexural vibration, whereby the plate pitches of the two pairs of z-axis detection response capacitances are kept unchanged, and the capacities of the two pairs of z-axis detection response capacitances are kept unchanged. At this point, the output of the present invention is zero. When angular velocity is input in the x-axis direction, the x-axis detection mass block moves out of plane around the y-axis under the action of the coriolis force, so that the polar plate distance of the two x-axis detection response capacitors is changed, and the capacity of the two x-axis detection response capacitors is changed. At this time, the control system can calculate the angular velocity input in the x-axis direction by detecting the capacities of the two x-axis detection response capacitors. In the process, the control system performs force feedback control through the two pairs of x-axis detection excitation capacitors, so that closed-loop detection of the x-axis is realized, and on the other hand, performs frequency tuning of the x-axis detection mode through applying electrostatic negative stiffness to the two pairs of x-axis frequency modulation capacitors. When angular velocity is input in the y-axis direction, the y-axis detection mass block moves out of plane around the x-axis under the action of the Golgi force, so that the polar plate distance of the two y-axis detection response capacitors is changed, and the capacity of the two y-axis detection response capacitors is changed. At this time, the control system can calculate the angular velocity input in the y-axis direction by detecting the capacities of the two y-axis detection response capacitors. In the process, the control system performs force feedback control through the two y-axis detection excitation capacitors, so that closed-loop detection of the y-axis is realized, and on the other hand, electrostatic negative stiffness is applied through the two y-axis frequency modulation capacitors, so that frequency tuning of a y-axis detection mode is performed. When the angular velocity is input in the z-axis direction, the z-axis detection mass block is subjected to four-antinode bending vibration in a detection mode under the action of the Golgi force. At this time, the two pairs of z-axis detection response capacitances are located at antinodes of the four antinode flexural vibrations, thereby changing the plate pitches of the two pairs of z-axis detection response capacitances, and thus changing the capacities of the two pairs of z-axis detection response capacitances. At this time, the control system can calculate the angular velocity input in the z-axis direction by detecting the capacities of the two pairs of z-axis detection response capacitances. In the process, the control system performs force feedback control through the two pairs of z-axis detection excitation capacitors, so that closed-loop detection of the z-axis is realized, and on the other hand, performs frequency tuning of the z-axis detection mode through applying electrostatic negative stiffness to the eight pairs of z-axis frequency modulation capacitors.
Based on the above process, compared with the existing triaxial gyroscope, the high-sensitivity nested wheel ring monolithic triaxial MEMS gyroscope chip provided by the invention has the advantages that the input of angular velocities in the directions of an x axis, a y axis and a z axis is simultaneously measured by adopting a brand new structure, and the high-sensitivity nested wheel ring monolithic triaxial MEMS gyroscope chip has the following advantages: 1. compared with the existing monolithic integrated triaxial gyroscope, the invention has the following advantages: the harmonic oscillator adopts the nested wheel ring structure, and the structure effectively reduces the ring structure area and simultaneously increases the wheel structure area to the greatest extent, so that the area utilization rate is effectively improved, and the sensitivity is effectively improved. Secondly, the invention realizes the complete decoupling of each driving and detecting direction, thereby effectively reducing the coupling error between each mode and effectively improving the measuring precision. 2. Compared with the existing assembled triaxial gyroscope, the invention adopts a monolithic integrated structure, so that the monolithic integrated structure is not limited by an assembly process, and the measurement accuracy is effectively improved.
The three-axis gyroscope has reasonable structure and ingenious design, effectively solves the problems of low sensitivity and low measurement precision of the existing three-axis gyroscope, and is suitable for the high-precision tip fields such as military navigation and deep space exploration.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic plan view of the present invention.
Fig. 3 is a schematic plan view of a wheel structure of a harmonic oscillator part, and eight pairs of unilateral comb-tooth-shaped three-dimensional electrodes A in the invention.
Fig. 4 is a schematic plan view of a ring structure of a harmonic oscillator part, eight pairs of arc-shaped three-dimensional electrodes and eight pairs of unilateral comb-shaped three-dimensional electrodes B in the invention.
Fig. 5 is a schematic view of the three-dimensional structure of the square base, two arcuate planar electrodes, two drum-shaped planar electrodes a, two drum-shaped planar electrodes B, eight pairs of strip-shaped planar electrodes a, four dot-shaped planar electrodes a, two T-shaped planar electrodes, two pairs of arc-shaped planar electrodes a, two pairs of arc-shaped planar electrodes B, eight dot-shaped planar electrodes B, eight pairs of arc-shaped planar electrodes C, eight pairs of strip-shaped planar electrodes B in the present invention.
Fig. 6 is a schematic plan view of a square base, two arcuate plane electrodes, two drum-shaped plane electrodes a, two drum-shaped plane electrodes B, eight pairs of strip-shaped plane electrodes a, four dot-shaped plane electrodes a, two T-shaped plane electrodes, two pairs of arc-shaped plane electrodes a, two pairs of arc-shaped plane electrodes B, eight dot-shaped plane electrodes B, eight pairs of arc-shaped plane electrodes C, eight pairs of strip-shaped plane electrodes B in the present invention.
In the figure: 101-disc-shaped mass blocks, 102-straight coupling suspension beams A, 103-circular ring-shaped supporting frames, 104-double-sided comb-shaped coupling suspension beams A, 105-straight supporting suspension beams A, 106-straight coupling suspension beams B, 107-anchor points A, 108-circular ring-shaped mass blocks A, 109-suspension mass blocks, 110-circular ring-shaped mass blocks B, 111-straight coupling suspension beams C, 112-square supporting suspension beams, 113-straight supporting suspension beams B, 114-anchor points B, 115-double-sided comb-shaped coupling suspension beams B, the electrode comprises a square base, a 202-arched plane electrode, a 203-drum-shaped plane electrode A, a 204-drum-shaped plane electrode B, a 205-strip-shaped plane electrode A, a 206-point-shaped plane electrode A, a 207-T-shaped plane electrode, a 208-arched plane electrode A, a 209-arc-shaped plane electrode B, a 210-point-shaped plane electrode B, a 211-arc-shaped plane electrode C, a 212-strip-shaped plane electrode B, a 213-single-side comb-tooth-shaped three-dimensional electrode A, a 214-arc-shaped three-dimensional electrode and a 215-single-side comb-tooth-shaped three-dimensional electrode B.
Detailed Description
The high-sensitivity nested wheel ring monolithic triaxial MEMS gyro chip comprises a harmonic oscillator part and an electrode part;
The harmonic oscillator part comprises a wheel structure and a ring structure;
The wheel structure comprises a disc-shaped mass 101;
Two grooves which are symmetrically distributed left and right are formed in the outer side surface of the disc-shaped mass block 101; two straight coupling cantilever beams A102 which are distributed in bilateral symmetry are correspondingly connected to the bottoms of the two open grooves one by one;
The ends of the two straight coupling cantilever beams A102 are commonly connected with a circular ring-shaped supporting frame 103;
The outer side surface of the circular supporting frame 103 is connected with eight double-side comb-tooth-shaped coupling suspension beams A104 symmetrically distributed along the circumferential direction, four straight supporting suspension beams A105 symmetrically distributed along the circumferential direction and two straight coupling suspension beams B106 symmetrically distributed front and back;
The four straight supporting suspension beams A105 are positioned between the first double-side comb-tooth-shaped coupling suspension beam A104 and the second double-side comb-tooth-shaped coupling suspension beam A104, between the third double-side comb-tooth-shaped coupling suspension beam A104 and the fourth double-side comb-tooth-shaped coupling suspension beam A104, between the fifth double-side comb-tooth-shaped coupling suspension beam A104 and the sixth double-side comb-tooth-shaped coupling suspension beam A104, and between the seventh double-side comb-tooth-shaped coupling suspension beam A104 and the eighth double-side comb-tooth-shaped coupling suspension beam A104 in a one-to-one correspondence manner; four anchor points A107 symmetrically distributed along the circumferential direction are connected with the end parts of the four straight supporting cantilever beams A105 in a one-to-one correspondence manner;
The two straight coupling suspension beams B106 are positioned between the second double-side comb-tooth coupling suspension beam A104 and the third double-side comb-tooth coupling suspension beam A104 and between the sixth double-side comb-tooth coupling suspension beam A104 and the seventh double-side comb-tooth coupling suspension beam A104 in a one-to-one correspondence manner; the ends of the two straight coupling cantilever beams B106 are commonly connected with a circular mass block A108;
The inner side surface of the annular mass block A108 is connected with two suspension mass blocks 109 which are distributed symmetrically left and right; the two suspension mass blocks 109 are positioned between the fourth double-sided comb-tooth-shaped coupling suspension beam A104 and the fifth double-sided comb-tooth-shaped coupling suspension beam A104 in a one-to-one correspondence manner, and between the eighth double-sided comb-tooth-shaped coupling suspension beam A104 and the first double-sided comb-tooth-shaped coupling suspension beam A104;
The ring structure comprises a circular ring-shaped mass block B110;
The annular mass block B110 is coaxially sleeved on the outer side of the annular mass block A108; eight straight coupling suspension beams C111 which are symmetrically distributed along the circumferential direction are connected to the inner side surface of the annular mass block B110, and the circumferential positions of the eight straight coupling suspension beams C111 are in one-to-one correspondence with the circumferential positions of the four straight supporting suspension beams A105, the circumferential positions of the two straight coupling suspension beams B106 and the circumferential positions of the two suspension mass blocks 109;
Eight straight coupling cantilever beams C111 are connected with eight support cantilever beams 112 symmetrically distributed along the circumferential direction in a one-to-one correspondence manner at the end parts;
eight straight support cantilever beams B113 which are symmetrically distributed along the circumferential direction are connected with the inner side surfaces of the eight square support cantilever beams 112 in a one-to-one correspondence manner;
eight anchor points B114 symmetrically distributed along the circumferential direction are connected to the end parts of the eight straight supporting cantilever beams B113 in a one-to-one correspondence manner;
eight double-side comb-shaped coupling cantilever beams B115 which are symmetrically distributed along the circumferential direction are connected to the outer side surface of the circular mass block B110, and the circumferential positions of the eight double-side comb-shaped coupling cantilever beams B115 are in one-to-one correspondence with the circumferential positions of eight straight coupling cantilever beams C111;
the electrode portion includes a square base 201;
the square base 201 is coaxially arranged with the disc-shaped mass block 101; the upper surface of the square base 201 is sputtered with two arc-shaped plane electrodes 202 which are symmetrically distributed front and back, two drum-shaped plane electrodes A203 which are symmetrically distributed front and back, two drum-shaped plane electrodes B204 which are symmetrically distributed front and back, eight pairs of strip-shaped plane electrodes A205 which are symmetrically distributed along the circumferential direction, four dot-shaped plane electrodes A206 which are symmetrically distributed along the circumferential direction, two T-shaped plane electrodes 207 which are symmetrically distributed left and right, two pairs of arc-shaped plane electrodes A208 which are symmetrically distributed left and right, two pairs of arc-shaped plane electrodes B209 which are symmetrically distributed left and right, eight dot-shaped plane electrodes B210 which are symmetrically distributed along the circumferential direction, eight pairs of arc-shaped plane electrodes C211 which are symmetrically distributed along the circumferential direction and eight pairs of strip-shaped plane electrodes B212 which are symmetrically distributed along the circumferential direction;
The upper surfaces of the two arcuate planar electrodes 202 and the lower surface of the disc-shaped mass 101 together form two parallel capacitances a;
two drum-shaped planar electrodes a203 are each located between two arcuate planar electrodes 202; the upper surfaces of the two drum-shaped plane electrodes A203 and the lower surface of the disc-shaped mass block 101 jointly form two parallel capacitors B;
Two drum-shaped planar electrodes B204 are positioned between the two drum-shaped planar electrodes A203; the upper surfaces of the two drum-shaped plane electrodes B204 and the lower surface of the disc-shaped mass block 101 jointly form two parallel capacitors C;
Eight pairs of unilateral comb-shaped three-dimensional electrodes A213 which are symmetrically distributed along the circumferential direction are bonded on the upper surfaces of the eight pairs of strip-shaped plane electrodes A205 in a one-to-one correspondence manner; eight pairs of unilateral comb-shaped three-dimensional electrodes A213 are symmetrically embedded at two sides of the eight bilateral comb-shaped coupling cantilever beams A104 in a one-to-one correspondence manner, and the eight pairs of unilateral comb-shaped three-dimensional electrodes A213 and the eight bilateral comb-shaped coupling cantilever beams A104 form eight pairs of comb-shaped capacitors A in a one-to-one correspondence manner;
The upper surfaces of the four punctiform plane electrodes A206 are bonded with the lower surfaces of the four anchor points A107 in a one-to-one correspondence;
The upper surfaces of the two T-shaped plane electrodes 207 and the lower surfaces of the annular mass A108 and the two suspended mass 109 together form two parallel capacitors D;
Two pairs of arc plane electrodes A208 are symmetrically distributed on two sides of the two T-shaped plane electrodes 207 in a one-to-one correspondence manner; the upper surfaces of the two pairs of arc plane electrodes A208 and the lower surface of the circular ring-shaped mass block A108 together form two pairs of parallel capacitors E;
The two pairs of arc-shaped plane electrodes B209 are symmetrically distributed on two sides of the two pairs of arc-shaped plane electrodes A208 in a one-to-one correspondence manner; the upper surfaces of the two pairs of arc plane electrodes B209 and the lower surface of the circular ring-shaped mass block A108 jointly form two pairs of parallel capacitors F;
the upper surfaces of the eight dot-shaped plane electrodes B210 are bonded with the lower surfaces of the eight anchor points B114 in a one-to-one correspondence;
Eight pairs of arc three-dimensional electrodes 214 are bonded on the upper surfaces of the eight pairs of arc plane electrodes C211 in a one-to-one correspondence manner; eight pairs of arc-shaped three-dimensional electrodes 214 are symmetrically distributed on two sides of the eight straight coupling cantilever beams C111 in a one-to-one correspondence manner, and the outer side surfaces of the eight pairs of arc-shaped three-dimensional electrodes 214 and the inner side surface of the circular ring-shaped mass block B110 jointly form eight pairs of parallel capacitors G;
eight pairs of unilateral comb-shaped three-dimensional electrodes B215 are bonded on the upper surfaces of the eight pairs of strip-shaped plane electrodes B212 in a one-to-one correspondence manner; eight pairs of unilateral comb-shaped three-dimensional electrodes B215 are symmetrically embedded at two sides of the eight bilateral comb-shaped coupling cantilever beams B115 in a one-to-one correspondence manner, and the eight pairs of unilateral comb-shaped three-dimensional electrodes B215 and the eight bilateral comb-shaped coupling cantilever beams B115 form eight pairs of comb-shaped capacitors B in a one-to-one correspondence manner.
The harmonic oscillator part is made of silicon; the square base 201 is made of glass.
The harmonic oscillator part and the electrode part are manufactured into a whole by adopting an SOG process.
While specific embodiments of the invention have been described above, it will be appreciated by those skilled in the art that these are by way of example only, and the scope of the invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the principles and spirit of the invention, but such changes and modifications fall within the scope of the invention.
Claims (3)
1. A high-sensitivity nested wheel ring single-chip triaxial MEMS gyro chip is characterized in that: comprises a harmonic oscillator part and an electrode part;
The harmonic oscillator part comprises a wheel structure and a ring structure;
the wheel structure comprises a disc-shaped mass (101);
two grooves which are symmetrically distributed left and right are formed on the outer side surface of the disc-shaped mass block (101); two straight coupling cantilever beams A (102) which are symmetrically distributed left and right are correspondingly connected to the bottoms of the two open grooves one by one;
the ends of the two straight coupling cantilever beams A (102) are commonly connected with a circular ring-shaped supporting frame (103);
Eight double-side comb-tooth-shaped coupling suspension beams A (104) symmetrically distributed along the circumferential direction, four straight supporting suspension beams A (105) symmetrically distributed along the circumferential direction and two straight coupling suspension beams B (106) symmetrically distributed front and back are connected to the outer side surface of the annular supporting frame (103);
Four straight supporting cantilever beams A (105) are positioned between the first double-side comb-tooth-shaped coupling cantilever beam A (104) and the second double-side comb-tooth-shaped coupling cantilever beam A (104), between the third double-side comb-tooth-shaped coupling cantilever beam A (104) and the fourth double-side comb-tooth-shaped coupling cantilever beam A (104), between the fifth double-side comb-tooth-shaped coupling cantilever beam A (104) and the sixth double-side comb-tooth-shaped coupling cantilever beam A (104), and between the seventh double-side comb-tooth-shaped coupling cantilever beam A (104) and the eighth double-side comb-tooth-shaped coupling cantilever beam A (104) in a one-to-one correspondence manner; four anchor points A (107) symmetrically distributed along the circumferential direction are connected with the end parts of the four straight supporting cantilever beams A (105) in a one-to-one correspondence manner;
Two straight coupling cantilever beams B (106) are positioned between the second double-side comb-tooth-shaped coupling cantilever beam A (104) and the third double-side comb-tooth-shaped coupling cantilever beam A (104) in a one-to-one correspondence manner, and between the sixth double-side comb-tooth-shaped coupling cantilever beam A (104) and the seventh double-side comb-tooth-shaped coupling cantilever beam A (104); the ends of the two straight coupling cantilever beams B (106) are commonly connected with a circular mass block A (108);
The inner side surface of the annular mass block A (108) is connected with two suspension mass blocks (109) which are symmetrically distributed left and right; the two suspension mass blocks (109) are positioned between the fourth double-side comb-tooth-shaped coupling suspension beam A (104) and the fifth double-side comb-tooth-shaped coupling suspension beam A (104) and between the eighth double-side comb-tooth-shaped coupling suspension beam A (104) and the first double-side comb-tooth-shaped coupling suspension beam A (104) in a one-to-one correspondence manner;
The ring structure comprises a circular ring-shaped mass B (110);
the annular mass block B (110) is coaxially sleeved on the outer side of the annular mass block A (108); eight straight coupling suspension beams C (111) which are symmetrically distributed along the circumferential direction are connected to the inner side surface of the annular mass block B (110), and the circumferential positions of the eight straight coupling suspension beams C (111) are in one-to-one correspondence with the circumferential positions of the four straight supporting suspension beams A (105), the circumferential positions of the two straight coupling suspension beams B (106) and the circumferential positions of the two suspension mass blocks (109);
eight straight coupling cantilever beams C (111) are connected with eight support cantilever beams (112) symmetrically distributed along the circumferential direction in a one-to-one correspondence manner at the end parts;
Eight straight support cantilever beams B (113) symmetrically distributed along the circumferential direction are connected with the inner side surfaces of the eight square support cantilever beams (112) in a one-to-one correspondence manner;
Eight anchor points B (114) symmetrically distributed along the circumferential direction are connected to the end parts of the eight straight supporting cantilever beams B (113) in a one-to-one correspondence manner;
eight double-side comb-shaped coupling cantilever beams B (115) symmetrically distributed along the circumferential direction are connected to the outer side surface of the circular mass block B (110), and the circumferential positions of the eight double-side comb-shaped coupling cantilever beams B (115) are in one-to-one correspondence with the circumferential positions of the eight straight coupling cantilever beams C (111);
The electrode portion includes a square base (201);
The square base (201) and the disc-shaped mass block (101) are coaxially arranged; the upper surface of the square base (201) is sputtered with two arc-shaped plane electrodes (202) which are symmetrically distributed front and back, two drum-shaped plane electrodes A (203) which are symmetrically distributed front and back, two drum-shaped plane electrodes B (204) which are symmetrically distributed front and back, eight pairs of strip-shaped plane electrodes A (205) which are symmetrically distributed along the circumferential direction, four dot-shaped plane electrodes A (206) which are symmetrically distributed along the circumferential direction, two T-shaped plane electrodes (207) which are symmetrically distributed left and right, two pairs of arc-shaped plane electrodes A (208) which are symmetrically distributed left and right, two pairs of arc-shaped plane electrodes B (209) which are symmetrically distributed left and right, eight dot-shaped plane electrodes B (210) which are symmetrically distributed along the circumferential direction, eight pairs of arc-shaped plane electrodes C (211) which are symmetrically distributed along the circumferential direction, and eight pairs of strip-shaped plane electrodes B (212) which are symmetrically distributed along the circumferential direction;
The upper surfaces of the two arched plane electrodes (202) and the lower surface of the disc-shaped mass block (101) form two parallel capacitors A together;
Two drum-shaped planar electrodes A (203) are positioned between the two arcuate planar electrodes (202); the upper surfaces of the two drum-shaped plane electrodes A (203) and the lower surface of the disc-shaped mass block (101) form two parallel capacitors B together;
Two drum-shaped plane electrodes B (204) are positioned between the two drum-shaped plane electrodes A (203); the upper surfaces of the two drum-shaped plane electrodes B (204) and the lower surface of the disc-shaped mass block (101) form two parallel capacitors C together;
Eight pairs of unilateral comb-shaped three-dimensional electrodes A (213) symmetrically distributed along the circumferential direction are bonded on the upper surfaces of the eight pairs of strip-shaped plane electrodes A (205) in a one-to-one correspondence manner; eight pairs of unilateral comb-shaped three-dimensional electrodes A (213) are symmetrically embedded on two sides of the eight bilateral comb-shaped coupling cantilever beams A (104) in a one-to-one correspondence manner, and the eight pairs of unilateral comb-shaped three-dimensional electrodes A (213) and the eight bilateral comb-shaped coupling cantilever beams A (104) form eight pairs of comb-shaped capacitors A in a one-to-one correspondence manner;
The upper surfaces of the four punctiform plane electrodes A (206) are bonded with the lower surfaces of the four anchor points A (107) in a one-to-one correspondence manner;
The upper surfaces of the two T-shaped plane electrodes (207), the lower surface of the annular mass block A (108) and the lower surfaces of the two suspended mass blocks (109) form two parallel capacitors D together;
Two pairs of arc plane electrodes A (208) are symmetrically distributed on two sides of the two T-shaped plane electrodes (207) in a one-to-one correspondence manner; the upper surfaces of the two pairs of arc plane electrodes A (208) and the lower surface of the annular mass block A (108) form two pairs of parallel capacitors E together;
The two pairs of arc-shaped plane electrodes B (209) are symmetrically distributed on two sides of the two pairs of arc-shaped plane electrodes A (208) in a one-to-one correspondence manner; the upper surfaces of the two pairs of arc plane electrodes B (209) and the lower surface of the annular mass block A (108) jointly form two pairs of parallel capacitors F;
The upper surfaces of the eight punctiform plane electrodes B (210) are bonded with the lower surfaces of the eight anchor points B (114) in a one-to-one correspondence manner;
eight pairs of arc three-dimensional electrodes (214) are bonded on the upper surfaces of the eight pairs of arc plane electrodes C (211) in a one-to-one correspondence manner; eight pairs of arc-shaped three-dimensional electrodes (214) are symmetrically distributed on two sides of the eight straight coupling cantilever beams C (111) in a one-to-one correspondence manner, and the outer side surfaces of the eight pairs of arc-shaped three-dimensional electrodes (214) and the inner side surfaces of the annular mass blocks B (110) jointly form eight pairs of parallel capacitors G;
Eight pairs of unilateral comb-shaped three-dimensional electrodes B (215) are bonded on the upper surfaces of the eight pairs of strip-shaped plane electrodes B (212) in a one-to-one correspondence manner; eight pairs of unilateral comb-shaped three-dimensional electrodes B (215) are symmetrically embedded at two sides of the eight bilateral comb-shaped coupling cantilever beams B (115) in a one-to-one correspondence manner, and the eight pairs of unilateral comb-shaped three-dimensional electrodes B (215) and the eight bilateral comb-shaped coupling cantilever beams B (115) form eight pairs of comb-shaped capacitors B in a one-to-one correspondence manner.
2. The high sensitivity nested torus monolithic triaxial MEMS gyroscope chip according to claim 1, wherein: the harmonic oscillator part is made of silicon; the square base (201) is made of glass.
3. The high sensitivity nested torus monolithic triaxial MEMS gyroscope chip according to claim 1, wherein: the harmonic oscillator part and the electrode part are manufactured into a whole by adopting an SOG process.
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| US20160084654A1 (en) * | 2014-09-24 | 2016-03-24 | The Regents Of The University Of California | Fully balanced micro-machined inertial sensor |
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| US20160084654A1 (en) * | 2014-09-24 | 2016-03-24 | The Regents Of The University Of California | Fully balanced micro-machined inertial sensor |
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