CN118464816A - Asynchronous wide-field ultrafast spectral microscopy imaging system and method - Google Patents
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Abstract
本发明公开了一种非同步宽场式的超快光谱显微成像系统及方法,系统包括非同步宽场式飞秒激光激光泵浦探测子系统和时空分辨光谱显微图像重构子系统,非同步宽场式飞秒激光激光泵浦探测子系统用于产生具有不同时间延迟的泵浦光与探测光,并将泵浦光与探测光分别聚焦在样品表面,以固定采样频率Fs连续采样样品反射的探测光图像,其中,Fs>2Fc,Fc为泵浦光的调制频率;时空分辨光谱显微图像重构子系统用于获取同一时间延迟下所有探测光图像同一像素位置的灰度值,组成一个像素灰度数组,再根据同一时间延迟下各像素位置的像素灰度数组计算得到各像素位置的幅值和相位,并将同一时间延迟下所有像素位置的幅值和相位按照像素位置进行图像重构,得到每一时间延迟下的显微光谱,最后将所有时间延迟下的显微光谱组合,形成时空分辨超快光谱显微图像序列。本发明不仅降低了硬件系统的成本,而且降低了图像重构算法复杂度,具有普适的参考意义和应用价值。
The invention discloses an asynchronous wide-field ultrafast spectral microscopy imaging system and method. The system comprises an asynchronous wide-field femtosecond laser pumping detection subsystem and a time-space resolution spectral microscopy image reconstruction subsystem. The asynchronous wide-field femtosecond laser pumping detection subsystem is used to generate pump light and detection light with different time delays, and respectively focus the pump light and the detection light on the sample surface, and continuously sample the detection light image reflected by the sample at a fixed sampling frequency Fs, wherein Fs>2Fc, and Fc is the modulation frequency of the pump light; the time-space resolution spectral microscopy image reconstruction subsystem is used to obtain the grayscale value of the same pixel position of all detection light images under the same time delay to form a pixel grayscale array, and then calculate the amplitude and phase of each pixel position according to the pixel grayscale array of each pixel position under the same time delay, and reconstruct the amplitude and phase of all pixel positions under the same time delay according to the pixel position to obtain the microscopic spectrum under each time delay, and finally combine the microscopic spectra under all time delays to form a time-space resolution ultrafast spectral microscopy image sequence. The present invention not only reduces the cost of the hardware system, but also reduces the complexity of the image reconstruction algorithm, and has universal reference significance and application value.
Description
技术领域Technical Field
本发明涉及光学显微成像,尤其涉及一种非同步宽场式的超快光谱显微成像系统及方法。The invention relates to optical microscopic imaging, and in particular to an asynchronous wide-field ultrafast spectral microscopic imaging system and method.
背景技术Background Art
飞秒激光泵浦探测是研究超快光物理过程的重要光谱手段,因具有飞秒级时间分辨率、无损、快速探测等优势,在半导体等功能材料及器件的载流子动力学、热扩散、相干声子等超快过程的探测与成像中具有重要应用价值,不仅可以测得光生载流子寿命、迁移率和热扩散系数等重要本征物理参数,而且可以通过监测界面能量超快转移等过程实现器件的功能评价。Femtosecond laser pump detection is an important spectroscopic method for studying ultrafast photophysical processes. Due to its advantages of femtosecond time resolution, non-destructive and rapid detection, it has important application value in the detection and imaging of ultrafast processes such as carrier dynamics, thermal diffusion, coherent phonons, etc. in functional materials and devices such as semiconductors. It can not only measure important intrinsic physical parameters such as photogenerated carrier lifetime, mobility and thermal diffusion coefficient, but also realize device functional evaluation by monitoring processes such as ultrafast interface energy transfer.
早期的飞秒激光泵浦探测手段,通常将飞秒激光泵浦脉冲和探测脉冲聚焦于待测样品表面,形成微米直径的焦斑,并采用锁相放大手段对不同时刻的探测脉冲反射信号强度变化实现灵敏检测,可对焦斑所在位置(认为是一个点)的光生载能子(电子、声子等)动力学过程实现时间分辨测量。进一步的,为了实现超快光谱的时空分辨显微成像,人们大多采用空间扫描或同步宽场成像的方式。但空间扫描的方式,不仅对扫描精度有很高的要求,而且成像速度很慢。同步宽场成像的方式,虽然提高了成像速度,但技术上需将光学斩波调制和图像采集进行精确同步,即相位相同且图像采集的频率为斩波调制频率的两倍,需要使用函数发生器对光学斩波调制和图像采集施加同步触发。这不仅会导致硬件和光谱采集控制系统复杂度的增加,更会导致与之配套的时序依赖图像差分重构算法占用了较多的计算资源,严重阻碍了超快光谱显微成像技术的便捷、普适应用。In the early stage of femtosecond laser pump detection, the femtosecond laser pump pulse and the detection pulse were usually focused on the surface of the sample to be tested to form a micrometer diameter focal spot, and the phase-locked amplification method was used to realize sensitive detection of the intensity change of the detection pulse reflection signal at different times, so that the dynamic process of the photogenerated carriers (electrons, phonons, etc.) at the location of the focal spot (considered as a point) can be measured in time resolution. Furthermore, in order to realize the time-space resolution microscopic imaging of ultrafast spectroscopy, most people use spatial scanning or synchronous wide-field imaging. However, the spatial scanning method not only has high requirements on scanning accuracy, but also has a very slow imaging speed. Although the synchronous wide-field imaging method improves the imaging speed, it is technically necessary to accurately synchronize the optical chopping modulation and image acquisition, that is, the phase is the same and the image acquisition frequency is twice the chopping modulation frequency. A function generator needs to be used to apply synchronous triggering to the optical chopping modulation and image acquisition. This will not only increase the complexity of the hardware and spectral acquisition control system, but also cause the matching timing-dependent image differential reconstruction algorithm to occupy more computing resources, which seriously hinders the convenient and universal application of ultrafast spectral microscopic imaging technology.
发明内容Summary of the invention
针对现有同步宽场超快光谱显微成像技术存在的问题,本发明提供一种无需同步触发的系统及方法。本发明同时降低了硬件系统、光谱采集控制系统和图像重构算法的复杂度,具有普适的参考意义和应用价值。In view of the problems existing in the existing synchronous wide-field ultrafast spectral microscopy imaging technology, the present invention provides a system and method that does not require synchronous triggering. The present invention also reduces the complexity of the hardware system, the spectral acquisition control system and the image reconstruction algorithm, and has universal reference significance and application value.
为了实现上述发明目的,本发明提供了一种非同步宽场式的超快光谱显微成像系统,包括:In order to achieve the above-mentioned object of the invention, the present invention provides an asynchronous wide-field ultrafast spectral microscopy imaging system, comprising:
非同步宽场式飞秒激光泵浦探测子系统,用于产生具有不同时间延迟的泵浦光与探测光,并将泵浦光聚焦在样品表面而探测光预聚焦后在样品表面形成扩大的光斑,以固定采样频率Fs连续采样样品反射的探测光图像,其中,Fs>2Fc,Fc为泵浦光的调制频率;An asynchronous wide-field femtosecond laser pump-probe subsystem is used to generate pump light and probe light with different time delays, and to focus the pump light on the sample surface and to form an expanded light spot on the sample surface after the probe light is pre-focused, and to continuously sample the probe light image reflected by the sample at a fixed sampling frequency Fs, where Fs>2Fc, and Fc is the modulation frequency of the pump light;
时空分辨光谱显微图像重构子系统,用于获取泵浦光和探测光同一时间延迟下所有探测光图像,并将所有探测光图像同一像素位置的灰度值,组成一个像素灰度数组,再根据同一时间延迟下各像素位置的像素灰度数组计算得到各像素位置的幅值和相位,并将同一时间延迟下所有像素位置的幅值和相位按照像素位置进行组合,得到每一时间延迟下的显微光谱,最后将所有时间延迟下的显微光谱组合,形成时空分辨超快光谱显微图像序列。The time-space resolved spectral microscopy image reconstruction subsystem is used to obtain all detection light images under the same time delay of pump light and detection light, and to form a pixel grayscale array with the grayscale values of the same pixel position of all detection light images, and then calculate the amplitude and phase of each pixel position according to the pixel grayscale array of each pixel position under the same time delay, and combine the amplitude and phase of all pixel positions under the same time delay according to the pixel position to obtain the microscopic spectrum under each time delay, and finally combine the microscopic spectra under all time delays to form a time-space resolved ultrafast spectral microscopy image sequence.
进一步的,所述非同步宽场式飞秒激光泵浦探测子系统具体包括飞秒激光器、分光镜、时间延迟调节模块、倍频晶体、频率调节模块、反射镜组合、显微物镜、目镜和CMOS相机,所述分光镜位于所述飞秒激光器的光输出端后方,用于将飞秒激光器输出光束分为探测光和泵浦光,所述反射镜组合用于转向泵浦光的传播方向,从而将泵浦光依次经过倍频晶体、频率调节模块到达显微物镜的光输入端,所述频率调节模块用于对泵浦光进行频率为Fc的频率调制,所述探测光经时间延迟调节模块到达显微物镜的光输入端,样品位于所述显微物镜的焦点处,所述显微物镜用于将样品反射的探测光经目镜成像到相机上,所述相机以固定采样频率Fs连续采样形成探测光图像序列。Furthermore, the asynchronous wide-field femtosecond laser pump detection subsystem specifically includes a femtosecond laser, a spectroscope, a time delay adjustment module, a frequency doubling crystal, a frequency adjustment module, a reflector assembly, a microscope objective, an eyepiece and a CMOS camera. The spectroscope is located behind the light output end of the femtosecond laser and is used to divide the output beam of the femtosecond laser into detection light and pump light. The reflector assembly is used to turn the propagation direction of the pump light, so that the pump light passes through the frequency doubling crystal and the frequency adjustment module in sequence to reach the light input end of the microscope objective. The frequency adjustment module is used to perform frequency modulation on the pump light with a frequency of Fc. The detection light reaches the light input end of the microscope objective via the time delay adjustment module. The sample is located at the focus of the microscope objective. The microscope objective is used to image the detection light reflected by the sample onto the camera through the eyepiece. The camera continuously samples at a fixed sampling frequency Fs to form a detection light image sequence.
进一步的,所述非同步宽场式飞秒激光泵浦探测子系统还包括第一透镜和第二透镜,所述第一透镜和第二透镜位于所述显微物镜之前的探测光光路中,用于将探测光束进行预聚焦。Furthermore, the asynchronous wide-field femtosecond laser pumping detection subsystem also includes a first lens and a second lens, wherein the first lens and the second lens are located in the detection light path before the microscope objective lens, and are used to pre-focus the detection light beam.
进一步的,所述反射镜组合包括沿泵浦光传播路径依次设置的第一反射镜、第二反射镜和第三反射镜,所述第一反射镜、第二反射镜和第三反射镜使得泵浦光最终到达显微物镜的光输入端。Furthermore, the reflector assembly includes a first reflector, a second reflector and a third reflector sequentially arranged along a propagation path of the pump light, and the first reflector, the second reflector and the third reflector enable the pump light to finally reach a light input end of the microscope objective.
进一步的,所述时空分辨光谱显微图像重构子系统包括:Furthermore, the time-space resolution spectral microscopy image reconstruction subsystem includes:
像素灰度值获取模块,用于获取在特定时间延迟t下拍摄的s张探测光图像,并按拍摄顺序提取每张探测光图像同一像素位置的灰度值,组成一个像素灰度值的数组ai,j(t)={ai,j(t,1),…,ai,j(t,s)},其中,t=1,…,T;i=1,…,m;j=1,…,n,ai,j(t,k)表示时间延迟为t时拍摄的第k张探测光图像的第i行第j列像素位置的灰度值,k=1,…,s,T为时间延迟的测量数量,m、n为探测光图像的行、列像素数;A pixel grayscale value acquisition module is used to acquire s detection light images taken at a specific time delay t, and extract the grayscale value of the same pixel position of each detection light image in the shooting order to form an array of pixel grayscale values ai,j (t)={ ai,j (t,1),…, ai,j (t,s)}, where t=1,…,T; i=1,…,m; j=1,…,n, ai,j (t,k) represents the grayscale value of the pixel position of the i-th row and j-th column of the k-th detection light image taken when the time delay is t, k=1,…,s, T is the measurement number of the time delay, and m and n are the number of pixels in the row and column of the detection light image;
幅值相位计算模块,用于按照下式计算幅值和相位:The amplitude and phase calculation module is used to calculate the amplitude and phase according to the following formula:
式中,Ai,j(t)为未矫正显微光谱图像第i行第j列的像素,为相位,|Ai,j(t)|为幅值;Where A i,j (t) is the pixel in the i-th row and j-th column of the uncorrected micro-spectral image, is the phase, |A i,j (t)| is the amplitude;
图像重构模块,用于将未矫正显微光谱图像按照下式矫正,并按照像素位置进行组合,得到每一时间延迟下的显微光谱:The image reconstruction module is used to correct the uncorrected microscopic spectrum image according to the following formula and combine it according to the pixel position to obtain the microscopic spectrum at each time delay:
式中,为时间延迟t下显微光谱第i行第j列的像素,Ai*,j*(t)为选取的参考像素,A*(t)为时间延迟t下显微光谱;In the formula, is the pixel in the i-th row and j-th column of the microscopic spectrum under time delay t, A i*,j* (t) is the selected reference pixel, and A * (t) is the microscopic spectrum under time delay t;
时空分辨显微光谱图像形成模块,用于将所有时间延迟下的显微光谱形成时空分辨超快光谱显微图像序列A*={A*(t)|t=1,…,T}。The time-space resolution micro-spectral image forming module is used to form a time-space resolution ultrafast spectral micro-image sequence A * ={A * (t)|t=1,…,T} from all micro-spectra under time delay.
进一步的,所述时间延迟调节模块为放置在位移平台的延时装置。所述频率调节模块为斩波器。Furthermore, the time delay adjustment module is a delay device placed on the displacement platform. The frequency adjustment module is a chopper.
本发明还提供一种非同步宽场式的超快光谱显微成像方法,包括:The present invention also provides an asynchronous wide-field ultrafast spectral microscopy imaging method, comprising:
步骤S1:产生具有不同时间延迟的泵浦光与探测光,并将泵浦光聚焦在样品表面而探测光预聚焦后在样品表面形成扩大的光斑,以固定采样频率Fs连续采样样品反射的探测光图像,其中,Fs>2Fc,Fc为泵浦光的调制频率;Step S1: Generate pump light and probe light with different time delays, focus the pump light on the sample surface, and form an enlarged light spot on the sample surface after the probe light is pre-focused, and continuously sample the probe light image reflected by the sample at a fixed sampling frequency Fs, where Fs>2Fc, and Fc is the modulation frequency of the pump light;
步骤S2:获取泵浦光和探测光同一时间延迟下所有探测光图像,并将所有探测光图像同一像素位置的灰度值,组成一个像素灰度数组,再根据同一时间延迟下各像素位置的像素灰度数组计算得到各像素位置的幅值和相位,并将同一时间延迟下所有像素位置的幅值和相位按照像素位置进行组合,得到每一时间延迟下的显微光谱,最后将所有时间延迟下的显微光谱组合,形成时空分辨超快光谱显微图像序列。Step S2: Acquire all detection light images under the same time delay of pump light and detection light, and form a pixel grayscale array with the grayscale values of the same pixel position of all detection light images, and then calculate the amplitude and phase of each pixel position according to the pixel grayscale array of each pixel position under the same time delay, and combine the amplitude and phase of all pixel positions under the same time delay according to the pixel position to obtain the microscopic spectrum under each time delay, and finally combine the microscopic spectra under all time delays to form a time-space resolved ultrafast spectral microscopic image sequence.
进一步的,所述步骤S2具体包括:Furthermore, the step S2 specifically includes:
获取在特定时间延迟t下拍摄的s张探测光图像,并按拍摄顺序提取每张探测光图像同一像素位置的灰度值,组成一个像素灰度值的数组ai,j(t)={ai,j(t,1),…,ai,j(t,s)},其中,t=1,…,T;i=1,…,m;j=1,…,n,ai,j(t,k)表示时间延迟为t时拍摄的第k张探测光图像的第i行第j列像素位置的灰度值,k=1,…,s,T为时间延迟的测量数量,m、n为探测光图像的行、列像素数;Obtain s detection light images taken at a specific time delay t, and extract the grayscale value of the same pixel position of each detection light image in the shooting order to form an array of pixel grayscale values ai ,j (t)={ ai,j (t,1),…, ai,j (t,s)}, where t=1,…,T; i=1,…,m; j=1,…,n, ai,j (t,k) represents the grayscale value of the pixel position of the i-th row and j-th column of the k-th detection light image taken when the time delay is t, k=1,…,s, T is the measurement number of the time delay, and m and n are the number of pixels in the rows and columns of the detection light image;
按照下式计算幅值和相位:Calculate the magnitude and phase as follows:
式中,Ai,j(t)为未矫正显微光谱图像第i行第j列的像素,为相位,|Ai,j(t)|为幅值;Where A i,j (t) is the pixel in the i-th row and j-th column of the uncorrected micro-spectral image, is the phase, |A i,j (t)| is the amplitude;
将未矫正显微光谱图像按照下式矫正,并按照像素位置进行组合,得到每一时间延迟下的显微光谱:The uncorrected microscopic spectrum image is corrected according to the following formula and combined according to the pixel position to obtain the microscopic spectrum at each time delay:
式中,为时间延迟t下显微光谱第i行第j列的像素,Ai*,j*(t)为选取的参考像素,A*(t)为时间延迟t下显微光谱;In the formula, is the pixel in the i-th row and j-th column of the microscopic spectrum under time delay t, A i*,j* (t) is the selected reference pixel, and A * (t) is the microscopic spectrum under time delay t;
将所有时间延迟下的显微光谱形成时空分辨超快光谱显微图像序列A*={A*(t)|t=1,…,T}。The microscopic spectra under all time delays are combined to form a temporally and spatially resolved ultrafast spectral microscopic image sequence A * ={A * (t)|t=1,…,T}.
本发明与现有技术相比,其有益效果是:本发明突破了现有宽场飞秒激光显微光谱成像方法,需要同步触发的技术瓶颈,提出一种无需斩波调制与图像采集同步的非同步宽场式的超快光谱显微成像系统及方法,降低了硬件系统复杂度和成本;并且简化了时空分辨显微光谱图像重构的算法,提升了时空分辨超快光谱成像的速度。本发明将使得宽场飞秒激光显微光谱成像获得更快更普适的应用场景。Compared with the prior art, the present invention has the following beneficial effects: the present invention breaks through the technical bottleneck of the existing wide-field femtosecond laser micro-spectral imaging method, which requires synchronous triggering, and proposes an asynchronous wide-field ultrafast spectral micro-imaging system and method that does not require chopping modulation and image acquisition synchronization, thereby reducing the hardware system complexity and cost; and simplifies the algorithm for time-space resolution micro-spectral image reconstruction, thereby increasing the speed of time-space resolution ultrafast spectral imaging. The present invention will enable wide-field femtosecond laser micro-spectral imaging to obtain faster and more universal application scenarios.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是本发明实施例提供的非同步宽场式的超快光谱显微成像系统的系统框图;FIG1 is a system block diagram of an asynchronous wide-field ultrafast spectral microscopy imaging system provided by an embodiment of the present invention;
图2是图1中非同步宽场式飞秒激光泵浦探测子系统的系统框图;FIG2 is a system block diagram of the asynchronous wide-field femtosecond laser pumping detection subsystem in FIG1;
图3是图1中时空分辨光谱显微图像重构子系统的系统框图;FIG3 is a system block diagram of the time-space resolution spectral microscopy image reconstruction subsystem in FIG1 ;
图4是泵浦脉冲与探测脉冲的信号图;FIG4 is a signal diagram of a pump pulse and a probe pulse;
图5是成像结果与取出光生载流子浓度的空间分布图;FIG5 is a diagram showing the spatial distribution of the imaging results and the concentration of the extracted photogenerated carriers;
图6是采用本发明测出的二维半导体MoSe2载流子扩散系数。FIG. 6 is a graph showing the carrier diffusion coefficient of the two-dimensional semiconductor MoSe 2 measured by the present invention.
具体实施方式DETAILED DESCRIPTION
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
本发明实施例提供了一种非同步宽场式的超快光谱显微成像系统,如图1所示,包括:The embodiment of the present invention provides an asynchronous wide-field ultrafast spectral microscopy imaging system, as shown in FIG1 , comprising:
非同步宽场式飞秒激光泵浦探测子系统,用于产生具有不同时间延迟的泵浦光与探测光,并将泵浦光聚焦在样品表面而探测光预聚焦后在样品表面形成扩大的光斑,以固定采样频率Fs连续采样样品反射的探测光图像,其中,Fs>2Fc,Fc为泵浦光的调制频率;An asynchronous wide-field femtosecond laser pump-probe subsystem is used to generate pump light and probe light with different time delays, and to focus the pump light on the sample surface and to form an expanded light spot on the sample surface after the probe light is pre-focused, and to continuously sample the probe light image reflected by the sample at a fixed sampling frequency Fs, where Fs>2Fc, and Fc is the modulation frequency of the pump light;
时空分辨光谱显微图像重构子系统,用于获取泵浦光和探测光同一时间延迟下所有探测光图像,并将所有探测光图像同一像素位置的灰度值,组成一个像素灰度数组,再根据同一时间延迟下各像素位置的像素灰度数组计算得到各像素位置的幅值和相位,并将同一时间延迟下所有像素位置的幅值和相位按照像素位置进行组合,得到每一时间延迟下的显微光谱,最后将所有时间延迟下的显微光谱组合,形成时空分辨超快光谱显微图像序列。The time-space resolved spectral microscopy image reconstruction subsystem is used to obtain all detection light images under the same time delay of pump light and detection light, and to form a pixel grayscale array with the grayscale values of the same pixel position of all detection light images, and then calculate the amplitude and phase of each pixel position according to the pixel grayscale array of each pixel position under the same time delay, and combine the amplitude and phase of all pixel positions under the same time delay according to the pixel position to obtain the microscopic spectrum under each time delay, and finally combine the microscopic spectra under all time delays to form a time-space resolved ultrafast spectral microscopy image sequence.
其中,如图2所示,所述非同步宽场式飞秒激光泵浦探测子系统具体包括飞秒激光器、分光镜、时间延迟调节模块、倍频晶体、频率调节模块、反射镜组合、显微物镜、目镜和相机,所述分光镜位于所述飞秒激光器的光输出端后方,用于将飞秒激光器输出光束分为探测光和泵浦光,所述反射镜组合用于转向泵浦光的传播方向,从而将泵浦光依次经过倍频晶体、频率调节模块到达显微物镜的光输入端,所述频率调节模块用于对泵浦光进行频率为Fc的频率调制,所述探测光经时间延迟调节模块到达显微物镜的光输入端,样品位于所述显微物镜的焦点处,所述显微物镜用于将样品反射的探测光经目镜成像到相机上,所述相机以固定采样频率Fs连续采样形成探测光图像序列。所述非同步宽场式飞秒激光泵浦探测子系统还包括第一透镜和第二透镜,所述第一透镜和第二透镜位于所述显微物镜之前的探测光光路中,用于将探测光束进行预聚焦。所述反射镜组合包括沿泵浦光传播路径依次设置的第一反射镜、第二反射镜和第三反射镜,所述第一反射镜、第二反射镜和第三反射镜使得泵浦光最终到达显微物镜的光输入端。所述相机为sCMOS相机。所述时间延迟调节模块为放置在位移平台的延时装置。所述频率调节模块为斩波器或其他频率调制模块。As shown in FIG2 , the asynchronous wide-field femtosecond laser pump detection subsystem specifically includes a femtosecond laser, a beam splitter, a time delay adjustment module, a frequency doubling crystal, a frequency adjustment module, a reflector assembly, a microscope objective, an eyepiece, and a camera. The beam splitter is located behind the light output end of the femtosecond laser and is used to divide the output beam of the femtosecond laser into detection light and pump light. The reflector assembly is used to turn the propagation direction of the pump light so that the pump light passes through the frequency doubling crystal and the frequency adjustment module in sequence to reach the light input end of the microscope objective. The frequency adjustment module is used to perform frequency modulation on the pump light with a frequency of Fc. The detection light reaches the light input end of the microscope objective via the time delay adjustment module. The sample is located at the focus of the microscope objective. The microscope objective is used to image the detection light reflected by the sample onto the camera via the eyepiece. The camera continuously samples at a fixed sampling frequency Fs to form a detection light image sequence. The asynchronous wide-field femtosecond laser pump detection subsystem also includes a first lens and a second lens, which are located in the detection light path before the microscope objective lens and are used to pre-focus the detection light beam. The reflector assembly includes a first reflector, a second reflector and a third reflector arranged in sequence along the pump light propagation path, and the first reflector, the second reflector and the third reflector enable the pump light to finally reach the light input end of the microscope objective lens. The camera is an sCMOS camera. The time delay adjustment module is a delay device placed on a displacement platform. The frequency adjustment module is a chopper or other frequency modulation module.
非同步宽场式飞秒激光泵浦探测子系统的工作原理为:先引入一束泵浦光脉冲,和一束相对于泵浦光脉冲延迟时间可调的探测光脉冲。其中,泵浦脉冲为平行光,经过斩波器的频率(Fc)调制,成为具有Fc频率的断续信号,并通过显微物镜的紧聚焦到待测样品的表面。而探测光脉冲经过拉长的透镜对后,成为稍稍汇聚的光束,经过显微物镜的聚焦后会在样品前预聚焦,再将聚焦后扩大的光斑覆盖以泵浦为中心的大范围区域。泵浦光和探测光到达样品的时间延迟可以调节,通过不同的时间延迟可以进行时间尺度的超快过程探测。到达样品表面的宽场探测光经过反射后,被显微物镜收集,通过目镜成像到CMOS相机,并使用CMOS相机以频率(Fs)连续采集成图像序列。The working principle of the asynchronous wide-field femtosecond laser pump-detection subsystem is as follows: first, a pump light pulse and a probe light pulse with an adjustable delay time relative to the pump light pulse are introduced. Among them, the pump pulse is a parallel light, which is modulated by the frequency (Fc) of the chopper to become an intermittent signal with a frequency of Fc, and is tightly focused on the surface of the sample to be tested through the microscope objective. After passing through the elongated lens pair, the probe light pulse becomes a slightly convergent light beam, which is pre-focused in front of the sample after being focused by the microscope objective, and then the expanded light spot after focusing covers a large area centered on the pump. The time delay between the pump light and the probe light reaching the sample can be adjusted, and ultrafast process detection on a time scale can be performed through different time delays. After reflection, the wide-field probe light reaching the sample surface is collected by the microscope objective, imaged to the CMOS camera through the eyepiece, and continuously collected into an image sequence at a frequency (Fs) using the CMOS camera.
其中,飞秒激光激光泵浦探测系统中,泵浦和探测脉冲的时间延迟为t,在某一特定时间延迟t下的成像需要连续拍摄s张图像序列,要得到该时间延迟下的超快光谱图像,需要对这s张图像进行信号的提取,生成一整完整的时空分辨超快图像。因此如图3所示,所述时空分辨光谱显微图像重构子系统包括:In the femtosecond laser pump detection system, the time delay between the pump and detection pulses is t. Imaging under a certain time delay t requires continuous shooting of s image sequences. To obtain the ultrafast spectral image under this time delay, it is necessary to extract the signals of these s images to generate a complete time-space resolved ultrafast image. Therefore, as shown in Figure 3, the time-space resolved spectral microscopy image reconstruction subsystem includes:
像素灰度值获取模块,用于获取在特定时间延迟t下拍摄的s张探测光图像,并按拍摄顺序提取每张探测光图像同一像素位置的灰度值,组成一个像素灰度值的数组ai,j(t)={ai,j(t,1),…,ai,j(t,s)},其中,t=1,…,T;i=1,…,m;j=1,…,n,ai,j(t,k)表示时间延迟为t时拍摄的第k张探测光图像的第i行第j列像素位置的灰度值,k=1,…,s,T为时间延迟的测量数量,m、n为探测光图像的行、列像素数;;A pixel grayscale value acquisition module is used to acquire s detection light images taken at a specific time delay t, and extract the grayscale value of the same pixel position of each detection light image in the shooting order to form an array of pixel grayscale values ai,j (t) = { ai,j (t,1), ..., ai,j (t,s)}, where t = 1, ..., T; i = 1, ..., m; j = 1, ..., n, ai,j (t,k) represents the grayscale value of the pixel position of the i-th row and j-th column of the k-th detection light image taken when the time delay is t, k = 1, ..., s, T is the measurement number of the time delay, and m and n are the number of row and column pixels of the detection light image;
幅值相位计算模块,用于按照下式计算幅值和相位:The amplitude and phase calculation module is used to calculate the amplitude and phase according to the following formula:
式中,Ai,j(t)为未矫正显微光谱图像第i行第j列的像素,为相位,|Ai,j(t)|为幅值;Where A i,j (t) is the pixel in the i-th row and j-th column of the uncorrected micro-spectral image, is the phase, |A i,j (t)| is the amplitude;
图像重构模块,用于将未矫正显微光谱图像按照下式矫正,并按照像素位置进行组合,得到每一时间延迟下的显微光谱:The image reconstruction module is used to correct the uncorrected microscopic spectrum image according to the following formula and combine it according to the pixel position to obtain the microscopic spectrum at each time delay:
式中,为时间延迟t下显微光谱第i行第j列的像素,Ai*,j*(t)为选取的参考像素,A*(t)为时间延迟t下显微光谱;In the formula, is the pixel in the i-th row and j-th column of the microscopic spectrum under time delay t, A i*,j* (t) is the selected reference pixel, and A * (t) is the microscopic spectrum under time delay t;
时空分辨显微光谱图像形成模块,用于将所有时间延迟下的显微光谱形成时空分辨超快光谱显微图像序列A*={A*(t)|t=1,…,T}。The time-space resolution micro-spectral image forming module is used to form a time-space resolution ultrafast spectral micro-image sequence A * ={A * (t)|t=1,…,T} from all micro-spectra under time delay.
本发明实施例还提供一种非同步宽场式的超快光谱显微成像方法,包括:The embodiment of the present invention further provides an asynchronous wide-field ultrafast spectral microscopy imaging method, comprising:
步骤S1:产生具有不同时间延迟的泵浦光与探测光,并将泵浦光聚焦在样品表面而探测光预聚焦后在样品表面形成扩大的光斑,以固定采样频率Fs连续采样样品反射的探测光图像,其中,Fs>2Fc,Fc为泵浦光的调制频率;Step S1: Generate pump light and probe light with different time delays, focus the pump light on the sample surface, and form an enlarged light spot on the sample surface after the probe light is pre-focused, and continuously sample the probe light image reflected by the sample at a fixed sampling frequency Fs, where Fs>2Fc, and Fc is the modulation frequency of the pump light;
步骤S2:用于获取泵浦光和探测光同一时间延迟下所有探测光图像,并将所有探测光图像同一像素位置的灰度值,组成一个像素灰度数组,再根据同一时间延迟下各像素位置的像素灰度数组计算得到各像素位置的幅值和相位,并将同一时间延迟下所有像素位置的幅值和相位按照像素位置进行组合,得到每一时间延迟下的显微光谱,最后将所有时间延迟下的显微光谱组合,形成时空分辨超快光谱显微图像序列。Step S2: used to obtain all detection light images under the same time delay of pump light and detection light, and form a pixel grayscale array with the grayscale values of the same pixel position of all detection light images, and then calculate the amplitude and phase of each pixel position according to the pixel grayscale array of each pixel position under the same time delay, and combine the amplitude and phase of all pixel positions under the same time delay according to the pixel position to obtain the microscopic spectrum under each time delay, and finally combine the microscopic spectra under all time delays to form a time-space resolved ultrafast spectral microscopic image sequence.
其中,所述步骤S2具体包括:Wherein, the step S2 specifically includes:
获取在特定时间延迟t下拍摄的s张探测光图像,并按拍摄顺序提取每张探测光图像同一像素位置的灰度值,组成一个像素灰度数组ai,j(t)={ai,j(t,1),…,ai,j(t,s)},t=1,…,T,i=1,…,m,j=1,…,n,ai,j(t,k)表示时间延迟为t时拍摄的第k个探测光图像的第i行第j列像素位置的灰度值,k=1,…,s,T为时间延迟数量,m、n为探测光图像的行、列像素大小,s为探测光图像数量;Obtain s detection light images taken at a specific time delay t, and extract the grayscale value of the same pixel position of each detection light image in the shooting order to form a pixel grayscale array ai ,j (t)={ ai,j (t,1),…, ai,j (t,s)}, t=1,…,T, i=1,…,m, j=1,…,n, ai ,j (t,k) represents the grayscale value of the pixel position of the i-th row and j-th column of the k-th detection light image taken when the time delay is t, k=1,…,s, T is the number of time delays, m and n are the row and column pixel sizes of the detection light image, and s is the number of detection light images;
按照下式计算幅值和相位:Calculate the magnitude and phase as follows:
式中,Ai,j(t)为未矫正显微光谱图像第i行第j列的像素,为相位,|Ai,j(t)|为幅值;Where A i,j (t) is the pixel in the i-th row and j-th column of the uncorrected micro-spectral image, is the phase, |A i,j (t)| is the amplitude;
将未矫正显微光谱图像按照下式矫正,并按照像素位置进行组合,得到每一时间延迟下的显微光谱:The uncorrected microscopic spectrum image is corrected according to the following formula and combined according to the pixel position to obtain the microscopic spectrum at each time delay:
式中,为时间延迟t下显微光谱第i行第j列的像素,Ai*,j*(t)为选取的参考像素,A*(t)为时间延迟t下显微光谱;In the formula, is the pixel in the i-th row and j-th column of the microscopic spectrum under time delay t, A i*,j* (t) is the selected reference pixel, and A * (t) is the microscopic spectrum under time delay t;
将所有时间延迟下的显微光谱形成时空分辨超快光谱显微图像序列A*={A*(t)|t=1,…,T}。The microscopic spectra under all time delays are combined to form a temporally and spatially resolved ultrafast spectral microscopic image sequence A * ={A * (t)|t=1,…,T}.
下面采用一个具体的例子进行实验。实验中,飞秒激光器为重复频率80MHz的钛宝石飞秒激光器(脉宽约100fs),输出波长为800nm;采用数值孔径0.4的显微物镜;光学斩波器调制泵浦激光,斩波频率约为Fc=4Hz;采用sCMOS相机采集数据,采集频率为Fs=24Hz。样品为多层MoSe2纳米薄膜样品,实验目的为对样品的载流子扩散过程成像,从而可用光学方法测量其载流子迁移率这一电子学参数。首先,在光学玻璃衬底上,通过机械剥离制备出多层的MoSe2样品,并测量其微区光学吸收光谱,激子共振峰约在800nm波长处。选用400nm飞秒激光作为泵浦脉冲,800nm飞秒激光作为探测脉冲,如图4所示。保持泵浦脉冲平行进入显微物镜,聚焦于多层MoSe2表面,并使用光学斩波器对泵浦光进行4Hz(Fc=4Hz)的频率调制,调节泵浦脉冲的功率约为150uW。探测脉冲经过被拉长的第一透镜和第二透镜后,为汇聚状态,汇聚状态的探测脉冲进入显微物镜,在样品前预聚焦后使扩大光斑照射在样品上。显微物镜收集反射回的探测脉冲,经过长通滤光片滤除杂光后,由目镜成像在CMOS相机上。选取CMOS相机上的成像区域,控制采样频率为24Hz(Fs=24Hz),单个t时刻采集图像序列为2000张(s=2000)。经过对泵浦和探测激光的准直、聚焦等条件和目镜位置的进一步优化,使信号最佳。此时,进行时间扫描,采集不同超快时刻(t)对应的一系列图像序列。分别在每个时间延迟的t时刻下,对所得到的s=2000张图像,并按照拍摄顺序组合形成时序序列,再通过对图像序列的4Hz斩波频率提取,重建出时空分辨超快光谱显微图像序列。由于MoSe2为各向同性材料,可以取出一行的像素灰度值形成二维高斯分布图。在0ps时刻的时空分辨显微光谱如图5的(a)所示,拟合高斯分布的标准差σ,如图5的(b)所示。做出σ2与时间延迟t的图像如图6所示,使用线性曲线拟合σ2(t)=σ0 2+2Dt,得到载流子的扩散系数D=2.43cm2/s,进而由爱因斯坦关系进一步计算得到293K下载流子迁移率为μ=96.07cm2·V-1·s-1。The following is an experiment using a specific example. In the experiment, the femtosecond laser is a titanium sapphire femtosecond laser with a repetition frequency of 80MHz (pulse width of about 100fs) and an output wavelength of 800nm; a microscope objective with a numerical aperture of 0.4 is used; an optical chopper modulates the pump laser, and the chopping frequency is about Fc=4Hz; an sCMOS camera is used to collect data, and the acquisition frequency is Fs=24Hz. The sample is a multilayer MoSe2 nanofilm sample. The purpose of the experiment is to image the carrier diffusion process of the sample, so that its carrier mobility, an electronic parameter, can be measured by optical methods. First, a multilayer MoSe2 sample is prepared on an optical glass substrate by mechanical peeling, and its micro-area optical absorption spectrum is measured. The exciton resonance peak is about 800nm wavelength. A 400nm femtosecond laser is selected as the pump pulse, and an 800nm femtosecond laser is used as the detection pulse, as shown in Figure 4. Keep the pump pulse parallel to the microscope objective, focus on the multilayer MoSe 2 surface, and use an optical chopper to modulate the pump light at 4Hz (Fc=4Hz), and adjust the power of the pump pulse to about 150uW. After the detection pulse passes through the elongated first lens and second lens, it is in a convergent state. The convergent detection pulse enters the microscope objective, and after pre-focusing in front of the sample, the expanded light spot is irradiated on the sample. The microscope objective collects the reflected detection pulse, and after filtering out stray light through a long-pass filter, it is imaged on the CMOS camera through the eyepiece. Select the imaging area on the CMOS camera, control the sampling frequency to 24Hz (Fs=24Hz), and collect 2000 images (s=2000) at a single time t. After further optimization of the collimation, focusing and other conditions of the pump and detection lasers and the position of the eyepiece, the signal is optimized. At this time, time scanning is performed to collect a series of image sequences corresponding to different ultrafast times (t). At each time delay t, the obtained s=2000 images are combined in the shooting order to form a time sequence, and then the 4Hz chopping frequency of the image sequence is extracted to reconstruct the time-space resolved ultrafast spectral microscopy image sequence. Since MoSe2 is an isotropic material, the grayscale value of a row of pixels can be taken out to form a two-dimensional Gaussian distribution map. The time-space resolved microscopic spectrum at 0ps is shown in Figure 5(a), and the standard deviation σ of the fitted Gaussian distribution is shown in Figure 5(b). The image of σ2 and time delay t is shown in Figure 6. Using linear curve fitting σ2 (t)= σ02 +2Dt, the carrier diffusion coefficient D= 2.43cm2 /s is obtained, and then from the Einstein relationship Further calculations revealed that the carrier mobility at 293K was μ=96.07 cm 2 ·V -1 ·s -1 .
需要说明的是,本发明的说明书和权利要求书及上述附图中的术语“第一”、“第二”等是用于区别不同对象,而不是用于描述特定顺序。在本文中提及“实施例”意味着,结合实施例描述的特定特征、结构或特性可以包含在本发明的至少一个实施例中。在说明书中的各个位置出现该短语并不一定均是指相同的实施例,也不是与其它实施例互斥的独立的或备选的实施例。本领域技术人员显式地和隐式地理解的是,本文所描述的实施例可以与其它实施例相结合。It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish different objects rather than to describe a specific order. The reference to "embodiment" in this article means that the specific features, structures or characteristics described in conjunction with the embodiment may be included in at least one embodiment of the present invention. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.
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