CN118402171A - High frequency power supply device and high frequency power output control method - Google Patents
High frequency power supply device and high frequency power output control method Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
- H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
- H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
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- H—ELECTRICITY
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- H02M1/00—Details of apparatus for conversion
- H02M1/0003—Details of control, feedback or regulation circuits
- H02M1/0032—Control circuits allowing low power mode operation, e.g. in standby mode
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- H02M1/00—Details of apparatus for conversion
- H02M1/0043—Converters switched with a phase shift, i.e. interleaved
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0048—Circuits or arrangements for reducing losses
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
- H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
- H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/493—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode the static converters being arranged for operation in parallel
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
- H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
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- H02M7/497—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode sinusoidal output voltages being obtained by combination of several voltages being out of phase
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- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
- H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
- H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/538—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a push-pull configuration
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Abstract
在使高频脉冲输出的输出电力成为可变的高频电力控制中,根据输出电平的输出电平范围,区分使用直流电压控制和相位差控制,由此减轻在高频电源装置的电源内部被消耗的内部损失所导致的电力转换效率的下降。直流电压控制通过控制供给至放大器的直流电压来控制输出电力。相位差控制通过控制放大器的多个控制信号的相位差φ来控制输出电力。在输出电平范围为高输出电平范围时,通过直流电压控制来控制输出电力,在输出电平范围为低输出电平范围时,通过相位差来控制输出电力。
In high-frequency power control that makes the output power of high-frequency pulse output variable, DC voltage control and phase difference control are used according to the output level range of the output level, thereby reducing the decrease in power conversion efficiency caused by internal losses consumed inside the power supply of the high-frequency power supply device. DC voltage control controls the output power by controlling the DC voltage supplied to the amplifier. Phase difference control controls the output power by controlling the phase difference φ of multiple control signals of the amplifier. When the output level range is a high output level range, the output power is controlled by DC voltage control, and when the output level range is a low output level range, the output power is controlled by phase difference.
Description
技术领域Technical Field
本发明关于高频电源装置和高频电力的输出控制方法,并关于以2电平以上的多个阶段输出高频的脉冲输出的高频电源装置、以及以多个阶段的输出电平和输出高频的脉冲输出的方法。The present invention relates to a high-frequency power supply device and a method for controlling the output of high-frequency power, and to a high-frequency power supply device that outputs high-frequency pulse output in multiple stages with more than two levels, and a method for outputting high-frequency pulse output in multiple stages of output levels.
背景技术Background technique
在高频电源装置中,以高频放大器对高频信号进行电力放大而输出高频的脉冲输出。输出为1kw以上且频率范围为27MHz~100MHz的高频的脉冲输出是被应用于例如半导体制造装置或平面面板显示器(液晶面板、有机面板)制造装置、太阳光面板制造装置、CO2激光加工机等的产业用途。In a high-frequency power supply device, a high-frequency amplifier is used to amplify the power of a high-frequency signal to output a high-frequency pulse output. The high-frequency pulse output with an output of more than 1 kW and a frequency range of 27 MHz to 100 MHz is used in industrial applications such as semiconductor manufacturing equipment or flat panel display (liquid crystal panel, organic panel) manufacturing equipment, solar panel manufacturing equipment, CO2 laser processing machines, etc.
在半导体制造过程中,以如将高频电源装置的脉冲输出设为高(High)和低(Low)的2电平、或者高(High)和低(Low)和零(Zero)的3电平的方式,切换成多个阶段而输出的多电平脉冲功能的需求变高。In the semiconductor manufacturing process, there is an increasing demand for a multi-level pulse function that switches the output into multiple stages, such as setting the pulse output of a high-frequency power supply device to 2 levels of high (High) and low (Low), or 3 levels of high (High), low (Low) and zero (Zero).
另外,从减少制造成本的生产率的观点、以及减少CO2所导致的环境的观点来看,存在要求高效率的电力转换效率的倾向。In addition, from the viewpoint of productivity to reduce manufacturing costs and from the viewpoint of environmental reduction due to CO 2 , there is a trend of demanding high power conversion efficiency.
在放大器中,晶体管的瞬时消耗电力是以瞬时电流与瞬时电压的积表示,瞬时消耗电力的RF-周期积分值的时间平均成为晶体管的时间平均消耗电力。In the amplifier, the instantaneous power consumption of the transistor is represented by the product of the instantaneous current and the instantaneous voltage, and the time average of the RF-cycle integrated value of the instantaneous power consumption becomes the time average power consumption of the transistor.
A级放大器是晶体管的漏极端子中的电流和电压彼此反相的正弦波,在A级动作中,电流、电压波形的重叠部分大。因此,放大器的效率低。B级动作是将漏极电流通过偏压设为半波整流波形,将漏极电压设为正弦波电压。在将漏极电压设为正弦波电压的B级动作中,虽然电流、电压波形的的重叠部分变小,但是重叠未消失。对于放大器的高效率化,在漏极电压和漏极电流的关系中,要求设为瞬时电压和瞬时电流同时不存在的状态。A class amplifier is a sine wave in which the current and voltage at the drain terminal of the transistor are in opposite phases. In class A operation, the overlap of the current and voltage waveforms is large. Therefore, the efficiency of the amplifier is low. Class B operation is to set the drain current to a half-wave rectified waveform through a bias voltage and set the drain voltage to a sine wave voltage. In class B operation in which the drain voltage is set to a sine wave voltage, although the overlap of the current and voltage waveforms becomes smaller, the overlap does not disappear. In order to improve the efficiency of the amplifier, in the relationship between the drain voltage and the drain current, it is required to set it to a state where both the instantaneous voltage and the instantaneous current do not exist at the same time.
作为放大器的效率化的方式,已知有D级放大、F级放大、EF级放大的开关模式所导致的电力放大。已知D级放大器是通过时间区域的电压、电流关系来实现高效率化,F级放大器、EF级放大器通过频率区域的电压、电流关系来实现高效率化。As a method of improving the efficiency of amplifiers, power amplification by switching modes of class D amplification, class F amplification, and class EF amplification is known. It is known that class D amplifiers achieve high efficiency through the relationship between voltage and current in the time domain, and class F amplifiers and class EF amplifiers achieve high efficiency through the relationship between voltage and current in the frequency domain.
作为控制开关模式方式的放大器的脉冲输出的方式,以往,已知将输入至放大器的直流的输入电压设为可变的直流电压控制、和对驱动开关元件的栅极信号的脉冲宽度进行控制的PWM控制。Conventionally, known methods for controlling pulse output of a switch mode amplifier include DC voltage control for making a DC input voltage to the amplifier variable and PWM control for controlling the pulse width of a gate signal for driving a switching element.
在直流电压控制中,由于是将输入电压设为可变而驱动DC/DC转换器的结构,因此除了小型化或轻量化的问题外,存在电力转换效率也较低的问题。为了解决这样的直流电压控制的问题,提出了使用相位位移控制的电源装置(专利文献1)。In DC voltage control, since the input voltage is set to be variable to drive the DC/DC converter, in addition to the problem of miniaturization or lightness, there is also the problem of low power conversion efficiency. In order to solve such problems of DC voltage control, a power supply device using phase shift control is proposed (Patent Document 1).
另外,在PWM控制中,存在由于DC/DC转换器的开关元件的动作能力无法追随高频,而因此难以进行在高频区域的控制的问题。为了解决在该高频区域中的控制的问题,提出了使用相位位移控制的电源装置(专利文献2)。In addition, in PWM control, there is a problem that the operation capability of the switching element of the DC/DC converter cannot follow the high frequency, so it is difficult to perform control in the high frequency region. In order to solve the control problem in this high frequency region, a power supply device using phase shift control is proposed (Patent Document 2).
现有技术文献Prior art literature
专利文献Patent Literature
专利文献1:国际公开第2015/097812号Patent Document 1: International Publication No. 2015/097812
专利文献2:日本特开平6-37375号公报Patent Document 2: Japanese Patent Application Laid-Open No. 6-37375
发明内容Summary of the invention
发明所要解决的课题Problems to be solved by the invention
在通过相位位移控制而控制高频的脉冲输出的方式中,对放大部供给恒定的直流电压,通过在高侧的第1规定值和低侧的第2规定值之间切换两个放大部间的相位差φ,输出两个输出电平的脉冲输出。In a method of controlling high-frequency pulse output by phase shift control, a constant DC voltage is supplied to the amplifier, and a pulse output of two output levels is output by switching the phase difference φ between the two amplifiers between a first predetermined value on the high side and a second predetermined value on the low side.
在相位位移控制中,以合成器合成两个放大器的输出时,通过将两个放大器间的相位差φ设为可变来调整输出电力。此时,通过被安装于电源内部的合成器的虚拟电阻产生内部损失。In phase shift control, when the outputs of two amplifiers are combined by a combiner, the output power is adjusted by making the phase difference φ between the two amplifiers variable. At this time, internal loss occurs due to the virtual resistance of the combiner installed inside the power supply.
相位位移控制存在由于在电源内部消耗的内部损失而电力转换效率较低的问题。将两个放大器间的相位差φ设为输出高侧电力的第1规定值区域(0[deg]~90[deg])和输出低侧电力的第2规定值区域(90[deg]~180[deg]),在进行输出电平的切换的情况下,在第1规定值区域中相位差φ为0[deg]以外的相位差中,不被传送至输出侧的差分功率作为内部损失而在电源内部被消耗。另外,在第2规定值区域的相位差φ中,内部损失比输出电力多,高频电源装置整体的电力转换效率成为50%以下。Phase shift control has a problem of low power conversion efficiency due to internal losses consumed inside the power supply. The phase difference φ between the two amplifiers is set to the first specified value range (0 [deg] ~ 90 [deg]) for outputting high-side power and the second specified value range (90 [deg] ~ 180 [deg]) for outputting low-side power. When switching the output level, in the phase difference other than 0 [deg] in the first specified value range, the differential power not transmitted to the output side is consumed inside the power supply as internal loss. In addition, in the phase difference φ in the second specified value range, the internal loss is greater than the output power, and the overall power conversion efficiency of the high-frequency power supply device becomes less than 50%.
因此,在进行相位位移控制的高频电源装置中,存在由于在电源内部被消耗的内部损失而电力转换效率较低的问题。该问题在生产率下降所导致的制造成本的方面、和减少CO2所导致的环境考虑的方面等中也将产生不希望的影响。Therefore, in a high frequency power supply device that performs phase shift control, there is a problem of low power conversion efficiency due to internal losses consumed within the power supply. This problem will also have undesirable effects on manufacturing costs due to reduced productivity and environmental considerations due to CO2 reduction.
本发明解决上述现有的问题,其目的在于,在高频电源装置及高频电力的输出控制方法中,减轻在高频电源装置的电源内部被消耗的内部损失所导致的电力转换效率的下降。The present invention solves the above-mentioned conventional problems and aims to reduce the decrease in power conversion efficiency caused by internal loss consumed inside the power supply of a high-frequency power supply device in a high-frequency power supply device and a high-frequency power output control method.
用于解决问题的手段Means used to solve problems
本发明在使高频脉冲输出的输出电力成为可变的高频电力控制中,根据输出电平的输出电平范围,通过区分使用直流电压控制和相位差控制,来减轻在高频电源装置的电源内部被消耗的内部损失所导致的电力转换效率的下降。The present invention reduces the decrease in power conversion efficiency caused by internal losses consumed inside the power supply of the high-frequency power supply device by distinguishing between the use of DC voltage control and phase difference control according to the output level range of the output level in the high-frequency power control that makes the output power of the high-frequency pulse output variable.
直流电压控制通过控制供给至放大器的直流电压来控制输出电力。另一方面,相位差控制通过控制放大器的多个控制信号的相位差φ来控制输出电力。The DC voltage control controls the output power by controlling the DC voltage supplied to the amplifier. On the other hand, the phase difference control controls the output power by controlling the phase difference φ of a plurality of control signals of the amplifier.
本发明在输出电平为高输出电平范围时,通过直流电压控制来控制输出电力,在输出电平为低输出电平范围时,通过相位差控制来控制输出电力。The present invention controls the output power by direct current voltage control when the output level is in a high output level range, and controls the output power by phase difference control when the output level is in a low output level range.
在直流电压控制所导致的输出电力的控制中,在高输出电平范围中,设为将相位差控制中的相位差φ(φd,φs)固定的状态,使供给至放大器的直流电压Vdc成为可变。由于直流电压控制不存在高频电源装置的内部的虚拟电阻所导致的消耗电力,因此在电源内部被消耗的内部损失及电力的低转换效率的问题将被解决,从而实现高效率化。存在为了使直流电压控制对应于输出电平的全范围而需要使装置大型化的缺点。In the control of the output power by the DC voltage control, in the high output level range, the phase difference φ (φd, φs) in the phase difference control is set to a fixed state, and the DC voltage Vdc supplied to the amplifier is made variable. Since the DC voltage control does not consume power due to the internal virtual resistance of the high-frequency power supply device, the internal loss consumed in the power supply and the low conversion efficiency of the power are solved, thereby achieving high efficiency. There is a disadvantage that the device needs to be enlarged in order to make the DC voltage control correspond to the full range of the output level.
另一方面,相位差控制所导致的输出电力的控制将所控制的输出电平限制在低输出电平范围。由此,流过高频电源装置的虚拟电阻的输出电平被抑制为低电平,因此在虚拟电阻产生的内部损失减少,从而实现高效率化。On the other hand, the output power control by phase difference control limits the controlled output level to a low output level range. As a result, the output level flowing through the virtual resistor of the high frequency power supply device is suppressed to a low level, so the internal loss generated in the virtual resistor is reduced, thereby achieving high efficiency.
本发明的相位差控制包含两个控制。The phase difference control of the present invention includes two controls.
第1相位差控制是通过作为控制信号间的相位差的控制信号间相位差φd来调制脉冲宽度的PWM控制。通过PWM控制,将驱动开关元件的脉冲信号的占空比(Duty)设为可变。在该第1相位差控制(PWM控制)中,由于没有高频电源装置的虚拟电阻所导致的内部损失,因此实现高效率化。The first phase difference control is a PWM control that modulates the pulse width by the phase difference φd between the control signals as the phase difference between the control signals. Through PWM control, the duty ratio (Duty) of the pulse signal driving the switching element is set to be variable. In this first phase difference control (PWM control), since there is no internal loss caused by the virtual resistance of the high-frequency power supply device, high efficiency is achieved.
第2相位差控制是将输入至两个放大器的各放大器的一对控制信号设为一组,将输入至两个放大器的控制信号的组间的相位差设为控制信号组间相位差φs,并使该控制信号组间相位差φs位移的相位位移控制(PS控制)。通过相位位移控制,控制合成两个放大器的输出而得到的输出电力。在该相位位移控制(PS控制)中,会在虚拟电阻产生损失。The second phase difference control is a phase shift control (PS control) in which a pair of control signals input to each amplifier of the two amplifiers is set as one group, the phase difference between the control signal groups input to the two amplifiers is set as the control signal group phase difference φs, and the control signal group phase difference φs is shifted. The output power obtained by synthesizing the outputs of the two amplifiers is controlled by the phase shift control. In this phase shift control (PS control), a loss is generated in the virtual resistor.
相位差控制在低输出电平范围中,通过输出电平的高低并根据输出电平来区分使用第1相位差控制的PWM控制和第2相位差控制的相位位移控制(PS控制)。The phase difference control distinguishes between PWM control using the first phase difference control and phase shift control (PS control) using the second phase difference control by the high and low output levels in the low output level range according to the output levels.
在区分使用PWM控制和相位位移控制(PS控制)的方式中,将低输出电平范围分为高电平侧和低电平侧,在高电平侧,通过PWM控制使输出电力成为可变,在低电平侧,通过相位位移控制(PS控制)使输出电力成为可变。In the method of distinguishing between the use of PWM control and phase shift control (PS control), the low output level range is divided into a high level side and a low level side. On the high level side, the output power is made variable through PWM control, and on the low level side, the output power is made variable through phase shift control (PS control).
相位位移控制(PS控制)具有由于在电源内部被消耗的内部损失而电力转换效率变低的特性。鉴于该特性,在本发明中,相较于输出电力,通过在内部损失的比率变大的低电平侧应用相位位移控制(PS控制),由此相较于将相位位移控制应用于高电平的情况,可以缩小内部损失的损失量。Phase shift control (PS control) has a characteristic that the power conversion efficiency becomes low due to the internal loss consumed inside the power supply. In view of this characteristic, in the present invention, by applying phase shift control (PS control) on the low-level side where the ratio of internal loss becomes larger than the output power, the loss amount of internal loss can be reduced compared to the case where phase shift control is applied to the high level.
通过区分使用PWM控制和相位位移控制(PS控制)的方式,可以将能够控制的输出电平的范围扩展至低电平侧,减少在输出电平范围的全范围内的内部损失,从而实现高效率化。By using PWM control and phase shift control (PS control) separately, the range of controllable output levels can be expanded to the low level side, reducing internal losses within the entire output level range, thereby achieving high efficiency.
本发明所导致的直流电压控制及相位差控制在各输出电平范围内使输出电力连续地可变。而且,在从直流电压控制向相位差控制或者从相位差控制向直流电压控制的控制间的切换时刻,通过使两控制的端部的输出电平相配合,由此输出电力在输出电平的全范围内不会不连续而是连续地成为可变。The DC voltage control and phase difference control of the present invention make the output power continuously variable within each output level range. Moreover, at the switching time between the DC voltage control and the phase difference control or from the phase difference control to the DC voltage control, the output levels at the ends of the two controls are matched, so that the output power is continuously variable within the full range of the output level without being discontinuous.
本发明具备(A)高频电源装置的方式以及(B)高频电力的输出控制方法的方式。The present invention includes (A) an aspect of a high-frequency power supply device and (B) an aspect of a method for controlling output of high-frequency power.
(A)高频电源装置的方式(A) High frequency power supply device
本发明的高频电源装置的方式具备:一对放大器;合成器,其合成一对放大器的放大器输出而生成高频脉冲的输出电力。控制输出电力的控制部具备:第1控制部,其通过控制供给至一对放大器的直流电压Vdc的直流电压控制来控制输出电力;第2控制部,其通过控制一对放大器的放大器输出的控制信号的相位差φ(φd、φs)来对输出电力进行相位差控制。根据输出电力的输出电平,切换基于第1控制部的直流电压控制和基于第2控制部的相位差控制。The high-frequency power supply device of the present invention comprises: a pair of amplifiers; a synthesizer that synthesizes the amplifier outputs of the pair of amplifiers to generate high-frequency pulse output power. The control unit that controls the output power comprises: a first control unit that controls the output power by controlling the DC voltage Vdc supplied to the pair of amplifiers; and a second control unit that performs phase difference control on the output power by controlling the phase difference φ (φd, φs) of the control signals output by the amplifiers of the pair of amplifiers. According to the output level of the output power, the DC voltage control based on the first control unit and the phase difference control based on the second control unit are switched.
本发明的高频电源装置是作为构成第1控制部及第2控制部的要素,具备:一对放大器;合成器,其合成一对放大器的各放大器输出而生成高频脉冲的输出电力;电力控制部,其在高频脉冲输出的输出电力的控制中,运算用于直流电压控制的直流电压指令值Vref*和用于相位差控制的相位差指令值φ*(φd*,φs*);直流电压控制部,其根据直流电压指令值Vref*对供给至一对放大器的直流电压Vdc进行直流电压控制;控制信号生成部,其生成根据相位差指令值φ*(φd*、φs*)对一对放大器进行相位差控制的控制信号。The high-frequency power supply device of the present invention is an element constituting a first control unit and a second control unit, and comprises: a pair of amplifiers; a synthesizer, which synthesizes the outputs of each amplifier of the pair of amplifiers to generate output power of a high-frequency pulse; a power control unit, which calculates a DC voltage command value Vref* for DC voltage control and a phase difference command value φ* (φd*, φs*) for phase difference control in controlling the output power of the high-frequency pulse output; a DC voltage control unit, which performs DC voltage control on a DC voltage Vdc supplied to a pair of amplifiers according to the DC voltage command value Vref*; and a control signal generating unit, which generates a control signal for performing phase difference control on a pair of amplifiers according to the phase difference command value φ* (φd*, φs*).
电力控制部在输出电力的输出电平中,The power control unit outputs the power at an output level.
(a)针对高输出电平范围,运算直流电压控制的直流电压指令值Vref*,(a) For the high output level range, the DC voltage command value Vref* for DC voltage control is calculated.
(b)针对低输出电平范围,运算相位差控制的相位差指令值φ*(φd*、φs*),并根据输出电力的输出电平,切换直流电压控制和相位差控制而控制输出电力。(b) For the low output level range, the phase difference command value φ* (φd*, φs*) for the phase difference control is calculated, and the output power is controlled by switching between the DC voltage control and the phase difference control according to the output level of the output power.
进行直流电压控制的第1控制部由在电力控制部的内运算直流电压指令值Vref*的直流电压运算部和根据直流电压指令值Vref*进行直流电压控制的直流电压控制部构成。进行相位差控制的第2控制部由在电力控制部的内运算相位差指令值φ*(φd*,φs*)的相位差运算部和根据相位差指令值φ*(φd*,φs*)生成具有相位差φ(φd,φs)的控制信号的控制信号生成部构成。The first control unit for performing DC voltage control is composed of a DC voltage calculation unit for calculating a DC voltage command value Vref* in the power control unit and a DC voltage control unit for performing DC voltage control based on the DC voltage command value Vref*. The second control unit for performing phase difference control is composed of a phase difference calculation unit for calculating a phase difference command value φ*(φd*, φs*) in the power control unit and a control signal generation unit for generating a control signal having a phase difference φ(φd, φs) based on the phase difference command value φ*(φd*, φs*).
虽然用于本发明的控制信号可以使用单端信号或差动信号,但是在高频区域中优选差动信号。在以超过数十Mhz~100Mhz的高频来驱动放大器的开关元件的情况下,为了准确地传送相位差或占空比信息需要抑制信号的噪声。在单端信号中,难以满足这样的耐噪声的要求,对此,由于一对信号的相位处于彼此反相关系的差动信号的耐噪性高,因此优选为控制高频脉冲输出的控制信号。Although the control signal used in the present invention can use a single-ended signal or a differential signal, a differential signal is preferred in the high-frequency region. When the switching element of the amplifier is driven at a high frequency exceeding tens of MHz to 100 MHz, it is necessary to suppress the noise of the signal in order to accurately transmit the phase difference or duty cycle information. It is difficult to meet such noise resistance requirements in a single-ended signal. In this regard, since a differential signal in which the phases of a pair of signals are in an anti-phase relationship with each other has high noise resistance, it is preferred to be a control signal for controlling the high-frequency pulse output.
(1)电力控制部(1) Power control unit
电力控制部根据输出电力指令值来判定输出电力的输出电平,根据输出电平的高低来判定是否应用直流电压控制和相位差控制中的哪一个控制,根据输出电平在高输出电平范围还是在低输出电平范围来切换直流电压控制和相位差控制。The power control unit determines the output level of the output power based on the output power command value, determines whether to apply DC voltage control or phase difference control based on the output level, and switches between DC voltage control and phase difference control based on whether the output level is in a high output level range or a low output level range.
电力控制部根据输出电力指令值FWD_ref*与输出电力反馈值FWD_FB的差量,在输出电平为高输出电平范围时进行直流电压控制,在低输出电平范围时进行相位差控制。The power control unit performs DC voltage control when the output level is in a high output level range, and performs phase difference control when the output level is in a low output level range, based on the difference between the output power command value FWD_ref* and the output power feedback value FWD_FB.
(a)在高输出电平范围,通过直流电压控制根据输出电力指令值FWD_ref*与输出电力反馈值FWD_FB的差量,运算直流电压指令值Vref*。直流电压指令值Vref*是施加于大器的直流电压Vdc的基准电压,通过对放大器施加直流电压Vdc,放大器输出基于直流电压指令值Vref*的输出电力FWD。(a) In the high output level range, the DC voltage command value Vref* is calculated based on the difference between the output power command value FWD_ref* and the output power feedback value FWD_FB by DC voltage control. The DC voltage command value Vref* is a reference voltage for the DC voltage Vdc applied to the amplifier. By applying the DC voltage Vdc to the amplifier, the amplifier outputs the output power FWD based on the DC voltage command value Vref*.
(b)在低输出电平范围,通过相位差控制根据输出电力指令值FWD_ref*与输出电力反馈值FWD_FB的差量,运算相位差指令值φ*(φd*,φs*)。相位差指令值φ*(φd*,φs*)被用作用于在控制信号生成部基于相位差指令值φ*来生成控制信号的操作量,通过以基于相位差φ(φd,φs)的控制信号的驱动信号来驱动放大器,由此放大器根据输出电力指令值FWD_ref*来将输出电力FWD输出。(b) In the low output level range, the phase difference command value φ* (φd*, φs*) is calculated based on the difference between the output power command value FWD_ref* and the output power feedback value FWD_FB by phase difference control. The phase difference command value φ* (φd*, φs*) is used as an operation amount for generating a control signal based on the phase difference command value φ* in the control signal generating unit, and the amplifier is driven by a drive signal of the control signal based on the phase difference φ (φd, φs), so that the amplifier outputs the output power FWD according to the output power command value FWD_ref*.
(2)直流电压控制部(2) DC voltage control unit
直流电压控制部是在高输出电平范围中,使根据通过电力控制部的直流电压控制得到的直流电压指令值Vref*而供给至放大器的直流电压Vdc成为可变,由此控制放大器的输出电力。The DC voltage control unit controls the output power of the amplifier by making variable the DC voltage Vdc supplied to the amplifier according to the DC voltage command value Vref* obtained by the DC voltage control of the power control unit in the high output level range.
直流电压控制部根据反馈电压Vdc_FB与直流电压指令值Vref*的差分,求出用于以使施加于放大器的直流电压Vdc与直流电压指令值Vref*一致的方式进行控制的操作量α,通过操作量α,控制放大器的AD/DC转换器而使直流电压Vdc成为可变的AD/DC转换器。通过基于直流电压指令值Vref*的操作量α来控制该AD/DC转换器,由此控制直流电压Vdc的输出电压。The DC voltage control unit obtains an operation amount α for controlling the DC voltage Vdc applied to the amplifier to be consistent with the DC voltage command value Vref* based on the difference between the feedback voltage Vdc_FB and the DC voltage command value Vref*, and controls the AD/DC converter of the amplifier to make the DC voltage Vdc a variable AD/DC converter by the operation amount α. The output voltage of the DC voltage Vdc is controlled by controlling the AD/DC converter based on the operation amount α of the DC voltage command value Vref*.
(3)控制信号生成部(3) Control signal generation unit
控制信号生成部在低输出电平范围中根据通过电力控制部的相位差控制而得到的相位差指令值φ*(φd*,φs*)来控制输入至两个放大器的一对控制信号的相位差φ(φd,φs)。控制信号的相位差φ(φd,φs)对应于通过电力控制部的相位差控制而得到的相位差指令值φ*(φd*,φs*)。The control signal generating unit controls the phase difference φ(φd, φs) of a pair of control signals input to the two amplifiers in accordance with the phase difference command value φ*(φd*, φs*) obtained by the phase difference control of the power control unit in the low output level range. The phase difference φ(φd, φs) of the control signal corresponds to the phase difference command value φ*(φd*, φs*) obtained by the phase difference control of the power control unit.
此外,在使用差动信号作为控制信号的情况下,由于一个差动信号是由处于反相关系的P信号和N信号的一对信号构成,因此输入至各放大器的具有相位差φ的一对控制信号由共计两对的4个信号构成。When a differential signal is used as a control signal, one differential signal is composed of a pair of signals, a P signal and an N signal, which are in an anti-phase relationship. Therefore, a pair of control signals having a phase difference φ input to each amplifier is composed of a total of two pairs of four signals.
相位差控制包含电力控制部进行的相位差指令值φ*(φd*,φs*)的运算和控制信号生成部进行的基于相位差指令值φ*(φd*,φs*)的相位差φ(φd,φs)的控制信号的生成。控制信号生成部根据由电力控制部运算出的相位差指令值φ*(φd*,φs*)而生成具有相位差φ(φd,φs)的控制信号。The phase difference control includes calculation of the phase difference command value φ*(φd*, φs*) by the power control unit and generation of a control signal having a phase difference φ(φd, φs) based on the phase difference command value φ*(φd*, φs*) by the control signal generation unit. The control signal generation unit generates a control signal having a phase difference φ(φd, φs) based on the phase difference command value φ*(φd*, φs*) calculated by the power control unit.
因此,本发明的相位差控制由基于电力控制部的相位差指令值φ*(φd*,φs*)的运算和根据相位差指令值φ*(φd*,φs*)而进行的基于控制信号生成部的具有相位差φ(φd,φs)的控制信号的生成构成。Therefore, the phase difference control of the present invention is composed of the calculation of the phase difference command value φ*(φd*, φs*) based on the power control unit and the generation of a control signal with a phase difference φ(φd, φs) based on the phase difference command value φ*(φd*, φs*) by the control signal generating unit.
作为被应用于基于相位差运算部及控制信号生成部的相位差控制的控制方式,具有(a)PWM控制(占空比控制)的控制方式、以及(b)相位位移控制(PS控制)。As control methods applied to the phase difference control by the phase difference calculation unit and the control signal generation unit, there are (a) PWM control (duty ratio control) and (b) phase shift control (PS control).
控制信号生成部具备通过PWM控制及相位位移控制(PS控制)的相位差控制生成控制信号的功能,在低输出电平范围,根据在电力控制部的相位差运算中求出的相位差指令值φ*(φd*,φs*)生成具有相位差φ(φd,φs)的控制信号。由控制信号生成部生成的控制信号在驱动器中被转换成栅极信号,对放大器的开关元件进行驱动控制而控制输出电力。The control signal generating unit has a function of generating a control signal through phase difference control of PWM control and phase shift control (PS control), and generates a control signal having a phase difference φ(φd, φs) in a low output level range according to the phase difference command value φ*(φd*, φs*) obtained in the phase difference calculation of the power control unit. The control signal generated by the control signal generating unit is converted into a gate signal in the driver, and the switching element of the amplifier is driven and controlled to control the output power.
相位差控制具备多个种类的控制方式。There are many types of phase difference control methods.
(a)相位差控制的第1控制方式。(a) The first control method of phase difference control.
相位差控制的第1控制方式为基于PWM控制(占空比控制)的控制方式。在低输出电平范围内,针对高输出电平侧的输出电力,通过PWM控制使用控制信号间相位差指令值φd*并通过PWM控制生成具有控制信号间相位差φd的控制信号,控制输出电力。The first control method of phase difference control is a control method based on PWM control (duty cycle control). In the low output level range, for the output power on the high output level side, the control signal phase difference command value φd* is used by PWM control to generate a control signal with a control signal phase difference φd by PWM control to control the output power.
由于针对一个放大器使用一对控制信号,因此针对一对放大器生成两对控制信号。在通过差动信号构成控制信号的情况下,被输入至一对放大器的控制信号的信号数为4。Since a pair of control signals is used for one amplifier, two pairs of control signals are generated for a pair of amplifiers. When the control signals are formed by differential signals, the number of control signals input to the pair of amplifiers is four.
根据控制信号间相位差指令值φd*而决定的控制信号间相位差φd决定放大器的开关元件的栅极信号的占空比(Duty),由此高频脉冲输出通过PWM控制(占空比控制)来控制。The control signal phase difference φd determined by the control signal phase difference command value φd* determines the duty ratio (Duty) of the gate signal of the switching element of the amplifier, thereby controlling the high-frequency pulse output by PWM control (duty ratio control).
(b)相位差控制的第2控制方式(b) Second control method of phase difference control
相位差控制的第2控制方式为基于相位位移控制(PS控制)的控制方式。对于低输出电平范围的低输出电平侧的输出电力,使用控制信号组间相位差指令值φs*并通过相位位移控制生成具有控制信号组间相位差φs的控制信号而控制输出电力。The second control method of phase difference control is a control method based on phase shift control (PS control). For the output power on the low output level side of the low output level range, the output power is controlled by using the control signal group phase difference command value φs* and generating a control signal having a control signal group phase difference φs through phase shift control.
相位位移控制是将输入至各放大器的一对控制信号设为组,控制输入至两个放大器的控制信号的组间的控制信号组间相位差φs,通过该控制信号组间相位差φs控制两个放大器间的栅极信号的相位差,控制将两个放大器的放大器输出合成而生成的高频脉冲输出的输出电力。Phase shift control is to set a pair of control signals input to each amplifier as a group, control the control signal group phase difference φs between the control signal groups input to the two amplifiers, control the phase difference of the gate signals between the two amplifiers through the control signal group phase difference φs, and control the output power of the high-frequency pulse output generated by synthesizing the amplifier outputs of the two amplifiers.
(c)相位差控制的第3控制方式(c) The third control method of phase difference control
相位差控制的第3控制方式是由第1控制方式的PWM控制(占空比控制)和第2控制方式的相位位移控制(PS控制)构成的控制方式。The third control method of the phase difference control is a control method composed of the PWM control (duty ratio control) of the first control method and the phase shift control (PS control) of the second control method.
电力控制部是通过运算求出包含输入至各放大器的一对控制信号间相位差指令值φd*、和输入至各放大器的由一对控制信号构成的控制信号组间相位差指令值φs*的相位差指令值φ*。The power control unit calculates a phase difference command value φ* including a phase difference command value φd* between a pair of control signals input to each amplifier and a phase difference command value φs* between control signal groups consisting of a pair of control signals input to each amplifier.
控制信号生成部根据由电力控制部的相位差运算求出的相位差指令值φ*(φd*,φs*),生成具有相位差φ(φd,φs)的控制信号,根据输出电平而对PWM控制和相位位移控制进行区分使用的相位差控制,控制高频脉冲输出的输出电力。The control signal generating unit generates a control signal having a phase difference φ(φd, φs) based on a phase difference command value φ*(φd*, φs*) obtained by phase difference calculation by the power control unit, and controls the output power of the high-frequency pulse output by distinguishing between PWM control and phase shift control according to the output level.
在相位差控制中,由PWM控制所控制的脉冲宽度规定栅极信号的脉冲宽度。栅极信号的脉冲宽度的最小宽度被限制于开关元件的动作特性。因此,通过PWM控制缩窄的脉冲宽度的最小脉冲宽度也被限制,在比最小的脉冲宽度短的脉冲宽度中,有可能会在PWM控制中产生障碍。In phase difference control, the pulse width controlled by PWM control determines the pulse width of the gate signal. The minimum width of the pulse width of the gate signal is limited by the operating characteristics of the switching element. Therefore, the minimum pulse width of the pulse width narrowed by PWM control is also limited, and a pulse width shorter than the minimum pulse width may cause trouble in PWM control.
本发明直至通过PWM控制缩窄的脉冲宽度的最小脉冲宽度为止以PWM控制进行栅极信号的脉冲宽度的缩窄,并针对比最小脉冲宽度短的脉冲宽度以相位位移控制来进行栅极信号的脉冲宽度的缩窄。由此,将控制到输出电力的任意的低电平区域。The present invention narrows the pulse width of the gate signal by PWM control until the minimum pulse width of the pulse width narrowed by PWM control, and narrows the pulse width of the gate signal by phase shift control for pulse widths shorter than the minimum pulse width, thereby controlling the output power to an arbitrary low-level region.
(B)高频电力的输出控制方法的方式(B) Method for controlling high-frequency power output
本发明的高频电力的输出控制方法的方式是控制一对放大器,而使高频脉冲输出的输出电力成为可变的高频电力的控制方法,根据输出电平而切换直流电压控制和相位差控制。The high frequency power output control method of the present invention is a method for controlling a pair of amplifiers to make the output power of high frequency pulse output variable high frequency power, and switches between DC voltage control and phase difference control according to the output level.
(a)在输出电平为高输出电平范围中,通过控制供给至一对放大器的直流电压的直流电压控制来控制输出电力。(a) When the output level is in the high output level range, the output power is controlled by direct current voltage control for controlling the direct current voltage supplied to the pair of amplifiers.
(b)在输出电平为低输出电平范围中,通过控制输入至一对放大器的多个控制信号的相位差φ(φd,φs)的相位差控制而控制输出电力。(b) In the low output level range, the output power is controlled by controlling the phase difference φ (φd, φs) of a plurality of control signals input to a pair of amplifiers.
(1)直流电压控制(1) DC voltage control
直流电压控制在高输出电平范围中求出直流电压指令值Vref*,使根据求出的直流电压指令值Vref*而供给至放大器的直流电压Vdc成为可变,由此控制放大器的输出电力。The DC voltage control obtains a DC voltage command value Vref* in a high output level range, and makes a DC voltage Vdc supplied to the amplifier variable according to the obtained DC voltage command value Vref*, thereby controlling the output power of the amplifier.
(2)相位差控制(2) Phase difference control
相位差控制被应用于低输出电平范围。将低输出电平范围区分为高输出电平侧和低输出电平侧,针对高输出电平侧的输出电力,以使用控制信号间相位差φd的PWM控制(占空比控制)来进行控制,针对低输出电平侧的输出电力,以使用控制信号组间相位差φs的相位位移控制(PS控制)来进行控制。Phase difference control is applied to the low output level range. The low output level range is divided into a high output level side and a low output level side. The output power on the high output level side is controlled by PWM control (duty cycle control) using a phase difference φd between control signals, and the output power on the low output level side is controlled by phase shift control (PS control) using a phase difference φs between control signal groups.
相位差控制具备求出相位差指令值φ*(φd*,φs*)的相位差运算工序、和根据相位差指令值φ*(φd*,φs*)生成相位差φ(φd,φs)的控制信号生成工序。The phase difference control includes a phase difference calculation step of obtaining a phase difference command value φ*(φd*, φs*) and a control signal generation step of generating a phase difference φ(φd, φs) based on the phase difference command value φ*(φd*, φs*).
相位差运算工序中,相位差运算根据输出电力指令值与输出电力反馈值的差分,运算相位差指令值φ*(φd*,φs*)。控制信号相位差控制根据由相位差运算得到的相位差指令值φ*(φd*,φs*)而生成具有相位差φ(φd,φs)的控制信号。通过控制信号驱动放大器,由此控制输出电力。In the phase difference calculation process, the phase difference calculation calculates the phase difference command value φ*(φd*, φs*) based on the difference between the output power command value and the output power feedback value. The control signal phase difference control generates a control signal with a phase difference φ(φd, φs) based on the phase difference command value φ*(φd*, φs*) obtained by the phase difference calculation. The amplifier is driven by the control signal, thereby controlling the output power.
相位差控制被应用于(a)基于PWM控制(占空比控制)的第1控制方式、以及(b)基于相位位移控制(PS控制)的第2控制方式。相位差控制被应用于低输出电平范围,放大器的开关元件通过根据控制信号而生成的栅极信号而被驱动控制,输出电力被控制。Phase difference control is applied to (a) a first control method based on PWM control (duty cycle control) and (b) a second control method based on phase shift control (PS control). Phase difference control is applied to a low output level range, and the switching element of the amplifier is driven and controlled by a gate signal generated according to a control signal, thereby controlling the output power.
(a)相位差控制的第1控制方式(a) The first control method of phase difference control
在第1控制方式中,相位差φ为输入至放大器的控制信号的控制信号间相位差φd,相位差控制通过控制信号间相位差φd控制脉冲宽度,通过控制放大器的开关元件的栅极信号的占空比(Duty)的PWM控制,控制高频脉冲输出的输出电力。In the first control method, the phase difference φ is the phase difference φd between the control signals input to the amplifier. The phase difference control controls the pulse width by the phase difference φd between the control signals. The output power of the high-frequency pulse output is controlled by the PWM control of the duty cycle (Duty) of the gate signal of the switching element of the amplifier.
(b)相位差控制的第2控制方式(b) Second control method of phase difference control
在第2控制方式中,相位差φ是输入至放大器控制信号的控制信号组间相位差φs,相位差控制是基于相位位移控制(PS控制)的控制方式。In the second control method, the phase difference φ is the phase difference φs between control signal groups input to the amplifier control signal, and the phase difference control is a control method based on phase shift control (PS control).
(c)相位差控制的第3控制方式(c) The third control method of phase difference control
相位差控制的第3控制方式是由第1控制方式的PWM控制(占空比控制)和第2控制方式的相位位移控制(PS控制)构成的控制方式。The third control method of the phase difference control is a control method composed of the PWM control (duty ratio control) of the first control method and the phase shift control (PS control) of the second control method.
在该相位差控制中,根据输出电平而区分使用PWM控制和相位位移控制(PS控制)。在应用相位差控制的低输出电平范围,在高输出电平侧,通过使用控制信号间相位差φd的PWM控制来对输出电力进行控制,在低输出电平侧通过使用控制信号组间相位差φs的相位位移控制来对输出电力进行控制。In this phase difference control, PWM control and phase shift control (PS control) are used according to the output level. In the low output level range where phase difference control is applied, the output power is controlled by PWM control using the phase difference φd between control signals on the high output level side, and the output power is controlled by phase shift control using the phase difference φs between control signal groups on the low output level side.
通过相位差运算求出输入至各放大器的控制信号间相位差指令值φd*、和输入至各放大器的控制信号组间相位差指令值φs*的相位差指令值φ*,使用求出的相位差指令值φ*(φd*,φs*),通过相位差控制生成具有相位差φ(φd,φs)的控制信号。The phase difference command value φ* between the control signals input to each amplifier and the phase difference command value φs* between the control signal groups input to each amplifier are calculated by phase difference calculation, and the calculated phase difference command value φ*(φd*, φs*) is used to generate a control signal with a phase difference φ(φd, φs) by phase difference control.
在相位差控制中,通过PWM控制来控制的脉冲宽度规定栅极信号的脉冲宽度。由于栅极信号的脉冲宽度被限制于开关元件的动作特性,因此通过PWM控制缩窄的脉冲宽度的最小脉冲宽度也被限制,有可能在基于比最小脉冲宽度短的脉冲宽度的PWM控制中产生障碍。In phase difference control, the pulse width controlled by PWM control specifies the pulse width of the gate signal. Since the pulse width of the gate signal is limited by the operating characteristics of the switching element, the minimum pulse width of the pulse width narrowed by PWM control is also limited, and there is a possibility that obstacles will occur in PWM control based on a pulse width shorter than the minimum pulse width.
本发明直至通过PWM控制缩窄的脉冲宽度的最小脉冲宽度为止以PWM控制来进行栅极信号的脉冲宽度,并针对比最小脉冲宽度短的脉冲宽度以相位位移控制(PS控制)来进行栅极信号的脉冲宽度。由此,在PWM控制中,即使在控制困难的低电平区域也能够进行控制,可以控制到输出电力的任意低电平区域。The present invention controls the pulse width of the gate signal by PWM control until the minimum pulse width of the pulse width narrowed by PWM control, and controls the pulse width of the gate signal by phase shift control (PS control) for the pulse width shorter than the minimum pulse width. Thus, in PWM control, control can be performed even in a low-level region where control is difficult, and control can be performed to any low-level region of the output power.
(3)基于电力控制部的控制信号间的相位差控制的型态(3) Type of control based on phase difference between control signals of power control unit
基于电力控制部的控制信号间的相位差控制具备第1型态~第3型态的多个型态。The phase difference control between the control signals by the power control unit includes a plurality of types, namely, a first type to a third type.
(a)第1型态(a) Type 1
在第1型态中,电力控制部根据高频脉冲输出的输出电力反馈值FWD FB与输出电力指令值FWD_ref*的比较,进行求出输入至各放大器的控制信号的一对控制信号间的控制信号间相位差指令值φd*的相位差控制。In the first form, the power control unit performs phase difference control to obtain a control signal phase difference command value φd* between a pair of control signals input to each amplifier based on a comparison between an output power feedback value FWD FB of a high frequency pulse output and an output power command value FWD_ref*.
(b)第2型态(b) Type 2
在第2型态中,电力控制部根据各放大器的放大器输出的比较,在各放大器中,调整控制信号的一对信号间的控制信号间相位差指令值φd*,进行使两个放大器的放大器输出均衡化的相位差控制。In the second aspect, the power control unit adjusts the control signal phase difference command value φd* between a pair of control signals in each amplifier based on comparison of the amplifier outputs of the amplifiers, thereby performing phase difference control to balance the amplifier outputs of the two amplifiers.
(c)第3型态(c) Type 3
在第3型态中,电力控制部在两个放大器的各放大器中,进行对将输入至一方的放大器的一对控制信号的信号间的第1控制信号间相位差φda、以及输入至另一方的放大器的一对控制信号的信号间的第2控制信号间相位差φdb设为相同的相位差量的控制信号间相位差指令值φda*及φdb*进行调整的相位差控制。In the third type, the power control unit performs phase difference control in each of the two amplifiers to adjust the first control signal phase difference φda between the signals of a pair of control signals input to one amplifier and the second control signal phase difference φdb between the signals of a pair of control signals input to the other amplifier to the same phase difference amount as the control signal phase difference command values φda* and φdb*.
(4)基于电力控制部的控制信号组间的相位差控制的型态(4) Type of phase difference control between control signal groups based on the power control unit
电力控制部根据高频脉冲输出的输出电力反馈值FWD_FB与输出电力指令值FWD_ref*的比较,求出两个信号组间的相位差指令值φs*。相位差控制部根据控制信号组间的相位差指令值φs*,进行生成具有相位差φs的控制信号的相位位移控制。The power control unit determines a phase difference command value φs* between the two signal groups by comparing the output power feedback value FWD_FB of the high frequency pulse output with the output power command value FWD_ref*. The phase difference control unit performs phase shift control to generate a control signal having a phase difference φs based on the phase difference command value φs* between the control signal groups.
(C)共同应用于高频电源装置及高频电力的输出控制方法的型态(C) Types commonly used in high-frequency power supply devices and high-frequency power output control methods
(1)PWM控制的控制方式(1) PWM control method
PWM控制包含第1控制方式~第3控制方式的多个控制方式。The PWM control includes a plurality of control methods including a first control method to a third control method.
(a)第1控制型态(a) Type 1 control
在PWM控制的第1控制方式中,根据高频脉冲输出的输出电力反馈值FWD_FB与输出电力指令值FWD_ref*的比较,求出输入至各放大器的控制信号的一对信号间的控制信号间相位差指令值φd*。In the first control method of PWM control, a control signal phase difference command value φd* between a pair of control signals input to each amplifier is obtained by comparing an output power feedback value FWD_FB of a high-frequency pulse output with an output power command value FWD_ref*.
(b)第2控制方式(b) Second control method
在PWM控制的第2控制方式中,根据各放大器的放大器输出的比较,在各放大器中,调整控制信号的一对信号间的控制信号间相位差指令值φd*,使一对放大器的放大器输出均衡化。In the second control method of PWM control, based on comparison of amplifier outputs of the respective amplifiers, a control signal phase difference command value φd* between a pair of control signals is adjusted in each amplifier to balance the amplifier outputs of the pair of amplifiers.
(c)第3控制方式(c) Third control method
在PWM控制的第3控制方式中,在一对放大器的各放大器中,进行对将输入至一方的放大器的一对控制信号的信号间的第1控制信号间相位差φda、以及输入至另一方的放大器的一对控制信号的信号间的第2控制信号间相位差φdb设为相同的相位差量的控制信号间相位差指令值φda*及φdb*进行调整的相位差控制。In the third control method of PWM control, in each amplifier of a pair of amplifiers, phase difference control is performed to adjust the first control signal phase difference φda between the signals of a pair of control signals input to one amplifier and the second control signal phase difference φdb between the signals of a pair of control signals input to the other amplifier so that the control signal phase difference command values φda* and φdb* are set to the same phase difference amount.
(2)相位位移控制(PS控制)的控制方式(2) Phase shift control (PS control)
在相位位移控制中,根据高频脉冲输出的输出电力反馈值FWD_FB与输出电力指令值FWD_ref*的比较,求出两个控制信号组间的控制信号组间相位差指令值φs*。In the phase shift control, the inter-control signal group phase difference command value φs* between the two control signal groups is obtained by comparing the output power feedback value FWD_FB of the high-frequency pulse output with the output power command value FWD_ref*.
(3)控制信号的型态(3) Type of control signal
在本发明中,控制信号使用处于相位彼此反相的相位关系的差动信号的型态,由此在放大器的开关元件的驱动中,提高耐噪性。在本发明中,虽然优选以使用差动信号作为控制信号,但是并非排除使用单端信号的动作。In the present invention, the control signal uses a differential signal in a phase relationship of opposite phases, thereby improving noise resistance in driving the switch element of the amplifier. In the present invention, although it is preferred to use a differential signal as the control signal, it does not exclude the operation of using a single-ended signal.
发明效果Effects of the Invention
如上述说明那样,根据本发明,在高频电源装置及高频电力的输出控制方法中,可以减轻起因于在高频电源装置的电源内部被消耗的内部损失的电力转换效率下降的情形。As described above, according to the present invention, in a high frequency power supply device and a high frequency power output control method, a decrease in power conversion efficiency due to internal loss consumed within the power supply of the high frequency power supply device can be reduced.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明的控制的概要图。FIG. 1 is a schematic diagram of the control of the present invention.
图2为表示本发明的直流电压控制和相位差控制的区分使用的图。FIG. 2 is a diagram showing the distinction between direct current voltage control and phase difference control according to the present invention.
图3为用于说明本发明的电力控制与输出电力的关系的图。FIG. 3 is a diagram for explaining the relationship between power control and output power according to the present invention.
图4为用于说明本发明的电力控制与输出电力的关系的图。FIG. 4 is a diagram for explaining the relationship between power control and output power according to the present invention.
图5为用于说明占空比Duty与输出电压的关系的图。FIG. 5 is a diagram for explaining the relationship between the duty ratio Duty and the output voltage.
图6为用于说明PWM控制与输出电力的关系的图。FIG. 6 is a diagram for explaining the relationship between PWM control and output power.
图7为用于说明本发明的高频电力的输出控制方法的方式的流程图。FIG. 7 is a flowchart for explaining the method of controlling the output of high-frequency power according to the present invention.
图8为用于说明本发明的高频电源装置的结构例的图。FIG. 8 is a diagram for explaining a configuration example of a high-frequency power supply device according to the present invention.
图9为用于说明本发明的高频电源装置的结构例的图。FIG. 9 is a diagram for explaining a configuration example of a high-frequency power supply device according to the present invention.
图10为用于说明本发明的高频电源装置的结构例的图。FIG. 10 is a diagram for explaining a configuration example of a high-frequency power supply device according to the present invention.
图11为用于说明本发明的电力控制部的重要部位的结构例的图。FIG. 11 is a diagram for explaining a configuration example of an important part of a power control unit according to the present invention.
图12为用于说明本发明的高频电源装置的控制信号、栅极信号等的信号图。FIG. 12 is a signal diagram for explaining control signals, gate signals, etc. of the high-frequency power supply device of the present invention.
图13为用于说明本发明的高频电源装置的控制信号、栅极信号等的信号图。FIG. 13 is a signal diagram for explaining control signals, gate signals, etc. of the high-frequency power supply device of the present invention.
图14为用于说明本发明的高频电源装置的控制信号、栅极信号等的信号图。FIG. 14 is a signal diagram for explaining control signals, gate signals, etc. of the high-frequency power supply device of the present invention.
图15为用于说明本发明的高频电源装置的并联连接例的信号图。FIG. 15 is a signal diagram for explaining an example of parallel connection of a high-frequency power supply device according to the present invention.
具体实施方式Detailed ways
以下,使用图1~图2说明本发明的控制的概要。关于本发明的电力控制,使用图3~图4说明本发明的电力控制与输出电力的关系,使用图5说明内部损失与输出电力的关系,使用图6,说明PWM控制与输出电力的关系。The following describes the control of the present invention using Figures 1 and 2. Regarding the power control of the present invention, Figures 3 and 4 describe the relationship between the power control of the present invention and the output power, Figure 5 describes the relationship between the internal loss and the output power, and Figure 6 describes the relationship between the PWM control and the output power.
关于本发明的方式,使用图7的流程图,说明本发明的高频电力的输出控制方法的方式,使用图8~图10,说明本发明的高频电源装置的结构例。而且,使用图11说明电力控制部的主要部分的结构例。图12~图14是本发明的高频电源装置的控制信号、栅极信号等的信号图。另外,在本发明的高频电源装置中,将图8所示的结构例用于多个组,并使用图15对将它们并联连接而成的结构例进行说明。Regarding the method of the present invention, the method of the output control method of high-frequency power of the present invention is described using the flowchart of FIG7, and the structural example of the high-frequency power supply device of the present invention is described using FIGS. 8 to 10. In addition, FIG. 11 is used to describe the structural example of the main part of the power control unit. FIGS. 12 to 14 are signal diagrams of control signals, gate signals, etc. of the high-frequency power supply device of the present invention. In addition, in the high-frequency power supply device of the present invention, the structural example shown in FIG. 8 is used for a plurality of groups, and FIG. 15 is used to describe the structural example formed by connecting them in parallel.
1.控制概要1. Control Overview
1-1.控制概要1-1. Control Overview
使用图1、图2说明本发明的控制概要。图1为用于说明本发明的控制的概要图,图2为用于说明本发明的直流电压控制和相位差控制的区分使用的图,图2中的(a)表示通过直流电压控制(CNTL1)控制电力输出的情况,图2中的(b)及图2中的(c)表示通过相位差控制(CNTL2)控制电力输出的情况。另外,图2中的(b)为通过PWM控制进行相位差控制(CNTL2)的情况,图2中的(c)为通过相位位移控制进行相位差控制(CNTL2)的情况。The control overview of the present invention is explained using Figures 1 and 2. Figure 1 is a schematic diagram for explaining the control of the present invention, and Figure 2 is a diagram for explaining the distinction between DC voltage control and phase difference control of the present invention. (a) in Figure 2 shows the case where the power output is controlled by DC voltage control (CNTL1), and (b) in Figure 2 and (c) in Figure 2 show the case where the power output is controlled by phase difference control (CNTL2). In addition, (b) in Figure 2 shows the case where phase difference control (CNTL2) is performed by PWM control, and (c) in Figure 2 shows the case where phase difference control (CNTL2) is performed by phase shift control.
本发明的高频电力的输出的控制根据输出电平来区分使用直流电压控制(CNTL1)和相位差控制(CNTL2)。在本发明的相位差控制(CNTL2)中,被应用于以合成器5将两个放大器2(2A,2B)的放大器输出合成并将输出电力输出的结构。将两个放大器2(2A,2B)的放大器输出合成而生成输出电力的结构是根据输入至放大器的两个控制信号的组间的控制信号组间相位差φs,控制放大器输出间的放大器输出间相位差φsamp,并应用于基于控制输出电力的相位位移控制的电力控制的结构。The control of the output of high frequency power of the present invention is distinguished by using direct current voltage control (CNTL1) and phase difference control (CNTL2) according to the output level. In the phase difference control (CNTL2) of the present invention, it is applied to a structure in which the amplifier outputs of two amplifiers 2 (2A, 2B) are synthesized by a synthesizer 5 and the output power is output. The structure in which the amplifier outputs of the two amplifiers 2 (2A, 2B) are synthesized to generate output power is a structure in which the phase difference φs amp between the amplifier outputs is controlled according to the phase difference φs between the control signal groups between the two control signals input to the amplifiers, and is applied to a structure of power control based on phase shift control of controlling the output power.
在本发明中,在以高输出电平范围控制输出电力的情况下,通过直流电压控制(CNTL1)控制输出电力,在以低输出电平范围控制输出电力的情况下,通过相位差控制(CNTL2)控制输出电力。In the present invention, when the output power is controlled in a high output level range, the output power is controlled by DC voltage control (CNTL1), and when the output power is controlled in a low output level range, the output power is controlled by phase difference control (CNTL2).
区分高输出电平范围和低输出电平范围的输出电平的阈值,可以考虑直流电压控制的结构和主电路方式、或者电力转换效率等而任意地设定。The output level threshold for distinguishing between the high output level range and the low output level range can be arbitrarily set in consideration of the DC voltage control structure, main circuit method, power conversion efficiency, and the like.
a.直流电压控制(CNTL1)a. DC voltage control (CNTL1)
在基于直流电压控制的输出电力的控制中,在高输出电平范围中,将供给至放大器的直流电压Vdc设为可变。In the control of the output power by the DC voltage control, the DC voltage Vdc supplied to the amplifier is made variable in the high output level range.
直流电压控制设为固定相位差指令值φ*并将相位差控制的相位差φ固定的状态,根据直流电压指令值Vref*而控制供给至一对放大器2(2A,2B)的直流电压Vdc并控制各输出电力,并控制合成后的输出电力。此外,直流电压指令值Vref*在图1中未图示。The DC voltage control is set to a fixed phase difference command value φ* and the phase difference φ of the phase difference control is fixed. The DC voltage Vdc supplied to the pair of amplifiers 2 (2A, 2B) is controlled according to the DC voltage command value Vref* to control each output power and control the combined output power. In addition, the DC voltage command value Vref* is not shown in FIG. 1.
在通过直流电压控制进行电力控制的情况下,将相位差控制的相位差φ设为固定状态,仅通过直流电压控制而将输出电力设为可变。此外,相位差φ的固定是是固定控制信号间的控制信号间相位差φd、以及控制信号组间相位差φs的这两方的控制信号的相位差,由此,停止基于相位差φ的控制的输出电力的可变。When power control is performed by DC voltage control, the phase difference φ of the phase difference control is set to a fixed state, and the output power is made variable only by DC voltage control. In addition, the phase difference φ is fixed by fixing the phase difference between the control signals, that is, the phase difference φd between the control signals and the phase difference φs between the control signal groups, thereby stopping the variable output power based on the control of the phase difference φ.
在基于直流电压控制的输出电力的控制中,在高频电源装置的内部不存在虚拟电阻所导致的消耗电力,因此在电源内部被消耗的内部损失及电力的低转换效率的问题得以解决,实现高效率化。In the control of output power based on DC voltage control, there is no power consumption caused by virtual resistance inside the high-frequency power supply device, so the problems of internal loss consumed inside the power supply and low power conversion efficiency are solved, achieving high efficiency.
另外,虽然为了使直流电压控制对应于输出电平范围的全范围而需要装置大型化,但是通过将应用本发明的直流电压控制的输出电平范围限制在任意的高输出电平范围,将实现高频电源装置的小型化或轻量化。In addition, although the device needs to be enlarged in order to make the DC voltage control correspond to the full range of the output level range, by limiting the output level range of the DC voltage control applied by the present invention to an arbitrary high output level range, the high-frequency power supply device can be miniaturized or lightweight.
在图1中,通过直流电压控制,以高表示的高输出电力被输出,通过PWM控制的相位差控制,输出以低1表示的低输出电力被输出,通过相位位移控制(PS控制)的相位差控制,输出以低2表示的更低的输出电平的低输出电力。图1中的实线的箭头、虚线的箭头、以及点划线的箭头分别表示直流电压控制、PWM控制的相位差控制、以及相位位移控制(PS控制)的相位差控制的控制状态。In FIG1 , a high output power represented by high is output by DC voltage control, a low output power represented by low 1 is output by phase difference control of PWM control, and a low output power of a lower output level represented by low 2 is output by phase difference control of phase shift control (PS control). The solid arrow, the dotted arrow, and the dashed arrow in FIG1 respectively represent the control states of DC voltage control, phase difference control of PWM control, and phase difference control of phase shift control (PS control).
图2中的(a)表示基于直流电压控制(CNTL1)的电力输出的控制方式,图中的横轴的左方表示控制信号中的控制方式,右方表示放大器中的控制方式。另外,图2的纵轴表示输出电力,虚线上方表示高输出电平范围,虚线下方是表示低输出电平范围。(a) in FIG2 shows the control method of the power output based on the DC voltage control (CNTL1), the left side of the horizontal axis in the figure shows the control method in the control signal, and the right side shows the control method in the amplifier. In addition, the vertical axis of FIG2 shows the output power, the upper side of the dotted line shows the high output level range, and the lower side of the dotted line shows the low output level range.
在输出电力的输出电平范围为高输出电平范围中,在放大器的控制方式中,仅通过直流电压控制将输出电力设为可变。高输出电平范围被直流电压的最大值Vdc_max和直流电压的最小值Vdc_min所规定。直流电压的最大值Vdc_max被生成例如输出直流电压的AC/DC转换器等的直流电压的装置所具备的规格所设定。另外,直流电压的最小值Vdc_min通过生成直流电压的装置的控制方式和主电路方式、或者电力转换效率等而被任意地决定。In the output level range of the output power being the high output level range, in the control method of the amplifier, the output power is made variable only by the DC voltage control. The high output level range is defined by the maximum value Vdc_max of the DC voltage and the minimum value Vdc_min of the DC voltage. The maximum value Vdc_max of the DC voltage is set by the specification of the device that generates the DC voltage, such as the AC/DC converter that outputs the DC voltage. In addition, the minimum value Vdc_min of the DC voltage is arbitrarily determined by the control method of the device that generates the DC voltage, the main circuit method, or the power conversion efficiency, etc.
在直流电压控制中,通过将进行相位差控制的PWM控制的控制信号间相位差φd、以及进行相位位移控制的控制信号组间相位差φs进行固定,由此不进行基于相位差控制的输出电力的控制,通过仅使直流电压Vdc设为可变来控制输出电力。除了相位差的固定值φs=0[deg]以外,控制信号间相位差φd可以被任意设定。此外,对于控制信号间相位差φd、以及控制信号组间相位差φs的固定,可以通过将控制信号间相位差指令值φd*、以及控制信号组间相位差指令值φs*固定来进行。In the DC voltage control, the phase difference φd between the control signals for the PWM control for the phase difference control and the phase difference φs between the control signal groups for the phase shift control are fixed, thereby not controlling the output power based on the phase difference control, and controlling the output power by only making the DC voltage Vdc variable. The phase difference φd between the control signals can be set arbitrarily except for the fixed value φs=0[deg]. In addition, the phase difference φd between the control signals and the phase difference φs between the control signal groups can be fixed by fixing the phase difference command value φd* between the control signals and the phase difference command value φs* between the control signal groups.
b.相位差控制(CNTL2)b. Phase difference control (CNTL2)
用于本发明的相位差控制的控制信号虽然可以使用单端信号或差动信号,但是在被应用于输出为1kw以上且频率范围为27MHz~100MHz的高频的脉冲输出的高频电源装置及高频电力的输出控制中,为了准确地传送相位差或占空比信息,优选耐噪性高的差动信号。在之后的说明中,针对基于差动信号的控制信号进行说明。此外,差动信号为相位处于彼此反相关系的两个信号,可以通过两个信号的差量,转换成单端信号。Although the control signal for the phase difference control of the present invention can use a single-ended signal or a differential signal, in the high-frequency power supply device and the output control of the high-frequency power applied to the high-frequency pulse output with an output of more than 1 kW and a frequency range of 27 MHz to 100 MHz, in order to accurately transmit the phase difference or duty cycle information, a differential signal with high noise resistance is preferred. In the following description, the control signal based on the differential signal is described. In addition, the differential signal is two signals whose phases are in an anti-phase relationship with each other, and can be converted into a single-ended signal by the difference between the two signals.
基于相位差控制(CNTL2)的输出电力的控制将进行控制的输出电平范围限制于低输出电平范围。由此,减少高频电源装置的虚拟电阻所导致的内部损失,实现高效率化。The output power control based on the phase difference control (CNTL2) limits the output level range to be controlled to a low output level range, thereby reducing the internal loss caused by the virtual resistance of the high-frequency power supply device and achieving high efficiency.
在图1中,在两个放大器(2A、2B)中,向各一个放大器输入一对控制信号。向放大器2A输入控制信号Sig1a、Sig2a的一对控制信号,向放大器2B输入控制信号Sig1b、Sig2b的一对控制信号。In Fig. 1, a pair of control signals is input to each of the two amplifiers (2A, 2B). A pair of control signals Sig1a and Sig2a is input to the amplifier 2A, and a pair of control signals Sig1b and Sig2b is input to the amplifier 2B.
因各控制信号Sig1a、Sig2a、Sig1b、Sig2b分别为差动信号,因此在将差动信号的两个信号视为一对信号时,向各一个放大器输入两对控制信号。因此,两对控制信号所含的信号数成为4信号。Since each control signal Sig1a, Sig2a, Sig1b, and Sig2b is a differential signal, when two differential signals are regarded as a pair of signals, two pairs of control signals are input to each amplifier. Therefore, the number of signals included in the two pairs of control signals is four signals.
在图1中,将被输入至一个放大器的两对控制信号间的相位差设为控制信号间相位差φd,将被输入至放大器2A的两对控制信号(Sig1a,Sig2a)之间的相位差以控制信号间相位差φda表示,被输入至放大器2B的两对控制信号(Sig1b,Sig2b)间的相位差以控制信号间相位差φdb表示。In Figure 1, the phase difference between two pairs of control signals input to an amplifier is set to the control signal phase difference φd, the phase difference between two pairs of control signals (Sig1a, Sig2a) input to amplifier 2A is represented by the control signal phase difference φda, and the phase difference between two pairs of control signals (Sig1b, Sig2b) input to amplifier 2B is represented by the control signal phase difference φdb.
被输入至放大器2A的两对控制信号(Sig1a、Sig2a)以及被输入至放大器2B的两对控制信号(Sig1b,Sig2b)分别构成控制信号的组,该控制信号的组间的相位差以控制信号组间相位差φs来表示。The two pairs of control signals (Sig1a, Sig2a) input to the amplifier 2A and the two pairs of control signals (Sig1b, Sig2b) input to the amplifier 2B respectively constitute a control signal group, and the phase difference between the control signal groups is represented by the control signal group phase difference φs.
相位差控制(CNTL2)包含第1相位差控制(CNTL2d)和第2相位差控制(CNTL2s)两个控制。第1相位差控制(CNTL2d)是通过控制信号间相位差φd对脉冲宽度进行调制的PWM控制,根据被PWM控制后的控制信号,使驱动开关元件的脉冲信号的占空比(Duty)成为可变。第2相位差控制(CNTL2s)是将一对控制信号组的组间的控制信号组间相位差φs位移的相位位移控制(PS控制),通过控制两个放大器的输出电力的重复程度,控制输出电力。Phase difference control (CNTL2) includes two controls: the first phase difference control (CNTL2d) and the second phase difference control (CNTL2s). The first phase difference control (CNTL2d) is a PWM control that modulates the pulse width by the phase difference φd between the control signals, and makes the duty ratio (Duty) of the pulse signal driving the switching element variable according to the control signal after PWM control. The second phase difference control (CNTL2s) is a phase shift control (PS control) that shifts the phase difference φs between the control signal groups of a pair of control signal groups, and controls the output power by controlling the repetition degree of the output power of the two amplifiers.
由于基于PWM控制的输出电力的控制没有高频电源装置的虚拟电组所导致的内部损失,因此能够实现高效率化。Since the control of the output power based on PWM control does not have internal losses caused by the virtual power group of the high-frequency power supply device, high efficiency can be achieved.
在图1中,CNTL2d是表示分别通过两对控制信号的控制信号间相位差φd(φda,φdb)对脉冲宽度进行调制的PWM控制,CNTL2s表示将一对控制信号组的组间的控制信号组间相位差φs位移的相位位移控制(PS控制)。In FIG. 1 , CNTL2d represents PWM control for modulating pulse width by the control signal phase difference φd (φda, φdb) between two pairs of control signals, and CNTL2s represents phase shift control (PS control) for shifting the control signal group phase difference φs between a pair of control signal groups.
通过脉冲宽度控制(PWM控制),控制为使输入至放大器2A的两对控制信号Sig1a及控制信号Sig2a间的相位差成为控制信号间相位差φda,并控制为使输入至放大器2B的两对控制信号Sig1b及控制信号Sig2b的相位差成为控制信号间相位差φdb。Through pulse width control (PWM control), the phase difference between the two pairs of control signals Sig1a and Sig2a input to amplifier 2A is controlled to become the phase difference φda between the control signals, and the phase difference between the two pairs of control signals Sig1b and Sig2b input to amplifier 2B is controlled to become the phase difference φdb between the control signals.
向放大器2A输入由具有控制信号间相位差φda的两对差动信号构成的控制信号Sig1a及控制信号Sig2a,根据该控制信号间相位差φda,控制开关元件的栅极信号的占空比(Duty),通过占空比(Duty)控制高频脉冲输出的输出电力。A control signal Sig1a and a control signal Sig2a consisting of two pairs of differential signals with a phase difference φda between the control signals are input to the amplifier 2A. According to the phase difference φda between the control signals, the duty cycle (Duty) of the gate signal of the switching element is controlled, and the output power of the high-frequency pulse output is controlled by the duty cycle (Duty).
同样地,向放大器2B输入由具有控制信号间相位差φdb的两对差动信号构成的控制信号Sig1b及控制信号Sig2b,根据该控制信号间相位差φdb,控制开关元件的栅极信号的占空比(Duty),通过占空比(Duty)控制高频脉冲输出的输出电力。Similarly, control signals Sig1b and Sig2b, which are composed of two pairs of differential signals with a phase difference φdb between the control signals, are input to amplifier 2B. The duty cycle (Duty) of the gate signal of the switching element is controlled according to the phase difference φdb between the control signals, and the output power of the high-frequency pulse output is controlled by the duty cycle (Duty).
在占空比(Duty)控制中,基于控制信号间相位差φda的占空比DutyA、以及基于控制信号间相位差φdb的占空比DutyB分别表示为:In the duty control, the duty ratio DutyA based on the phase difference φda between the control signals and the duty ratio DutyB based on the phase difference φdb between the control signals are respectively expressed as:
DutyA=φda/180[deg]…(1)DutyA=φda/180[deg]…(1)
DutyB=φdb/180[deg]…(2)。DutyB=φdb/180[deg]…(2).
相位差控制将低输出电平范围分为高输出电平和低输出电平,可以设为:The phase difference control divides the low output level range into high output level and low output level and can be set to:
(i)对高输出电平应用第1相位差控制的PWM控制的方式(i) PWM control method using the first phase difference control for high output level
(ii)对低输出电平应用第2相位差控制的相位位移控制(PS控制)的方式。(ii) A method of applying the phase shift control (PS control) of the second phase difference control to the low output level.
(i)应用PWM控制的方式(i) How to apply PWM control
图2中的(b)是表示在基于相位差控制(CNTL2)的输出电力的控制中,示出了仅基于第1相位差控制的PWM控制的电力输出的控制方式,在图中的横轴中,隔着点划线,左边表示控制信号中的控制方式,右边表示在放大器中的控制方式。另外,图中的纵轴表示输出电力,以下侧的虚线为边界,上方表示高输出电平侧,下方表示低输出电平侧。FIG2(b) shows the control method of the power output based on the PWM control of the first phase difference control only in the control of the output power based on the phase difference control (CNTL2). In the horizontal axis of the figure, the left side shows the control method in the control signal, and the right side shows the control method in the amplifier. In addition, the vertical axis of the figure shows the output power, with the lower dotted line as the boundary, the upper side shows the high output level side, and the lower side shows the low output level side.
在输出电力的输出电平为低输出电平范围内的高输出电平侧的情况下,在控制信号的控制方式中通过PWM控制(CNTL2d)的相位差控制使输出电力成为可变,在放大器的控制方式中通过基于被PWM控制的控制信号的控制信号间相位差φd(φda,φdb)的Duty控制使输出电力成为可变。驱动放大器的栅极信号的占空比Duty(DutyA,DutyB)是根据控制信号间相位差φd(φda、φdb)而得到的。When the output power level is on the high output level side within the low output level range, the output power is made variable by the phase difference control of the PWM control (CNTL2d) in the control method of the control signal, and the output power is made variable by the duty control based on the phase difference φd (φda, φdb) between the control signals controlled by PWM in the control method of the amplifier. The duty ratio Duty (DutyA, DutyB) of the gate signal driving the amplifier is obtained based on the phase difference φd (φda, φdb) between the control signals.
低输出电平范围内的高输出电平侧被占空比成为最大值的最大占空比Duty_max和占空比成为最小值的最小占空比Duty_min所规定。最大占空比Duty_max是根据开关元件的输出电力与电力转换效率的平衡而被决定为最小所需死区时间DT_min,此时所得到的电力输出与直流电压控制时的最小输出一致。另外,最小占空比Duty_min是依赖于放大器所具备的开关元件的响应速度而决定的,通过对应于开关元件的最快的响应速度的脉冲宽度而被设定。The high output level side within the low output level range is defined by the maximum duty ratio Duty_max where the duty ratio is the maximum value and the minimum duty ratio Duty_min where the duty ratio is the minimum value. The maximum duty ratio Duty_max is determined as the minimum required dead time DT_min based on the balance between the output power of the switching element and the power conversion efficiency, and the power output obtained at this time is consistent with the minimum output during DC voltage control. In addition, the minimum duty ratio Duty_min is determined by the response speed of the switching element of the amplifier and is set by the pulse width corresponding to the fastest response speed of the switching element.
在第1相位差控制的PWM控制中,通过固定用于进行直流电压控制的直流电压Vdc、以及用于进行相位位移控制的控制信号组间相位差φs,仅使进行PWM控制的控制信号间相位差φd成为可变,由此控制输出电力。直流电压Vdc及控制信号组间相位差φs的固定值可以被任意设定。此外,固定的控制信号组间相位差φs是以φs=0[deg]为基本。由于控制信号组间相位差φs=0[deg]是在相位位移控制中得到最大输出的相位差,因此通过将控制信号组间相位差φs固定于0[deg],可以在使控制信号间相位差φd成为可变而进行的PWM控制中,设置输出电力的控制宽度。In the PWM control of the first phase difference control, the DC voltage Vdc used for DC voltage control and the phase difference φs between control signal groups used for phase shift control are fixed, and only the phase difference φd between control signals for PWM control is made variable, thereby controlling the output power. The fixed values of the DC voltage Vdc and the phase difference φs between control signal groups can be set arbitrarily. In addition, the fixed phase difference φs between control signal groups is based on φs=0[deg]. Since the phase difference φs between control signal groups=0[deg] is the phase difference that obtains the maximum output in the phase shift control, by fixing the phase difference φs between control signal groups to 0[deg], the control width of the output power can be set in the PWM control performed by making the phase difference φd between control signals variable.
(ii)应用相位位移控制(PS控制)的方式(ii) Phase shift control (PS control)
图2中的(c)表示在基于相位差控制(CNTL2)的输出电力的控制中,仅基于第2相位差控制的相位位移控制的电力输出的控制方式。在图中的横轴上,隔着点划线,左边表示在控制信号中的控制方式,右边表示在放大器中的控制方式。另外,图中的纵轴表示输出电力,以下侧的虚线为边界,上方表示高输出电平侧,下方表示低输出电平侧。(c) in FIG. 2 shows a control method for power output based on phase shift control of the second phase difference control alone in the control of output power based on phase difference control (CNTL2). On the horizontal axis in the figure, the left side shows the control method in the control signal, and the right side shows the control method in the amplifier, separated by a dotted line. In addition, the vertical axis in the figure shows the output power, with the lower dotted line as the boundary, the upper side showing the high output level side, and the lower side showing the low output level side.
在PWM控制中,在相比于以最小占空比Duty_min控制的值使输出电力减少的情况下,应用相位位移控制,来取代PWM控制。在该相位位移控制中,在0[deg]~180[deg]的范围使驱动控制放大器的控制信号的组间的控制信号组间相位差φs可变。在相位位移控制中,控制信号组间相位差φs为0[deg]的输出电力在PWM控制中,占空比Duty相当于最小占空比Duty_min的输出电力。另外,在相位位移控制中,控制信号组间相位差φs为180[deg]的输出电力相当于电力0。In PWM control, when the output power is reduced compared to the value controlled by the minimum duty ratio Duty_min, phase shift control is applied instead of PWM control. In this phase shift control, the control signal group phase difference φs between the control signals driving the control amplifier is made variable in the range of 0 [deg] to 180 [deg]. In the phase shift control, the output power when the control signal group phase difference φs is 0 [deg] is equivalent to the output power of the minimum duty ratio Duty_min in PWM control. In addition, in the phase shift control, the output power when the control signal group phase difference φs is 180 [deg] is equivalent to power 0.
在输出电力的输出电平为低输出电平范围内的低输出电平侧的情况下,在控制信号的控制方式中,通过相位差控制的相位位移控制(CNTL2s)使输出电力成为可变,在放大器的控制方式中,通过基于被相位位移控制的控制信号的控制信号组间相位差φs的放大器间相位差φsamp的栅极信号,驱动开关元件而使输出电力成为可变。When the output level of the output power is on the low output level side within the low output level range, in the control method of the control signal, the output power is made variable by the phase shift control (CNTL2s) of the phase difference control, and in the control method of the amplifier, the output power is made variable by driving the switching element by the gate signal of the phase difference φs amp between the control signal groups based on the control signal that is phase shift controlled.
进行相位位移控制(CNTL2s)的控制信号组间相位差φs的范围是0[deg]~180[deg]的范围。在相位位移控制(CNTL2s)中,控制信号组间相位差φs为0[deg]时,得到在相位位移控制中的最大输出电力,在控制信号组间相位差φs为180[deg]时,得到在相位位移控制中的最小输出电力。The range of the phase difference φs between the control signal groups for performing the phase shift control (CNTL2s) is 0 [deg] to 180 [deg]. In the phase shift control (CNTL2s), when the phase difference φs between the control signal groups is 0 [deg], the maximum output power in the phase shift control is obtained, and when the phase difference φs between the control signal groups is 180 [deg], the minimum output power in the phase shift control is obtained.
在此,使控制信号组间相位差φs为0[deg]时的输出电力在PWM控制(CNTL2d)与占空比为最小占空比Duty_min时的输出电力配合,由此通过消除在PWM控制(CNTL2d)与相位位控制(CNTL2s)的切换时刻的输出电力的偏移,使输出电力的可变成为连续。Here, the output power when the phase difference φs between the control signal groups is 0 [deg] is coordinated with the output power when the duty cycle is the minimum duty cycle Duty_min under PWM control (CNTL2d), thereby eliminating the offset of the output power at the switching moment between the PWM control (CNTL2d) and the phase control (CNTL2s), making the output power variable continuous.
在相位差控制中,由PWM控制所控制的脉冲宽度规定栅极信号的脉冲宽度。由于栅极信号的脉冲宽度被限制于开关元件的动作特性,因此通过PWM控制缩窄的脉冲宽度的最小脉冲宽度也被限制,有可能在基于比最小脉冲宽度短的脉冲宽度的PWM控制中产生障碍。In phase difference control, the pulse width controlled by PWM control determines the pulse width of the gate signal. Since the pulse width of the gate signal is limited by the operating characteristics of the switching element, the minimum pulse width of the pulse width narrowed by PWM control is also limited, and there is a possibility that obstacles will occur in PWM control based on a pulse width shorter than the minimum pulse width.
本发明以PWM控制将栅极信号的脉冲宽度进行至由PWM控制缩窄的脉冲宽度的最小脉冲宽度,针对比最小脉冲宽度短的脉冲宽度以相位位移控制(PS控制)来进行,由此在PWM控制中,即使在控制困难的低电平区域中也能够控制,并能够进行直至输出电力的任意低电平区域的控制。The present invention uses PWM control to reduce the pulse width of the gate signal to the minimum pulse width of the pulse width narrowed by PWM control, and uses phase shift control (PS control) for pulse widths shorter than the minimum pulse width. As a result, in PWM control, control can be performed even in low-level areas that are difficult to control, and control can be performed in any low-level area up to the output power.
在输出电力的最小输出为能够通过PWM控制来控制的程度的大小的情况下,即使不应用相位位移控制(PS控制),也可以仅通过PWM控制,进行相位差控制。When the minimum output of the output power is of a magnitude that can be controlled by PWM control, phase difference control can be performed only by PWM control without applying phase shift control (PS control).
相位位移控制(PS控制)存在由于在电源内部被消耗的内部损失使得电力转换效率低的问题,但是在本发明中,通过将相位位移控制(PS控制)的应用范围限制于低电平侧,即使在高电平侧,相比于应用相位位移控制(PS控制)的情况,也可以缩小内部损失的损失量。由此,减少在输出电平的全范围内的内部损失,能够实现高效率化。Phase shift control (PS control) has a problem of low power conversion efficiency due to internal losses consumed inside the power supply, but in the present invention, by limiting the application range of phase shift control (PS control) to the low-level side, even on the high-level side, the amount of internal loss can be reduced compared to the case where phase shift control (PS control) is applied. As a result, internal losses are reduced over the entire range of output levels, making it possible to achieve high efficiency.
本发明的直流电压控制及相位差控制在各输出电平范围内,输出电力连续可变,从直流电压控制向相位差控制、或者从相位差控制向直流电压控制的控制切换时刻,通过配合基于两控制的输出电平,由此输出电平的输出电力在全范围不会成为不连续而是可以连续地可变。The DC voltage control and phase difference control of the present invention can continuously change the output power within each output level range. The switching moment from DC voltage control to phase difference control, or from phase difference control to DC voltage control, is coordinated with the output levels based on the two controls, so that the output power of the output level will not be discontinuous but can be continuously variable within the entire range.
1-2.电力控制与输出电力的关系1-2. Relationship between power control and output power
本发明在高输出电压范围及低输出电压范围的各输出电压范围中,可以任意地设定输出电力的变化特性。图3、4示出了变化特性例。在此,示出了高输出电压High(高)、低输出电压Low(低)1、Low(低)2、零输出电压的4个输出电压范围的例子。The present invention can arbitrarily set the variation characteristics of the output power in each output voltage range of the high output voltage range and the low output voltage range. Figures 3 and 4 show examples of variation characteristics. Here, examples of four output voltage ranges of high output voltage High, low output voltage Low 1, Low 2, and zero output voltage are shown.
(a)恒定输出电力的方式(a) Constant power output method
图3是在各输出电压范围内通过恒定的输出电压使输出电压成为恒定的方式例子。在高输出电压范围中,在输出High(高)的恒定输出电力的情况下,固定控制信号间相位差φda、φdb、和控制信号组间相位差φs,通过将直流电压Vdc设为可变的直流电压控制,控制输出电力。此时,通过将直流电压Vdc设为恒定电压,使输出电力成为恒定。FIG3 is an example of a method of making the output voltage constant by a constant output voltage in each output voltage range. In the high output voltage range, when outputting a constant output power of High, the phase differences φda and φdb between control signals and the phase difference φs between control signal groups are fixed, and the output power is controlled by setting the DC voltage Vdc to a variable DC voltage control. At this time, the output power is made constant by setting the DC voltage Vdc to a constant voltage.
在输出Low(低)1的恒定输出电力的情况下,固定直流电压Vdc及控制信号组间相位差φs,通过将控制信号间相位差φda、φdb设为可变的相位位移控制,控制输出电力。此时,通过将控制信号间相位差φda、φdb设为恒定相位差,使输出电力成为恒定。In the case of outputting a constant output power of Low 1, the DC voltage Vdc and the phase difference φs between the control signal groups are fixed, and the output power is controlled by setting the phase differences φda and φdb between the control signals to variable phase shift control. At this time, the output power is made constant by setting the phase differences φda and φdb between the control signals to constant phase differences.
在输出Low(低)2的恒定输出电力的情况下,固定直流电压Vdc及控制信号间相位差φda、φdb,通过将控制信号组间相位差φs设为可变的相位位移控制,来控制输出电力。此时,通过将控制信号组间相位差φs设为恒定相位差,使输出电力成为恒定。In the case of outputting a constant output power of Low 2, the DC voltage Vdc and the phase differences φda and φdb between the control signals are fixed, and the output power is controlled by setting the phase difference φs between the control signal groups to a variable phase shift control. At this time, the output power is made constant by setting the phase difference φs between the control signal groups to a constant phase difference.
在零输出电压的情况下,通过直流电压控制、或相位差控制,设定为使输出电压成为零输出电压,不进行输出电压的可变控制。In the case of zero output voltage, the output voltage is set to zero output voltage by direct current voltage control or phase difference control, and variable control of the output voltage is not performed.
根据该恒定输出电力的方式,在各输出电压范围间,输出电力成为阶段状的电力变化。According to this constant output power method, the output power changes in steps between the output voltage ranges.
(b)线性可变的方式(b) Linear variable method
图4中的(a)是在各输出电压范围内使输出电力线性可变的方式例子。FIG. 4( a ) is an example of a method of making the output power linearly variable within each output voltage range.
在高输出电压范围中,以High(高)的电平使输出电力线性可变的情况下,固定控制信号间相位差φda、φdb、控制信号组间相位差φs,通过将直流电压Vdc设为可变的直流电压控制,来控制输出电力。此时,为了使输出电力成为线性可变,直流电压Vdc是相对于输出电力的线性变化,以根函数性(平方根函数)的方式可变。In the high output voltage range, when the output power is made linearly variable at the High level, the phase differences φda and φdb between the control signals and the phase difference φs between the control signal groups are fixed, and the output power is controlled by making the DC voltage Vdc a variable DC voltage control. At this time, in order to make the output power linearly variable, the DC voltage Vdc is variable in a root function (square root function) manner relative to the linear change of the output power.
在以Low(低)1的电平使输出电力成为线性可变的情况下,固定直流电压Vdc及控制信号组间相位差φs,通过将控制信号间相位差φda、φdb设为可变的PWM控制,来控制输出电力。此时,由于控制信号间相位差φda、φdb的变化与输出电力的变化之间不一定成为线性关系,因此以使输出电力成为线性可变的方式调整控制信号间相位差φda、φdb的变化。When the output power is made linearly variable at the level of Low 1, the DC voltage Vdc and the phase difference φs between the control signal groups are fixed, and the output power is controlled by PWM control in which the phase differences φda and φdb between the control signals are made variable. At this time, since the change between the phase differences φda and φdb between the control signals and the change in the output power are not necessarily in a linear relationship, the change between the phase differences φda and φdb between the control signals is adjusted so that the output power becomes linearly variable.
在以Low(低)2的电平使输出电力成为线性可变的情况下,固定直流电压Vdc及控制信号间相位差φda、φdb,通过将控制信号组间相位差φs设为可变的相位位移控制,来控制输出电力。此时,由于控制信号组间相位差φs的变化与输出电力的变化之间不一定成为线性关系,因此以使输出电力成为线性可变的方式调整控制信号组间相位差φs的变化。When the output power is made linearly variable at the level of Low 2, the DC voltage Vdc and the phase differences φda and φdb between the control signals are fixed, and the output power is controlled by making the phase difference φs between the control signal groups variable through phase shift control. At this time, since the change of the phase difference φs between the control signal groups and the change of the output power are not necessarily in a linear relationship, the change of the phase difference φs between the control signal groups is adjusted so that the output power becomes linearly variable.
在零输出电压的情况下,通过直流电压控制或相位差控制,设定为使输出电压成为零输出电压,不进行输出电压的可变控制。In the case of zero output voltage, the output voltage is set to zero output voltage by direct current voltage control or phase difference control, and variable control of the output voltage is not performed.
(c)指数函数性可变的方式(c) Exponentially variable functions
图4中的(b)是在各输出电压范围内使输出电力指数函数性可变的方式例子。在高输出电压范围中,以High(高)的电平使输出电力以指数函数性的方式可变的情况下,固定控制信号间相位差φda、φdb、和控制信号组间相位差φs,通过将直流电压Vdc设为可变的直流电压控制,来控制输出电力。此时,直流电压Vdc以使输出电力呈指数函数性可变的方式成为可变。(b) in FIG4 is an example of a method of making the output power exponentially variable in each output voltage range. In the high output voltage range, when the output power is made exponentially variable at the High level, the phase differences φda and φdb between the control signals and the phase difference φs between the control signal groups are fixed, and the output power is controlled by making the DC voltage Vdc a variable DC voltage control. At this time, the DC voltage Vdc is made variable so that the output power is exponentially variable.
在以Low(低)1的电平使输出电力成为指数函数性可变的情况下,固定直流电压Vdc及控制信号组间相位差φs,通过将控制信号间相位差φda、φdb设为可变的PWM控制,来控制输出电力。此时,由于在控制信号间相位差φda、φdb的变化与输出电力的变化之间,不一定成为线性关系,因此以使输出电力成为指数函数性可变的方式,调整控制信号间相位差φda、φdb的变化。When the output power is made exponentially variable at the level of Low 1, the DC voltage Vdc and the phase difference φs between the control signal groups are fixed, and the output power is controlled by PWM control in which the phase differences φda and φdb between the control signals are made variable. At this time, since the change in the phase differences φda and φdb between the control signals and the change in the output power are not necessarily in a linear relationship, the change in the phase differences φda and φdb between the control signals is adjusted so that the output power is made exponentially variable.
在以Low(低)2的电平使输出电力成为指数函数性可变的情况下,固定直流电压Vdc及控制信号间相位差φda、φdb,通过将控制信号组间相位差φs设为可变的相位位移控制,来控制输出电力。此时,由于在控制信号组间相位差φs的变化与输出电力的变化之间,不一定成为线性关系,因此以使输出电力成为指数函数性可变的方式,调整控制信号组间相位差φs的变化。When the output power is made exponentially variable at the level of Low 2, the DC voltage Vdc and the phase differences φda and φdb between the control signals are fixed, and the output power is controlled by making the phase difference φs between the control signal groups variable through phase shift control. At this time, since the change in the phase difference φs between the control signal groups and the change in the output power are not necessarily linearly related, the change in the phase difference φs between the control signal groups is adjusted so that the output power is made exponentially variable.
在零输出电压的情况下,通过直流电压控制、或相位差控制,将输出电压设定为零输出电压,不进行输出电压的可变控制。In the case of zero output voltage, the output voltage is set to zero output voltage by direct current voltage control or phase difference control, and variable control of the output voltage is not performed.
1-3.内部损失和输出电力的关系1-3. Relationship between internal loss and output power
图5表示基于D级、F级、EF级的开关模式方式的推挽式放大器的PWM控制时的输出电压波形。输出电压波形Vdd表示漏极-漏极间电压。Fig. 5 shows output voltage waveforms of push-pull amplifiers of class D, class F, and class EF switching mode when PWM control is performed. The output voltage waveform Vdd represents the drain-drain voltage.
输出电压波形Vdd为方形波状波形,振幅为漏极-源极间电压Vds。在开关模式的高频电源中,基本波以外的谐波成分通过输出滤波器来除去,仅输出基本波。于是,将输出电压波形Vdd,作为仅基本波成分的正弦波电压Vac来进行等效计算时,通过以下的式(3)来表示。在此,占空比Duty以半周期的180[deg]被正规化。The output voltage waveform Vdd is a square wave waveform, and the amplitude is the drain-source voltage Vds. In the high-frequency power supply of the switching mode, the harmonic components other than the fundamental wave are removed by the output filter, and only the fundamental wave is output. Therefore, when the output voltage waveform Vdd is equivalently calculated as a sine wave voltage Vac with only the fundamental wave component, it is expressed by the following formula (3). Here, the duty cycle Duty is normalized to 180 [deg] of half a cycle.
Vac=(4/π)·Vds·sin{(π/2)·Duty}·sin(ωs·t)…(3)Vac=(4/π)·Vds·sin{(π/2)·Duty}·sin(ω s ·t)…(3)
Vac:正弦波电压Vac: Sine wave voltage
Vds:漏极-源极间电压Vds: drain-source voltage
Duty:占空比Duty: Duty cycle
ωs:基板波的角频率ω s : angular frequency of substrate wave
图6为根据式(3)求出在高频电源中进行将占空比Duty设为可变的PWM控制的情况下的输出电力Pout的图。在图6中,横轴表示占空比Duty[%],纵轴表示Pout的电力。此外,在开关模式的情况下,通过对栅极信号电压Vgs设置死区时间DT,实现高效率化。FIG6 is a graph showing the output power P out when the high frequency power supply is subjected to PWM control with the duty ratio Duty set to be variable according to equation (3). In FIG6 , the horizontal axis represents the duty ratio Duty [%], and the vertical axis represents the power of P out . In addition, in the case of the switching mode, high efficiency is achieved by setting the dead time DT for the gate signal voltage Vgs.
由于在式(3)所示的Vac在sin函数内存在占空比Duty的项,因此成为描绘S字状的曲线。在S字状的曲线中,在占空比Duty为20%~80%的范围示出了大致直线状的线形特性,相对于此,占空比Duty为80%以上的范围以及占空比Duty为20%以下的范围倾斜变得缓和,明显表现为非线形状的特性。根据这样的正弦波电压Vac的输出特性,在高频电源的PWM控制中,在占空比Duty为20%~80%的范围以外,Duty对输出电力增益极端地变低,难以通过占空比Duty调整输出电力增益,控制性变差。Since the term of duty cycle Duty exists in the sin function of Vac shown in formula (3), it becomes an S-shaped curve. In the S-shaped curve, a roughly linear characteristic is shown in the range of duty cycle Duty of 20% to 80%. In contrast, the inclination becomes gentle in the range of duty cycle Duty of more than 80% and the range of duty cycle Duty of less than 20%, and it clearly shows a non-linear characteristic. According to the output characteristics of such a sinusoidal voltage Vac, in the PWM control of the high-frequency power supply, outside the range of duty cycle Duty of 20% to 80%, Duty has an extremely low effect on the output power gain, making it difficult to adjust the output power gain by the duty cycle Duty, and the controllability deteriorates.
根据上述输出电力的特性,为了避开控制性变低的占空比Duty的范围,将PWM控制中的额定Duty选定在80%的附近。当80%附近的占空比Duty换算成控制信号间相位差φda、φdb时,相当于140[deg]~160[deg]。According to the above output power characteristics, the rated duty in PWM control is selected to be around 80% in order to avoid the duty range where controllability decreases. When the duty range around 80% is converted into the phase difference φda, φdb between control signals, it is equivalent to 140[deg] to 160[deg].
另一方面,在将成为最小脉冲宽度的最小占空比Duty_min选择在20%的情况,输出电力相对于额定输出成为1/10左右。在将占空比Duty的范围这样选定在20%~80%的范围,并将以该占空比Duty的范围确定的区域设为PWM控制区域时,在最小占空比Duty_min中输出电力被减少至额定输出的10%。此外,在图6中,将PWM控制区域中的输出电力的范围以P_high和P_low表示。On the other hand, when the minimum duty ratio Duty_min, which will become the minimum pulse width, is selected to be 20%, the output power becomes about 1/10 of the rated output. When the range of the duty ratio Duty is selected in the range of 20% to 80% in this way, and the area determined by the range of the duty ratio Duty is set as the PWM control area, the output power is reduced to 10% of the rated output at the minimum duty ratio Duty_min. In addition, in FIG. 6, the range of the output power in the PWM control area is represented by P_high and P_low.
在相比于以最小占空比Duty_min来控制的值减少输出电力的情况下,应用相位位移控制来取代PWM控制。在该相位位移控制中,在0[deg]~180[deg]的范围使放大器间的相位差即控制信号组间相位差φs可变。在相位位移控制中,控制信号组间相位差φs为0[deg]的输出电力在PWM控制中,占空比Duty相当于最小占空比Duty_min的输出电力。另外,在相位位移控制中,控制信号组间相位差φs为180[deg]的输出电力相当于电力0。In the case where the output power is reduced compared to the value controlled by the minimum duty cycle Duty_min, phase shift control is applied instead of PWM control. In this phase shift control, the phase difference between amplifiers, that is, the phase difference φs between control signal groups, is made variable in the range of 0 [deg] to 180 [deg]. In the phase shift control, the output power when the phase difference φs between control signal groups is 0 [deg] is equivalent to the output power of the minimum duty cycle Duty_min in PWM control. In addition, in the phase shift control, the output power when the phase difference φs between control signal groups is 180 [deg] is equivalent to power 0.
相位位移控制的最大内部损失虽然在控制信号组间相位差φs为180[deg]时,但是本发明中,对于此时的内部损失,占空比Duty与最小占空比Duty_min时的输出电力一致。通过相位位移控制,在全控制范围控制输出电力的情况下,虽然在将输出电力降低到0的情况(φs=180[deg])下,与高侧的额定电力同等的电力由于内部的虚拟电阻被消耗,但是根据本发明,由于控制信号组间相位差φs为180[deg],相当于占空比Duty为最小占空比Duty_min的输出电力,因此内部损失较低至约1/10左右。Although the maximum internal loss of the phase shift control occurs when the phase difference φs between the control signal groups is 180 [deg], in the present invention, the internal loss at this time is consistent with the output power when the duty cycle Duty is the minimum duty cycle Duty_min. When the output power is controlled in the full control range by phase shift control, when the output power is reduced to 0 (φs = 180 [deg]), the power equivalent to the rated power of the high side is consumed due to the internal virtual resistance, but according to the present invention, since the phase difference φs between the control signal groups is 180 [deg], it is equivalent to the output power when the duty cycle Duty is the minimum duty cycle Duty_min, so the internal loss is reduced to about 1/10.
因此,由于内部损失仅相当于额定电力的10%,因此相比于仅基于相位位移控制的输出电力控制,内部损失约90%被改善。Therefore, since the internal loss is only equivalent to 10% of the rated power, the internal loss is improved by about 90% compared to the output power control based only on the phase shift control.
2.高频电力的输出控制方法2. High-frequency power output control method
使用图7的流程图说明本发明的高频电力的输出控制方法。在以下的流程图中,使用S的附图标记表示各工序的流程。The high-frequency power output control method of the present invention will be described using the flowchart of Fig. 7. In the following flowchart, the flow of each step is indicated by the reference numeral S.
本发明的高频电力的输出控制的概略是根据输出电力电平来区分使用直流电压控制和相位差控制,由此,减少高频电源的虚拟电阻所导致的内部损失。The outline of the high-frequency power output control of the present invention is to selectively use DC voltage control and phase difference control according to the output power level, thereby reducing the internal loss caused by the virtual resistance of the high-frequency power supply.
图7中的(a)为用于说明输出控制的概略的流程图。在输出电力有变更的情况(S1)下,判定输出电力的电平处于事先被设定的高电平范围(高输出电平范围)、或处于低电平范围(低输出电平范围)(S2)。在输出电力电平为高电平范围内时,进行直流电压控制(S3),在输出电力电平为低电平范围内时,进行相位差控制(S4)。(a) in FIG7 is a flowchart for explaining the outline of output control. When the output power is changed (S1), it is determined whether the output power level is in a high level range (high output level range) or a low level range (low output level range) (S2) that is set in advance. When the output power level is in the high level range, DC voltage control is performed (S3), and when the output power level is in the low level range, phase difference control is performed (S4).
图7中的(b)为表示相位差控制的详细流程的流程图,以虚线的框表示图7中的(a)所示的流程图的S4的工序。当输出电力电平被判定为在低电平范围内时(S2),对驱动放大器的开关元件的驱动信号的占空比Duty与事先被设定的最小占空比Duty_min进行比较(S4a)。Fig. 7(b) is a flowchart showing a detailed process of phase difference control, and the dotted line frame shows the step S4 of the flowchart shown in Fig. 7(a). When the output power level is determined to be within the low level range (S2), the duty ratio Duty of the drive signal of the switch element driving the amplifier is compared with the minimum duty ratio Duty_min set in advance (S4a).
在S4a的比较工序中,在占空比Duty大于最小占空比Duty_min的情况下,通过相位差控制的相位差运算,求出控制信号间相位差指令值φda*、φdb*,根据求出的控制信号间相位差指令值φda*、φdb*生成具有控制信号间相位差φda、φdb的控制信号(S4b1)。根据所生成的控制信号间相位差φda、φdb,求出驱动信号的占空比DutyA、DutyB,通过求出的DutyA、DutyB对放大器的开关元件进行PWM控制(S4b2)。In the comparison process of S4a, when the duty cycle Duty is greater than the minimum duty cycle Duty_min, the phase difference command values φda* and φdb* between the control signals are obtained by the phase difference calculation of the phase difference control, and the control signals having the phase differences φda and φdb between the control signals are generated according to the obtained phase difference command values φda* and φdb* between the control signals (S4b1). The duty cycles DutyA and DutyB of the drive signals are obtained according to the generated phase differences φda and φdb between the control signals, and the switching elements of the amplifier are PWM controlled according to the obtained DutyA and DutyB (S4b2).
另一方面,在S4a的比较工序中,在占空比Duty小于最小占空比Duty_min的情况下,通过相位差控制的相位差运算,求出作为控制信号的组间的相位差的控制信号组间指令值相位差φs*。根据求出的控制信号组间相位差指令值φs*而生成具有控制信号组间相位差φs控制信号(S4c1),对放大器的开关元件进行相位位移控制(S4c2)。On the other hand, in the comparison step of S4a, when the duty cycle Duty is less than the minimum duty cycle Duty_min, the control signal group command value phase difference φs*, which is the phase difference between the control signal groups, is obtained by the phase difference calculation of the phase difference control. A control signal having the control signal group phase difference φs is generated based on the obtained control signal group phase difference command value φs* (S4c1), and the phase shift control of the switch element of the amplifier is performed (S4c2).
此外,在S4a的工序中,在占空比Duty与最小占空比Duty_min一致的情况下,可以任意地决定设定为进行基于S4b的控制信号间相位差的PWM控制、或者进行基于S4c的控制信号组间相位差的相位位移控制。In the process of S4a, when the duty ratio Duty matches the minimum duty ratio Duty_min, it can be arbitrarily determined whether to perform PWM control based on the phase difference between control signals in S4b or to perform phase shift control based on the phase difference between control signal groups in S4c.
在图7中的(b)所示的流程图中,虽然设为在相位差控制中选择PWM控制和相位位移控制中的任一方的结构,但是如在图7中的(c)的流程图所示,也可以设为同时执行PWM控制和相位位移控制的方式。In the flowchart shown in (b) of FIG. 7 , a configuration is provided in which either PWM control or phase shift control is selected in phase difference control. However, as shown in the flowchart of (c) of FIG. 7 , PWM control and phase shift control may be performed simultaneously.
在相位差控制(S4)中,通过运算求出控制信号间相位差指令值φda*、φdb*及控制信号组间相位差指令值φs*,根据求出的相位差所涉及的各指令值φda*、φdb*及φs*,生成具有各相位差φda、φdb及φs的控制信号,并与PWM控制(S4b)一起进行相位位移控制(PS控制)(S4c)。In the phase difference control (S4), the phase difference command values φda*, φdb* between control signals and the phase difference command value φs* between control signal groups are calculated, and control signals having phase differences φda*, φdb* and φs* are generated based on the command values φda*, φdb* and φs* involved in the calculated phase differences, and phase shift control (PS control) (S4c) is performed together with the PWM control (S4b).
在相位差控制(S4)中,同时进行PWM控制(S4b)和相位位移控制(S4c)的情况下,相比于个别地进行两控制的情况,内部损失增加。例如,在占空比Duty为50%,控制信号组间相位差φs为90[deg]的情况下,额定输出的25%成为内部损失。但是,由于该内部损失相比于仅基于相位位移控制的输出电力控制,损失减少至1/4,因此相对于现有方式具有优势。In the phase difference control (S4), when PWM control (S4b) and phase shift control (S4c) are performed simultaneously, the internal loss increases compared to the case where both controls are performed separately. For example, when the duty ratio Duty is 50% and the phase difference φs between the control signal groups is 90 [deg], 25% of the rated output becomes internal loss. However, since the internal loss is reduced to 1/4 compared to the output power control based only on phase shift control, it is advantageous over the existing method.
3:高频电源装置3: High frequency power supply device
使用图8~图10说明本发明的高频电源装置的结构例。An example of the configuration of the high-frequency power supply device of the present invention will be described with reference to FIGS. 8 to 10 .
3-1.结构例13-1. Structural Example 1
根据图8说明结构例1。高频电源装置1具备一对放大器2A、2B、将放大器2A、2B的放大器输出合成而生成高频脉冲输出的合成器5。Configuration Example 1 will be described with reference to Fig. 8. The high-frequency power supply device 1 includes a pair of amplifiers 2A and 2B, and a synthesizer 5 that synthesizes amplifier outputs of the amplifiers 2A and 2B to generate a high-frequency pulse output.
放大器2A、2B是基于D级、F级或EF级的开关模式方式的电力放大器,具备:AD/DC转换器,其作为对电力放大器供给直流电压Vdc的直流电源的结构要素。在图8中,示出了将以两个LDMOS或单封装构成的开关元件、输出晶体管和低通滤波器串联连接而成的结构来作为一例。在输出变压器的中点,从AC/DC转换器6的直流电源施加直流电压Vdc。The amplifiers 2A and 2B are power amplifiers of a switch mode method based on class D, class F, or class EF, and are provided with an AD/DC converter as a structural element of a DC power supply for supplying a DC voltage Vdc to the power amplifier. FIG8 shows a structure in which a switching element, an output transistor, and a low-pass filter composed of two LDMOS or a single package are connected in series as an example. A DC voltage Vdc is applied from a DC power supply of an AC/DC converter 6 to the midpoint of the output transformer.
向放大器2A、2B分别具备的两个开关元件的栅极端子,从驱动电路3A、3B输入作为驱动信号的栅极信号Gsig1a、Gsig2a、以及栅极信号Gsig1b、Gsig2b,各开关元件被该些栅极信号来驱动。Gate signals Gsig1a and Gsig2a and gate signals Gsig1b and Gsig2b as drive signals are input from drive circuits 3A and 3B to gate terminals of two switch elements included in amplifiers 2A and 2B, respectively, and each switch element is driven by these gate signals.
放大器2A、2B的放大器输出经由循环器/隔离器4A、4B而被输入至合成器5。合成器5将2A、2B的放大器输出合成,并作为高频脉冲输出而输出。循环器/隔离器4A、4B连接有虚拟电阻。放大器输出中的未被供给至合成器5的合成的输出将在虚拟电阻中被消耗,成为内部损失。The amplifier outputs of the amplifiers 2A and 2B are input to the synthesizer 5 via the circulators/isolators 4A and 4B. The synthesizer 5 synthesizes the amplifier outputs of 2A and 2B and outputs them as high-frequency pulse outputs. The circulators/isolators 4A and 4B are connected to dummy resistors. The synthesized output of the amplifier output that is not supplied to the synthesizer 5 is consumed in the dummy resistor and becomes an internal loss.
高频电源装置1具备作为控制放大器2A、2B的输出电力的结构而进行直流电压控制的结构、以及进行相位差控制的结构,直流电压控制由电力控制部10及直流电压控制部11构成,相位差控制由电力控制部10及控制信号生成部12构成。The high-frequency power supply device 1 has a structure for performing DC voltage control as a structure for controlling the output power of amplifiers 2A and 2B, and a structure for performing phase difference control. The DC voltage control is composed of a power control unit 10 and a DC voltage control unit 11, and the phase difference control is composed of the power control unit 10 and a control signal generating unit 12.
(电力控制部)(Power Control Department)
电力控制部10运算用于控制输出电力的指令值,控制信号生成部12根据由电力控制部10的运算求出的相位差控制指令值,生成用于相位控制差控制的控制信号。The power control unit 10 calculates a command value for controlling output power, and the control signal generation unit 12 generates a control signal for phase control difference control based on the phase difference control command value calculated by the power control unit 10 .
电力控制部10根据高频电源装置1输出的高频脉冲输出的输出电平,切换直流电压控制和相位差控制,在输出电平为高输出电平范围,通过直流电压控制,运算直流电压指令值Vref*,在输出电平为低输出电平范围,通过相位差控制,运算相位差指令值φ*(φd*,φs*),将直流电压指令值Vref*发送至直流电压控制部11,将相位差指令值φ*(φd*,φs*)发送至控制信号生成部12。The power control unit 10 switches between DC voltage control and phase difference control according to the output level of the high-frequency pulse output by the high-frequency power supply device 1. When the output level is in the high output level range, the DC voltage command value Vref* is calculated through DC voltage control. When the output level is in the low output level range, the phase difference command value φ*(φd*, φs*) is calculated through phase difference control. The DC voltage command value Vref* is sent to the DC voltage control unit 11, and the phase difference command value φ*(φd*, φs*) is sent to the control signal generating unit 12.
直流电压指令值Vref*及相位差指令值φ*(φd*,φs*)是根据输出电力指令值FWD_ref*与输出电力反馈值FWD_FB的差量进行运算而得到的。The DC voltage command value Vref* and the phase difference command value φ* (φd*, φs*) are obtained by calculation based on the difference between the output power command value FWD_ref* and the output power feedback value FWD_FB.
电力控制部10具备运算用于通过直流电压控制来控制输出电力的直流电压指令值Vref*的直流电压运算部10a、以及运算用于通过相位差控制来控制输出电力的相位差指令值φ*(φd*、φs*)的相位差运算部10b。The power control unit 10 includes a DC voltage calculation unit 10a that calculates a DC voltage command value Vref* for controlling output power by DC voltage control, and a phase difference calculation unit 10b that calculates a phase difference command value φ* (φd*, φs*) for controlling output power by phase difference control.
(直流电压运算部)(DC voltage calculation unit)
直流电压运算部10a根据输出电力指令值FWD_ref*与输出电力反馈值FWD_FB的差量,来运算用于使输出电力与输出电力指令值FWD_ref*一致的直流电压指令值Vref*。The DC voltage calculation unit 10 a calculates a DC voltage command value Vref* for making the output power coincide with the output power command value FWD_ref*, based on the difference between the output power command value FWD_ref* and the output power feedback value FWD_FB.
直流电压指令值Vref*的运算可以通过使输出电力指令值FWD_ref*与输出电力反馈值FWD_FB的差分成为零的反馈控制来进行。例如,差分(FWD_ref*)-(FWD_FB)为正的值时,由于输出电力反馈值FWD_FB小于输出电力指令值FWD_ref*,因此通过使输出电力指令值即Vref*增加,使输出电力反馈值FWD_FB接近于输出电力指令值FWD_ref*。相反地,差分(FWD_ref*)-(FWD_FB)为负的值时,由于输出电力反馈值FWD_FB大于输出电力指令值FWD_ref*,因此通过使输出电力指令值即Vref*减少,使输出电力反馈值FWD_FB接近于输出电力指令值FWD_ref*。The calculation of the DC voltage command value Vref* can be performed by feedback control that makes the difference between the output power command value FWD_ref* and the output power feedback value FWD_FB zero. For example, when the difference (FWD_ref*)-(FWD_FB) is a positive value, since the output power feedback value FWD_FB is smaller than the output power command value FWD_ref*, the output power feedback value FWD_FB is made closer to the output power command value FWD_ref* by increasing the output power command value Vref*. Conversely, when the difference (FWD_ref*)-(FWD_FB) is a negative value, since the output power feedback value FWD_FB is larger than the output power command value FWD_ref*, the output power feedback value FWD_FB is made closer to the output power command value FWD_ref* by decreasing the output power command value Vref*.
直流电压指令值Vref*在直流电压控制部11中,被使用于控制供给至一对放大器2A、2B的直流电压Vdc的操作量α的计算。The DC voltage command value Vref* is used in the DC voltage control unit 11 to calculate the operation amount α for controlling the DC voltage Vdc supplied to the pair of amplifiers 2A and 2B.
(相位差运算部10b)(Phase difference calculation unit 10b)
相位差运算部10b根据输出电力指令值FWD_ref*与输出电力反馈值FWD_FB的差分,运算用于对输出电力进行相位差控制的相位差指令值φ*。相位差指令值φ*包含用于PWM控制的控制信号间相位差指令值φda*、φdb*以及用于相位差控制(PS控制)的控制信号组间相位差指令值φs*,控制信号生成部12根据相位差指令值φ*(φda*,φdb*,φs*)生成具备相位差φ(φda,φdb,φs)的控制信号。The phase difference calculation unit 10b calculates the phase difference command value φ* for performing phase difference control on the output power based on the difference between the output power command value FWD_ref* and the output power feedback value FWD_FB. The phase difference command value φ* includes the control signal inter-phase difference command values φda* and φdb* for PWM control and the control signal group inter-phase difference command value φs* for phase difference control (PS control). The control signal generation unit 12 generates a control signal having a phase difference φ (φda, φdb, φs) based on the phase difference command values φ* (φda*, φdb*, φs*).
(直流电压控制部及控制信号生成部)(DC voltage control unit and control signal generation unit)
高频电源装置1具备:直流电压控制部11,其控制输出电力;以及控制信号生成部12,其根据电力控制部10针对输入至一对放大器2A、2B的控制信号的相位差φ(φd,φs)运算的相位差指令值φ*(φd*、φs*),生成差动信号,并控制输出电力。The high-frequency power supply device 1 includes: a DC voltage control unit 11, which controls the output power; and a control signal generating unit 12, which generates a differential signal based on a phase difference command value φ*(φd*, φs*) calculated by the power control unit 10 for the phase difference φ(φd, φs) of the control signal input to a pair of amplifiers 2A and 2B, and controls the output power.
用于直流电压控制的直流电压指令值Vref*、用于相位差控制的控制信号间相位差φda、φdb以及控制信号组间相位差φs是通过电力控制部10的运算而得到的。The DC voltage command value Vref* for DC voltage control, the control signal phase differences φda and φdb for phase difference control, and the control signal group phase difference φs are obtained by calculation in the power control unit 10 .
(直流电压控制部)(DC voltage control unit)
作为进行直流电压控制的结构,具备直流电压控制部11。直流电压控制部11根据直流电压指令值Vref*而生成操作量α。构成直流电源的AC/DC转换器6根据操作量α而被控制,将根据直流电压指令值Vref*的直流电压Vdc的输出电压供给至放大器2A、2B。As a structure for performing DC voltage control, a DC voltage control unit 11 is provided. The DC voltage control unit 11 generates an operation amount α according to a DC voltage command value Vref*. The AC/DC converter 6 constituting a DC power supply is controlled according to the operation amount α, and an output voltage of a DC voltage Vdc according to the DC voltage command value Vref* is supplied to the amplifiers 2A and 2B.
直流电压控制部11对从放大器2A、2B回馈的反馈电压Vdc_FB和直流电压指令值Vref*进行比较,以使直流电压Vdc与直流电压指令值Vref*一致的方式进行反馈控制。The DC voltage control unit 11 compares the feedback voltage Vdc_FB fed back from the amplifiers 2A and 2B with the DC voltage command value Vref*, and performs feedback control so that the DC voltage Vdc coincides with the DC voltage command value Vref*.
(控制信号生成部)(Control signal generation unit)
作为进行相位差控制的结构,具备控制信号生成部12。控制信号生成部12具备负责PWM控制的相位差控制功能部12Aa、12Ab、以及负责相位位移控制的相位差控制功能部12B。As a configuration for performing phase difference control, a control signal generating unit 12 is provided. The control signal generating unit 12 includes phase difference control functional units 12Aa and 12Ab in charge of PWM control and a phase difference control functional unit 12B in charge of phase shift control.
PWM控制的相位差控制功能部12Aa、12Ab的控制信号间相位差φda、φdb、以及相位位移控制的相位差控制功能部12B的控制信号组间相位差φs是根据通过电力控制部10的运算处理而得到的相位指令值而被生成的。The control signal phase differences φda and φdb between the PWM control phase difference control functional units 12Aa and 12Ab and the control signal group phase difference φs between the phase difference control functional units 12B are generated based on the phase command value obtained by the calculation process of the power control unit 10 .
(PWM控制)(PWM control)
负责PWM控制的相位差控制功能部12Aa、12Ab分别生成用于控制放大器2A的控制信号Sig1a、Sig2a、以及用于控制放大器2B的控制信号Sig1b、Sig2b。在通过相位彼此处于反相关系的差动信号而构成控制信号Sig1a、Sig2a、Sig1b、Sig2b的情况下,向各放大器输入包含一对差动信号的两对控制信号。由此,被输入至放大器2A的控制信号Sig1a、Sig2a构成由包含一对差动信号的两对控制信号构成的成组信号Siga,即使在被输入至放大器2B的控制信号Sig1b、Sig2b中,也同样地构成由包含一对差动信号的两对控制信号构成的成组信号Sigb。因此,成组信号Siga及成组信号Sigb所含的信号数为4信号。The phase difference control function units 12Aa and 12Ab responsible for PWM control respectively generate control signals Sig1a and Sig2a for controlling the amplifier 2A, and control signals Sig1b and Sig2b for controlling the amplifier 2B. When the control signals Sig1a, Sig2a, Sig1b, and Sig2b are formed by differential signals whose phases are in anti-phase relationship with each other, two pairs of control signals including a pair of differential signals are input to each amplifier. As a result, the control signals Sig1a and Sig2a input to the amplifier 2A form a group signal Siga composed of two pairs of control signals including a pair of differential signals, and even in the control signals Sig1b and Sig2b input to the amplifier 2B, a group signal Sigb composed of two pairs of control signals including a pair of differential signals is similarly formed. Therefore, the number of signals contained in the group signal Siga and the group signal Sigb is 4 signals.
在构成被输入至放大器2A的成组信号Siga的控制信号Sig1a、Sig2a中,控制信号Sig1a与控制信号Sig2a之间的控制信号间相位差φda是根据控制信号间相位差指令值φda*而被生成的,根据该控制信号间相位差φda,对驱动电路3A输出的栅极信号Gsig1a、Gsig2a的脉冲宽度进行PWM控制。In the control signals Sig1a and Sig2a constituting the group signal Siga input to the amplifier 2A, the control signal phase difference φda between the control signal Sig1a and the control signal Sig2a is generated based on the control signal phase difference instruction value φda*, and based on the control signal phase difference φda, the pulse width of the gate signals Gsig1a and Gsig2a output by the drive circuit 3A is PWM controlled.
同样地,在构成被输入至放大器2B的成组信号Sigb的控制信号Sig1b、Sig2b中,控制信号Sig1b与控制信号Sig2b之间的控制信号间相位差φdb是根据控制信号间相位差指令值φdb*而被生成的,根据该控制信号间相位差φdb,对驱动电路3B输出的栅极信号Gsig1a、Gsig2a的脉冲宽度被PWM控制。Similarly, in the control signals Sig1b and Sig2b constituting the group signal Sigb input to the amplifier 2B, the control signal phase difference φdb between the control signal Sig1b and the control signal Sig2b is generated based on the control signal phase difference instruction value φdb*, and based on the control signal phase difference φdb, the pulse width of the gate signals Gsig1a and Gsig2a output to the drive circuit 3B is PWM controlled.
通过PWM控制,驱动电路3A输出对应于控制信号间相位差φda的放大器输出,驱动电路3B输出对应于控制信号间相位差φdb的放大器输出。在从放大器2A、2B输出对应于同一控制信号间相位差φd的放大器输出的情况下,将控制信号间相位差φda和控制信号间相位差φdb作为同一相位差而进行PWM控制。By PWM control, the drive circuit 3A outputs an amplifier output corresponding to the phase difference φda between the control signals, and the drive circuit 3B outputs an amplifier output corresponding to the phase difference φdb between the control signals. When the amplifiers 2A and 2B output amplifier outputs corresponding to the same phase difference φd between the control signals, PWM control is performed with the phase difference φda between the control signals and the phase difference φdb between the control signals being the same phase difference.
控制信号间相位差指令值φd*的运算可以通过使输出电力指令值FWD_ref*与输出电力反馈值FWD_FB的差分成为零的反馈控制来进行。The calculation of the control signal phase difference command value φd* can be performed by feedback control that makes the difference between the output power command value FWD_ref* and the output power feedback value FWD_FB zero.
例如,在差分(FWD_ref*)-(FWD_FB)为正的值时,由于输出电力反馈值FWD_FB小于输出电力指令值FWD_ref*,因此通过使控制信号间相位差指令值φd*增加,加宽脉冲宽度而使占空比Duty接近于最大占空比Duty_max,由此使输出电力反馈值FWD_FB接近于输出电力指令值FWD_ref*。For example, when the difference (FWD_ref*)-(FWD_FB) is a positive value, since the output power feedback value FWD_FB is smaller than the output power command value FWD_ref*, the duty cycle Duty is made close to the maximum duty cycle Duty_max by increasing the phase difference command value φd* between the control signals and widening the pulse width, thereby making the output power feedback value FWD_FB close to the output power command value FWD_ref*.
相反地,在差分(FWD_ref*)-(FWD_FB)为负的值时,由于输出电力反馈值FWD_FB大于输出电力指令值FWD_ref*,因此通过使控制信号间相位差指令值φd*减少来缩窄脉冲宽度并使占空比Duty接近于最小占空比Duty_min,由此使输出电力反馈值FWD_FB接近于输出电力指令值FWD_ref*。On the contrary, when the difference (FWD_ref*)-(FWD_FB) is a negative value, since the output power feedback value FWD_FB is greater than the output power command value FWD_ref*, the pulse width is narrowed and the duty cycle Duty is close to the minimum duty cycle Duty_min by reducing the phase difference command value φd* between the control signals, thereby making the output power feedback value FWD_FB close to the output power command value FWD_ref*.
(相位位移控制)(Phase shift control)
负责相位位移控制的相位差控制功能部12B对用于分别控制放大器2A、2B的控制信号Sig1a、Sig2a的成组信号Siga与控制信号Sig1b、Sig2b的成组信号Sigb的成组信号间,赋予控制信号组间相位差φs。The phase difference control function unit 12B in charge of phase shift control provides an inter-control signal group phase difference φs between the group signals Siga of the control signals Sig1a and Sig2a and the group signal Sigb of the control signals Sig1b and Sig2b for controlling the amplifiers 2A and 2B, respectively.
控制信号组间相位差φs被用于相位位移控制,该相位位移控制对驱动电路3A输出的栅极信号Gsig1a、Gsig2a的信号组与驱动电路3B输出的栅极信号Gsig1b、Gsig2b的成组信号的信号组间赋予相位差φs,并对同时输出驱动电路3A的放大器输出和驱动电路3B的放大器输出的相位的重叠进行控制。驱动电路3A的放大器输出与驱动电路3B的放大器输出之间的放大器输出间相位差φsamp根据控制信号组间相位差指令值φs*而生成的控制信号的控制信号组间相位差φs而被相位位移控制。The control signal group phase difference φs is used for phase shift control, which gives a phase difference φs between the signal group of gate signals Gsig1a and Gsig2a output by the drive circuit 3A and the signal group of gate signals Gsig1b and Gsig2b output by the drive circuit 3B, and controls the overlap of the phases of the amplifier output of the drive circuit 3A and the amplifier output of the drive circuit 3B that are simultaneously output. The amplifier output inter-phase difference φsamp between the amplifier output of the drive circuit 3A and the amplifier output of the drive circuit 3B is phase-shift controlled according to the control signal group phase difference φs of the control signal generated by the control signal group phase difference command value φs*.
控制信号组间相位差指令值φs*的运算可以通过使输出电力指令值FWD_ref*与输出电力反馈值FWD_FB的差分成为零的反馈控制来进行。The calculation of the control signal group phase difference command value φs* can be performed by feedback control that makes the difference between the output power command value FWD_ref* and the output power feedback value FWD_FB zero.
例如,差分(FWD_ref*)-(FWD_FB)为正的值时,由于输出电力反馈值FWD_FB小于输出电力指令值FWD_ref*,因此通过使控制信号组间相位差指令值φs*接近于0[deg],使输出电力反馈值FWD_FB接近于输出电力指令值FWD_ref*。For example, when the difference (FWD_ref*)-(FWD_FB) is a positive value, since the output power feedback value FWD_FB is smaller than the output power command value FWD_ref*, the output power feedback value FWD_FB is made close to the output power command value FWD_ref* by making the phase difference command value φs* between the control signal groups close to 0 [deg].
相反地,差分(FWD_ref*)-(FWD_FB)为负的值时,由于输出电力反馈值FWD_FB大于输出电力指令值FWD_ref*,因此通过使控制信号组间相位差指令值φs*接近于180[deg],使输出电力反馈值FWD_FB接近于输出电力指令值FWD_ref*。On the contrary, when the difference (FWD_ref*)-(FWD_FB) is a negative value, since the output power feedback value FWD_FB is greater than the output power command value FWD_ref*, the output power feedback value FWD_FB is made close to the output power command value FWD_ref* by making the phase difference command value φs* between the control signal groups close to 180 [deg].
PWM控制的相位差控制功能部12Aa、12Ab以及相位位移控制的相位差控制功能部12B根据由电力控制部10的运算处理得到的控制信号间相位差指令值φda*、φdb*以及控制信号组间相位差指令值φs*,生成以频率信号(CLK信号)为基准的差动信号的控制信号Sig1a、Sig2a以及控制信号Sig1b、Sig2b。The phase difference control functional unit 12Aa, 12Ab of PWM control and the phase difference control functional unit 12B of phase shift control generate control signals Sig1a, Sig2a and control signals Sig1b, Sig2b of differential signals based on the frequency signal (CLK signal) according to the phase difference command values φda*, φdb* between control signals and the phase difference command value φs* between control signal groups obtained by the calculation processing of the power control unit 10.
PWM控制的相位差控制功能部12Aa、12Ab以及相位位移控制的相位差控制功能部12B,可以通过将DDS(直接数字合成)的频率/相位设为可变的信号振荡器,或者FPGA(现厂可编程逻辑门阵列)的集成电路等而构成各功能部分。The phase difference control functional units 12Aa, 12Ab of PWM control and the phase difference control functional unit 12B of phase shift control can be composed of each functional part by setting the frequency/phase of DDS (direct digital synthesis) to a variable signal oscillator, or an integrated circuit of FPGA (field programmable gate array).
此外,在图8中,以圆圈数字1表示直流电压指令值Vref*,以圆圈数字2表示控制信号间相位差指令值φd*(φda*,φdb*),以圆圈数字3表示控制信号组间相位差指令值φs*。8 , circled number 1 indicates the DC voltage command value Vref*, circled number 2 indicates the control signal phase difference command value φd* (φda*, φdb*), and circled number 3 indicates the control signal group phase difference command value φs*.
3-2.结构例23-2. Structural Example 2
根据图9说明结构例2。结构例2判定由控制信号生成部12生成的控制信号间相位差φd是否与通过电力控制部10的运算得到的控制信号间相位差指令值φd*一致,在不一致的情况下,调整成由控制信号生成部12生成的控制信号间相位差φd与控制信号间相位差指令值φd*一致。Configuration Example 2 is described with reference to Fig. 9. Configuration Example 2 determines whether the control signal phase difference φd generated by the control signal generating unit 12 is consistent with the control signal phase difference command value φd* obtained by the operation of the power control unit 10, and if they are inconsistent, adjusts the control signal phase difference φd generated by the control signal generating unit 12 to be consistent with the control signal phase difference command value φd*.
在控制信号间相位差φd的调整中,个别地进行控制信号Sig1a、Sig2a的信号间的控制信号间相位差φda的调整、和控制信号Sig1b、Sig2b的信号间的控制信号间相位差φdb的调整。In the adjustment of the control signal phase difference φd, the control signal phase difference φda between the control signals Sig1a and Sig2a and the control signal phase difference φdb between the control signals Sig1b and Sig2b are adjusted separately.
在图9中,带圆圈的附图标记a1、a2表示将从控制信号生成部12输出的控制信号Sig1a、Sig2a反馈至电力控制部10,并求出控制信号Sig1a和控制信号Sig2a之间的控制信号间相位差φda的路径,带圆圈的附图标记b1、b2表示将从控制信号生成部12输出的控制信号Sig1b、Sig2b反馈至电力控制部10,并求出控制信号Sig1b和控制信号Sig2b之间的控制信号间相位差φdb的路径。In Figure 9, the circled reference numerals a1 and a2 indicate paths for feeding back the control signals Sig1a and Sig2a output from the control signal generating unit 12 to the power control unit 10, and calculating the phase difference φda between the control signals Sig1a and Sig2a. The circled reference numerals b1 and b2 indicate paths for feeding back the control signals Sig1b and Sig2b output from the control signal generating unit 12 to the power control unit 10, and calculating the phase difference φdb between the control signals Sig1b and Sig2b.
相位差运算部10b对由运算得到的控制信号间相位差指令值φda*与通过反馈所得到的控制信号间相位差φda进行比较,以使控制信号间相位差φda与控制信号间相位差指令值φda*一致的方式,调整对控制信号生成部12进行指令的指令值。同样地,对由运算得到的控制信号间相位差指令值φdb*与通过反馈所得到的控制信号间相位差φdb进行比较,以使控制信号间相位差φdb与控制信号间相位差指令值φdb*一致的方式,调整对控制信号生成部12进行指令的指令值。控制信号生成部12根据被调整后的指令值而调整控制信号间相位差φda、φdb。The phase difference calculation unit 10b compares the control signal phase difference command value φda* obtained by calculation with the control signal phase difference φda obtained by feedback, and adjusts the command value for instructing the control signal generator 12 so that the control signal phase difference φda and the control signal phase difference command value φda* are consistent. Similarly, the control signal phase difference command value φdb* obtained by calculation is compared with the control signal phase difference φdb obtained by feedback, and adjusts the command value for instructing the control signal generator 12 so that the control signal phase difference φdb and the control signal phase difference command value φdb* are consistent. The control signal generator 12 adjusts the control signal phase differences φda and φdb according to the adjusted command values.
3-3.结构例33-3. Structural Example 3
根据图10说明结构例3。结构例3是判定以放大器2A、2B生成的放大器输出间是否产生差异,在不一致的情况下,调整由控制信号生成部12生成的控制信号组间相位差φs。在图10中,带圆圈的附图标记c、附图标记d表示将放大器2A、放大器2B的放大器输出反馈于电力控制部10而求出控制信号组间相位差φs的路径。Configuration Example 3 is described with reference to FIG10. Configuration Example 3 is to determine whether there is a difference between the amplifier outputs generated by the amplifiers 2A and 2B, and if there is a difference, adjust the control signal group phase difference φs generated by the control signal generating unit 12. In FIG10, circled reference numerals c and d indicate a path for feeding back the amplifier outputs of the amplifiers 2A and 2B to the power control unit 10 to obtain the control signal group phase difference φs.
相位差运算部10b对由运算得到的控制信号组间相位差指令值φs*与通过反馈所得到的控制信号组间相位差φs进行比较,以使控制信号组间相位差φs与控制信号组间相位差φs*一致的方式,调整对控制信号生成部12下指令的指令值。控制信号生成部12根据被调整后的指令值而调整控制信号组间相位差φs。The phase difference calculation unit 10b compares the control signal group phase difference command value φs* obtained by calculation with the control signal group phase difference φs obtained by feedback, and adjusts the command value given to the control signal generation unit 12 so that the control signal group phase difference φs is consistent with the control signal group phase difference φs*. The control signal generation unit 12 adjusts the control signal group phase difference φs according to the adjusted command value.
3-4.电力控制部的重要部位的结构例3-4. Example of the structure of important parts of the power control unit
图11表示电力控制部的重要部位的结构例。在此,输出电力反馈值FWD_FB是表示高输出和低输出的2阶段的输出电平的例子。Fig. 11 shows an example of the configuration of a main part of the power control unit. Here, the output power feedback value FWD_FB is an example showing two-stage output levels of high output and low output.
在输出电力反馈值FWD_FB为高输出的输出电平的情况下,通过High_hold信号取样(保持)高输出,求出取样后的高输出与高侧的输出电力指令值FWD_ref*(H)的差分,通过电力控制器10a1对该差分进行电力放大而运算直流电压指令值Vref*。直流电压指令值Vref*通过电力控制器10a1转换成操作量α,控制直流电源6的AC/DC转换器。直流电源6是将交流电源的交流交流/直流转换成直流而输出直流电压Vdc。When the output power feedback value FWD_FB is at the output level of the high output, the high output is sampled (held) by the High_hold signal, and the difference between the sampled high output and the high-side output power command value FWD_ref* (H) is obtained. The power controller 10a1 performs power amplification on the difference to calculate the DC voltage command value Vref*. The DC voltage command value Vref* is converted into the operation amount α by the power controller 10a1 to control the AC/DC converter of the DC power supply 6. The DC power supply 6 converts the AC/DC of the AC power supply into DC and outputs the DC voltage Vdc.
在输出电力反馈值FWD_FB为低输出的输出电平的情况,通过Low_hold信号,取样(保持)低输出,求出取样后的低输出与低侧的输出电力指令值FWD_ref*(L)的差分,将该差分通过电力控制器10b1进行电力放大之后,运算控制信号间相位差指令值φd*及控制信号组间相位差指令值φs*的各相位差数据。When the output power feedback value FWD_FB is the output level of low output, the low output is sampled (held) through the Low_hold signal, and the difference between the sampled low output and the low-side output power command value FWD_ref*(L) is obtained. After the difference is power-amplified by the power controller 10b1, the phase difference data of the phase difference command value φd* between control signals and the phase difference command value φs* between control signal groups are calculated.
3-5.概略信号例3-5. General signal example
3-5a.高输出电平(直流电压控制)的信号例3-5a. Signal example of high output level (DC voltage control)
图12是表示本发明的高频电源装置的各部的信号的概略,在高输出电平范围中进行直流电压控制时的概略信号例。FIG. 12 schematically shows signals of various parts of the high-frequency power supply device of the present invention, and is a schematic signal example when DC voltage control is performed in a high output level range.
在进行直流电压控制的情况下,固定控制信号间相位差指令值φd*及控制信号组间相位差指令值φs*,通过基于直流电压Vdc的直流电压控制来进行输出电力的可变控制。When DC voltage control is performed, the inter-control signal phase difference command value φd* and the inter-control signal group phase difference command value φs* are fixed, and variable control of output power is performed by DC voltage control based on the DC voltage Vdc.
图12中的(a)、(b)表示在放大器(AMP_UNITA)侧的控制信号Sig1a、Sig2a,图12中的(c)、(d)表示在放大器(AMP_UNITB)侧的控制信号Sig1b、Sig2b。各信号表示处于以P、N的附图标记表示的相位彼此反相的关系的差动信号的例子。在图12中的(a)、(b)、(c)、(d)中以实线表示信号P,以虚线表示信号N。(a) and (b) in FIG. 12 show control signals Sig1a and Sig2a on the amplifier (AMP_UNITA) side, and (c) and (d) in FIG. 12 show control signals Sig1b and Sig2b on the amplifier (AMP_UNITB) side. Each signal shows an example of a differential signal in which the phases are in a mutually anti-phase relationship represented by the reference numerals P and N. In (a), (b), (c), and (d) in FIG. 12, the signal P is represented by a solid line, and the signal N is represented by a dotted line.
图12中的(e)示出了控制信号Sig1a与控制信号Sig2a的成组信号、和控制信号Sig1b与控制信号Sig2b的成组信号的控制信号组间相位差指令值φs*,并示出了控制信号组间相位差指令值φs*为固定状态。虽然控制信号组间相位差指令值φs*可以设为例如0[deg]的固定值,但是即使设为0[deg]以外的相位差也可以。(e) in Fig. 12 shows the control signal group phase difference command value φs* of the group signal of the control signal Sig1a and the control signal Sig2a, and the control signal Sig1b and the control signal Sig2b, and shows that the control signal group phase difference command value φs* is fixed. Although the control signal group phase difference command value φs* can be set to a fixed value of 0 [deg], for example, it can also be set to a phase difference other than 0 [deg].
图12中的(f)示出了控制信号Sig1a与控制信号Sig2a的控制信号间相位差指令值φda*、以及控制信号Sig1b和控制信号Sig2b的控制信号间相位差φdb*为固定状态。由于控制信号间相位差指令值φda*、φdb*被固定,因此即使针对驱动放大器的栅极信号的占空比Duty也被固定(图12中的(g))。(f) in FIG12 shows that the phase difference command value φda* between the control signal Sig1a and the control signal Sig2a, and the phase difference φdb* between the control signal Sig1b and the control signal Sig2b are fixed. Since the phase difference command values φda* and φdb* between the control signals are fixed, the duty ratio Duty of the gate signal for the driver amplifier is also fixed ((g) in FIG12).
当控制信号间相位差指令值φda*、φdb*的固定值考虑高效率化时,140[deg]-160[deg]为推荐值,将基于该控制信号间相位差φd的占空比Duty设定为额定Duty。When considering high efficiency, the fixed values of the control signal phase difference command values φda* and φdb* are recommended to be 140 [deg]-160 [deg], and the duty ratio Duty based on the control signal phase difference φd is set as the rated Duty.
图12中的(h)、(i)是放大器(AMP_UNITA)侧的栅极信号电压Vgs1a、Vgs2a,图12中的(j)、(k)是放大器(AMP_UNITB)侧的栅极信号电压Vgs1b、Vgs2b,各自的脉冲宽度由图12中的(g)的占空比DutyA、DutyB决定。此外,DTA是被设置在栅极信号电压Vgs1a与栅极信号电压Vgs2a之间的死区时间,DTB是被设置在栅极信号电压Vgs1b与栅极信号电压Vgs2b之间的死区时间。图12中的(1)为以基于直流电压控制的操作量α而决定的直流电压Vdc。(h) and (i) in FIG. 12 are gate signal voltages Vgs1a and Vgs2a on the amplifier (AMP_UNITA) side, and (j) and (k) in FIG. 12 are gate signal voltages Vgs1b and Vgs2b on the amplifier (AMP_UNITB) side, and the respective pulse widths are determined by the duty ratios DutyA and DutyB in (g) in FIG. 12. In addition, DTA is the dead time set between the gate signal voltage Vgs1a and the gate signal voltage Vgs2a, and DTB is the dead time set between the gate signal voltage Vgs1b and the gate signal voltage Vgs2b. (1) in FIG. 12 is the DC voltage Vdc determined by the operation amount α based on the DC voltage control.
栅极信号电压Vgs1a与栅极信号电压Vgs1b的相位差是放大器2A与放大器2B的放大器输出间相位差φsamp,对应于控制信号组间相位差φs。在控制信号组间相位差指令值φs*被固定在0[deg]的固定值的情况下,放大器输出间相位差φsamp成为0[deg]。The phase difference between gate signal voltage Vgs1a and gate signal voltage Vgs1b is the phase difference φs amp between amplifier outputs of amplifier 2A and amplifier 2B, which corresponds to the phase difference φs between control signal groups. When the control signal group phase difference command value φs* is fixed to a fixed value of 0 [deg], the phase difference φs amp between amplifier outputs becomes 0 [deg].
3-5b.低输出电平(PWM控制)的信号例3-5b. Example of signal with low output level (PWM control)
图13是表示本发明的高频电源装置的各部的信号的概略,在低输出电平范围中,进行基于PWM控制的相位差控制时的概略信号例。FIG. 13 schematically shows signals of various parts of the high-frequency power supply device of the present invention, and is a schematic signal example when phase difference control is performed by PWM control in a low output level range.
在进行PWM控制的情况下,固定直流电压指令值Vdc*及控制信号组间相位差指令值φs*,通过将控制信号间相位差φd设为可变的相位位移控制,进行输出电力的可变控制。When PWM control is performed, the DC voltage command value Vdc* and the control signal group phase difference command value φs* are fixed, and variable control of the output power is performed by phase shift control in which the control signal phase difference φd is made variable.
图13中的(a)、(b)示出了在放大器(AMP_UNITA)侧的控制信号Sig1a、Sig2a,图13中的(c)、(d)示出了在放大器(AMP_UNITB)侧的控制信号Sig1b、Sig2b。各信号表示处于以P、N的附图标记表示的相位彼此反相的关系的差动信号的例子。在图13中的(a)、(b)、(c)、(d)中,以实线表示信号P,以虚线表示信号N。(a) and (b) in FIG. 13 show control signals Sig1a and Sig2a on the amplifier (AMP_UNITA) side, and (c) and (d) in FIG. 13 show control signals Sig1b and Sig2b on the amplifier (AMP_UNITB) side. Each signal represents an example of a differential signal in which the phases are in a relationship of anti-phase to each other, which are represented by reference numerals P and N. In (a), (b), (c), and (d) in FIG. 13, signal P is represented by a solid line, and signal N is represented by a dotted line.
图13中的(e)示出了控制信号Sig1a与控制信号Sig2a的成组信号、和控制信号Sig1b与控制信号Sig2b的成组信号的控制信号组间相位差指令值φs*,并示出了控制信号组间相位差指令值φs*为固定状态。FIG13(e) shows the control signal group phase difference command value φs* of the control signal Sig1a and the control signal Sig2a, and the control signal Sig1b and the control signal Sig2b, and shows that the control signal group phase difference command value φs* is fixed.
图13中的(f)示出了控制信号Sig1a与控制信号Sig2a的控制信号间相位差φda、以及控制信号Sig1b与控制信号Sig2b的控制信号间相位差指令值φdb*为可变状态。通过将控制信号间相位差指令值φda*、φdb*设为可变,驱动放大器的栅极信号的占空比Duty成为可变(图13中的(g))。FIG13(f) shows that the phase difference φda between the control signal Sig1a and the control signal Sig2a and the phase difference command value φdb* between the control signal Sig1b and the control signal Sig2b are variable. By making the phase difference command values φda* and φdb* between the control signals variable, the duty cycle Duty of the gate signal driving the amplifier becomes variable (FIG13(g)).
图13中的(h)、(i)为放大器(AMP_UNITA)侧的栅极信号电压Vgs1a、Vgs2a,图13中的(j)、(k)为放大器(AMP_UNITB)侧的栅极信号电压Vgs1b、Vgs2b,各自的脉冲宽度通过图13中的(g)的占空比DutyA、DutyB成为可变。此外,DTA是被设置在栅极信号电压Vgs1a与栅极信号电压Vgs2a之间的死区时间,DTB是被设置在栅极信号电压Vgs1b与栅极信号电压Vgs2b之间的死区时间,伴随着占空比DutyA及DutyB的变化而变化。以比高输出电平时设定的额定Duty降低输出电力的方式而将占空比DutyA及DutyB设为可变。(h) and (i) in FIG. 13 are gate signal voltages Vgs1a and Vgs2a on the amplifier (AMP_UNITA) side, and (j) and (k) in FIG. 13 are gate signal voltages Vgs1b and Vgs2b on the amplifier (AMP_UNITB) side, and the respective pulse widths are made variable by the duty ratios DutyA and DutyB in (g) in FIG. 13. In addition, DTA is a dead time set between the gate signal voltage Vgs1a and the gate signal voltage Vgs2a, and DTB is a dead time set between the gate signal voltage Vgs1b and the gate signal voltage Vgs2b, which change with the changes in the duty ratios DutyA and DutyB. DutyA and DutyB are made variable in such a way as to reduce the output power compared to the rated duty set at the high output level.
图13中的(1)是以基于直流电压控制的操作量α决定的直流电压Vdc,由于不进行直流电压控制,因此被固定。(1) in FIG. 13 is a DC voltage Vdc determined by the operation amount α based on the DC voltage control, and is fixed because the DC voltage control is not performed.
栅极信号电压Vgs1a与栅极信号电压Vgs1b的相位差为放大器2A与放大器2B的放大器输出间相位差φsamp,对应于控制信号组间相位差φs。在控制信号组间相位差指令值φs*被固定于0[deg]的固定值的情况下,放大器输出间相位差φsamp成为0[deg]。The phase difference between gate signal voltage Vgs1a and gate signal voltage Vgs1b is the phase difference φs amp between amplifier outputs of amplifier 2A and amplifier 2B, which corresponds to the phase difference φs between control signal groups. When the control signal group phase difference command value φs* is fixed to a fixed value of 0 [deg], the phase difference φs amp between amplifier outputs becomes 0 [deg].
PWM控制是从在高输出电平时设定的额定Duty在最小占空比Duty_min的范围内使控制信号间相位差φd可变,在超过最小占空比Duty_min进而使输出电力降低至低输出侧的情况下,应用相位位移控制。The PWM control makes the phase difference φd between control signals variable within the range of the minimum duty ratio Duty_min from the rated duty set at the high output level. When the minimum duty ratio Duty_min is exceeded and the output power is reduced to the low output side, phase shift control is applied.
3-5c.低输出电平(相位位移控制)的信号例3-5c. Signal example of low output level (phase shift control)
图14表示本发明的高频电源装置的各部的信号的概略,在低输出电平范围,进行基于相位位移控制的相位差控制时的概略信号例。FIG. 14 schematically shows signals of various parts of the high-frequency power supply device of the present invention, and shows a schematic signal example when phase difference control based on phase shift control is performed in a low output level range.
相位位移控制应用于即使通过PWM控制将脉冲宽度缩窄至最小占空比Duty_min,输出电压也不能下降的情况。在进行相位位移控制的情况下,固定直流电压指令值Vdc*及控制信号间相位差指令值φd*,通过将控制信号组间相位差φs设为可变的相位位移控制,进行输出电力的可变控制。通过将控制信号组间相位差φs在0[deg]≤φs≤180[deg]的范围设为可变,可以使输出电力下降至零。Phase shift control is used when the output voltage cannot be reduced even if the pulse width is narrowed to the minimum duty cycle Duty_min by PWM control. When performing phase shift control, the DC voltage command value Vdc* and the phase difference command value φd* between control signals are fixed, and variable control of the output power is performed by setting the phase difference φs between control signal groups to be variable. By setting the phase difference φs between control signal groups to be variable within the range of 0[deg]≤φs≤180[deg], the output power can be reduced to zero.
图14中的(a)、(b)表示在放大器(AMP_UNITA)侧的控制信号Sig1a、Sig2a,图14中的(c)、(d)表示在放大器(AMP_UNITB)侧的控制信号Sig1b、Sig2b。各信号表示处于以P、N的附图标记表示的相位彼此反相的关系的差动信号的例子。在图14中的(a)、(b)、(c)、(d)中以实线表示信号P,以虚线表示信号N。(a) and (b) in FIG. 14 show control signals Sig1a and Sig2a on the amplifier (AMP_UNITA) side, and (c) and (d) in FIG. 14 show control signals Sig1b and Sig2b on the amplifier (AMP_UNITB) side. Each signal shows an example of a differential signal in which the phases are in a mutually opposite relationship, which are indicated by reference numerals P and N. In (a), (b), (c), and (d) in FIG. 14, signal P is indicated by a solid line, and signal N is indicated by a dotted line.
图14中的(e)示出了控制信号Sig1a与控制信号Sig2a的成组信号、和控制信号Sig1b与控制信号Sig2b的成组信号的控制信号组间相位差指令值φs*,示出了控制信号组间相位差指令值φs*为可变状态。(e) in FIG. 14 shows the control signal group phase difference command value φs* of the control signal Sig1a and the control signal Sig2a, and the control signal Sig1b and the control signal Sig2b, and shows that the control signal group phase difference command value φs* is variable.
图14中的(f)示出了控制信号Sig1a与控制信号Sig2a的控制信号间相位差指令值φda*、以及控制信号Sig1b与控制信号Sig2b的控制信号间相位差指令值φdb*为固定状态。通过固定控制信号间相位差指令值φda*、φdb*,驱动放大器的栅极信号的占空比Duty成为固定值(图14中的(g))。(f) in FIG14 shows that the phase difference command value φda* between the control signal Sig1a and the control signal Sig2a, and the phase difference command value φdb* between the control signal Sig1b and the control signal Sig2b are fixed. By fixing the phase difference command values φda* and φdb* between the control signals, the duty cycle Duty of the gate signal driving the amplifier becomes a fixed value ((g) in FIG14).
图14中的(h)、(i)是放大器(AMP_UNITA)侧的栅极信号电压Vgs1a、Vgs2a,图14中的(j)、(k)是放大器(AMP_UNITB)侧的栅极信号电压Vgs1b、Vgs2b,各自的脉冲宽度以图14中的(g)的占空比DutyA、DutyB的固定值而成为固定状态。此外,DTA是被设置在栅极信号电压Vgs1a与栅极信号电压Vgs2a之间的死区时间,DTB是被设置在栅极信号电压Vgs1b与栅极信号电压Vgs2b之间的死区时间。(h) and (i) in FIG. 14 are gate signal voltages Vgs1a and Vgs2a on the amplifier (AMP_UNITA) side, and (j) and (k) in FIG. 14 are gate signal voltages Vgs1b and Vgs2b on the amplifier (AMP_UNITB) side, and the respective pulse widths are fixed at the fixed values of duty ratios DutyA and DutyB in (g) in FIG. 14. In addition, DTA is a dead time set between gate signal voltage Vgs1a and gate signal voltage Vgs2a, and DTB is a dead time set between gate signal voltage Vgs1b and gate signal voltage Vgs2b.
控制信号间相位差φda、φdb将施加于放大器的栅极信号电压Vgs1a、Vgs2a的占空比DutyA、以及栅极信号电压Vgs1b、Vgs2b的占空比DutyB设为成为驱动基板能够供给的最小占空比Duty_min的固定值。The control signal phase differences φda and φdb set the duty ratio DutyA of the gate signal voltages Vgs1a and Vgs2a and the duty ratio DutyB of the gate signal voltages Vgs1b and Vgs2b applied to the amplifier to fixed values that are the minimum duty ratio Duty_min that can be supplied by the drive substrate.
图14中的(1)为通过基于直流电压控制的操作量α决定的直流电压Vdc,由于不进行直流电压控制,因此被固定。(1) in FIG. 14 is a DC voltage Vdc determined by the operation amount α based on the DC voltage control, and is fixed because the DC voltage control is not performed.
栅极信号电压Vgs1a与栅极信号电压Vgs1b的相位差是放大器2A与放大器2B的放大器输出间相位差φsamp,对应于控制信号组间相位差φs。放大器输出间相位差φsamp成为控制信号组间相位差指令值φs*对应于可变值的角度。The phase difference between gate signal voltage Vgs1a and gate signal voltage Vgs1b is the phase difference φsamp between amplifier outputs of amplifier 2A and amplifier 2B, which corresponds to the phase difference φs between control signal groups. The phase difference φsamp between amplifier outputs becomes the angle corresponding to the variable value of the phase difference command value φs* between control signal groups.
4.并联连接例4. Parallel connection example
图15的结构例示出了将图1所示的高频电源装置设为1个单元,并联连接多个单元的结构。The configuration example of FIG15 shows a configuration in which the high-frequency power supply device shown in FIG1 is used as one unit and a plurality of units are connected in parallel.
图15所示的结构例是将单元A-单元N的多个个高频电源装置并联连接而成的结构。各单元A-N与图1所示的结构同样地分别具备驱动电路3、放大器2、以及循环器/隔离器4。由控制信号生成部12生成的控制信号Sig1a、Sig2a、Sig1b、Sig2b被信号分配器7分配,并供给至单元A-单元N。单元A-单元N的控制与上述控制方式同样地被进行。从单元A-单元N的各单元输出的两个放大器的放大器输出间相位差φsamp是与控制信号组间相位差值φs*对应的相位差。The configuration example shown in FIG15 is a configuration in which a plurality of high frequency power supply devices of unit A to unit N are connected in parallel. Each unit AN is provided with a drive circuit 3, an amplifier 2, and a circulator/isolator 4, respectively, similarly to the configuration shown in FIG1 . The control signals Sig1a, Sig2a, Sig1b, and Sig2b generated by the control signal generating unit 12 are distributed by the signal distributor 7 and supplied to the units A to unit N. The control of the units A to unit N is performed in the same manner as the above-mentioned control method. The phase difference φs amp between the amplifier outputs of the two amplifiers output from each unit of the units A to unit N is a phase difference corresponding to the phase difference value φs* between the control signal groups.
合成器5将在各单元合成并经过相位位移控制而得到的放大器输出进一步合成而输出最终的高频脉冲输出。The synthesizer 5 further synthesizes the amplifier outputs synthesized in each unit and obtained through phase shift control to output a final high-frequency pulse output.
工业实用性Industrial Applicability
本发明的高频电源装置及高频脉冲输出的输出控制方法被应用于输出为1kw以上且频率范围为27MHz~100MHz的脉冲输出的工业机器,可以应用于半导体制造装置或平板显示器(液晶面板、有机面板)制造装置、太阳光面板制造装置、CO2激光加工机等工业用途。The high-frequency power supply device and the output control method of high-frequency pulse output of the present invention are applied to industrial machines with pulse outputs of more than 1 kW and a frequency range of 27 MHz to 100 MHz, and can be applied to semiconductor manufacturing equipment or flat panel display (liquid crystal panel, organic panel) manufacturing equipment, solar panel manufacturing equipment, CO2 laser processing machines and other industrial uses.
附图标记说明Description of Reference Numerals
1 高频电源装置1 High frequency power supply device
2 放大器2 Amplifier
2、2A、2B 放大器2.2A, 2B Amplifier
3、3A、3B 驱动电路3.3A, 3B drive circuit
4、4A、4B 循环器/隔离器4, 4A, 4B Circulator/Isolator
5 合成器5 Synthesizer
6 直流电源6 DC power supply
7 信号分配器7 Signal distributor
10 电力控制部10 Power Control Unit
10a 直流电压运算部10a DC voltage calculation unit
10a1、10b1电力控制器10a1, 10b1 power controller
10b 相位差运算部10b Phase difference calculation unit
11 直流电压控制部11 DC voltage control unit
12 控制信号生成部12 Control signal generation unit
12Aa、12Ab、12B相位差控制功能部12Aa, 12Ab, 12B phase difference control function unit
A-N单元A-N Unit
DT_min最小所需死区时间DT_min minimum required dead time
DT、DTA、DTB死区时间DT, DTA, DTB dead time
Duty_max最大占空比Duty_max maximum duty cycle
Duty_min最小占空比Duty_min minimum duty cycle
Duty、DutyA、DutyB占空比Duty, DutyA, DutyB duty ratio
FWD_ref*输出电力指令值FWD_ref* output power command value
FWD_FB输出电力反馈值FWD_FB output power feedback value
FWD输出电力FWD output power
Gsig1a、Gsig2a栅极信号Gsig1a, Gsig2a gate signals
Gsig1b、Gsig2b栅极信号Gsig1b, Gsig2b gate signals
P、N差动信号P, N differential signal
Pout输出电力P out output power
Sig1a、Sig2a控制信号Sig1a, Sig2a control signals
Sig1b、Sig2b控制信号Sig1b, Sig2b control signals
Siga、Sigb成组信号Siga, Sigb grouped signals
Vac 正弦波电压Vac Sine wave voltage
Vdc 直流电压Vdc DC voltage
Vdc_FB反馈电压Vdc_FB feedback voltage
Vdc_max最大值Vdc_max maximum value
Vdc_min最小值Vdc_min minimum value
Vdc* 直流电压指令值Vdc* DC voltage command value
Vdd 输出电压波形Vdd output voltage waveform
Vds 漏极-源极间电压Vds drain-source voltage
Vgs 栅极信号电压Vgs Gate signal voltage
Vgs1a,Vgs2a 栅极信号电压Vgs1a, Vgs2a Gate signal voltage
Vgs1b,Vgs2b 栅极信号电压Vgs1b, Vgs2b Gate signal voltage
Vref* 直流电压指令值Vref* DC voltage command value
α 操作量α Operation amount
φ 相位差φ Phase difference
φ* 相位差指令值φ* Phase difference command value
φd 控制信号间相位差φd Phase difference between control signals
φd* 控制信号间相位差指令值φd* Phase difference command value between control signals
φda 控制信号间相位差φda Phase difference between control signals
φda* 控制信号间相位差指令值φda* Phase difference command value between control signals
φdb 控制信号间相位差φdb Phase difference between control signals
φdb* 控制信号间相位差指令值φdb* Phase difference command value between control signals
φs 控制信号组间相位差φs Phase difference between control signal groups
φs* 控制信号组间相位差指令值φs* Phase difference command value between control signal groups
φsamp 放大器输出间相位差。φs amp amplifier output phase difference.
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