CN118004971A - A method for circulating and filtering electronic grade hydrogen peroxide - Google Patents
A method for circulating and filtering electronic grade hydrogen peroxide Download PDFInfo
- Publication number
- CN118004971A CN118004971A CN202410350766.6A CN202410350766A CN118004971A CN 118004971 A CN118004971 A CN 118004971A CN 202410350766 A CN202410350766 A CN 202410350766A CN 118004971 A CN118004971 A CN 118004971A
- Authority
- CN
- China
- Prior art keywords
- hydrogen peroxide
- electronic grade
- water
- raw water
- filtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
- C01B15/01—Hydrogen peroxide
- C01B15/013—Separation; Purification; Concentration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D37/00—Processes of filtration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
- B01D61/027—Nanofiltration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/145—Ultrafiltration
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Water Supply & Treatment (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Environmental & Geological Engineering (AREA)
- Nanotechnology (AREA)
- Inorganic Chemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The invention discloses a method for circularly filtering electronic grade hydrogen peroxide, which comprises the following steps: step S01: raw water pretreatment, step S02: mixing reaction, step S03: filtering, and step S04: recycling and step S05: and (5) online monitoring. The beneficial effects of the invention are as follows: the electronic grade hydrogen peroxide circulating filtration method provided by the invention has the advantages of simple process steps, easiness in operation and realization, capability of effectively improving the efficiency of electronic grade hydrogen peroxide circulating filtration and the effect of electronic grade hydrogen peroxide circulating filtration, no need of a large amount of energy to keep water circulation, great reduction in production cost and suitability for popularization and use.
Description
Technical Field
The invention relates to the technical field of electronic grade hydrogen peroxide circulating filtration, in particular to a method for circulating filtration of electronic grade hydrogen peroxide.
Background
Hydrogen peroxide is generally classified into industrial grade, food grade, reagent grade and electronic grade. Electronic grade hydrogen peroxide is a necessary raw material for large-scale integrated circuit production, and is prepared by using industrial hydrogen peroxide products as raw materials through the processes of resin adsorption or membrane filtration, ion exchange and the like. The quality requirements of electronic grade hydrogen peroxide are very high because even small impurities can have adverse effects on electronic components and integrated circuits.
The electronic grade hydrogen peroxide needs to be circularly filtered in the preparation process, and the main purpose is to ensure the high purity of the hydrogen peroxide so as to meet strict industrial standards and production requirements. In the prior art, the electronic grade hydrogen peroxide circulating filtration method has complex process and low efficiency, and simultaneously, a large amount of energy is required to keep water circulation and filter, so that the cost is high, and further development and improvement are required.
Disclosure of Invention
The invention aims to solve the problems that in the prior art, an electronic grade hydrogen peroxide circulating and filtering method is complex in process, low in efficiency, high in cost and capable of keeping water circulation and filtering by a large amount of energy.
The invention realizes the above purpose through the following technical scheme: the electronic grade hydrogen peroxide cyclic filtering method includes the following steps:
Step S01: the raw water is pretreated, deionized water is used as raw water to meet the requirement of electronic grade purified water, and then a microporous filter is used for removing solid particles below 0.2 microns in the raw water;
step S02: mixing reaction, namely injecting electronic grade hydrogen peroxide into the raw water treated in the step S01, and stirring at the same time to ensure that the hydrogen peroxide and the raw water are fully mixed for reaction;
Step S03: filtering, namely filtering the water after the mixed reaction in the step S02 through one of ultrafiltration membrane or nanofiltration membrane to remove tiny particles, microorganisms and other impurities, so as to ensure that the water quality reaches an electronic grade standard;
Step S04: recycling, namely re-injecting hydrogen peroxide into the water subjected to the filtering treatment in the step S03, and recycling to maintain the consistency of water quality and ensure the effective use of the hydrogen peroxide;
step S05: on-line monitoring, namely monitoring the water quality concentration of the hydrogen peroxide in the step S04 in real time, and discharging the hydrogen peroxide until the required water quality concentration is reached;
further, the raw water filtered in the step S01 is softened using an ion exchange resin.
Further, the stirring speed in the step S02 is 80-100r/min, and the reaction time is 10-20min.
Further, the injection of hydrogen peroxide in step S02 and step S04 is performed by an automatic control system, so as to ensure accurate control of the injection amount of hydrogen peroxide.
Further, the sensor for monitoring the water quality concentration in the step S05 needs to be regularly maintained and calibrated.
Compared with the prior art, the invention has the beneficial effects that: the electronic grade hydrogen peroxide circulating filtration method provided by the invention has the advantages of simple process steps, easiness in operation and realization, capability of effectively improving the efficiency of electronic grade hydrogen peroxide circulating filtration and the effect of electronic grade hydrogen peroxide circulating filtration, no need of a large amount of energy to keep water circulation, great reduction in production cost and suitability for popularization and use.
Drawings
FIG. 1 is a process flow diagram of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The method for circularly filtering the electronic grade hydrogen peroxide shown in the figure 1 comprises the following steps:
Step S01: the raw water is pretreated, deionized water is used as raw water to meet the requirement of electronic grade purified water, and then a microporous filter is used for removing solid particles below 0.2 microns in the raw water;
step S02: mixing reaction, namely injecting electronic grade hydrogen peroxide into the raw water treated in the step S01, and stirring at the same time to ensure that the hydrogen peroxide and the raw water are fully mixed for reaction;
Step S03: filtering, namely filtering the water after the mixed reaction in the step S02 through one of ultrafiltration membrane or nanofiltration membrane to remove tiny particles, microorganisms and other impurities, so as to ensure that the water quality reaches an electronic grade standard;
Step S04: recycling, namely re-injecting hydrogen peroxide into the water subjected to the filtering treatment in the step S03, and recycling to maintain the consistency of water quality and ensure the effective use of the hydrogen peroxide;
step S05: on-line monitoring, namely monitoring the water quality concentration of the hydrogen peroxide in the step S04 in real time, and discharging the hydrogen peroxide until the required water quality concentration is reached;
Softening the raw water filtered in the step S01 by using ion exchange resin; the stirring speed in the step S02 is 80-100r/min, and the reaction time is 10-20min; the injection of the hydrogen peroxide in the step S02 and the step S04 is operated by adopting an automatic control system so as to ensure the accurate control of the injection amount of the hydrogen peroxide; the sensor for monitoring the water quality concentration in the step S05 needs to be regularly maintained and calibrated.
The invention is illustrated by the following more specific examples.
Embodiment one:
The electronic grade hydrogen peroxide cyclic filtering method includes the following steps:
Step S01: the raw water is pretreated, deionized water is used as raw water to meet the requirement of electronic grade purified water, and then a microporous filter is used for removing solid particles below 0.2 microns in the raw water;
step S02: mixing reaction, namely injecting electronic grade hydrogen peroxide into the raw water treated in the step S01, and stirring at the same time to ensure that the hydrogen peroxide and the raw water are fully mixed for reaction;
Step S03: filtering, namely filtering the water after the mixed reaction in the step S02 through one of ultrafiltration membrane or nanofiltration membrane to remove tiny particles, microorganisms and other impurities, so as to ensure that the water quality reaches an electronic grade standard;
Step S04: recycling, namely re-injecting hydrogen peroxide into the water subjected to the filtering treatment in the step S03, and recycling to maintain the consistency of water quality and ensure the effective use of the hydrogen peroxide;
step S05: on-line monitoring, namely monitoring the water quality concentration of the hydrogen peroxide in the step S04 in real time, and discharging the hydrogen peroxide until the required water quality concentration is reached;
Softening the raw water filtered in the step S01 by using ion exchange resin; the stirring speed in the step S02 is 80r/min, and the reaction time is 10min; the injection of the hydrogen peroxide in the step S02 and the step S04 is operated by adopting an automatic control system so as to ensure the accurate control of the injection amount of the hydrogen peroxide; the sensor for monitoring the water quality concentration in the step S05 needs to be regularly maintained and calibrated.
Embodiment two:
The electronic grade hydrogen peroxide cyclic filtering method includes the following steps:
Step S01: the raw water is pretreated, deionized water is used as raw water to meet the requirement of electronic grade purified water, and then a microporous filter is used for removing solid particles below 0.2 microns in the raw water;
step S02: mixing reaction, namely injecting electronic grade hydrogen peroxide into the raw water treated in the step S01, and stirring at the same time to ensure that the hydrogen peroxide and the raw water are fully mixed for reaction;
Step S03: filtering, namely filtering the water after the mixed reaction in the step S02 through one of ultrafiltration membrane or nanofiltration membrane to remove tiny particles, microorganisms and other impurities, so as to ensure that the water quality reaches an electronic grade standard;
Step S04: recycling, namely re-injecting hydrogen peroxide into the water subjected to the filtering treatment in the step S03, and recycling to maintain the consistency of water quality and ensure the effective use of the hydrogen peroxide;
step S05: on-line monitoring, namely monitoring the water quality concentration of the hydrogen peroxide in the step S04 in real time, and discharging the hydrogen peroxide until the required water quality concentration is reached;
Softening the raw water filtered in the step S01 by using ion exchange resin; the stirring speed in the step S02 is 90r/min, and the reaction time is 15min; the injection of the hydrogen peroxide in the step S02 and the step S04 is operated by adopting an automatic control system so as to ensure the accurate control of the injection amount of the hydrogen peroxide; the sensor for monitoring the water quality concentration in the step S05 needs to be regularly maintained and calibrated.
Embodiment III:
The electronic grade hydrogen peroxide cyclic filtering method includes the following steps:
Step S01: the raw water is pretreated, deionized water is used as raw water to meet the requirement of electronic grade purified water, and then a microporous filter is used for removing solid particles below 0.2 microns in the raw water;
step S02: mixing reaction, namely injecting electronic grade hydrogen peroxide into the raw water treated in the step S01, and stirring at the same time to ensure that the hydrogen peroxide and the raw water are fully mixed for reaction;
Step S03: filtering, namely filtering the water after the mixed reaction in the step S02 through one of ultrafiltration membrane or nanofiltration membrane to remove tiny particles, microorganisms and other impurities, so as to ensure that the water quality reaches an electronic grade standard;
Step S04: recycling, namely re-injecting hydrogen peroxide into the water subjected to the filtering treatment in the step S03, and recycling to maintain the consistency of water quality and ensure the effective use of the hydrogen peroxide;
step S05: on-line monitoring, namely monitoring the water quality concentration of the hydrogen peroxide in the step S04 in real time, and discharging the hydrogen peroxide until the required water quality concentration is reached;
Softening the raw water filtered in the step S01 by using ion exchange resin; the stirring speed in the step S02 is 100r/min, and the reaction time is 20min; the injection of the hydrogen peroxide in the step S02 and the step S04 is operated by adopting an automatic control system so as to ensure the accurate control of the injection amount of the hydrogen peroxide; the sensor for monitoring the water quality concentration in the step S05 needs to be regularly maintained and calibrated.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (5)
1. The electronic grade hydrogen peroxide cyclic filtering method is characterized by comprising the following steps:
Step S01: the raw water is pretreated, deionized water is used as raw water to meet the requirement of electronic grade purified water, and then a microporous filter is used for removing solid particles below 0.2 microns in the raw water;
step S02: mixing reaction, namely injecting electronic grade hydrogen peroxide into the raw water treated in the step S01, and stirring at the same time to ensure that the hydrogen peroxide and the raw water are fully mixed for reaction;
Step S03: filtering, namely filtering the water after the mixed reaction in the step S02 through one of ultrafiltration membrane or nanofiltration membrane to remove tiny particles, microorganisms and other impurities, so as to ensure that the water quality reaches an electronic grade standard;
Step S04: recycling, namely re-injecting hydrogen peroxide into the water subjected to the filtering treatment in the step S03, and recycling to maintain the consistency of water quality and ensure the effective use of the hydrogen peroxide;
Step S05: and (3) on-line monitoring, namely monitoring the water quality concentration of the hydrogen peroxide in the step S04 in real time, and discharging the hydrogen peroxide until the required water quality concentration is reached.
2. The method for cyclic filtration of electronic grade hydrogen peroxide according to claim 1, wherein the raw water filtered in the step S01 is softened by using ion exchange resin.
3. The method for cyclic filtration of electronic grade hydrogen peroxide according to claim 1, wherein the stirring speed in the step S02 is 80-100r/min, and the reaction time is 10-20min.
4. The method for cyclic filtration of electronic grade hydrogen peroxide according to claim 1, wherein the injection of hydrogen peroxide in step S02 and the injection of hydrogen peroxide in step S04 are operated by an automatic control system, so as to ensure accurate control of the injection amount of hydrogen peroxide.
5. The method for cyclic filtration of electronic grade hydrogen peroxide according to claim 1, wherein the sensor for monitoring water quality concentration in the step S05 is required to be regularly maintained and calibrated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410350766.6A CN118004971A (en) | 2024-03-26 | 2024-03-26 | A method for circulating and filtering electronic grade hydrogen peroxide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410350766.6A CN118004971A (en) | 2024-03-26 | 2024-03-26 | A method for circulating and filtering electronic grade hydrogen peroxide |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN118004971A true CN118004971A (en) | 2024-05-10 |
Family
ID=90954183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410350766.6A Pending CN118004971A (en) | 2024-03-26 | 2024-03-26 | A method for circulating and filtering electronic grade hydrogen peroxide |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN118004971A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5262058A (en) * | 1989-04-12 | 1993-11-16 | Interox Chemicals Limited | Purification of hydrogen peroxide |
| JP2003119008A (en) * | 2001-10-10 | 2003-04-23 | Santoku Kagaku Kogyo Kk | Method for producing purified hydrogen peroxide solution |
| KR20090065605A (en) * | 2007-12-18 | 2009-06-23 | 신상열 | Hydrogen peroxide production device |
| CN109761201A (en) * | 2019-03-08 | 2019-05-17 | 住化电子材料科技(西安)有限公司 | A kind of preparation facilities and preparation method of ultrapure hydrogen peroxide aqueous solution |
| CN116253294A (en) * | 2023-03-31 | 2023-06-13 | 三立福新材料(福建)有限公司 | A kind of preparation method of electronic grade hydrogen peroxide |
-
2024
- 2024-03-26 CN CN202410350766.6A patent/CN118004971A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5262058A (en) * | 1989-04-12 | 1993-11-16 | Interox Chemicals Limited | Purification of hydrogen peroxide |
| JP2003119008A (en) * | 2001-10-10 | 2003-04-23 | Santoku Kagaku Kogyo Kk | Method for producing purified hydrogen peroxide solution |
| KR20090065605A (en) * | 2007-12-18 | 2009-06-23 | 신상열 | Hydrogen peroxide production device |
| CN109761201A (en) * | 2019-03-08 | 2019-05-17 | 住化电子材料科技(西安)有限公司 | A kind of preparation facilities and preparation method of ultrapure hydrogen peroxide aqueous solution |
| CN116253294A (en) * | 2023-03-31 | 2023-06-13 | 三立福新材料(福建)有限公司 | A kind of preparation method of electronic grade hydrogen peroxide |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1204044C (en) | Method for preparing industrial grade and food grade phosphoric acid by wet method phosphoric acid | |
| CN101857320B (en) | Method for treatment of silk degumming wastewater and recovery of silk gum | |
| CN104313583B (en) | Precipitant for recycling acidic etching waste liquid, and processing method thereof | |
| KR101044463B1 (en) | Apparatus and method for recycling potassium iodide waste solution in polarizing film manufacturing process | |
| CN106731883A (en) | A kind of poly-dopamine nano lignocellulose Kynoar composite hyperfiltration membrane and preparation method thereof | |
| CN112758957A (en) | Process for purifying sodium hydroxide concentration by electrodialysis | |
| CN112939281A (en) | Method and system for recovering N-methylmorpholine-N-oxide | |
| CN118004971A (en) | A method for circulating and filtering electronic grade hydrogen peroxide | |
| CN102061215B (en) | Decoloring method for recovering cutting fluids through multilineal cutting | |
| CN105219892A (en) | A kind of xylose production process | |
| CN113460969A (en) | Preparation method of semiconductor-grade hydrogen peroxide with high production efficiency and strong stability | |
| CN101870639A (en) | Production method of kelp mannitol with low energy consumption | |
| CN102493251A (en) | Papermaking red liquor sugar component using method | |
| CN110746008A (en) | Wastewater treatment system | |
| CN118388083A (en) | Wastewater treatment and recycling method for chip production | |
| CN107129081A (en) | A kind of processing of the sour acid out waste water of 2B and resource recovery process | |
| CN219128871U (en) | Recovery system of NMMO in lyocell fiber coagulating bath effluent | |
| CN116002815A (en) | A method for separation and purification of nickel sulfate electrolytic residual liquid and concentration of sulfuric acid | |
| CN223213974U (en) | Monocrystalline silicon slice wastewater treatment system | |
| CN1424255A (en) | Method for qualifying industrial ammonium chloride products | |
| CN113387503A (en) | Method for resource utilization of sewage | |
| CN120757627A (en) | A method and system for industrialized continuous production of silk fibroin | |
| CN112300224A (en) | Method for continuous decolorization and desalination of xylose mother liquor | |
| CN104370413A (en) | Papermaking wastewater treatment method by use of modified fly ash zeolite | |
| CN112759114A (en) | Treatment method of metal electroplating waste liquid |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |