CN117907667B - A collection device - Google Patents

Abstract

The present application relates to the field of radio frequency power sampling, and specifically, to a collection device, which includes a wire and a shell, one end of the wire is connected to the output end of the radio frequency power supply, and the other end is connected to the load circuit, the shell has a cylindrical cavity, the wire passes through the center of the cavity and is coaxially arranged with the shell, and does not contact the shell, and the shell is grounded; the collection device also includes a coaxial probe and a current sampling line; the coaxial probe is arranged outside the cavity, and includes: a coil, a first end of which passes through the shell, is perpendicular to the axis of the wire and enters the cavity, and a second end of which is grounded; the first end of the current sampling line outputs a sampling current signal, and the second end is grounded. The collection device of the present application can solve the problem of serious signal waveform distortion obtained by sampling the existing radio frequency power supply current sampling method, and can achieve the effect of preventing the current signal passing through the wire inside the cavity from interfering with the current sampling process outside the cavity based on the shielding effect of the shell.

Description

A collection device

Technical Field

The present application relates to the field of radio frequency power sampling, and in particular, to a sampling device.

Background technique

RF generator is a power source used to generate RF electric power. Its output is generally a sine wave or pulse. The frequency has specifications such as 2MHz, 13.56MHz, 27.12MHz, 60MHz, etc. The output power ranges from tens of watts to tens of kilowatts. The output impedance is generally 50 ohms. It can be used in various fields such as plasma generation, induction heating, and medical treatment.

The current sampling method of the existing RF power supply is generally to directly connect the current sampling circuit to the RF power supply for current sampling. However, since the power of the current signal output by the RF power supply is relatively large, it is easy to cause serious harmonic interference to the sampled current signal in the current sampling circuit, resulting in serious distortion of the signal waveform obtained in the current sampling process.

Therefore, the existing technology needs to be improved and developed.

Summary of the invention

The purpose of the present application is to provide a sampling device, aiming to solve the problem of serious signal waveform distortion obtained by sampling the existing radio frequency power supply current sampling method.

In a first aspect, the present application provides a collection device for collecting a current signal output by a radio frequency power supply, the collection device comprising a wire and a housing, one end of the wire is connected to the output end of the radio frequency power supply, and the other end is connected to a load circuit, the housing has a cylindrical cavity, the wire passes through the center of the cavity and is coaxially arranged with the housing, and does not contact the housing, and the housing is grounded;

The acquisition device also includes a coaxial probe and a current sampling line;

The coaxial probe is arranged outside the cavity and comprises:

The coil has a first end passing through the housing, perpendicular to the axial direction of the wire and entering the cavity, and a second end being grounded;

The first end of the current sampling line outputs a sampling current signal, the second end is grounded, and the coil is sleeved on the current sampling line without contacting the current sampling line.

The present application provides a collection device that can, based on the shielding effect of the shell, prevent the current signal passing through the wire inside the cavity from interfering with the current sampling process performed by the coil and the current sampling line outside the cavity, so that the waveform of the sampled current signal output outside the cavity does not produce a large distortion. The collection device of the present application is provided with a first end of the coil passing through the shell and entering the cavity, which can output the current signal from the inside of the cavity to the outside of the cavity while the shell shields the interference signal generated by the interference source outside the cavity.

Optionally, the collection device further includes:

The voltage sampling structure is installed on the housing, has an antenna end located inside the cavity and used for receiving electromagnetic radiation emitted by the wire, and has an output end located outside the cavity and outputting a sampled voltage signal.

In this embodiment, the acquisition device of the present application is provided with a voltage sampling structure, which can output the voltage signal from the inside of the cavity to the outside of the cavity while the outer shell shields the interference signal generated by the interference source outside the cavity, and enables the antenna end of the voltage sampling structure to receive accurate electromagnetic radiation, so that the sampled voltage signal outputted from its output end can more accurately represent the RF power supply voltage.

Optionally, the voltage sampling structure includes a microstrip antenna plate, a dielectric plate, a first ground plate and a second ground plate which are sequentially stacked from the inside of the cavity to the outside of the cavity;

The microstrip antenna plate is the antenna end of the voltage sampling structure, connected to the surface of the first ground plate close to the dielectric plate through the dielectric plate, and has a microstrip line on the surface away from the dielectric plate;

The surface of the first grounding plate close to the dielectric plate is a ground layer, and the surface is connected to the surface of the second grounding plate close to the first grounding plate;

The second ground plate outputs a sampled voltage signal.

In this embodiment, the acquisition device of the present application is provided with a microstrip antenna plate, a dielectric plate, a first ground plate and a second ground plate, which can shield the interference signal generated by the external interference source, and obtain a sampling voltage signal with a suitable voltage value while outputting the voltage signal from the inside of the cavity to the outside of the cavity. The acquisition device of the present application performs voltage sampling and current sampling respectively based on two different structures of coaxial probe and microstrip line, which can avoid mutual interference between the signals generated in the voltage sampling process and the current sampling process.

Optionally, the voltage sampling structure is detachably mounted on the housing, and the coaxial probe is mounted on a surface of the second grounding plate away from the first grounding plate.

In this embodiment, the acquisition device of the present application is provided with a voltage sampling structure detachably mounted on the outer shell, and a coaxial probe mounted on the surface of the second grounding plate away from the first grounding plate. The structure is streamlined, which facilitates the setting of the coaxial probe on the outer shell and the connection of the coaxial probe and the wire.

Optionally, a surface of the second grounding plate close to the first grounding plate is a ground layer, and the second end of the coil and the second end of the current sampling line pass through the second grounding plate and are connected to the surface of the second grounding plate close to the first grounding plate for grounding.

In this embodiment, the acquisition device of the present application connects the coil and the current sampling line to the surface of the second grounding plate close to the first grounding plate, so as to facilitate the grounding of the coil and the current sampling line.

Optionally, the microstrip antenna board, the dielectric board, the first ground plate and the second ground plate each have a first through hole, and the microstrip antenna board, the dielectric board, the first ground plate and the second ground plate are sequentially connected through the first through holes.

Optionally, the voltage sampling structure has a second through hole, and the first end of the coil passes through the voltage sampling structure through the second through hole to pass through the housing and enter the cavity.

Optionally, the coaxial probe further comprises:

The shielding magnetic ring is sleeved on the coil.

Optionally, the collection device further includes:

The filter circuit is arranged outside the cavity. The first end of the current sampling line outputs a sampling current signal through the filter circuit, and is used to filter the current signal output by the first end of the current sampling line.

Optionally, the filtering circuit comprises:

A first resistor, a first end of the current sampling line outputs a sampling current signal through the first resistor;

The first inductor is connected in parallel with the first resistor.

From the above, it can be seen that the present application provides a collection device, which can, based on the shielding effect of the shell, prevent the current signal passing through the wire inside the cavity from interfering with the current sampling process performed by the coil and the current sampling line outside the cavity, so that the waveform of the sampled current signal output outside the cavity does not produce a large distortion. The collection device of the present application is provided with a first end of the coil passing through the shell and entering the cavity, which can output the current signal from the inside of the cavity to the outside of the cavity while the shell shields the interference signal generated by the interference source outside the cavity.

Other features and advantages of the present application will be described in the following description, and partly become apparent from the description, or be understood by practicing the present application. The purpose and other advantages of the present application can be realized and obtained by the structures specifically pointed out in the written description and the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a structural diagram of a collection device provided in an embodiment of the present application.

FIG. 2 is a schematic diagram of the structure of a voltage sampling structure provided in an embodiment of the present application.

FIG. 3 is an exploded view of a voltage sampling structure provided in an embodiment of the present application.

FIG. 4 is a schematic diagram of the structure of a conductor and a microstrip antenna board provided in an embodiment of the present application.

FIG. 5 is a circuit diagram of a filter circuit provided in an embodiment of the present application.

Explanation of reference numerals: Is, sampling current signal; L, first inductor; R, first resistor; Vs, sampling voltage signal; 11, conductor; 12, housing; 121, cavity; 2, coaxial probe; 21, coil; 22, shielding magnetic ring; 3, current sampling line; 5, voltage sampling structure; 501, first through hole; 502, second through hole; 503, ground layer; 504, third through hole; 51, microstrip antenna board; 511, microstrip line; 512, notch; 52, dielectric board; 53, first ground plate; 54, second ground plate; 6, filtering circuit.

Detailed ways

The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

In the first aspect, as shown in FIG. 1 , the present application provides a collection device for collecting a current signal output by a radio frequency power source, the collection device comprising a wire 11 and a housing 12, one end of the wire 11 is connected to the output end of the radio frequency power source, and the other end is connected to a load circuit, the housing 12 has a cylindrical cavity 121, the wire 11 passes through the center of the cavity 121 and is coaxially arranged with the housing 12, and does not contact the housing 12, and the housing 12 is grounded;

The acquisition device also includes a coaxial probe 2 and a current sampling line 3;

The coaxial probe 2 is arranged outside the cavity 121, and includes:

The coil 21 has a first end passing through the housing 12, perpendicular to the axial direction of the wire 11 and entering the cavity 121, and a second end thereof is grounded;

The first end of the current sampling line 3 outputs the sampling current signal Is, and the second end is grounded. The coil 21 is sleeved on the current sampling line 3 and does not contact the current sampling line 3 .

Specifically, the wire 11 may be a copper wire, or may be a conductive wire made of other existing materials that can carry the output signal of the radio frequency power supply.

More specifically, when current sampling is performed on the RF power supply, the current signal output by the RF power supply passes through the wire 11. Since the wire 11 is coaxially arranged with the housing 12 and the wire 11 does not contact the housing 12, an electromagnetic field radiation interval is formed inside the cavity 121. The first end of the coil 21 receives the electromagnetic radiation emitted by the wire 11 so that the current signal is input into the coil 21. Since the coil 21 is sleeved on the current sampling line 3, the coil 21 and the current sampling line 3 form a current transformer. Therefore, the current sampling line 3 generates a sampling current signal Is based on the principle of electromagnetic induction and outputs it to realize current sampling of the RF power supply.

More specifically, the wire 11, as an inner conductor, forms a coaxial structure similar to a coaxial line with the air as a medium and the shell 12 as an outer conductor. According to the working principle of the coaxial line, when the shell 12, as an outer conductor, is grounded, the shell 12 has a shielding effect on the current signal passing through the wire 11 inside the cavity 121, and the electric field inside the cavity 121 and the electric field outside the cavity 121 will not affect each other. The current signal passing through the wire 11 inside the cavity 121 will not interfere with the current sampling process performed by the coil 21 and the current sampling line 3 outside the cavity, and the waveform of the sampling current signal Is output outside the cavity 121 will not produce a large distortion. In addition, since the current signal passing through the wire 11 inside the cavity 121 propagates in a direction perpendicular to the axial direction of the wire 11, the first end of the coil 21 passes through the shell 12 and enters the cavity 121 inside the cavity 121, so that the current signal passing through the wire 11 can be output from the inside of the cavity 121 to the outside of the cavity 121.

The acquisition device provided in the present application is provided with a shell 12, and based on the shielding effect of the shell 12, the current signal passing through the wire 11 inside the cavity 121 does not interfere with the current sampling process performed by the coil 21 and the current sampling line 3 outside the cavity, so that the waveform of the sampling current signal Is output outside the cavity 121 does not produce a large distortion. In addition, the acquisition device of the present application is provided with a first end of the coil 21 passing through the shell 12 and entering the cavity 121, which can output the current signal from the inside of the cavity 121 to the outside of the cavity 121 while the shell 12 shields the interference signal generated by the interference source outside the cavity 121.

As shown in FIG2 , in some preferred embodiments, the collection device further includes:

The voltage sampling structure 5 is mounted on the housing 12 and has an antenna end located inside the cavity 121 and used to receive electromagnetic radiation emitted by the wire 11, and an output end located outside the cavity 121 and outputting a sampled voltage signal Vs.

Specifically, when the RF power supply is voltage sampled, the current signal output by the RF power supply passes through the wire 11. Since the wire 11 is coaxially arranged with the shell 12 and the wire 11 does not contact the shell 12, an electromagnetic field radiation interval is formed inside the cavity 121. The antenna end of the voltage sampling structure 5 receives the electromagnetic radiation emitted by the wire 11 and converts it into a voltage signal, so that its output end outputs a sampling voltage signal Vs that can represent the voltage of the RF power supply, so as to realize voltage sampling of the RF power supply.

More specifically, the housing 12 confines all electromagnetic fields within the cavity 121, so there is no radiation loss in the voltage sampling process, and the antenna end of the voltage sampling structure 5 can receive accurate electromagnetic radiation, so that the sampled voltage signal Vs outputted from its output end can more accurately represent the RF power supply voltage.

In this embodiment, the acquisition device of the present application is provided with a voltage sampling structure 5, which can output the voltage signal from the inside of the cavity 121 to the outside of the cavity 121 while the outer shell 12 shields the interference signal generated by the interference source outside the cavity 121, and enables the antenna end of the voltage sampling structure 5 to receive accurate electromagnetic radiation, so that the sampling voltage signal Vs outputted from its output end can more accurately represent the RF power supply voltage.

Preferably, the housing 12 has an opening, and the voltage sampling structure 5 is installed on the opening and close to the housing 12 , which can prevent the electromagnetic radiation emitted by the wire 11 from propagating to the outside of the cavity 121 through the gap between the voltage sampling structure 5 and the housing 12 .

As shown in FIG. 3 and FIG. 4 , in some preferred embodiments, the voltage sampling structure 5 includes a microstrip antenna plate 51, a dielectric plate 52, a first ground plate 53 and a second ground plate 54 which are sequentially stacked from the inside of the cavity 121 to the outside of the cavity 121;

The microstrip antenna plate 51 is the antenna end of the voltage sampling structure 5, and is connected to the surface of the first ground plate 53 close to the dielectric plate 52 through the dielectric plate 52, and the surface away from the dielectric plate 52 has a microstrip line 511;

The surface of the first grounding plate 53 close to the dielectric plate 52 is a ground layer 503, and the surface is connected to the surface of the second grounding plate 54 close to the first grounding plate 53;

The second ground plate 54 outputs the sampled voltage signal Vs.

Specifically, the microstrip antenna board 51, the dielectric board 52, the first grounding board 53 and the second grounding board 54 may be PCB boards or other structures capable of realizing the voltage sampling function.

More specifically, when voltage sampling is performed on the RF power supply, the microstrip line 511 on the microstrip antenna board 51 receives electromagnetic radiation emitted from the conductor 11 and converts it into a voltage signal. Since the microstrip line 511 has the function of transmitting signals, the microstrip line 511 transmits the voltage signal to the second grounding plate 54 through the dielectric plate 52 and the first grounding plate 53. The second grounding plate 54 outputs a sampling voltage signal Vs to realize voltage sampling of the RF power supply.

More specifically, the first grounding plate 53 and the second grounding plate 54 have the function of shielding interference signals generated by external interference sources. In addition, since the microstrip antenna plate 51 is connected to the surface of the first grounding plate 53 close to the dielectric plate 52 through the dielectric plate 52, and the surface is the ground layer 503, the microstrip line 511 is grounded through the surface of the first grounding plate 53 close to the dielectric plate 52, and the impedance of the microstrip line 511 is related to the distance between the microstrip line 511 and the first grounding plate 53. The distance between the microstrip line 511 and the first grounding plate 53 can be set as needed to divide the voltage signal transmitted by the microstrip line 511, thereby obtaining a sampling voltage signal Vs with a suitable voltage value.

In this embodiment, the acquisition device of the present application is provided with a microstrip antenna plate 51, a dielectric plate 52, a first ground plate 53 and a second ground plate 54, which can shield the interference signal generated by the external interference source, and obtain a sampling voltage signal Vs with a suitable voltage value while outputting the voltage signal from the inside of the cavity 121 to the outside of the cavity 121. In addition, the acquisition device of the present application performs voltage sampling and current sampling respectively based on two different structures of the coaxial probe 2 and the microstrip line 511, which can avoid mutual interference between the signals generated during the voltage sampling process and the current sampling process.

In some preferred embodiments, the voltage sampling structure 5 is detachably mounted on the housing 12 , and the coaxial probe 2 is mounted on a surface of the second grounding plate 54 away from the first grounding plate 53 .

In this embodiment, the acquisition device of the present application is provided with a voltage sampling structure 5 detachably mounted on the housing 12, and a coaxial probe 2 mounted on the surface of the second grounding plate 54 away from the first grounding plate 53. The structure is streamlined, which facilitates the setting of the coaxial probe 2 on the housing 12 and the connection between the coaxial probe 2 and the wire 11.

In some preferred embodiments, the surface of the second grounding plate 54 close to the first grounding plate 53 is the ground layer 503, and the second end of the coil 21 and the second end of the current sampling line 3 pass through the second grounding plate 54 and are connected to the surface of the second grounding plate 54 close to the first grounding plate 53 for grounding.

In this embodiment, the acquisition device of the present application connects the coil 21 and the current sampling line 3 to the surface of the second grounding plate 54 close to the first grounding plate 53 , so as to facilitate the grounding of the coil 21 and the current sampling line 3 .

In some preferred embodiments, the microstrip antenna board 51, the dielectric board 52, the first ground plate 53 and the second ground plate 54 each have a first through hole 501, and the microstrip antenna board 51, the dielectric board 52, the first ground plate 53 and the second ground plate 54 are connected in sequence through each first through hole 501.

In this embodiment, the acquisition device of the present application is provided with a microstrip antenna board 51 having a first through hole 501, a dielectric board 52, a first grounding plate 53 and a second grounding plate 54, so that the microstrip antenna board 51 can transmit the voltage signal to the second grounding plate 54 so that the second grounding plate 54 can output the sampling voltage signal Vs.

Preferably, positions of the first through holes 501 correspond to each other.

In some preferred embodiments, the voltage sampling structure 5 has a second through hole 502 , and the first end of the coil 21 passes through the voltage sampling structure 5 through the second through hole 502 to pass through the housing 12 and enter the cavity 121 .

In this embodiment, the acquisition device of the present application is provided with a voltage sampling structure 5 having a second through hole 502 , which enables the coil 21 to pass through the housing 12 and enter the cavity 121 .

In the embodiment where the voltage sampling structure 5 includes a microstrip antenna plate 51, a dielectric plate 52, a first ground plate 53, and a second ground plate 54 which are sequentially stacked from the inside of the cavity 121 to the outside of the cavity 121, the second through hole 502 may be arranged in such a manner that the microstrip antenna plate 51, the dielectric plate 52, the first ground plate 53, and the second ground plate 54 each have a second through hole 502, and each second through hole 502 has a corresponding position, and the first end of the coil 21 sequentially passes through each second through hole 502 to pass through the voltage sampling structure 5, thereby passing through the housing 12 and entering the cavity 121. In this embodiment, the dielectric plate 52, the first ground plate 53, and the second ground plate 54 each have a second through hole 502, and the microstrip antenna plate 51 has a notch 512, and the notch 512 and each second through hole 502 have a corresponding position, and the first end of the coil 21 sequentially passes through each second through hole 502 and the notch 512 to pass through the voltage sampling structure 5, thereby passing through the housing 12 and entering the cavity 121.

Preferably, the microstrip antenna plate 51, the dielectric plate 52, the first ground plate 53 and the second ground plate 54 have the same number of third through holes 504 with corresponding positions, so as to facilitate the connection between the surface of the first ground plate 53 close to the dielectric plate 52 and the surface of the second ground plate 54 close to the first ground plate 53.

In some preferred embodiments, the coaxial probe 2 further comprises:

The shielding magnetic ring 22 is sleeved on the coil 21 .

Specifically, the implementation method of setting up the coaxial probe 2 and the current sampling line 3 can only shield the interference of the current signal passing through the wire 11 inside the cavity 121, and cannot prevent the interference signal generated by the interference source in other circuits or other devices outside the cavity 121 from interfering with the current sampling process. Therefore, in this implementation, the acquisition device of the present application is provided with a shielding magnetic ring 22 sleeved on the coil 21, which can minimize the interference of the interference signal generated by the interference source outside the cavity 121 on the current sampling process, and the structure is simplified.

As shown in FIG5 , in some preferred embodiments, the collection device further includes:

The filter circuit 6 is arranged outside the cavity 121 . The first end of the current sampling line 3 outputs a sampling current signal Is through the filter circuit 6 , which is used to filter the current signal output from the first end of the current sampling line 3 .

In this embodiment, the acquisition device of the present application is provided with a filter circuit 6, which can filter the signal generated by the current sampling line 3 and output the sampling current signal Is, further preventing the interference signal generated by the external interference source of the cavity 121 from interfering with the current sampling process.

In some preferred embodiments, the filter circuit 6 includes:

A first resistor R, the first end of the current sampling line 3 outputs a sampling current signal Is through the first resistor R;

The first inductor L is connected to the first resistor R in parallel.

In this embodiment, the acquisition device of the present application is provided with a filter circuit 6 including a first resistor R and a first inductor L connected in parallel, which can filter the signal generated by the current sampling line 3 to output a sampling current signal Is, and has a simple structure.

As can be seen from the above, the present application provides a collection device, which can prevent the current signal passing through the wire 11 inside the cavity 121 from interfering with the current sampling process performed by the coil 21 and the current sampling line 3 outside the cavity based on the shielding effect of the shell 12, so that the waveform of the sampling current signal Is output outside the cavity 121 does not produce a large distortion, and the collection device of the present application is provided with a first end of the coil 21 passing through the shell 12 and entering the cavity 121, which can output the current signal from the inside of the cavity 121 to the outside of the cavity 121 while the shell 12 shields the interference signal generated by the interference source outside the cavity 121.

In the embodiments provided in the present application, it should be understood that, herein, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

The above are only embodiments of the present application and are not intended to limit the scope of protection of the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the scope of protection of the present application.

Claims (10)

1. A collection device for collecting a current signal output by a radio frequency power supply, characterized in that the collection device comprises a wire (11) and a housing (12), one end of the wire (11) is connected to the output end of the radio frequency power supply, and the other end is connected to a load circuit, the housing (12) has a cylindrical cavity (121), the wire (11) passes through the center of the cavity (121) and is coaxially arranged with the housing (12) and does not contact the housing (12), and the housing (12) is grounded; The acquisition device also includes a coaxial probe (2) and a current sampling line (3); The coaxial probe (2) is arranged outside the cavity (121), and comprises: A coil (21), a first end of which passes through the housing (12), is perpendicular to the axial direction of the wire (11) and enters the cavity (121), and a second end of which is grounded; The first end of the current sampling line (3) outputs a sampling current signal, and the second end is grounded; the coil (21) is sleeved on the current sampling line (3) and does not contact the current sampling line (3). 2. A collection device according to claim 1, characterized in that the collection device further comprises: A voltage sampling structure (5) is mounted on the housing (12), having an antenna end located inside the cavity (121) and used to receive electromagnetic radiation emitted by the wire (11), and having an output end located outside the cavity (121) and outputting a sampled voltage signal. 3. A collection device according to claim 2, characterized in that the voltage sampling structure (5) comprises a microstrip antenna plate (51), a dielectric plate (52), a first ground plate (53) and a second ground plate (54) which are sequentially stacked from the inside of the cavity (121) to the outside of the cavity (121); The microstrip antenna plate (51) is the antenna end of the voltage sampling structure (5), and is connected to a surface of the first ground plate (53) close to the dielectric plate (52) through the dielectric plate (52), and a surface thereof far from the dielectric plate (52) has a microstrip line (511); A surface of the first grounding plate (53) close to the dielectric plate (52) is a ground layer (503), and the surface is connected to a surface of the second grounding plate (54) close to the first grounding plate (53); The second ground plate (54) outputs a sampled voltage signal. 4. A data acquisition device according to claim 3, characterized in that the voltage sampling structure (5) is detachably mounted on the housing (12), and the coaxial probe (2) is mounted on a surface of the second grounding plate (54) away from the first grounding plate (53). 5. A data acquisition device according to claim 4, characterized in that the surface of the second grounding plate (54) close to the first grounding plate (53) is a ground layer (503), and the second end of the coil (21) and the second end of the current sampling line (3) pass through the second grounding plate (54) and are connected to the surface of the second grounding plate (54) close to the first grounding plate (53) for grounding. 6. A data acquisition device according to claim 3, characterized in that the microstrip antenna board (51), the dielectric board (52), the first ground board (53) and the second ground board (54) each have a first through hole (501), and the microstrip antenna board (51), the dielectric board (52), the first ground board (53) and the second ground board (54) are connected in sequence through each first through hole (501). 7. A data acquisition device according to claim 2, characterized in that the voltage sampling structure (5) has a second through hole (502), and the first end of the coil (21) passes through the voltage sampling structure (5) through the second through hole (502) to pass through the housing (12) and enter the cavity (121). 8. The acquisition device according to claim 1, characterized in that the coaxial probe (2) further comprises: The shielding magnetic ring (22) is sleeved on the coil (21). 9. A collection device according to claim 1, characterized in that the collection device further comprises: A filter circuit (6) is arranged outside the cavity (121), and the first end of the current sampling line (3) outputs a sampled current signal through the filter circuit (6), and is used to filter the current signal output by the first end of the current sampling line (3). 10. A data acquisition device according to claim 9, characterized in that the filtering circuit (6) comprises: A first resistor, the first end of the current sampling line (3) outputs a sampling current signal through the first resistor; A first inductor is connected in parallel with the first resistor.