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CN117870034B - Control method, device and system for environmental parameters of clean room - Google Patents

Control method, device and system for environmental parameters of clean room Download PDF

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Publication number
CN117870034B
CN117870034B CN202410272675.5A CN202410272675A CN117870034B CN 117870034 B CN117870034 B CN 117870034B CN 202410272675 A CN202410272675 A CN 202410272675A CN 117870034 B CN117870034 B CN 117870034B
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influence
parameters
clean room
environmental
model
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CN117870034A (en
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齐峻岭
黄永康
张子杰
陈祥栋
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Shenzhen Deni Environmental Technology Co ltd
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Shenzhen Deni Environmental Technology Co ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/50—Control or safety arrangements characterised by user interfaces or communication
    • F24F11/61—Control or safety arrangements characterised by user interfaces or communication using timers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/62—Control or safety arrangements characterised by the type of control or by internal processing, e.g. using fuzzy logic, adaptive control or estimation of values
    • F24F11/63—Electronic processing
    • F24F11/64—Electronic processing using pre-stored data
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/80—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/88—Electrical aspects, e.g. circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/10—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/20—Humidity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/40—Pressure, e.g. wind pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/50—Air quality properties
    • F24F2110/64—Airborne particle content
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2130/00—Control inputs relating to environmental factors not covered by group F24F2110/00
    • F24F2130/40—Noise

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Fuzzy Systems (AREA)
  • Mathematical Physics (AREA)
  • Human Computer Interaction (AREA)
  • Air Conditioning Control Device (AREA)

Abstract

The invention relates to the technical field of clean room control and discloses a control method, a device and a system for environmental parameters of a clean room.

Description

Control method, device and system for environmental parameters of clean room
Technical Field
The present invention relates to the field of clean room control technology, and in particular, to a method, an apparatus, and a system for controlling environmental parameters of a clean room.
Background
A clean room is a special environment with tight control of air pollutants, temperature, humidity, airflow rate, and other environmental parameters. Is generally used in fields requiring extremely high air quality, such as semiconductor manufacturing, bioscience research, pharmaceutical manufacturing, and the like. The design and management of clean rooms is critical to ensure product quality, production efficiency and experimental accuracy.
The environmental parameters of the clean room need to be controlled, and the environmental elements have an interactive relationship, namely, one of the environmental elements is controlled, so that other environmental parameters can be changed, and a control error phenomenon is easy to occur.
Disclosure of Invention
The invention aims to provide a control method, a device and a system for environmental parameters of a clean room, and aims to solve the problem that control errors are easy to occur in the prior art.
The present invention is achieved in a first aspect by providing a method for controlling environmental parameters of a clean room, comprising:
Data acquisition is carried out on all environmental parameters of the clean room through a sensor group preset in the clean room so as to obtain all environmental parameters of the clean room; wherein the environmental parameters include particle parameters, temperature parameters, humidity parameters, pressure difference parameters, chemical pollution parameters, and noise parameters;
Constructing an environment feedback model of the clean room according to various environment parameters of the clean room; the environment feedback model is used for feeding back various environment parameters of the clean room;
Analyzing and processing the mapping relation among all environmental parameters of the clean room based on the environmental feedback model to obtain an influence relation model among all environmental parameters of the clean room; the influence relation model is used for describing influence relations among various environmental parameters of the clean room;
Generating an influence test scheme according to the environment feedback model and the influence relation model at intervals of preset time, performing test processing on the clean room according to the influence test scheme to obtain influence characteristics corresponding to the influence test scheme, and correcting the influence relation model according to the influence characteristics;
And monitoring the environment feedback model in real time, and when the environment feedback model has abnormal feedback characteristics, analyzing and processing according to the abnormal feedback characteristics and the influence relation model to obtain a parameter control scheme corresponding to the abnormal feedback characteristics.
Preferably, the step of constructing an environmental feedback model of the clean room according to various environmental parameters of the clean room comprises:
constructing a time coordinate axis; the time coordinate axis is provided with time coordinate points which are sequentially arranged;
Respectively constructing an environment parameter coordinate axis perpendicular to the time coordinate axis based on each time coordinate point of the time coordinate axis; the environment parameter coordinate axis is provided with a plurality of display levels, and each display level corresponds to an environment parameter of a clean room;
And carrying out coordinate positioning and coordinate connection on the environmental parameter coordinate axes of each time coordinate point of the time coordinate axis according to each environmental parameter of the clean room so as to obtain an environmental feedback model of the clean room.
Preferably, the step of analyzing the mapping relation between the environmental parameters of the clean room based on the environmental feedback model to obtain an influence relation model between the environmental parameters of the clean room includes:
Analyzing and processing the mapping relation of parameter values at all moments among all environmental parameters of the clean room based on the environmental feedback model to obtain a first influence relation level of all environmental parameters of the clean room;
Analyzing and processing the mapping relation of the change characteristics at each moment among all environmental parameters of the clean room based on the environmental feedback model to obtain a second influence relation level of all environmental parameters of the clean room;
the first and second impact relationship levels are used together as an impact relationship model between environmental parameters of the clean room.
Preferably, the step of analyzing the mapping relation of the parameter values at each moment between the environmental parameters of the clean room based on the environmental feedback model to obtain a first influence relation level of the environmental parameters of the clean room includes:
dividing each environmental parameter in advance to obtain a plurality of association combinations; the association combination comprises an influence result parameter and an influence application parameter, wherein a mapping relation exists between the influence result parameter and the influence application parameter;
And blurring the influence result parameters and the influence application parameters of each association combination to obtain an influence result area corresponding to the influence result parameters and an influence application area of the influence application parameters, and performing association analysis processing on the influence result area and the influence application area of each association combination to obtain a mapping relation of each association combination.
Preferably, the step of analyzing the mapping relation of the change characteristics of each moment between each environmental parameter of the clean room based on the environmental feedback model to obtain the second influence relation level of each environmental parameter of the clean room includes:
extracting and processing the change characteristics of all environmental parameters of the clean room based on the environmental feedback model to obtain the change characteristics of all environmental parameters of the clean room at all moments; wherein the change characteristics comprise change trend, change amplitude and change frequency;
Dividing the change characteristics of the environmental parameters to obtain a plurality of association combinations; the association combination comprises an influence result feature and an influence application feature, wherein a mapping relation exists between the influence result feature and the influence application feature;
And blurring the influence result features and the influence application features of each association combination to obtain an influence result region corresponding to the influence result features and an influence application region of the influence application features, and performing association analysis processing on the influence result region and the influence application region of each association combination to obtain a mapping relation of each association combination.
Preferably, generating an influence test scheme according to the environmental feedback model and the influence relation model at intervals of a predetermined time, and performing test processing on the clean room according to the influence test scheme to obtain influence characteristics corresponding to the influence test scheme, wherein the step of obtaining the influence characteristics corresponding to the influence test scheme comprises the following steps:
Acquiring an influence relation among all environmental parameters of the clean room according to the influence relation model;
Selecting one environmental parameter of the environmental feedback model as a test parameter, and generating a theoretical influence parameter of the test parameter according to an influence relation between the corresponding test parameter and other environmental parameters;
Taking the test parameters and the theoretical influence parameters as the influence test scheme;
performing environmental parameter control on the clean room according to the test parameters in the influence test scheme to obtain actual influence parameters corresponding to the test parameters; wherein the actual influencing parameter is an actual change of other environmental parameters which are displayed by the clean room after the environmental parameters of the test parameters of the receiver are controlled;
Comparing the actual influence parameter with the theoretical influence parameter to obtain deviation characteristics of the actual influence parameter and the theoretical influence parameter; wherein the deviation feature is used for describing the reliability degree of the influence relation between the corresponding test parameter and other environment parameters;
And taking the actual influence parameter and the reliability degree together as influence characteristics of the influence test scheme.
Preferably, the step of modifying the influence relation model according to the influence characteristics comprises:
Judging the reliability degree according to a preset standard, and if the reliability degree meets the preset standard, correcting the influence relation model is not needed;
if the reliability degree does not meet the preset standard, the test parameters, the actual influence parameters and the environmental parameters of the clean room at all times are used for constructing an environmental feedback model of the clean room together, and the mapping relation among the environmental parameters of the clean room is analyzed and processed based on the environmental feedback model so as to obtain an influence relation model among the environmental parameters of the clean room.
Preferably, the environmental feedback model is monitored in real time, and when an abnormal feedback feature occurs in the environmental feedback model, the step of analyzing and processing according to the abnormal feedback feature and the influence relation model to obtain a parameter control scheme corresponding to the abnormal feedback feature includes:
Monitoring the environment feedback model in real time according to a preset standard to obtain abnormal feedback characteristics of the environment feedback model;
Analyzing and processing the abnormal feedback characteristics according to the influence relation model to obtain model change characteristics corresponding to the abnormal feedback characteristics; the model change feature is used for describing the change of the rest environmental parameters caused by the abnormal feedback feature;
And taking the abnormal feedback characteristics and the model variation characteristics as adjustment targets, taking all the environmental parameters as adjustment subjects, generating adjustment coefficients of all the adjustment subjects according to the influence relation model, and carrying out calculation processing based on the adjustment targets, the adjustment subjects and the adjustment coefficients to obtain control parameters of all the adjustment subjects, wherein the control parameters of all the adjustment subjects are taken as parameter control schemes of the abnormal feedback characteristics.
In a second aspect, the present invention provides a control apparatus for a clean room environment parameter, comprising:
The data acquisition module is used for acquiring data of all environmental parameters of the clean room through a sensor group preset in the clean room so as to obtain all the environmental parameters of the clean room; wherein the environmental parameters include particle parameters, temperature parameters, humidity parameters, pressure difference parameters, chemical pollution parameters, and noise parameters;
The first model building module is used for building an environment feedback model of the clean room according to various environment parameters of the clean room; the environment feedback model is used for feeding back various environment parameters of the clean room;
The second model building module is used for analyzing and processing the mapping relation among all environmental parameters of the clean room based on the environmental feedback model so as to obtain an influence relation model among all environmental parameters of the clean room; the influence relation model is used for describing influence relations among various environmental parameters of the clean room;
The model correction module is used for generating an influence test scheme according to the environment feedback model and the influence relation model at intervals of preset time, carrying out test processing on the clean room according to the influence test scheme to obtain influence characteristics corresponding to the influence test scheme, and correcting the influence relation model according to the influence characteristics;
The scheme generating module is used for monitoring the environment feedback model in real time, and when the environment feedback model has abnormal feedback characteristics, analyzing and processing are carried out according to the abnormal feedback characteristics and the influence relation model so as to obtain a parameter control scheme corresponding to the abnormal feedback characteristics.
In a third aspect, the present invention provides a control system for a clean room environment parameter, for implementing a control method for a clean room environment parameter according to any one of the first aspect.
The invention provides a control method of environmental parameters of a clean room, which has the following beneficial effects:
According to the invention, a plurality of environmental parameters of the clean room are collected, an environmental feedback model and an influence relation model corresponding to the clean room are constructed, each environmental parameter of the clean room is monitored through the environmental feedback model, and a parameter control scheme corresponding to the abnormal environmental parameter is obtained according to the influence relation model, so that the problem that control errors are easy to occur in the prior art is solved.
Drawings
FIG. 1 is a schematic diagram of steps of a method for controlling environmental parameters of a clean room according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a control device for environmental parameters of a clean room according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
The implementation of the present invention will be described in detail below with reference to specific embodiments.
Referring to fig. 1 and 2, a preferred embodiment of the present invention is provided.
In a first aspect, the present invention provides a method for controlling environmental parameters of a clean room, including:
s1: data acquisition is carried out on all environmental parameters of the clean room through a sensor group preset in the clean room so as to obtain all environmental parameters of the clean room; wherein the environmental parameters include particle parameters, temperature parameters, humidity parameters, pressure difference parameters, chemical pollution parameters, and noise parameters;
s2: constructing an environment feedback model of the clean room according to various environment parameters of the clean room; the environment feedback model is used for feeding back various environment parameters of the clean room;
s3: analyzing and processing the mapping relation among all environmental parameters of the clean room based on the environmental feedback model to obtain an influence relation model among all environmental parameters of the clean room; the influence relation model is used for describing influence relations among various environmental parameters of the clean room;
S4: generating an influence test scheme according to the environment feedback model and the influence relation model at intervals of preset time, performing test processing on the clean room according to the influence test scheme to obtain influence characteristics corresponding to the influence test scheme, and correcting the influence relation model according to the influence characteristics;
S5: and monitoring the environment feedback model in real time, and when the environment feedback model has abnormal feedback characteristics, analyzing and processing according to the abnormal feedback characteristics and the influence relation model to obtain a parameter control scheme corresponding to the abnormal feedback characteristics.
Specifically, in step S1 of the embodiment provided by the present invention, sensors such as particle parameters, temperature parameters, humidity parameters, pressure difference parameters, chemical pollution parameters, noise parameters, etc. are reasonably arranged according to specific scale and requirements of the clean room. These sensors should cover critical areas of the clean room to fully monitor environmental changes.
More specifically, all sensors are connected to a central data acquisition system. The system is responsible for collecting the data of the sensors and can display and record the data in real time. The system has high stability and reliability, and ensures accurate transmission and storage of data.
More specifically, the system starts to monitor environmental parameters such as particles, temperature, humidity, pressure difference, chemical pollution, noise and the like of the clean room in real time, analyzes the collected data, evaluates the environmental control effect of the clean room, and adjusts and optimizes the environmental control strategy according to the data analysis result.
It can be understood that through real-time monitoring and automatic adjustment, environmental parameters in the clean room can be accurately controlled, strict standards and requirements are met, long-term data collection and analysis can reveal trends and rules of environmental parameter changes, and data support and decision basis are provided for design improvement, equipment maintenance and operation management of the clean room.
Specifically, in step S2 of the embodiment provided by the present invention, first, environmental data such as a particle parameter, a temperature parameter, a humidity parameter, a pressure difference parameter, a chemical contamination parameter, a noise parameter, etc. are collected through a sensor set preset in a clean room. The collected data needs to be preprocessed, including cleaning error data, filling missing values, normalizing the data, etc., to ensure data quality.
More specifically, the correlation between environmental parameters and their importance to the clean room environment is analyzed, and the most representative features are selected as model inputs. This step is critical to improving the accuracy and efficiency of the model.
More specifically, depending on the selected features, a machine learning or deep learning algorithm may be used to construct the environmental feedback model. The model may be selected from linear regression, decision trees, neural networks, etc., depending on the complexity of the problem and the nature of the data. Other model building methods may be employed
It can be understood that through the environment feedback model, real-time monitoring and automatic optimization of the environment parameters in the clean room can be realized, the environment conditions are always in an ideal state, and the model running for a long time can accumulate a large amount of data, so that data support is provided for the management of the clean room, and a manager is helped to make more scientific decisions.
Specifically, in step S3 of the embodiment provided by the present invention, a statistical method or a machine learning technique (such as feature importance evaluation) is used to perform correlation analysis on the collected data, identify the correlation strength between different environmental parameters, and based on the result of the correlation analysis, construct an influence relationship model between the environmental parameters using an appropriate mathematical model or machine learning algorithm. The model should be accurate in describing how one or more input parameters (e.g., temperature, humidity) affect one or more output parameters (e.g., particulate concentration).
More specifically, the influence relation model is trained by using historical data, verification and test are carried out by methods such as cross verification and the like so as to ensure the accuracy and generalization capability of the model, and the model is adjusted and optimized according to the training and verification results. The optimized model can be used for monitoring and adjusting the clean room environment in real time, and predicting and preventing adverse environmental changes.
It can be understood that the interaction mechanism between the environmental parameters in the clean room can be further understood through the influence relation model, scientific basis is provided for environmental control, a more refined environmental control strategy can be realized based on the accurate influence relation model, unnecessary adjustment is reduced, resource waste is avoided, the model can predict the possible change trend of other environmental parameters under the change of specific input parameters, measures can be taken in advance, environmental deterioration is prevented, the operation plans of equipment such as air purification, temperature and humidity adjustment and the like can be reasonably arranged through understanding the influence relation between the environmental parameters, the energy efficiency is improved, the operation cost is reduced, the accurate control and management of the clean room environment can be realized through constructing and applying the influence relation model between the environmental parameters of the clean room, the operation efficiency and the product quality of the clean room are improved, and powerful support is provided for the research and production activities of the related fields.
Specifically, in step S4 of the embodiments provided herein, a series of test protocols are designed based on the existing environmental feedback model and the influence relation model, which are intended to evaluate the influence of a specific environmental parameter variation on the clean room environment. The test scheme should cover different combinations and ranges of environmental parameters, and the clean room is tested according to the designed influence test scheme. In the testing process, environmental parameter data are collected through a preset sensor group, including data before, during and after testing, the collected test data are analyzed, and specific influences of various environmental parameter changes on the clean room environment are identified. Influencing features related to the test protocol, such as sensitivity to parameter changes, strength of interaction, etc., are extracted.
More specifically, the existing environmental feedback model and impact relationship model are modified and optimized according to the test results and impact characteristics. This may include adjusting model parameters, introducing new variables or relationships, improving algorithms, etc., and the modified model needs to be validated for performance and accuracy by further testing. Depending on the validation results, multiple rounds of testing, analysis, and model corrections may be required to continuously improve the accuracy and reliability of the model.
It can be understood that the precision of the environmental control model can be continuously improved through periodical testing and model correction, so that the environmental control model is better suitable for the change and special requirements of the clean room environment, the influence relation and dynamic change rule among environmental parameters are deeply known, the environmental control strategy is helped to be optimized, the more effective and economical environmental management is realized, the resource waste can be reduced, the energy consumption is reduced, the overall operation efficiency of the clean room is improved, the continuous testing and model updating are favorable for timely finding and correcting potential problems, and the reliability and the stability of the environmental control system of the clean room are enhanced.
Through this continuous step, the environmental control system of the clean room can be continuously self-perfected and optimized to adapt to the continuously changing working conditions and to improve the control effect, thereby ensuring that the production and research activities in the clean room are carried out under the optimal environmental conditions.
Specifically, in step S5 of the embodiment provided by the present invention, monitoring and anomaly detection are performed in real time: environmental parameter data (such as temperature, humidity, particle concentration, etc.) are collected in real time by a sensor set installed in the clean room, and continuously monitored by using an environmental feedback model. Statistical analysis or machine learning algorithms are used to identify abnormal feedback features in the data that may indicate that the environmental conditions deviate from normal ranges. Once an abnormal feedback feature is detected, the cause behind the abnormal feature is analyzed immediately using the impact relationship model. This includes assessing which environmental parameters deviate from normal values and whether there is a interplay between these parameters.
More specifically, a targeted parameter control scheme is formulated based on the results of the anomaly analysis. This may include adjusting settings of the associated environmental equipment (e.g., air filtration systems, temperature and humidity control systems, etc.) to restore normal environmental conditions.
More specifically, the formulated parameter control scheme is executed and environmental parameter changes continue to be monitored to ensure that the control measures are effective. If the problem fails to resolve, further analysis and adjustment of the control scheme may be required.
More specifically, implementation results and experience are fed back into the environmental feedback model and the impact relationship model to optimize and refine the model. This helps to improve the prediction and processing power of the model in future similar situations.
It can be appreciated that through real-time monitoring and a quick response mechanism, problems in the clean room environment can be found and solved in time, and the influence on production and research activities is avoided. The effective parameter control scheme is beneficial to maintaining stable environmental conditions in the clean room and improving the product quality and research accuracy. The targeted control scheme can reduce unnecessary resource consumption, improve the energy utilization efficiency and reduce the operation cost. And the implementation results of the anomaly analysis and parameter control scheme are fed back to the model, so that the model is improved continuously, and the intelligent level of the clean room environment control system is improved.
The invention provides a control method of environmental parameters of a clean room, which has the following beneficial effects:
According to the invention, a plurality of environmental parameters of the clean room are collected, an environmental feedback model and an influence relation model corresponding to the clean room are constructed, each environmental parameter of the clean room is monitored through the environmental feedback model, and a parameter control scheme corresponding to the abnormal environmental parameter is obtained according to the influence relation model, so that the problem that control errors are easy to occur in the prior art is solved.
Preferably, the step of constructing an environmental feedback model of the clean room according to various environmental parameters of the clean room comprises:
S21: constructing a time coordinate axis; the time coordinate axis is provided with time coordinate points which are sequentially arranged;
S22: respectively constructing an environment parameter coordinate axis perpendicular to the time coordinate axis based on each time coordinate point of the time coordinate axis; the environment parameter coordinate axis is provided with a plurality of display levels, and each display level corresponds to an environment parameter of a clean room;
s23: and carrying out coordinate positioning and coordinate connection on the environmental parameter coordinate axes of each time coordinate point of the time coordinate axis according to each environmental parameter of the clean room so as to obtain an environmental feedback model of the clean room.
Specifically, first, a time coordinate axis is created, on which sequentially arranged time coordinate points representing specific time points at which environmental parameters are observed or recorded are marked.
More specifically, for each time coordinate point on the time coordinate axis, an environmental parameter coordinate axis perpendicular to the time coordinate axis is constructed. Each of the environmental parameter axes includes a plurality of display levels, each corresponding to a particular clean room environmental parameter (e.g., temperature, humidity, particle concentration, etc.).
More specifically, according to actual monitoring data of the clean room, coordinate positioning is performed on each environmental parameter on the environmental parameter coordinate axis of each time coordinate point. This means that at each instant the measured value for each environmental parameter finds the corresponding position on the respective parameter axis.
More specifically, coordinate points of the same environmental parameter at different points in time are chronologically connected to form a trend line of the parameter over time. Thus, each environmental parameter forms an independent trend line in the graph.
More specifically, interactions, rules of variation and potential anomalies between parameters can be identified by observing and analyzing trend lines for various environmental parameters. Based on these analysis results, the environmental control strategy of the clean room can be further adjusted and optimized.
It can be understood that by displaying the change of the environmental parameters on the time coordinate axis in a graphic manner, the change trend of each parameter along with time can be intuitively observed, the rapid understanding and analysis of data are facilitated, the constructed environmental feedback model can help monitoring personnel to timely find out the abnormal change of the environmental parameters, early warning measures can be taken to prevent possible quality problems or equipment faults, scientific data support can be provided for management personnel through comprehensive analysis of the change trend of the environmental parameters of the clean room, more reasonable operation and maintenance decisions can be helped to be made for the management personnel, the detailed information provided by the model is helpful for identifying the problems existing in the environmental control process, and basis is provided for continuously improving and optimizing the environmental control strategy of the clean room.
Preferably, the step of analyzing the mapping relation between the environmental parameters of the clean room based on the environmental feedback model to obtain an influence relation model between the environmental parameters of the clean room includes:
s31: analyzing and processing the mapping relation of parameter values at all moments among all environmental parameters of the clean room based on the environmental feedback model to obtain a first influence relation level of all environmental parameters of the clean room;
S32: analyzing and processing the mapping relation of the change characteristics at each moment among all environmental parameters of the clean room based on the environmental feedback model to obtain a second influence relation level of all environmental parameters of the clean room;
s33: the first and second impact relationship levels are used together as an impact relationship model between environmental parameters of the clean room.
Preferably, the step of analyzing the mapping relation of the parameter values at each moment between the environmental parameters of the clean room based on the environmental feedback model to obtain a first influence relation level of the environmental parameters of the clean room includes:
S311: dividing each environmental parameter in advance to obtain a plurality of association combinations; the association combination comprises an influence result parameter and an influence application parameter, wherein a mapping relation exists between the influence result parameter and the influence application parameter;
S312: and blurring the influence result parameters and the influence application parameters of each association combination to obtain an influence result area corresponding to the influence result parameters and an influence application area of the influence application parameters, and performing association analysis processing on the influence result area and the influence application area of each association combination to obtain a mapping relation of each association combination.
Specifically, environmental parameters of the clean room are categorized, and an influence result parameter (an affected parameter) and an influence application parameter (a parameter that affects other parameters) are identified. A combination of associations between parameters is determined, i.e. which influence exerted parameters may influence a particular influence result parameter.
More specifically, the blurring process is performed on the influence result parameter and the influence application parameter in each association combination. This involves converting specific values of parameters into membership in fuzzy sets, such as "high", "medium", "low", etc. fuzzy intervals, in order to better handle and analyze uncertainties and ambiguities in the data. An influence result area (range of values of influence result parameters after blurring) and an influence application area (range of values of influence application parameters after blurring) are determined.
More specifically, the influence result area and the influence application area of each association combination are subjected to association analysis. This step aims at identifying and quantifying the mapping between the two, i.e. how a change in the applied parameters is affected, which leads to a change in the resulting parameters. Fuzzy logic or other correlation algorithms are used to analyze and establish these mappings.
More specifically, based on the result of the association analysis, a specific mapping relationship of each association combination is determined. These mappings describe the dependency and strength of action between the impact application region and the impact result region.
It will be appreciated that complex relationships between environmental parameters can be handled more flexibly, particularly in the face of higher uncertainties and ambiguities, by blurring processing and correlation analysis. Defining the mapping relationship between different environmental parameters facilitates accurate adjustment of the influencing applied parameters to achieve the expected influencing result parameter state, thereby improving the accuracy of the overall clean room environmental management. The constructed mapping relation model can be used as a decision support tool to help management personnel predict possible results of specific control measures, so that more scientific and reasonable decisions can be made. By continuously updating and refining the mapping relation of the association combination, the environmental parameter setting of the clean room can be continuously optimized to adapt to the changing requirements of production and research activities.
Preferably, the step of analyzing the mapping relation of the change characteristics of each moment between each environmental parameter of the clean room based on the environmental feedback model to obtain the second influence relation level of each environmental parameter of the clean room includes:
S321: extracting and processing the change characteristics of all environmental parameters of the clean room based on the environmental feedback model to obtain the change characteristics of all environmental parameters of the clean room at all moments; wherein the change characteristics comprise change trend, change amplitude and change frequency;
S322: dividing the change characteristics of the environmental parameters to obtain a plurality of association combinations; the association combination comprises an influence result feature and an influence application feature, wherein a mapping relation exists between the influence result feature and the influence application feature;
S323: and blurring the influence result features and the influence application features of each association combination to obtain an influence result region corresponding to the influence result features and an influence application region of the influence application features, and performing association analysis processing on the influence result region and the influence application region of each association combination to obtain a mapping relation of each association combination.
Specifically, various environmental parameter data of the clean room are collected and analyzed, and characteristics such as change trend, change amplitude and change frequency of each parameter are extracted. This step requires processing the historical data using time series analysis, statistical analysis methods, or machine learning algorithms to identify the law of variation of each parameter over time.
More specifically, the environmental parameters are classified into two main categories of influence result characteristics and influence application characteristics according to the extracted change characteristics, and the association combination between them is determined. Influencing the result features means that the change features of certain environmental parameters are influenced by the changes of other parameters; influencing the applied characteristics means that the changing characteristics of certain parameters will influence other parameters.
More specifically, the influence result features and influence application features in the association combination are subjected to blurring processing and converted into blurred regions (such as "high", "medium", "low") so as to better cope with uncertainty and ambiguity. And carrying out relevance analysis on the influence result area and the influence application area of each relevance combination, and establishing a mapping relation between the influence result area and the influence application area by using fuzzy logic or other related algorithms.
More specifically, based on the result of the correlation analysis, the mapping relationship between each correlation combination is clarified, that is, how the change feature of one parameter affects the change feature of another parameter.
It will be appreciated that by the above steps, the interaction mechanism between the environmental parameters in a clean room, especially the interactions at the level of varying features, can be understood more deeply. After the mapping relation among the parameters is clarified, the environment control strategy can be regulated more accurately so as to achieve the optimal environment state and improve the operation efficiency of the clean room. Based on the analysis of the association combination and the mapping relation, the change trend of the environmental parameters can be predicted better, and the control measures can be adjusted in time, so that adverse effects are reduced. With the accumulation and analysis of more data, the method based on the environment feedback model can be continuously perfected, and provides scientific basis for continuous improvement and optimization of the clean room environment.
Preferably, generating an influence test scheme according to the environmental feedback model and the influence relation model at intervals of a predetermined time, and performing test processing on the clean room according to the influence test scheme to obtain influence characteristics corresponding to the influence test scheme, wherein the step of obtaining the influence characteristics corresponding to the influence test scheme comprises the following steps:
s41: acquiring an influence relation among all environmental parameters of the clean room according to the influence relation model;
S42: selecting one environmental parameter of the environmental feedback model as a test parameter, and generating a theoretical influence parameter of the test parameter according to an influence relation between the corresponding test parameter and other environmental parameters;
S43: taking the test parameters and the theoretical influence parameters as the influence test scheme;
S44: performing environmental parameter control on the clean room according to the test parameters in the influence test scheme to obtain actual influence parameters corresponding to the test parameters; wherein the actual influencing parameter is an actual change of other environmental parameters which are displayed by the clean room after the environmental parameters of the test parameters of the receiver are controlled;
S45: comparing the actual influence parameter with the theoretical influence parameter to obtain deviation characteristics of the actual influence parameter and the theoretical influence parameter; wherein the deviation feature is used for describing the reliability degree of the influence relation between the corresponding test parameter and other environment parameters;
s46: and taking the actual influence parameter and the reliability degree together as influence characteristics of the influence test scheme.
Specifically, the established influence relation model is utilized to define the mutual influence relation among all environment parameters in the clean room.
More specifically, one environmental parameter is selected from the environmental feedback model as a test parameter, and a theoretical influence parameter list is generated according to a theoretical influence relation between the test parameter and other environmental parameters. And taking the selected test parameters and the theoretical influence parameters thereof as core contents of the influence test scheme, and controlling environmental parameters of the clean room according to the test parameters in the influence test scheme. And recording the actual changes of other environment parameters after control, namely the actual influencing parameters.
More specifically, the actual influencing parameter is compared with the theoretical influencing parameter, and the deviation between the two is analyzed. And obtaining the reliability degree of the influence relationship between the test parameter and other environment parameters through deviation analysis.
More specifically, the actual influencing parameters and the deviation characteristics (i.e., the reliability degree) between the actual influencing parameters and the theoretical influencing parameters are integrated as influencing characteristics for influencing the test scheme.
It can be appreciated that by comparing the theoretical impact parameters with the actual impact parameters, the accuracy of the environmental control strategy can be intuitively understood, thereby making necessary adjustments and optimizations. The deviation feature analysis helps to identify possible problems in environmental parameter control and improves overall reliability of clean room environmental management. By periodically implementing and evaluating the impact test scheme, the environmental control strategy of the clean room can be continuously monitored and improved, and the environmental quality is ensured to meet the requirements.
Preferably, the step of modifying the influence relation model according to the influence characteristics comprises:
S47: judging the reliability degree according to a preset standard, and if the reliability degree meets the preset standard, correcting the influence relation model is not needed;
S48: if the reliability degree does not meet the preset standard, the test parameters, the actual influence parameters and the environmental parameters of the clean room at all times are used for constructing an environmental feedback model of the clean room together, and the mapping relation among the environmental parameters of the clean room is analyzed and processed based on the environmental feedback model so as to obtain an influence relation model among the environmental parameters of the clean room.
Specifically, deviation between actual influence parameters and theoretical influence parameters is compared, whether the deviation is within an acceptable range is evaluated according to preset standards, and whether the reliability degree meets expectations is judged. If the reliability degree does not meet the preset standard, the test parameters and the actual influence parameters are required to be used, and a new environment feedback model is built by combining all environmental parameter data of the clean room at all times.
More specifically, based on the newly constructed environmental feedback model, the mapping relation among various environmental parameters of the clean room is deeply analyzed, and the influence relation among the parameters is re-estimated and determined. And carrying out necessary correction on the original influence relation model according to the result of the analysis of the mapping relation so as to ensure that the influence relation among the reflected parameters is more accurate and reliable.
It can be appreciated that the accuracy of the influence relation model can be continuously improved through continuous testing, evaluation and correction, so that the influence relation model is more close to the actual environment parameter control condition. The modified influence relation model can guide the control of environmental parameters more accurately, so that the reliability of the environmental management of the whole clean room is improved. The process forms a continuously improved cycle, and the influence relation model between the environment parameters can be continuously optimized through continuous testing, evaluation and correction, so as to adapt to environment changes or new management requirements. The accurate influence relation model provides scientific basis for management staff, helps them to make more reasonable environment control decisions, and improves the effectiveness of the decisions.
Preferably, the environmental feedback model is monitored in real time, and when an abnormal feedback feature occurs in the environmental feedback model, the step of analyzing and processing according to the abnormal feedback feature and the influence relation model to obtain a parameter control scheme corresponding to the abnormal feedback feature includes:
S51: monitoring the environment feedback model in real time according to a preset standard to obtain abnormal feedback characteristics of the environment feedback model;
s52: analyzing and processing the abnormal feedback characteristics according to the influence relation model to obtain model change characteristics corresponding to the abnormal feedback characteristics; the model change feature is used for describing the change of the rest environmental parameters caused by the abnormal feedback feature;
S53: and taking the abnormal feedback characteristics and the model variation characteristics as adjustment targets, taking all the environmental parameters as adjustment subjects, generating adjustment coefficients of all the adjustment subjects according to the influence relation model, and carrying out calculation processing based on the adjustment targets, the adjustment subjects and the adjustment coefficients to obtain control parameters of all the adjustment subjects, wherein the control parameters of all the adjustment subjects are taken as parameter control schemes of the abnormal feedback characteristics.
Specifically, the environmental feedback model is monitored in real time according to preset criteria to capture any abnormal feedback characteristics.
More specifically, based on the influence relation model, the abnormal feedback characteristics are analyzed and processed, corresponding model variation characteristics are determined, and the changes of other environmental parameters caused by the abnormal feedback characteristics are described. And taking the abnormal feedback characteristic and the model change characteristic as adjustment targets, taking all environmental parameters as adjustment subjects, and generating adjustment coefficients of all the adjustment subjects according to the influence relation model. And calculating based on the adjustment targets, the adjustment subjects and the adjustment coefficients to obtain the control parameters of each adjustment subject. And taking the control parameters of the adjusting main bodies as a parameter control scheme of the abnormal feedback characteristics so as to realize accurate control of the environmental parameters.
It can be appreciated that by monitoring and analyzing the abnormal feedback characteristics in real time, the system can quickly respond and adjust environmental parameters to ensure environmental stability. Based on the adjustment coefficient generated by the influence relation model, the fine control of each environmental parameter can be realized, and the accuracy and efficiency of environmental management are improved. The control parameters obtained through calculation processing can realize automatic adjustment of environmental parameters, reduce the burden of manual management and improve the working efficiency. The establishment of the parameter control scheme can help to optimize the environment management strategy, so that the environment parameters are kept in the optimal state, and the production and research efficiency of the clean room is improved.
Referring to fig. 2, in a second aspect, the present invention provides a control apparatus for environmental parameters of a clean room, including:
The data acquisition module is used for acquiring data of all environmental parameters of the clean room through a sensor group preset in the clean room so as to obtain all the environmental parameters of the clean room; wherein the environmental parameters include particle parameters, temperature parameters, humidity parameters, pressure difference parameters, chemical pollution parameters, and noise parameters;
The first model building module is used for building an environment feedback model of the clean room according to various environment parameters of the clean room; the environment feedback model is used for feeding back various environment parameters of the clean room;
The second model building module is used for analyzing and processing the mapping relation among all environmental parameters of the clean room based on the environmental feedback model so as to obtain an influence relation model among all environmental parameters of the clean room; the influence relation model is used for describing influence relations among various environmental parameters of the clean room;
The model correction module is used for generating an influence test scheme according to the environment feedback model and the influence relation model at intervals of preset time, carrying out test processing on the clean room according to the influence test scheme to obtain influence characteristics corresponding to the influence test scheme, and correcting the influence relation model according to the influence characteristics;
The scheme generating module is used for monitoring the environment feedback model in real time, and when the environment feedback model has abnormal feedback characteristics, analyzing and processing are carried out according to the abnormal feedback characteristics and the influence relation model so as to obtain a parameter control scheme corresponding to the abnormal feedback characteristics.
In this embodiment, for specific implementation of each module in the above embodiment of the apparatus, please refer to the description in the above embodiment of the method, and no further description is given here.
In a third aspect, the present invention provides a control system for a clean room environment parameter, configured to implement a method for controlling a clean room environment parameter according to any embodiment of the first aspect.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.

Claims (8)

1. A method for controlling environmental parameters of a clean room, comprising:
Data acquisition is carried out on all environmental parameters of the clean room through a sensor group preset in the clean room so as to obtain all environmental parameters of the clean room; wherein the environmental parameters include particle parameters, temperature parameters, humidity parameters, pressure difference parameters, chemical pollution parameters, and noise parameters;
Constructing an environment feedback model of the clean room according to various environment parameters of the clean room; the environment feedback model is used for feeding back various environment parameters of the clean room;
Analyzing and processing the mapping relation among all environmental parameters of the clean room based on the environmental feedback model to obtain an influence relation model among all environmental parameters of the clean room; the influence relation model is used for describing influence relations among various environmental parameters of the clean room; the step of analyzing the mapping relation among the environmental parameters of the clean room based on the environmental feedback model to obtain an influence relation model among the environmental parameters of the clean room comprises the following steps: analyzing and processing the mapping relation of parameter values at all moments among all environmental parameters of the clean room based on the environmental feedback model to obtain a first influence relation level of all environmental parameters of the clean room; analyzing and processing the mapping relation of the change characteristics at each moment among all environmental parameters of the clean room based on the environmental feedback model to obtain a second influence relation level of all environmental parameters of the clean room; the first influence relation hierarchy and the second influence relation hierarchy are used as an influence relation model among various environmental parameters of the clean room;
Generating an influence test scheme according to the environment feedback model and the influence relation model at intervals of preset time, performing test processing on the clean room according to the influence test scheme to obtain influence characteristics corresponding to the influence test scheme, and correcting the influence relation model according to the influence characteristics; generating an influence test scheme according to the environment feedback model and the influence relation model at intervals of preset time, and performing test processing on the clean room according to the influence test scheme to obtain influence characteristics corresponding to the influence test scheme, wherein the step of obtaining the influence characteristics corresponding to the influence test scheme comprises the following steps: acquiring an influence relation among all environmental parameters of the clean room according to the influence relation model; selecting one environmental parameter of the environmental feedback model as a test parameter, and generating a theoretical influence parameter of the test parameter according to an influence relation between the corresponding test parameter and other environmental parameters; taking the test parameters and the theoretical influence parameters as the influence test scheme; performing environmental parameter control on the clean room according to the test parameters in the influence test scheme to obtain actual influence parameters corresponding to the test parameters; wherein the actual influencing parameter is an actual change of other environmental parameters which are displayed by the clean room after the environmental parameters of the test parameters of the receiver are controlled; comparing the actual influence parameter with the theoretical influence parameter to obtain deviation characteristics of the actual influence parameter and the theoretical influence parameter; wherein the deviation feature is used for describing the reliability degree of the influence relation between the corresponding test parameter and other environment parameters; the actual influencing parameters and the reliability degree are used as influencing characteristics of the influencing test scheme;
And monitoring the environment feedback model in real time, and when the environment feedback model has abnormal feedback characteristics, analyzing and processing according to the abnormal feedback characteristics and the influence relation model to obtain a parameter control scheme corresponding to the abnormal feedback characteristics.
2. The method of claim 1, wherein constructing an environmental feedback model of the clean room based on the environmental parameters of the clean room comprises:
constructing a time coordinate axis; the time coordinate axis is provided with time coordinate points which are sequentially arranged;
Respectively constructing an environment parameter coordinate axis perpendicular to the time coordinate axis based on each time coordinate point of the time coordinate axis; the environment parameter coordinate axis is provided with a plurality of display levels, and each display level corresponds to an environment parameter of a clean room;
And carrying out coordinate positioning and coordinate connection on the environmental parameter coordinate axes of each time coordinate point of the time coordinate axis according to each environmental parameter of the clean room so as to obtain an environmental feedback model of the clean room.
3. The method according to claim 1, wherein the step of analyzing the mapping relation of parameter values at each time between the environmental parameters of the clean room based on the environmental feedback model to obtain the first level of influence relation of the environmental parameters of the clean room comprises:
dividing each environmental parameter in advance to obtain a plurality of association combinations; the association combination comprises an influence result parameter and an influence application parameter, wherein a mapping relation exists between the influence result parameter and the influence application parameter;
And blurring the influence result parameters and the influence application parameters of each association combination to obtain an influence result area corresponding to the influence result parameters and an influence application area of the influence application parameters, and performing association analysis processing on the influence result area and the influence application area of each association combination to obtain a mapping relation of each association combination.
4. The method for controlling environmental parameters of a clean room according to claim 1, wherein the step of analyzing the mapping relation of the change characteristics at each time between the environmental parameters of the clean room based on the environmental feedback model to obtain the second level of influence relation of the environmental parameters of the clean room comprises:
extracting and processing the change characteristics of all environmental parameters of the clean room based on the environmental feedback model to obtain the change characteristics of all environmental parameters of the clean room at all moments; wherein the change characteristics comprise change trend, change amplitude and change frequency;
Dividing the change characteristics of the environmental parameters to obtain a plurality of association combinations; the association combination comprises an influence result feature and an influence application feature, wherein a mapping relation exists between the influence result feature and the influence application feature;
And blurring the influence result features and the influence application features of each association combination to obtain an influence result region corresponding to the influence result features and an influence application region of the influence application features, and performing association analysis processing on the influence result region and the influence application region of each association combination to obtain a mapping relation of each association combination.
5. The method of claim 1, wherein modifying the influence relation model according to the influence characteristics comprises:
Judging the reliability degree according to a preset standard, and if the reliability degree meets the preset standard, correcting the influence relation model is not needed;
if the reliability degree does not meet the preset standard, the test parameters, the actual influence parameters and the environmental parameters of the clean room at all times are used for constructing an environmental feedback model of the clean room together, and the mapping relation among the environmental parameters of the clean room is analyzed and processed based on the environmental feedback model so as to obtain an influence relation model among the environmental parameters of the clean room.
6. The method according to claim 1, wherein the step of monitoring the environmental feedback model in real time, and when an abnormal feedback characteristic occurs in the environmental feedback model, analyzing according to the abnormal feedback characteristic and the influence relation model to obtain a parameter control scheme corresponding to the abnormal feedback characteristic comprises:
Monitoring the environment feedback model in real time according to a preset standard to obtain abnormal feedback characteristics of the environment feedback model;
Analyzing and processing the abnormal feedback characteristics according to the influence relation model to obtain model change characteristics corresponding to the abnormal feedback characteristics; the model change feature is used for describing the change of the rest environmental parameters caused by the abnormal feedback feature;
And taking the abnormal feedback characteristics and the model variation characteristics as adjustment targets, taking all the environmental parameters as adjustment subjects, generating adjustment coefficients of all the adjustment subjects according to the influence relation model, and carrying out calculation processing based on the adjustment targets, the adjustment subjects and the adjustment coefficients to obtain control parameters of all the adjustment subjects, wherein the control parameters of all the adjustment subjects are taken as parameter control schemes of the abnormal feedback characteristics.
7. A control device for a clean room environment parameter, characterized by implementing a control method for a clean room environment parameter according to any one of claims 1 to 6, comprising:
The data acquisition module is used for acquiring data of all environmental parameters of the clean room through a sensor group preset in the clean room so as to obtain all the environmental parameters of the clean room; wherein the environmental parameters include particle parameters, temperature parameters, humidity parameters, pressure difference parameters, chemical pollution parameters, and noise parameters;
The first model building module is used for building an environment feedback model of the clean room according to various environment parameters of the clean room; the environment feedback model is used for feeding back various environment parameters of the clean room;
The second model building module is used for analyzing and processing the mapping relation among all environmental parameters of the clean room based on the environmental feedback model so as to obtain an influence relation model among all environmental parameters of the clean room; the influence relation model is used for describing influence relations among various environmental parameters of the clean room;
The model correction module is used for generating an influence test scheme according to the environment feedback model and the influence relation model at intervals of preset time, carrying out test processing on the clean room according to the influence test scheme to obtain influence characteristics corresponding to the influence test scheme, and correcting the influence relation model according to the influence characteristics;
The scheme generating module is used for monitoring the environment feedback model in real time, and when the environment feedback model has abnormal feedback characteristics, analyzing and processing are carried out according to the abnormal feedback characteristics and the influence relation model so as to obtain a parameter control scheme corresponding to the abnormal feedback characteristics.
8. A control system for clean room environment parameters, characterized by implementing a control method for clean room environment parameters according to any one of claims 1-6.
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007072987A (en) * 2005-09-09 2007-03-22 Denso Corp Environment recognition apparatus
CN114486656A (en) * 2021-12-31 2022-05-13 扬州江净空调制造有限公司 Dynamic Environmental Monitoring System for Medical Cleanrooms
CN115355954A (en) * 2022-10-24 2022-11-18 派欧尼尔环境净化工程(北京)有限公司 Detection method and system for clean room mobile robot
KR102482591B1 (en) * 2021-09-28 2022-12-29 (주)디엘정보기술 Method od Selecting Environmental Data Feature Parameter for Controlling Particle of Semiconductor Clean Room
CN116629550A (en) * 2023-05-26 2023-08-22 扬州市勘测设计研究院有限公司 Water environment supervision method and scheduling operation system based on cloud computing
WO2024032009A1 (en) * 2022-08-10 2024-02-15 浙江大学 Model evolution-based environment sensing method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7046245B2 (en) * 2001-10-10 2006-05-16 Sony Computer Entertainment America Inc. System and method for environment mapping
US11333383B2 (en) * 2017-03-29 2022-05-17 Panasonic Intellectual Property Management Co., Ltd. Environment estimation device and environment estimation method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007072987A (en) * 2005-09-09 2007-03-22 Denso Corp Environment recognition apparatus
KR102482591B1 (en) * 2021-09-28 2022-12-29 (주)디엘정보기술 Method od Selecting Environmental Data Feature Parameter for Controlling Particle of Semiconductor Clean Room
CN114486656A (en) * 2021-12-31 2022-05-13 扬州江净空调制造有限公司 Dynamic Environmental Monitoring System for Medical Cleanrooms
WO2024032009A1 (en) * 2022-08-10 2024-02-15 浙江大学 Model evolution-based environment sensing method
CN115355954A (en) * 2022-10-24 2022-11-18 派欧尼尔环境净化工程(北京)有限公司 Detection method and system for clean room mobile robot
CN116629550A (en) * 2023-05-26 2023-08-22 扬州市勘测设计研究院有限公司 Water environment supervision method and scheduling operation system based on cloud computing

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