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CN1178295C - Flip chip and flip chip type packaging substrate - Google Patents

Flip chip and flip chip type packaging substrate Download PDF

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Publication number
CN1178295C
CN1178295C CNB02122403XA CN02122403A CN1178295C CN 1178295 C CN1178295 C CN 1178295C CN B02122403X A CNB02122403X A CN B02122403XA CN 02122403 A CN02122403 A CN 02122403A CN 1178295 C CN1178295 C CN 1178295C
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pads
signal
bump
chip
bump pads
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CN1387256A (en
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־
许志行
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Via Technologies Inc
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Via Technologies Inc
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  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Wire Bonding (AREA)

Abstract

A flip chip and flip chip type package substrate, wherein the flip chip has a plurality of core power/ground pads, at least one signal pad ring, at least one power pad ring and at least one ground pad ring, all disposed on the active surface of the flip chip, and the pad rings are concentrically and annularly distributed around the core power/ground pads. In addition, the top conducting wire layer of the flip chip type package substrate is provided with a plurality of bump pads, the positions of the bump pads correspond to the positions of the welding pads of the flip chip respectively, a non-signal bump pad ring can be arranged on the periphery of the bump pad ring, and a pair of power traces or ground traces can be arranged on any conducting wire layer of the flip chip type package substrate and are respectively arranged on two sides of one signal trace to serve as the protective trace of the signal trace.

Description

倒装芯片及倒装芯片式封装基板Flip Chip and Flip Chip Package Substrate

技术领域technical field

本发明是有关于一种倒装芯片及倒装芯片式封装基板,且特别是有关于一种具有多个焊垫环的倒装芯片,以及一种对应于上述倒装芯片而具有多个凸块垫环的倒装芯片式封装基板。The present invention relates to a flip chip and a flip chip package substrate, and more particularly to a flip chip with a plurality of pad rings, and a flip chip corresponding to the above flip chip with a plurality of bumps. Flip Chip Package Substrate with Block Spacer Ring.

背景技术Background technique

倒装芯片式接合技术(Flip Chip,FC)是一种常见应用于芯片尺寸封装(Chip Scale Package,CSP)的芯片封装技术,其主要是利用面矩阵(Area Array)的排列方式,将芯片(die)的多个焊垫(die pad)设计配置于芯片的主动表面(active surface),即芯片的具有主动组件(active device)的一面,并在各个焊垫上分别形成凸块(bump),接着再将芯片上的凸块连接至承载器(carrier)上所对应的接点(contact),使得芯片以翻覆(flip)的方式对应接合至承载器的表面。Flip chip bonding technology (Flip Chip, FC) is a common chip packaging technology used in chip size packaging (Chip Scale Package, CSP), which mainly uses the arrangement of the area array (Area Array), the chip ( The multiple die pads of the die are designed and arranged on the active surface of the chip, that is, the side of the chip with active components (active device), and bumps are formed on each pad respectively, and then Then, the bumps on the chip are connected to the corresponding contacts on the carrier, so that the chip is correspondingly bonded to the surface of the carrier in a flipping manner.

由于倒装芯片式接合技术具有缩小封装面积,提高封装密度,以及缩短信号传输路径等优点,使得倒装芯片式接合技术已广泛地应用在芯片封装领域,特别是具有高脚位(High Pin Count)的芯片封装结构,例如以倒装芯片式接合(FC)搭配球栅格阵列(Ball Grid Array,BGA)的倒装芯片式球栅格阵列(FCBGA)的芯片封装型态,或以倒装芯片式接合(FC)搭配针格数组(Pin Grid Array,PGA)的芯片封装型态,均能有效地将单颗具有高达数百个焊垫的芯片加以封装。Due to the flip-chip bonding technology has the advantages of reducing the packaging area, increasing the packaging density, and shortening the signal transmission path, the flip-chip bonding technology has been widely used in the field of chip packaging, especially with high pins (High Pin Count ) chip packaging structure, such as flip-chip bonding (FC) with a ball grid array (BGA) flip-chip ball grid array (FCBGA) chip packaging type, or flip-chip Chip bonding (FC) and pin grid array (Pin Grid Array, PGA) chip packaging types can effectively package a single chip with up to hundreds of pads.

无论是上述的倒装芯片式球栅格阵列(FCBGA)、倒装芯片式针格数组(FCPGA),或是其它应用到倒装芯片式接合(FC)的芯片封装技术,通常是利用倒装芯片式封装基板(substrate)来作为倒装芯片式接合用的承载器,而倒装芯片式接合用的倒装芯片式封装基板(以下简称基板)主要系由多层图案化导线层及多层绝缘层所相互交错叠合而成,并以多个导电插塞分别贯穿上述的绝缘层,用以电性连接上述的相邻的导线层。此外,基板的顶面更配置有多个凸块垫(bumppad),用以连接芯片上的凸块,而基板的底面则配设有多个焊球垫(ballpad),其分别经由基板的内部线路,而绕线至基板的底面的焊球垫,并可在焊球垫上分别配设焊球(ball)等导电结构,用以连接至下一层级(next level)的电子装置,例如印刷电路板(Printed Circuit Board,PCB)等。Whether it is the above-mentioned flip chip ball grid array (FCBGA), flip chip pin grid array (FCPGA), or other chip packaging technologies applied to flip chip bonding (FC), usually using flip chip The chip package substrate (substrate) is used as a carrier for flip-chip bonding, and the flip-chip package substrate (hereinafter referred to as the substrate) for flip-chip bonding is mainly composed of multi-layer patterned wire layers and multi-layer The insulation layers are interlaced and laminated, and a plurality of conductive plugs respectively penetrate through the above insulation layers to electrically connect the above-mentioned adjacent wire layers. In addition, the top surface of the substrate is further equipped with a plurality of bump pads for connecting the bumps on the chip, while the bottom surface of the substrate is equipped with a plurality of solder ball pads, which respectively pass through the interior of the substrate. The wires are wound to the solder ball pads on the bottom surface of the substrate, and conductive structures such as solder balls can be arranged on the solder ball pads to connect to next-level electronic devices, such as printed circuits. Board (Printed Circuit Board, PCB) and so on.

请参考图1,其为已知的一种倒装芯片式封装结构的局部剖示图。芯片10的主动表面12上系以面矩阵的方式配置有多个焊垫14,而倒装芯片式封装基板20(以下简称基板20)则是由多层图案化的导线层24(如组件标号24a、24b、24c...)以及多层绝缘层26(如组件标号26a、26b、26c)相互交错叠合而成,并利用多个导电插塞(plug)36分别贯穿绝缘层26,用以电性连接导电层24。其中,导电插塞36的种类包括有导通插塞(via)36a及镀通插塞(Plating Through Hole,PTH)36b,两者依照插塞制程的不同而有尺寸上的差异。Please refer to FIG. 1 , which is a partial cross-sectional view of a known flip-chip packaging structure. On the active surface 12 of the chip 10, a plurality of bonding pads 14 are arranged in a surface matrix, while the flip-chip package substrate 20 (hereinafter referred to as the substrate 20) is composed of a multi-layer patterned wire layer 24 (such as the component label 24a, 24b, 24c...) and multi-layer insulating layers 26 (such as component numbers 26a, 26b, 26c) are formed by interlacing and stacking each other, and a plurality of conductive plugs (plug) 36 are used to penetrate the insulating layer 26 respectively. To electrically connect the conductive layer 24 . The types of the conductive plug 36 include a via 36a and a plated through hole (PTH) 36b, both of which have different sizes according to different plug manufacturing processes.

请同样参考图1,导线层24的最顶层者(即最接近基板20的顶面21者)系为第一导线层24a,其具有多个凸块垫30,而凸块垫30的位置系分别对应焊垫14的位置,使得焊垫14可经由凸块16而连接至基板20上所对应的凸块垫30,再经由导线层24及导电插塞36所构成的线路,而将芯片10的部分焊垫14扇出(fan out)至芯片10的主动表面12下方以外的区域。另外,基板20更包括有一图案化的防焊层(Solder Mask)28,其覆盖于第一绝缘层26a及第一导线层24a上,并同时暴露出第一导线层24a的多个凸块垫30,用以保护第一导线层24a的其它部分及第一绝缘层26a。此外,基板20的底面22则具有多个焊球垫34,其系用以连接焊球(未绘示)等导电结构,用以连接至下一层级的电子装置。Please also refer to FIG. 1 , the top layer of the wiring layer 24 (that is, the one closest to the top surface 21 of the substrate 20) is the first wiring layer 24a, which has a plurality of bump pads 30, and the position of the bump pads 30 is Corresponding to the positions of the pads 14, so that the pads 14 can be connected to the corresponding bump pads 30 on the substrate 20 through the bumps 16, and then through the circuit formed by the wire layer 24 and the conductive plug 36, the chip 10 Part of the bonding pads 14 fan out to areas other than under the active surface 12 of the chip 10. In addition, the substrate 20 further includes a patterned solder mask (Solder Mask) 28, which covers the first insulating layer 26a and the first wiring layer 24a, and simultaneously exposes a plurality of bump pads of the first wiring layer 24a. 30, used to protect other parts of the first wire layer 24a and the first insulating layer 26a. In addition, the bottom surface 22 of the substrate 20 has a plurality of solder ball pads 34 for connecting conductive structures such as solder balls (not shown) for connecting to next-level electronic devices.

请参考图2A,其为图1的芯片的仰视图。芯片110的主动表面112系以面矩阵的方式,配置有多个焊垫114(如组件标号114a、114b、114c、114d、...),并依照功能上的不同,焊垫114系可区分为信号焊垫(signal pad)114a、电源焊垫(power pad)114b、接地焊垫(groundpad)114c及核心(core)电源/接地焊垫114d,其中信号焊垫114a、电源焊垫114b及接地焊垫114c均位于核心电源/接地焊垫114d的外围。值得注意的是,由于已知的信号焊垫114a、电源焊垫114b及接地焊垫114c均不规则地分布于芯片110的主动表面112上,因此,当芯片110上的原有焊垫(未绘示)经由重布线层(Re-Distribution Layer,RDL)(未绘示),而重新分布于芯片110的主动表面112时,将相对增加芯片110的原有焊垫经由绕线至重配置后的焊垫114的线路长度,因而增加信号传递的路径长度,进而降低芯片110的电气效能(Electrical Performance)。Please refer to FIG. 2A , which is a bottom view of the chip in FIG. 1 . The active surface 112 of the chip 110 is configured with a plurality of welding pads 114 (such as component numbers 114a, 114b, 114c, 114d, . It is signal pad (signal pad) 114a, power pad (power pad) 114b, ground pad (groundpad) 114c and core (core) power/ground pad 114d, wherein signal pad 114a, power pad 114b and ground The bonding pads 114c are located on the periphery of the core power/ground bonding pads 114d. It should be noted that, since the known signal pads 114a, power pads 114b and ground pads 114c are irregularly distributed on the active surface 112 of the chip 110, when the original pads on the chip 110 (not Shown) When redistributed on the active surface 112 of the chip 110 through the redistribution layer (Re-Distribution Layer, RDL) (not shown), the original pads of the chip 110 will be relatively increased after being re-distributed by winding. The line length of the bonding pad 114 increases, thereby increasing the signal transmission path length, thereby reducing the electrical performance of the chip 110 (Electrical Performance).

接着请参考图2B,其为对应图2A的芯片的倒装芯片式封装基板的局部俯视图。倒装芯片式封装基板120的顶面121系分布有多个凸块垫130(如组件标号130a、130b、130c、130d...),而全部的凸块垫130均配置于倒装芯片式封装基板120的芯片区域140之内,并对应图2A的芯片110上的焊垫114,而呈面矩阵的方式排列分布。此外,为对应连接图2A的芯片110的信号焊垫114a、电源焊垫114b、接地焊垫114c及核心电源/接地焊垫114d,更可将基板120的凸块垫130区分为信号凸块垫130a、电源凸块垫130b、接地凸块垫130c及核心电源/接地凸块垫130d,其中信号凸块垫130a、电源凸块垫130b及接地凸块垫130c均位于核心电源/接地焊垫130d的外围。值得注意的是,由于已知的信号焊垫114a、电源焊垫114b及接地焊垫114c均系不规则分布于芯片110的主动表面112上,如图2A所示,使得基板120上的信号凸块垫130a、电源凸块垫130b及接地凸块垫130c也将对应不规则地分布于基板120的顶面121。Next, please refer to FIG. 2B , which is a partial top view of a flip-chip packaging substrate corresponding to the chip shown in FIG. 2A . A plurality of bump pads 130 (such as component numbers 130a, 130b, 130c, 130d . Within the chip area 140 of the package substrate 120 , corresponding to the bonding pads 114 on the chip 110 shown in FIG. 2A , they are arranged and distributed in a planar matrix. In addition, in order to correspond to the signal pads 114a, power pads 114b, ground pads 114c and core power supply/ground pads 114d connected to the chip 110 in FIG. 130a, power bump pad 130b, ground bump pad 130c and core power supply/ground bump pad 130d, wherein the signal bump pad 130a, power supply bump pad 130b and ground bump pad 130c are all located on the core power supply/ground pad 130d the periphery. It should be noted that, since the known signal pads 114a, power pads 114b and ground pads 114c are irregularly distributed on the active surface 112 of the chip 110, as shown in FIG. The bump pads 130 a , the power bump pads 130 b and the ground bump pads 130 c are also irregularly distributed on the top surface 121 of the substrate 120 .

发明内容Contents of the invention

本发明的第一目的在于提出一种倒装芯片,用以缩短倒装芯片的内部线路的绕线长度,藉以缩短倒装芯片的重配置线路层的绕线长度,进而提高芯片的电气效能,并可将电源焊垫及接地焊垫分别设计集中分布,除了有利于芯片的布线之外,也可使同组信号所参考的电源及接地较为平均,如此同样可以提高芯片的电气效能。The first purpose of the present invention is to provide a flip chip, which is used to shorten the winding length of the internal circuit of the flip chip, so as to shorten the winding length of the reconfiguration circuit layer of the flip chip, thereby improving the electrical performance of the chip. In addition, the power pads and ground pads can be designed and distributed separately, which is not only beneficial to the wiring of the chip, but also makes the power and ground referenced by the same group of signals more even, which can also improve the electrical performance of the chip.

本发明的第二目的在于提出一种倒装芯片式封装基板,其凸块垫位置分别对应第一目的的倒装芯片的焊垫位置,并对应同样将电源凸块垫及接地凸块垫分别设计集中分布,故有利于基板的布线,并可将防护迹线(guard trace)配设于信号迹线的两侧,用以避免信号迹线与相邻的其它信号迹线发生串音(cross-talk)的现象,进而提高芯片的电气效能。The second object of the present invention is to provide a flip-chip package substrate, the positions of the bump pads respectively correspond to the pad positions of the flip-chip of the first object, and correspondingly, the power bump pads and the ground bump pads are respectively The design is concentrated and distributed, so it is beneficial to the wiring of the substrate, and the guard trace can be arranged on both sides of the signal trace to avoid crosstalk between the signal trace and other adjacent signal traces. -talk) phenomenon, thereby improving the electrical performance of the chip.

基于本发明的上述第一目的,本发明提出一种倒装芯片,其具有一主动表面,而倒装芯片更具有多个核心电源/接地焊垫、至少一信号焊垫环、至少一电源焊垫环及至少一接地焊垫环,均配置于主动表面上,其中信号焊垫环、电源焊垫环及接地焊垫环是以这些核心电源/接地焊垫为中心,而呈同心环状分布于这些核心电源/接地焊垫的外围。Based on the above-mentioned first object of the present invention, the present invention proposes a flip chip, which has an active surface, and the flip chip further has a plurality of core power/ground pads, at least one signal pad ring, at least one power pad The pad ring and at least one ground pad ring are all arranged on the active surface, wherein the signal pad ring, the power pad ring and the ground pad ring are centered on these core power/ground pads and distributed in a concentric ring shape on the periphery of these core power/ground pads.

基于本发明的上述第二目的,本发明更提出一种倒装芯片式封装基板,其具有多个导线层,其依序相互重叠、多个绝缘层,其分别配置于二相邻导电层之间,用以电性隔离这些导线层,并与这些导线层相互交错叠合、及多个导电插塞,分别贯穿这些绝缘层,用以电性连接这些导电层,其中这些导线层的最顶层具有多个核心电源/接地凸块垫、至少一信号凸块垫环、至少一电源凸块垫环及至少一接地凸块垫环,其中信号凸块垫环、电源凸块垫环及接地凸块垫环是以这些核心电源/接地凸块垫为中心,而呈同心环状分布于这些核心电源/接地凸块垫的外围。Based on the above-mentioned second object of the present invention, the present invention further proposes a flip-chip packaging substrate, which has a plurality of conductive layers, which overlap each other in sequence, and a plurality of insulating layers, which are respectively arranged between two adjacent conductive layers. Spaces are used to electrically isolate these wire layers and overlap with these wire layers, and a plurality of conductive plugs respectively penetrate through these insulating layers to electrically connect these conductive layers, wherein the topmost layer of these wire layers Having a plurality of core power/ground bump pads, at least one signal bump pad ring, at least one power bump pad ring, and at least one ground bump pad ring, wherein the signal bump pad ring, the power bump pad ring, and the ground bump pad The block pad ring is centered on these core power/ground bump pads, and is distributed concentrically around the periphery of these core power/ground bump pads.

为让本发明的上述目的、特征和优点能明显易懂,下文特举一较佳实施例,并配合所附图标,作详细说明如下:In order to make the above-mentioned purposes, features and advantages of the present invention clearly understandable, a preferred embodiment is specifically cited below, and in conjunction with the attached icons, the detailed description is as follows:

附图说明Description of drawings

图1为已知的一种倒装芯片式封装结构的局部剖示图;Fig. 1 is a partial sectional view of a known flip-chip packaging structure;

图2A为图1的芯片的仰视图;Fig. 2A is the bottom view of the chip of Fig. 1;

图2B为对应图2A的芯片的倒装芯片式封装基板的局部俯视图;2B is a partial top view of a flip-chip packaging substrate corresponding to the chip in FIG. 2A;

图3A、图3C、图3E、图3G、图3I、图3K及图3M为本发明的较佳实施例的一种芯片的仰视图;Fig. 3A, Fig. 3C, Fig. 3E, Fig. 3G, Fig. 3I, Fig. 3K and Fig. 3M are the bottom views of a kind of chip of the preferred embodiment of the present invention;

图3B、图3D、图3F、图3H、图3J、图3L、图3N分别为对应图3A、图3C、图3E、图3G、图3I、图3K及图3M的芯片的倒装芯片式封装基板的局部俯视图;Fig. 3B, Fig. 3D, Fig. 3F, Fig. 3H, Fig. 3J, Fig. 3L, and Fig. 3N are respectively the flip-chip type of the chip corresponding to Fig. 3A, Fig. 3C, Fig. 3E, Fig. 3G, Fig. 3I, Fig. 3K and Fig. 3M A partial top view of the package substrate;

图4A为图3B的倒装芯片式封装基板,其第一导线层的局部示意图;以及4A is a partial schematic view of the first wiring layer of the flip-chip packaging substrate of FIG. 3B; and

图4B为图3B的倒装芯片式封装基板,其第二导线层的局部示意图。FIG. 4B is a partial schematic diagram of the second wire layer of the flip-chip packaging substrate of FIG. 3B .

图式的标示说明Graphical labeling instructions

10:芯片                    12:主动表面10: chip 12: active surface

14:焊垫                    16:凸块14: Welding pad 16: Bump

20:倒装芯片式封装基板      21:顶面20: Flip chip package substrate 21: Top surface

22:底面                    24、24a~24c:导线层22: Bottom surface 24, 24a~24c: wire layer

26、26a~26c:绝缘层        28:防焊层26, 26a~26c: insulation layer 28: solder mask layer

30:凸块垫                  32:插塞垫30: bump pad 32: plug pad

34:焊球垫                  36:导电插塞34: Solder ball pad 36: Conductive plug

36a:导通插塞               36b:镀通插塞36a: Conduction plug 36b: Plated through plug

110:芯片                   112:主动表面110: chip 112: active surface

114、114a~114d:焊垫       120:倒装芯片式封装基板114, 114a~114d: Welding pads 120: Flip chip package substrate

121:顶面                   130、130a~130d:凸块垫121: top surface 130, 130a~130d: bump pad

150:芯片区域               210:芯片150: chip area 210: chip

212:主动表面               214、214a~214d:焊垫212: active surface 214, 214a~214d: welding pad

215、215a~215f:焊垫环     220:倒装芯片式封装基板215, 215a~215f: welding pad ring 220: flip-chip package substrate

221:顶面                   230、230a~230d:凸块垫221: top surface 230, 230a~230d: bump pad

231、231a~231f:凸块垫环231, 231a~231f: bump backing ring

250:芯片区域               324a:第一导线层250: chip area 324a: first wire layer

324b:第二导线层            330:凸块垫324b: Second wire layer 330: Bump pad

331、331a~331f:凸块垫环   332:插塞垫331, 331a~331f: bump gasket ring 332: plug pad

333、331a~331f:凸块垫环   336:导电插塞333, 331a~331f: bump backing ring 336: conductive plug

340、342:导电迹线          340a、342a:接地迹线340, 342: Conductive traces 340a, 342a: Ground traces

340b、342b:信号迹线        350:芯片区域340b, 342b: signal traces 350: chip area

具体实施方式Detailed ways

请参考图3A,其为本发明的较佳实施例的一种芯片的仰视图。芯片210的主动表面212以面矩阵的方式,配设有多个焊垫214(如组件标号214a、214b、214c、214d...),并组成多个焊垫环215。此外,依照功能的不同,还可将焊垫214区分为信号焊垫214a、电源焊垫214b、接地焊垫214c及核心电源/接地焊垫214d,其中信号焊垫214a、电源焊垫214b及接地焊垫214c均以核心电源/接地焊垫214为中心,而分布于核心电源/接地焊垫214d的外围。值得注意的是,由多个焊垫214所组成的信号焊垫环(如第二焊垫环215b、第三焊垫环215c及第六焊垫环215f),其焊垫214有百分之五十以上是信号焊垫214a,而较佳的情况是信号焊垫环的焊垫214有百分之九十以上是信号焊垫214a,而电源焊垫环(如第五焊垫环215e)及接地焊垫环(如第一焊垫环215a及第四焊垫环215d)也是如此。此外,信号焊垫环可由单层、双层、三层或多层环状排列的焊垫214所组成,例如图3A的第二焊垫环215b及第三焊垫环215c可视为同一信号焊垫环,同样地,电源焊垫环及接地焊垫环也是如此。Please refer to FIG. 3A , which is a bottom view of a chip according to a preferred embodiment of the present invention. The active surface 212 of the chip 210 is provided with a plurality of bonding pads 214 (such as component numbers 214 a , 214 b , 214 c , 214 d . . . ) in a matrix, forming a plurality of bonding pad rings 215 . In addition, according to different functions, the pads 214 can also be divided into signal pads 214a, power pads 214b, ground pads 214c, and core power/ground pads 214d, wherein the signal pads 214a, power pads 214b and ground pads The pads 214c are centered on the core power/ground pads 214 and distributed around the core power/ground pads 214d. It should be noted that, for a signal pad ring composed of a plurality of pads 214 (such as the second pad ring 215b, the third pad ring 215c and the sixth pad ring 215f), the pads 214 have 100% More than 50% are signal pads 214a, and preferably, more than 90% of the pads 214 of the signal pad ring are signal pads 214a, and the power pad ring (such as the fifth pad ring 215e) The same is true for the ground pad rings (such as the first pad ring 215a and the fourth pad ring 215d). In addition, the signal pad ring can be composed of single-layer, double-layer, three-layer or multi-layer ring-arranged pads 214. For example, the second pad ring 215b and the third pad ring 215c in FIG. 3A can be regarded as the same signal pad ring. Pad rings, likewise, power pad rings and ground pad rings.

请同样参考图3A,多圈焊垫环215呈同心环状排列分布于芯片210的主动表面212,而各圈焊垫环215均可分别设定为信号焊垫环、电源焊垫环及接地焊垫环。以图3A的芯片210为例,芯片210具有三信号焊垫环(如第二焊垫环215b、第三焊垫环215c及第六焊垫环215f)、一电源焊垫环(如第五焊垫环215e)及二接地焊垫环(如第一焊垫环215a及第四焊垫环215d),其中图3A的芯片210的多圈焊垫环215的排列方式仅为众多同心环状的排列的方式之一,而其它同心环状排列的方式如图3C、图3E、图3G、图3I、图3K及图3M的芯片210所示。然而,本发明的芯片210的多圈不同功能的焊垫环215并不局限于图3A、图3C、图3E、图3G、图3I、图3K及图3M的同心环状排列的方式,也可为其它同心环状排列的方式。值得注意的是,本发明的较佳实施例可将最外圈的第六焊垫环215f设计为电源焊垫环或接地焊垫环,其主要目的在于让信号于导线传输时能有较佳的屏蔽效应(Shielding)。Please also refer to FIG. 3A , the multi-circle welding pad rings 215 are concentrically arranged and distributed on the active surface 212 of the chip 210, and each ring of welding pad rings 215 can be respectively set as signal welding pad rings, power supply welding pad rings and grounding pads. pad ring. Taking the chip 210 of FIG. 3A as an example, the chip 210 has three signal pad rings (such as the second pad ring 215b, the third pad ring 215c and the sixth pad ring 215f), a power pad ring (such as the fifth Welding pad ring 215e) and two grounding welding pad rings (such as the first welding pad ring 215a and the fourth welding pad ring 215d), wherein the multi-circle welding pad ring 215 of the chip 210 in FIG. 3A is only arranged in the form of many concentric rings One of the ways of arrangement, and other ways of concentric ring arrangement are shown in the chips 210 in FIG. 3C , FIG. 3E , FIG. 3G , FIG. 3I , FIG. 3K and FIG. 3M . However, the multi-turn pad rings 215 with different functions of the chip 210 of the present invention are not limited to the concentric annular arrangements shown in FIGS. 3A, 3C, 3E, 3G, 3I, 3K and 3M. It can be arranged in other concentric rings. It is worth noting that in the preferred embodiment of the present invention, the sixth pad ring 215f in the outermost circle can be designed as a power pad ring or a ground pad ring. The shielding effect (Shielding).

请同样参考图3A,本发明的较佳实施例是将多个相同功能的焊垫214共同排列组成同一功能的焊垫环215,并可将电源焊垫环215e的电源焊垫214b经由绕线而相互电性连接,更可将接地焊垫环215a(或接地焊垫环215d)的接地焊垫214c经由绕线而相互电性连接,使得各个信号焊垫214a所参考的电源焊垫214b及接地焊垫214c将较为平均,故有助于提高芯片的电气效能。Please also refer to FIG. 3A. In a preferred embodiment of the present invention, a plurality of welding pads 214 of the same function are arranged together to form a welding pad ring 215 of the same function, and the power supply welding pad 214b of the power supply welding pad ring 215e can be wound To be electrically connected to each other, the ground pads 214c of the ground pad ring 215a (or ground pad ring 215d) can be electrically connected to each other through winding wires, so that the power pads 214b and 214b referred to by each signal pad 214a and The ground pads 214c will be relatively uniform, which helps to improve the electrical performance of the chip.

请同时参考图1、图3B,其中图3B为对应图3A的芯片的倒装芯片式封装基板的局部俯视图。如图3B所示,倒装芯片式封装基板220(以下简称基板220)是由图1的图案化的多层导线层24(如组件标号24a、24b、24c、...)及多层绝缘层26(如组件标号26a、26b、26c、...)所构成,其中这些导线层24依序相互重叠,而这些绝缘层26则分别位于二相邻导线层24之间,用以电性隔离这些导线层24,并与这些导线层24相互交错叠合。此外,基板220还具有多个图1的导电插塞36,例如导通插塞(via)36a及镀通插塞(PTH)36b,其分别贯穿图1的绝缘层26,用以电性连接图1的二相邻的导线层24。Please refer to FIG. 1 and FIG. 3B at the same time, wherein FIG. 3B is a partial top view of a flip-chip packaging substrate corresponding to the chip in FIG. 3A . As shown in FIG. 3B , the flip-chip package substrate 220 (hereinafter referred to as the substrate 220 ) is composed of the patterned multilayer wiring layer 24 (such as component numbers 24a, 24b, 24c, ...) and multilayer insulation in FIG. Layers 26 (such as component numbers 26a, 26b, 26c, . The wire layers 24 are isolated and interlaced with the wire layers 24 . In addition, the substrate 220 also has a plurality of conductive plugs 36 shown in FIG. 1, such as vias 36a and plated through plugs (PTH) 36b, which respectively penetrate through the insulating layer 26 of FIG. 1 for electrical connection. Two adjacent wire layers 24 in FIG. 1 .

请同样参考图1、图3B,如图3B所示,基板220的顶面221上的多个凸块垫230(如组件标号230a、230b、230c、...),即图1的凸块垫30,其是由图1的第一导线层24a所构成,其中第一导线层24a为这些导线层24的最顶层,即最接近基板220的顶面221的导线层24。接着如图1所示,凸块垫30的分布位置分别对应焊垫14的分布位置,使得焊垫14可经由凸块16而连接至基板20上所对应的凸块垫30,再经由导线层24及导电插塞36等导电结构,而将芯片10的部分焊垫14扇出至芯片10的主动表面12下方以外的区域。Please also refer to FIG. 1 and FIG. 3B. As shown in FIG. 3B, a plurality of bump pads 230 (such as component numbers 230a, 230b, 230c, . . . ) on the top surface 221 of the substrate 220 are the bumps in FIG. The pad 30 is composed of the first wire layer 24 a in FIG. 1 , wherein the first wire layer 24 a is the topmost layer of these wire layers 24 , that is, the wire layer 24 closest to the top surface 221 of the substrate 220 . Next, as shown in FIG. 1, the distribution positions of the bump pads 30 correspond to the distribution positions of the solder pads 14, so that the solder pads 14 can be connected to the corresponding bump pads 30 on the substrate 20 through the bumps 16, and then through the wire layer. 24 , conductive plugs 36 and other conductive structures, and fan out part of the bonding pads 14 of the chip 10 to areas other than the area below the active surface 12 of the chip 10 .

请再同样参考图1、图3B,为符合图3A的芯片210的多个焊垫214的分布位置,故基板220的凸块垫230也同样以面矩阵的方式,分布于基板220的顶面221的芯片区域250之内,并组成多个凸块垫环231。此外,更依照凸块垫230所连接至图3A的信号焊垫214a、电源焊垫214b、接地焊垫214c,也可将凸块垫130区分为信号凸块垫230a、电源凸块垫230b、接地凸块垫230c及核心电源/接地凸块垫230d,其中信号凸块垫230a、电源凸块垫230b及接地凸块垫230c均以核心电源/接地凸块垫230d,而分布于核心电源/接地凸块垫230d的外围。值得注意的是,由多个凸块垫230所组成的信号凸块垫环(如第二凸块垫环231b、第三凸块垫环231c及第六凸块垫环231f),其凸块垫230有百分之五十以上是信号凸块垫230a,而较佳的情况是信号凸块垫环的凸块垫230有百分之九十以上是信号凸块垫230a,而电源凸块垫环(如第五凸块垫环231e)及接地凸块垫环(如第一凸块垫环231a及第四凸块垫环231d)也是如此。此外,信号凸块垫环系可对应图3A的芯片的信号焊垫环,可由单层、双层、三层或多层环状排列的凸块垫230所组成,例如图3B的第二凸块垫环231b及第三凸块垫环231c可视为同一信号凸块垫环,而电源凸块垫环及接地凸块垫环也是如此。Please also refer to FIG. 1 and FIG. 3B. In order to conform to the distribution positions of the plurality of pads 214 of the chip 210 in FIG. 3A, the bump pads 230 of the substrate 220 are also distributed on the top surface of the substrate 220 in a matrix manner. 221 within the chip area 250 and form a plurality of bump pad rings 231 . In addition, according to the connection of the bump pad 230 to the signal pad 214a, the power pad 214b, and the ground pad 214c in FIG. The ground bump pad 230c and the core power supply/ground bump pad 230d, wherein the signal bump pad 230a, the power supply bump pad 230b and the ground bump pad 230c are distributed in the core power supply/ground bump pad 230d by the core power supply/ground bump pad 230d. The periphery of the ground bump pad 230d. It is worth noting that the signal bump pad rings (such as the second bump pad ring 231b, the third bump pad ring 231c and the sixth bump pad ring 231f) composed of a plurality of bump pads 230, the bump pads More than fifty percent of the pads 230 are signal bump pads 230a, and preferably more than ninety percent of the bump pads 230 of the signal bump pad ring are signal bump pads 230a, while power bump pads The same is true for backing rings such as fifth bump backing ring 231e and ground bump backing rings such as first bump backing ring 231a and fourth bump backing ring 231d. In addition, the signal pad pad ring system can correspond to the signal pad pad ring of the chip in FIG. The bump back ring 231b and the third bump back ring 231c can be regarded as the same signal bump back ring, as can the power bump back ring and the ground bump back ring.

请同样参考图3B,基板220的多圈凸块垫环231的排列方式仅为众多同心环状排列的方式之一,而其它同心环状的排列方式也可如图3D、图3F、图3H、图3J、图3L及图3N所示。然而,本发明的基板220的多圈凸块垫环215并不局限于图3B、图3D、图3F、图3H、图3J、图3L及图3N的同心环状排列的方式,也可分别对应芯片210的焊垫214的分布的方式,而为其它同心环状排列的方式。Please also refer to FIG. 3B, the arrangement of the multi-turn bump backing ring 231 on the substrate 220 is only one of many concentric ring arrangements, and other concentric ring arrangements can also be as shown in FIGS. 3D, 3F, and 3H. , Figure 3J, Figure 3L and Figure 3N. However, the multi-turn bump backing ring 215 of the substrate 220 of the present invention is not limited to the concentric annular arrangement shown in FIG. 3B, FIG. 3D, FIG. 3F, FIG. 3H, FIG. 3J, FIG. 3L and FIG. Corresponding to the distribution of the bonding pads 214 of the chip 210 , there are other concentric circular arrangements.

请依序参考图4A、图4B,其分别为图3B的倒装芯片式封装基板,其第一导线层及第二导线层的局部示意图。如图4A所示,第一导线层324a(即图1的第一导线层24a)具有多个凸块垫330(即图1的凸块垫30),并将其以同心环状排列的方式,区分为多圈凸块垫环331,即为图3B所示的多圈凸块垫环231,其中图4A仅绘示多圈凸块垫环331的局部结构,而凸块垫330均位于芯片区域350(即图3B的芯片区域250)之内。值得注意的是,若以图3B的倒装芯片式封装基板220的六圈凸块垫环231为例,图4B的六圈凸块垫环331依序为接地凸块垫环331a、信号凸块垫环331b、信号凸块垫环331c、接地凸块垫环331d、电源凸块垫环331e及信号凸块垫环331f。Please refer to FIG. 4A and FIG. 4B in sequence, which are partial schematic diagrams of the first wire layer and the second wire layer of the flip-chip package substrate shown in FIG. 3B . As shown in FIG. 4A, the first wiring layer 324a (ie, the first wiring layer 24a in FIG. 1 ) has a plurality of bump pads 330 (ie, the bump pads 30 in FIG. 1 ), and they are arranged in a concentric ring shape. , divided into multi-turn bump back ring 331, that is, multi-turn bump back ring 231 shown in FIG. 3B, wherein FIG. within the chip area 350 (ie, the chip area 250 in FIG. 3B ). It is worth noting that, if taking the six-circle bump ring 231 of the flip-chip package substrate 220 in FIG. 3B as an example, the six-circle bump ring 331 in FIG. bump back ring 331b, signal bump back ring 331c, ground bump back ring 331d, power bump back ring 331e, and signal bump back ring 331f.

如图4B所示,第二导线层324b(如图1的第二导线层24b)具有多个插塞垫(via pad)332(如图1的插塞垫32),其均位于芯片区域350(即图3B的芯片区域250)之内,其中图4A的第一导线层324a的凸块垫330分别经由导电插塞336(即图1的导通插塞36a),而与图4B的第二导线层324b的插塞垫332相互电性连接。同样地,第二导线层324b的多个插塞垫332也构成有多个插塞垫环333,其分别对应于第一导线层324a的信号凸块垫环331a、电源凸块垫环331b及接地凸块垫环331c,而为信号插塞垫环333a、电源插塞垫环333b及接地插塞垫环333c。As shown in FIG. 4B, the second wiring layer 324b (such as the second wiring layer 24b of FIG. 1) has a plurality of plug pads (via pad) 332 (such as the plug pad 32 of FIG. 1), which are all located in the chip area 350. (that is, the chip region 250 of FIG. 3B ), wherein the bump pads 330 of the first wiring layer 324a of FIG. The plug pads 332 of the two wire layers 324b are electrically connected to each other. Similarly, the plurality of plug pads 332 of the second wire layer 324b also constitute a plurality of plug rings 333, which respectively correspond to the signal bump ring 331a, the power bump ring 331b and the first wire layer 324a. The ground bump ring 331c is the signal plug ring 333a, the power plug ring 333b and the ground plug ring 333c.

请再依序参考图4A、图4B,如图4A所示,第一导线层324a的多条导电迹线340将外三圈凸块垫环231,包括接地凸块垫环231f、信号凸块垫环231e、信号凸块垫环231d的凸块垫230分别扇出至芯片区域350之外,而内三圈凸块垫环231包括接地凸块垫环231c、电源凸块垫环231b及信号凸块垫环231a的部分凸块垫230则是分别先经由导电插塞336,而向下电性连接至图4B的第二导线层324b其内三圈接地插塞垫环333c、电源插塞垫环333b及信号插塞垫环333a的插塞垫332,再经由导电迹线342将接地插塞垫环333c及信号插塞垫环333a的插塞垫332分别扇出至芯片区域350之外。Please refer to FIG. 4A and FIG. 4B in sequence. As shown in FIG. 4A, the plurality of conductive traces 340 of the first wire layer 324a connect the outer three circles of the bump backing ring 231, including the ground bump backing ring 231f, the signal bump The bump pads 230 of the backing ring 231e and the signal bump backing ring 231d fan out to the outside of the chip area 350 respectively, and the inner three rings of the bump backing ring 231 include the ground bump backing ring 231c, the power bump backing ring 231b and the signal bump backing ring 231b. Part of the bump pads 230 of the bump pad ring 231a are electrically connected downwards to the second wire layer 324b in FIG. The plug ring 333b and the plug pad 332 of the signal plug ring 333a are fanned out to the outside of the chip area 350 through the conductive trace 342 respectively to the ground plug ring 333c and the plug pad 332 of the signal plug ring 333a .

如图4A所示,从接地凸块垫环331f的凸块垫330所连接的导电迹线340作为接地迹线340a,而从信号凸块垫环331d或信号凸块垫环331e的凸块垫330所连接出的导电迹线340则是作为信号迹线340b,为了防止信号迹线340b与相邻的其它信号迹线340b之间发生串音(cross-talk)的现象,即信号相互干扰的现象,因此,本发明的较佳实施例是将成对的接地迹线340a(非信号迹线)分别配设于欲防护的信号迹线340b的两侧,用以作为信号迹线340b的防护迹线,此外,连接至电源端的成对的电源迹线(未绘示)也可作为信号迹线340b的防护迹线。另外,成对的接地迹线340a之间所夹的信号迹线340b可为一条或数条以上,如图4A所示。As shown in FIG. 4A, the conductive trace 340 connected from the bump pad 330 of the ground bump pad ring 331f serves as the ground trace 340a, while the bump pad from the signal bump pad ring 331d or the signal bump pad ring 331e The conductive trace 340 connected by 330 is used as the signal trace 340b, in order to prevent the phenomenon of cross-talk (cross-talk) between the signal trace 340b and other adjacent signal traces 340b, that is, signal interference phenomenon, therefore, the preferred embodiment of the present invention is to arrange the paired grounding traces 340a (non-signal traces) on both sides of the signal traces 340b to be protected respectively, so as to serve as the protection traces of the signal traces 340b In addition, a pair of power traces (not shown) connected to the power terminal can also serve as a guard trace for the signal trace 340b. In addition, there may be one or more signal traces 340b sandwiched between the paired ground traces 340a, as shown in FIG. 4A .

如图4B所示,同样可将成对连接于接地插塞垫环333c的插塞垫332的导电迹线342(即接地迹线342a)分别配置位于连接信号插塞垫环333a的插塞垫332的导电迹线342(即信号迹线342b)的两侧,即一对接地迹线340a可分别配置位于至少一条信号迹线340b的两侧,用以作为信号迹线304b的防护迹线,可防止信号迹线342b与邻近的其它信号迹线342b之间发生串音的现象。同样地,连接至电源端的成对的导电迹线342也可作为信号迹线342b的防护迹线。值得注意的是,作为防护迹线的接地迹线342a的宽度可大于信号迹线342b的宽度,如此将有助于降低接地迹线342a的电阻值。同样地,如图4A所示,作为防护迹线的接地迹线340a的宽度也可大于信号迹线340a的宽度,如此也同样有助于降低接地迹线340a的电阻值。As shown in FIG. 4B, the conductive traces 342 (that is, the ground traces 342a) of the plug pads 332 connected to the ground plug pad ring 333c in pairs can also be respectively configured on the plug pads 332 connected to the signal plug pad ring 333a. The two sides of the conductive trace 342 (that is, the signal trace 342b), that is, a pair of ground traces 340a can be respectively arranged on both sides of at least one signal trace 340b, and are used as protective traces for the signal trace 304b. The phenomenon of crosstalk between the signal trace 342b and other adjacent signal traces 342b is prevented. Likewise, the pair of conductive traces 342 connected to the power supply terminals can also serve as guard traces for the signal trace 342b. It should be noted that the width of the ground trace 342a as the guard trace can be greater than the width of the signal trace 342b, which will help reduce the resistance of the ground trace 342a. Similarly, as shown in FIG. 4A , the width of the ground trace 340 a as the guard trace can also be greater than the width of the signal trace 340 a, which also helps to reduce the resistance value of the ground trace 340 a.

综上所述,本发明的倒装芯片是将芯片上不同功能的焊垫分组,并分别利用多环排列的方式,将焊垫分别配置于芯片的主动表面上,藉以缩短芯片的重配置线路层的绕线长度,进而提高芯片的电气效能。此外,本发明还设计出一倒装芯片式封装基板,其可对应上述的倒装芯片的焊垫布局,而在基板的顶面配置分布有多个面矩阵排列的凸块垫,并使得大部分相同功能的凸块垫组成为同一凸块垫环,此外,更可将成对的电源迹线或接地迹线分别配设于信号迹线的两侧,用以作为信号迹线的防护迹线,因而降低其与邻近的信号迹线之间发生串音的现象,藉以提高芯片的电气效能。To sum up, the flip chip of the present invention is to group the pads with different functions on the chip, and respectively arrange the pads on the active surface of the chip in a multi-ring arrangement, so as to shorten the reconfiguration circuit of the chip Layer winding length, thereby improving the electrical performance of the chip. In addition, the present invention also designs a flip-chip packaging substrate, which can correspond to the pad layout of the above-mentioned flip-chip, and a plurality of bump pads arranged in a matrix are arranged on the top surface of the substrate, so that large Part of the bump pads with the same function form the same bump pad ring. In addition, pairs of power traces or ground traces can be arranged on both sides of the signal traces to serve as protective traces for the signal traces. , thereby reducing the phenomenon of crosstalk between it and adjacent signal traces, so as to improve the electrical performance of the chip.

虽然本发明已以一较佳实施例揭露如上,然其并非用以限定本发明,任何本领域的熟练技术人员,在不脱离本发明的精神和范围内,当可作些许的更动与润饰,因此本发明的保护范围当视后附的权利要求所界定者为准。Although the present invention has been disclosed above with a preferred embodiment, it is not intended to limit the present invention. Any skilled person in the art may make some changes and modifications without departing from the spirit and scope of the present invention. , so the protection scope of the present invention shall prevail as defined by the appended claims.

Claims (11)

1. a chip upside-down mounting type base plate for packaging is characterized in that, comprising:
A plurality of conductor layers, overlapped in regular turn;
A plurality of insulating barriers are disposed at respectively between two adjacent these conductive layers, in order to these conductor layers of electrical isolation, and interlaced superimposed with these conductor layers; And
A plurality of conductive plungers run through these insulating barriers respectively, in order to electrically connecting these conductive layers,
Wherein the top layer person of these conductor layers has a plurality of core power supplys/ground connection bump pads, at least one signal projection gasket ring, at least one power supply projection gasket ring and at least one ground connection projection gasket ring, wherein this signal projection gasket ring, this power supply projection gasket ring and this ground connection projection gasket ring are the center with these core power supply/ground connection bump pads, and be the periphery that concentric annular is distributed in these core power supply/ground connection bump pads
The periphery of wherein at least one this signal projection gasket ring disposes at least one non-signal projection gasket ring,
Wherein at least one this conductor layer has at least one signal traces (signal trace) and at least one protection trace (guard trace), and this protection trace is equipped on the adjacent position of this signal traces.
2. chip upside-down mounting type base plate for packaging as claimed in claim 1 is characterized in that: this signal projection gasket ring is made up of a plurality of bump pads, and these bump pads more than 50 percent are the signal bump pads.
3. chip upside-down mounting type base plate for packaging as claimed in claim 1 is characterized in that: this signal projection gasket ring is made up of a plurality of bump pads, and these bump pads are the multilayer annular arrangement.
4. chip upside-down mounting type base plate for packaging as claimed in claim 1 is characterized in that: this power supply projection gasket ring is made up of a plurality of bump pads, and these bump pads more than 50 percent are the power supply bump pads.
5. chip upside-down mounting type base plate for packaging as claimed in claim 1 is characterized in that: this power supply projection gasket ring is made up of a plurality of bump pads, and these bump pads are the multilayer annular arrangement.
6. chip upside-down mounting type base plate for packaging as claimed in claim 1 is characterized in that: this ground connection projection gasket ring is made up of a plurality of bump pads, and these bump pads more than 50 percent are the ground connection bump pads.
7. chip upside-down mounting type base plate for packaging as claimed in claim 1 is characterized in that: this ground connection projection gasket ring is made up of a plurality of bump pads, and these bump pads are the multilayer annular arrangement.
8. chip upside-down mounting type base plate for packaging as claimed in claim 1 is characterized in that: this protection trace is a power trace.
9. chip upside-down mounting type base plate for packaging as claimed in claim 1 is characterized in that: this protection trace is the ground connection trace.
10. chip upside-down mounting type base plate for packaging as claimed in claim 1 is characterized in that: this non-signal projection gasket ring is a power supply projection gasket ring.
11. chip upside-down mounting type base plate for packaging as claimed in claim 1 is characterized in that: this non-signal projection gasket ring is a ground connection projection gasket ring.
CNB02122403XA 2002-06-05 2002-06-05 Flip chip and flip chip type packaging substrate Expired - Lifetime CN1178295C (en)

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TWI363210B (en) 2007-04-04 2012-05-01 Au Optronics Corp Layout structure for chip coupling
CN100468178C (en) * 2007-04-24 2009-03-11 友达光电股份有限公司 Wiring structure for coupling chips
US8084853B2 (en) * 2009-09-25 2011-12-27 Mediatek Inc. Semiconductor flip chip package utilizing wire bonding for net switching
US9985006B2 (en) 2016-05-31 2018-05-29 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor structure and manufacturing method thereof
CN109509737B (en) * 2017-09-15 2020-09-08 瑞昱半导体股份有限公司 Electronic packaging component and circuit layout structure

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