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CN117626200A - Metal steel ring in steel belt assembly for continuously variable transmission and preparation method thereof - Google Patents

Metal steel ring in steel belt assembly for continuously variable transmission and preparation method thereof Download PDF

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Publication number
CN117626200A
CN117626200A CN202311643968.1A CN202311643968A CN117626200A CN 117626200 A CN117626200 A CN 117626200A CN 202311643968 A CN202311643968 A CN 202311643968A CN 117626200 A CN117626200 A CN 117626200A
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target
metal steel
steel ring
continuously variable
steel
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Inventor
李晓
陈文辉
张�林
周成双
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Zhejiang University of Technology ZJUT
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Zhejiang University of Technology ZJUT
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Priority to CN202311643968.1A priority Critical patent/CN117626200A/en
Publication of CN117626200A publication Critical patent/CN117626200A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20Bonding
    • B23K26/21Bonding by welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/02Ferrous alloys, e.g. steel alloys containing silicon
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/06Ferrous alloys, e.g. steel alloys containing aluminium
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/10Ferrous alloys, e.g. steel alloys containing cobalt
    • C22C38/105Ferrous alloys, e.g. steel alloys containing cobalt containing Co and Ni
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/12Ferrous alloys, e.g. steel alloys containing tungsten, tantalum, molybdenum, vanadium, or niobium
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/14Ferrous alloys, e.g. steel alloys containing titanium or zirconium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • C23C14/0036Reactive sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/028Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H57/00General details of gearing
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D2211/00Microstructure comprising significant phases
    • C21D2211/008Martensite

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

本发明公开了一种无级变速器用钢带组件中金属钢环及其制备方法,该金属钢环由带状且双面具有激光织构化图案的通用18Ni系列马氏体时效钢焊接成圆环状,再通过磁控溅射在圆环的内壁和外壁上沉积(CoCrFeNiAlXTaY)NZ高熵合金薄膜制成;本发明采用通用18Ni马氏体时效钢,而非专用马氏体时效钢,原材料容易获得;本发明制备的金属钢环疲劳强度提升大于30%,在同样销盘磨损实验条件下,磨损深度降低了约70%以上。The invention discloses a metal steel ring in a steel belt assembly for a continuously variable transmission and a preparation method thereof. The metal steel ring is made of strip-shaped universal 18Ni series maraging steel with laser texturing patterns on both sides and is welded into a circle. Ring - shaped , and then deposited ( CoCrFeNiAl Aged steel, raw materials are easy to obtain; the fatigue strength of the metal steel ring prepared by the invention is increased by more than 30%, and under the same pin-disk wear experimental conditions, the wear depth is reduced by more than 70%.

Description

Metal steel ring in steel belt assembly for continuously variable transmission and preparation method thereof
Technical Field
The invention relates to a metal steel ring in a steel belt component for a continuously variable transmission and a preparation method thereof.
Background
The stepless speed changer has the advantages of good stability, no uncomfortable feeling of abrupt acceleration and light weight, but also has the problem of great manufacturing difficulty. The steel belt assembly is one of the core components of the continuously variable transmission and consists of a push plate and metal steel rings placed on two sides. The metal steel ring is formed by superposing a certain number of annular thin steel sheets, and the number is changed according to the model, and is generally 6, 10 and 12. The mass of the steel ring affects not only the transmission torque of the transmission, but also its service life. When the continuously variable transmission works, the metal steel ring is subjected to alternating stress and is worn with the pushing piece, so that the main failure modes of the metal steel ring are fatigue fracture and wear. Therefore, it has been studied to improve the wear resistance and fatigue strength.
Disclosure of Invention
The invention provides a metal steel ring in a steel belt component for a continuously variable transmission and a preparation method thereof, and aims to solve the problems that the abrasion resistance between the metal steel ring and a push plate in the steel belt component for the continuously variable transmission is insufficient and fatigue damage is easy to occur in the prior art.
The technical scheme of the invention is as follows:
a metal steel ring in a steel belt assembly for a continuously variable transmission is formed by welding a general 18 Ni-series maraging steel having a laser-textured pattern on both surfaces in a strip shape into a ring shape, and depositing (CoCrFeNiAl X Ta Y )N Z The high-entropy alloy film is manufactured;
the general 18Ni series maraging steel comprises the following specific components in percentage by mass: 16-19% of nickel, 10-13% of cobalt, 4-6% of molybdenum, 1-2% of titanium, less than 0.2% of aluminum, less than 0.02% of carbon, less than 0.01% of silicon, less than 0.001% of sulfur, less than 0.001% of phosphorus and the balance of iron;
laser texturing patterns such as: geometric patterns such as grooves, circles or diamonds;
(CoCrFeNiAl X Ta Y )N Z the thickness of the high-entropy alloy film is 4-6 mu m, (CoCrFeNiAl) X Ta Y )N Z Wherein X, Y, Z represents an atomic ratio of x=0.3 to 0.9, y=0.4 to 0.8, and z=0.3 to 0.5, and co, cr, fe, ni are equal to an atomic ratio of 1.
(CoCrFeNiAl X Ta Y )N Z In the high-entropy alloy film, the atomic ratio of Al, ta and N is respectively X=0.3-0.9, Y=0.4-0.8 and Z=0.3-0.5. If X is less than 0.3, the film hardness is low, the wear resistance is poor, and the wear resistance of the prepared metal steel ring is poor; if X>And 0.9, the film has poor ductility and toughness, and the prepared metal steel ring has poor fatigue strength. If Y < 0.4, no phase transition occurs, which results in low film hardness; if Y is more than 0.8, the film is liable to be cracked due to the large brittleness. If Z is less than 0.3, the number of metal nitride phases in the film is small, and the effect of improving the hardness and the wear resistance of the film is not obvious; if Z is more than 0.5, the number of metal nitride phases in the film is rapidly increased, so that defects such as columnar coarse crystals, air holes and the like are formed in the film, the film is easy to crack, the hardness and the elastic modulus of the film are reduced, and the wear resistance of the metal steel ring is deteriorated.
The invention relates to a preparation method of a metal steel ring in a steel belt component for a continuously variable transmission, which comprises the following steps:
(1) Preparing textured patterns on two surfaces of the strip-shaped general 18Ni series maraging steel by utilizing laser;
(2) Welding the strip-shaped general 18Ni series maraging steel treated in the step (1) into a metal steel ring;
(3) Depositing (CoCrFeNiAl) on the inner wall and the outer wall of the metal steel ring obtained in the step (2) by magnetron sputtering X Ta Y )N Z High entropy alloy film.
Further, the operation method of the step (1) is as follows:
polishing the surface of the strip-shaped general 18Ni series maraging steel by using silicon carbide sand paper sequentially according to the sequence of 320#, 600#, 1000#, 1500# and 2000#, placing the strip-shaped general 18Ni series maraging steel in acetone after polishing, performing ultrasonic vibration for 15min to wash out impurities on the surface, placing the strip-shaped general 18Ni series maraging steel in absolute ethyl alcohol, performing ultrasonic vibration for 15min to wash out residual acetone solution, and finally taking out and drying the strip-shaped general 18Ni series maraging steel; fixing the pretreated strip universal 18Ni series maraging steel on a laser processing working platform, opening a laser switch, and inputting laser technological parameters: laser power 60-80W, scanning speed 5-20mm/s, spot diameter 10-30 μm, pulse width 0.2-0.6ms, pulse frequency 15-30Hz, and scanning times 2-4 times; and processing the two surfaces of the steel material into texture patterns, wherein the texture sizes are 10-40 mu m in width, 5-20 mu m in depth and 100-300 mu m in interval between textures, the texture occupies 20-40% of the area, and taking out the steel material after the processing is finished, and closing a laser switch.
The invention uses laser to prepare textures with different shapes, which aims at: (1) in order to improve the bonding force between the substrate and the film; (2) increasing the wear resistance of the metal steel ring. The occupied areas of textures with different shapes are 20-40%, and the occupied areas refer to the proportion of the areas of the textures in the total area of the matrix. If the texture is less than 20% by area, the lubricant will have less storage and less wear resistance. If the texture is greater than 40% by area, too small a pit spacing causes a rapid increase in the surface roughness of the friction pair, thereby affecting the wear resistance of the metal steel ring.
In the step (2), welding modes such as laser welding and argon arc welding can be adopted. The specific operation method is as follows:
placing the strip-shaped general 18 Ni-series maraging steel with the texture morphology into acetone, performing ultrasonic vibration for 15min, washing off oxide on the surface, placing the strip-shaped general 18 Ni-series maraging steel into absolute ethyl alcohol, performing ultrasonic vibration for 15min, washing off residual acetone solution, and finally taking out and drying; opening a welding equipment switch, placing the pretreated steel on a welding fixture, and welding the rolled round edge after the steel is rounded, wherein welding parameters are set as follows: the welding power is 180-200W, the welding speed is 4-8mm/s, and the welding beam spot is 0.5-1.2mm; and after the welding is finished, closing the equipment switch, and taking out the metal steel ring.
Further, the apparatus for magnetron sputtering in the step (3) includes: the device comprises a cavity, a frame, a substrate heating self-rotating table, a magnetic control target, a vacuum air extraction system, a cooling water unit and a computer control platform; the cavity is arranged on the frame and connected with a vacuum pumping system positioned in the frame, a plurality of magnetic control targets and magnetic control target baffles are uniformly distributed on the inner wall of the cavity, and a plurality of gas channels are distributed on the outer wall of the cavity; the substrate heating self-rotating table is arranged in the cavity and is divided into a sample table and a self-rotating table upper part and a self-rotating table lower part; the sample table comprises a roller, a rotating motor, a rotating shaft, an adjustable connecting rod and a sample table base, the bottom end of the connecting rod is connected with the rotating disc, the top end of the connecting rod is connected with the sample table base, and the position direction and the angle of the sample table can be adjusted by adjusting the radian of the connecting rod; two circular holes are distributed on the sample table base and are used for being connected with a rotating shaft, a rotating motor and rollers are connected to the rotating shaft, a heat insulation box is arranged outside the rotating motor, a heating device is arranged inside the rollers, a sample is placed on the two rollers, and the rollers are driven to rotate through the rotating motor to drive the sample to do rotary motion; the working principle of the self-rotating disc is as follows: the output end of the self-rotating motor is connected with a pinion meshed with a self-rotating gear in the machine table, the self-rotating gear is provided with a self-rotating shaft, and the top end of the self-rotating shaft is connected with a self-rotating disc, so that the self-rotating disc is driven by the gear to do self-rotating motion; a plurality of mounting positions for mounting the sample stage connecting rods are arranged on the self-rotating disc in an annular array manner; the vacuum pumping system comprises a mechanical pump and a molecular pump; the cooling water unit is provided with a molecular pump cooling water inlet, a molecular pump cooling water outlet, a magnetic control target cooling water inlet and a magnetic control target cooling water outlet, and mainly plays a role in cooling the magnetic control target and the molecular pump; the computer control platform controls the heating device in the substrate heating self-rotating table and the self-rotating disk to rotate.
In particular, on the inner and outer walls of the metal steel ring (CoCrFeNiAl X Ta Y )N Z The method for the high-entropy alloy film comprises the following steps:
placing the metal steel ring with the texture morphology into absolute ethyl alcohol, ultrasonically cleaning for 15min, washing off impurities remained on the surface, and drying by a blowerThe method comprises the steps of carrying out a first treatment on the surface of the Placing a CoCrFeNi high-entropy alloy target, a Ta target and an Al target on a magnetic control target, mounting the cleaned metal steel ring on two rollers of a sample stage, adjusting the angle of a connecting rod and fixing the connecting rod to ensure that the metal steel ring is perpendicular to the magnetic control target, and enabling sputtered atoms in the target to be deposited on the inner surface and the outer surface of the metal steel ring; after the sample loading is finished, closing a cavity chamber door and closing a gas release valve; opening a mechanical pump and an extraction valve, vacuumizing to below 8.0Pa, and closing the extraction valve; opening a switch of a cooling water unit, opening a molecular pump and a gate valve, and vacuumizing to 3.0X10 -3 Pa or less; regulating the air pressure to be between 0.8 and 1Pa by using a gate valve; turning on a heating switch, a rotation switch and a rotary switch on a computer control platform, wherein the substrate temperature is 400-600 ℃, the rotation speed of a rotation disc is 10-20r/min, and the rotation speed of a roller is 5-10r/min; opening an argon valve switch, wherein the argon flow is 10-30sccm; turning on a bias switch, wherein the bias voltage is 80-120V; sequentially starting a CoCrFeNi alloy target, an Al target and a Ta target, adjusting the deposition power of the CoCrFeNi alloy target to 150W, adjusting the deposition power of the Al target to 30-90W, adjusting the deposition power of the Ta target to 40-80W, pre-sputtering the target for 10min, and removing pollutants on the surface of the target; opening a nitrogen valve switch, wherein the nitrogen flow is 10-20sccm; the magnetic control target baffle plate is opened, and the metal steel ring (CoCrFeNiAl X Ta Y )N Z Sputtering the high-entropy alloy film for 140-220min; after the film deposition is finished, sequentially closing the magnetic control target power, a magnetic control target baffle plate, a nitrogen valve, an argon valve, a heating and autorotation switch, a gate valve, a molecular pump, a mechanical pump and a cooling water unit; cooling to 25deg.C under vacuum, opening the air release valve to allow the cavity to be air-released to atmospheric pressure, opening the cavity door, and taking out the deposited (CoCrFeNiAl X Ta Y )N Z A metal steel ring of the high-entropy alloy film.
In the invention, the temperature of the magnetron sputtering deposition film is 400-600 ℃, and in the temperature range, the method is not only beneficial to the mutual diffusion of atoms between the high-entropy alloy film and the substrate to form chemical bonds and increase the binding force, but also can age the substrate 18Ni maraging steel, enhance the hardness of the substrate, save the aging process in a box-type resistance furnace and improve the efficiency.
The invention has the beneficial effects that:
(1) The invention adopts general 18Ni maraging steel instead of special maraging steel, and raw materials are easy to obtain;
(2) The fatigue strength of the metal steel ring prepared by the method is improved by more than 30%, and the abrasion depth is reduced by more than 70% under the same experimental conditions of pin disc abrasion.
Drawings
Fig. 1: the preparation process of the metal steel ring is schematically shown in the invention.
Fig. 2: the invention discloses a schematic diagram of different morphology texture patterns.
Fig. 3: the magnetron sputtering equipment structure of the invention is schematically shown.
Fig. 4: the invention discloses a magnetic control target cross-section.
In FIGS. 3-4, 1-rack, 2-rotation motor, 3-pinion, 4-mechanical pump, 5-electromagnetic differential pressure valve, 6-rotation shaft, 7-rotation gear, 8-high vacuum electromagnetic baffle valve, 9-self-rotating disk, 10-molecular pump, 11-gate valve, 12-molecular pump cooling water inlet, 13-molecular pump cooling water outlet, 14-cooling water set, 15-magnetic target cooling water inlet, 16-magnetic target cooling water outlet, 17-nitrogen valve, 18-third gas valve, 19-magnetic target, 20-magnetic target baffle plate, 21-roller, 22-heating device, 23-rotation shaft, 24-rotation motor, 25-heat insulation box, 26-metal steel ring, 27-sputtering cavity, 28-sample stage base, 29-air release valve, 30-argon valve, 31-adjustable connecting rod, 32-fourth gas valve, 33-air extraction valve, 34-computer control platform.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the drawings are illustrative and intended to explain the present invention and should not be construed as limiting the invention. The present invention provides a metal steel ring in a steel belt assembly for a continuously variable transmission and a method for manufacturing the same, and the present invention is further described below with reference to specific examples, but the scope of the present invention is not limited thereto.
Example 1: as shown in fig. 1, the preparation of the metal steel ring in the steel belt assembly for the continuously variable transmission includes the following steps:
step one: the groove-shaped texture prepared on the inner and outer surfaces of the general 18 Ni-series maraging steel is shown in FIG. 2, and comprises the following steps:
in the embodiment, a metal steel ring (with the diameter of 90.7+/-0.1 mm) is prepared by adopting an 18Ni (350) maraging steel plate (with the length of 285mm, the width of 12mm and the thickness of 0.2 mm), and the mass percentages of the components are nickel: 18.5%, cobalt: 12.1%, molybdenum: 5.3%, titanium: 1.3%, aluminum: 0.15%, carbon: less than 0.02%, silicon: less than 0.01%, sulfur: less than 0.001%, phosphorus: less than 0.001%, the balance being iron.
The pretreatment comprises the steps of polishing the surface of a plate by using silicon carbide sand paper according to the sequence of 320#, 600#, 1000#, 1500# and 2000# in sequence, carrying out ultrasonic vibration in acetone for 15min after polishing is finished, and washing impurities on the surface; then carrying out ultrasonic vibration in absolute ethyl alcohol for 15min, and washing off residual acetone solution; finally, taking out the sample, and drying. Fixing the plate on a laser processing working platform, opening a Nd-YAG pulse laser switch, and inputting laser process parameters: the laser power was 70W, the scanning speed was 10mm/s, the spot diameter was 20 μm, the pulse width was 0.4ms, the pulse frequency was 25Hz, and the number of scans was 3. Textured patterns with different shapes are processed on the inner surface and the outer surface of the plate, the specific dimensions are 20 mu m in width, 10 mu m in depth and 200 mu m in interval between textures, the occupied area of the textures is 30%, and after the processing is finished, a sample is taken out, and a laser switch is turned off.
Step two, welding treatment, comprising the following steps:
placing the plate with the texture morphology into acetone, carrying out ultrasonic vibration for 15min, and washing off oxides on the surface; then carrying out ultrasonic vibration in absolute ethyl alcohol for 15min, and washing off residual acetone solution; finally, taking out the sample, and drying. And opening a welding equipment switch, placing the plate on a welding fixture, and welding the plate by tightly rolling round edges after the plate is subjected to round punching treatment, wherein welding parameters are set to be 190W in welding power, 6mm/s in welding speed and 0.8mm in welding beam spot. And after the welding is finished, closing the equipment switch, and taking out the metal steel ring with the groove-shaped texture.
As shown in fig. 3, the magnetron sputtering apparatus in this embodiment includes a cavity 27, a frame 1, a substrate heating self-rotating table, a magnetron target 19, a vacuum air extraction system, a cooling water unit 14 and a computer control platform 34, wherein the cavity 27 is installed on the frame 1 and connected with the vacuum air extraction system located in the frame 1, a plurality of magnetron targets 19 and magnetron target baffles 20 are uniformly distributed on the inner wall of the cavity 27, and a plurality of gas channels are distributed on the outer wall of the cavity. The substrate heating self-rotating table is arranged in the cavity 27 and is divided into a sample table and a self-rotating disc 9. The sample stage comprises a roller 21, a rotating motor 24, a rotating shaft 23, an adjustable connecting rod 31 and a sample stage base 28, wherein the bottom end of the connecting rod 31 is connected with the rotating disc 9, the top end of the connecting rod is connected with the sample stage base 28, and the position direction and the angle of the sample stage can be adjusted by adjusting the radian of the connecting rod 31; two circular holes are distributed on the sample table base 28 and are used for connecting the rotating shaft 23, the rotating motor 24 and the roller 21 are connected to the rotating shaft 23, the heat insulation box 25 is arranged outside the rotating motor 24, the heating device 22 is arranged inside the roller, the sample is arranged on the two rollers 21, and the roller 21 is driven to rotate by the rotating motor 24 to drive the sample to rotate. The working principle of the self-rotating disc 9 is that the output end of the self-rotating motor 2 is connected with a pinion 3 meshed with a self-rotating gear 7 in the frame table 1, the self-rotating gear 7 is provided with a self-rotating shaft 6, the top end of the self-rotating shaft 6 is connected with the self-rotating disc 9, and the self-rotating disc 9 is driven to do self-rotating motion by gear transmission. Further, a plurality of mounting positions for mounting the sample stage connecting bars 31 are arranged in an annular array on the rotation disk 9. The vacuum pumping system comprises a mechanical pump 4 and a molecular pump 12. The cooling water unit 14 is provided with a molecular pump cooling water inlet 12, a molecular pump cooling water outlet 13, a magnetic control target cooling water inlet 15 and a magnetic control target cooling water outlet 16, and mainly plays a role in cooling the magnetic control target and the molecular pump. The computer control platform 34 controls the heating device in the substrate heating self-rotating table and the self-rotating disk to spin.
Deposited on the surface of the metal steel ring (CoCrFeNiAl 0.3 Ta 0.4 )N 0.4 A high entropy alloy film comprising the steps of:
putting a metal steel ring with a texture appearance into an anhydrous BUltrasonic cleaning in alcohol for 15min, washing off impurities remained on the surface, and drying by a blower. The CoCrFeNi high-entropy alloy target, the Ta target and the Al target are placed on the magnetron target 19, the cleaned metal steel ring 13 is arranged on two rollers 21 on a sample table, the angle of the connecting rod 31 is adjusted and fixed, the metal steel ring 13 is ensured to be perpendicular to the magnetron target 19, and atoms sputtered in the target material can be deposited on the inner surface and the outer surface of the metal steel ring. After the sample is loaded, the chamber door of the cavity 27 is closed, and the air release valve 29 is closed. The mechanical pump 4 and the air extraction valve 33 were opened, vacuum was applied to 7.0Pa, and the air extraction valve 33 was closed. The switch of the cooling water unit 14 is opened, the molecular pump 10 and the gate valve 11 are opened, and the vacuum is pumped to 2.5 multiplied by 10 -3 Pa. The air pressure is regulated to 0.9Pa by using a gate valve 11, a heating switch, a rotation switch and a rotary switch on a computer control platform 34 are turned on, the substrate temperature is 500 ℃, the rotating speed of a rotation disc 9 is 15r/min, and the rotating speed of a roller 21 is 8r/min. The argon valve 30 switch was turned on, and the argon flow was 20sccm. The bias switch was turned on, biasing 100V. And sequentially starting the CoCrFeNi alloy target, the Al target and the Ta target, adjusting the deposition power of the CoCrFeNi alloy target to 150W, adjusting the deposition power of the Al target to 30W and adjusting the deposition power of the Ta target to 40W after successful starting, pre-sputtering the target for 10min, and removing pollutants on the surface of the target. The nitrogen valve 17 switch was turned on and the nitrogen flow was 15sccm. The magnetron target shield 20 was opened and a metal steel ring was subjected to (CoCrFeNiAl 0.3 Ta 0.4 )N 0.4 And (3) depositing the high-entropy alloy film, wherein the deposition time is 180min. After the film deposition is finished, the power of the magnetic control target 19, the magnetic control target baffle 20, the nitrogen valve 17, the argon valve 30, the heating and autorotation switch, the gate valve 11, the molecular pump 10, the mechanical pump 4 and the cooling water unit 14 are sequentially closed. Cooling to 25deg.C under vacuum, opening the air release valve 29 to allow the cavity 27 to be air-released to atmospheric pressure, opening the cavity door, and taking out the deposited (CoCrFeNiAl 0.3 Ta 0.4 )N 0.4 A metal steel ring of the high-entropy alloy film.
The metal steel ring prepared by the method is subjected to the following performance test:
(1) According to GB/T3075-2008, an INSTRON 8801 hydraulic servo fatigue testing machine is utilized to test the fatigue strength of the metal steel ring. The test conditions were: the loading frequency was 15Hz, the stress ratio was 0.1 and the temperature was 25 ℃. The test results are shown in Table 1, and the fatigue strength of the metal steel ring is 1269.+ -. 9.1MPa.
(2) The wear resistance of the metal steel ring was tested using an MFT-500 frictional wear tester. The abrasion experiment adopts a pin disc friction mode, an upper test piece is a cylindrical pin made of bearing steel materials, a lower test piece is a metal steel ring, and in the test process, the lower test piece is in a fixed state, and the upper test piece performs friction and abrasion reciprocating motion. Wherein the load is set to 80N, the travel distance is 100mm, the frequency is 2Hz, the temperature is 25 ℃, the time is 30min, the lubricating oil is CVTF-EX1, and the surface of a lower test piece needs to be covered. The test results are shown in Table 1, and the abrasion depth of the metal steel ring is 1.31.+ -. 0.47. Mu.m.
Examples 2-3:
examples 2-3 the preparation and test methods were the same as example 1, as shown in fig. 2, except that the textures in examples 2-3 were round and diamond, respectively. The results of the tests of the texture morphology, texture area, film composition atomic ratio, deposition temperature, fatigue strength and abrasion depth of the metal steel rings prepared in examples 2 to 3 are shown in table 1.
Examples 4 to 5:
examples 4-5 the preparation and test methods were the same as example 1, except that the textures in examples 4-5 were 20% and 40% respectively. The results of the tests of the texture morphology, texture area, film composition atomic ratio, deposition temperature, fatigue strength and abrasion depth of the metal steel rings prepared in examples 4 to 5 are shown in table 1.
Examples 6 to 11:
examples 6-11 the preparation and test methods were the same as in example 1, except that the high-entropy alloy thin films in examples 6-11 were each composed of (CoCrFeNiAl 0.3 Ta 0.4 )N 0.3 、(CoCrFeNiAl 0.3 Ta 0.4 )N 0.5 、(CoCrFeNiAl 0.3 Ta 0.6 )N 0.4 、(CoCrFeNiAl 0.3 Ta 0.8 )N 0.4 、(CoCrFeNiAl 0.6 Ta 0.4 )N 0.4 、(CoCrFeNiAl 0.9 Ta 0.4 )N 0.4 The method comprises the steps of carrying out a first treatment on the surface of the The corresponding process parameters in thin film deposition are a nitrogen flow of 10sccm, nitrogen flow of 20sccm, ta target power of 60W, ta target power 80W, al target power 60W, al target power 90W. The results of the tests of the texture morphology, texture area, film composition atomic ratio, deposition temperature, fatigue strength and abrasion depth of the metal steel rings prepared in examples 6 to 11 are shown in table 1.
Examples 12 to 13:
examples 12-13 the preparation method and the test method were the same as in example 1, except that the film deposition temperatures in examples 12-13 were 400℃and 600℃respectively. The results of the tests of the texture morphology, texture area, film composition atomic ratio, deposition temperature, fatigue strength and abrasion depth of the metal steel rings prepared in examples 12 to 13 are shown in table 1.
Comparative example 1
The preparation method and test conditions of the second and third procedures in comparative example 1 are the same as those of example 1, except that textures with different morphologies are not prepared on the inner and outer surfaces of the general 18Ni maraging steel. The results of the test of the atomic ratio of the film components, the deposition temperature, the fatigue strength and the wear depth of the metal steel ring prepared in comparative example 1 are shown in table 1.
Comparative example 2: the traditional process for preparing the metal steel ring comprises the following steps:
step one: the welding treatment of the special maraging steel comprises the following steps:
in the comparative example, a special maraging steel plate with the thickness of 0.2mm is adopted to prepare a metal steel ring, and the metal steel ring comprises the following components in percentage by mass: 18.5%, cobalt: 15.4%, molybdenum: 5.6%, carbon: less than 0.02%, silicon: less than 0.01%, sulfur: less than 0.001%, phosphorus: less than 0.001%, the balance being iron.
Placing the plate into acetone, performing ultrasonic vibration for 15min, and washing off oxides on the surface; then carrying out ultrasonic vibration in absolute ethyl alcohol for 15min, and washing off residual acetone solution; finally, taking out the sample, and drying. And opening a welding equipment switch, placing the plate on a welding fixture, and welding the plate by tightly rolling round edges after the plate is subjected to round punching treatment, wherein welding parameters are set to be 190W in welding power, 6mm/s in welding speed and 0.8mm in welding beam spot. And after the welding is finished, taking out the metal steel ring, and closing the equipment switch.
Step two, strengthening treatment is carried out on the metal steel ring, and the method comprises the following steps:
placing the metal steel ring into a box-type resistance furnace for solid solution treatment, wherein the solid solution temperature is 830 ℃, the solid solution time is 60min, and the cooling mode is air cooling; aging the metal steel ring after solid solution treatment, and placing the metal steel ring in a box-type resistance furnace, wherein the aging temperature is 500 ℃, the aging time is 180min, and the cooling mode is air cooling; polishing the surface of the metal steel ring subjected to solid solution and aging treatment by using silicon carbide abrasive paper according to the sequence of No. 600, no. 1000, no. 1500 and No. 2000, firstly carrying out ultrasonic vibration in acetone for 15min, and washing off impurities on the surface; then carrying out ultrasonic vibration in absolute ethyl alcohol for 15min, and washing off residual acetone solution; finally, taking out the sample, and drying. Putting the cleaned steel ring into a well type gas nitriding furnace, wherein the nitriding temperature is 480 ℃, the nitriding time is 12h, and the cooling mode is furnace cooling.
The performance test method is the same as in example 1, and the test results are shown in Table 1.
Table 1 shows the process parameters and the results of performance tests for the metal steel rings prepared in examples 1-13 and comparative examples 1-2 of the present invention.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.

Claims (9)

1.一种无级变速器用钢带组件中金属钢环,其特征在于,所述的金属钢环由带状且双面具有激光织构化图案的通用18Ni系列马氏体时效钢焊接成圆环状,再通过磁控溅射在圆环的内壁和外壁上沉积(CoCrFeNiAlXTaY)NZ高熵合金薄膜制成;1. A metal steel ring in a steel belt assembly for a continuously variable transmission, characterized in that the metal steel ring is welded into a circle by a strip-shaped universal 18Ni series maraging steel with laser textured patterns on both sides. Ring - shaped, and then deposited ( CoCrFeNiAl (CoCrFeNiAlXTaY)NZ中,X、Y、Z代表原子比,X=0.3-0.9、Y=0.4-0.8、Z=0.3-0.5,Co、Cr、Fe、Ni为等原子比1。 ( CoCrFeNiAl _ 2.如权利要求1所述的无级变速器用钢带组件中金属钢环,其特征在于,通用18Ni系列马氏体时效钢的成分质量百分比如下:镍16-19%,钴10-13%,钼4-6%,钛1-2%,铝<0.2%,碳<0.02%,硅<0.01%,硫<0.001%,磷<0.001%,余量为铁。2. The metal steel ring in the steel belt assembly of the continuously variable transmission as claimed in claim 1, characterized in that the composition mass percentage of the general 18Ni series maraging steel is as follows: nickel 16-19%, cobalt 10-13% , molybdenum 4-6%, titanium 1-2%, aluminum <0.2%, carbon <0.02%, silicon <0.01%, sulfur <0.001%, phosphorus <0.001%, the balance is iron. 3.如权利要求1所述的无级变速器用钢带组件中金属钢环,其特征在于,激光织构化图案为:沟槽形、圆形或菱形。3. The metal steel ring in the steel belt assembly for continuously variable transmission according to claim 1, characterized in that the laser texturing pattern is: groove-shaped, circular or diamond-shaped. 4.如权利要求1所述的无级变速器用钢带组件中金属钢环,其特征在于,(CoCrFeNiAlXTaY)NZ高熵合金薄膜的厚度为4-6μm。4. The metal steel ring in the steel belt assembly for continuously variable transmission according to claim 1, characterized in that the thickness of the ( CoCrFeNiAl 5.如权利要求1所述的无级变速器用钢带组件中金属钢环的制备方法,其特征在于,包括如下步骤:5. The method for preparing metal steel rings in steel belt components for continuously variable transmissions according to claim 1, characterized in that it includes the following steps: (1)利用激光在带状通用18Ni系列马氏体时效钢的两个表面制备织构化图案;(1) Use laser to prepare texture patterns on both surfaces of strip-shaped general-purpose 18Ni series maraging steel; (2)将经过步骤(1)处理的带状通用18Ni系列马氏体时效钢焊接成金属钢环;(2) Weld the strip-shaped universal 18Ni series maraging steel processed in step (1) into a metal steel ring; (3)通过磁控溅射在步骤(2)所得金属钢环的内壁和外壁上沉积(CoCrFeNiAlXTaY)NZ高熵合金薄膜。( 3 ) Deposit ( CoCrFeNiAl 6.如权利要求5所述的无级变速器用钢带组件中金属钢环的制备方法,其特征在于,步骤(1)的操作方法如下:6. The method for preparing metal steel rings in the steel belt assembly for continuously variable transmissions according to claim 5, characterized in that the operation method of step (1) is as follows: 使用碳化硅砂纸,依次按320#、600#、1000#、1500#和2000#的顺序,对带状通用18Ni系列马氏体时效钢的表面进行打磨,打磨结束后置于丙酮中超声震荡15min,洗去表面的杂质,再置于无水乙醇中超声震荡15min,洗去残留的丙酮溶液,最后取出干燥;把经过前处理的带状通用18Ni系列马氏体时效钢固定在激光加工工作平台上,打开激光器开关,输入激光器工艺参数:激光功率60-80W、扫描速度5-20mm/s、光斑直径10-30μm、脉冲宽度0.2-0.6ms、脉冲频率15-30Hz、扫描次数2-4次;在钢材的两个表面加工出织构化图案,织构尺寸为宽度10-40μm、深度5-20μm、织构间间距100-300μm,织构占比面积20-40%,加工结束后,取出钢材,关闭激光器开关。Use silicon carbide sandpaper to polish the surface of the strip-shaped universal 18Ni series maraging steel in the order of 320#, 600#, 1000#, 1500# and 2000#. After polishing, place it in acetone and vibrate ultrasonically for 15 minutes. , wash away the impurities on the surface, and then place it in absolute ethanol for 15 minutes with ultrasonic vibration, wash away the remaining acetone solution, and finally take it out and dry it; fix the pre-treated strip-shaped universal 18Ni series maraging steel on the laser processing work platform , turn on the laser switch, and enter the laser process parameters: laser power 60-80W, scanning speed 5-20mm/s, spot diameter 10-30μm, pulse width 0.2-0.6ms, pulse frequency 15-30Hz, and scanning times 2-4 times ; Process a textured pattern on both surfaces of the steel. The texture size is 10-40μm in width, 5-20μm in depth, 100-300μm in spacing between textures, and the texture accounts for 20-40% of the area. After processing, Take out the steel and turn off the laser switch. 7.如权利要求5所述的无级变速器用钢带组件中金属钢环的制备方法,其特征在于,步骤(2)中焊接采用激光焊接或氩弧焊。7. The method for preparing a metal steel ring in a steel belt assembly for a continuously variable transmission according to claim 5, characterized in that the welding in step (2) adopts laser welding or argon arc welding. 8.如权利要求5所述的无级变速器用钢带组件中金属钢环的制备方法,其特征在于,步骤(3)中磁控溅射的设备包括:腔体、机架、基片加热自转台、磁控靶、真空抽气系统、冷却水机组及计算机控制平台;其中,腔体安装在机架上并与位于机架内的真空抽气系统相连,在腔体内壁上均布有多个磁控靶和磁控靶挡板,在腔体外壁上分布有多个气体通道;基片加热自转台安装在腔体内部,该自转台分为样品台和自转盘上下两部分;样品台包括滚轮、旋转电机、转动轴、可调节连接杆及样品台底座,连接杆底端与自转盘相连,顶端与样品台底座相连,且可以通过调节连接杆的弧度来调节样品台位置方向和角度;样品台底座上布有两个圆形孔,用于连接转动轴,转动轴上连接旋转电机和滚轮,旋转电机外设有隔热盒,滚轮内部设有加热装置,样品置于两个滚轮上,通过旋转电机驱动滚轮旋转带动样品做旋转运动;自转盘上环形阵列布置有多个用于安装样品台连接杆的安装位;真空抽气系统包括机械泵及分子泵;冷却水机组上布有分子泵冷却水进水口、分子泵冷却水出水口、磁控靶冷却水进水口及磁控靶冷却水出水口,用于给磁控靶及分子泵起降温作用;计算机控制平台控制基片加热自转台中的加热装置及自转盘自转。8. The method for preparing metal steel rings in steel belt components for continuously variable transmissions as claimed in claim 5, characterized in that the magnetron sputtering equipment in step (3) includes: a cavity, a frame, and a substrate heating Rotation stage, magnetic control target, vacuum pumping system, cooling water unit and computer control platform; among them, the cavity is installed on the frame and connected to the vacuum pumping system located in the frame, and is evenly distributed on the inner wall of the cavity. There are multiple magnetron targets and magnetron target baffles, and multiple gas channels distributed on the outer wall of the cavity; the substrate heating rotation table is installed inside the cavity, and the rotation table is divided into two parts: the sample stage and the upper and lower parts of the rotation disk; the sample The stage includes rollers, a rotating motor, a rotating shaft, an adjustable connecting rod and a sample stage base. The bottom end of the connecting rod is connected to the rotation plate, and the top end is connected to the sample stage base. The position, direction and direction of the sample stage can be adjusted by adjusting the curvature of the connecting rod. angle; there are two circular holes on the base of the sample stage, which are used to connect the rotating shaft. The rotating shaft is connected to the rotating motor and the roller. There is a heat insulation box outside the rotating motor, and a heating device is installed inside the roller. The sample is placed on two On the roller, the rotating motor drives the rotation of the roller to drive the sample to rotate; on the rotating disk, there are multiple mounting positions for installing the sample stage connecting rods arranged in an annular array; the vacuum pumping system includes a mechanical pump and a molecular pump; on the cooling water unit There are molecular pump cooling water inlet, molecular pump cooling water outlet, magnetic target cooling water inlet and magnetic target cooling water outlet, which are used to cool the magnetic target and molecular pump; the computer control platform controls the base The heating device in the sheet heating rotation table and the rotation plate rotate. 9.如权利要求8所述的无级变速器用钢带组件中金属钢环的制备方法,其特征在于,在金属钢环的内壁和外壁上沉积(CoCrFeNiAlXTaY)NZ高熵合金薄膜的方法如下:9. The preparation method of metal steel rings in steel belt components for continuously variable transmissions as claimed in claim 8, characterized in that ( CoCrFeNiAl The method is as follows: 将具有织构形貌的金属钢环放入无水乙醇中超声清洗15min,洗去表面残留的杂质,用吹风机吹干;将CoCrFeNi高熵合金靶、Ta靶、Al靶置于磁控靶上,将清洗后的金属钢环装于样品台的两个滚轮上,调整连接杆角度并固定,确保金属钢环垂直于磁控靶,使靶材中溅射出的原子能沉积至金属钢环内外表面;装样结束后,关闭腔体室门,关闭放气阀;打开机械泵及抽气阀,抽真空至8.0Pa以下,关闭抽气阀;打开冷却水机组开关,打开分子泵及闸板阀,抽真空至3.0×10-3Pa以下;利用闸板阀将气压调至0.8-1Pa之间;打开计算机控制平台上的加热开关,自转开关及旋转开关,基底温度为400-600℃,自转盘转速为10-20r/min,滚轮转速为5-10r/min;打开氩气阀开关,氩气流量为10-30sccm;打开偏压开关,偏压为80-120V;依次进行CoCrFeNi合金靶、Al靶及Ta靶的起辉,起辉成功后,将CoCrFeNi合金靶沉积功率调至150W,Al靶沉积功率调至30-90W之间,Ta靶沉积功率调至40-80W之间,对靶材进行预溅射,溅射时长为10min,除去靶材表面污染物;打开氮气阀开关,氮气流量为10-20sccm;打开磁控靶挡板,对金属钢环进行(CoCrFeNiAlXTaY)NZ高熵合金薄膜溅射,溅射时长为140-220min;薄膜沉积结束后,依次关闭磁控靶功率,磁控靶挡板,氮气阀,氩气阀,加热和自转开关,闸板阀,分子泵,机械泵,冷却水机组;在真空环境下冷却至25℃,打开放气阀使腔体放气至大气压,打开腔体室门,取出内外表面沉积了(CoCrFeNiAlXTaY)NZ高熵合金薄膜的金属钢环。Put the metal steel ring with textured morphology into absolute ethanol for ultrasonic cleaning for 15 minutes, wash away the remaining impurities on the surface, and blow dry with a hair dryer; place the CoCrFeNi high-entropy alloy target, Ta target, and Al target on the magnetron target , install the cleaned metal steel ring on the two rollers of the sample stage, adjust the angle of the connecting rod and fix it, ensuring that the metal steel ring is perpendicular to the magnetron target, so that the atoms sputtered from the target can be deposited on the inner and outer surfaces of the metal steel ring ; After loading the sample, close the chamber door and close the exhaust valve; open the mechanical pump and exhaust valve, vacuum to below 8.0Pa, close the exhaust valve; open the cooling water unit switch, open the molecular pump and gate valve , vacuum to below 3.0×10 -3 Pa; use the gate valve to adjust the air pressure to between 0.8-1Pa; turn on the heating switch, autorotation switch and rotary switch on the computer control platform, and the base temperature is 400-600°C. The turntable speed is 10-20r/min, the roller speed is 5-10r/min; open the argon valve switch, the argon gas flow is 10-30sccm; open the bias switch, the bias voltage is 80-120V; perform CoCrFeNi alloy target, The ignition of Al target and Ta target. After ignition is successful, adjust the CoCrFeNi alloy target deposition power to 150W, the Al target deposition power to between 30-90W, and the Ta target deposition power to between 40-80W. Pre-sputtering the material, the sputtering time is 10 minutes, and the contaminants on the target surface are removed; open the nitrogen valve switch, the nitrogen flow is 10-20 sccm; open the magnetron target baffle, and perform (CoCrFeNiAl X Ta Y ) N on the metal steel ring Z high-entropy alloy film sputtering, the sputtering time is 140-220 minutes; after the film deposition is completed, turn off the magnetron target power, magnetron target baffle, nitrogen valve, argon valve, heating and rotation switch, gate valve, Molecular pump, mechanical pump, cooling water unit; cool to 25°C in a vacuum environment, open the vent valve to deflate the cavity to atmospheric pressure, open the cavity door, and take out the (CoCrFeNiAl X Ta Y ) N Z deposited on the inner and outer surfaces Metal steel ring with high entropy alloy film.
CN202311643968.1A 2023-12-04 2023-12-04 Metal steel ring in steel belt assembly for continuously variable transmission and preparation method thereof Pending CN117626200A (en)

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WO2023138145A1 (en) * 2022-01-20 2023-07-27 中国石油大学(华东) Method for improving anti-friction and anti-wear properties of substrate

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CN111690930A (en) * 2020-07-08 2020-09-22 常州信息职业技术学院 Preparation method of high-entropy alloy coating suitable for dry friction working condition
WO2023138145A1 (en) * 2022-01-20 2023-07-27 中国石油大学(华东) Method for improving anti-friction and anti-wear properties of substrate
CN115896700A (en) * 2022-12-06 2023-04-04 浙江工业大学 Metal substrate surface hard coating and preparation method and application thereof

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