CN1175304C - On-line Debugger for Dynamic Coaxial Adjustment of Spatial Filter - Google Patents
On-line Debugger for Dynamic Coaxial Adjustment of Spatial Filter Download PDFInfo
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- CN1175304C CN1175304C CNB021117322A CN02111732A CN1175304C CN 1175304 C CN1175304 C CN 1175304C CN B021117322 A CNB021117322 A CN B021117322A CN 02111732 A CN02111732 A CN 02111732A CN 1175304 C CN1175304 C CN 1175304C
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Abstract
一种用于空间滤波器动态同轴调整的在线调试仪，主要适用激光系统发射的主激光束与空间滤波器的动态同轴在线的调整。由激光系统发射的主激光束依次经过补偿透镜、起偏振片、检偏振片、自准平面透镜和空间滤波器至全反射镜。由全反射镜反射沿原光路返回的激光束再次通过空间滤波器和自准平面透镜至检偏振片后转45°方向前进，再依次经衰减器、成像物镜、小孔光栏、显微物镜至输出连接到显示器上的探测器。通过调节空间滤波器内输出透镜的粗调，调节补偿透镜的精调以及自准平面透镜的调节，能够使主激光束严格地与空间滤波器同轴。通过成像物镜的远场成像，能够在主激光束与空间滤波器在工作状态的动态下，在线上进行同光轴地调整。
An online debugging instrument for dynamic coaxial adjustment of a spatial filter is mainly applicable to the dynamic coaxial online adjustment of the main laser beam emitted by a laser system and the spatial filter. The main laser beam emitted by the laser system passes through a compensation lens, a polarizing plate, an analyzer, an autocollimating plane lens and a spatial filter to a total reflection mirror in sequence. The laser beam reflected by the total reflection mirror and returned along the original optical path passes through the spatial filter and the autocollimating plane lens to the analyzer again, then turns 45 degrees and moves forward, and then passes through an attenuator, an imaging objective lens, a pinhole light bar, a microscope objective lens in sequence to the output detector connected to the display. By adjusting the coarse adjustment of the output lens in the spatial filter, the fine adjustment of the compensation lens and the adjustment of the autocollimating plane lens, the main laser beam can be strictly coaxial with the spatial filter. Through the far-field imaging of the imaging objective lens, the main laser beam and the spatial filter can be adjusted coaxially online in the dynamic working state.
Description
Technical field:
The present invention be a kind of spatial filter that is used for dynamically with the on-line debugging instrument of axial adjustment, the dynamic coaxial of main laser bundle and spatial filter that is mainly used in the high power laser system adjusted online.
Background technology:
In high power laser system, adopt the existing nearly 30 years history of spatial filter technology.The major function of spatial filter is that the light beam between the laser amplifier stage is carried out spatial filtering, promptly on its Fourier spectrum, utilizes the high fdrequency component in the aperture filtering incident beam, suppresses the non-linear growth of radio-frequency component, prevents that self-focusing from taking place; Also has to beam expander control bundle divergence and have ability of the reverse laser damage of certain isolation etc. simultaneously.
Facts have proved, in high power laser system, adopted the spatial filter technology after, the brightness of laser, energy, can focus on power index and all significantly improve.At the structure of spatial filter complexity, realize that the accurate coaxial debugging difficulty of main laser bundle and spatial filter is big, precision is not enough.It formerly in the technology the coaxial debugging of adopting static off-line.Formerly technology [1] is to adopt He-Ne laser to carry out coaxial debugging with three dull and stereotyped interference structures.(referring to formerly technology [1] " neodymium glass high power laser system spatial filter " Acta Physica Sinica, Wang Guiying, Zhang Mingke etc., Vol.34, No.2Feb, 1985).Because it is the adjustment at static off-line, dynamically the time and when static, always exist certain difference, this has just caused coaxial degree of accuracy lower, and can not adjust in real time.
Summary of the invention:
The present invention is in order to overcome the existing problem of coaxial debugging of static off-line in the technology formerly, provide a kind of when laser system emission main laser bundle by under the duty of spatial filter, main laser bundle and the same optical axis of spatial filter are adjusted in online in real time ground.
On-line debugging instrument of the present invention comprises: contain the input lens 601 of confocal some O ' and output lens 603 movably, input with export the spatial filter 6 that confocal some O ' between two lens 601 and 603 locates to be equipped with filtering aperture 602.Before the input lens 601 light beam incident ends of spatial filter 6, be equipped with offset lens 1, offset lens 1 and spatial filter 6 concentricity optical axis OO
2, and with 601,603 confocal somes O ' of input and output two lens; On the light path between offset lens 1 and the spatial filter 6, be equipped with polarizing plate 2, on the light path between polarizing plate 2 and the spatial filter 6, be equipped with analyser plate 4, be equipped with autocollimatic planar lens 5 on the light path between analyser plate 4 and the spatial filter 6; The light beam that is returned by original optical path by the completely reflecting mirror 7 (perhaps using system) that is seated in outside spatial filter 6 output lens 603 output terminals passes through spatial filter 6 and autocollimatic planar lens 5 again to analyser plate 4, after analyser plate 4 makes 45 ° of light beam working direction deflections, be connected to the detector 12 on the display screen 13 through attenuator 8, image-forming objective lens 9, smallcolumn diaphragm 10, microcobjective 11 to output successively again.
Said attenuator 8 is that its output end face is on the object plane of image-forming objective lens 9 by the attenuator formation of n piece (n 〉=1).The plane of incidence of microcobjective 11 is on the image planes of image-forming objective lens 9.Plane of incidence storing facing to analyser plate 4 has Absorptivie Attenuator 3.Absorptivie Attenuator 3 is the attenuation by absorption sheet formations by n piece (n 〉=1).
Structure as implied above, on-line debugging instrument of the present invention be we can say, mainly comprises the optical axis regulating system, imaging system and record display system three parts.The optical axis regulating system is the central optical axis OO by the main laser bundle Gz of laser system 14 emissions
1With spatial filter 6 concentricity optical axis OO
2Inject offset lens 1, again successively through polarizing plate 2, analyser plate 4, enter the input lens 601 of spatial filter 6 behind the autocollimatic planar lens 5, in input lens 601 focuses on filtering aperture 602, light beam passes filtering aperture 602, returns original optical path through completely reflecting mirror 7 again from the light beam of output lens 603 outgoing of spatial filter 6.Utilize the offset lens 1 in the light path, autocollimatic planar lens 5 and completely reflecting mirror 7 can accurately online adjusting spatial filters 6 and the concentricity optical axis OO ' O of main laser bundle
2When spatial filter 6 is advanced in the main laser beam, at first regulate the output lens 603 of spatial filter 6, make output lens 603 and input lens 601 confocal on focus O ', and just in time focus in the filtering aperture 602.This is coarse adjustment.And then adjust offset lens 1 and make offset lens 1, input lens 601 and output lens 603 confocal more accurately on public focus O ', and the center of public focus O ' is just in time concentric with filtering aperture 602, and this is accurate adjustment.Return along original optical path by completely reflecting mirror 7 (or using system) beam reflected,, make the coaxial of its incident beam and the light beam strictness returned of reflection by the adjustment of autocollimatic planar lens 5.All adjustment process can clearly be observed from display screen 13.
Imaging system and record display system are that Returning beam is through entering in the attenuator 8 on 45 ° of directions behind the analyser plate 4, after the light beam that light intensity decays through attenuator 8 passes through smallcolumn diaphragm 10 filtering again, enter in the image-forming objective lens 11, image-forming objective lens 11 clearly is imaged on the focal spot on the laser beam foucing in the filtering aperture in the spatial filter 6 602 on the microcobjective 11, after microcobjective 11 enlarges hot spot, be mapped on the detector 12, on display screen 13, reproduce.Be absorbed attenuator 3 by analyser plate 4 beam reflected and absorb, attenuate.
On-line debugging instrument of the present invention is used for spatial filter 6 in the dynamic coaxial debugging of using, and has avoided formerly only adjusting coaxial all drawbacks of bringing at spatial filter 6 static off-lines in the technology 1.For example, it is that the employing wavelength is He-Ne laser and the three dull and stereotyped interferometers of 0.6328 μ m that spatial filter 6 static off-lines are adjusted coaxial, when adjust as the main laser bundle with the He-Ne laser beam with spatial filter coaxial after, push He-Ne laser and three dull and stereotyped interferometers open, push the main laser of the different wave length that will use again, there is aberration in the two kinds of light beams in front and back, and the use light beam is that high light is that the low light level exists the position phase distortion that is caused by nonlinear effect with adjusting light beam.
On-line debugging instrument of the present invention directly inserts in the light path spatial filter 6 is carried out dynamically same axial adjustment, the position phase distortion problem that does not exist aberration that two kinds of wavelength bring and laser power to cause.It is to image on the detector 12 by the far field that on-line debugging instrument of the present invention also has a remarkable advantage, and the picture of focal spots in the filtering aperture 602 clearly is reproduced on the display screen 13 the same optical axis of Real Time Observation main laser and spatial filter 6.So the present invention has improved tens times for the concentric adjustment precision of main laser and filtering aperture 602, can reach 6 μ m.When the main laser bundle is the high-energy emission, can be observed filtering aperture 602 parasitic light distribution on every side, and laser plasma is to the injection of aperture.The present invention also can be used for diagnosing the energy space of target edge, hole laser to distribute.When the geometric position of the Z-direction of regulating spatial filter 6 output lens 603, the laser beam that spatial filter 6 is penetrated becomes the above directional light of 2000m.Can carry out same axial adjustment apace.
Description of drawings:
Fig. 1 is an on-line debugging instrument structural representation of the present invention.
Embodiment:
Structure as shown in Figure 1.Wavelength X=1.053 μ m of the main laser bundle Gz of laser system 14 outputs, wherein offset lens 1 is a biconvex lens, material is a K9 glass, is of a size of Φ 80 * 8mm.Lens two surface platings 1.053 μ m high antireflection films.45 ° of polarizing plates 2 are square plates, and material is a K9 glass, are of a size of length 100mm, width 80mm, thickness 8mm.At 45 ° of polarizing plates, 2 square plates, two surface platings, 1.053 μ m anti-reflection films.45 ° of analyser plates 4 also are square plates, and material is a K9 glass, are of a size of length 100mm, width 80mm, thickness 8mm.Plate the part reflective semitransparent film of 1.053 μ m on the surface of 45 ° of analyser plates, 4 square plate incident main laser bundle Gz.When main laser bundle Gz incided surface, 45 ° of analyser plate 4 centers, 50% main laser energy was reflected to be absorbed in the Absorptivie Attenuator 3 and attenuates.In the present embodiment, Absorptivie Attenuator 3 has n=1 piece attenuation by absorption sheet.Absorptivie Attenuator 3 is square plates, and material is a welding glass, is of a size of length 100mm, width 80mm, thickness 8mm.At the total reflection film of the surface of analyser plate 4 outgoing main laser bundles plating to 1.053 μ m main laser bundles.Autocollimatic planar lens 5 is square parallel flats, and material is a K9 glass, is of a size of length 100mm, width 80mm, thickness 8mm.At the anti-reflection film of 5 liang of minute surface platings of autocollimatic planar lens, and require the parallel machining precision＜λ of two minute surfaces/4 to 1.053 μ m main laser bundle Gz.The input lens 601 of spatial filter 6 and output lens 603, material are K9 glass.Filtering aperture 602 materials are tantalum or tantalum-tungsten alloy.Orifice size is generally expressed by the multiple of the required diffraction limit of physics.Completely reflecting mirror 7 is a square plate, and material is a K9 glass, is of a size of length 120mm, width 100mm, thickness 10mm.The plane of incidence to 1.053 μ m main laser bundle Gz plates 1.053 μ m laser total reflection films, and requires plane of incidence machining precision＜λ/4 to 1.053 μ m laser beam.
Attenuator 8 contains n=4 piece attenuator, and as reducing laser intensity, material is a welding glass, square plate, and length is 80mm, width 60mm, thickness 10mm.4 attenuators adopt carves the storing of type position, and attenuator can be decided according to the light intensity that microcobjective 11 is born.Image-forming objective lens 9 clearly as by after smallcolumn diaphragm 10 filtering, passes to spatial filter 6 filtering apertures 602 places on the microcobjective 11.Image-forming objective lens 9 materials are K9 glass, and bore is the biconvex spherical mirror of 60mm, and focal length is 200mm.Smallcolumn diaphragm 10, material are copper-tungsten, and diameter is greater than the diameter of image-forming objective lens 9 hot spot on image planes.Microcobjective 11 bores are Φ 10mm, and enlarging the hot spot multiplying power is 20 times, is the marketing of standard.Detector 12 adopts general charge-coupled device (CCD), and display screen 13 is used video screen.
As mentioned above, on-line debugging instrument of the present invention is with high low power imaging system, and by the structure that the far field receives, on display screen 13, reproduction space wave filter 6 filtering aperture places laser beam clearly focus on focal spot.Regulate the focal position in the spatial filter 6, make its filtering aperture 602 and focal spot strict concentric, adjustment accuracy can reach 6 μ m, and the precision of debugging the nearly 100 μ m of instrument than the off-line of technology has formerly improved tens times.
Completely reflecting mirror that autocollimatic planar lens 5 in the on-line debugging instrument of the present invention and spatial filter 6 output terminals are put 7 strict coaxial after, the geometric position of the Z-direction by regulating spatial filter 6 output lens 603, the laser beam that spatial filter 6 is penetrated becomes the above directional light transmission of 2000m.
When the high homenergic of main laser Shu Weizhong of laser system 14 emission, the on-line debugging instrument can be observed spatial filter filtering aperture edge parasitic light and distribute, and also can be used for diagnosing the energy space of target edge, hole laser to distribute.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021117322A CN1175304C (en) | 2002-05-17 | 2002-05-17 | On-line Debugger for Dynamic Coaxial Adjustment of Spatial Filter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021117322A CN1175304C (en) | 2002-05-17 | 2002-05-17 | On-line Debugger for Dynamic Coaxial Adjustment of Spatial Filter |
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| CN1379264A CN1379264A (en) | 2002-11-13 |
| CN1175304C true CN1175304C (en) | 2004-11-10 |
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| CNB021117322A Expired - Fee Related CN1175304C (en) | 2002-05-17 | 2002-05-17 | On-line Debugger for Dynamic Coaxial Adjustment of Spatial Filter |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102385161A (en) * | 2010-09-03 | 2012-03-21 | 时代光电科技股份有限公司 | Laser beam coaxial adjustment method and device |
| CN102662241B (en) * | 2012-05-16 | 2014-01-22 | 中国科学院光电技术研究所 | Laser beam common-aperture power synthesis system based on beam stabilization closed-loop control |
| CN105408764B (en) * | 2013-05-06 | 2019-08-09 | 丹麦科技大学 | Coaxially directly detect LIDAR system |
| CN104535296B (en) * | 2014-12-03 | 2017-04-05 | 中国科学院苏州生物医学工程技术研究所 | A kind of multiple beam is with shaft detection and method of adjustment |
| CN104570380B (en) * | 2015-01-22 | 2017-02-22 | 中国科学院上海光学精密机械研究所 | Spatial filter debugging device and method |
| CN104617475B (en) * | 2015-02-04 | 2017-08-08 | 广州市普东医疗设备股份有限公司 | A kind of adjusting method of double-channel holmium laser |
| CN112630983A (en) * | 2020-12-24 | 2021-04-09 | 中国工程物理研究院激光聚变研究中心 | Laser system, laser-induced damage testing system and method |
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