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CN117415443B - A low-cost diffusion welding tool and its use method - Google Patents

A low-cost diffusion welding tool and its use method

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Publication number
CN117415443B
CN117415443B CN202311656474.7A CN202311656474A CN117415443B CN 117415443 B CN117415443 B CN 117415443B CN 202311656474 A CN202311656474 A CN 202311656474A CN 117415443 B CN117415443 B CN 117415443B
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China
Prior art keywords
welding
positioning
vacuum
hole
pressure rod
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CN202311656474.7A
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CN117415443A (en
Inventor
程媛媛
请求不公布姓名
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Hebei Jinheng Electronic Technology Co ltd
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Hebei Jinheng Electronic Technology Co ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/26—Auxiliary equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Diaphragms And Bellows (AREA)

Abstract

本发明公开了一种低成本扩散焊接用工装及其使用方法，属于焊接技术领域。该工装由封盖，真空腔体，套筒，压杆，伸缩波纹管，压板，定位销，真空波纹管及带液冷功能的转接头组成。本发明的优点在于：工艺简单，易于实现，可实现选用成本低廉的气氛炉、马弗炉等设备替代传统工艺用昂贵的真空扩散焊炉设备的目的，进而大幅降低产品的生产成本。

The present invention discloses a low-cost diffusion welding tool and its use method, belonging to the field of welding technology. The tool comprises a cover, a vacuum chamber, a sleeve, a pressure rod, a telescopic bellows, a pressure plate, a positioning pin, a vacuum bellows, and an adapter with liquid cooling. The advantages of this invention are its simple and easy-to-implement process. It can replace the expensive vacuum diffusion welding furnaces used in traditional processes with low-cost equipment such as atmosphere furnaces and muffle furnaces, thereby significantly reducing product production costs.

Description

Low-cost diffusion welding tool and application method thereof
Technical Field
The invention relates to the technical field of diffusion welding, in particular to a low-cost tool for diffusion welding and a using method thereof.
Background
Along with the gradual increase of the power density of electronic components, the use frequency of the series of heat control products such as the micro-channel liquid cooling plate, the micro-channel heat exchanger, the evaporation cavity temperature equalizing plate, the solid state temperature equalizing plate and the like is higher and higher, and the corresponding use range is wider and wider. However, because of strict quality requirements, vacuum diffusion welding and other processes are generally required to be adopted in the thermal control products.
The vacuum diffusion welding process has the advantages of good quality of a diffusion welding head, high precision of a welding piece, small deformation, small plastic deformation of the whole welding piece, no mechanical processing of the welded workpiece, welding of workpieces with large cross sections, complex structure, difficult accessibility of joints and large thickness difference, and simultaneous welding of a plurality of joints in an assembly. However, vacuum diffusion welding equipment is very expensive, especially in a variety of small-volume production, which results in very high production costs for such thermal control products. The invention aims to solve the problems of high production cost and the like caused by adopting expensive vacuum diffusion welding equipment for thermal control products.
Disclosure of Invention
The invention aims to solve the problem of high production cost caused by the adoption of expensive equipment such as vacuum diffusion welding and the like in the prior art, and provides a low-cost tool for diffusion welding and a use method thereof, which have the advantages of simple process, cost saving and high welding yield. The invention can not only greatly reduce the production cost, but also effectively ensure the welding quality of the product, and can also realize the one-time welding of the multi-layer product.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
the utility model provides a low-cost diffusion welding is with frock, includes closing cap, vacuum cavity, sleeve, depression bar, bellows, clamp plate, locating pin, vacuum bellows and take liquid cooling function's adapter.
The vacuum cavity consists of five solid wall surfaces and one opening surface. A through hole (defined as a through hole 1) for vacuumizing is formed at the edge of the wall surface of any one solid body. A positioning groove (defined as positioning groove 1) is formed on the outer surface of the wall surface of the solid body where the through hole 1 is located. The positioning groove 1 is coaxial with the through hole 1.
A through hole (defined as a through hole 2) is opened at a center of a wall surface perpendicular to the opening surface and close to the through hole. Two positioning grooves (respectively defined as positioning groove 2 and positioning groove 3) are formed on the outer surface of the wall surface of the solid body where the through hole 2 is located. The positioning groove 2 and the positioning groove 3 are coaxial with the through hole 2. The depth of the positioning groove 2 is larger than the depth of the positioning groove 3.
The vacuum corrugated pipe is a vacuum corrugated pipe with flanges at two ends. One end flange of the connecting rod is matched with the positioning groove 1, and is connected in a sealing welding mode after being inserted into the positioning groove 1. The flange at the other end is connected with an adapter with a cooling function.
The adapter with the liquid cooling function is formed by integrally welding a water cooling sleeve, a vacuum pipeline and a flange. The water-cooled jacket is wound on the vacuum pipe and is connected together by welding. One end of the vacuum pipeline is connected with the flange, and the other end of the vacuum pipeline is connected with the flange of the vacuum corrugated pipe in a sealing welding mode.
The sleeve is an annular pipe. The outer diameter of the sleeve is equal to the diameter of the positioning groove 2, and the sleeve and the positioning groove are matched and installed. One end of the sleeve is embedded into the positioning groove 2, and an annular seam formed by connecting the sleeve and the positioning groove 2 is fixedly connected in a welding mode.
The telescopic corrugated pipe is a vacuum corrugated pipe with flanges at two ends. The outer diameter of the flange is equal to the diameter of the positioning groove 3. One end flange of the telescopic corrugated pipe is embedded into the positioning groove 3, and an annular seam formed by the telescopic corrugated pipe and the positioning groove 3 is connected in a sealing welding mode. The other end flange of the telescopic corrugated pipe is connected with the compression bar.
The compression bar consists of five parts, namely a tray, a positioning circular boss, a pressure bar, a positioning through hole (defined as a positioning through hole 1) and a hemispherical body. The tray is a flat cylinder. Along the same direction, a positioning circular boss, a pressure rod and a hemisphere are sequentially constructed on the tray. The pressure rod is a cylinder. And the tray is used for positioning the circular boss and the pressure rod coaxially. The diameter of the positioning circular boss is equal to the inner diameter of the telescopic corrugated pipe flange. A hemisphere is built at the bottom end of the pressure rod, the diameter of the hemisphere being equal to the diameter of the pressure rod. A positioning through hole 1 is formed on the pressure rod side near the boundary line between the hemispherical body and the pressure rod.
The compression bar is inserted into the through hole 2, the compression bar is moved up and down, the positioning circular boss of the compression bar is embedded into the flange at the other end which is not connected with the telescopic corrugated pipe, the section of the port of the flange is contacted with the surface of the tray, and the annular seam formed by the interface of the flange and the tray is connected in a sealing welding mode.
The pressing plate is a block-shaped thick plate which can be placed in the vacuum cavity. And constructing a concentric annular boss at the center of the thick plate. The inner diameter of the annular boss is equal to the outer diameter of the pressure rod. A positioning through hole (defined as a positioning through hole 2) is formed on the annular boss. The diameter of the positioning through hole 2 is equal to the diameter of the positioning through hole 1. The pressing plate is placed in the vacuum cavity, the hemispherical body of the pressure rod is placed in the annular boss, and the positioning through hole 1 is aligned with the positioning through hole 2.
The locating pin passes through the locating through hole 1 and the locating through hole 2 to realize the connection of the pressure lever and the pressure plate, so that the pressure plate can move along with the up-and-down movement of the pressure lever. The outer diameter of the positioning pin is equal to the diameters of the positioning through holes 1 and 2.
The sealing cover is a thin plate and is matched with the opening surface of the vacuum cavity. When the strip weldment is placed in the vacuum cavity, the sealing cover and the vacuum cavity can be connected in a sealing welding mode, so that a sealed vacuum cavity is formed.
Further, the telescopic corrugated pipe is preferably a vacuum welding corrugated pipe.
Further, the height of the sleeve is larger than or equal to the height of the expansion corrugated pipe after the expansion corrugated pipe is compressed in a limiting mode and smaller than the height of the expansion corrugated pipe when the expansion corrugated pipe is stretched to the limit.
Furthermore, the lower end of the pressing rod is provided with a hemisphere, the pressing rod is connected with the pressing plate through the positioning pin, and the pressing plate is allowed to deflect at a small angle locally by taking the positioning pin as an axis, so that the welding working condition when the surface of a workpiece and the surface of the pressing plate are not parallel is met.
The application method of the low-cost tooling for diffusion welding, which is used for the low-cost tooling for diffusion welding, specifically comprises the following steps of:
step 1, lifting a pressing rod, placing a workpiece to be welded in a coverage area below a pressing plate in a vacuum cavity, and then lowering the pressing rod to press the workpiece to be welded by the pressing plate;
Step 2, the sealing cover is matched and connected with the opening surface of the vacuum cavity, and a sealed vacuum cavity is formed through sealing welding;
step 3, putting the tooling for putting the workpiece to be welded into a heating device;
Step 4, connecting a flange of the adapter with a liquid cooling function with a vacuum platform, and extracting air in the vacuum cavity to meet the vacuum degree requirement of welding;
Step 5, connecting a water cooling sleeve of the adapter with a liquid cooling function with a water cooling circulation system for controlling the temperature of the adapter so as to prevent the vacuum platform from being damaged by high-temperature heat conduction to the vacuum platform;
step 6, placing a metal pressing block on the tray to meet the pressure requirement of welding;
Step 7, the heating device starts to heat according to a welding temperature curve so as to meet the temperature requirement required by welding;
And 8, closing the heating device for cooling, disconnecting the water cooling circulation system from the water cooling sleeve after cooling, connecting the adapter with the liquid cooling function with the vacuum platform, and then taking out the welding tool.
Step 9, cutting a sealing cover of the welding tool, and taking out a workpiece;
and 10, polishing the opening surface of the vacuum cavity to enable the opening surface to be flat, and repeatedly using the welding tool.
Furthermore, the sealing welding adopts welding modes such as arc breaking pulse arc welding, laser welding, tig welding (argon tungsten-arc welding), CMT (cold metal transition welding technology) and the like.
Furthermore, the heating device can be low-cost equipment such as an atmosphere furnace or a muffle furnace.
Further, the sealing cover is cut by adopting modes of wire cutting, laser cutting, machining milling and the like.
The beneficial effects generated by adopting the technical scheme are as follows:
1. The workpiece is placed in the tooling for low-cost diffusion welding, the tooling provides pressure and vacuum welding environment for the workpiece, and then the workpiece is integrally placed in heating equipment such as an atmosphere furnace or a muffle furnace with low cost to provide welding temperature, so that the vacuum diffusion welding of the workpiece can be realized. Therefore, the method provided by the invention can replace the purpose of expensive vacuum diffusion welding furnace equipment used in the traditional process, thereby greatly reducing the production cost of the product.
2. The traditional process adopts a vacuum diffusion welding furnace, the vacuum cavity has a large volume, so that the vacuumizing time is long, more than 4-6 hours are generally required, and the method only needs to extract the space in the diffusion welding tool which is slightly larger than the workpiece, so that the vacuumizing time can be greatly shortened, the production period is shortened, and the production cost is reduced.
3. The tooling for low-cost diffusion welding provided by the invention can be reused, and only the sealing cover needs to be replaced during each welding, so that the production cost can be greatly reduced.
Drawings
Fig. 1 is a schematic structural diagram of a low-cost diffusion welding tool according to embodiment 1 of the present invention.
Fig. 2 is an exploded view of a low cost diffusion welding tooling according to embodiment 1 of the present invention.
Fig. 3 is a schematic view showing the structure of a vacuum chamber according to the present invention in example 1.
Fig. 4 is a schematic structural diagram of a compression bar according to the present invention in embodiment 1.
Fig. 5 is a schematic view of the bellows structure according to the present invention in embodiment 1.
Fig. 6 is a schematic view showing the structure of a platen according to the present invention in embodiment 1.
Fig. 7 is a schematic view of the structure of the vacuum bellows according to the present invention in example 1.
Fig. 8 is a schematic structural diagram of an adapter with liquid cooling function according to embodiment 1 of the present invention.
In the figure, 1, a sealing cover, 2, a vacuum cavity, 3, a sleeve, 4, a compression bar, 5, a telescopic corrugated pipe, 6, a pressing plate, 7, a locating pin, 8, a vacuum corrugated pipe and 9, and an adapter with a liquid cooling function.
Detailed Description
The invention will be further described with reference to the drawings and detailed description.
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings of the embodiments will be briefly described below, and it will be apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
In order to solve the problem that the production cost of products is high due to the fact that expensive equipment such as vacuum diffusion welding is adopted in the prior art, the invention creatively provides a low-cost tooling for diffusion welding. The structure comprises a sealing cover 1, a vacuum cavity 2, a sleeve 3, a compression bar 4, a telescopic corrugated pipe 5, a pressing plate 6, a positioning pin 7, a vacuum corrugated pipe 8 and an adapter 9 with a liquid cooling function.
Referring to fig. 1 to 8, the vacuum chamber 2 is composed of five solid wall surfaces and one opening surface. At the edge of the solid wall surface parallel to the opening surface, a through hole (defined as a through hole 1) for vacuum suction is opened. A positioning groove 23 is formed on the outer surface of the wall surface of the solid body where the through hole 1 is positioned. The positioning groove 23 is coaxial with the through hole 1.
A through hole (defined as a through hole 2) is opened at a center of a wall surface perpendicular to the opening surface and close to the through hole. Two positioning grooves, namely a positioning groove 21 and a positioning groove 22, are formed on the outer surface of the wall surface of the solid body where the through hole 2 is located. The positioning groove 21 and the positioning groove 22 are coaxial with the through hole 2. The depth of the positioning groove 22 is greater than the depth of the positioning groove 21.
The vacuum bellows 8 is a vacuum bellows 82 with flanges (flange 81 and flange 83) at two ends. The flange 81 is engaged with the positioning groove 23, and is inserted into the positioning groove 23 and then connected by laser welding. The flange 83 is connected to the adapter 9 with a cooling function.
The adapter 9 with the liquid cooling function is formed by integrally welding a water cooling sleeve 92, a vacuum pipeline 91 and a flange 93. The water jacket 92 is wound around the vacuum line 91 and is joined together by brazing. One end of the vacuum pipe 91 is connected to the flange 93, and the other end is connected to the flange 83 of the vacuum bellows by laser welding.
The sleeve 3 is an annular pipe. The sleeve has an outer diameter equal to the diameter of the positioning groove 22 and is cooperatively installed. One end of the sleeve is embedded into the positioning groove 22, and an annular seam formed by connecting the sleeve and the positioning groove 22 is fixedly connected in a laser welding mode.
The telescopic corrugated pipe 5 is a vacuum corrugated pipe 52 with flanges (a flange 51 and a flange 53) at two ends. The outer diameters of the flanges 51, 53 are equal to the diameter of the positioning groove 21. The flange 51 is fitted into the positioning groove 21, and an annular slit formed between the flange 51 and the positioning groove 21 is connected by laser welding. The flange 53 is connected to the compression bar 4.
The compression bar 4 consists of five parts, namely a tray 41, a positioning circular boss 42, a pressure bar 43, a positioning through hole 44 and a hemispherical body 45. The tray 41 is a flat cylinder. Along the same direction, a positioning circular boss 42, a pressure rod 43 and a hemispherical body 45 are sequentially constructed on the tray 41. The pressure lever 43 is a cylinder. The tray 41, the positioning circular boss 42 is concentric with the pressure bar 43. The diameter of the positioning circular boss 42 is equal to the inner diameter of the bellows flange 53. A hemisphere 45 is constructed at the bottom end of the pressure rod 43, the diameter of the hemisphere 45 being equal to the diameter of the pressure rod 43. A positioning through hole 44 is formed on the pressure rod 43 side in the vicinity of the boundary line between the hemispherical body 45 and the pressure rod 43.
The compression bar 4 is inserted into the through hole 2, the compression bar 4 is moved up and down, the positioning circular boss 42 of the compression bar 4 is embedded into the flange 53 of the telescopic corrugated pipe 5, the port section of the flange 53 is contacted with the plane of the tray 41, and the annular seam formed by the interface of the flange and the plane is connected in a laser welding mode.
The pressing plate 6 is placed in the vacuum cavity 2 and consists of a block thick plate 61, an annular boss 62 and a positioning through hole 63. A concentric annular boss 62 is formed at the center of the bulk slab 61. The inner diameter of the annular boss 62 is equal to the outer diameter of the pressure rod 43. A positioning through hole 63 is constructed on the annular boss 62. The diameter of the positioning through hole 63 is equal to the diameter of the positioning through hole 44. The platen 6 is placed in the vacuum chamber 2, and the hemispherical body 45 of the pressure rod 43 is placed in the annular boss 62, aligning the positioning through hole 63 with the positioning through hole 44.
The positioning pin 7 passes through the positioning through hole 63 and the positioning through hole 44 to realize the connection of the pressing rod 4 and the pressing plate 6, so that the pressing plate 6 can move along with the up-and-down movement of the pressing rod 4. The outer diameter of the positioning pin 7 is equal to the diameters of the positioning through hole 63 and the positioning through hole 44.
The sealing cover 1 is a thin plate and is matched with the opening surface of the vacuum cavity 2. When the strip weldment is placed in the vacuum cavity 2, the sealing cover 1 and the vacuum cavity 2 can be connected in a laser welding mode to form a closed vacuum cavity.
In this embodiment, the bellows 5 is a vacuum welded bellows.
In this embodiment, the height of the sleeve is equal to the height of the bellows 5 after extreme compression.
In this embodiment, a hemisphere 45 is designed at the lower end of the pressing rod 4, and the pressing rod 4 and the pressing plate 6 are connected by a positioning pin 7, so that the pressing plate 6 is allowed to deflect at a small angle locally by taking the positioning pin 7 as an axis, and the welding method is suitable for welding conditions when the surface of a workpiece and the surface of the pressing plate are not parallel.
The application method of the low-cost tooling for diffusion welding specifically comprises the following steps:
step 1, lifting a pressing rod 4 to place a workpiece to be welded into a vacuum cavity 2 in a coverage area below a pressing plate 6, and then putting down the pressing rod 4 to enable the pressing plate 6 to press the workpiece to be welded;
Step 2, the sealing cover 1 is matched and connected with the opening surface of the vacuum cavity 2, and a closed vacuum cavity is formed through laser welding;
Step 3, putting the tooling for putting the workpiece to be welded into a muffle furnace heating device;
Step 4, connecting the flange 93 of the adapter 9 with the liquid cooling function with a vacuum platform, and extracting air in the vacuum cavity to meet the vacuum degree requirement of welding;
Step 5, connecting a water cooling sleeve 92 of the adapter 9 with a liquid cooling function with a water cooling circulation system for controlling the temperature of the adapter 9 so as to prevent the vacuum platform from being damaged by high-temperature heat conduction to the vacuum platform;
step 6, placing a metal pressing block on the tray 41 to meet the pressure requirement of welding;
Step 7, operating the muffle furnace to start heating according to a welding temperature curve so as to meet the temperature requirement required by welding;
And 8, closing the muffle furnace for cooling, disconnecting the water cooling circulation system from the water cooling sleeve 92 and connecting the flange 93 with the vacuum platform after cooling, and then taking out the welding tool.
Step 9, milling off the sealing cover 1 of the welding tool in a machining and milling mode, and taking out a workpiece;
and 10, polishing the opening surface of the vacuum cavity to enable the opening surface to be flat, and repeatedly using the welding tool.
The above embodiments are merely preferred embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.

Claims (8)

1.一种低成本扩散焊接用工装，其特征在于，包括封盖、真空腔体、套筒、压杆、伸缩波纹管、压板、定位销、真空波纹管及带液冷功能的转接头；所述的真空腔体由五个实体壁面和一个开口面组成，在任一实体壁面边缘处开一个用于抽真空用的通孔1，在通孔1所在实体壁面的外表面开一个定位槽1，定位槽1与通孔1同轴心；在与开口面相互垂直且靠近通孔的壁面中心处开一个通孔2，在通孔2所在实体壁面的外表面开两个定位槽，分别为定位槽2与定位槽3，定位槽2和定位槽3与通孔2同轴心，定位槽2的深度大于定位槽3的深度；所述的真空波纹管为一两端带法兰的真空波纹管，其一端法兰与定位槽1相配合并插入定位槽1中，再通过密封焊接的方式进行连接，另一端法兰与带液冷功能的转接头进行连接；所述的带液冷功能的转接头由水冷套、真空管路与法兰整体焊接而成，水冷套缠绕在真空管路上并通过焊接的方式连接到一起，真空管路的一端与法兰连接，另一端与真空波纹管的法兰进行连接，通过密封焊接的方式连接到一起；所述的套筒为一环形管，套筒的外径等于定位槽2的直径，二者相配合安装，套筒的一端嵌入定位槽2中，并将套筒与定位槽2连接形成的环形缝通过焊接的方式进行固定连接；所述的伸缩波纹管为一两端带法兰的真空波纹管，其法兰的外径等于定位槽3的直径，伸缩波纹管的一端法兰嵌入定位槽3中，并将伸缩波纹管与定位槽3形成的环形缝通过密封焊接的方式进行连接，伸缩波纹管的另一端法兰与压杆进行连接；所述的压杆由托盘、定位圆形凸台、压力杆、定位通孔1与半球体五部分组成，托盘为一扁状的圆柱体，沿着同一方向在托盘上依次构建定位圆形凸台、压力杆与半球体，压力杆为一圆柱体，托盘、定位圆形凸台与压力杆同轴心，定位圆形凸台的直径等于伸缩波纹管法兰的内径，在压力杆的底端构建一半球体，半球体的直径等于压力杆的直径，在半球体与压力杆交界线附近的压力杆侧构建定位通孔1；将压杆插入通孔2中，上下移动压杆，使压杆的定位圆形凸台嵌入伸缩波纹管未连接的另一端法兰内，并使法兰端口截面与托盘面相接触，二者交界面形成的环形缝通过密封焊接的方式进行连接；所述的压板为一可放入真空腔体内的块状厚板，在厚板中心处构建一同轴心的环形凸台，环形凸台的内径等于压力杆的外径，环形凸台上构建一定位通孔2，定位通孔2的直径等于定位通孔1的直径，将压板放入真空腔内，并将压力杆的半球体置入环形凸台内，将定位通孔1与定位通孔2相对齐；所述的定位销，穿过定位通孔1与定位通孔2实现压杆与压板的连接，使压板可随着压杆的上下移动而移动，定位销的外径等于定位通孔1与定位通孔2的直径；所述的封盖为一薄板，其与真空腔体开口面相配合，当带焊件放入真空腔体内，通过密封焊接的方式将封盖与真空腔体进行连接，形成一个密闭的真空腔体。1. A low-cost diffusion welding tool, characterized in that it includes a cover, a vacuum chamber, a sleeve, a pressure rod, a telescopic bellows, a pressure plate, a positioning pin, a vacuum bellows and an adapter with liquid cooling function; the vacuum chamber is composed of five solid wall surfaces and an opening surface, a through hole 1 for vacuuming is opened at the edge of any solid wall surface, a positioning groove 1 is opened on the outer surface of the solid wall surface where the through hole 1 is located, and the positioning groove 1 is coaxial with the through hole 1; a through hole 2 is opened at a wall surface perpendicular to the opening surface and close to the center of the through hole, and two positioning grooves are opened on the outer surface of the solid wall surface where the through hole 2 is located, namely positioning groove 2 and positioning groove 3, positioning groove 2 and positioning groove 3 are coaxial with the through hole 2, and the depth of positioning groove 2 is greater than the depth of positioning groove 3; the vacuum bellows is a vacuum bellows with flanges at both ends, and the flange at one end cooperates with the positioning groove 1 and is inserted into the positioning groove 1 , and then connected by sealing welding, and the flange at the other end is connected to the adapter with liquid cooling function; the adapter with liquid cooling function is formed by welding a water cooling jacket, a vacuum pipeline and a flange as a whole, the water cooling jacket is wrapped around the vacuum pipeline and connected together by welding, one end of the vacuum pipeline is connected to the flange, and the other end is connected to the flange of the vacuum bellows, and connected together by sealing welding; the sleeve is an annular tube, the outer diameter of the sleeve is equal to the diameter of the positioning groove 2, and the two are installed in coordination, one end of the sleeve is embedded in the positioning groove 2, and the annular seam formed by connecting the sleeve and the positioning groove 2 is fixedly connected by welding; the telescopic bellows is a vacuum bellows with flanges at both ends, the outer diameter of the flange is equal to the diameter of the positioning groove 3, and the flange at one end of the telescopic bellows is embedded in the positioning groove 3, and the telescopic bellows formed by the positioning groove 3 is fixedly connected. The annular seam is connected by sealing welding, and the flange at the other end of the telescopic bellows is connected to the pressure rod; the pressure rod is composed of a tray, a positioning circular boss, a pressure rod, a positioning through hole 1 and a hemisphere. The tray is a flat cylinder, and the positioning circular boss, the pressure rod and the hemisphere are constructed in sequence on the tray along the same direction. The pressure rod is a cylinder, and the tray, the positioning circular boss and the pressure rod are coaxial. The diameter of the positioning circular boss is equal to the inner diameter of the flange of the telescopic bellows. A hemisphere is constructed at the bottom end of the pressure rod, and the diameter of the hemisphere is equal to the diameter of the pressure rod. A positioning through hole 1 is constructed on the pressure rod side near the boundary between the hemisphere and the pressure rod; the pressure rod is inserted into the through hole 2, and the pressure rod is moved up and down so that the positioning circular boss of the pressure rod is embedded in the flange at the other end of the telescopic bellows that is not connected, and the flange port cross section is in contact with the tray surface, and the annular interface formed by the two The seams are connected by sealing welding; the pressure plate is a block-shaped thick plate that can be placed in the vacuum chamber, and a coaxial annular boss is constructed at the center of the thick plate. The inner diameter of the annular boss is equal to the outer diameter of the pressure rod, and a positioning hole 2 is constructed on the annular boss. The diameter of the positioning hole 2 is equal to the diameter of the positioning hole 1. The pressure plate is placed in the vacuum chamber, and the hemisphere of the pressure rod is placed in the annular boss, and the positioning hole 1 is aligned with the positioning hole 2; the positioning pin passes through the positioning hole 1 and the positioning hole 2 to realize the connection between the pressure rod and the pressure plate, so that the pressure plate can move with the up and down movement of the pressure rod. The outer diameter of the positioning pin is equal to the diameter of the positioning hole 1 and the positioning hole 2; the cover is a thin plate, which cooperates with the opening surface of the vacuum chamber. When the welded part is placed in the vacuum chamber, the cover is connected to the vacuum chamber by sealing welding to form a closed vacuum chamber. 2.根据权利要求1所述的一种低成本扩散焊接用工装，其特征在于，所述伸缩波纹管，优先选用真空焊接式波纹管。2. A low-cost diffusion welding tool according to claim 1, characterized in that the telescopic bellows is preferably a vacuum welding bellows. 3.根据权利要求1所述的一种低成本扩散焊接用工装，其特征在于，所述套筒的高度大于等于伸缩波纹管极限压缩后的高度，小于伸缩波纹管拉伸达到极限时的高度。3. The low-cost diffusion welding tool according to claim 1, characterized in that the height of the sleeve is greater than or equal to the height of the telescopic bellows after extreme compression, and less than the height of the telescopic bellows when it reaches the limit of extension. 4.根据权利要求1所述的一种低成本扩散焊接用工装，其特征在于，所述压杆下端设计一半球体，且压杆与压板是通过定位销予以连接，此种设计，允许压板以定位销为轴心进行局部小角度的偏转，适用于工件表面与压板面不平行时的焊接工况。4. A low-cost diffusion welding tool according to claim 1, characterized in that the lower end of the pressure rod is designed as a hemisphere, and the pressure rod and the pressure plate are connected by a positioning pin. This design allows the pressure plate to perform local small-angle deflection with the positioning pin as the axis, which is suitable for welding conditions when the workpiece surface is not parallel to the pressure plate surface. 5.一种低成本扩散焊接用工装的使用方法，其特征在于，使用如权利要求1～4任意一项的一种低成本扩散焊接用工装，具体包括以下步骤：5. A method for using a low-cost diffusion welding tool, characterized in that the low-cost diffusion welding tool according to any one of claims 1 to 4 is used, specifically comprising the following steps: 步骤1，提起压杆将待焊工件放入真空腔内压板下面的覆盖区域，然后放下压杆，使压板压住待焊工件；Step 1: Lift the pressure rod and place the workpiece to be welded into the covering area below the pressure plate in the vacuum chamber, then lower the pressure rod so that the pressure plate presses the workpiece to be welded; 步骤2，将封盖与真空腔体的开口面配合连接，通过密封焊接形成一个密闭的真空腔体；Step 2: Connect the cover to the opening surface of the vacuum chamber and form a closed vacuum chamber by sealing welding; 步骤3，将放入待焊工件的工装放入加热装置内；Step 3: Place the tooling containing the workpiece to be welded into the heating device; 步骤4，将带液冷功能的转接头的法兰与真空平台进行连接，抽取真空腔体内的空气，达到焊接需要的真空度要求；Step 4: Connect the flange of the adapter with liquid cooling function to the vacuum platform to extract the air in the vacuum chamber to achieve the vacuum level required for welding; 步骤5，将带液冷功能的转接头的水冷套与水冷循环系统进行连接，用于控制转接头的温度，以免高温热量传导至真空平台损坏真空平台；Step 5: Connect the water cooling jacket of the adapter with liquid cooling function to the water cooling circulation system to control the temperature of the adapter to prevent high temperature heat from being transferred to the vacuum platform and damaging the vacuum platform; 步骤6，在托盘上放入金属压块，以达到焊接需要的压力要求；Step 6: Place a metal pressing block on the tray to meet the pressure requirements for welding; 步骤7，加热装置按焊接温度曲线开始进行加热，以达到焊接所需的温度要求；Step 7: The heating device starts heating according to the welding temperature curve to achieve the temperature required for welding; 步骤8，关闭加热装置进行冷却，待冷却后断开水冷循环系统与水冷套的连接及带液冷功能的转接头与真空平台的连接，然后取出焊接工装；Step 8: Turn off the heating device to cool down. After cooling, disconnect the water cooling circulation system from the water cooling jacket and the adapter with liquid cooling function from the vacuum platform, and then remove the welding tooling; 步骤9，将焊接工装的封盖切开，取出工件；Step 9: Cut open the cover of the welding tool and remove the workpiece; 步骤10，打磨真空腔体的开口面，使开口面平整，可重复使用焊接工装。Step 10: Polish the opening surface of the vacuum chamber to make it smooth so that the welding tooling can be reused. 6.根据权利要求5所述的一种低成本扩散焊接用工装的使用方法，其特征在于，所述密封焊接采用断弧脉冲电弧焊、激光焊、钨极氩弧焊或冷金属过渡焊接技术。6. The method for using a low-cost diffusion welding tool according to claim 5, wherein the sealing welding adopts broken arc pulse arc welding, laser welding, tungsten inert gas welding or cold metal transfer welding technology. 7.根据权利要求5所述的一种低成本扩散焊接用工装的使用方法，其特征在于，所述加热装置选用成本低廉的气氛炉或马弗炉。7 . The method for using a low-cost diffusion welding tool according to claim 5 , wherein the heating device is a low-cost atmosphere furnace or muffle furnace. 8.根据权利要求5所述的一种低成本扩散焊接用工装的使用方法，其特征在于，所述封盖的切割采用线切割、激光切割或机加工铣削方式。8. The method for using a low-cost diffusion welding tool according to claim 5, wherein the cover is cut by wire cutting, laser cutting or machining and milling.
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