CN117006958B - A method for precise measurement of geometric features of inner surface of small hole with high aspect ratio - Google Patents
A method for precise measurement of geometric features of inner surface of small hole with high aspect ratio Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2408—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
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Abstract
The invention belongs to the technical field of geometric quantity precise measurement based on machine vision, and discloses a method for precisely measuring geometric features of the inner surface of a small hole with a high depth-to-diameter ratio. The method is based on the measuring system of the ring laser, achieves nondestructive measurement of the inner surface of the deep hole, achieves integrated measurement of geometric characteristics such as the size, roundness and straightness surface waviness of the deep hole due to high collimation of the ring laser, processes images in the measuring process, improves accuracy of acquiring information of the inner surface of the deep hole, establishes a complete measuring model in the image restoring process, and restores the images rapidly and accurately.
Description
Technical Field
The invention belongs to the technical field of geometric quantity precise measurement based on machine vision, and particularly relates to a method for precisely measuring geometric features of an inner surface of a small hole with a high depth-to-diameter ratio.
Background
The core equipment in major projects such as nuclear power, energy power, aerospace and the like has the characteristics of high technical content, high manufacturing difficulty and high reliability requirement, and the comprehensive preparation capacity is the centralized representation of comprehensive strength such as national industry, scientific and technological level and the like. The deep hole processing technology has the characteristics of multiple subjects, complex processing environment, high processing difficulty and high processing cost, so the deep hole processing technology has a significant position in the equipment manufacturing industry. The working environment of the parts has the characteristics of high temperature, high pressure and large impact load, if the machining errors of aperture, roundness and straightness are too large during deep hole machining, the service performance of the parts is directly affected, and if the machining errors are serious, the parts are directly disabled and scrapped, the influence on the service performance of the workpiece is extremely remarkable, so that extremely high requirements are put forward on the machining precision and quality of the small-caliber deep hole parts. Meanwhile, the requirements on the detection precision of key geometric parameters such as deep hole diameter, roundness, straightness and the like are also improved. Although the measurement of the outer dimension and the plane dimension has reached the resolution of 1nm or even 0.1nm at present, the measurement relative precision of the dimension in the deep hole is about 0.2% -0.5%. At present, no mature and stable solution exists internationally for measuring any cross section size and shape error of a deep small hole with the diameter of <20mm and the depth-diameter ratio of > 40. The detection of the inner surface of the deep hole part plays a very important role in product quality control and fault diagnosis, so that the research of the small-aperture deep hole multi-geometric measurement integrated method is significant.
Currently, common normal vector detection methods are classified into 2 types, including a contact measurement method and a non-contact measurement method:
The contact measurement method comprises an oscillation scanning detection method, an inner diameter dial indicator measurement method and the like. In 1993, the method for scanning and detecting a workpiece having a sample hole depth of 700 μm and a diameter of 200 to 300 μm by probe oscillation was proposed in the document Vibroscanning Method for Nondestructive Measurement of Small Holes, incorporated by reference in Tokyo university, japan. The oscillator drives the probe to vibrate in the vertical direction of the measured surface according to certain frequency, when the probe is in critical contact with the measured object surface, the loop between the probe and the measured object is connected, and the sensitive circuit is closed, so that the electric signal can be detected. Because the measuring needle continuously oscillates, when the measuring needle approaches the measured object, the turn-on time of the loop is intermittent. In one oscillation period, the time for detecting the signal is determined by the distance between the measuring needle and the measured object, and the shorter the distance is, the longer the on time is.
The non-contact measurement method comprises a laser triangulation method and a halo section method, wherein the middle science is Chao in the document ALaser Triangulation-Based 3D Measurement System for Inner Surface of Deep Holes, the influence caused by assembly errors and refractive distortion is researched Based on the laser triangulation principle, and a flexible laser plane calibration technology Based on binocular vision is provided to accurately obtain the profile characteristics of the section in the deep hole. The optical ring section method is that Tianjin university Su Jie et al researches a detection system suitable for large and medium-sized pipelines, authors project an optical band ring formed by modulation of an optical system onto the inner wall of the pipeline, shoot information of the inner surface through a CCD, and finally analyze gray images of the ring through a PC end, so that the appearance and defect condition of the inner wall can be detected. However, the method needs to have the visual sensor and the measured aperture on the same axis, so that the applicability is low, and in view of the fact that the measurement parameters are single, the measurement data are discontinuous, so that the internal surface parameters need to be measured step by step for multiple times, the problems of complex measurement flow, low measurement efficiency, poor precision and the like exist in the existing measurement method of the geometrical characteristics of the internal surface of the deep hole, and in order to solve the problems, a special precision measurement method for the internal surface of the small hole with high depth-diameter ratio needs to be found.
Disclosure of Invention
Based on the problems, the invention discloses a method for precisely measuring the geometric characteristics of the inner surface of the small hole with the high depth-diameter ratio.
The technical scheme of the invention is as follows:
a quick high-precision measurement method for geometric features of the inner surface of a deep hole comprises the following steps:
step 1, setting up an endoscopic measurement system for obtaining images
The endoscopic measurement system comprises a light source emission module, an inner surface imaging module and an image acquisition module;
the light source emission module consists of point laser and an optical diffraction element, so that the point laser emits collimated ring laser;
The inner surface imaging module consists of a round table type reflecting mirror with the gradient of 50 degrees and a conical reflecting mirror with the upper angle of 40 degrees;
the image acquisition module consists of a geometric reflecting prism with an angle of 45 degrees and a CCD camera vertical to the lower part of the geometric reflecting prism;
The inner surface imaging module, the image acquisition module and the light source emission module are sequentially arranged from left to right and are encapsulated by the glass tube, so that the axes of the round table type reflecting mirror, the conical reflecting mirror and the point laser are overlapped with the axis of the glass tube;
When in measurement, an endoscopic measurement system enters the deep hole and ensures that the axis of the glass tube and the axis of the deep hole are completely overlapped, a light source emission module emits a beam of collimated ring laser, the ring laser enters the inner surface imaging module after passing through the image acquisition module, firstly enters the surface of a round table type reflecting mirror with the angle of 50 degrees, is totally reflected to the inner surface of the deep hole, and is totally reflected again to enter a 40-degree conical reflecting mirror at the inner surface of the deep hole, finally is totally reflected again to exit in parallel at the surface of the conical reflecting mirror, enters a geometric reflecting prism in the image acquisition module, and is vertically redirected by the geometric reflecting prism to enter a CCD camera below the geometric reflecting prism to obtain an image;
step 2, image processing
After the image on the surface of the deep hole is obtained from the CCD camera, due to the influence of the width problem of the annular laser spot and the roughness of the inner surface of the deep hole on the laser reflectivity, halation and dark areas exist in the image obtained in the previous step, the halation and dark areas thicken the laser spot to lead the finally obtained image to be a blurred strip-shaped circle, and the image can reduce the precision of the measurement scheme, so that the obtained image needs to be processed;
step 3, image restoration
In the endoscopic measuring system, the distance from the inner surface of the deep hole to the axis of the deep hole is not directly equal to the distance from one point on the image obtained by the CCD camera to the center of the image along with the repeated reflection of light, so that the distance from the upper point on the image obtained by the CCD camera to the center of the image is substituted into a mathematical model established according to an optical path model to restore the distance from the inner surface of the deep hole to the axis of the deep hole, and the geometric characteristic of the inner surface of the deep hole is further shown;
The geometric characteristics of the inner surface of the deep hole are expressed by the distance R from the inner surface of the deep hole to the axis of the deep hole, the distance R from one point on the image obtained in the CCD camera to the center of the image is expressed, a polar coordinate system is established by taking the center of the image as the polar coordinate center on the image obtained in the CCD camera in the process of restoring the distance from the inner surface of the deep hole to the axis of the deep hole, the numerical value of the distance R from one point on the image obtained in the CCD camera to the center of the image is easily obtained in the interval of [0,2 pi ] in the process of gradually increasing the independent variable theta from 0 to 2 pi according to the numerical value of the independent variable theta, and the mathematical model is expressed as follows:
substituting the distance R from one point on the image obtained in the CCD camera to the center of the image into the mathematical model to obtain the value of the distance R from the inner surface of the deep hole to the axis of the deep hole, and finally completing the measurement.
The annular laser-based measuring system has the advantages that nondestructive measurement of the inner surface of the deep hole is achieved, the integrated measurement of geometric features such as the size, roundness and straightness surface waviness of the deep hole is achieved due to high collimation of the annular laser, the image is processed in the measuring process, the accuracy of acquiring the inner surface information of the deep hole is improved, a complete measuring model is built in the image restoring process, and the image is quickly and accurately restored.
Drawings
Fig. 1 is a diagram of a measuring apparatus.
Fig. 2 is a two-dimensional schematic diagram of an optical path model.
FIG. 3 is a schematic view of the measurement of the inner surface of a deep hole, wherein (a) the inner surface is measured when the inner surface is damaged, and (b) the inner surface is damaged.
Fig. 4 is a diagram of an image processing procedure in which (a) an image is taken by a CCD camera and (b) the processed image.
Fig. 5 is an image restoration flowchart.
Fig. 6 is an optical modeling diagram.
Fig. 7 is a diagram of simulation results of photographed images.
Fig. 8 is a diagram of the image restoration simulation result.
Detailed Description
The following describes the embodiments of the present invention further with reference to the drawings and technical schemes.
A quick high-precision measuring method for profile characteristics of an inner section of a deep hole comprises the following steps:
step 1, setting up an endoscopic measurement system for obtaining images
The endoscopic measurement system comprises a light source emission module, an inner surface imaging module and an image acquisition module;
the light source emission module consists of point laser and an optical diffraction element, so that the point laser emits collimated ring laser;
The inner surface imaging module consists of a round table type reflecting mirror with the gradient of 50 degrees and a conical reflecting mirror with the upper angle of 40 degrees;
the image acquisition module consists of a geometric reflecting prism with an angle of 45 degrees and a CCD camera vertical to the lower part of the geometric reflecting prism;
The inner surface imaging module, the image acquisition module and the light source emission module are sequentially arranged from left to right and are encapsulated by the glass tube, so that the axes of the round table type reflecting mirror, the conical reflecting mirror and the point laser are overlapped with the axis of the glass tube;
When in measurement, an endoscopic measurement system enters the deep hole and ensures that the axis of the glass tube and the axis of the deep hole are completely overlapped, a light source emission module emits a beam of collimated ring laser, the ring laser enters the inner surface imaging module after passing through the image acquisition module, firstly enters the surface of a round table type reflecting mirror with the angle of 50 degrees, is totally reflected to the inner surface of the deep hole, and is totally reflected again to enter a 40-degree conical reflecting mirror at the inner surface of the deep hole, finally is totally reflected again to exit in parallel at the surface of the conical reflecting mirror, enters a geometric reflecting prism in the image acquisition module, and is vertically redirected by the geometric reflecting prism to enter a CCD camera below the geometric reflecting prism to obtain an image;
step 2, image processing
Because of the problem of the width of the ring laser spot and the influence of the geometric features of the inner surface of the measurement target on the laser reflectivity, there are halation, dark areas and nonlinear fluctuations in the image obtained in the above step, and the halation and dark areas thicken the laser spot in the CCD camera, as shown in fig. 4 (a), image processing is required. In this scheme, the edges are extracted using an image processing algorithm, and then fitted using a least squares method to obtain a more accurate image to improve the accuracy of the information to be expressed, the processed image being as shown in fig. 4 (b).
After the image processed in the previous step is obtained, the information carried by the image needs to be restored and expressed by establishing a measurement model so as to obtain the geometrical characteristics of the inner surface of the real deep hole.
Step 3 is explained and illustrated in conjunction with fig. 2 and 5:
The measurement model is shown in the figure, the geometric characteristics of the inner surface of the deep hole mainly comprise roundness and surface waviness, the largest change of the radius of the inner surface of the deep hole represents the roundness, the surface waviness is a measurement unit with microscopic degree larger than the thickness of the surface, the measurement of the roundness and the surface waviness requires the measurement of the radius of each point on the inner surface of the deep hole, the final measurement result is obtained by calculating the difference value of the radius, in the measurement model built at this time, the radius is represented by the distance R from one point on the inner surface of the deep hole to the axis of the deep hole, and how the distance R from one point on the inner surface of the deep hole to the axis of the deep hole is restored according to the distance R obtained in the measurement step 2 is the working key of the step 3.
The relation between R and R is deduced according to a two-dimensional schematic diagram of a measurement model IN fig. 2, wherein PT is an optical ring radius IV, the length of UV EU is known, PIT=40° LEA1=50°, IH is prolonged to intersect PL (light ray), an isosceles triangle ZPN is easily obtained by geometric relation, NS=sin 40°IN, IN=IP-NP=PT/sin 40 ° -NP (PT is the optical ring radius), and isosceles triangle is obtained ZPN;∴NP＝2cos40°ZP;ZP＝ZL+LP LP＝VT+(UV-EA1)∵∠LEA1＝50°LA1＝PT-EU∴EA1＝LA1/tan50°;LA1＝PT-EU ZL＝2MQ/tan80°;VT＝PT/tan40°-IV
So it is finally
It can be seen that mq=r-PT, ns=r, substitution can be obtained:
R is proposed and R obtained from image measurement is substituted into available:
the above calculation model is aimed at the reduction and expression between single points, because the deep hole is a measurement target which can be approximately seen as a cylinder, the reduction of the whole image can be completed by one rotation of the single point, the positive characteristic is suitable for reducing the single point under the condition of polar coordinates, as shown in the reduction process from the point to the circle, after R is acquired from the step 2, an angle is arbitrarily determined as an initial angle, the R corresponding to the angle is calculated, substituted into the calculation model, the R value corresponding to the angle is obtained, the image is marked, the next angle is selected, and the steps are repeated until the image is complete.
Examples
The simulation is performed by using optical software tracepro, and the optical measurement unit is first built according to step 1, and the optical path operation is simulated, as shown in fig. 6.
By utilizing the tracepro ray tracing function, the coordinates of all rays obtained on the CCD camera can be accurately simulated, so that coordinate data inside a measurement target can be restored according to an established mathematical model in the simulation process.
Measuring an established deep hole in the simulation process, placing the established measuring unit into a cylinder, performing ray tracing in tracepro to finally and accurately simulate to obtain the ray coordinates obtained from the CCD camera image in the step 2, obtaining r according to a formula (r= vα 2+β2) from coordinate data obtained from the tracepro simulating the CCD camera, and drawing the r data into a graph according to the angle, wherein the effect is shown in figure 7
Substituting the obtained data into the established mathematical model, restoring the data R which can represent the geometric characteristics of the inner surface of the deep hole, and outputting a complete image according to the restoring flow, wherein the result is shown in fig. 8.
The description of the exemplary embodiments presented above is merely illustrative of the technical solution of the present invention and is not intended to be exhaustive or to limit the invention to the precise form described. Obviously, many modifications and variations are possible in light of the above teaching to those of ordinary skill in the art. The exemplary embodiments were chosen and described in order to explain the specific principles of the invention and its practical application to thereby enable others skilled in the art to understand, make and utilize the invention in various exemplary embodiments and with various alternatives and modifications. It is intended that the scope of the invention be defined by the following claims and their equivalents.
Claims (1)
1. A quick high-precision measurement method for geometric features of the inner surface of a deep hole is characterized by comprising the following steps:
step 1, setting up an endoscopic measurement system for obtaining images
The endoscopic measurement system comprises a light source emission module, an inner surface imaging module and an image acquisition module;
the light source emission module consists of point laser and an optical diffraction element, so that the point laser emits collimated ring laser;
The inner surface imaging module consists of a round table type reflecting mirror with the gradient of 50 degrees and a conical reflecting mirror with the upper angle of 40 degrees;
the image acquisition module consists of a geometric reflecting prism with an angle of 45 degrees and a CCD camera vertical to the lower part of the geometric reflecting prism;
The inner surface imaging module, the image acquisition module and the light source emission module are sequentially arranged from left to right and are encapsulated by the glass tube, so that the axes of the round table type reflecting mirror, the conical reflecting mirror and the point laser are overlapped with the axis of the glass tube;
When in measurement, an endoscopic measurement system enters the deep hole and ensures that the axis of the glass tube and the axis of the deep hole are completely overlapped, a light source emission module emits a beam of collimated ring laser, the ring laser enters the inner surface imaging module after passing through the image acquisition module, firstly enters the surface of a round table type reflecting mirror with the angle of 50 degrees, is totally reflected to the inner surface of the deep hole, and is totally reflected again to enter a 40-degree conical reflecting mirror at the inner surface of the deep hole, finally is totally reflected again to exit in parallel at the surface of the conical reflecting mirror, enters a geometric reflecting prism in the image acquisition module, and is vertically redirected by the geometric reflecting prism to enter a CCD camera below the geometric reflecting prism to obtain an image;
step 2, image processing
After the image processing algorithm is used for extracting the edge of the obtained image, a least square method is used for fitting the edge of the image to obtain a linear circle so as to improve the accuracy of information carried by the image, and more accurate initial data is provided for the restoration of the subsequent image;
step 3, image restoration
In the endoscopic measuring system, the distance from the inner surface of the deep hole to the axis of the deep hole is not directly equal to the distance from one point on the image obtained by the CCD camera to the center of the image along with the repeated reflection of light, so that the distance from the upper point on the image obtained by the CCD camera to the center of the image is substituted into a mathematical model established according to an optical path model to restore the distance from the inner surface of the deep hole to the axis of the deep hole, and the geometric characteristic of the inner surface of the deep hole is further shown;
The geometric characteristics of the inner surface of the deep hole are expressed by the distance R from the inner surface of the deep hole to the axis of the deep hole, the distance R from one point on the image obtained in the CCD camera to the center of the image is expressed, a polar coordinate system is established by taking the center of the image as the polar coordinate center on the image obtained in the CCD camera in the process of restoring the distance from the inner surface of the deep hole to the axis of the deep hole, the numerical value of the distance R from one point on the image obtained in the CCD camera to the center of the image is easily obtained in the interval of [0,2 pi ] in the process of gradually increasing the independent variable theta from 0 to 2 pi according to the numerical value of the independent variable theta, and the mathematical model is expressed as follows:
In the mathematical model, an independent variable R is a value obtained from a CCD camera, PT is the emergent radius of annular laser, IV is the sum of the widths of an imaging cone and a reflecting cone, UV is the width of the reflecting cone, EU is the top radius of the reflecting cone, the distance R from one point on an image obtained in the CCD camera to the center of the image is substituted into the mathematical model, the image is restored according to a designed drawing process, and finally the value of the distance R from the inner surface of a deep hole to the axis of the deep hole is obtained, so that the measurement is finally completed.
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| CN117781909B (en) * | 2024-02-27 | 2024-04-26 | 中北大学 | Deep hole measuring device and measuring method |
| CN117804357B (en) * | 2024-03-01 | 2024-05-14 | 中北大学 | Deep hole detection device and detection method based on laser reflection |
| CN118258327B (en) * | 2024-04-19 | 2025-01-03 | 广东省科学院智能制造研究所 | Nuclear power evaporator tube hole straightness measuring device, system and method |
| CN118089605B (en) * | 2024-04-26 | 2024-06-21 | 北京奥博泰科技有限公司 | Method and system for detecting surface shape of planar glass |
| CN120651125B (en) * | 2025-08-20 | 2025-10-17 | 江苏博兰杰石英科技有限公司 | A laser detection device for detecting the inner diameter of a quartz tube |
| CN121140679B (en) * | 2025-11-19 | 2026-01-30 | 江苏跃翔装备有限公司 | Straightness measuring device is used in tower processing |
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| CN100342207C (en) * | 2004-12-17 | 2007-10-10 | 北京航空航天大学 | Detector for three-dimensional appearance of micro-member through-hole inner surface and its marking and using method |
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| JP5930984B2 (en) * | 2013-02-14 | 2016-06-08 | 学校法人 埼玉医科大学 | Shape measuring device |
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| CN108458658A (en) * | 2018-04-20 | 2018-08-28 | 南京航空航天大学 | A kind of micropore apparatus for measuring three-dimensional profile and method based on illumination reflection model |
| CN113701669A (en) * | 2021-09-26 | 2021-11-26 | 大连工业大学 | Method for quickly and accurately measuring profile characteristics of inner section of deep hole |
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