CN116816647A - Air extraction system and device of air extraction pump - Google Patents
Air extraction system and device of air extraction pump Download PDFInfo
- Publication number
- CN116816647A CN116816647A CN202310869540.2A CN202310869540A CN116816647A CN 116816647 A CN116816647 A CN 116816647A CN 202310869540 A CN202310869540 A CN 202310869540A CN 116816647 A CN116816647 A CN 116816647A
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- China
- Prior art keywords
- pump
- air
- pipeline
- storage tank
- waste discharge
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/16—Filtration; Moisture separation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
- F04B39/123—Fluid connections
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/14—Provisions for readily assembling or disassembling
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressor (AREA)
Abstract
The invention discloses an air extraction system and device of an air extraction pump, comprising a vacuum pipeline, wherein one end of the vacuum pipeline is connected with a filter cartridge, a filter screen plate is arranged in the filter cartridge, a waste discharge pipeline is inlaid at the side part of the filter cartridge, and the bottom end of the waste discharge pipeline is connected with a waste collection storage tank; according to the invention, through the designed vacuum pipeline, the filter cartridge, the filter screen plate, the waste discharge pipeline and the waste collection storage tank, the filter cartridge with the filter screen plate with the included angle of degree is connected between the vacuum pipeline and the air pump, so that sediment generated in the pipeline is intercepted through the filter screen plate in the filter cartridge, and the sediment is sent into the waste collection storage tank through the waste discharge pipeline to be collected in a concentrated manner under the inclination of the included angle of 30 degrees of the filter screen plate, so that the sediment generated in the vacuum pipeline is effectively prevented from entering the pump body to cause damage.
Description
Technical Field
The invention belongs to the technical field of integrated circuit manufacturing, and particularly relates to an air extraction system and an air extraction device of an air extraction pump.
Background
In dry etching technology, generally, vacuum problem is solved by adopting a suction pump for sucking air, specifically, the suction pump is connected with one end of a vacuum tube, the other end of the vacuum tube is connected with an etching reaction cavity, and the vacuum tube is vertically arranged, that is, the suction pump is in through connection with the vacuum tube, the suction pump sucks air from the etching reaction cavity in a vertical suction mode, the suction system of the suction pump and the suction pump have the application number of 201510179466.7, and the suction system of the suction pump comprises: one end of the first vacuum tube is connected with the reaction cavity, the other end of the first vacuum tube is provided with a pressure relief valve, and a first switch valve is arranged on the first vacuum tube; one end of the second vacuum tube is connected with the first vacuum tube; and one end of the third vacuum tube is connected with the other end of the second vacuum tube. When needs clearance, will first ooff valve with the second ooff valve is closed, opens the relief valve lets the air get into in the first vacuum tube, the clearance first vacuum tube can, need not to stop the aspiration pump, also need not to open the reaction chamber, reduced the damage to the aspiration pump and third vacuum tube with the wearing and tearing of aspiration pump junction has improved the life of aspiration pump, nevertheless have following defect:
(1) The air extraction system and the air extraction pump of the air extraction pump can clean the pipeline without stopping, but in actual work, the pipeline is still in a direct communication state, and sediment generated on the inner wall of the pipeline still directly enters the pump body through the pipeline, so that the pump body is damaged.
Disclosure of Invention
The invention aims to provide an air extraction system and an air extraction device of an air extraction pump, which are used for solving the problem that the pump body is damaged due to the fact that pipeline sediments enter the inside of the pump body when the pipeline is not cleaned although the pipeline can be cleaned by the air extraction system and the air extraction device of the air extraction pump in the background art.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides an air extraction system of aspiration pump, includes vacuum pipe, vacuum pipe's one end is connected with the cartridge filter, the inside of cartridge filter is provided with the filter screen board, the lateral part of cartridge filter is inlayed and is had the exhaust pipeline, the bottom of exhaust pipeline is connected with the collection and useless jar of accomodating.
Preferably, the filter screen plate is arranged at an included angle with the horizontal surface of the filter cartridge, and the included angle between the filter screen plate and the horizontal surface of the filter cartridge is 30 degrees.
Preferably, the outer wall of the top end of the waste collection storage tank is provided with external threads, the inner wall of one end of the waste discharge pipeline is provided with internal threads, and the external threads on the waste collection storage tank are connected with the internal threads on the waste discharge pipeline through threads.
Preferably, a sealing gasket is arranged between the waste collection storage tank and the waste discharge pipeline, and the sealing gasket is fixed on a port of the waste discharge pipeline.
Preferably, the sealing gasket is a rubber member.
Preferably, the invention further provides an air pump device, which comprises an air pump main body, wherein the air pump main body is respectively provided with an air inlet and an air outlet, and the air inlet is connected with a filter cylinder of the air pumping system.
Preferably, the air pump body is of a screw pump body structure.
Compared with the prior art, the invention has the beneficial effects that:
(1) Through the vacuum pipeline, the cartridge filter, the filter screen plate, the waste discharge pipeline and the waste collection storage tank of design, the cartridge filter with the included angle degree filter screen plate is connected between the vacuum pipeline and the air pump, the sediment generated in the pipeline is intercepted through the filter screen plate in the cartridge filter, and the sediment is sent into the waste collection storage tank through the waste discharge pipeline to be collected in a concentrated manner under the inclination of the included angle of 30 degrees of the filter screen plate, so that the sediment generated in the vacuum pipeline is effectively prevented from entering the pump body to cause damage, the waste collection storage tank is detachably mounted on the waste discharge pipeline through the designed internal threads and external threads, the waste collection storage tank is convenient to quickly unscrew and treat the waste collection storage tank with the sediment, and the interface of the waste discharge pipeline and the waste collection storage tank is sealed through the designed sealing gasket, so that the air tightness of the whole system is improved.
Drawings
FIG. 1 is a schematic diagram of the pumping system and apparatus of the pump of the present invention;
FIG. 2 is an assembled cross-sectional view of the vacuum line, filter cartridge, waste drain line, and waste collection canister of the present invention;
FIG. 3 is an enlarged view of the invention at A in FIG. 2;
FIG. 4 is an assembled perspective view of the waste conduit, collection canister and filter cartridge of the present invention;
in the figure: 1. a vacuum pipe; 2. an air pump main body; 3. a waste discharge pipe; 4. a waste collection storage tank; 5. an air outlet; 6. an air inlet; 7. a filter cartridge; 8. a filter screen plate; 9. and a sealing gasket.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Examples
Referring to fig. 1 to 4, the present invention provides a technical solution: an air exhaust system and a device of an air exhaust pump comprise a vacuum pipeline 1, one end of the vacuum pipeline 1 is connected with a filter drum 7, a filter screen 8 is arranged in the filter drum 7, a waste discharge pipeline 3 is inlaid at the side part of the filter drum 7, a waste collection storage tank 4 is connected to the bottom end of the waste discharge pipeline 3, a certain included angle is formed between the filter screen 8 and the horizontal surface of the filter drum 7, the filter screen 8, the waste discharge pipeline 3 and the waste collection storage tank 4 are arranged through the designed vacuum pipeline 1, the filter drum 7 with the included angle of 30-DEG filter screen 8 is connected between the vacuum pipeline 1 and the air exhaust pump, the interception of sediment generated in the pipeline through the filter screen 8 in the filter drum 7 is realized, the sediment generated in the filter screen 8 is concentrated and collected through the sediment collection in the waste discharge pipeline 3, the sediment generated in the vacuum pipeline 4 is effectively avoided from entering the pump body to be damaged, the included angle of the horizontal surface of the filter screen 8 and the filter drum 7 is 30 DEG, the outer wall of the top end of the waste collection storage tank 4 is provided with an external thread, one end of the waste discharge pipeline 3 is provided with the internal wall of 30 DEG, the waste collection tank 4 is connected with the seal 9 through the seal 9, the seal 9 is arranged on the whole waste collection tank 4 and the seal 9, the seal is arranged on the seal 9 of the waste collection tank is sealed and the seal 9 is arranged on the seal 9, the seal is arranged on the seal 9 of the seal joint of the waste collection tank, and the seal is sealed up and the seal is arranged on the seal 9 is sealed and the seal joint is sealed and the seal is sealed, the seal gasket 9 is a rubber material member.
In this embodiment, preferably, the present invention further provides an air pump device, which includes an air pump main body 2, where the air pump main body 2 is provided with an air inlet 6 and an air outlet 5, and the air pump main body 2 is designed to provide vacuum suction for the whole air pump system so as to ensure that the system generates strong suction to act on the etching reaction chamber to pump air, and the air inlet 6 is connected with a filter cartridge 7 of the air pump system, and the air pump main body 2 is of a screw pump body structure.
The working principle and the using flow of the invention are as follows: according to the invention, the filter cylinder 7 provided with the filter screen plate 8 with an included angle of 30 degrees is connected between the vacuum pipeline 1 and the air pump, wherein the vacuum pipeline 1 is connected to the etching reaction cavity, the air pump main body 2 provides vacuum suction for the whole air pumping system at the moment so as to ensure that the system generates strong suction to act on the etching reaction cavity for air pumping, in the air pumping process, as gas is conveyed to the filter cylinder 7 through the vacuum pipeline 1, sediment generated in the vacuum pipeline is intercepted through the filter screen plate 8 in the filter cylinder 7 at the moment, and is sent into the waste collection storage tank 4 through the waste discharge pipeline 3 under the inclination of the included angle of 30 degrees of the filter screen plate 8 for concentrated collection of the sediment, so that the sediment generated in the vacuum pipeline is effectively prevented from entering the pump body to cause damage, and the sediment collected in the interior can be poured out only by screwing the waste collection storage tank 4 out in the later stage when the sediment is discharged.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. An air extraction system of an air extraction pump, comprising a vacuum pipeline (1), characterized in that: one end of vacuum pipeline (1) is connected with cartridge filter (7), the inside of cartridge filter (7) is provided with filter screen (8), the lateral part of cartridge filter (7) is inlayed and is had waste discharge pipeline (3), the bottom of waste discharge pipeline (3) is connected with collection useless storage tank (4).
2. An aspiration system of an aspiration pump according to claim 1 wherein: the horizontal plane of filter screen plate (8) and cartridge filter (7) personally submits certain contained angle setting, and the horizontal plane contained angle of filter screen plate (8) and cartridge filter (7) is 30 degrees.
3. An aspiration system of an aspiration pump according to claim 1 wherein: the waste collection and storage tank is characterized in that an external thread is arranged on the outer wall of the top end of the waste collection and storage tank (4), an internal thread is arranged on the inner wall of one end of the waste discharge pipeline (3), and the external thread on the waste collection and storage tank (4) is connected with the internal thread on the waste discharge pipeline (3) through threads.
4. A pumping system of a pump as defined in claim 3, wherein: a sealing gasket (9) is arranged between the waste collection and storage tank (4) and the waste discharge pipeline (3), and the sealing gasket (9) is fixed on a port of the waste discharge pipeline (3).
5. An aspiration system of an aspiration pump as in claim 4 wherein: the sealing gasket (9) is a rubber member.
6. The invention also provides an air pump device, which is characterized in that: the air pump comprises an air pump main body (2), wherein an air inlet (6) and an air outlet (5) are respectively arranged on the air pump main body (2), and the air inlet (6) is connected with the air pumping system as claimed in any one of claims 1-5.
7. An aspiration pump device in accordance with claim 6, wherein: the air pump main body (2) is of a screw pump body structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310869540.2A CN116816647A (en) | 2023-07-17 | 2023-07-17 | Air extraction system and device of air extraction pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310869540.2A CN116816647A (en) | 2023-07-17 | 2023-07-17 | Air extraction system and device of air extraction pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116816647A true CN116816647A (en) | 2023-09-29 |
Family
ID=88116666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310869540.2A Pending CN116816647A (en) | 2023-07-17 | 2023-07-17 | Air extraction system and device of air extraction pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116816647A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102032141A (en) * | 2010-11-30 | 2011-04-27 | 浙江大学 | Vertical non-oil-contamination energy-saving vacuum pump |
| ITMI20130565A1 (en) * | 2013-04-10 | 2014-10-11 | Ugo Mancini | ADAPTED SYSTEM FOR THE MANAGEMENT OF CHEMOTHERAPIC DRUGS AND WASTE DERIVING FROM THEIR USE |
| CN214944421U (en) * | 2021-04-25 | 2021-11-30 | 山东鼎安检测技术有限公司 | Device with water prevention and control and ventilation safety functions for coal mine |
| CN114288793A (en) * | 2021-12-28 | 2022-04-08 | 上海华力微电子有限公司 | Dust collection device and vacuum-pumping system |
-
2023
- 2023-07-17 CN CN202310869540.2A patent/CN116816647A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102032141A (en) * | 2010-11-30 | 2011-04-27 | 浙江大学 | Vertical non-oil-contamination energy-saving vacuum pump |
| ITMI20130565A1 (en) * | 2013-04-10 | 2014-10-11 | Ugo Mancini | ADAPTED SYSTEM FOR THE MANAGEMENT OF CHEMOTHERAPIC DRUGS AND WASTE DERIVING FROM THEIR USE |
| CN214944421U (en) * | 2021-04-25 | 2021-11-30 | 山东鼎安检测技术有限公司 | Device with water prevention and control and ventilation safety functions for coal mine |
| CN114288793A (en) * | 2021-12-28 | 2022-04-08 | 上海华力微电子有限公司 | Dust collection device and vacuum-pumping system |
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