CN116203821A - Time-to-digital converter system based on gating single photon counting - Google Patents
Time-to-digital converter system based on gating single photon counting Download PDFInfo
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Abstract
本公开提供了一种基于门控单光子计数的时间数字转换器系统,包括:锁相环,用于将输入的系统时钟信号倍频产生第一时钟信号;全局门控信号生成模块,响应于接收第一时钟信号生成M个第一门控信号和激光同步触发信号,第一门控信号被配置成与下一个第一门控信号交叠P个第一时钟信号的周期,每个第一门控信号的信号宽度为第一时钟信号的周期的M倍;激光同步触发信号适用于控制第一激光脉冲发出的时间,其中M为大于1的正整数,P为大于等于1的正整数;时间数字转换器阵列,适用于根据第一门控信号和第一时钟信号对第二激光脉冲信号进行门控计数,得到单光子在时间上的第一统计分布;第一激光脉冲信号经目标反射后得到第二激光脉冲信号。
The present disclosure provides a time-to-digital converter system based on gated single photon counting, including: a phase-locked loop for multiplying the input system clock signal to generate a first clock signal; a global gating signal generation module responsive to Receive the first clock signal to generate M first gating signals and laser synchronous trigger signals, the first gating signal is configured to overlap with the next first gating signal P periods of the first clock signal, each first The signal width of the gating signal is M times the period of the first clock signal; the laser synchronous trigger signal is suitable for controlling the time when the first laser pulse is emitted, wherein M is a positive integer greater than 1, and P is a positive integer greater than or equal to 1; The time-to-digital converter array is suitable for gating and counting the second laser pulse signal according to the first gating signal and the first clock signal to obtain the first statistical distribution of single photons in time; the first laser pulse signal is reflected by the target Then the second laser pulse signal is obtained.
Description
技术领域technical field
本公开涉及基于单光子雪崩二极管的直接飞行时间测量三维成像领域技术领域,尤其涉及一种基于门控单光子计数的时间数字转换器系统。The present disclosure relates to the technical field of direct time-of-flight measurement three-dimensional imaging based on single-photon avalanche diodes, and in particular to a time-to-digital converter system based on gated single-photon counting.
背景技术Background technique
三维成像可用于物体识别,行为识别,场景建模等应用。目前常用的3D成像技术有结构光、双目立体视觉和飞行时间(TOF)测量等。相比于传统的三维成像方式,如结构光,双目视觉等,直接计算光源发出的激光脉冲到传感器探测到反射信号的时间差的直接飞行时间测量(D-TOF)技术有着巨大的优势。基于飞行时间原理的图像传感器技术由于其在人脸识别、车载雷达、3-D游戏等领域的应用而备受关注,并随着CMOS技术的推动逐渐向着低成本、高性能的方向发展。3D imaging can be used for object recognition, behavior recognition, scene modeling and other applications. Currently commonly used 3D imaging technologies include structured light, binocular stereo vision, and time-of-flight (TOF) measurement. Compared with traditional three-dimensional imaging methods, such as structured light, binocular vision, etc., direct time-of-flight (D-TOF) technology, which directly calculates the time difference between the laser pulse emitted by the light source and the reflected signal detected by the sensor, has a huge advantage. Image sensor technology based on the time-of-flight principle has attracted much attention due to its applications in face recognition, vehicle radar, 3-D games and other fields, and is gradually developing towards low-cost and high-performance with the promotion of CMOS technology.
直接飞行时间的测量通常需要使用时间-数字转换器(TDC),传统的时间数字转换器通常为单事件触发模式,即一次测量只能记录一次事件,转换效率低,且会导致严重的堆叠失真效应,影响测量精度;由于TDC电路本身不具有区分信号与噪声的能力,且探测到的激光信号回波在时间上的分布具有随机性,实际应用中,通常会进行多次测量,并通过时间相关单光子计数(TCSPC)的技术对测量结果进行累加统计,生成统计直方图,以得到有效的飞行时间。为了减小统计过程中,芯片的输入输出(IO)对数据传输的限制,并降低IO上由数据传输造成的大功耗,将统计直方图集成在传感器内部是一种有效的解决方案。The measurement of direct time-of-flight usually requires the use of a time-to-digital converter (TDC). The traditional time-to-digital converter is usually in a single-event trigger mode, that is, only one event can be recorded for a measurement, the conversion efficiency is low, and it will cause serious stacking distortion. effect, which affects the measurement accuracy; since the TDC circuit itself does not have the ability to distinguish signal from noise, and the distribution of detected laser signal echoes in time is random, in practical applications, multiple measurements are usually performed and passed through time Correlative Single Photon Counting (TCSPC) technology accumulates and counts the measurement results and generates a statistical histogram to obtain an effective time-of-flight. In order to reduce the limitation of the input and output (IO) of the chip on data transmission during the statistical process, and reduce the large power consumption caused by data transmission on the IO, it is an effective solution to integrate the statistical histogram inside the sensor.
然而在现有技术中,对时间数字转换器的研究存在以下不足:TDC转换效率低,测量过程中,大量输入无法被有效记录,以及片上直方图统计需要大量的存储单元,面积开销大,不适用于大阵列应用等。However, in the prior art, the research on time-to-digital converters has the following deficiencies: TDC conversion efficiency is low, a large number of inputs cannot be effectively recorded during the measurement process, and on-chip histogram statistics require a large number of memory units, which require a large area overhead and are not Suitable for large array applications etc.
发明内容Contents of the invention
为解决现有技术中的技术问题的至少之一,本公开提供一种基于门控单光子技术的时间数字转换器系统,在测量中,通过将门控信号与下一个门控信号交叠,避免了门控信号边缘处的信号损失,以使得输入脉冲可以被有效记录,提高了时间数字转换器的转换效率。In order to solve at least one of the technical problems in the prior art, the present disclosure provides a time-to-digital converter system based on gated single photon technology. During measurement, by overlapping the gating signal with the next gating signal, avoiding The signal loss at the edge of the gating signal is eliminated, so that the input pulse can be effectively recorded, and the conversion efficiency of the time-to-digital converter is improved.
本公开实施例的一个方面,提供了一种基于门控单光子计数的时间数字转换器系统,包括:锁相环、全局门控信号生成模块和时间数字转换器阵列。锁相环用于将输入的系统时钟信号倍频产生第一时钟信号。全局门控信号生成模块响应于接收所述第一时钟信号生成M个第一门控信号和激光同步触发信号,所述第一门控信号被配置成与下一个第一门控信号交叠P个所述第一时钟信号的周期,以及使每个所述第一门控信号的信号宽度为第一时钟信号的周期的M倍;所述激光同步触发信号适用于控制第一激光脉冲发出的时间,以获得激光发出的时刻信息,其中M为大于1的正整数,P为大于等于1的正整数。时间数字转换器阵列,包括多个时间数字转换器,每个所述时间数字转换器均适用于根据第一门控信号和所述第一时钟信号对第二激光脉冲信号进行门控计数,以便得到单光子在时间上的第一统计分布。其中,所述第一激光脉冲信号经目标反射后得到所述第二激光脉冲信号。An aspect of the embodiments of the present disclosure provides a time-to-digital converter system based on gated single photon counting, including: a phase-locked loop, a global gating signal generation module, and a time-to-digital converter array. The phase-locked loop is used to multiply the frequency of the input system clock signal to generate the first clock signal. The global gating signal generation module generates M first gating signals and laser synchronization trigger signals in response to receiving the first clock signal, and the first gating signal is configured to overlap P with the next first gating signal period of the first clock signal, and make the signal width of each of the first gating signals M times that of the period of the first clock signal; the laser synchronous trigger signal is suitable for controlling the emission of the first laser pulse Time to obtain the time information of laser emission, where M is a positive integer greater than 1, and P is a positive integer greater than or equal to 1. an array of time-to-digital converters, comprising a plurality of time-to-digital converters, each of said time-to-digital converters being adapted to gate and count a second laser pulse signal based on a first gating signal and said first clock signal, so that The first statistical distribution of single photons in time is obtained. Wherein, the second laser pulse signal is obtained after the first laser pulse signal is reflected by the target.
根据本公开的实施例,每个所述时间数字转换器均包括:缓存模块和可配置计数器阵列。缓存模块响应于所述第一时钟信号的输入将输入的M个第一门控信号进行重新定时以得到M个第二门控信号。可配置计数器阵列包括M个计数器组件,每个所述计数器组件适用于接收一个所述第二门控信号对所述第二激光脉冲信号进行门控计数。According to an embodiment of the present disclosure, each time-to-digital converter includes: a buffer module and a configurable counter array. In response to the input of the first clock signal, the cache module retimes the input M first gating signals to obtain M second gating signals. The configurable counter array includes M counter components, and each of the counter components is adapted to receive one of the second gating signals and perform gating and counting of the second laser pulse signals.
根据本公开的实施例,每个所述时间数字转换器阵列还包括:According to an embodiment of the present disclosure, each of the time-to-digital converter arrays further includes:
寻峰模块,用于对所述计数器阵列得到的单光子数的数值进行比较,得到最大光子数值所在的门控信号的地址。The peak-seeking module is used to compare the values of the number of single photons obtained by the counter array to obtain the address of the gating signal where the maximum value of photons is located.
根据本公开的实施例,每个所述时间数字转换器还包括:数字控制模块、第一模式门控信号生成模块和多级门控同步模块。数字控制模块用于根据将外部输入的采样模式控制指令生成模式选择信号。第一模式门控信号生成模块响应于所述模式选择信号根据第一最大门控信号生成2M个第三门控信号,每个所述第三门控信号宽度为M/8个所述第一时钟信号的周期,相邻的第三门控信号交叠P/2的第一时钟的周期,其中,第一最大门控信号是由所述寻峰模块对所述第一统计分布进行比较得到的。多级门控同步模块适用于响应于所述模式选择信号,根据所述第一时钟信号将所述第二门控信号和所述第三门控信号进行时钟重新定时以使所述第三门控信号的上升沿与所述第二门控信号的上升沿对齐。其中,所述计数器组件适用于根据对齐后的第三门控信号对第二激光脉冲信号进行计数,得到第二统计分布。According to an embodiment of the present disclosure, each of the time-to-digital converters further includes: a digital control module, a first mode gating signal generating module, and a multi-level gating synchronization module. The digital control module is used for generating a mode selection signal according to an externally input sampling mode control instruction. The first mode gating signal generation module responds to the mode selection signal and generates 2M third gating signals according to the first maximum gating signal, and the width of each of the third gating signals is M/8 of the first The cycle of the clock signal, the adjacent third gating signal overlaps the cycle of the first clock of P/2, wherein the first maximum gating signal is obtained by comparing the first statistical distribution by the peak-finding module of. The multi-level gating synchronization module is adapted to reclock the second gating signal and the third gating signal according to the first clock signal in response to the mode selection signal so that the third gate The rising edge of the control signal is aligned with the rising edge of the second gating signal. Wherein, the counter component is suitable for counting the second laser pulse signal according to the aligned third gating signal to obtain the second statistical distribution.
根据本公开的实施例,上述的时间数字转换器系统,还包括:延迟锁相环,响应于接收所述第一时钟信号将所述第一时钟信号进行多级延时,以输出用于控制延时单元进行延时操作的控制电压;According to an embodiment of the present disclosure, the above-mentioned time-to-digital converter system further includes: a delay-locked loop, in response to receiving the first clock signal, performing multi-stage delay on the first clock signal to output The control voltage for the delay unit to perform delay operation;
每个所述时间数字转换器还包括:第二模式门控信号生成模块,响应于接收所述模式选择信号将第二最大门控信号输入至4M级延长复制链电路,所述4M级延长复制链电路在所述控制电压的作用下输出4M个延迟信号,4M个延迟信号的上升沿对第二激光脉冲信号进行采样,检测第二激光脉冲信号上升沿所在位置,并相应生成4M个第四门控信号,其中,第二最大门控信号是由所述寻峰模块对所述第二统计分布进行比较得到的。其中,所述计数器组件适用于根据第四门控信号配合所述延迟信号的上升沿进行计数,以得到第三统计分布。Each of the time-to-digital converters also includes: a second mode gating signal generation module, which inputs a second maximum gating signal to a 4M-level extended copy chain circuit in response to receiving the mode selection signal, and the 4M-level extended copy chain circuit The chain circuit outputs 4M delayed signals under the action of the control voltage, the rising edges of the 4M delayed signals sample the second laser pulse signal, detect the position of the rising edge of the second laser pulse signal, and generate 4M fourth laser pulse signals accordingly A gating signal, wherein the second maximum gating signal is obtained by comparing the second statistical distribution by the peak finding module. Wherein, the counter component is adapted to count according to the fourth gating signal and the rising edge of the delay signal, so as to obtain the third statistical distribution.
根据本公开的实施例,所述多级门控同步模块还适用于根据所述模式选择信号、所述第二门控信号、所述第三门控信号和所述第四门控信号生成有效计数门控信号;According to an embodiment of the present disclosure, the multi-level gating synchronization module is further adapted to generate a valid count gate signal;
每个所述计数器组件包括:第一数据选择器、多个计数器以及多个第二数据选择器。第一数据选择器被配置为接收所述模式选择信号以选择计数脉冲信号,所述计数脉冲信号包括所述第二激光脉冲信号或所述延迟信号。多个计数器被配置为结合所述有效计数门控信号和所述计数脉冲信号对光子进行计数。每个所述第二数据选择器的输入端分别与一个所述计数器的输出端和所述第一数据选择器的输出端连接,该第二数据选择器的输出端与下一个计数器的输入端连接,结合所述模式选择信号将所述触发脉冲信号输入到下一个计数器。Each of the counter components includes: a first data selector, a plurality of counters and a plurality of second data selectors. The first data selector is configured to receive the mode selection signal to select a count pulse signal including the second laser pulse signal or the delay signal. A plurality of counters are configured to count photons in combination with the valid count gate signal and the count pulse signal. The input end of each of the second data selectors is respectively connected with the output end of one of the counters and the output end of the first data selector, and the output end of the second data selector is connected with the input end of the next counter connected, the trigger pulse signal is input to the next counter in combination with the mode selection signal.
根据本公开的实施例,每个所述计数器均包括:多个计数D触发器喝计数数据选择器。首个计数D触发器的时钟信号输入端被配置为连接所述第一数据选择器的输出端,以接收所述计数脉冲信号。计数数据选择器根据所述计数类型信号将第一计数D触发器的第一输出端或第二输出端的输出信号作为第一计数D触发器的数据输入信号,其他计数D触发器的数据输入端分别接收各自第二输出端的输出信号。其中,前一个计数D触发器的第二输出端连接下一个计数D触发器的时钟信号输入端,第一个计数D触发器的输出端输出计数值的最低位,最后一个计数D触发器的输出端输出计数值的最高位。According to an embodiment of the present disclosure, each of the counters includes: a plurality of counting D flip-flops and a counting data selector. The clock signal input end of the first counting D flip-flop is configured to be connected to the output end of the first data selector to receive the counting pulse signal. The counting data selector uses the output signal of the first output terminal or the second output terminal of the first counting D flip-flop as the data input signal of the first counting D flip-flop according to the counting type signal, and the data input terminals of other counting D flip-flops The output signals of the respective second output terminals are respectively received. Wherein, the second output end of the previous counting D flip-flop is connected to the clock signal input end of the next counting D flip-flop, the output end of the first counting D flip-flop outputs the lowest bit of the count value, and the last counting D flip-flop The output terminal outputs the most significant bit of the count value.
根据本公开的实施例,每个所述时间数字转换器还包括:数据读出模块,适用于根据所述模式选择信号,将所述计数器组件生成的计数值或寻峰模块生成的峰值地址读出数据。According to an embodiment of the present disclosure, each of the time-to-digital converters further includes: a data readout module, adapted to read the count value generated by the counter component or the peak address generated by the peak-seeking module according to the mode selection signal out the data.
根据本公开的实施例,所述全局门控信号生成模块包括:分频单元、生成单元和激光同步单元。分频单元适用于将所述第一时钟信号分频得到第三时钟信号。生成单元适用于根据所述第三时钟信号和第一时钟信号生成多个第一门控信号,所述生成单元包括分别设置在输出端的M个生成D触发器和M个生成或门,以使得所述第一门控信号与下一个第一门控信号交叠P个所述第一时钟信号周期。激光同步单元适用于在所述第一门控信号与所述第一时钟信号的作用下,发射激光同步触发信号。According to an embodiment of the present disclosure, the global gating signal generation module includes: a frequency division unit, a generation unit and a laser synchronization unit. The frequency division unit is adapted to divide the frequency of the first clock signal to obtain a third clock signal. The generating unit is adapted to generate a plurality of first gating signals according to the third clock signal and the first clock signal, and the generating unit includes M generating D flip-flops and M generating OR gates respectively arranged at the output terminals, so that The first gating signal overlaps with the next first gating signal by P periods of the first clock signal. The laser synchronization unit is adapted to emit a laser synchronization trigger signal under the action of the first gating signal and the first clock signal.
根据本公开的实施例,上述的时间数字转换器系统,还包括:时钟树,适用于将所述锁相环生成的第一时钟信号和所述全局门控信号生成的第一门控信号分别发送至每个时间数字转换器。According to an embodiment of the present disclosure, the above-mentioned time-to-digital converter system further includes: a clock tree, adapted to convert the first clock signal generated by the phase-locked loop and the first gating signal generated by the global gating signal to sent to each time-to-digital converter.
根据本公开的实施例,采用本公开提供一种基于门控单光子技术的时间数字转换器系统,在测量中,通过将门控信号与下一个门控信号交叠,避免了门控信号边缘处的信号损失,以使得输入脉冲可以被有效记录,提高了时间数字转换器的转换效率。According to an embodiment of the present disclosure, the present disclosure provides a time-to-digital converter system based on gated single-photon technology. In the measurement, by overlapping the gating signal with the next gating signal, the edge of the gating signal is avoided. signal loss, so that the input pulse can be effectively recorded, improving the conversion efficiency of the time-to-digital converter.
附图说明Description of drawings
图1示意性示出了根据本公开实施例的基于门控单光子技术的时间数字转换器系统的测量原理图;FIG. 1 schematically shows a measurement principle diagram of a time-to-digital converter system based on gated single photon technology according to an embodiment of the present disclosure;
图2示意性示出了根据本公开实施例的基于门控单光子技术的时间数字转换器系统的系统图;2 schematically shows a system diagram of a time-to-digital converter system based on gated single photon technology according to an embodiment of the present disclosure;
图3示意性示出了根据本公开示意性实施例的第一门控信号和第二门控信号在第一时钟下的脉冲时序图;FIG. 3 schematically shows a pulse timing diagram of a first gating signal and a second gating signal under a first clock according to an exemplary embodiment of the present disclosure;
图4示意性示出了根据本公开示意性实施例的缓存模块和数字控制模块的电路图;Fig. 4 schematically shows a circuit diagram of a buffer module and a digital control module according to an exemplary embodiment of the present disclosure;
图5示意性示出了根据本公开示意性实施例的第一模式门控信号生成模块的电路图;Fig. 5 schematically shows a circuit diagram of a first mode gating signal generation module according to an exemplary embodiment of the present disclosure;
图6示意性示出了根据本公开示意性实施例的第二模式门控信号生成模块的电路图;Fig. 6 schematically shows a circuit diagram of a second mode gating signal generation module according to an exemplary embodiment of the present disclosure;
图7示意性示出了根据本公开示意性实施例的第三统计分布的统计脉冲时序图;Fig. 7 schematically shows a statistical pulse timing diagram of a third statistical distribution according to an exemplary embodiment of the present disclosure;
图8示意性示出了根据本公开示意性实施例的多级门控同步模块的电路图;Fig. 8 schematically shows a circuit diagram of a multi-level gating synchronization module according to an exemplary embodiment of the present disclosure;
图9示意性示出了根据本公开示意性实施例的计数器组件的电路图;Fig. 9 schematically shows a circuit diagram of a counter assembly according to an exemplary embodiment of the present disclosure;
图10示意性示出了根据本公开示意性实施例的数据读出模块的电路图;Fig. 10 schematically shows a circuit diagram of a data readout module according to an exemplary embodiment of the present disclosure;
图11示意性示出了根据本公开示意性实施例的全局门控信号生成模块的电路图;以及Fig. 11 schematically shows a circuit diagram of a global gating signal generation module according to an exemplary embodiment of the present disclosure; and
图12示意性示出了根据本公开示意性实施例的统计分布图。Fig. 12 schematically shows a statistical distribution diagram according to an exemplary embodiment of the present disclosure.
附图标记说明:Explanation of reference signs:
1-锁相环;1 - PLL;
2-全局门控信号生成模块;2-Global gating signal generation module;
21-分频单元;21-frequency division unit;
22-生成单元;22 - generating unit;
23-激光同步单元;23 - laser synchronization unit;
3-时间数字转换器阵列;3 - Time-to-digital converter array;
31-缓存模块;31-cache module;
32-可配置计数器阵列;32 - configurable counter array;
33-寻峰模块;33-peak finding module;
34-第一模式门控信号生成模块;34-the first mode gating signal generating module;
35-多级门控同步模块;35-Multi-level gating synchronization module;
36-第二模式门控信号生成模块;36-the second mode gating signal generating module;
361-延长复制链电路;361-extended copy chain circuit;
37-数据读出模块;37-data readout module;
38-数字控制模块;38 - digital control module;
4-延迟锁相环;以及4- Delay locked loop; and
5-时钟树。5- Clock tree.
具体实施方式Detailed ways
为使本公开的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本公开作进一步的详细说明。但是,本公开能够以不同形式实施,而不应当解释为局限于这里提出的实施例。相反地,提供这些实施例将使公开彻底和完全,并且将本公开的范围完全地传递给本领域技术人员。在附图中,为了清楚,层和区的尺寸以及相对尺寸可能被夸大,自始至终相同附图标记表示相同元件。In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. However, this disclosure may be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity, and like reference numerals designate like elements throughout.
以下,将参照附图来描述本公开的实施例。但是应该理解,这些描述只是示例性的,而并非要限制本公开的范围。在下面的详细描述中,为便于解释,阐述了许多具体的细节以提供对本公开实施例的全面理解。然而,明显地,一个或多个实施例在没有这些具体细节的情况下也可以被实施。此外,在以下说明中,省略了对公知结构和技术的描述,以避免不必要地混淆本公开的概念。Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. It should be understood, however, that these descriptions are exemplary only, and are not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concepts of the present disclosure.
在此使用的术语仅仅是为了描述具体实施例,而并非意在限制本公开。在此使用的术语“包括”、“包含”等表明了所述特征、步骤、操作和/或部件的存在,但是并不排除存在或添加一个或多个其他特征、步骤、操作或部件。The terminology used herein is for the purpose of describing particular embodiments only, and is not intended to be limiting of the present disclosure. The terms "comprising", "comprising", etc. used herein indicate the presence of stated features, steps, operations and/or components, but do not exclude the presence or addition of one or more other features, steps, operations or components.
在此使用的所有术语(包括技术和科学术语)具有本领域技术人员通常所理解的含义,除非另外定义。应注意,这里使用的术语应解释为具有与本说明书的上下文相一致的含义,而不应以理想化或过于刻板的方式来解释。All terms (including technical and scientific terms) used herein have the meaning commonly understood by one of ordinary skill in the art, unless otherwise defined. It should be noted that the terms used herein should be interpreted to have a meaning consistent with the context of this specification, and not be interpreted in an idealized or overly rigid manner.
为便于本领域技术人员理解本公开技术方案,现对如下技术术语进行解释说明。In order to facilitate those skilled in the art to understand the technical solution of the present disclosure, the following technical terms are now explained.
在使用类似于“A、B和C等中至少一个”这样的表述的情况下,一般来说应该按照本领域技术人员通常理解该表述的含义来予以解释(例如,“具有A、B和C中至少一个的系统”应包括但不限于单独具有A、单独具有B、单独具有C、具有A和B、具有A和C、具有B和C、和/或具有A、B、C的系统等)。在使用类似于“A、B或C等中至少一个”这样的表述的情况下,一般来说应该按照本领域技术人员通常理解该表述的含义来予以解释(例如,“具有A、B或C中至少一个的系统”应包括但不限于单独具有A、单独具有B、单独具有C、具有A和B、具有A和C、具有B和C、和/或具有A、B、C的系统等)。Where expressions such as "at least one of A, B, and C, etc." are used, they should generally be interpreted as those skilled in the art would normally understand the expression (for example, "having A, B, and C A system of at least one of "shall include, but not be limited to, systems with A alone, B alone, C alone, A and B, A and C, B and C, and/or A, B, C, etc. ). Where expressions such as "at least one of A, B, or C, etc." are used, they should generally be interpreted as those skilled in the art would normally understand the expression (for example, "having A, B, or C A system of at least one of "shall include, but not be limited to, systems with A alone, B alone, C alone, A and B, A and C, B and C, and/or A, B, C, etc. ).
图1示意性示出了根据本公开实施例的基于门控单光子技术的时间数字转换器系统的测量原理图。FIG. 1 schematically shows a measurement principle diagram of a time-to-digital converter system based on gated single photon technology according to an embodiment of the present disclosure.
如图1所示,激光器响应于发射信号发出的第一激光脉冲。第一激光脉冲到目标的距离为D,激光器在START时刻发射第一脉冲激光,第一脉冲激光经目标反射后,在STOP时刻经探测器探测到反射激光信号,从START时刻到STOP时刻的时间差为第一激光的传播时间为t。反射激光信号经过外置像素阵列转换后得到第二脉冲信号,第二脉冲信号为电学脉冲信号。图1中TDC表示时间数字转换器系统。As shown in Figure 1, the laser emits a first laser pulse in response to a transmit signal. The distance from the first laser pulse to the target is D. The laser emits the first pulse laser at the START moment. After the first pulse laser is reflected by the target, the reflected laser signal is detected by the detector at the STOP moment. The time difference from the START moment to the STOP moment The travel time of the first laser is t. The reflected laser signal is converted by an external pixel array to obtain a second pulse signal, and the second pulse signal is an electrical pulse signal. TDC in Fig. 1 represents a time-to-digital converter system.
在一种示意性的实施例中,外置像素阵列为雪崩二极管阵列(SPADs)。In an exemplary embodiment, the external pixel arrays are avalanche diode arrays (SPADs).
时间数字转换器系统TDC根据检测到的第二脉冲信号,配合激光的传播时间t,得到光子在时间上的统计分布直方图。The time-to-digital converter system TDC obtains the statistical distribution histogram of photons in time according to the detected second pulse signal and the propagation time t of the laser.
图2示意性示出了根据本公开实施例的基于门控单光子技术的时间数字转换器系统的系统图。图3示意性示出了根据本公开示意性实施例的第一门控信号和第二门控信号在第一时钟下的脉冲时序图。FIG. 2 schematically shows a system diagram of a time-to-digital converter system based on gated single photon technology according to an embodiment of the present disclosure. Fig. 3 schematically shows a pulse timing diagram of a first gating signal and a second gating signal under a first clock according to an exemplary embodiment of the present disclosure.
本公开的一个方面,提供一种基于门控单光子计数的时间数字转换器系统,如图2所示,包括:锁相环1、全局门控信号生成模块2以及时间数字转换器阵列3。锁相环1用于将输入的系统时钟信号倍频产生第一时钟信号。全局门控信号生成模块2响应于接收第一时钟信号生成M个第一门控信号和激光同步触发信号,第一门控信号被配置成与下一个第一门控信号交叠P个第一时钟信号的周期,以及使每个第一门控信号的信号宽度为第一时钟信号的周期的M倍。激光同步触发信号适用于控制第一激光脉冲发出的时间,以获得激光发出的时刻信息,其中M为大于1的正整数,P为大于等于1的正整数。时间数字转换器阵列3包括多个时间数字转换器,每个时间数字转换器均适用于根据第一门控信号和第一时钟信号对第二激光脉冲信号SiPM进行门控计数,以便得到单光子在时间上的第一统计分布。其中,第一激光脉冲信号经目标反射后得到第二激光脉冲信号SiPM。One aspect of the present disclosure provides a time-to-digital converter system based on gated single photon counting, as shown in FIG. The phase-locked
根据本公开的实施例,采用本公开提供一种基于门控单光子技术的时间数字转换器系统,在测量中,通过将门控信号与下一个门控信号交叠,避免了门控信号边缘处的信号损失,以得到完整的回波信号,使得输入脉冲可以被有效记录,提高了时间数字转换器的转换效率。According to an embodiment of the present disclosure, the present disclosure provides a time-to-digital converter system based on gated single-photon technology. In the measurement, by overlapping the gating signal with the next gating signal, the edge of the gating signal is avoided. The signal loss is reduced to obtain a complete echo signal, so that the input pulse can be effectively recorded, and the conversion efficiency of the time-to-digital converter is improved.
根据本公开的实施例,在电子电路中,产生的输出信号频率是输入信号频率的整数倍称为倍频。According to an embodiment of the present disclosure, in an electronic circuit, the frequency of the generated output signal is an integer multiple of the frequency of the input signal, which is called frequency multiplication.
在一种示意性的实施例中,锁相环1将输入的系统时钟信号4倍频产生频率为系统时钟4倍的第一时钟信号。In an exemplary embodiment, the
在一种示意性的实施例中,锁相环将输入的系统时钟信号8倍频产生频率为系统时钟8倍的第一时钟信号。In an exemplary embodiment, the phase-locked loop multiplies the frequency of the input system clock signal by 8 to generate the first clock signal whose frequency is 8 times that of the system clock.
根据本公开的实施例,激光器响应于激光同步触发信号上升沿的时刻发出第一激光脉冲信号。According to an embodiment of the present disclosure, the laser emits a first laser pulse signal in response to a rising edge of the laser synchronization trigger signal.
根据本公开的实施例,外部探测器检测到的经目标反射后的第一激光脉冲信号,经过外置像素阵列转换后得到的第二脉冲信号,第二脉冲信号为电学脉冲信号。According to an embodiment of the present disclosure, the first laser pulse signal detected by the external detector and reflected by the target is converted by an external pixel array to obtain a second pulse signal, and the second pulse signal is an electrical pulse signal.
在一些示意性的实施例中,第一门控信号的信号宽度为第一时钟信号的周期的16倍、20倍、32倍等中的任一种。In some exemplary embodiments, the signal width of the first gating signal is any one of 16 times, 20 times, 32 times, etc. of the period of the first clock signal.
在一些示意性的实施例中,第一门控信号与下一个第一门控信号交叠4个第一时钟信号的周期。In some exemplary embodiments, the first gating signal overlaps with the next first gating signal by 4 periods of the first clock signal.
在一种示意性的实施例中,第一门控信号与下一个第一门控信号交叠3个第一时钟信号的周期。In an exemplary embodiment, the first gating signal overlaps with the next first gating signal by 3 cycles of the first clock signal.
在一种示意性的实施例中,第一门控信号与下一个第一门控信号交叠2个第一时钟信号的周期。In an exemplary embodiment, the first gating signal overlaps with the next first gating signal by 2 periods of the first clock signal.
优选地,如图3所示,CK表示第一时钟信号,C1_GATE<n>表示第一门控信号,n为正整数,且M>n≥0。第一门控信号C1_GATE<n>的信号宽度T1为第一时钟信号的周期T0的8倍,第一门控信号C1_GATE<0>与下一个第一门控信号C1_GATE<1>交叠1个时钟周期。Preferably, as shown in FIG. 3 , CK represents the first clock signal, C1_GATE<n> represents the first gate control signal, n is a positive integer, and M>n≥0. The signal width T1 of the first gate control signal C1_GATE<n> is 8 times the period T0 of the first clock signal, and the first gate control signal C1_GATE<0> overlaps with the next first gate control signal C1_GATE<1> by 1 clock cycle.
图4示意性示出了根据本公开示意性实施例的缓存模块和数字控制模块的电路图。Fig. 4 schematically shows a circuit diagram of a cache module and a digital control module according to an exemplary embodiment of the present disclosure.
根据本公开的实施例,如图2所示,每个时间数字转换器均包括:缓存模块31和可配置计数器阵列32。如图4所示,SYS_RST_N为外部输入的系统复位信号,缓存模块31响应于第一时钟信号的输入将输入的M个第一门控信号进行重新定时以得到M个第二门控信号。可配置计数器阵列32包括M个计数器组件,每个计数器组件适用于接收一个第二门控信号对第二激光SiPM脉冲信号进行门控计数。According to an embodiment of the present disclosure, as shown in FIG. 2 , each time-to-digital converter includes: a
根据本公开的实施例,第二门控信号为与第一时钟信号上升沿对齐的第一门控信号。According to an embodiment of the present disclosure, the second gating signal is the first gating signal aligned with the rising edge of the first clock signal.
根据本公开的实施例,如图2所示,每个时间数字转换器阵列还包括:寻峰模块33,用于对计数器阵列得到的单光子数的数值进行比较,得到最大光子数值所在的门控信号的地址。According to an embodiment of the present disclosure, as shown in FIG. 2 , each time-to-digital converter array further includes: a peak-seeking
图5示意性示出了根据本公开示意性实施例的第一模式门控信号生成模块的电路图Fig. 5 schematically shows a circuit diagram of a first mode gating signal generation module according to an exemplary embodiment of the present disclosure
根据本公开的实施例,如图2所示,每个时间数字转换器还包括:数字控制模块、第一模式门控信号生成模块和多级门控同步模块。如图4所示,数字控制模块38用于根据将外部输入的采样模式控制指令DIG_Control生成模式选择信号DIG_Control_OUT。如5图所示,第一模式门控信号生成模块响应于模式选择信号根据第一最大门控信号生成2M个第三门控信号F_GATE,每个第三门控信号F_GATE的信号宽度为M/8个第一时钟信号的周期,相邻的第三门控信号交叠P/2的第一时钟的周期,其中,第一最大门控信号是由寻峰模块对第一统计分布进行比较得到的。多级门控同步模块,适用于响应于模式选择信号,根据第一时钟信号将第二门控信号和第三门控信号进行时钟重新定时以使第三门控信号的上升沿与第二门控信号的上升沿对齐。其中,计数器组件适用于根据对齐后的第三门控信号对第二激光SiPM脉冲信号进行计数,得到第二统计分布。According to an embodiment of the present disclosure, as shown in FIG. 2 , each time-to-digital converter further includes: a digital control module, a first mode gating signal generating module, and a multi-level gating synchronization module. As shown in FIG. 4 , the
在一种示意性的实施例中,第三门控信号与下一个第三门控信号交叠1个第一时钟信号的周期。In an exemplary embodiment, the third gating signal overlaps with the next third gating signal by one period of the first clock signal.
优选地,如图3所示,CK表示第一时钟信号,C2_GATE<n>表示第三门控信号,n为正整数,且2M>n≥0。第三门控信号C2_GATE<n>的信号宽度为第一时钟信号的周期T0的1倍,第三门控信号C2_GATE<0>与下一个第三门控信号C2_GATE<1>交叠1/2个时钟周期。Preferably, as shown in FIG. 3 , CK represents the first clock signal, C2_GATE<n> represents the third gate control signal, n is a positive integer, and 2M>n≥0. The signal width of the third gate control signal C2_GATE<n> is 1 time of the period T0 of the first clock signal, and the third gate control signal C2_GATE<0> overlaps with the next third gate control signal C2_GATE<1> by 1/2 clock cycle.
根据本公开的实施例,第一门控信号与第三门控信号均为交叠型,避免了非交叠门控信号边缘处产生的遗漏问题。According to the embodiment of the present disclosure, both the first gating signal and the third gating signal are overlapping, which avoids the problem of omission generated at the edges of non-overlapping gating signals.
根据本公开的实施例,第一统计分布和第二统计分布中,直接生成多级门控信号作用于计数器阵列进行门控计数,其最大计数率取决于D触发器的最大工作频率。According to an embodiment of the present disclosure, in the first statistical distribution and the second statistical distribution, a multi-level gating signal is directly generated to act on the counter array for gating counting, and its maximum counting rate depends on the maximum operating frequency of the D flip-flop.
图6示意性示出了根据本公开示意性实施例的第二模式门控信号生成模块的电路图。图7示意性示出了根据本公开示意性实施例的第三统计分布的统计脉冲时序图。Fig. 6 schematically shows a circuit diagram of a second mode gating signal generating module according to an exemplary embodiment of the present disclosure. Fig. 7 schematically shows a statistical pulse timing diagram of a third statistical distribution according to an exemplary embodiment of the present disclosure.
根据本公开的实施例,如图2所示,时间数字转换器系统还包括:延迟锁相环4,响应于接收第一时钟信号将第一时钟信号进行多级延时,以输出用于控制延时单元进行延时操作的控制电压VCTRL。According to an embodiment of the present disclosure, as shown in FIG. 2 , the time-to-digital converter system further includes: a delay-locked
如图2所示,每个时间数字转换器还包括:第二模式门控信号生成模块36。如图6所示,第二模式门控信号生成模块36响应于接收模式选择信号将第二最大门控信号输入至4M级延长复制链电路361,4M级延长复制链电路361在控制电压VCTRL的作用下输出4M个延迟信号delay<31:0>,如图7所示,4M个延迟信号的上升沿对第二激光脉冲信号SiPM进行采样,检测第二激光脉冲信号SiPM上升沿所在位置,并相应生成4M个第四门控信号F_GATE,其中,第二最大门控信号是由寻峰模块对第二统计分布进行比较得到的。其中,计数器组件适用于根据第四门控信号配合延迟信号的上升沿进行计数,以得到第三统计分布。As shown in FIG. 2 , each time-to-digital converter further includes: a second mode gating
根据本公开的实施例,延迟锁相环4响应于接收第一时钟信号将第一时钟信号进行N级延时,以输出用于控制延时单元进行延时操作的控制电压,其中,N为正整数,且4M>N>2M。According to an embodiment of the present disclosure, the delay-locked
在一种示意性的实施例中,延迟锁相环响应于接收第一时钟信号将第一时钟信号进行20级延时,以输出用于控制延时单元进行延时操作的控制电压。In an exemplary embodiment, the delay-locked loop delays the first clock signal by 20 levels in response to receiving the first clock signal, so as to output a control voltage for controlling the delay unit to perform a delay operation.
根据本公开的实施例,第三统计分布中,通过延长复制链电路361生成的多相时钟延迟信号对第二激光脉冲进行上升沿检测,并将检测到上升沿的延迟时钟对应的门控使能信号置为1,其最大检测率取决于输入脉冲信号的频率。According to an embodiment of the present disclosure, in the third statistical distribution, the rising edge of the second laser pulse is detected by extending the multi-phase clock delay signal generated by the
根据本公开的实施例,第二模式门控信号生成模块生成多相时钟的延时链电路为延长复制延迟链电路,通过将延迟锁相环中的N级延迟链延长复制为4M级延迟链,避免了由于工艺-电压-温度(PVT)变化导致的失配对复制延迟链电路的影响,确保在第三统计分布中的转换时间宽度(可探测的时间区间宽度)略大于第三门控信号宽度。According to an embodiment of the present disclosure, the delay chain circuit for generating multi-phase clocks by the second mode gating signal generation module is an extended and replicated delay chain circuit, by extending and replicating the N-level delay chain in the delay-locked loop into a 4M-level delay chain , to avoid the impact of the mismatch on the replica delay chain circuit due to process-voltage-temperature (PVT) changes, and ensure that the transition time width (detectable time interval width) in the third statistical distribution is slightly larger than the third gating signal width.
在一种示意性的实施例中,转换时间宽度大于第三门控信号宽度差值为一个第一时钟信号的周期。In an exemplary embodiment, the switching time width is greater than the third gating signal width difference by a period of the first clock signal.
图8示意性示出了根据本公开示意性实施例的多级门控同步模块的电路图。图9示意性示出了根据本公开示意性实施例的计数器组件的电路图。Fig. 8 schematically shows a circuit diagram of a multi-level gating synchronization module according to an exemplary embodiment of the present disclosure. Fig. 9 schematically shows a circuit diagram of a counter component according to an exemplary embodiment of the present disclosure.
根据本公开的实施例,如图8所示,多级门控同步模块还适用于根据模式选择信号、第二门控信号、第三门控信号和第四门控信号生成有效计数门控信号CNT_EN。According to an embodiment of the present disclosure, as shown in FIG. 8, the multi-level gating synchronization module is also adapted to generate an effective count gating signal according to the mode selection signal, the second gating signal, the third gating signal and the fourth gating signal CNT_EN.
如图9所示,每个计数器组件包括:第一数据选择器、多个计数器以及多个第二数据选择器。第一数据选择器被配置为接收模式选择信号以选择计数脉冲信号cnt_tregger,计数脉冲信号包括第二激光脉冲信号SiPM或延迟信号。多个计数器被配置为结合有效计数门控信号CNT_EN和计数脉冲信号cnt_tregger对光子进行计数。每个第二数据选择器的输入端分别与一个计数器的输出端和第一数据选择器的输出端连接,该第二数据选择器的输出端与下一个计数器的输入端连接,结合模式选择信号将触发脉冲信号输入到下一个计数器。图9中Fine_En为第三统计分布模式使能信号。RN为外部输入的计数器复位信号。As shown in FIG. 9 , each counter component includes: a first data selector, a plurality of counters, and a plurality of second data selectors. The first data selector is configured to receive a mode selection signal to select the count pulse signal cnt_tregger including the second laser pulse signal SiPM or the delay signal. The plurality of counters are configured to count photons in combination with the active count gate signal CNT_EN and the count pulse signal cnt_tregger. The input end of each second data selector is respectively connected with the output end of a counter and the output end of the first data selector, and the output end of the second data selector is connected with the input end of the next counter, combined with the mode selection signal Input the trigger pulse signal to the next counter. In FIG. 9, Fine_En is the enabling signal of the third statistical distribution mode. RN is an external input counter reset signal.
根据本公开的实施例,如图9所示,每个计数器均包括:多个计数D触发器和计数数据选择器。首个计数D触发器的时钟信号输入端被配置为连接第一数据选择器的输出端,以接收计数脉冲信号。计数数据选择器根据计数类型信号将第一计数D触发器的第一输出端或第二输出端的输出信号作为第一计数D触发器的数据输入信号,其他计数D触发器的数据输入端分别接收各自第二输出端的输出信号。其中,前一个计数D触发器的第二输出端连接下一个计数D触发器的时钟信号输入端,第一个计数D触发器的输出端输出计数值的最低位,最后一个计数D触发器的输出端输出计数值的最高位。According to an embodiment of the present disclosure, as shown in FIG. 9 , each counter includes: a plurality of counting D flip-flops and a counting data selector. The clock signal input terminal of the first counting D flip-flop is configured to be connected to the output terminal of the first data selector to receive the counting pulse signal. The counting data selector uses the output signal of the first output terminal or the second output terminal of the first counting D flip-flop as the data input signal of the first counting D flip-flop according to the counting type signal, and the data input terminals of other counting D flip-flops respectively receive The output signals of the respective second output terminals. Wherein, the second output end of the previous counting D flip-flop is connected to the clock signal input end of the next counting D flip-flop, the output end of the first counting D flip-flop outputs the lowest bit of the count value, and the last counting D flip-flop The output terminal outputs the most significant bit of the count value.
根据本公开的实施例,可配置计数器阵列在不同的统计模式下有灵活的配置方式以满足不同模式对计数范围的要求。可配置的计数器阵列根据门控信号宽度来调节计数器的位宽,可以在既满足计数器的位宽要求,也减小面积。According to the embodiments of the present disclosure, the configurable counter array has flexible configuration modes in different statistical modes to meet the requirements of different modes for the counting range. The configurable counter array adjusts the bit width of the counter according to the width of the gate control signal, which can not only meet the bit width requirement of the counter, but also reduce the area.
在一种示意性的实施例中,第一统计分布模式下,计数器阵列被配置为8个20bit的异步计数器阵列;第二统计分布模式下,计数器阵列被配置为16个10bit的异步计数器阵列;第三统计分布模式下,计数器阵列被配置为32个5bit的异步计数器阵列。In an exemplary embodiment, in the first statistical distribution mode, the counter array is configured as 8 20-bit asynchronous counter arrays; in the second statistical distribution mode, the counter array is configured as 16 10-bit asynchronous counter arrays; In the third statistical distribution mode, the counter array is configured as 32 5-bit asynchronous counter arrays.
根据本公开的实施例,可配置计数器阵列在各个分布模式下,均有防溢出功能,一旦任意计数器计满计数最大值,则阵列中所有计数器均停止计数。According to an embodiment of the present disclosure, the configurable counter array has an overflow prevention function in each distribution mode, and once any counter reaches the maximum value, all counters in the array stop counting.
在一种示意性的实施例中,第一统计分布模式下,任意计数器计满1048575(220-1),则阵列中8个计数器均停止计数;第二统计分布模式下,任意计数器计满1023(210-1),则阵列中16个计数器均停止计数;第三统计分布模式下,任意计数器计满31(25-1),则阵列中32个计数器均停止计数。In an exemplary embodiment, in the first statistical distribution mode, if any counter reaches 1048575 (2 20 -1), all 8 counters in the array stop counting; in the second statistical distribution mode, if any counter reaches 1023 (2 10 -1), all 16 counters in the array stop counting; in the third statistical distribution mode, if any counter counts up to 31 (2 5 -1), all 32 counters in the array stop counting.
图10示意性示出了根据本公开示意性实施例的数据读出模块的电路图。Fig. 10 schematically shows a circuit diagram of a data readout module according to an exemplary embodiment of the present disclosure.
根据本公开的实施例,如图2所示,每个时间数字转换器还包括:数据读出模块37。如图10所示,数据读出模块37适用于根据模式选择信号,将计数器组件生成的计数值或寻峰模块生成的峰值地址读出数据。According to an embodiment of the present disclosure, as shown in FIG. 2 , each time-to-digital converter further includes: a
根据本公开的实施例,数据读出模块37将计数器阵列的计数值或寻峰模块生成的峰值地址通过多路选择器和三态门读出缓存器输出到阵列外进行数据处理。According to an embodiment of the present disclosure, the
根据本公开的实施例,数据读出模块采用了多路选择器加三态门列总线的方式减小数据总线的位宽,并支持峰值地址读出、计数器阵列计数值读出两种读出模式,以满足不同模式下对读出数据的不同要求。图11示意性示出了根据本公开示意性实施例的全局门控信号生成模块的电路图。According to the embodiment of the present disclosure, the data readout module adopts a multiplexer plus a three-state gate column bus to reduce the bit width of the data bus, and supports two readouts of peak address readout and counter array count value readout mode to meet the different requirements for reading data in different modes. Fig. 11 schematically shows a circuit diagram of a global gating signal generating module according to an exemplary embodiment of the present disclosure.
根据本公开的实施例,如图11所示,全局门控信号生成模块包括:分频单元、生成单元和激光同步单元。分频单元适用于将第一时钟信号分频得到第三时钟信号。生成单元,适用于根据第三时钟信号和第一时钟信号生成多个第一门控信号,生成单元包括分别设置在输出端的M个生成D触发器和M个生成或门,以使得第一门控信号与下一个第一门控信号交叠P个第一时钟信号周期。激光同步单元,适用于在第一门控信号与第一时钟信号的作用下,发射激光同步触发信号。According to an embodiment of the present disclosure, as shown in FIG. 11 , the global gating signal generation module includes: a frequency division unit, a generation unit and a laser synchronization unit. The frequency dividing unit is adapted to divide the frequency of the first clock signal to obtain the third clock signal. The generating unit is adapted to generate a plurality of first gating signals according to the third clock signal and the first clock signal, and the generating unit includes M generating D flip-flops and M generating OR gates respectively arranged at the output terminals, so that the first gate The control signal overlaps with the next first gating signal for P periods of the first clock signal. The laser synchronization unit is adapted to emit a laser synchronization trigger signal under the action of the first gate signal and the first clock signal.
根据本公开的实施例,分频单元适用于将第一时钟信号进行M-1倍分频得到第三时钟信号,第三时钟信号的频率为第一时钟信号的1/(M-1)倍。According to an embodiment of the present disclosure, the frequency division unit is adapted to divide the first clock signal by M-1 times to obtain a third clock signal, and the frequency of the third clock signal is 1/(M-1) times that of the first clock signal .
在一种示意性的实施例中,分频单元适用于将第一时钟信号进行15倍分频得到第三时钟信号。In an exemplary embodiment, the frequency dividing unit is adapted to divide the frequency of the first clock signal by 15 times to obtain the third clock signal.
根据本公开的实施例,为了补偿第一门控信号从产生到作用到可配置计数器阵列上的传播延时,将C1_GATA<0>信号延迟三个第一时钟信号周期后生成激光同步信号laser_sync。According to the embodiment of the present disclosure, in order to compensate the propagation delay from the generation of the first gating signal to the action on the configurable counter array, the C1_GATA<0> signal is delayed by three periods of the first clock signal to generate the laser synchronization signal laser_sync.
根据本公开的实施例,如图2所示,时间数字转换器系统还包括:时钟树,适用于将锁相环生成的第一时钟信号和全局门控信号生成的第一门控信号分别发送至每个时间数字转换器。According to an embodiment of the present disclosure, as shown in FIG. 2 , the time-to-digital converter system further includes: a clock tree, adapted to respectively send the first clock signal generated by the phase-locked loop and the first gating signal generated by the global gating signal to each time-to-digital converter.
根据本公开的实施例,本公开提供的基于门控单光子技术的时间数字转换系统,提供至少3种模式的时间数字转换输出。According to an embodiment of the present disclosure, the time-to-digital conversion system based on the gated single photon technology provided by the present disclosure provides at least three modes of time-to-digital conversion outputs.
第一统计分布模式下,输出第一统计分布结果。在第二统计分布模式下,根据第一统计分布结果确定第一最大门控信号,输出第二统计结果。在第三统计分布模式下,根据第二统计分布结果确定第二最大门控信号,输出第三统计结果。可以根据实际需要,对时间数字转换器系统输入采样模式控制指令,选择所需要的输出结果。可以对各个曝光模式下的计数器阵列进行灵活的配置,以适应不同门控信号宽度下对计数器计数范围的要求,从而降低整体对计数器位宽的要求,减小计数器阵列所需面积。计数器阵列防溢出设计可以避免由于曝光时间过长对计数统计造成的失真。In the first statistical distribution mode, output the result of the first statistical distribution. In the second statistical distribution mode, the first maximum gating signal is determined according to the first statistical distribution result, and the second statistical result is output. In the third statistical distribution mode, the second maximum gating signal is determined according to the second statistical distribution result, and the third statistical result is output. According to actual needs, a sampling mode control command can be input to the time-to-digital converter system to select the desired output result. The counter array in each exposure mode can be flexibly configured to meet the requirements of the counter counting range under different gating signal widths, thereby reducing the overall requirement for the counter bit width and reducing the required area of the counter array. The anti-overflow design of the counter array can avoid the distortion of the counting statistics due to the long exposure time.
根据本公开的实施例,本公开提供的时间数字转换器系统可以通过峰值检测的方式定位激光回波信号所在的门控信号地址,并通过细化该门控信号为更小窗口的门控信号来逼近激光回波的位置,最终生成仅32bin的直方图。According to an embodiment of the present disclosure, the time-to-digital converter system provided by the present disclosure can locate the address of the gate control signal where the laser echo signal is located by means of peak detection, and refine the gate control signal into a gate control signal of a smaller window To approximate the position of the laser echo, and finally generate a histogram of only 32 bins.
根据本公开的实施例,在第三统计分布模式下,也通过延长延迟链的方式做了一定的冗余,避免了信号的丢失,并且可以识别探测时间内输入信号SiPM的多个脉冲上升沿,实现了一个多事件的探测,时间数字转换器的转换效率高,不易于丢失事件,利于完整地无失真地将输入时间数字转换器的事件进行高效的时间分布统计。According to the embodiment of the present disclosure, in the third statistical distribution mode, a certain redundancy is also made by extending the delay chain to avoid signal loss, and multiple rising edges of the input signal SiPM within the detection time can be identified , to realize a multi-event detection, the conversion efficiency of the time-to-digital converter is high, it is not easy to lose events, and it is beneficial to perform efficient time distribution statistics on the events input into the time-to-digital converter completely and without distortion.
在一种示意性的实施例中,如图2所示,基于门控单光子技术的时间数字转换器系统包括:锁相环1、延迟锁相环4、全局门控信号生成模块2、时钟树5和时间数字转换器阵列3。In an exemplary embodiment, as shown in FIG. 2 , the time-to-digital converter system based on gated single photon technology includes: a phase-locked
锁相环1用于将输入的低频放入系统时钟SYS_CK倍频产生高频的第一时钟信号CK。The phase-locked
延迟锁相环4,用于将输入的第一时钟信号CK时钟经过28级延迟单元产生28相延迟时钟,并将控制延时单元延时的延迟链控制电压VCTRL输出到时间数字转换器阵列3,作为第二模式门控信号生成模块中延长复制延时链电路的控制电压。The delay-locked
如图2和图3所示,全局门控信号生成模块2用于生成8级交叠第一门控信号,第一门控信号宽度为八个第一时钟周期,并分别与下一个第一门控信号交叠一个第一时钟周期。如图6所示,全局门控信号生成模块2包括分频单元21、生成单元22和激光同步触发单元23。As shown in Fig. 2 and Fig. 3, the global gating
如图6所示,分频单元21将第一时钟信号CK进行七分频得到第三时钟信号CK_7。As shown in FIG. 6 , the
如图6所示,生成单元22包括分别设置在输出端的8个生成D触发器和8个生成或门。生成单元22根据第三时钟信号CK_7和第一时钟信号CK生成8个第一门控信号C1_GATE<n>。CK_7与CK共同作用于全局门控信号产生模块2。当外部输入的使能信号EXP_EN由低电平转为高电平时,产生宽度为7个CK时钟周期的脉冲信号STA,STA信号在D触发器延迟链电路中传播,并由第一时钟信号CK分别采样生成D触发器和生成或门,将脉宽展宽到8个第一时钟周期。当STA信号传播到生成D触发器延迟链电路末端时,将生成反馈信号FB,重新传入D触发器延迟链电路,循环产生第一门控信号,直至外部输入的使能信号EXP_EN由高电平转为低电平,切断反馈信号FB的反馈回路,停止生成新的门控信号。As shown in FIG. 6 , the generating
如图6所示,激光同步单元23将C1_GATA<0>信号延迟三个第一时钟信号周期后生成激光同步信号laser_sync。As shown in FIG. 6 , the
时钟树5将第一时钟信号和全局门控信号生成模块2生成的8级交叠门控信号C1_GATE<n>分布到整个时间数字转换器阵列3。The
如图2所示,时间数字转换器阵列3包括至少1个时间数字转换器HTDC。每个时间数字转换器HTDC均包括:缓存模块31、数字控制模块38、第一模式门控信号生成模块34、第二模式门控信号生成模块36、多级门控同步模块35、可配置计数器阵列32、寻峰模块33和数据读出模块37。As shown in FIG. 2 , the time-to-
如4图所示,缓存模块31用于将输入单相的第一时钟信号CK处理为差分时钟对CK/KCN,并增加其驱动能力。第一时钟信号CK将输入的第一门控信号进行重定时后得到第二门控信号。As shown in FIG. 4 , the
数字控制模块38根据将外部输入的采样模式控制指令DIG_Control生成模式选择信号DIG_Control_OUT。The
如图8所示,多级门控同步模块35响应于模式选择信号,根据第一时钟信号将第二门控信号和第三门控信号进行时钟重新定时以使第三门控信号的上升沿与第二门控信号的上升沿对齐。多级门控同步模块35还可以根据模式选择信号、第二门控信号、第三门控信号和第四门控信号生成有效计数门控信号。As shown in FIG. 8 , the multi-level
可配置计数器阵列32用于在第二门控信号下对第二激光脉冲信号SiPM进行计数,通过给可配置计数器阵列中每个计数器配置对应的第二门控信号,经过多次计数统计后,可得到输入第二激光脉冲信号SiPM在时间上的第一统计分布情况。可配置计数器阵列32包括8个计数器组件。The
如图9所示,每个计数器组件均包括:第一数据选择器、4个计数器CNT_5b和3个第二数据选择器。第一数据选择器接收模式选择信号以选择计数脉冲信号。4个计数器结合有效计数门控信号和计数脉冲信号对光子进行计数。每个第二数据选择器的输入端分别与一个计数器的输出端和第一数据选择器的输出端连接,该第二数据选择器的输出端与下一个计数器的输入端连接,结合模式选择信号将触发脉冲信号输入到下一个计数器。两两相邻的计数器之间接了一个数据选择器,通过chain<2:0>信号来控制。chain<2:0>信号为模式选择信号的数值。如果chain<0>、chain<1>和chain<2>信号都=1,那么被配置为1个20bit的计数器;如果都为0,则是4个5bit的计数器,如果chain<1>=0,chain<0>,chain<2>=1,则配置为2个10bit计数器。As shown in FIG. 9 , each counter component includes: a first data selector, 4 counters CNT_5b and 3 second data selectors. The first data selector receives the mode selection signal to select the count pulse signal. The four counters count photons in combination with effective counting gate signals and counting pulse signals. The input end of each second data selector is respectively connected with the output end of a counter and the output end of the first data selector, and the output end of the second data selector is connected with the input end of the next counter, combined with the mode selection signal Input the trigger pulse signal to the next counter. A data selector is connected between two adjacent counters, which is controlled by the chain<2:0> signal. The chain<2:0> signal is the value of the mode selection signal. If the chain<0>, chain<1> and chain<2> signals are all = 1, then it is configured as a 20-bit counter; if they are all 0, it is four 5-bit counters, if chain<1> = 0 , chain<0>, chain<2>=1, then it is configured as two 10bit counters.
寻峰模块33对可配置计数器阵列的第一统计分布情况的计数值进行比较,得到最大计数值所在的第一最大门控信号地址,并返回到第一模式门控信号生成模块,作为第一模式门控信号生成模块的选择器的控制信号。The peak-seeking
如图10所示,数据读出模块根据所述模式选择信号,将寻峰模块生成的第一最大门控信号地址读出数据。As shown in FIG. 10 , the data readout module reads data from the address of the first maximum gating signal generated by the peak hunting module according to the mode selection signal.
如图5所示,第一模式门控信号生成模块34,将第一门控信号地址统计到峰值的第一最大门控信号C1_ADDR进行细量化,即在第一最大门控信号C1_ADDR下,生成16个交叠第三门控信号C2_GATE,每个第三门控信号宽度为一个第一时钟信号的周期,相邻第三门控信号交叠二分之一第一时钟周期。八选一选择器由C1_ADDR选出对应的C1_GATE信号,并在控制信号MODE_EN为1时作用到脉冲生成模块产生宽度为1个CK周期的脉冲Wind_In,并分别在差分时钟对CK/CKN作用下在生成D触发器传播链中进行传播,生成所需的门控信号。As shown in FIG. 5 , the first mode gating
可配置计数器阵列32用于在第三门控信号下对第二激光脉冲进行计数,通过给可配置计数器阵列中每个计数器配置对应的第三门控信号,经过多次计数统计后,可得到输入第二激光脉冲在时间上的第二统计分布情况。The
如图10所示,数据读出模块37根据所述模式选择信号,将寻峰模块33生成的第二最大门控信号地址读出数据。As shown in FIG. 10 , the
寻峰模块33对可配置计数器阵列的第二统计分布情况的计数值进行比较,得到最大计数值所在的第二最大门控信号地址,并返回到第一模式门控信号生成模块,作为第一模式门控信号生成模块的选择器的控制信号。The peak-seeking
如图6所示,第二模式门控信号生成模块接收模式选择信号将第二最大门控信号输入至4M级延长复制链电路,4M级延长复制链电路在控制电压VCTRL的作用下输出4M个延迟信号,4M个延迟信号的上升沿对第二激光脉冲信号进行采样,检测第二激光脉冲信号上升沿所在位置,并相应生成4M个第四门控信号。As shown in Figure 6, the second mode gating signal generation module receives the mode selection signal and inputs the second maximum gating signal to the 4M-level extended copy chain circuit, and the 4M-level extended copy chain circuit outputs 4M under the action of the control voltage VCTRL For the delay signal, the rising edges of the 4M delayed signals sample the second laser pulse signal, detect the position of the rising edge of the second laser pulse signal, and correspondingly generate 4M fourth gate signals.
如图9所示,计数器组件根据第四门控信号配合延迟信号的上升沿进行计数,以得到第三统计分布。As shown in FIG. 9 , the counter component counts according to the fourth gating signal and the rising edge of the delay signal, so as to obtain the third statistical distribution.
图12示意性示出了根据本公开示意性实施例的统计分布图。Fig. 12 schematically shows a statistical distribution diagram according to an exemplary embodiment of the present disclosure.
如图12所示,第一统计分布模式下,输出第一统计分布结果,第一统计分布结果为8个20bit计数器。在第二统计分布模式下,根据第一统计分布结果确定第一最大门控信号,对第一最大门控信号细量化,输出第二统计分布结果,第二统计分布结果为16个10bit计数器。在第三统计分布模式下,根据第二统计分布结果确定第二最大门控信号,将第二最大门控信号输入至4M级延长复制链电路,4M级延长复制链电路在控制电压的作用下输出4M个延迟信号,4M个延迟信号的上升沿对第二激光脉冲信号进行采样,检测第二激光脉冲信号上升沿所在位置,并相应生成4M个第四门控信号,计数器组件根据第四门控信号配合延迟信号的上升沿进行计数,得到第三统计结果,第三统计分布结果为32个5bit计数器。As shown in FIG. 12 , in the first statistical distribution mode, the first statistical distribution result is output, and the first statistical distribution result is eight 20-bit counters. In the second statistical distribution mode, the first maximum gating signal is determined according to the first statistical distribution result, the first maximum gating signal is refined, and the second statistical distribution result is output. The second statistical distribution result is 16 10-bit counters. In the third statistical distribution mode, the second maximum gating signal is determined according to the second statistical distribution result, and the second maximum gating signal is input to the 4M-level extended copy chain circuit, and the 4M-level extended copy chain circuit is under the action of the control voltage Output 4M delayed signals, the rising edge of the 4M delayed signals samples the second laser pulse signal, detects the position of the rising edge of the second laser pulse signal, and generates 4M fourth gate control signals accordingly, the counter component is based on the fourth gate The control signal cooperates with the rising edge of the delay signal to count to obtain the third statistical result, and the third statistical distribution result is 32 5-bit counters.
上述门控单光子计数的时间数字转换器系统的的工作流程如下:The workflow of the time-to-digital converter system for gated single photon counting described above is as follows:
上电启动时,锁相环开始工作,并将系统时钟锁定到需要的频率上,生成第一时钟信号。When the power is turned on and started, the phase-locked loop starts to work, and locks the system clock to the required frequency to generate the first clock signal.
锁相环上电锁定后,延迟锁相环开始工作,并将延迟链控制电压VCTRL锁定到对应的电压值上,并作为控制电压输出到时间数字转换器阵列中延长复制延迟链电路上。After the phase-locked loop is powered on and locked, the delay-locked loop starts to work, and locks the delay chain control voltage VCTRL to the corresponding voltage value, and outputs it as a control voltage to the extended copy delay chain circuit in the time-to-digital converter array.
数字控制单元或片外输入使能信号EXP_EN到全局门控信号生成模块,当EXP_EN信号为高电平时,全局门控信号生成模块生成第一门控信号C1_GATE和激光同步触发信号LASER_SYNC。其中LASER_SYNC输出到片外,用于同步触发激光器。第一门控信号与锁相环输出时钟(第一时钟信号)通过时钟树分布到时间数字转换器阵列。The digital control unit or off-chip input enable signal EXP_EN to the global gate control signal generation module, when the EXP_EN signal is high level, the global gate control signal generation module generates the first gate control signal C1_GATE and the laser synchronization trigger signal LASER_SYNC. Among them, LASER_SYNC is output to off-chip, which is used to trigger the laser synchronously. The first gating signal and the phase-locked loop output clock (the first clock signal) are distributed to the time-to-digital converter array through the clock tree.
时间数字转换器阵列在第一门控信号下进行门控计数统计。第一门控信号C1_GATE经多级门控同步模块重新定时后,生成第二门控信号输入可配置计数器阵列进行门控计数统计,直至EXP_EN信号转为低电平,全局门控信号生成模块停止循环生成C1_GATE,则停止计数统计。等待计数器阵列计数稳定后,启动寻峰模块,得到计数峰值所在的门控信号地址C1_ADDR。The time-to-digital converter array performs gated counting statistics under the first gating signal. After the first gating signal C1_GATE is retimed by the multi-level gating synchronization module, the second gating signal is generated and input to the configurable counter array for gating counting statistics, until the EXP_EN signal turns to low level, the global gating signal generation module stops When C1_GATE is generated cyclically, the counting and statistics will stop. After waiting for the counting of the counter array to be stable, start the peak-seeking module to obtain the gating signal address C1_ADDR where the counting peak is located.
统计模式转为第二统计分布模式,使能信号EXP_EN转为高电平后,在第二统计分布模式下进行门控计数统计。第一模式门控信号生成模块在C1_ADDR控制下选择对应的C1_GATE信号,并将其细分为16级交叠门控信号C2_GATE,经多级门控同步模块重新定时后输入可配置计数器阵列进行门控计数统计,直至EXP_EN信号转为低电平,全局门控信号生成模块停止循环生成C1_GATE,则停止计数统计。等待计数器阵列计数稳定后,启动寻峰模块,得到计数峰值所在的门控信号地址C2_ADDR。The statistical mode is changed to the second statistical distribution mode, and after the enable signal EXP_EN is changed to a high level, gated counting statistics are performed in the second statistical distribution mode. The first mode gating signal generation module selects the corresponding C1_GATE signal under the control of C1_ADDR, and subdivides it into 16-level overlapping gating signal C2_GATE, which is retimed by the multi-level gating synchronization module and then input to the configurable counter array for gate Control the counting and statistics until the EXP_EN signal turns to low level, the global gating signal generation module stops generating C1_GATE in a loop, and then stops the counting and statistics. After waiting for the counting of the counter array to be stable, start the peak-seeking module to obtain the gating signal address C2_ADDR where the counting peak is located.
统计模式转为第三统计分布模式,使能信号EXP_EN转为高电平后,在第三统计分布模式下进行门控计数统计。第二模式门控信号生成模块在C2_ADDR控制下选择对应的C2_GATE信号,并将其通过28级延迟链生成32相延迟信号delay<31:0>,该多相延迟信号delay<31:0>上升沿分别触发采样触发器对输入脉冲进行采样,并通过组合逻辑检测其上升沿位置,将采集到输入脉冲上升沿的延迟信号对应的门控信号置为1,并输入多级门控同步模块。在32相延迟信号delay<31:0>上升沿触发采样完毕后,第二模式门控信号生成模块产生的触发脉冲将对门控信号为1的计数器进行触发计数。计数完毕后,第二模式门控信号生成模块将产生复位信号,将延迟信号上升沿采样D触发器复位。在EXP_EN为高电平期间,第三统计分布模式流程将多次重复,直至EXP_EN信号转为低电平,全局门控信号生成模块停止循环生成C1_GATE,第三统计分布模式结束,此时可启动寻峰模块,得到计数峰值所在的门控信号地址F_ADDR。The statistical mode is changed to the third statistical distribution mode, and after the enable signal EXP_EN is changed to a high level, gated counting statistics are performed in the third statistical distribution mode. The second mode gating signal generation module selects the corresponding C2_GATE signal under the control of C2_ADDR, and generates a 32-phase delay signal delay<31:0> through a 28-stage delay chain, and the multi-phase delay signal delay<31:0> rises Sampling flip-flops are respectively triggered on the edge to sample the input pulse, and the position of its rising edge is detected by combinational logic, and the gate control signal corresponding to the delayed signal of the rising edge of the input pulse is set to 1, and input to the multi-level gate synchronization module. After the rising edge trigger sampling of the 32-phase delay signal delay<31:0> is completed, the trigger pulse generated by the gating signal generating module in the second mode will trigger and count the counter whose gating signal is 1. After the counting is completed, the second mode gating signal generating module will generate a reset signal to reset the rising edge sampling D flip-flop of the delayed signal. When EXP_EN is at a high level, the process of the third statistical distribution mode will be repeated multiple times until the EXP_EN signal turns to a low level, the global gating signal generation module stops generating C1_GATE in a loop, and the third statistical distribution mode ends, and it can be started at this time The peak-seeking module obtains the gating signal address F_ADDR where the counting peak value is located.
根据输入的数字控制信号,数据读出模块选择输出峰值地址({C1_ADDR,C2_ADDR,F_ADDR})或计数器阵列计数值(CNT[159:0])。According to the input digital control signal, the data readout module selects output peak address ({C1_ADDR, C2_ADDR, F_ADDR}) or counter array count value (CNT[159:0]).
可根据具体需求,重复第一统计分布模式、第二统计分布模式或第三统计分布模式,并输出对应数据。According to specific requirements, the first statistical distribution mode, the second statistical distribution mode or the third statistical distribution mode may be repeated, and corresponding data may be output.
至此,已经结合附图对本公开实施例进行了详细描述。需要说明的是,在附图或说明书正文中,未绘示或描述的实现方式,均为所属技术领域中普通技术人员所知的形式,并未进行详细说明。此外,上述对各元件和方法的定义并不仅限于实施例中提到的各种具体结构、形状或方式,本领域普通技术人员可对其进行简单地更改或替换。So far, the embodiments of the present disclosure have been described in detail with reference to the accompanying drawings. It should be noted that, in the accompanying drawings or in the text of the specification, implementations that are not shown or described are forms known to those of ordinary skill in the art, and are not described in detail. In addition, the above definitions of each element and method are not limited to the various specific structures, shapes or methods mentioned in the embodiments, and those skilled in the art can easily modify or replace them.
依据以上描述,本领域技术人员应当对本公开提供的基于门控单光子计数的时间数字转换系统有了清楚的认识。Based on the above description, those skilled in the art should have a clear understanding of the time-to-digital conversion system based on gated single photon counting provided by the present disclosure.
综上所述,本公开提供了一种基于门控单光子技术的时间数字转换器系统,在测量中,通过将门控信号与下一个门控信号交叠,避免了门控信号边缘处的信号损失,以得到完整的回波信号,使得输入脉冲可以被有效记录,提高了时间数字转换器的转换效率。可以对各个曝光模式下的计数器阵列进行灵活的配置,以适应不同门控信号宽度下对计数器计数范围的要求,从而降低整体对计数器位宽的要求,减小计数器阵列所需面积。计数器阵列防溢出设计可以避免由于曝光时间过长对计数统计造成的失真。可以通过峰值检测的方式定位激光回波信号所在的门控信号地址,并通过细化该门控信号为更小窗口的门控信号来逼近激光回波的位置,最终生成仅32bin的直方图。可以在第三统计分布模式下,同时测量多个输入脉冲,进行时间数字转换,转换效率高,不易于丢失事件,利于完整地无失真地将输入TDC的事件进行高效的时间分布统计。In summary, the present disclosure provides a time-to-digital converter system based on gated single-photon technology, in which the signal at the edge of the gated signal is avoided by overlapping the gated signal with the next gated signal. Loss, to obtain a complete echo signal, so that the input pulse can be effectively recorded, improving the conversion efficiency of the time-to-digital converter. The counter array in each exposure mode can be flexibly configured to meet the requirements of the counter counting range under different gating signal widths, thereby reducing the overall requirement for the counter bit width and reducing the required area of the counter array. The anti-overflow design of the counter array can avoid the distortion of the counting statistics due to the long exposure time. The address of the gating signal where the laser echo signal is located can be located by means of peak detection, and the position of the laser echo can be approximated by refining the gating signal into a gating signal of a smaller window, and finally a histogram of only 32 bins is generated. In the third statistical distribution mode, multiple input pulses can be measured at the same time for time-to-digital conversion. The conversion efficiency is high, and events are not easy to be lost, which is conducive to efficient time distribution statistics of events input into the TDC completely and without distortion.
还需要说明的是,实施例中提到的方向用语,例如“上”、“下”、“前”、“后”、“左”、“右”等,仅是参考附图的方向,并非用来限制本公开的保护范围。贯穿附图,相同的元素由相同或相近的附图标记来表示。在可能导致对本公开的理解造成混淆时,将省略常规结构或构造,并且图中各部件的形状和尺寸不反映真实大小和比例,而仅示意本公开实施例的内容。It should also be noted that the directional terms mentioned in the embodiments, such as "up", "down", "front", "back", "left", "right", etc., are only referring to the directions of the drawings, not Used to limit the protection scope of this disclosure. Throughout the drawings, the same elements are indicated by the same or similar reference numerals. Where it may cause confusion in the understanding of the present disclosure, conventional structures or configurations will be omitted, and the shapes and sizes of components in the drawings do not reflect real sizes and proportions, but merely illustrate the contents of the embodiments of the present disclosure.
除非有所知名为相反之意,本说明书及所附权利要求中的数值参数是近似值,能够根据通过本公开的内容所得的所需特性改变。具体而言,所有使用于说明书及权利要求中表示组成的含量、反应条件等等的数字,应理解为在所有情况中是受到“约”的用语所修饰。一般情况下,其表达的含义是指包含由特定数量在一些实施例中±10%的变化、在一些实施例中±5%的变化、在一些实施例中±1%的变化、在一些实施例中±0.5%的变化。Unless known to the contrary, the numerical parameters set forth in the specification and attached claims are approximations that can vary depending upon the desired properties obtained from the teachings of the present disclosure. Specifically, all numbers used in the specification and claims to indicate the content of components, reaction conditions, etc., should be understood to be modified by the term "about" in all cases. In general, the expressed meaning is meant to include a variation of ±10% in some embodiments, a variation of ±5% in some embodiments, a variation of ±1% in some embodiments, a variation of ±1% in some embodiments, and a variation of ±1% in some embodiments ±0.5% variation in the example.
说明书与权利要求中所使用的序数例如“第一”、“第二”、“第三”等的用词,以修饰相应的元件,其本身并不意味着该元件有任何的序数,也不代表某一元件与另一元件的顺序、或是制造方法上的顺序,该些序数的使用仅用来使具有某命名的一元件得以和另一具有相同命名的元件能做出清楚区分。Words such as "first", "second", "third" and the like used in the description and claims to modify the corresponding elements do not in themselves mean that the elements have any ordinal numbers, nor The use of these ordinal numbers to represent the sequence of an element with respect to another element, or the order of manufacturing methods, is only used to clearly distinguish one element with a certain designation from another element with the same designation.
此外,除非特别描述或必须依序发生的步骤,上述步骤的顺序并无限制于以上所列,且可根据所需设计而变化或重新安排。并且上述实施例可基于设计及可靠度的考虑,彼此混合搭配使用或与其他实施例混合搭配使用,即不同实施例中的技术特征可以自由组合形成更多的实施例。In addition, unless specifically described or steps that must occur sequentially, the order of the above steps is not limited to that listed above and may be changed or rearranged according to the desired design. Moreover, the above-mentioned embodiments can be mixed and matched with each other or with other embodiments based on design and reliability considerations, that is, technical features in different embodiments can be freely combined to form more embodiments.
以上所述的具体实施例,对本公开的目的、技术方案和有益效果进行了进一步详细说明,应理解的是,以上所述仅为本公开的具体实施例而已,并不用于限制本公开,凡在本公开的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本公开的保护范围之内。The specific embodiments described above have further described the purpose, technical solutions and beneficial effects of the present disclosure in detail. It should be understood that the above descriptions are only specific embodiments of the present disclosure, and are not intended to limit the present disclosure. Within the spirit and principles of the present disclosure, any modifications, equivalent replacements, improvements, etc., shall be included in the protection scope of the present disclosure.
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