CN116200807B - A continuous feeding device for a single crystal furnace and its application method - Google Patents

Abstract

The invention belongs to the field of single crystal furnace charging equipment, and particularly relates to a continuous charging device of a single crystal furnace and a use method thereof, comprising a fixed bottom plate and a conveying hose, wherein a device shell is fixedly connected to the top end surface of the fixed bottom plate, a discharging crushing assembly, a high-efficiency grinding assembly and a circulating conveying assembly are arranged in the device shell, the discharging crushing assembly is connected with the high-efficiency grinding assembly through a fixed rod, and the high-efficiency grinding assembly is connected with the circulating conveying assembly.

Description

A continuous feeding device for a single crystal furnace and its application method

technical field

The invention relates to the field of single crystal furnace feeding equipment, in particular to a single crystal furnace continuous feeding device and a method for using the same.

Background technique

The rapid development of the semiconductor industry has made the production of single crystal furnaces continuous and efficient, and the cost of crystal pulling production needs to be saved. When the single crystal furnace is fed for the first time, because the silicon material is in the form of solid particles, it is formed in the quartz crucible. However, after melting at high temperature, the polysilicon raw material and dopant become liquid, and the volume will be greatly reduced compared with the original solid state, and there will be a large space in the upper part of the quartz crucible, which will cause the crystals pulled out The length of the rod is not long enough, so it is necessary to use a continuous feeding device for multiple feedings. Multiple feedings can continue to increase the silicon material after the silicon material is melted into a liquid, so that the silicon liquid in the quartz crucible can be filled as much as possible. Use the volume of the quartz crucible to pull out long silicon rods at one time, because the service life of the quartz crucible is about 200 hours at a time, within the service life, you can feed multiple times and pull out as many crystal rods as possible;

While the existing single crystal furnace continuous feeding device can carry out continuous feeding during use, but in the feeding process, it is impossible to carry out convenient and stable intermittent equal-amount feeding of the polysilicon raw materials and dopants that need to be used, so During the feeding process, the polysilicon raw material and dopant that need to be used cannot be used in a stable ratio, and it is impossible to effectively avoid the internal blockage of the device caused by a large amount of feeding at one time, or the overflow of the raw material inside the quartz crucible; the existing single crystal During the use of the furnace continuous feeding device, although it can perform continuous feeding, it cannot perform comprehensive and efficient crushing and grinding of the continuously added raw materials. The large particle size of the raw materials will lead to low subsequent melting efficiency, which will affect the continuous stability of the single crystal furnace. Therefore, it is necessary to provide a single crystal furnace continuous feeding device and its use method to meet the needs of users.

Contents of the invention

In view of the problems existing in the existing single crystal furnace continuous feeding device and its use method, the present invention is proposed.

In order to solve the above-mentioned technical problems, according to one aspect of the present invention, the present invention provides the following technical solution: a continuous feeding device for a single crystal furnace, comprising a fixed bottom plate and a conveying hose, and a device is fixedly connected to the top surface of the fixed bottom plate shell, the device shell is equipped with a blanking crushing assembly, a high-efficiency grinding assembly and a circulating conveying assembly, the blanking crushing assembly is connected to the high-efficiency grinding assembly through a fixed rod, and the high-efficiency grinding assembly is connected to the circulating conveying assembly. A fixed plate is fixedly connected to the conveying hose, a first threaded rod is rotatably connected to the fixed plate, a clamping plate is threaded on the first threaded rod, and a hydraulic pressure is fixed on the top surface of the fixed bottom plate. Rod, the top of the hydraulic rod is fixedly connected to the limiting plate, the limiting plate is slidingly connected to the device shell, the limiting plate is fixedly connected to the support rod, and the internal thread of the supporting rod is connected to the second threaded rod, the bottom end of the second threaded rod is rotatably connected with a mounting plate, the bottom end surface of the mounting plate is fixed with a universal wheel, and the blanking and crushing assembly includes a guide plate, and the guide plate is fixedly connected to the In the housing of the device, a reciprocating screw rod is threadedly connected to the guide plate, and the top end of the reciprocating screw rod is connected to the output end of the first servo motor, and the first servo motor is fixedly connected to the top end of the adapter frame. The plate is fixed at the middle part inside the device housing, and the central axis of the reciprocating screw rod and the central axis of the device housing are located on the same vertical center line.

As a preferred solution of the continuous feeding device for a single crystal furnace according to the present invention, wherein: the adapter frame is limited and slidably connected to the guide plate, the side end of the adapter frame is provided with a conveying groove, and the device A storage box is fixedly connected to the housing, and the storage boxes are symmetrically distributed on both sides of the device housing. The bottom side end of the storage box is provided with a feeding trough, and the inner side end surface of the connecting frame and the side end of the guide plate The sides of the connecting frame fit together, the side end faces of the connecting frame fit together with the side end faces of the storage box, the conveying grooves are symmetrically distributed on both sides of the connecting frame, the bottom end faces of the conveying grooves are inclined, and the conveying grooves The length is greater than the length of the chute.

As a preferred solution of the continuous feeding device for a single crystal furnace according to the present invention, wherein: the bottom end of the reciprocating screw rod is fixedly connected with a turntable, and a crushing blade is fixedly connected with the turntable, and the bottom of the turntable A fixed rod is fixedly connected to the end surface, the crushing blades are equiangularly distributed on the turntable, and the bottom of the fixed rod is inclined.

As a preferred solution of a single crystal furnace continuous feeding device according to the present invention, wherein: the high-efficiency grinding assembly includes a grinding ball and a grinding frame, the grinding ball is fixedly connected to the bottom end of the fixed rod, and the grinding A connecting groove is opened on the ball, and a first telescopic rod is fixedly connected in the connecting groove, a return spring is fixedly connected in the first telescopic rod, and a connecting plate is fixedly connected to the top of the first telescopic rod, The connecting plate is slidably connected in the connecting groove, the connecting plate is fixedly connected with a first grinding block, the diameter of the grinding ball is smaller than the inner diameter of the grinding frame, the connecting groove is provided with two groups, and each group of connecting groove is provided with There are five, two groups of connecting grooves are symmetrically distributed on the upper and lower sides of the grinding ball, and the five connecting grooves are equiangularly distributed on the grinding ball. The connecting grooves correspond to the first grinding block through the first telescopic sleeve rod one by one, so The first grinding block is in the shape of a hemisphere, and the inner side end surface of the connecting groove is attached to the side end surface of the connecting plate.

As a preferred solution of a single crystal furnace continuous feeding device according to the present invention, wherein: the grinding frame is fixedly connected to the inner bottom end surface of the device shell, and the inner side end surface of the grinding frame is fixedly connected with a second Grinding block, the inner bottom end surface of the grinding frame is fixedly connected with a filter plate, the inside of the grinding frame is fixedly connected with the top end of the delivery hose, the second grinding block is provided with four groups, four groups of second grinding The blocks are equidistantly distributed in the grinding frame, and the second grinding blocks of each group are equiangularly distributed in the grinding frame. The shape and size of the second grinding block are the same as that of the first grinding block. The cross-section of the filter plate It is diamond-shaped.

As a preferred solution of a single crystal furnace continuous feeding device according to the present invention, wherein: the circulation conveying assembly includes a second telescopic sleeve rod, and the second telescopic sleeve rod is fixedly connected to the bottom end surface of the grinding ball , the bottom end of the second telescopic sleeve rod is fixedly connected with a connecting push plate, the inner side end surface of the device housing is fixedly connected with a straight plate, and a second servo motor is fixed on the straight plate, and the second servo motor A screw rod is connected to the output end of the screw rod, and a first circular gear is fixedly connected to the screw rod, and a second circular gear is meshed and connected to the first circular gear, and the second circular gear is rotatably connected through a bearing. On the grinding frame, the connecting push plates are symmetrically distributed on both sides of the bottom of the second telescopic sleeve rod, and the bottom end surface of the connecting push plate is attached to the top surface of the filter screen plate.

As a preferred solution of a single crystal furnace continuous feeding device according to the present invention, wherein: the screw rod is rotatably connected in the delivery cylinder, and the delivery cylinder is connected with a feed pipe and a discharge pipe, the The other end of the feed pipe and the other end of the discharge pipe are both connected to the grinding frame, the side end surface of the screw rod is attached to the inner wall of the delivery cylinder, and both the feed pipe and the discharge pipe are inclined.

As a preferred solution of a single crystal furnace continuous feeding device according to the present invention, wherein: the cross section of the fixing plate is "L" shaped, and the first threaded rod is connected to the middle part of the top of the clamping plate , the top surface of the clamping plate fits with the bottom end surface of the fixed plate, the hydraulic rods are symmetrically distributed on both sides of the fixed bottom plate, and the support rods are symmetrically distributed on the left and right sides and the front and rear sides of the limiting plate , the length of the second threaded rod is greater than the length of the supporting rod.

A method for using a single crystal furnace continuous feeding device, comprising the following steps:

S1: The second threaded rod can drive the universal wheel to move downward or upward, and cooperate with the support rod to conveniently switch the overall moving state and placement state of the device to ensure that the device can work stably in different single crystal furnaces, and Using the cooperation of the hydraulic rod and the limit plate, by driving the movement of the support rod, the overall working height of the device can be adjusted conveniently according to the actual situation;

S2: The rotation of the first threaded rod can drive the clamping plate to move conveniently and stably on the fixing plate. At this time, the clamping plate and the fixing plate can be clamped and fixed on the crucible conveniently and stably, and then the conveying hose can be clamped Hold and install on the crucible to ensure the stability of the subsequent feeding work, and when the crucible needs to be replaced, you only need to use the cooperation of the clamping plate and the fixing plate again to clamp and install the delivery hose on another crucible again;

S3: By adding the polysilicon raw material and dopant that need to be used into the cutting and crushing component, the polysilicon raw material and dopant can be automatically and stably intermittently fed in equal amounts by using the cutting and crushing component, and at the same time, the cutting Stable pulverization of polysilicon raw materials and dopants;

S4: The crushed polysilicon raw materials and dopants can be comprehensively and efficiently ground through the high-efficiency grinding component, and the unqualified raw materials can be transported to the high-efficiency grinding component for repeated grinding with the filter plate and circulation conveying component Grinding until the grinding is qualified;

S5: The raw materials that pass the grinding can be stably transported to the crucible through the delivery hose for continuous and stable feeding work, thereby ensuring the stability of the subsequent continuous work of the single crystal furnace.

Compared with prior art, the beneficial effect of the present invention is:

1. It is equipped with a blanking and crushing component, which can drive the connecting frame to perform automatic and stable up and down reciprocating movements by using the rotation of the reciprocating screw rod. The polysilicon raw materials and dopants stored in the storage boxes on both sides are automatically and stably intermittently fed in the same amount, which can ensure the stability of the subsequent crushing and grinding of polysilicon raw materials and dopants, avoid blockage during the feeding process, and at the same time be able to Effectively avoid uneven delivery of polysilicon raw materials and dopants, affecting the preparation qualification of the subsequent melt, and during the rotation of the reciprocating screw rod, it can drive the turntable to rotate stably, combined with each crushing blade, it can conveniently and stably grind the intermittently delivered raw materials The crushing treatment ensures the stability of the subsequent grinding work and effectively improves the convenience and efficiency of the device.

2. Equipped with high-efficiency grinding components. When the turntable is rotating and reciprocating up and down, the fixed rod can drive the grinding balls to rotate and reciprocate up and down. At this time, the grinding balls pass through the first grinding blocks on each first telescopic sleeve rod. Cooperating with each second grinding block in the grinding frame, the polysilicon raw material and dopant delivered in equal amounts intermittently can be comprehensively and efficiently ground, which effectively improves the grinding efficiency of the polysilicon raw material and dopant, thereby ensuring subsequent feeding and melting The stability of the work avoids the large size of polysilicon raw materials and dopants, which affects the subsequent melting work, resulting in the inability of continuous and stable work in the follow-up of the single crystal furnace.

3. Equipped with a circulating conveying assembly, during the rotation of the grinding ball, the connecting push plates on both sides can be driven to rotate stably through the second telescopic sleeve rod, and then the raw materials with larger particle sizes filtered on the top surface of the filter plate can be stabilized Pushing, through the joint action of the screw rods on both sides and the corresponding conveying cylinder, the raw material with larger particle size can be transported to the grinding frame again for grinding treatment until the particle size of the grinding is qualified, and then the subsequent feeding and melting work can be guaranteed. Stable, so as to ensure the stability of the subsequent working state of the single crystal furnace, and increase the use diversity and high efficiency of the device.

4. A clamping plate is provided, and the rotation of the first threaded rod can drive the clamping plate to move conveniently and stably on the fixing plate. At this time, the clamping plate cooperates with the fixing plate to be clamped and fixed on the crucible conveniently and stably, and then The delivery hose can be clamped and installed on the crucible to ensure the stability of the subsequent feeding work. When the crucible needs to be replaced, the delivery hose can be clamped and installed on the crucible again only by using the cooperation of the clamping plate and the fixing plate. on another crucible.

5. There are support rods and universal wheels. The second threaded rod can drive the universal wheels to move downward or upward. With the support rod, the overall moving state and placement state of the device can be switched conveniently, ensuring that the device can be used in different places. The single crystal furnace works stably, and by using the cooperation of the hydraulic rod and the limit plate, by driving the movement of the support rod, the overall working height of the device can be adjusted conveniently according to the actual situation.

Description of drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the present invention will be described in detail below in conjunction with the accompanying drawings and detailed embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. Ordinary technicians can also obtain other drawings based on these drawings without paying creative work. in:

Fig. 1 is a schematic diagram of the overall three-dimensional structure of a single crystal furnace continuous feeding device of the present invention;

Fig. 2 is a schematic diagram of a three-dimensional structure of a fixed plate of a single crystal furnace continuous feeding device of the present invention;

Fig. 3 is a schematic diagram of the three-dimensional structure of a screen plate of a continuous feeding device for a single crystal furnace according to the present invention;

Fig. 4 is a schematic structural diagram of the overall front view of a single crystal furnace continuous feeding device of the present invention;

Fig. 5 is a schematic diagram of the structure at A in Fig. 4 of a single crystal furnace continuous feeding device of the present invention;

Fig. 6 is a schematic diagram of the structure at B in Fig. 4 of a single crystal furnace continuous feeding device of the present invention;

Fig. 7 is a schematic diagram of the universal wheel structure of a single crystal furnace continuous feeding device of the present invention;

Fig. 8 is a schematic top view structure diagram of a connecting frame of a continuous feeding device for a single crystal furnace according to the present invention;

Fig. 9 is a top view structural diagram of a turntable of a single crystal furnace continuous feeding device according to the present invention;

Fig. 10 is a top view structural diagram of a single crystal furnace continuous feeding device connected to a push plate of the present invention;

Fig. 11 is a schematic structural diagram of a top view of a grinding ball of a continuous feeding device for a single crystal furnace according to the present invention;

Fig. 12 is a schematic diagram of the structure of the first telescopic rod of a continuous feeding device for a single crystal furnace according to the present invention.

Symbols in the figure: 1, fixed bottom plate; 2, device shell; 3, blanking and crushing assembly; 301, guide plate; 302, reciprocating screw rod; 303, first servo motor; 304, connecting frame; 305, conveying trough; 306 , storage box; 307, feeding trough; 308, turntable; 309, crushing blade; 4, fixed rod; 5, high-efficiency grinding assembly; 501, grinding ball; Return spring; 505, connecting plate; 506, first grinding block; 507, grinding frame; 508, second grinding block; ; 604, the second servo motor; 605, the screw rod; 606, the first circular gear; 607, the second circular gear; 608, the delivery cylinder; 609, the feed pipe; 610, the discharge pipe; 7, the filter Plate; 8. Delivery hose; 9. Fixed plate; 10. First threaded rod; 11. Clamping plate; 12. Hydraulic rod; 13. Limiting plate; 14. Support rod; 15. Second threaded rod; 16 , Mounting plate; 17, universal wheel.

Detailed ways

In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.

In the following description, a lot of specific details are set forth in order to fully understand the present invention, but the present invention can also be implemented in other ways different from those described here, and those skilled in the art can do it without departing from the meaning of the present invention. Similarly generalized, the present invention is therefore not limited by the specific embodiments disclosed below.

Secondly, the present invention is described in detail in conjunction with schematic diagrams. When describing the implementation of the present invention in detail, for the convenience of explanation, the cross-sectional view showing the device structure will not be partially enlarged according to the general scale, and the schematic diagram is only an example, which should not be limited here. The protection scope of the present invention. In addition, the three-dimensional space dimensions of length, width and depth should be included in actual production.

Example

In order to make the purpose, technical solution and advantages of the present invention clearer, the following will further describe the implementation of the present invention in detail in conjunction with the accompanying drawings.

As shown in Figure 1-12, a continuous feeding device for a single crystal furnace includes a fixed bottom plate 1 and a conveying hose 8. A device shell 2 is fixedly connected to the top surface of the fixed bottom plate 1, and a cutting and crushing device is installed in the device shell 2. Component 3, high-efficiency grinding component 5 and circulation conveying component 6, the blanking crushing component 3 is connected with the high-efficiency grinding component 5 through the fixed rod 4, the high-efficiency grinding component 5 is connected with the circulation conveying component 6, and the conveying hose 8 is fixedly connected with a fixed Plate 9, the first threaded rod 10 is connected with rotation on the fixed plate 9, the clamping plate 11 is threaded on the first threaded rod 10, the top surface of the fixed bottom plate 1 is installed and fixed with a hydraulic rod 12, and the top of the hydraulic rod 12 is fixed Connect the limiting plate 13, the limiting plate 13 is slidingly connected on the device housing 2, the limiting plate 13 is fixedly connected with the support rod 14, the internal thread of the supporting rod 14 is connected with the second threaded rod 15, the second threaded rod 15 The bottom end of the bottom is rotatably connected with a mounting plate 16, and a universal wheel 17 is installed and fixed on the bottom end surface of the mounting plate 16. The blanking and crushing assembly 3 can be used to perform automatic and stable intermittent equal-volume blanking of polysilicon raw materials and dopants. At the same time, it can be conveniently and stably pulverized, and by using the cooperation of the high-efficiency grinding component 5 and the circulation conveying component 6, the polysilicon raw material and dopant that are intermittently transported in equal amounts can be comprehensively and efficiently cyclically ground until the ground particles The size of the diameter is qualified, which effectively improves the grinding efficiency of the polysilicon raw material and dopant, thereby ensuring the stability of the subsequent feeding and melting work, avoiding the large size of the polysilicon raw material and dopant, which affects the subsequent melting work, resulting in the subsequent failure of the single crystal furnace. Carry out continuous and stable work, and at the same time use the second threaded rod 15 to drive the universal wheel 17 to move downward or upward, and cooperate with the support rod 14 to conveniently switch the overall moving state and placement state of the device, ensuring that the device can be used in different positions. The crystal furnace works stably, and by using the cooperation of the hydraulic rod 12 and the limit plate 13, by driving the support rod 14 to move, the overall working height of the device can be conveniently adjusted according to the actual situation.

In this example, the blanking crushing assembly 3 includes a guide plate 301, the guide plate 301 is fixedly connected in the device housing 2, the guide plate 301 is threaded with a reciprocating screw 302, and the top of the reciprocating screw 302 is connected to the first servo motor At the output end of 303, the first servo motor 303 is fixedly connected to the top of the adapter frame 304, the guide plate 301 is fixed at the middle part inside the device casing 2, and the central axis of the reciprocating screw rod 302 is located at the same vertical center as the central axis of the device casing 2. On the line, the connecting frame 304 is limited and slidingly connected on the guide plate 301, and the side end of the connecting frame 304 is provided with a delivery groove 305, and a storage box 306 is fixedly connected in the device casing 2, and the storage boxes 306 are symmetrically distributed on both sides of the device casing 2. side, the bottom side end of the storage box 306 is penetrated with a trough 307, the inner side end surface of the connecting frame 304 is attached to the side end surface of the guide plate 301, and the side end surface of the connecting frame 304 is attached to the side end surface of the storage box 306 Together, the conveying trough 305 is symmetrically distributed on both sides of the connecting frame 304. The bottom end surface of the conveying trough 305 is inclined. 304 performs automatic and stable up-and-down reciprocating movement. During the up-and-down reciprocating movement of the connecting frame 304, the polysilicon raw materials and dopants stored in the storage boxes 306 on both sides can be automatically controlled by using the cooperation of the conveying trough 305 and the feeding trough 307. Stable intermittent and equal-volume blanking can ensure the stability of the subsequent crushing and grinding of polysilicon raw materials and dopants, avoid blockage during the blanking process, and effectively avoid uneven delivery of polysilicon raw materials and dopants, which will affect subsequent melting Liquid preparation eligibility.

In this example, the bottom end of the reciprocating screw rod 302 is fixedly connected with a turntable 308, the turntable 308 is fixedly connected with a crushing blade 309, the bottom surface of the turntable 308 is fixedly connected with a fixed rod 4, and the crushing blades 309 are equiangularly distributed on the turntable 308. Above, the bottom of the fixed rod 4 is inclined. During the rotation of the reciprocating screw rod 302, it can drive the turntable 308 to rotate stably. Combined with each crushing blade 309, it can conveniently and stably crush the intermittently conveyed raw materials to ensure the smoothness of the subsequent grinding work. Stable, effectively improving the convenience and efficiency of the device.

In this example, the high-efficiency grinding assembly 5 includes a grinding ball 501 and a grinding frame 507. The grinding ball 501 is fixedly connected to the bottom end of the fixed rod 4. The grinding ball 501 is provided with a connecting groove 502, and the connecting groove 502 is fixedly connected with a first Telescopic rod 503, first telescopic rod 503 is fixedly connected with return spring 504, the top of first telescopic rod 503 is fixedly connected with connecting plate 505, connecting plate 505 is slidably connected in connecting groove 502, fixed on connecting plate 505 The first grinding block 506 is connected, the diameter of the grinding ball 501 is smaller than the inner diameter of the grinding frame 507, two groups of connecting grooves 502 are provided, and each group of connecting grooves 502 is provided with five, and the two groups of connecting grooves 502 are symmetrically distributed between the grinding balls 501. On the upper and lower sides, five connecting grooves 502 are equiangularly distributed on the grinding ball 501. The connecting grooves 502 are in one-to-one correspondence with the first grinding block 506 through the first telescopic sleeve rod 503. The inner side end face of the connecting plate 505 fits, the grinding frame 507 is fixedly connected to the inner bottom end face of the device shell 2, the second grinding block 508 is fixedly connected to the inner side end face of the grinding frame 507, and the grinding frame 507 A filter plate 7 is fixedly connected to the inner bottom surface, and the inside of the grinding frame 507 is fixedly connected to the top of the delivery hose 8. There are four sets of second grinding blocks 508, and the four groups of second grinding blocks 508 are equidistantly distributed on the grinding frame. 507, every group of second grinding blocks 508 is equiangularly distributed in the grinding frame 507, the shape and size of the second grinding blocks 508 are the same as the shape and size of the first grinding blocks 506, the cross section of the filter screen plate 7 is rhombus, and the rotating disk 308 When rotating and reciprocating up and down, the fixed rod 4 can drive the grinding ball 501 to rotate and reciprocate up and down. At this time, the grinding ball 501 passes through the first grinding block 506 on each first telescopic sleeve rod 503, and cooperates with the grinding frame 507 Each second grinding block 508 inside can perform comprehensive and efficient grinding work on the polysilicon raw material and dopant transported intermittently in equal amounts, effectively improving the grinding efficiency of the polysilicon raw material and dopant, thereby ensuring the smoothness of the subsequent feeding and melting work. Stable, to avoid polysilicon raw materials and dopants having a large size, which will affect the subsequent melting work, resulting in the failure of continuous and stable work in the follow-up of the single crystal furnace.

In this example, the circulation conveying assembly 6 includes a second telescopic sleeve rod 601, the second telescopic sleeve rod 601 is fixedly connected to the bottom end surface of the grinding ball 501, and the bottom end of the second telescopic sleeve rod 601 is fixedly connected with a push plate 602 A straight plate 603 is fixedly connected to the inner side end surface of the device housing 2, a second servo motor 604 is mounted and fixed on the straight plate 603, a screw rod 605 is connected to the output end of the second servo motor 604, and a first screw rod 605 is fixedly connected to the screw rod 605. Circular gear 606, the first circular gear 606 is meshed with the second circular gear 607, the second circular gear 607 is rotatably connected to the grinding frame 507 through the bearing, and the connecting push plate 602 is symmetrically distributed on the second telescopic sleeve rod On both sides of the bottom of 601, the bottom end surface of the connecting push plate 602 is attached to the top surface of the filter screen plate 7. During the rotation of the grinding ball 501, the connecting push plate 602 on both sides can be driven to rotate stably by the second telescopic sleeve rod 601. Furthermore, the raw materials with larger particle diameters filtered on the top surface of the filter screen plate 7 can be stably pushed, thereby ensuring the stability of the subsequent circulation conveying work and avoiding the raw materials remaining in the device.

In this example, the screw rod 605 is rotatably connected in the delivery cylinder 608, the delivery cylinder 608 is connected with the feed pipe 609 and the discharge pipe 610, and the other end of the feed pipe 609 and the other end of the discharge pipe 610 are connected to On the grinding frame 507, the side end surface of the screw rod 605 is attached to the inner wall of the conveying cylinder 608, and the feeding pipe 609 and the discharging pipe 610 are inclined, and through the joint action of the screw rod 605 on both sides and the corresponding conveying cylinder 608 In this way, the raw material with a larger particle size can be transported to the grinding frame 507 again for grinding treatment until the particle size of the grinding is qualified, thereby ensuring the stability of the subsequent feeding and melting work, thereby ensuring the stability of the subsequent working state of the single crystal furnace. The use diversity and high efficiency of the device are increased.

In this example, the cross section of the fixing plate 9 is "L" shaped, the first threaded rod 10 is connected to the top middle part of the clamping plate 11, and the top end surface of the clamping plate 11 is attached to the bottom end surface of the fixing plate 9 , the hydraulic rods 12 are symmetrically distributed on both sides of the fixed base plate 1, the support rods 14 are symmetrically distributed on the left and right sides and the front and rear sides of the limit plate 13, and the length of the second threaded rod 15 is greater than the length of the support rod 14. Using the first The rotation of the threaded rod 10 can drive the clamping plate 11 to move conveniently and stably on the fixing plate 9. At this time, the clamping plate 11 and the fixing plate 9 can be clamped and fixed on the crucible conveniently and stably, and then the delivery hose 8 can be It is clamped and installed on the crucible to ensure the stability of the subsequent feeding work. When the crucible needs to be replaced, the delivery hose 8 can be clamped and installed on another on the crucible.

It should be noted that the present invention is a single crystal furnace continuous feeding device and its use method. First, the staff can add the polysilicon raw materials and dopant to be used into the storage boxes 306 on both sides respectively, and then work Personnel can be by rotating the second threaded rod 15 on each support rod 14, this moment, under the thread rotation effect of the second threaded rod 15, can drive universal wheel 17 to move downwards by mounting plate 16, until universal wheel 17 and The ground is in contact with each other. At this time, the device can use various universal wheels 17 to carry out convenient and stable mobile work. The device moves as a whole to the single crystal furnace that needs continuous feeding. Then the staff can hold the fixed plate 9 and move the fixed plate 9 Lap on the edge of the crucible, and then the staff can rotate the first threaded rod 10 on the fixed plate 9. At this time, under the rotation of the first threaded rod 10, the clamping plate 11 that is threaded can be driven to the fixed plate. 9, at this time, under the joint action of the fixing plate 9 and the clamping plate 11, the sides of the crucible can be clamped and fixed conveniently and stably, and then the conveying hose 8 can be clamped and installed conveniently and stably. At the crucible, when the crucible needs to be replaced, the convenient disassembly work of the delivery hose 8 can be completed by turning the first threaded rod 10 in reverse, and the bottom end of the delivery hose 8 is arranged in the crucible to ensure The subsequent feeding work is stable, and when the device is moved to the single crystal furnace as a whole, the staff can turn the second threaded rod 15 on each support rod 14 in the opposite direction. At this time, under the thread rotation of the second threaded rod 15 , the universal wheel 17 can be driven upward through the mounting plate 16 until the universal wheel 17 is separated from the ground. At this time, the device can be placed conveniently and stably by using the support rods 14. At the same time, the hydraulic rods 12 on both sides can be used to The drive can drive the limit plate 13 to move up and down conveniently and stably, and the overall use height of the device can be conveniently adjusted through each support rod 14;

When the device starts to work, the staff can turn on the first servo motor 303 and the second servo motor 604 through control. At this time, under the driving action of the first servo motor 303, the reciprocating screw mandrel 302 can be driven to rotate stably. Under the action of the rotation of the screw rod 302, through the thread connection with the connecting frame 304, the connecting frame 304 can be driven to carry out automatic and stable up and down reciprocating motion on the guide plate 301. At this time, under the reciprocating action of the connecting frame 304, the two The conveying chute 305 on the side overlaps intermittently with the unloading chute 307 on the storage boxes 306 on both sides. At this time, the storage boxes 306 on both sides can transfer the polysilicon raw materials and doped materials in the storage boxes 306 on both sides through the corresponding unloading chute 307. The dopant is transported to the delivery grooves 305 on both sides, and then when the adapter frame 304 moves down to the lowest end, the polysilicon raw material and dopant additive can be stably transported into the grinding frame 507 through the delivery groove 305. The up and down reciprocating motion of 304 can automatically and stably perform intermittent and equal-volume cutting of the polysilicon raw materials and dopants stored in the storage boxes 306 on both sides, and during the rotation of the reciprocating screw rod 302, it can drive the turntable 308 at the bottom to stabilize At this time, under the rotation of the turntable 308, with each crushing blade 309, the intermittently conveyed raw materials can be conveniently and stably crushed to ensure the stability of the subsequent grinding work;

The crushed raw materials can be stably transported into the grinding frame 507. At the same time, under the action of the rotation and up-and-down reciprocating motion of the turntable 308, the fixed rod 4 can drive the grinding ball 501 to rotate and reciprocate up and down. 501 during the movement, it can drive each first grinding block 506 and each second grinding block 508 in the grinding frame 507 to carry out intermittent contact extrusion. The sleeve rod 503 can automatically push the first grinding block 506, and cooperate with the return spring 504 in the first telescopic sleeve rod 503 and the connecting plate 505 at the end of the first telescopic sleeve rod 503 to drive the first grinding block 506 in the connecting groove 502 Automatic and stable reciprocating motion within the frame, at this time, under the reciprocating telescopic movement of each first grinding block 506 and the action of each first grinding block 506, combined with each second grinding block 508 in the grinding frame 507, the intermittent equal amount can be transported Comprehensive and efficient grinding of polysilicon raw materials and dopants;

The raw material after grinding can fall on the filter screen plate 7. At this time, under the action of the filter screen plate 7, the ground raw material can be stably filtered, and the raw material with a small particle size after grinding can pass through the filter screen plate 7. Move into the conveying hose 8, and through the conveying hose 8, the raw materials can be continuously and stably fed, and the unqualified raw materials with large particle sizes can be blocked by the filter plate 7, and the filter plate can be used to The inclined surface of 7 can roll down to the side, and at the same time, under the rotation of the grinding ball 501, the connecting push plate 602 on both sides can be driven to rotate stably through the second telescopic sleeve rod 601, and then the filter plate can be filtered 7 Raw materials with larger particle diameters on the top surface are stably pushed to the feed pipes 609 on both sides, and the unqualified raw materials can be transported to the conveying cylinder 608 through the inclined guidance of the feed pipes 609. At this time, the raw materials on the straight plate 603 Driven by the second servo motor 604, it can drive the screw rod 605 on one side to rotate. At this time, the screw rod 605 on one side can drive the first circular gear 606 to rotate, and the second circular gear 607 connected by meshing can Drive the first circular gear 606 on the other side to rotate, and then can drive the screw rod 605 on the other side to rotate. At this time, under the rotation of the screw rods 605 on both sides, combined with the corresponding delivery cylinder 608, it can be pushed to the two sides. The raw materials in the side conveying cylinder 608 are automatically and stably transported, and the unqualified raw materials can be transported to the grinding frame 507 again by the feed pipe 609 for grinding treatment, and so on, until the grinding particle size is qualified, and then can It is ensured that the raw materials are transported into the crucible, and fast and stable melting work can be carried out in the crucible, thereby ensuring the stability of the subsequent working state of the single crystal furnace.

While the invention has been described above with reference to the embodiments, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention can be used in combination with each other in any way, and the description of these combinations is not exhaustive in this specification only to show In consideration of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims (4)

1. A continuous feeding device of a single crystal furnace, which comprises a fixed bottom plate (1) and a conveying hose (8), and is characterized in that; the utility model discloses a grinding device for the material feeding and crushing device, which comprises a fixed bottom plate (1), a device shell (2) fixedly connected with the top end face of the fixed bottom plate (1), a discharging grinding component (3), a high-efficiency grinding component (5) and a circulating conveying component (6) are installed in the device shell (2), the discharging grinding component (3) is connected with the high-efficiency grinding component (5) through a fixed rod (4), the high-efficiency grinding component (5) is connected with the circulating conveying component (6), a fixed plate (9) is fixedly connected with a conveying hose (8), a first threaded rod (10) is rotationally connected with the fixed plate (9), a clamping plate (11) is connected with the first threaded rod (10) in a threaded manner, a hydraulic rod (12) is installed and fixed on the top end face of the fixed bottom plate (1), a limiting plate (13) is fixedly connected with the top end face of the hydraulic rod (12), the limiting plate (13) is in limiting sliding connection with the device shell (2), a supporting rod (14) is fixedly connected with a second threaded rod (15) in the supporting rod (14), a universal wheel (16) is connected with the bottom end face (16) of the fixed bottom plate (301), the guide plate (301) is fixedly connected in the device shell (2), a reciprocating screw rod (302) is connected to the guide plate (301) in a threaded mode, the top end of the reciprocating screw rod (302) is connected to the output end of the first servo motor (303), the first servo motor (303) is fixedly connected to the top end of the connecting frame (304), the guide plate (301) is fixed to the middle position inside the device shell (2), and the central axis of the reciprocating screw rod (302) and the central axis of the device shell (2) are located on the same vertical central line;

the connecting frame (304) is in limiting sliding connection on the guide plate (301), conveying grooves (305) are formed in the side ends of the connecting frame (304), storage boxes (306) are fixedly connected in the device shell (2), the storage boxes (306) are symmetrically distributed on two sides of the device shell (2), blanking grooves (307) are formed in the bottom side ends of the storage boxes (306) in a penetrating mode, inner side end faces of the connecting frame (304) are attached to the side end faces of the guide plate (301), side end faces of the connecting frame (304) are attached to the side end faces of the storage boxes (306), conveying grooves (305) are symmetrically distributed on two sides of the connecting frame (304), the bottom ends of the conveying grooves (305) are inclined, and the length of the conveying grooves (305) is larger than that of the blanking grooves (307);

the efficient grinding assembly (5) comprises a grinding ball (501) and a grinding frame (507), the grinding ball (501) is fixedly connected to the bottom end of a fixed rod (4), two groups of connecting grooves (502) are formed in the grinding ball (501), a first telescopic sleeve rod (503) is fixedly connected to the inside of the connecting grooves (502), a reset spring (504) is fixedly connected to the inside of the first telescopic sleeve rod (503), a connecting plate (505) is fixedly connected to the top end of the first telescopic sleeve rod (503), the connecting plate (505) is slidably connected to the inside of the connecting grooves (502), a first grinding block (506) is fixedly connected to the connecting plate (505), the diameter of the grinding ball (501) is smaller than the inner diameter of the grinding frame (507), two groups of connecting grooves (502) are formed in the upper side and the lower side of the grinding ball (501), the five connecting grooves (502) are distributed on the grinding ball (501) in an equiangular mode, and the connecting grooves (502) are correspondingly matched with the end faces of the first grinding block (506) on the inner side of the first grinding block (506) in an equiangular mode;

the grinding frame (507) is fixedly connected to the inner bottom end face of the device shell (2), a second grinding block (508) is fixedly connected to the inner side end face of the grinding frame (507), a filter screen plate (7) is fixedly connected to the inner bottom end face of the grinding frame (507), the inside of the grinding frame (507) is fixedly connected with the top end of the conveying hose (8), the second grinding block (508) is provided with four groups, the four groups of second grinding blocks (508) are equidistantly distributed in the grinding frame (507), each group of second grinding blocks (508) is equiangularly distributed in the grinding frame (507), the shape and the size of the second grinding blocks (508) are the same as those of the first grinding blocks (506), and the cross section of the filter screen plate (7) is diamond;

the circulating conveying assembly (6) comprises a second telescopic sleeve rod (601), the second telescopic sleeve rod (601) is fixedly connected to the bottom end face of the grinding ball (501), the bottom end of the second telescopic sleeve rod (601) is fixedly connected with a connecting pushing plate (602), the inner side end face of the device shell (2) is fixedly connected with a straight plate (603), a second servo motor (604) is fixedly arranged on the straight plate (603), the output end of the second servo motor (604) is connected with a screw rod (605), a first circular gear (606) is fixedly connected to the screw rod (605), a second circular gear (607) is connected to the first circular gear (606) in a meshed mode, the second circular gear (607) is connected to the grinding frame (507) in a rotating mode through a bearing, the connecting pushing plate (602) is symmetrically distributed on two sides of the bottom of the second telescopic sleeve rod (601), and the bottom end face of the connecting pushing plate (602) is attached to the top end face of the filter screen plate (7);

the screw rod (605) is rotationally connected in the conveying cylinder (608), the conveying cylinder (608) is connected with a feeding pipe (609) and a discharging pipe (610), the other end of the feeding pipe (609) and the other end of the discharging pipe (610) are both connected on the grinding frame (507), the side end face of the screw rod (605) is attached to the inner wall of the conveying cylinder (608), and the feeding pipe (609) and the discharging pipe (610) are all inclined.

2. The continuous feeding device of a single crystal furnace according to claim 1, wherein: the bottom fixedly connected with carousel (308) of reciprocating screw rod (302), fixedly connected with smashes blade (309) on carousel (308), fixedly connected with dead lever (4) on the bottom terminal surface of carousel (308), smash blade (309) equiangular distribution on carousel (308), the bottom of dead lever (4) is the slope form.

3. The continuous feeding device of a single crystal furnace according to claim 1, wherein: the cross section of fixed plate (9) is "L" shape, first threaded rod (10) are connected at the top middle part of grip block (11), the top face of grip block (11) is laminated mutually with the bottom end face of fixed plate (9), hydraulic rod (12) symmetric distribution is in the both sides of fixed baseplate (1), bracing piece (14) symmetric distribution is in the left and right sides and the front and back both sides of limiting plate (13), the length of second threaded rod (15) is greater than the length of bracing piece (14).

4. A method of using a continuous feeding apparatus for a single crystal furnace according to claim 1, comprising the steps of:

s1: the universal wheel (17) can be driven to move downwards or upwards by the aid of the second threaded rod (15), the moving state and the placing state of the whole device can be conveniently switched by the aid of the supporting rods (14), the device can be guaranteed to work stably at different single crystal furnaces, and the whole working height of the device can be conveniently and quickly adjusted according to actual conditions by means of the aid of the cooperation of the hydraulic rods (12) and the limiting plates (13) and the movement of the supporting rods (14);

s2: the clamping plate (11) can be driven to move conveniently and stably on the fixed plate (9) by utilizing the rotation of the first threaded rod (10), at the moment, the clamping plate (11) is matched with the fixed plate (9) to clamp and fix the crucible conveniently and stably, and then the conveying hose (8) can be clamped and installed on the crucible to ensure the stability of the subsequent feeding operation, and when the crucible needs to be replaced, the conveying hose (8) can be clamped and installed on the other crucible again only by utilizing the matching of the clamping plate (11) and the fixed plate (9) again;

s3: the polycrystalline silicon raw material and the doping agent which need to be used are added into the blanking crushing assembly (3), and the blanking crushing assembly (3) can be utilized to perform automatic stable intermittent equivalent blanking on the polycrystalline silicon raw material and the doping agent respectively, and meanwhile, the blanking polycrystalline silicon raw material and the doping agent can be subjected to stable crushing treatment;

s4: the crushed polysilicon raw material and the doping agent can be subjected to comprehensive and efficient grinding treatment through the efficient grinding assembly (5), and the raw material which is unqualified in grinding treatment can be conveyed into the efficient grinding assembly (5) again by matching with the filter screen plate (7) and the circulating conveying assembly (6) for repeated grinding until the raw material is qualified in grinding;

s5: the raw materials after qualified grinding can be stably conveyed into the crucible through the conveying hose (8) to perform continuous and stable feeding work, and further the stability of the follow-up continuous work of the single crystal furnace can be ensured.