CN116187224B - A process design kit device library and design migration method - Google Patents
A process design kit device library and design migration method Download PDFInfo
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Abstract
本申请提供一种制程设计套件器件库及设计迁移方法。制程设计套件器件库包括:第一器件库,包括多个第一器件,基于通用工艺制程和通用工艺层预先确定;第二器件库,包括至少一个第二器件,第二器件库的结构和第二器件可配置为对应指定工艺制程并且可映射到指定工艺层。针对待开发工艺制程,通过第一器件库提供待开发工艺制程的至少一部分以及通过第二器件库提供待开发工艺制程的剩余部分,待开发工艺制程的所述至少一部分通过比较待开发工艺制程和通用工艺制程确定。如此有助于大幅减少开发和验证周期。
The application provides a process design kit device library and a design migration method. The device library of the process design kit includes: a first device library, including a plurality of first devices, predetermined based on a general process and a general process layer; a second device library, including at least one second device, the structure of the second device library and the first The second device can be configured to correspond to a specified process and can be mapped to a specified process layer. For the process to be developed, at least a part of the process to be developed is provided through the first device library and the remaining part of the process to be developed is provided through the second device library, and the at least part of the process to be developed is compared with the process to be developed and The general process is determined. This helps to drastically reduce development and verification cycles.
Description
技术领域technical field
本申请涉及计算机技术领域,尤其涉及一种制程设计套件器件库及设计迁移方法。The present application relates to the field of computer technology, in particular to a process design kit device library and a design migration method.
背景技术Background technique
在芯片设计例如大规模混合信号电路和模拟电路设计,一般需要利用制程设计套件(Process Design Kit,PDK)来完成设计及验证工作。但是,随着集成电路的集成度和设计复杂度的提升,以及各种新的工艺制程、新的器件结构的发展,开发及验证周期也大幅增长。另外,在前端电路设计和后端版图设计,还有从一个工艺制程节点到另一个工艺制程节点,有必要进行设计迁移来加速电路设计,而随着设计复杂度的提升和工艺制程的发展,在设计迁移上投入的人工消耗也大幅增长。In chip design such as large-scale mixed-signal circuit and analog circuit design, it is generally necessary to use Process Design Kit (PDK) to complete the design and verification work. However, with the improvement of the integration level and design complexity of integrated circuits, as well as the development of various new processes and new device structures, the development and verification cycle has also increased significantly. In addition, in front-end circuit design and back-end layout design, and from one process node to another process node, it is necessary to carry out design migration to speed up circuit design, and with the increase in design complexity and process development, The labor consumption invested in design migration has also increased significantly.
为此,本申请提供了一种制程设计套件器件库及设计迁移方法,可以有效地减少使用制程设计套件器件库的开发及验证周期,并且可以有效地减少在设计迁移上投入的时间和资源。Therefore, the application provides a process design kit device library and a design migration method, which can effectively reduce the development and verification cycle of using the process design kit device library, and can effectively reduce the time and resources invested in design migration.
发明内容Contents of the invention
第一方面,本申请提供了一种制程设计套件器件库。所述制程设计套件器件库包括:第一器件库,其中,所述第一器件库包括多个第一器件,所述多个第一器件基于通用工艺制程和通用工艺层预先确定;第二器件库,其中,所述第二器件库包括至少一个第二器件,所述第二器件库的结构和所述至少一个第二器件可配置为对应指定工艺制程并且可映射到指定工艺层。其中,针对待开发工艺制程,通过所述制程设计套件器件库的所述第一器件库提供所述待开发工艺制程的至少一部分以及通过所述制程设计套件器件库的所述第二器件库提供所述待开发工艺制程的剩余部分,所述待开发工艺制程的所述至少一部分通过比较所述待开发工艺制程和所述通用工艺制程确定。In a first aspect, the present application provides a process design kit device library. The process design kit device library includes: a first device library, wherein the first device library includes a plurality of first devices, and the plurality of first devices are predetermined based on a general process and a general process layer; the second device A library, wherein the second device library includes at least one second device, and the structure of the second device library and the at least one second device can be configured to correspond to a specified process and can be mapped to a specified process layer. Wherein, for the process to be developed, at least a part of the process to be developed is provided through the first device library of the process design kit device library and provided through the second device library of the process design kit device library For the remaining part of the process recipe to be developed, the at least a part of the process recipe to be developed is determined by comparing the process recipe to be developed with the general process recipe.
通过本申请的第一方面,通过基于通用工艺制程和通用工艺层预先确定的第一器件库和可配置为对应指定工艺制程并且可映射到指定工艺层的第二器件库,实现了通用器件库部分和可配置部分的解耦。这样通过制程设计套件器件库的可配置部分也即第二器件库,可以灵活地实现对新的半导体器件和新的半导体工艺的适配,同时可以通过制程设计套件器件库的通用器件库部分也即第一器件库来充分利用具有大量可用模型和设计规则的半导体器件以及成熟的可大规模应用的半导体工艺,从而有助于大幅减少开发和验证周期。Through the first aspect of the present application, the general device library is realized through the first device library predetermined based on the general process and the general process layer and the second device library that can be configured to correspond to the specified process and can be mapped to the specified process layer Decoupling of sections and configurable sections. In this way, through the configurable part of the process design kit device library, that is, the second device library, the adaptation to new semiconductor devices and new semiconductor processes can be flexibly realized, and at the same time, the general device library part of the process design kit device library can also be That is, the first device library to make full use of semiconductor devices with a large number of available models and design rules and mature semiconductor processes that can be applied on a large scale, thereby helping to greatly reduce the development and verification cycle.
在本申请的第一方面的一种可能的实现方式中,针对待迁移设计,通过比较与所述待迁移设计对应的迁移前工艺制程和迁移后工艺制程,确定所述制程设计套件器件库的所述第一器件库以及确定所述制程设计套件器件库的所述第二器件库,利用所述制程设计套件器件库完成所述待迁移设计的迁移。In a possible implementation of the first aspect of the present application, for the design to be migrated, by comparing the pre-migration process and the post-migration process corresponding to the design to be migrated, determine the The first device library and the second device library determining the process design kit device library use the process design kit device library to complete the migration of the design to be migrated.
在本申请的第一方面的一种可能的实现方式中,所述多个第一器件包括适用于所述通用工艺制程的晶体管、接触孔、互连线,所述第一器件库还包括所述多个第一器件各自的电学特性和设计规则。In a possible implementation manner of the first aspect of the present application, the plurality of first devices include transistors, contact holes, and interconnection lines suitable for the general process, and the first device library further includes the The electrical characteristics and design rules of each of the plurality of first devices are described.
在本申请的第一方面的一种可能的实现方式中,所述至少一个第二器件包括适用于所述指定工艺制程的基本元素,所述第二器件库还包括所述至少一个第二器件的与所述指定工艺制程相关联的电学特性和设计规则。In a possible implementation of the first aspect of the present application, the at least one second device includes basic elements suitable for the specified process, and the second device library further includes the at least one second device The electrical characteristics and design rules associated with the specified process.
在本申请的第一方面的一种可能的实现方式中,所述第一器件库还包括与所述通用工艺制程相关联的设计规则、电学规则、版图设计验证规则。In a possible implementation manner of the first aspect of the present application, the first device library further includes design rules, electrical rules, and layout verification rules associated with the general process.
在本申请的第一方面的一种可能的实现方式中,所述第二器件库的结构还可配置为对应与所述待开发工艺制程相关联的金属层结构。In a possible implementation manner of the first aspect of the present application, the structure of the second device library may also be configured to correspond to a metal layer structure associated with the process to be developed.
在本申请的第一方面的一种可能的实现方式中,所述制程设计套件器件库包括通用视图用于展示所述第一器件库和所述通用工艺层。In a possible implementation manner of the first aspect of the present application, the process design kit device library includes a general view for displaying the first device library and the general process layer.
在本申请的第一方面的一种可能的实现方式中,所述待开发工艺制程的所述至少一部分是所述待开发工艺制程和所述通用工艺制程之间的重合部分,所述待开发工艺制程的所述剩余部分是所述待开发工艺制程和所述通用工艺制程之间的不重合部分。In a possible implementation manner of the first aspect of the present application, the at least part of the process to be developed is an overlapping part between the process to be developed and the general process, and the process to be developed The remaining part of the process recipe is a non-overlapping part between the process recipe to be developed and the general process recipe.
在本申请的第一方面的一种可能的实现方式中,所述待迁移设计是电路设计,所述迁移前工艺制程和所述迁移后工艺制程分别是针对所述电路设计的前一工艺制程节点和后一工艺制程节点。In a possible implementation of the first aspect of the present application, the design to be migrated is a circuit design, and the pre-migration process and the post-migration process are respectively the previous process for the circuit design node and the next process node.
在本申请的第一方面的一种可能的实现方式中,所述待迁移设计是版图设计,所述迁移前工艺制程和所述迁移后工艺制程分别是针对所述版图设计的前一工艺制程节点和后一工艺制程节点。In a possible implementation of the first aspect of the present application, the design to be migrated is a layout design, and the pre-migration process and the post-migration process are respectively the previous process for the layout design node and the next process node.
在本申请的第一方面的一种可能的实现方式中,所述制程设计套件器件库的所述第一器件库是所述迁移前工艺制程和所述迁移后工艺制程之间的可复用部分,所述制程设计套件器件库的所述第二器件库是所述迁移前工艺制程和所述迁移后工艺制程之间的不可复用部分。In a possible implementation of the first aspect of the present application, the first device library of the process design kit device library is a reusable part, the second device library of the process design kit device library is a non-reusable part between the pre-migration process and the post-migration process.
在本申请的第一方面的一种可能的实现方式中,所述制程设计套件器件库用于在多个工艺制程节点之间的设计迁移,针对所述多个工艺制程节点之间的任一紧邻的成对工艺制程节点,通过比较该成对工艺制程节点中的前一工艺制程节点的工艺制程和后一工艺制程节点的工艺制程,基于所述第一器件库并且通过配置所述第二器件库从而完成该成对工艺制程节点之间的设计迁移。In a possible implementation of the first aspect of the present application, the process design kit device library is used for design migration between multiple process nodes, and for any of the multiple process nodes For adjacent paired process nodes, by comparing the process process of the previous process node and the process process of the next process node in the pair of process nodes, based on the first device library and by configuring the second The device library thus completes the design migration between the paired process nodes.
在本申请的第一方面的一种可能的实现方式中,通过所述制程设计套件器件库的所述第一器件库提供该成对工艺制程节点中的后一工艺制程节点的工艺制程的至少一部分以及通过所述制程设计套件器件库的所述第二器件库提供该成对工艺制程节点中的后一工艺制程节点的工艺制程的剩余部分。In a possible implementation of the first aspect of the present application, the first device library of the process design kit device library provides at least A portion and through said second device library of said process design kit device library provides the remainder of the process flow of a subsequent process node of the pair of process nodes.
在本申请的第一方面的一种可能的实现方式中,所述制程设计套件器件库的所述第一器件库是该成对工艺制程节点中的前一工艺制程节点的工艺制程和后一工艺制程节点的工艺制程之间的可复用部分,所述制程设计套件器件库的所述第二器件库是该成对工艺制程节点中的前一工艺制程节点的工艺制程和后一工艺制程节点的工艺制程之间的不可复用部分。In a possible implementation of the first aspect of the present application, the first device library of the process design kit device library is the process process of the previous process node and the subsequent process node in the paired process nodes. The reusable part between the process steps of the process node, the second device library of the process design kit device library is the process process of the previous process node and the subsequent process process in the pair of process nodes A non-reusable part between process steps of a node.
第二方面,本申请实施例提供了一种设计迁移方法。所述设计迁移方法包括:提供包括第一器件库和第二器件库的制程设计套件器件库,其中,所述第一器件库包括多个第一器件,所述多个第一器件基于通用工艺制程和通用工艺层预先确定,所述第二器件库包括至少一个第二器件,所述第二器件库的结构和所述至少一个第二器件可配置为对应指定工艺制程并且可映射到指定工艺层,所述第一器件库用于提供待开发工艺制程的至少一部分和所述第二器件库用于提供所述待开发工艺制程的剩余部分,所述待开发工艺制程的所述至少一部分通过比较所述待开发工艺制程和所述通用工艺制程确定;针对待迁移设计,通过比较与所述待迁移设计对应的迁移前工艺制程和迁移后工艺制程,确定所述制程设计套件器件库的所述第一器件库以及确定所述制程设计套件器件库的所述第二器件库;和利用所述制程设计套件器件库完成所述待迁移设计的迁移。In the second aspect, the embodiment of the present application provides a design migration method. The design migration method includes: providing a process design kit device library including a first device library and a second device library, wherein the first device library includes a plurality of first devices, and the plurality of first devices are based on a common process The process and general process layer are predetermined, the second device library includes at least one second device, the structure of the second device library and the at least one second device can be configured to correspond to a specified process and can be mapped to a specified process layer, the first device library is used to provide at least a part of the process to be developed and the second device library is used to provide the remaining part of the process to be developed, and the at least a part of the process to be developed is passed Comparing the process process to be developed and the general process process to determine; for the design to be migrated, by comparing the process process before migration and the process process after migration corresponding to the design to be migrated, determine all the components of the process design kit device library The first device library and determining the second device library of the process design kit device library; and using the process design kit device library to complete the migration of the design to be migrated.
通过本申请的第二方面,通过基于通用工艺制程和通用工艺层预先确定的第一器件库和可配置为对应指定工艺制程并且可映射到指定工艺层的第二器件库,实现了通用器件库部分和可配置部分的解耦。这样通过制程设计套件器件库的可配置部分也即第二器件库,可以灵活地实现对新的半导体器件和新的半导体工艺的适配,同时可以通过制程设计套件器件库的通用器件库部分也即第一器件库来充分利用具有大量可用模型和设计规则的半导体器件以及成熟的可大规模应用的半导体工艺,从而有助于大幅减少开发和验证周期。Through the second aspect of the present application, the general device library is realized through the first device library predetermined based on the general process and the general process layer and the second device library that can be configured to correspond to the specified process and can be mapped to the specified process layer Decoupling of sections and configurable sections. In this way, through the configurable part of the process design kit device library, that is, the second device library, the adaptation to new semiconductor devices and new semiconductor processes can be flexibly realized, and at the same time, the general device library part of the process design kit device library can also be That is, the first device library to make full use of semiconductor devices with a large number of available models and design rules and mature semiconductor processes that can be applied on a large scale, thereby helping to greatly reduce the development and verification cycle.
在本申请的第二方面的一种可能的实现方式中,所述待迁移设计是电路设计,所述迁移前工艺制程和所述迁移后工艺制程分别是针对所述电路设计的前一工艺制程节点和后一工艺制程节点。In a possible implementation of the second aspect of the present application, the design to be migrated is a circuit design, and the pre-migration process and the post-migration process are respectively the previous process for the circuit design node and the next process node.
在本申请的第二方面的一种可能的实现方式中,所述待迁移设计是版图设计,所述迁移前工艺制程和所述迁移后工艺制程分别是针对所述版图设计的前一工艺制程节点和后一工艺制程节点。In a possible implementation of the second aspect of the present application, the design to be migrated is a layout design, and the pre-migration process and the post-migration process are respectively the previous process for the layout design node and the next process node.
在本申请的第二方面的一种可能的实现方式中,所述制程设计套件器件库的所述第一器件库是所述迁移前工艺制程和所述迁移后工艺制程之间的可复用部分,所述制程设计套件器件库的所述第二器件库是所述迁移前工艺制程和所述迁移后工艺制程之间的不可复用部分。In a possible implementation of the second aspect of the present application, the first device library of the process design kit device library is a reusable part, the second device library of the process design kit device library is a non-reusable part between the pre-migration process and the post-migration process.
在本申请的第二方面的一种可能的实现方式中,所述制程设计套件器件库用于在多个工艺制程节点之间的设计迁移,针对所述多个工艺制程节点之间的任一紧邻的成对工艺制程节点,通过比较该成对工艺制程节点中的前一工艺制程节点的工艺制程和后一工艺制程节点的工艺制程,基于所述第一器件库并且通过配置所述第二器件库从而完成该成对工艺制程节点之间的设计迁移。In a possible implementation of the second aspect of the present application, the process design kit device library is used for design migration between multiple process nodes, and for any of the multiple process nodes For adjacent paired process nodes, by comparing the process process of the previous process node and the process process of the next process node in the pair of process nodes, based on the first device library and by configuring the second The device library thus completes the design migration between the paired process nodes.
在本申请的第二方面的一种可能的实现方式中,通过所述制程设计套件器件库的所述第一器件库提供该成对工艺制程节点中的后一工艺制程节点的工艺制程的至少一部分以及通过所述制程设计套件器件库的所述第二器件库提供该成对工艺制程节点中的后一工艺制程节点的工艺制程的剩余部分。In a possible implementation of the second aspect of the present application, the first device library of the process design kit device library provides at least A portion and through said second device library of said process design kit device library provides the remainder of the process flow of a subsequent process node of the pair of process nodes.
在本申请的第二方面的一种可能的实现方式中,所述制程设计套件器件库的所述第一器件库是该成对工艺制程节点中的前一工艺制程节点的工艺制程和后一工艺制程节点的工艺制程之间的可复用部分,所述制程设计套件器件库的所述第二器件库是该成对工艺制程节点中的前一工艺制程节点的工艺制程和后一工艺制程节点的工艺制程之间的不可复用部分。In a possible implementation of the second aspect of the present application, the first device library of the process design kit device library is the process process of the previous process node and the next process node in the pair of process nodes. The reusable part between the process steps of the process node, the second device library of the process design kit device library is the process process of the previous process node and the subsequent process process in the pair of process nodes A non-reusable part between process steps of a node.
第三方面,本申请实施例还提供了一种计算机设备,所述计算机设备包括存储器、处理器及存储在所述存储器上并可在所述处理器上运行的计算机程序,所述处理器执行所述计算机程序时实现根据上述任一方面的任一种实现方式的方法。In the third aspect, the embodiment of the present application also provides a computer device, the computer device includes a memory, a processor, and a computer program stored in the memory and operable on the processor, and the processor executes The computer program implements the method according to any implementation manner of any of the above aspects.
第四方面,本申请实施例还提供了一种计算机可读存储介质,所述计算机可读存储介质存储有计算机指令,当所述计算机指令在计算机设备上运行时使得所述计算机设备执行根据上述任一方面的任一种实现方式的方法。In the fourth aspect, the embodiment of the present application also provides a computer-readable storage medium, the computer-readable storage medium stores computer instructions, and when the computer instructions are run on the computer equipment, the computer equipment executes the above-mentioned A method of any implementation of any aspect.
第五方面,本申请实施例还提供了一种计算机程序产品,所述计算机程序产品包括存储在计算机可读存储介质上的指令,当所述指令在计算机设备上运行时使得所述计算机设备执行根据上述任一方面的任一种实现方式的方法。In the fifth aspect, the embodiment of the present application also provides a computer program product, the computer program product includes instructions stored on a computer-readable storage medium, and when the instructions are run on a computer device, the computer device executes A method according to any implementation manner of any of the foregoing aspects.
附图说明Description of drawings
为了更清楚地说明本申请实施例技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to illustrate the technical solutions of the embodiments of the present application more clearly, the drawings that need to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present application. Ordinary technicians can also obtain other drawings based on these drawings on the premise of not paying creative work.
图1为本申请实施例提供的一种制程设计套件器件库的示意图;FIG. 1 is a schematic diagram of a process design kit device library provided by an embodiment of the present application;
图2为本申请实施例提供的一种基于制程设计套件器件库的设计迁移的示意图;FIG. 2 is a schematic diagram of a design migration based on a process design kit device library provided by an embodiment of the present application;
图3为本申请实施例提供的一种设计迁移方法的流程示意图;FIG. 3 is a schematic flow chart of a design migration method provided in an embodiment of the present application;
图4为本申请实施例提供的一种计算设备的结构示意图。FIG. 4 is a schematic structural diagram of a computing device provided by an embodiment of the present application.
具体实施方式Detailed ways
下面将结合附图对本申请实施例作进一步地详细描述。The embodiments of the present application will be further described in detail below in conjunction with the accompanying drawings.
应当理解的是,在本申请的描述中,“至少一个”指一个或一个以上,“多个”指两个或两个以上。另外,“第一”、“第二”等词汇,除非另有说明,否则仅用于区分描述的目的,而不能理解为指示或暗示相对重要性,也不能理解为指示或暗示顺序。It should be understood that in the description of the present application, "at least one" means one or more than one, and "plurality" means two or more. In addition, words such as "first" and "second", unless otherwise specified, are only used for the purpose of distinguishing and describing, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying order.
图1为本申请实施例提供的一种制程设计套件器件库的示意图。如图1所示,制程设计套件器件库A 100包括第一器件库110和第二器件库120。其中,所述第一器件库110包括多个第一器件。图1中示例性示出了第一器件A112、第一器件B114和第一器件C116。第一器件库110可以包括任意数量的第一器件。所述多个第一器件基于通用工艺制程130和通用工艺层132预先确定。第二器件库120包括至少一个第二器件。图1中示例性示出了第二器件A122和第二器件B124。第二器件库120可以包括任意数量的第二器件。第二器件库120的结构和所述至少一个第二器件(例如第二器件A122和第二器件B124)可配置为对应指定工艺制程140并且可映射到指定工艺层142。其中,针对待开发工艺制程,通过所述制程设计套件器件库A 100的所述第一器件库110提供所述待开发工艺制程的至少一部分以及通过所述制程设计套件器件库A 100的所述第二器件库120提供所述待开发工艺制程的剩余部分,所述待开发工艺制程的所述至少一部分通过比较所述待开发工艺制程和所述通用工艺制程130确定。制程设计套件器件库A 100用于提供制程设计套件(Process Design Kit,PDK),制程设计套件是用于搭建在芯片设计公司、代工厂与电子设计自动化(Electronic designautomation,EDA)公司之间沟通的桥梁。一般地,制程设计套件器件库A 100以及所提供的制程设计套件,包含了用于芯片设计及验证工作的技术文件包。在一些实施例中,制程设计套件包含了反映制造工艺基本的元素,例如晶体管、接触孔、互连线等。在一些实施例中,制程设计套件的内容还包括设计规则文件、电学规则文件、版图层次定义文件、SPICE仿真模型、器件版图和期间定制参数等。制程设计套件器件库A 100以及所提供的制程设计套件与半导体工艺紧密相关,其中包含一组描述半导体工艺细节的文件用于芯片设计EDA工具使用。在芯片投产前一般使用晶圆厂提供的制程设计套件,确保晶圆厂能够基于芯片设计生产芯片,从而确保芯片的预期功能和性能。当需要开发新的半导体工艺时,例如针对待开发工艺制程,需要开发配套的制程设计套件,其中用代工厂的语言定义了一套反映代工厂的半导体工艺的文档材料,这样可以用于芯片设计时的物理验证,这也是决定了芯片是否流片成败的关键因素。示例性的且非限制性的,制程设计套件器件库A 100以及所提供的制程设计套件,可以包含以下一项或者多项内容,包括但是不限于:器件模型(Device Model),由代工厂提供的仿真模型文件;用于原理图设计的符号,其中参数化的设计单元通过了仿真验证;组件描述格式(Component Description Format,CDF),器件的属性描述文件,其定义了器件的类型、名称、参数以及参数调用关系函数集、器件模型、器件的视图格式等;参数化单元(Parameterized Cell,Pcell),描述晶体管及其他器件的可能定制方法;技术文件,用于版图设计和验证的工艺文件,包含设计数据层和工艺层的映射关系定义、设计数据层的属性定义、在线设计规则、电气规则、显示色彩定义和图形格式定义等;物理验证规则文件,包含版图验证文件等。FIG. 1 is a schematic diagram of a process design kit device library provided by an embodiment of the present application. As shown in FIG. 1 , the process design kit device library A 100 includes a first device library 110 and a second device library 120 . Wherein, the first device library 110 includes a plurality of first devices. A first device A 112 , a first device B 114 and a first device C 116 are exemplarily shown in FIG. 1 . The first device library 110 may include any number of first devices. The multiple first devices are predetermined based on the common process recipe 130 and the common process layer 132 . The second device library 120 includes at least one second device. A second device A 122 and a second device B 124 are exemplarily shown in FIG. 1 . The second device library 120 may include any number of second devices. The structure of the second device library 120 and the at least one second device (eg, the second device A 122 and the second device B 124 ) may be configured to correspond to a specified process recipe 140 and may be mapped to a specified process layer 142 . Wherein, for the process to be developed, the first device library 110 of the process design kit device library A 100 provides at least a part of the process to be developed and the first device library A 100 of the process design kit The second device library 120 provides the remaining part of the process recipe to be developed, the at least a part of the process recipe to be developed is determined by comparing the process recipe to be developed with the general process recipe 130 . The process design kit device library A 100 is used to provide a process design kit (Process Design Kit, PDK), which is used to build communication between chip design companies, foundries and electronic design automation (EDA) companies bridge. Generally, the process design kit device library A 100 and the provided process design kit include a technical file package for chip design and verification work. In some embodiments, the process design kit includes basic elements reflecting the manufacturing process, such as transistors, contact holes, interconnection lines, and the like. In some embodiments, the content of the process design kit also includes design rule files, electrical rule files, layout level definition files, SPICE simulation models, device layout and period customization parameters, etc. The process design kit device library A 100 and the provided process design kit are closely related to the semiconductor process, which contains a set of files describing the details of the semiconductor process for chip design EDA tools. Before the chip is put into production, the process design kit provided by the fab is generally used to ensure that the fab can produce chips based on the chip design, thereby ensuring the expected function and performance of the chip. When it is necessary to develop a new semiconductor process, for example, for the process to be developed, it is necessary to develop a supporting process design kit, which defines a set of document materials reflecting the semiconductor process of the foundry in the language of the foundry, which can be used for chip design. The physical verification at the time is also the key factor that determines the success or failure of the chip. Exemplary and non-limiting, the process design kit device library A 100 and the provided process design kit may include one or more of the following contents, including but not limited to: device model (Device Model), provided by the foundry The simulation model file; the symbol used for schematic design, in which the parameterized design unit has passed the simulation verification; the component description format (Component Description Format, CDF), the attribute description file of the device, which defines the type, name, Parameters and parameter call relationship function sets, device models, device view formats, etc.; parameterized cells (Parameterized Cell, Pcell), which describe possible customization methods for transistors and other devices; technical documents, process documents for layout design and verification, Including the definition of the mapping relationship between the design data layer and the process layer, the attribute definition of the design data layer, online design rules, electrical rules, display color definition and graphic format definition, etc.; physical verification rule files, including layout verification files, etc.
继续参阅图1,如上所述,制程设计套件PDK与半导体工艺的相关细节密切相关,一方面要反映半导体制造工艺的基本要素如晶体管、接触孔、互连线等,另一方面也要体现较为宏观的规则、模型等信息例如设计规则文件、电学规则文件、版图层次定义文件、SPICE仿真模型、器件版图和期间定制参数等。因此,制程设计套件PDK作为在芯片设计公司、代工厂与EDA公司之间沟通的桥梁,不仅要适配代工厂所采用的具体半导体工艺(例如由晶圆厂、代工厂提供反映了其半导体工艺的文档材料等),而且要适配EDA公司提供的EDA工具的有关特性(例如EDA公司开发的EDA工具可能在器件模型、参数化单元还有验证规则等方面有改进),也需要考虑到芯片设计公司在电路设计、版图设计上的需求例如要实现特定的芯片功能、要采用特定的器件或者运用特定的半导体工艺等。这样意味着,对于新开发的半导体工艺,例如针对待开发工艺制程,需要综合考虑芯片设计公司、代工厂与EDA公司之间的沟通和协作,并且制程设计套件作为芯片设计和物理验证环节的基石也是芯片制造成败的关键因素。而随着半导体器件、半导体工艺等发展,新的工艺制程、新的器件结构如金属层结构等,新的器件的电学特性以及设计规则等,这些都需要在芯片设计开发过程中通过制程设计套件有所体现。例如,制程设计套件器件库A 100需要针对新的半导体器件,提供其金属层结构、电学特性以及相关设计规则、物理验证规则方面的技术细节,还需要针对新的半导体工艺如新的工艺制程包含描述了相关联的半导体工艺细节的技术文件。随着集成电路的规模和设计复杂度日益增加,需要通过高质量高效率的制程设计套件器件库来尽量缩短芯片开发和验证的周期,提高芯片设计效率同时也尽量降低成本。另外,在芯片开发的整个流程中,涉及到前端电路图设计和后端版图设计,还可能涉及到工艺制程上的差异以及不同的设计数据库之间的差异,有时候需要从一个工艺制程节点到另一个工艺制成节点进行工艺制成级的设计迁移,这些也依赖高质量高效率的制程设计套件器件库来缩短设计迁移所需的人工投入和时间。Continue to refer to Figure 1. As mentioned above, the process design kit PDK is closely related to the relevant details of the semiconductor process. On the one hand, it must reflect the basic elements of the semiconductor manufacturing process such as transistors, contact holes, and interconnection lines. Macro information such as rules and models, such as design rule files, electrical rule files, layout level definition files, SPICE simulation models, device layout and period customization parameters, etc. Therefore, as a bridge for communication between chip design companies, foundries and EDA companies, the process design kit PDK must not only adapt to the specific semiconductor process used by the foundry (for example, provided by the fab and foundry to reflect its semiconductor process) Documentation materials, etc.), and to adapt to the relevant characteristics of the EDA tools provided by the EDA company (for example, the EDA tools developed by the EDA company may have improvements in device models, parameterized units, and verification rules, etc.), and it is also necessary to consider the chip The design company's requirements on circuit design and layout design, such as realizing specific chip functions, using specific devices, or using specific semiconductor processes, etc. This means that for a newly developed semiconductor process, for example, for the process to be developed, it is necessary to comprehensively consider the communication and collaboration between the chip design company, the foundry and the EDA company, and the process design kit serves as the cornerstone of the chip design and physical verification process It is also a key factor in the success or failure of chip manufacturing. With the development of semiconductor devices and semiconductor processes, new processes, new device structures such as metal layer structures, new device electrical characteristics and design rules, etc., all of these need to be passed in the chip design and development process. Shown. For example, the process design kit device library A 100 needs to provide technical details of its metal layer structure, electrical characteristics, related design rules, and physical verification rules for new semiconductor devices, and it also needs to target new semiconductor processes such as new process processes. A technical document describing the details of an associated semiconductor process. With the increasing scale and design complexity of integrated circuits, it is necessary to use high-quality and high-efficiency process design kit device libraries to shorten the chip development and verification cycle as much as possible, improve chip design efficiency and reduce costs as much as possible. In addition, in the entire process of chip development, it involves front-end circuit diagram design and back-end layout design, and may also involve process differences and differences between different design databases. Sometimes it is necessary to transfer from one process node to another. A process manufacturing node performs process manufacturing-level design migration, which also relies on high-quality and high-efficiency process design kit device libraries to shorten the labor input and time required for design migration.
继续参阅图1,制程设计套件器件库A 100包括第一器件库110和第二器件库120。第一器件库110所包括的所述多个第一器件基于通用工艺制程130和通用工艺层132预先确定。第二器件库120的结构和第二器件库120所包括的所述至少一个第二器件可配置为对应指定工艺制程140并且可映射到指定工艺层142。这里,通用工艺制程130对应了半导体工艺制程中通用的、常见的或者说大规模成熟应用的工艺制程。通用工艺层132对应了与通用工艺制程130相关联的金属层结构、工艺制造层等。上面提到,制程设计套件与工艺制程及器件结构信息如金属层结构等密切相关。因此,所述多个第一器件基于通用工艺制程130和通用工艺层132预先确定,这意味着所述多个第一器件,例如第一器件A112等,是通用型的半导体器件,其对应了通用的半导体工艺制程以及通用的器件结构信息,如通用的工艺制造层和通用的金属层结构等。因此,第一器件库110所包括的多个第一器件也反映了通用半导体制造工艺的有关基本要素,例如通用工艺制程130和通用工艺层132相关联的晶体管、接触孔、互连线等。第一器件库110所包括的多个第一器件也体现了通用半导体制造工艺的有关宏观因素,例如通用工艺制程130和通用工艺层132相关联的设计规则文件、电学规则文件、版图层次定义文件、SPICE仿真模型、器件版图和期间定制参数等。因此,第一器件库及其结构有利于快速地使用通用的器件列表和工艺制造层信息还有器件电学特性和设计规则等,从而有利于高效高质地搭建制程设计套件器件库A 100。相对的,第二器件库120的结构和第二器件库120所包括的所述至少一个第二器件可配置为对应指定工艺制程140并且可映射到指定工艺层142。指定工艺制程140是相对于通用工艺制程130而言,可以对应相对不那么常见的工艺制程,如新开发的工艺制程或者应用面较窄的工艺制程。指定工艺层142是相对于通用工艺层132而言,对应了与指定工艺制程140相关联的金属层结构、工艺制造层等。上面提到,制程设计套件与工艺制程及器件结构信息如金属层结构等密切相关。因此,第二器件库120的结构和第二器件库120所包括的所述至少一个第二器件可配置为对应指定工艺制程140并且可映射到指定工艺层142,这意味着所述至少一个第二器件,例如第二器件A122,是针对指定工艺制程140的半导体器件,其对应了指定工艺制程140以及与指定工艺制程140相关联的器件结构信息如工艺制造层和金属层结构等。第二器件库120所包括的所述至少一个第二器件也反映了指定工艺制程140相关联的晶体管、接触孔、互连线等。第二器件库120的结构和所述至少一个第二器件也体现了宏观因素,例如指定工艺制程140和指定工艺层142相关联的设计规则文件、电学规则文件、版图层次定义文件、SPICE仿真模型、器件版图和期间定制参数等。并且,第二器件库120的结构和第二器件库120所包括的所述至少一个第二器件是可配置的,也就是说可以对第二器件库120的结构还有所述至少一个第二器件共同地或者分别地进行配置,从而可以对应指定工艺制程140并且可映射到指定工艺层142,这样意味着可以灵活地改变指定工艺制程140和/或指定工艺层142(例如引入新的半导体工艺制程或者新的工艺制造层等),然后通过再配置第二器件库120的结构和所述至少一个第二器件来反映对指定工艺制程140和/或指定工艺层142所做出的改变。第一器件库110可以理解为制程设计套件器件库A 100的通用器件库部分,第二器件库120可以理解为制程设计套件器件库A 100的可配置部分。如此,通过基于通用工艺制程130和通用工艺层132预先确定的第一器件库110和可配置为对应指定工艺制程140并且可映射到指定工艺层142的第二器件库120,实现了通用器件库部分和可配置部分的解耦。这样通过制程设计套件器件库A 100的可配置部分也即第二器件库120,可以灵活地实现对新的半导体器件和新的半导体工艺的适配,同时可以通过制程设计套件器件库A 100的通用器件库部分也即第一器件库110来充分利用具有大量可用模型和设计规则的半导体器件以及成熟的可大规模应用的半导体工艺,从而有助于大幅减少开发和验证周期。因此,针对特定工艺制程,通过在第一器件库110和第二器件库120之间的分工及组合,可以快速高效地构建起相配套的制程设计套件器件库A 100,用于实现采用该特定工艺制程的芯片设计及验证。Continuing to refer to FIG. 1 , the process design kit device library A 100 includes a first device library 110 and a second device library 120 . The multiple first devices included in the first device library 110 are predetermined based on the common process recipe 130 and the common process layer 132 . The structure of the second device library 120 and the at least one second device included in the second device library 120 may be configured to correspond to a specified process recipe 140 and may be mapped to a specified process layer 142 . Here, the general process 130 corresponds to a general, common or large-scale mature application process in the semiconductor process. The general process layer 132 corresponds to the metal layer structure, process manufacturing layer, etc. associated with the general process 130 . As mentioned above, the process design kit is closely related to the process and device structure information such as metal layer structure. Therefore, the multiple first devices are predetermined based on the general process flow 130 and the common process layer 132, which means that the multiple first devices, such as the first device A112, etc., are general-purpose semiconductor devices, which correspond to General semiconductor process and general device structure information, such as general process manufacturing layer and general metal layer structure, etc. Therefore, the plurality of first devices included in the first device library 110 also reflect relevant basic elements of the general semiconductor manufacturing process, such as transistors, contact holes, interconnection lines, etc. associated with the general process 130 and the general process layer 132 . The multiple first devices included in the first device library 110 also reflect relevant macro factors of the general semiconductor manufacturing process, such as design rule files, electrical rule files, and layout level definition files associated with the general process flow 130 and the general process layer 132 , SPICE simulation model, device layout and period custom parameters, etc. Therefore, the first device library and its structure are conducive to the rapid use of common device list and process manufacturing layer information as well as device electrical characteristics and design rules, thereby facilitating the efficient and high-quality construction of the process design kit device library A100. In contrast, the structure of the second device library 120 and the at least one second device included in the second device library 120 may be configured to correspond to a specified process 140 and may be mapped to a specified process layer 142 . The designated process 140 is relative to the general process 130 , and may correspond to a relatively uncommon process, such as a newly developed process or a process with narrow application. The specified process layer 142 is relative to the general process layer 132 , and corresponds to the metal layer structure, process manufacturing layer, etc. associated with the specified process 140 . As mentioned above, the process design kit is closely related to the process and device structure information such as metal layer structure. Therefore, the structure of the second device library 120 and the at least one second device included in the second device library 120 can be configured to correspond to the specified process recipe 140 and can be mapped to the specified process layer 142, which means that the at least one first The second device, such as the second device A122, is a semiconductor device for a specified process 140, which corresponds to the specified process 140 and device structure information associated with the specified process 140, such as process manufacturing layer and metal layer structure. The at least one second device included in the second device library 120 also reflects transistors, contact holes, interconnection lines, etc. associated with the specified process 140 . The structure of the second device library 120 and the at least one second device also reflect macro factors, such as design rule files, electrical rule files, layout level definition files, and SPICE simulation models associated with the specified process 140 and the specified process layer 142 , device layout and period customization parameters, etc. Moreover, the structure of the second device library 120 and the at least one second device included in the second device library 120 are configurable, that is to say, the structure of the second device library 120 and the at least one second device can be configured. The devices are configured jointly or separately so that they can correspond to the specified process 140 and can be mapped to the specified process layer 142, which means that the specified process 140 and/or the specified process layer 142 can be flexibly changed (for example, introducing a new semiconductor process process or a new process manufacturing layer, etc.), and then reflect the changes made to the specified process recipe 140 and/or the specified process layer 142 by reconfiguring the structure of the second device library 120 and the at least one second device. The first device library 110 can be understood as a general device library part of the process design kit device library A 100 , and the second device library 120 can be understood as a configurable part of the process design kit device library A 100 . In this way, the general device library is realized through the first device library 110 predetermined based on the general process 130 and the general process layer 132 and the second device library 120 that can be configured to correspond to the specified process 140 and can be mapped to the specified process layer 142 Decoupling of sections and configurable sections. In this way, the second device library 120, which is the configurable part of the process design kit device library A 100, can flexibly realize the adaptation to new semiconductor devices and new semiconductor processes, and at the same time, the process design kit device library A 100 can The common device library part, ie, the first device library 110, makes full use of semiconductor devices with a large number of available models and design rules and mature semiconductor processes that can be applied on a large scale, thereby helping to greatly reduce the development and verification cycle. Therefore, for a specific process, through the division of labor and combination between the first device library 110 and the second device library 120, a matching process design kit device library A 100 can be quickly and efficiently constructed to realize the use of the specific process. Process chip design and verification.
继续参阅图1,应当理解的是,制程设计套件器件库A 100的通用器件库部分也即第一器件库110与制程设计套件器件库A 100的可配置部分也即第二器件库120之间是相对概念。特定器件或者特定工艺制程,在一些业务场景下可能被划分到第一器件库110,但是在另一些业务场景下可能被划分到第二器件库120。这可能是因为在一些业务场景下,该特定器件或者该特定工艺制程属于常见的、通用的或者大规模应用的类型,但是在另一些业务场景下,该特定器件或者该特定工艺制程属于少见的、不通用的或者应用范围较小的类型。例如,用于高速数字通信电路的关键器件如某些特别设计的晶体管等,在通信相关的业务场景下(例如用于通信的芯片设计),可能占用了芯片设计方案中的相当一部分,如属于关键的芯片功能设计,这时可能适合划分到第一器件库110,也就是说基于通用工艺制程130和通用工艺层132预先确定,这样有助于降低开发周期和利用成熟工艺制程来降低成本。但是,这样特别设计的晶体管,在其它业务场景下例如存储相关的业务场景下(例如存储芯片设计),可能只占用芯片设计方案中的很小一部分,如属于相对次要的芯片功能设计,这时可能适合划分到第二器件库120,也就是说可配置为对应指定工艺制程140并且可映射到指定工艺层142,这样有助于利用可配置的特性快速搭建起适合存储芯片设计的业务场景的制程设计套件器件库A 100。另外,有些器件模型或者工艺制程迭代频率较高、迭代速度快,也可能适合划分到第二器件库120,这样能更好地利用可配置的特性更好地实现对新的半导体器件和新的半导体工艺的适配。因此,具体的芯片设计目的、客户需求、业务场景、技术迭代速度等各种因素决定了制程设计套件器件库A 100的通用器件库部分也即第一器件库110与制程设计套件器件库A 100的可配置部分也即第二器件库120之间的划分。图1所示的制程设计套件器件库A 100,不仅实现了通用器件库部分和可配置部分的解耦,而且可以根据具体的业务场景、芯片设计目的、客户需求、业务场景、技术迭代速度等来灵活地调整通用器件库部分和可配置部分之间的划分,有助于快速高效地构建起相配套的制程设计套件器件库A 100。Continuing to refer to FIG. 1 , it should be understood that there is a gap between the common device library part of the process design kit device library A 100, that is, the first device library 110, and the configurable part of the process design kit device library A 100, that is, the second device library 120 is a relative concept. A specific device or a specific process may be divided into the first device library 110 in some business scenarios, but may be divided into the second device library 120 in other business scenarios. This may be because in some business scenarios, the specific device or the specific process is common, common or large-scale application type, but in other business scenarios, the specific device or the specific process is rare , non-universal or less applicable types. For example, key devices used in high-speed digital communication circuits, such as certain specially designed transistors, may occupy a considerable part of the chip design scheme in communication-related business scenarios (such as chip design for communication), such as belonging to At this time, the key chip function design may be suitable to be divided into the first device library 110, that is to say, it is pre-determined based on the general process 130 and the common process layer 132, which helps to reduce the development cycle and reduce the cost by utilizing the mature process. However, such specially designed transistors may only take up a small part of the chip design in other business scenarios such as storage-related business scenarios (such as memory chip design). It may be suitable to be divided into the second device library 120, that is to say, it can be configured to correspond to the specified process process 140 and can be mapped to the specified process layer 142, which helps to quickly build a business scenario suitable for memory chip design using configurable features Process Design Kit Library A 100. In addition, some device models or process iterations have a high iteration frequency and a fast iteration speed, and may also be suitable for being divided into the second device library 120, so that configurable features can be better used to better implement new semiconductor devices and new Adaptation of semiconductor process. Therefore, various factors such as specific chip design purposes, customer needs, business scenarios, and technology iteration speed determine the general device library part of the process design kit device library A 100, that is, the first device library 110 and the process design kit device library A 100 The configurable part of , that is, the division between the second device library 120 . The process design kit device library A 100 shown in Figure 1 not only realizes the decoupling of the general device library part and the configurable part, but also can be customized according to specific business scenarios, chip design purposes, customer needs, business scenarios, technology iteration speed, etc. to flexibly adjust the division between the common device library part and the configurable part, and help to quickly and efficiently build a matching process design kit device library A 100 .
继续参阅图1,以电容这一器件为例说明下制程设计套件器件库A 100的通用器件库部分也即第一器件库110与制程设计套件器件库A 100的可配置部分也即第二器件库120之间的划分。设第一器件库110包括场效应管电容这一器件,例如可以设图1所示的第一器件A112是场效应管电容。场效应管指的是金属氧化物半导体场效应晶体管(Metal-Oxide-Semiconductor Field-Effect Transistor,MOSFET),场效应管电容是基于MOSFET实现的电容,简称MOS电容。场效应管电容将MOSFET作为电容,其原理是利用了MOSFET的栅极(gate)与沟道之间的栅氧作为绝缘介质,将栅极作为上极板而将源漏和衬底三端短接一起组成下极板。场效应管电容也即MOS电容以及其相关的半导体工艺制程,属于常见的、通用的或者大规模应用的类型。因此,在一般情况下,MOS电容适合划分到第一器件库110,也就是说基于通用工艺制程130和通用工艺层132预先确定,这样有助于降低开发周期和利用成熟工艺制程来降低成本。相对的,金属绝缘体金属(Metal-Insulator-Metal,MIM)电容也叫MIM电容,指的是利用金属绝缘体金属元件来构建电容。其中,MIM是由金属、绝缘体、金属三层薄膜组成的夹心结构。MIM电容一般由最顶层二层金属和中间特殊的金属层构成。MIM电容相当于一个平行板电容,最顶层的二层金属间距较大,形成的电容容值很小。MIM电容中间的介质层比较薄,形成的电容密度较高。MIM电容具有寄生电容较小且精度高的特性。MOS电容的电容值确定性和稳定性不如MIM电容,相比与MOS电容,MIM电容电容值较精确,电容值不会随偏压变化而变化,也被称为极板电容。但是在相关的半导体工艺制程上,MIM电容,比起MOS电容,需要额外的工艺和额外的掩模,并且因为MIM电容的特性也需要使用高介电常数的介电层材料。采用了MIM电容这一器件的芯片设计,需要面对如降低的集成电容的线性度和降低的线性系统的稳定性等难题。因此,通过将MOS电容划分到第一器件库110例如设第一器件A112为MOS电容,将MIM电容划分到第二器件库120例如设第二器件A122为MIM电容,这样可以基于通用工艺制程130和通用工艺层132预先确定MOS电容,从而降低开发周期和利用成熟工艺制程来降低成本;另一方面,还可以配置MIM电容为对应指定工艺制程并且可映射到指定工艺层,这样可以针对MIM电容的特性和设计上的难题,更好地适配MIM电容这一器件模型的电气特性、设计规则及相关的半导体工艺制程,还可以更灵活地采用为MIM电容做出的工艺优化,最后快速高效地构建起相配套的制程设计套件器件库A 100。Continuing to refer to FIG. 1, taking the capacitor as an example to illustrate the common device library part of the process design kit device library A 100, that is, the first device library 110 and the configurable part of the process design kit device library A 100, that is, the second device partition between libraries 120 . Assuming that the first device library 110 includes a device such as a field effect transistor capacitor, for example, it may be assumed that the first device A112 shown in FIG. 1 is a field effect transistor capacitor. Field-effect transistor refers to metal-oxide-semiconductor field-effect transistor (Metal-Oxide-Semiconductor Field-Effect Transistor, MOSFET), and field-effect transistor capacitor is a capacitor based on MOSFET, referred to as MOS capacitor. Field effect tube capacitors use MOSFETs as capacitors. The principle is to use the gate oxide between the gate (gate) and the channel of the MOSFET as the insulating medium, and use the gate as the upper plate to short-circuit the source, drain and substrate. Connect together to form the lower plate. Field effect tube capacitors, also known as MOS capacitors and their related semiconductor processes, are common, general-purpose or large-scale application types. Therefore, in general, MOS capacitors are suitable to be divided into the first device library 110, that is to say predetermined based on the general process 130 and the common process layer 132, which helps to reduce the development cycle and reduce costs by using mature processes. In contrast, metal-insulator-metal (Metal-Insulator-Metal, MIM) capacitors are also called MIM capacitors, which refer to the use of metal insulator metal components to build capacitors. Among them, MIM is a sandwich structure composed of metal, insulator, and metal three-layer film. MIM capacitors are generally composed of the top two layers of metal and a special metal layer in the middle. The MIM capacitor is equivalent to a parallel plate capacitor, and the distance between the two layers of metal on the top layer is relatively large, resulting in a small capacitance value. The dielectric layer in the middle of the MIM capacitor is relatively thin, and the formed capacitance density is relatively high. The MIM capacitor has the characteristics of small parasitic capacitance and high precision. The certainty and stability of the capacitance value of MOS capacitors is not as good as that of MIM capacitors. Compared with MOS capacitors, the capacitance values of MIM capacitors are more accurate, and the capacitance value will not change with the change of bias voltage. It is also called plate capacitance. However, in the related semiconductor process, the MIM capacitor requires additional processes and additional masks compared with the MOS capacitor, and because of the characteristics of the MIM capacitor, it is also necessary to use a dielectric layer material with a high dielectric constant. The chip design using the MIM capacitor needs to face such difficulties as the reduced linearity of the integrated capacitor and the reduced stability of the linear system. Therefore, by dividing the MOS capacitors into the first device library 110, for example, setting the first device A112 as a MOS capacitor, and dividing the MIM capacitors into the second device library 120, for example, setting the second device A122 as a MIM capacitor, this can be based on the general process 130 and common process layer 132 to predetermine MOS capacitors, thereby reducing the development cycle and utilizing mature processes to reduce costs; characteristics and design problems, better adapt to the electrical characteristics, design rules and related semiconductor process of the device model of MIM capacitors, and can also more flexibly adopt the process optimization made for MIM capacitors, and finally fast and efficient A matching process design kit device library A 100 is constructed in a timely manner.
继续参阅图1,上面提到,图1所示的制程设计套件器件库A 100,不仅实现了通用器件库部分和可配置部分的解耦,而且可以根据具体的业务场景、芯片设计目的、客户需求、业务场景、技术迭代速度等来灵活地调整通用器件库部分和可配置部分之间的划分,也就是可以在解耦基础上进行重构,也即解耦重构,有助于快速高效地构建起相配套的制程设计套件器件库A 100。因此,针对待开发工艺制程,通过所述制程设计套件器件库A 100的所述第一器件库110提供所述待开发工艺制程的至少一部分以及通过所述制程设计套件器件库A 100的所述第二器件库120提供所述待开发工艺制程的剩余部分,所述待开发工艺制程的所述至少一部分通过比较所述待开发工艺制程和所述通用工艺制程130确定。这样意味着可以充分利用图1所示的制程设计套件器件库A 100中的所述通用工艺制程130以及所述第一器件库110,从而降低开发周期和利用成熟工艺制程来降低成本,同时还考虑到了待开发工艺制程与所述通用工艺制程130之间的工艺制程差异,利用图1所示的制程设计套件器件库A 100中的第二器件库120来适配待开发工艺制程,有助于快速高效地构建起与待开发工艺制程相配套的制程设计套件器件库A 100。并且,通过将PDK器件库解耦为通用型器件库和可配置结构部分,可以通过通用视图来展示通用型器件库,还可以利用重构后的通用型器件库来快速完成指定工艺制程的PDK器件库的开发及验证,并且,通过复用再合并可配置部分的方法大幅提升PDK器件库的开发效率。因此,利用图1所示的制程设计套件器件库A 100的解耦再重构方案,可以大幅提升PDK器件库的开发及验证效率,同时通用型的PDK器件库结构有助于表现出不同工艺制程之间的异同点,可以在设计迁移流程上提供更加直接有效的帮助。Continue to refer to Figure 1. As mentioned above, the process design kit device library A 100 shown in Figure 1 not only realizes the decoupling of the general device library part and the configurable part, but also can Requirements, business scenarios, technology iteration speed, etc. to flexibly adjust the division between the general device library part and the configurable part, that is, refactoring can be performed on the basis of decoupling, that is, decoupling refactoring, which is helpful for fast and efficient A matching process design kit device library A 100 is constructed in a timely manner. Therefore, for the process to be developed, the first device library 110 of the process design kit device library A 100 provides at least a part of the process to be developed and the process design kit device library A 100. The second device library 120 provides the remaining part of the process recipe to be developed, the at least a part of the process recipe to be developed is determined by comparing the process recipe to be developed with the general process recipe 130 . This means that the general process 130 and the first device library 110 in the process design kit device library A 100 shown in FIG. Considering the process difference between the process to be developed and the general process 130, using the second device library 120 in the process design kit device library A 100 shown in FIG. 1 to adapt the process to be developed will help In order to quickly and efficiently build a process design kit device library A 100 matching the process to be developed. Moreover, by decoupling the PDK device library into a general-purpose device library and a configurable structure part, the general-purpose device library can be displayed through a general-purpose view, and the reconstructed general-purpose device library can be used to quickly complete the PDK of a specified process The development and verification of the device library, and the development efficiency of the PDK device library is greatly improved by reusing and merging the configurable parts. Therefore, using the decoupling and reconfiguration scheme of the process design kit device library A 100 shown in Figure 1 can greatly improve the development and verification efficiency of the PDK device library. The similarities and differences between the processes can provide more direct and effective help in the design migration process.
继续参阅图1,在芯片开发的整个流程中,涉及到前端电路图设计和后端版图设计,还可能涉及到工艺制程上的差异以及不同的设计数据库之间的差异,有时候需要从一个工艺制程节点到另一个工艺制成节点进行工艺制成级的设计迁移。通过图1所示的制程设计套件器件库A 100,利用通用器件库部分和可配置部分的解耦,可以根据具体的业务场景、芯片设计目的、客户需求、业务场景、技术迭代速度等来灵活地调整通用器件库部分和可配置部分之间的划分,从而满足设计迁移的需求,缩短设计迁移所需的人工投入和时间。Continue to refer to Figure 1. In the entire process of chip development, it involves front-end circuit diagram design and back-end layout design. It may also involve differences in process and different design databases. Sometimes it is necessary to start from a process. Process-manufacturing-level design migration from a node to another process-manufacturing node. Through the process design kit device library A 100 shown in Figure 1, by using the decoupling of the general device library part and the configurable part, it can be flexible according to specific business scenarios, chip design purposes, customer needs, business scenarios, technology iteration speed, etc. The division between the common device library part and the configurable part can be adjusted accurately, so as to meet the needs of design migration and shorten the labor input and time required for design migration.
在一种可能的实施方式中,针对待迁移设计,通过比较与所述待迁移设计对应的迁移前工艺制程和迁移后工艺制程,确定所述制程设计套件器件库A 100的所述第一器件库110以及确定所述制程设计套件器件库A 100的所述第二器件库120,利用所述制程设计套件器件库A 100完成所述待迁移设计的迁移。如此有助于满足设计迁移的需求,缩短设计迁移所需的人工投入和时间。In a possible implementation manner, for the design to be migrated, the first device of the process design kit device library A 100 is determined by comparing the pre-migration process and the post-migration process corresponding to the design to be migrated. Library 110 and the second device library 120 determining the process design kit device library A 100 , using the process design kit device library A 100 to complete the migration of the design to be migrated. This helps to meet the needs of design migration and shorten the labor input and time required for design migration.
在一种可能的实施方式中,所述多个第一器件包括适用于所述通用工艺制程130的晶体管、接触孔、互连线,所述第一器件库110还包括所述多个第一器件各自的电学特性和设计规则。在一种可能的实施方式中,所述至少一个第二器件包括适用于所述指定工艺制程140的基本元素,所述第二器件库120还包括所述至少一个第二器件的与所述指定工艺制程140相关联的电学特性和设计规则。在一种可能的实施方式中,所述第一器件库110还包括与所述通用工艺制程130相关联的设计规则、电学规则、版图设计验证规则。在一种可能的实施方式中,所述第二器件库120的结构还可配置为对应与所述待开发工艺制程相关联的金属层结构。如此,实现了通用器件库部分和可配置部分的解耦,而且可以根据具体的业务场景、芯片设计目的、客户需求、业务场景、技术迭代速度等来灵活地调整通用器件库部分和可配置部分之间的划分,有助于快速高效地构建起相配套的制程设计套件器件库A100。In a possible implementation manner, the plurality of first devices include transistors, contact holes, and interconnection lines suitable for the general process 130, and the first device library 110 further includes the plurality of first The electrical characteristics and design rules of each device. In a possible implementation manner, the at least one second device includes basic elements suitable for the specified process 140, and the second device library 120 further includes the at least one second device and the specified The electrical characteristics and design rules associated with the process recipe 140 . In a possible implementation manner, the first device library 110 further includes design rules, electrical rules, and layout verification rules associated with the general process 130 . In a possible implementation manner, the structure of the second device library 120 may also be configured to correspond to a metal layer structure associated with the process to be developed. In this way, the decoupling of the general device library part and the configurable part is realized, and the general device library part and the configurable part can be flexibly adjusted according to specific business scenarios, chip design purposes, customer needs, business scenarios, technology iteration speed, etc. The division among them helps to quickly and efficiently build a matching process design kit device library A100.
在一种可能的实施方式中,所述制程设计套件器件库A 100包括通用视图用于展示所述第一器件库110和所述通用工艺层132。如此,利用通用视图能更好地展示所述第一器件库110和所述通用工艺层132,有助于提高开发效率。In a possible implementation manner, the process design kit device library A 100 includes a general view for displaying the first device library 110 and the general process layer 132 . In this way, the first device library 110 and the common process layer 132 can be better displayed by using a common view, which helps to improve development efficiency.
在一种可能的实施方式中,所述待开发工艺制程的所述至少一部分是所述待开发工艺制程和所述通用工艺制程130之间的重合部分,所述待开发工艺制程的所述剩余部分是所述待开发工艺制程和所述通用工艺制程130之间的不重合部分。如此,有助于快速高效地构建起与待开发工艺制程相配套的制程设计套件器件库A 100。In a possible implementation manner, the at least part of the process to be developed is an overlapping part between the process to be developed and the general process 130, and the remaining part of the process to be developed A part is a non-overlapping part between the process recipe to be developed and the general process recipe 130 . In this way, it is helpful to quickly and efficiently build the process design kit device library A 100 matching the process to be developed.
在一种可能的实施方式中,所述待迁移设计是电路设计,所述迁移前工艺制程和所述迁移后工艺制程分别是针对所述电路设计的前一工艺制程节点和后一工艺制程节点。如此,有助于满足设计迁移的需求,缩短设计迁移所需的人工投入和时间。In a possible implementation manner, the design to be migrated is a circuit design, and the pre-migration process and the post-migration process are respectively the previous process node and the next process node of the circuit design . In this way, it is helpful to meet the requirements of design migration, and shorten the labor input and time required for design migration.
在一种可能的实施方式中,所述待迁移设计是版图设计,所述迁移前工艺制程和所述迁移后工艺制程分别是针对所述版图设计的前一工艺制程节点和后一工艺制程节点。如此,有助于满足设计迁移的需求,缩短设计迁移所需的人工投入和时间。In a possible implementation manner, the design to be migrated is a layout design, and the pre-migration process and the post-migration process are respectively the previous process node and the next process node of the layout design . In this way, it is helpful to meet the requirements of design migration, and shorten the labor input and time required for design migration.
在一种可能的实施方式中,所述制程设计套件器件库A 100的所述第一器件库110是所述迁移前工艺制程和所述迁移后工艺制程之间的可复用部分,所述制程设计套件器件库A 100的所述第二器件库120是所述迁移前工艺制程和所述迁移后工艺制程之间的不可复用部分。如此,有助于满足设计迁移的需求,缩短设计迁移所需的人工投入和时间。In a possible implementation manner, the first device library 110 of the process design kit device library A 100 is a reusable part between the pre-migration process and the post-migration process, the The second device library 120 of the process design kit device library A 100 is a non-reusable part between the pre-migration process and the post-migration process. In this way, it is helpful to meet the requirements of design migration, and shorten the labor input and time required for design migration.
在一种可能的实施方式中,所述制程设计套件器件库A 100用于在多个工艺制程节点之间的设计迁移,针对所述多个工艺制程节点之间的任一紧邻的成对工艺制程节点,通过比较该成对工艺制程节点中的前一工艺制程节点的工艺制程和后一工艺制程节点的工艺制程,基于所述第一器件库110并且通过配置所述第二器件库120从而完成该成对工艺制程节点之间的设计迁移。在一些实施例中,通过所述制程设计套件器件库A 100的所述第一器件库110提供该成对工艺制程节点中的后一工艺制程节点的工艺制程的至少一部分以及通过所述制程设计套件器件库A 100的所述第二器件库120提供该成对工艺制程节点中的后一工艺制程节点的工艺制程的剩余部分。在一些实施例中,所述制程设计套件器件库A100的所述第一器件库110是该成对工艺制程节点中的前一工艺制程节点的工艺制程和后一工艺制程节点的工艺制程之间的可复用部分,所述制程设计套件器件库A 100的所述第二器件库120是该成对工艺制程节点中的前一工艺制程节点的工艺制程和后一工艺制程节点的工艺制程之间的不可复用部分。如此,有助于满足设计迁移的需求,缩短设计迁移所需的人工投入和时间。In a possible implementation manner, the process design kit device library A 100 is used for design migration between multiple process nodes, for any adjacent paired process between the multiple process nodes Process node, by comparing the process process of the previous process node and the process process of the next process node in the pair of process nodes, based on the first device library 110 and by configuring the second device library 120 so that Design migration between the paired process nodes is completed. In some embodiments, through the first device library 110 of the process design kit device library A 100, at least a part of the process recipe of the next process node in the pair of process nodes is provided and through the process design The second device library 120 of the kit device library A 100 provides the rest of the process flow of the next process node in the pair of process nodes. In some embodiments, the first device library 110 of the process design kit device library A100 is between the process process of the previous process node and the process process of the next process node in the pair of process nodes. The second device library 120 of the process design kit device library A 100 is one of the process flow of the previous process node and the process flow of the next process node in the pair of process nodes. The non-reusable part between. In this way, it is helpful to meet the requirements of design migration, and shorten the labor input and time required for design migration.
图2为本申请实施例提供的一种基于制程设计套件器件库的设计迁移的示意图。如图2所示,制程设计套件器件库B 200用于从第一设计数据库210向第二设计数据库212进行设计迁移。其中,制程设计套件器件库B 200包括第一器件库和第二器件库。所述第一器件库包括多个第一器件,所述多个第一器件基于通用工艺制程和通用工艺层预先确定,所述第二器件库包括至少一个第二器件,所述第二器件库的结构和所述至少一个第二器件可配置为对应指定工艺制程并且可映射到指定工艺层。通过制程设计套件器件库B 200,所述第一器件库用于提供待开发工艺制程的至少一部分和所述第二器件库用于提供所述待开发工艺制程的剩余部分,所述待开发工艺制程的所述至少一部分通过比较所述待开发工艺制程和所述通用工艺制程确定。待迁移设计要从第一设计数据库210向第二设计数据库212进行设计迁移。针对该待迁移设计,通过比较与所述待迁移设计对应的迁移前工艺制程220和迁移后工艺制程222,确定所述制程设计套件器件库B 200的所述第一器件库以及确定所述制程设计套件器件库B 200的所述第二器件库。最后利用所述制程设计套件器件库B 200完成所述待迁移设计的迁移。应当理解的是,在一些实施例中,迁移前工艺制程220可以对应一种制程设计套件,迁移后工艺制程222可以对应另一种制程设计套件,通过整合这两种制程设计套件从而生成制程设计套件器件库B 200。在芯片开发的整个流程中,涉及到前端电路图设计和后端版图设计,还可能涉及到工艺制程上的差异以及不同的设计数据库之间的差异,有时候需要从一个工艺制程节点到另一个工艺制成节点进行工艺制成级的设计迁移,例如图2所示的第一设计数据库210向第二设计数据库212进行设计迁移。这里,第一设计数据库210可以当作旧的设计数据库并且与迁移前工艺制程220相关联,第二设计数据库212可以当作新的设计数据库并且与迁移后工艺制程222相关联。制程设计套件器件库B200的有关细节和技术效果可以参考图1所示的制程设计套件器件库A 100,这样,制程设计套件器件库B 200,利用通用器件库部分和可配置部分的解耦,可以根据具体的业务场景、芯片设计目的、客户需求、业务场景、技术迭代速度等来灵活地调整通用器件库部分和可配置部分之间的划分,从而满足设计迁移的需求,缩短设计迁移所需的人工投入和时间。因此,图2所示的制程设计套件器件库B 200,不仅可以完成前端电路图的设计迁移,同样也可以完成后端版图设计的快速设计迁移。进一步地,采用图2所示的制程设计套件器件库B200也即通用PDK器件库方案,可以达成快速高质量的电路图和版图的设计迁移,只需在多个工艺制程的PDK基础上建立通用PDK器件库,以图2为例,通过比较与所述待迁移设计对应的迁移前工艺制程220和迁移后工艺制程222,确定所述制程设计套件器件库B 200的所述第一器件库以及确定所述制程设计套件器件库B 200的所述第二器件库。FIG. 2 is a schematic diagram of design migration based on a process design kit device library provided by an embodiment of the present application. As shown in FIG. 2 , the process design kit component library B 200 is used for design migration from the first design database 210 to the second design database 212 . Wherein, the process design kit device library B 200 includes a first device library and a second device library. The first device library includes a plurality of first devices, the plurality of first devices are predetermined based on a general process and a general process layer, the second device library includes at least one second device, and the second device library The structure and the at least one second device can be configured to correspond to a specified process and can be mapped to a specified process layer. Through the process design kit device library B 200, the first device library is used to provide at least a part of the process to be developed and the second device library is used to provide the remaining part of the process to be developed, and the process to be developed The at least a portion of the recipe is determined by comparing the process recipe to be developed with the general recipe. The design to be migrated needs to be migrated from the first design database 210 to the second design database 212 . For the design to be migrated, by comparing the pre-migration process 220 and the post-migration process 222 corresponding to the design to be migrated, determine the first device library of the process design kit device library B 200 and determine the process The second device library of the design kit device library B 200 . Finally, the process design kit device library B 200 is used to complete the migration of the design to be migrated. It should be understood that, in some embodiments, the pre-migration process flow 220 may correspond to one process design suite, and the post-migration process flow 222 may correspond to another process design suite, and the process design is generated by integrating the two process design suites Kit Parts Library B 200. In the entire process of chip development, it involves front-end circuit diagram design and back-end layout design, and may also involve process differences and differences between different design databases. Sometimes it is necessary to transfer from one process node to another. The manufacturing node performs process manufacturing level design migration, for example, the first design database 210 shown in FIG. 2 performs design migration to the second design database 212 . Here, the first design database 210 can be regarded as an old design database and is associated with the pre-migration process 220 , and the second design database 212 can be regarded as a new design database and is associated with the post-migration process 222 . The relevant details and technical effects of the process design kit device library B200 can refer to the process design kit device library A 100 shown in FIG. According to specific business scenarios, chip design purposes, customer needs, business scenarios, technology iteration speed, etc., the division between the general device library part and the configurable part can be flexibly adjusted, so as to meet the needs of design migration and shorten the time required for design migration. labor input and time. Therefore, the process design kit device library B 200 shown in FIG. 2 can not only complete the design migration of the front-end circuit diagram, but also can complete the rapid design migration of the back-end layout design. Further, using the process design kit device library B200 shown in Figure 2, that is, the general PDK device library solution, can achieve fast and high-quality design migration of circuit diagrams and layouts, and only need to establish a general PDK on the basis of PDKs of multiple processes The device library, taking FIG. 2 as an example, by comparing the pre-migration process 220 and the post-migration process 222 corresponding to the design to be migrated, determine the first device library of the process design kit device library B 200 and determine The second device library of the PDS device library B 200 .
图3为本申请实施例提供的一种设计迁移方法的流程示意图。如图3所示,设计迁移方法包括以下步骤。FIG. 3 is a schematic flowchart of a design migration method provided by an embodiment of the present application. As shown in Figure 3, the design migration method includes the following steps.
步骤S310:提供包括第一器件库和第二器件库的制程设计套件器件库,其中,所述第一器件库包括多个第一器件,所述多个第一器件基于通用工艺制程和通用工艺层预先确定,所述第二器件库包括至少一个第二器件,所述第二器件库的结构和所述至少一个第二器件可配置为对应指定工艺制程并且可映射到指定工艺层,所述第一器件库用于提供待开发工艺制程的至少一部分和所述第二器件库用于提供所述待开发工艺制程的剩余部分,所述待开发工艺制程的所述至少一部分通过比较所述待开发工艺制程和所述通用工艺制程确定。Step S310: Provide a process design kit device library including a first device library and a second device library, wherein the first device library includes a plurality of first devices, and the plurality of first devices are based on a general process and a general process The layer is predetermined, the second device library includes at least one second device, the structure of the second device library and the at least one second device can be configured to correspond to a specified process and can be mapped to a specified process layer, the The first device library is used to provide at least a part of the process to be developed and the second device library is used to provide the remaining part of the process to be developed, and the at least a part of the process to be developed is compared with the process to be developed The development process and the determination of the general process.
步骤S320:针对待迁移设计,通过比较与所述待迁移设计对应的迁移前工艺制程和迁移后工艺制程,确定所述制程设计套件器件库的所述第一器件库以及确定所述制程设计套件器件库的所述第二器件库。Step S320: For the design to be migrated, by comparing the pre-migration process and the post-migration process corresponding to the design to be migrated, determine the first device library of the process design kit device library and determine the process design kit The second device library of the device library.
步骤S330:利用所述制程设计套件器件库完成所述待迁移设计的迁移。Step S330: complete the migration of the design to be migrated by using the process design kit device library.
参阅上述各个步骤,针对待开发工艺制程,通过所述制程设计套件器件库的所述第一器件库提供所述待开发工艺制程的至少一部分以及通过所述制程设计套件器件库的所述第二器件库提供所述待开发工艺制程的剩余部分,所述待开发工艺制程的所述至少一部分通过比较所述待开发工艺制程和所述通用工艺制程确定。这样意味着可以充分利用制程设计套件器件库中的所述通用工艺制程以及所述第一器件库,从而降低开发周期和利用成熟工艺制程来降低成本,同时还考虑到了待开发工艺制程与所述通用工艺制程之间的工艺制程差异,利用制程设计套件器件库中的第二器件库来适配待开发工艺制程,有助于快速高效地构建起与待开发工艺制程相配套的制程设计套件器件库。如此,通过基于通用工艺制程和通用工艺层预先确定的第一器件库和可配置为对应指定工艺制程并且可映射到指定工艺层的第二器件库120,实现了通用器件库部分和可配置部分的解耦。这样通过制程设计套件器件库的可配置部分也即第二器件库,可以灵活地实现对新的半导体器件和新的半导体工艺的适配,同时可以通过制程设计套件器件库的通用器件库部分也即第一器件库来充分利用具有大量可用模型和设计规则的半导体器件以及成熟的可大规模应用的半导体工艺,从而有助于大幅减少开发和验证周期。因此,针对特定工艺制程,通过在第一器件库和第二器件库之间的分工及组合,可以快速高效地构建起相配套的制程设计套件器件库,用于实现采用该特定工艺制程的芯片设计及验证。并且,在芯片开发的整个流程中,涉及到前端电路图设计和后端版图设计,还可能涉及到工艺制程上的差异以及不同的设计数据库之间的差异,有时候需要从一个工艺制程节点到另一个工艺制成节点进行工艺制成级的设计迁移。通过制程设计套件器件库,利用通用器件库部分和可配置部分的解耦,可以根据具体的业务场景、芯片设计目的、客户需求、业务场景、技术迭代速度等来灵活地调整通用器件库部分和可配置部分之间的划分,从而满足设计迁移的需求,缩短设计迁移所需的人工投入和时间。Referring to the above steps, for the process to be developed, at least a part of the process to be developed is provided through the first device library of the process design kit device library and the second device library is provided through the process design kit device library. The device library provides the remainder of the process recipe to be developed, the at least a portion of the process recipe to be developed is determined by comparing the process recipe to be developed with the general process recipe. This means that the general process and the first device library in the device library of the process design kit can be fully utilized, thereby reducing the development cycle and utilizing the mature process to reduce costs, while also taking into account the relationship between the process to be developed and the described Process differences between general processes, use the second device library in the process design kit device library to adapt to the process to be developed, which helps to quickly and efficiently build process design kit devices that match the process to be developed library. In this way, the general device library part and the configurable part are realized through the first device library predetermined based on the general process and general process layer and the second device library 120 that can be configured to correspond to the specified process process and can be mapped to the specified process layer decoupling. In this way, through the configurable part of the process design kit device library, that is, the second device library, the adaptation to new semiconductor devices and new semiconductor processes can be flexibly realized, and at the same time, the general device library part of the process design kit device library can also be That is, the first device library to make full use of semiconductor devices with a large number of available models and design rules and mature semiconductor processes that can be applied on a large scale, thereby helping to greatly reduce the development and verification cycle. Therefore, for a specific process, through the division of labor and combination between the first device library and the second device library, a matching process design kit device library can be quickly and efficiently constructed to implement chips using this specific process. design and verification. Moreover, in the entire process of chip development, it involves front-end circuit diagram design and back-end layout design, and may also involve process differences and differences between different design databases. Sometimes it is necessary to transfer from one process node to another. A process manufacturing node performs design migration at the process manufacturing level. Through the device library of the process design kit, using the decoupling of the general device library part and the configurable part, the general device library part and the configurable part can be flexibly adjusted according to specific business scenarios, chip design purposes, customer needs, business scenarios, technology iteration speed, etc. The division between parts can be configured to meet the needs of design migration and reduce the manual investment and time required for design migration.
图3所示的设计迁移方法,提供了一种工艺制程级的设计迁移方法,将制程设计套件器件库应用于多个工艺制程节点间的设计迁移,可以在多个工艺制程上快速完成电路图的设计迁移,并且还可以在多工艺制程上快速完成像电路图设计迁移一样便捷的版图设计迁移。The design migration method shown in Figure 3 provides a process-level design migration method. The process design kit device library is applied to the design migration between multiple process nodes, and the circuit diagram can be quickly completed on multiple process processes. Design migration, and can also quickly complete layout design migration as convenient as circuit diagram design migration on multi-process processes.
在一种可能的实施方式中,所述待迁移设计是电路设计,所述迁移前工艺制程和所述迁移后工艺制程分别是针对所述电路设计的前一工艺制程节点和后一工艺制程节点。如此,实现了多个工艺制程上快速完成电路图的设计迁移。In a possible implementation manner, the design to be migrated is a circuit design, and the pre-migration process and the post-migration process are respectively the previous process node and the next process node of the circuit design . In this way, the rapid completion of design migration of circuit diagrams on multiple manufacturing processes is realized.
在一种可能的实施方式中,所述待迁移设计是版图设计,所述迁移前工艺制程和所述迁移后工艺制程分别是针对所述版图设计的前一工艺制程节点和后一工艺制程节点。如此,实现了在多工艺制程上快速完成版图设计迁移。In a possible implementation manner, the design to be migrated is a layout design, and the pre-migration process and the post-migration process are respectively the previous process node and the next process node of the layout design . In this way, the rapid completion of the layout design migration on the multi-process process is realized.
在一种可能的实施方式中,所述制程设计套件器件库的所述第一器件库是所述迁移前工艺制程和所述迁移后工艺制程之间的可复用部分,所述制程设计套件器件库的所述第二器件库是所述迁移前工艺制程和所述迁移后工艺制程之间的不可复用部分。如此有助于满足设计迁移的需求,缩短设计迁移所需的人工投入和时间。In a possible implementation manner, the first device library of the process design kit device library is a reusable part between the pre-migration process and the post-migration process, and the process design kit The second device library of the device library is a non-reusable part between the pre-migration process and the post-migration process. This helps to meet the needs of design migration and shorten the labor input and time required for design migration.
在一种可能的实施方式中,所述制程设计套件器件库用于在多个工艺制程节点之间的设计迁移,针对所述多个工艺制程节点之间的任一紧邻的成对工艺制程节点,通过比较该成对工艺制程节点中的前一工艺制程节点的工艺制程和后一工艺制程节点的工艺制程,基于所述第一器件库并且通过配置所述第二器件库从而完成该成对工艺制程节点之间的设计迁移。在一些实施例中,通过所述制程设计套件器件库的所述第一器件库提供该成对工艺制程节点中的后一工艺制程节点的工艺制程的至少一部分以及通过所述制程设计套件器件库的所述第二器件库提供该成对工艺制程节点中的后一工艺制程节点的工艺制程的剩余部分。在一些实施例中,所述制程设计套件器件库的所述第一器件库是该成对工艺制程节点中的前一工艺制程节点的工艺制程和后一工艺制程节点的工艺制程之间的可复用部分,所述制程设计套件器件库的所述第二器件库是该成对工艺制程节点中的前一工艺制程节点的工艺制程和后一工艺制程节点的工艺制程之间的不可复用部分。如此有助于满足设计迁移的需求,缩短设计迁移所需的人工投入和时间。In a possible implementation manner, the process design kit device library is used for design migration between multiple process nodes, for any adjacent pair of process nodes between the multiple process nodes , by comparing the process flow of the previous process node and the process flow of the next process node in the paired process node, based on the first device library and by configuring the second device library, the paired Design migration between process nodes. In some embodiments, at least a part of the process recipe of the next process node in the pair of process nodes is provided through the first device library of the process design kit device library and through the process design kit device library The second device library provides the rest of the process flow of the next process node in the pair of process nodes. In some embodiments, the first device library of the process design kit device library is the possible relationship between the process flow of the previous process node and the process flow of the next process node in the pair of process nodes. For the reuse part, the second device library of the process design kit device library is a non-reusable process between the process process of the previous process node and the process process of the next process node in the pair of process nodes part. This helps to meet the needs of design migration and shorten the labor input and time required for design migration.
图4是本申请实施例提供的一种计算设备的结构示意图,该计算设备400包括:一个或者多个处理器410、通信接口420以及存储器430。所述处理器410、通信接口420以及存储器430通过总线440相互连接。可选地,该计算设备400还可以包括输入/输出接口450,输入/输出接口450连接有输入/输出设备,用于接收用户设置的参数等。该计算设备400能够用于实现上述的本申请实施例中设备实施例或者系统实施例的部分或者全部功能;处理器410还能够用于实现上述的本申请实施例中方法实施例的部分或者全部操作步骤。例如,该计算设备400执行各种操作的具体实现可参照上述实施例中的具体细节,如处理器410用于执行上述方法实施例中部分或者全部步骤或者上述方法实施例中的部分或者全部操作。再例如,本申请实施例中,计算设备400可用于实现上述装置实施例中一个或者多个部件的部分或者全部功能,此外通信接口420具体可用于为了实现这些装置、部件的功能所必须的通讯功能等,以及处理器410具体可用于为了实现这些装置、部件的功能所必须的处理功能等。FIG. 4 is a schematic structural diagram of a computing device provided by an embodiment of the present application. The computing device 400 includes: one or more processors 410 , a communication interface 420 and a memory 430 . The processor 410 , communication interface 420 and memory 430 are connected to each other through a bus 440 . Optionally, the computing device 400 may further include an input/output interface 450 connected with an input/output device for receiving parameters set by a user and the like. The computing device 400 can be used to implement part or all of the functions of the device embodiment or the system embodiment in the above-mentioned embodiment of the present application; the processor 410 can also be used to realize part or all of the method embodiment in the above-mentioned embodiment of the present application Steps. For example, the specific implementation of various operations performed by the computing device 400 may refer to the specific details in the above-mentioned embodiments, for example, the processor 410 is used to perform some or all of the steps in the above-mentioned method embodiments or some or all of the operations in the above-mentioned method embodiments . For another example, in the embodiment of the present application, the computing device 400 can be used to realize some or all of the functions of one or more components in the above-mentioned device embodiments, and the communication interface 420 can be specifically used for communication necessary to realize the functions of these devices and components functions, etc., and the processor 410 can specifically be used for processing functions and the like necessary to realize the functions of these devices and components.
应当理解的是,图4的计算设备400可以包括一个或者多个处理器410,并且多个处理器410可以按照并行化连接方式、串行化连接方式、串并行连接方式或者任意连接方式来协同提供处理能力,或者多个处理器410可以构成处理器序列或者处理器阵列,或者多个处理器410之间可以分成主处理器和辅助处理器,或者多个处理器410之间可以具有不同的架构如采用异构计算架构。另外,图4所示的计算设备400,相关的结构性描述及功能性描述是示例性且非限制性的。在一些示例性实施例中,计算设备400可以包括比图4所示的更多或更少的部件,或者组合某些部件,或者拆分某些部件,或者具有不同的部件布置。It should be understood that the computing device 400 in FIG. 4 may include one or more processors 410, and the multiple processors 410 may cooperate in a parallel connection manner, a serial connection manner, a serial-parallel connection manner, or any connection manner. Provide processing capability, or a plurality of processors 410 can form a processor sequence or a processor array, or a plurality of processors 410 can be divided into main processors and auxiliary processors, or a plurality of processors 410 can have different Architecture such as heterogeneous computing architecture. In addition, the computing device 400 shown in FIG. 4 , the relevant structural description and functional description are exemplary and non-limiting. In some exemplary embodiments, computing device 400 may include more or fewer components than shown in FIG. 4 , or combine certain components, or separate certain components, or have a different arrangement of components.
处理器410可以有多种具体实现形式,例如处理器410可以包括中央处理器(central processing unit,CPU)、图形处理器(graphic processing unit,GPU)、神经网络处理器(neural-network processing unit,NPU)、张量处理器(tensor processingunit,TPU)或数据处理器(data processing unit,DPU)等一种或多种的组合,本申请实施例不做具体限定。处理器410还可以是单核处理器或多核处理器。处理器410可以由CPU和硬件芯片的组合。上述硬件芯片可以是专用集成电路(application-specific integratedcircuit,ASIC),可编程逻辑器件(programmable logic device,PLD)或其组合。上述PLD可以是复杂可编程逻辑器件(complex programmable logic device,CPLD),现场可编程逻辑门阵列(field-programmable gate array,FPGA),通用阵列逻辑(generic array logic,GAL)或其任意组合。处理器410也可以单独采用内置处理逻辑的逻辑器件来实现,例如FPGA或数字信号处理器(digital signal processor,DSP)等。通信接口420可以为有线接口或无线接口,用于与其他模块或设备进行通信,有线接口可以是以太接口、局域互联网络(local interconnect network,LIN)等,无线接口可以是蜂窝网络接口或使用无线局域网接口等。The processor 410 may have various specific implementation forms. For example, the processor 410 may include a central processing unit (central processing unit, CPU), a graphics processing unit (graphic processing unit, GPU), a neural network processor (neural-network processing unit, NPU), a tensor processing unit (tensor processing unit, TPU) or a data processing unit (data processing unit, DPU) and a combination of one or more, which are not specifically limited in this embodiment of the present application. Processor 410 may also be a single-core processor or a multi-core processor. The processor 410 may be a combination of a CPU and a hardware chip. The aforementioned hardware chip may be an application-specific integrated circuit (application-specific integrated circuit, ASIC), a programmable logic device (programmable logic device, PLD) or a combination thereof. The above-mentioned PLD may be a complex programmable logic device (complex programmable logic device, CPLD), a field-programmable gate array (field-programmable gate array, FPGA), a general array logic (generic array logic, GAL) or any combination thereof. The processor 410 may also be implemented solely by a logic device with built-in processing logic, such as an FPGA or a digital signal processor (digital signal processor, DSP). The communication interface 420 may be a wired interface or a wireless interface for communicating with other modules or devices. The wired interface may be an Ethernet interface, a local interconnect network (LIN), etc., and the wireless interface may be a cellular network interface or use Wireless LAN interface, etc.
存储器430可以是非易失性存储器,例如,只读存储器(read-only memory,ROM)、可编程只读存储器(programmable ROM,PROM)、可擦除可编程只读存储器(erasable PROM,EPROM)、电可擦除可编程只读存储器(electrically EPROM,EEPROM)或闪存。存储器430也可以是易失性存储器,易失性存储器可以是随机存取存储器(random access memory,RAM),其用作外部高速缓存。通过示例性但不是限制性说明,许多形式的RAM可用,例如静态随机存取存储器(static RAM,SRAM)、动态随机存取存储器(dynamic RAM,DRAM)、同步动态随机存取存储器(synchronous DRAM,SDRAM)、双倍数据速率同步动态随机存取存储器(double data rate SDRAM,DDR SDRAM)、增强型同步动态随机存取存储器(enhancedSDRAM,ESDRAM)、同步连接动态随机存取存储器(synchlink DRAM,SLDRAM)和直接内存总线随机存取存储器(direct rambus RAM,DR RAM)。存储器430也可用于存储程序代码和数据,以便于处理器410调用存储器430中存储的程序代码执行上述方法实施例中的部分或者全部操作步骤,或者执行上述设备实施例中的相应功能。此外,计算设备400可能包含相比于图4展示的更多或者更少的组件,或者有不同的组件配置方式。The memory 430 may be a non-volatile memory, for example, a read-only memory (read-only memory, ROM), a programmable read-only memory (programmable ROM, PROM), an erasable programmable read-only memory (erasable PROM, EPROM), Electrically Erasable Programmable Read-Only Memory (electrically EPROM, EEPROM) or flash memory. The memory 430 can also be a volatile memory, and the volatile memory can be a random access memory (random access memory, RAM), which is used as an external cache. By way of illustration and not limitation, many forms of RAM are available, such as static random access memory (static RAM, SRAM), dynamic random access memory (dynamic RAM, DRAM), synchronous dynamic random access memory (synchronous DRAM, SDRAM), double data rate synchronous dynamic random access memory (double data rate SDRAM, DDR SDRAM), enhanced synchronous dynamic random access memory (enhancedSDRAM, ESDRAM), synchronous connection dynamic random access memory (synchlink DRAM, SLDRAM) And direct memory bus random access memory (direct rambus RAM, DR RAM). The memory 430 can also be used to store program codes and data, so that the processor 410 calls the program codes stored in the memory 430 to perform some or all of the operation steps in the above method embodiments, or perform corresponding functions in the above device embodiments. Additionally, computing device 400 may contain more or fewer components than shown in FIG. 4 , or have components arranged in a different manner.
总线440可以是快捷外围部件互连标准(peripheral component interconnectexpress,PCIe)总线,或扩展工业标准结构(extended industry standard architecture,EISA)总线、统一总线(unified bus,Ubus或UB)、计算机快速链接(compute express link,CXL)、缓存一致互联协议(cache coherent interconnect for accelerators,CCIX)等。总线440可以分为地址总线、数据总线、控制总线等。总线440除包括数据总线之外,还可以包括电源总线、控制总线和状态信号总线等。但是为了清楚说明起见,图4中仅用一条粗线表示,但并不表示仅有一根总线或一种类型的总线。The bus 440 can be a peripheral component interconnect express (PCIe) bus, or an extended industry standard architecture (EISA) bus, a unified bus (Ubus or UB), a computer fast link (compute express link, CXL), cache coherent interconnect for accelerators (CCIX), etc. The bus 440 can be divided into an address bus, a data bus, a control bus, and the like. In addition to the data bus, the bus 440 may also include a power bus, a control bus, a status signal bus, and the like. However, for the sake of clarity, only one thick line is used in FIG. 4 , but it does not mean that there is only one bus or one type of bus.
本申请实施例提供的方法和设备是基于同一发明构思的,由于方法及设备解决问题的原理相似,因此方法与设备的实施例、实施方式、示例或实现方式可以相互参见,其中重复之处不再赘述。本申请实施例还提供一种系统,该系统包括多个计算设备,每个计算设备的结构可以参照上述所描述的计算设备的结构。该系统可实现的功能或者操作可以参照上述方法实施例中的具体实现步骤和/或上述装置实施例中所描述的具体功能,在此不再赘述。The methods and devices provided in the embodiments of the present application are based on the same inventive concept. Since the methods and devices have similar problem-solving principles, the embodiments, implementations, examples or implementations of the methods and devices can be referred to each other, and the repetitions are not Let me repeat. An embodiment of the present application further provides a system, where the system includes multiple computing devices, and the structure of each computing device may refer to the structure of the computing device described above. For the functions or operations that can be realized by the system, reference may be made to the specific implementation steps in the foregoing method embodiments and/or the specific functions described in the foregoing device embodiments, and details are not repeated here.
本申请实施例还提供一种计算机可读存储介质,所述计算机可读存储介质中存储有计算机指令,当所述计算机指令在计算机设备(如一个或者多个处理器)上运行时可以实现上述方法实施例中的方法步骤。所述计算机可读存储介质的处理器在执行上述方法步骤的具体实现可参照上述方法实施例中所描述的具体操作和/或上述装置实施例中所描述的具体功能,在此不再赘述。The embodiment of the present application also provides a computer-readable storage medium, where computer instructions are stored in the computer-readable storage medium, and when the computer instructions are run on a computer device (such as one or more processors), the above-mentioned Method steps in the method examples. For specific implementation of the processor of the computer-readable storage medium executing the above method steps, reference may be made to the specific operations described in the above method embodiments and/or the specific functions described in the above device embodiments, and details are not repeated here.
本领域内的技术人员应明白,本申请的实施例可提供为方法、系统、或计算机程序产品。本申请可采用完全硬件实施例、完全软件实施例、或结合软件和硬件方面的实施例的形式。本申请实施例可以全部或部分地通过软件、硬件、固件或其他任意组合来实现。当使用软件实现时,上述实施例可以全部或部分地以计算机程序产品的形式实现。本申请可采用在一个或多个其中包含有计算机可用程序代码的计算机可用存储介质上实施的计算机程序产品的形式。所述计算机程序产品包括一个或多个计算机指令。在计算机上加载或执行所述计算机程序指令时,全部或部分地产生按照本申请实施例所述的流程或功能。所述计算机可以为通用计算机、专用计算机、计算机网络、或者其他可编程装置。计算机指令可以存储在计算机可读存储介质中,或者从一个计算机可读存储介质向另一个计算机可读存储介质传输,例如,计算机指令可以从一个网站站点、计算机、服务器或数据中心通过有线(例如同轴电缆、光纤、数字用户线)或无线(例如红外、无线、微波等)方式向另一个网站站点、计算机、服务器或数据中心进行传输。计算机可读存储介质可以是计算机能够存取的任何可用介质或者是包含一个或多个可用介质集合的服务器、数据中心等数据存储设备。可用介质可以是磁性介质(如软盘、硬盘、磁带)、光介质、或者半导体介质。半导体介质可以是固态硬盘,也可以是随机存取存储器,闪存,只读存储器,可擦可编程只读存储器,电可擦可编程只读存储器,寄存器或任何其他形式的合适存储介质。Those skilled in the art should understand that the embodiments of the present application may be provided as methods, systems, or computer program products. This application can take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. The embodiments of the present application may be implemented in whole or in part by software, hardware, firmware or other arbitrary combinations. When implemented using software, the above-described embodiments may be implemented in whole or in part in the form of computer program products. This application may take the form of a computer program product embodied on one or more computer-usable storage media having computer-usable program code embodied therein. The computer program product includes one or more computer instructions. When the computer program instructions are loaded or executed on the computer, the processes or functions according to the embodiments of the present application will be generated in whole or in part. The computer may be a general purpose computer, a special purpose computer, a computer network, or other programmable devices. Computer instructions may be stored in or transmitted from one computer-readable storage medium to another computer-readable storage medium, e.g. coaxial cable, optical fiber, digital subscriber line) or wirelessly (eg, infrared, wireless, microwave, etc.) to another website site, computer, server, or data center. A computer-readable storage medium may be any available medium that can be accessed by a computer, or a data storage device such as a server, a data center, etc. that includes one or more sets of available media. Usable media may be magnetic media (eg, floppy disks, hard disks, magnetic tape), optical media, or semiconductor media. The semiconductor medium may be a solid state disk, random access memory, flash memory, ROM, EEPROM, EEPROM, register or any other form of suitable storage medium.
本申请是参照根据本申请实施例的方法、设备(系统)、和计算机程序产品的流程图和/或方框图来描述。可由计算机程序指令实现流程图和/或方框图中的每一流程和/或方框、以及流程图和/或方框图中的流程和/或方框的结合。可提供这些计算机程序指令到通用计算机、专用计算机、嵌入式处理机或其他可编程数据处理设备的处理器以产生一个机器,使得通过计算机或其他可编程数据处理设备的处理器执行的指令产生用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的装置。这些计算机程序指令也可存储在能引导计算机或其他可编程数据处理设备以特定方式工作的计算机可读存储器中,使得存储在该计算机可读存储器中的指令产生包括指令装置的制造品,该指令装置实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能。这些计算机程序指令也可装载到计算机或其他可编程数据处理设备上,使得在计算机或其他可编程设备上执行一系列操作步骤以产生计算机实现的处理,从而在计算机或其他可编程设备上执行的指令提供用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的步骤。The present application is described with reference to flowcharts and/or block diagrams of methods, devices (systems), and computer program products according to embodiments of the present application. Each procedure and/or block in the flowchart and/or block diagram, and a combination of procedures and/or blocks in the flowchart and/or block diagram can be realized by computer program instructions. These computer program instructions may be provided to a general purpose computer, special purpose computer, embedded processor, or processor of other programmable data processing equipment to produce a machine such that the instructions executed by the processor of the computer or other programmable data processing equipment produce a An apparatus for realizing the functions specified in one or more procedures of the flowchart and/or one or more blocks of the block diagram. These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing apparatus to operate in a specific manner, such that the instructions stored in the computer-readable memory produce an article of manufacture comprising instruction means, the instructions The device realizes the function specified in one or more procedures of the flowchart and/or one or more blocks of the block diagram. These computer program instructions can also be loaded onto a computer or other programmable data processing device, causing a series of operational steps to be performed on the computer or other programmable device to produce a computer-implemented process, thereby The instructions provide steps for implementing the functions specified in the flow chart or blocks of the flowchart and/or the block or blocks of the block diagrams.
在上述实施例中,对各个实施例的描述都各有侧重,某个实施例中没有详述的部分,可以参见其它实施例的相关描述。显然,本领域的技术人员可以对本申请实施例进行各种改动和变型而不脱离本申请实施例的精神和范围。本申请实施例方法中的步骤可以根据实际需要进行顺序调整、合并或删减;本申请实施例系统中的模块可以根据实际需要进行划分、合并或删减。如果本申请实施例的这些修改和变型属于本申请权利要求及其等同技术的范围之内,则本申请也意图包含这些改动和变型在内。In the above-mentioned embodiments, the descriptions of each embodiment have their own emphases, and for parts not described in detail in a certain embodiment, reference may be made to relevant descriptions of other embodiments. Apparently, those skilled in the art can make various changes and modifications to the embodiments of the present application without departing from the spirit and scope of the embodiments of the present application. The steps in the method of the embodiment of the present application can be adjusted in order, merged or deleted according to actual needs; the modules in the system of the embodiment of the present application can be divided, combined or deleted according to actual needs. If the modifications and variations of the embodiments of the present application fall within the scope of the claims of the present application and their equivalent technologies, the present application also intends to include these modifications and variations.
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| WO2022267010A1 (en) * | 2021-06-25 | 2022-12-29 | 华为技术有限公司 | Circuit design method and related device |
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| US9330219B2 (en) * | 2014-03-31 | 2016-05-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit design method |
| US10719657B1 (en) * | 2019-04-30 | 2020-07-21 | Globalfoundries Inc. | Process design kit (PDK) with design scan script |
| CN114185524B (en) * | 2021-09-27 | 2024-09-17 | 杰华特微电子股份有限公司 | Device list extraction method and device in circuit design software and related equipment |
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| US10885256B1 (en) * | 2020-02-04 | 2021-01-05 | Hong Kong Applied Science and Technology Research Institute Company, Limited | Method and system for integrated circuit (IC) layout migration integrated with layout expertise |
| WO2022267010A1 (en) * | 2021-06-25 | 2022-12-29 | 华为技术有限公司 | Circuit design method and related device |
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