[go: up one dir, main page]

CN116124889A - Metal pipeline corrosion monitoring method based on synthetic emission aperture imaging - Google Patents

Metal pipeline corrosion monitoring method based on synthetic emission aperture imaging Download PDF

Info

Publication number
CN116124889A
CN116124889A CN202310059254.XA CN202310059254A CN116124889A CN 116124889 A CN116124889 A CN 116124889A CN 202310059254 A CN202310059254 A CN 202310059254A CN 116124889 A CN116124889 A CN 116124889A
Authority
CN
China
Prior art keywords
echo amplitude
echo
excited
monitored
pipeline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310059254.XA
Other languages
Chinese (zh)
Inventor
张欢
徐宁
马龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China General Nuclear Power Corp
CGN Power Co Ltd
Suzhou Nuclear Power Research Institute Co Ltd
Original Assignee
China General Nuclear Power Corp
CGN Power Co Ltd
Suzhou Nuclear Power Research Institute Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China General Nuclear Power Corp, CGN Power Co Ltd, Suzhou Nuclear Power Research Institute Co Ltd filed Critical China General Nuclear Power Corp
Priority to CN202310059254.XA priority Critical patent/CN116124889A/en
Publication of CN116124889A publication Critical patent/CN116124889A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/4409Processing the detected response signal, e.g. electronic circuits specially adapted therefor by comparison
    • G01N29/4418Processing the detected response signal, e.g. electronic circuits specially adapted therefor by comparison with a model, e.g. best-fit, regression analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/028Material parameters
    • G01N2291/0289Internal structure, e.g. defects, grain size, texture

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

The invention discloses a metal pipeline corrosion monitoring method based on synthetic emission aperture imaging, which comprises the following steps: an array probe containing a plurality of wafers is arranged on the surface of a pipeline to be monitored, the wafers are arranged into a matrix in an n multiplied by m mode, and n is more than or equal to 3 and m is more than or equal to 3; determining areas to be excited according to a first set rule, wherein each area to be excited comprises at least 4 wafers; triggering each area to be excited to emit ultrasonic pulse signals according to a second set rule according to set delay; each wafer of the array probe receives echo signals of the ultrasonic pulse signals, an imaging diagram of the pipeline to be monitored is obtained after all the received echo signals are processed, and corrosion conditions of the pipeline to be monitored are judged according to the imaging diagram. By implementing the technical scheme of the invention, the wafer adopts a surface arrangement mode, so that deflection in a sound velocity space is realized, and the monitoring area is large; meanwhile, the excitation of a plurality of wafers improves the sensitivity of monitoring.

Description

一种基于合成发射孔径成像的金属管道腐蚀监测方法A Corrosion Monitoring Method for Metal Pipeline Based on Synthetic Emission Aperture Imaging

技术领域technical field

本发明涉及管道腐蚀监测领域,尤其涉及一种基于合成发射孔径成像的金属管道腐蚀监测方法。The invention relates to the field of pipeline corrosion monitoring, in particular to a metal pipeline corrosion monitoring method based on synthetic emission aperture imaging.

背景技术Background technique

在液体介质的传输中,管道传输是必不可少的一种传输方式,在管道选用时,常采用含衬胶的管道盛装腐蚀流体,在腐蚀流体的作用下,衬胶位置常会发生缺陷,常出现的缺陷衬胶破损和衬胶脱落。在衬胶状态监视时,根据衬胶的特性,采用超声脉冲信号扫描的方式判断衬胶是否发生缺陷。当衬胶完好时,由于管道金属材质在衬胶中的声阻抗相差较大,小部分超声脉冲信号能量透过管道进入衬胶,剩余超声脉冲信号能量在管道与衬胶结合处会产生回波信号,对应回波信号在深度等于原始壁厚位置时回波幅值较高。当发生衬胶局部破损,管道本体被腐蚀时,被腐蚀位置实际壁厚小于原始壁厚,对应的回波信号在剩余壁厚位置处出现回波幅值较高数值,最大回波位置相对完好区域会提前。当发生衬胶脱落时,在管道内壁和衬胶中间产生气隙,超声脉冲信号在金属与空气界面近似为全反射,在回波信号中,界面处回波幅值会相对增大。目前,在现有技术中,管道腐蚀监测的方法多采用的线阵探头,线阵探头中的晶片采用的线排列的方式,声速在空间内不能偏转,使得监测的面积较小;同时,在线阵探头监测过程中,采用单个晶片的激发方式,发射声速能量不够集中,导致了监测的灵敏度不够高。In the transmission of liquid media, pipeline transmission is an indispensable transmission method. When selecting pipelines, pipelines containing rubber linings are often used to contain corrosive fluids. Under the action of corrosive fluids, defects often occur at the rubber lining positions, often Defects The rubber lining is damaged and the rubber lining is peeled off. When monitoring the rubber lining state, according to the characteristics of the rubber lining, the ultrasonic pulse signal scanning method is used to judge whether the rubber lining is defective. When the rubber lining is intact, due to the large difference in the acoustic impedance of the metal material of the pipe in the rubber lining, a small part of the ultrasonic pulse signal energy enters the rubber lining through the pipe, and the remaining ultrasonic pulse signal energy will generate echoes at the joint between the pipe and the rubber lining The corresponding echo signal has a higher echo amplitude at the position where the depth is equal to the original wall thickness. When the rubber lining is partially damaged and the pipe body is corroded, the actual wall thickness of the corroded position is smaller than the original wall thickness, and the corresponding echo signal has a higher echo amplitude value at the position of the remaining wall thickness, and the maximum echo position is relatively intact Regions will advance. When the rubber liner falls off, an air gap is formed between the inner wall of the pipe and the rubber liner, and the ultrasonic pulse signal is approximately totally reflected at the metal-air interface. In the echo signal, the echo amplitude at the interface will increase relatively. At present, in the existing technology, the method of pipeline corrosion monitoring mostly adopts the line array probe, the chips in the line array probe are arranged in a way, and the sound velocity cannot be deflected in the space, so that the monitoring area is small; at the same time, the online In the monitoring process of the array probe, the excitation mode of a single chip is adopted, and the emitted sound velocity energy is not concentrated enough, resulting in insufficient monitoring sensitivity.

发明内容Contents of the invention

本发明要解决的技术问题在于,提供一种基于合成发射孔径成像的金属管道腐蚀监测方法。The technical problem to be solved by the present invention is to provide a metal pipeline corrosion monitoring method based on synthetic emission aperture imaging.

本发明解决其技术问题所采用的技术方案是:一种基于合成发射孔径成像的金属管道腐蚀监测方法,包括以下步骤:The technical solution adopted by the present invention to solve the technical problem is: a metal pipeline corrosion monitoring method based on synthetic emission aperture imaging, comprising the following steps:

S1:将含有多个晶片的阵列探头安装在待监测管道表面,所述晶片以n×m的方式排列成矩阵,n≥3、m≥3;S1: Install an array probe containing multiple chips on the surface of the pipeline to be monitored, the chips are arranged in a matrix in the form of n×m, n≥3, m≥3;

S2:按第一设定规则确定待激发区域,每一所述待激发区域包括至少4个所述晶片;S2: Determine the region to be excited according to the first set rule, each region to be excited includes at least 4 wafers;

S3:按设定延时依次触发每一所述待激发区域按第二设定规则发射超声脉冲信号;S3: Triggering each of the regions to be excited sequentially according to the set delay time to emit ultrasonic pulse signals according to the second set rule;

S4:阵列探头的每一所述晶片接收所述超声脉冲信号的回波信号,对接收到的所有所述回波信号进行处理后得到所述待监测管道的成像图,并根据所述成像图判断待监测管道的腐蚀情况。S4: Each chip of the array probe receives the echo signal of the ultrasonic pulse signal, processes all the received echo signals to obtain an imaging image of the pipeline to be monitored, and according to the imaging image Judge the corrosion condition of the pipeline to be monitored.

优选地,所述第一设定规则为从所述矩阵的第一个阵元开始,以a×a的形式将所述晶片划分为第一个所述待激发区域;并从所述矩阵的行或列中选取第二个阵元以a×a的形式将所述晶片划分为下一个所述待激发区域,直至将所有所述阵元划分完成,其中,a≥2。Preferably, the first setting rule is to divide the wafer into the first region to be excited in the form of a×a starting from the first array element of the matrix; Selecting the second array element in the row or column to divide the wafer into the next region to be excited in the form of a×a until all the array elements are divided, wherein a≥2.

优选地,所述第二规则为控制所述待激发区域中的每一所述晶片发射所述超声脉冲信号的时间延迟,所述待激发区域中的所述晶片按所述时间延迟激发所述晶片发射所述超声脉冲信号,并且所述超声脉冲信号到达所述待监测管道表面的相位差为2π整数倍,所述超声脉冲信号在待监测管道表面叠加增强。Preferably, the second rule is to control the time delay for each of the wafers in the to-be-excited region to emit the ultrasonic pulse signal, and the wafers in the to-be-excited region excite the ultrasonic pulse signal according to the time delay. The chip emits the ultrasonic pulse signal, and the phase difference of the ultrasonic pulse signal reaching the surface of the pipeline to be monitored is an integer multiple of 2π, and the ultrasonic pulse signal is superimposed and enhanced on the surface of the pipeline to be monitored.

优选地,所述步骤S4包括以下步骤:Preferably, said step S4 includes the following steps:

S41:根据所述回波信号,获取回波幅值;S41: Obtain an echo amplitude according to the echo signal;

S42:处理所述回波幅值,获取到所述回波幅值实测值,所述回波幅值实测值组成所述回波幅值矩阵;S42: Process the echo amplitude to obtain the measured value of the echo amplitude, and the measured value of the echo amplitude forms the echo amplitude matrix;

S43:根据所述回波幅值矩阵,获取合成回波幅值,根据所述合成回波幅值得到所述待监测管道的成像图。S43: Obtain a composite echo magnitude according to the echo magnitude matrix, and obtain an imaging image of the pipeline to be monitored according to the composite echo magnitude.

优选地,所述步骤S41中包括以下步骤:Preferably, the step S41 includes the following steps:

S411:获取所述晶片的坐标点;S411: Obtain the coordinate points of the wafer;

S412:根据所述晶片的所述坐标点,获取所述待激发区域的几何中心点;S412: Obtain the geometric center point of the region to be excited according to the coordinate point of the wafer;

S413:根据所述几何中心点,获取发射所述超声脉冲信号到所述晶片接收所述回波信号的时间t;S413: Obtain the time t from transmitting the ultrasonic pulse signal to receiving the echo signal on the wafer according to the geometric center point;

S414:根据不同所述时间t,获取对应的回波幅值函数r(t);S414: Obtain the corresponding echo amplitude function r(t) according to the different time t;

S415:根据所述回波幅值函数r(t),获取所述回波幅值。S415: Acquire the echo amplitude according to the echo amplitude function r(t).

优选地,所述步骤S42中包括以下步骤:Preferably, the step S42 includes the following steps:

S421:获取所述回波幅值的最大值;S421: Obtain the maximum value of the echo amplitude;

S422:判断所述回波幅值是否满足回波幅值剔除规则,若否,所述回波幅值为回波幅值的实测值,若是,所述回波幅值赋0;S422: Judging whether the echo amplitude meets the echo amplitude elimination rule, if not, the echo amplitude is the actual measured value of the echo amplitude, and if so, assigning 0 to the echo amplitude;

S423:获取所述回波幅值实测值,根据所述回波幅值实测值,组成所述回波幅值矩阵。S423: Acquire the measured echo amplitude values, and form the echo amplitude matrix according to the measured echo amplitude values.

优选地,所述回波幅值剔除规则为所述回波幅值是否小于所述回波幅值的所述最大值的20%,若是,为满足所述回波幅值剔除规则,所述回波幅值赋0,若否,所述回波幅值为所述回波幅值的实测值。Preferably, the echo amplitude elimination rule is whether the echo amplitude is less than 20% of the maximum value of the echo amplitude, and if so, in order to satisfy the echo amplitude elimination rule, the The echo amplitude is assigned 0, if not, the echo amplitude is the actual measured value of the echo amplitude.

优选地,所述时间t通过公式1计算过程确定:Preferably, the time t is determined through the calculation process of formula 1:

公式1 Formula 1

其中,c为管道材料中的声速,x、y、z为待监测点的空间坐标点,xi、yi、zi,为所述激发区域中所述晶片的几何中心点,xj、yj、zj为接收所述晶片的空间坐标点,此时zi、zj为0。Wherein, c is the sound velocity in the pipe material, x, y, z are the spatial coordinate points of the points to be monitored, x i , y i , z i are the geometric center points of the wafer in the excitation area, x j , y j , z j are spatial coordinate points for receiving the wafer, and z i , z j are 0 at this time.

优选地,所述回波合成幅值通过公式2计算过程确定:Preferably, the echo synthesis amplitude is determined through the calculation process of formula 2:

公式2 Formula 2

其中,rij(t)为所述回波幅值剔除规则处理后的所述回波幅值,o(x,y,z)为所述待检测区域中坐标为(x, y, z)点的合成回波幅值。Among them, r ij (t) is the echo amplitude value processed by the echo amplitude value elimination rule, o(x, y, z) is the coordinate (x, y, z) in the area to be detected The synthetic echo amplitude of the point.

优选地,所述n=4,所述m=8。Preferably, the n=4 and the m=8.

实施本发明技术方案具有以下有益效果:晶片采用面排列的方式,实现了声速空间内的偏转,监测面积大;同时,多个晶片的激发,提高了监测的灵敏度。Implementing the technical solution of the present invention has the following beneficial effects: the wafers are arranged in a plane manner, which realizes the deflection in the sound velocity space, and the monitoring area is large; at the same time, the excitation of multiple wafers improves the monitoring sensitivity.

附图说明Description of drawings

下面将结合附图及实施例对本发明作进一步说明,附图中:The present invention will be further described below in conjunction with accompanying drawing and embodiment, in the accompanying drawing:

图1是本发明实施例的流程示意图;Fig. 1 is a schematic flow chart of an embodiment of the present invention;

图2是本发明实施例的回波信号处理流程示意图;FIG. 2 is a schematic diagram of an echo signal processing flow in an embodiment of the present invention;

图3是本发明实施例的回波幅值获取流程示意图;Fig. 3 is a schematic diagram of the echo amplitude acquisition process of the embodiment of the present invention;

图4是本发明实施例的回波幅值实测值获取流程示意图。Fig. 4 is a schematic diagram of the process of obtaining the measured value of the echo amplitude according to the embodiment of the present invention.

具体实施方式Detailed ways

为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述。显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。通常在此处附图中描述和表示出的本发明实施例的组件可以以各种不同的配置来布置和设计。因此,以下对在附图中提供的本发明的实施例的详细描述并非旨在限制要求保护的本发明的范围,而是仅仅表示本发明的选定实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. The components of the embodiments of the invention generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations. Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

应注意到:相似的标号和字母在下面的附图中表示类似项,因此,一旦某一项在一个附图中被定义,则在随后的附图中不需要对其进行进一步定义和解释。It should be noted that like numerals and letters denote similar items in the following figures, therefore, once an item is defined in one figure, it does not require further definition and explanation in subsequent figures.

在一优选实施例中,如图1所示,为本发明所提供的一种基于合成发射孔径成像的金属管道腐蚀监测方法的流程示意图。具体的,该金属管道腐蚀监测方法包括以下步骤:In a preferred embodiment, as shown in FIG. 1 , it is a schematic flowchart of a metal pipeline corrosion monitoring method based on synthetic emission aperture imaging provided by the present invention. Specifically, the metal pipeline corrosion monitoring method includes the following steps:

步骤S1,将含有多个晶片的阵列探头安装在待监测管道表面,晶片以n×m的方式排列成矩阵,n≥3、m≥3。具体的,现场人员使用安装工具将含有多个晶片的阵列探头安装在待监测管道表面,其中,所有晶片以n×m的排列方式进行布置,n≥3、m≥3,在布置时,根据待监测管道的实际监测面积可安装一个阵列探头,也可布置多个阵列探头。在本实施例中,选用的阵列探头中有32个晶片,晶片以4×8的方式布置在待监测管道表面。当然,在阵列探头选用时也可选用监测面积大于待监测管道上的待监测区域的阵列探头。In step S1, an array probe containing multiple chips is installed on the surface of the pipeline to be monitored, and the chips are arranged in a matrix in the form of n×m, where n≥3 and m≥3. Specifically, on-site personnel use installation tools to install the array probe containing multiple chips on the surface of the pipeline to be monitored, wherein all the chips are arranged in an n×m arrangement, n≥3, m≥3, when arranging, according to The actual monitoring area of the pipeline to be monitored can be installed with one array probe, or multiple array probes can be arranged. In this embodiment, there are 32 wafers in the selected array probe, and the wafers are arranged in a 4×8 manner on the surface of the pipeline to be monitored. Of course, when selecting the array probe, the array probe whose monitoring area is larger than the area to be monitored on the pipeline to be monitored can also be selected.

进一步地,在另一些实施例中,阵列探头可选用任意晶片数量大于等于9的其它阵列探头,且晶片以n×m的方式布置,其中,n≥3、m≥3。Further, in some other embodiments, the array probe can be any other array probe whose number of chips is greater than or equal to 9, and the chips are arranged in an n×m manner, where n≧3 and m≧3.

步骤S2,按第一设定规则确定待激发区域,每一待激发区域包括至少4个晶片。具体的,在布置完阵列探头以后,需要确定阵列探头的激发方式,在本实施例中,采用的激发方式为多晶片的激发方式,在开始激发前需按第一设定规则对阵列探头中的晶片进行待激发区域划分。其中,第一规则为从矩阵的第一阵元开始,以a×a的方式把所有晶片进行划分,从第一个阵元为起始位进行划分的第一个区域为一个待激发区域,并从矩阵中与第一个阵元相邻的行或列中的阵元为起始位进行下一个待激发区域的划分,直至将所有晶片划分完,其中,a≥2。Step S2, determining the region to be excited according to the first set rule, and each region to be excited includes at least 4 wafers. Specifically, after the array probe is arranged, it is necessary to determine the excitation mode of the array probe. In this embodiment, the excitation mode adopted is a multi-chip excitation mode. The wafer is divided into areas to be excited. Among them, the first rule is to start from the first array element of the matrix and divide all the wafers in the form of a×a, and the first area divided from the first array element as the starting bit is a to-be-excited area, And divide the next area to be excited from the array element in the row or column adjacent to the first array element in the matrix until all chips are divided, wherein a≥2.

进一步地,在另一实施例中,阵列探头中的待激发区域进行划分时可任意选择任一晶片为起始位按照划分方式进行划分。Further, in another embodiment, when the region to be excited in the array probe is divided, any wafer can be arbitrarily selected as the starting position and divided according to the division method.

进一步地,在另一实施例中,阵列探头在进行待激发区域划分时,可采用a×a和b×b两种或以上的不同的划分方式,其中,a≥2、b≥2。Further, in another embodiment, when the array probe divides the region to be excited, two or more different division methods of a×a and b×b can be used, where a≥2 and b≥2.

进一步地,在另一实施例中,同一阵列探头中的待激发区域可采用a×b的划分方式进行划分,其中,a≠b,且a≥2、b≥2。Further, in another embodiment, the region to be excited in the same array probe can be divided by a × b division method, where a≠b, and a≧2 and b≧2.

进一步地,在另一实施例中,同一阵列探头中的不同的待激发区域在进行阵元划分时,可采用a×a和a×b两种或以上的不同的划分方式,其中,至少有一种划分方式采用a×b的划分方式,其中,a≠b,且a≥2、b≥2。Further, in another embodiment, when the different areas to be excited in the same array probe are divided into array elements, two or more different division methods of a×a and a×b can be used, among which at least one The first division method adopts the division method of a×b, where a≠b, and a≥2 and b≥2.

步骤S3,按设定延时依次触发每一待激发区域按第二设定规则发射超声脉冲信号。具体的,在阵列探头开始激发晶片之前,还需要设定激发延时时间,按预设的激发延时时间,激发阵列探头中的待激发区域中的晶片,在激发一个区域之后,按设定的激发延时激发下一个待激发区域。被激发区域中的晶片按照第二设定规则发射超声脉冲信号,根据第二设定规则被激发区域中的晶片发射超声脉冲信号,被激发区域中的晶片发射完超声脉冲信号后,准备激发下一个待激发区域。Step S3, sequentially trigger each to-be-excited area to emit ultrasonic pulse signals according to the second set rule according to the set time delay. Specifically, before the array probe starts to excite the wafer, it is also necessary to set the excitation delay time. According to the preset excitation delay time, the wafer in the area to be excited in the array probe is excited. After exciting an area, press the set Excitation delay for the next region to be excited. The chip in the excited area emits an ultrasonic pulse signal according to the second setting rule, and the chip in the excited area emits an ultrasonic pulse signal according to the second setting rule. After the chip in the excited area emits the ultrasonic pulse signal, it is ready to be excited A region to be activated.

在本实施例中,第二设定规则为控制待激发区域中的每一晶片发射超声脉冲信号的延迟时间,使得两激发的晶片之间发射的超声脉冲信号产生相位差。具体的,待激发区域中的一个晶片发射超声脉冲信号后根据时间延迟激发下一个晶片,通过设置时间延迟,待激发区域中的所有晶片在发射超声脉冲信号的过程中,当超声脉冲信号在到达空间的某一个点的时候,超声脉冲信号之间产生为2π整数倍的相位差,此时,超声脉冲信号在待监测管道表面叠加增强,接收晶片接收到的回波信号也是叠加后的超声脉冲信号所产生的回波信号,对待监测管道上的待监测点实现了合成发射孔径监测。In this embodiment, the second setting rule is to control the delay time of the ultrasonic pulse signal emitted by each chip in the region to be excited, so that the ultrasonic pulse signal emitted between the two excited chips produces a phase difference. Specifically, after a wafer in the area to be excited emits an ultrasonic pulse signal, the next wafer is excited according to the time delay. By setting the time delay, all wafers in the area to be excited are in the process of emitting the ultrasonic pulse signal. When the ultrasonic pulse signal arrives At a certain point in the space, the phase difference between the ultrasonic pulse signals is an integer multiple of 2π. At this time, the ultrasonic pulse signals are superimposed and enhanced on the surface of the pipeline to be monitored, and the echo signal received by the receiving chip is also a superimposed ultrasonic pulse. The echo signal generated by the signal realizes the synthetic emission aperture monitoring of the point to be monitored on the pipeline to be monitored.

进一步地,在另一实施例中,可通过设定时间延时,使同一待激发区域中的晶片发射的超声脉冲信号在到达空间的某一个点的时候,超声脉冲信号之间产生4π整数倍或2nπ整数倍的相位差,此时,超声脉冲信号在这一点进行叠加,接收晶片接收到的回波信号也是叠加后的超声脉冲信号所产生的回波信号,其中,n为整数。Further, in another embodiment, the time delay can be set so that when the ultrasonic pulse signals emitted by the wafer in the same region to be excited reach a certain point in the space, 4π integer multiples are generated between the ultrasonic pulse signals Or a phase difference of 2nπ integer multiples. At this time, the ultrasonic pulse signal is superimposed at this point, and the echo signal received by the receiving chip is also the echo signal generated by the superimposed ultrasonic pulse signal, wherein n is an integer.

步骤S4,阵列探头的每一晶片接收超声脉冲信号的回波信号,对接收到的所有回波信号进行处理后得到待监测管道的成像图,并根据成像图判断待监测管道的腐蚀情况。具体的,超声脉冲信号在空间某一点叠加增强,阵列探头中的晶片接收叠加增强的超声脉冲信号所产生的回波信号,对获取到的回波信号进行处理后形成待监测管道的成像图。Step S4, each chip of the array probe receives the echo signal of the ultrasonic pulse signal, processes all the received echo signals to obtain an imaging image of the pipeline to be monitored, and judges the corrosion condition of the pipeline to be monitored according to the imaging image. Specifically, the ultrasonic pulse signal is superimposed and enhanced at a certain point in space, and the chip in the array probe receives the echo signal generated by the superimposed and enhanced ultrasonic pulse signal, and processes the acquired echo signal to form an imaging map of the pipeline to be monitored.

如图2所示,在本实施例中,步骤S4具体包括以下步骤:As shown in Figure 2, in this embodiment, step S4 specifically includes the following steps:

S41:根据回波信号,获取回波幅值。具体的,阵列探头中的晶片在超声脉冲信号接收的过程中,接收到的超声脉冲信号为连续的波形图,从波形图中获取接收到的回波幅值。S41: Obtain the echo amplitude according to the echo signal. Specifically, when the chip in the array probe receives the ultrasonic pulse signal, the received ultrasonic pulse signal is a continuous wave form, and the received echo amplitude is obtained from the wave form.

S42:处理回波幅值,获取到回波幅值实测值,回波幅值实测值组成回波幅值矩阵。具体的,获取到回波幅值以后需要对回波幅值按照回波剔除规则进行二次处理,剔除掉不具有表征意义的回波幅值,最后未被剔除掉的回波幅值称为回波幅值实测值,若干个回波幅值实测值组成回波矩阵,组成的回波矩阵为:S42: Process the echo amplitude, obtain the measured value of the echo amplitude, and the measured value of the echo amplitude forms an echo amplitude matrix. Specifically, after obtaining the echo amplitude, it is necessary to perform secondary processing on the echo amplitude according to the echo elimination rule, and eliminate the echo amplitude that does not have representative significance, and the final echo amplitude that is not eliminated is called The measured value of the echo amplitude, several measured values of the echo amplitude form an echo matrix, and the formed echo matrix is:

[r11(t),r12(t)………r1(m-a)(t)[r 11 (t),r 12 (t)……r 1 (ma)(t)

r21(t),r22(t)………r2(m-a)(t)r 21 (t),r 22 (t)……r 2 (ma)(t)

……………………………………………………………

r(n-a)1(t),r(n-a)2(t)………r(n-a) (m-a)(t)]r (na)1 (t),r (na)2 (t)……r (na)(ma) (t)]

其中,r11(t)为第一组晶片发射,第一个晶片在时间t时接收到的回波幅值;r21(t)为第二组晶片发射,第一个晶片在时间t时接收到的回波幅值;r(n-a) (m-a)(t)为第(n-a)组晶片发射,第(m-a)个晶片接收到的回波幅值。Among them, r 11 (t) is the emission of the first group of chips, and the echo amplitude received by the first chip at time t; r 21 (t) is the emission of the second group of chips, and the echo amplitude received by the first chip at time t Received echo amplitude; r (na) (ma) (t) is the echo amplitude received by the (na)th group of chips and received by the (ma)th chip.

在本实施例中,回波幅值剔除规则为回波幅值是否小于回波幅值的最大值的20%,若是,为满足回波幅值剔除规则,回波幅值赋0,若否,回波幅值为回波幅值的实测值。可以理解地,凡是用来对获取到的回波信号进行剔除处理的二次处理方式均可视为回波幅值剔除规则,本实施例以大于最大回波幅值的20%为例进行的说明,本领域技术人员将其他比例参数应用到本实施例的发明构思中,也属于本实施例的保护范围。In this embodiment, the echo amplitude elimination rule is whether the echo amplitude is less than 20% of the maximum value of the echo amplitude, if so, in order to satisfy the echo amplitude elimination rule, the echo amplitude is assigned 0, if not , and the echo amplitude is the measured value of the echo amplitude. It can be understood that any secondary processing method used to eliminate the acquired echo signal can be regarded as the echo amplitude elimination rule. In this embodiment, the maximum echo amplitude is greater than 20% as an example. It should be noted that those skilled in the art apply other proportional parameters to the inventive concept of this embodiment, which also belongs to the protection scope of this embodiment.

S43:根据回波幅值矩阵,获取合成回波幅值,根据合成回波幅值得到待监测管道的成像图。具体的,回波幅值实测值通过公式2的计算过程获取到合成回波幅值,在完成一次扫描后,获取到多个合成回波幅值,根据合成回波幅值,形成待监测管道成像图。其中,公式2为:S43: Obtain the synthetic echo amplitude according to the echo amplitude matrix, and obtain the imaging map of the pipeline to be monitored according to the synthetic echo amplitude. Specifically, the measured value of the echo amplitude is obtained through the calculation process of the formula 2 to obtain the synthetic echo amplitude. After a scan is completed, multiple synthetic echo amplitudes are obtained, and the pipeline to be monitored is formed according to the synthetic echo amplitude. Imaging diagram. Among them, formula 2 is:

公式2 Formula 2

rij(t)为回波幅值剔除规则处理后的回波幅值实测值,o(x,y,z)为待监测区域中坐标为(x, y, z)点的合成回波幅值。r ij (t) is the measured value of the echo amplitude after the echo amplitude elimination rule processing, o(x, y, z) is the synthesized echo amplitude of the point coordinates (x, y, z) in the area to be monitored value.

如图3所示,在本实施例中,步骤S41具体包括以下步骤:As shown in Figure 3, in this embodiment, step S41 specifically includes the following steps:

S411:获取晶片的坐标点;S411: Obtain the coordinate points of the wafer;

S412:根据晶片的坐标点,获取待激发区域的几何中心点;S412: Obtain the geometric center point of the region to be excited according to the coordinate point of the wafer;

S413:根据几何中心点,获取发射超声脉冲信号到晶片接收回波信号的时间t;S413: Obtain the time t from transmitting the ultrasonic pulse signal to receiving the echo signal by the chip according to the geometric center point;

S414:获取不同时间t对应的回波幅值函数r(t);S414: Obtain the echo amplitude function r(t) corresponding to different time t;

S415:根据回波幅值函数r(t),获取回波幅值。S415: Acquire the echo amplitude according to the echo amplitude function r(t).

具体的,超声脉冲信号传播时间与传播的距离有关系。可以理解地,先获取待激发区域的每一晶片的坐标点,通过获取到的坐标点获取到待激发区域所有晶片的几何中心点,几何中心点到待监测点的距离以及待监测点到接收晶片的距离是一定的,距离确定后,根据公式1的计算过程,计算出晶片接收到回波信号的时间t,根据不同时间t,获取不同时间t对应的回波幅值函数r(t),根据回波幅值函数r(t),得到回波幅值,Specifically, the propagation time of the ultrasonic pulse signal is related to the propagation distance. Understandably, the coordinate points of each wafer in the region to be excited are obtained first, and the geometric center points of all wafers in the region to be excited are obtained through the obtained coordinate points, the distance from the geometric center point to the point to be monitored, and the distance from the point to be monitored to the receiver The distance of the chip is fixed. After the distance is determined, the time t when the chip receives the echo signal is calculated according to the calculation process of formula 1. According to different time t, the echo amplitude function r(t) corresponding to different time t is obtained. , according to the echo amplitude function r(t), get the echo amplitude,

 公式1 Formula 1

其中,c为管道材料中的声速,x、y、z为待监测点的空间坐标点,xi、yi、zi,为待激发区域中晶片的几何中心点,xj、yj、zj为接收晶片的空间坐标点,此时zi、zj为0。Among them, c is the sound velocity in the pipe material, x, y, z are the spatial coordinates of the points to be monitored, xi, yi, zi are the geometric center points of the chip in the area to be excited, xj, yj, zj are the receiving chip Space coordinate point, at this time zi, zj are 0.

如图4所示,在本实施例中,步骤S42具体包括以下步骤:As shown in Figure 4, in this embodiment, step S42 specifically includes the following steps:

S421:获取回波幅值最大值;S421: Obtain the maximum value of the echo amplitude;

S422:判断回波幅值是否满足回波幅值剔除规则,若否,回波幅值为回波幅值的实测值,若是,回波幅值赋0;S422: Determine whether the echo amplitude meets the echo amplitude elimination rule, if not, the echo amplitude is the actual measured value of the echo amplitude, and if so, assign 0 to the echo amplitude;

S423:获取回波幅值实测值,根据回波幅值实测值,组成回波幅值矩阵。S423: Obtain the measured value of the echo amplitude, and form an echo amplitude matrix according to the measured value of the echo amplitude.

具体的,按照回波幅值剔除规则对获取到的回波幅值进行处理,不满足回波幅值剔除规则的回波幅值为回波幅值实测值,满足回波幅值剔除规则的回波幅值进行赋0处理,回波幅值实测值组成回波幅值矩阵。Specifically, the acquired echo amplitudes are processed according to the echo amplitude elimination rules, the echo amplitudes that do not meet the echo amplitude elimination rules are the actual echo amplitude values, and the The echo amplitude is assigned 0, and the measured values of the echo amplitude form the echo amplitude matrix.

在本实施例中,阵列探头接收到回波信号后,通过放大电路处理后将回波信号应用物联网技术传递到网络端,其中,网络端具有数据查看和缺陷预警功能。数据查看功能可将阵列探头实时测量到的合成回波矩阵,通过RGB色代表不同回波幅值实测值的方式,将待监测管道的监测区域的二维图谱直观显示,同时,可结合阵列探头的安装位置和管道规格等参数,将回波合成幅值通过RGB色标注在三维模型中,形成待监测管道的三维成像图,通过三维成像图直观的显示待监测管道的腐蚀情况。缺陷预警功能为阵列探头在安装前测量多组待监测管道各种状态下的回波幅值矩阵,通过神经网络机器学习模型,学习识别各种状态下的回波幅值矩阵,学习完成后对每次扫描获取到的回波幅值矩阵进行识别,实现对待监测管道状态的自动识别判断,在发现待监测管道上有疑似缺陷时,网络端自动发送报警邮件或短信提醒现场人员,以进一步确认待监测管道的状态。In this embodiment, after the array probe receives the echo signal, the echo signal is processed by the amplifying circuit and transmitted to the network terminal by applying the Internet of Things technology, wherein the network terminal has functions of data viewing and defect warning. The data viewing function can display the synthetic echo matrix measured by the array probe in real time, and display the two-dimensional map of the monitoring area of the pipeline to be monitored visually by means of RGB colors representing the measured values of different echo amplitudes. At the same time, it can be combined with the array probe The parameters such as the installation position and pipeline specifications, etc., the echo synthesis amplitude is marked in the 3D model by RGB color to form a 3D imaging map of the pipeline to be monitored, and the corrosion situation of the pipeline to be monitored can be intuitively displayed through the 3D imaging map. The defect early warning function is to measure the echo amplitude matrix of multiple groups of pipelines to be monitored in various states before the array probe is installed, and learn to identify the echo amplitude matrix in various states through the neural network machine learning model. The echo amplitude matrix obtained by each scan is identified to realize the automatic identification and judgment of the status of the pipeline to be monitored. When a suspected defect is found on the pipeline to be monitored, the network end will automatically send an alarm email or SMS to remind the on-site personnel for further confirmation. The status of the pipeline to be monitored.

可以理解的,以上实施例仅表达了本发明的优选实施方式,其描述较为具体和详细,但并不能因此而理解为对本发明专利范围的限制;对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,可以对上述特点进行自由组合,还可以做出若干变形和改进,这些都属于本发明的保护范围;因此,凡跟本发明权利要求范围所做的等同变换,均应属于本发明权利要求的涵盖范围。It can be understood that the above examples only express the preferred implementation of the present invention, and its description is more specific and detailed, but it should not be interpreted as limiting the patent scope of the present invention; Under the premise of departing from the concept of the present invention, the above-mentioned features can be freely combined, and some deformations and improvements can also be made, which all belong to the protection scope of the present invention; therefore, all equivalent transformations made with the scope of the claims of the present invention are Should belong to the scope covered by the claims of the present invention.

Claims (10)

1. The metal pipeline corrosion monitoring method based on synthetic emission aperture imaging is characterized by comprising the following steps of:
s1: an array probe containing a plurality of wafers is arranged on the surface of a pipeline to be monitored, the wafers are arrayed into a matrix in an n multiplied by m mode, and n is more than or equal to 3, and m is more than or equal to 3;
s2: determining areas to be excited according to a first set rule, wherein each area to be excited comprises at least 4 wafers;
s3: triggering each to-be-excited area to emit ultrasonic pulse signals according to a second set rule according to set delay;
s4: and each wafer of the array probe receives the echo signals of the ultrasonic pulse signals, an imaging diagram of the pipeline to be monitored is obtained after all the received echo signals are processed, and the corrosion condition of the pipeline to be monitored is judged according to the imaging diagram.
2. The method of claim 1, wherein the first set rule is to divide the wafer into a first of the regions to be excited in a x a form starting from a first element of the matrix; and selecting a second array element from the rows or columns of the matrix, and dividing the wafer into the next area to be excited in a form of a multiplied by a until all the array elements are divided, wherein a is more than or equal to 2.
3. The method according to claim 1, wherein the second rule is to control a time delay of the transmission of the ultrasonic pulse signal by each of the wafers in the region to be excited, the ultrasonic pulse signal is transmitted by exciting the wafers in the region to be excited at the time delay, and a phase difference of the ultrasonic pulse signal reaching the surface of the pipe to be monitored is an integer multiple of 2Ω, the ultrasonic pulse signal being superimposed and enhanced on the surface of the pipe to be monitored.
4. The method of claim 1, wherein the step S4 comprises the steps of:
s41: acquiring an echo amplitude value according to the echo signal;
s42: processing the echo amplitude value to obtain the echo amplitude value actual measurement value, wherein the echo amplitude value actual measurement value forms the echo amplitude matrix;
s43: and acquiring a composite echo amplitude according to the echo amplitude matrix, and acquiring an imaging diagram of the pipeline to be monitored according to the composite echo amplitude.
5. The method of monitoring corrosion of a metal pipe according to claim 4, wherein the step S41 includes the steps of:
s411: acquiring coordinate points of the wafer;
s412: acquiring a geometric center point of the region to be excited according to the coordinate point of the wafer;
s413: acquiring the time t from transmitting the ultrasonic pulse signal to receiving the echo signal by the wafer according to the geometric center point;
s414: acquiring a corresponding echo amplitude function r (t) according to different time t;
s415: and acquiring the echo amplitude according to the echo amplitude function r (t).
6. The method of monitoring corrosion of a metal pipe according to claim 4, wherein the step S42 comprises the steps of:
s421: acquiring the maximum value of the echo amplitude;
s422: judging whether the echo amplitude meets an echo amplitude rejection rule or not, if not, judging that the echo amplitude is an actual measurement value of the echo amplitude, and if so, giving 0 to the echo amplitude;
s423: and acquiring the echo amplitude actual measurement value, and forming the echo amplitude matrix according to the echo amplitude actual measurement value.
7. The method according to claim 6, wherein the echo amplitude rejection rule is whether the echo amplitude in the echo amplitude function r (t) is less than 20% of the maximum value of the echo amplitude, if yes, the echo amplitude is assigned 0, and if not, the echo amplitude is an actual measurement value of the echo amplitude.
8. The method of claim 4, wherein the time t is determined by a calculation process of equation 1:
Figure QLYQS_1
equation 1
Wherein c is the sound velocity in the pipeline material, x, y and z are the space coordinate points of the point to be monitored, and x i 、y i 、z i X is the geometric center point of the wafer in the excitation region j 、y j ,z j To receive the spatial coordinate point of the wafer, z i 、z j Is 0.
9. The method of claim 4, wherein the echo synthesis amplitude is determined by a calculation process of equation 2:
Figure QLYQS_2
equation 2
Wherein r is ij And (t) is the echo amplitude processed by the echo amplitude eliminating rule, and o (x, y, z) is the synthesized echo amplitude of the point with the coordinates of (x, y, z) in the region to be detected.
10. The method of claim 1, wherein n = 4 and m = 8.
CN202310059254.XA 2023-01-17 2023-01-17 Metal pipeline corrosion monitoring method based on synthetic emission aperture imaging Pending CN116124889A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310059254.XA CN116124889A (en) 2023-01-17 2023-01-17 Metal pipeline corrosion monitoring method based on synthetic emission aperture imaging

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310059254.XA CN116124889A (en) 2023-01-17 2023-01-17 Metal pipeline corrosion monitoring method based on synthetic emission aperture imaging

Publications (1)

Publication Number Publication Date
CN116124889A true CN116124889A (en) 2023-05-16

Family

ID=86304307

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310059254.XA Pending CN116124889A (en) 2023-01-17 2023-01-17 Metal pipeline corrosion monitoring method based on synthetic emission aperture imaging

Country Status (1)

Country Link
CN (1) CN116124889A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118501272A (en) * 2024-07-19 2024-08-16 国网山东省电力公司东营供电公司 Method, system, medium and equipment for identifying salt spray corrosion of insulating partition plate

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080110263A1 (en) * 2006-11-10 2008-05-15 Penrith Corporation Transducer array imaging system
JP2009281805A (en) * 2008-05-21 2009-12-03 Hitachi Engineering & Services Co Ltd Ultrasonic flaw detecting method and ultrasonic flaw detector
JP2010071983A (en) * 2008-08-19 2010-04-02 Jfe Steel Corp Ultrasonic imaging method and ultrasonic imaging apparatus
JP2010151490A (en) * 2008-12-24 2010-07-08 Hitachi-Ge Nuclear Energy Ltd Nondestructive inspection device and nondestructive inspection method
CN102967657A (en) * 2012-11-23 2013-03-13 河海大学常州校区 Nondestructive testing method based on synthetic aperture ultrasonic imaging technique
US20130083628A1 (en) * 2011-09-30 2013-04-04 Ge Inspection Technologies Ltd Imaging system and method
US20140144238A1 (en) * 2012-11-28 2014-05-29 General Electric Company Sensor array for pipeline corrosion monitoring
CN107219305A (en) * 2017-06-02 2017-09-29 北京航空航天大学 A kind of total focus imaging detection method based on annular array transducer
CN108680649A (en) * 2018-05-30 2018-10-19 广州特种承压设备检测研究院 A kind of defect imaging method of lining anti-corrosion pipeline
CN109281651A (en) * 2017-07-19 2019-01-29 中国科学院声学研究所 An ultrasonic borehole wall imaging method applied to a cylindrical ultrasonic array

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080110263A1 (en) * 2006-11-10 2008-05-15 Penrith Corporation Transducer array imaging system
JP2009281805A (en) * 2008-05-21 2009-12-03 Hitachi Engineering & Services Co Ltd Ultrasonic flaw detecting method and ultrasonic flaw detector
JP2010071983A (en) * 2008-08-19 2010-04-02 Jfe Steel Corp Ultrasonic imaging method and ultrasonic imaging apparatus
JP2010151490A (en) * 2008-12-24 2010-07-08 Hitachi-Ge Nuclear Energy Ltd Nondestructive inspection device and nondestructive inspection method
US20130083628A1 (en) * 2011-09-30 2013-04-04 Ge Inspection Technologies Ltd Imaging system and method
CN102967657A (en) * 2012-11-23 2013-03-13 河海大学常州校区 Nondestructive testing method based on synthetic aperture ultrasonic imaging technique
US20140144238A1 (en) * 2012-11-28 2014-05-29 General Electric Company Sensor array for pipeline corrosion monitoring
CN107219305A (en) * 2017-06-02 2017-09-29 北京航空航天大学 A kind of total focus imaging detection method based on annular array transducer
CN109281651A (en) * 2017-07-19 2019-01-29 中国科学院声学研究所 An ultrasonic borehole wall imaging method applied to a cylindrical ultrasonic array
CN108680649A (en) * 2018-05-30 2018-10-19 广州特种承压设备检测研究院 A kind of defect imaging method of lining anti-corrosion pipeline

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118501272A (en) * 2024-07-19 2024-08-16 国网山东省电力公司东营供电公司 Method, system, medium and equipment for identifying salt spray corrosion of insulating partition plate

Similar Documents

Publication Publication Date Title
CN106404903B (en) Ultrasound examination apparatus, ultrasound examination system and method of calibrating an ultrasound examination apparatus
US11170489B2 (en) System and method for inspecting the condition of structures using remotely controlled devices
EP2982972B1 (en) Three-dimensional ultrasonic imaging apparatus
US7380456B2 (en) 3-dimensional ultrasonographic device
CN112997075B (en) Method for ultrasonic detection and characterization of defects in heterogeneous materials
CN116124889A (en) Metal pipeline corrosion monitoring method based on synthetic emission aperture imaging
JP2019504311A (en) Crack measuring apparatus and method
JP2021032754A (en) Ultrasonic inspection equipment and ultrasonic inspection method
RU2346295C1 (en) Active sonar
JP5957425B2 (en) Apparatus and method for measuring the thickness of internal deposits
CN119915902B (en) Method for jointly detecting corrosion defect of pressure pipeline by utilizing multiple guided wave modes
CN116804654A (en) Aluminum alloy damage positioning imaging method and system based on distance damage factor
CN106018560A (en) Ultrasonic detector for crack propagation of USV (unmanned surface vehicle) body
CN110596246A (en) Inspection method for detecting corrosion defects on the floor of large storage tanks
JP2020030163A (en) Ultrasonic flaw detector and ultrasonic flaw detection method
EP3754371B1 (en) Underwater detection apparatus and underwater detection method
CN111047547B (en) A joint defect quantification method based on multi-view TFM
JP2021181919A (en) Internal damage portion detection method of concrete structure
CN120870331A (en) A wafer pattern processing method, apparatus and equipment
GB2104219A (en) Measuring sizes by means of ultrasonic waves
CN120891077A (en) Methods, devices, equipment, storage media and products for identifying joint anomalies
US20230059369A1 (en) Method for monitoring the change over time of a defect in a structure
JP2024091150A (en) Flaw Detection Testing System
JP2025070728A (en) Ultrasonic inspection device and ultrasonic inspection method
JP2025095192A (en) Inspection data processing device, inspection data processing method, and program

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination