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CN116111438A - Calibration method of ultraviolet laser and ultraviolet laser - Google Patents

Calibration method of ultraviolet laser and ultraviolet laser Download PDF

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Publication number
CN116111438A
CN116111438A CN202211664075.0A CN202211664075A CN116111438A CN 116111438 A CN116111438 A CN 116111438A CN 202211664075 A CN202211664075 A CN 202211664075A CN 116111438 A CN116111438 A CN 116111438A
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ultraviolet laser
power
real
laser
frequency doubling
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杨庆双
刘猛
余冠南
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Shenzhen JPT Optoelectronics Co Ltd
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Shenzhen JPT Optoelectronics Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H01S3/109Frequency multiplication, e.g. harmonic generation

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  • Nonlinear Science (AREA)
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  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
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Abstract

The embodiment of the application provides a calibration method of an ultraviolet laser and the ultraviolet laser, and relates to the technical field of lasers. According to the ultraviolet laser calibration method and the ultraviolet laser, the real-time power of the ultraviolet laser is obtained first, and then whether power calibration operation is needed to be executed on the ultraviolet laser is judged according to the real-time power. If the power calibration operation needs to be executed on the ultraviolet laser, determining a temperature adjustment scheme of a frequency multiplication component corresponding to the ultraviolet laser according to the real-time power and the factory power of the ultraviolet laser, and controlling the frequency multiplication component to execute the temperature adjustment scheme. Therefore, the real-time power of the ultraviolet laser can be automatically monitored to judge whether power attenuation occurs, and when the power attenuation occurs, the frequency doubling component is controlled to execute a temperature adjustment scheme to realize temperature compensation, so that the laser power is automatically recovered, and the laser power is automatically and accurately calibrated through simple operation.

Description

紫外激光器的校准方法及紫外激光器Calibration method of ultraviolet laser and ultraviolet laser

技术领域technical field

本申请涉及激光器技术领域,尤其涉及一种紫外激光器的校准方法及紫外激光器。The present application relates to the technical field of lasers, in particular to a method for calibrating an ultraviolet laser and the ultraviolet laser.

背景技术Background technique

在激光技术应用领域,紫外激光器被广泛应用在科研、工业加工、医疗等方面,紫外皮秒激光器输出的可靠性和稳定性要求较高。紫外激光器通常包括紫外皮秒激光器和紫外纳秒激光器,紫外激光器通常具有倍频组件和温度控制模组。紫外激光器在使用中经常会出现输出功率衰减即实际输出功率低于出厂标定功率的情况,从而影响激光器的加工使用。功率衰减的原因通常是因为倍频晶体的转换效率发生了改变,而倍频晶体的转换效率与其温度密切相关。In the application field of laser technology, ultraviolet lasers are widely used in scientific research, industrial processing, medical treatment, etc., and the reliability and stability of the output of ultraviolet picosecond lasers are required to be high. Ultraviolet lasers generally include ultraviolet picosecond lasers and ultraviolet nanosecond lasers, and ultraviolet lasers usually have frequency doubling components and temperature control modules. In the use of ultraviolet lasers, output power attenuation often occurs, that is, the actual output power is lower than the factory calibration power, which affects the processing and use of the laser. The reason for the power attenuation is usually because the conversion efficiency of the frequency doubling crystal has changed, and the conversion efficiency of the frequency doubling crystal is closely related to its temperature.

现有的校准方式是在激光器输出端放置功率计然后人为的通过激光器人机交互界面或上位机软件手动的修改倍频晶体温度同时观察功率计上显示功率是否达到出厂标定功率值来校准。此种操作方法过程相对繁琐,且人工校准的准确性较差。The existing calibration method is to place a power meter at the output end of the laser and manually modify the temperature of the frequency doubling crystal through the laser man-machine interface or the host computer software and observe whether the power displayed on the power meter reaches the factory calibration power value to calibrate. The process of this method of operation is relatively cumbersome, and the accuracy of manual calibration is poor.

发明内容Contents of the invention

为了解决上述技术问题,本申请实施例提供了一种紫外激光器的校准方法及紫外激光器。In order to solve the above technical problems, embodiments of the present application provide a method for calibrating an ultraviolet laser and an ultraviolet laser.

第一方面,本申请实施例提供了一种紫外激光器的校准方法,应用于紫外激光器,所述方法包括:In the first aspect, an embodiment of the present application provides a method for calibrating an ultraviolet laser, which is applied to an ultraviolet laser, and the method includes:

获取所述紫外激光器的实时功率;Obtain the real-time power of the ultraviolet laser;

根据所述实时功率判断是否需要对所述紫外激光器执行功率校准操作;judging whether a power calibration operation needs to be performed on the ultraviolet laser according to the real-time power;

若判定需要对所述紫外激光器执行功率校准操作,则根据所述实时功率和所述紫外激光器的出厂功率确定对应所述紫外激光器的倍频组件的温度调整方案;If it is determined that a power calibration operation needs to be performed on the ultraviolet laser, then determine a temperature adjustment scheme corresponding to the frequency doubling component of the ultraviolet laser according to the real-time power and the factory power of the ultraviolet laser;

控制所述倍频组件执行所述温度调整方案。The frequency doubling component is controlled to implement the temperature adjustment scheme.

根据本申请的一种具体实施方式,所述获取所述紫外激光器的实时功率的步骤,包括:According to a specific implementation manner of the present application, the step of obtaining the real-time power of the ultraviolet laser includes:

在所述紫外激光器的输出激光中分离出测试光束;separating a test beam in the output laser light of the ultraviolet laser;

通过光电探测器将所述测试光束转换为电脉冲信号,并通过模数转换器将所述电脉冲信号转换得到数字信号;converting the test light beam into an electrical pulse signal through a photodetector, and converting the electrical pulse signal into a digital signal through an analog-to-digital converter;

接收所述数字信号并计算对应的所述实时功率。The digital signal is received and the corresponding real-time power is calculated.

根据本申请的一种具体实施方式,所述通过模数转换器将所述电脉冲信号转换得到数字信号的步骤之前,所述方法还包括:According to a specific implementation manner of the present application, before the step of converting the electrical pulse signal to obtain a digital signal through an analog-to-digital converter, the method further includes:

对所述电脉冲信号进行滤波降噪处理。Filtering and noise reduction processing is performed on the electric pulse signal.

根据本申请的一种具体实施方式,所述根据所述实时功率和所述紫外激光器的出厂功率确定对应所述紫外激光器的倍频组件的温度调整方案,控制所述倍频组件执行所述温度调整方案的步骤,包括:According to a specific implementation of the present application, the temperature adjustment scheme of the frequency doubling component corresponding to the ultraviolet laser is determined according to the real-time power and the factory power of the ultraviolet laser, and the frequency doubling component is controlled to implement the temperature adjustment scheme. Steps to adjust the plan, including:

根据所述实时功率和所述出厂功率计算补偿温度;calculating the compensation temperature according to the real-time power and the factory power;

控制所述倍频组件根据所述补偿温度执行温度提升操作,直至达到预定条件时停止。Controlling the frequency doubling component to perform a temperature raising operation according to the compensation temperature, until a predetermined condition is reached and stop.

根据本申请的一种具体实施方式,所述预定条件包括以下任一种:According to a specific implementation manner of the present application, the predetermined conditions include any of the following:

执行温度提升操作的过程中所述紫外激光器的实时功率达到所述出厂功率;The real-time power of the ultraviolet laser reaches the factory power during the temperature raising operation;

所述倍频组件的实时温度达到所述补偿温度;The real-time temperature of the frequency doubling component reaches the compensation temperature;

执行温度提升操作的时长达到时长阈值。The time to perform the temperature boost operation reaches the time threshold.

根据本申请的一种具体实施方式,所述根据所述实时功率判断是否需要对所述紫外激光器执行功率校准操作的步骤,包括:According to a specific implementation manner of the present application, the step of judging whether a power calibration operation needs to be performed on the ultraviolet laser according to the real-time power includes:

在所述紫外激光器的外接显示器上显示所述实时功率;displaying the real-time power on an external display of the ultraviolet laser;

监测是否接收到作用于预设按钮上的点选操作;Monitor whether a click operation acting on a preset button is received;

若接收到作用于预设按钮上的点选操作,则判定需要对所述紫外激光器执行功率校准操作。If a click operation acting on the preset button is received, it is determined that a power calibration operation needs to be performed on the ultraviolet laser.

第二方面,本申请实施例提供了一种紫外激光器,包括激光发生器本体、倍频组件、存储器以及处理器,所述存储器存储有计算机程序,所述计算机程序在所述处理器运行时执行第一方面中任一项所述的紫外激光器的校准方法。In the second aspect, the embodiment of the present application provides an ultraviolet laser, including a laser generator body, a frequency doubling component, a memory, and a processor, the memory stores a computer program, and the computer program is executed when the processor runs The calibration method of the ultraviolet laser described in any one of the first aspect.

根据本申请的一种具体实施方式,所述倍频组件包括倍频晶体、热敏电阻、结构件和用于加热的半导体制冷片,所述结构件包围所述倍频晶体设置,所述半导体制冷片和所述热敏电阻安装在所述结构件上。According to a specific embodiment of the present application, the frequency doubling component includes a frequency doubling crystal, a thermistor, a structural member and a semiconductor cooling chip for heating, the structural member surrounds the frequency doubling crystal, and the semiconductor The refrigerating sheet and the thermistor are installed on the structural member.

根据本申请的一种具体实施方式,所述紫外激光器还包括光电探测器和模数转换器,所述光电探测器设置于所述激光发生器本体的输出端,且所述光电探测器的输出端与所述模数转换器连接,所述模数转换器与所述处理器连接。According to a specific embodiment of the present application, the ultraviolet laser further includes a photodetector and an analog-to-digital converter, the photodetector is arranged at the output end of the laser generator body, and the output of the photodetector The terminal is connected to the analog-to-digital converter, and the analog-to-digital converter is connected to the processor.

根据本申请的一种具体实施方式,所述紫外激光器还包括人机交互模组。According to a specific implementation manner of the present application, the ultraviolet laser further includes a human-computer interaction module.

上述本申请提供的紫外激光器的校准方法及紫外激光器,先获取所述紫外激光器的实时功率,再根据所述实时功率判断是否需要对所述紫外激光器执行功率校准操作。若判定需要对所述紫外激光器执行功率校准操作,则根据所述实时功率和所述紫外激光器的出厂功率确定对应所述紫外激光器的倍频组件的温度调整方案,并控制所述倍频组件执行所述温度调整方案。这样,可以自动监控紫外激光器的实时功率来判断是否出现功率衰减,并在出现功率衰减时控制倍频组件执行温度调整方案实现温度补偿进而使得激光功率自动恢复,通过简便的操作实现激光功率的自动、准确地校准。In the above-mentioned calibration method of the ultraviolet laser and the ultraviolet laser provided in the present application, the real-time power of the ultraviolet laser is obtained first, and then it is judged according to the real-time power whether it is necessary to perform a power calibration operation on the ultraviolet laser. If it is determined that the power calibration operation needs to be performed on the ultraviolet laser, then determine the temperature adjustment scheme corresponding to the frequency doubling component of the ultraviolet laser according to the real-time power and the factory power of the ultraviolet laser, and control the frequency doubling component to perform The temperature adjustment scheme. In this way, the real-time power of the ultraviolet laser can be automatically monitored to determine whether there is power attenuation, and when the power attenuation occurs, the frequency doubling component is controlled to implement a temperature adjustment scheme to achieve temperature compensation and then the laser power is automatically restored, and the automatic laser power is realized through simple operation. , Calibrated accurately.

附图说明Description of drawings

为了更清楚地说明本申请的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,应当理解,以下附图仅示出了本申请的某些实施例,因此不应被看作是对本申请保护范围的限定。在各个附图中,类似的构成部分采用类似的编号。In order to illustrate the technical solution of the present application more clearly, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the application, and therefore should not be regarded It is regarded as a limitation on the scope of protection of the present application. In the respective drawings, similar components are given similar reference numerals.

图1示出了本申请实施例提供的一种紫外激光器的校准方法的流程示意图;Fig. 1 shows a schematic flow chart of a method for calibrating an ultraviolet laser provided in an embodiment of the present application;

图2示出了本申请实施例提供的一种紫外激光器的结构示意图;Fig. 2 shows a schematic structural diagram of an ultraviolet laser provided by an embodiment of the present application;

图3示出了本申请实施例提供的紫外激光器的光电探测器的电路示意图;Fig. 3 shows the schematic circuit diagram of the photodetector of the ultraviolet laser that the embodiment of the present application provides;

图4示出了本申请实施例提供的紫外激光器的倍频组件的组成示意图;FIG. 4 shows a schematic diagram of the composition of the frequency doubling component of the ultraviolet laser provided by the embodiment of the present application;

图5示出了本申请实施例提供的紫外激光器的倍频组件的TEC制冷片的电路示意图。FIG. 5 shows a schematic circuit diagram of a TEC cooling chip of a frequency doubling component of an ultraviolet laser provided in an embodiment of the present application.

具体实施方式Detailed ways

下面将结合本申请实施例中附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all of them.

通常在此处附图中描述和示出的本申请实施例的组件可以以各种不同的配置来布置和设计。因此,以下对在附图中提供的本申请的实施例的详细描述并非旨在限制要求保护的本申请的范围,而是仅仅表示本申请的选定实施例。基于本申请的实施例,本领域技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本申请保护的范围。The components of the embodiments of the application generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations. Accordingly, the following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of the present application.

在下文中,可在本申请的各种实施例中使用的术语“包括”、“具有”及其同源词仅意在表示特定特征、数字、步骤、操作、元件、组件或前述项的组合,并且不应被理解为首先排除一个或更多个其它特征、数字、步骤、操作、元件、组件或前述项的组合的存在或增加一个或更多个特征、数字、步骤、操作、元件、组件或前述项的组合的可能性。Hereinafter, the terms "comprising", "having" and their cognates that may be used in various embodiments of the present application are only intended to represent specific features, numbers, steps, operations, elements, components or combinations of the foregoing, And it should not be understood as first excluding the existence of one or more other features, numbers, steps, operations, elements, components or combinations of the foregoing or adding one or more features, numbers, steps, operations, elements, components or a combination of the foregoing possibilities.

此外,术语“第一”、“第二”、“第三”等仅用于区分描述,而不能理解为指示或暗示相对重要性。In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions, and should not be construed as indicating or implying relative importance.

除非另有限定,否则在这里使用的所有术语(包括技术术语和科学术语)具有与本申请的各种实施例所属领域普通技术人员通常理解的含义相同的含义。所述术语(诸如在一般使用的词典中限定的术语)将被解释为具有与在相关技术领域中的语境含义相同的含义并且将不被解释为具有理想化的含义或过于正式的含义,除非在本申请的各种实施例中被清楚地限定。Unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which various embodiments of the application belong. The terms (such as those defined in commonly used dictionaries) will be interpreted as having the same meaning as the contextual meaning in the relevant technical field and will not be interpreted as having an idealized meaning or an overly formal meaning, Unless clearly defined in the various embodiments of the present application.

实施例1Example 1

本公开实施例提供了一种紫外激光器的校准方法,应用于如图2所示的紫外激光器200。如图1所示,所述紫外激光器的校准方法主要包括以下步骤:An embodiment of the present disclosure provides a method for calibrating an ultraviolet laser, which is applied to the ultraviolet laser 200 shown in FIG. 2 . As shown in Figure 1, the calibration method of described ultraviolet laser mainly comprises the following steps:

步骤S101,获取所述紫外激光器的实时功率;Step S101, obtaining the real-time power of the ultraviolet laser;

紫外激光器200可以包括紫外纳米激光器和紫外皮秒激光器,其功率衰减的原因通常是因为倍频晶体的转换效率发生改变,而倍频晶体的转换效率与其温度密切相关,本申请提供的校准方法,主要通过温度补偿方案进行功率校准。为实现紫外激光器200在出厂后用户使用过程中可以远距离地自动校准,本校准方案所依赖的校准器件为紫外激光器200本身包含的器件,即在紫外激光器200内设置校准器件实现校准。The ultraviolet laser 200 may include an ultraviolet nanolaser and an ultraviolet picosecond laser. The reason for its power attenuation is usually because the conversion efficiency of the frequency doubling crystal changes, and the conversion efficiency of the frequency doubling crystal is closely related to its temperature. The calibration method provided by this application, Power calibration is primarily performed through a temperature compensation scheme. In order to realize that the ultraviolet laser 200 can be automatically calibrated remotely during the user's use after leaving the factory, the calibration device relied on in this calibration scheme is the device contained in the ultraviolet laser 200 itself, that is, the calibration device is set in the ultraviolet laser 200 to achieve calibration.

具体的,如图2所示,紫外激光器200包括激光发生器201、作为控制单元的处理器202和倍频组件203、光电探测器204等执行单元,处理器202获取光电探测单元探测的紫外激光器200的实时功率,再控制相关执行单元来执行校准操作,这样就无需外置功率计来获取紫外激光器200的输出功率和执行校准操作。Specifically, as shown in Figure 2, the ultraviolet laser 200 includes a laser generator 201, a processor 202 as a control unit, a frequency doubling component 203, a photodetector 204 and other execution units, and the processor 202 obtains the ultraviolet laser detected by the photodetection unit 200 real-time power, and then control the relevant execution units to perform calibration operations, so that there is no need for an external power meter to obtain the output power of the ultraviolet laser 200 and perform calibration operations.

根据本申请的一种具体实施方式,所述获取所述紫外激光器200的实时功率的步骤,包括:According to a specific implementation manner of the present application, the step of obtaining the real-time power of the ultraviolet laser 200 includes:

在所述紫外激光器200的输出激光中分离出测试光束;separating a test beam from the output laser of the ultraviolet laser 200;

通过光电探测器204将所述测试光束转换为电脉冲信号,并通过模数转换器205将所述电脉冲信号转换得到数字信号;The test light beam is converted into an electrical pulse signal by a photodetector 204, and the electrical pulse signal is converted by an analog-to-digital converter 205 to obtain a digital signal;

接收所述数字信号并计算对应的所述实时功率。The digital signal is received and the corresponding real-time power is calculated.

如图2所示,紫外激光器200内设置有光电探测器204,将激光发生器201的输出激光中分离出一个光束,定义为测试光束,通过光电探测器204来探测该测试光束的实时功率,作为该紫外激光器200的实时功率。As shown in Figure 2, a photodetector 204 is arranged in the ultraviolet laser 200, and a beam is separated from the output laser of the laser generator 201, which is defined as a test beam, and the real-time power of the test beam is detected by the photodetector 204, as the real-time power of the ultraviolet laser 200 .

如图3所示,光电探测器204的内部电路的简化示意图,其为一种可以将光信号转换为电信号的光电传感器。在光电探测器204D1正极接入负电压使D1处于反向偏压状态,会加快光生载流子的产生和运动,响应度增大,适用于高速应用。由于光电探测器204转化的光电流较小,不便于后级处理,所以先对光电流进行前置放大,采用光电探测器204与跨阻式放大器电路的接法。D1在接收到激光脉冲射入时会产生同步的电流脉冲信号,经转换电路后输出为电压脉冲信号,转换电路的输出为:Vs=Id1*Rf;As shown in FIG. 3 , a simplified schematic diagram of the internal circuit of the photodetector 204 is a photosensor capable of converting optical signals into electrical signals. Connecting a negative voltage to the anode of the photodetector 204D1 makes D1 in a reverse bias state, which will accelerate the generation and movement of photogenerated carriers and increase the responsivity, which is suitable for high-speed applications. Since the photocurrent converted by the photodetector 204 is small, it is not convenient for post-stage processing, so the photocurrent is pre-amplified first, and the connection method between the photodetector 204 and the transimpedance amplifier circuit is adopted. When D1 receives the laser pulse injection, it will generate a synchronous current pulse signal, which will be output as a voltage pulse signal after the conversion circuit. The output of the conversion circuit is: Vs=Id1*Rf;

其中,Id1为光信号转化为电信号后流经光电探测器204的电流大小,Rf为反馈电阻,Vs为光电转换电路输出电压。Wherein, Id1 is the magnitude of the current flowing through the photodetector 204 after the optical signal is converted into an electrical signal, Rf is the feedback resistor, and Vs is the output voltage of the photoelectric conversion circuit.

采用这样一种放大电路,不仅可以将微弱的光电流信号进行第一级放大,也可以将电流信号转化成电压信号,便于后级电路对信号的进一步处理。在Rf两端并联电容C1可以限制信号的带宽,滤除高频信号的干扰,确保信号传输的稳定性。Using such an amplifying circuit can not only amplify the weak photocurrent signal in the first stage, but also convert the current signal into a voltage signal, which is convenient for the further processing of the signal by the subsequent stage circuit. Connecting capacitor C1 in parallel at both ends of Rf can limit the bandwidth of the signal, filter out the interference of high-frequency signals, and ensure the stability of signal transmission.

光电探测器204将测试光束转换为电脉冲信号,再通过紫外激光器200内的模数转换器205A/D转换器转换得到数字信号,即可计算得到该测试信号的实时功率。The photodetector 204 converts the test beam into an electrical pulse signal, and then converts the test beam into a digital signal through the analog-to-digital converter 205 in the ultraviolet laser 200 to obtain a digital signal, and then calculates the real-time power of the test signal.

在上述实施方式的基础上,根据本申请的一种具体实施方式,所述通过模数转换器205将所述电脉冲信号转换得到数字信号的步骤之前,所述方法还包括:On the basis of the above embodiments, according to a specific embodiment of the present application, before the step of converting the electrical pulse signal to a digital signal through the analog-to-digital converter 205, the method further includes:

对所述电脉冲信号进行滤波降噪处理。Filtering and noise reduction processing is performed on the electric pulse signal.

为了更准确地探测实时功率,紫外激光器200内还可以增设滤波器206,用于在进行模数转换之前对探测信号进行滤波降噪处理,把不规则的电脉冲信号转换为较规则的电脉冲信号,提高探测精度和校准灵敏度。In order to detect real-time power more accurately, a filter 206 can also be added in the ultraviolet laser 200, which is used to perform filtering and noise reduction processing on the detection signal before analog-to-digital conversion, and convert irregular electrical pulse signals into regular electrical pulses signal, improving detection accuracy and calibration sensitivity.

步骤S102,根据所述实时功率判断是否需要对所述紫外激光器200执行功率校准操作;Step S102, judging whether it is necessary to perform a power calibration operation on the ultraviolet laser 200 according to the real-time power;

依据上述步骤获取紫外激光器200的实时功率之后,即可根据实时功率判断相对出厂功率是否存在功率衰减,以判断是否需要执行功率校准操作。触发功率校准操作的方式可以全自动或者半自动方式。After obtaining the real-time power of the ultraviolet laser 200 according to the above steps, it can be judged according to the real-time power whether there is power attenuation relative to the factory power, so as to judge whether power calibration operation needs to be performed. The way to trigger the power calibration operation can be fully automatic or semi-automatic.

其中,全自动的触发方式可以为,紫外激光器200可以内设自动监控程序,周期性地或者在每次上电工作时监控紫外激光器200的实时功率,并根据自动监控到的实时功率与出厂功率做比较,若出现功率衰减则自动触发功率校准操作。Among them, the fully automatic triggering method can be that the ultraviolet laser 200 can be equipped with an automatic monitoring program to monitor the real-time power of the ultraviolet laser 200 periodically or every time it is powered on, and according to the automatically monitored real-time power and factory power For comparison, if there is power attenuation, the power calibration operation will be automatically triggered.

半自动的触发方式则可以为由用户手动触发校准操作。根据本申请的一种具体实施方式,所述根据所述实时功率判断是否需要对所述紫外激光器200执行功率校准操作的步骤,可以具体包括:The semi-automatic triggering method may be manually triggered by the user for the calibration operation. According to a specific implementation manner of the present application, the step of judging whether a power calibration operation needs to be performed on the ultraviolet laser 200 according to the real-time power may specifically include:

在所述紫外激光器200的外接显示器上显示所述实时功率;Display the real-time power on the external display of the ultraviolet laser 200;

监测是否接收到作用于预设按钮上的点选操作;Monitor whether a click operation acting on a preset button is received;

若接收到作用于预设按钮上的点选操作,则判定需要对所述紫外激光器200执行功率校准操作。If a click operation acting on the preset button is received, it is determined that a power calibration operation needs to be performed on the ultraviolet laser 200 .

紫外激光器200外接显示器和人机交互模组207,该外接显示器可以为用户持有的与紫外激光器200通信连接的终端设备的显示器,也可以为紫外激光器200外装配的显示器。紫外激光器200探测到实时功率后,将实时功率显示在显示器上供用户查看。用户通过比较实时功率和出厂功率来判断是否存在功率衰减,若存在功率衰减则在人机交互模组的预设按钮上施加点选操作,该点选操作即为紫外激光器200的一键校准操作。紫外激光器200若监测到作用于预设按钮上的点选操作,则触发功率校准操作。The ultraviolet laser 200 is connected with an external display and a human-computer interaction module 207. The external display may be a display of a terminal device held by the user and communicated with the ultraviolet laser 200, or may be a display equipped outside the ultraviolet laser 200. After the ultraviolet laser 200 detects the real-time power, the real-time power is displayed on the display for users to check. The user judges whether there is power attenuation by comparing the real-time power with the factory power. If there is power attenuation, the user performs a click operation on the preset button of the human-computer interaction module. The click operation is the one-key calibration operation of the ultraviolet laser 200 . If the ultraviolet laser 200 detects a click operation acting on the preset button, a power calibration operation is triggered.

需要说明的是,紫外激光器200自动比较实时功率和出厂功率,还是用户人工比较实时功率和出厂功率,可以不限定实时功率和出厂功率完全一致。即若实时功率和出厂功率的差值在一个较小的差值范围内可以不触发功率校准操作,可以设定在差值大于预设的差值范围时才触发功率校准操作,这样也可以避免频繁的功率校准导致的多余功耗。当然较高精度需求的场景也可以设置较小的差值范围或者限定实时功率和出厂功率完全一致。It should be noted that the ultraviolet laser 200 automatically compares the real-time power with the factory power, or the user manually compares the real-time power with the factory power, and it is not limited that the real-time power and the factory power are exactly the same. That is, if the difference between the real-time power and the factory power is within a small difference range, the power calibration operation may not be triggered. You can set the power calibration operation to be triggered only when the difference is greater than the preset difference range, which can also avoid Unnecessary power consumption due to frequent power calibration. Of course, scenes with higher precision requirements can also set a smaller difference range or limit the real-time power to be exactly the same as the factory power.

步骤S103,若判定需要对所述紫外激光器200执行功率校准操作,则根据所述实时功率和所述紫外激光器200的出厂功率确定对应所述紫外激光器200的倍频组件203的温度调整方案;Step S103, if it is determined that a power calibration operation needs to be performed on the ultraviolet laser 200, then determine a temperature adjustment scheme corresponding to the frequency doubling component 203 of the ultraviolet laser 200 according to the real-time power and the factory power of the ultraviolet laser 200;

功率衰减的原因是倍频晶体的温度降低导致转换效率变差,那么提高倍频组件203的温度可以进行功率提升,功率需要提升的程度和温度补偿的程度相关,需要根据实时功率和紫外激光器200的出厂功率的差值,来确定一个温度调整方案,由紫外激光器200的倍频组件203来执行。The reason for the power attenuation is that the temperature reduction of the frequency doubling crystal leads to the deterioration of the conversion efficiency. Then, increasing the temperature of the frequency doubling component 203 can increase the power. The degree of power increase is related to the degree of temperature compensation. The difference of the factory power to determine a temperature adjustment scheme, which is implemented by the frequency doubling component 203 of the ultraviolet laser 200 .

步骤S104,控制所述倍频组件203执行所述温度调整方案。Step S104, controlling the frequency doubling component 203 to execute the temperature adjustment scheme.

如图4所示,倍频组件203由倍频晶体、TEC制冷片、热敏电阻和结构件结构件构成。倍频晶体通常为长方体形状,结构件对倍频晶体进行包裹夹持,以固定倍频晶体同时吸收激光通过倍频晶体时产生的热量。TEC制冷片安装在结构件上,对其进行加热或者制冷使之维持在一个恒定的温度点。热敏电阻也是安装在结构件上,进行实时温度反馈,与TEC制冷片形成温度闭环控制。As shown in FIG. 4 , the frequency doubling component 203 is composed of a frequency doubling crystal, a TEC cooling chip, a thermistor and structural components. The frequency doubling crystal is usually in the shape of a cuboid, and the structural parts wrap and clamp the frequency doubling crystal to fix the frequency doubling crystal and absorb the heat generated when the laser passes through the frequency doubling crystal. TEC cooling chips are installed on the structure to heat or cool it to maintain it at a constant temperature point. The thermistor is also installed on the structural parts for real-time temperature feedback and forms a temperature closed-loop control with the TEC refrigeration sheet.

TEC是一种基于帕尔贴效应的器件,通过改变TEC工作电流的方向,可实现加热或制冷,改变电流大小可调节制冷功率的大小。电路通常使用H桥驱动电路如图5所示,当控制MOS管Q1和Q4的逻辑电平为1,MOS管Q2和Q3的逻辑电平为0,电路中将产生一个从VCC流向Q1到L1然后到TEC再到L2最后到Q4再到地的电流;反之,将电平逻辑互换后,将产生从VCC流向Q3到L2然后到TEC再到L1最后到Q2再到地的电流,这就实现了双向控制。电路中加入电感和电容器件,起到了滤波的作用,使的电路工作更加稳定。TEC is a device based on the Peltier effect. By changing the direction of the TEC working current, heating or cooling can be realized, and the cooling power can be adjusted by changing the current. The circuit usually uses an H-bridge drive circuit as shown in Figure 5. When the logic level of the control MOS transistors Q1 and Q4 is 1, and the logic level of the MOS transistors Q2 and Q3 is 0, a flow from VCC to Q1 to L1 will be generated in the circuit. Then to TEC, then to L2, finally to Q4, and then to ground; conversely, after the level logic is interchanged, a current will flow from VCC to Q3 to L2, then to TEC, then to L1, finally to Q2, and then to ground, which is Two-way control is realized. The inductance and capacitor are added to the circuit to play the role of filtering and make the circuit work more stable.

具体实施时,所述根据所述实时功率和所述紫外激光器200的出厂功率确定对应所述紫外激光器200的倍频组件203的温度调整方案,控制所述倍频组件203执行所述温度调整方案的步骤,包括:During specific implementation, the temperature adjustment scheme of the frequency doubling component 203 corresponding to the ultraviolet laser 200 is determined according to the real-time power and the factory power of the ultraviolet laser 200, and the frequency doubling component 203 is controlled to execute the temperature adjustment scheme steps, including:

根据所述实时功率和所述出厂功率计算补偿温度;calculating the compensation temperature according to the real-time power and the factory power;

控制所述倍频组件203根据所述补偿温度执行温度提升操作,直至达到预定条件时停止。The frequency multiplier component 203 is controlled to perform a temperature raising operation according to the compensation temperature until a predetermined condition is reached and then stops.

根据本申请的一种具体实施方式,所述预定条件包括以下任一种:According to a specific implementation manner of the present application, the predetermined conditions include any of the following:

执行温度提升操作的过程中所述紫外激光器200的实时功率达到所述出厂功率;The real-time power of the ultraviolet laser 200 reaches the factory power during the temperature raising operation;

所述倍频组件203的实时温度达到所述补偿温度;The real-time temperature of the frequency doubling component 203 reaches the compensation temperature;

执行温度提升操作的时长达到时长阈值。The time to perform the temperature boost operation reaches the time threshold.

倍频晶体有一个较佳的工作温度范围,在进行温度调整时再改较佳的工作温度范围内调整。根据当前功率与目标功率差值的大小去设定调节温度刻度的大小,可以从工作温度范围下限逐渐增加温度,同时接收激光器当前的实时功率反馈以确定合适的温度值点。考虑到倍频晶体的工作温度受限或者可能其他原因导致功率衰减的问题,在通过温度调整方案进行功率校准时可以设定三个停止的预定条件,具体如下:The frequency doubling crystal has a better working temperature range, and then adjust it within the better working temperature range when adjusting the temperature. According to the difference between the current power and the target power to set and adjust the size of the temperature scale, the temperature can be gradually increased from the lower limit of the working temperature range, and at the same time receive the current real-time power feedback of the laser to determine the appropriate temperature point. Considering that the operating temperature of the frequency doubling crystal is limited or the power attenuation may be caused by other reasons, three predetermined conditions for stopping can be set when performing power calibration through the temperature adjustment scheme, as follows:

第一方面,实时探测紫外激光器200当前的实时功率,在实时功率达到或者基本达到出厂功率时停止温度提升并保持在当前温度。In the first aspect, the current real-time power of the ultraviolet laser 200 is detected in real time, and when the real-time power reaches or basically reaches the factory power, the temperature increase is stopped and kept at the current temperature.

第二方面,在实时温度达到功率差值对应的补偿温度时停止。In the second aspect, stop when the real-time temperature reaches the compensation temperature corresponding to the power difference.

第三方面,在执行温度提升操作达到时长阈值时停止,时长阈值可以预设为3分钟-5分钟,当然也可以根据紫外激光器200的工作参数来自定义设置,不作限定。In the third aspect, stop when the temperature raising operation reaches the time threshold. The time threshold can be preset as 3 minutes to 5 minutes. Of course, it can also be customized according to the working parameters of the ultraviolet laser 200 , without limitation.

设置预定条件来控制温度提升操作的执行程度,避免温度提升程度过高反向影响紫外激光器200的输出功率。Predetermined conditions are set to control the execution degree of the temperature raising operation, so as to prevent the output power of the ultraviolet laser 200 from being adversely affected by the temperature raising degree being too high.

本实施例提供的紫外激光器的校准方法,在紫外激光器内置了光电探测器测功率无需外置功率计观测激光器输出功率。通过一键校准功率算法无需人为的反复调节倍频温度试验激光器输出功率。当紫外激光器在用户端出现功率衰减时,可让用户施加一键校准功率操作,使激光器输出功率达到出厂设定功率,快速解决故障,恢复应用。减少技术人员到用户端去维修激光器的频次。当然,本实施例所提供的紫外激光器的校准方案还可以适用于其他受温度影响导致功率衰减的激光器的校准,不作限定。In the calibration method of the ultraviolet laser provided in this embodiment, a built-in photodetector is used to measure the power of the ultraviolet laser, and no external power meter is required to observe the output power of the laser. Through the one-key calibration power algorithm, there is no need to manually adjust the output power of the frequency-doubling temperature test laser repeatedly. When the power of the UV laser attenuates at the user end, the user can apply a one-key calibration power operation to make the output power of the laser reach the factory-set power, quickly solve the fault, and restore the application. Reduce the frequency of technicians going to the user's end to repair the laser. Of course, the calibration scheme of the ultraviolet laser provided in this embodiment can also be applied to the calibration of other lasers whose power is attenuated due to the influence of temperature, without limitation.

实施例2Example 2

参见图2,为本申请实施例提供的一种紫外激光器,包括激光发生器本体201、倍频组件203、存储器(图中未示出)以及处理器202,所述存储器存储有计算机程序,所述计算机程序在所述处理器运行时执行第一方面中任一项所述的紫外激光器的校准方法。Referring to Fig. 2, a kind of ultraviolet laser provided for the embodiment of the present application includes a laser generator body 201, a frequency doubling assembly 203, a memory (not shown in the figure) and a processor 202, the memory stores a computer program, so The computer program executes the method for calibrating an ultraviolet laser according to any one of the first aspect when the processor is running.

根据本申请的一种具体实施方式,所述倍频组件203包括倍频晶体、热敏电阻、结构件和用于加热的半导体制冷片,所述结构件包围所述倍频晶体设置,所述半导体制冷片和所述热敏电阻安装在所述结构件上。According to a specific embodiment of the present application, the frequency doubling component 203 includes a frequency doubling crystal, a thermistor, a structural member and a semiconductor cooling chip for heating, the structural member surrounds the frequency doubling crystal, and the The semiconductor cooling chip and the thermistor are installed on the structural member.

根据本申请的一种具体实施方式,所述紫外激光器还包括光电探测器204和模数转换器205,所述光电探测器设置于所述激光发生器本体的输出端,且所述光电探测器的输出端与所述模数转换器连接,所述模数转换器与所述处理器连接。According to a specific embodiment of the present application, the ultraviolet laser further includes a photodetector 204 and an analog-to-digital converter 205, the photodetector is arranged at the output end of the laser generator body, and the photodetector The output terminal of is connected with the analog-to-digital converter, and the analog-to-digital converter is connected with the processor.

根据本申请的一种具体实施方式,所述紫外激光器还包括过滤器206,所述过滤器206设置于所述光电探测器204的输出端与模数转换器205之间。According to a specific implementation manner of the present application, the ultraviolet laser further includes a filter 206 disposed between the output end of the photodetector 204 and the analog-to-digital converter 205 .

根据本申请的一种具体实施方式,所述紫外激光器还包括人机交互模组207。According to a specific implementation manner of the present application, the ultraviolet laser further includes a human-computer interaction module 207 .

上述本申请提供的紫外激光器,先获取所述紫外激光器的实时功率,再根据所述实时功率判断是否需要对所述紫外激光器执行功率校准操作。若判定需要对所述紫外激光器执行功率校准操作,则根据所述实时功率和所述紫外激光器的出厂功率确定对应所述紫外激光器的倍频组件的温度调整方案,并控制所述倍频组件执行所述温度调整方案。这样,可以自动监控紫外激光器的实时功率来判断是否出现功率衰减,并在出现功率衰减时控制倍频组件执行温度调整方案实现温度补偿进而使得激光功率自动恢复,通过简便的操作实现激光功率的自动、准确地校准。当紫外激光器在用户端出现功率衰减时,可让用户施加一键校准功率操作,使激光器输出功率达到出厂设定功率,快速解决故障,恢复应用。减少技术人员到用户端去维修激光器的频次。当然,本实施例所提供的紫外激光器的校准方案还可以适用于其他受温度影响导致功率衰减的激光器的校准,不作限定。所提供的紫外激光器的具体实施过程可以参见上述实施例提供的紫外激光器的校准方法的具体实施过程,在此不再一一赘述。For the above-mentioned ultraviolet laser provided in the present application, the real-time power of the ultraviolet laser is obtained first, and then it is judged according to the real-time power whether to perform a power calibration operation on the ultraviolet laser. If it is determined that the power calibration operation needs to be performed on the ultraviolet laser, then determine the temperature adjustment scheme corresponding to the frequency doubling component of the ultraviolet laser according to the real-time power and the factory power of the ultraviolet laser, and control the frequency doubling component to perform The temperature adjustment scheme. In this way, the real-time power of the ultraviolet laser can be automatically monitored to determine whether there is power attenuation, and when the power attenuation occurs, the frequency doubling component is controlled to implement a temperature adjustment scheme to achieve temperature compensation and then the laser power is automatically restored, and the automatic laser power is realized through simple operation. , Calibrated accurately. When the power of the UV laser attenuates at the user end, the user can apply a one-key calibration power operation to make the output power of the laser reach the factory-set power, quickly solve the fault, and restore the application. Reduce the frequency of technicians going to the user's end to repair the laser. Certainly, the calibration scheme of the ultraviolet laser provided in this embodiment may also be applicable to the calibration of other lasers whose power is attenuated due to the influence of temperature, without limitation. For the specific implementation process of the provided ultraviolet laser, reference may be made to the specific implementation process of the calibration method for the ultraviolet laser provided in the above-mentioned embodiments, which will not be repeated here.

需要说明的是,在本文中,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者终端不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者终端所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括该要素的过程、方法、物品或者终端中还存在另外的相同要素。It should be noted that, in this document, the term "comprising", "comprising" or any other variation thereof is intended to cover a non-exclusive inclusion such that a process, method, article or terminal comprising a set of elements includes not only those elements, It also includes other elements not expressly listed, or elements inherent in the process, method, article, or terminal. Without further limitations, an element defined by the phrase "comprising a ..." does not preclude the presence of additional identical elements in the process, method, article or terminal comprising the element.

通过以上的实施方式的描述,本领域的技术人员可以清楚地了解到上述实施例方法可借助软件加必需的通用硬件平台的方式来实现,当然也可以通过硬件,但很多情况下前者是更佳的实施方式。基于这样的理解,本申请的技术方案本质上或者说对现有技术做出贡献的部分可以以软件产品的形式体现出来,该计算机软件产品存储在一个存储介质(如ROM/RAM、磁碟、光盘)中,包括若干指令用以使得一台终端(可以是手机,计算机,服务器,空调器,或者网络设备等)执行本申请各个实施例所述的方法。Through the description of the above embodiments, those skilled in the art can clearly understand that the methods of the above embodiments can be implemented by means of software plus a necessary general-purpose hardware platform, and of course also by hardware, but in many cases the former is better implementation. Based on such an understanding, the technical solution of the present application can be embodied in the form of a software product in essence or the part that contributes to the prior art, and the computer software product is stored in a storage medium (such as ROM/RAM, disk, CD) contains several instructions to enable a terminal (which may be a mobile phone, a computer, a server, an air conditioner, or a network device, etc.) to execute the methods described in various embodiments of the present application.

上面结合附图对本申请的实施例进行了描述,但是本申请并不局限于上述的具体实施方式,上述的具体实施方式仅仅是示意性的,而不是限制性的,本领域的普通技术人员在本申请的启示下,在不脱离本申请宗旨和权利要求所保护的范围情况下,还可做出很多形式,均属于本申请的保护之内。The embodiments of the present application have been described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementations. The above-mentioned specific implementations are only illustrative and not restrictive. Those of ordinary skill in the art will Under the inspiration of this application, without departing from the purpose of this application and the scope of protection of the claims, many forms can also be made, all of which belong to the protection of this application.

Claims (10)

1. A method of calibrating an ultraviolet laser, for application to an ultraviolet laser, the method comprising:
acquiring the real-time power of the ultraviolet laser;
judging whether power calibration operation is required to be executed on the ultraviolet laser according to the real-time power;
if the power calibration operation needs to be executed on the ultraviolet laser, determining a temperature adjustment scheme of a frequency multiplication component corresponding to the ultraviolet laser according to the real-time power and the factory power of the ultraviolet laser;
and controlling the frequency doubling component to execute the temperature adjustment scheme.
2. The method of claim 1, wherein the step of obtaining real-time power of the ultraviolet laser comprises:
separating a test beam from the output laser of the ultraviolet laser;
converting the test light beam into an electric pulse signal through a photoelectric detector, and converting the electric pulse signal into a digital signal through an analog-to-digital converter;
and receiving the digital signal and calculating the corresponding real-time power.
3. The method of claim 2, wherein prior to the step of converting the electrical pulse signal to a digital signal by an analog-to-digital converter, the method further comprises:
and filtering and denoising the electric pulse signal.
4. The method of claim 1, wherein the step of determining a temperature adjustment scheme for a frequency doubling component of the ultraviolet laser based on the real-time power and the factory power of the ultraviolet laser, and controlling the frequency doubling component to execute the temperature adjustment scheme comprises:
calculating a compensation temperature according to the real-time power and the factory power;
and controlling the frequency doubling component to execute temperature lifting operation according to the compensation temperature until a preset condition is reached.
5. The method of claim 4, wherein the predetermined condition comprises any one of:
the real-time power of the ultraviolet laser reaches the factory power in the process of executing the temperature raising operation;
the real-time temperature of the frequency doubling component reaches the compensation temperature;
the duration of performing the temperature ramp-up operation reaches a duration threshold.
6. The method according to any one of claims 1 to 5, wherein the step of determining whether power calibration operation of the ultraviolet laser is required based on the real-time power comprises:
displaying the real-time power on an external display of the ultraviolet laser;
monitoring whether a clicking operation acting on a preset button is received or not;
and if the clicking operation acted on the preset button is received, judging that the power calibration operation needs to be executed on the ultraviolet laser.
7. An ultraviolet laser comprising a laser generator body, a frequency doubling component, a memory and a processor, the memory storing a computer program which, when run by the processor, performs the method of calibrating an ultraviolet laser according to any of claims 1 to 6.
8. The ultraviolet laser of claim 7, wherein the frequency doubling assembly comprises a frequency doubling crystal, a thermistor, a structural member and a semiconductor cooling sheet for heating, the structural member being disposed around the frequency doubling crystal, the semiconductor cooling sheet and the thermistor being mounted on the structural member.
9. The ultraviolet laser of claim 7, further comprising a photodetector and an analog-to-digital converter, wherein the photodetector is disposed at the output of the laser generator body, and wherein the output of the photodetector is coupled to the analog-to-digital converter, and wherein the analog-to-digital converter is coupled to the processor.
10. The ultraviolet laser of claim 7, further comprising a man-machine interaction module.
CN202211664075.0A 2022-12-23 2022-12-23 Calibration method of ultraviolet laser and ultraviolet laser Pending CN116111438A (en)

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Publication number Priority date Publication date Assignee Title
CN116544769A (en) * 2023-05-15 2023-08-04 大族激光科技产业集团股份有限公司 Laser power automatic correction method of ultraviolet skin second laser and laser equipment
CN118137270A (en) * 2024-01-29 2024-06-04 武汉光至科技有限公司 A high-speed and high-precision solid-state ultraviolet laser temperature control system and method

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CN113984339A (en) * 2021-10-22 2022-01-28 北京卓镭激光技术有限公司 Laser power calibration method, device, equipment and computer readable storage medium

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CN101222105A (en) * 2006-12-14 2008-07-16 Jds尤尼弗思公司 Circuits and methods for reducing noise in laser systems with frequency conversion components
CN113984339A (en) * 2021-10-22 2022-01-28 北京卓镭激光技术有限公司 Laser power calibration method, device, equipment and computer readable storage medium

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CN116544769A (en) * 2023-05-15 2023-08-04 大族激光科技产业集团股份有限公司 Laser power automatic correction method of ultraviolet skin second laser and laser equipment
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