CN116009366A - Light irradiation device and photomask drawing device using the light irradiation device - Google Patents

Abstract

The invention provides a light irradiation device, which can realize high illuminance and uniformity on the irradiation surface without using an integrator lens. Using a plurality of LEDs (12), a plurality of collimating lenses (14) corresponding to each LED (12) and parallelizing the light (L) from each LED (12), the light from each collimating lens (14) A condenser lens (16) for converging light (L) toward the irradiation surface (A), and a position adjustment mechanism (18) for adjusting the position of the collimator lens (14) relative to the LED (12) constitute a light irradiation device (10) . Moreover, a light emitting part (22) having a geometrical outer shape is formed on each LED (12), and the arrangement angle of a part of the LEDs (12) is set to be compared with the arrangement angle of at least a part of the LEDs (12) in the remaining part. The state rotated by the angle corresponding to the geometry.

Description

Light irradiation device and photomask drawing device using the light irradiation device

technical field

The present invention relates to, for example, a photoirradiation device used for manufacturing (drawing) a photomask for exposing a semiconductor, and a photomask drawing device using the photoirradiation device.

Background technique

Conventionally, when manufacturing a semiconductor with a high integration density, a method of performing stepper exposure using a photomask as an original plate of a circuit pattern has been developed.

Electron beams and lasers have conventionally been used in manufacturing (drawing) such photomasks, but use of LEDs (Light Emitting Diodes) has been considered for cost reduction of light irradiation devices for photomask manufacturing (drawing).

For example, many light sources using LEDs have been developed as light sources for semiconductor exposure devices (Patent Document 1), but it is difficult to directly apply such light sources to photomask drawing devices.

prior art literature

patent documents

Patent Document 1: Japanese Patent Laid-Open No. 2020-86393

Contents of the invention

(The problem to be solved by the invention)

This is because a light irradiation device used in a photomask drawing device requires high illuminance and uniformity on the irradiation surface.

In general, as shown in FIG. 7, a light irradiation device 1 using LEDs has a plurality of LEDs 2, a collimator lens 3 that makes the light emitted from the LEDs 2 collimated, and directs the light from the collimator lens 3 toward a predetermined direction. Condenser lens 4 that converges on the irradiation surface, and integrator lens 5 that superimposes light from each LED 2 on the irradiation surface.

In order to increase the illuminance on the irradiated surface as much as possible, it is necessary to arrange the collimator lens 3 and the condensing lens 4 as close to the focus position as possible. In this way, the electrodes arranged in the light emitting part of the LED 2 and the foreign matter adhering to the LED 2 are projected onto the irradiation surface as they are, and a dark portion is formed on the irradiation surface, so there is a problem that unevenness of illuminance on the irradiation surface occurs. In order to eliminate such unevenness, an integrator lens 5 is used.

However, it can be understood that if an integrator lens 5 is used, another problem occurs. That is, if the integrator lens 5 is used, there will be a problem with the manufacturing accuracy of the lens, and light loss due to lens position deviation when two lenses are combined. In addition, light loss also occurs at joints between the respective lenses constituting the integrator lens 5 . Furthermore, the manufacture of the integrator lens 5 inherently requires advanced technology and is expensive.

The present invention was made in view of the above problems, and its object is to provide a light irradiation device and a photomask drawing device using the light irradiation device, which can achieve high illuminance and uniformity on the irradiation surface without using an integrator lens. .

(Technical solution to solve the problem)

According to an aspect of the present invention, there is provided a light irradiation device comprising:

Multiple LEDs;

a plurality of collimating lenses, corresponding to each of said LEDs, to parallelize light from each of said LEDs;

a condensing lens that condenses the light from each of the collimating lenses toward the irradiating surface; and

a position adjustment mechanism for adjusting the position of the collimator lens relative to the LED,

each of said LEDs includes a light emitting portion having a geometric shape,

The arrangement angle of some of the LEDs is rotated by an angle corresponding to the geometric shape compared to the arrangement angle of at least some of the LEDs in the remaining part.

Preferably,

Each of the LEDs is distributed in multiple modules for configuration,

all the LEDs arranged in one of the modules have the same arrangement angle,

In the LEDs arranged in different modules, the arrangement angle is in a rotated state.

Preferably,

Each of the LEDs is distributed in multiple modules for configuration,

In the LED arranged in one of the modules, the arrangement angle is in a rotated state.

Preferably,

The geometric shape is a rectangle,

The configuration angle is 90°.

Preferably,

The position adjusting mechanism adjusts the distance between the LED and the collimating lens.

Preferably,

The position adjustment mechanism adjusts the position of the collimator lens on a plane perpendicular to the optical axis of the LED.

According to another aspect of the present invention, there is provided a photomask drawing device including the above-mentioned light irradiation device.

(invention effect)

According to the light irradiation device according to the present invention, each LED includes a light emitting part having a geometric shape, and the arrangement angle of some of the LEDs is rotated by an angle corresponding to the geometric shape compared with the arrangement angle of the rest of the LEDs. status. As a result, even if the collimator lens and the condenser lens are arranged as close as possible to the focus position, the electrodes arranged in the light emitting part of one LED, foreign objects attached to the LED, etc. are projected onto the irradiation surface as they are. , a dark portion is formed on the irradiated surface, but the light-emitting portion including the dark portion of another LED arranged at a different arrangement angle from that of one LED is projected onto the irradiated surface at a slightly shifted position. As a result, in The unevenness of illuminance on the irradiation surface can be reduced without using an integrator lens.

In addition, the light irradiation device according to the present invention has a position adjustment mechanism for adjusting the position of the collimator lens relative to the LED, so by adjusting the position of the collimator lens relative to the LED according to the relationship between the illuminance and uniformity required by the light irradiation device Therefore, a little sacrifice of illuminance can increase the uniformity by a corresponding amount; on the contrary, a slight sacrifice of some uniformity can increase the illuminance by a corresponding amount.

Description of drawings

FIG. 1 is a diagram showing a light irradiation device 10 according to an embodiment to which the present invention is applied.

FIG. 2 : is a figure which shows LED12 and the module 20 which concern on embodiment to which this invention is applied.

FIG. 3 is a diagram showing a light emitting unit 22 in the LED 12 .

FIG. 4 is an enlarged view of the center portion (Z portion) of FIG. 2 .

FIG. 5 is a diagram showing the light emitting portion 22 and the dark portion X projected onto the irradiation surface A from one LED 12 .

FIG. 6 is a diagram showing the light emitting part 22 and the dark part X projected onto the irradiation surface A from one LED12 and another LED12 arranged at a different arrangement angle from the LED12.

FIG. 7 is a diagram showing a conventional light irradiation device 1 .

Detailed ways

(Configuration of Light Irradiation Device 10 )

Hereinafter, the light irradiation device 10 according to the embodiment to which the present invention is applied will be described. As an example, as shown in FIG. 1 , a light irradiation device 10 used in a photomask drawing device roughly includes an LED 12 , a collimator lens 14 , a condenser lens 16 , and a position adjustment mechanism 18 .

The LED 12 is a member that emits light (in this embodiment, light for drawing a photomask) L of predetermined illuminance and wavelength. As shown in FIG. 2 , in this embodiment, 22 LEDs 12 are arranged in one module 20 . In addition, four modules 20 are used in this embodiment. The number of LED12 arrange|positioned in one module 20, and the number of modules 20 used for the light irradiation apparatus 10 are not specifically limited.

Moreover, in this Embodiment, it is preferable to make the dominant wavelength of the light L radiated from LED12 into 365 nm or less. This is because, for light having a wavelength longer than 365 nm, lenses can be formed of inexpensive materials other than quartz, and an integrator lens is easy to manufacture, so it is preferable to use an integrator lens.

Moreover, on the surface of each module 20, not only the some LED12 is arrange|positioned as mentioned above, but also the circuit etc. (not shown) for supplying power to these LED12 are formed.

Furthermore, two positioning pin insertion holes 26 through which the positioning pins 24 protruding from the collimator lens substrate 15 on which the plurality of collimator lenses 14 are arranged are inserted are formed in each module 20 . This positioning pin 24 extends parallel to the optical axis of each LED12, so when the distance between the LED12 and the collimator lens 14 is adjusted by the position adjustment mechanism 18, the collimator lens 14 can be prevented from being on a plane perpendicular to the optical axis of the LED12. position deviates.

Each LED12 includes the light emitting part 22 which has the outer shape of a geometric shape, as shown in FIG. This light emitting part 22 is a part which receives the supply of electric power, and emits light L, and in LED12 which concerns on this embodiment, an outer shape is formed in rectangular shape (geometric shape).

Moreover, each LED12 is arrange|positioned at the each module 20 by predetermined arrangement|positioning angle. For example, if we focus on the central part (Z part) of FIG. 2 where four modules 20 are assembled, as shown in FIG. The rectangular arrangement shape extends in the left-right direction in the figure. Next, LED12 of the module 20b at the bottom right in a figure is arrange|positioned by the arrangement angle rotated 90 degrees compared with LED12 arrange|positioned at the module 20a at the upper right in a figure. In addition, LED12 of the module 20c in the lower left part of a figure is arrange|positioned by the arrangement angle rotated by 90 degrees compared with LED12 arrange|positioned in the module 20b in the lower right part of a figure. That is, it is arranged at an arrangement angle rotated by 180° compared with the LED 12 arranged in the upper right module 20a in the figure. Furthermore, LED12 of the upper left module 20d in a figure is arrange|positioned at the arrangement angle rotated 90 degrees compared with LED12 arrange|positioned in the module 20c of the lower left in a figure. That is, compared with the LED 12 arranged in the module 20a at the upper right in the figure, it is arranged at an arrangement angle of 270°, and compared with the LED 12 arranged in the module 20b at the lower right in the figure, it is arranged at an angle of 180°. Configure the configuration angle.

Returning to FIG. 1 , the collimator lens 14 is a lens having a function of collimating the light L radiated from the LED 12 , and a plurality of collimator lenses 14 are arranged in a one-to-one correspondence with each LED 12 . Moreover, each collimator lens 14 is arrange|positioned so that the focal point of each collimator lens 14 may approach the irradiation surface A as much as possible.

The condensing lens 16 is a lens that condenses the light L from each collimator lens 14 toward the irradiation surface A, and in the present embodiment, one condensing lens 16 is used for one light irradiation device 10 . In addition, instead of this configuration, a plurality of condenser lenses 16 may be arranged in one-to-one correspondence with each LED 12 and collimator lens 14 . In addition, the condensing lens 16 is arranged so that the focal point of the condensing lens 16 is as close to the irradiation surface A as possible.

In addition, in this embodiment, it is preferable that the shape of each light-emitting part 22 in LED12 is projected on the irradiation surface A with the magnification of 5 times - 100 times by the collimator lens 14 and the condensing lens 16 . This is because it is technically difficult to achieve a projection ratio of less than 5 times. Conversely, if the magnification is greater than 100 times, the number of units of the integrator lens is only small, so it is better to use an integrator lens.

The position adjustment mechanism 18 is a mechanism which has the function of adjusting the position of the collimator lens 14 with respect to LED12. The position adjustment mechanism 18 according to this embodiment can move each collimator lens 14 in parallel with respect to the optical axis of each LED 12 , that is, can adjust the distance between each LED 12 and each collimator lens 14 .

(Features of Light Irradiation Device 10)

According to the light irradiation device 10 according to the present embodiment, each LED 12 includes a light emitting unit 22 having a geometric shape, and the arrangement angle of some of the LEDs 12 is an angle corresponding to the geometric shape compared with the arrangement angle of the remaining LEDs 12 . The angle is the state after the unit of 90° is rotated. Thus, although the collimator lens 14 and the condensing lens 16 are respectively arranged as close as possible to the focus position, as shown in FIG. Foreign matter or the like is projected onto the irradiation surface A as it is, and a dark part X is formed on the irradiation surface A, but the light emitting part 22 including the above-mentioned dark part X in another LED 12 arranged at a different arrangement angle from that of one LED 12 is displayed as Since slightly shifted positions are projected onto the irradiated surface, as a result, as shown in FIG. 6 , unevenness in illuminance on the irradiated surface can be reduced without using an integrator lens.

In addition, since the light irradiation device 10 according to the present embodiment includes the position adjustment mechanism 18 for adjusting the distance between the LED 12 and the collimator lens 14, the distance between the LED 12 and the collimator lens 14 is adjusted according to the relationship between the illuminance and the uniformity required by the light irradiation device 10. The distance between the LED 12 and the collimating lens 14 can slightly sacrifice some illuminance, and the uniformity can be improved by a corresponding amount; on the contrary, the illuminance can be increased by a corresponding amount by slightly sacrificing some uniformity.

Moreover, each LED12 is distributed and arrange|positioned in the some module 20, LED12 arrange|positioned in one module 20 all has the same arrange|position angle, and the arrange|position angle is the state rotated among the LED12 arrange|positioned in the different module 20. Thereby, since LED12 can be exchanged by module 20 as a unit, the exchange work of LED12 becomes easy.

(Modification 1)

In the light irradiation device 10 according to the above-mentioned embodiment, the position adjustment mechanism 18 adjusts the distance between the LED 12 and the collimator lens 14, but instead of this structure, the position adjustment mechanism 18 may align the collimator lens 14 with the The position on the plane perpendicular to the optical axis of LED12 is adjusted. In this way, in the case where the position of the collimating lens 14 on the plane perpendicular to the optical axis of the LED 12 has been moved and adjusted, a little sacrifice of illuminance can improve the uniformity by a corresponding amount; on the contrary, a little sacrifice Uniformity can increase the illuminance by a corresponding amount.

Of course, the distance between the LED 12 and the collimator lens 14 and the position of the collimator lens 14 on a plane perpendicular to the optical axis of the LED 12 can also be adjusted by the position adjustment mechanism 18 .

(Modification 2)

In the light irradiation apparatus 10 which concerns on the said embodiment, LED12 was distributed and arrange|positioned in several modules 20, but instead of this structure, only one module 20 may be prepared, and all LED12 may be arrange|positioned in this module 20. In this case as well, the arrangement angle of some LEDs 12 is in a state rotated by an angle corresponding to the geometric shape compared with the arrangement angle of the remaining LEDs 12 .

(Modification 3)

The geometric shape related to the arrangement of the light emitting unit 22 is not limited to the above-mentioned "rectangular", and may be, for example, "square". In the case of "square", if the arrangement angle is set to 90°, the light-emitting part 22 in one LED12 and the light-emitting part in another LED12 arranged at an arrangement angle different from that of one LED12 by 90° 22 overlap each other at the same position on the irradiation surface A, but as long as the dark part X included in the light emitting part 22 of each LED12 does not overlap each other at the same position, there is no problem if the arrangement angle is 90°.

When the dark part X contained in the light emitting part 22 of each LED12 overlaps in the mutually same position, it is preferable to set the arrangement angle other than the multiple of 90 degrees.

In addition, when the geometric shape is "regular hexagon", there may be no problem even if it is a multiple of 60° for the same reason, but it is preferable to set an arrangement angle other than a multiple of 60°. Furthermore, when the geometric shape is "regular octagon", for the same reason, there may be no problem even if it is a multiple of 45°, but it is preferable to set an arrangement angle other than a multiple of 45°.

That is, as long as it is possible to avoid the light emitting part 22 in one LED 12 and the dark part X included in it, and the light emitting part 22 in another LED 12 arranged at a different arrangement angle from that of one LED 12 and the dark part X included in it, The arrangement angle in which the Xs overlap each other at the same position on the irradiation surface A is referred to as "the angle corresponding to the geometric shape".

The arrangement angles of the LEDs 12 involved in this embodiment are as described above, but are not limited thereto, as long as the arrangement angles of a part of the LEDs 12 are rotated relative to the arrangement angles of at least a part of the LEDs 12 in the remaining parts The state after the angle corresponding to the geometric shape involved in the configuration shape can be.

(Modification 4)

Furthermore, as a method of improving the uniformity of the illuminance on the irradiation surface A, the electric current value supplied to each LED12 can be adjusted.

Specifically, the electric current adjustment means (not shown) which can adjust the electric current value supplied to each LED12 individually is provided. And, for example, when a foreign matter is mixed into one LED 12, and the foreign matter is projected onto the irradiation surface A to impair the uniformity of illuminance, the value of the current to the LED 12 is lowered by using the current adjustment means (or becomes zero), the uniformity of illuminance can be maintained.

The adjustment of the current value may be performed in units of individual LEDs 12 or in units of all LEDs 12 arranged in one module 20, and further, may be performed for each of the LEDs 12 arranged in a module 20 and electrically connected in series. Group LED12 to make adjustments.

(Modification 5)

As an example, the light irradiation device 10 according to the above-mentioned embodiment is used in a photomask drawing device, but it may be used in applications other than a photomask drawing device as long as high illuminance and uniformity on the irradiated surface are pursued. This light irradiation device 10 is used.

It should be considered that the embodiment disclosed this time is an illustration in all points and is not restrictive at all. The scope of the present invention is shown not by the above-described description but by the scope of claims, and it is intended that all changes within the meaning and range equivalent to the scope of claims are included.

(Explanation of labels)

10 light irradiation device, 12 LED, 14 collimator lens, 15 collimator lens substrate, 16 condenser lens, 18 position adjustment mechanism

20 module, 22 light-emitting part, 24 positioning pin, 26 positioning pin insertion hole

L light, A illuminated surface, X dark part.

Claims (7)

1. A light irradiation device, comprising: Multiple LEDs; a plurality of collimating lenses, corresponding to each of said LEDs, to parallelize light from each of said LEDs; a condensing lens that condenses the light from each of the collimating lenses toward the irradiating surface; and a position adjustment mechanism for adjusting the position of the collimator lens relative to the LED, each of said LEDs includes a light emitting portion having a geometric shape, The arrangement angle of some of the LEDs is rotated by an angle corresponding to the geometric shape compared to the arrangement angle of at least some of the LEDs in the remaining part. 2. The light irradiation device according to claim 1, wherein, Each of the LEDs is distributed in multiple modules for configuration, all the LEDs arranged in one of the modules have the same arrangement angle, In the LEDs arranged in different modules, the arrangement angle is in a rotated state. 3. The light irradiation device according to claim 1, wherein, Each of the LEDs is distributed in multiple modules for configuration, In the LED arranged in one of the modules, the arrangement angle is in a rotated state. 4. The light irradiation device according to any one of claims 1 to 3, wherein, The geometric shape is a rectangle, The configuration angle is 90°. 5. The light irradiation device according to any one of claims 1 to 3, wherein, The position adjusting mechanism adjusts the distance between the LED and the collimating lens. 6. The light irradiation device according to any one of claims 1 to 3, wherein, The position adjustment mechanism adjusts the position of the collimator lens on a plane perpendicular to the optical axis of the LED. 7. A photomask drawing device comprising the light irradiation device according to any one of claims 1 to 3.

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