CN116008398A - An ultrasonic scanning microscopic imaging device and method - Google Patents
An ultrasonic scanning microscopic imaging device and method Download PDFInfo
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- CN116008398A CN116008398A CN202211602957.4A CN202211602957A CN116008398A CN 116008398 A CN116008398 A CN 116008398A CN 202211602957 A CN202211602957 A CN 202211602957A CN 116008398 A CN116008398 A CN 116008398A
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Abstract
The invention discloses an ultrasonic scanning microscopic imaging device, which comprises a water tank, an objective table, an imaging mechanism and a storage box, wherein the objective table spans over the water tank, the imaging mechanism is positioned between the objective table and the water tank, the storage box is used for storing ultrasonic media, the objective table is provided with an imaging hole which is penetrated up and down, the imaging mechanism comprises an ultrasonic probe which extends into the imaging hole from the lower part of the objective table, a water spraying unit for providing ultrasonic media into the imaging hole, and a displacement unit for adjusting the relative position of the ultrasonic probe and the imaging hole, and the water spraying unit comprises a nozzle which is positioned below the objective table and is communicated with the storage box, and a water pump for providing driving force for the nozzle to spray the ultrasonic media. The invention also provides an ultrasonic scanning microscopic imaging method. The device and the method provided by the invention can solve the problem that the sample is invalid due to the fact that the sample is soaked in the medium for a long time, and can simplify the horizontal adjustment work between the ultrasonic probe and the sample.
Description
Technical Field
The invention relates to the technical field of component detection imaging equipment, in particular to an ultrasonic scanning microscopic imaging device and method.
Background
In the existing ultrasonic scanning microscopic imaging device and equipment, a sample to be detected is soaked in a medium, and the relative positions of a probe and a clamp are repeatedly adjusted to ensure the horizontal state between the probe and the sample to be detected.
In addition, the traditional ultrasonic probe and the clamp are fixed through bolts, the bolts are required to be repeatedly disassembled and assembled when the probe is adjusted each time, the operation is complicated, and the adjustment difficulty is very high due to the fact that the volume of the probe is small and the hand is not good for controlling the adjustment angle; when the sample to be tested is an electronic capacitor device, the problems of sample corrosion and device failure exist if the sample is soaked for a long time.
Patent document CN112166320a discloses an ultrasound microscope for inspecting an object, the microscope comprising: an object holder configured to hold the object in an object region; a scanning head movable relative to the object region; a first transducer supported by the scanning head, wherein the first transducer is configured to emit a first acoustic pulse along a direction of emission and focus the first acoustic pulse in a focus, and wherein the first transducer is further configured to detect a second acoustic pulse emitted from the subject and output a first detection signal representative of the second acoustic pulse detected by the first transducer; a first actuator configured to move the first transducer relative to the scan head along a vertical direction substantially parallel to the emission direction; and a controller configured to control vertical movement of the first transducer relative to the scan head provided by the first actuator based on the first detection signal. The device comprises a pair of probes arranged above each other, and a sample is soaked in a medium for detection. However, the device is complicated in early debugging, two probes are required to be focused, the two probes are ensured to be symmetrical, and meanwhile, a sample is required to be soaked in a medium for a long time in the detection process, so that the sample is corroded.
Patent document CN216669845U discloses an ultrasonic microscope water tank multi-probe scanning machine, which comprises a frame, a water tank, a lifting workbench, a two-dimensional numerical control commutator and a multi-probe bracket; two lifting tables for installing the scanned workpiece are positioned in the water tank; the two-dimensional numerical control commutator mainly comprises an advanced X-axis module, a Y-axis module support, a reversing Y-axis module and a two-dimensional numerical control commutator slide seat, wherein the multi-probe support is an automatic focusing device of an ultrasonic microscope provided with a plurality of high-frequency probes and is connected with the two-dimensional numerical control commutator slide seat through a connecting plate; the adjusting mechanism of the automatic focusing device is an adjusting mechanism of a ball screw and a ball nut driven by a servo motor, and is provided with a guide device consisting of a square slide rail and a guide rail slide block. The device increases the number of the samples which can be detected at the same time through a plurality of groups of probes, and simultaneously realizes that a plurality of samples are soaked in a medium through a lifting workbench. However, the device does not consider that the horizontal relationship between the probe and the sample can cause the problem of distortion of a final image, the workload of adjusting the horizontal relationship between the probe and the corresponding sample one by one can be very great, and meanwhile, the problem that the sample is corroded or a device fails can exist when the sample is completely immersed in a medium.
Disclosure of Invention
In order to solve the problems, the invention provides an ultrasonic scanning microscopic imaging device which can avoid the problem that a sample is invalid due to long-time soaking of the sample in a medium.
The utility model provides an ultrasonic scanning microscopic imaging device, includes the basin, spanes the objective table in the basin top, is located the imaging mechanism and the storage box that have ultrasonic medium before objective table and the basin, the object carrying surface of objective table is equipped with the imaging hole that link up from top to bottom, imaging mechanism includes the ultrasonic probe who stretches into in the imaging hole from the objective table below, provides ultrasonic medium's water spray unit to imaging hole to and be used for adjusting ultrasonic probe and imaging hole relative position's displacement unit, water spray unit including being located the objective table below, with the nozzle of storage box intercommunication, and for the water pump of nozzle blowout ultrasonic medium provides driving force.
The device only needs the part of the sample at the imaging hole to be in contact with the ultrasonic medium and flow, so that the problem that the sample is immersed in the ultrasonic medium for a long time to cause corrosion failure is avoided.
Preferably, the objective table further comprises a first fixing support and a second fixing support, wherein the first fixing support and the second fixing support are used for adjusting the horizontal position of the objective table, a first adjusting bolt is arranged at the center position of the first fixing support, a second adjusting bolt and a third adjusting bolt are respectively arranged at the two sides of the center of the second fixing support, the detection surface of the ultrasonic probe is used as a horizontal reference, the horizontal position of the objective table is adjusted, so that the horizontal adjustment process is simplified, and meanwhile, the adjustment accuracy is improved.
Preferably, the plane distribution connection diagram of the first adjusting bolt, the second adjusting bolt and the third adjusting bolt is isosceles triangle, so that the horizontal angle change of two sides in the adjusting process is consistent.
Preferably, the stage is further provided with a rotary motor for adjusting the first, second and third adjusting bolts, so that the adjusting process is quantified, thereby improving accuracy and efficiency of the horizontal calibration.
Specifically, the imaging hole is a step through hole from top to bottom, and the step through hole is provided with a compression cover matched with the upper port to fix a sample and a sealing ring matched with the lower port to prevent a medium from flowing into the step to corrode the sample.
Preferably, the bottom of the water tank is also provided with a water outlet with a filter screen, and the water outlet is communicated with the storage box, so that the medium can be recycled, and the cost is saved.
Specifically, the displacement unit comprises a linear sliding group in the X-axis direction, the Y-axis direction and the Z-axis direction, and a clamp arm matched with the linear sliding group for use, wherein the clamp arm is used for clamping and fixing the ultrasonic probe and the nozzle.
The invention also provides an ultrasonic scanning microscopic imaging method, which can effectively simplify the horizontal adjustment work between the ultrasonic probe and the sample by the ultrasonic scanning microscopic imaging device, and comprises the following steps:
step 1, placing a sample at a step type through hole of an objective table, fixing the sample through a compression cover, and finishing fixing work after the pressure fed back by a pressure sensor reaches a threshold value;
step 2, fixing the ultrasonic probe and the nozzle on the clamp arm, and completing focusing between the ultrasonic probe and the sample by controlling the linear sliding group;
setting the position of the focused ultrasonic probe as a scanning origin, respectively acquiring corresponding signals along the X, Y axis horizontal direction and the Z axis vertical direction by controlling the linear sliding group, and adjusting the heights of the adjusting bolts at three positions of the object stage one by utilizing a rotating motor according to the acquired signals to finish the horizontal calibration work of the sample and the ultrasonic probe;
step 4, locking parameters of a rotating motor, and adjusting a linear sliding group in the Z-axis direction to enable the ultrasonic coverage range of the ultrasonic probe to cover the whole step-type through hole;
step 5, starting formal scanning: placing a sample to be tested, fixing the sample by a compression cover, activating a nozzle to provide a medium for transmitting ultrasonic waves into the stepped through hole, starting an ultrasonic probe to acquire signals, closing the nozzle after scanning, loosening the compression cover, and replacing the sample to be tested;
and 6, collecting the acquired signals, and generating a visual image output through an external computer.
Preferably, the level correction works specifically as follows:
setting the initial scanning position as O, the end point position in the horizontal direction as H, the end point in the vertical direction as G, and the horizontal included angle between the straight line OH and the horizontal line as theta 1 The vertical included angle between the straight line OH and the vertical line is theta 2 ；
Step 3-1, according to the first adjusting bolt, the second adjusting bolt and the third adjusting boltVertical distance of joint bolt connecting line and horizontal included angle theta 1 Calculating to obtain a first rotating pitch of the rotating motor by adopting an arctangent function;
step 3-2, forming an included angle theta with the vertical direction according to the length of the connecting line of the second adjusting bolt and the third adjusting bolt 2 Calculating to obtain a second rotation pitch of the rotating motor by adopting an arctangent function;
step 3-3, controlling the rotary motor corresponding to the first adjusting bolt to work according to the first rotating screw pitch obtained in the step 3-1;
and (3) respectively controlling the rotary motors corresponding to the second adjusting bolt and the third adjusting bolt to work according to the second rotating pitch obtained in the step (3-2), wherein the adjusting direction of the second adjusting bolt is opposite to that of the third adjusting bolt.
Specifically, the first arctangent function expression in the step 3-1 is as follows:
wherein p is 1 The first rotation pitch of the rotating motor is represented, and m represents the vertical distance between the first adjusting bolt and the connecting lines of the second adjusting bolt and the third adjusting bolt.
Specifically, the second arctangent function expression in the step 3-2 is as follows:
wherein p is 2 The second rotational pitch of the rotary electric machine is represented, and n represents the length of the connecting line between the second adjusting bolt and the third adjusting bolt.
Compared with the prior art, the invention has the beneficial effects that:
(1) According to the device provided by the invention, the ultrasonic probe is arranged below the sample to be detected, and the ultrasonic medium is sprayed into the imaging hole in a matching way, so that the sample only needs to be in partial contact with the ultrasonic medium in the ultrasonic microscopic imaging scanning process, and the problem that the sample is corroded and failed due to long-time soaking of electronic components of IGBT (insulated gate bipolar transistor) and capacitor energy band pins in the medium is solved, and a certain benefit value is generated for sample protection.
(2) According to the method provided by the invention, the stage level adjustment work taking the ultrasonic probe as a reference is completed by adjusting the adjusting bolts at three positions of the stage, and the ultrasonic probe does not need to be repeatedly scanned, disassembled and installed, so that the level adjustment work between the ultrasonic probe and a sample is simplified, and the problem of image distortion caused by non-parallelism between the ultrasonic probe and the sample is avoided.
Drawings
FIG. 1 is a schematic diagram of the overall structure of an ultrasonic scanning microscopic imaging device provided by the invention;
FIG. 2 is a schematic horizontal cross-sectional view of a stage provided by the present invention;
FIG. 3 is a schematic top view of a stage according to the present invention
Fig. 4 is a schematic flow chart of an ultrasonic scanning microscopic imaging method provided by the invention.
Detailed Description
Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numbers in different drawings refer to the same or similar elements, unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with the invention. Rather, they are merely examples of apparatus and methods consistent with aspects of the invention as detailed in the accompanying claims.
As shown in fig. 1, the invention provides an ultrasonic scanning imaging device, which comprises a water tank 1, an objective table 5 spanned above the water tank 1, an imaging mechanism positioned between the objective table 5 and the water tank, and a storage box 8 for storing ultrasonic media, wherein a stepped through hole 4 penetrating up and down is arranged on the object carrying surface of the objective table 5, the stepped through hole 4 is provided with a compression cover 3 matched with an upper port to fix a sample and a sealing ring matched with a lower port, the sealing ring is used for preventing the ultrasonic media from flowing into the stepped through hole to corrode the sample, the compression cover 3 is also provided with a pressure sensor, and the opening and closing actions are controlled by a lifting motor 2;
the imaging mechanism comprises an ultrasonic probe 12 extending into the stepped through hole 4 from the lower part of the objective table 5, a water spraying unit for providing ultrasonic medium for the stepped through hole 4, and a displacement unit for adjusting the relative position of the ultrasonic probe 12 and the stepped through hole 4, wherein the water spraying unit comprises a nozzle 11 positioned below the objective table 5 and communicated with the storage box 8, and a water pump 9 for providing driving force for the nozzle 11 to spray the ultrasonic medium;
the displacement unit comprises a linear sliding group 7 in the X-axis direction, the Y-axis direction and the Z-axis direction, and a clamp arm 6 matched with the linear sliding group, wherein the clamp arm 6 is used for clamping and fixing an ultrasonic probe 12 and a nozzle 11 of a water spraying unit, the parallel part of the clamp arm 6 and the bottom of the water tank 1 is larger than the width of the objective table 5 so as to ensure that the movement range of the ultrasonic probe 12 can cover the plane size of the objective table 5, and the relative distance between the ultrasonic probe 12 and the bottom of the water tank 1 is smaller than the relative distance between the lower end surface of the objective table 5 and the bottom of the water tank 1 so as to ensure that the range of the ultrasonic probe 12 can cover the whole sample to be tested during scanning, and meanwhile, the ultrasonic probe cannot interfere with the objective table 5 or the water tank 1 during clamp replacement and debugging;
in addition, the bottom of the water tank 1 is also provided with a water outlet 9 which is provided with a filter screen and is used for filtering impurities in the ultrasonic medium, and discharging the filtered ultrasonic medium back to the storage box 8 for continuous use, and the water outlet, the water spraying unit and the storage box 8 form an ultrasonic medium recycling system.
As shown in fig. 2, the objective table 5 further includes a first fixing bracket 17 and a second fixing bracket 16 at two sides, the first fixing bracket 17 is connected with the objective table 5 through a first adjusting bolt 13, and the second fixing bracket 16 is connected with the objective table 5 through a second adjusting bolt 14 and a third adjusting bolt 15;
as shown in fig. 3, the first adjusting bolt 13 is located at the center of the first fixing bracket 17, the second adjusting bolt 14 and the third adjusting bolt 15 are located at two sides of the center of the second fixing bracket 16, and meanwhile, the plane distribution connection diagram of the first adjusting bolt 13 and the second adjusting bolt 14, and the third adjusting bolt 15 is isosceles triangle.
As shown in fig. 4, the present embodiment provides an ultrasonic scanning microscopic imaging method, which is performed by the ultrasonic scanning microscopic imaging device in the above embodiment, including:
step 1, placing a sample at a step type through hole of an objective table, fixing the sample through a compression cover, and finishing fixing work after the pressure fed back by a pressure sensor reaches a threshold value;
step 2, fixing the ultrasonic probe and the nozzle on the clamp arm, and completing focusing between the ultrasonic probe and the sample by controlling the linear sliding group;
step 3, acquiring the horizontal state between the current ultrasonic probe and the sample: setting the initial scanning position as O, the end position of the X, Y axis horizontal movement as H, and the end point of the Z axis vertical movement as G, scanning the sample from O to H to obtain a corresponding plane signal in the test process, simultaneously scanning the sample from O to G to obtain a corresponding vertical signal, fitting the plane signal and the vertical signal to obtain an OH line and an OG line, and if no included angle exists between the OH line and the horizontal plane where the ultrasonic probe is located and no included angle exists between the OG line and the vertical plane where the ultrasonic probe is located, no leveling is needed, otherwise, an adjustment step is needed;
step 3-1, according to the vertical distance between the first adjusting bolt and the connecting line of the second adjusting bolt and the connecting line of the third adjusting bolt, forming a horizontal included angle theta with the connecting line of the second adjusting bolt and the connecting line of the third adjusting bolt 1 Calculating a first rotation pitch of the rotating electric machine by using a first arctangent function:
wherein p is 1 A first rotating pitch of the rotating motor is represented, and m represents a vertical distance between the first adjusting bolt and connecting lines of the second adjusting bolt and the third adjusting bolt;
step 3-2, forming an included angle theta with the vertical direction according to the length of the connecting line of the second adjusting bolt and the third adjusting bolt 2 And calculating to obtain a second rotation pitch of the rotating motor by adopting an arctangent function:
wherein p is 2 A second rotation pitch of the rotary motor is represented, and n represents the length of a connecting line of the second adjusting bolt and the third adjusting bolt;
step 3-3, controlling the rotary motor corresponding to the first adjusting bolt to work according to the first rotating screw pitch obtained in the step 3-1;
and (3) respectively controlling the rotary motors corresponding to the second adjusting bolt and the third adjusting bolt to work according to the second rotating pitch obtained in the step (3-2), wherein the adjusting direction of the second adjusting bolt is opposite to that of the third adjusting bolt.
Step 4, locking parameters of a rotating motor, and adjusting a linear sliding group in the Z-axis direction to enable the ultrasonic coverage range of the ultrasonic probe to cover the whole step-type through hole;
step 5, starting formal scanning: placing a sample to be tested, fixing the sample by a compression cover, activating a nozzle to provide a medium for transmitting ultrasonic waves into the stepped through hole, starting an ultrasonic probe to acquire signals, closing the nozzle after scanning, loosening the compression cover, and replacing the sample to be tested;
and 6, collecting the acquired signals, and generating a visual image output through an external computer.
In summary, the device provided in this embodiment is arranged under the sample to be tested, and simultaneously, the ultrasonic probe is matched with the water spraying unit to spray the ultrasonic medium into the imaging hole, so that the sample is only contacted with the flowing ultrasonic medium at the local position exposed at the imaging hole in the whole scanning process, and the problem that the electronic device is corroded and failed due to long-time soaking in the ultrasonic medium is avoided; meanwhile, the adjusting bolts at three parts of the objective table are adjusted to finish the objective table horizontal adjustment work taking ultrasonic head lifting as a reference, so that repeated scanning and disassembly of the ultrasonic probe are not needed, the horizontal adjustment work between the ultrasonic probe and a sample is simplified, and the problem of image distortion caused by non-parallelism between the ultrasonic probe and the sample is avoided.
Claims (10)
1. The utility model provides an ultrasonic scanning microscopic imaging device, its characterized in that includes the basin, spanes the objective table in the basin top, is located the imaging mechanism and the storage box that have ultrasonic medium between objective table and the basin, the objective table carries the object plane and is equipped with the imaging hole that link up from top to bottom, imaging mechanism includes the ultrasonic probe who stretches into in the imaging hole from objective table below, provides ultrasonic medium's water spray unit to imaging hole to and be used for adjusting ultrasonic probe and imaging hole relative position's displacement unit, water spray unit including be located objective table below, with the nozzle of storage box intercommunication, and for the nozzle blowout ultrasonic medium provides the water pump of drive power.
2. The ultrasonic scanning microscopic imaging device according to claim 1, wherein the objective table further comprises a first fixing support and a second fixing support for adjusting the horizontal position of the objective table, a first adjusting bolt is arranged at the center position of the first fixing support, and a second adjusting bolt and a third adjusting bolt are respectively arranged at two sides of the center of the second fixing support.
3. The ultrasonic scanning microscopic imaging device according to claim 2, wherein the plane distribution connection diagram of the first adjusting bolt and the second and third adjusting bolts is isosceles triangle.
4. The ultrasonic scanning microscopic imaging device according to claim 2, wherein the stage is further provided with a rotary motor for adjusting the first adjusting bolt, the second adjusting bolt, and the third adjusting bolt.
5. The ultrasonic scanning microscopic imaging device according to claim 1, wherein the imaging hole is a stepped through hole from top to bottom, and the stepped through hole is provided with a pressing cover matched with the upper port to fix a sample and a sealing ring matched with the lower port.
6. The ultrasonic scanning microscopy imaging device of claim 5, wherein the compression cap is provided with a pressure sensor.
7. The ultrasonic scanning microscopic imaging device according to claim 1, wherein a drain port with a filter screen is further provided at the bottom of the water tank, and the drain port is communicated with the storage tank.
8. The ultrasonic scanning microscopic imaging device according to claim 1, wherein the displacement unit comprises a linear sliding group in an X-axis direction, a Y-axis direction and a Z-axis direction, and a clamp arm used in cooperation with the linear sliding group is used for clamping and fixing the ultrasonic probe and the nozzle.
9. An ultrasonic scanning microscopic imaging method realized by the ultrasonic scanning microscopic imaging device according to any one of claims 1 to 8, comprising:
step 1, placing a sample at a step type through hole of an objective table, fixing the sample through a compression cover, and finishing fixing work after the pressure fed back by a pressure sensor reaches a threshold value;
step 2, fixing the ultrasonic probe and the nozzle on the clamp arm, and completing focusing between the ultrasonic probe and the sample by controlling the linear sliding group;
setting the position of the focused ultrasonic probe as a scanning origin, respectively acquiring corresponding signals along the X, Y axis horizontal direction and the Z axis vertical direction by controlling the linear sliding group, and adjusting the heights of the adjusting bolts at three positions of the object stage one by utilizing a rotating motor according to the acquired signals to finish the horizontal calibration work of the sample and the ultrasonic probe;
step 4, locking parameters of a rotating motor, and adjusting a linear sliding group in the Z-axis direction to enable the ultrasonic coverage range of the ultrasonic probe to cover the whole step-type through hole;
step 5, starting formal scanning: placing a sample to be tested, fixing the sample by a compression cover, activating a nozzle to provide a medium for transmitting ultrasonic waves into the stepped through hole, starting an ultrasonic probe to acquire signals, closing the nozzle after scanning, loosening the compression cover, and replacing the sample to be tested;
and 6, collecting the acquired signals, and generating a visual image output through an external computer.
10. The ultrasound scanning microscopy imaging method of claim 9, wherein in step 3, the level correction works are specifically as follows:
setting the initial scanning position as O, the end point position in the horizontal direction as H, the end point in the vertical direction as G, and the horizontal included angle between the straight line OH and the horizontal line as theta 1 The vertical included angle between the straight line OH and the vertical line is theta 2 ；
Step 3-1, according to the vertical distance between the first adjusting bolt and the connecting line of the second adjusting bolt and the connecting line of the third adjusting bolt, forming a horizontal included angle theta with the connecting line of the second adjusting bolt and the connecting line of the third adjusting bolt 1 Calculating to obtain a first rotating pitch of the rotating motor by adopting a first arctangent function;
step 3-2, forming an included angle theta with the vertical direction according to the length of the connecting line of the second adjusting bolt and the third adjusting bolt 2 Calculating a second rotation pitch of the rotating motor by adopting a second arctangent function;
step 3-3, controlling the rotary motor corresponding to the first adjusting bolt to work according to the first rotating screw pitch obtained in the step 3-1;
and (3) respectively controlling the rotary motors corresponding to the second adjusting bolt and the third adjusting bolt to work according to the second rotating pitch obtained in the step (3-2), wherein the adjusting direction of the second adjusting bolt is opposite to that of the third adjusting bolt.
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